WO2021063035A1 - Micro light-emitting diode chip and display panel - Google Patents

Micro light-emitting diode chip and display panel Download PDF

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Publication number
WO2021063035A1
WO2021063035A1 PCT/CN2020/097496 CN2020097496W WO2021063035A1 WO 2021063035 A1 WO2021063035 A1 WO 2021063035A1 CN 2020097496 W CN2020097496 W CN 2020097496W WO 2021063035 A1 WO2021063035 A1 WO 2021063035A1
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layer
light emitting
boss
emitting diode
type semiconductor
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PCT/CN2020/097496
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French (fr)
Chinese (zh)
Inventor
郭恩卿
田文亚
王程功
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成都辰显光电有限公司
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Priority to KR1020227005907A priority Critical patent/KR20220031729A/en
Publication of WO2021063035A1 publication Critical patent/WO2021063035A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/38Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
    • H01L33/385Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape the electrode extending at least partially onto a side surface of the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/075Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
    • H01L25/0753Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/38Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • H01L33/46Reflective coating, e.g. dielectric Bragg reflector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls

Definitions

  • the present disclosure relates to the field of display technology, and in particular to a micro light emitting diode chip and a display panel.
  • a micro light-emitting diode ( ⁇ LED) display is a display that uses an LED (light-emitting diode) chip with a size below one hundred micrometers to be integrated on a substrate as display pixels to achieve image display.
  • LED light-emitting diode
  • One pixel can be individually driven to light up, and the micro-light-emitting diode display is a self-luminous display.
  • the micro-light-emitting diode In the manufacturing process of the micro-light-emitting diode display panel, the micro-light-emitting diode is transferred from the growth substrate to the temporary substrate, and then transferred to the driving backplane. Since the chip thickness of the flip-chip structure is usually only about 3 microns, it is necessary to transfer the micro-light-emitting diode from the growth substrate to the temporary substrate. When the micro light-emitting diodes are transferred in batches, the chips are prone to fracture and failure during the stress process.
  • the existing micro-light-emitting diode chip has the problems of easy breakage during transfer and high transfer difficulty.
  • the embodiments of the present disclosure provide a micro-light-emitting diode chip and a display panel to solve the problem of difficulty in transferring the existing micro-light-emitting diode chip.
  • embodiments of the present disclosure provide a micro light emitting diode chip, including a first type semiconductor layer, a light emitting layer, a second type semiconductor layer, a first type electrode layer, a second type electrode layer, an insulating passivation layer, and a filling layer ,among them,
  • the first type semiconductor layer includes a first boss and a second boss, and a recessed area is formed between the first boss and the second boss;
  • a light emitting layer and a second type semiconductor layer are stacked on the second boss;
  • the first type electrode layer covers the first boss and part of the recessed area
  • the insulating passivation layer covers the sidewalls of the second bosses, part of the side of the second type semiconductor layer away from the light emitting layer, and at least part of the first type electrode layer located in the recessed area;
  • the second type electrode layer covers the insulating passivation layer and a part of the second type semiconductor layer away from the light emitting layer;
  • the filling layer is at least partially filled in the recessed area.
  • an embodiment of the present disclosure also provides a display panel including the above-mentioned micro light emitting diode chip.
  • the display panel provided by the embodiments of the present disclosure includes the above-mentioned micro-light-emitting diode chip, and therefore also has the same advantages as those of the above-mentioned micro-light-emitting diode chip, which will not be repeated here.
  • the micro light emitting diode chip provided by the embodiments of the present disclosure has the following advantages:
  • the micro-light-emitting diode chip provided by the embodiment of the present disclosure increases the thickness of the micro-light-emitting diode chip and reduces the thickness of the micro-light-emitting diode chip by arranging the first boss and the second boss, and by providing a filling layer between the first boss and the second boss. The possibility of the micro light-emitting diode chip breaking during the transfer process is improved, thereby improving the product yield.
  • first type electrode layer is covered on the first boss
  • second type electrode layer is covered on the second boss, so that the first type electrode layer and the second type electrode layer jointly cover the micro light emitting diode chip Since the first type electrode layer and the second type electrode layer have a reflective function on all side walls of the, it is ensured that the light directed to the side walls can be reflected, and the problem of light crosstalk caused by light leakage on the side walls is avoided. At the same time, the first pad and the second pad are flush in the horizontal direction, which facilitates alignment during subsequent soldering.
  • FIG. 1 is a first structural diagram of a micro light-emitting diode chip provided in the first embodiment of the present disclosure
  • Figure 2 is a top view of Figure 1;
  • FIG. 3 is a second structural diagram of the micro light emitting diode chip provided in the first embodiment of the disclosure.
  • the micro light emitting diode chip provided in the first embodiment of the present disclosure includes a first type semiconductor layer 10, a light emitting layer 30, a second type semiconductor layer 20, a first type electrode layer 40, and a second type electrode layer 50.
  • An insulating passivation layer 60 and a filling layer 70 wherein the first type semiconductor layer 10 includes a first boss 11 and a second boss 12, and a recessed area is formed between the first boss 11 and the second boss 12;
  • a light emitting layer 30 and a second type semiconductor layer 20 are stacked on the second boss 12;
  • the first type electrode layer 40 covers the first boss 11 and a part of the recessed area, the first type electrode layer 40 and the first type semiconductor layer 10 Ohmic contact;
  • the insulating passivation layer 60 covers the sidewalls of the second boss 12, part of the side of the second type semiconductor layer 20 away from the light emitting layer 30, and at least part of the first type electrode layer 40 in the recessed area;
  • the second type electrode The layer 50 covers the insulating passivation layer
  • the bottom surface of the first type semiconductor layer 10 protrudes downward to form a first boss 11 and a second boss 12, the light emitting layer 30 and the second type semiconductor layer 20 It is stacked on the second boss 12.
  • the top surface of the first type semiconductor layer 10 in this embodiment is the light-emitting surface of the micro light emitting diode.
  • the light emitting layer 30 is formed on the bottom surface of the second boss 12, and the second type semiconductor layer 20 is formed on the bottom surface of the light emitting layer 30, that is, the light emitting layer 30 and the second type semiconductor layer 20 are formed on the opposite side of the second boss 12.
  • first boss 11 when the bottom surfaces of the first boss 11 and the second boss 12 are flush, the first boss 11 may also be provided with a light-emitting layer 30 and a second type semiconductor layer 20 to heighten the first boss.
  • the station 11 facilitates subsequent electrical connection and ensures the alignment accuracy during connection.
  • the first type electrode layer 40 is formed on the first boss 11 and extends to the recessed area between the first boss 11 and the second boss 12, and the first type electrode layer 40 An ohmic contact is formed with the first type semiconductor layer 10.
  • the insulating passivation layer 60 is formed on the second boss 12 and extends to the recessed area between the first boss 11 and the second boss 12, and the insulating passivation layer 60 covers at least a part of the first boss located in the recessed area.
  • the type electrode layer 40 is used to isolate the first type electrode layer 40 and the second type electrode layer 50.
