WO2021082617A1

WO2021082617A1 - Six-dimensional force sensor calibration apparatus and calibration method

Info

Publication number: WO2021082617A1
Application number: PCT/CN2020/108557
Authority: WO
Inventors: 李云; 马珂幸; 姚举禄; 黄肖飞
Original assignee: 南京神源生智能科技有限公司; 南京溧航仿生产业研究院有限公司
Priority date: 2019-10-30
Filing date: 2020-08-12
Publication date: 2021-05-06
Also published as: CN210625934U

Abstract

A six-dimensional force sensor calibration device, comprising a rack (1), a loading device (2), a rotary device (3), and a moving platform (4), the rack (1) is arranged on the ground, the loading device (2) is arranged in the rack (1), the moving platform (4) is arranged on the top of the rack (1), the rotary device (3) is arranged on the moving platform (4), a sensor to be measured (5) is arranged on the rotary device (3), the sensor to be measured (5) is connected to the loading device (2) by means of a sensor loading rod (305), and the loading device (2) can be driven by an electric motor to automatically load weights on the sensor to be measured (5). The calibration efficiency can be improved. A six-dimensional force sensor calibration method, wherein stress points of the sensor to be measured (5) are all located on the central plane of the sensor to be measured (5) during calibration, such that the calibration precision is further improved.

Description

Calibration device and calibration method for six-dimensional force sensor

Technical field

The invention relates to a six-dimensional force sensor, in particular to a calibration device and a calibration method for the six-dimensional force sensor.

Background technique

The six-dimensional force sensor can simultaneously detect full force information in three-dimensional space, namely three-dimensional force information (Fx, Fy, Fz) and three-dimensional torque information (Mx, My, Mz), which are mainly used in force and torque position control situations, such as contour tracking, Precision assembly, hand coordination, six-dimensional force information detection in the test system, etc.

The measurement accuracy of the sensor is one of the most important performance indicators for evaluating the sensor, and its errors include random errors and systematic errors. For the six-dimensional force sensor, the random error is mainly caused by internal signal processing circuits, quantization errors, external interference and other factors; the system error is mainly determined by the calibration accuracy of the calibration system. The six-dimensional force sensor is due to its own mechanical The complexity of the structure, as well as the errors in the manufacturing and bonding of strain gauges in the sensor, the mutual coupling between the input and output channels of the sensor, it is necessary to determine the coupling relationship between the input and output in each direction through calibration, and calculate the coupling matrix , And compensate the impact of coupling between dimensions by decoupling. Therefore, the design of the sensor calibration device and the research of the calibration method are very important, and its calibration accuracy will directly affect its measurement accuracy during use.

The calibration of the six-dimensional force sensor is to read the output of the six-dimensional force sensor when the six-dimensional force sensor is calibrated in various states by applying independent force/torque in the space coordinate system to the six-dimensional force sensor, or multiple linearly independent forces/torques. , Calculate the decoupling matrix. According to actual application requirements, the calibration of the six-dimensional force sensor is divided into static calibration and dynamic calibration. Static calibration is mainly used to detect the static performance indicators of the sensor, such as static sensitivity, nonlinearity, hysteresis, repeatability, etc.; dynamic calibration is mainly used for Detect the dynamic characteristics of the sensor, such as dynamic sensitivity, frequency response, and natural frequency.

technical problem

At present, the loading methods used in the static calibration of the six-dimensional force sensor mainly include the force ring type and the weight type. Among them, the force-measuring ring loading adopts the ejector method, and the load force value is read by the force-measuring ring. This kind of loading allows a larger load force, but the reading accuracy is low, and the high-precision force ring is expensive. Weight calibration is to use grade weights to provide standard loading force, directly use grade weights as a reference, the force value is more accurate, and it is commonly used in the calibration of medium-range and small-range six-dimensional force sensors.

Technical solutions

Aiming at the above shortcomings of the prior art, a calibration device for a six-dimensional force sensor is proposed, which can be driven by a motor to automatically load weights on the sensor to be tested. Can improve the calibration efficiency.

The specific technical solution is a six-dimensional force sensor calibration device, which includes a frame (1), a loading device (2), a slewing device (3) and a mobile platform (4). The frame (1) is placed on the ground, The loading device (2) is installed in the rack (1), the mobile platform (4) is installed on the top of the rack (1), the slewing device (3) is installed on the mobile platform (4), and the sensor to be tested (5) is installed On the slewing device (3), the sensor to be tested (5) and the loading device (2) are connected through a sensor loading rod (305).

