WO2021027657A1 - Optical homogenization system employing multiple fiber output laser modules, and machining head - Google Patents

Optical homogenization system employing multiple fiber output laser modules, and machining head Download PDF

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Publication number
WO2021027657A1
WO2021027657A1 PCT/CN2020/107129 CN2020107129W WO2021027657A1 WO 2021027657 A1 WO2021027657 A1 WO 2021027657A1 CN 2020107129 W CN2020107129 W CN 2020107129W WO 2021027657 A1 WO2021027657 A1 WO 2021027657A1
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light
fiber output
optical fiber
laser modules
output laser
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PCT/CN2020/107129
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French (fr)
Chinese (zh)
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方强
方笑尘
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方强
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0673Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

Definitions

  • the invention belongs to the field of laser technology, and relates to a laser processing optical system and a laser processing head using the optical system, in particular to a homogenized optical system and processing head based on multiple optical fiber output laser modules, which can be widely used in the laser industry in.
  • spot homogenization laser systems can be divided into two categories. One is the laser system that directly homogenizes the light output by the semiconductor laser array laser, and the other is the laser system that first couples the light output from the laser into the optical fiber, and then A laser system that homogenizes the laser spot with an optical system at the fiber output end.
  • the second type of system uses optical fiber for light transmission. At this time, the laser and the laser processing head are separated and connected by optical fiber.
  • the homogenization system processing head is usually much smaller than the laser, so it can provide greater convenience. It is more popular with users.
  • a laser is used to perform beam shaping and homogenization through an optical system.
  • high-power lasers are composed of multiple small laser modules that are combined by a beam combiner. Therefore, the actual implementation path of the current homogenized laser processing system is: 1. Using low-power laser modules by photosynthesis The beamer constitutes a high-power laser output by the optical fiber; 2. The laser output from the optical fiber is shaped and homogenized through the optical system.
  • the high-power beam combiner is a very difficult and very expensive device to manufacture, and its reliability is also low, because the greater the power, the more difficult it is to deal with the local loss of light, and the device is easy to burn.
  • the unit power price of a power-emitting laser is usually about twice the unit power price of the low-power module that composes it.
  • the homogenized optical system achieves spot shaping and homogenization by segmenting and recombining the wavefront of the Gaussian beam of the laser. These methods either have large light energy loss or low spot uniformity.
  • Current commercial laser systems usually use microlens arrays and binary optics for homogenization, but it is difficult to manufacture microlens arrays and binary optics that can withstand high power and are expensive.
  • a laser system is designed, its spot structure is determined. The spot distribution area cannot be changed, and the optical power distribution in the spot distribution area cannot be changed, which makes it difficult to adapt to the ever-changing laser processing requirements in practical applications.
  • the purpose of the present invention is to provide a homogenization optical system and processing head based on multiple optical fiber output laser modules.
  • the technical route is to use multiple low-power laser modules. , Shaping and homogenization are performed directly through the optical system, avoiding the use of high-power lasers, thus avoiding the problems of beam combiners in the prior art, reducing costs and improving reliability.
  • the technical solution provided by the present invention adopts conventional optical elements, avoids the use of expensive special optical elements, and can further reduce the cost of the system and improve the uniformity effect.
  • the spot structure can be controlled in real time, which brings great flexibility.
  • a homogenizing optical system based on multiple optical fiber output laser modules which is characterized in that it includes multiple optical fiber output laser modules, imaging lenses and light splitting components; the optical fiber output end faces of the multiple optical fiber output laser modules are arranged in one according to a certain rule.
  • the imaging lens includes at least one lens located on the output optical path of the light emitting direction of the fiber output end face of the laser module;
  • the splitting component includes at least one spatial angle or position splitting device, and these splitting devices are independent or located in the imaging Before the lens, or behind the imaging lens, or between the lenses of the imaging lens;
  • the imaging lens and the beam splitter constitute a one-to-multipoint imaging system, so that the end face of the laser module output fiber forms a multi-point image on the image surface of the imaging lens. Group images, these images combine to form a uniform spot.
  • the light splitting component is a polarization light splitting device, or a spatial wave surface light splitting device, or a combination of a polarization light splitting device and a space wave surface light splitting device.
  • the polarization splitting device is a parallel flat crystal displacement plate that splits O light (normal light) and E light (abnormal light) and produces relative displacement, or separates O light (normal light) and E light (abnormal light). Beam and produce a relative angular displacement of the crystal wedge.
  • the spatial wavefront beam splitting device is a spatially arranged optical wedge that generates relative deflection of light beams, or a plurality of spatially arranged mirrors that generate relative deflection of light beams.
  • the cross-sections of the output fiber cores of the plurality of fiber output modules are circular or rectangular.
  • the light splitting component forms a relative displacement light splitting in a one-dimensional direction.
  • the optical beam splitting component simultaneously forms a relative displacement beam splitting in two orthogonal directions.
  • the relative duration of light emission of the fiber output laser modules is the same or different; the relative duration of light emission power of each fiber output laser module is the same or different; the light emission of the fiber output laser modules
  • the relative duration is synchronous or asynchronous; a spot structure whose spot shape changes with time is formed to meet the requirements of different laser processing spots.
  • a laser processing head of a homogenized optical system includes a pair of multipoint optical imaging systems composed of a plurality of fiber output laser modules, imaging lenses, and spectroscopic components, a fiber holder, a pair of multipoint optical imaging system support components, and Tubular housing; the output fibers of the multiple optical fiber output laser modules are fixed on the fiber support and the output end faces are arranged in a certain pattern in a plane; the pair of multipoint imaging systems are fixed on the one pair of multipoints The imaging system support member; the optical fiber holder is fixed inside the tubular housing near one end, and the optical fiber output end face faces the other end of the tubular housing; the pair of multipoint imaging system support members are arranged on the The inside of the tubular housing; the light emitted from the end face of the output fiber of the optical fiber output laser module fixed on the optical fiber holder passes through a pair of multipoint imaging systems fixed on a pair of multipoint imaging system support members from the tubular housing The other end of the body outputs the uniform laser spot.
  • the present invention avoids the laser beam combining problem of the high-power fiber output laser system by using a low-power fiber output laser module, greatly reduces the cost of the laser light source, and Improve the reliability of the system; at the same time, the laser homogenization system of the present invention adopts common optical elements, which avoids the use of expensive special optical elements, and further reduces the system cost; third, the homogenization effect is improved; fourth, It can provide a light spot that changes with time, providing flexibility for laser processing.
  • FIG. 1 is a schematic diagram of the principle structure of a homogenized optical system based on multiple optical fiber output laser modules proposed by the present invention.
  • FIG. 2A is a schematic diagram of the structure of the first spectroscopic component proposed by the present invention, which is a parallel flat crystal displacement plate that generates relative displacement.
  • Fig. 2B is a schematic structural diagram of the second type of light splitting component proposed by the present invention, which is a crystal wedge-shaped piece that produces relative angular displacement.
  • FIG. 3A is a schematic diagram of the structure of the third type of light splitting component proposed by the present invention, which is an optical wedge that generates relative deflection of the light beam.
  • FIG. 3B is a schematic structural diagram of the fourth type of light splitting component proposed by the present invention, which is a plurality of spatially arranged mirrors that generate relative deflection of light beams.
  • FIG. 4A is a schematic structural diagram of an embodiment of a uniform light optical system solution based on multiple optical fiber output laser modules proposed by the present invention.
  • Fig. 4B is a schematic diagram of the fiber end face distribution in the embodiment shown in Fig. 4A.
  • FIG. 4C is a schematic diagram of the light spot distribution in the embodiment shown in FIG. 4A.
  • FIG. 5A is a schematic structural diagram of a second embodiment of a homogenized optical system solution based on multiple optical fiber output laser modules proposed by the present invention.
  • Fig. 5B is a schematic diagram of the end face distribution of the optical fiber in the embodiment shown in Fig. 5A.
  • FIG. 5C is a schematic diagram of light spot distribution in the embodiment shown in FIG. 5A.
  • FIG. 6A is a schematic structural diagram of a third embodiment of a homogenized optical system solution based on multiple optical fiber output laser modules proposed by the present invention.
  • Fig. 6B is a schematic diagram of the fiber end face distribution in the embodiment shown in Fig. 6A.
  • FIG. 6C is a schematic diagram of the light spot distribution of the imaging lens in the embodiment shown in FIG. 6A.
  • Fig. 7 is a schematic structural diagram of a laser processing head using a homogenized optical system based on multiple optical fiber output laser modules proposed by the present invention.