  • the second type electrode layer 50 is formed on the second boss 12 in contact with the insulating passivation layer 60, and extends to the recessed area between the first boss 11 and the second boss 12, as shown in FIG. 1
  • the second type electrode layer 50 covers a part of the insulating passivation layer 60 located in the recessed area, so as to avoid contact with the first type electrode layer 40 and cause a short circuit.
  • the insulating passivation layer 60 covers part of the side of the second type semiconductor layer 20 away from the light emitting layer 30, and the part of the second type semiconductor layer 20 not covered by the insulating passivation layer 60 is in contact with the second type electrode layer 50,
  • the type electrode layer 50 is connected to this part to form an ohmic contact.
  • a filling layer 70 is provided in the recessed area.
  • the filling layer 70 is set as an insulating hard material.
  • the filling layer 70 is partially filled in the recessed area, or completely filled in the recessed area. This arrangement increases the thickness of the micro light emitting diode chip, thereby enhancing the structural strength of the micro light emitting diode chip, and reducing or avoiding the possibility of the micro light emitting diode chip breaking.
  • the micro light emitting diode chip provided in the first embodiment of the present disclosure is provided with a first boss 11 and a second boss 12, and a filling layer 70 is provided between the first boss 11 and the second boss 12,
  • the thickness of the micro-light-emitting diode chip is increased, and the possibility of the micro-light-emitting diode chip being broken during the transfer process is reduced, thereby improving the product yield.
  • the second type electrode layer 50 covers the second boss 12, so that the first type electrode layer 40 and the second type electrode layer 50 are common Covers all the sidewalls of the micro light-emitting diode chip. Because the first type electrode layer 40 and the second type electrode layer 50 have a reflective effect, it is ensured that the light directed to the sidewall can be reflected, and the light caused by the light leakage of the sidewall is avoided. Crosstalk issues.
  • the filling layer 70 wraps the first type electrode layer 40, the insulating passivation layer 60 and the second type electrode layer 50.
  • the filling layer 70 is at least partially filled in the recessed area between the first boss 11 and the second boss 12.
  • the filling layer 70 is also provided on the first boss 11 and The outer side of the second boss 12, that is, is disposed on the sidewalls of the first type electrode layer 40, the insulating passivation layer 60, and the second type electrode layer 50, and is used to support the first type electrode layer 40 and the insulating passivation layer 60 And the sidewalls of the second type electrode layer 50 further enhance the structural strength of the micro light emitting diode chip.
  • the filling layer 70 is epoxy resin glue or spin-on glass.
  • epoxy resin glue or spin-on glass is used to form the filling layer 70, which facilitates the production of the sealing and filling layer 70.
  • Both the epoxy resin glue and the spin-on glass are transparent, which can avoid affecting the light output rate of the micro light emitting diode chip.
  • the micro light emitting diode chip further includes a first pad 41 and a second pad 51, and the first pad 41 is disposed on the first type electrode layer 40 away from one of the first type semiconductor layer 10
  • the second pad 51 is disposed on the side of the second type electrode layer 50 away from the second type semiconductor layer 20.
  • the second pad 51 is connected to the second type electrode layer 50 formed on the second boss 12.
  • the bottom surface of the second pad 51 is connected to the bottom surface of the first pad 41. They are flush in the horizontal direction, and this arrangement facilitates alignment during subsequent welding.
  • first pad 41 There are many ways to arrange the first pad 41.
  • a light-emitting layer 30 and a second type semiconductor layer 20 may be stacked on the first boss 11 for stacking the first boss 11.
  • the first type electrode layer 40 is formed on the first boss 11 and is in contact with the first type semiconductor layer 10, the light emitting layer 30, and the second type semiconductor layer 20, respectively.
  • the first type electrode layer 40 is only in ohmic contact with the first type semiconductor layer 10, while the second type semiconductor layer 20 forms a short circuit and is located on the first boss 11.
  • the light emitting layer 30 on the second type semiconductor layer 20 on the 11 does not emit light.
  • the light emitting layer 30 and the second type semiconductor layer 20 on the first boss 11 only have the function of stacking the first pad 41 .
  • the first pad 41 is formed on the first type electrode layer 40 on the first boss 11, and the first pad 41 is connected to the first type electrode layer 40.
  • the stacked structure formed by the layer 30 and the second type semiconductor layer 20 can stack the first pad 41 so that the bottom surface of the first pad 41 is flush with the bottom surface of the second pad 51.
  • first boss 11 can also be further raised by itself to achieve a height stacking effect on the first pad 41, so that the bottom surface of the first pad 41 is flush with the bottom surface of the second pad 51.
  • the thickness of the first pad 41 itself can be increased while the thickness of the first boss 11 of the micro-light emitting diode in this embodiment is set to a smaller thickness, or the first The boss 11 is etched away.
  • the side of the first pad 41 away from the first type semiconductor layer 10 and the side of the second pad 51 away from the first type semiconductor layer 10 are flush in the horizontal direction, and at the same time The side of the first pad 41 away from the first type semiconductor layer 10 and the side of the filling layer 70 away from the first type semiconductor layer 10 are flush in the horizontal direction.
  • This arrangement can simplify the manufacturing process.
  • the side of the first pad 41 and the second pad 51 away from the first type semiconductor layer 10 are flush in the horizontal direction, and in the horizontal direction, the side of the first pad 41 away from the first type semiconductor layer 10
  • One side protrudes from the side of the filling layer 70 away from the first type semiconductor layer 10, and this arrangement facilitates alignment during subsequent soldering.
  • the filling layer 70 wraps the first type electrode layer 40, the insulating passivation layer 60, and the second type electrode layer 50, so as to protect the micro light emitting diode chip from cracking.
  • a light-emitting layer 30 and a second-type semiconductor layer 20 are stacked on the first boss 11, and the light-emitting layer 30 and the second-type semiconductor layer 20 are used to support the first pad 41.
  • the light-emitting layer 30 and the second-type semiconductor layer 20 are stacked on the side of the first boss 11 away from the light-emitting surface.
  • the first pad 41 is formed on the first type electrode layer 40 on the first boss 11, and the first pad 41 is connected to the first type electrode layer 40.
  • the above-mentioned light emitting layer 30 and the second type semiconductor layer The stacked height structure formed by 20 can support and stack the first pad 41 so that the bottom surface of one pad is flush with the bottom surface of the second pad 51.
  • the cross-sectional shape of the second boss 12, the light-emitting layer 30, and the second-type semiconductor layer 20 is an inverted trapezoid with a plane perpendicular to the light-emitting surface as a cross-section.
  • the cross section of the second boss 12, the light emitting layer 30, and the second type semiconductor layer 20 refers to the cross section of the laminated structure composed of the second boss 12, the light emitting layer 30, and the second type semiconductor layer 20.
  • the top surface of the first type semiconductor layer 10 is the light-emitting surface, and a plane perpendicular to the top surface of the first type semiconductor layer 10 is taken as the cross section.
  • the cross-sectional shape of the laminated structure formed by the second type semiconductor layer 20 is an inverted trapezoid.
  • the length of the bottom side of the inverted trapezoid on the side of the light-emitting surface is greater than the length of the bottom side away from the light-emitting surface. Fabrication of LED chips.
