WO2021117307A1 - Élément d'imagerie à semi-conducteurs, dispositif d'imagerie et procédé de commande d'élément d'imagerie à semi-conducteurs - Google Patents

Élément d'imagerie à semi-conducteurs, dispositif d'imagerie et procédé de commande d'élément d'imagerie à semi-conducteurs Download PDF

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Publication number
WO2021117307A1
WO2021117307A1 PCT/JP2020/034222 JP2020034222W WO2021117307A1 WO 2021117307 A1 WO2021117307 A1 WO 2021117307A1 JP 2020034222 W JP2020034222 W JP 2020034222W WO 2021117307 A1 WO2021117307 A1 WO 2021117307A1
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Prior art keywords
illuminance
signal
solid
value
unit
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PCT/JP2020/034222
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English (en)
Japanese (ja)
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和樹 比津
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ソニーセミコンダクタソリューションズ株式会社
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Publication of WO2021117307A1 publication Critical patent/WO2021117307A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components

Definitions

  • the image pickup control unit 130 controls the solid-state image sensor 200 to capture image data.
  • the image pickup control unit 130 supplies a synchronization signal such as a vertical synchronization signal to the solid-state image pickup device 200 via a signal line 139.
  • the optical axis of the incident light will be the Z axis
  • the predetermined axis perpendicular to the Z axis will be the X axis
  • the axis perpendicular to the Z-axis and the X-axis is defined as the Y-axis.
  • the detection circuits 212 are arranged along the X-axis direction and the Y-axis direction.
  • a low-sensitivity photon detector 220 and a high-sensitivity photon detector 230 are arranged in each of the detection circuits 212. These low-sensitivity photon detector 220 and high-sensitivity photon detector 230 generate a pulse signal in response to the incident of photons.
  • the sensitivity of the high-sensitivity photon detector 230 is higher than that of the low-sensitivity photon detector 220.
  • a method of giving a difference in sensitivity there are a method of physically reducing the amount of light taken in by one of the two photon detectors and a method of reducing the sensitivity of one of the two photon detectors in a switchable manner during operation.
  • the former method there are a method of shading the low-sensitivity photon detector 220 with metal, and a method of providing a lens for each photon detector and reducing the lens of the low-sensitivity photon detector 220.
  • the shapes of the low-sensitivity photon detector 220 and the high-sensitivity photon detector 230 are square when viewed from the Z-axis direction.
  • the four low-sensitivity photon detectors 220 in the detection block 211 are arranged adjacent to each other in the central portion of the detection block 211.
  • FIG. 4 is a diagram showing an example of the layout of the detection circuit 212 according to the first embodiment of the present technology.
  • a is an example of a layout in which a rectangular low-sensitivity photon detector 220 whose long side is along the X-axis direction is arranged.
  • b is an example of a layout in which a rectangular low-sensitivity photon detector 220 having a long side along the Y-axis direction is arranged.
  • the shape of the low-sensitivity photon detector 220 can be rectangular.
  • the logic circuit 300 is arranged for each detection circuit 212. Each of these logic circuits 300 is connected to the corresponding detection circuit 212 via a signal line.
  • the circuit including the detection circuit 212 and the logic circuit 300 corresponding to the detection circuit 212 functions as a pixel circuit for generating pixel data of one pixel in the image data.
  • the signal processing unit 270 executes predetermined signal processing such as filter processing on the image data in which the pixel data is arranged.
  • the signal processing unit 270 outputs the processed image data to the recording unit 120.
  • the logic circuit 300 includes a determination counting processing unit 305 and a switching unit 330.
  • An illuminance determination device 310 and a counting unit 320 are arranged in the determination counting processing unit 305.
  • the low-sensitivity photon detector 220 generates a pulse signal according to the incident of a photon, and supplies a signal (inverted signal or the like) corresponding to the pulse signal to the illuminance determination device 310.
  • the high-sensitivity photon detector 230 generates a pulse signal in response to the incident of a photon, and supplies the signal corresponding to the pulse signal to the counting unit 320.
  • the low-sensitivity photon detector 220 is an example of the first photon detector described in the claims, and the high-sensitivity photon detector 230 is the second photon detector described in the claims. This is an example.
  • the illuminance determining device 310 determines whether or not the illuminance of the incident light on the pixel circuit 280 exceeds a predetermined value.
  • the illuminance determination device 310 supplies the illuminance determination result to the switching unit 330.
  • the counting unit 320 counts the number of photons contained in the incident light.
  • the counting unit 320 supplies the counting value to the switching unit 330.
  • the switching unit 330 outputs the fixed mask value MSK as the output counter value CNTout to the signal processing unit 270.
  • the output counter value CNTout is output as the value of the pixel data of the pixel circuit 280.
  • the mask value MSK a preset value is held in a register (not shown) or the like.