  • M 1 , M 2 ,..., M N respectively represent the fiber output module
  • OB and I respectively represent the object plane where the output fiber end face of the fiber output laser module is located and its corresponding conjugate image plane
  • M 11 ,..., M 1M means a pair of multi-point imaging system on the fiber output laser module output fiber end face multiple images
  • BS means optical splitting system, 1 ⁇ MIM means a pair of multi-point imaging system
  • PBS1, PBS2 respectively indicate crystal beam splitter
  • BS1 RBS1 and RBS2 respectively represent the reflective beamsplitter
  • L represents the imaging lens
  • L1 represents the collimating lens
  • L2 represents the focusing lens
  • GXJ represents the fiber holder
  • 1 ⁇ MZJ represents a pair of multipoint imaging system support components
  • GZK stands for tubular shell.
  • FIG. 1 is a schematic diagram of the principle structure of a homogenized optical system based on multiple optical fiber output laser modules proposed by the present invention.
  • N optical fiber output modules M 1 , M 2 , ..., M N output fiber end faces are distributed according to a certain law
  • the object plane OB the light they emit is composed of a pair of M (multiple) point imaging system 1 ⁇ MIM imaged on the conjugate image plane I of the object plane OB, which is formed on the image plane I.
  • M 11 ,..., M 1M respectively represent a plurality of images formed by a pair of multipoint imaging system 1 ⁇ MIM on the output fiber end face of the fiber output laser module M1.
  • the light field distribution of the required shape and uniformity can be formed according to the design requirements to meet different processing requirements.
  • the optical splitting component and the optical imaging lens are each composed of one or more elements, and the combination relationship can be that the respective elements form a whole according to needs, or It can be that the respective components interact together, and the setting sequence is also flexibly set according to needs.
  • the optical splitting component can be realized by polarization splitting.
  • This splitting can be spatial parallel displacement beam splitting or spatial angular displacement beam splitting.
  • Figure 2A shows a parallel displacement realization structure, which is a parallel flat crystal displacement plate using uniaxial crystal.
  • the optical axis of the crystal forms a certain angle with the surface of the flat crystal.
  • the beam is divided into normal Light (O) and abnormal light (E) form a relative lateral displacement between them in the plane determined by the optical axis and the surface normal.
  • the displacement is determined by the two refractive indices, thicknesses and the angle between the optical axis and the surface normal of the crystal. Decided.
  • Figure 2B shows an angular displacement realization structure. It is a crystal wedge that uses a uniaxial crystal. The optical axis of the crystal is parallel to one surface of the wedge.
  • O normal light
  • E abnormal light
  • the amount of angular displacement is determined by the two refractive indices of the crystal and the wedge angle.
  • the optical splitting component can be realized by a spatial method, that is, in the transmission space of the beam, spatial angle deflection and splitting are performed at different positions of the transmission section.
  • Figure 3A shows a schematic diagram of a basic element wedge that realizes spatial angular deflection beam splitting. When wedges with different wedge angles are inserted at different positions of the beam transmission section, angular displacement beam splitting can be realized.
  • Figure 3B shows the angular beam splitting structure realized by the two mirror groups. When there is an angle between the two mirrors, the deflection beam splitting is realized.
  • the cross-sectional shape of the core of the output fiber of the fiber output module can be various, and can be a commonly used circular shape or a rectangular shape.
  • the optical beam splitter can form a relative displacement beam splitter in one-dimensional direction; it can also form a relative displacement beam splitter in two orthogonal directions at the same time. Splitting.
  • the fiber output laser modules can be independently controlled.
  • the laser modules can be continuous light lasers, quasi continuous light lasers, or pulsed light.
  • Lasers, that is, the relative duration of light emission can be the same or different; the relative duration of light emission of each fiber output laser module can be the same or different; the light emission of the fiber output laser modules
  • the relative duration can be synchronized or non-synchronized; a spot structure whose spot shape changes with time is formed to meet the requirements of different laser processing spots.
  • Figure 4A is an embodiment of a homogenizing optical system based on multiple fiber output laser modules proposed in the present invention.
  • the end faces of the output fibers of the multiple fiber output modules are distributed on the object plane OB, and point A on the end face of a certain output fiber
  • the emitted light is divided into normal light O light and abnormal light E light after passing through the polarization beam splitting device PBS1.
  • the two beams of light are relatively laterally displaced, which is equivalent to forming two images A and A'. After passing through the imaging lens, they are on the conjugate image plane.
  • Two image points Ai1 and Ai2 are formed on it.
  • the system forms two sets of images that are laterally displaced from each other on the image plane with the end faces of the output fibers of multiple fiber output modules, and they together form the light distribution on the image plane.
  • the cross-section of the output fiber core of the fiber output module is square, and all end faces are arranged in a straight line with a distance of twice the side length of the square fiber core in one direction, as shown in FIG. 4B.
  • the polarization beam splitter PBS1 is a parallel plate crystal displacement plate, which divides the output fiber end face of the fiber output module into two groups of relative lateral displacement images of O light and E light.
  • the lateral displacement is equal to the side length of the square fiber core, and the displacement direction is
  • the optical fibers are arranged in the same direction. After passing through the lens, the two images form a strip-shaped uniform light distribution as shown in Fig. 4C. This light distribution can be used in laser heat treatment and laser cladding processing.
  • the side length of the square core of the output fiber is 100 microns
  • the fiber arrangement pitch is 200 microns, forming a stripe spot with an aspect ratio of 40:1, using different amplification
  • the magnification lens can form laser spots of different sizes.
  • the output power of the two outermost fibers in the laser system composed of the above 20 fibers is 20% greater than the output power of the other fibers in the middle.
  • the output power of each module in the laser system composed of the above 20 optical fibers is independently controlled, and the area with varying width can be laser processed.
  • 5A is a second embodiment of a homogenizing optical system based on multiple fiber output laser modules proposed in the present invention.
  • the end faces of the output fibers of the multiple fiber output modules are distributed on the object plane OB, and an output fiber end face
  • the light emitted from point A is divided into normal light O light and abnormal light E light after passing through the polarization beam splitting device PBS2.
  • the two beams are relatively angularly displaced, which is equivalent to forming two images of A'and A”.
  • the system outputs multiple optical fibers to the output fiber of the module
  • the end surface forms 4 sets of images that are laterally displaced from each other on the image surface. Together, they form the light distribution on the image surface.
  • the cross-section of the output fiber core of the fiber output module is circular with a diameter of 125 microns, and all end faces are arranged in a straight line at a distance of 125 microns in one direction, as shown in FIG. 5B.
  • the polarization beam splitter PBS1 is a crystal wedge, which forms two images of O light and E light with a certain angular displacement on the end face of the fiber. The distance between the images is determined by the displacement angle and the distance from PBS2 to the object surface.
  • the distance is a quarter of the distance between the optical fibers, that is, 31.25 microns, and its displacement direction is the same as the arrangement direction of the fiber end faces; after passing through the lens, the beam is divided into two groups by the beam splitter BS1, which is a wedge, occupying the beam section Half of the area, two sets of images with a certain displacement are formed on the image plane. The distance between these two sets of images is determined by the deflection angle of the wedge and the distance from the wedge to the image plane.
  • the displacement It is 62.5 microns multiplied by the magnification of the imaging system, and the displacement direction is the same as the distribution direction of the fiber end face, which forms 4 sets of images of the fiber end face on the conjugate image plane, and they are superimposed to form the uniform stripe shown in Figure 5C Light distribution.
  • This light distribution can be used in laser heat treatment and laser cladding processing.
  • the imaging lens is composed of a collimator lens L1 and a focusing lens L2.
  • the end faces of the output fibers of the multiple fiber output modules Distributed on the front focal plane OB of the collimating lens.
  • the light emitted from point A on the end face of a certain output fiber is divided into normal light O light and abnormal light E light after passing through the polarization beam splitter PBS1.
  • the relative angular displacement of these two beams is equivalent to the formation of two images A'and A”. , The two images are separated in the direction perpendicular to the paper surface.
  • the mirrors RBS1 and RBS2 After passing through the collimating lens, the mirrors RBS1 and RBS2 with a certain angle that are set on the light transmission section and occupy 50% of the section are divided into two in space. Light with a certain angle, after they pass through the focusing lens, 4 image points AO1, AO2, AE1 and AE2 are formed on the back focal plane I of the focusing lens.
  • the mirrors RBS1 and RBS2 form image separation in the direction parallel to the paper surface.
  • the light splitting system of this system splits light in two vertical directions, and the end faces of the output fibers of multiple fiber output modules form 4 sets of images that are laterally displaced on the image plane, and they together form the light on the image plane. distributed.
