WO2021027657A1 - Système d'homogénéisation optique utilisant de multiples modules laser de sortie de fibres, et tête d'usinage - Google Patents

Système d'homogénéisation optique utilisant de multiples modules laser de sortie de fibres, et tête d'usinage Download PDF

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WO2021027657A1
WO2021027657A1 PCT/CN2020/107129 CN2020107129W WO2021027657A1 WO 2021027657 A1 WO2021027657 A1 WO 2021027657A1 CN 2020107129 W CN2020107129 W CN 2020107129W WO 2021027657 A1 WO2021027657 A1 WO 2021027657A1
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light
fiber output
optical fiber
laser modules
output laser
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PCT/CN2020/107129
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Chinese (zh)
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方强
方笑尘
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方强
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0673—Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

Definitions

  • the invention belongs to the field of laser technology, and relates to a laser processing optical system and a laser processing head using the optical system, in particular to a homogenized optical system and processing head based on multiple optical fiber output laser modules, which can be widely used in the laser industry in.
  • spot homogenization laser systems can be divided into two categories. One is the laser system that directly homogenizes the light output by the semiconductor laser array laser, and the other is the laser system that first couples the light output from the laser into the optical fiber, and then A laser system that homogenizes the laser spot with an optical system at the fiber output end.
  • the second type of system uses optical fiber for light transmission. At this time, the laser and the laser processing head are separated and connected by optical fiber.
  • the homogenization system processing head is usually much smaller than the laser, so it can provide greater convenience. It is more popular with users.
  • a laser is used to perform beam shaping and homogenization through an optical system.
  • high-power lasers are composed of multiple small laser modules that are combined by a beam combiner. Therefore, the actual implementation path of the current homogenized laser processing system is: 1. Using low-power laser modules by photosynthesis The beamer constitutes a high-power laser output by the optical fiber; 2. The laser output from the optical fiber is shaped and homogenized through the optical system.
  • the high-power beam combiner is a very difficult and very expensive device to manufacture, and its reliability is also low, because the greater the power, the more difficult it is to deal with the local loss of light, and the device is easy to burn.
  • the unit power price of a power-emitting laser is usually about twice the unit power price of the low-power module that composes it.
  • the homogenized optical system achieves spot shaping and homogenization by segmenting and recombining the wavefront of the Gaussian beam of the laser. These methods either have large light energy loss or low spot uniformity.
  • Current commercial laser systems usually use microlens arrays and binary optics for homogenization, but it is difficult to manufacture microlens arrays and binary optics that can withstand high power and are expensive.
  • a laser system is designed, its spot structure is determined. The spot distribution area cannot be changed, and the optical power distribution in the spot distribution area cannot be changed, which makes it difficult to adapt to the ever-changing laser processing requirements in practical applications.
  • the purpose of the present invention is to provide a homogenization optical system and processing head based on multiple optical fiber output laser modules.
  • the technical route is to use multiple low-power laser modules. , Shaping and homogenization are performed directly through the optical system, avoiding the use of high-power lasers, thus avoiding the problems of beam combiners in the prior art, reducing costs and improving reliability.
  • the technical solution provided by the present invention adopts conventional optical elements, avoids the use of expensive special optical elements, and can further reduce the cost of the system and improve the uniformity effect.
  • the spot structure can be controlled in real time, which brings great flexibility.
  • a homogenizing optical system based on multiple optical fiber output laser modules which is characterized in that it includes multiple optical fiber output laser modules, imaging lenses and light splitting components; the optical fiber output end faces of the multiple optical fiber output laser modules are arranged in one according to a certain rule.
  • the imaging lens includes at least one lens located on the output optical path of the light emitting direction of the fiber output end face of the laser module;
  • the splitting component includes at least one spatial angle or position splitting device, and these splitting devices are independent or located in the imaging Before the lens, or behind the imaging lens, or between the lenses of the imaging lens;
  • the imaging lens and the beam splitter constitute a one-to-multipoint imaging system, so that the end face of the laser module output fiber forms a multi-point image on the image surface of the imaging lens. Group images, these images combine to form a uniform spot.
  • the light splitting component is a polarization light splitting device, or a spatial wave surface light splitting device, or a combination of a polarization light splitting device and a space wave surface light splitting device.
  • the polarization splitting device is a parallel flat crystal displacement plate that splits O light (normal light) and E light (abnormal light) and produces relative displacement, or separates O light (normal light) and E light (abnormal light). Beam and produce a relative angular displacement of the crystal wedge.