  • the vertical control unit 240 supplies the reset signal RSTi and the enable signal ENi to the illuminance determination device 310, and supplies the reset signal RSTp and the enable signal ENp to the counting unit 320. Further, the vertical control unit 240 supplies the reset signals RSTs to the switching unit 330. These reset signals RSTi, RSTp and RSTs are signals for initialization, and enable signals ENi and ENp are signals for enabling or disabling the circuit.
  • FIG. 7 is a circuit diagram showing a configuration example of the pixel circuit 280 according to the first embodiment of the present technology.
  • a resistor 221, an avalanche photodiode 222, and an inverter 223 are provided in the low-sensitivity photon detector 220 in the pixel circuit 280.
  • a resistor 231 and an avalanche photodiode 232 and an inverter 233 are provided in the high-sensitivity photon detector 230.
  • SPAD is used as the avalanche photodiodes 222 and 232.
  • the inverter 223 inverts the pulse signal from the cathode of the avalanche photodiode 222.
  • the inverter 223 supplies an inverted inverted signal to the illuminance determination device 310.
  • the OR gate 312 outputs the logical sum of the predetermined determination clock signal CLKi and the inverting signal of the inverter 311 to the counter 313.
  • the counter 313 counts the count value based on the input signal from the OR gate 312.
  • the counter 313 supplies a bit indicating a predetermined digit (highest digit or the like) of the count value to the switching unit 330 as a determination result. Further, the counter 313 counts when the enable is set by the enable signal ENi, and initializes the count value according to the reset signal RSTi.
  • the counter 313 is an example of the first counter described in the claims.
  • the illuminance determination device 310 can count the number of clocks of the determination clock signal CLKi over the period of the pulse width of the pulse signal generated by the low-sensitivity photon detector 220.
  • connection configuration of the resistor 231 and the avalanche photodiode 232 and the inverter 233 in the high-sensitivity photon detector 230 is the same as that of the low-sensitivity photon detector 220.
  • the inverter 233 supplies an inverted signal to the counting unit 320.
  • the counter 322 counts the number of pulses based on the input signal (that is, the pulse signal) from the inverter 321.
  • the counter 322 supplies the count value as an input counter value CNTin to the switching unit 330. Further, the counter 322 counts when the enable is set by the enable signal ENp, and initializes the count value according to the reset signal RSTp.
  • the counter 322 is an example of the second counter described in the claims.
  • the switching unit 330 includes a flip-flop 331 and a selector 332.
  • the flip-flop 331 holds the determination result.
  • a D-type flip-flop having an input terminal D, an output terminal Q, a clock terminal, and a reset terminal R is used.
  • a high level is input to the input terminal D, and a determination result is input to the clock terminal.
  • Reset signals RSTs are input to the reset terminal R, and the output terminal Q is connected to the control terminal of the selector 332.
  • the selector 332 selects either the mask value MSK or the input counter value CNTin from the counter 322 according to the signal from the flip-flop 331 (that is, the determination result). For example, when the illuminance exceeds a predetermined value, the logical value "1" is set in the determination result, and when the illuminance is less than the predetermined value, the logical value "0" is set in the determination result. In this case, if the determination result is "1", the selector 332 selects the mask value MSK and outputs it to the signal processing unit 270 via the horizontal control unit 260 as the output counter value CNTout. On the other hand, if the determination result is "0", the selector 332 selects the input counter value CNTin and outputs it to the signal processing unit 270 as the output counter value CNTout.
  • the AND gate 314 outputs the logical product of the enable signal ENi and the counter input signal CINi from the OR gate 312 to the 0th digit flip-flop 315.
  • the flip-flop 315 for example, a D-type flip-flop having an input terminal D, an output terminal Q, an inverting output terminal xQ, a clock terminal, and a reset terminal R is used.
  • the clock terminal of the 0th digit flip-flop 315 is connected to the output terminal of the AND gate 314. Further, the clock terminal of the nth digit flip-flop 315 after the first digit is connected to the inverting output terminal xQ of the n-1 digit flip-flop 315. The inverting output terminal xQ of the nth digit flip-flop 315 is also connected to the input terminal D of the flip-flop 315 itself. Further, the output terminal Q of the most significant N-1 digit is connected to the switching unit 330, and the bit of the most significant digit is output as a determination result from this terminal.
  • the counters 313 and 322 can count the number of pulses of the counter input signals CINi and CINp (pulse signal) without using a clock signal.
  • a counter that does not use a clock signal in this way is called an asynchronous counter.
  • a microlens 281 is provided for each pixel. Further, assuming that the incident light is incident from the upper part, avalanche photodiodes 222 and 232 having different sensitivities are arranged under the microlens 281.
  • FIG. 10 is a timing chart showing an example of the operation of the solid-state image sensor 200 when the illuminance is low in the first embodiment of the present technology.
  • the period from timing T1 to T2 is defined as the frame period.
  • the frame period corresponds to the period of the vertical synchronization signal from the image pickup control unit 130.
  • the vertical control unit 240 sets the enable signals ENi and ENp to a high level and sets them to enable.