  • the cross section of the output fiber core of the fiber output module is square, and the end faces of the 6 optical fibers are two-dimensionally separated on the object plane, as shown in FIG. 6B, in which the 4 fibers are arranged in two-dimensional distribution.
  • Square the spacing is the side length of the cross-section of the fiber core, the other two are 3 times the length of the core side of the fiber under the upper 4 fibers, and the length between them is 3 times the length of the core side.
  • the polarization beam splitting device PBS1 is a crystal wedge, which forms two images of O light and E light with a certain angular displacement on the end face of the fiber. The distance between the images is determined by the displacement angle and the distance from PBS1 to the object surface.
  • the distance is the same as the side length of the core of the square fiber, and its displacement direction is parallel to one side of the core of the square fiber; after passing through the lens, the beam is set on the light transmission section and each occupying 50% of the cross section has a certain angle.
  • the mirrors RBS1 and RBS2 are further divided into two groups on the conjugate image plane I. Two groups of images with a certain displacement are formed on the image plane. The distance between the two groups of images, the relative deflection angle formed by the mirror and their The distance of the image plane is determined.
  • the displacement is the side length of the square fiber core, and the displacement direction is perpendicular to the direction generated by PBS1. This forms 4 sets of images of the fiber end faces on the conjugate image plane. After being superimposed, the uniform light distribution in the three regions as shown in FIG. 6C is formed. This light distribution is widely used in laser welding processing.
  • the output power of each module in the above-mentioned laser system is independently controlled.
  • the relative power of the main spot and the two auxiliary spots can be controlled to meet the requirements of laser processing under different process conditions.
  • the laser module used can be a continuous optical module or a pulsed optical module.
  • Fig. 7 is a schematic structural diagram of a laser processing head using a homogenized optical system based on multiple optical fiber output laser modules proposed by the present invention.
  • N fiber output modules the end faces of the output fibers of M 1 , M 2 , ..., M N are fixed on the fiber holder GXJ according to a certain rule; the fiber holder GXJ is fixed on one end of the tubular housing GZK; composed of imaging lens and beam splitter
  • the composed pair of multipoint imaging system 1 ⁇ MIM is fixed on a pair of multipoint imaging system support member 1 ⁇ MZJ; a pair of multipoint imaging system support member 1 ⁇ MZJ is set inside the tubular housing GZK.
  • the light emitted from the end face of the output optical fiber of the optical fiber output laser module fixed on the optical fiber holder passes through a pair of multipoint imaging system 1 fixed on a pair of multipoint imaging system support parts 1 ⁇ MZJ ⁇ MIM after another from the tubular shell GZK
  • One end output, the uniform laser spot produced is used for laser processing.
  • the homogenized optical system based on multiple optical fiber output laser modules proposed in the present invention uses multiple low-power laser modules as light sources, avoids the laser beam combining problem required in the use of high-power lasers, reduces system costs, and reduces system reliability. higher.
  • the use of traditional imaging and spectroscopic components to construct a homogenization system further reduces the cost of the system.
  • the spot structure can be manipulated in real time to flexibly adapt to the requirements of different laser processing processes.
  • the laser processing head designed with this optical system can be used in the fields of laser heat treatment, laser cladding and laser welding.

Abstract

An optical homogenization system employing multiple fiber output laser modules, and a machining head. The system comprises multiple fiber output laser modules (M1, M2, ..., MN), an imaging lens (L), and an optical splitter component. Fiber output end surfaces of the multiple fiber output laser modules (M1, M2, ..., MN) are arranged in one plane in accordance with a specific rule. The imaging lens (L) comprises at least one lens, and is located on an output light path in a light emitting direction of the fiber output end surfaces of the laser modules (M1, M2, ..., MN). The optical splitter component comprises at least one spatial angle or position optical splitter device, and the optical splitter devices are independently located in front of the imaging lens (L), located behind the imaging lens (L), or located between lenses of the imaging lens (L). The invention uses multiple low-power laser modules, and directly performs shaping and homogenization by means of the optical system, thereby avoiding the usage of high-power lasers, and accordingly avoiding the problem of beam combiners in the prior art, lowering costs, and improving reliability.

Description

基于多个光纤输出激光模块的匀光光学系统及加工头Uniform light optical system and processing head based on multiple optical fiber output laser modules 技术领域Technical field
本发明属于激光技术领域,涉及一种激光加工光学系统及利用该光学系统的激光加工头,特别是一种基于多个光纤输出激光模块的匀光光学系统及加工头,可广泛应用于激光产业中。The invention belongs to the field of laser technology, and relates to a laser processing optical system and a laser processing head using the optical system, in particular to a homogenized optical system and processing head based on multiple optical fiber output laser modules, which can be widely used in the laser industry in.
背景技术Background technique
激光应用的许多领域,都需要均匀的激光光斑以保证激光处理的效果。像激光热处理、激光熔覆、激光焊接及激光医疗等诸多领域,都需要各种形状的均匀光斑。目前,光斑匀化激光系统可以分成两大类,一类是将半导体激光阵列激光器输出的光直接进行匀化的激光系统,另一类是将激光器输出的光先耦合到光纤中,之后再在光纤输出端对用光学系统对激光光斑进行匀化的激光系统。第二类系统由于采用光纤进行光的传输,这时激光器与激光加工头是分离的,用光纤连接,匀光系统加工头通常比激光器小的多,因而能提供更大的便利性,在市场上更受用户的欢迎。针对这种系统,目前学术界已有多种解决方案,包括:基于微透镜阵列的匀光方案(基于微透镜阵列的激光扩束匀光器CN201410225708.7);基于菲涅尔透镜的匀光方案(一种多焦点光斑能量均匀化菲涅尔透镜CN201410499782.8);基于二元光学元件的匀光方案(有产品);反射式积分镜匀光方案(激光表面改性常用激光器及常用匀光变换系统,长春大学学报2015年地10期);组合镜分割叠加变换系统(激光表面改性常用激光器及常用匀光变换系统,长春大学学报2015年地10期)等。Many areas of laser applications require uniform laser spots to ensure the effect of laser processing. Many fields, such as laser heat treatment, laser cladding, laser welding, and laser medical treatment, require uniform spots of various shapes. At present, spot homogenization laser systems can be divided into two categories. One is the laser system that directly homogenizes the light output by the semiconductor laser array laser, and the other is the laser system that first couples the light output from the laser into the optical fiber, and then A laser system that homogenizes the laser spot with an optical system at the fiber output end. The second type of system uses optical fiber for light transmission. At this time, the laser and the laser processing head are separated and connected by optical fiber. The homogenization system processing head is usually much smaller than the laser, so it can provide greater convenience. It is more popular with users. For this kind of system, there are a variety of solutions in the academic community, including: uniform light scheme based on microlens array (laser expansion homogenizer based on microlens array CN201410225708.7); uniform light based on Fresnel lens Scheme (a multi-focus spot energy homogenization Fresnel lens CN201410499782.8); homogenization scheme based on binary optical elements (products available); homogenization scheme of reflective integrator (laser surface modification common laser and common uniform Optical conversion system, Journal of Changchun University 2015, Issue 10); Combined mirror segmentation and stack conversion system (Laser surface modification commonly used lasers and common uniform light conversion systems, Journal of Changchun University 2015, Issue 10), etc.
