WO2021114869A1 - 一种角位移微驱动机构 - Google Patents

一种角位移微驱动机构 Download PDF

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Publication number
WO2021114869A1
WO2021114869A1 PCT/CN2020/121796 CN2020121796W WO2021114869A1 WO 2021114869 A1 WO2021114869 A1 WO 2021114869A1 CN 2020121796 W CN2020121796 W CN 2020121796W WO 2021114869 A1 WO2021114869 A1 WO 2021114869A1
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WO
WIPO (PCT)
Prior art keywords
shaft
gear
bearing
bolt
power output
Prior art date
Application number
PCT/CN2020/121796
Other languages
English (en)
French (fr)
Inventor
张士军
Original Assignee
山东建筑大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN201922177921.6U external-priority patent/CN211288651U/zh
Priority claimed from CN201911249019.9A external-priority patent/CN110762178A/zh
Application filed by 山东建筑大学 filed Critical 山东建筑大学
Publication of WO2021114869A1 publication Critical patent/WO2021114869A1/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H37/00—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00
    • F16H37/02—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00 comprising essentially only toothed or friction gearings
    • F16H37/06—Combinations of mechanical gearings, not provided for in groups F16H1/00 - F16H35/00 comprising essentially only toothed or friction gearings with a plurality of driving or driven shafts; with arrangements for dividing torque between two or more intermediate shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/02—Gearboxes; Mounting gearing therein
    • F16H57/021—Shaft support structures, e.g. partition walls, bearing eyes, casing walls or covers with bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/02—Gearboxes; Mounting gearing therein
    • F16H57/023—Mounting or installation of gears or shafts in the gearboxes, e.g. methods or means for assembly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/08—General details of gearing of gearings with members having orbital motion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
    • F16M11/02—Heads
    • F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
    • F16M11/06—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
    • F16M11/02—Heads
    • F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Definitions

  • the invention belongs to the technical field of mechanical design and manufacturing, and particularly relates to an angular displacement micro-drive mechanism.
  • the surface morphology formed after machining of mechanical parts has a great influence on the friction characteristics, contact stiffness, fatigue strength, fit, vibration and operation accuracy of the parts.
  • the micro morphology of the processed surface of the workpiece is an important indicator for judging the quality of the workpiece. Therefore, it is of great significance to measure the surface micro-topography of the workpiece.
  • the white light interference profiler using a non-contact measurement method is a precision instrument that can obtain parameters such as the surface roughness of the workpiece with high precision.
  • the purpose of the present invention is to provide an angular displacement micro-driving mechanism capable of realizing precise micro-rotation in order to realize precise angular displacement micro-drive and solve the current lack of precise angular displacement driving mechanism.
  • an angular displacement micro-drive mechanism including an input shaft, a hollow shaft, a gear I, a circlip, a circlip, a sleeve, a gear IV, a power output shaft , Sleeve Two, Bearing One, Bearing End Cover One, Bolt One, Rotating Table, Bearing Two, Bearing End Cover Two, Bolt Two, Gear III, Bushing, Intermediate Shaft, Planet Carrier, Gear II, Sleeve Three, Bracket, bearing three, bearing end cover three, bolt three, bearing four, bearing end cover four, worm gear, worm, sealing ring, bolt four, retaining ring, elastic washer, nut, box body, characterized in that the hollow shaft passes through The shaft hole of the box body is fixed to the box body by bolt four through the fixed shaft section on the hollow shaft and the fixed boss.
  • Bolt four fixes the bearing end cover four at the same time, and the gear I is splined to the spline two on the hollow shaft. , And press it on the hollow shaft boss on the hollow shaft through the elastic retaining ring.
  • the gear II and the gear I mesh without backlash, and the mesh without backlash can ensure the precise transmission accuracy.
  • the hollow shaft is hollow.
  • the shaft is mounted on the box body through the hollow shaft through the bearing 4, the worm wheel is fixed at the end of the input shaft through the elastic retaining ring 2, the worm gear meshes with the worm, and the two ends of the worm are mounted on the box body through the bearing, the worm can be relative to the box body Rotate freely, the planet carrier is installed on the spline 1 on the input shaft with internal splines, the planet carrier is pressed against the input shaft boss of the input shaft by the elastic retaining ring 2, and the shaft section of the power output shaft is installed on the input shaft In the light hole of the power output shaft, the shaft section of the power output shaft and the light hole of the input shaft are transitional fits. The transitional fit can ensure precise transmission accuracy.
