WO2021015379A1 - Awg device module for optical transceiver, and manufacturing method - Google Patents

Abstract

The present invention relates to an AWG device module for an optical transceiver, and a manufacturing method, and to an AWG device module for an optical transceiver, and a manufacturing method, the present invention providing a function of focusing an optical signal of a light-emitting surface of the AWG device module so that, by focusing the optical signal from an optical transmission means so as to output same on an optical reception means, the reduction of an active area of a photodiode is induced according to an increase in transmission capacity of the optical transceiver, and thus high performance of the photodiode can be promoted, and a return loss can be reduced so as to prevent the optical signal, reflected from a reflective layer, from being incident again on the optical transmission means.

Description

AWG device module and manufacturing method for optical transceiver

The present invention relates to an AWG device module and a manufacturing method for an optical transceiver, and more particularly, to an AWG device module and a manufacturing method for an optical transceiver that enables packaging with a photodiode and control of an optical focusing distance.

As mobile devices such as smart phones and smart pads become more common, Internet traffic continues to increase, and routers, switches, and transmission devices are increasing in high-speed and large-capacity to efficiently deliver Internet traffic. In order to increase the transmission capacity per unit time, the method of transmitting optical signals of different wavelengths to one optical fiber by multiplexing wavelength division (WDM) on one optical fiber has been mainly used since 2000, and subscriber networks are also used in one optical fiber. A technology for bidirectional transmission with different wavelengths is commercially available. In the Ethernet field, a wavelength division multiplexing method or a parallel transmission method through a ribbon fiber is being standardized. In the case of 40G Ethernet, 10G × 4 channel CWDM method is adopted as a standard for single mode fiber 10km transmission, and for 100G Ethernet, single mode fiber 10km, 25G × 4 channel LAN-WDM for 40km transmission. Adopted the standard method.

The optical transceiver is a module that performs photoelectric conversion, and the receiver of the optical transceiver converts an incident optical signal into an electrical signal and outputs it. In this case, a photodiode is an element that receives an optical signal and converts it into a current signal, and a transimpedance amplifier (TIA) is an element that amplifies the signal.

Ultra-high-speed optical transceivers having a transmission rate of 10 Gbps or higher use optical waveguides to perform the MUX/DeMUX (multiplexing/separating) function of optical wavelengths in the receiver. In this case, the optical signal transmitted through the optical waveguide is incident on the photodiode and amplified by a transimpedance amplifier (TIA).

In general, the diameter of the optical waveguide core is about 3 to 10 microns, and the diameter of the light receiving part of the photodiode is in the range of 20 to 40 microns. Therefore, in order to inject the optical signal output from the optical waveguide into the photodiode light-receiving unit, a precisely calculated and controlled structure must be designed. In this case, a structure that focuses light using an optical lens or the like is used. Usually, a structure that effectively arranges components such as an optical waveguide, lens, photodiode, and TIA is designed.

However, conventionally, there has been an example of using a convex lens shape through cladding processing, but there is a limitation in effectively focusing the spreading light due to spherical processing and a low refractive index of the upper clad.

In addition, as the transmission capacity of optical transceivers has evolved from 100G to 200G or more, the size of the photodiode's light-receiving unit has become smaller, so it is necessary to focus and minimize the optical signal on the exit surface of the AWG device module. It was necessary to minimize the distance between the surface of the device and the photodiode of about 30 ~ 100 ㎛. If it becomes larger than a certain interval, all optical signals are not incident on the light receiving part of the photodiode, resulting in optical loss and an increase in coupling loss, resulting in deterioration of the performance of the optical transceiver. .

[Prior technical literature]

[Patent Literature]

(Patent Document 1) Korean Patent Publication No. 1711691 (2017.02.23)

Accordingly, the present invention was conceived to solve the above problems, and an object of the present invention is to focus and output an optical signal from the optical transmission means to the photodiode of the optical receiving means, thereby increasing the transmission capacity of the optical transceiver. The purpose is to induce the reduction of the active area of the diode, thereby promoting the high performance of the photodiode.

