WO2021031649A1 - 一种电喷射打印曲面压电陶瓷的方法 - Google Patents

一种电喷射打印曲面压电陶瓷的方法 Download PDF

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Publication number
WO2021031649A1
WO2021031649A1 PCT/CN2020/092926 CN2020092926W WO2021031649A1 WO 2021031649 A1 WO2021031649 A1 WO 2021031649A1 CN 2020092926 W CN2020092926 W CN 2020092926W WO 2021031649 A1 WO2021031649 A1 WO 2021031649A1
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Prior art keywords
curved
printing
piezoelectric ceramic
dimensional
rotating
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PCT/CN2020/092926
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English (en)
French (fr)
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王大志
赵奎鹏
梁军生
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大连理工大学
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Priority to US17/047,363 priority Critical patent/US10960670B1/en
Publication of WO2021031649A1 publication Critical patent/WO2021031649A1/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/001—Rapid manufacturing of 3D objects by additive depositing, agglomerating or laminating of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00—Data acquisition or data processing for additive manufacturing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Definitions

  • the invention belongs to the field of advanced manufacturing technology, and relates to a method for electro-jet printing curved piezoelectric ceramics.
  • piezoelectric sensing and driving sensitive components are generally planar structures.
  • piezoelectric ceramic blocks are usually processed into thin sheets, which are mounted on a curved substrate by splicing, pasting, etc. This method has problems such as low accuracy and difficulty in pasting, which limits the sensitivity and reliability of complex surface sensing and driving.
  • this method also has problems such as creep of the adhesive glue between the piezoelectric ceramic and the substrate, and weak bonding strength, which seriously affects the performance of the device.
  • the present invention invented a method for manufacturing curved piezoelectric ceramics by electro-jet printing.
  • piezoelectric ceramic slurry using the effect of "electrohydrodynamics", the slurry forms a micro-nano-level fine jet under the action of electric field force, combined with the coordinated control method of the curved substrate six-axis linkage system and the fine jet on-demand printing system, Direct printing and manufacturing of micro-nano-scale curved piezoelectric ceramic patterns.
  • the method eliminates the traditional splicing, transfer, and pasting processes of the traditional curved piezoelectric ceramics, simplifies the technological process, improves the shape and position accuracy and bonding strength of the piezoelectric ceramics, and improves the electrical and mechanical properties of the piezoelectric device.
  • This method solves the manufacturing problems of curved piezoelectric ceramics, and realizes the high-precision and high-performance manufacturing of curved piezoelectric ceramics.
  • a method for electro-jet printing of curved piezoelectric ceramics A curved piezoelectric ceramic electro-fluid jet printing and molding device including an electro-jet piezoelectric ceramic module and a curved substrate six-axis linkage module is used to realize the printing of curved piezoelectric ceramics;
  • the piezoelectric ceramic spray module provides stable pressure for the piezoelectric ceramic slurry to ensure that the piezoelectric ceramic slurry flows out from the nozzle at a fixed flow rate.
  • the specific composition of the curved piezoelectric ceramic electro-jet printing and molding device is as follows:
  • the electrospray piezoelectric ceramic module includes a PC industrial control computer 1, a CCD observation camera 2, a micro syringe pump 4, a precision syringe 5, a hose 6, a spray needle 7 and a high-voltage power supply 8.
  • the precision syringe 5 is fixed on the micro
  • the injection pump 4 is connected to the injection needle 7 through the hose 6, and the injection needle 7 is fixed on the Z-axis slider of the three-dimensional moving device 10, which is located above the three-dimensional rotating device 9;
  • the high-voltage power supply 8 has its positive output The end is connected to the spray needle 7, and the negative output end is connected to the replaceable clamp 19 in the three-dimensional rotating device 9;
  • the ceramic slurry is used as the raw material ink and stored in the precision syringe 5; after the micro syringe pump 4 is powered, Control the precision syringe 5 to eject the raw ink from the nozzle 7 through the hose 6 at a stable flow rate to realize electro-jet printing;
  • the CCD observation camera 2, the micro syringe pump 4 and the high-voltage power supply 8 are all connected with PC industrial control
  • the machine 1 is connected, the CCD is used to observe the camera 2 to observe the stability of the jet during the printing process, and
  • the six-axis linkage module of the curved base includes a PC industrial computer 1, a positioning camera 3, a three-dimensional rotating device 9 and a three-dimensional moving device 10.