在上述第二类激光匀光方法中,都是采用一个激光器,通过光学系统来进行光束整形和匀光。而在现实中,大功率激光器都是由多个小激光模块通过合束器合束后组成的,因而,目前的匀光激光加工系统实际的实现路径是:1、采用小功率激光模块由光合束器组成光纤输出的大功率激光器;2、通过光学系统将光纤输出的激光进行整形和匀化。在这种技术方案中, 大功率合束器是一个制造难度极高且非常昂贵的器件,可靠性也低,因为功率越大,局部损耗光的处理越难,器件很容易烧毁。此外,发功率激光器单位功率的价格通常为组成它的小功率模块单位功率价格的2倍左右。而匀光光学系统都是通过对激光的高斯光束波面进行分割和重新组合来实现光斑整形和匀化,这些方法或者光能损失较大或者光斑均匀性不高。目前商业的激光系统通常采用微透镜整列和二元光学器件进行匀光,但能承受大功率的微透镜阵列和二元光学器件制造困难,价格昂贵。最后,当一个激光系统设计好后,它的光斑结构就确定了,光斑的分布区域无法改变,光斑分布区域内的光功率分布也无法改变,难以适应实际应用中千变万化激光加工工艺要求。In the above-mentioned second type of laser homogenization method, a laser is used to perform beam shaping and homogenization through an optical system. In reality, high-power lasers are composed of multiple small laser modules that are combined by a beam combiner. Therefore, the actual implementation path of the current homogenized laser processing system is: 1. Using low-power laser modules by photosynthesis The beamer constitutes a high-power laser output by the optical fiber; 2. The laser output from the optical fiber is shaped and homogenized through the optical system. In this technical solution, the high-power beam combiner is a very difficult and very expensive device to manufacture, and its reliability is also low, because the greater the power, the more difficult it is to deal with the local loss of light, and the device is easy to burn. In addition, the unit power price of a power-emitting laser is usually about twice the unit power price of the low-power module that composes it. The homogenized optical system achieves spot shaping and homogenization by segmenting and recombining the wavefront of the Gaussian beam of the laser. These methods either have large light energy loss or low spot uniformity. Current commercial laser systems usually use microlens arrays and binary optics for homogenization, but it is difficult to manufacture microlens arrays and binary optics that can withstand high power and are expensive. Finally, when a laser system is designed, its spot structure is determined. The spot distribution area cannot be changed, and the optical power distribution in the spot distribution area cannot be changed, which makes it difficult to adapt to the ever-changing laser processing requirements in practical applications.
发明内容Summary of the invention
为了解决现有上述第二类激光匀光技术中存在问题,本发明的目的是提供基于多个光纤输出激光模块的匀光光学系统及加工头,其技术路线是采用多个小功率的激光模块,直接通过光学系统进行整形和匀光,避免了采用大功率激光器,因而回避了现有技术中的合束器的问题,降低了成本,提高了可靠性。同时,本发明提供的技术方案采用常规光学元件,避免使用昂贵的特种光学元件,可以进一步降低系统的成本和改善匀光效果。最后,通过对诸模块的独立控制,可以实时对光斑结构进行控制,带来极大的灵活性。In order to solve the problems existing in the above-mentioned second type of laser homogenization technology, the purpose of the present invention is to provide a homogenization optical system and processing head based on multiple optical fiber output laser modules. The technical route is to use multiple low-power laser modules. , Shaping and homogenization are performed directly through the optical system, avoiding the use of high-power lasers, thus avoiding the problems of beam combiners in the prior art, reducing costs and improving reliability. At the same time, the technical solution provided by the present invention adopts conventional optical elements, avoids the use of expensive special optical elements, and can further reduce the cost of the system and improve the uniformity effect. Finally, through independent control of the modules, the spot structure can be controlled in real time, which brings great flexibility.
为了实现上述目的,本发明采用的技术方案是:In order to achieve the above objective, the technical solution adopted by the present invention is:
一种基于多个光纤输出激光模块的匀光光学系统,其特征在于,包括多个光纤输出激光模块、成像透镜和分光部件;所述多个光纤输出激光模块的光纤输出端面按一定规律在一个平面中排列;所述成像透镜包括至少一片透镜,位于激光模块的光纤输出端面发光方向的输出光路上;所述分光部件包括至少一个空间角度或位置分光器件,这些分光器件各自独立的或者位于成像透镜之前,或者位于成像透镜之后,或者位于成像透镜诸透镜之间;所述成像透镜和分光部件构成一个一对多点的成像系统,使激光模块输出光纤端面在成像透镜的像面 上形成多组像,这些像组合形成均匀的光斑。A homogenizing optical system based on multiple optical fiber output laser modules, which is characterized in that it includes multiple optical fiber output laser modules, imaging lenses and light splitting components; the optical fiber output end faces of the multiple optical fiber output laser modules are arranged in one according to a certain rule. Arranged in a plane; the imaging lens includes at least one lens located on the output optical path of the light emitting direction of the fiber output end face of the laser module; the splitting component includes at least one spatial angle or position splitting device, and these splitting devices are independent or located in the imaging Before the lens, or behind the imaging lens, or between the lenses of the imaging lens; the imaging lens and the beam splitter constitute a one-to-multipoint imaging system, so that the end face of the laser module output fiber forms a multi-point image on the image surface of the imaging lens. Group images, these images combine to form a uniform spot.
所述分光部件为偏振分光器件,或者为空间波面分光器件,或者是偏振分光器件和空间波面分光器件的组合。The light splitting component is a polarization light splitting device, or a spatial wave surface light splitting device, or a combination of a polarization light splitting device and a space wave surface light splitting device.
所述偏振分光器件是将O光(正常光)和E光(异常光)分束并产生相对位移的平行平板晶体位移片,或者是将O光(正常光)和E光(异常光)分束并产生相对角位移的晶体楔形片。The polarization splitting device is a parallel flat crystal displacement plate that splits O light (normal light) and E light (abnormal light) and produces relative displacement, or separates O light (normal light) and E light (abnormal light). Beam and produce a relative angular displacement of the crystal wedge.
所述空间波面分光器件是产生光束相对偏转的空间排列的光楔,或者是产生光束相对偏转的空间排列的多个反射镜。The spatial wavefront beam splitting device is a spatially arranged optical wedge that generates relative deflection of light beams, or a plurality of spatially arranged mirrors that generate relative deflection of light beams.
所述多个光纤输出模块的输出光纤纤芯截面是圆形的,或者是矩形的。The cross-sections of the output fiber cores of the plurality of fiber output modules are circular or rectangular.
所述分光部件在一维方向上形成相对位移的分光。The light splitting component forms a relative displacement light splitting in a one-dimensional direction.
所述光学分光部件在两个正交的方向上同时形成相对位移的分光。The optical beam splitting component simultaneously forms a relative displacement beam splitting in two orthogonal directions.
所述诸光纤输出激光模块发光的相对持续时间是相同的,或者是不同的;各光纤输出激光模块发光的相对持续时间内的功率是相同的,或者是不同的;诸光纤输出激光模块发光的相对持续时间是同步的,或者是不同步的;形成光斑形状随时间变化的光斑结构,满足不同激光加工对光斑的要求。The relative duration of light emission of the fiber output laser modules is the same or different; the relative duration of light emission power of each fiber output laser module is the same or different; the light emission of the fiber output laser modules The relative duration is synchronous or asynchronous; a spot structure whose spot shape changes with time is formed to meet the requirements of different laser processing spots.
进一步的,一种匀光光学系统的激光加工头,包括多个光纤输出激光模块、成像透镜和分光部件组成的一对多点光学成像系统、光纤支架、一对多点光学成像系统支撑部件及管状壳体;所述多个光纤输出激光模块的输出光纤固定在光纤支架上并使其输出端面在一个平面内按一定规律排列;所述一对多点成像系统固定在所述一对多点成像系统支撑部件上;所述光纤支架固定在所述管状壳体内部靠近一端,并使光纤输出端面面向所述管状壳体的另一端;所述一对多点成像系统支撑部件设置在所述管状壳体的内部;固定在所述光纤支架上的光纤输出激光模块的输出光纤端面发出的光通过固定在一对多点成像系统支撑部件上的一对多点 成像系统后从所述管状壳体的另一端输出产生的匀光激光光斑。Further, a laser processing head of a homogenized optical system includes a pair of multipoint optical imaging systems composed of a plurality of fiber output laser modules, imaging lenses, and spectroscopic components, a fiber holder, a pair of multipoint optical imaging system support components, and Tubular housing; the output fibers of the multiple optical fiber output laser modules are fixed on the fiber support and the output end faces are arranged in a certain pattern in a plane; the pair of multipoint imaging systems are fixed on the one pair of multipoints The imaging system support member; the optical fiber holder is fixed inside the tubular housing near one end, and the optical fiber output end face faces the other end of the tubular housing; the pair of multipoint imaging system support members are arranged on the The inside of the tubular housing; the light emitted from the end face of the output fiber of the optical fiber output laser module fixed on the optical fiber holder passes through a pair of multipoint imaging systems fixed on a pair of multipoint imaging system support members from the tubular housing The other end of the body outputs the uniform laser spot.
与现有技术相比,本发明至少具有以下有益效果:首先,本发明通过采用小功率的光纤输出激光模块回避了大功率光纤输出激光系统的激光合束问题,大幅降低激光光源的成本,并提高系统可靠性;同时,本发明的激光匀光系统构成采用的是常用光学元件,避免了昂贵特种光学元件的使用,进一步降低系统了成本;第三、匀光效果有所提升;第四,可以提供随时间变化的光斑,为激光加工提供灵活性。Compared with the prior art, the present invention has at least the following beneficial effects: First, the present invention avoids the laser beam combining problem of the high-power fiber output laser system by using a low-power fiber output laser module, greatly reduces the cost of the laser light source, and Improve the reliability of the system; at the same time, the laser homogenization system of the present invention adopts common optical elements, which avoids the use of expensive special optical elements, and further reduces the system cost; third, the homogenization effect is improved; fourth, It can provide a light spot that changes with time, providing flexibility for laser processing.
