WO2021082847A1

WO2021082847A1 - Evaporation apparatus of vacuum film-plating machine

Info

Publication number: WO2021082847A1
Application number: PCT/CN2020/118421
Authority: WO
Inventors: 刘坤; 关天恩; 阮智伟; 胡强; 巴德纯
Original assignee: 东北大学
Priority date: 2019-10-30
Filing date: 2020-09-28
Publication date: 2021-05-06
Also published as: CN110629168B; CN110629168A

Abstract

An evaporation apparatus of a vacuum film-plating machine, comprising: an evaporation boat (10), a heating system, and a gas distribution system, the evaporation boat (10) comprising an evaporation boat inner layer (11), an evaporation boat outer layer (12), and a moving cover plate (13), the evaporation boat inner layer (11) being positioned between the evaporation boat outer layer (12) and the moving cover plate (13), a plurality of evaporation holes being disposed on the moving cover plate (13), and evaporation grooves corresponding to the evaporation holes being disposed on the evaporation boat inner layer (11); the heating system comprises a plurality of mutually independent evaporation sources (20), the evaporation sources being provided with an inner crucible (21), the inner crucible (21) being nested in the evaporation groove, and the evaporation source (20) being capable of heating an object placed in the inner crucible (21); a gas distribution pipeline (30) with a multi-stage binary structure is also provided to implement control of the uniformity of the gas intake volume, such that the evaporation gas and the external introduced gas can fully mix to form a uniform composite film. The evaporation sources (20) using a honeycomb structure have a high heating efficiency, and are capable of ensuring uniformity when heating and evaporating a large surface area of material, reducing sputtering and being suitable for large-area high-speed winding and film-plating processes.

Description

Evaporation device of vacuum coating machine

Technical field

This application relates to the technical field of vacuum coating, and mainly relates to an evaporation device of a vacuum evaporation coating machine.

Background technique

In recent years, with the development of optical thin film technology and semiconductor technology, the application of vacuum coating technology in production has become more and more extensive and important. Vacuum evaporation is the most common and widely used vacuum coating process. The physical process of vacuum evaporation includes: evaporation or sublimation of the deposition material into gaseous particles → rapid transport of gaseous particles from the evaporation source to the surface of the substrate → adhesion of gaseous particles to the substrate The surface nucleates and grows into a solid film→the film atoms are reconstructed or chemically bonded.

Put the substrate into a vacuum chamber, heat the film material by resistance, electron beam, laser, etc., to evaporate or sublimate the film material, and vaporize into particles (atoms, molecules or groups of atoms) with a certain energy (0.1～0.3eV). The gaseous particles are rapidly transported to the substrate in a substantially collision-free linear motion. Part of the particles that reach the surface of the substrate is reflected, and the other part is adsorbed on the substrate and diffused on the surface. A two-dimensional collision occurs between the deposited atoms to form clusters. It may evaporate after a short stay on the surface. The particle clusters continuously collide with diffused particles, or adsorb single particles, or release single particles. This process is repeated. When the number of aggregated particles exceeds a certain critical value, it becomes a stable nucleus, and then continues to adsorb and diffuse particles to gradually grow up, and finally through the contact and merging of adjacent stable nuclei, a continuous film is formed.

If large-area thin films need to be plated efficiently, a vacuum winding coating process is required. When large-area thin films are plated, a large number of substrates need to be heated. In the existing vacuum evaporation equipment, small-sized The evaporation boat heats the substrate, the evaporation is small and the heating efficiency is low, and the sputtering phenomenon is prone to occur during the evaporation process, which is not suitable for the large-area high-speed winding coating process.

Summary of the invention

One of the technical problems solved by the present application is an evaporation device used in a large-area high-speed winding coating process to reduce the sputtering phenomenon generated during the evaporation process.

