WO2021056545A1 - 一种可调光学相位阵列的制作方法及可调光学相位阵列 - Google Patents
一种可调光学相位阵列的制作方法及可调光学相位阵列 Download PDFInfo
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- WO2021056545A1 WO2021056545A1 PCT/CN2019/109092 CN2019109092W WO2021056545A1 WO 2021056545 A1 WO2021056545 A1 WO 2021056545A1 CN 2019109092 W CN2019109092 W CN 2019109092W WO 2021056545 A1 WO2021056545 A1 WO 2021056545A1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G02F1/125—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves in an optical waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G02F1/116—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves using an optically anisotropic medium, wherein the incident and the diffracted light waves have different polarizations, e.g. acousto-optic tunable filter [AOTF]
Definitions
- This application relates to the technical field of beam manipulation, and in particular to a manufacturing method of an adjustable optical phase array and an adjustable optical phase array.
- Beam steering is the core device in the fields of lidar, optical communications, etc.
- Traditional beam steering design solutions usually use mechanical vibrating mirrors, microelectromechanical system (MEMS) micromirrors, double prisms, photoelectric crystals, and liquid crystals.
- MEMS microelectromechanical system
- the beam is controlled.
- the mechanical or micro-mechanical MEMS achieves the disadvantages of slower beam manipulation speed, low control flexibility, poor stability and reliability.
- the double prism has the problem of uncontrollable and irregular scanning area when performing beam manipulation.
- photoelectric crystals have the problems of small beam scanning angle, large crystal volume, high price, and high driving power consumption.
- the spatial light modulator based on liquid crystal is relatively mature, it has slow speed, complicated driving method, and durable liquid crystal material. The problem of weak high and low temperature capabilities.
- One of the objectives of the embodiments of the present application is to provide a method for manufacturing an adjustable optical phase array and an adjustable optical phase array, aiming to solve the problem of slow beam manipulation speed, low control flexibility, and stability in beam manipulation in related technologies. The problem of poor performance and reliability.
- an adjustable optical phase array including: a substrate layer, a distributed Bragg reflector, a support layer, a piezoelectric layer, an antenna array, and a transducer for mutual conversion of phase control signals and surface waves ⁇ module;
- the distributed Bragg reflector is arranged on the surface of the substrate layer, the support layer is arranged between the piezoelectric layer and the distributed Bragg reflector, and the antenna array and the transducer module are arranged on A Fabry Perot cavity is formed between the surface of the piezoelectric layer, the antenna array and the distributed Bragg reflector.
- a manufacturing method of an adjustable optical phase array includes:
- a distributed Bragg reflector is formed on the surface of the substrate layer
- a supporting layer is provided on the antenna array and the distributed Bragg reflector, so that the antenna array and the distributed Bragg reflector form a Fabry-Perot resonant cavity.
- the manufacturing method of the adjustable optical phase array provided by the embodiments of the application and the beneficial effect of the adjustable optical phase array are: the antenna array and the distributed Bragg reflector are used to form a Fabry-Perot resonant cavity, and the transducer module The phase control signal and the surface wave are converted into each other, and the surface wave is transmitted to the antenna array through the piezoelectric layer, so that the Fabry-Perot resonant cavity generates corresponding oscillations, so as to control the output phase of the antenna array. Make adjustments to achieve the purpose of manipulating the beam.
- FIG. 1 is a diagram of the relationship between wavelength, optical path, amplitude, and phase provided by an embodiment of the application;
- FIG. 2 is a schematic structural diagram of an adjustable optical phase array provided by an embodiment of the application.
- Fig. 3 is a top view of an adjustable optical phase array provided by an embodiment of the application.
- 4a, 4b, and 4c are respectively structural schematic diagrams of various interdigital transducers provided by embodiments of the application;
- 5a and 5b are respectively schematic diagrams of different structures using the same material for the piezoelectric layer and the antenna array provided by the embodiments of the application.
- Fig. 6 is a top view of an adjustable optical phase array provided by another embodiment of the application.
