WO2021033544A1 - Polyimide resin composition, polyimide varnish, and polyimide film - Google Patents

Polyimide resin composition, polyimide varnish, and polyimide film Download PDF

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WO2021033544A1
WO2021033544A1 PCT/JP2020/029989 JP2020029989W WO2021033544A1 WO 2021033544 A1 WO2021033544 A1 WO 2021033544A1 JP 2020029989 W JP2020029989 W JP 2020029989W WO 2021033544 A1 WO2021033544 A1 WO 2021033544A1
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structural unit
polyimide resin
mol
polyimide
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PCT/JP2020/029989
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French (fr)
Japanese (ja)
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洋平 安孫子
健太郎 石井
三田寺 淳
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三菱瓦斯化学株式会社
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Priority to CN202080058012.3A priority Critical patent/CN114245809A/en
Priority to KR1020227004984A priority patent/KR20220051335A/en
Priority to JP2021540715A priority patent/JPWO2021033544A1/ja
Publication of WO2021033544A1 publication Critical patent/WO2021033544A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1075Partially aromatic polyimides
    • C08G73/1078Partially aromatic polyimides wholly aromatic in the diamino moiety
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1003Preparatory processes
    • C08G73/1007Preparatory processes from tetracarboxylic acids or derivatives and diamines
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1039Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors comprising halogen-containing substituents
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1042Copolyimides derived from at least two different tetracarboxylic compounds or two different diamino compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1057Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain
    • C08G73/106Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain containing silicon
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/1075Partially aromatic polyimides
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D179/00Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09D161/00 - C09D177/00
    • C09D179/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C09D179/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2379/00Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
    • C08J2379/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08J2379/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/16Nitrogen-containing compounds
    • C08K5/34Heterocyclic compounds having nitrogen in the ring
    • C08K5/35Heterocyclic compounds having nitrogen in the ring having also oxygen in the ring
    • C08K5/353Five-membered rings

Definitions

  • an alkaline aqueous solution such as a sodium hydroxide aqueous solution or a potassium hydroxide aqueous solution is mainly used for cleaning a support (a support to which a polyimide varnish is applied) such as a glass plate used in manufacturing a polyimide film. .. Cleaning with an alkaline aqueous solution may be performed even when a polyimide film is formed on a support such as a glass plate. Therefore, the polyimide film is also required to have resistance to alkali.
  • Patent Document 1 does not describe any chemical resistance and detergency. Further, in Patent Document 2, resistance to a solvent (N, N-dimethylacetamide) has not been evaluated, and detergency and residual stress have not been examined at all.
  • a solvent N, N-dimethylacetamide
  • X is a single-bonded, substituted or unsubstituted alkylene group, a carbonyl group, an ether group, a group represented by the following formula (b-2-i), or the following formula (b-2).
  • -Ii p is an integer of 0 to 2
  • m1 is an integer of 0 to 4
  • m2 is an integer of 0 to 4.
  • m1 Is an integer from 1 to 4.
  • m3 is an integer of 0 to 5
  • m4 is an integer of 0 to 5. Note that m1 + m2 + m3 + m4 is 1 or more.
  • R 1 to R 6 in the formula (a-3) are independently monovalent hydrocarbon groups having 1 to 20 carbon atoms.
  • the monovalent hydrocarbon group having 1 to 20 carbon atoms includes an alkyl group having 1 to 20 carbon atoms, a cycloalkyl group having 3 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms, and an aralkyl group having 7 to 20 carbon atoms. Examples thereof include a group and an alkenyl group having 2 to 20 carbon atoms.
  • aromatic tetracarboxylic dianhydrides such as 4,4'-(hexafluoroisopropyridene) diphthalic dianhydride; 1,2,3,4-cyclobutanetetracarboxylic dianhydride and 1,2,4,5 -Alicyclic tetracarboxylic dianhydride such as cyclohexanetetracarboxylic dianhydride (excluding the compound represented by the formula (a-1)); and 1,2,3,4-butanetetracarboxylic acid.
  • aromatic tetracarboxylic dianhydrides such as 4,4'-(hexafluoroisopropyridene) diphthalic dianhydride; 1,2,3,4-cyclobutanetetracarboxylic dianhydride and 1,2,4,5 -Alicyclic tetracarboxylic dianhydride such as cyclohexanetetracarboxylic dianhydride (excluding the compound represented by the formula (a-1)); and 1,2,
  • the tetracarboxylic acid component may contain a compound other than the compound giving the structural unit (A-1).
  • the tetracarboxylic acid component preferably further contains a compound that gives the structural unit (A-2) in addition to the compound that gives the structural unit (A-1).
  • Examples of the compound giving the structural unit (A-2) include the compound represented by the formula (a-2), but the compound is not limited to this, and may be a derivative thereof as long as the same structural unit is given.
  • Examples of the derivative include a tetracarboxylic acid corresponding to the tetracarboxylic dianhydride represented by the formula (a-2) and an alkyl ester of the tetracarboxylic acid.
  • the compound represented by the formula (a-2) that is, dianhydride
  • the carbonate solvent examples include diethyl carbonate, methyl ethyl carbonate, ethylene carbonate, propylene carbonate and the like.
  • an amide solvent or a lactone solvent is preferable.
  • the above-mentioned reaction solvent may be used alone or in mixture of 2 or more types.
  • the molar ratio (oxazolyl group / carboxyl group) of the oxazolyl group in the cross-linking agent to the carboxyl group in the polyimide resin is in the range of 1/8 to 1 / 0.5. Therefore, it is preferable to contain a polyimide resin and a cross-linking agent.
  • the molar ratio is more preferably 1/6 to 1/1, still more preferably 1/4 to 1/2.
  • the above molar ratio means the molar ratio of the oxazolyl group contained in the cross-linking agent to the carboxyl group contained in the compound giving the structural unit (B-1) used for producing the polyimide resin, and the addition of the cross-linking agent. Calculated based on the amount and amount of compound added to give the building block (B-1).
  • a polyimide resin can be obtained by imidizing (dehydrating and ring-closing) this polyamic acid.
  • the organic solvent contained in the polyamic acid varnish the organic solvent contained in the polyimide varnish of the present invention can be used.
  • the polyamic acid varnish includes a tetracarboxylic acid component containing the compound giving the above-mentioned structural unit (A-1), a compound giving the above-mentioned structural unit (B-1), and the above-mentioned structural unit (B-2). It may be a polyamic acid solution itself obtained by subjecting a diamine component containing a compound to give a compound to a polyaddition reaction in a reaction solvent, or a diamine solvent is further added to the polyamic acid solution. Good.
  • Comparative Example 2 A polyimide varnish was prepared in the same manner as in Example 2 except that 1,3-PBO was not added, to obtain a polyimide varnish having a solid content concentration of 10% by mass. Using the obtained polyimide varnish, a film was prepared in the same manner as in Example 1 to obtain a film having a thickness of 10 ⁇ m.
  • Comparative Example 3 A polyimide varnish was prepared in the same manner as in Example 3 except that 1,3-PBO was not added, to obtain a polyimide varnish having a solid content concentration of 10% by mass. Using the obtained polyimide varnish, a film was prepared in the same manner as in Example 1 to obtain a film having a thickness of 10 ⁇ m.
  • the polyimide films of Examples 1 to 5 were excellent in heat resistance and colorless transparency, low residual stress, excellent chemical resistance, and good detergency. On the other hand, the polyimide film of the comparative example was inferior in solvent resistance.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
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  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)

Abstract

A polyimide resin composition including a polyimide resin and a crosslinking agent having at least two oxazolyl groups, wherein the polyimide resin is a polyimide resin having constituent units A derived from a tetracarboxylic acid dianhydride, and constituent units B derived from a diamine, the constituent units A including constituent units (A-1) derived from CpODA, and the constituent units B including constituent units (B-1) derived from TFMB and constituent units (B-2) derived from a specific compound typified by 3,5-DABA.

Description

ポリイミド樹脂組成物、ポリイミドワニス及びポリイミドフィルムPolyimide resin composition, polyimide varnish and polyimide film
 本発明はポリイミド樹脂組成物、ポリイミドワニス及びポリイミドフィルムに関する。 The present invention relates to a polyimide resin composition, a polyimide varnish and a polyimide film.
 一般に、ポリイミド樹脂は優れた耐熱性を有することから、電気・電子部品等の分野において様々な利用が検討されている。例えば、液晶ディスプレイやOLEDディスプレイ等の画像表示装置に用いられるガラス基板を、デバイスの軽量化やフレキシブル化を目的として、プラスチック基板へ代替することが望まれており、当該プラスチック基板として適するポリイミドフィルムの研究が進められている。このような用途のポリイミドフィルムには無色透明性が求められる。 In general, polyimide resin has excellent heat resistance, so various uses are being studied in fields such as electrical and electronic parts. For example, it is desired to replace a glass substrate used in an image display device such as a liquid crystal display or an OLED display with a plastic substrate for the purpose of reducing the weight and flexibility of the device, and a polyimide film suitable as the plastic substrate. Research is underway. Colorless transparency is required for polyimide films for such applications.
 ガラス支持体やシリコンウェハ上に塗布したワニスを加熱硬化してポリイミドフィルムを形成すると、ポリイミドフィルムに残留応力が生じる。ポリイミドフィルムの残留応力が大きいと、ガラス支持体やシリコンウェハが反ってしまうという問題が生じるため、ポリイミドフィルムには残留応力の低減も求められる。 When the varnish applied on the glass support or silicon wafer is heat-cured to form a polyimide film, residual stress is generated in the polyimide film. If the residual stress of the polyimide film is large, there is a problem that the glass support and the silicon wafer are warped. Therefore, the polyimide film is also required to reduce the residual stress.
 ところで、ポリイミドフィルムが基板として適するためには、無色透明性及び低残留応力だけでなく、耐薬品性(例えば耐酸性、耐アルカリ性、耐溶媒性)も重要な物性である。例えば、ポリイミドフィルムをITO(Indium Tin Oxide)膜形成用の基板として用いた場合、ポリイミドフィルムにはITO膜のエッチングに用いられる酸に対する耐性が求められる。ポリイミドフィルムの耐酸性が不十分であると、フィルムが黄変して無色透明性が損なわれるおそれがある。 By the way, in order for a polyimide film to be suitable as a substrate, not only colorless transparency and low residual stress, but also chemical resistance (for example, acid resistance, alkali resistance, solvent resistance) are important physical properties. For example, when a polyimide film is used as a substrate for forming an ITO (Indium Tin Oxide) film, the polyimide film is required to have resistance to the acid used for etching the ITO film. If the acid resistance of the polyimide film is insufficient, the film may turn yellow and the colorless transparency may be impaired.
 また、ポリイミドフィルムを製造する際に使用するガラス板等の支持体(ポリイミドワニスを塗布する支持体)の洗浄には、水酸化ナトリウム水溶液や水酸化カリウム水溶液等のアルカリ水溶液が主に使用される。アルカリ水溶液による洗浄は、ガラス板等の支持体上にポリイミドフィルムが製膜された状態でも行われる可能性がある。したがって、ポリイミドフィルムにはアルカリに対する耐性も求められる。 Further, an alkaline aqueous solution such as a sodium hydroxide aqueous solution or a potassium hydroxide aqueous solution is mainly used for cleaning a support (a support to which a polyimide varnish is applied) such as a glass plate used in manufacturing a polyimide film. .. Cleaning with an alkaline aqueous solution may be performed even when a polyimide film is formed on a support such as a glass plate. Therefore, the polyimide film is also required to have resistance to alkali.
 さらには、ポリイミドフィルム上に各種TFT等の電子回路を形成する過程では、NMP等の有機溶媒が使用されることがあり、ポリイミドフィルムには有機溶媒に対する耐性も求められている。 Furthermore, in the process of forming electronic circuits such as various TFTs on the polyimide film, an organic solvent such as NMP may be used, and the polyimide film is also required to have resistance to the organic solvent.
 一方で、ポリイミド樹脂組成物をポリイミドフィルムに加工した後には、塗布等に使用した配管や装置を洗浄する必要がある。装置を十分に洗浄するためには、ポリイミド樹脂組成物は使用する洗浄液(例えば、東京応化工業株式会社製の「OK73シンナー」や、NMP等の各種有機溶媒)に対する溶解性も求められ、耐溶媒性と洗浄性という相反する性能が求められている。 On the other hand, after processing the polyimide resin composition into a polyimide film, it is necessary to clean the piping and equipment used for coating and the like. In order to sufficiently clean the apparatus, the polyimide resin composition is also required to be soluble in the cleaning liquid used (for example, "OK73 thinner" manufactured by Tokyo Ohka Kogyo Co., Ltd. and various organic solvents such as NMP), and is solvent resistant. Conflicting performances of property and detergency are required.
 特許文献1には、低残留応力のフィルムを与えるポリイミド樹脂として、テトラカルボン酸成分として4,4’-オキシジフタル酸二無水物を用い、ジアミン成分として数平均分子量1000のα,ω-アミノプロピルポリジメチルシロキサン及び4,4’-ジアミノジフェニルエーテルを用いて合成されたポリイミド樹脂が開示されている。 In Patent Document 1, 4,4'-oxydiphthalic dianhydride is used as a tetracarboxylic dian component as a polyimide resin that gives a film having a low residual stress, and α, ω-aminopropyl poly having a number average molecular weight of 1000 is used as a diamine component. A polyimide resin synthesized using dimethylsiloxane and 4,4'-diaminodiphenyl ether is disclosed.
 特許文献2には、カルボキシル基を有するポリイミド樹脂と少なくとも2つのオキサゾリル基を有する架橋剤とを含むポリイミド樹脂組成物が開示され、当該ポリイミド樹脂組成物によって、良好な透明性と高硬度を有する膜の形成が可能であると記載されている。 Patent Document 2 discloses a polyimide resin composition containing a polyimide resin having a carboxyl group and a cross-linking agent having at least two oxazolyl groups, and the polyimide resin composition provides a film having good transparency and high hardness. It is stated that the formation of is possible.
 しかし、特許文献1では、耐薬品性及び洗浄性について何ら記載されていない。また、特許文献2では、溶剤(N,N-ジメチルアセトアミド)に対する耐性は評価されておらず、洗浄性や残留応力も何ら検討されていない。 However, Patent Document 1 does not describe any chemical resistance and detergency. Further, in Patent Document 2, resistance to a solvent (N, N-dimethylacetamide) has not been evaluated, and detergency and residual stress have not been examined at all.
特開2005-232383号公報Japanese Unexamined Patent Publication No. 2005-232383 特開2016-222797号公報Japanese Unexamined Patent Publication No. 2016-222777
 上述のように、ポリイミドフィルムには無色透明性や低残留応力、耐薬品性が要求されるが、優れた耐熱性を維持しながら、それら特性を向上させることは容易ではない。
 本発明が解決しようとする課題は、耐熱性、無色透明性、耐薬品性及び洗浄性に優れ、更に残留応力が低いフィルムの形成が可能なポリイミド樹脂組成物、並びに該ポリイミド樹脂組成物を含むポリイミドワニス及びポリイミドフィルムを提供することにある。
As described above, the polyimide film is required to have colorless transparency, low residual stress, and chemical resistance, but it is not easy to improve these properties while maintaining excellent heat resistance.
The problem to be solved by the present invention includes a polyimide resin composition having excellent heat resistance, colorless transparency, chemical resistance and cleanability, and capable of forming a film having low residual stress, and the polyimide resin composition. The present invention is to provide a polyimide varnish and a polyimide film.
 本発明者らは、特定の構成単位の組み合わせを含むポリイミド樹脂と特定の架橋剤とを含むポリイミド樹脂組成物が上記課題を解決できることを見出し、発明を完成させるに至った。 The present inventors have found that a polyimide resin composition containing a polyimide resin containing a combination of specific structural units and a specific cross-linking agent can solve the above-mentioned problems, and have completed the invention.
 即ち、本発明は、下記の<1>~<11>に関する。
<1> ポリイミド樹脂と、少なくとも2つのオキサゾリル基を有する架橋剤とを含むポリイミド樹脂組成物であって、
 前記ポリイミド樹脂が、テトラカルボン酸二無水物に由来する構成単位A及びジアミンに由来する構成単位Bを有するポリイミド樹脂であり、構成単位Aが下記式(a-1)で表される化合物に由来する構成単位(A-1)を含み、構成単位Bが下記式(b-1)で表される化合物に由来する構成単位(B-1)と、下記式(b-2)で表される化合物に由来する構成単位(B-2)とを含む、ポリイミド樹脂組成物。
Figure JPOXMLDOC01-appb-C000005

(式(b-2)中、Xは単結合、置換若しくは無置換のアルキレン基、カルボニル基、エーテル基、下記式(b-2-i)で表される基、又は下記式(b-2-ii)で表される基であり、pは0~2の整数であり、m1は0~4の整数であり、m2は0~4の整数である。ただし、pが0の場合、m1は1~4の整数である。)
Figure JPOXMLDOC01-appb-C000006

(式(b-2-i)中、m3は0~5の整数であり;式(b-2-ii)中、m4は0~5の整数である。なお、m1+m2+m3+m4は1以上であり、pが2の場合、2つのX及び2つのm2~m4のそれぞれは独立して選択される。)
<2> 構成単位(B-2)が、下記式(b-21)で表される化合物に由来する構成単位(B-21)である、上記<1>に記載のポリイミド樹脂組成物。
Figure JPOXMLDOC01-appb-C000007

