WO2021047896A1 - Manomètre de pression absolue comprenant une cellule de mesure de pression de mesure relative - Google Patents

Manomètre de pression absolue comprenant une cellule de mesure de pression de mesure relative Download PDF

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Publication number
WO2021047896A1
WO2021047896A1 PCT/EP2020/073635 EP2020073635W WO2021047896A1 WO 2021047896 A1 WO2021047896 A1 WO 2021047896A1 EP 2020073635 W EP2020073635 W EP 2020073635W WO 2021047896 A1 WO2021047896 A1 WO 2021047896A1
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WO
WIPO (PCT)
Prior art keywords
pressure
measuring
housing
measurement
measuring device
Prior art date
Application number
PCT/EP2020/073635
Other languages
German (de)
English (en)
Inventor
Heinz Walter
Original Assignee
Ifm Electronic Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ifm Electronic Gmbh filed Critical Ifm Electronic Gmbh
Publication of WO2021047896A1 publication Critical patent/WO2021047896A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously

Definitions

  • the invention relates to a measuring device for detecting the absolute pressure of a medium adjoining the pressure measuring device.
  • Pressure measuring devices or pressure sensors are used in many industrial sectors for measuring pressure. They often have a pressure measuring cell as a transducer for the process pressure and evaluation electronics for signal processing. Typical pressure measuring cells measure the pressure either capacitively or resistively.
  • Typical capacitive pressure measuring cells consist of a compact unit with a ceramic base body and an elastic membrane, an annular joint, typically a glass solder ring, being arranged between the base body and the membrane.
  • the resulting cavity between the base body and the diaphragm - also referred to as the measuring chamber - enables the diaphragm to move longitudinally as a result of the influence of pressure.
  • electrodes are provided which together form a measuring capacitor.
  • the effect of pressure causes deformation of the membrane, which results in a change in the capacitance of the measuring capacitor. With the help of an evaluation unit, the change in capacitance is recorded and converted into a pressure reading.
  • a capacitive pressure measuring device is known, for example, from DE 102010 062622 A1.
  • resistively measuring pressure cells record the deflection of the membrane with the help of electromechanical transducers, for example by means of strain gauges, which are deformed with the deflected membrane and convert the deflection into a corresponding resistance value or voltage or current value.
  • Such pressure measuring cells are available both in one piece in the form of a monolith, but also in two pieces with a base body and a thin membrane.
  • a resistive pressure measuring device is known, for example, from DE 102010035862 A1.
  • the so-called process connection is located on the lower part of the measuring device, through which the measuring device is connected to a container or pipe carrying the medium.
  • these pressure gauges are used for monitoring or control of processes. They are therefore often connected to higher-level control units (PLC) via a plug connection.
  • PLC higher-level control units
  • pressure measuring devices used in process measurement technology are provided to measure a relative pressure, that is to say the output of the pressure values recorded by the pressure measuring cell in relation to the ambient or atmospheric pressure.
  • a relative pressure that is to say the output of the pressure values recorded by the pressure measuring cell in relation to the ambient or atmospheric pressure.
  • atmospheric pressure in the room, which enables the longitudinal mobility of the measuring membrane of the measuring cell as a result of the influence of pressure.
  • this is the aforementioned measuring chamber between the base body and the membrane.
  • resistively measuring pressure measuring cell this is usually the entire interior of the housing of the measuring device, provided the measuring cell is not encapsulated.
  • the measuring devices that measure a relative pressure have a pressure compensation device that includes an opening of whatever type.
  • This opening can be arranged in the housing wall, as disclosed, for example, in DE 102013 200840 A1 by the applicant, or also in the plug connection, as known from DE 102012201 018 A1 by the applicant.
  • the measuring devices must be cleaned frequently in order to maintain hygienic conditions, which is done, for example, by means of a high pressure or steam jet.
  • DE 10232028 B4 proposes, for example, to provide an opening in the housing wall which is closed with a liquid-repellent and gas-permeable segment in order to achieve pressure equalization between the interior of the housing and the external environment of the housing.
  • the segment consists of a film, for example a plastic film, or a membrane, for example made of PTFE.
  • DE 19708 116 A1 proposes the use of a breathable and waterproof film, such as are known, for example, under the name Goretex® or Sympatex®.
  • the object of the invention is to propose an absolute pressure measuring device that can be produced simply and inexpensively.
  • the core of the invention is the use of a conventional, relatively measuring pressure measuring cell that does not require an evacuated cavity, as well as a barometric air pressure transducer that records the internal pressure within the measuring device housing, which also acts on the second side of the measuring membrane facing away from the medium.
  • a processing unit is also provided that increases the relative pressure measured value at the output of the evaluation electronics by the internal housing pressure recorded by the barometric air pressure transducer.
  • the measuring device can thus provide a measured value, for example via a cable connection, which is independent of external pressure conditions.