  • the cross-sectional shape of the first boss 11, the light emitting layer 30, and the second type semiconductor layer 20 may also be set to an inverted trapezoid.
  • the range of the base angle ⁇ of the inverted trapezoid is 10°-80°.
  • the bottom angle of the inverted trapezoid can take any value in the range of 10° to 80°, for example, the cross-sectional shape of the laminated structure composed of the second boss 12, the light emitting layer 30, and the second type semiconductor layer 20 It is an isosceles trapezoid, and the bottom angle of the isosceles trapezoid can be set to 60°, which is convenient for the manufacture of micro-light emitting diodes.
  • the first type electrode layer 40 and the second type electrode layer 50 are metal electrode layers.
  • the first type electrode layer 40 and the second type electrode layer 50 cover the micro
  • the first type electrode layer 40 and the second type electrode layer 50 are set as metal electrode layers, and the reflectivity of the metal is relatively high, which further increases the first type electrode layer 40 and the second type electrode layer 40 and the second type electrode layer.
  • the reflectivity of the second type electrode layer 50 prevents light from the sidewalls.
  • the materials of the first type electrode layer 40 and the second type electrode layer 50 include silver, aluminum, etc., and silver and aluminum are common reflective metal materials, which are cheap and easy to obtain, and the manufacturing process is simple.
  • the shape of the second boss 12, the light emitting layer 30, and the second type semiconductor layer 20 is a truncated cone or a prism cone. It should be noted that the shape of the second boss 12, the light emitting layer 30, and the second type semiconductor layer 20 refers to the shape of the laminated structure composed of the second boss 12, the light emitting layer 30, and the second type semiconductor layer 20, such as As shown in FIG. 2, the laminated structure composed of the boss, the light-emitting layer 30 and the second type semiconductor layer 20 can be a truncated cone, or a truncated cone, specifically a quadrangular truncated cone. This shape can effectively simplify the manufacturing process.
  • the display panel provided in the second embodiment of the present disclosure includes the micro-light-emitting diode chip provided in the first embodiment.
  • the display panel provided in this embodiment can be applied to any device with a display function including a micro light emitting diode chip, such as a mobile phone, a tablet computer, a smart watch, an e-book, a navigator, a TV, a digital camera, and the like.
  • the display panel provided in this embodiment also has the same advantages as the micro light-emitting diode chip provided in the first embodiment, which will not be repeated here.

Abstract

Provided are a micro light-emitting diode chip and a display panel. The micro light-emitting diode chip comprises a first-type semiconductor layer, a light-emitting layer, a second-type semiconductor layer, a first-type electrode layer, a second-type electrode layer, an insulating passivation layer, and a filler layer. The first-type semiconductor layer comprises a first protrusion and a second protrusion. A recessed region is formed between the first protrusion and the second protrusion. The light-emitting layer and the second-type semiconductor layer are stacked on the second protrusion. The first-type electrode layer covers the first protrusion and a portion of the recessed region. The insulating passivation layer covers a sidewall of the second protrusion, a portion of a surface of the second-type semiconductor layer away from the light-emitting layer and at least a portion of the first-type electrode layer positioned in the recessed region. The second-type electrode layer covers the insulating passivation layer and a portion of the surface of the second-type semiconductor layer away from the light-emitting layer. The filler layer is at least partially filled in the recessed region.

Description

微发光二极管芯片及显示面板Micro light emitting diode chip and display panel 技术领域Technical field
本公开涉及显示技术领域,尤其涉及一种微发光二极管芯片及显示面板。The present disclosure relates to the field of display technology, and in particular to a micro light emitting diode chip and a display panel.
背景技术Background technique
微发光二极管(micro light-emitting diode,μLED)显示屏是一种以在一个基板上集成尺寸在百微米级别以下的LED(light-emitting diode)芯片作为显示像素实现图像显示的显示屏,其中每一个像素可单独驱动点亮,微发光二极管显示屏是一种自发光显示屏。A micro light-emitting diode (μLED) display is a display that uses an LED (light-emitting diode) chip with a size below one hundred micrometers to be integrated on a substrate as display pixels to achieve image display. One pixel can be individually driven to light up, and the micro-light-emitting diode display is a self-luminous display.
在微发光二极管显示面板的制作过程中,要将微发光二极管从生长基板上转移到临时基板上,然后再转移到驱动背板上,由于倒装结构的芯片厚度通常只有约3微米,因此在批量转移微发光二极管时芯片在受力过程中容易断裂失效。In the manufacturing process of the micro-light-emitting diode display panel, the micro-light-emitting diode is transferred from the growth substrate to the temporary substrate, and then transferred to the driving backplane. Since the chip thickness of the flip-chip structure is usually only about 3 microns, it is necessary to transfer the micro-light-emitting diode from the growth substrate to the temporary substrate. When the micro light-emitting diodes are transferred in batches, the chips are prone to fracture and failure during the stress process.
因此现有的微发光二极管芯片存在转移时易断裂、转移难度大的问题。Therefore, the existing micro-light-emitting diode chip has the problems of easy breakage during transfer and high transfer difficulty.
发明内容Summary of the invention
本公开实施例提供一种微发光二极管芯片及显示面板,用以解决现有的微发光二极管芯片转移难度大的问题。The embodiments of the present disclosure provide a micro-light-emitting diode chip and a display panel to solve the problem of difficulty in transferring the existing micro-light-emitting diode chip.
为了实现上述目的,本公开实施例提供如下技术方案:In order to achieve the foregoing objectives, the embodiments of the present disclosure provide the following technical solutions:
一方面,本公开实施例提供一种微发光二极管芯片,包括第一类型半导体层、发光层、第二类型半导体层、第一类型电极层、第二类型电极层、绝缘钝化层和填充层,其中,On the one hand, embodiments of the present disclosure provide a micro light emitting diode chip, including a first type semiconductor layer, a light emitting layer, a second type semiconductor layer, a first type electrode layer, a second type electrode layer, an insulating passivation layer, and a filling layer ,among them,
所述第一类型半导体层包括第一凸台和第二凸台,所述第一凸台与所述第二凸台之间形成凹陷区;The first type semiconductor layer includes a first boss and a second boss, and a recessed area is formed between the first boss and the second boss;
所述第二凸台上层叠设置有发光层和第二类型半导体层;A light emitting layer and a second type semiconductor layer are stacked on the second boss;
所述第一类型电极层覆盖所述第一凸台以及部分所述凹陷区;The first type electrode layer covers the first boss and part of the recessed area;
所述绝缘钝化层覆盖所述第二凸台的侧壁、部分所述第二类型半导体层远离所述发光层的一面以及位于所述凹陷区内的至少部分所述第一类型电极层;The insulating passivation layer covers the sidewalls of the second bosses, part of the side of the second type semiconductor layer away from the light emitting layer, and at least part of the first type electrode layer located in the recessed area;
所述第二类型电极层覆盖所述绝缘钝化层和部分所述第二类型半导体层远离所述发光层的一面;The second type electrode layer covers the insulating passivation layer and a part of the second type semiconductor layer away from the light emitting layer;
所述填充层至少部分填充在所述凹陷区。此微发光二极管芯片解决了转移难度大、显示效果差的问题。The filling layer is at least partially filled in the recessed area. The micro light emitting diode chip solves the problems of difficult transfer and poor display effect.