<3> 構成単位A中における構成単位(A-1)の比率が40モル%以上である、上記<1>又は<2>に記載のポリイミド樹脂組成物。
<4> 構成単位B中における構成単位(B-1)の比率が35~95モル%であり、
 構成単位B中における構成単位(B-2)の比率が5~65モル%である、上記<1>~<3>のいずれか1つに記載のポリイミド樹脂組成物。
<5> 構成単位Aが、下記式(a-2)で表される化合物に由来する構成単位(A-2)を更に含む、上記<1>~<4>のいずれか1つに記載のポリイミド樹脂組成物。
Figure JPOXMLDOC01-appb-C000008

<6> 構成単位Aが、両末端酸無水物変性シリコーンに由来する構成単位(A-3)を更に含む、上記<1>~<5>のいずれか1つに記載のポリイミド樹脂組成物。
<7> 前記架橋剤が、少なくとも2つのオキサゾリル基が結合した芳香環又は芳香族複素環を含む化合物である、上記<1>~<6>のいずれか1つに記載のポリイミド樹脂組成物。
<8> 前記架橋剤が、少なくとも2つのオキサゾリル基が結合したベンゼン環を含む化合物である、上記<1>~<7>のいずれか1つに記載のポリイミド樹脂組成物。
<9> 前記架橋剤が、1,3-ビス(4,5-ジヒドロ-2-オキサゾリル)ベンゼンである、上記<1>~<8>のいずれか1つに記載のポリイミド樹脂組成物。
<10> 上記<1>~<9>のいずれか1つに記載のポリイミド樹脂組成物が有機溶媒に溶解してなるポリイミドワニス。
<11> 上記<1>~<9>のいずれか1つに記載のポリイミド樹脂組成物中の前記ポリイミド樹脂が前記架橋剤により架橋されてなる、ポリイミドフィルム。
That is, the present invention relates to the following <1> to <11>.
<1> A polyimide resin composition containing a polyimide resin and a cross-linking agent having at least two oxazolyl groups.
The polyimide resin is a polyimide resin having a structural unit A derived from tetracarboxylic acid dianhydride and a structural unit B derived from diamine, and the structural unit A is derived from a compound represented by the following formula (a-1). The structural unit B is represented by the following formula (b-2) and the structural unit (B-1) derived from the compound represented by the following formula (b-1). A polyimide resin composition containing a structural unit (B-2) derived from a compound.
Figure JPOXMLDOC01-appb-C000005

(In the formula (b-2), X is a single-bonded, substituted or unsubstituted alkylene group, a carbonyl group, an ether group, a group represented by the following formula (b-2-i), or the following formula (b-2). -Ii), p is an integer of 0 to 2, m1 is an integer of 0 to 4, m2 is an integer of 0 to 4. However, when p is 0, m1 Is an integer from 1 to 4.)
Figure JPOXMLDOC01-appb-C000006

(In the formula (b-2-i), m3 is an integer of 0 to 5; in the formula (b-2-ii), m4 is an integer of 0 to 5. Note that m1 + m2 + m3 + m4 is 1 or more. When p is 2, each of the two Xs and the two m2 to m4 are independently selected.)
<2> The polyimide resin composition according to <1> above, wherein the structural unit (B-2) is a structural unit (B-21) derived from a compound represented by the following formula (b-21).
Figure JPOXMLDOC01-appb-C000007

<3> The polyimide resin composition according to <1> or <2> above, wherein the ratio of the structural unit (A-1) in the structural unit A is 40 mol% or more.
<4> The ratio of the constituent unit (B-1) in the constituent unit B is 35 to 95 mol%.
The polyimide resin composition according to any one of <1> to <3> above, wherein the ratio of the structural unit (B-2) in the structural unit B is 5 to 65 mol%.
<5> The above-mentioned <1> to <4>, wherein the structural unit A further contains a structural unit (A-2) derived from a compound represented by the following formula (a-2). Polyimide resin composition.
Figure JPOXMLDOC01-appb-C000008

<6> The polyimide resin composition according to any one of <1> to <5> above, wherein the structural unit A further contains a structural unit (A-3) derived from both terminal acid anhydride-modified silicones.
<7> The polyimide resin composition according to any one of <1> to <6> above, wherein the cross-linking agent is a compound containing an aromatic ring or an aromatic heterocycle having at least two oxazolyl groups bonded thereto.
<8> The polyimide resin composition according to any one of <1> to <7> above, wherein the cross-linking agent is a compound containing a benzene ring in which at least two oxazolyl groups are bonded.
<9> The polyimide resin composition according to any one of <1> to <8> above, wherein the cross-linking agent is 1,3-bis (4,5-dihydro-2-oxazolyl) benzene.
<10> A polyimide varnish in which the polyimide resin composition according to any one of <1> to <9> above is dissolved in an organic solvent.
<11> A polyimide film obtained by cross-linking the polyimide resin in the polyimide resin composition according to any one of <1> to <9> with the cross-linking agent.
 本発明によれば、耐熱性、無色透明性、耐薬品性及び洗浄性に優れ、更に残留応力が低いフィルムを形成することができる。 According to the present invention, it is possible to form a film having excellent heat resistance, colorless transparency, chemical resistance and detergency, and further having low residual stress.
[ポリイミド樹脂組成物]
 本発明のポリイミド樹脂組成物はポリイミド樹脂と架橋剤とを含む。以下、本発明におけるポリイミド樹脂及び架橋剤について説明する。
[Polyimide resin composition]
The polyimide resin composition of the present invention contains a polyimide resin and a cross-linking agent. Hereinafter, the polyimide resin and the cross-linking agent in the present invention will be described.
<ポリイミド樹脂>
 本発明のポリイミド樹脂は、テトラカルボン酸二無水物に由来する構成単位A及びジアミンに由来する構成単位Bを有し、構成単位Aが下記式(a-1)で表される化合物に由来する構成単位(A-1)を含み、構成単位Bが下記式(b-1)で表される化合物に由来する構成単位(B-1)と、下記式(b-2)で表される化合物に由来する構成単位(B-2)とを含む。
Figure JPOXMLDOC01-appb-C000009

(式(b-2)中、Xは単結合、置換若しくは無置換のアルキレン基、カルボニル基、エーテル基、下記式(b-2-i)で表される基、又は下記式(b-2-ii)で表される基であり、pは0~2の整数であり、m1は0~4の整数であり、m2は0~4の整数である。ただし、pが0の場合、m1は1~4の整数である。)
Figure JPOXMLDOC01-appb-C000010

(式(b-2-i)中、m3は0~5の整数であり;式(b-2-ii)中、m4は0~5の整数である。なお、m1+m2+m3+m4は1以上であり、pが2の場合、2つのX及び2つのm2~m4のそれぞれは独立して選択される。)
<Polyimide resin>
The polyimide resin of the present invention has a structural unit A derived from tetracarboxylic dianhydride and a structural unit B derived from diamine, and the structural unit A is derived from a compound represented by the following formula (a-1). A structural unit (B-1) containing a structural unit (A-1) and whose structural unit B is derived from a compound represented by the following formula (b-1) and a compound represented by the following formula (b-2). Includes a structural unit (B-2) derived from.
Figure JPOXMLDOC01-appb-C000009

(In the formula (b-2), X is a single-bonded, substituted or unsubstituted alkylene group, a carbonyl group, an ether group, a group represented by the following formula (b-2-i), or the following formula (b-2). -Ii), p is an integer of 0 to 2, m1 is an integer of 0 to 4, m2 is an integer of 0 to 4. However, when p is 0, m1 Is an integer from 1 to 4.)
Figure JPOXMLDOC01-appb-C000010

(In the formula (b-2-i), m3 is an integer of 0 to 5; in the formula (b-2-ii), m4 is an integer of 0 to 5. Note that m1 + m2 + m3 + m4 is 1 or more. When p is 2, each of the two Xs and the two m2 to m4 are independently selected.)
(構成単位A)
 構成単位Aは、ポリイミド樹脂に占めるテトラカルボン酸二無水物に由来する構成単位であって、下記式(a-1)で表される化合物に由来する構成単位(A-1)を含む。
Figure JPOXMLDOC01-appb-C000011
(Structural unit A)
The structural unit A is a structural unit derived from tetracarboxylic dianhydride in the polyimide resin, and includes a structural unit (A-1) derived from a compound represented by the following formula (a-1).
Figure JPOXMLDOC01-appb-C000011
 式(a-1)で表される化合物は、ノルボルナン-2-スピロ-α-シクロペンタノン-α’-スピロ-2”-ノルボルナン-5,5”,6,6”-テトラカルボン酸二無水物である。構成単位Aが構成単位(A-1)を含むことによって、フィルムの無色透明性及び耐熱性が向上する。 The compound represented by the formula (a-1) is norbornane-2-spiro-α-cyclopentanone-α'-spiro-2 "-norbornane-5,5", 6,6 "-tetracarboxylic dianhydride. By including the constituent unit (A-1) in the constituent unit A, the colorless transparency and heat resistance of the film are improved.
 構成単位A中における構成単位(A-1)の比率は、好ましくは40モル%以上であり、より好ましくは50モル%以上であり、更に好ましくは60モル%以上である。構成単位(A-1)の比率の上限値は特に限定されず、即ち、100モル%である。構成単位Aは構成単位(A-1)のみからなっていてもよい。 The ratio of the structural unit (A-1) in the structural unit A is preferably 40 mol% or more, more preferably 50 mol% or more, and further preferably 60 mol% or more. The upper limit of the ratio of the structural unit (A-1) is not particularly limited, that is, 100 mol%. The structural unit A may consist of only the structural unit (A-1).
 構成単位Aは、構成単位(A-1)以外の構成単位を含んでもよい。
 構成単位Aは、構成単位(A-1)に加えて、下記式(a-2)で表される化合物に由来する構成単位(A-2)を更に含むことが好ましい。
Figure JPOXMLDOC01-appb-C000012
The structural unit A may include a structural unit other than the structural unit (A-1).
The structural unit A preferably further contains a structural unit (A-2) derived from a compound represented by the following formula (a-2) in addition to the structural unit (A-1).
Figure JPOXMLDOC01-appb-C000012
 式(a-2)で表される化合物は、ビフェニルテトラカルボン酸二無水物(BPDA)であり、その具体例としては、下記式(a-2s)で表される3,3’,4,4’-ビフェニルテトラカルボン酸二無水物(s-BPDA)、下記式(a-2a)で表される2,3,3’,4’-ビフェニルテトラカルボン酸二無水物(a-BPDA)、下記式(a-2i)で表される2,2’,3,3’-ビフェニルテトラカルボン酸二無水物(i-BPDA)が挙げられる。3,3’,4,4’-ビフェニルテトラカルボン酸二無水物は、本発明のポリイミドフィルムの残留応力を低下させることができるため好ましい。
Figure JPOXMLDOC01-appb-C000013
The compound represented by the formula (a-2) is biphenyltetracarboxylic dianhydride (BPDA), and specific examples thereof are 3,3', 4, represented by the following formula (a-2s). 4'-biphenyltetracarboxylic dianhydride (s-BPDA), 2,3,3', 4'-biphenyltetracarboxylic dianhydride (a-BPDA) represented by the following formula (a-2a), Examples thereof include 2,2', 3,3'-biphenyltetracarboxylic dianhydride (i-BPDA) represented by the following formula (a-2i). 3,3', 4,4'-biphenyltetracarboxylic dianhydride is preferable because it can reduce the residual stress of the polyimide film of the present invention.
Figure JPOXMLDOC01-appb-C000013
 構成単位Aが構成単位(A-1)及び構成単位(A-2)を含む場合、構成単位A中における構成単位(A-1)の比率は、好ましくは40~95モル%であり、より好ましくは50~90モル%であり、更に好ましくは55~85モル%であり、構成単位A中における構成単位(A-2)の比率は、好ましくは5~60モル%であり、より好ましくは10~50モル%であり、更に好ましくは15~45モル%である。
 構成単位A中における構成単位(A-1)及び(A-2)の合計の比率は、好ましくは50モル%以上であり、より好ましくは70モル%以上であり、更に好ましくは90モル%以上であり、特に好ましくは99モル%以上である。構成単位(A-1)及び(A-2)の合計の比率の上限値は特に限定されず、即ち、100モル%である。構成単位Aは構成単位(A-1)と構成単位(A-2)とのみからなっていてもよい。
When the constituent unit A includes the constituent unit (A-1) and the constituent unit (A-2), the ratio of the constituent unit (A-1) in the constituent unit A is preferably 40 to 95 mol%, and more. It is preferably 50 to 90 mol%, more preferably 55 to 85 mol%, and the ratio of the constituent unit (A-2) in the constituent unit A is preferably 5 to 60 mol%, more preferably. It is 10 to 50 mol%, more preferably 15 to 45 mol%.
The total ratio of the structural units (A-1) and (A-2) in the structural unit A is preferably 50 mol% or more, more preferably 70 mol% or more, still more preferably 90 mol% or more. It is particularly preferably 99 mol% or more. The upper limit of the total ratio of the structural units (A-1) and (A-2) is not particularly limited, that is, 100 mol%. The structural unit A may consist only of the structural unit (A-1) and the structural unit (A-2).
 構成単位Aが構成単位(A-2)を更に含むことによって、残留応力が更に低下する。
 また、構成単位Aが構成単位(A-2)を更に含むことによって、フィルムの波長308nmにおける光線透過率が小さくなる。近年、樹脂フィルムが積層された支持体における当該支持体と当該樹脂フィルムを剥離する方法として、レーザーリフトオフ(LLO)と呼ばれるレーザー剥離加工が注目を浴びている。波長308nmにおける光線透過率が小さいほど、波長308nmのXeClエキシマレーザーによるレーザー剥離性に優れる。
When the structural unit A further includes the structural unit (A-2), the residual stress is further reduced.
Further, when the structural unit A further includes the structural unit (A-2), the light transmittance of the film at a wavelength of 308 nm becomes small. In recent years, a laser peeling process called laser lift-off (LLO) has attracted attention as a method for peeling the support and the resin film on a support on which a resin film is laminated. The smaller the light transmittance at a wavelength of 308 nm, the better the laser exfoliation property by the XeCl excimer laser at a wavelength of 308 nm.
 構成単位Aは、構成単位(A-1)に加えて、両末端酸無水物変性シリコーンに由来する構成単位(A-3)を更に含むことが好ましい。
 前記両末端酸無水物変性シリコーンとしては、下記式(a-3)で表される化合物が好ましい。
Figure JPOXMLDOC01-appb-C000014

(式(a-3)中、
 R1~R6は、それぞれ独立して、炭素数1~20の一価の炭化水素基であり、
 L1及びL2は、それぞれ独立して、単結合又は炭素数1~20の二価の炭化水素基であり、
 Z1及びZ2は、それぞれ独立して、炭素数1~20の三価の炭化水素基であり、
 nは、1~200である。)
The structural unit A preferably further contains a structural unit (A-3) derived from the biterminal acid anhydride-modified silicone in addition to the structural unit (A-1).
As the biterminal acid anhydride-modified silicone, a compound represented by the following formula (a-3) is preferable.
Figure JPOXMLDOC01-appb-C000014