  • the gear IV is splined on the spline 3 of the power output shaft, and
  • the sleeve 1 is pressed on the power output shaft boss of the power output shaft, the power output shaft is installed on the box body through the sleeve 2 and the bearing one, and the bearing end cover is fixed on the box body by bolts and pressed on On the outer ring of bearing 1, the other end of the power output shaft has external threads.
  • the rotating table is installed on the external threads of the power output shaft and is fastened to the power output shaft by nuts, spring washers, and retaining rings.
  • the working table is composed of a fixed seat, a thin spring plate, and a working table. The thin spring plate connects the fixed seat and the working table.
  • the power output shaft drives the fixed seat to rotate, and the fixed seat drives the working table to rotate through the thin spring plate.
  • the spring plate can eliminate the vibration in motion and improve the transmission precision.
  • the left end of the intermediate shaft is installed in the inner ring of the second bearing, the outer ring of the second bearing is installed on the bracket, and the bearing end cover 2 is fixed on the bracket by the second bolt And press the outer ring of bearing two, the right end of the intermediate shaft is installed in the inner ring of bearing three, the outer ring of bearing three is installed on the bracket, the bearing end cover three is fixed on the bracket by bolt three and pressed tightly
  • the outer ring of bearing three, the intermediate shaft is designed with long splines and short splines, gear III is matched with the long splines on the intermediate shaft through the splines, and the spline forms are involute splines and involute splines.
  • the key has good centering and improves the installation accuracy.
  • the gear II is installed at the short spline on the intermediate shaft, and the gear II is pressed against the intermediate shaft under the action of the inner ring of the sleeve 3 and the bearing 3.
  • a planet carrier is installed on the optical shaft section of the intermediate shaft, and the light hole of the planet carrier and the optical shaft section of the intermediate shaft are in transitional fit to ensure that the light hole and the optical shaft section are in close contact and can freely rotate relative to each other.
  • the driving force during operation is transmitted from the worm to the worm gear, and is transmitted to the input shaft through the worm gear, and the planetary mechanism is driven by the input shaft.
  • the beneficial effects of the patent of the present invention are: the present invention generates a great transmission ratio through the combination of worm gear and planetary gear transmission, and realizes the rotation of nanometer-level micro angular displacement; the angular displacement micro-drive mechanism of the present invention is a pure mechanical
  • the type of angular displacement micro-drive mechanism does not require capacitors, does not produce electromagnetic effects, and does not produce electrothermal effects. Therefore, this mechanism will not affect the operation of other components and improve the operation accuracy of the equipment; one aspect of the present invention
  • This kind of angular displacement micro-drive mechanism does not use piezoelectric ceramics and has low cost; the rotating worktable is designed with thin spring plates, which can eliminate vibration in motion and realize high-precision transmission.
  • Figure 1 Schematic diagram of an angular displacement micro-drive mechanism of the present invention.
  • Figure 7 Sectional view of the rotating table.
  • the present invention provides an angular displacement micro-drive mechanism.
  • the angular displacement micro-drive mechanism includes an input shaft 1, a hollow shaft 2, a gear I3, an elastic ring 4, an elastic ring 2 5, a sleeve 6 and a gear IV7, power output shaft 8, sleeve two 9, bearing one 10, bearing end cover one 11, bolt one 12, rotating table 13, bearing two 14, bearing end cover two 15, bolt two 16, gear III17, shaft sleeve 18.
  • Intermediate shaft 19 planet carrier 20, gear II21, sleeve three 22, bracket 23, bearing three 24, bearing end cover three 25, bolt three 26, bearing four 27, bearing end cover four 28, worm gear 29, worm 30 , Sealing ring 31, bolt 32, retaining ring 33, elastic washer 34, nut 35, box 36, characterized in that: the hollow shaft 2 passes through the shaft hole of the box 36 through the fixed shaft section 204 on the hollow shaft 2 and The fixing boss 205 is fixed on the box 36 by bolts 32, and the bolts 32 at the same time fix the bearing end cover 28.