The loading device (2) includes a loading fixing frame (201), a loading rod (202), a driving mechanism (203), a transmission mechanism (204) and a weight loading device (205). The loading fixing frame (201) is set horizontally, and the loading is fixed. Both ends of the frame (201) are installed on the frame (1), the weight loading device (205) is installed on the loading fixing frame (201) and is located inside the frame (1), and the driving mechanism (203) is located on the weight Below the loading device (205), one end of the transmission mechanism (204) is connected to the output of the driving mechanism (203), the other end of the transmission mechanism (204) is connected to the input of the weight loading device (205); one end of the loading rod (202) is connected to the weight The output of the loading device (205), the other end of the loading rod (202) is connected to the sensor loading rod (305).

The mobile platform (4) includes the X-direction mobile platform (401) and the Y-direction mobile platform (402), the X-direction mobile platform (401) and the Y-direction mobile platform (402) are connected, and the X-direction mobile platform (401) is installed in the rack (1) The top; the slewing device (3) is installed on the Y-direction moving platform (402). The slewing device (3) includes a vertical seat (301), a first shaft seat (302), a second shaft seat (303), Rotary platform (306) and sensor fixing plate (304), the bottom of the vertical seat (301) is installed on the Y-direction moving platform (402), and the first shaft seat (302) fits the plane of one side of the vertical seat (301) Installation, a horizontal rotating shaft is installed on the first shaft seat (302), the second shaft seat (303) is sleeved on the horizontal rotating shaft and can rotate around the horizontal rotating shaft, and the rotary platform (306) is installed on the second shaft seat (303), the rotary axis of the rotary platform (306) is perpendicular to the X-direction rotary axis, the sensor fixing plate (304) is installed on the rotary platform (306), and the sensor under test (5) is installed on the sensor fixing plate (304) , The center hole on the sensor (5) to be tested is concentric with the rotation axis of the rotary platform (306), and the sensor loading rod (305) is installed on the sensor (5) to be tested.

Sensor loading rod (305) includes mounting plate (501), X-direction force transmission rod (502), Y-direction force transmission rod (503) and Z-direction force transmission rod (504), Z-direction force transmission rod (504) is fixed vertically On the mounting plate (501), a circle of bolt through holes is opened on the mounting plate (501), a circle of bolt through holes are located on the same circle, and the Z-direction force transmission rod (504) is installed on the center of the circle where all the bolt through holes are located. ), around the central hole of the sensor (5) to be tested, a circle of screw holes that coincide with the circle where the bolt through hole is located is arranged; on the edge of the mounting plate (501), a vertical X-direction force plate and a Y-direction are provided For the force plate, the X-direction force transmission rod (502) is vertically arranged on the X-direction force plate, and the Y-direction force transmission rod (503) is vertically arranged on the Y-direction force plate.

In the calibration device of the present invention, the loading device (2) can automatically load the weights of the sensor (5) to be tested through a motor drive. Can improve the calibration efficiency.

The technical solution further limited by the present invention is.

The driving mechanism (203) is a motor. The transmission mechanism (204) includes a worm gear mechanism and a ball screw nut pair. The input of the worm gear mechanism is connected to the motor shaft, and the output of the worm gear mechanism is connected to the ball screw in the ball screw nut pair. The screw nut in the ball screw nut pair is installed on the weight loading device (205).

The weight loading device (205) includes a support plate (205-1), a loading sleeve (205-2), multiple columns (205-3), a loading plate (205-5) and multiple weights (205-6) ), multiple uprights (205-3) penetrate through the support plate (205-1), the upper and lower ends of the multiple uprights (205-3) are respectively fixed to the loading fixing frame (201), the screw in the ball screw nut pair The nut is fixed on the back of the support plate (205-1); the loading sleeve (205-2) is installed vertically on the support plate (205-1), and a plurality of loading sleeves (205-2) are arranged on the inner wall Suspension block (205-4) used to place weights, multiple suspension blocks (205-4) are arranged in multiple spiral lines, weights (205-6) are placed on the suspension block (205-4) layered, Each layer of weights (205-6) is placed on multiple suspension blocks (205-4); the loading rod (202) penetrates all the weights (205-6) and is connected to the loading plate (205-5), the loading plate (205) -5) Located under the lowest weight (205-6), the loading plate (205-5) is located above the support plate (205-1).