In order to achieve the above objective, the present application provides an evaporation device for a vacuum coating machine, comprising: an evaporation boat, the evaporation boat includes an evaporation boat inner layer, an evaporation boat outer layer and a movable cover, the evaporation boat inner layer is located in the evaporation boat Between the outer layer of the boat and the movable cover plate, the movable cover plate is provided with a plurality of evaporation holes, and the inner layer of the evaporation boat is provided with evaporation grooves corresponding to the evaporation holes. Arranged in a honeycomb pattern;

The heating system includes a plurality of relatively independent evaporation sources, the evaporation source is provided with an inner crucible, the inner crucible is nested in the evaporation groove, and the evaporation source can be placed in the inner crucible. The objects in the crucible are heated;

An air distribution pipe is arranged at the upper end of the evaporation boat, the air distribution pipe is provided with an air inlet and a plurality of air outlets, the air inlet is connected to an external gas source, and the air outlet faces the Evaporation source.

Optionally, the evaporation source adopts high-frequency induction heating, the evaporation source includes several induction coils, a heat insulation layer, and an outer crucible, the inner crucible is stacked in the outer crucible, and the heat insulation layer is arranged in Between the side wall of the inner crucible and the side wall of the outer crucible, the induction coil is arranged between the side wall of the outer crucible and the inner layer of the evaporation boat.

Optionally, the evaporation source further includes a gap adjustment gasket, and the gap adjustment gasket is located between the inner crucible and the thermal insulation layer.

Optionally, the evaporation source is further provided with an electrode block, the electrode block is connected to an external AC power source, a plurality of the induction coils are connected in series to form a group of induction coil groups, and the plurality of groups of the induction coil groups are connected in parallel with each other. The coil assembly is connected to the electrode block, and the induction coil is inside a hollow pipe, and the hollow pipe can circulate a coolant to cool the induction coil.

Optionally, the inner layer of the evaporation boat is heated by resistance, the evaporation source is further provided with a pair of electrode blocks, the evaporation boat is located between the pair of electrode blocks and the end of the inner layer of the evaporation boat The part is connected with the electrode block, and the inner crucible and the inner layer of the evaporation boat are in contact with each other.

Optionally, the outer layer of the evaporation boat is provided with a groove, and the movable cover plate can be clamped in the groove.

Optionally, the air distribution pipe includes an air inlet pipe, a multi-stage shunt pipe, and an exhaust pipe that are connected in sequence, the exhaust pipe is parallel to the edge of the evaporation boat, and the air inlet is located at the On the intake pipeline, the air outlet is located on the exhaust pipeline.

Optionally, the horizontal plane on which the axis of the exhaust pipe is located and the axis of the air outlet form an included angle of 10°-70°, and the distance between adjacent air outlets is equal.

Optionally, the exhaust pipe includes a plurality of relatively independent exhaust branch pipes, each of the exhaust branch pipes can communicate with the corresponding branch pipeline, and the exhaust branch pipes are each provided with a plurality of the exhaust branch pipes. An air outlet, the diameter of the air outlet located in the middle of the exhaust branch pipe is smaller than the diameter of the air outlets located on both sides of the exhaust branch pipe, and each air outlet has the same amount of air output.

Optionally, the cross section of the inner crucible gradually expands from the bottom to the opening.

The beneficial effect of the application is that the application adopts the evaporation source of honeycomb structure, and the cross section of the crucible in each evaporation source gradually expands from the bottom to the opening, which increases the emission angle and mixing range of the evaporation gas, and can ensure the large-area heating of the material Uniformity during evaporation. At the same time, air distribution pipelines are installed on both sides. Each outlet on the air distribution pipeline can evenly and stably pass in the same flow of gas, ensuring the uniformity and adequacy of gas mixing during the chemical reaction. , To ensure the uniformity of the composite film generated, and the evaporation source also has high heating efficiency, the temperature of the material above the inner crucible is slightly lower than that of the material below the inner crucible, so it can avoid the excessive heating of the material surface and reduce the occurrence of sputtering. Suitable for large-area high-speed winding coating process

Description of the drawings

By reading the detailed description of the non-limiting embodiments with reference to the following drawings:

FIG. 1 is a schematic structural diagram of an evaporation device of a vacuum coating machine according to an embodiment of the application;

2 is a schematic diagram of a cross-sectional structure of an evaporation device of a vacuum coating machine using a high-frequency induction evaporation source according to an embodiment of the application;

FIG. 3 is a schematic cross-sectional structure diagram of another evaporation device of a vacuum coating machine using a resistance heating evaporation source provided by an embodiment of the application

Fig. 4 is a schematic structural diagram of an air distribution pipeline of an evaporation device of a vacuum coating machine according to an embodiment of the application.