  • the inverter 233 outputs an inverted signal in which the pulse signal Pout is inverted.
  • An inverted signal is similarly output from the inverter 223.
  • the counter 313 counts the number of clocks of the determination clock CNTi within the period of the pulse width of the pulse signal.
  • the illuminance determination counter value is relatively small. Therefore, it is assumed that the most significant bit (that is, the determination result) of the illuminance determination counter value is the low level.
  • the illuminance determination device 310 and the counting unit 320 operate in parallel during the period from T1 to T13 within the frame period, and simultaneously determine the illuminance and count the number of pulses.
  • the loss in the counting period of the number of pulses is reduced and the decrease in sensitivity can be suppressed as compared with the case where they are sequentially performed in time division.
  • the switching unit 330 determines whether or not to switch the output value to the mask value based on the determination result.
  • the mask value cannot be switched and the count value of the number of pulses (that is, the input counter value CNTin) is output as it is.
  • FIG. 11 is a timing chart showing an example of the operation of the solid-state image sensor 200 when the illuminance is high in the first embodiment of the present technology.
  • the pulse signal Pout drops at the timing t1 and the next photon is incident at the timing t2 before the dead time elapses. It is assumed that each of the photons at other timings is also incident at the dead time. In this case, the pulse signal Pout does not recover with the potential dropped, and a plurality of pulses are connected. As a result, the counter 322 cannot count the number of pulses. Therefore, the input counter value CNTin is a low value (for example, the initial value remains) even though the illuminance is high.
  • the input counter value CNTin is low even though the illuminance is high, if the value is output as pixel data as it is, the image quality of the image data may deteriorate. For example, when an image of the sun with high illuminance is taken, pseudo black spots may occur in the image data because the value of the pixel data is small even though there are actually no black spots.
  • the counter 313 in the illuminance determination device 310 counts the number of clocks of the determination clock CNTi over the period of the pulse width. The higher the illuminance, the greater the number of connected pulses and the longer the pulse width. Therefore, the illuminance determination counter value of the counter 313 becomes a value according to the illuminance, and the bit of a specific digit (highest digit, etc.) of the illuminance determination counter value indicates whether or not the illuminance exceeds a predetermined value. It can be judged by whether or not it reaches the level. In the figure, since the illuminance is high, for example, the bit of the most significant digit (that is, the determination result) becomes a high level at the timing t3.
  • the selector 332 Since the determination result is at a high level, the selector 332 outputs the mask value MSK as the output counter value CNTout instead of the input counter value CNTin immediately after the timing T13. As a result, it is possible to suppress a decrease in the output counter value CNTout when the illuminance is high. By suppressing the decrease in the output counter value CNTout, it is possible to prevent phenomena such as pseudo black spots and improve the image quality.
  • FIG. 12 is a graph showing an example of the relationship between the incident photon rate and the counter value in the first embodiment of the present technology.
  • the vertical axis represents a counter value (input counter value CNTin or output counter value CNTout), and the horizontal axis represents an incident photon rate.
  • the alternate long and short dash line shows the relationship between the incident photon rate and the input counter value CNTin, and the practice shows the relationship between the incident photon rate and the output counter value CNTout.
  • the input counter value CNTin increases as the incident photon rate increases.
  • the illuminance becomes so high that the incident photon rate exceeds R2
  • a plurality of pulses are connected and the input counter value CNTin decreases. Therefore, if the input counter value CNTin is output as pixel data as it is, pseudo black spots and the like may occur and the image quality may deteriorate.
  • the illuminance determining device 310 determines whether or not the illuminance is higher than the predetermined value corresponding to the incident photon rate R1. When the illuminance is higher than a predetermined value, the illuminance determination device 310 sets the determination result to a high level. When the determination result is high level, the switching unit 330 outputs the mask value MSK as the output counter value CNTout instead of the input counter value CNTin. Therefore, the output counter value CNTout is fixed to the mask value MSK in the region where the incident photon rate is higher than R1. As a result, it is possible to suppress a decrease in the output counter value CNTout when the illuminance is high. By suppressing the decrease in the output counter value CNTout, it is possible to prevent the occurrence of pseudo black spots and improve the image quality.
  • FIG. 13 is a flowchart showing an example of the operation of the pixel circuit 280 according to the first embodiment of the present technology. This operation is started, for example, when a predetermined application for capturing image data is executed.
  • the pixel circuit 280 initializes the counter value according to the reset signal (step S901). Then, the counting unit 320 in the pixel circuit 280 counts the number of photons and sets the counted value as the input counter value CNTin (step S902). Further, the illuminance determining device 310 in the pixel circuit 280 determines whether or not the illuminance exceeds a predetermined value (step S903).
  • step S903: Yes When the illuminance exceeds a predetermined value (step S903: Yes), the switching unit 330 in the pixel circuit 280 outputs the mask value MSK as the output counter value CNTout (step S904). On the other hand, when the illuminance is less than the predetermined value (step S903: No), the switching unit 330 outputs the input counter value CNTin as it is as the output counter value CNTout (step S905). After step S904 or S905, the pixel circuit 280 repeatedly executes step S901 and subsequent steps.