The present invention provides a calibration method for a calibration device of a six-dimensional force sensor, which includes the following steps.

Step 1) Assemble the calibration device.

Step 2) Fix the sensor (5) to be tested on the sensor fixing plate (304).

Step 3) Install the sensor loading rod (305), match the center hole of the sensor to be tested (5) with the Fz loading rod of the sensor loading rod (305), and set the x direction and y direction of the sensor to be tested (5) with the sensor respectively The Fx and Fy directions of the loading rod (305) are parallel, and finally the sensor loading rod (305) is fixed on the sensor (5) to be tested with bolts.

Step 4) Adjust the initial position, adjust the mobile platform (4), keep the Fx direction vertical, and wait for calibration.

Step 5) Fx direction calibration, the X-direction force transmission rod (502) and the top of the loading rod (202) are fixed, and the loading device (2) loads the loading rod (202). At this time, the force state of the sensor (5) under test is Fx, and then collect the output data of the sensor (5) under test in each direction.

Step 6) Calibrate in the My direction, adjust the mobile platform (4), move the Z-direction transfer rod (504) to just above the loading device (2), and fix the Z-direction transfer rod (504) and the top of the loading rod (202) , The loading device (2) loads the loading rod (202), at this time the force state of the sensor (5) under test is My, and then the output data of the sensor (5) under test is collected in various directions.

Step 7) Calibrate in the Mz direction, adjust the mobile platform (4), move the Y-direction transfer rod (503) to the top of the loading device (2), and fix the Y-direction transfer rod (503) and the top of the loading rod (202) , The loading device (2) loads the loading rod (202), at this time the force state of the sensor (5) under test is Mz, and then the output data of the sensor (5) under test is collected in various directions.

Step 8) Fy direction calibration, the rotating platform (306) rotates 90° counterclockwise, the Fx direction remains vertical, waiting for calibration; the Y-direction transfer rod (503) and the top of the loading rod (202) are fixed, the loading device (2) is aligned The loading rod (202) performs loading, at this time the force state of the sensor (5) under test is Fy, and then the output data of the sensor (5) under test is collected in various directions.

Step 9) Calibrate in the Mx direction, adjust the mobile platform (4), move the Z-direction transfer rod (504) to directly above the loading device (2), and fix the Z-direction transfer rod (504) and the top of the loading rod (202) , The loading device (2) loads the loading rod (202), at this time the force state of the sensor (5) under test is Mx, and then the output data of the sensor (5) under test is collected in various directions.

Step 10) Fz direction calibration, the second shaft base (303) rotates around the horizontal rotation axis, move the Z-direction force transmission rod (504) to the vertical downward, adjust the mobile platform (4), and set the Z-direction force transmission rod ( 504) Move to the top of the loading device (2), the Z-direction force transmission rod (504) and the top of the loading rod (202) are fixed, the loading device (2) loads the loading rod (202), and the sensor under test ( 5) The force state is Fz, and then collect the output data of the sensor (5) under test in each direction.

Step 11) Process and analyze the output data measured in the above steps to obtain the decoupling matrix of the sensor (5) under test, and complete the calibration of the sensor (5) under test.

In the calibration method of the present invention, the stress points of the sensor (5) to be tested are all located on the center plane of the sensor to be tested during calibration, which further improves the accuracy of the calibration.

Collecting the output data of the sensor (5) under test is completed by connecting the signal end of the sensor (5) under test to a data acquisition card. The use of a data acquisition card to collect the output data of the sensor (5) under test in each stress state is a conventional technology in the technical field.

Beneficial effect

The beneficial effects of the present invention are.

1. In this calibration device, the loading device can automatically load weights for the sensor under test through a motor drive. Can improve the calibration efficiency.

2. In this calibration method, the force points of the sensor to be tested are all located on the center plane of the sensor to be tested during calibration, which further improves the accuracy of the calibration.

Description of the drawings

Figure 1 is a schematic diagram of the structure of the present invention.

Figure 2 is a schematic diagram of the assembly of the loading device and the frame.

Figure 3 is a front view of the weight loading device.

Figure 4 is a cutaway view of the loading sleeve.

Figure 5 is a schematic diagram of the weight.

Figure 6 is a cut-away view of the weight loading device.

Figure 7 is a schematic diagram of the structure of the mobile platform.

Figure 8 is a schematic diagram of the structure of the slewing device.