In order to achieve the above object, the present invention provides an optical transmission means comprising a core through which an optical signal is transmitted, and a plate-type optical waveguide including a cladding surrounding the core; And an optical receiving means for receiving the optical signal output from the optical transmitting means and converting the optical signal into an electrical signal, wherein the optical signal is collected and focused on a surface of the clad corresponding to the optical receiving means and is an emission surface of the optical signal. Provides an AWG device module for an optical transceiver with an optical path part installed.

According to an embodiment of the present invention, the optical path portion is in the form of a concave lens, and a concave groove is formed on the surface of the clad through wet wet etching by photolithography.

According to an embodiment of the present invention, a UV curing material having a high refractive index is filled in the concave groove of the optical path part.

According to an embodiment of the present invention, the concave groove is made of any one of hemispherical, U-shaped, V-shaped, and wedge-shaped grooves.

According to an embodiment of the present invention, the hemispherical, U-shaped concave groove is formed through a wet etching process.

According to an embodiment of the present invention, the V-shaped, wedge-shaped concave groove is formed through a dicing blade process.

According to an embodiment of the present invention, a material capable of UV curing having a high refractive index is thermally reflowed on a corresponding surface of the optical path portion to form a spherical lens portion.

The present invention comprises the steps of forming a core layer on a lower clad layer on a substrate; Forming a photoresist pattern on the core layer, and etching and patterning the core layer using the same; Forming an upper cladding layer on the patterned core layer to complete an optical waveguide; Forming a concave groove having a photoresist pattern on the upper cladding layer and on the upper cladding layer on which the photoresist pattern is not formed; And forming a concave lens-shaped optical path part by filling the concave groove with a UV curing material having a high refractive index.

According to an embodiment of the present invention, the concave groove is made of any one of a hemispherical, U-shaped, V-shaped, and wedge-shaped groove.

According to an embodiment of the present invention, the hemispherical, U-shaped concave groove is formed through a wet etching process.

According to an embodiment of the present invention, the V-shaped, wedge-shaped concave groove is formed through a dicing blade process.

According to an exemplary embodiment of the present invention, the method further includes forming a spherical lens unit by thermally reflowing the UV curable material having a high refractive index on the corresponding surface of the optical path unit.

According to the AWG device module and manufacturing method for an optical transceiver according to the present invention having the configuration as described above, by focusing an optical signal from the optical transmission means and outputting it to the optical receiving means, the photo of the optical receiving means according to the expansion of the transmission capacity of the optical transceiver. There is an effect of inducing the reduction of the active area of the diode to promote high performance of the photodiode and minimizing the coupling loss caused by the light spreading phenomenon.

By eliminating the lens array protruding from the device surface to minimize the gap between the device surface of the AWG device module and the photodiode, the optical alignment procedure can be minimized, as well as the refractive index of the UV-cured material with a high refractive index filling the recesses. As the focal length can be controlled according to the photodiode and packaging clearance tolerance, the concave groove is formed at the same height as the surface of the AWG device, minimizing damage to the lens and photodiode that occurs when using a convex lens. Productivity can be improved by reducing the reduction and defect rate.

The optical signal is focused from the optical waveguide of the optical transmission means and output to the optical receiving means, but the optical signal reflected on the reflective surface is prevented from entering the optical transmission means again, thereby reducing return loss.

By including a molding mold that can manufacture the optical path part of the optical waveguide by injecting a high refractive index UV curing material, it is possible to not only reduce the cost of manufacturing the optical waveguide, but also reduce the defect rate, thereby improving productivity.

1 is a block diagram showing an AWG device module according to the present invention.

2 is a cross-sectional view showing an optical path portion between the optical transmission means and the optical reception means of the AWG device module according to the first embodiment of the present invention.

3 is a cross-sectional view showing an optical path portion between an optical transmission means and a light reception means of an AWG device module according to a second embodiment of the present invention.