FIG. 5 is a schematic diagram of a specific design case size of an exhaust pipe of an evaporation device of a vacuum coating machine according to an embodiment of the application.

10: evaporation boat; 11: evaporation boat inner layer; 12: evaporation boat outer layer; 13: movable cover plate; 14: groove;

20: evaporation source; 21: inner crucible; 22: induction coil; 23: insulation layer; 24: outer crucible; 25: gap adjustment gasket; 26: electrode block;

30: Air distribution pipeline; 31: Air inlet; 32: Air outlet; 33: Air inlet pipeline; 34: Diversion pipeline; 35: Exhaust pipeline; 36: Exhaust branch pipe.

Detailed ways

In order to better explain the application and facilitate understanding, the application will be described in detail below through specific implementations in conjunction with the drawings.

It should be noted that all directional indicators (such as up, down, left, right, front, back...) in the embodiments of this application are only used to explain the relationship between components in a specific posture (as shown in the accompanying drawings). If the relative position relationship, movement situation, etc. change, the directional indication will change accordingly.

In addition, the descriptions related to "first", "second", etc. in this application are only for descriptive purposes, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined with "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present application, "a plurality of" means at least two, such as two, three, etc., unless specifically defined otherwise.

In this application, unless otherwise clearly specified and limited, the terms "connected", "fixed", etc. should be understood in a broad sense. For example, "fixed" can be a fixed connection, a detachable connection, or a whole; It can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be an internal communication between two components or an interaction relationship between two components, unless specifically defined otherwise. For those of ordinary skill in the art, the specific meanings of the above-mentioned terms in this application can be understood according to specific circumstances.

The present application provides an evaporation device of a vacuum coating machine, which includes: an evaporation boat 10 body, a heating system for heating a target material, and a gas distribution pipe 30 connected with an external gas source for supplying gas.

The evaporation boat 10 includes an evaporation boat inner layer 11, an evaporation boat outer layer 12 and a movable cover 13. In this embodiment, the evaporation boat 10 is elongated as a whole, and the inside of the evaporation boat 10 is provided with grooves. The boat inner layer 11 and the movable cover plate 13 are located in the groove, the evaporation boat inner layer 11 is located between the evaporation boat outer layer 12 and the movable cover plate 13, and the movable cover plate 13 is provided with a plurality of evaporation holes (not marked). The inner layer 11 is provided with evaporation grooves (not marked) corresponding to the evaporation holes. The outer layer of the evaporation boat 12 is mainly used for isolation, protection and fixation. The outer layer 12 of the boat is coated with an insulating and heat-insulating coating to improve the safety of the structure;

The heating system includes a plurality of relatively independent evaporation sources 20. In this embodiment, the evaporation source 20 is provided with an inner crucible 21, the inner crucible 21 is nested in the evaporation groove, and the evaporation source 20 can be placed opposite to the inner crucible 21 The objects inside are heated;

The air distribution pipe 30 is arranged at the upper end of the evaporation boat 10, the air distribution pipe 30 is provided with an air inlet 31 and a plurality of air outlets 32, the air inlet 31 is connected to an external air source, and the air outlet 32 faces the evaporation source 20;

When you need to heat the target or other materials, you only need to put the materials in the inner crucible 21. According to actual needs, you can select different amounts of materials and put them in the multiple inner crucibles 21, so as to ensure that each material will be uniformly received. Heating does not cause uneven heating and reduces the sputtering phenomenon during the evaporation process. At the same time, the arrangement of the evaporation source 20 is honeycomb, which can make the gas evaporated after heating the material in a large area very uniform;

Further, the gas distribution pipe 30 is arranged above the evaporation boat 10, and the gas outlet 32 is directed to the evaporation source 20, which can combine the external air with the gas generated by the evaporation source 20 to evaporate the material to achieve a composite film coating. The requirements;

Furthermore, in order to meet the needs of coating large-area thin films, the arrangement of the evaporation sources 20 in the evaporation boat 10 is at least 3 rows, and the length and number of the arrangement and the radius of the evaporation holes can be changed according to the specific plating requirements. In order to meet the needs of coating a larger area.