  • the gear I3 is splined to the spline 2 202 on the hollow shaft 2, and is connected to the spline 2 202 on the hollow shaft 2 through the elastic retaining ring 1. 4 Pressed on the hollow shaft boss 203 on the hollow shaft 2.
  • the gear II21 and the gear I3 are meshed without backlash. The meshing without backlash can ensure precise transmission accuracy.
  • the hollow shaft 2 has a hollow shape and the input shaft 1
  • the hollow shaft 2 is mounted on the box 36 through the bearing 29, the worm wheel 29 is fixed to the end of the input shaft 1 through the elastic retaining ring 5, the worm wheel 29 is meshed with the worm 30, and the two ends of the worm 30 are mounted by bearings
  • the worm 30 can rotate freely relative to the box 36, and the planet carrier 20 is installed on the spline 101 of the input shaft 1 by the internal spline 2003, and the planet carrier 20 is pressed tightly by the elastic retaining ring two 5.
  • the shaft section 803 of the power output shaft 8 is installed in the optical hole 103 of the input shaft 1.
  • the shaft section 803 of the power output shaft 8 and the optical hole 103 of the input shaft 1 are Transition fit, the transition fit can ensure precise transmission accuracy.
  • Gear IV7 is installed on spline 3 801 of power output shaft 8 through splines, and pressed by sleeve 2 9 on the power output shaft boss of power output shaft 8
  • the power output shaft 8 is installed on the box 36 through the sleeve 9 and the bearing 10, and the bearing end cover 11 is fixed to the box 36 by the bolt 12 and pressed against the outer ring of the bearing 10.
  • the other end of the shaft 8 has an external thread 802.
  • the rotating table 13 is mounted on the external thread 802 of the power output shaft 8, and is fastened to the power output shaft 8 by a nut 35, a spring washer 34, and a retaining ring 33.
  • the rotation The working table 13 is composed of a fixed seat 1301, a thin spring plate 1302, and a working table 1303.
  • the thin spring plate 1302 is connected to the fixed seat 1301 and the working table 1303.
  • the power output shaft 8 drives the fixed seat 1301 to rotate
  • the fixed seat 1301 The thin spring sheet 1302 drives the worktable 1303 to rotate.
  • the thin spring sheet 1302 can eliminate vibration in motion and improve the precision of transmission.
  • the left end of the shaft 19 is installed in the inner ring of the bearing two 14, the outer ring of the bearing two 14 is installed on the bracket 23, the bearing end cover 15 is fixed on the bracket 23 by the bolt two 16 and the outer ring of the bearing two 14 is pressed tightly.
  • the right end of the intermediate shaft 19 is installed in the inner ring of the bearing three 24, the outer ring of the bearing three 24 is installed on the bracket 23, and the bearing end cover three 25 is fixed on the bracket 23 by the bolt three 26 and compressed
  • the outer ring of bearing three 24, the intermediate shaft 19 is designed with a long spline 1901 and a short spline 1903, the gear III17 is matched with the long spline 1901 on the intermediate shaft 19 through the spline, and the spline form is an involute spline.
  • the key, the involute spline has good centering and improves the installation accuracy.
  • the gear II21 is installed at the short spline 1903 on the intermediate shaft 19 under the action of the inner ring of the sleeve three 22 and the bearing three 24 Press the gear II21 on the intermediate shaft boss 1904 on the intermediate shaft 19, the optical shaft section 1902 of the intermediate shaft 19 is equipped with a planet carrier 20, the light hole 2001 of the planet carrier 20 and the optical shaft section 1902 of the intermediate shaft 19 It is a transitional fit to ensure that the light hole 2001 and the central optical axis section 1902 are in close contact and can rotate freely relative to each other.
  • the driving force during operation is transmitted from the worm 30 to the worm wheel 29, and is transmitted through the worm wheel 29 to the input shaft 1, the star carrier 20, the intermediate shaft 19, the gear I3, the gear II21, and the gear In the planetary mechanism composed of III17, gear IV7, and power output shaft 8, the power transmitted to the worm gear is first transmitted to the input shaft 1.
  • the input shaft 1 drives the planet carrier 20 to rotate, the planet carrier 20 drives the intermediate shaft 19 to rotate, and the intermediate shaft 19
  • the rotation drives gear II21 and gear III17 to rotate.
  • Gear III17 and gear IV7 mesh without backlash.