  • the three-dimensional rotating device 9 includes a conductive slip ring 11, a circumferential rotating frame 12, and a Y-direction Rotating stepper motor 13, Y-direction rotating frame 14, X-direction rotating frame 16, leveling weight 17, replaceable fixture 19, X-direction rotating stepper motor 20, circumferential rotating motor 22, X-direction rotation limit sensor 18 , Y-direction rotation limit sensor 15 and Z-direction rotation limit sensor 21;
  • the Y-direction rotating frame 14 and the X-direction rotating frame 16 are frame structures, and they are respectively rotated by the Y-direction stepping motor 13 and the X-direction
  • the stepping motor 20 controls and provides the Y-direction and X-direction rotating torque; the replaceable clamp 19 is fixedly installed on the X-direction rotating frame 16, the X-direction rotating frame 16
  • the weight of the X-direction rotating stepping motor 20 is balanced by the leveling weight 17; the X-direction rotation limit The sensor 18, the Y-direction rotation limit sensor 15 and the Z-direction rotation limit sensor 21 are respectively installed on the X-direction rotating frame 16, the Y-direction rotating frame 14 and the circumferential rotating frame 12, and are connected with the PC industrial computer 1, as The rotational movement of the module provides the reference origin and limit point, and feedbacks the limit and zero return through the PC industrial computer 1; the conductive slip ring 11 is installed under the circumferential rotating frame 12 to solve the rotation of the circumferential rotating motor 22 Lead to winding problems in the control lines of the Y-direction rotating stepper motor 13 and the X-direction rotating stepper motor 20, the X-direction rotation limit sensor 18, the Y-direction rotation limit sensor 15 and the Z-direction rotation limit sensor 21; The curved base 23 is fixed on the replaceable fixture 19 and fastened by the set screw 26; the three-dimensional rotating device 9 is installed on the X/Y
  • the high-voltage power supply 8 applies a voltage between the spray needle 7 and the replaceable fixture 19 to form a stable electric field; the ceramic slurry is driven by the micro syringe pump 4 and flows from the precision syringe 5 through the hose 6 To the exit of spray needle 7, under the action of electric field and gravitational field, a stable fine jet is formed at the exit of spray needle 7, which can be printed on the curved substrate 23 in the subsequent process; monitor the CCD observation camera 2 field of view in the PC industrial computer 1 screen Printing situation of internal jet;
  • the PC industrial computer 1 performs positioning by observing the positioning camera 3 and controlling the movement of the three-dimensional mobile device 10, and drives the three-dimensional rotating device 9 to move to the predetermined printing point to realize the initial position setting, and feedback through the PC industrial computer 1 and three limit sensors Adjust the initial posture of the three-dimensional rotating device 9; in the process of generating fine jets from the electro-jet piezoelectric ceramic module, set the curved surface movement trajectory of the curved substrate six-axis linkage module through the PC industrial computer 1, and control the work of the stepping motor to make the curved surface
  • the substrate 23 rotates according to a predetermined curved surface movement trajectory, and controls the injection of the micro-injection pump 4 to realize electro-jet printing and molding of curved piezoelectric ceramics; the curved surface movement trajectory ensures the distance between the nozzle of the spray needle 7 and the printing point on the curved substrate 23 Keep the same, and ensure that the spray needle 7 is always perpendicular to the cutting surface of the curved surface at the printing point; after the first layer is printed, lock
  • the output voltage range of the high-voltage power supply 8 is 500V-6000V.
  • the X-direction rotation limit sensor 18, the Y-direction rotation limit sensor 15 and the Z-direction rotation limit sensor 21 are Hall sensors, but are not limited to such sensors.
  • the rotation speeds of the Y-direction rotating stepper motor 13, the X-direction rotating stepper motor 20, and the circumferential direction rotating motor 22 are 0-2000 r/min.
  • the curved substrate 23 can be a hemispherical surface, a semi-cylindrical surface, a conical surface and other curved surfaces of different sizes.
  • the replaceable clamp 19 can be replaced with different clamps according to the shape and size of the curved base 23 to meet different requirements.
  • the thickness of the curved piezoelectric ceramic is 1-200 ⁇ m.
  • the beneficial effects of the present invention are: the method of the present invention realizes the printing and molding of the piezoelectric ceramics with complex curved surfaces.
  • the invention avoids the problems of low precision of the traditional manufacturing process, high difficulty in pasting, as well as the creep of the adhesive between the piezoelectric ceramic and the matrix, and weak bonding strength, and improves the sensitivity and reliability of the complex curved surface sensing and driving device. And it has the advantages of wide application range, simple operation and low cost.
  • Figure 1 is a three-dimensional schematic diagram of a curved piezoelectric ceramic electrofluidic jet printing molding device used in the present invention
  • Figure 2 is a three-dimensional schematic diagram of a three-dimensional rotating device
  • Figure 3 is a schematic diagram of electrojet printing piezoelectric ceramics.
  • the electrojet printing equipment used in the embodiments mainly includes an electrojet piezoelectric ceramic module and a six-axis linkage module with a curved substrate.
  • the precision syringe 5 is installed on the micro syringe pump 4 and contains "ZnO slurry" inside.
  • the spray needle 7 is connected to the precision syringe 5 through a hose 6.
  • the spray needle 7 is fixed on the Z-axis slider of the three-dimensional moving device 10 and can move in the vertical direction.
  • the high-voltage power supply 8 outputs a voltage of 1200V, the positive output terminal is connected to the spray needle 7, and the negative electrode is connected to the replaceable clamp 19 in the three-dimensional rotating device 9.
  • the positioning camera 3 is fixed on the Z-axis slider of the three-dimensional moving device 10, and is kept relatively still with the spray needle 7 to achieve precise repeated positioning.
  • the curved substrate 23 to be printed (a spherical substrate in this embodiment) is placed and fixed in the replaceable jig 19.
  • the X/Y-axis translation stage of the three-dimensional moving device 10 can drive the three-dimensional rotating device 9 to perform translational movement as a whole, so that Move to the position where the extension line of the spray needle 7 passes through the center of the sphere.