附图说明Description of the drawings
图1为本发明提出的基于多个光纤输出激光模块的匀光光学系统的原理性结构示意图。FIG. 1 is a schematic diagram of the principle structure of a homogenized optical system based on multiple optical fiber output laser modules proposed by the present invention.
图2A为本发明提出的第一种分光部件的结构示意图,它是产生相对位移的平行平板晶体位移片。2A is a schematic diagram of the structure of the first spectroscopic component proposed by the present invention, which is a parallel flat crystal displacement plate that generates relative displacement.
图2B为本发明提出的第二种分光部件的结构示意图,它是产生相对角位移的晶体楔形片。Fig. 2B is a schematic structural diagram of the second type of light splitting component proposed by the present invention, which is a crystal wedge-shaped piece that produces relative angular displacement.
图3A为本发明提出的第三种分光部件的结构示意图,它是产生光束相对偏转的光楔。FIG. 3A is a schematic diagram of the structure of the third type of light splitting component proposed by the present invention, which is an optical wedge that generates relative deflection of the light beam.
图3B为本发明提出的第四种分光部件的结构示意图,它是产生光束相对偏转的空间排列的多个反射镜。FIG. 3B is a schematic structural diagram of the fourth type of light splitting component proposed by the present invention, which is a plurality of spatially arranged mirrors that generate relative deflection of light beams.
图4A为基于本发明提出的基于多个光纤输出激光模块的匀光光学系统方案的一种实施方案的结构示意图。FIG. 4A is a schematic structural diagram of an embodiment of a uniform light optical system solution based on multiple optical fiber output laser modules proposed by the present invention.
图4B为图4A所示实施例中光纤端面分布的示意图。Fig. 4B is a schematic diagram of the fiber end face distribution in the embodiment shown in Fig. 4A.
图4C为图4A所示实施例中光斑分布的示意图。4C is a schematic diagram of the light spot distribution in the embodiment shown in FIG. 4A.
图5A为基于本发明提出的基于多个光纤输出激光模块的匀光光学系统方案的第二种实施方案的结构示意图。FIG. 5A is a schematic structural diagram of a second embodiment of a homogenized optical system solution based on multiple optical fiber output laser modules proposed by the present invention.
图5B为图5A所示实施例中光纤端面分布的示意图。Fig. 5B is a schematic diagram of the end face distribution of the optical fiber in the embodiment shown in Fig. 5A.
图5C为图5A所示实施例中光斑分布的示意图。FIG. 5C is a schematic diagram of light spot distribution in the embodiment shown in FIG. 5A.
图6A为基于本发明提出的基于多个光纤输出激光模块的匀光光学系统方案的第三种实施方案的结构示意图。FIG. 6A is a schematic structural diagram of a third embodiment of a homogenized optical system solution based on multiple optical fiber output laser modules proposed by the present invention.
图6B为图6A所示实施例中光纤端面分布的示意图。Fig. 6B is a schematic diagram of the fiber end face distribution in the embodiment shown in Fig. 6A.
图6C为图6A所示实施例中成像透镜成像的光斑分布的示意图。FIG. 6C is a schematic diagram of the light spot distribution of the imaging lens in the embodiment shown in FIG. 6A.
图7为利用本发明提出的基于多个光纤输出激光模块的匀光光学系统的激光加工头的结构示意图。Fig. 7 is a schematic structural diagram of a laser processing head using a homogenized optical system based on multiple optical fiber output laser modules proposed by the present invention.
其中:M 1、M 2、…、M N分别表示光纤输出模块;OB和I分别表示光纤输出激光模块的输出光纤端面所在的物面和其对应的共轭像面;M 11、…、M 1M分别表示一对多点成像系统对光纤输出激光模块输出光纤端面成的多个像;BS表示光学分光系统,1→MIM表示一对多点成像系统;PBS1、PBS2分别表示晶体分光器件;BS1表示光楔分光器件;RBS1和RBS2分别表示反射式分光器件;L表示成像透镜,L1表示准直透镜,L2表示聚焦透镜;GXJ表示光纤支架;1→MZJ表示一对多点成像系统支撑部件;GZK表示管状壳。 Among them: M 1 , M 2 ,..., M N respectively represent the fiber output module; OB and I respectively represent the object plane where the output fiber end face of the fiber output laser module is located and its corresponding conjugate image plane; M 11 ,..., M 1M means a pair of multi-point imaging system on the fiber output laser module output fiber end face multiple images; BS means optical splitting system, 1→MIM means a pair of multi-point imaging system; PBS1, PBS2 respectively indicate crystal beam splitter; BS1 RBS1 and RBS2 respectively represent the reflective beamsplitter; L represents the imaging lens, L1 represents the collimating lens, L2 represents the focusing lens; GXJ represents the fiber holder; 1→MZJ represents a pair of multipoint imaging system support components; GZK stands for tubular shell.
具体实施方式detailed description
下面结合附图和实施例详细说明本发明提出的基于多个光纤输出激光模块的匀光光学系统及利用该系统的激光加工头。The following describes in detail the homogenization optical system based on multiple optical fiber output laser modules and the laser processing head using the system proposed by the present invention with reference to the accompanying drawings and embodiments.
图1为本发明提出的基于多个光纤输出激光模块的匀光光学系统的原理性结构示意图,N个光纤输出模块:M 1、M 2、…、M N的输出光纤的端面按一定规律分布在物面OB上,它们发出的光由成像透镜和分光部件构成的1对M(多)点成像系统1→MIM成像在物面OB的共轭像面I上,在像面I上形成的共N×M个光纤端面的像。图中,M 11、…、M 1M分别表示一对多点成像系统1→MIM对光纤输出激光模块M1的输出光纤端面成的多个像。利用该系统,可以根据设计要求形成所需形状和均匀度的光场分布,以满足不同的加工要求。 Figure 1 is a schematic diagram of the principle structure of a homogenized optical system based on multiple optical fiber output laser modules proposed by the present invention. N optical fiber output modules: M 1 , M 2 , ..., M N output fiber end faces are distributed according to a certain law On the object plane OB, the light they emit is composed of a pair of M (multiple) point imaging system 1→MIM imaged on the conjugate image plane I of the object plane OB, which is formed on the image plane I. A total of N×M images of fiber end faces. In the figure, M 11 ,..., M 1M respectively represent a plurality of images formed by a pair of multipoint imaging system 1→MIM on the output fiber end face of the fiber output laser module M1. With this system, the light field distribution of the required shape and uniformity can be formed according to the design requirements to meet different processing requirements.
在图1所示的基于多个光纤输出激光模块的匀光光学系统中,光学分光部件和光学成像透镜各由一个或多个元件组成,其组合关系根据需要可以是各自元件组成一个整体,也可以是各自元件交互在一起,设置顺序也是根据需要灵活设置的。In the homogenizing optical system based on multiple optical fiber output laser modules shown in Figure 1, the optical splitting component and the optical imaging lens are each composed of one or more elements, and the combination relationship can be that the respective elements form a whole according to needs, or It can be that the respective components interact together, and the setting sequence is also flexibly set according to needs.
在图1所示的基于多个光纤输出激光模块的匀光光学系统中,光学分光部件可以采用偏振分光的方法实现,这种分光可以是空间平行位移分光,也可以是空间角位移分光。图2A给出了一种平行位移实现结构,是一种采用单轴晶体的平行平板晶体位移片,晶体光轴与平板晶体表面成一定的夹角,当光通过该晶片时,光束被分成正常光(O)和异常光(E),它们之间在光轴与表面法线确定的平面内形成相对横向位移,位移量由晶体的两种折射率、厚度及光轴与表面法线夹角决定。图2B给出了一种角位移实现结构,是一种采用单轴晶体的晶体楔形片,晶体光轴与楔形片的一个表面平行,当光通过该晶片时,光束被分成正常光(O)和异常光(E),由于O光和E光的折射率不同,各自光楔产生的偏转角不同,在O光和E光间产生一定的角分离。角位移量由晶体的两种折射率及楔角决定。In the homogenizing optical system based on multiple optical fiber output laser modules shown in FIG. 1, the optical splitting component can be realized by polarization splitting. This splitting can be spatial parallel displacement beam splitting or spatial angular displacement beam splitting. Figure 2A shows a parallel displacement realization structure, which is a parallel flat crystal displacement plate using uniaxial crystal. The optical axis of the crystal forms a certain angle with the surface of the flat crystal. When the light passes through the wafer, the beam is divided into normal Light (O) and abnormal light (E) form a relative lateral displacement between them in the plane determined by the optical axis and the surface normal. The displacement is determined by the two refractive indices, thicknesses and the angle between the optical axis and the surface normal of the crystal. Decided. Figure 2B shows an angular displacement realization structure. It is a crystal wedge that uses a uniaxial crystal. The optical axis of the crystal is parallel to one surface of the wedge. When light passes through the wafer, the beam is divided into normal light (O) Unlike abnormal light (E), due to the different refractive indices of O light and E light, the deflection angles of the respective wedge are different, and a certain angular separation occurs between O light and E light. The amount of angular displacement is determined by the two refractive indices of the crystal and the wedge angle.