(In equation (a-3),
R 1 to R 6 are independently monovalent hydrocarbon groups having 1 to 20 carbon atoms.
L 1 and L 2 are independently single-bonded or divalent hydrocarbon groups having 1 to 20 carbon atoms.
Z 1 and Z 2 are independently trivalent hydrocarbon groups having 1 to 20 carbon atoms.
n is 1 to 200. )
 式(a-3)におけるR1~R6は、それぞれ独立して、炭素数1~20の一価の炭化水素基である。
 炭素数1~20の一価の炭化水素基としては、炭素数1~20のアルキル基、炭素数3~20のシクロアルキル基、炭素数6~20のアリール基、炭素数7~20のアラルキル基、炭素数2~20のアルケニル基等が挙げられる。
 炭素数1~20のアルキル基としては、炭素数1~10のアルキル基が好ましく、例えば、メチル基、エチル基、プロピル基、イソプロピル基、ブチル基、イソブチル基、t-ブチル基、ペンチル基、及びヘキシル基が挙げられる。炭素数3~20のシクロアルキル基としては、炭素数3~10のシクロアルキル基が好ましく、例えば、シクロペンチル基及びシクロヘキシル基が挙げられる。炭素数6~20のアリール基としては、炭素数6~10のアリール基が好ましく、例えば、フェニル基及びナフチル基が挙げられる。炭素数7~20のアラルキル基としては、炭素数7~10のアラルキル基が好ましく、例えば、ベンジル基及びフェネチル基が挙げられる。炭素数2~20のアルケニル基としては、炭素数2~10のアルケニル基が好ましく、例えば、ビニル基、アリル基、プロペニル基、イソプロペニル基、及びブテニル基が挙げられる。
R 1 to R 6 in the formula (a-3) are independently monovalent hydrocarbon groups having 1 to 20 carbon atoms.
The monovalent hydrocarbon group having 1 to 20 carbon atoms includes an alkyl group having 1 to 20 carbon atoms, a cycloalkyl group having 3 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms, and an aralkyl group having 7 to 20 carbon atoms. Examples thereof include a group and an alkenyl group having 2 to 20 carbon atoms.
The alkyl group having 1 to 20 carbon atoms is preferably an alkyl group having 1 to 10 carbon atoms, for example, a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a t-butyl group, a pentyl group, and the like. And hexyl groups. The cycloalkyl group having 3 to 20 carbon atoms is preferably a cycloalkyl group having 3 to 10 carbon atoms, and examples thereof include a cyclopentyl group and a cyclohexyl group. As the aryl group having 6 to 20 carbon atoms, an aryl group having 6 to 10 carbon atoms is preferable, and examples thereof include a phenyl group and a naphthyl group. The aralkyl group having 7 to 20 carbon atoms is preferably an aralkyl group having 7 to 10 carbon atoms, and examples thereof include a benzyl group and a phenethyl group. The alkenyl group having 2 to 20 carbon atoms is preferably an alkenyl group having 2 to 10 carbon atoms, and examples thereof include a vinyl group, an allyl group, a propenyl group, an isopropenyl group, and a butenyl group.
 R1~R6は、それぞれ独立して、好ましくは、炭素数1~20のアルキル基、炭素数3~20のシクロアルキル基、炭素数6~20のアリール基、炭素数7~20のアラルキル基、及び炭素数2~20のアルケニル基からなる群より選ばれ;より好ましくは、炭素数1~10のアルキル基、炭素数3~10のシクロアルキル基、炭素数6~10のアリール基、炭素数7~10のアラルキル基、及び炭素数2~10のアルケニル基からなる群より選ばれ;更に好ましくは、炭素数1~10のアルキル基、炭素数6~10のアリール基、及び炭素数2~10のアルケニル基からなる群より選ばれ;特に好ましくは、メチル基、エチル基、プロピル基、イソプロピル基、ブチル基、イソブチル基、t-ブチル基、ペンチル基、ヘキシル基、フェニル基、ナフチル基、ビニル基、アリル基、プロペニル基、イソプロペニル基、及びブテニル基からなる群より選ばれ;最も好ましくはメチル基、エチル基、フェニル基、及びビニル基からなる群より選ばれる。 R 1 to R 6 are independent of each other, preferably an alkyl group having 1 to 20 carbon atoms, a cycloalkyl group having 3 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms, and an aralkyl group having 7 to 20 carbon atoms. Selected from the group consisting of groups and alkenyl groups having 2 to 20 carbon atoms; more preferably alkyl groups having 1 to 10 carbon atoms, cycloalkyl groups having 3 to 10 carbon atoms, aryl groups having 6 to 10 carbon atoms, etc. It is selected from the group consisting of an aralkyl group having 7 to 10 carbon atoms and an alkenyl group having 2 to 10 carbon atoms; more preferably, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, and a carbon number of carbon atoms. Selected from the group consisting of 2-10 alkyl groups; particularly preferably methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, t-butyl group, pentyl group, hexyl group, phenyl group, naphthyl. It is selected from the group consisting of a group, a vinyl group, an allyl group, a propenyl group, an isopropenyl group, and a butenyl group; most preferably it is selected from the group consisting of a methyl group, an ethyl group, a phenyl group, and a vinyl group.
 式(a-3)におけるL1及びL2は、それぞれ独立して、単結合又は炭素数1~20の二価の炭化水素基である。
 炭素数1~20の二価の炭化水素基としては、炭素数1~20のアルキレン基、炭素数3~20のシクロアルキレン基、炭素数6~20のアリーレン基等が挙げられる。
 炭素数1~20のアルキレン基としては、炭素数1~10のアルキレン基が好ましく、例えば、メチレン基、エチレン基、プロピレン基、ブチレン基、ペンチレン基、及びヘキシレン基が挙げられる。
 炭素数3~20のシクロアルキレン基としては、炭素数3~10のシクロアルキレン基が好ましく、例えば、シクロブチレン基、シクロペンチレン基、シクロヘキシレン基、及びシクロヘプチレン基が挙げられる。
 炭素数6~20のアリーレン基としては、炭素数6~10のアリーレン基が好ましく、例えば、フェニレン基及びナフチレン基が挙げられる。
L 1 and L 2 in the formula (a-3) are independently single-bonded or divalent hydrocarbon groups having 1 to 20 carbon atoms.
Examples of the divalent hydrocarbon group having 1 to 20 carbon atoms include an alkylene group having 1 to 20 carbon atoms, a cycloalkylene group having 3 to 20 carbon atoms, and an arylene group having 6 to 20 carbon atoms.
The alkylene group having 1 to 20 carbon atoms is preferably an alkylene group having 1 to 10 carbon atoms, and examples thereof include a methylene group, an ethylene group, a propylene group, a butylene group, a pentylene group, and a hexylene group.
The cycloalkylene group having 3 to 20 carbon atoms is preferably a cycloalkylene group having 3 to 10 carbon atoms, and examples thereof include a cyclobutylene group, a cyclopentylene group, a cyclohexylene group, and a cycloheptylene group.
As the arylene group having 6 to 20 carbon atoms, an arylene group having 6 to 10 carbon atoms is preferable, and examples thereof include a phenylene group and a naphthylene group.
 L1及びL2は、それぞれ独立して、好ましくは、単結合、炭素数1~20のアルキレン基、炭素数3~20のシクロアルキレン基、及び炭素数6~20のアリーレン基からなる群より選ばれ;より好ましくは、単結合、炭素数1~10のアルキレン基、炭素数3~10のシクロアルキレン基、及び炭素数6~10のアリーレン基からなる群より選ばれ;更に好ましくは、単結合、炭素数1~10のアルキレン基、及び炭素数6~10のアリーレン基からなる群より選ばれ;特に好ましくは、単結合、メチレン基、エチレン基、プロピレン基、ブチレン基、ペンチレン基、ヘキシレン基、フェニレン基及びナフチレン基からなる群より選ばれ;最も好ましくは、単結合、メチレン基、エチレン基、プロピレン基、及びフェニレン基からなる群より選ばれる。 L 1 and L 2 are independent of each other, preferably from the group consisting of a single bond, an alkylene group having 1 to 20 carbon atoms, a cycloalkylene group having 3 to 20 carbon atoms, and an arylene group having 6 to 20 carbon atoms. Selected; more preferably selected from the group consisting of a single bond, an alkylene group having 1 to 10 carbon atoms, a cycloalkylene group having 3 to 10 carbon atoms, and an arylene group having 6 to 10 carbon atoms; more preferably a single bond. Selected from the group consisting of bonds, alkylene groups with 1 to 10 carbons, and arylene groups with 6 to 10 carbons; particularly preferably single bonds, methylene groups, ethylene groups, propylene groups, butylene groups, pentylene groups, hexylenes. It is selected from the group consisting of groups, phenylene groups and naphthylene groups; most preferably it is selected from the group consisting of single bonds, methylene groups, ethylene groups, propylene groups, and phenylene groups.
 式(a-3)におけるZ1及びZ2は、それぞれ独立して、炭素数1~20の三価の炭化水素基である。
 Z1及びZ2は、それぞれ独立して、好ましくは、下記式(a-3-i)で表される基、下記式(a-3-ii)で表される基、下記式(a-3-iii)で表される基、及び下記式(a-3-iv)で表される基からなる群より選ばれる。
Figure JPOXMLDOC01-appb-C000015
Z 1 and Z 2 in the formula (a-3) are independently trivalent hydrocarbon groups having 1 to 20 carbon atoms.
Z 1 and Z 2 are independent of each other, preferably a group represented by the following formula (a-3-i), a group represented by the following formula (a-3-ii), and the following formula (a-ii). It is selected from the group consisting of a group represented by 3-iii) and a group represented by the following formula (a-3-iv).
Figure JPOXMLDOC01-appb-C000015
 式(a-3-i)で表される基はコハク酸残基であり、式(a-3-ii)で表される基フタル酸残基であり、式(a-3-iii)で表される基は2,3-ノルボルナンジカルボン酸残基であり、(a-3-iv)で表される基は5-ノルボルネン-2,3-ジカルボン酸残基である。なお、式(a-3-i)~(a-3-iv)中、「*」は結合位置を示す。 The group represented by the formula (a-3-i) is a succinic acid residue, the group phthalic acid residue represented by the formula (a-3-ii), and the formula (a-3-iii). The group represented is a 2,3-norbornanedicarboxylic acid residue, and the group represented by (a-3-iv) is a 5-norbornane-2,3-dicarboxylic acid residue. In the formulas (a-3-i) to (a-3-iv), "*" indicates the bonding position.
 式(a-3)におけるnは、1~200である。nは好ましくは3~150であり、より好ましくは5~120である。 N in the formula (a-3) is 1 to 200. n is preferably 3 to 150, more preferably 5 to 120.
 両末端酸無水物変性シリコーンの市販品として入手できるものとしては、信越化学工業株式会社製の「X22-168AS」、「X22-168A」、「X22-168B」、及び「X22-168-P5-8」、並びにゲレスト社製の「DMS-Z21」等が挙げられる。 Commercially available products of biterminal acid anhydride-modified silicone include "X22-168AS", "X22-168A", "X22-168B", and "X22-168-P5-" manufactured by Shin-Etsu Chemical Co., Ltd. 8 ”,“ DMS-Z21 ”manufactured by Gerest, and the like.
 構成単位Aが構成単位(A-1)及び構成単位(A-3)を含む場合、構成単位A中における構成単位(A-1)の比率は、好ましくは50~99モル%であり、より好ましくは60~98モル%であり、更に好ましく70~97モル%であり、構成単位A中における構成単位(A-3)の比率は、好ましくは1~50モル%であり、より好ましくは2~40モル%であり、更に好ましく3~30モル%である。
 構成単位A中における構成単位(A-1)及び(A-3)の合計の比率は、好ましくは50モル%以上であり、より好ましくは70モル%以上であり、更に好ましくは90モル%以上であり、特に好ましくは99モル%以上である。構成単位(A-1)及び(A-3)の合計の比率の上限値は特に限定されず、即ち、100モル%である。構成単位Aは構成単位(A-1)と構成単位(A-3)とのみからなっていてもよい。
When the constituent unit A includes the constituent unit (A-1) and the constituent unit (A-3), the ratio of the constituent unit (A-1) in the constituent unit A is preferably 50 to 99 mol%, and more. It is preferably 60 to 98 mol%, more preferably 70 to 97 mol%, and the ratio of the constituent unit (A-3) in the constituent unit A is preferably 1 to 50 mol%, more preferably 2 It is -40 mol%, more preferably 3-30 mol%.
The total ratio of the structural units (A-1) and (A-3) in the structural unit A is preferably 50 mol% or more, more preferably 70 mol% or more, still more preferably 90 mol% or more. It is particularly preferably 99 mol% or more. The upper limit of the total ratio of the structural units (A-1) and (A-3) is not particularly limited, that is, 100 mol%. The structural unit A may consist only of the structural unit (A-1) and the structural unit (A-3).
 構成単位Aが構成単位(A-3)を更に含むことによって、フィルムの残留応力を低く維持しながら、無色透明性を向上することができる。 By further including the structural unit (A-3) in the structural unit A, it is possible to improve the colorless transparency while keeping the residual stress of the film low.
 また、構成単位Aは、構成単位(A-1)に加えて、構成単位(A-2)及び構成単位(A-3)の両方を更に含むことも好ましい。
 構成単位Aが構成単位(A-1)、構成単位(A-2)、及び構成単位(A-3)を含む場合、構成単位A中における構成単位(A-1)の比率は、好ましくは50~90モル%であり、より好ましくは60~85モル%、更に好ましくは65~80モル%であり、構成単位A中における構成単位(A-2)の比率は、好ましくは5~30モル%であり、より好ましくは5~25モル%であり、更に好ましくは5~20モル%であり、構成単位A中における構成単位(A-3)の比率は、好ましくは1~25モル%であり、より好ましくは2~20モル%であり、更に好ましくは3~15モル%である。
 構成単位A中における構成単位(A-1)~(A-3)の合計の比率は、好ましくは50モル%以上であり、より好ましくは70モル%以上であり、更に好ましくは90モル%以上であり、特に好ましくは99モル%以上である。構成単位(A-1)~(A-3)の合計の比率の上限値は特に限定されず、即ち、100モル%である。構成単位Aは構成単位(A-1)と構成単位(A-2)と構成単位(A-3)とのみからなっていてもよい。
Further, it is preferable that the structural unit A further includes both the structural unit (A-2) and the structural unit (A-3) in addition to the structural unit (A-1).
When the constituent unit A includes the constituent unit (A-1), the constituent unit (A-2), and the constituent unit (A-3), the ratio of the constituent unit (A-1) in the constituent unit A is preferably It is 50 to 90 mol%, more preferably 60 to 85 mol%, further preferably 65 to 80 mol%, and the ratio of the constituent unit (A-2) in the constituent unit A is preferably 5 to 30 mol%. %, More preferably 5 to 25 mol%, still more preferably 5 to 20 mol%, and the ratio of the constituent unit (A-3) in the constituent unit A is preferably 1 to 25 mol%. Yes, more preferably 2 to 20 mol%, still more preferably 3 to 15 mol%.
The total ratio of the structural units (A-1) to (A-3) in the structural unit A is preferably 50 mol% or more, more preferably 70 mol% or more, still more preferably 90 mol% or more. It is particularly preferably 99 mol% or more. The upper limit of the total ratio of the structural units (A-1) to (A-3) is not particularly limited, that is, 100 mol%. The structural unit A may be composed of only the structural unit (A-1), the structural unit (A-2), and the structural unit (A-3).
 構成単位Aに任意に含まれる構成単位(A-1)以外の構成単位は、構成単位(A-2)及び(A-3)に限定されない。そのような任意の構成単位を与えるテトラカルボン酸二無水物としては、特に限定されないが、ピロメリット酸二無水物、9,9’-ビス(3,4-ジカルボキシフェニル)フルオレン二無水物、及び4,4’-(ヘキサフルオロイソプロピリデン)ジフタル酸無水物等の芳香族テトラカルボン酸二無水物;1,2,3,4-シクロブタンテトラカルボン酸二無水物及び1,2,4,5-シクロヘキサンテトラカルボン酸二無水物等の脂環式テトラカルボン酸二無水物(ただし、式(a-1)で表される化合物を除く);並びに1,2,3,4-ブタンテトラカルボン酸二無水物等の脂肪族テトラカルボン酸二無水物が挙げられる。
 なお、本明細書において、芳香族テトラカルボン酸二無水物とは芳香環を1つ以上含むテトラカルボン酸二無水物を意味し、脂環式テトラカルボン酸二無水物とは脂環を1つ以上含み、かつ芳香環を含まないテトラカルボン酸二無水物を意味し、脂肪族テトラカルボン酸二無水物とは芳香環も脂環も含まないテトラカルボン酸二無水物を意味する。
 構成単位Aに任意に含まれる構成単位(A-1)以外の構成単位は、1種でもよいし、2種以上であってもよい。
The structural units other than the structural unit (A-1) arbitrarily included in the structural unit A are not limited to the structural units (A-2) and (A-3). The tetracarboxylic dianhydride giving such an arbitrary constituent unit is not particularly limited, but is pyromellitic dianhydride, 9,9'-bis (3,4-dicarboxyphenyl) fluorene dianhydride, and the like. And aromatic tetracarboxylic dianhydrides such as 4,4'-(hexafluoroisopropyridene) diphthalic dianhydride; 1,2,3,4-cyclobutanetetracarboxylic dianhydride and 1,2,4,5 -Alicyclic tetracarboxylic dianhydride such as cyclohexanetetracarboxylic dianhydride (excluding the compound represented by the formula (a-1)); and 1,2,3,4-butanetetracarboxylic acid. Examples thereof include aliphatic tetracarboxylic dianhydrides such as dianhydrides.
In the present specification, the aromatic tetracarboxylic dianhydride means a tetracarboxylic dianhydride containing one or more aromatic rings, and the alicyclic tetracarboxylic dianhydride has one alicyclic ring. The tetracarboxylic acid dianhydride containing the above and containing no aromatic ring is meant, and the aliphatic tetracarboxylic acid dianhydride means a tetracarboxylic acid dianhydride containing neither an aromatic ring nor an alicyclic ring.
The structural unit other than the structural unit (A-1) arbitrarily included in the structural unit A may be one type or two or more types.
(構成単位B)
 構成単位Bは、ポリイミド樹脂に占めるジアミンに由来する構成単位であって、下記式(b-1)で表される化合物に由来する構成単位(B-1)と、下記式(b-2)で表される化合物に由来する構成単位(B-2)とを含む。
Figure JPOXMLDOC01-appb-C000016

(式(b-2)中、Xは単結合、置換若しくは無置換のアルキレン基、カルボニル基、エーテル基、下記式(b-2-i)で表される基、又は下記式(b-2-ii)で表される基であり、pは0~2の整数であり、m1は0~4の整数であり、m2は0~4の整数である。ただし、pが0の場合、m1は1~4の整数である。)
Figure JPOXMLDOC01-appb-C000017

(式(b-2-i)中、m3は0~5の整数であり;式(b-2-ii)中、m4は0~5の整数である。なお、m1+m2+m3+m4は1以上であり、pが2の場合、2つのX及び2つのm2~m4のそれぞれは独立して選択される。)
 なお、式(b-2-i)及び(b-2-ii)中、「*」は結合位置を示す。
(Structural unit B)
The structural unit B is a structural unit derived from diamine in the polyimide resin, and is a structural unit (B-1) derived from a compound represented by the following formula (b-1) and the following formula (b-2). Includes a structural unit (B-2) derived from the compound represented by.
Figure JPOXMLDOC01-appb-C000016

(In the formula (b-2), X is a single-bonded, substituted or unsubstituted alkylene group, a carbonyl group, an ether group, a group represented by the following formula (b-2-i), or the following formula (b-2). -Ii), p is an integer of 0 to 2, m1 is an integer of 0 to 4, m2 is an integer of 0 to 4. However, when p is 0, m1 Is an integer from 1 to 4.)
Figure JPOXMLDOC01-appb-C000017