Fig. 9 is a schematic diagram of a state in which the second shaft seat in Fig. 8 rotates a certain angle around the horizontal rotation axis.

Figure 10 is a schematic diagram of the position where the sensor loading rod and the sensor are fixed together on the rotary platform.

Fig. 11 is a state diagram of Fig. 10 after rotating 90° counterclockwise.

Figure 12 is a schematic diagram of the structure of the sensor loading rod.

Figure 13 is a schematic diagram showing the positions of the sensor loading rod 305 and the sensor to be tested installed on the rotating device for Fx direction calibration.

Figure 14 is a schematic diagram of the position of the sensor loading rod 305 and the sensor to be tested installed on the rotating device for the My direction calibration.

Figure 15 is a schematic diagram of the position of the sensor loading rod 305 and the sensor to be tested installed on the rotating device for the Mz direction calibration.

Figure 16 is a schematic diagram of the Fy direction calibration, the sensor loading rod 305 and the sensor to be tested are installed on the rotating device.

Figure 17 is a schematic diagram of the position of the Mx direction calibration, the sensor loading rod 305 and the sensor to be tested installed on the revolving device.

Figure 18 is a schematic diagram of the Fz direction calibration, the sensor loading rod 305 and the sensor to be tested are installed on the rotating device.

Embodiments of the present invention

The technical solution of the present invention will be described in detail below, but the protection scope of the present invention is not limited to the embodiments.

In order to make the objectives, technical solutions, and advantages of the present invention clearer, the following further describes the present invention in detail with reference to FIGS. 1-18 and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not used to limit the present invention.

Example 1.

As shown in Figure 1, a calibration device for a six-dimensional force sensor includes a frame 1, a loading device 2, a slewing device 3, and a mobile platform 4. The frame 1 is placed on the ground, and the loading device 2 is installed in the frame 1. , The mobile platform 4 is installed on the top of the frame 1, the slewing device 3 is installed on the moving platform 4, the sensor 5 to be tested is installed on the slewing device 3, and the sensor 5 to be tested and the loading device 2 are connected by a sensor loading rod 305.

As shown in Fig. 1, the frame 1 in this embodiment is a steel frame formed by welding angle steel or section steel.

As shown in Figure 2, the loading device 2 includes a loading fixing frame 201, a loading rod 202, a driving mechanism 203, a transmission mechanism 204, and a weight loading device 205. The loading fixing frame 201 is arranged horizontally, and both ends of the loading fixing frame 201 are installed at On the frame 1, the weight loading device 205 is installed on the loading fixing frame 201 and located inside the frame 1, the driving mechanism 203 is located below the weight loading device 205, one end of the transmission mechanism 204 is connected to the output of the driving mechanism 203, and the transmission mechanism 204 The other end is connected to the input of the weight loading device 205; one end of the loading rod 202 is connected to the output of the weight loading device 205, and the other end of the loading rod 202 is connected to the sensor loading rod 305.

As shown in Figure 2, the driving mechanism 203 is a motor, and the transmission mechanism 204 includes a worm gear mechanism and a ball screw nut pair. The input of the worm gear mechanism is connected to the motor shaft, and the output of the worm gear mechanism is connected to the ball screw in the ball screw nut pair. The screw 204-2 and the screw nut 204-1 in the ball screw nut pair are installed on the weight loading device 205.

As shown in Figures 3, 4, 5, and 6, the weight loading device 205 includes a support plate 205-1, a loading sleeve 205-2, a plurality of uprights 205-3, a loading plate 205-5 and a plurality of weights 205- 6. Multiple uprights 205-3 penetrate through the support plate 205-1, the upper and lower ends of the multiple uprights 205-3 are respectively fixed to the loading fixing frame 201, and the screw nut 204-1 in the ball screw nut pair is fixed on the support plate On the back of the 205-1; the loading sleeve 205-2 is installed vertically on the support plate 205-1, and a plurality of suspension blocks 205-4 for placing weights are arranged on the inner wall of the loading sleeve 205-2. The two suspension blocks 205-4 are arranged in multiple spiral lines. The weight 205-6 is placed on the suspension block 205-4 in layers, and each layer of weight 205-6 is placed on the multiple suspension blocks 205-4; the loading rod 202 It passes through all the weights 205-6 and is connected to the loading plate 205-5. The loading plate 205-5 is located below the lowermost weight 205-6, and the loading plate 205-5 is located above the support plate 205-1.