  • the power is transmitted to the rotating table 13 through the gear IV7 and the power output shaft 8, and the angular displacement of the rotating table 13 is micro-driving.
  • the number of teeth of gear I3 is z 3
  • the number of teeth of gear II21 is z 21
  • the number of teeth of gear IV7 is z 7
  • the number of teeth of gear III17 is z 17

Abstract

一种角位移微驱动机构，包括输入轴（1）、空心轴（2）、齿轮I（3）、弹性挡圈一（4）、弹性挡圈二（5）、套筒一（6）、齿轮IV（7）、动力输出轴（8）、套筒二（9）、轴承一（10）、轴承端盖一（11）、螺栓一（12）、转动工作台（13）、轴承二（14）、轴承端盖二（15）、螺栓二（16）、齿轮III（17）、轴套（18）、中间轴（19）、行星架（20）、齿轮II（21）、套筒三（22）、支架（23）、轴承三（24）、轴承端盖三（25）、螺栓三（26）、轴承四（27）、轴承端盖四（28）、蜗轮（29）、蜗杆（30）、密封圈（31）、螺栓四（32）、挡圈（33）、弹性垫圈（34）、螺母（35），箱体（36），空心轴（2）穿过箱体（36）的轴孔通过空心轴（2）上的固定轴段（204）和固定凸台（205）由螺栓四（32）固定在箱体（36）上，螺栓四（32）同时固定轴承端盖四（28），齿轮I（3）通过花键安装到空心轴（2）上的花键二（202）上，并通过弹性挡圈一（4）压紧在空心轴（2）上的空心轴凸台（203）上，以实现精密的角位移传动。

Description

一种角位移微驱动机构 技术领域
本发明是属于机械设计与制造技术领域，特别涉及一种角位移微驱动机构。
 背景技术
机械零件加工后形成的表面形貌对零件的摩擦特性、接触刚度、疲劳强度、配合、振动及运转精度等有很大的影响，工件加工表面的微观形貌是判断工件质量的重要指标。因此，对工件的表面微观形貌进行测量具有重要意义。为了获得工件表面的微观形貌，采用非接触式测量方法的白光干涉轮廓仪是一种高精度获得工件表面粗糙度等参数的一种精密仪器。利用白光干涉轮廓仪测量工件粗糙度时，需要精密微转动工作台，以测量不同位置的粗糙度，但目前此类技术还有待进一步研究。随着光纤通信和光纤传感技术的发展，光电子器件的制备中也需要精密的角位移微动机构，但目前的微动角位移机构难以达到所需要的精度要求，且价格比较高。因此，亟需设计一种能实现精密微传动的角位移驱动机构。
 技术问题
本发明的目的是：为了实现精密的角位移微传动，解决目前缺乏精密角位移驱动机构存在的问题，提供了一种可以实现精密微转动的一种角位移微驱动机构。
 技术解决方案
为实现上述目的，本发明的技术方案是：一种角位移微驱动机构，包括输入轴、空心轴、齿轮I、弹性挡圈一、弹性挡圈二、套筒一、齿轮IV、动力输出轴、套筒二、轴承一、轴承端盖一、螺栓一、转动工作台、轴承二、轴承端盖二、螺栓二、齿轮III、轴套、中间轴、行星架、齿轮II、套筒三、支架、轴承三、轴承端盖三、螺栓三、轴承四、轴承端盖四、蜗轮、蜗杆、密封圈、螺栓四、挡圈、弹性垫圈、螺母、箱体，其特征在于：空心轴穿过箱体的轴孔通过空心轴上的固定轴段和固定凸台由螺栓四固定在箱体上，螺栓四同时固定轴承端盖四，齿轮I通过花键安装到空心轴上的花键二上，并通过弹性挡圈一压紧在空心轴上的空心轴凸台上，齿轮II与齿轮I为无侧隙啮合，无侧隙啮合可以保证有精密的传动精度，空心轴为中空形状，输入轴经空心轴通过轴承四