在图1所示的基于多个光纤输出激光模块的匀光光学系统中,光学分光部件可以采用空间方法实现,即在光束的传输空间中,在传输截面的不同位置上进行空间角偏转分光。图3A给出了实现空间角偏转分光的基本元件光楔的示意图,当在光束传输截面的不同位置插入不同楔角的光楔时,就可以实现角位移分光。图3B给出了由2反射镜组实现的角分光结构,当两个反射镜间有夹角时,就实现偏转分光。In the homogenizing optical system based on multiple optical fiber output laser modules shown in FIG. 1, the optical splitting component can be realized by a spatial method, that is, in the transmission space of the beam, spatial angle deflection and splitting are performed at different positions of the transmission section. Figure 3A shows a schematic diagram of a basic element wedge that realizes spatial angular deflection beam splitting. When wedges with different wedge angles are inserted at different positions of the beam transmission section, angular displacement beam splitting can be realized. Figure 3B shows the angular beam splitting structure realized by the two mirror groups. When there is an angle between the two mirrors, the deflection beam splitting is realized.
在图1所示的基于多个光纤输出激光模块的匀光光学系统中,光纤输出模块的输出光纤的芯的截面的形状可以多种多样,可以是常用的圆形,也可以是矩形的。In the homogenized optical system based on multiple fiber output laser modules shown in FIG. 1, the cross-sectional shape of the core of the output fiber of the fiber output module can be various, and can be a commonly used circular shape or a rectangular shape.
在图1所示的基于多个光纤输出激光模块的匀光光学系统中,光学分光部件可以在一维方向上形成相对位移的分光;也可以在两个正交的方向上同时形成相对位移的分光。In the homogenization optical system based on multiple optical fiber output laser modules shown in Figure 1, the optical beam splitter can form a relative displacement beam splitter in one-dimensional direction; it can also form a relative displacement beam splitter in two orthogonal directions at the same time. Splitting.
在图1所示的基于多个光纤输出激光模块的匀光光学系统中,诸光纤输出激光模块可以 独立控制,激光模块可以是连续光激光器,也可以是准连续光激光器,还可以是脉冲光激光器,即发光的相对持续时间可以是相同的,也可以是不同的;各光纤输出激光模块发光的相对持续时间内的功率可以是相同的,也可以是不同的;诸光纤输出激光模块发光的相对持续时间可以是同步的,也可以是不同步的;形成光斑形状随时间变化的光斑结构,满足不同激光加工对光斑的要求。In the homogenization optical system based on multiple fiber output laser modules shown in Figure 1, the fiber output laser modules can be independently controlled. The laser modules can be continuous light lasers, quasi continuous light lasers, or pulsed light. Lasers, that is, the relative duration of light emission can be the same or different; the relative duration of light emission of each fiber output laser module can be the same or different; the light emission of the fiber output laser modules The relative duration can be synchronized or non-synchronized; a spot structure whose spot shape changes with time is formed to meet the requirements of different laser processing spots.
图4A为基于本发明提出的基于多个光纤输出激光模块的匀光光学系统的一个实施例,多个光纤输出模块的输出光纤的端面分布在物面OB上,某个输出光纤端面上A点发出的光通过偏振分光器件PBS1后被分成正常光O光和异常光E光,这两束光相对横向位移,相当于形成了A和A’两个像,通过成像透镜后在共轭像面上形成2个像点Ai1和Ai2。显然,该系统将多个光纤输出模块的输出光纤的端面在像面上形成了2组相互横向错位的像,他们共同组成了像面上的光分布。Figure 4A is an embodiment of a homogenizing optical system based on multiple fiber output laser modules proposed in the present invention. The end faces of the output fibers of the multiple fiber output modules are distributed on the object plane OB, and point A on the end face of a certain output fiber The emitted light is divided into normal light O light and abnormal light E light after passing through the polarization beam splitting device PBS1. The two beams of light are relatively laterally displaced, which is equivalent to forming two images A and A'. After passing through the imaging lens, they are on the conjugate image plane. Two image points Ai1 and Ai2 are formed on it. Obviously, the system forms two sets of images that are laterally displaced from each other on the image plane with the end faces of the output fibers of multiple fiber output modules, and they together form the light distribution on the image plane.
在该实施例中:光纤输出模块的输出光纤芯的横截面为方形,所有端面按一个方向以2倍方形光纤芯的边长间距排成直线,如图4B所示。偏振分光器件PBS1是一平行平板晶体位移片,将光纤输出模块的输出光纤端面分成O光和E光两组相对横向位移的像,其横向位移量等于方形光纤芯的边长,且位移方向与光纤排列方向相同,通过透镜后,这两种像形成图4C所示的条形均匀光分布。这种光分布可被应用于激光热处理和激光熔覆加工中。In this embodiment: the cross-section of the output fiber core of the fiber output module is square, and all end faces are arranged in a straight line with a distance of twice the side length of the square fiber core in one direction, as shown in FIG. 4B. The polarization beam splitter PBS1 is a parallel plate crystal displacement plate, which divides the output fiber end face of the fiber output module into two groups of relative lateral displacement images of O light and E light. The lateral displacement is equal to the side length of the square fiber core, and the displacement direction is The optical fibers are arranged in the same direction. After passing through the lens, the two images form a strip-shaped uniform light distribution as shown in Fig. 4C. This light distribution can be used in laser heat treatment and laser cladding processing.
在我们的一个实际设计中,共采用20根光纤,输出光纤的方形芯的边长为100微米,光纤排列间距为200微米,形成了一个长宽比40:1的条状光斑,采用不同放大倍率的镜头,就可以形成不同尺寸的激光光斑。In one of our actual designs, a total of 20 fibers are used, the side length of the square core of the output fiber is 100 microns, and the fiber arrangement pitch is 200 microns, forming a stripe spot with an aspect ratio of 40:1, using different amplification The magnification lens can form laser spots of different sizes.
在我们的一个实际设计中,上述20根光纤构成的激光系统中的最边缘的两根光纤的输出功率比中间其它光纤的输出功率大20%,该肩部升高的条状能量分布结构,可以补偿边缘热导对激光加工的影响,提供更均匀的处理效果。In one of our actual designs, the output power of the two outermost fibers in the laser system composed of the above 20 fibers is 20% greater than the output power of the other fibers in the middle. This strip-shaped energy distribution structure with raised shoulders, It can compensate for the influence of edge thermal conductivity on laser processing and provide a more uniform processing effect.
在我们的一个实际设计中,上述20根光纤构成的激光系统中各模块的输出功率独立控制,可以对宽度变化的区域进行激光加工。In one of our actual designs, the output power of each module in the laser system composed of the above 20 optical fibers is independently controlled, and the area with varying width can be laser processed.
图5A为基于本发明提出的基于多个光纤输出激光模块的匀光光学系统的第二个实施例,多个光纤输出模块的输出光纤的端面分布在物面OB上,某个输出光纤端面上A点发出的光通过偏振分光器件PBS2后被分成正常光O光和异常光E光,这两束光相对角向位移,相当于形成了A’和A”两个像,在通过成像透镜后,被设置在光传输截面上且占有50%截面的BS1进一步在共轭像面I上形成4个像点AO1、AO2、AE1和AE2。显然,该系统将多个光纤输出模块的输出光纤的端面在像面上形成了4组相互横向错位的像,他们共同组成了像面上的光分布。5A is a second embodiment of a homogenizing optical system based on multiple fiber output laser modules proposed in the present invention. The end faces of the output fibers of the multiple fiber output modules are distributed on the object plane OB, and an output fiber end face The light emitted from point A is divided into normal light O light and abnormal light E light after passing through the polarization beam splitting device PBS2. The two beams are relatively angularly displaced, which is equivalent to forming two images of A'and A”. After passing through the imaging lens BS1, which is set on the optical transmission cross-section and occupies 50% of the cross-section, further forms 4 image points AO1, AO2, AE1 and AE2 on the conjugate image plane I. Obviously, the system outputs multiple optical fibers to the output fiber of the module The end surface forms 4 sets of images that are laterally displaced from each other on the image surface. Together, they form the light distribution on the image surface.