As shown in Fig. 5, a plurality of support blocks 205-6-1 are extended on the outer circumference of the weight 205-6, and the support block 205-6-1 of the weight is movably connected with the suspension block 205-4 of the loading pipe.

During the loading process of the weight loading device 205, the motor drives the worm gear mechanism and the ball screw. The screw nut 204-1 on the screw is fixed on the support plate 205-1, and the support plate is driven to move downward through the screw nut. Thereby driving the loading sleeve 205-2 to move downwards, thereby driving the weight 205-6 to move downwards. When the weight at the lowest level of the loading plate 205-5 is pressed against the loading plate, the support block 205-6 of the weight is pressed against the loading plate. 1 Disengage from the suspension block 205-4 of the loading sleeve 205-2, the weight of the weight is all pressed on the loading plate to realize the loading of the loading plate. When the loading sleeve 205-2 continues to move downwards, the penultimate The weight continues to move downwards, and after pressing the bottom weight, it leaves the loading sleeve 205-2 to achieve further loading, and so on, to achieve loading of different magnitudes of force.

During the unloading process of the weight loading device 205, the motor drives the worm gear mechanism and the ball screw. The screw nut drives the support plate to move upwards, thereby driving the loading sleeve 205-2 to move upwards. When set in the loading sleeve 205-2 After the upper suspension block 205-4 comes into contact with the weight support block 205-6-1, it drives the weight away from the loading plate, thereby realizing unloading.

The installation relationship between the suspension block 205-4 on the loading sleeve 205-2 and the weight support block 205-6-1 mentioned in this embodiment is a known technology in the weight loading device in the prior art .

As shown in Figure 7, the mobile platform 4 includes an X-direction mobile platform 401 and a Y-direction mobile platform 402. The X-direction mobile platform 401 and the Y-direction mobile platform 402 are connected. The X-direction mobile platform 401 is installed on the top of the frame 1; Installed on the Y-direction moving platform 402.

In this embodiment, the mobile platform 4 is a known technology, and its function is linear movement in the X and Y directions.

As shown in Figures 8 and 9, the turning device 3 includes a vertical seat 301, a first shaft seat 302, a second shaft seat 303, a turning platform 306, and a sensor fixing plate 304. The bottom of the vertical seat 301 is mounted with a Y-direction moving platform 402. On the top, the first shaft seat 302 is mounted on the plane of one side of the vertical seat 301, a horizontal rotating shaft is installed on the first shaft seat 302, and the second shaft seat 303 is sleeved on the horizontal rotating shaft and can rotate around the horizontal rotating shaft. Rotate, the rotary platform 306 is mounted on the second shaft seat 303, the rotary axis of the rotary platform 306 is perpendicular to the X-direction rotary axis, the sensor fixing plate 304 is mounted on the rotary platform 306, and the sensor 5 to be tested is mounted on the sensor fixing plate 304, The center hole on the sensor 5 to be tested is concentric with the rotation axis of the rotating platform 306, and the sensor loading rod 305 is installed on the sensor 5 to be tested.

As shown in Figures 10 and 11, the sensor loading rod and the sensor are fixed on the rotating platform together. As shown in Figure 11, the position of this state diagram can measure data in three different directions, namely Fx, My and Mz. Figure 2 is obtained by rotating 90° counterclockwise in Figure 11. The position of this state diagram can measure data in three different directions, namely Fy, Mx and Fz.

As shown in Figure 12, the sensor loading rod 305 includes a mounting plate 501, an X-direction force transmission rod 502, a Y-direction force transmission rod 503, and a Z-direction force transmission rod 504. The Z-direction force transmission rod 504 is vertically fixed on the mounting plate 501, A circle of bolt through holes is provided on the mounting plate 501, and a circle of bolt through holes is located on the same circle. The Z-direction force transmission rod 504 is installed at the center of the circle where all the bolt through holes are located, and the center hole of the sensor 5 to be tested is set around A circle of screw holes coincides with the circle where the bolt through hole is located; a vertical X-direction force plate and a Y-direction force plate are extended on the edge of the mounting plate 501, and the X-direction force transmission rod 502 is vertically arranged in the X-direction. On the force plate, the Y-direction force transmission rod 503 is vertically arranged on the Y-direction force plate.

As shown in FIG. 10, the loading device 2 is installed on the X-direction force transmission rod 402 to detect Fx and Mz, and the loading device 2 is installed on the Z-direction force transmission rod 404 to detect My.