4 is an optical distribution diagram showing the size of an optical signal on a light exit surface of an AWG device module according to the present invention.

5 is a flowchart showing a method of manufacturing an AWG device module for an optical transceiver according to the present invention.

6 is a view of FIG. 5.

7 is a cross-sectional view illustrating an optical path part of an AWG device module according to a third embodiment of the present invention.

8 is a cross-sectional view illustrating an optical path part of an AWG device module according to a fourth embodiment of the present invention.

9 is a cross-sectional view showing a molding process for manufacturing the output-end waveguide of FIG. 8 and a molding process of the optical path part by the molding mold part.

10 to 12 are light distribution diagrams showing reflection loss for each angle of inclined surface of reflective layers formed in the waveguide of the output terminal of the AWG device module according to the present invention and the optical size of the output terminal.

13 is a light distribution diagram showing reflection loss for each angle of an inclined surface of a reflective layer and a light intensity at an output end according to an embodiment of the present invention.

The present invention will be described in detail in the text, since various modifications can be made and various forms can be obtained. However, this is not intended to limit the present invention to a specific disclosed form, and it should be understood to include all changes, equivalents, and substitutes included in the spirit and scope of the present invention. In describing each drawing, similar reference numerals have been used for similar elements.

These terms are used only for the purpose of distinguishing one component from another component. The terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram showing an AWG device module according to the present invention, and FIG. 2 is an optical path part between the optical transmission unit 100 and the optical receiving unit 300 of the AWG device module according to the first embodiment of the present invention. 20) is a cross-sectional view, and FIG. 3 is a cross-sectional view showing an optical path portion 20 between the optical transmission means 100 and the optical reception means 300 of the AWG device module according to the second embodiment of the present invention.

Referring to the accompanying drawings, the AWG device module for an optical transceiver according to the present invention includes an input waveguide 11, a first shaping coupler 12, an arrayed waveguide grating 13, and a second shaping coupler. (14), including an output waveguide (15).

A first molding coupler 12 is installed at the output end of the input waveguide 11 to diffract an optical signal incident through the input waveguide 11. The diffracted optical signal in this way is incident on the array waveguide diffraction grating 13 and waveguide. At this time, the path difference between the adjacent waveguides in the array waveguide diffraction grating 13 is ΔL, and each waveguide is a phase shifter. Will play a role.

The light waves waved through the diffraction grating 13 with the array waveguide are incident on the second shaping coupler 14 while having different phases. The second shaping coupler 14 causes constructive interference to the light wave, and thus the focus is focused on the output waveguide 15.

The position at which the output waveguide 15 is focused varies depending on the wavelength, because the phase shifted according to the wavelength is different. Therefore, since each of the output waveguides 15 can obtain light waves of different wavelengths, this element can function as a de-multiplexer. Likewise, when a plurality of optical signals having different wavelengths are incident on the output waveguide 15, the focus is focused on one input waveguide 11, and this device functions as a multiplexer for obtaining multiplexed light waves. do.

Meanwhile, a plurality of optical signals input to the input waveguide 11 proceeds toward each output waveguide 15, and the optical signals reflected from the first reflective layer 111 are incident on the optical path unit 20 and are output. do. The optical path unit 20 focuses and outputs the incident optical signal.

More specifically, the AWG device module for an optical transceiver according to the present invention will be described, as shown in Figs. 2 and 3, the optical transmission unit 100 for transmitting an optical signal and the optical signal of the optical transmission unit 100 And a light receiving means 300 for receiving and receiving the focused optical signal and converting it into an electric signal. In addition, a sub-mount (not shown) may be provided for stacking and supporting the optical transmission means 100 and the optical reception means 300.

The optical transmission means 100 uses a planar optical waveguide 110 including a core 120 through which an optical signal is transmitted and a cladding 130 surrounding the core 120. The optical waveguide 110 has an inclined surface formed at one end thereof, and a first reflective layer 111 vertically reflecting an optical signal is formed on the inclined surface.