在图5A所示的实施例中:光纤输出模块的输出光纤芯的横截面为圆形,直径为125微米,所有端面按一个方向按间距125微米排成直线,如图5B所示。偏振分光器件PBS1是一晶体楔形片,它将光纤端面形成O光和E光两个由一定角位移的像,像的间距由位移角和PBS2到物面的距离决定,在本实施例中,该间距为光纤间距的四分之一,即31.25微米,其位移方向与光纤端面排列方向相同;通过透镜后,光束又被分光镜BS1分成两组,该分光镜为一光楔,占据光束截面一半的区域,在像面上形成两组有一定位移的像,这两组像之间的距离,由该光楔的偏转角和光楔到像面的距离决定,在本实施例中,位移量为62.5微米乘以成像系统的放大倍率,且位移方向与光纤端面分布方向相同,这就在共轭像面上形成了4组光纤端面的像,他们叠加后形成图5C所示的条形均匀光分布。这种光分布可以被应用于激光热处理和激光熔覆加工中。In the embodiment shown in FIG. 5A: the cross-section of the output fiber core of the fiber output module is circular with a diameter of 125 microns, and all end faces are arranged in a straight line at a distance of 125 microns in one direction, as shown in FIG. 5B. The polarization beam splitter PBS1 is a crystal wedge, which forms two images of O light and E light with a certain angular displacement on the end face of the fiber. The distance between the images is determined by the displacement angle and the distance from PBS2 to the object surface. In this embodiment, The distance is a quarter of the distance between the optical fibers, that is, 31.25 microns, and its displacement direction is the same as the arrangement direction of the fiber end faces; after passing through the lens, the beam is divided into two groups by the beam splitter BS1, which is a wedge, occupying the beam section Half of the area, two sets of images with a certain displacement are formed on the image plane. The distance between these two sets of images is determined by the deflection angle of the wedge and the distance from the wedge to the image plane. In this embodiment, the displacement It is 62.5 microns multiplied by the magnification of the imaging system, and the displacement direction is the same as the distribution direction of the fiber end face, which forms 4 sets of images of the fiber end face on the conjugate image plane, and they are superimposed to form the uniform stripe shown in Figure 5C Light distribution. This light distribution can be used in laser heat treatment and laser cladding processing.
图6A为基于本发明提出的基于多个光纤输出激光模块的匀光光学系统的第三个实施例,成像透镜由准直透镜L1和聚焦透镜L2组成,多个光纤输出模块的输出光纤的端面分布在准直透镜的前焦面OB上。某个输出光纤端面上A点发出的光通过偏振分光器件PBS1后被分 成正常光O光和异常光E光,这两束光相对角向位移,相当于形成了A’和A”两个像,这两个像在垂直纸面的方向上分离。在通过准直透镜后,被设置在光传输截面上且各占有50%截面的具有一定夹角的反射镜RBS1和RBS2在空间分成两束有一定夹角的光,他们经过聚焦透镜后,在聚焦透镜后焦面I上形成4个像点AO1、AO2、AE1和AE2。反射镜RBS1和RBS2在平行于纸面方向上形成像的分离。显然,该系统的分光系统在两个垂直的方向分光,将多个光纤输出模块的输出光纤的端面在像面上形成了4组相互横向错位的像,他们共同组成了像面上的光分布。6A is a third embodiment of a homogenizing optical system based on multiple fiber output laser modules proposed in the present invention. The imaging lens is composed of a collimator lens L1 and a focusing lens L2. The end faces of the output fibers of the multiple fiber output modules Distributed on the front focal plane OB of the collimating lens. The light emitted from point A on the end face of a certain output fiber is divided into normal light O light and abnormal light E light after passing through the polarization beam splitter PBS1. The relative angular displacement of these two beams is equivalent to the formation of two images A'and A”. , The two images are separated in the direction perpendicular to the paper surface. After passing through the collimating lens, the mirrors RBS1 and RBS2 with a certain angle that are set on the light transmission section and occupy 50% of the section are divided into two in space. Light with a certain angle, after they pass through the focusing lens, 4 image points AO1, AO2, AE1 and AE2 are formed on the back focal plane I of the focusing lens. The mirrors RBS1 and RBS2 form image separation in the direction parallel to the paper surface. Obviously, the light splitting system of this system splits light in two vertical directions, and the end faces of the output fibers of multiple fiber output modules form 4 sets of images that are laterally displaced on the image plane, and they together form the light on the image plane. distributed.
在图6A所示的实施例中:光纤输出模块的输出光纤芯的横截面为方形,6根光纤端面在物面呈两维分别,如图6B所示,其中4根光纤两维分布排成方形,间距为光纤芯的横截面的边长,另外两根在上4根光纤下方3倍光纤芯边长的地方,它们之间为3倍芯边长。偏振分光器件PBS1是一晶体楔形片,它将光纤端面形成O光和E光两个由一定角位移的像,像的间距由位移角和PBS1到物面的距离决定,在本实施例中,该间距与方形光纤的芯的边长相同,其位移方向与方形光纤的芯的一个边平行;通过透镜后,光束又被设置在光传输截面上且各占有50%截面的具有一定夹角的反射镜RBS1和RBS2进一步在共轭像面I上分成两组,在像面上形成两组有一定位移的像,这两组像之间的距离,由反射镜形成的相对偏转角和它们到像面的距离决定,在本实施例中,位移量为方形光纤芯的边长,且位移方向与PBS1产生的方向垂直,这就在共轭像面上形成了4组光纤端面的像,他们叠加后形成图6C所示的分布在3个区域的均匀光分布。这种光分布被广泛应用于激光焊接加工中。In the embodiment shown in FIG. 6A: the cross section of the output fiber core of the fiber output module is square, and the end faces of the 6 optical fibers are two-dimensionally separated on the object plane, as shown in FIG. 6B, in which the 4 fibers are arranged in two-dimensional distribution. Square, the spacing is the side length of the cross-section of the fiber core, the other two are 3 times the length of the core side of the fiber under the upper 4 fibers, and the length between them is 3 times the length of the core side. The polarization beam splitting device PBS1 is a crystal wedge, which forms two images of O light and E light with a certain angular displacement on the end face of the fiber. The distance between the images is determined by the displacement angle and the distance from PBS1 to the object surface. In this embodiment, The distance is the same as the side length of the core of the square fiber, and its displacement direction is parallel to one side of the core of the square fiber; after passing through the lens, the beam is set on the light transmission section and each occupying 50% of the cross section has a certain angle. The mirrors RBS1 and RBS2 are further divided into two groups on the conjugate image plane I. Two groups of images with a certain displacement are formed on the image plane. The distance between the two groups of images, the relative deflection angle formed by the mirror and their The distance of the image plane is determined. In this embodiment, the displacement is the side length of the square fiber core, and the displacement direction is perpendicular to the direction generated by PBS1. This forms 4 sets of images of the fiber end faces on the conjugate image plane. After being superimposed, the uniform light distribution in the three regions as shown in FIG. 6C is formed. This light distribution is widely used in laser welding processing.
在我们的一个实际设计中,上述激光系统中各模块的输出功率独立控制,可以通过控制主光斑和两个辅助光斑的相对功率,满足不同工艺条件下激光加工的要求。所用激光模块可以是连续光模块,也可以是脉冲光模块。In one of our actual designs, the output power of each module in the above-mentioned laser system is independently controlled. The relative power of the main spot and the two auxiliary spots can be controlled to meet the requirements of laser processing under different process conditions. The laser module used can be a continuous optical module or a pulsed optical module.