  • the spatial wavefront beam splitting device is a spatially arranged optical wedge that generates relative deflection of light beams, or a plurality of spatially arranged mirrors that generate relative deflection of light beams.
  • the cross-sections of the output fiber cores of the plurality of fiber output modules are circular or rectangular.
  • the light splitting component forms a relative displacement light splitting in a one-dimensional direction.
  • the optical beam splitting component simultaneously forms a relative displacement beam splitting in two orthogonal directions.
  • the relative duration of light emission of the fiber output laser modules is the same or different; the relative duration of light emission power of each fiber output laser module is the same or different; the light emission of the fiber output laser modules
  • the relative duration is synchronous or asynchronous; a spot structure whose spot shape changes with time is formed to meet the requirements of different laser processing spots.
  • a laser processing head of a homogenized optical system includes a pair of multipoint optical imaging systems composed of a plurality of fiber output laser modules, imaging lenses, and spectroscopic components, a fiber holder, a pair of multipoint optical imaging system support components, and Tubular housing; the output fibers of the multiple optical fiber output laser modules are fixed on the fiber support and the output end faces are arranged in a certain pattern in a plane; the pair of multipoint imaging systems are fixed on the one pair of multipoints The imaging system support member; the optical fiber holder is fixed inside the tubular housing near one end, and the optical fiber output end face faces the other end of the tubular housing; the pair of multipoint imaging system support members are arranged on the The inside of the tubular housing; the light emitted from the end face of the output fiber of the optical fiber output laser module fixed on the optical fiber holder passes through a pair of multipoint imaging systems fixed on a pair of multipoint imaging system support members from the tubular housing The other end of the body outputs the uniform laser spot.
  • the present invention avoids the laser beam combining problem of the high-power fiber output laser system by using a low-power fiber output laser module, greatly reduces the cost of the laser light source, and Improve the reliability of the system; at the same time, the laser homogenization system of the present invention adopts common optical elements, which avoids the use of expensive special optical elements, and further reduces the system cost; third, the homogenization effect is improved; fourth, It can provide a light spot that changes with time, providing flexibility for laser processing.
  • FIG. 1 is a schematic diagram of the principle structure of a homogenized optical system based on multiple optical fiber output laser modules proposed by the present invention.
  • FIG. 2A is a schematic diagram of the structure of the first spectroscopic component proposed by the present invention, which is a parallel flat crystal displacement plate that generates relative displacement.
  • Fig. 2B is a schematic structural diagram of the second type of light splitting component proposed by the present invention, which is a crystal wedge-shaped piece that produces relative angular displacement.
  • FIG. 3A is a schematic diagram of the structure of the third type of light splitting component proposed by the present invention, which is an optical wedge that generates relative deflection of the light beam.
  • FIG. 3B is a schematic structural diagram of the fourth type of light splitting component proposed by the present invention, which is a plurality of spatially arranged mirrors that generate relative deflection of light beams.
  • FIG. 4A is a schematic structural diagram of an embodiment of a uniform light optical system solution based on multiple optical fiber output laser modules proposed by the present invention.
  • Fig. 4B is a schematic diagram of the fiber end face distribution in the embodiment shown in Fig. 4A.
  • FIG. 4C is a schematic diagram of the light spot distribution in the embodiment shown in FIG. 4A.
  • FIG. 5A is a schematic structural diagram of a second embodiment of a homogenized optical system solution based on multiple optical fiber output laser modules proposed by the present invention.
  • Fig. 5B is a schematic diagram of the end face distribution of the optical fiber in the embodiment shown in Fig. 5A.
  • FIG. 5C is a schematic diagram of light spot distribution in the embodiment shown in FIG. 5A.
  • FIG. 6A is a schematic structural diagram of a third embodiment of a homogenized optical system solution based on multiple optical fiber output laser modules proposed by the present invention.
  • Fig. 6B is a schematic diagram of the fiber end face distribution in the embodiment shown in Fig. 6A.
  • FIG. 6C is a schematic diagram of the light spot distribution of the imaging lens in the embodiment shown in FIG. 6A.
  • Fig. 7 is a schematic structural diagram of a laser processing head using a homogenized optical system based on multiple optical fiber output laser modules proposed by the present invention.