As shown in FIG. 2, in this embodiment, the evaporation source 20 of the present application adopts high-frequency induction heating. This heating method is suitable for heating metal materials, and eddy currents are generated inside the metal materials in the inner crucible 21 by passing high-frequency alternating current. , A strong magnetic flux with an instantaneous change in polarity is generated in the induction coil 22, and the metal to be heat-treated is placed in the high-frequency coil, and the magnetic flux will penetrate the entire heated metal material. The inside of the induction heating object is in the opposite direction to the induction heating current, and a corresponding strong eddy current is generated. At the same time, because of the resistance in the metal material of the induction heating, strong Joule heat is generated, which causes the temperature of the induction heating object to rise rapidly, thereby To achieve the purpose of heat treatment and realize the heating of metal materials, the evaporation source 20 includes several induction coils 22, a heat insulation layer 23, and an outer crucible 24. The inner crucible 21 is stacked in the outer crucible 24, and the heat insulation layer 23 is set on the inner crucible 21. Between the side wall of the outer crucible 24 and the side wall of the outer crucible 24, it is used to isolate the heat of the inner crucible 21 to prevent the heat of the inner crucible 21 from affecting the induction coil 22, which is arranged on the side wall of the outer crucible 24 and the inner layer of the evaporation boat 11, in this embodiment, the inner crucible 21 is made of high-temperature resistant graphite, the heat insulation layer 23 is made of carbon felt with good heat insulation performance, and the induction coil 22 is made of copper with good conductivity. The coil diameter is 1.5 cm, and the coil turns The number is 5 turns. The inner crucible 21 of the evaporation source 20 has an inverted trapezoidal shape with a top circle diameter of 6 cm. The outer crucible 24 is cylindrical. The gap between the outer crucible 24 and the inner crucible 21 is filled with a heat-insulating material to form a heat-insulating layer 23 , Above the coil is the movable cover plate 13. When the induction coil 22 and the outer crucible 24 need to be installed or removed, the movable cover plate 13 is opened. The inner layer 11 of the evaporation boat is made of composite ceramics with good thermal and insulating properties to reduce the interference between the induction coils 22.

Wherein, the evaporation source 20 also includes a gap adjustment gasket 25, which is located between the inner crucible 21 and the outer crucible 24. In the embodiment, the gap adjustment gasket 25 uses a high temperature resistant asbestos gasket, and the outer crucible The material of 24 is alumina and other oxides. The gap adjustment gasket 25 is a thin metal sheet with a thickness. The height of the inner crucible is adjusted by stacking, reducing the evaporation difference, ensuring the uniformity of the evaporation of each evaporation source, and further When the evaporation source 20 is installed, there is often a gap between the inner crucible 21 and the outer crucible 24. If there is a gap, the air in the gap will expand after heating, which will affect the fit of the evaporation source 20 parts, and the gap adjustment gasket 25 can effectively eliminate the gap and prevent accidents during heating. At the same time, the gap adjustment gasket 25 can also provide a good support to the inner crucible 21 to prevent the inner crucible 21 from tilting.

Further, referring to Figures 1 and 2, the evaporation source 20 is also provided with electrode blocks 26, the electrode blocks 26 are connected to an external AC power source, the electrode blocks 26 are a pair, respectively located at the two ends of the evaporation boat 10, for sealing the outer layer of the evaporation boat 12. The evaporation source 20 provides a plurality of induction coils 22 in series to form a group of induction coils 22, and the groups of induction coils 22 are connected in parallel. In this embodiment, the inductive coils are connected in series according to eight adjacent groups to form an induction coil 22 group. , Each group of induction coils 22 are connected in parallel for heating, so the temperature of each part of the evaporation boat can be adjusted accurately according to the way that eight adjacent evaporation sources 20 are a group, and each evaporation source 20 is not installed. When the material is full, the crucible can be selectively heated to improve the heating efficiency and the flexibility of the coating length design, so as to realize the full and efficient use of heat and energy. At the same time, the induction coil 22 group is connected with the electrode block 26 to facilitate current Through the induction coil 22, the inside of the induction coil 22 is a hollow pipe, the hollow pipe can circulate coolant to cool the induction coil 22, and the induction coil 22 is cooled by cooling water to ensure that the coil can be in a high temperature environment working normally.