  • the switching unit 330 outputs a fixed mask value MSK as a counter value when the illuminance exceeds a predetermined value corresponding to the incident photon rate R1. , It is possible to suppress a decrease in the counter value when the illuminance is high.
  • the flip-flop 331 is arranged in the switching unit 330 to hold only the determination result, but the input counter value CNTin can be further held. In addition, the determination result may not be retained.
  • the switching unit 330 of the modified example of the first embodiment is different from the first embodiment in that the information to be held is different.
  • FIG. 14 is a circuit diagram showing a configuration example of the switching unit 330 in the first modification of the first embodiment of the present technology.
  • a is an example of a circuit diagram of the switching unit 330 when holding the determination result and the input counter value CNTin.
  • Reference numeral b in the figure is an example of a circuit diagram of the switching unit 330 when only the input counter value CNTin is held.
  • Reference numeral c in the figure is an example of a circuit diagram of the switching unit 330 when the determination result and the input counter value CNTin are not held.
  • a predetermined number of flip-flops 333 are further arranged in the switching unit 330.
  • the flip-flop 333 is arranged by the number of bits of the data indicating the input counter value CNTin.
  • the corresponding bit in the data indicating the input counter value CNTin is input to the input terminal D of the flip-flop 333.
  • the output terminal Q of the flip-flop 333 is connected to the input terminal of the selector 332. Further, reset signals RSTs are input to the reset terminal R of the flip-flop 333.
  • the flip-flop 331 is an example of the first flip-flop described in the claims
  • the flip-flop 333 is an example of the second flip-flop described in the claims.
  • the switching unit 330 holds the input counter value CNTin, so that the switching unit 330 can perform the switching operation after the lapse of the frame period. As a result, it is not necessary to perform the switching operation within the frame period, and the pulse number counting period can be extended accordingly to improve the sensitivity of the pixel circuit 280. Further, by adopting a configuration that does not hold data as illustrated in c in the figure, it is not necessary to arrange the flip-flops 331 and 333, and the circuit scale of the pixel circuit 280 can be reduced.
  • the switching unit 330 since the switching unit 330 holds the input counter value CNTin, the switching unit 330 performs the switching operation after the elapse of the frame period. Can be done. As a result, it is not necessary for the switching unit 330 to perform the switching operation within the frame period, and the pulse number counting period can be extended accordingly to improve the sensitivity. Further, by adopting a configuration in which data is not held in the switching unit 330, it is not necessary to arrange a flip-flop, and the circuit scale of the pixel circuit 280 can be reduced.
  • the avalanche photodiode 222 in the low-sensitivity photon detector 220 is arranged on the ground side, but it can also be arranged on the power supply side. In addition, the operation of the low-sensitivity photon detector 220 can be stopped by the enable signal.
  • the low-sensitivity photon detector 220 of the second modification of the first embodiment is different from the first embodiment in that the avalanche photodiode 222 is connected to the power supply side and an enable switch is added.
  • FIG. 15 is a circuit diagram showing a configuration example of the low-sensitivity photon detector 220 in the second modification of the first embodiment of the present technology.
  • a is an example of a circuit diagram of a low-sensitivity photon detector 220 to which an enable switch is added.
  • Reference numeral b in the figure is an example of a circuit diagram of a low-sensitivity photon detector 220 in which an avalanche photodiode 222 is arranged on the power supply side.
  • Reference numeral c in the figure is an example of a circuit diagram of a low-sensitivity photon detector 220 in which an enable switch is added and an avalanche photodiode 222 is arranged on the power supply side.
  • the avalanche photodiode 222 can be arranged on the power supply side.
  • the potential of the pulse signal rises (in other words, the logic is inverted) according to the incident of the photon, so that the inverter 223 becomes unnecessary.
  • the circuit scale of the pixel circuit 280 can be reduced.
  • the configuration of the high-sensitivity photon detector 230 is the same as that of the low-sensitivity photon detector 220.
  • an avalanche photodiode 222 can be arranged on the power supply side, and an enable switch 224 can be added.
  • the enable switch 224 is inserted between the power supply terminal and the avalanche photodiode 222.
  • the configuration of the high-sensitivity photon detector 230 is the same as that of the low-sensitivity photon detector 220.
  • the enable switch 224 that cuts off the current from the power supply when the disable is set is added, so that the enable switch 224 is added. Power consumption can be reduced. Further, since the avalanche photodiode 222 is arranged on the power supply side, the inverter 223 is not required, and the circuit scale can be reduced accordingly.
  • Second Embodiment> In the first embodiment described above, the low-sensitivity photon detector 220 and the high-sensitivity photon detector 230 are arranged for each pixel, but the pixel circuit is compared with the case where only one of them is arranged for each pixel.