  • the three-dimensional rotating device 9 can realize spherical motion around the center of the base sphere; the PC industrial computer 1 controls the linkage rotation of the three-dimensional rotating device 9 to realize the spiral movement of the spray needle 7 relative to the spherical surface of the curved base 23 to achieve the spherical trajectory No cross-jet printing to ensure the uniformity of the prepared ceramic thick film.
  • the PC industrial computer 1 and the CCD observation camera 2 are connected through a USB data cable to monitor the stability of the Taylor cone in the printing area and the trajectory movement in the sphere in real time.
  • the positive and negative output ends of the high-voltage power supply 8 are respectively connected to the spray needle 7 and the replaceable fixture 19.
  • the high-voltage power supply 8 applies a voltage of 1200V, and selects the ZnO suspension as the "ceramic slurry".
  • the ZnO suspension is slow in the micro syringe pump 4 Under the push, flow from the precision syringe 5 through the hose 6 to the outlet of the spray needle 7 at a flow rate of 0.5 ⁇ L/min, and a stable Taylor cone 24 is formed at the mouth of the spray needle 7 under the action of electric field and gravity field, and the spray deposits on the curved surface.
  • a deposition layer is formed on the substrate 23.
  • the curved substrate 23 is placed in the adjustable jig 19 and fixed by a set screw 26.
  • the Z axis of the three-dimensional moving device 10 adjusts the height between the spray needle 7 and the substrate to be about 600 ⁇ m, and the thickness of each deposition layer is about 1 ⁇ m.
  • the printing situation of the cone jet in the field of view of the CCD camera 2 can be monitored on the screen of the industrial computer 1.
  • step 1) Before printing, first move the needle 7 to a proper height through step 1), set the initial point and print point of the needle 7 by positioning the camera 3, and ensure that the needle 7 at the printing point passes the center of the printing sphere, and then the PC
  • the industrial computer 1 drives the three-dimensional rotating device 9 to be positioned to the predetermined printing point through the positioning camera 3 and the three-dimensional moving device 10, and locks the X, Y and Z axis translation, through the PC industrial computer 1 and three limit sensors (X-direction rotation limit sensor 18.
  • Y-direction rotation limit sensor 15 and Z-direction rotation limit sensor 21 feedback and adjust the initial posture of the three-dimensional rotating device 9, and then the PC industrial computer 1 controls the stepping motor of the three-dimensional rotating device 9 (Y-direction rotation) according to the established program
  • the stepping motor 13 and the X-direction rotating stepping motor 20) are linked to make the curved substrate 23 make a spherical rotation around its own sphere center, and the printed trajectory line 25 formed is a spherical spiral line, and the PC industrial computer 1 controls the motor to start at the same time Control the micro-injection pump 4 and the high-voltage power supply 8 to work, and immediately shut down after printing; during the printing process, the circumferential rotating motor 22 drives the circumferential rotating frame 12 to rotate in real time to ensure the uniformity of the printed surface; after the printing is completed, lock the three-dimensional rotating device 9 And unlock the three-dimensional moving device 10, and remove the curved base 23 for heating treatment. Repeat the above steps for the second layer printing, repeat the above steps until the
  • the present invention proposes a method for electrojet printing of curved piezoelectric ceramics, using "ceramic slurry" under the combined action of electric field force, gravity, surface tension, viscous force, etc., to eject micro-nano-level fine jets, and use
  • the coordinated control of the three-dimensional moving device 10, the three-dimensional rotating device 9, the micro-injection pump 4 and the high-voltage power supply 8 realizes the on-demand printing and manufacturing of complex curved ceramics such as hemispherical surface and semi-cylindrical surface, ensuring the stability of the printing jet and the printing surface The uniform consistency.