- FIG. 7 is a schematic diagram of an adjustable optical phase array structure provided by another embodiment of the application.
- FIG. 8 is a schematic diagram of an adjustable optical phase array structure provided by another embodiment of the application.
- FIG. 9 is a top view of an adjustable optical phase array structure provided by another embodiment of the application.
- FIG. 10 is a schematic diagram of the layout of the interdigital transducer array provided by an embodiment of the application.
- FIG. 11 is a schematic diagram of a phased array in which surface acoustic waves propagate at an angle of 20 degrees to the horizontal in the antenna array area provided by an embodiment of the application;
- FIG. 12 is a far-field distribution diagram of the light spot when the surface acoustic wave propagates at an angle of 20 degrees to the horizontal in the antenna array area provided by an embodiment of the application;
- FIG. 13 is a schematic diagram of a phased array in which surface acoustic waves propagate at an angle of 45 degrees to the horizontal in the antenna array area provided by an embodiment of the application;
- Fig. 14 is a far-field distribution diagram of a light spot of a surface acoustic wave propagating at an angle of 45 degrees to the horizontal in the antenna array area provided by an embodiment of the application.
- an optical antenna is used in the embodiment of the present application to provide 0-2 ⁇ phase delay control.
- the embodiment of the present application uses surface acoustic waves to control the response amplitude and phase of the antenna array.
- the electrical signals are converted into surface acoustic waves by inputting an interdigital transducer.
- a Fabry-Perot (Fabry-Perot, FP) resonant cavity is formed between the antenna array and the distributed Bragg reflector, which can greatly reduce the driving power of the surface acoustic wave and enhance the phase Delay amount.
- the variation curve of the amplitude and phase of an asymmetric FP cavity at the resonance position with wavelength or optical path length in the cavity is shown in Figure 1.
- the higher the Q value of the cavity The greater the slope of the phase change, and vice versa. Therefore, by adjusting the optical path in the cavity, a phase adjustment range of 0-2 ⁇ can be obtained, and the higher the resonance Q value, the smaller the optical path range that needs to be adjusted.
- FIG. 2 is a schematic structural diagram of a surface acoustic wave modulation-based adjustable optical phase array provided by an embodiment of the application.
- the adjustable optical phase array in this embodiment includes: a substrate layer 10, a distributed Bragg reflector 20, support layer 30, piezoelectric layer 40, antenna array 60, and transducer module 50 for mutual conversion of phase control signals and surface waves; the distributed Bragg reflector 20 is arranged on the substrate On the surface of the bottom layer 10, the support layer 30 is arranged between the piezoelectric layer 40 and the distributed Bragg reflector 20, and the antenna array 60 and the transducer module 50 are arranged on the piezoelectric layer 40 On the surface, a Fabry Perot cavity is formed between the antenna array 60 and the distributed Bragg reflector 20.
- the transducer module 50 uses the inverse piezoelectric effect to convert the input phase control signal into a surface wave. Since the transducer module 50 is located on the surface of the piezoelectric layer 40, the surface wave is along the surface of the piezoelectric layer 40. spread. In this embodiment, surface waves are mechanical waves. Since the piezoelectric layer 40 is formed of piezoelectric materials that support the excitation and propagation of surface waves, when the surface waves pass through the antenna array 60, the antenna array 60 and the distributed Bragg reflector 20 The phase delay of the Fabry-Perot resonant cavity formed in between is modulated, so as to adjust the delay of the output phase of the antenna array 60. At this time, the incident beam is directly hit on the antenna array 60. Therefore, the signal source The output phase of the antenna array 60 can be adjusted by providing the phase control signal to achieve the purpose of beam control.
- the transducer module 50 is used to realize the mutual conversion between the phase control signal and the surface wave.
- the phase control signal may be an electrical signal
- the transducer module 50 converts the electrical signal into a corresponding surface wave.
- the user can generate the corresponding surface wave by adjusting the size, frequency and wave curve of the electrical signal to drive the antenna array 60 to generate the corresponding motion, thereby adjusting the Fabry-Perot resonant cavity to achieve the adjustment of the adjustable optical phase array The purpose of output phase adjustment.