  • the circuit scale of 280 will increase.
  • the pixel circuit 280 of the second embodiment is different from the first embodiment in that only one photon detector is provided.
  • FIG. 16 is a circuit diagram showing a configuration example of the pixel circuit 280 according to the second embodiment of the present technology.
  • the pixel circuit 280 of the second embodiment is different from the first embodiment in that a photon detector 225 is provided instead of the low-sensitivity photon detector 220 and the high-sensitivity photon detector 230.
  • the photon detector 225 generates a pulse signal according to the incident of photons.
  • the photon detector 225 includes a resistor 226, an avalanche photodiode 227 and an inverter 228.
  • the connection configuration of these resistors 226, avalanche photodiode 227 and inverter 228 is similar to the element of the same name in the low-sensitivity photon detector 220.
  • the counting unit 320 of the second embodiment is different from the first embodiment in that the inverter 321 is not provided.
  • the photon detector 225 outputs an inverted signal of the pulse signal to the inverter 311 in the illuminance determination device 310.
  • the inverter 311 outputs an inverting signal to the OR gate 312 and the counter 322 in the counting unit 320.
  • the circuit scale of the pixel circuit 280 is compared with the case where two photon detectors (low-sensitivity photon detector 220 and high-sensitivity photon detector 230) are provided. Can be reduced. This facilitates the miniaturization of pixels.
  • first modification and the second modification of the first embodiment can be applied to the second embodiment.
  • FIG. 17 is a block diagram showing a configuration example of the pixel circuit 280 according to the third embodiment of the present technology.
  • the pixel circuit 280 of the third embodiment is different from the first embodiment in that the determination counting processing unit 340 is provided instead of the determination counting processing unit 305.
  • FIG. 18 is a circuit diagram showing a configuration example of the pixel circuit 280 according to the third embodiment of the present technology.
  • the determination counting processing unit 340 includes a selector 341, an inverter 342, an AND gate 343, an OR gate 344, and a counter 345.
  • the selector 341 selects either an inverted signal from the low-sensitivity photon detector 220 or an inverted signal from the high-sensitivity photon detector 230 according to the mode signal MODE and outputs it to the inverter 342.
  • the mode signal MODE is a signal instructing either a determination mode for determining the illuminance or a counting mode for counting the number of photons, and is supplied from, for example, the vertical control unit 240.
  • the determination mode the logic value "0" is set in the mode signal MODE, and the selector 341 selects the inverted signal from the low-sensitivity photon detector 220.
  • the counting mode the logic value "1" is set in the mode signal MODE, and the selector 341 selects the inverted signal from the high-sensitivity photon detector 230.
  • the inverter 342 adjusts the level of the signal from the selector 341, inverts it, and outputs it to the AND gate 343.
  • the AND gate 343 outputs the logical product of the inverted signal from the inverter 342, the enable signal ENi, and the inverted value of the feedback signal from the switching unit 330 to the OR gate 344.
  • the OR gate 344 outputs the logical sum of the signal from the AND gate 343 and the determination clock signal CLKi to the counter 345.
  • the counter 345 counts the count value based on the input signal from the OR gate 344.
  • the counter 345 supplies a bit indicating a predetermined digit (most significant digit or the like) of the count value to the flip-flop 331 as a determination result. Further, the counter 345 supplies the count value to the selector 332 as an input counter value CNTin. Further, the counter 345 counts when the enable is set by the enable signal ENi, and initializes the count value according to the reset signal RSTi.
  • the circuit configuration of the switching unit 330 of the third embodiment is the same as that of the first embodiment. However, the flip-flop 331 in the switching unit 330 supplies the holding value (that is, the determination result) to the selector 332 and also returns it to the AND gate 343.
  • the determination counting processing unit 340 determines whether or not the illuminance exceeds a predetermined value within the period of the determination mode. Further, the determination counting processing unit 340 counts the number of photons within the period of the counting mode. By performing the processing in time division in this way, the function of the illuminance determination device 310 and the function of the counting unit 320 can be realized by one counter.
  • FIG. 19 is a timing chart showing an example of the operation of the solid-state image sensor 200 when the illuminance is low in the third embodiment of the present technology.
  • GUI parts for performing various operations for the display on the display device which is the output destination device are provided. It is provided. The user can operate the display on the display device by appropriately selecting these GUI components.
  • the endoscope 5115 is composed of a lens barrel 5117 in which a region having a predetermined length from the tip is inserted into the body cavity of the patient 5185, and a camera head 5119 connected to the base end of the lens barrel 5117.
  • the endoscope 5115 configured as a so-called rigid mirror having a rigid barrel 5117 is illustrated, but the endoscope 5115 is configured as a so-called flexible mirror having a flexible barrel 5117. May be good.
  • the input device 5161 is an input interface for the endoscopic surgery system 5113.
  • the user can input various information and input instructions to the endoscopic surgery system 5113 via the input device 5161.