  • the invention avoids the pasting and splicing process in the traditional piezoelectric ceramic complex curved surface manufacturing process, eliminates the signal delay and distortion caused by the traditional device superimposing and fitting the spatial signal, and improves the complex curved surface sensing and driving micro-device The sensitivity and reliability.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Coating Apparatus (AREA)
  • Ink Jet Recording Methods And Recording Media Thereof (AREA)

Abstract

本发明属于先进制造技术领域，提供一种电喷射打印曲面压电陶瓷的方法，首先为压电陶瓷浆料提供稳定的压力，以保证浆料按固定流量从喷口流出，同时在喷口处对压电陶瓷浆料施加电场，使之形成稳定的精细射流；然后将曲面基底固定在曲面基底六轴联动模块的夹具上，保证曲面基底在打印过程中始终与喷针射流保持垂直且距离喷口不变；通过协同控制曲面基底六轴联动模块和电场、流场的变化实现精细射流按需打印，并最终实现曲面压电陶瓷的电喷射打印成型。本发明实现复杂曲面陶瓷的按需打印制造，保证打印射流的稳定性和打印曲面的均匀一致性，避免传统制造工艺精度低、粘贴难度大等问题以及压电陶瓷和基体的粘接胶蠕变、结合强度弱等问题。

Description

一种电喷射打印曲面压电陶瓷的方法 技术领域
本发明属于先进制造技术领域，涉及一种电喷射打印曲面压电陶瓷的方法。
 背景技术
近年来，智能装备不断向微型化、集成化、智能化方向发展，这一现状对机电系统也提出了更高的要求，需要实现空间全方位信息采集和曲面驱动变形等功能。在传感和驱动领域，压电陶瓷作为敏感传感和驱动元件，因具有响应快、结构简单、灵敏度高等优势，被广泛应用。
目前，航空航天领域的变形翼飞行器，需要在弯曲翼面上集成数百个压电微驱动器以实现协同变形。航海工程领域的潜航器，需要捕捉空间多方向信号以实现航行器准确的导航控制；海洋预警声纳系统的水听器，需要感知水域中不同方向的信息以实现对各方位不明物体的准确识别。然而，压电传感和驱动敏感元件一般为平面结构，当对于空间曲面结构进行传感和驱动时，通常将压电陶瓷块材加工成薄片，以拼接、粘贴等方式安装到曲面基底上，这种方式存在精度低、粘贴难度大等问题，限制了复杂曲面传感和驱动的灵敏性和可靠性。此外，该方式还存在压电陶瓷和基体的粘接胶蠕变、结合强度弱等问题，严重影响了器件性能。
 技术问题
本发明为了解决现有技术的难题，发明了一种电喷射打印制造曲面压电陶瓷的方法。采用压电陶瓷浆料，利用“电流体动力学”效应，浆料在电场力作用下形成微纳米级精细射流，结合曲面基底六轴联动系统和精细射流按需打印系统的协同控制的方法，直接打印制造微纳米级曲面压电陶瓷图案。该方法免除了传统曲面压电陶瓷的拼接、转移、粘贴等工艺，简化了工艺流程，将提高压电陶瓷形位精度和结合强度，并提高压电器件的电学、力学等性能。该方法解决了曲面压电陶瓷的制造难题，实现了曲面压电陶瓷的高精度和高性能制造。
 技术解决方案
为了达到上述目的，本发明采用的技术方案是：
一种电喷射打印曲面压电陶瓷的方法，采用包括电喷射压电陶瓷模块和曲面基底六轴联动模块两部分的曲面压电陶瓷电流体喷射打印成型装置实现曲面压电陶瓷的打印；首先电喷射压电陶瓷模块为压电陶瓷浆料提供稳定的压力，以保证压电陶瓷浆料按固定流量从喷口流出，同时在喷口处对压电陶瓷浆料施加电场，形成精细射流；然后将曲面基底23固定在曲面基底六轴联动模块的可换夹具19上，保证曲面基底23在打印过程中始终与精细射流保持垂直且距离喷口不变；通过协同控制曲面基底六轴联动模块和电场、流场的变化实现精细射流按需打印，并最终实现复杂曲面结构压电陶瓷的电喷射打印成型。
所述的曲面压电陶瓷电喷射打印成型装置具体组成如下：
所述的电喷射压电陶瓷模块包括PC工控机1、CCD观察相机2、微量注射泵4、精密注射器5、软管6、喷针7和高压电源8；所述的精密注射器5固定在微量注射泵4上，通过软管6和喷针7相连，且喷针7固定在三维移动装置10的Z轴滑块上，位于三维旋转装置9的上方；所述的高压电源8，其正极输出端与喷针7相连接，其负极输出端与三维旋转装置9中的可换夹具19相连接；陶瓷浆料作为原材料墨汁，储存在精密注射器5中；所述的微量注射泵4供电后，控制精密注射器5以稳定的流量将原材料墨汁经过软管6后从喷针7口喷出，实现电喷射打印；所述的CCD观察相机2、微量注射泵4和高压电源8，均与PC工控机1连接，通过CCD观察相机2观察打印过程中射流的稳定性，通过PC工控机1控制微量注射泵4的注射以及高压电源8通电情况。