另一方面,本公开实施例还提供了一种显示面板,包括上述微发光二极管芯片。On the other hand, an embodiment of the present disclosure also provides a display panel including the above-mentioned micro light emitting diode chip.
本公开实施例提供的显示面板包括上述微发光二极管芯片,因此也具有与上述微发光二极管芯片的优点相同的优点,在此不再赘述。The display panel provided by the embodiments of the present disclosure includes the above-mentioned micro-light-emitting diode chip, and therefore also has the same advantages as those of the above-mentioned micro-light-emitting diode chip, which will not be repeated here.
与现有技术相比,本公开的实施例提供的微发光二极管芯片具有如下优点:Compared with the prior art, the micro light emitting diode chip provided by the embodiments of the present disclosure has the following advantages:
本公开实施例提供的微发光二极管芯片通过设置第一凸台和第二凸台,通过在第一凸台和第二凸台之间设置填充层,增大了微发光二极管芯片的厚度,降低了微发光二极管芯片在转移过程中断裂的可能性,从而提高了产品良率。进一步的,将第一类型电极层覆盖在第一凸台上,将第二类型电极层覆盖在第二凸台上,使得第一类型电极层和第二类型电极层共同覆盖了微发光二极管芯片的全部侧壁,由于第一类型电极层和第二类型电极层具有反射功能,保证了射向侧壁的光线能够被反射,避免了侧壁漏光导致的光串扰问题。同时,第一焊盘与第二焊盘在水平方向上平齐,有利于后续焊接时进行对准。The micro-light-emitting diode chip provided by the embodiment of the present disclosure increases the thickness of the micro-light-emitting diode chip and reduces the thickness of the micro-light-emitting diode chip by arranging the first boss and the second boss, and by providing a filling layer between the first boss and the second boss. The possibility of the micro light-emitting diode chip breaking during the transfer process is improved, thereby improving the product yield. Further, the first type electrode layer is covered on the first boss, and the second type electrode layer is covered on the second boss, so that the first type electrode layer and the second type electrode layer jointly cover the micro light emitting diode chip Since the first type electrode layer and the second type electrode layer have a reflective function on all side walls of the, it is ensured that the light directed to the side walls can be reflected, and the problem of light crosstalk caused by light leakage on the side walls is avoided. At the same time, the first pad and the second pad are flush in the horizontal direction, which facilitates alignment during subsequent soldering.
附图说明Description of the drawings
为了更清楚地说明本公开实施例或现有技术中的技术方案,下面将对本公开实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一部分实施例。In order to explain the embodiments of the present disclosure or the technical solutions in the prior art more clearly, the following will briefly introduce the drawings that need to be used in the description of the embodiments of the present disclosure or the prior art. Obviously, the drawings in the following description It is only a part of the embodiments of the present invention.
图1为本公开实施例一提供的微发光二极管芯片的结构示意图一;FIG. 1 is a first structural diagram of a micro light-emitting diode chip provided in the first embodiment of the present disclosure;
图2为图1的俯视图;Figure 2 is a top view of Figure 1;
图3为本公开实施例一提供的微发光二极管芯片的结构示意图二。FIG. 3 is a second structural diagram of the micro light emitting diode chip provided in the first embodiment of the disclosure.
具体实施方式Detailed ways
为了使本公开实施例的上述目的、特征和优点能够更加明显易懂,下面将结合本公开实施例中的附图,对本公开实施例中的技术方案进行清楚、完整地描述。显然,所描述的实施例仅仅是本公开的一部分实施例,而不是全部的实施例。基于本公开中的实施例,本领域普通技术人员在没有作出创造性劳动的前提下所获得的所有其它实施例,均属于本公开保护的范围。In order to make the above objectives, features and advantages of the embodiments of the present disclosure more obvious and understandable, the technical solutions in the embodiments of the present disclosure will be described clearly and completely in conjunction with the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present disclosure.
实施例一Example one
请参阅图1-图3,本公开实施例一提供的微发光二极管芯片包括第一类型半导体层10、发光层30、第二类型半导体层20、第一类型电极层40、第二类型电极层50、绝缘钝化层60和填充层70,其中,第一类型半导体层10包括第一凸台11和第二凸台12,第一凸台11与第二凸台12之间形成凹陷区;第二凸台12上层叠设置有发光层30和第二类型半导体层20;第一类型电极层40覆盖第一凸台11以及部分凹陷区,第一类型电极层40与第一类型半导体层10欧姆接触;绝缘钝化层60覆盖第二凸台12的侧壁、部分第二类型半导体层20远离发光层30的一面以及位于凹陷区内的至少部分第一类型电极层40;第二类型电极层50覆盖绝缘钝化层60和第二类型半导体层20远离发光层30的一面,并与第二类型半导体层20欧姆接触;填充层70至少部分填充在凹陷区以增加微发光二极管芯片的厚度。1 to 3, the micro light emitting diode chip provided in the first embodiment of the present disclosure includes a first type semiconductor layer 10, a light emitting layer 30, a second type semiconductor layer 20, a first type electrode layer 40, and a second type electrode layer 50. An insulating passivation layer 60 and a filling layer 70, wherein the first type semiconductor layer 10 includes a first boss 11 and a second boss 12, and a recessed area is formed between the first boss 11 and the second boss 12; A light emitting layer 30 and a second type semiconductor layer 20 are stacked on the second boss 12; the first type electrode layer 40 covers the first boss 11 and a part of the recessed area, the first type electrode layer 40 and the first type semiconductor layer 10 Ohmic contact; the insulating passivation layer 60 covers the sidewalls of the second boss 12, part of the side of the second type semiconductor layer 20 away from the light emitting layer 30, and at least part of the first type electrode layer 40 in the recessed area; the second type electrode The layer 50 covers the insulating passivation layer 60 and the side of the second type semiconductor layer 20 away from the light emitting layer 30, and is in ohmic contact with the second type semiconductor layer 20; the filling layer 70 is at least partially filled in the recessed area to increase the thickness of the micro light emitting diode chip .