- phase control signal can also be a laser signal.
- the transducer module 50 converts the laser signal into a corresponding surface wave to drive the antenna array 60 to produce a corresponding motion, thereby performing a corresponding motion on the Fabry-Perot cavity. Adjust, achieve the purpose of adjusting the output phase of the adjustable optical phase array.
- the surface wave is a mechanical wave propagating along the interface between different media, and the antenna array 60 performs simple resonance under the action of the surface wave, thereby adjusting the Fabry-Perot cavity.
- the surface wave may be a surface acoustic wave.
- the transducer module 50 includes one or more sets of interdigital transducers, and each set of interdigital transducers includes at least one input fork for converting electrical signals into surface acoustic waves. Refers to the transducer.
- each group of the interdigital transducers further includes an output interdigital transducer arranged opposite to the input interdigital transducer and used for converting surface acoustic waves into electrical signals, and the antenna
- the array 60 is provided between the input interdigital transducer and the output interdigital transducer.
- the input interdigital transducer in the transducer module 50 uses the inverse piezoelectric effect to convert the input electrical signal into a surface acoustic wave. Since the input interdigital transducer is located on the surface of the piezoelectric layer 40, this The surface acoustic wave propagates along the surface of the piezoelectric layer 40, and finally the output interdigital transducer at the other end converts the surface acoustic wave into an electrical signal for output. In this embodiment, the surface acoustic wave is an acoustic signal.
- the piezoelectric layer 40 is formed of a piezoelectric material that supports the excitation and propagation of the surface acoustic wave, when the surface acoustic wave passes through the antenna array 60, the antenna array 60 and the distributed The phase delay of the Fabry-Perot cavity formed between the Bragg reflectors 20 is modulated, thereby adjusting the output phase of the antenna array 60. At this time, the incident light is directly irradiated on the antenna array 60. The electrical signal provided by the signal source is converted into a surface acoustic wave to adjust the emission phase of the antenna array 60 to achieve the purpose of beam control.
- the transducer module 50 includes two pairs of interdigital transducers, and the included angle between the two pairs of interdigital transducers is 90 degrees.
- FIG. 3 is a top view of an adjustable optical phase array provided by an embodiment of the application.
- the transducer module 50 includes an input interdigital transducer 511, an input interdigital transducer 521, and an output interdigital transducer
- the transducer 512 and the output interdigital transducer 522, the input interdigital transducer 511 and the output interdigital transducer 512 form a set of interdigital transducers, the input interdigital transducer 521 and the output interdigital transducer
- the device 522 forms a set of interdigital transducers.
- the interdigital transducers in this embodiment are all arranged on the surface of the piezoelectric layer 40, and their shape is like a cross-shaped pattern of the fingers of two hands.
- the input fork The finger transducer 511 is composed of multiple metal electrodes alternately connected to two bus bars.
- the acoustic wavelength ( ⁇ ) corresponding to the frequency is equal to the period of the interdigital transducer, the excited surface acoustic wave is the strongest, and the total amplitude of the surface acoustic waves excited by other frequencies is very small due to the phase cancellation. Therefore, the interdigital transducer has frequency selectivity.
- interdigital transducers of different wavelengths are designed to obtain surface acoustic wave devices of different frequencies.
- the structure of the interdigital transducer may be at least one of a chirped structure, an inclined structure, and an apodized structure.
- the signal frequency of the interdigital transducer changes linearly with time, and the frequency changes due to modulation at the front and rear edges of the pulse, making the signal spectrum Broadening, and is characterized by a chirp coefficient (also called a line width widening factor).
- the interdigital electrode when the structure of the interdigital transducer is an inclined structure, the interdigital electrode changes periodically along the device aperture direction. As shown in Figure 4b, the upper part of the device excites the signal of the high frequency part, and the lower part of the device excites The low-frequency part of the signal, thereby dividing the drive signal into multiple sub-channels of different frequencies, each channel produces a narrow passband of different frequencies, and finally a wide passband is synthesized, thereby achieving a wider band filter design.