(In the formula (b-2-i), m3 is an integer of 0 to 5; in the formula (b-2-ii), m4 is an integer of 0 to 5. Note that m1 + m2 + m3 + m4 is 1 or more. When p is 2, each of the two Xs and the two m2 to m4 are independently selected.)
In the formulas (b-2-i) and (b-2-ii), "*" indicates the bonding position.
 式(b-1)で表される化合物は、2,2’-ビス(トリフルオロメチル)ベンジジンである。構成単位Bが構成単位(B-1)を含むことによって、フィルムの無色透明性が向上し、残留応力が低下する。 The compound represented by the formula (b-1) is 2,2'-bis (trifluoromethyl) benzidine. When the structural unit B includes the structural unit (B-1), the colorless transparency of the film is improved and the residual stress is reduced.
 式(b-2)で表される化合物の具体例としては、下記式(b-21)~(b-27)で表される化合物が挙げられる。 Specific examples of the compound represented by the formula (b-2) include compounds represented by the following formulas (b-21) to (b-27).
Figure JPOXMLDOC01-appb-C000018
Figure JPOXMLDOC01-appb-C000018
 式(b-21)で表される化合物の具体例としては、下記式(b-211)で表される化合物、即ち、3,5-ジアミノ安息香酸が挙げられる。
Figure JPOXMLDOC01-appb-C000019
Specific examples of the compound represented by the formula (b-21) include a compound represented by the following formula (b-211), that is, 3,5-diaminobenzoic acid.
Figure JPOXMLDOC01-appb-C000019
 構成単位(B-2)は、式(b-21)で表される化合物に由来する構成単位(B-21)であることが好ましく、式(b-211)で表される化合物に由来する構成単位(B-211)であることがより好ましい。 The structural unit (B-2) is preferably a structural unit (B-21) derived from the compound represented by the formula (b-21), and is derived from the compound represented by the formula (b-211). It is more preferably a structural unit (B-211).
 構成単位Bが構成単位(B-2)を含むことによって、フィルムの耐熱性が向上する。 The heat resistance of the film is improved by including the structural unit (B-2) in the structural unit B.
 構成単位B中における構成単位(B-1)の比率は、好ましくは35~95モル%であり、より好ましくは40~90モル%であり、更に好ましくは45~85モル%である。
 構成単位B中における構成単位(B-2)の比率は、好ましくは5~65モル%であり、より好ましくは10~60モル%であり、更に好ましくは15~55モル%である。
 構成単位B中における構成単位(B-1)及び(B-2)の合計の比率は、好ましくは50モル%以上であり、より好ましくは70モル%以上であり、更に好ましくは90モル%以上であり、特に好ましくは99モル%以上である。構成単位(B-1)及び(B-2)の合計の比率の上限値は特に限定されず、即ち、100モル%である。構成単位Bは構成単位(B-1)と構成単位(B-2)とのみからなっていてもよい。
The ratio of the structural unit (B-1) in the structural unit B is preferably 35 to 95 mol%, more preferably 40 to 90 mol%, and further preferably 45 to 85 mol%.
The ratio of the structural unit (B-2) in the structural unit B is preferably 5 to 65 mol%, more preferably 10 to 60 mol%, still more preferably 15 to 55 mol%.
The total ratio of the structural units (B-1) and (B-2) in the structural unit B is preferably 50 mol% or more, more preferably 70 mol% or more, still more preferably 90 mol% or more. It is particularly preferably 99 mol% or more. The upper limit of the total ratio of the structural units (B-1) and (B-2) is not particularly limited, that is, 100 mol%. The structural unit B may consist only of the structural unit (B-1) and the structural unit (B-2).
 構成単位Bは、構成単位(B-1)及び(B-2)以外の構成単位を含んでもよい。そのような構成単位を与えるジアミンとしては、特に限定されないが、1,4-フェニレンジアミン、p-キシリレンジアミン、1,5-ジアミノナフタレン、2,2’-ジメチルビフェニル-4,4’-ジアミン、4,4’-ジアミノジフェニルエーテル、4,4’-ジアミノジフェニルメタン、2,2-ビス(4-アミノフェニル)ヘキサフルオロプロパン、4,4’-ジアミノジフェニルスルホン、4,4’-ジアミノベンズアニリド、1-(4-アミノフェニル)-2,3-ジヒドロ-1,3,3-トリメチル-1H-インデン-5-アミン、α,α’-ビス(4-アミノフェニル)-1,4-ジイソプロピルベンゼン、N,N’-ビス(4-アミノフェニル)テレフタルアミド、4,4’-ビス(4-アミノフェノキシ)ビフェニル、2,2-ビス〔4-(4-アミノフェノキシ)フェニル〕プロパン、2,2-ビス(4-(4-アミノフェノキシ)フェニル)ヘキサフルオロプロパン、及び9,9-ビス(4-アミノフェニル)フルオレン等の芳香族ジアミン(ただし、式(b-1)で表される化合物及び式(b-2)で表される化合物を除く);1,3-ビス(アミノメチル)シクロヘキサン及び1,4-ビス(アミノメチル)シクロヘキサン等の脂環式ジアミン;並びにエチレンジアミン及びヘキサメチレンジアミン等の脂肪族ジアミンが挙げられる。
 なお、本明細書において、芳香族ジアミンとは芳香環を1つ以上含むジアミンを意味し、脂環式ジアミンとは脂環を1つ以上含み、かつ芳香環を含まないジアミンを意味し、脂肪族ジアミンとは芳香環も脂環も含まないジアミンを意味する。
 構成単位Bに任意に含まれる構成単位(B-1)及び(B-2)以外の構成単位は、1種でもよいし、2種以上であってもよい。
The structural unit B may include a structural unit other than the structural units (B-1) and (B-2). The diamine that gives such a structural unit is not particularly limited, but is limited to 1,4-phenylenediamine, p-xylylene diamine, 1,5-diaminonaphthalene, 2,2'-dimethylbiphenyl-4,4'-diamine. , 4,4'-Diaminodiphenyl ether, 4,4'-diaminodiphenylmethane, 2,2-bis (4-aminophenyl) hexafluoropropane, 4,4'-diaminodiphenylsulfone, 4,4'-diaminobenzanilide, 1- (4-aminophenyl) -2,3-dihydro-1,3,3-trimethyl-1H-inden-5-amine, α, α'-bis (4-aminophenyl) -1,4-diisopropylbenzene , N, N'-bis (4-aminophenyl) terephthalamide, 4,4'-bis (4-aminophenoxy) biphenyl, 2,2-bis [4- (4-aminophenoxy) phenyl] propane, 2, Aromatic diamines such as 2-bis (4- (4-aminophenoxy) phenyl) hexafluoropropane and 9,9-bis (4-aminophenyl) fluorene (however, compounds represented by the formula (b-1)). And compounds represented by the formula (b-2)); alicyclic diamines such as 1,3-bis (aminomethyl) cyclohexane and 1,4-bis (aminomethyl) cyclohexane; and ethylenediamine and hexamethylenediamine. Etc. include aliphatic diamines.
In the present specification, the aromatic diamine means a diamine containing one or more aromatic rings, and the alicyclic diamine means a diamine containing one or more alicyclic rings and not containing an aromatic ring, and is a fat. The group diamine means a diamine that does not contain an aromatic ring or an alicyclic ring.
The structural units other than the structural units (B-1) and (B-2) arbitrarily included in the structural unit B may be one type or two or more types.
 ポリイミド樹脂の数平均分子量は、得られるポリイミドフィルムの機械的強度の観点から、好ましくは5,000~100,000である。なお、ポリイミド樹脂の数平均分子量は、例えば、ゲルろ過クロマトグラフィー測定による標準ポリメチルメタクリレート(PMMA)換算値より求めることができる。 The number average molecular weight of the polyimide resin is preferably 5,000 to 100,000 from the viewpoint of the mechanical strength of the obtained polyimide film. The number average molecular weight of the polyimide resin can be obtained from, for example, a standard polymethylmethacrylate (PMMA) conversion value measured by gel filtration chromatography.
 ポリイミド樹脂は、ポリイミド鎖(構成単位Aと構成単位Bとがイミド結合してなる構造)以外の構造を含んでもよい。ポリイミド樹脂中に含まれうるポリイミド鎖以外の構造としては、例えばアミド結合を含む構造等が挙げられる。
 ポリイミド樹脂は、ポリイミド鎖(構成単位Aと構成単位Bとがイミド結合してなる構造)を主たる構造として含むことが好ましい。したがって、ポリイミド樹脂中に占めるポリイミド鎖の比率は、好ましくは50質量%以上であり、より好ましくは70質量%以上であり、更に好ましくは90質量%以上であり、特に好ましくは99質量%以上である。
The polyimide resin may contain a structure other than the polyimide chain (a structure in which the structural unit A and the structural unit B are imide-bonded). Examples of the structure other than the polyimide chain that can be contained in the polyimide resin include a structure containing an amide bond.
The polyimide resin preferably contains a polyimide chain (a structure in which the structural unit A and the structural unit B are imide-bonded) as a main structure. Therefore, the ratio of the polyimide chain to the polyimide resin is preferably 50% by mass or more, more preferably 70% by mass or more, further preferably 90% by mass or more, and particularly preferably 99% by mass or more. is there.
 上記ポリイミド樹脂を含む本発明のポリイミド樹脂組成物は、耐熱性、無色透明性、耐薬品性及び洗浄性に優れ、更に残留応力が低いフィルムを形成することができ、当該フィルムの有する好適な物性値は以下の通りである。 The polyimide resin composition of the present invention containing the above-mentioned polyimide resin can form a film having excellent heat resistance, colorless transparency, chemical resistance and cleanability, and further has low residual stress, and has suitable physical properties of the film. The values are as follows.
 ガラス転移温度(Tg)は、好ましくは380℃以上であり、より好ましくは400℃以上であり、更に好ましくは450℃以上である。
 全光線透過率は、厚さ10μmのフィルムとした際に、好ましくは88%以上であり、より好ましくは89%以上であり、更に好ましくは90%以上である。
 イエローインデックス(YI)は、厚さ10μmのフィルムとした際に、好ましくは5.0以下であり、より好ましくは4.0以下であり、更に好ましくは3.0以下である。
 残留応力は、好ましくは25.0MPa以下であり、より好ましくは24.0MPa以下であり、更に好ましくは22.0MPa以下である。
The glass transition temperature (Tg) is preferably 380 ° C. or higher, more preferably 400 ° C. or higher, and even more preferably 450 ° C. or higher.
The total light transmittance is preferably 88% or more, more preferably 89% or more, still more preferably 90% or more when the film has a thickness of 10 μm.
The yellow index (YI) is preferably 5.0 or less, more preferably 4.0 or less, and further preferably 3.0 or less when the film has a thickness of 10 μm.
The residual stress is preferably 25.0 MPa or less, more preferably 24.0 MPa or less, and further preferably 22.0 MPa or less.
 また、上記ポリイミド樹脂の一態様である、構成単位Aが構成単位(A-2)を更に含むポリイミド樹脂を用いることで、更にレーザー剥離性にも優れるフィルムを形成することができ、当該フィルムの有する好適な物性値は以下の通りである。
 波長308nmにおける光線透過率は、厚さ10μmのフィルムとした際に、好ましくは0.8%以下であり、より好ましくは0.6%以下であり、更に好ましくは0.4%以下である。
Further, by using a polyimide resin in which the structural unit A further contains the structural unit (A-2), which is one aspect of the polyimide resin, a film having further excellent laser peelability can be formed, and the film can be formed. Suitable physical property values to have are as follows.
The light transmittance at a wavelength of 308 nm is preferably 0.8% or less, more preferably 0.6% or less, still more preferably 0.4% or less when the film has a thickness of 10 μm.
 また、上記ポリイミド樹脂を用いて形成することができるフィルムは機械的特性も良好であり、以下のような好適な物性値を有する。
 引張弾性率は、好ましくは2.0GPa以上であり、より好ましくは3.0GPa以上であり、更に好ましくは4.0GPa以上である。
 引張強度は、好ましくは80MPa以上であり、より好ましくは100MPa以上であり、更に好ましくは120MPa以上である。
 なお、本発明における上述の物性値は、具体的には実施例に記載の方法で測定することができる。
In addition, the film that can be formed using the polyimide resin has good mechanical properties and has the following suitable physical property values.
The tensile elastic modulus is preferably 2.0 GPa or more, more preferably 3.0 GPa or more, and further preferably 4.0 GPa or more.
The tensile strength is preferably 80 MPa or more, more preferably 100 MPa or more, and further preferably 120 MPa or more.
The above-mentioned physical property values in the present invention can be specifically measured by the method described in Examples.
<ポリイミド樹脂の製造方法>
 本発明において、ポリイミド樹脂は、上述の構成単位(A-1)を与える化合物を含むテトラカルボン酸成分と、上述の構成単位(B-1)を与える化合物及び上述の構成単位(B-2)を与える化合物を含むジアミン成分とを反応させることにより製造することができる。
<Manufacturing method of polyimide resin>
In the present invention, the polyimide resin contains a tetracarboxylic acid component containing the compound giving the above-mentioned structural unit (A-1), the compound giving the above-mentioned structural unit (B-1), and the above-mentioned structural unit (B-2). It can be produced by reacting with a diamine component containing a compound that gives.
 構成単位(A-1)を与える化合物としては、式(a-1)で表される化合物が挙げられるが、それに限られず、同じ構成単位を与える範囲でその誘導体であってもよい。当該誘導体としては、式(a-1)で表されるテトラカルボン酸二無水物に対応するテトラカルボン酸(即ち、ノルボルナン-2-スピロ-α-シクロペンタノン-α’-スピロ-2”-ノルボルナン-5,5”,6,6”-テトラカルボン酸)、及び当該テトラカルボン酸のアルキルエステルが挙げられる。構成単位(A-1)を与える化合物としては、式(a-1)で表される化合物(即ち、二無水物)が好ましい。 Examples of the compound giving the structural unit (A-1) include the compound represented by the formula (a-1), but the compound is not limited to this, and may be a derivative thereof as long as the same structural unit is given. The derivative is a tetracarboxylic acid corresponding to the tetracarboxylic dianhydride represented by the formula (a-1) (that is, norbornan-2-spiro-α-cyclopentanone-α'-spiro-2 "-. Norbornan-5,5 ", 6,6" -tetracarboxylic acid), and an alkyl ester of the tetracarboxylic acid. Examples of the compound giving the structural unit (A-1) are represented by the formula (a-1). The compound (ie, dianhydride) to be used is preferred.
 テトラカルボン酸成分は、構成単位(A-1)を与える化合物を、好ましくは40モル%以上含み、より好ましくは50モル%以上含み、更に好ましくは60モル%以上含む。構成単位(A-1)を与える化合物の含有量の上限値は特に限定されず、即ち、100モル%である。テトラカルボン酸成分は構成単位(A-1)を与える化合物のみからなっていてもよい。 The tetracarboxylic acid component preferably contains 40 mol% or more, more preferably 50 mol% or more, and further preferably 60 mol% or more of the compound giving the constituent unit (A-1). The upper limit of the content of the compound giving the structural unit (A-1) is not particularly limited, that is, 100 mol%. The tetracarboxylic acid component may consist only of the compound giving the structural unit (A-1).
 テトラカルボン酸成分は、構成単位(A-1)を与える化合物以外の化合物を含んでもよい。
 テトラカルボン酸成分は、構成単位(A-1)を与える化合物に加えて、構成単位(A-2)を与える化合物を更に含むことが好ましい。
 構成単位(A-2)を与える化合物としては、式(a-2)で表される化合物が挙げられるが、それに限られず、同じ構成単位を与える範囲でその誘導体であってもよい。当該誘導体としては、式(a-2)で表されるテトラカルボン酸二無水物に対応するテトラカルボン酸及び当該テトラカルボン酸のアルキルエステルが挙げられる。構成単位(A-2)を与える化合物としては、式(a-2)で表される化合物(即ち、二無水物)が好ましい。
The tetracarboxylic acid component may contain a compound other than the compound giving the structural unit (A-1).
The tetracarboxylic acid component preferably further contains a compound that gives the structural unit (A-2) in addition to the compound that gives the structural unit (A-1).
Examples of the compound giving the structural unit (A-2) include the compound represented by the formula (a-2), but the compound is not limited to this, and may be a derivative thereof as long as the same structural unit is given. Examples of the derivative include a tetracarboxylic acid corresponding to the tetracarboxylic dianhydride represented by the formula (a-2) and an alkyl ester of the tetracarboxylic acid. As the compound giving the structural unit (A-2), the compound represented by the formula (a-2) (that is, dianhydride) is preferable.
 テトラカルボン酸成分が構成単位(A-1)を与える化合物及び構成単位(A-2)を与える化合物を含む場合、テトラカルボン酸成分は、構成単位(A-1)を与える化合物を、好ましくは40~95モル%含み、より好ましくは50~90モル%含み、更に好ましくは55~85モル%含み、構成単位(A-2)を与える化合物を、好ましくは5~60モル%含み、より好ましくは10~50モル%含み、更に好ましくは15~45モル%含む。
 テトラカルボン酸成分は、構成単位(A-1)を与える化合物及び構成単位(A-2)を与える化合物を合計で、好ましくは50モル%以上含み、より好ましくは70モル%以上含み、更に好ましくは90モル%以上含み、特に好ましくは99モル%以上含む。構成単位(A-1)を与える化合物及び構成単位(A-2)を与える化合物の合計の含有量の上限値は特に限定されず、即ち、100モル%である。テトラカルボン酸成分は構成単位(A-1)を与える化合物と構成単位(A-2)を与える化合物とのみからなっていてもよい。
When the tetracarboxylic acid component contains a compound giving a structural unit (A-1) and a compound giving a structural unit (A-2), the tetracarboxylic acid component preferably contains a compound giving a structural unit (A-1). It contains 40 to 95 mol%, more preferably 50 to 90 mol%, further preferably 55 to 85 mol%, and preferably contains 5 to 60 mol% of the compound giving the constituent unit (A-2), more preferably. Contains 10 to 50 mol%, more preferably 15 to 45 mol%.
The tetracarboxylic acid component contains, in total, a compound that gives the structural unit (A-1) and a compound that gives the structural unit (A-2), preferably 50 mol% or more, more preferably 70 mol% or more, and further preferably. Contains 90 mol% or more, and particularly preferably 99 mol% or more. The upper limit of the total content of the compound giving the structural unit (A-1) and the compound giving the structural unit (A-2) is not particularly limited, that is, 100 mol%. The tetracarboxylic acid component may consist only of a compound that gives a constituent unit (A-1) and a compound that gives a constituent unit (A-2).
 テトラカルボン酸成分は、構成単位(A-1)を与える化合物に加えて、構成単位(A-3)を与える化合物を更に含むことが好ましい。
 構成単位(A-3)を与える化合物としては、両末端酸無水物変性シリコーン(例えば、式(a-3)で表される化合物)が挙げられるが、それに限られず、同じ構成単位を与える範囲でその誘導体であってもよい。当該誘導体としては、両末端酸無水物変性シリコーンに対応するテトラカルボン酸及び当該テトラカルボン酸のアルキルエステルが挙げられる。構成単位(A-3)を与える化合物としては、両末端酸無水物変性シリコーン(即ち、二無水物)が好ましい。
The tetracarboxylic acid component preferably further contains a compound that gives the structural unit (A-3) in addition to the compound that gives the structural unit (A-1).
Examples of the compound giving the structural unit (A-3) include, but are not limited to, biterminal acid anhydride-modified silicone (for example, the compound represented by the formula (a-3)), and the range giving the same structural unit is not limited thereto. And it may be a derivative thereof. Examples of the derivative include a tetracarboxylic acid corresponding to both terminal acid anhydride-modified silicones and an alkyl ester of the tetracarboxylic acid. As the compound that gives the structural unit (A-3), double-terminal acid anhydride-modified silicone (that is, dianhydride) is preferable.
 テトラカルボン酸成分が構成単位(A-1)を与える化合物及び構成単位(A-3)を与える化合物を含む場合、テトラカルボン酸成分は、構成単位(A-1)を与える化合物を、好ましくは50~99モル%含み、より好ましくは60~98モル%含み、更に好ましくは70~97モル%含み、構成単位(A-3)を与える化合物を、好ましくは1~50モル%含み、より好ましくは2~40モル%含み、更に好ましくは3~30モル%含む。
 テトラカルボン酸成分は、構成単位(A-1)を与える化合物及び構成単位(A-3)を与える化合物を合計で、好ましくは50モル%以上含み、より好ましくは70モル%以上含み、更に好ましくは90モル%以上含み、特に好ましくは99モル%以上含む。構成単位(A-1)を与える化合物及び構成単位(A-3)を与える化合物の合計の含有量の上限値は特に限定されず、即ち、100モル%である。テトラカルボン酸成分は構成単位(A-1)を与える化合物と構成単位(A-3)を与える化合物とのみからなっていてもよい。