As shown in FIG. 11, the loading device 2 is installed on the Y-direction force transmission rod 403 to measure Fy and Mx, and the loading device 2 is installed on the Z-direction force transmission rod 404 to measure Fz.

The sensor 5 to be tested is cylindrical. The center hole of the sensor 5 to be tested is matched with the Fz loading rod of the sensor loading rod 305, and the x and y directions of the sensor 5 to be tested are adjusted to be parallel to the Fx and Fy directions of the sensor loading rod 305. Then use bolts to fix the sensor loading rod 305 to the sensor 5 to be tested. Specifically, the Z-direction force transmission rod 504 is vertically fixed on the mounting plate 501. The mounting plate 501 is provided with a circle of bolt through holes, and a circle of bolt through holes are located in the same On the circumference, the Z-direction force transmission rod 504 is installed at the center of the circle where all the bolt through holes are located, and a circle of screw holes that coincide with the circle where the bolt through holes are located is arranged around the center hole of the sensor 5 to be tested.

In this calibration device, the loading device 2 can be driven by a motor to automatically load the weights of the sensor 5 under test. Can improve the calibration efficiency.

The calibration method of the six-dimensional force sensor calibration device of this embodiment includes the following steps.

Step 1) Assemble the calibration device.

Step 2) Fix the sensor 5 to be tested on the sensor fixing plate 304.

Step 3) Install the sensor loading rod 305, match the center hole of the sensor 5 to be tested with the Fz loading rod of the sensor loading rod 305, and set the x direction and y direction of the sensor 5 to be tested with the Fx and Fy directions of the sensor loading rod 305 respectively Parallel, and finally fix the sensor loading rod 305 on the sensor 5 to be tested with bolts.

Step 4) Adjust the initial position, adjust the mobile platform 4, keep the Fx direction vertical, and wait for calibration.

Step 5) Fx direction calibration, the X-direction force transmission rod 502 is fixed to the top of the loading rod 202, and the loading device 2 loads the loading rod 202. At this time, the force state of the sensor 5 under test is Fx, and then the various directions of the sensor under test 5 are collected The output data; shown in Figure 13.

Step 6) Calibrate the My direction, adjust the mobile platform 4, move the Z-direction force transmission rod 504 to just above the loading device 2, the Z-direction force transmission rod 504 and the top of the loading rod 202 are fixed, and the loading device 2 loads the loading rod 202 At this time, the force state of the sensor 5 to be tested is My, and then the output data of the sensor 5 to be tested in various directions is collected; as shown in FIG. 14.

Step 7) Calibrate in the Mz direction, adjust the mobile platform 4, move the Y-direction force transmission rod 503 to the top of the loading device 2, the Y-direction force transmission rod 503 and the top of the loading rod 202 are fixed, and the loading device 2 loads the loading rod 202 At this time, the force state of the sensor 5 to be tested is Mz, and then the output data of the sensor 5 to be tested in various directions are collected; as shown in FIG. 15.

Step 8) Calibration in the Fy direction, the rotating platform 306 rotates 90° counterclockwise, the Fx direction remains vertical, waiting for calibration; the Y-direction force transmission rod 503 is fixed on the top of the loading rod 202, and the loading device 2 loads the loading rod 202. At this time The force state of the sensor 5 to be tested is Fy, and then the output data of the sensor 5 to be tested in various directions are collected; as shown in FIG. 16.

Step 9) Calibrate in the Mx direction, adjust the mobile platform 4, move the Z-direction force transmission rod 504 to directly above the loading device 2, and the Z-direction force transmission rod 504 and the top of the loading rod 202 are fixed, and the loading device 2 loads the loading rod 202 At this time, the force state of the sensor 5 to be tested is Mx, and then the output data of the sensor 5 to be tested in various directions is collected; as shown in FIG. 17.

Step 10) Fz direction calibration, the second shaft base 303 rotates around the horizontal rotation axis, move the Z direction force transmission rod 504 to the vertical downward, adjust the mobile platform 4, move the Z direction force transmission rod 504 to the loading device 2 Right above, the Z-direction force transmission rod 504 is fixed to the top of the loading rod 202, and the loading device 2 loads the loading rod 202. At this time, the force state of the sensor 5 to be tested is Fz, and then the output data of the sensor 5 to be tested in various directions is collected; As shown in Figure 18.

In step 11, the output data measured in the above steps are processed and analyzed to obtain the decoupling matrix of the sensor 5 to be tested, and the calibration of the sensor 5 to be tested is completed.