- the interdigital transducer when the structure of the interdigital transducer is an apodization structure, as shown in FIG. 4a, the interdigital transducer is also called an apodization and chirped interdigital transducer.
- the frequency of the signal changes non-linearly with time. Specifically, the refractive index of the medium will dynamically change according to the influence of the dynamic electrical signal modulation, which will cause the phase of the optical signal propagating in the medium to also dynamically change. This phase change is directly reflected in the frequency of the optical signal. Dynamic changes.
- the structure of the interdigital transducer as a chirped structure, an inclined structure or an apodized structure, a beam scanning range with a larger field of view can be obtained.
- the frequency of the input signal can be filtered, so that the driving frequency can be set to at least one of single frequency, multi-frequency, and broadband sweep.
- the center response frequency of the interdigital transducer when the center response frequency of the interdigital transducer is 900MHz and the bandwidth is greater than 300MHz, it can achieve a scanning field angle of more than 10 degrees, and a 60-80 degree scanning can be achieved after a 5-8x beam expander lens. Angle of view.
- the antenna array 60 includes a plurality of nano antenna elements, the refractive index of the nano antenna elements is greater than 1.9, and the plurality of nano antenna elements are arranged periodically.
- a plurality of nano-antenna elements are repeatedly arranged, and the distance between adjacent nano-antenna elements is smaller than the wavelength of incident light.
- the size of the nano-antenna element is less than half of the wavelength of the incident light.
- the antenna array 60 in this embodiment is made of high-refractive materials.
- the electroelastic effect of the surface acoustic wave generated and propagated on the piezoelectric layer 40 formed by the suspended piezoelectric material and the acousto-optic modulation effect of the surface acoustic wave on the antenna array 60 adjust the phase delay amount to achieve low power conditions The purpose of obtaining a large amount of phase delay.
- the material of the nano antenna element is any one of silicon, gallium arsenide, aluminum gallium arsenide, silicon nitride, and indium phosphide.
- the shape of the nano antenna element is at least one of a cylinder, a square, a cross, a round hole, a square hole, a cross hole, and a V-shape.
- the antenna array layer is etched by using different masks to form nano-antenna elements of different shapes.
- the shape of the nano-antenna elements is not limited to cylinders, squares, crosses, round holes, square holes, Cross hole, V-shaped, can be set according to user needs.
- the structure of the nano-antenna element in the antenna array 60 in this embodiment is cylindrical, and the center wavelength of the response of the adjustable optical phase array in this embodiment may be the communication wavelength band. 1550nm, where the composition material of the nano-antenna element can be any one of monocrystalline silicon, polycrystalline silicon or amorphous silicon.
- the material of the piezoelectric layer 40 is the same as the material of the antenna array 60.
- the manufacturing process of the adjustable optical phase array structure can be simplified.
- the antenna element is supported by the support layer 30.
- a piezoelectric layer 40 is provided between the antenna array 60 and the transducer module 50, and the surface wave generated by the transducer module 50 is conducted to the antenna array through the piezoelectric layer 40.
- the antenna array 60 and the piezoelectric layer 40 in this embodiment are formed of the same piezoelectric material.
- the antenna array 60 and the piezoelectric layer 40 can both be made of materials with piezoelectric characteristics. It is composed of AlGaAs, as shown in Fig. 6.
- the nano-antenna element in the antenna array 60 in this embodiment adopts a cross-shaped structure and is formed by crossing vertical grating structures. At this time, the antenna array can be used as a suspended piezoelectric film.
- the piezoelectric layer 40 is supported by the support layer 30 to form a suspended piezoelectric film, wherein the suspension height is less than 15um.
- the support layer 30 is provided between the piezoelectric layer 40 and the distributed Bragg reflector 20. Since the surface of the piezoelectric layer 40 is provided with an antenna array 60, the antenna array 60 and the distributed Bragg reflector 20 A Fabry-Perot resonant cavity (FP cavity) is formed in between. When the surface acoustic wave is transmitted to the area of the antenna array 60, the Fabry-Perot resonant cavity between the antenna array 60 and the distributed Bragg reflector 20 oscillates. , So as to adjust the output phase of the adjustable optical array structure.