具体地,在本实施例中,如图1所示,第一类型半导体层10的底面向下 凸出形成第一凸台11和第二凸台12,发光层30、第二类型半导体层20层叠设置在第二凸台12上,需要说明的是,本实施例中第一类型半导体层10的顶面为微发光二极管的出光面。具体地,发光层30形成在第二凸台12的底面,第二类型半导体层20形成在发光层30的底面,即发光层30和第二类型半导体层20形成在第二凸台12的背离出光面的一侧。需要说明的是,当第一凸台11和第二凸台12的底面相平齐时,第一凸台11上也可以设置有发光层30和第二类型半导体层20以垫高第一凸台11,以便于后续电性连接,保证连接时的对准精度。Specifically, in this embodiment, as shown in FIG. 1, the bottom surface of the first type semiconductor layer 10 protrudes downward to form a first boss 11 and a second boss 12, the light emitting layer 30 and the second type semiconductor layer 20 It is stacked on the second boss 12. It should be noted that the top surface of the first type semiconductor layer 10 in this embodiment is the light-emitting surface of the micro light emitting diode. Specifically, the light emitting layer 30 is formed on the bottom surface of the second boss 12, and the second type semiconductor layer 20 is formed on the bottom surface of the light emitting layer 30, that is, the light emitting layer 30 and the second type semiconductor layer 20 are formed on the opposite side of the second boss 12. One side of the light-emitting surface. It should be noted that when the bottom surfaces of the first boss 11 and the second boss 12 are flush, the first boss 11 may also be provided with a light-emitting layer 30 and a second type semiconductor layer 20 to heighten the first boss. The station 11 facilitates subsequent electrical connection and ensures the alignment accuracy during connection.
在上述实施方式的基础上,第一类型电极层40形成在第一凸台11上,并向第一凸台11与第二凸台12之间的凹陷区延伸,且第一类型电极层40与第一类型半导体层10形成欧姆接触。绝缘钝化层60形成在第二凸台12上,并向第一凸台11与第二凸台12之间的凹陷区延伸,且绝缘钝化层60至少覆盖位于凹陷区内的部分第一类型电极层40,以隔离第一类型电极层40和第二类型电极层50。On the basis of the foregoing embodiment, the first type electrode layer 40 is formed on the first boss 11 and extends to the recessed area between the first boss 11 and the second boss 12, and the first type electrode layer 40 An ohmic contact is formed with the first type semiconductor layer 10. The insulating passivation layer 60 is formed on the second boss 12 and extends to the recessed area between the first boss 11 and the second boss 12, and the insulating passivation layer 60 covers at least a part of the first boss located in the recessed area. The type electrode layer 40 is used to isolate the first type electrode layer 40 and the second type electrode layer 50.
进一步地,第二类型电极层50形成在第二凸台12上与绝缘钝化层60接触,并向第一凸台11与第二凸台12之间的凹陷区延伸,如图1所示,本实施例中第二类型电极层50覆盖位于凹陷区内的部分绝缘钝化层60,以避免与第一类型电极层40接触导致短路。绝缘钝化层60覆盖了部分第二类型半导体层20远离发光层30的一面,未被绝缘钝化层60覆盖的第二类型半导体层20的部分与第二类型电极层50接触,,第二类型电极层50与该部分连接形成欧姆接触。Further, the second type electrode layer 50 is formed on the second boss 12 in contact with the insulating passivation layer 60, and extends to the recessed area between the first boss 11 and the second boss 12, as shown in FIG. 1 In this embodiment, the second type electrode layer 50 covers a part of the insulating passivation layer 60 located in the recessed area, so as to avoid contact with the first type electrode layer 40 and cause a short circuit. The insulating passivation layer 60 covers part of the side of the second type semiconductor layer 20 away from the light emitting layer 30, and the part of the second type semiconductor layer 20 not covered by the insulating passivation layer 60 is in contact with the second type electrode layer 50, The type electrode layer 50 is connected to this part to form an ohmic contact.
在上述实施方式的基础上,第一凸台11与第二凸台12之间存在凹陷区,本实施例在凹陷区内设置有填充层70,本实施例中填充层70设置为绝缘硬质材料。填充层70部分填充在凹陷区内,或全部填充在凹陷区内。这样的设置增大了微发光二极管芯片的厚度,从而增强了微发光二极管芯片的结构强度,降低或避免了微发光二极管芯片断裂的可能性。On the basis of the above embodiment, there is a recessed area between the first boss 11 and the second boss 12. In this embodiment, a filling layer 70 is provided in the recessed area. In this embodiment, the filling layer 70 is set as an insulating hard material. The filling layer 70 is partially filled in the recessed area, or completely filled in the recessed area. This arrangement increases the thickness of the micro light emitting diode chip, thereby enhancing the structural strength of the micro light emitting diode chip, and reducing or avoiding the possibility of the micro light emitting diode chip breaking.
综上所述,本公开实施例一提供的微发光二极管芯片,通过设置第一凸台11和第二凸台12,在第一凸台11和第二凸台12之间设置填充层70,增大了微发光二极管芯片的厚度,降低了微发光二极管芯片在转移过程中断裂的可能性,从而提高了产品良率。进一步的,通过将第一类型电极层40覆盖在第一凸台11上,第二类型电极层50覆盖在第二凸台12上,使得第一类型电极层40和第二类型电极层50共同覆盖了微发光二极管芯片的全部侧壁,由于第一类型电极层40和第二类型电极层50具有反射作用,因此保证了射向侧壁的光线能够被反射,避免了侧壁漏光导致的光串扰问题。In summary, the micro light emitting diode chip provided in the first embodiment of the present disclosure is provided with a first boss 11 and a second boss 12, and a filling layer 70 is provided between the first boss 11 and the second boss 12, The thickness of the micro-light-emitting diode chip is increased, and the possibility of the micro-light-emitting diode chip being broken during the transfer process is reduced, thereby improving the product yield. Further, by covering the first type electrode layer 40 on the first boss 11, the second type electrode layer 50 covers the second boss 12, so that the first type electrode layer 40 and the second type electrode layer 50 are common Covers all the sidewalls of the micro light-emitting diode chip. Because the first type electrode layer 40 and the second type electrode layer 50 have a reflective effect, it is ensured that the light directed to the sidewall can be reflected, and the light caused by the light leakage of the sidewall is avoided. Crosstalk issues.
在一种可能的实现方式中,填充层70包裹第一类型电极层40、绝缘钝化层60和第二类型电极层50。在上述实施方式的基础上,填充层70至少部分填充在第一凸台11与第二凸台12之间的凹陷区内,本实施例中,填充层70还设置在第一凸台11和第二凸台12的外侧,即设置在第一类型电极层40、绝缘钝化层60和第二类型电极层50的侧壁上,用于支撑第一类型电极层40、绝缘钝化层60和第二类型电极层50的侧壁,进一步增强了微发光二极管芯片的结构强度。In a possible implementation manner, the filling layer 70 wraps the first type electrode layer 40, the insulating passivation layer 60 and the second type electrode layer 50. On the basis of the above embodiment, the filling layer 70 is at least partially filled in the recessed area between the first boss 11 and the second boss 12. In this embodiment, the filling layer 70 is also provided on the first boss 11 and The outer side of the second boss 12, that is, is disposed on the sidewalls of the first type electrode layer 40, the insulating passivation layer 60, and the second type electrode layer 50, and is used to support the first type electrode layer 40 and the insulating passivation layer 60 And the sidewalls of the second type electrode layer 50 further enhance the structural strength of the micro light emitting diode chip.
在上述实施方式的基础上,进一步地,填充层70为环氧树脂胶或旋涂玻璃。本实施例选用环氧树脂胶或旋涂玻璃形成填充层70,便于制作封填充层70,环氧树脂胶和旋涂玻璃均为透明状,能够避免影响微发光二极管芯片的出光率。On the basis of the foregoing embodiment, further, the filling layer 70 is epoxy resin glue or spin-on glass. In this embodiment, epoxy resin glue or spin-on glass is used to form the filling layer 70, which facilitates the production of the sealing and filling layer 70. Both the epoxy resin glue and the spin-on glass are transparent, which can avoid affecting the light output rate of the micro light emitting diode chip.