As shown in FIG. 3, in another embodiment, for non-metallic materials, the inner layer 11 of the evaporation boat is the entire heating resistor, which generates heat through the thermal effect of direct current, and then transmits the heat to the inner crucible 21 through the thermal conduction effect. Furthermore, the non-metallic materials in the inner crucible can be heated. The evaporation source 20 is also provided with a pair of electrode blocks 26. The pair of electrode blocks 26 are respectively connected to the positive and negative electrodes of the external DC power supply. The evaporation boat 10 is located on the pair of electrode blocks 26. The inner crucible 21 and the inner layer 11 of the evaporation boat are in contact with each other. The pair of electrode blocks 26 can not only be used to seal the outer layer 12 of the evaporation boat, but also It can play the role of connecting the power supply and the inner layer 11 of the evaporation boat. The direct current generated by the external DC power supply can flow to the inner layer 11 of the evaporation boat through the pair of electrode blocks 26, and then generate heat. It is heated by resistance and can be applied to those that cannot form eddy currents. Non-metallic materials.

Further, the outer layer 12 of the evaporation boat is provided with a groove 14, and the movable cover plate 13 can be clamped in the groove 14. In the embodiment, the movable cover plate 15 is mainly used to fix the inner layer 11 of the evaporation boat and the induction coil. 22. For structures such as the outer crucible 24, when replacing the above-mentioned structures, the above-mentioned components need to be disassembled in sequence, and the inner crucible 21 can be installed or unloaded with the movable cover plate 13 fixed.

Among them, see Figure 1, Figure 4, the air distribution pipe 30 includes an air inlet pipe 33, a multi-stage shunt pipe 34, and an exhaust pipe 35 that are connected in sequence. The exhaust pipe 35 is parallel to the edge of the evaporation boat 10, and the air inlet The port 31 is located on the air inlet pipe 33, and the air outlet 32 is located on the exhaust pipe 35. In this embodiment, the air distribution pipe 30 adopts a binary structure, and one inlet pipe 33 is connected to two first-stage shunt pipes. Road 34, one upper-level shunt pipe 34 is connected to two lower-level shunt pipes 34, the number of shunt pipe 34 is greater than 3, the path of each section of shunt pipe 34 is the same, and the pipe diameter of each stage pipe can be Similarly, it can also be gradually reduced. Finally, the external air is ejected from the air outlet 32 on the exhaust pipe 35. The multi-stage shunt pipe 34 can well control the pressure of the external air to ensure that the external air will not be over-pressured. Generally, the boil-off gas on the evaporation source 20 is blown away, and the outside gas cannot be mixed with the boil-off gas evaporated from the evaporation source 20 because the pressure of the outside gas is too small.

Further, the horizontal plane where the axis of the exhaust pipe 35 is located is at an angle of 10°-70° with the axis of the air outlet 32, and the distance between adjacent air outlets 32 is equal, in order to ensure that the external air can communicate with the evaporation source 20. The evaporated boil-off gas can be mixed well. The angle of the external gas sprayed from the gas outlet 32 needs to be inclined. The inclination direction is toward the evaporation source 20, and the horizontal plane where the axis of the exhaust pipe 35 lies and the outlet 32 The angle between the axes of 10°-70° can ensure that the external air can be injected into the top of the evaporation source 20. At the same time, the equally spaced air outlets 32 can ensure the uniformity of the external air in the evaporation boat 10, thereby ensuring that the evaporation gas is The quality of the mixing reaction of the external air.