- FP cavity Fabry-Perot resonant cavity
- the piezoelectric layer 40 is made to form a piezoelectric film suspension structure through the support layer 30, which can also greatly enhance the electroelastic effect generated by the surface acoustic wave, so that a complete 0-2 ⁇ phase can be obtained with a small optical path adjustment amount. The purpose of the delay.
- the supporting layer includes a plurality of supporting structures, and the interval between adjacent supporting structures is greater than the antenna period.
- the antenna period is the separation distance between adjacent nano-antenna elements.
- the interval between adjacent support structures is greater than 10um.
- the supporting material used for the supporting layer 30 may be any one of silicon (Si), gallium arsenide (GaAs), or silicon dioxide (SiO 2 ).
- both the antenna array 60 and the piezoelectric layer 40 may be composed of AlGaAs, a material with piezoelectric characteristics, and the supporting material used for the supporting layer 30 is gallium arsenide (GaAs), so as to facilitate the choice between the AlGaAs and AlGaAs during the preparation process. ⁇ etching.
- GaAs gallium arsenide
- FIG. 7 is a schematic diagram of an adjustable optical phase array structure provided by another embodiment of the application.
- an electromechanical layer is formed on the antenna array 60 made of AlGaAs material.
- Piezoelectric materials with higher coupling coefficients are used for energy conversion.
- the piezoelectric materials can be lithium niobate, zinc oxide, aluminum nitride, or the like.
- the same mask as the AlGaAs layer can be used for etching in the area of the antenna array 60, so that higher electromechanical coupling efficiency can be obtained without increasing process complexity.
- the thickness of the piezoelectric layer 40 is greater than 200 nm.
- the suspension height of the piezoelectric layer 40 formed by the suspension piezoelectric film is less than 15 um, the thickness of the suspension piezoelectric film is less than 1 um, and the material used for the piezoelectric layer 40 is lithium niobate.
- the distributed Bragg reflector 20 includes a plurality of alternately stacked dielectric layers, and any two adjacent dielectric layers have different refractive indexes.
- the material of the dielectric layer is at least one of titanium oxide (TiOx), silicon dioxide (SiO 2 ), silicon nitride (SiNx), gallium arsenide (GaAs), and aluminum gallium arsenide (AlGaAs). Two.
- the distributed Bragg reflector 20 can be formed by stacking dielectric layers such as TiOx/SiO 2 , SiNx/SiO 2 or AlGaAs/GaAs, due to titanium oxide (TiOx), silicon dioxide (SiO 2 ), silicon nitride (SiNx) , Gallium arsenide (GaAs) and aluminum gallium arsenide (AlGaAs) have different refractive indices.
- dielectric layers such as TiOx/SiO 2 , SiNx/SiO 2 or AlGaAs/GaAs, due to titanium oxide (TiOx), silicon dioxide (SiO 2 ), silicon nitride (SiNx) , Gallium arsenide (GaAs) and aluminum gallium arsenide (AlGaAs) have different refractive indices.
- the reflectance of the distributed Bragg reflector 20 can reach more than 99%.
- the reflectivity of the distributed Bragg reflector 20 can reach 99.9%.
- the number of stacking cycles represents the number of times that dielectric layers of different refractive indices are stacked.
- the distributed Bragg reflector 20 adopts AlGaAs/GaAs dielectric layer stacking
- the number of stacking cycles is 12, it means that AlGaAs/GaAs is stacked twelve times. , That is, twelve layers of AlGaAs and twelve layers of GaAs are alternately stacked.
- the distributed Bragg reflector 20 is formed by alternately stacking 30 layers of AlGaAs/GaAs. At this time, the reflectivity of the adjustable optical phase array can reach 99.98%.
- the material of the substrate layer 10 is any one of silicon, gallium arsenide, quartz, sapphire, gallium nitride, and silicon carbide.