安装在箱体上，蜗轮通过弹性挡圈二固定在输入轴的端部，蜗轮与蜗杆啮合，蜗杆的两端通过轴承安装在箱体上，蜗杆可以相对于箱体自由转动，行星架利用内花键安装在输入轴上的花键一上，由弹性挡圈二将行星架压紧在输入轴的输入轴凸台上，动力输出轴的轴段安装在输入轴的光孔中，所述动力输出轴的轴段与输入轴的光孔为过渡配合，过渡配合可以保证有精密的传动精度，齿轮IV通过花键安装在动力输出轴的花键三上，并由套筒一压紧在动力输出轴的动力输出轴凸台上，动力输出轴通过套筒二和轴承一安装在箱体上，轴承端盖一通过螺栓一固定在箱体上并压紧在轴承一的外圈上，动力输出轴的另一端有外螺纹，转动工作台安装在动力输出轴的外螺纹上，并由螺母、弹簧垫圈、挡圈紧固在动力输出轴上，所述转动工作台由固定座、薄弹簧片、工作台组成，薄弹簧片连接固定座和工作台，进行角位移驱动时，动力输出轴带动固定座转动，固定座通过薄弹簧片带动工作台转动，薄弹簧片能够消除运动中的振动，提高传动精密性，中间轴的左端安装在轴承二的内圈中，所述轴承二的外圈安装在支架上，轴承端盖二通过螺栓二固定在支架上并压紧轴承二的外圈，所述中间轴的右端安装在轴承三的内圈中，所述轴承三的外圈安装在支架上，轴承端盖三通过螺栓三固定在支架上并压紧轴承三的外圈，所述中间轴上设计有长花键和短花键，齿轮III通过花键与中间轴上的长花键配合，花键形式为渐开线花键，渐开线花键具有很好的对中性，提高了安装精度，齿轮II安装在中间轴上的短花键处，在套筒三和轴承三的内圈的作用下将齿轮II压紧在中间轴上的中间轴凸台上，所述中间轴的光轴段上安装行星架，行星架的光孔与中间轴的光轴段为过渡配合，以保证光孔与中光轴段紧密接触且能够自由相对转动。工作时的驱动力由蜗杆传入蜗轮，并通过蜗轮传递到输入轴，由输入轴带动行星机构运转。
 有益效果
本发明专利的有益效果是：本发明通过蜗轮蜗杆与行星齿轮传动结合，产生极大的传动比，实现纳米级微角位移的转动；本发明的一种角位移微驱动机构是一种纯粹机械式的角位移微驱动机构，不需要电容，不会产生电磁效应，也不会产生电热效应，因此这种机构不会对其他部件的运行产生影响，提高了设备的运转精度；本发明的一种角位移微驱动机构不采用压电陶瓷，成本低；转动工作台设计有薄弹簧片，薄弹簧片能够消除运动中的振动，实现高精密的传动。
 附图说明
图1 本发明一种角位移微驱动机构示意图。
图2 输入轴。
图3 动力输出轴。
图4 空心轴。
图5 中间轴。
图6 行星架。
图7 转动工作台剖面图。
图8 图7的A向视图。
图中，1、输入轴，2、空心轴，3、齿轮I，4、弹性挡圈一，5、弹性挡圈二，6、套筒一，7、齿轮IV，8、动力输出轴，9、套筒二，10、轴承一，11、轴承端盖一，12、螺栓一，13、转动工作台，14、轴承二，15、轴承端盖二，16、螺栓二，17、齿轮III，18、轴套，19、中间轴，20、行星架，21、齿轮II，22、套筒三，23、支架，24、轴承三，25、轴承端盖三，26、螺栓三，27、轴承四，28、轴承端盖四，29、蜗轮，30、蜗杆，31、密封圈，32、螺栓四，33、挡圈，34、弹性垫圈，35、螺母，36、箱体，101、花键一，102、弹性挡圈槽二，103、光孔，104、输入轴凸台，201、弹性挡圈槽一、202、花键二，203、空心轴凸台，204、固定轴段，205、固定凸台，801、花键三，802、外螺纹，803、光轴段，804、动力输出轴凸台，1301、固定座1301，1302、薄弹簧片，1303、工作台， 1901、长花键，1902、光轴段，1903、短花键，1904、中间轴凸台，2001、光孔，2002、倒角，2003、内花键，2004、倒角。
 本发明的最佳实施方式
以下结合附图和具体实施例对本发明作进一步的详细描述。