In the calibration method of this embodiment, the stress points of the sensor 5 to be tested are all located on the center plane of the sensor to be tested during calibration, which further improves the accuracy of the calibration.

Sequence Listing Free Content

As mentioned in the calibration method of this embodiment, the output data measured in the calibration method is processed and analyzed to obtain the decoupling matrix of the sensor 5 under test. This algorithm process is a well-known algorithm in the technical field, and the specific algorithm is not limited in the present invention.

The above embodiments are only to illustrate the technical ideas of the present invention, and cannot be used to limit the scope of protection of the present invention. Any changes made on the basis of the technical solutions based on the technical ideas proposed by the present invention fall into the scope of protection of the present invention. Inside.

Claims

A calibration device for a six-dimensional force sensor, which is characterized in that it comprises a frame (1), a loading device (2), a slewing device (3) and a mobile platform (4). The frame (1) is placed on the ground and the loading The device (2) is installed in the rack (1), the mobile platform (4) is installed on the top of the rack (1), the slewing device (3) is installed on the mobile platform (4), and the sensor to be tested (5) is installed on the On the slewing device (3), the sensor to be tested (5) and the loading device (2) are connected through a sensor loading rod (305);

The loading device (2) includes a loading fixing frame (201), a loading rod (202), a driving mechanism (203), a transmission mechanism (204) and a weight loading device (205). The loading fixing frame (201) is set horizontally, and the loading is fixed. Both ends of the frame (201) are installed on the frame (1), the weight loading device (205) is installed on the loading fixing frame (201) and is located inside the frame (1), and the driving mechanism (203) is located on the weight Below the loading device (205), one end of the transmission mechanism (204) is connected to the output of the driving mechanism (203), the other end of the transmission mechanism (204) is connected to the input of the weight loading device (205); one end of the loading rod (202) is connected to the weight The output of the loading device (205), the other end of the loading rod (202) is connected to the sensor loading rod (305);

The mobile platform (4) includes the X-direction mobile platform (401) and the Y-direction mobile platform (402), the X-direction mobile platform (401) and the Y-direction mobile platform (402) are connected, and the X-direction mobile platform (401) is installed in the rack (1) The top; the slewing device (3) is installed on the Y-direction moving platform (402). The slewing device (3) includes a vertical seat (301), a first shaft seat (302), a second shaft seat (303), Rotary platform (306) and sensor fixing plate (304), the bottom of the vertical seat (301) is installed on the Y-direction moving platform (402), and the first shaft seat (302) fits the plane of one side of the vertical seat (301) Installation, a horizontal rotating shaft is installed on the first shaft seat (302), the second shaft seat (303) is sleeved on the horizontal rotating shaft and can rotate around the horizontal rotating shaft, and the rotary platform (306) is installed on the second shaft seat (303), the rotary axis of the rotary platform (306) is perpendicular to the X-direction rotary axis, the sensor fixing plate (304) is installed on the rotary platform (306), and the sensor under test (5) is installed on the sensor fixing plate (304) , The center hole on the sensor (5) to be tested is concentric with the rotation axis of the rotary platform (306), and the sensor loading rod (305) is installed on the sensor (5) to be tested;