  • the user inputs various information related to the surgery, such as physical information of the patient and information about the surgical procedure, via the input device 5161.
  • the user gives an instruction to drive the arm portion 5145 via the input device 5161 and an instruction to change the imaging conditions (type of irradiation light, magnification, focal length, etc.) by the endoscope 5115.
  • Input an instruction to drive the energy treatment tool 5135, and the like.
  • the input device 5161 By configuring the input device 5161 to be able to input various information in a non-contact manner in this way, a user belonging to a clean area (for example, an operator 5181) can operate a device belonging to a dirty area in a non-contact manner. Is possible. In addition, the user can operate the device without taking his / her hand off the surgical tool that he / she has, which improves the convenience of the user.
  • the arm portion 5145 can be preferably configured to have at least 6 degrees of freedom.
  • the endoscope 5115 can be freely moved within the movable range of the arm portion 5145, so that the lens barrel 5117 of the endoscope 5115 can be inserted into the body cavity of the patient 5185 from a desired direction. It will be possible.
  • the arm control device 5159 does not necessarily have to be provided on the cart 5151. Further, the arm control device 5159 does not necessarily have to be one device. For example, the arm control device 5159 may be provided at each joint portion 5147a to 5147c of the arm portion 5145 of the support arm device 5141, and a plurality of arm control devices 5159 cooperate with each other to drive the arm portion 5145. Control may be realized.
  • the body tissue is irradiated with excitation light to observe the fluorescence from the body tissue (autofluorescence observation), or a reagent such as indocyanine green (ICG) is locally injected into the body tissue and the body tissue is injected.
  • An excitation light corresponding to the fluorescence wavelength of the reagent may be irradiated to obtain a fluorescence image.
  • the light source device 5157 may be configured to be capable of supplying narrow band light and / or excitation light corresponding to such special light observation.
  • FIG. 39 is a block diagram showing an example of the functional configuration of the camera head 5119 and the CCU 5153 shown in FIG. 38.
  • CMOS Complementary Metal Oxide Semiconductor
  • the image pickup device for example, an image pickup device capable of capturing a high-resolution image of 4K or higher may be used.
  • the imaging unit 5123 does not necessarily have to be provided on the camera head 5119.
  • the imaging unit 5123 may be provided inside the lens barrel 5117 immediately after the objective lens.
  • the drive unit 5125 is composed of an actuator, and the zoom lens and focus lens of the lens unit 5121 are moved by a predetermined distance along the optical axis under the control of the camera head control unit 5129. As a result, the magnification and focus of the image captured by the imaging unit 5123 can be adjusted as appropriate.
  • the communication unit 5127 is composed of a communication device for transmitting and receiving various information to and from the CCU 5153.
  • the communication unit 5127 transmits the image signal obtained from the image pickup unit 5123 as RAW data to the CCU 5153 via the transmission cable 5179.
  • the image signal is transmitted by optical communication.
  • the surgeon 5181 performs the surgery while observing the condition of the affected area with the captured image, so for safer and more reliable surgery, the moving image of the surgical site is displayed in real time as much as possible. This is because it is required.
  • the communication unit 5127 is provided with a photoelectric conversion module that converts an electric signal into an optical signal.
  • the image signal is converted into an optical signal by the photoelectric conversion module and then transmitted to the CCU 5153 via the transmission cable 5179.
  • the communication unit 5127 receives a control signal for controlling the drive of the camera head 5119 from the CCU 5153.
  • the control signal includes, for example, information to specify the frame rate of the captured image, information to specify the exposure value at the time of imaging, and / or information to specify the magnification and focus of the captured image, and the like. Contains information about the condition.
  • the communication unit 5127 provides the received control signal to the camera head control unit 5129.
  • the control signal from CCU5153 may also be transmitted by optical communication.
  • the communication unit 5127 is provided with a photoelectric conversion module that converts an optical signal into an electric signal, and the control signal is converted into an electric signal by the photoelectric conversion module and then provided to the camera head control unit 5129.
  • the above imaging conditions such as frame rate, exposure value, magnification, focus, etc. are automatically set by the control unit 5177 of CCU5153 based on the acquired image signal. That is, the so-called AE (Auto Exposure) function, AF (Auto Focus) function, and AWB (Auto White Balance) function are mounted on the endoscope 5115.
  • AE Auto Exposure
  • AF Automatic Focus
  • AWB Automatic White Balance
  • the communication unit 5173 is composed of a communication device for transmitting and receiving various information to and from the camera head 5119.
  • the communication unit 5173 receives an image signal transmitted from the camera head 5119 via the transmission cable 5179.
  • the image signal can be suitably transmitted by optical communication.
  • the communication unit 5173 is provided with a photoelectric conversion module that converts an optical signal into an electric signal.
  • the communication unit 5173 provides the image processing unit 5175 with an image signal converted into an electric signal.
  • the image processing unit 5175 performs various image processing on the image signal which is the RAW data transmitted from the camera head 5119.