- FIG. 8 is a schematic diagram of an adjustable optical phase array structure provided by another embodiment of the application. See FIG. 8.
- the distribution is distributed through a wafer bonding method.
- the type Bragg reflector 20 and the piezoelectric layer 40 are separately prepared.
- the two layers are bonded together by the method of wafer bonding. Specifically, in this embodiment, a distributed Bragg reflector 20 is first formed on the substrate layer 10, and then a support layer 30 is formed on the distributed Bragg reflector 20.
- an antenna array is formed on the surface of the piezoelectric layer 40 60 and the transducer module 50. Finally, the above two parts are bonded together to form a complete adjustable optical phase array, see FIG. 9 for a top view.
- the antenna array 60 and the transducer module 50 provided on the surface of the piezoelectric layer 40 may be located between the piezoelectric layer 40 and the distributed Bragg reflector. Between 20, a Fabry Perot cavity is formed between the antenna array 60 and the distributed Bragg reflector 20.
- a bidirectional interdigital transducer (IDT) layout can produce a biaxial spot scan, but the spots are four spots symmetrically distributed on the four quadrants.
- the design of the interdigital transducer (IDT) can be made more flexible, so that the dual-axis control of a single exit spot can be better realized.
- the voltage-controlled variable capacitor or radio frequency vector modulator is used between each interdigital transducer to generate a phase delay, so as to realize the interdigital transducer
- the phase delay linear transformation of the phase delay achieves the purpose of adjusting the wavefront of the surface acoustic wave.
- a single set of interdigital transducer array design is used to achieve dual-axis scanning control of the light spot, thereby achieving surface acoustic wave beam control based on electronic circuits.
- this embodiment provides a method for fabricating an adjustable optical phase array as described in any of the above embodiments.
- the fabricating method includes: forming a distributed Bragg reflector on the surface of the substrate layer;
- the surface of the piezoelectric layer forms an antenna array and a transducer module, wherein the transducer module is used for mutual conversion of phase control signals and surface waves;
- a support layer is provided on the antenna array and the distributed Bragg reflector , So that the antenna array and the distributed Bragg reflector form a Fabry Perot cavity.
- the transducer module 50 uses the inverse piezoelectric effect to convert the input phase control signal into a surface wave. Since the transducer module 50 is located on the surface of the piezoelectric layer 40, the surface wave is along the surface of the piezoelectric layer 40. spread. In this embodiment, surface waves are mechanical waves. Since the piezoelectric layer 40 is formed of piezoelectric materials that support the excitation and propagation of surface waves, a support layer 30 is provided between the antenna array 60 and the distributed Bragg reflector 20, so that the antenna The array 60 and the distributed Bragg reflector 20 form an adjustable Fabry Perot cavity. When the surface wave passes through the antenna array 60, the Fabry Perot formed between the antenna array 60 and the distributed Bragg reflector 20 is affected.
- the phase delay of the resonant cavity is modulated to adjust the output phase of the antenna array 60.
- the incident beam is directly hit on the antenna array 60. Therefore, the phase control signal can be provided to the antenna array by the signal source.
- the exit phase of 60 is adjusted to achieve the purpose of beam control.
- Figure 11 is a schematic diagram of a phased array where a sawtooth waveform of a surface acoustic wave propagates at an angle of 20 degrees to the horizontal in the antenna array area
- Figure 12 is a light spot when a surface acoustic wave propagates at an angle of 20 degrees to the horizontal in the antenna array area Far-field distribution diagram.
- the angle sin ⁇ m ⁇ /d (m is an integer) of incident light after the phase delay processing of the antenna array, where ⁇ is the wavelength of the surface acoustic wave, and d is the antenna array The distance between adjacent in-phase nano-antenna elements.
- Fig. 12 is a polar diagram.
- Fig. 13 is a schematic diagram of a phased array in which a sine wave surface acoustic wave propagates at an angle of 45 degrees to the horizontal in the antenna array area. As shown in Fig. 13, the surface acoustic wave propagates at an angle of 45 degrees to the horizontal in the nano-antenna area.