  • M 1 , M 2 ,..., M N respectively represent the fiber output module
  • OB and I respectively represent the object plane where the output fiber end face of the fiber output laser module is located and its corresponding conjugate image plane
  • M 11 ,..., M 1M means a pair of multi-point imaging system on the fiber output laser module output fiber end face multiple images
  • BS means optical splitting system, 1 ⁇ MIM means a pair of multi-point imaging system
  • PBS1, PBS2 respectively indicate crystal beam splitter
  • BS1 RBS1 and RBS2 respectively represent the reflective beamsplitter
  • L represents the imaging lens
  • L1 represents the collimating lens
  • L2 represents the focusing lens
  • GXJ represents the fiber holder
  • 1 ⁇ MZJ represents a pair of multipoint imaging system support components
  • GZK stands for tubular shell.
  • FIG. 1 is a schematic diagram of the principle structure of a homogenized optical system based on multiple optical fiber output laser modules proposed by the present invention.
  • N optical fiber output modules M 1 , M 2 , ..., M N output fiber end faces are distributed according to a certain law
  • the object plane OB the light they emit is composed of a pair of M (multiple) point imaging system 1 ⁇ MIM imaged on the conjugate image plane I of the object plane OB, which is formed on the image plane I.
  • M 11 ,..., M 1M respectively represent a plurality of images formed by a pair of multipoint imaging system 1 ⁇ MIM on the output fiber end face of the fiber output laser module M1.
  • the light field distribution of the required shape and uniformity can be formed according to the design requirements to meet different processing requirements.
  • the optical splitting component and the optical imaging lens are each composed of one or more elements, and the combination relationship can be that the respective elements form a whole according to needs, or It can be that the respective components interact together, and the setting sequence is also flexibly set according to needs.
  • the optical splitting component can be realized by polarization splitting.
  • This splitting can be spatial parallel displacement beam splitting or spatial angular displacement beam splitting.
  • Figure 2A shows a parallel displacement realization structure, which is a parallel flat crystal displacement plate using uniaxial crystal.
  • the optical axis of the crystal forms a certain angle with the surface of the flat crystal.
  • the beam is divided into normal Light (O) and abnormal light (E) form a relative lateral displacement between them in the plane determined by the optical axis and the surface normal.
  • the displacement is determined by the two refractive indices, thicknesses and the angle between the optical axis and the surface normal of the crystal. Decided.
  • Figure 2B shows an angular displacement realization structure. It is a crystal wedge that uses a uniaxial crystal. The optical axis of the crystal is parallel to one surface of the wedge.
  • O normal light
  • E abnormal light
  • the amount of angular displacement is determined by the two refractive indices of the crystal and the wedge angle.
  • the optical splitting component can be realized by a spatial method, that is, in the transmission space of the beam, spatial angle deflection and splitting are performed at different positions of the transmission section.
  • Figure 3A shows a schematic diagram of a basic element wedge that realizes spatial angular deflection beam splitting. When wedges with different wedge angles are inserted at different positions of the beam transmission section, angular displacement beam splitting can be realized.
  • Figure 3B shows the angular beam splitting structure realized by the two mirror groups. When there is an angle between the two mirrors, the deflection beam splitting is realized.
  • the cross-sectional shape of the core of the output fiber of the fiber output module can be various, and can be a commonly used circular shape or a rectangular shape.
  • the optical beam splitter can form a relative displacement beam splitter in one-dimensional direction; it can also form a relative displacement beam splitter in two orthogonal directions at the same time. Splitting.
  • the fiber output laser modules can be independently controlled.
  • the laser modules can be continuous light lasers, quasi continuous light lasers, or pulsed light.
  • Lasers, that is, the relative duration of light emission can be the same or different; the relative duration of light emission of each fiber output laser module can be the same or different; the light emission of the fiber output laser modules
  • the relative duration can be synchronized or non-synchronized; a spot structure whose spot shape changes with time is formed to meet the requirements of different laser processing spots.
  • Figure 4A is an embodiment of a homogenizing optical system based on multiple fiber output laser modules proposed in the present invention.
  • the end faces of the output fibers of the multiple fiber output modules are distributed on the object plane OB, and point A on the end face of a certain output fiber
  • the emitted light is divided into normal light O light and abnormal light E light after passing through the polarization beam splitting device PBS1.
  • the two beams of light are relatively laterally displaced, which is equivalent to forming two images A and A'. After passing through the imaging lens, they are on the conjugate image plane.
  • Two image points Ai1 and Ai2 are formed on it.
  • the system forms two sets of images that are laterally displaced from each other on the image plane with the end faces of the output fibers of multiple fiber output modules, and they together form the light distribution on the image plane.