  • the image processing includes, for example, development processing, high image quality processing (band enhancement processing, super-resolution processing, NR (Noise reduction) processing and / or camera shake correction processing, etc.), and / or enlargement processing (electronic zoom processing). Etc., various known signal processing is included.
  • the image processing unit 5175 performs detection processing on the image signal for performing AE, AF, and AWB.
  • the image processing unit 5175 is composed of a processor such as a CPU or GPU, and when the processor operates according to a predetermined program, the above-mentioned image processing and detection processing can be performed.
  • the image processing unit 5175 is composed of a plurality of GPUs, the image processing unit 5175 appropriately divides the information related to the image signal and performs image processing in parallel by the plurality of GPUs.
  • the control unit 5177 performs various controls related to the imaging of the surgical site by the endoscope 5115 and the display of the captured image. For example, the control unit 5177 generates a control signal for controlling the drive of the camera head 5119. At this time, when the imaging condition is input by the user, the control unit 5177 generates a control signal based on the input by the user. Alternatively, when the endoscope 5115 is equipped with the AE function, the AF function, and the AWB function, the control unit 5177 determines the optimum exposure value, focal length, and the optimum exposure value and the focal length according to the result of the detection processing by the image processing unit 5175. The white balance is calculated appropriately and a control signal is generated.
  • the transmission cable 5179 that connects the camera head 5119 and the CCU 5153 is an electric signal cable that supports electric signal communication, an optical fiber that supports optical communication, or a composite cable thereof.
  • the communication is performed by wire using the transmission cable 5179, but the communication between the camera head 5119 and the CCU 5153 may be performed wirelessly.
  • the communication between the two is performed wirelessly, it is not necessary to lay the transmission cable 5179 in the operating room, so that the situation where the movement of the medical staff in the operating room is hindered by the transmission cable 5179 can be solved.
  • the example of the operating room system 5100 to which the technology according to the present disclosure can be applied has been described above.
  • the medical system to which the operating room system 5100 is applied is the endoscopic surgery system 5113
  • the configuration of the operating room system 5100 is not limited to such an example.
  • the operating room system 5100 may be applied to an examination flexible endoscopic system or a microsurgery system instead of the endoscopic surgery system 5113.
  • the technique according to the present disclosure can be suitably applied to the imaging unit 5123 among the configurations described above.
  • the image pickup apparatus 100 can be applied to the image pickup unit 5123.
  • the image quality of the image data can be improved especially in high illuminance, so that the reliability of the surgical system can be improved.
  • the present technology can have the following configurations.
  • An illuminance judge for determining whether or not the illuminance of incident light exceeds a predetermined value A counting unit that counts the number of photons contained in the incident light and supplies the counted value, A solid-state image sensor including a switching unit that outputs the count value when the illuminance is less than the predetermined value and outputs a predetermined fixed value when the illuminance exceeds the predetermined value.
  • the illuminance judge counts the number of clocks of a predetermined clock signal within the period of the pulse width of the pulse signal generated in response to the incident of a photon, and sets a bit indicating a predetermined digit of the counted value.
  • the solid-state image sensor according to (1) above which outputs to the switching unit as a determination result of illuminance.
  • the illuminance determination device includes a first counter that counts the number of clocks.
  • the illuminance determination device counts the number of clocks within a predetermined determination period, and the illuminance determination device counts the number of clocks.
  • a first photon detector that generates a first pulse signal and supplies a signal corresponding to the first pulse signal to the illuminance determination device.
  • a second photon detector that generates a second pulse signal and supplies a signal corresponding to the second pulse signal to the counting unit is further provided.
  • the illuminance judge is The capacity to hold the integral value of the electric signal generated by photoelectric conversion,
  • the electric signal includes first and second pulse signals generated in response to the incident of photons.
  • a first photon detector that generates the first pulse signal and supplies a signal corresponding to the first pulse signal to the illuminance determination device.
  • a second photon detector that generates the second pulse signal and supplies a signal corresponding to the second pulse signal to the counting unit is further provided.
  • the solid-state image sensor according to (7) wherein the sensitivity of the first photon detector is lower than that of the second photon detector.
  • a photon detector that generates a pulse signal in response to the incident of a photon and supplies the signal corresponding to the pulse signal to the counting unit is further provided.
  • the illuminance determining device determines whether or not the illuminance exceeds the predetermined value within a predetermined exposure period.
  • the illuminance determination device counts the number of clocks within a predetermined determination period, and the illuminance determination device counts the number of clocks.
  • the switching unit includes a selector that outputs either the count value or the fixed value according to the determination result of the illuminance.
  • the solid-state imaging device (14) The solid-state imaging device according to (13), wherein the switching unit further includes a first flip-flop that holds the determination result.
  • the solid-state imaging device (13) or (14), wherein the switching unit further includes a predetermined number of second flip-flops holding the count value.
  • Avalanche photodiode and The solid-state image sensor according to any one of (1) to (15), further comprising a resistor connected in series with the avalanche photodiode between the power supply terminal and the ground terminal.