- the far-field distribution diagram of the light spot produced is shown in Figure 14. Compared with the sawtooth wave, the sine wave in this embodiment is easier to generate, but there are two or more emitted light waves. In specific applications, the corresponding lidar optical system can be constructed to utilize and display the emitted light waves.
- the driving frequency of the input interdigital transducer is at least one of a single frequency, a multi-frequency, and a broadband sweep.
- the driving frequency of the input interdigital transducer is greater than 300 MHz.
- the bandwidth of the wideband frequency sweep is greater than 100 MHz.
- the arrangement period of the nano-antenna elements is less than the wavelength of incident light.
- the size of the antenna element is less than half of the wavelength of the incident light.
- the wavelength range of the incident light can be 0.1um-40um
- the size of the antenna element is less than half of the wavelength of the incident light
- the size range of the antenna element can be 0.001um-20um.
- each group of the interdigital transducers further includes an output interdigital transducer arranged opposite to the input interdigital transducer and used for converting surface acoustic waves into electrical signals, and the antenna
- the array 60 is provided between the input interdigital transducer and the output interdigital transducer.
- the signal source provides a phase control signal, outputs the interdigital transducer to convert the surface wave into a feedback electrical signal, receives the phase control signal through the host, the drive electrical signal and the feedback electrical signal, and according to the The feedback electrical signal and the phase control signal output the working state of the adjustable optical phase array.
- the transducer module 50 includes multiple sets of interdigital transducers, wherein the incident interdigital transducer converts the phase control signal into a surface acoustic wave, and the surface acoustic wave is transmitted along the piezoelectric layer to the output interdigital transducer.
- the output interdigital transducer converts the surface acoustic wave into a feedback electrical signal, by comparing the phase control signal with the feedback electrical signal, and analyzing the comparison result to determine whether the adjustable optical phase array is working normally, for example .
- the piezoelectric layer in the adjustable optical phase array is damaged or does not conform to the preset process parameters
- the surface acoustic wave generated by the interdigital transducer at one end is transmitted to the interdigital transducer at the other end, the acoustic surface The wave will have large loss or abnormality.
- the feedback electrical signal generated by the output interdigital transducer corresponds to the received surface acoustic wave. Therefore, by comparing the phase control signal with the feedback electrical signal, the Adjust the working state of the optical phase array to judge.
- outputting the working state of the adjustable optical phase array according to the feedback electrical signal and the phase control signal includes: obtaining the voltage difference between the feedback electrical signal and the phase control signal; Whether the voltage difference is within a preset voltage threshold range, if yes, then it is judged that the working state of the adjustable optical phase array is normal, and if not, it is judged that the working state of the adjustable optical phase array is abnormal.
- the voltage difference is used to characterize the power loss of the surface acoustic wave during transmission.
- the greater the loss the greater the voltage difference between the feedback electrical signal and the phase control signal.
- the user can set a preset voltage threshold range as needed. If the voltage difference is within the preset voltage threshold range, It is determined that the working state of the adjustable optical phase array is normal, and if the voltage difference is not within the preset voltage threshold range, it is determined that the working state of the adjustable optical phase array is abnormal.