  • Both the pressure measuring cell and the barometric air pressure transducer can be manufactured or procured inexpensively, among other things because no special structural requirements have to be placed on the barometric air pressure transducer if it is located inside the measuring device housing and thus against external, in particular mechanical influences of a process environment is protected. Furthermore, no special requirements have to be placed on the measuring device housing or the connection between the measuring device housing and the process connection, e.g. with regard to tightness, since the barometric air pressure transducer immediately detects pressure changes inside the measuring device housing and calculates them accordingly with the measurement results of the relatively measuring pressure measuring cell . It is particularly advantageous to design the barometric air pressure transducer as an SMD component, since these components are available very inexpensively.
  • FIG. 1 an electronic pressure measuring device
  • FIG. 2 shows a cross section through the pressure measuring device.
  • FIG. 1 shows an electronic pressure measuring device 1 for use in process measurement technology, which is manufactured and sold by the applicant under the designation PNxxxx.
  • the measuring device 1 consists essentially of a housing 2, which is divided into an upper part 3 and a lower part 4.
  • the lower part 4, also referred to as a process connection on the one hand includes the sensor unit 10 (not shown) in the form of a pressure measuring cell and on the other hand enables the mechanical connection of the measuring device 1 with the container or pipe containing the medium.
  • the evaluation electronics 30 (not shown), which are provided for evaluating and processing the measurement signals supplied by the sensor unit 10, which can then be picked up via the plug connection 8 and, for example, forwarded to a PLC.
  • the measuring device 1 is operated via the operating elements 7, i.e. a parameterization or a setting of essential key data, such as the switching points, is carried out.
  • the respective actions are displayed to the user via the display 6.
  • FIG. 2 shows a very schematic representation of a cross section through the measuring device 1 together with a representation of a conventional capacitive, Relatively measuring pressure measuring cell 10.
  • the pressure measuring cell 10 consists essentially of a base body 12 and a measuring membrane 11.
  • the structure and mode of operation of such pressure measuring cells is well known, for example from EP 2606330 B1 of the applicant.
  • a capacitive pressure measuring cell 10 is shown as an example in FIG. 2, the invention can also be implemented with a resistive pressure measuring cell, as is known, for example, from DE 102010035862 B4 by the applicant.
  • the housing 2 of the measuring device 1 essentially contains the electronic units, consisting of evaluation electronics 30 and a processing unit 40, which is preferably designed as a microcontroller.
  • the pressure measuring cell 10 is connected to the interior of the housing 2 via a ventilation channel 13, i.e. the same pressure pi is applied to the side of the measuring membrane 11 facing away from the medium that also prevails in the interior of the housing 2.
  • a ventilation channel 13 i.e. the same pressure pi is applied to the side of the measuring membrane 11 facing away from the medium that also prevails in the interior of the housing 2.
  • the measuring device 1 does not have such a pressure compensation opening in the housing 2.
  • the pressure pi in the interior of the housing 2 can change permanently, primarily due to temperature influences, which must be taken into account in terms of measurement technology.
  • a barometric air pressure transducer 20 is provided in the interior of the housing 2, which is preferably arranged as an SMD component on the same circuit carrier as the evaluation electronics 30 and the processing unit 40.
  • An example of such a barometric air pressure transducer 20 is the Bosch BME280.
  • the relative pressure measured value at the output of the evaluation electronics 30 is increased by the measured internal pressure value pi of the housing recorded by the barometric air pressure transducer 20 and is made available at the indicated plug connection 8 for further processing.
  • the housing 2 of the measuring device 1 therefore does not have to be be hermetically sealed. Every change in pressure inside the housing 2 is detected by the barometric air pressure transducer 20 and taken into account by the processing unit 40 when calculating the process pressure.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un dispositif de mesure permettant de mesurer la pression absolue d'un milieu dans un récipient, possédant au moins un raccord de traitement (3) comprenant une cellule de mesure de pression (10) de mesure relative, et un boîtier (2) placé sur le raccord de traitement (3), dans la chambre intérieure de laquelle est disposée une unité électronique d'évaluation (30) permettant d'évaluer et de traiter un signal de mesure généré par la cellule de mesure de pression (10). Afin de rendre le dispositif de mesure simple et économique à produire, selon l'invention, le boîtier (2) comprend une unité de traitement (40) et un convertisseur de pression d'air barométrique (20) permettant de détecter la pression intérieure de boîtier pI régnant à l'intérieur du boîtier (2), en plus de l'unité électronique d'évaluation (30) et, dans l'unité de traitement (40), la valeur de mesure de pression relative à la sortie de l'unité électronique d'évaluation (30) est augmentée par la pression intérieure de boîtier pI détectée par le convertisseur de pression d'air barométrique (20).
PCT/EP2020/073635 2019-09-09 2020-08-24 Manomètre de pression absolue comprenant une cellule de mesure de pression de mesure relative WO2021047896A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019124083.2 2019-09-09
DE102019124083.2A DE102019124083B3 (de) 2019-09-09 2019-09-09 Absolutdruckmessgerät mit einer relativ messenden Druckmesszelle