  • the cross-section of the output fiber core of the fiber output module is square, and all end faces are arranged in a straight line with a distance of twice the side length of the square fiber core in one direction, as shown in FIG. 4B.
  • the polarization beam splitter PBS1 is a parallel plate crystal displacement plate, which divides the output fiber end face of the fiber output module into two groups of relative lateral displacement images of O light and E light.
  • the lateral displacement is equal to the side length of the square fiber core, and the displacement direction is
  • the optical fibers are arranged in the same direction. After passing through the lens, the two images form a strip-shaped uniform light distribution as shown in Fig. 4C. This light distribution can be used in laser heat treatment and laser cladding processing.
  • the side length of the square core of the output fiber is 100 microns
  • the fiber arrangement pitch is 200 microns, forming a stripe spot with an aspect ratio of 40:1, using different amplification
  • the magnification lens can form laser spots of different sizes.
  • the output power of the two outermost fibers in the laser system composed of the above 20 fibers is 20% greater than the output power of the other fibers in the middle.
  • the output power of each module in the laser system composed of the above 20 optical fibers is independently controlled, and the area with varying width can be laser processed.
  • 5A is a second embodiment of a homogenizing optical system based on multiple fiber output laser modules proposed in the present invention.
  • the end faces of the output fibers of the multiple fiber output modules are distributed on the object plane OB, and an output fiber end face
  • the light emitted from point A is divided into normal light O light and abnormal light E light after passing through the polarization beam splitting device PBS2.
  • the two beams are relatively angularly displaced, which is equivalent to forming two images of A'and A”.
  • the system outputs multiple optical fibers to the output fiber of the module
  • the end surface forms 4 sets of images that are laterally displaced from each other on the image surface. Together, they form the light distribution on the image surface.
  • the cross-section of the output fiber core of the fiber output module is circular with a diameter of 125 microns, and all end faces are arranged in a straight line at a distance of 125 microns in one direction, as shown in FIG. 5B.
  • the polarization beam splitter PBS1 is a crystal wedge, which forms two images of O light and E light with a certain angular displacement on the end face of the fiber. The distance between the images is determined by the displacement angle and the distance from PBS2 to the object surface.
  • the distance is a quarter of the distance between the optical fibers, that is, 31.25 microns, and its displacement direction is the same as the arrangement direction of the fiber end faces; after passing through the lens, the beam is divided into two groups by the beam splitter BS1, which is a wedge, occupying the beam section Half of the area, two sets of images with a certain displacement are formed on the image plane. The distance between these two sets of images is determined by the deflection angle of the wedge and the distance from the wedge to the image plane.
  • the displacement It is 62.5 microns multiplied by the magnification of the imaging system, and the displacement direction is the same as the distribution direction of the fiber end face, which forms 4 sets of images of the fiber end face on the conjugate image plane, and they are superimposed to form the uniform stripe shown in Figure 5C Light distribution.
  • This light distribution can be used in laser heat treatment and laser cladding processing.
  • the imaging lens is composed of a collimator lens L1 and a focusing lens L2.
  • the end faces of the output fibers of the multiple fiber output modules Distributed on the front focal plane OB of the collimating lens.
  • the light emitted from point A on the end face of a certain output fiber is divided into normal light O light and abnormal light E light after passing through the polarization beam splitter PBS1.
  • the relative angular displacement of these two beams is equivalent to the formation of two images A'and A”. , The two images are separated in the direction perpendicular to the paper surface.
  • the mirrors RBS1 and RBS2 After passing through the collimating lens, the mirrors RBS1 and RBS2 with a certain angle that are set on the light transmission section and occupy 50% of the section are divided into two in space. Light with a certain angle, after they pass through the focusing lens, 4 image points AO1, AO2, AE1 and AE2 are formed on the back focal plane I of the focusing lens.
  • the mirrors RBS1 and RBS2 form image separation in the direction parallel to the paper surface.
  • the light splitting system of this system splits light in two vertical directions, and the end faces of the output fibers of multiple fiber output modules form 4 sets of images that are laterally displaced on the image plane, and they together form the light on the image plane. distributed.
  • the cross section of the output fiber core of the fiber output module is square, and the end faces of the 6 optical fibers are two-dimensionally separated on the object plane, as shown in FIG. 6B, in which the 4 fibers are arranged in two-dimensional distribution.
  • Square the spacing is the side length of the cross-section of the fiber core, the other two are 3 times the length of the core side of the fiber under the upper 4 fibers, and the length between them is 3 times the length of the core side.