本发明提出了一种角位移微驱动机构，所述角位移微驱动机构，包括输入轴1、空心轴2、齿轮I3、弹性挡圈一4、弹性挡圈二5、套筒一6、齿轮IV7、动力输出轴8、套筒二9、轴承一10、轴承端盖一11、螺栓一12、转动工作台13、轴承二14、轴承端盖二15、螺栓二16、齿轮III17、轴套18、中间轴19、行星架20、齿轮II21、套筒三22、支架23、轴承三24、轴承端盖三25、螺栓三26、轴承四27、轴承端盖四28、蜗轮29、蜗杆30、密封圈31、螺栓四32、挡圈33、弹性垫圈34、螺母35、箱体36，其特征在于：空心轴2穿过箱体36的轴孔通过空心轴2上的固定轴段204和固定凸台205由螺栓四32固定在箱体36上，螺栓四32同时固定轴承端盖四28，齿轮I3通过花键安装到空心轴2上的花键二202上，并通过弹性挡圈一4 压紧在空心轴2上的空心轴凸台203上，所述齿轮II21与齿轮I3为无侧隙啮合，无侧隙啮合可以保证有精密的传动精度，空心轴2为中空形状，输入轴1经空心轴2通过轴承四27安装在箱体36上，蜗轮29通过弹性挡圈二5固定在输入轴1的端部，所述蜗轮29与蜗杆30啮合，蜗杆30的两端通过轴承安装在箱体36上，蜗杆30可以相对于箱体36自由转动，行星架20利用内花键2003安装在输入轴1上的花键一101上，由弹性挡圈二5将行星架20压紧在输入轴1的输入轴凸台104上，动力输出轴8的轴段803安装在输入轴1的光孔103中，所述动力输出轴8的轴段803与输入轴1的光孔103为过渡配合，过渡配合可以保证有精密的传动精度，齿轮IV7通过花键安装在动力输出轴8的花键三801上，并由套筒二9压紧在动力输出轴8的动力输出轴凸台804上，动力输出轴8通过套筒二9和轴承一10安装在箱体36上，轴承端盖一11通过螺栓一12固定在箱体36压紧在轴承一10的外圈上，动力输出轴8的另一端有外螺纹802，转动工作台13安装在动力输出轴8的外螺纹802上，并由螺母35、弹簧垫圈34、挡圈33紧固在动力输出轴8上，所述转动工作台13由固定座1301、薄弹簧片1302、工作台1303组成，薄弹簧片1302连接固定座1301和工作台1303，进行角位移驱动时，动力输出轴8带动固定座1301转动，固定座1301通过薄弹簧片1302带动工作台1303转动，薄弹簧片1302能够消除运动中的振动，提高传动精密性，中间轴19的左端安装在轴承二14的内圈中，所述轴承二14的外圈安装在支架23上，轴承端盖二15通过螺栓二16固定在支架23上并压紧轴承二14的外圈，所述中间轴19的右端安装在轴承三24的内圈中，所述轴承三24的外圈安装在支架23上，轴承端盖三25通过螺栓三26固定在支架23上并压紧轴承三24的外圈，所述中间轴19上设计有长花键1901和短花键1903，齿轮III17通过花键与中间轴19上的长花键1901配合，花键形式为渐开线花键，渐开线花键具有很好的对中性，提高了安装精度，齿轮II21安装在中间轴19上的短花键1903处，在套筒三22和轴承三24的内圈的作用下将齿轮II21压紧在中间轴19上的中间轴凸台1904上，所述中间轴19的光轴段1902上安装行星架20，行星架20的光孔2001与中间轴19的光轴段1902为过渡配合，以保证光孔2001与中光轴段1902紧密接触且能够自由相对转动。本发明的一种角位移微驱动机构，工作时的驱动力由蜗杆30传入蜗轮29，并通过蜗轮29传递到由输入轴1、星架20、中间轴19、齿轮I3、齿轮II21、齿轮III17、齿轮IV7、动力输出轴8组成的行星机构中，传递到蜗轮的动力首先传递到输入轴1上，由输入轴1带动行星架20转动，行星架20带动中间轴19转动，中间轴19转动带动齿轮II21、齿轮III17转动，齿轮III17齿轮IV7无侧隙啮合，最终将动力通过齿轮IV7、动力输出轴8传递到转动工作台13上，实现对转动工作台13的角位移微驱动，所述角位移微驱动机构中，设齿轮I3的齿数为z 3 ，齿轮II21的齿数为z 21，齿轮IV7的齿数为z 