Wherein, the exhaust pipe 35 includes a plurality of relatively independent exhaust branch pipes 36, and the exhaust branch pipes 36 can communicate with the corresponding branch pipe 34. Each exhaust branch pipe 36 is provided with a plurality of air outlets 32 located in the exhaust pipe. The diameter of the air outlet 32 in the middle of the branch pipe 36 is smaller than the diameter of the air outlet 32 located on both sides of the exhaust branch pipe 36. The aperture size of each air outlet 32 is positively correlated with the distance from the air outlet 32 to the middle of the exhaust branch pipe 36. That is, the farther the position from the middle of the exhaust branch pipe 36 is, the larger the diameter of the small hole is.

Furthermore, each gas outlet 32 has the same gas output, and each gas outlet 32 on the gas distribution pipeline 30 can evenly and stably pass the same flow of gas, which ensures the uniformity and adequacy of gas mixing during the chemical reaction process. , To ensure the uniformity of the generated composite film, because there is a pressure difference in the pipeline, when it is necessary to ensure that the gas output of the gas outlet 32 is equal, the valve can be used to limit the gas flow, or the diameter of the gas outlet 32 can be adjusted. Restrictions, do not use air outlets with the same diameter, thereby ensuring the uniformity of air outlet. In this embodiment, the total length of the designed heating device is 1.6m. If the air distribution pipeline adopts the same air pipe with a diameter of 8mm and is distributed in three stages, the effective length of each section of the exhaust branch pipe 36 is 20cm, and there are 8 sections in total. If it is necessary to make 10 holes on each exhaust branch pipe 36 and distribute them symmetrically, the adjacent distance between each hole is 2 cm. The exhaust branch pipe 36 is symmetrical in the middle, and there are 5 air holes on each side. Assuming that a total of 20 sccm of oxygen is required through calculation, and the working environment temperature is 500 ℃, to ensure the uniformity of the air, the exhaust branch pipe 36 takes the middle as the axis of symmetry, and each pore on both sides has a diameter from the middle to the two sides. D ₁ =2mm, d ₂ =2.05mm, d ₃ =2.09mm, d ₄ =2.12m, d ₅ =2.13mm. The schematic diagram of its dimensions is shown in Figure 5, and the specific calculation process is as follows:

Effective length of exhaust branch pipe 36: L=2×10 ^-2 m

Pipe diameter: D＝8×10 ^-3 m

Wall thickness: h=2×10 ^-3 m

Gas flow:

Air intake on one side of exhaust branch pipe 36:

Oxygen molecular weight:

Oxygen dynamic viscosity at 25°C: Z ₀ ＝2.055×10 ^-5 Pa/s

T ₀ ＝298k

C=112k

T=773K

Then the oxygen dynamic viscosity at 500°C is:

The calculation of characteristic parameter B is as follows:

by

Get:

Take d ₁ =2mm, substitute the above formula for calculation, and finally get d ₂ =2.05mm, d ₃ =2.09mm, d ₄ =2.12m, and d ₅ =2.13mm.

Through a series of calculations and diversions, it is ensured that the air flow rate of each air outlet 32 is almost equal, and the influence of pipeline friction and internal pressure difference on the air intake distribution is avoided. Considering the processing accuracy, the aperture size needs to be rounded. To achieve the distinguishing effect. Here, the calculation results of the numerical selection problem are difficult to realize processing, and the corresponding external conditions can be changed in the specific production to achieve the optimization of the uniformity of the intake air.

Further, the cross section of the inner crucible 21 gradually expands from the bottom to the opening. The structure of the inner crucible 21 preferably adopts an inverted trapezoidal shape but is not limited to this shape. It may also be an inverted truncated cone shape, an inverted arch shape, etc. The material above the inner crucible 21 The temperature is slightly lower than that of the material under the inner crucible 21, so that excessive heating of the surface of the material can be avoided. The cross section of the inner crucible 21 is parallel to the gap adjustment gasket 25. Among them, the cross section of the inner crucible 21 refers to the cross section perpendicular to the axis of the inner crucible 21. When the structure of the inner crucible 21 adopts a rounded frustum shape, the angle between the generatrix of the inner crucible and the axis cannot be too large or too small. It is recommended to introduce Between 5° and 45°, the emission angle and mixing range of the vaporized gas are increased, so that the vaporized substance produced is easily distributed to the substrate to be coated.