- the adjustable optical phase array includes: a substrate layer, a distributed Bragg reflector, a support layer, a piezoelectric layer, an antenna array, and A transducer module for mutual conversion of phase control signals and surface waves; the distributed Bragg reflector is provided on the surface of the substrate layer, and the support layer is provided on the piezoelectric layer and the distributed Bragg reflector In between, the antenna array and the transducer module are arranged on the surface of the piezoelectric layer, a Fabry-Perot resonant cavity is formed between the antenna array and the distributed Bragg reflector, and the antenna array and the The distributed Bragg reflector forms a Fabry-Perot resonant cavity, the phase control signal and the surface wave are mutually converted through the transducer module, and the surface acoustic wave is conducted to the antenna array through the piezoelectric layer to The Fabry-Perot resonant cavity is caused to generate corresponding
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Abstract
Description
Claims (20)
- 一种可调光学相位阵列,其特征在于,包括:衬底层、分布式布拉格反射器、支撑层、压电层、天线阵列以及用于对相位控制信号与表面波进行相互转换的换能器模块;所述分布式布拉格反射器设于所述衬底层表面,所述支撑层设于所述压电层与所述分布式布拉格反射器之间,所述天线阵列和所述换能器模块设于所述压电层表面,所述天线阵列与所述分布式布拉格反射器形成法布里珀罗谐振腔。
- 如权利要求1所述的可调光学相位阵列,其特征在于,所述换能器模块包括一组或者多组叉指换能器,每组所述叉指换能器至少包括一个用于将相位控制信号转换为表面波的输入叉指换能器。
- 如权利要求2所述的可调光学相位阵列,其特征在于,每组所述叉指换能器包括与所述输入叉指换能器相对设置、用于将表面波转换为反馈信号的输出叉指换能器,所述天线阵列设于所述输入叉指换能器与所述输出叉指换能器之间。
- 如权利要求2所述的光学相位阵列,其特征在于,所述叉指换能器的结构为啁啾结构、倾斜结构以及变迹结构中的至少一种。
- 如权利要求1所述的可调光学相位阵列,其特征在于,所述天线阵列包括多个纳米天线元件,所述纳米天线元件的折射率大于1.9。
- 如权利要求5所述的可调光学相位阵列,其特征在于,所述纳米天线元件的形状为圆柱、方块、十字、圆孔、方孔、十字孔、V型中的至少一种。
- 如权利要求5所述的可调光学相位阵列,其特征在于,所述纳米天线元件的材料为硅、砷化镓、铝镓砷、氮化硅以及磷化铟中的任意一种。
- 如权利要求1所述的可调光学相位阵列,其特征在于,所述天线阵列的材料与所述压电层的材料相同。
- 如权利要求1所述的可调光学相位阵列,其特征在于,所述压电层 由支撑层支撑,以形成悬浮的压电薄膜,其中,悬浮高度小于15um。
- 如权利要求1所述的可调光学相位阵列,其特征在于,所述支撑层包括多个支撑结构,相邻的所述支撑结构之间的间隔大于天线周期。
- 如权利要求1所述的可调光学相位阵列,其特征在于,所述压电层的厚度大于200nm。
- 如权利要求1所述的可调光学相位阵列,其特征在于,所述分布式布拉格反射器包括多个交替堆叠的介质层,且任意两个相邻的所述介质层的折射率不同。
- 一种如权利要求1-12任一项所述的可调光学相位阵列的制作方法,其特征在于,所述制作方法包括:在衬底层表面形成分布式布拉格反射器;在压电层表面形成天线阵列和换能器模块,其中,所述换能器模块用于对相位控制信号与表面波进行相互转换;在所述天线阵列与所述分布式布拉格反射器设置支撑层,以使所述天线阵列与所述分布式布拉格反射器形成法布里珀罗谐振腔。
- 如权利要求13所述的制作方法,其特征在于,所述输入叉指换能器的驱动频率为单频率、多频率以及宽带扫频中的至少一种。
- 如权利要求14所述的制作方法,其特征在于,所述输入叉指换能器的驱动频率大于100MHz。
- 如权利要求14所述的制作方法,其特征在于,所述宽带扫频的带宽大于100MHz。
- 如权利要求13所述的制作方法,其特征在于,所述天线阵列中相邻纳米天线元件的间隔小于入射光波长。
- 如权利要求17所述的制作方法,其特征在于,所述纳米天线元件的尺寸小于入射光波长的二分之一。
- 如权利要求13所述的制作方法,其特征在于,所述换能器模块包 括一组或者多组叉指换能器,每组所述叉指换能器至少包括一个用于将相位控制信号转换为表面波的输入叉指换能器。
- 如权利要求19所述的制作方法,其特征在于,每组所述叉指换能器包括与所述输入叉指换能器相对设置、用于将表面波转换为反馈信号的输出叉指换能器,所述天线阵列设于所述输入叉指换能器与所述输出叉指换能器之间。
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