Publications (1)

Publication Number Publication Date
WO2021047896A1 true WO2021047896A1 (fr) 2021-03-18

Family

ID=72234863

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2020/073635 WO2021047896A1 (fr) 2019-09-09 2020-08-24 Manomètre de pression absolue comprenant une cellule de mesure de pression de mesure relative

Country Status (2)

Country Link
DE (1) DE102019124083B3 (fr)
WO (1) WO2021047896A1 (fr)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19708116A1 (de) 1997-02-28 1998-09-10 Telefunken Microelectron Vorrichtung zum Verschließen von Druckausgleichsöffnungen
DE10232028B4 (de) 2002-07-16 2006-07-20 Leuze Electronic Gmbh + Co. Kg Optischer Sensor
US20070012116A1 (en) * 2005-06-10 2007-01-18 Arnold Paul C Wide-range combination vacuum gauge
US20080257052A1 (en) * 2007-04-20 2008-10-23 Kuznia Philip D Dual pressure sensor apparatus
DE102010035862A1 (de) 2010-08-30 2012-03-01 Ifm Electronic Gmbh Diagnosefähige resistive Druckmesszelle
DE102010062622A1 (de) 2010-12-08 2012-06-14 Ifm Electronic Gmbh Verfahren zur Selbstüberwachung einer keramischen Druckmesszelle eines kapazitiven Drucksensors und eine Auswerteschaltung zur Durchführung des Verfahrens
DE102012201018A1 (de) 2012-01-24 2013-07-25 Ifm Electronic Gmbh Messgerät mit am Gehäuse vorgesehenen Luftdurchgang
DE102013200840A1 (de) 2012-01-23 2013-07-25 Ifm Electronic Gmbh Messgerät mit am Gehäuse vorgesehenen Luftdurchgang

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004219402A (ja) * 2002-12-24 2004-08-05 Denso Corp 圧力センサ装置およびその製造方法
DE102018100716B3 (de) * 2018-01-15 2018-11-22 Ifm Electronic Gmbh Druckmessgerät
DE102018203174A1 (de) * 2018-03-02 2019-09-05 Brose Fahrzeugteile Gmbh & Co. Kommanditgesellschaft, Bamberg Fahrzeugtüranordnung mit einer Sensoreinrichtung zum Erkennen eines Verstellwunsches

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19708116A1 (de) 1997-02-28 1998-09-10 Telefunken Microelectron Vorrichtung zum Verschließen von Druckausgleichsöffnungen
DE10232028B4 (de) 2002-07-16 2006-07-20 Leuze Electronic Gmbh + Co. Kg Optischer Sensor
US20070012116A1 (en) * 2005-06-10 2007-01-18 Arnold Paul C Wide-range combination vacuum gauge
US20080257052A1 (en) * 2007-04-20 2008-10-23 Kuznia Philip D Dual pressure sensor apparatus
DE102010035862A1 (de) 2010-08-30 2012-03-01 Ifm Electronic Gmbh Diagnosefähige resistive Druckmesszelle
DE102010035862B4 (de) 2010-08-30 2013-01-03 Ifm Electronic Gmbh Diagnosefähige resistive Druckmesszelle
DE102010062622A1 (de) 2010-12-08 2012-06-14 Ifm Electronic Gmbh Verfahren zur Selbstüberwachung einer keramischen Druckmesszelle eines kapazitiven Drucksensors und eine Auswerteschaltung zur Durchführung des Verfahrens
EP2606330B1 (fr) 2010-12-08 2014-09-24 IFM Electronic GmbH Procédé de contrôle automatique d'une cellule de mesure de pression céramique d'un capteur de pression capacitif et circuit d'évaluation pour mettre en oeuvre ce procédé
DE102013200840A1 (de) 2012-01-23 2013-07-25 Ifm Electronic Gmbh Messgerät mit am Gehäuse vorgesehenen Luftdurchgang
DE102012201018A1 (de) 2012-01-24 2013-07-25 Ifm Electronic Gmbh Messgerät mit am Gehäuse vorgesehenen Luftdurchgang

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