所述的曲面基底六轴联动模块包括PC工控机1、定位相机3、三维旋转装置9和三维移动装置10；所述的三维旋转装置9包括导电滑环11、周向旋转架12、Y向旋转步进电机13、Y向旋转架14、X向旋转架16、调平配重17、可换夹具19、X向旋转步进电机20、周向旋转电机22、X向旋转限位传感器18、Y向旋转限位传感器15和Z向旋转限位传感器21；所述的Y向旋转架14和X向旋转架16为框架结构，二者分别由Y向旋转步进电机13和X向旋转步进电机20控制并提供Y向和X向的旋转力矩；可换夹具19固定安装在X向旋转架16上，X向旋转架16通过安装轴安装在Y向旋转架14，X向旋转架16绕轴旋转；所述的Y向旋转架14通过安装轴安装在周向旋转架12上，Y向旋转架14绕轴旋转；所述的周向旋转架12通过周向旋转电机22提供周向的旋转力矩并保证打印的均匀性，使周向旋转架12绕底座周向旋转；从而通过电机和旋转架的配合带动可换夹具19做曲面运动；所述的X向旋转步进电机20和调平配重17均安装在Y向旋转架14上，且二者的安装位置相对称，通过调平配重17平衡X向旋转步进电机20的重量；所述的X向旋转限位传感器18、Y向旋转限位传感器15和Z向旋转限位传感器21分别安装在X向旋转架16、Y向旋转架14和周向旋转架12上，并与PC工控机1相连接，为模块的旋转运动提供基准原点和限位点，并通过PC工控机1反馈限位和回零；所述的导电滑环11安装在周向旋转架12的下方，解决周向旋转电机22的旋转导致Y向旋转步进电机13和X向旋转步进电机20以及X向旋转限位传感器18、Y向旋转限位传感器15和Z向旋转限位传感器21的控制线发生绕线问题；所述的曲面基底23固定在可换夹具19上，并通过紧定螺钉26进行紧固；所述的三维旋转装置9安装在三维移动装置10的X/Y二维移动平台上，三维移动装置10实现三维旋转装置9的X和Y轴平移运动，通过调节三维移动装置10的Z轴滑块的位置以调整喷针7与曲面基底23之间的距离；三维旋转装置9和三维移动装置10均与PC工控机1相连接，PC工控机1协同控制三维旋转装置9和三维移动装置10实现六轴联动运动，实现曲面基底23的X、Y轴旋转运动以及周向旋转运动，从而实现复杂压电陶瓷曲面轨迹的运动；所述的定位相机3固定在三维移动装置10的Z轴滑块上，位于三维旋转装置9的上方，且与PC工控机1连接，通过定位相机3和三维移动装置10的共同配合实现曲面基底23轨迹的精确重复定位。
电喷射打印复杂曲面压电陶瓷结构的具体步骤如下：
1）电喷射压电陶瓷浆料
调节喷针7的高度，高压电源8在喷针7与可换夹具19之间施加电压，形成稳定电场；陶瓷浆料在微量注射泵4的推动下，从精密注射器5中通过软管6流至喷针7出口，在电场、重力场作用下，在喷针7口处形成稳定的精细射流，后续过程中可打印在曲面基底23上；在PC工控机1屏幕中监测CCD观察相机2视野内射流的打印情况；
2）曲面压电陶瓷的电喷射打印成型
PC工控机1通过定位相机3的观察并控制三维移动装置10运动进行定位，带动三维旋转装置9移动至预定打印点，实现初始位置设定，并通过PC工控机1和三个限位传感器反馈调整三维旋转装置9起始姿态；在电喷射压电陶瓷模块产生精细射流的过程中，通过PC工控机1设定曲面基底六轴联动模块的曲面运动轨迹，控制步进电机的工作，使曲面基底23按照预定的曲面运动轨迹进行旋转运动，并控制微量注射泵4的注射，实现曲面压电陶瓷的电喷射打印成型；曲面运动轨迹保证喷针7的喷口与曲面基底23上打印点的距离保持不变，且保证喷针7始终垂直于曲面在打印点处的切面；第一层打印完成后，锁定三维旋转装置9并解除三维移动装置10的锁定，移出曲面基底23进行加热处理；重复上述步骤进行下一层打印，直至满足规定的打印厚度，然后烧结成型得到所需的曲面压电陶瓷结构。
所述的高压电源8输出的电压范围为500V-6000V。
所述的X向旋转限位传感器18、Y向旋转限位传感器15和Z向旋转限位传感器21为霍尔传感器，但不限于此类传感器。
所述的Y向旋转步进电机13、X向旋转步进电机20和周向旋转电机22的转速为0-2000r/min。
所述的曲面基底23可为不同尺寸的半球面、半柱面、锥面等曲面结构。
所述的可换夹具19可根据曲面基底23的形状和尺寸更换为不同夹具，以实现不同需求。
所述的曲面压电陶瓷厚度为1-200μm。
 有益效果
本发明的有益效果为：本发明的方法，实现了复杂曲面压电陶瓷打印成型。本发明避免了传统制造工艺精度低、粘贴难度大等问题以及压电陶瓷和基体的粘接胶蠕变、结合强度弱等问题，提高了复杂曲面传感和驱动器件的灵敏性和可靠性，并具有适用范围广、操作简单、成本低的优势。
 附图说明
图1为本发明所采用的曲面压电陶瓷电流体喷射打印成型装置的三维示意图；
图2为三维旋转装置的三维示意图；
图3为电喷射打印压电陶瓷示意图。
图中：1PC工控机；2CCD观察相机；3定位相机；4微量注射泵；5精密注射器；6软管；7喷针；8高压电源；9三维旋转装置；10三维移动装置；11导电滑环；12周向旋转架；13Y向旋转步进电机；14Y向旋转架；15 Y向旋转限位传感器；16X向旋转架；17调平配重；18 X向旋转限位传感器；19可换夹具；20X向旋转步进电机；21 Z向旋转限位传感器；22周向旋转电机；23曲面基底；24泰勒锥；25打印轨迹线；26紧定螺钉。
 本发明的实施方式
以下结合技术方案和附图对本发明进一步说明，实施例中采用的电喷印设备主要包括电喷射压电陶瓷模块和曲面基底六轴联动模块两部分。