Sensor loading rod (305) includes mounting plate (501), X-direction force transmission rod (502), Y-direction force transmission rod (503) and Z-direction force transmission rod (504), Z-direction force transmission rod (504) is fixed vertically On the mounting plate (501), a circle of bolt through holes is opened on the mounting plate (501), a circle of bolt through holes are located on the same circle, and the Z-direction force transmission rod (504) is installed on the center of the circle where all the bolt through holes are located. ), around the central hole of the sensor (5) to be tested, a circle of screw holes that coincide with the circle where the bolt through hole is located is arranged; on the edge of the mounting plate (501), a vertical X-direction force plate and a Y-direction are provided For the force plate, the X-direction force transmission rod (502) is vertically arranged on the X-direction force plate, and the Y-direction force transmission rod (503) is vertically arranged on the Y-direction force plate.
The six-dimensional force sensor calibration device according to claim 1, characterized in that the driving mechanism (203) is a motor, the transmission mechanism (204) includes a worm gear mechanism and a ball screw nut pair, and the input of the worm gear mechanism is connected to the motor shaft , The output of the worm gear mechanism is connected to the ball screw in the ball screw nut pair, and the screw nut in the ball screw nut pair is installed on the weight loading device (205).
The six-dimensional force sensor calibration device according to claim 2, characterized in that: the weight loading device (205) comprises a support plate (205-1), a loading sleeve (205-2), and a plurality of uprights (205-3). ), loading plate (205-5) and multiple weights (205-6), multiple uprights (205-3) penetrate the support plate (205-1), the upper and lower ends of the multiple uprights (205-3) are respectively Fix the loading bracket (201), the screw nut in the ball screw nut pair is fixed on the back of the support plate (205-1); the loading sleeve (205-2) is installed vertically on the support plate (205-1) ), on the inner wall of the loading sleeve (205-2), a plurality of suspension blocks (205-4) for placing weights are set, and the plurality of suspension blocks (205-4) are arranged in multiple spiral lines, and the weights (205-6) On the suspension blocks (205-4) placed in layers, each layer of weights (205-6) is placed on multiple suspension blocks (205-4); the loading rod (202) runs through all the weights ( 205-6) and connected to the loading plate (205-5), the loading plate (205-5) is located under the lowest weight (205-6), and the loading plate (205-5) is located on the support plate (205-1) Above.
The calibration method of the six-dimensional force sensor calibration device according to claims 1-3, characterized in that it comprises the following steps:

Step 1) Assemble the calibration device;

Step 2) Fix the sensor (5) to be tested on the sensor fixing plate (304);

Step 3) Install the sensor loading rod (305), match the center hole of the sensor to be tested (5) with the Fz loading rod of the sensor loading rod (305), and set the x direction and y direction of the sensor to be tested (5) with the sensor respectively The Fx and Fy directions of the loading rod (305) are parallel, and finally the sensor loading rod (305) is fixed to the sensor (5) under test with bolts;

Step 4) Adjust the initial position, adjust the mobile platform (4), keep the Fx direction vertical, and wait for calibration;

Step 5) Fx direction calibration, the X-direction force transmission rod (502) and the top of the loading rod (202) are fixed, and the loading device (2) loads the loading rod (202). At this time, the force state of the sensor (5) under test is Fx, and then collect the output data of the sensor (5) under test in each direction;

Step 6) Calibrate in the My direction, adjust the mobile platform (4), move the Z-direction transfer rod (504) to just above the loading device (2), and fix the Z-direction transfer rod (504) and the top of the loading rod (202) , The loading device (2) loads the loading rod (202), at this time the force state of the sensor (5) under test is My, and then the output data of the sensor under test (5) is collected in various directions;

Step 7) Calibrate in the Mz direction, adjust the mobile platform (4), move the Y-direction transfer rod (503) to the top of the loading device (2), and fix the Y-direction transfer rod (503) and the top of the loading rod (202) , The loading device (2) loads the loading rod (202), at this time the force state of the sensor (5) under test is Mz, and then the output data of the sensor under test (5) in various directions are collected;

Step 8) Fy direction calibration, the rotating platform (306) rotates 90° counterclockwise, the Fx direction remains vertical, waiting for calibration; the Y-direction transfer rod (503) and the top of the loading rod (202) are fixed, the loading device (2) is aligned The loading rod (202) performs loading, and at this time the force state of the sensor (5) under test is Fy, and then the output data of the sensor under test (5) in various directions are collected;

Step 9) Calibrate in the Mx direction, adjust the mobile platform (4), move the Z-direction transfer rod (504) to directly above the loading device (2), and fix the Z-direction transfer rod (504) and the top of the loading rod (202) , The loading device (2) loads the loading rod (202), at this time the force state of the sensor (5) under test is Mx, and then the output data of the sensor (5) under test is collected in various directions;

Step 10) Fz direction calibration, the second shaft base (303) rotates around the horizontal rotation axis, move the Z-direction force transmission rod (504) to the vertical downward, adjust the mobile platform (4), and set the Z-direction force transmission rod ( 504) Move to the top of the loading device (2), the Z-direction force transmission rod (504) and the top of the loading rod (202) are fixed, the loading device (2) loads the loading rod (202), and the sensor under test ( 5) The force state is Fz, and then collect the output data of the sensor (5) under test in each direction;

Step 11) Process and analyze the output data measured in the above steps to obtain the decoupling matrix of the sensor (5) under test, and complete the calibration of the sensor (5) under test.
The calibration method according to claim 4, characterized in that collecting the output data of the sensor (5) under test is completed by connecting the signal terminal of the sensor (5) under test to a data acquisition card.