  • the polarization beam splitting device PBS1 is a crystal wedge, which forms two images of O light and E light with a certain angular displacement on the end face of the fiber. The distance between the images is determined by the displacement angle and the distance from PBS1 to the object surface.
  • the distance is the same as the side length of the core of the square fiber, and its displacement direction is parallel to one side of the core of the square fiber; after passing through the lens, the beam is set on the light transmission section and each occupying 50% of the cross section has a certain angle.
  • the mirrors RBS1 and RBS2 are further divided into two groups on the conjugate image plane I. Two groups of images with a certain displacement are formed on the image plane. The distance between the two groups of images, the relative deflection angle formed by the mirror and their The distance of the image plane is determined.
  • the displacement is the side length of the square fiber core, and the displacement direction is perpendicular to the direction generated by PBS1. This forms 4 sets of images of the fiber end faces on the conjugate image plane. After being superimposed, the uniform light distribution in the three regions as shown in FIG. 6C is formed. This light distribution is widely used in laser welding processing.
  • the output power of each module in the above-mentioned laser system is independently controlled.
  • the relative power of the main spot and the two auxiliary spots can be controlled to meet the requirements of laser processing under different process conditions.
  • the laser module used can be a continuous optical module or a pulsed optical module.
  • Fig. 7 is a schematic structural diagram of a laser processing head using a homogenized optical system based on multiple optical fiber output laser modules proposed by the present invention.
  • N fiber output modules the end faces of the output fibers of M 1 , M 2 , ..., M N are fixed on the fiber holder GXJ according to a certain rule; the fiber holder GXJ is fixed on one end of the tubular housing GZK; composed of imaging lens and beam splitter
  • the composed pair of multipoint imaging system 1 ⁇ MIM is fixed on a pair of multipoint imaging system support member 1 ⁇ MZJ; a pair of multipoint imaging system support member 1 ⁇ MZJ is set inside the tubular housing GZK.
  • the light emitted from the end face of the output optical fiber of the optical fiber output laser module fixed on the optical fiber holder passes through a pair of multipoint imaging system 1 fixed on a pair of multipoint imaging system support parts 1 ⁇ MZJ ⁇ MIM after another from the tubular shell GZK
  • One end output, the uniform laser spot produced is used for laser processing.
  • the homogenized optical system based on multiple optical fiber output laser modules proposed in the present invention uses multiple low-power laser modules as light sources, avoids the laser beam combining problem required in the use of high-power lasers, reduces system costs, and reduces system reliability. higher.
  • the use of traditional imaging and spectroscopic components to construct a homogenization system further reduces the cost of the system.
  • the spot structure can be manipulated in real time to flexibly adapt to the requirements of different laser processing processes.
  • the laser processing head designed with this optical system can be used in the fields of laser heat treatment, laser cladding and laser welding.

Abstract

La présente invention concerne un système d'homogénéisation optique utilisant de multiples modules laser de sortie de fibres, et une tête d'usinage. Le système comprend de multiples modules laser de sortie de fibres (M1, M2, ..., MN), une lentille d'imagerie (L), et un composant diviseur optique. Les surfaces d'extrémité de sortie de fibres des multiples modules laser de sortie de fibres (M1, M2, ..., MN) sont disposées dans un plan conformément à une règle spécifique. La lentille d'imagerie (L) comprend au moins une lentille, et est située sur un trajet de lumière de sortie dans une direction d'émission de lumière des surfaces d'extrémité de sortie de fibres des modules laser (M1, M2, ..., MN). Le composant diviseur optique comprend au moins un dispositif de diviseur optique d'angle spatial ou de position, et les dispositifs de diviseur optique sont situés indépendamment devant la lentille d'imagerie (L), situés derrière la lentille d'imagerie (L), ou situés entre des lentilles de la lentille d'imagerie (L). La présente invention utilise de multiples modules laser à faible puissance, et effectue directement la mise en forme et l'homogénéisation au moyen du système optique, ce qui permet d'éviter l'utilisation de lasers à haute puissance, et en conséquence d'éviter le problème des combineurs de faisceau dans l'état de la technique, d'abaisser les coûts et d'améliorer la fiabilité.
PCT/CN2020/107129 2019-08-14 2020-08-05 Système d'homogénéisation optique utilisant de multiples modules laser de sortie de fibres, et tête d'usinage WO2021027657A1 (fr)

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