When the tetracarboxylic acid component contains a compound giving a structural unit (A-1) and a compound giving a structural unit (A-3), the tetracarboxylic acid component preferably contains a compound giving a structural unit (A-1). It contains 50 to 99 mol%, more preferably 60 to 98 mol%, further preferably 70 to 97 mol%, and preferably contains 1 to 50 mol% of the compound giving the constituent unit (A-3), more preferably. Contains 2-40 mol%, more preferably 3-30 mol%.
The tetracarboxylic acid component contains, in total, a compound that gives the constituent unit (A-1) and a compound that gives the constituent unit (A-3), preferably 50 mol% or more, more preferably 70 mol% or more, and further preferably. Contains 90 mol% or more, and particularly preferably 99 mol% or more. The upper limit of the total content of the compound giving the structural unit (A-1) and the compound giving the structural unit (A-3) is not particularly limited, that is, 100 mol%. The tetracarboxylic acid component may consist only of a compound giving a structural unit (A-1) and a compound giving a structural unit (A-3).
 テトラカルボン酸成分は、構成単位(A-1)を与える化合物に加えて、構成単位(A-2)を与える化合物及び構成単位(A-3)を与える化合物の両方を更に含むことも好ましい。
 テトラカルボン酸成分が構成単位(A-1)を与える化合物、構成単位(A-2)を与える化合物、及び構成単位(A-3)を与える化合物を含む場合、テトラカルボン酸成分は、構成単位(A-1)を与える化合物を、好ましくは50~90モル%含み、より好ましくは60~85モル%含み、更に好ましくは65~80モル%含み、構成単位(A-2)を与える化合物を、好ましくは5~30モル%含み、より好ましくは5~25モル%含み、更に好ましくは5~20モル%含み、構成単位(A-3)を与える化合物を、好ましくは1~25モル%含み、より好ましくは2~20モル%含み、更に好ましくは3~15モル%含む。
 テトラカルボン酸成分は、構成単位(A-1)を与える化合物、構成単位(A-2)を与える化合物、及び構成単位(A-3)を与える化合物を合計で、好ましくは50モル%以上含み、より好ましくは70モル%以上含み、更に好ましくは90モル%以上含み、特に好ましくは99モル%以上含む。構成単位(A-1)を与える化合物、構成単位(A-2)を与える化合物、及び構成単位(A-3)を与える化合物の合計の含有量の上限値は特に限定されず、即ち、100モル%である。テトラカルボン酸成分は構成単位(A-1)を与える化合物と構成単位(A-2)を与える化合物と構成単位(A-3)を与える化合物とのみからなっていてもよい。
The tetracarboxylic acid component preferably further contains, in addition to the compound giving the structural unit (A-1), both the compound giving the structural unit (A-2) and the compound giving the structural unit (A-3).
When the tetracarboxylic acid component contains a compound that gives a constituent unit (A-1), a compound that gives a constituent unit (A-2), and a compound that gives a constituent unit (A-3), the tetracarboxylic acid component is a constituent unit. A compound containing (A-1) preferably 50 to 90 mol%, more preferably 60 to 85 mol%, still more preferably 65 to 80 mol%, and giving a structural unit (A-2). Containing 5 to 30 mol%, more preferably 5 to 25 mol%, further preferably 5 to 20 mol%, and preferably 1 to 25 mol% of the compound giving the structural unit (A-3). , More preferably 2 to 20 mol%, still more preferably 3 to 15 mol%.
The tetracarboxylic acid component contains a compound that gives the structural unit (A-1), a compound that gives the structural unit (A-2), and a compound that gives the structural unit (A-3) in total, preferably 50 mol% or more. , More preferably 70 mol% or more, further preferably 90 mol% or more, and particularly preferably 99 mol% or more. The upper limit of the total content of the compound giving the structural unit (A-1), the compound giving the structural unit (A-2), and the compound giving the structural unit (A-3) is not particularly limited, that is, 100. Mol%. The tetracarboxylic acid component may consist only of a compound that gives a constituent unit (A-1), a compound that gives a constituent unit (A-2), and a compound that gives a constituent unit (A-3).
 テトラカルボン酸成分に任意に含まれる構成単位(A-1)を与える化合物以外の化合物は、構成単位(A-2)を与える化合物及び構成単位(A-3)を与える化合物に限定されない。そのような任意の化合物としては、上述の芳香族テトラカルボン酸二無水物、脂環式テトラカルボン酸二無水物、及び脂肪族テトラカルボン酸二無水物、並びにそれらの誘導体(テトラカルボン酸、テトラカルボン酸のアルキルエステル等)が挙げられる。
 テトラカルボン酸成分に任意に含まれる構成単位(A-1)を与える化合物以外の化合物は、1種でもよいし、2種以上であってもよい。
The compound other than the compound that gives the structural unit (A-1) arbitrarily contained in the tetracarboxylic acid component is not limited to the compound that gives the structural unit (A-2) and the compound that gives the structural unit (A-3). Such arbitrary compounds include the above-mentioned aromatic tetracarboxylic dianhydride, alicyclic tetracarboxylic dianhydride, and aliphatic tetracarboxylic dianhydride, and derivatives thereof (tetracarboxylic acid, tetra). Alkyl ester of carboxylic acid, etc.) can be mentioned.
The compound other than the compound that gives the structural unit (A-1) arbitrarily contained in the tetracarboxylic acid component may be one kind or two or more kinds.
 構成単位(B-1)を与える化合物としては、式(b-1)で表される化合物が挙げられるが、それに限られず、同じ構成単位を与える範囲でその誘導体であってもよい。当該誘導体としては、式(b-1)で表されるジアミンに対応するジイソシアネートが挙げられる。構成単位(B-1)を与える化合物としては、式(b-1)で表される化合物(即ち、ジアミン)が好ましい。
 同様に、構成単位(B-2)を与える化合物としては、式(b-2)で表される化合物が挙げられるが、それに限られず、同じ構成単位を与える範囲でその誘導体であってもよい。当該誘導体としては、式(b-2)で表されるジアミンに対応するジイソシアネートが挙げられる。構成単位(B-2)を与える化合物としては、式(b-2)で表される化合物(即ち、ジアミン)が好ましい。
Examples of the compound giving the structural unit (B-1) include, but are not limited to, the compound represented by the formula (b-1), and may be a derivative thereof as long as the same structural unit is given. Examples of the derivative include diisocyanates corresponding to the diamine represented by the formula (b-1). As the compound giving the structural unit (B-1), the compound represented by the formula (b-1) (that is, diamine) is preferable.
Similarly, the compound giving the structural unit (B-2) includes a compound represented by the formula (b-2), but the compound is not limited to this, and may be a derivative thereof as long as the same structural unit is given. .. Examples of the derivative include diisocyanates corresponding to the diamine represented by the formula (b-2). As the compound giving the structural unit (B-2), the compound represented by the formula (b-2) (that is, diamine) is preferable.
 ジアミン成分は、構成単位(B-1)を与える化合物を、好ましくは35~95モル%含み、より好ましくは40~90モル%含み、更に好ましくは45~85モル%含む。
 ジアミン成分は、構成単位(B-2)を与える化合物を、好ましくは5~65モル%含み、より好ましくは10~60モル%含み、更に好ましくは15~55モル%含む。
 ジアミン成分は、構成単位(B-1)を与える化合物及び構成単位(B-2)を与える化合物を合計で、好ましくは50モル%以上含み、より好ましくは70モル%以上含み、更に好ましくは90モル%以上含み、特に好ましくは99モル%以上含む。構成単位(B-1)を与える化合物及び構成単位(B-2)を与える化合物の合計の含有量の上限値は特に限定されず、即ち、100モル%である。ジアミン成分は構成単位(B-1)を与える化合物と構成単位(B-2)を与える化合物とのみからなっていてもよい。
The diamine component preferably contains a compound that gives the structural unit (B-1) in an amount of 35 to 95 mol%, more preferably 40 to 90 mol%, still more preferably 45 to 85 mol%.
The diamine component preferably contains a compound that gives the structural unit (B-2) in an amount of 5 to 65 mol%, more preferably 10 to 60 mol%, and even more preferably 15 to 55 mol%.
The diamine component contains, in total, a compound giving the structural unit (B-1) and a compound giving the structural unit (B-2) in an amount of 50 mol% or more, more preferably 70 mol% or more, and further preferably 90. It contains more than mol%, and particularly preferably 99 mol% or more. The upper limit of the total content of the compound giving the structural unit (B-1) and the compound giving the structural unit (B-2) is not particularly limited, that is, 100 mol%. The diamine component may consist only of a compound giving a structural unit (B-1) and a compound giving a structural unit (B-2).
 ジアミン成分は構成単位(B-1)を与える化合物及び構成単位(B-2)を与える化合物以外の化合物を含んでもよく、当該化合物としては、上述の芳香族ジアミン、脂環式ジアミン、及び脂肪族ジアミン、並びにそれらの誘導体(ジイソシアネート等)が挙げられる。
 ジアミン成分に任意に含まれる構成単位(B-1)を与える化合物及び構成単位(B-2)を与える化合物以外の化合物は、1種でもよいし、2種以上であってもよい。
The diamine component may contain a compound that gives the constituent unit (B-1) and a compound other than the compound that gives the constituent unit (B-2), and the compound includes the above-mentioned aromatic diamine, alicyclic diamine, and fat. Examples thereof include group diamines and derivatives thereof (diisocyanate, etc.).
The compound other than the compound giving the structural unit (B-1) arbitrarily contained in the diamine component and the compound giving the structural unit (B-2) may be one kind or two or more kinds.
 本発明において、ポリイミド樹脂の製造に用いるテトラカルボン酸成分とジアミン成分の仕込み量比は、テトラカルボン酸成分1モルに対してジアミン成分が0.9~1.1モルであることが好ましい。 In the present invention, the charging amount ratio of the tetracarboxylic acid component and the diamine component used in the production of the polyimide resin is preferably 0.9 to 1.1 mol of the diamine component with respect to 1 mol of the tetracarboxylic acid component.
 また、本発明において、ポリイミド樹脂の製造には、前述のテトラカルボン酸成分及びジアミン成分の他に、末端封止剤を用いてもよい。末端封止剤としてはモノアミン類あるいはジカルボン酸類が好ましい。導入される末端封止剤の仕込み量としては、テトラカルボン酸成分1モルに対して0.0001~0.1モルが好ましく、特に0.001~0.06モルが好ましい。モノアミン類末端封止剤としては、例えば、メチルアミン、エチルアミン、プロピルアミン、ブチルアミン、ベンジルアミン、4-メチルベンジルアミン、4-エチルベンジルアミン、4-ドデシルベンジルアミン、3-メチルベンジルアミン、3-エチルベンジルアミン、アニリン、3-メチルアニリン、4-メチルアニリン等が推奨される。これらのうち、ベンジルアミン、アニリンが好適に使用できる。ジカルボン酸類末端封止剤としては、ジカルボン酸類が好ましく、その一部を閉環していてもよい。例えば、フタル酸、無水フタル酸、4-クロロフタル酸、テトラフルオロフタル酸、2,3-ベンゾフェノンジカルボン酸、3,4-ベンゾフェノンジカルボン酸、シクロヘキサン-1,2-ジカルボン酸、シクロペンタン-1,2-ジカルボン酸、4-シクロヘキセン-1,2-ジカルボン酸等が推奨される。これらのうち、フタル酸、無水フタル酸が好適に使用できる。 Further, in the present invention, in addition to the above-mentioned tetracarboxylic acid component and diamine component, an end-capping agent may be used for producing the polyimide resin. Monoamines or dicarboxylic acids are preferable as the terminal encapsulant. The amount of the terminal encapsulant to be introduced is preferably 0.0001 to 0.1 mol, particularly preferably 0.001 to 0.06 mol, based on 1 mol of the tetracarboxylic acid component. Examples of the monoamine terminal sealant include methylamine, ethylamine, propylamine, butylamine, benzylamine, 4-methylbenzylamine, 4-ethylbenzylamine, 4-dodecylbenzylamine, 3-methylbenzylamine, 3-. Ethylbenzylamine, aniline, 3-methylaniline, 4-methylaniline and the like are recommended. Of these, benzylamine and aniline can be preferably used. As the dicarboxylic acid terminal encapsulant, dicarboxylic acids are preferable, and a part thereof may be ring-closed. For example, phthalic acid, phthalic anhydride, 4-chlorophthalic acid, tetrafluorophthalic acid, 2,3-benzophenonedicarboxylic acid, 3,4-benzophenonedicarboxylic acid, cyclohexane-1,2-dicarboxylic acid, cyclopentane-1,2 -Dicarboxylic acid, 4-cyclohexene-1,2-dicarboxylic acid and the like are recommended. Of these, phthalic acid and phthalic anhydride can be preferably used.
 前述のテトラカルボン酸成分とジアミン成分とを反応させる方法には特に制限はなく、公知の方法を用いることができる。
 具体的な反応方法としては、(1)テトラカルボン酸成分、ジアミン成分、及び反応溶剤を反応器に仕込み、室温~80℃で0.5~30時間撹拌し、その後に昇温してイミド化反応を行う方法、(2)ジアミン成分及び反応溶剤を反応器に仕込んで溶解させた後、テトラカルボン酸成分を仕込み、必要に応じて室温~80℃で0.5~30時間撹拌し、その後に昇温してイミド化反応を行う方法、(3)テトラカルボン酸成分、ジアミン成分、及び反応溶剤を反応器に仕込み、直ちに昇温してイミド化反応を行う方法等が挙げられる。
The method for reacting the above-mentioned tetracarboxylic acid component with the diamine component is not particularly limited, and a known method can be used.
Specific reaction methods include (1) charging a tetracarboxylic dian component, a diamine component, and a reaction solvent into a reactor, stirring at room temperature to 80 ° C. for 0.5 to 30 hours, and then raising the temperature to imidize. Method of carrying out the reaction, (2) After charging the diamine component and the reaction solvent into the reactor and dissolving them, the tetracarboxylic acid component is charged, and if necessary, the mixture is stirred at room temperature to 80 ° C. for 0.5 to 30 hours, and then. Examples thereof include a method of carrying out an imidization reaction by raising the temperature to (3) a method of charging a tetracarboxylic dian component, a diamine component and a reaction solvent into a reactor and immediately raising the temperature to carry out the imidization reaction.
 ポリイミド樹脂の製造に用いられる反応溶剤は、イミド化反応を阻害せず、生成するポリイミドを溶解できるものであればよい。例えば、非プロトン性溶剤、フェノール系溶剤、エーテル系溶剤、カーボネート系溶剤等が挙げられる。 The reaction solvent used in the production of the polyimide resin may be one that does not inhibit the imidization reaction and can dissolve the produced polyimide. For example, an aprotic solvent, a phenol solvent, an ether solvent, a carbonate solvent and the like can be mentioned.
 非プロトン性溶剤の具体例としては、N,N-ジメチルホルムアミド、N,N-ジメチルアセトアミド、N-メチル-2-ピロリドン(NMP)、N-メチルカプロラクタム、1,3-ジメチルイミダゾリジノン、テトラメチル尿素等のアミド系溶剤、γ-ブチロラクトン(GBL)、γ-バレロラクトン等のラクトン系溶剤、ヘキサメチルホスホリックアミド、ヘキサメチルホスフィントリアミド等の含リン系アミド系溶剤、ジメチルスルホン、ジメチルスルホキシド、スルホラン等の含硫黄系溶剤、アセトン、シクロヘキサノン、メチルシクロヘキサノン等のケトン系溶剤、ピコリン、ピリジン等のアミン系溶剤、酢酸(2-メトキシ-1-メチルエチル)等のエステル系溶剤等が挙げられる。 Specific examples of the aprotonic solvent include N, N-dimethylformamide, N, N-dimethylacetamide, N-methyl-2-pyrrolidone (NMP), N-methylcaprolactam, 1,3-dimethylimidazolidinone, and tetra. Amide solvents such as methyl urea, lactone solvents such as γ-butyrolactone (GBL) and γ-valerolactone, phosphorus-containing amide solvents such as hexamethylphosphoric amide and hexamethylphosphintriamide, dimethyl sulfone and dimethyl sulfoxide. , Sulfur-containing solvent such as sulfolane, ketone solvent such as acetone, cyclohexanone, methylcyclohexanone, amine solvent such as picolin and pyridine, ester solvent such as acetic acid (2-methoxy-1-methylethyl) and the like. ..
 フェノール系溶剤の具体例としては、フェノール、o-クレゾール、m-クレゾール、p-クレゾール、2,3-キシレノール、2,4-キシレノール、2,5-キシレノール、2,6-キシレノール、3,4-キシレノール、3,5-キシレノール等が挙げられる。
 エーテル系溶剤の具体例としては、1,2-ジメトキシエタン、ビス(2-メトキシエチル)エーテル、1,2-ビス(2-メトキシエトキシ)エタン、ビス〔2-(2-メトキシエトキシ)エチル〕エーテル、テトラヒドロフラン、1,4-ジオキサン等が挙げられる。
 また、カーボネート系溶剤の具体的な例としては、ジエチルカーボネート、メチルエチルカーボネート、エチレンカーボネート、プロピレンカーボネート等が挙げられる。
 上記反応溶剤の中でも、アミド系溶剤又はラクトン系溶剤が好ましい。また、上記の反応溶剤は単独で又は2種以上混合して用いてもよい。
Specific examples of the phenolic solvent include phenol, o-cresol, m-cresol, p-cresol, 2,3-xylenol, 2,4-xylenol, 2,5-xylenol, 2,6-xylenol, 3,4. -Xylenol, 3,5-xylenol and the like can be mentioned.
Specific examples of the ether solvent include 1,2-dimethoxyethane, bis (2-methoxyethyl) ether, 1,2-bis (2-methoxyethoxy) ethane, and bis [2- (2-methoxyethoxy) ethyl]. Examples include ether, tetrahydrofuran, 1,4-dioxane and the like.
Specific examples of the carbonate solvent include diethyl carbonate, methyl ethyl carbonate, ethylene carbonate, propylene carbonate and the like.
Among the above reaction solvents, an amide solvent or a lactone solvent is preferable. Moreover, the above-mentioned reaction solvent may be used alone or in mixture of 2 or more types.
 イミド化反応では、ディーンスターク装置などを用いて、製造時に生成する水を除去しながら反応を行うことが好ましい。このような操作を行うことで、重合度及びイミド化率をより上昇させることができる。 In the imidization reaction, it is preferable to carry out the reaction while removing water generated during production using a Dean-Stark apparatus or the like. By performing such an operation, the degree of polymerization and the imidization rate can be further increased.
 上記のイミド化反応においては、公知のイミド化触媒を用いることができる。イミド化触媒としては、塩基触媒又は酸触媒が挙げられる。
 塩基触媒としては、ピリジン、キノリン、イソキノリン、α-ピコリン、β-ピコリン、2,4-ルチジン、2,6-ルチジン、トリメチルアミン、トリエチルアミン(TEA)、トリプロピルアミン、トリブチルアミン、トリエチレンジアミン、イミダゾール、N,N-ジメチルアニリン、N,N-ジエチルアニリン等の有機塩基触媒、水酸化カリウムや水酸化ナトリウム、炭酸カリウム、炭酸ナトリウム、炭酸水素カリウム、炭酸水素ナトリウム等の無機塩基触媒が挙げられる。
 また、酸触媒としては、クロトン酸、アクリル酸、トランス-3-ヘキセノイック酸、桂皮酸、安息香酸、メチル安息香酸、オキシ安息香酸、テレフタル酸、ベンゼンスルホン酸、パラトルエンスルホン酸、ナフタレンスルホン酸等が挙げられる。上記のイミド化触媒は単独で又は2種以上を組み合わせて用いてもよい。
 上記のうち、取り扱い性の観点から、塩基触媒を用いることが好ましく、有機塩基触媒を用いることがより好ましく、トリエチルアミンを用いることが更に好ましく、トリエチルアミンとトリエチレンジアミンを組み合わせて用いることが特に好ましい。
In the above imidization reaction, a known imidization catalyst can be used. Examples of the imidization catalyst include a base catalyst and an acid catalyst.
Base catalysts include pyridine, quinoline, isoquinoline, α-picoline, β-picoline, 2,4-lutidine, 2,6-lutidine, trimethylamine, triethylamine (TEA), tripropylamine, tributylamine, triethylenediamine, imidazole, Examples thereof include organic base catalysts such as N, N-dimethylaniline and N, N-diethylaniline, and inorganic base catalysts such as potassium hydroxide, sodium hydroxide, potassium carbonate, sodium carbonate, potassium hydrogencarbonate and sodium hydrogencarbonate.