  • An inverter that inverts the potential at the connection point between the avalanche photodiode and the resistor and outputs the potential to at least one of the illuminance determination device and the counting unit is further provided.
  • the solid-state imaging device wherein the avalanche photodiode is connected to the ground side.
  • the solid-state imaging device according to (16) or (17), further comprising an enable switch that cuts off a current from the power supply terminal according to a predetermined enable signal.
  • An illuminance judge for determining whether or not the illuminance of incident light exceeds a predetermined value, and A counting unit that counts the number of photons contained in the incident light and supplies the counted value, A switching unit that outputs the count value as pixel data when the illuminance is less than the predetermined value, and outputs a predetermined fixed value as the pixel data when the illuminance exceeds the predetermined value.
  • An imaging device including a signal processing unit that processes the pixel data.
  • An illuminance determination procedure for determining whether or not the illuminance of incident light exceeds a predetermined value, and A counting procedure that counts the number of photons contained in the incident light and supplies the counted value, and A control method for a solid-state image sensor including an output switching procedure that outputs the count value when the illuminance is less than the predetermined value and outputs a predetermined fixed value when the illuminance exceeds the predetermined value. ..
  • Image sensor 110 Image sensor 120 Recording unit 130 Image control unit 200
  • Solid-state image sensor 201 Light receiving chip 202
  • Logic chip 210 Light receiving unit 211
  • Detection block 212 Detection circuit 220
  • Signal processing unit 280 Pixel circuit 281
  • Pixel circuit 281 Microlens 300
  • Flip flop 320 Counting unit 330 Switching unit 332, 341 Selector 351, 352, 372 pMOS transistor 355, 363, 373 Capacity 362 Non-Avalanche photod

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  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

L'invention concerne un élément d'imagerie à semi-conducteurs permettant de compter le nombre de photons, l'élément étant configuré pour supprimer une diminution d'une valeur de compte.　Cet élément d'imagerie à semi-conducteurs comprend un appareil de détermination d'éclairement, une unité de comptage et une unité de commutation. L'appareil de détermination d'éclairement dans cet élément d'imagerie à semi-conducteur détermine si l'éclairement de la lumière incidente dépasse ou non une valeur prédéterminée. L'unité de comptage dans l'élément d'imagerie à semi-conducteurs compte le nombre de photons inclus dans la lumière incidente et fournit la valeur de compte. L'unité de commutation dans l'élément d'imagerie à semi-conducteurs produit la valeur de compte tant que l'éclairement n'atteint pas la valeur prédéterminée et produit une valeur fixe prédéterminée si l'éclairement dépasse la valeur prédéterminée.
PCT/JP2020/034222 2019-12-09 2020-09-10 Élément d'imagerie à semi-conducteurs, dispositif d'imagerie et procédé de commande d'élément d'imagerie à semi-conducteurs WO2021117307A1 (fr)

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JP2019-221937 2019-12-09

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JP7286730B2 (ja) * 2021-10-20 2023-06-05 キヤノン株式会社 光電変換装置
KR20230078373A (ko) 2021-11-26 2023-06-02 삼성전자주식회사 이미지 센서, 영상 획득 장치 및 이를 포함하는 전자 장치
JP2023099398A (ja) 2022-01-01 2023-07-13 キヤノン株式会社 光電変換装置、撮像システム、光検出システム、および移動体
WO2024009343A1 (fr) * 2022-07-04 2024-01-11 ソニーセミコンダクタソリューションズ株式会社 Dispositif de détection optique

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JP2019110409A (ja) * 2017-12-15 2019-07-04 キヤノン株式会社 固体撮像素子、撮像装置及び撮像方法
WO2019150752A1 (fr) * 2018-02-02 2019-08-08 ソニーセミコンダクタソリューションズ株式会社 Élément d'imagerie à semi-conducteurs, dispositif d'imagerie, et procédé de commande pour élément d'imagerie à semi-conducteurs
WO2019176250A1 (fr) * 2018-03-15 2019-09-19 株式会社ニコン Dispositif de commande, procédé de commande et programme
JP2020041812A (ja) * 2018-09-06 2020-03-19 キヤノン株式会社 光電変換装置及び撮像システム

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JP2019110409A (ja) * 2017-12-15 2019-07-04 キヤノン株式会社 固体撮像素子、撮像装置及び撮像方法
WO2019150752A1 (fr) * 2018-02-02 2019-08-08 ソニーセミコンダクタソリューションズ株式会社 Élément d'imagerie à semi-conducteurs, dispositif d'imagerie, et procédé de commande pour élément d'imagerie à semi-conducteurs
WO2019176250A1 (fr) * 2018-03-15 2019-09-19 株式会社ニコン Dispositif de commande, procédé de commande et programme
JP2020041812A (ja) * 2018-09-06 2020-03-19 キヤノン株式会社 光電変換装置及び撮像システム

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