所述的精密注射器5安装在微量注射泵4上，内部装有“ZnO浆料”。喷针7通过软管6与精密注射器5相连接，喷针7固定在三维移动装置10的Z轴滑块上，能够在竖直方向移动。所述高压电源8输出电压1200V，正极输出端与喷针7相连，负极与三维旋转装置9中的可换夹具19相连接。所述的定位相机3固定在三维移动装置10的Z轴滑块上，和喷针7保持相对静止以实现精确重复定位。待打印的曲面基底23（本实施例采用球面的基底）放置并固定在可换夹具19内，三维移动装置10的X/Y轴位移台可以带动三维旋转装置9整体做平移运动，可使其平移至喷针7的延长线通过球面球心的位置。所述的三维旋转装置9可以实现绕基底球心的球面运动；通过PC工控机1控制三维旋转装置9的联动旋转配合，实现喷针7相对与曲面基底23的球面螺旋线运动，达到球面轨迹无交叉喷印，保证制备的陶瓷厚膜的均匀性。PC工控机1和CCD观察相机2通过USB数据线相连，实时监控打印区域内的泰勒锥的稳定性以及球面内的轨迹运动情况。
实施例的具体实施步骤如下：
1）电喷射压电陶瓷浆料
高压电源8正极输出端和负极输出端分别与喷针7和可换夹具19连接，高压电源8施加1200V电压，选用ZnO悬浮液作为“陶瓷浆料”，ZnO悬浮液在微量注射泵4的缓慢推动下，以0.5μL/min的流量从精密注射器5通过软管6流至喷针7出口，在电场、重力场等作用下在喷针7口处形成稳定的泰勒锥24，喷射沉积在曲面基底23上形成沉积层。曲面基底23放置在可调夹具19内并通过紧定螺钉26固定，三维移动装置10的Z轴调节喷针7和基底之间的高度约600μm，沉积层每层厚度约1μm。在工控机1屏幕中可监测CCD相机2视野内锥射流的打印情况。
2）曲面压电陶瓷的电喷射打印成型
打印前，先通过步骤1）移动喷针7至合适的高度，通过定位相机3设定喷针7的初始点和打印点，并保证打印点处喷针7通过打印球面的球心，然后PC工控机1通过定位相机3和三维移动装置10带动三维旋转装置9定位至预定打印点，锁定X、Y和Z轴平移，通过PC工控机1和三个限位传感器（X向旋转限位传感器18、Y向旋转限位传感器15和Z向旋转限位传感器21）反馈调整三维旋转装置9起始姿态，然后PC工控机1按照既定的程序控制三维旋转装置9的步进电机（Y向旋转步进电机13和X向旋转步进电机20）联动，使曲面基底23做绕其自身球心的球面旋转运动，并且形成的打印轨迹线25为球面螺旋线，PC工控机1控制电机启动同时控制微量注射泵4和高压电源8工作，打印完成后同时即时关闭；打印过程中，周向旋转电机22带动周向旋转架12实时旋转以保证打印曲面的均匀；打印完成后，锁定三维旋转装置9并解除三维移动装置10的锁定，移出曲面基底23进行加热处理。重复上述步骤进行第二层打印，重复上述步骤直至满足规定的打印厚度，然后烧结成型即可得到所需的半球面陶瓷结构。
本发明提出了一种电喷射打印曲面压电陶瓷的方法，利用“陶瓷浆料”在电场力、重力、表面张力、粘滞力等共同作用下，喷射出微纳米级的精细射流，并利用三维移动装置10、三维旋转装置9、微量注射泵4和高压电源8的协同控制，实现了半球面、半柱面等复杂曲面陶瓷的按需打印制造，保证了打印射流的稳定性和打印曲面的均匀一致性。本发明避免了传统的压电陶瓷复杂曲面制作过程中粘贴、拼接工艺，消除了传统器件对空间信号叠加拟合处理造成的信号延时和失真等问题，提高了复杂曲面传感和驱动微器件的灵敏性和可靠性。

Claims (8)

  1. 一种电喷射打印曲面压电陶瓷的方法，其特征在于，采用包括电喷射压电陶瓷模块和曲面基底六轴联动模块两部分的曲面压电陶瓷电流体喷射打印成型装置实现曲面压电陶瓷的打印；首先电喷射压电陶瓷模块为压电陶瓷浆料提供稳定的压力，以保证压电陶瓷浆料按固定流量从喷口流出，同时在喷口处对压电陶瓷浆料施加电场，形成精细射流；然后将曲面基底(23)固定在曲面基底六轴联动模块的可换夹具(19)上，保证曲面基底(23)在打印过程中始终与精细射流保持垂直且距离喷口不变；通过协同控制曲面基底六轴联动模块和电场、流场的变化实现精细射流按需打印，并最终实现复杂曲面结构压电陶瓷的电喷射打印成型；
    所述的曲面压电陶瓷电喷射打印成型装置具体组成如下：
    所述的电喷射压电陶瓷模块包括PC工控机(1)、CCD观察相机(2)、微量注射泵(4)、精密注射器(5)、软管(6)、喷针(7)和高压电源(8)；所述的精密注射器(5)固定在微量注射泵(4)上，通过软管(6)和喷针(7)相连，且喷针(7)固定在三维移动装置(10)的Z轴滑块上，位于三维旋转装置(9)的上方；所述的高压电源(8)，其正极输出端与喷针(7)相连接，其负极输出端与三维旋转装置(9)中的可换夹具(19)相连接；陶瓷浆料作为原材料墨汁，储存在精密注射器(5)中；所述的微量注射泵(4)供电后，控制精密注射器(5)以稳定的流量将原材料墨汁经过软管(6)后从喷针(7)口喷出，实现电喷射打印；所述的CCD观察相机(2)、微量注射泵(4)和高压电源(8)，均与PC工控机(1)连接，通过CCD观察相机(2)观察打印过程中射流的稳定性，通过PC工控机(1)控制微量注射泵(4)的注射以及高压电源(8)通电情况；