Examples of the acid catalyst include crotonic acid, acrylic acid, trans-3-hexenoic acid, cinnamic acid, benzoic acid, methylbenzoic acid, oxybenzoic acid, terephthalic acid, benzenesulfonic acid, paratoluenesulfonic acid, naphthalenesulfonic acid and the like. Can be mentioned. The above-mentioned imidization catalyst may be used alone or in combination of two or more.
Of the above, from the viewpoint of handleability, it is preferable to use a base catalyst, more preferably an organic base catalyst, further preferably triethylamine, and particularly preferably a combination of triethylamine and triethylenediamine.
 イミド化反応の温度は、反応率及びゲル化等の抑制の観点から、好ましくは120~250℃、より好ましくは160~200℃である。また、反応時間は、生成水の留出開始後、好ましくは0.5~10時間である。 The temperature of the imidization reaction is preferably 120 to 250 ° C., more preferably 160 to 200 ° C. from the viewpoint of suppressing the reaction rate and gelation. The reaction time is preferably 0.5 to 10 hours after the start of distillation of the produced water.
<架橋剤>
 本発明において、架橋剤は少なくとも2つのオキサゾリル基を有する。即ち、本発明における架橋剤は、分子内に2以上のオキサゾリル基(オキサゾリン環)を有する多官能オキサゾリン化合物である。
 オキサゾリル基はカルボキシル基との反応性を有しており、カルボキシル基とオキサゾリル基とが反応すると、以下に示すようにアミドエステル結合が形成される。この反応は、80℃以上に加熱すると特に進行しやすい。
Figure JPOXMLDOC01-appb-C000020
<Crosslinking agent>
In the present invention, the cross-linking agent has at least two oxazolyl groups. That is, the cross-linking agent in the present invention is a polyfunctional oxazoline compound having two or more oxazoline groups (oxazoline rings) in the molecule.
The oxazolyl group has reactivity with the carboxyl group, and when the carboxyl group reacts with the oxazolyl group, an amide ester bond is formed as shown below. This reaction is particularly easy to proceed when heated to 80 ° C. or higher.
Figure JPOXMLDOC01-appb-C000020
 本発明のポリイミド樹脂組成物に含まれるポリイミド樹脂はカルボキシル基を有することから、本発明のポリイミド樹脂組成物を加熱すると、架橋剤を介してポリイミド樹脂同士が架橋して、架橋ポリイミド樹脂が形成される。このような理由から、フィルムの耐薬品性が向上する。 Since the polyimide resin contained in the polyimide resin composition of the present invention has a carboxyl group, when the polyimide resin composition of the present invention is heated, the polyimide resins are crosslinked with each other via a cross-linking agent to form a crosslinked polyimide resin. To. For this reason, the chemical resistance of the film is improved.
 架橋剤は、分子内に2以上のオキサゾリル基を有する多官能オキサゾリン化合物であれば特に限定されず、その具体例としては、1,3-ビス(4,5-ジヒドロ-2-オキサゾリル)ベンゼン、1,4-ビス(4,5-ジヒドロ-2-オキサゾリル)ベンゼン、2,2’-ビス(2-オキサゾリン)、株式会社日本触媒製のK-2010E、K-2020E、K-2030E、2,6-ビス(4-イソプロピル-2-オキサゾリン-2-イル)ピリジン、2,6-ビス(4-フェニル-2-オキサゾリン-2-イル)ピリジン、2,2’-イソプロピリデンビス(4-フェニル-2-オキサゾリン)、2,2’-イソプロピリデンビス(4-ターシャルブチル-2-オキサゾリン)などが挙げられる。 The cross-linking agent is not particularly limited as long as it is a polyfunctional oxazoline compound having two or more oxazoline groups in the molecule, and specific examples thereof include 1,3-bis (4,5-dihydro-2-oxazoline) benzene. 1,4-bis (4,5-dihydro-2-oxazoline) benzene, 2,2'-bis (2-oxazoline), K-2010E, K-2020E, K-2030E, 2, manufactured by Nippon Catalyst Co., Ltd. 6-bis (4-isopropyl-2-oxazoline-2-yl) pyridine, 2,6-bis (4-phenyl-2-oxazoline-2-yl) pyridine, 2,2'-isopropyridenebis (4-phenyl) -2-Oxazoline), 2,2'-isopropyridenebis (4-talshalbutyl-2-oxazoline) and the like.
 架橋剤は、好ましくは少なくとも2つのオキサゾリル基が結合した芳香環又は芳香族複素環を含む化合物であり、より好ましくは少なくとも2つのオキサゾリル基が結合したベンゼン環又はピリジン環を含む化合物であり、更に好ましくは少なくとも2つのオキサゾリル基が結合したベンゼン環を含む化合物であり、特に好ましくは1,3-ビス(4,5-ジヒドロ-2-オキサゾリル)ベンゼンである。
 架橋剤は、単独で用いてもよいし、2種類以上を組み合わせて用いてもよい。
The cross-linking agent is preferably a compound containing an aromatic ring or an aromatic heterocycle having at least two oxazolyl groups bonded thereto, more preferably a compound containing a benzene ring or a pyridine ring having at least two oxazolyl groups bonded thereto, and further. A compound containing a benzene ring in which at least two oxazolyl groups are bonded is preferable, and 1,3-bis (4,5-dihydro-2-oxazolyl) benzene is particularly preferable.
The cross-linking agent may be used alone or in combination of two or more.
 本発明のポリイミド樹脂組成物は、架橋剤中のオキサゾリル基とポリイミド樹脂中のカルボキシル基とのモル比(オキサゾリル基/カルボキシル基)が1/8~1/0.5の範囲となるような比率で、ポリイミド樹脂と架橋剤とを含むことが好ましい。前記モル比は、より好ましくは1/6~1/1であり、更に好ましくは1/4~1/2である。
 なお、上記のモル比は、架橋剤に含まれるオキサゾリル基と、ポリイミド樹脂の製造に用いる構成単位(B-1)を与える化合物に含まれるカルボキシル基とのモル比を意味し、架橋剤の添加量と構成単位(B-1)を与える化合物の添加量に基づいて計算される。
In the polyimide resin composition of the present invention, the molar ratio (oxazolyl group / carboxyl group) of the oxazolyl group in the cross-linking agent to the carboxyl group in the polyimide resin is in the range of 1/8 to 1 / 0.5. Therefore, it is preferable to contain a polyimide resin and a cross-linking agent. The molar ratio is more preferably 1/6 to 1/1, still more preferably 1/4 to 1/2.
The above molar ratio means the molar ratio of the oxazolyl group contained in the cross-linking agent to the carboxyl group contained in the compound giving the structural unit (B-1) used for producing the polyimide resin, and the addition of the cross-linking agent. Calculated based on the amount and amount of compound added to give the building block (B-1).
[ポリイミドワニス]
 本発明のポリイミド樹脂組成物の好適な一態様として、上述のポリイミド樹脂及び上述の架橋剤に加えて、有機溶媒を更に含み、当該ポリイミド樹脂が当該有機溶媒に溶解しているポリイミド樹脂組成物(以後、“ポリイミドワニス”とも呼称する)が挙げられる。
 有機溶媒はポリイミド樹脂が溶解するものであればよく、特に限定されないが、ポリイミド樹脂の製造に用いられる反応溶剤として上述した化合物を、単独又は2種以上を混合して用いることが好ましい。
 ポリイミドワニスは、重合法により得られるポリイミド樹脂が反応溶剤に溶解した溶液そのものに対して架橋剤を添加したものであってもよいし、又は当該溶液に対して希釈溶剤及び架橋剤を添加したものであってもよい。
[Polyimide varnish]
As a preferred embodiment of the polyimide resin composition of the present invention, a polyimide resin composition containing an organic solvent in addition to the above-mentioned polyimide resin and the above-mentioned cross-linking agent, and the polyimide resin is dissolved in the organic solvent ( Hereinafter, it is also referred to as "polyimide varnish").
The organic solvent may be any one that dissolves the polyimide resin, and is not particularly limited, but it is preferable to use the above-mentioned compounds alone or in combination of two or more as the reaction solvent used for producing the polyimide resin.
The polyimide varnish may be a solution in which a polyimide resin obtained by a polymerization method is dissolved in a reaction solvent, to which a cross-linking agent is added, or a solution in which a diluting solvent and a cross-linking agent are added. It may be.
ポリイミドワニスは、ポリイミド樹脂を5~40質量%含むことが好ましく、7~30質量%含むことがより好ましく、8~20質量%含むことが更に好ましい。ポリイミドワニスの粘度は50~5000Pa・sが好ましく、100~4000Pa・sがより好ましく、300~3500Pa・sが更に好ましい。ポリイミドワニスの粘度は、E型粘度計を用いて25℃で測定された値である。 The polyimide varnish preferably contains 5 to 40% by mass of the polyimide resin, more preferably 7 to 30% by mass, and even more preferably 8 to 20% by mass. The viscosity of the polyimide varnish is preferably 50 to 5000 Pa · s, more preferably 100 to 4000 Pa · s, and even more preferably 300 to 3500 Pa · s. The viscosity of the polyimide varnish is a value measured at 25 ° C. using an E-type viscometer.
 また、本発明のポリイミドワニスは、ポリイミドフィルムの要求特性を損なわない範囲で、無機フィラー、接着促進剤、剥離剤、難燃剤、紫外線安定剤、界面活性剤、レベリング剤、消泡剤、蛍光増白剤、架橋剤、重合開始剤、感光剤等各種添加剤を含んでもよい。
 本発明のポリイミドワニスの製造方法は特に限定されず、公知の方法を適用することができる。
In addition, the polyimide varnish of the present invention contains an inorganic filler, an adhesion accelerator, a release agent, a flame retardant, an ultraviolet stabilizer, a surfactant, a leveling agent, a defoaming agent, and an optical brightener as long as the required properties of the polyimide film are not impaired. Various additives such as a whitening agent, a cross-linking agent, a polymerization initiator, and a photosensitizer may be contained.
The method for producing the polyimide varnish of the present invention is not particularly limited, and a known method can be applied.
[ポリイミドフィルム]
 本発明のポリイミドフィルムは、本発明のポリイミド樹脂組成物中に含まれる上述のポリイミド樹脂が上述の架橋剤により架橋されてなる。即ち、本発明のポリイミドフィルムは、架橋剤を介したポリイミド樹脂同士の架橋物である架橋ポリイミド樹脂を含む。したがって、本発明のポリイミドフィルムは、耐熱性、無色透明性及び耐薬品性に優れ、更に残留応力が低い。本発明のポリイミドフィルムが有する好適な物性値は上述の通りである。
[Polyimide film]
The polyimide film of the present invention is obtained by cross-linking the above-mentioned polyimide resin contained in the polyimide resin composition of the present invention with the above-mentioned cross-linking agent. That is, the polyimide film of the present invention contains a crosslinked polyimide resin which is a crosslinked product between polyimide resins via a crosslinking agent. Therefore, the polyimide film of the present invention is excellent in heat resistance, colorless transparency and chemical resistance, and has low residual stress. Suitable physical property values of the polyimide film of the present invention are as described above.
 本発明のポリイミドフィルムの製造方法には、ポリイミド樹脂と架橋剤との架橋反応が進行する温度(好ましくは80℃以上、より好ましくは100℃以上、更に好ましくは150℃以上)で架橋する工程を含めば、特に制限はない。例えば、上述のポリイミドワニスを、ガラス板、金属板、プラスチックなどの平滑な支持体上に塗布、又はフィルム状に成形した後、加熱する方法が挙げられる。この加熱処理により、ポリイミドワニス中のポリイミド樹脂と架橋剤との架橋反応を進行させながら、ポリイミドワニス中に含まれる反応溶剤や希釈溶剤等の有機溶媒を除去することができる。前記支持体の表面には、必要に応じて、予め離形剤を塗布しておいてもよい。 In the method for producing a polyimide film of the present invention, a step of cross-linking at a temperature at which the cross-linking reaction between the polyimide resin and the cross-linking agent proceeds (preferably 80 ° C. or higher, more preferably 100 ° C. or higher, still more preferably 150 ° C. or higher) is performed. If included, there are no particular restrictions. For example, a method of applying the above-mentioned polyimide varnish on a smooth support such as a glass plate, a metal plate, or plastic, or forming it into a film and then heating it can be mentioned. By this heat treatment, it is possible to remove organic solvents such as a reaction solvent and a diluting solvent contained in the polyimide varnish while advancing the cross-linking reaction between the polyimide resin in the polyimide varnish and the cross-linking agent. If necessary, a release agent may be applied to the surface of the support in advance.
 加熱処理としては、以下の方法が好ましい。すなわち、まず120℃以下の温度で有機溶媒を蒸発させた後、更に有機溶媒の沸点以上の温度で乾燥してポリイミドフィルムを製造することが好ましい。また、窒素雰囲気下で乾燥することが好ましい。乾燥雰囲気の圧力は、減圧、常圧、加圧のいずれでもよい。2段階の温度で乾燥することでフィルム表面が滑らかで欠陥の無いフィルムを得ることができる。また、2段階目の乾燥温度は、特に限定されないが、200~450℃が好ましく、300~430℃がより好ましく、特に好ましくは350~400℃である。この温度範囲で乾燥することで、フィルムの透明性・黄色度が良好となり、更に良好な耐溶媒性が得られる。 The following method is preferable as the heat treatment. That is, it is preferable that the organic solvent is first evaporated at a temperature of 120 ° C. or lower and then dried at a temperature equal to or higher than the boiling point of the organic solvent to produce a polyimide film. Moreover, it is preferable to dry in a nitrogen atmosphere. The pressure in the dry atmosphere may be reduced pressure, normal pressure, or pressurized. A film having a smooth film surface and no defects can be obtained by drying at two stages of temperature. The drying temperature in the second stage is not particularly limited, but is preferably 200 to 450 ° C, more preferably 300 to 430 ° C, and particularly preferably 350 to 400 ° C. By drying in this temperature range, the transparency and yellowness of the film become good, and further good solvent resistance can be obtained.
 また、本発明のポリイミドフィルムは、ポリアミド酸及び架橋剤が有機溶媒に溶解してなるポリアミド酸ワニスを用いて製造することもできる。
 前記ポリアミド酸ワニスに含まれるポリアミド酸は、本発明におけるポリイミド樹脂の前駆体であって、上述の構成単位(A-1)を与える化合物を含むテトラカルボン酸成分と、上述の構成単位(B-1)を与える化合物及び上述の構成単位(B-2)を与える化合物を含むジアミン成分との重付加反応の生成物である。このポリアミド酸をイミド化(脱水閉環)することで、ポリイミド樹脂が得られる。
 前記ポリアミド酸ワニスに含まれる有機溶媒としては、本発明のポリイミドワニスに含まれる有機溶媒を用いることができる。
 本発明において、ポリアミド酸ワニスは、上述の構成単位(A-1)を与える化合物を含むテトラカルボン酸成分と上述の構成単位(B-1)を与える化合物及び上述の構成単位(B-2)を与える化合物を含むジアミン成分とを反応溶剤中で重付加反応させて得られるポリアミド酸溶液そのものであってもよいし、又は当該ポリアミド酸溶液に対して更に希釈溶剤を追加したものであってもよい。
Further, the polyimide film of the present invention can also be produced by using a polyamic acid varnish in which a polyamic acid and a cross-linking agent are dissolved in an organic solvent.
The polyamic acid contained in the polyamic acid varnish is a precursor of the polyimide resin in the present invention, and contains a tetracarboxylic acid component containing a compound giving the above-mentioned structural unit (A-1) and the above-mentioned structural unit (B-). It is a product of a polyaddition reaction with a diamine component containing a compound giving 1) and a compound giving the above-mentioned structural unit (B-2). A polyimide resin can be obtained by imidizing (dehydrating and ring-closing) this polyamic acid.
As the organic solvent contained in the polyamic acid varnish, the organic solvent contained in the polyimide varnish of the present invention can be used.
In the present invention, the polyamic acid varnish includes a tetracarboxylic acid component containing the compound giving the above-mentioned structural unit (A-1), a compound giving the above-mentioned structural unit (B-1), and the above-mentioned structural unit (B-2). It may be a polyamic acid solution itself obtained by subjecting a diamine component containing a compound to give a compound to a polyaddition reaction in a reaction solvent, or a diamine solvent is further added to the polyamic acid solution. Good.
 ポリアミド酸ワニスを用いてポリイミドフィルムを製造する方法には、ポリイミド樹脂と架橋剤との架橋反応が進行する温度(好ましくは80℃以上、より好ましくは100℃以上、更に好ましくは150℃以上)で架橋する工程を含めば特に制限はなく、公知の方法を用いることができる。例えば、ポリアミド酸ワニスを、ガラス板、金属板、プラスチックなどの平滑な支持体上に塗布、又はフィルム状に成形し、該ワニス中に含まれる反応溶剤や希釈溶剤等の有機溶媒を加熱により除去してポリアミド酸フィルムを得て、該ポリアミド酸フィルム中のポリアミド酸を加熱によりイミド化し、更にポリイミド樹脂と架橋剤とを反応させて架橋することで、ポリイミドフィルムを製造することができる。
 ポリアミド酸ワニスを乾燥させてポリアミド酸フィルムを得る際の加熱温度としては、好ましくは50~120℃である。ポリアミド酸を加熱によりイミド化する際の加熱温度としては好ましくは200~400℃である。
 なお、イミド化の方法は熱イミド化に限定されず、化学イミド化を適用することもできる。
In the method for producing a polyimide film using a polyamic acid varnish, the temperature at which the crosslinking reaction between the polyimide resin and the crosslinking agent proceeds (preferably 80 ° C. or higher, more preferably 100 ° C. or higher, still more preferably 150 ° C. or higher) There is no particular limitation as long as the step of cross-linking is included, and a known method can be used. For example, a polyamic acid varnish is applied onto a smooth support such as a glass plate, a metal plate, or a plastic, or formed into a film, and organic solvents such as a reaction solvent and a diluting solvent contained in the varnish are removed by heating. Then, a polyamic acid film is obtained, the polyamic acid in the polyamic acid film is imidized by heating, and the polyimide resin is further reacted with a cross-linking agent to cross-link the polyimide film, whereby the polyimide film can be produced.
The heating temperature for drying the polyamic acid varnish to obtain a polyamic acid film is preferably 50 to 120 ° C. The heating temperature for imidizing the polyamic acid by heating is preferably 200 to 400 ° C.
The imidization method is not limited to thermal imidization, and chemical imidization can also be applied.
 本発明のポリイミドフィルムの厚みは用途等に応じて適宜選択することができるが、好ましくは1~250μm、より好ましくは5~100μm、更に好ましくは10~80μmの範囲である。厚みが1~250μmであることで、自立膜としての実用的な使用が可能となる。
 ポリイミドフィルムの厚みは、ポリイミドワニスの固形分濃度や粘度を調整することにより、容易に制御することができる。
The thickness of the polyimide film of the present invention can be appropriately selected depending on the intended use and the like, but is preferably in the range of 1 to 250 μm, more preferably 5 to 100 μm, and further preferably 10 to 80 μm. When the thickness is 1 to 250 μm, it can be practically used as a self-supporting film.
The thickness of the polyimide film can be easily controlled by adjusting the solid content concentration and viscosity of the polyimide varnish.
 本発明のポリイミドフィルムは、カラーフィルター、フレキシブルディスプレイ、半導体部品、光学部材等の各種部材用のフィルムとして好適に用いられる。本発明のポリイミドフィルムは、液晶ディスプレイやOLEDディスプレイ等の画像表示装置の基板として、特に好適に用いられる。 The polyimide film of the present invention is suitably used as a film for various members such as color filters, flexible displays, semiconductor parts, and optical members. The polyimide film of the present invention is particularly preferably used as a substrate for an image display device such as a liquid crystal display or an OLED display.