7，齿轮III17的齿轮的齿数为z 17，那么，输入轴1到动力输出轴8的传动比为i 18=1-z 17z 3/z 7/z 21，当z 7=100，z 17=101，z 21=100，z 3=99时，i 18=1-101x99/100/100=0.0001，设蜗轮蜗杆的传动比为i 1，那么从蜗杆30到动力输入再到转动工作台13的总的传动比为蜗轮蜗杆传动比与行星机构传动比之积i 总= i 1xi 18，由于蜗轮蜗杆的传动可以很大，甚至可以到千分之一，因此本发明的一种角位移驱动机构总传动比可达千万分之一，可以实现精密的角位移传动。
最后，还需要注意的是，以上举例仅是本发明的一种具体实施例。显然，本发明不仅仅限于以上实施例，还可以有许多变形。本领域的普通技术人员能从本发明的公开内容直接导出或联想到的所有变形，均应认为是本发明的保护范围。

Claims (2)

  1. 一种角位移微驱动机构，所述角位移微驱动机构，包括输入轴(1)、空心轴(2)、齿轮I(3)、弹性挡圈一(4)、弹性挡圈二(5)、套筒一(6)、齿轮IV(7)、动力输出轴(8)、套筒二(9)、轴承一(10)、轴承端盖一(11)、螺栓一(12)、转动工作台(13)、轴承二(14)、轴承端盖二(15)、螺栓二(16)、齿轮III(17)、轴套(18)、中间轴(19)、行星架(20)、齿轮II(21)、套筒三(22)、支架(23)、轴承三(24)、轴承端盖三(25)、螺栓三(26)、轴承四(27)、轴承端盖四(28)、蜗轮(29)、蜗杆(30)、密封圈(31)、螺栓四(32)、挡圈(33)、弹性垫圈(34)、螺母(35)，箱体(36)，其特征在于：空心轴(2)穿过箱体(36)的轴孔通过空心轴(2)上的固定轴段(204)和固定凸台(205)由螺栓四(32)固定在箱体(36)上，螺栓四(32)同时固定轴承端盖四(28)，齿轮(I3)通过花键安装到空心轴(2)上的花键二(202)上，并通过弹性挡圈一(4)压紧在空心轴(2)上的空心轴凸台(203)上,所述齿轮II(21)与齿轮I(3)为无侧隙啮合，空心轴（2）为中空形状，输入轴（1）经空心轴(2)通过轴承四(27)安装在箱体(36)上，蜗轮（29）通过弹性挡圈二（5）固定在输入轴(1)的端部，所述蜗轮(29)与蜗杆(30)啮合，蜗杆(30)的两端通过轴承安装在箱体(36)上，蜗杆(30)可以相对于箱体(36)自由转动，所述行星架(20)利用内花键(2003)安装在输入轴(1)上的花键一(101)上，由弹性挡圈二（5）将行星架(20)压紧在输入轴(1)的输入轴凸台(104)上，动力输出轴(8)的轴段(803)安装在输入轴(1)的光孔(103)中，所述动力输出轴(8)的轴段(803)与输入轴(1)的光孔(103)为过渡配合，齿轮IV(7)通过花键安装在动力输出轴(8)的花键三(801)上，并由套筒二(9)压紧在动力输出轴(8)的动力输出轴凸台(804)上，动力输出轴(8)通过套筒二(9)和轴承一(10)安装在箱体(36)上，轴承端盖一(11)通过螺栓一(12)固定在箱体(36)压紧在轴承一(10)的外圈上，动力输出轴(8)的另一端有外螺纹(802)，转动工作台(13)安装在动力输出轴(8)的外螺纹(802)上，并由螺母(35)、弹簧垫圈(340)、挡圈(33)紧固在动力输出轴(8)上。
  2. 根据权利要求1 所述的一种角位移微驱动机构，其特征在于，所述转动工作台(13)由固定座(1301)、薄弹簧片(1302)、工作台(1303)组成，薄弹簧片(1302)连接固定座(1301)和工作台(1303)，进行角位移驱动时，动力输出轴(8)带动固定座(1301)转动，固定座(1301)通过薄弹簧片(1302)带动工作台(1303)转动。
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