在一种可能的实现方式中,微发光二极管芯片还包括第一焊盘41和第二焊盘51,第一焊盘41设置在第一类型电极层40上远离第一类型半导体层10的一侧,第二焊盘51设置在第二类型电极层50上远离第二类型半导体层20的一侧。具体地,第二焊盘51与形成在第二凸台12上的第二类型电极层50相连接,本实施例中,优选地,第二焊盘51的底面与第一焊盘41的底面在水平方向上平齐,这样的设置有利于后续焊接时进行对准。In a possible implementation, the micro light emitting diode chip further includes a first pad 41 and a second pad 51, and the first pad 41 is disposed on the first type electrode layer 40 away from one of the first type semiconductor layer 10 On the other hand, the second pad 51 is disposed on the side of the second type electrode layer 50 away from the second type semiconductor layer 20. Specifically, the second pad 51 is connected to the second type electrode layer 50 formed on the second boss 12. In this embodiment, preferably, the bottom surface of the second pad 51 is connected to the bottom surface of the first pad 41. They are flush in the horizontal direction, and this arrangement facilitates alignment during subsequent welding.
第一焊盘41的设置方式有多种,例如,如图1所示,第一凸台11上可 以层叠设置有发光层30和第二类型半导体层20,用于叠高第一凸台11,第一类型电极层40形成在第一凸台11上,并分别与第一类型半导体层10、发光层30、第二类型半导体层20相接触。There are many ways to arrange the first pad 41. For example, as shown in FIG. 1, a light-emitting layer 30 and a second type semiconductor layer 20 may be stacked on the first boss 11 for stacking the first boss 11. The first type electrode layer 40 is formed on the first boss 11 and is in contact with the first type semiconductor layer 10, the light emitting layer 30, and the second type semiconductor layer 20, respectively.
需要说明的是,本实施例中,在第一凸台11上,第一类型电极层40仅与第一类型半导体层10欧姆接触,而第二类型半导体层20构成短路,位于第一凸台11上的第二类型半导体层20上的发光层30不发光,可以理解的是,第一凸台11上的发光层30和第二类型半导体层20仅具有叠高第一焊盘41的作用。具体地,在上述实施方式的基础上,第一焊盘41形成在第一凸台11上的第一类型电极层40上,第一焊盘41与第一类型电极层40相连接,上述发光层30和第二类型半导体层20构成的叠高结构能够叠高第一焊盘41,从而使第一焊盘41的底面与第二焊盘51的底面平齐。It should be noted that, in this embodiment, on the first boss 11, the first type electrode layer 40 is only in ohmic contact with the first type semiconductor layer 10, while the second type semiconductor layer 20 forms a short circuit and is located on the first boss 11. The light emitting layer 30 on the second type semiconductor layer 20 on the 11 does not emit light. It can be understood that the light emitting layer 30 and the second type semiconductor layer 20 on the first boss 11 only have the function of stacking the first pad 41 . Specifically, on the basis of the above-mentioned embodiment, the first pad 41 is formed on the first type electrode layer 40 on the first boss 11, and the first pad 41 is connected to the first type electrode layer 40. The stacked structure formed by the layer 30 and the second type semiconductor layer 20 can stack the first pad 41 so that the bottom surface of the first pad 41 is flush with the bottom surface of the second pad 51.
再如,第一凸台11也可以通过自身进一步凸起对第一焊盘41起到叠高效果,以使第一焊盘41的底面与第二焊盘51的底面平齐。For another example, the first boss 11 can also be further raised by itself to achieve a height stacking effect on the first pad 41, so that the bottom surface of the first pad 41 is flush with the bottom surface of the second pad 51.
又如,如图3所示,可以通过增大第一焊盘41自身的厚度,同时将本实施例中的微发光二极管的第一凸台11的厚度设置为较小厚度,或者将第一凸台11刻蚀掉。For another example, as shown in FIG. 3, the thickness of the first pad 41 itself can be increased while the thickness of the first boss 11 of the micro-light emitting diode in this embodiment is set to a smaller thickness, or the first The boss 11 is etched away.
在一种可能的实现方式中,第一焊盘41的远离第一类型半导体层10的一侧与第二焊盘51的远离第一类型半导体层10的一侧在水平方向上平齐,同时,第一焊盘41的远离第一类型半导体层10的一侧与填充层70的远离第一类型半导体层10的一侧在水平方向上平齐,这种设置可简化制作工艺。或者,第一焊盘41与第二焊盘51的远离第一类型半导体层10的一侧在水平方向上平齐,在水平方向上,第一焊盘41的远离第一类型半导体层10的一侧从填充层70的远离第一类型半导体层10的一侧凸出,这样的设置有利于后续焊接时进行对准。在上述实施方式的基础上,填充层70包裹第一类型电极层40、绝缘钝化层60和第二类型电极层50,便于保护微发光二极管芯片避免其发生断裂的现象。In a possible implementation, the side of the first pad 41 away from the first type semiconductor layer 10 and the side of the second pad 51 away from the first type semiconductor layer 10 are flush in the horizontal direction, and at the same time The side of the first pad 41 away from the first type semiconductor layer 10 and the side of the filling layer 70 away from the first type semiconductor layer 10 are flush in the horizontal direction. This arrangement can simplify the manufacturing process. Alternatively, the side of the first pad 41 and the second pad 51 away from the first type semiconductor layer 10 are flush in the horizontal direction, and in the horizontal direction, the side of the first pad 41 away from the first type semiconductor layer 10 One side protrudes from the side of the filling layer 70 away from the first type semiconductor layer 10, and this arrangement facilitates alignment during subsequent soldering. On the basis of the foregoing embodiment, the filling layer 70 wraps the first type electrode layer 40, the insulating passivation layer 60, and the second type electrode layer 50, so as to protect the micro light emitting diode chip from cracking.
在上述实施方式的基础上,优选地,第一凸台11上层叠设置有发光层30和第二类型半导体层20,发光层30和第二类型半导体层20用于支撑第一焊盘41。需要说明的是,发光层30和第二类型半导体层20层叠设置在第一凸台11背离出光面的一侧。具体地,第一焊盘41形成在第一凸台11上的第一类型电极层40上,第一焊盘41与第一类型电极层40相连接,上述发光层30和第二类型半导体层20构成的叠高结构能够支撑和叠高第一焊盘41,从而使一焊盘的底面与第二焊盘51的底面平齐。Based on the above-mentioned embodiments, preferably, a light-emitting layer 30 and a second-type semiconductor layer 20 are stacked on the first boss 11, and the light-emitting layer 30 and the second-type semiconductor layer 20 are used to support the first pad 41. It should be noted that the light-emitting layer 30 and the second-type semiconductor layer 20 are stacked on the side of the first boss 11 away from the light-emitting surface. Specifically, the first pad 41 is formed on the first type electrode layer 40 on the first boss 11, and the first pad 41 is connected to the first type electrode layer 40. The above-mentioned light emitting layer 30 and the second type semiconductor layer The stacked height structure formed by 20 can support and stack the first pad 41 so that the bottom surface of one pad is flush with the bottom surface of the second pad 51.