 以下に、実施例により本発明を具体的に説明する。但し、本発明はこれらの実施例により何ら制限されるものではない。
 実施例及び比較例で得たワニスの固形分濃度及びフィルムの各物性は以下に示す方法によって測定した。
Hereinafter, the present invention will be specifically described with reference to Examples. However, the present invention is not limited to these examples.
The solid content concentration of the varnish obtained in Examples and Comparative Examples and the physical characteristics of the film were measured by the methods shown below.
(1)固形分濃度
 ワニスの固形分濃度の測定は、アズワン株式会社製の小型電気炉「MMF-1」で試料を320℃×120minで加熱し、加熱前後の試料の質量差から算出した。
(1) Solid content concentration The solid content concentration of the varnish was measured by heating the sample at 320 ° C. × 120 min in a small electric furnace “MMF-1” manufactured by AS ONE Corporation and calculating from the mass difference of the sample before and after heating.
(2)フィルム厚さ
 フィルム厚さは、株式会社ミツトヨ製のマイクロメーターを用いて測定した。
(2) Film thickness The film thickness was measured using a micrometer manufactured by Mitutoyo Co., Ltd.
(3)全光線透過率、イエローインデックス(YI)
 全光線透過率及びYIは、JIS K7105:1997に準拠し、日本電色工業株式会社製の色彩・濁度同時測定器「COH7700」を用いて測定した。
(3) Total light transmittance, yellow index (YI)
The total light transmittance and YI were measured in accordance with JIS K7105: 1997 using a color / turbidity simultaneous measuring device "COH7700" manufactured by Nippon Denshoku Kogyo Co., Ltd.
(4)ガラス転移温度(Tg)
 株式会社日立ハイテクサイエンス製の熱機械的分析装置「TMA/SS6100」を用いて、引張モードで試料サイズ2mm×20mm、荷重0.1N、昇温速度10℃/minの条件で、残留応力を取り除くのに十分な温度まで昇温して残留応力を取り除き、その後室温まで冷却した。その後、前記残留応力を取り除くための処理と同じ条件で試験片伸びの測定を行い、伸びの変曲点が見られたところをガラス転移温度として求めた。
(4) Glass transition temperature (Tg)
Using the thermomechanical analyzer "TMA / SS6100" manufactured by Hitachi High-Tech Science Co., Ltd., residual stress is removed under the conditions of sample size 2 mm x 20 mm, load 0.1 N, and heating rate 10 ° C / min in tensile mode. The temperature was raised to a sufficient temperature to remove residual stress, and then cooled to room temperature. Then, the elongation of the test piece was measured under the same conditions as the treatment for removing the residual stress, and the place where the inflection point of the elongation was observed was determined as the glass transition temperature.
(5)残留応力
 ケーエルエー・テンコール社製の残留応力測定装置「FLX-2320」を用いて、予め「反り量」を測定しておいた、厚み525μm±25μmの4インチシリコンウェハ上に、ポリイミドワニスあるいはポリアミド酸ワニスを、スピンコーターを用いて塗布し、プリベークした。その後、熱風乾燥器を用いて、窒素雰囲気下、350~400℃30分の加熱硬化処理を施し、硬化後膜厚8~15μmのポリイミドフィルムのついたシリコンウェハを作製した。このウェハの反り量を前述の残留応力測定装置を用いて測定し、シリコンウェハとポリイミドフィルムの間に生じた残留応力を評価した。
(5) Residual stress Polyamide varnish on a 4-inch silicon wafer with a thickness of 525 μm ± 25 μm for which the “warp amount” has been measured in advance using the residual stress measuring device “FLX-2320” manufactured by KLA Tencor. Alternatively, a polyamic acid varnish was applied using a spin coater and prebaked. Then, using a hot air dryer, heat curing treatment was performed at 350 to 400 ° C. for 30 minutes in a nitrogen atmosphere to prepare a silicon wafer with a polyimide film having a film thickness of 8 to 15 μm after curing. The amount of warpage of this wafer was measured using the above-mentioned residual stress measuring device, and the residual stress generated between the silicon wafer and the polyimide film was evaluated.
(6)引張弾性率、引張強度
 引張弾性率及び引張強度は、JIS K7127に準拠し、東洋精機株式会社製の引張試験機「ストログラフVG-1E」を用いて測定した。チャック間距離は50mm、試験片サイズは10mm×50mm、試験速度は20mm/minとした。
(6) Tensile Elastic Modulus and Tensile Strength The tensile elastic modulus and tensile strength were measured using a tensile tester "Strograph VG-1E" manufactured by Toyo Seiki Co., Ltd. in accordance with JIS K7127. The distance between the chucks was 50 mm, the test piece size was 10 mm × 50 mm, and the test speed was 20 mm / min.
(7)耐溶媒性1(PGMEA)
 ガラス板上に製膜したポリイミドフィルムに、室温で溶剤を滴下し、フィルム表面に変化がないかを確認した。なお、溶剤としては、プロピレングリコールモノメチルエーテルアセテート(PGMEA)を使用した。
 耐溶剤性の評価基準は、以下の通りとした。
○:フィルム表面に変化がなかった。
△:フィルム表面にわずかにクラックが入った。
×:フィルム表面にクラックが入った、又はフィルム表面が溶解した。
(7) Solvent resistance 1 (PGMEA)
A solvent was dropped on the polyimide film formed on the glass plate at room temperature, and it was confirmed whether the film surface was changed. As the solvent, propylene glycol monomethyl ether acetate (PGMEA) was used.
The evaluation criteria for solvent resistance were as follows.
◯: There was no change on the film surface.
Δ: Slight cracks were formed on the film surface.
X: The film surface was cracked or the film surface was melted.
(8)耐溶剤性2(NMP)
 ガラス板上に製膜したポリイミドフィルムを剥離し、室温でN-メチル-2-ピロリドン(NMP)中に60分浸漬した。評価基準は以下の通りとした。
〇:フィルムは溶解せずに形状を維持していた。
×:フィルムが溶解し形状を維持できなかった。
(8) Solvent resistance 2 (NMP)
The polyimide film formed on the glass plate was peeled off and immersed in N-methyl-2-pyrrolidone (NMP) at room temperature for 60 minutes. The evaluation criteria are as follows.
〇: The film maintained its shape without melting.
X: The film melted and the shape could not be maintained.
(9)洗浄性
 N-メチル-2-ピロリドンとポリイミドワニスを混合し、室温で均一に混ざるかどうかを確認した。洗浄性の評価基準は、以下の通りとした。
〇:ポリイミドワニスとNMP混合液が均一に混合した。
×:ポリイミドワニスとNMP混合液が均一に混合せず、析出物が生じた。
(9) Detergency N-methyl-2-pyrrolidone and polyimide varnish were mixed, and it was confirmed whether or not they were mixed uniformly at room temperature. The evaluation criteria for detergency were as follows.
〇: Polyimide varnish and NMP mixed solution were uniformly mixed.
X: The polyimide varnish and the NMP mixed solution were not uniformly mixed, and a precipitate was formed.
 実施例及び比較例にて使用したテトラカルボン酸成分及びジアミン成分、並びにその略号は以下の通りである。 The tetracarboxylic acid component and diamine component used in Examples and Comparative Examples, and their abbreviations are as follows.
<テトラカルボン酸成分>
CpODA:ノルボルナン-2-スピロ-α-シクロペンタノン-α’-スピロ-2”-ノルボルナン-5,5”,6,6”-テトラカルボン酸二無水物(JXエネルギー株式会社製;式(a-1)で表される化合物)
s-BPDA:3,3’,4,4’-ビフェニルテトラカルボン酸二無水物(三菱化学株式会社製;式(a-2)で表される化合物)
<Tetracarboxylic acid component>
CpODA: Norbornane-2-spiro-α-cyclopentanone-α'-spiro-2 "-norbornane-5,5", 6,6 "-tetracarboxylic dianhydride (manufactured by JX Energy Co., Ltd .; formula (a) -1) Compound)
s-BPDA: 3,3', 4,4'-biphenyltetracarboxylic dianhydride (manufactured by Mitsubishi Chemical Corporation; compound represented by formula (a-2))
<ジアミン>
TFMB:2,2’-ビス(トリフルオロメチル)ベンジジン(和歌山精化工業株式会社製;式(b-1)で表される化合物)
3,5-DABA:3,5-ジアミノ安息香酸(日本純良薬品株式会社製;式(b-2)で表される化合物)
<Diamine>
TFMB: 2,2'-bis (trifluoromethyl) benzidine (manufactured by Wakayama Seika Kogyo Co., Ltd .; compound represented by formula (b-1))
3,5-DABA: 3,5-diaminobenzoic acid (manufactured by Nippon Pure Chemical Industries, Ltd .; compound represented by formula (b-2))
<架橋剤>
1,3-PBO:1,3-ビス(4,5-ジヒドロ-2-オキサゾリル)ベンゼン(三國製薬工業株式会社製)
<Crosslinking agent>
1,3-PBO: 1,3-bis (4,5-dihydro-2-oxazolyl) benzene (manufactured by Mikuni Pharmaceutical Co., Ltd.)
<その他>
GBL:γ-ブチロラクトン(三菱ケミカル株式会社製)
TEA:トリエチルアミン(関東化学株式会社製)
<Others>
GBL: γ-Butyrolactone (manufactured by Mitsubishi Chemical Corporation)
TEA: Triethylamine (manufactured by Kanto Chemical Co., Inc.)
実施例1
 ステンレス製半月型撹拌翼、窒素導入管、冷却管を取り付けたディーンスターク、温度計、ガラス製エンドキャップを備えた1Lの5つ口丸底フラスコに、TFMBを25.619g(0.080モル)、3,5-DABAを3.043g(0.020モル)とGBLを161.040g投入し、系内温度70℃、窒素雰囲気下、回転数150rpmで撹拌して溶液を得た。
 この溶液に、CpODAを38.438g(0.100モル)とGBLを20.130gとを一括で添加した後、イミド化触媒としてTEAを0.506g、トリエチレンジアミン(東京化成工業株式会社製)0.056g投入し、マントルヒーターで加熱し、約20分かけて反応系内温度を190℃まで上げた。留去される成分を捕集し、回転数を粘度上昇に合わせて調整しつつ、反応系内温度を190℃に保持して2時間還流した。
 その後、固形分濃度が10質量%になるようGBLを添加して、反応系内温度を120℃まで冷却した後、更に約1時間撹拌して均一化した。続いて、得られたワニス100gに1,3-PBOを0.167g(3,5-DABA 1モル%に対して0.25モル%)投入し30分間撹拌して均一化しポリイミドワニスを得た。
 続いてガラス板上、シリコンウェハへ、得られたポリイミドワニスをスピンコートにより塗布し、ホットプレートで80℃、20分間保持し、その後、窒素雰囲気下、熱風乾燥機中400℃で30分加熱し溶媒を蒸発させ、厚み10μmのフィルムを得た。
Example 1
25.619 g (0.080 mol) of TFMB in a 1 L 5-necked round-bottom flask equipped with a stainless steel half-moon agitator, a nitrogen inlet tube, a Dean Stark with a cooling tube, a thermometer, and a glass end cap. , 3.043 g (0.020 mol) of 3,5-DABA and 161.040 g of GBL were added, and the mixture was stirred at a system temperature of 70 ° C. and a nitrogen atmosphere at a rotation speed of 150 rpm to obtain a solution.
After adding 38.438 g (0.100 mol) of CpODA and 20.130 g of GBL in a batch to this solution, 0.506 g of TEA and triethylenediamine (manufactured by Tokyo Chemical Industry Co., Ltd.) 0 as an imidization catalyst. .056 g was added and heated with a mantle heater, and the temperature inside the reaction system was raised to 190 ° C. over about 20 minutes. The components to be distilled off were collected, and the temperature inside the reaction system was maintained at 190 ° C. and refluxed for 2 hours while adjusting the rotation speed according to the increase in viscosity.
Then, GBL was added so that the solid content concentration became 10% by mass, the temperature in the reaction system was cooled to 120 ° C., and then the mixture was further stirred for about 1 hour to homogenize. Subsequently, 0.167 g (0.25 mol% with respect to 1 mol% of 3,5-DABA) of 1,3-PBO was added to 100 g of the obtained varnish and stirred for 30 minutes to homogenize to obtain a polyimide varnish. ..
Subsequently, the obtained polyimide varnish was applied to a silicon wafer on a glass plate by spin coating, held on a hot plate at 80 ° C. for 20 minutes, and then heated in a hot air dryer at 400 ° C. for 30 minutes in a nitrogen atmosphere. The solvent was evaporated to obtain a film having a thickness of 10 μm.
実施例2
 TFMBの量を27.220g(0.085モル)、3,5-DABAの量を2.282g(0.015モル)に変更した以外は、実施例1と同様の方法によりポリイミドワニスを作製し、固形分濃度10質量%のポリイミドワニスを得た。
 得られたポリイミドワニスを用いて、2段階目の乾燥温度を表1記載の条件に変更した以外は、実施例1と同様の方法によりフィルムを作製し、厚み9μmのフィルムを得た。
Example 2
A polyimide varnish was prepared by the same method as in Example 1 except that the amount of TFMB was changed to 27.220 g (0.085 mol) and the amount of 3,5-DABA was changed to 2.282 g (0.015 mol). , A polyimide varnish having a solid content concentration of 10% by mass was obtained.
Using the obtained polyimide varnish, a film was prepared in the same manner as in Example 1 except that the drying temperature in the second step was changed to the conditions shown in Table 1, and a film having a thickness of 9 μm was obtained.
実施例3
 ステンレス製半月型撹拌翼、窒素導入管、冷却管を取り付けたディーンスターク、温度計、ガラス製エンドキャップを備えた1Lの5つ口丸底フラスコに、TFMBを25.619g(0.080モル)、3,5-DABAを3.043g(0.020モル)とGBLを156.713g投入し、系内温度70℃、窒素雰囲気下、回転数150rpmで撹拌して溶液を得た。
 この溶液に、CpODAを30.750g(0.08モル)とs-BPDA5.884g(0.02モル)とGBLを39.178gとを一括で添加した後、イミド化触媒としてTEAを0.506g、トリエチレンジアミン(東京化成工業株式会社製)0.056g投入し、マントルヒーターで加熱し、約20分かけて反応系内温度を190℃まで上げた。留去される成分を捕集し、回転数を粘度上昇に合わせて調整しつつ、反応系内温度を190℃に保持して2時間還流した。
 その後、固形分濃度が10質量%になるようGBLを添加して、反応系内温度を120℃まで冷却した後、更に約1時間撹拌して均一化した。続いて、1,3-PBOを0.173g(3,5-DABA 1モル%に対して0.25モル%)投入し30分間攪拌して均一化し、固形分濃度10質量%のポリイミドワニスを得た。
 続いてガラス板上、シリコンウェハへ、得られたポリイミドワニスをスピンコートにより塗布し、ホットプレートで80℃、30分間保持し、その後、窒素雰囲気下、熱風乾燥機中350℃で20分加熱し溶媒を蒸発させ、厚み10μmのフィルムを得た。
Example 3
25.619 g (0.080 mol) of TFMB in a 1 L 5-necked round-bottom flask equipped with a stainless steel half-moon agitator, a nitrogen inlet tube, a Dean Stark with a cooling tube, a thermometer, and a glass end cap. , 3,5-DABA (3.043 g (0.020 mol)) and GBL (156.713 g) were added, and the mixture was stirred at a system temperature of 70 ° C. and a nitrogen atmosphere at a rotation speed of 150 rpm to obtain a solution.
To this solution, 30.750 g (0.08 mol) of CpODA, 5.884 g (0.02 mol) of s-BPDA and 39.178 g of GBL were added in a batch, and then 0.506 g of TEA as an imidization catalyst was added. , 0.056 g of triethylenediamine (manufactured by Tokyo Chemical Industry Co., Ltd.) was added and heated with a mantle heater to raise the temperature inside the reaction system to 190 ° C. over about 20 minutes. The components to be distilled off were collected, and the temperature inside the reaction system was maintained at 190 ° C. and refluxed for 2 hours while adjusting the rotation speed according to the increase in viscosity.
Then, GBL was added so that the solid content concentration became 10% by mass, the temperature in the reaction system was cooled to 120 ° C., and then the mixture was further stirred for about 1 hour to homogenize. Subsequently, 0.173 g (0.25 mol% with respect to 1 mol% of 3,5-DABA) of 1,3-PBO was added and stirred for 30 minutes to homogenize, and a polyimide varnish having a solid content concentration of 10% by mass was added. Obtained.
Subsequently, the obtained polyimide varnish was applied to a silicon wafer on a glass plate by spin coating, held on a hot plate at 80 ° C. for 30 minutes, and then heated in a hot air dryer at 350 ° C. for 20 minutes in a nitrogen atmosphere. The solvent was evaporated to obtain a film having a thickness of 10 μm.
実施例4
 TFMBの量を28.822g(0.090モル)、3,5-DABAの量を1.522g(0.010モル)に変更した以外は、実施例3と同様の方法によりポリイミドワニスを作製し、固形分濃度10質量%のポリイミドワニスを得た。
 得られたポリイミドワニスを用いて、実施例3と同様の方法によりフィルムを作製し、厚み10μmのフィルムを得た。
Example 4
A polyimide varnish was prepared by the same method as in Example 3 except that the amount of TFMB was changed to 28.822 g (0.090 mol) and the amount of 3,5-DABA was changed to 1.522 g (0.010 mol). , A polyimide varnish having a solid content concentration of 10% by mass was obtained.
Using the obtained polyimide varnish, a film was prepared in the same manner as in Example 3 to obtain a film having a thickness of 10 μm.
実施例5
 TFMBの量を17.933g(0.070モル)、3,5-DABAの量を3.652g(0.030モル)に変更した以外は、実施例1と同様の方法によりポリイミドワニスを作製し、固形分濃度10質量%のポリイミドワニスを得た。
 得られたポリイミドワニスを用いて、実施例3と同様の方法によりフィルムを作製し、厚み9μmのフィルムを得た。
Example 5
A polyimide varnish was prepared by the same method as in Example 1 except that the amount of TFMB was changed to 17.933 g (0.070 mol) and the amount of 3,5-DABA was changed to 3.652 g (0.030 mol). , A polyimide varnish having a solid content concentration of 10% by mass was obtained.
Using the obtained polyimide varnish, a film was prepared in the same manner as in Example 3 to obtain a film having a thickness of 9 μm.
比較例1
 1,3-PBOを添加しなかった以外は、実施例1と同様の方法によりポリイミドワニスを作製し、固形分濃度10質量%のポリイミドワニスを得た。得られたポリイミドワニスを用いて、実施例1と同様の方法によりフィルムを作製し、厚み10μmのフィルムを得た。
Comparative Example 1
A polyimide varnish was prepared in the same manner as in Example 1 except that 1,3-PBO was not added, to obtain a polyimide varnish having a solid content concentration of 10% by mass. Using the obtained polyimide varnish, a film was prepared in the same manner as in Example 1 to obtain a film having a thickness of 10 μm.
比較例2
 1,3-PBOを添加しなかった以外は、実施例2と同様の方法によりポリイミドワニスを作製し、固形分濃度10質量%のポリイミドワニスを得た。得られたポリイミドワニスを用いて、実施例1と同様の方法によりフィルムを作製し、厚み10μmのフィルムを得た。
Comparative Example 2
A polyimide varnish was prepared in the same manner as in Example 2 except that 1,3-PBO was not added, to obtain a polyimide varnish having a solid content concentration of 10% by mass. Using the obtained polyimide varnish, a film was prepared in the same manner as in Example 1 to obtain a film having a thickness of 10 μm.
比較例3
 1,3-PBOを添加しなかった以外は、実施例3と同様の方法によりポリイミドワニスを作製し、固形分濃度10質量%のポリイミドワニスを得た。得られたポリイミドワニスを用いて、実施例1と同様の方法によりフィルムを作製し、厚み10μmのフィルムを得た。
Comparative Example 3
A polyimide varnish was prepared in the same manner as in Example 3 except that 1,3-PBO was not added, to obtain a polyimide varnish having a solid content concentration of 10% by mass. Using the obtained polyimide varnish, a film was prepared in the same manner as in Example 1 to obtain a film having a thickness of 10 μm.
 得られたフィルムについて上記の評価を行った。結果を表1に示す。 The above evaluation was performed on the obtained film. The results are shown in Table 1.
Figure JPOXMLDOC01-appb-T000021
Figure JPOXMLDOC01-appb-T000021
 表1に示すように、実施例1~5のポリイミドフィルムは、耐熱性及び無色透明性に優れ、残留応力が低く、耐薬品性に優れ、洗浄性も良好なものであった。一方、比較例のポリイミドフィルムは耐溶媒性に劣るものであった。 As shown in Table 1, the polyimide films of Examples 1 to 5 were excellent in heat resistance and colorless transparency, low residual stress, excellent chemical resistance, and good detergency. On the other hand, the polyimide film of the comparative example was inferior in solvent resistance.