    所述的曲面基底六轴联动模块包括PC工控机(1)、定位相机(3)、三维旋转装置(9)和三维移动装置(10)；所述的三维旋转装置(9)包括导电滑环(11)、周向旋转架(12)、Y向旋转步进电机(13)、Y向旋转架(14)、X向旋转架(16)、调平配重(17)、可换夹具(19)、X向旋转步进电机(20)、周向旋转电机(22)、X向旋转限位传感器(18)、Y向旋转限位传感器(15)和Z向旋转限位传感器(21)；所述的Y向旋转架(14)和X向旋转架(16)为框架结构，二者分别由Y向旋转步进电机(13)和X向旋转步进电机(20)控制并提供Y向和X向的旋转力矩；可换夹具(19)固定安装在X向旋转架(16)上，X向旋转架(16)通过安装轴安装在Y向旋转架(14)，X向旋转架(16)绕轴旋转；所述的Y向旋转架(14)通过安装轴安装在周向旋转架(12)上，Y向旋转架(14)绕轴旋转；所述的周向旋转架(12)通过周向旋转电机(22)提供周向的旋转力矩并保证打印的均匀性，使周向旋转架(12)绕底座周向旋转；从而通过电机和旋转架的配合带动可换夹具(19)做曲面运动；所述的X向旋转步进电机(20)和调平配重(17)均安装在Y向旋转架(14)上，且二者的安装位置相对称，通过调平配重(17)平衡X向旋转步进电机(20)的重量；所述的X向旋转限位传感器(18)、Y向旋转限位传感器(15)和Z向旋转限位传感器(21)分别安装在X向旋转架(16)、Y向旋转架(14)和周向旋转架(12)上，并与PC工控机(1)相连接，为模块的旋转运动提供基准原点和限位点，并通过PC工控机(1)反馈限位和回零；所述的导电滑环(11)安装在周向旋转架(12)的下方，解决周向旋转电机(22)的旋转导致Y向旋转步进电机(13)和X向旋转步进电机(20)以及X向旋转限位传感器(18)、Y向旋转限位传感器(15)和Z向旋转限位传感器(21)的控制线发生绕线问题；所述的曲面基底(23)固定在可换夹具(19)上，并通过紧定螺钉(26)进行紧固；所述的三维旋转装置(9)安装在三维移动装置(10)的X/Y二维移动平台上，三维移动装置(10)实现三维旋转装置(9)的X和Y轴平移运动，通过调节三维移动装置(10)的Z轴滑块的位置以调整喷针(7)与曲面基底(23)之间的距离；三维旋转装置(9)和三维移动装置(10)均与PC工控机(1)相连接，PC工控机(1)协同控制三维旋转装置(9)和三维移动装置(10)实现六轴联动运动，实现曲面基底(23)的X、Y轴旋转运动以及周向旋转运动，从而实现复杂压电陶瓷曲面轨迹的运动；所述的定位相机(3)固定在三维移动装置(10)的Z轴滑块上，位于三维旋转装置(9)的上方，且与PC工控机(1)连接，通过定位相机(3)和三维移动装置(10)的共同配合实现曲面基底(23)轨迹的精确重复定位；
    电喷射打印复杂曲面压电陶瓷结构的具体步骤如下：
    1）电喷射压电陶瓷浆料
    调节喷针(7)的高度，高压电源(8)在喷针(7)与可换夹具(19)之间施加电压，形成稳定电场；陶瓷浆料在微量注射泵(4)的推动下，从精密注射器(5)中通过软管(6)流至喷针(7)出口，在电场、重力场作用下，在喷针(7)口处形成稳定的精细射流，后续过程中可打印在曲面基底(23)上；在PC工控机(1)屏幕中监测CCD观察相机(2)视野内射流的打印情况；
    2）曲面压电陶瓷的电喷射打印成型
    PC工控机(1)通过定位相机(3)的观察并控制三维移动装置(10)运动进行定位，带动三维旋转装置(9)移动至预定打印点，实现初始位置设定，并通过PC工控机(1)和三个限位传感器反馈调整三维旋转装置(9)起始姿态；在电喷射压电陶瓷模块产生精细射流的过程中，通过PC工控机(1)设定曲面基底六轴联动模块的曲面运动轨迹，控制步进电机的工作，使曲面基底(23)按照预定的曲面运动轨迹进行旋转运动，并控制微量注射泵(4)的注射，实现曲面压电陶瓷的电喷射打印成型；曲面运动轨迹保证喷针(7)的喷口与曲面基底(23)上打印点的距离保持不变，且保证喷针(7)始终垂直于曲面在打印点处的切面；第一层打印完成后，锁定三维旋转装置(9)并解除三维移动装置(10)的锁定，移出曲面基底(23)进行加热处理；重复上述步骤进行下一层打印，直至满足规定的打印厚度，然后烧结成型得到所需的曲面压电陶瓷结构。
  2. 根据权利要求1所述的一种电喷射打印曲面压电陶瓷的方法，其特征在于，所述的高压电源(8)输出的电压范围为500V-6000V。
  3. 根据权利要求1或2所述的一种电喷射打印曲面压电陶瓷的方法，其特征在于，所述的X向旋转限位传感器(18)、Y向旋转限位传感器(15)和Z向旋转限位传感器(21)为霍尔传感器；所述的Y向旋转步进电机(13)、X向旋转步进电机(20)和周向旋转电机(22)的转速为0-2000r/min。
  4. 根据权利要求1或2所述的一种电喷射打印曲面压电陶瓷的方法，其特征在于，所述的曲面基底(23)为不同尺寸曲面结构，包括半球面、半柱面和锥面；所述的可换夹具(19)可根据曲面基底(23)的形状和尺寸更换为不同夹具。
  5. 根据权利要求3所述的一种电喷射打印曲面压电陶瓷的方法，其特征在于，所述的曲面基底(23)为不同尺寸曲面结构，包括半球面、半柱面和锥面；所述的可换夹具(19)可根据曲面基底(23)的形状和尺寸更换为不同夹具。
  6. 根据权利要求1、2或5所述的一种电喷射打印曲面压电陶瓷的方法，其特征在于，所述的曲面压电陶瓷厚度为1-200μm。
  7. 根据权利要求3所述的一种电喷射打印曲面压电陶瓷的方法，其特征在于，所述的曲面压电陶瓷厚度为1-200μm。