图7为利用本发明提出的基于多个光纤输出激光模块的匀光光学系统的激光加工头的结 构示意图。N个光纤输出模块:M 1、M 2、…、M N的输出光纤的端面按一定规律固定在光纤支架GXJ上;光纤支架GXJ被固定在管状壳体GZK的一端;由成像透镜和分光镜组成的一对多点成像系统1→MIM被固定在一对多点成像系统支撑部件1→MZJ上;一对多点成像系统支撑部件1→MZJ被设置在管状壳体GZK内部。固定在光纤支架上的光纤输出激光模块的输出光纤端面发出的光通过固定在一对多点成像系统支撑部件1→MZJ上的一对多点成像系统1→MIM后从管状壳体GZK的另一端输出,所产生的匀光激光光斑用于激光加工。 Fig. 7 is a schematic structural diagram of a laser processing head using a homogenized optical system based on multiple optical fiber output laser modules proposed by the present invention. N fiber output modules: the end faces of the output fibers of M 1 , M 2 , ..., M N are fixed on the fiber holder GXJ according to a certain rule; the fiber holder GXJ is fixed on one end of the tubular housing GZK; composed of imaging lens and beam splitter The composed pair of multipoint imaging system 1→MIM is fixed on a pair of multipoint imaging system support member 1→MZJ; a pair of multipoint imaging system support member 1→MZJ is set inside the tubular housing GZK. The light emitted from the end face of the output optical fiber of the optical fiber output laser module fixed on the optical fiber holder passes through a pair of multipoint imaging system 1 fixed on a pair of multipoint imaging system support parts 1→MZJ→MIM after another from the tubular shell GZK One end output, the uniform laser spot produced is used for laser processing.
本发明提出的基于多个光纤输出激光模块的匀光光学系统,采用多个小功率激光模块作为光源,避免了采用大功率激光器中需要的激光合束问题,降低了系统成本,系统的可靠性更高。此外,采用传统成像和分光部件构造匀光系统,进一步降低了系统的成本。最后,可以对光斑结构进行实时操控,灵活适应不同的激光加工工艺要求。利用该光学系统设计的激光加工头,可以被用在激光热处理、激光熔覆和激光焊接等领域中。The homogenized optical system based on multiple optical fiber output laser modules proposed in the present invention uses multiple low-power laser modules as light sources, avoids the laser beam combining problem required in the use of high-power lasers, reduces system costs, and reduces system reliability. higher. In addition, the use of traditional imaging and spectroscopic components to construct a homogenization system further reduces the cost of the system. Finally, the spot structure can be manipulated in real time to flexibly adapt to the requirements of different laser processing processes. The laser processing head designed with this optical system can be used in the fields of laser heat treatment, laser cladding and laser welding.

Claims (9)

  1. 一种基于多个光纤输出激光模块的匀光光学系统,其特征在于,包括多个光纤输出激光模块、成像透镜和分光部件;所述多个光纤输出激光模块的光纤输出端面按一定规律在一个平面中排列;所述成像透镜包括至少一片透镜,位于激光模块的光纤输出端面发光方向的输出光路上;所述分光部件包括至少一个空间角度或位置分光器件,分光器件各自独立的或者位于成像透镜之前,或者位于成像透镜之后,或者位于成像透镜的诸透镜之间;所述成像透镜和分光部件构成一个一对多点的成像系统,使激光模块输出光纤端面在成像透镜的像面上形成多组像,这些像组合形成均匀的光斑。A homogenizing optical system based on multiple optical fiber output laser modules, which is characterized in that it includes multiple optical fiber output laser modules, imaging lenses and light splitting components; the optical fiber output end faces of the multiple optical fiber output laser modules are arranged in one according to a certain rule. Arranged in a plane; the imaging lens includes at least one lens located on the output light path of the light emitting direction of the fiber output end face of the laser module; the splitting component includes at least one spatial angle or position splitting device, the splitting device is independent or located in the imaging lens Before, or behind the imaging lens, or between the lenses of the imaging lens; the imaging lens and the spectroscopic component constitute a one-to-multipoint imaging system, so that the end face of the laser module output fiber is formed on the image surface of the imaging lens. Group images, these images combine to form a uniform spot.
  2. 根据权利要求1所述的基于多个光纤输出激光模块的匀光光学系统,其特征是:所述分光部件为偏振分光器件,或者为空间波面分光器件,或者是偏振分光器件和空间波面分光器件的组合。The homogenizing optical system based on multiple optical fiber output laser modules according to claim 1, wherein the light splitting component is a polarization splitting device, or a spatial wave surface splitting device, or a polarization splitting device and a space wave surface splitting device The combination.
  3. 根据权利要求2所述的基于多个光纤输出激光模块的匀光光学系统,其特征是:所述偏振分光器件是将O光(正常光)和E光(异常光)分束并产生相对位移的平行平板晶体位移片,或者是将O光(正常光)和E光(异常光)分束并产生相对角位移的晶体楔形片。The homogenizing optical system based on multiple optical fiber output laser modules according to claim 2, characterized in that: the polarization beam splitting device splits O light (normal light) and E light (abnormal light) and generates relative displacement Parallel plate crystal displacement plate, or a wedge-shaped crystal plate that splits O light (normal light) and E light (abnormal light) and produces relative angular displacement.
  4. 根据权利要求2所述的基于多个光纤输出激光模块的匀光光学系统,其特征是:所述空间波面分光器件是产生光束相对偏转的空间排列的光楔,或者是产生光束相对偏转的空间排列的多个反射镜。The homogenizing optical system based on multiple optical fiber output laser modules according to claim 2, wherein the spatial wavefront beam splitting device is a spatially arranged optical wedge that generates relative deflection of light beams, or a space that generates relative deflection of light beams. Multiple mirrors arranged.
  5. 根据权利要求1所述的基于多个光纤输出激光模块的匀光光学系统,其特征是:所述多个光纤输出模块的输出光纤纤芯截面是圆形的,或者是矩形的。The homogenizing optical system based on multiple optical fiber output laser modules according to claim 1, wherein the cross section of the output optical fiber cores of the multiple optical fiber output modules is circular or rectangular.
  6. 根据权利要求1所述的基于多个光纤输出激光模块的匀光光学系统,其特征是:所述分光部件在一维方向上形成相对位移的分光。The homogenizing optical system based on multiple optical fiber output laser modules according to claim 1, wherein the light splitting component forms a relative displacement light splitting in a one-dimensional direction.
  7. 根据权利要求1所述的基于多个光纤输出激光模块的匀光光学系统,其特征是:所述分光部件在两个正交的方向上同时形成相对位移的分光。The homogenizing optical system based on multiple optical fiber output laser modules according to claim 1, characterized in that: the beam splitting component simultaneously forms a relative displacement beam splitting in two orthogonal directions.
  8. 根据权利要求1所述的基于多个光纤输出激光模块的匀光光学系统,其特征是:所述诸光纤输出激光模块发光的相对持续时间是相同的,或者是不同的;各光纤输出激光模块发光的相对持续时间内的功率是相同的,或者是不同的;诸光纤输出激光模块发光的相对持续时间是同步的,或者是不同步的。The homogenizing optical system based on multiple optical fiber output laser modules according to claim 1, wherein the relative duration of light emission of the optical fiber output laser modules is the same or different; each optical fiber output laser module The power in the relative duration of light emission is the same or different; the relative duration of light emission of the fiber output laser modules is synchronized or asynchronous.
  9. 一种利用权利要求1所述匀光光学系统的激光加工头,其特征是:包括多个光纤输出激光模块、成像透镜和分光部件组成的一对多点光学成像系统、光纤支架、一对多点光学成像系统支撑部件及管状壳体;所述多个光纤输出激光模块的输出光纤固定在光纤支架上并使其输出端面在一个平面内按一定规律排列;所述一对多点成像系统固定在所述一对多点成像系统支撑部件上;所述光纤支架固定在所述管状壳体内部靠近一端,并使光纤输出端面面向所述管状壳体的另一端;所述一对多点成像系统支撑部件设置在所述管状壳体的内部;固定在所述光纤支架上的光纤输出激光模块的输出光纤端面发出的光通过固定在一对多点成像系统支撑部件上的一对多点成像系统后从所述管状壳体的另一端输出产生的匀光激光光斑。A laser processing head using the homogenizing optical system of claim 1, characterized in that it includes a pair of multi-point optical imaging systems composed of a plurality of fiber output laser modules, imaging lenses and light splitting components, fiber holders, one-to-many Point optical imaging system support component and tubular housing; the output fibers of the multiple optical fiber output laser modules are fixed on the fiber support and the output end faces are arranged in a plane according to a certain rule; the pair of multipoint imaging systems are fixed On the pair of multi-point imaging system support components; the optical fiber holder is fixed inside the tubular housing near one end, and the optical fiber output end face faces the other end of the tubular housing; the pair of multi-point imaging The system supporting part is arranged inside the tubular housing; the light emitted from the output fiber end face of the fiber output laser module fixed on the optical fiber holder passes through a pair of multipoint imaging fixed on a pair of multipoint imaging system supporting parts The system then outputs the uniform laser spot generated from the other end of the tubular shell.
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