在一种可能的实现方式中,以垂直于出光面的平面为截面,第二凸台12、发光层30、第二类型半导体层20的截面形状为倒梯形。需要说明的是,第二凸台12、发光层30、第二类型半导体层20的截面指的是第二凸台12、发光层30、第二类型半导体层20构成的层叠结构的截面,本实施例中如图1所示,第一类型半导体层10的顶面为出光面,以垂直于第一类型半导体层10的顶面的平面为截面,上述第二凸台12、发光层30、第二类型半导体层20构成的层叠结构的截面形状为倒梯形,本实施例中倒梯形的位于出光面所在侧的底边长度大于远离出光面的底边的长度,倒梯形的结构设置便于微发光二极管芯片的制作。In a possible implementation manner, the cross-sectional shape of the second boss 12, the light-emitting layer 30, and the second-type semiconductor layer 20 is an inverted trapezoid with a plane perpendicular to the light-emitting surface as a cross-section. It should be noted that the cross section of the second boss 12, the light emitting layer 30, and the second type semiconductor layer 20 refers to the cross section of the laminated structure composed of the second boss 12, the light emitting layer 30, and the second type semiconductor layer 20. As shown in FIG. 1 in the embodiment, the top surface of the first type semiconductor layer 10 is the light-emitting surface, and a plane perpendicular to the top surface of the first type semiconductor layer 10 is taken as the cross section. The cross-sectional shape of the laminated structure formed by the second type semiconductor layer 20 is an inverted trapezoid. In this embodiment, the length of the bottom side of the inverted trapezoid on the side of the light-emitting surface is greater than the length of the bottom side away from the light-emitting surface. Fabrication of LED chips.
此外,当第一凸台11上也形成有发光层30和第二类型半导体层20时,第一凸台11、发光层30、第二类型半导体层20的截面形状也可以设置为倒梯形。In addition, when the light emitting layer 30 and the second type semiconductor layer 20 are also formed on the first boss 11, the cross-sectional shape of the first boss 11, the light emitting layer 30, and the second type semiconductor layer 20 may also be set to an inverted trapezoid.
在一种可能的实现方式中,如图1所示,倒梯形的底角α的范围为10°~80°。具体地,本实施例中,倒梯形的底角可以在10°~80°范围内取任意值,例如第二凸台12、发光层30、第二类型半导体层20构成的层叠结构的截面形状为等腰梯形,该等腰梯形的底角可以设置为60°,这样的设置便于微发光二极管的制作。In a possible implementation manner, as shown in FIG. 1, the range of the base angle α of the inverted trapezoid is 10°-80°. Specifically, in this embodiment, the bottom angle of the inverted trapezoid can take any value in the range of 10° to 80°, for example, the cross-sectional shape of the laminated structure composed of the second boss 12, the light emitting layer 30, and the second type semiconductor layer 20 It is an isosceles trapezoid, and the bottom angle of the isosceles trapezoid can be set to 60°, which is convenient for the manufacture of micro-light emitting diodes.
在一种可能的实现方式中,第一类型电极层40和第二类型电极层50为金属电极层,在上述实施方式的基础上,第一类型电极层40和第二类型电极 层50覆盖微发光二极管的侧壁,本实施例中,将第一类型电极层40和第二类型电极层50设置为金属电极层,金属的反射率较高,进一步增大了第一类型电极层40和第二类型电极层50的反射率,避免了侧壁出光。优选地,第一类型电极层40和第二类型电极层50的材料包括银、铝等,银、铝金属为常见的反射金属材料,廉价易得,制作工艺简单。In a possible implementation manner, the first type electrode layer 40 and the second type electrode layer 50 are metal electrode layers. On the basis of the foregoing embodiment, the first type electrode layer 40 and the second type electrode layer 50 cover the micro On the sidewall of the light emitting diode, in this embodiment, the first type electrode layer 40 and the second type electrode layer 50 are set as metal electrode layers, and the reflectivity of the metal is relatively high, which further increases the first type electrode layer 40 and the second type electrode layer 40 and the second type electrode layer. The reflectivity of the second type electrode layer 50 prevents light from the sidewalls. Preferably, the materials of the first type electrode layer 40 and the second type electrode layer 50 include silver, aluminum, etc., and silver and aluminum are common reflective metal materials, which are cheap and easy to obtain, and the manufacturing process is simple.
在一种可能的实现方式中,第二凸台12、发光层30、第二类型半导体层20的形状为圆台或棱台。需要说明的是,第二凸台12、发光层30、第二类型半导体层20的形状指的是第二凸台12、发光层30、第二类型半导体层20构成的层叠结构的形状,如图2所示,凸台、发光层30、第二类型半导体层20构成的层叠结构可以为圆台,也可以为棱台,具体可以为四棱台,此种形状可有效简化制备生产工艺。In a possible implementation manner, the shape of the second boss 12, the light emitting layer 30, and the second type semiconductor layer 20 is a truncated cone or a prism cone. It should be noted that the shape of the second boss 12, the light emitting layer 30, and the second type semiconductor layer 20 refers to the shape of the laminated structure composed of the second boss 12, the light emitting layer 30, and the second type semiconductor layer 20, such as As shown in FIG. 2, the laminated structure composed of the boss, the light-emitting layer 30 and the second type semiconductor layer 20 can be a truncated cone, or a truncated cone, specifically a quadrangular truncated cone. This shape can effectively simplify the manufacturing process.
实施例二Example two
本公开实施例二提供的显示面板包括上述实施例一中提供的微发光二极管芯片,其中,微发光二极管芯片的结构、功能及实现可参照上述实施例中的具体描述,此处不再赘述。本实施例提供的显示面板可以应用于手机、平板电脑、智能手表、电子书、导航仪、电视、数码相机等任意包括微发光二极管芯片的、具有显示功能的设备中。本实施例提供的显示面板也具有与实施一所提供的微发光二极管芯片相同的优点,在此不再赘述。The display panel provided in the second embodiment of the present disclosure includes the micro-light-emitting diode chip provided in the first embodiment. For the structure, function, and implementation of the micro-light-emitting diode chip, reference may be made to the specific description in the foregoing embodiment, and will not be repeated here. The display panel provided in this embodiment can be applied to any device with a display function including a micro light emitting diode chip, such as a mobile phone, a tablet computer, a smart watch, an e-book, a navigator, a TV, a digital camera, and the like. The display panel provided in this embodiment also has the same advantages as the micro light-emitting diode chip provided in the first embodiment, which will not be repeated here.
最后应说明的是:以上各实施例仅用以说明本公开的技术方案,而非对其限制;尽管参照前述各实施例对本公开进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分或者全部技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本公开各实施例技术方案的范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present disclosure, not to limit it; although the present disclosure has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: The technical solutions recorded in the foregoing embodiments can still be modified, or some or all of the technical features can be equivalently replaced; these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the technical solutions of the embodiments of the present disclosure. range.