The above are only the implementation manners of the application, and are not used to limit the application. For those skilled in the art, this application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included in the scope of the claims of this application.

Industrial applicability

This application can avoid excessive heating of the material surface, reduce the occurrence of sputtering, and is applied to the scene of large-area high-speed winding coating, so it has industrial applicability.

Claims

An evaporation device of a vacuum coating machine, wherein the evaporation device includes:

The evaporation boat includes an inner layer of the evaporation boat, an outer layer of the evaporation boat, and a movable cover plate. The inner layer of the evaporation boat is located between the outer layer of the evaporation boat and the movable cover plate. The movable cover plate is provided with a plurality of Evaporation holes, the inner layer of the evaporation boat is provided with evaporation grooves corresponding to the evaporation holes, and the evaporation holes and the evaporation grooves are arranged in a honeycomb shape;

The heating system includes a plurality of relatively independent evaporation sources, the evaporation source is provided with an inner crucible, the inner crucible is nested in the evaporation groove, and the evaporation source can be placed in the inner crucible. The objects in the crucible are heated;

An air distribution pipe is arranged at the upper end of the evaporation boat, the air distribution pipe is provided with an air inlet and a plurality of air outlets, the air inlet is connected to an external gas source, and the air outlet faces the Evaporation source.
The evaporation device of the vacuum coating machine according to claim 1, wherein: the evaporation source adopts high-frequency induction heating, and the evaporation source includes a plurality of induction coils, a heat insulation layer, and an outer crucible, and the inner crucible is overlapped with In the outer crucible, and the heat insulating layer is arranged between the side wall of the inner crucible and the side wall of the outer crucible, and the induction coil is arranged in the side wall of the outer crucible and the evaporation boat Between layers.
The evaporation device of the vacuum coating machine according to claim 2, wherein: the evaporation source further comprises a gap adjustment gasket, and the gap adjustment gasket is located between the inner crucible and the heat insulating layer.
The evaporation device of a vacuum coating machine according to claim 3, wherein: the evaporation source is further provided with an electrode block, the electrode block is connected to an external AC power supply, and a plurality of the induction coils are connected in series to form a group of induction coils, and The induction coil groups are connected in parallel with each other, the induction coil groups are connected to the electrode blocks, the induction coils are internally hollow pipes, and the hollow pipes can circulate a coolant to cool the induction coils .
The evaporation device of a vacuum coating machine according to claim 1, wherein: the inner layer of the evaporation boat is resistance heating, the evaporation source is also provided with a pair of electrode blocks, and the evaporation boat is located in the pair of the The electrode blocks and the end of the inner layer of the evaporation boat are connected to the electrode blocks, and the inner crucible and the inner layer of the evaporation boat are in contact with each other.
The evaporation device of a vacuum coating machine according to any one of claims 1 to 5, wherein: the outer layer of the evaporation boat is provided with a groove, and the movable cover plate can be clamped in the groove.
The evaporation device of the vacuum coating machine according to any one of claims 1 to 5, wherein: the air distribution pipe includes an intake pipe, a multi-stage shunt pipe, and an exhaust pipe that are connected in sequence, and the exhaust pipe The path is parallel to the edge of the evaporation boat, the air inlet is located on the air inlet pipe, and the air outlet is located on the exhaust pipe.
The evaporation device of the vacuum coating machine according to claim 7, wherein: the horizontal plane where the axis of the exhaust pipe is located and the axis of the air outlet are at an angle of 10°-70°, adjacent to the outlet The spacing between the air ports is equal.
The evaporation device of a vacuum coating machine according to claim 7, wherein: the exhaust pipe includes a plurality of relatively independent exhaust branch pipes, and the exhaust branch pipes can communicate with the corresponding branch pipes, The exhaust branch pipe is provided with a plurality of the air outlets, and the diameter of the air outlet located in the middle of the exhaust branch pipe is smaller than the diameter of the air outlets located on both sides of the exhaust branch pipe. The air output of each of the air outlets is equal.
The evaporation device of the vacuum coating machine according to any one of claims 1 to 5, wherein: the cross section of the inner crucible gradually expands from the bottom to the opening.