Claims (11)

  1.  ポリイミド樹脂と、少なくとも2つのオキサゾリル基を有する架橋剤とを含むポリイミド樹脂組成物であって、
     前記ポリイミド樹脂が、テトラカルボン酸二無水物に由来する構成単位A及びジアミンに由来する構成単位Bを有するポリイミド樹脂であり、構成単位Aが下記式(a-1)で表される化合物に由来する構成単位(A-1)を含み、構成単位Bが下記式(b-1)で表される化合物に由来する構成単位(B-1)と、下記式(b-2)で表される化合物に由来する構成単位(B-2)とを含む、ポリイミド樹脂組成物。
    Figure JPOXMLDOC01-appb-C000001

    (式(b-2)中、Xは単結合、置換若しくは無置換のアルキレン基、カルボニル基、エーテル基、下記式(b-2-i)で表される基、又は下記式(b-2-ii)で表される基であり、pは0~2の整数であり、m1は0~4の整数であり、m2は0~4の整数である。ただし、pが0の場合、m1は1~4の整数である。)
    Figure JPOXMLDOC01-appb-C000002

    (式(b-2-i)中、m3は0~5の整数であり;式(b-2-ii)中、m4は0~5の整数である。なお、m1+m2+m3+m4は1以上であり、pが2の場合、2つのX及び2つのm2~m4のそれぞれは独立して選択される。)
    A polyimide resin composition containing a polyimide resin and a cross-linking agent having at least two oxazolyl groups.
    The polyimide resin is a polyimide resin having a structural unit A derived from tetracarboxylic acid dianhydride and a structural unit B derived from diamine, and the structural unit A is derived from a compound represented by the following formula (a-1). The structural unit B is represented by the following formula (b-2) and the structural unit (B-1) derived from the compound represented by the following formula (b-1). A polyimide resin composition containing a structural unit (B-2) derived from a compound.
    Figure JPOXMLDOC01-appb-C000001

    (In the formula (b-2), X is a single-bonded, substituted or unsubstituted alkylene group, a carbonyl group, an ether group, a group represented by the following formula (b-2-i), or the following formula (b-2). -Ii), p is an integer of 0 to 2, m1 is an integer of 0 to 4, m2 is an integer of 0 to 4. However, when p is 0, m1 Is an integer from 1 to 4.)
    Figure JPOXMLDOC01-appb-C000002

    (In the formula (b-2-i), m3 is an integer of 0 to 5; in the formula (b-2-ii), m4 is an integer of 0 to 5. Note that m1 + m2 + m3 + m4 is 1 or more. When p is 2, each of the two Xs and the two m2 to m4 are independently selected.)
  2.  構成単位(B-2)が、下記式(b-21)で表される化合物に由来する構成単位(B-21)である、請求項1に記載のポリイミド樹脂組成物。
    Figure JPOXMLDOC01-appb-C000003
    The polyimide resin composition according to claim 1, wherein the structural unit (B-2) is a structural unit (B-21) derived from a compound represented by the following formula (b-21).
    Figure JPOXMLDOC01-appb-C000003
  3.  構成単位A中における構成単位(A-1)の比率が40モル%以上である、請求項1又は2に記載のポリイミド樹脂組成物。 The polyimide resin composition according to claim 1 or 2, wherein the ratio of the structural unit (A-1) in the structural unit A is 40 mol% or more.
  4.  構成単位B中における構成単位(B-1)の比率が35~95モル%であり、
     構成単位B中における構成単位(B-2)の比率が5~65モル%である、請求項1~3のいずれか1つに記載のポリイミド樹脂組成物。
    The ratio of the structural unit (B-1) in the structural unit B is 35 to 95 mol%.
    The polyimide resin composition according to any one of claims 1 to 3, wherein the ratio of the structural unit (B-2) in the structural unit B is 5 to 65 mol%.
  5.  構成単位Aが、下記式(a-2)で表される化合物に由来する構成単位(A-2)を更に含む、請求項1~4のいずれか1つに記載のポリイミド樹脂組成物。
    Figure JPOXMLDOC01-appb-C000004
    The polyimide resin composition according to any one of claims 1 to 4, wherein the structural unit A further contains a structural unit (A-2) derived from a compound represented by the following formula (a-2).
    Figure JPOXMLDOC01-appb-C000004
  6.  構成単位Aが、両末端酸無水物変性シリコーンに由来する構成単位(A-3)を更に含む、請求項1~5のいずれか1つに記載のポリイミド樹脂組成物。 The polyimide resin composition according to any one of claims 1 to 5, wherein the structural unit A further contains a structural unit (A-3) derived from both terminal acid anhydride-modified silicones.
  7.  前記架橋剤が、少なくとも2つのオキサゾリル基が結合した芳香環又は芳香族複素環を含む化合物である、請求項1~6のいずれか1つに記載のポリイミド樹脂組成物。 The polyimide resin composition according to any one of claims 1 to 6, wherein the cross-linking agent is a compound containing an aromatic ring or an aromatic heterocycle having at least two oxazolyl groups bonded thereto.
  8.  前記架橋剤が、少なくとも2つのオキサゾリル基が結合したベンゼン環を含む化合物である、請求項1~7のいずれか1つに記載のポリイミド樹脂組成物。 The polyimide resin composition according to any one of claims 1 to 7, wherein the cross-linking agent is a compound containing a benzene ring having at least two oxazolyl groups bonded thereto.
  9.  前記架橋剤が、1,3-ビス(4,5-ジヒドロ-2-オキサゾリル)ベンゼンである、請求項1~8のいずれか1つに記載のポリイミド樹脂組成物。 The polyimide resin composition according to any one of claims 1 to 8, wherein the cross-linking agent is 1,3-bis (4,5-dihydro-2-oxazolyl) benzene.
  10.  請求項1~9のいずれか1つに記載のポリイミド樹脂組成物が有機溶媒に溶解してなるポリイミドワニス。 A polyimide varnish in which the polyimide resin composition according to any one of claims 1 to 9 is dissolved in an organic solvent.
  11.  請求項1~9のいずれか1つに記載のポリイミド樹脂組成物中の前記ポリイミド樹脂が前記架橋剤により架橋されてなる、ポリイミドフィルム。

     
    A polyimide film obtained by cross-linking the polyimide resin in the polyimide resin composition according to any one of claims 1 to 9 with the cross-linking agent.

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