Claims (17)

  1. 一种微发光二极管芯片,包括:A micro light emitting diode chip, including:
    第一类型半导体层,所述第一类型半导体层包括第一凸台和第二凸台,所述第一凸台与所述第二凸台之间形成凹陷区;A first type semiconductor layer, the first type semiconductor layer includes a first boss and a second boss, and a recessed area is formed between the first boss and the second boss;
    层叠设置于第二凸台上的发光层和第二类型半导体层;Stacking the light emitting layer and the second type semiconductor layer arranged on the second boss;
    第一类型电极层,覆盖所述第一凸台以及部分所述凹陷区;A first type electrode layer covering the first boss and part of the recessed area;
    第二类型电极层;The second type of electrode layer;
    绝缘钝化层,覆盖所述第二凸台的侧壁、部分所述第二类型半导体层远离所述发光层的一面以及位于所述凹陷区内的至少部分所述第一类型电极层;和An insulating passivation layer covering the sidewalls of the second boss, part of the side of the second type semiconductor layer away from the light emitting layer, and at least part of the first type electrode layer located in the recessed area; and
    填充层,所述填充层至少部分填充在所述凹陷区,其中,A filling layer, the filling layer is at least partially filled in the recessed area, wherein,
    所述第二类型电极层覆盖所述绝缘钝化层和部分所述第二类型半导体层远离所述发光层的一面。The second type electrode layer covers the insulating passivation layer and a part of the second type semiconductor layer away from the light emitting layer.
  2. 根据权利要求1所述的微发光二极管芯片,其中,所述填充层包裹所述第一类型电极层、所述绝缘钝化层和所述第二类型电极层。4. The micro light emitting diode chip of claim 1, wherein the filling layer wraps the first type electrode layer, the insulating passivation layer, and the second type electrode layer.
  3. 根据权利要求2所述的微发光二极管芯片,其中,所述填充层至少部分填充在所述第一凸台与所述第二凸台之间的凹陷区内。3. The micro light emitting diode chip of claim 2, wherein the filling layer is at least partially filled in the recessed area between the first boss and the second boss.
  4. 根据权利要求3所述的微发光二极管芯片,其中,所述填充层还设置在所述第一凸台和所述第二凸台的外侧。3. The micro light emitting diode chip according to claim 3, wherein the filling layer is further provided on the outer side of the first boss and the second boss.
  5. 根据权利要求1或2所述的微发光二极管芯片,其中,所述填充层为环氧树脂胶或旋涂玻璃。The micro light emitting diode chip according to claim 1 or 2, wherein the filling layer is epoxy resin glue or spin-on glass.
  6. 根据权利要求1所述的微发光二极管芯片,其中,还包括第一焊盘和第二焊盘,所述第一焊盘设置在所述第一类型电极层上远离所述第一类型半导体层的一侧,所述第二焊盘设置在所述第二类型电极层上远离所述第二类型半导体层的一侧。The micro light emitting diode chip according to claim 1, further comprising a first bonding pad and a second bonding pad, the first bonding pad being disposed on the first type electrode layer away from the first type semiconductor layer The second pad is disposed on the side of the second type electrode layer away from the second type semiconductor layer.
  7. 根据权利要求4所述的微发光二极管芯片,其中,所述第一焊盘的远 离所述第一类型半导体层的一侧与所述第二焊盘的远离所述第一类型半导体层的一侧在水平方向上平齐,且所述第一焊盘的远离所述第一类型半导体层的一侧与所述填充层的远离所述第一类型半导体层的一侧在水平方向上平齐或所述第一焊盘从所述填充层凸出。The micro light emitting diode chip according to claim 4, wherein a side of the first pad away from the first type semiconductor layer and a side of the second pad away from the first type semiconductor layer The sides are flush in the horizontal direction, and the side of the first pad away from the first type semiconductor layer is flush with the side of the filling layer away from the first type semiconductor layer in the horizontal direction Or the first pad protrudes from the filling layer.
  8. 根据权利要求7所述的微发光二极管芯片,其中,所述第一凸台上层叠设置有发光层和第二类型半导体层。8. The micro light emitting diode chip according to claim 7, wherein a light emitting layer and a second type semiconductor layer are stacked on the first boss.
  9. 根据权利要求8所述的微发光二极管芯片,其中,所述第一类型电极层形成在所述第一凸台上,并分别与所述第一类型半导体层、所述发光层、所述第二类型半导体层相接触。8. The micro light emitting diode chip according to claim 8, wherein the first type electrode layer is formed on the first boss and is respectively connected to the first type semiconductor layer, the light emitting layer, and the The two types of semiconductor layers are in contact.
  10. 根据权利要求1所述的微发光二极管芯片,其中,以垂直于出光面的平面为截面,所述第二凸台、所述发光层、所述第二类型半导体层的截面形状为倒梯形。3. The micro light emitting diode chip of claim 1, wherein the cross section of the second boss, the light emitting layer, and the second type semiconductor layer is an inverted trapezoid with a plane perpendicular to the light emitting surface as a cross section.
  11. 根据权利要求10所述的微发光二极管芯片,其中,所述倒梯形的底角在10°~80°范围内。The micro light emitting diode chip of claim 10, wherein the bottom angle of the inverted trapezoid is in the range of 10° to 80°.
  12. 根据权利要求11所述的微发光二极管芯片,其中,所述倒梯形为等腰梯形,所述等腰梯形的底角为60°。11. The micro light emitting diode chip of claim 11, wherein the inverted trapezoid is an isosceles trapezoid, and the bottom angle of the isosceles trapezoid is 60°.
  13. 根据权利要求1所述的微发光二极管芯片,其中,所述第一类型电极层和所述第二类型电极层为金属电极层。The micro light emitting diode chip according to claim 1, wherein the first type electrode layer and the second type electrode layer are metal electrode layers.
  14. 根据权利要求13所述的微发光二极管芯片,其中,所述第一类型电极层和所述第二类型电极层的材料相同或不同,所述第一类型电极层和所述第二类型电极层的材料包括银和铝。The micro light emitting diode chip according to claim 13, wherein the materials of the first type electrode layer and the second type electrode layer are the same or different, and the first type electrode layer and the second type electrode layer The materials include silver and aluminum.
  15. 根据权利要求1所述的微发光二极管芯片,其中,所述第二凸台、所述发光层、所述第二类型半导体层的形状为圆台或棱台。4. The micro light emitting diode chip according to claim 1, wherein the shape of the second boss, the light emitting layer, and the second type semiconductor layer is a truncated cone or a truncated cone.
  16. 根据权利要求1所述的微发光二极管芯片,其中,所述第二凸台、所述发光层、所述第二类型半导体层的形状为四棱台。The micro light emitting diode chip of claim 1, wherein the shape of the second boss, the light emitting layer, and the second type semiconductor layer is a quadrangular pyramid.
  17. 一种显示面板,包括权利要求1-16任一项所述的微发光二极管芯片。A display panel comprising the micro light emitting diode chip according to any one of claims 1-16.
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