  8. 根据权利要求4所述的一种电喷射打印曲面压电陶瓷的方法，其特征在于，所述的曲面压电陶瓷厚度为1-200μm。
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114985772A (zh) * 2022-06-02 2022-09-02 临沂大学 一种基于微纳电子制造的复杂曲面打印装置及成形方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110509395B (zh) 2019-08-22 2020-08-14 大连理工大学 一种电喷射打印曲面压电陶瓷的方法
CN111725385B (zh) * 2020-06-16 2022-04-12 大连理工大学 基于溶胶-凝胶法和电射流沉积法的复合型pzt压电膜的制备方法
CN114571725B (zh) * 2022-03-03 2024-04-30 芯体素(杭州)科技发展有限公司 一种led封装挡墙的打印设备
CN115090896B (zh) * 2022-05-23 2023-06-20 大连理工大学 一种导线互联电流体喷印装置及方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6144008A (en) * 1996-11-22 2000-11-07 Rabinovich; Joshua E. Rapid manufacturing system for metal, metal matrix composite materials and ceramics
CN105058549A (zh) * 2015-07-20 2015-11-18 武汉大学 基于飞秒激光的3d打印制备压电陶瓷的方法
CN107159894A (zh) * 2017-07-05 2017-09-15 嘉兴学院 一种多模式的电流体动力学喷射成形设备及控制方法
CN108115810A (zh) * 2017-12-30 2018-06-05 许昌学院 一种陶瓷玻璃复合结构3d打印成形装置及方法
CN108752010A (zh) * 2018-07-18 2018-11-06 广东工业大学 一种压电陶瓷及其制备方法及3d打印压电陶瓷装置
CN108748975A (zh) * 2018-07-17 2018-11-06 中南大学 一种纳米级高精度增材制造设备
CN110509395A (zh) * 2019-08-22 2019-11-29 大连理工大学 一种电喷射打印曲面压电陶瓷的方法
CN110509394A (zh) * 2019-08-22 2019-11-29 大连理工大学 曲面压电陶瓷电流体喷射打印成型装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN206912250U (zh) * 2017-07-05 2018-01-23 嘉兴学院 一种多模式的电流体动力学喷射成形设备
CN209051039U (zh) * 2018-10-15 2019-07-02 鑫烯三维科技浙江有限公司 一种具有五轴联动打印平台的螺杆式熔融沉积3d打印装置
CN110039773B (zh) * 2019-05-08 2020-07-28 清华大学 一种复合式工艺的三维打印机及其打印方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6144008A (en) * 1996-11-22 2000-11-07 Rabinovich; Joshua E. Rapid manufacturing system for metal, metal matrix composite materials and ceramics
CN105058549A (zh) * 2015-07-20 2015-11-18 武汉大学 基于飞秒激光的3d打印制备压电陶瓷的方法
CN107159894A (zh) * 2017-07-05 2017-09-15 嘉兴学院 一种多模式的电流体动力学喷射成形设备及控制方法
CN108115810A (zh) * 2017-12-30 2018-06-05 许昌学院 一种陶瓷玻璃复合结构3d打印成形装置及方法
CN108748975A (zh) * 2018-07-17 2018-11-06 中南大学 一种纳米级高精度增材制造设备
CN108752010A (zh) * 2018-07-18 2018-11-06 广东工业大学 一种压电陶瓷及其制备方法及3d打印压电陶瓷装置
CN110509395A (zh) * 2019-08-22 2019-11-29 大连理工大学 一种电喷射打印曲面压电陶瓷的方法
CN110509394A (zh) * 2019-08-22 2019-11-29 大连理工大学 曲面压电陶瓷电流体喷射打印成型装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114985772A (zh) * 2022-06-02 2022-09-02 临沂大学 一种基于微纳电子制造的复杂曲面打印装置及成形方法

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