The planar optical waveguide 110 is a waveguide through which an optical signal is transmitted, and is composed of a core 120 having a relatively large refractive index and a cladding 130 having a relatively small refractive index, and the optical signal incident to the core 120 has a refractive index. It proceeds along the large core 120.

The inclined surface is formed at a 45 degree angle at one end of the optical waveguide 110 and may be formed through a process of polishing or etching. Reflective coating may be performed on an inclined surface formed through such a process to form a first reflective layer 111 on which an optical signal is reflected. The angle of the inclined surface is ideally 45 degrees, but it is difficult to accurately polish in actual implementation, so it can be limited to an angle of 40 to 50 degrees.

The first reflective layer 111 serves to reflect the optical signal that has progressed through the core 120 to proceed to the light receiving means 300. Metal materials such as gold, silver, or chromium or other highly reflective coating materials may be formed on the first reflective layer 111 to improve reflectance.

After the optical signal traveling along the core 120 is reflected by the first reflective layer 111, the optical signal spreads according to the principle of light propagation in the free space and proceeds in the direction in which the light receiving means 300 is located. At this time, as the distance between the core 120 and the first reflective layer 111 meets and reflects the light receiving means 300 increases, the optical power of the edge of the spreading optical signal increases. The photodiode 310 cannot be reached, and is transmitted out of the photodiode 310 to cause optical loss.

Therefore, to prevent such a problem from occurring, the existing lens array is deleted so that the distance between the optical waveguide 110 and the light receiving means 300 is as close as possible, and optical alignment is performed so that all optical signals are converted to optical power without loss of optical power. It was made to be able to enter the reception means 300.

Meanwhile, the optical receiving means 300 includes a photodiode (PD) and a transimpedance amplifier (TIA) electrically connected to the photodiode 310 (hereinafter referred to as'TIA', 320). Can include.

The submount can support both the optical transmission means 100 and the optical reception means 300, or can support any one of the optical transmission means 100 or the optical reception means 300, and various materials such as silicon wafers, glass and metal materials You can use A substrate (not shown) may be mounted on the submount, and the photodiode 310 and the TIA 320 are mounted on the top of the substrate and wire bonded. If the number of channels is large, the substrate may be separated into a plurality of substrates and manufactured, and the TIA 320 may be wire-bonded with a pattern formed on the upper portion of the substrate for high-speed electrical signal transmission.

The optical receiving means 300 may use a module in which the photodiode 310 is directed upward based on the position of the optical transmission means 100 or a module in which the photodiode 310 is located below may be used. In the embodiment according to the present invention, as described above, a module in which the photodiode 310 is located is used.

A concave groove 21 is formed on the surface of the clad 130 through which the optical signal propagated through the core 120 of the optical transmission means 100 is reflected by the first reflective layer 111. In the present invention, a hemispherical concave groove 21 is formed on the surface of the clad 130 through a wet etching method using a photolithography (PR) method to provide an optical path part 20 in the form of a concave lens. The characteristic light can be effectively collected and focused.

The hemispherical concave groove 21 can be manufactured by removing the coating of the optical fiber and then finely etching the light exit surface of the clad 130 to form a pattern.

The hemispherical concave groove 21 may be filled with a material capable of UV curing having a high refractive index, such as resin, epoxy, and the like, to provide an optical path part 20 capable of inducing optical focusing.

In addition to the hemispherical concave groove 21, the optical path part 20 may be formed of any one of a U-shaped, V-shaped, and wedge-shaped groove. The V-shaped and wedge-shaped grooves of FIG. 3 can be manufactured by forming a pattern using a dicing blade.

4 is an optical distribution diagram showing the size of an optical signal on the light exit surface of the AWG device module according to the present invention, and the light reflected by the first reflective layer 111 of the flat optical waveguide 110 passes through the optical path part 20 After passing through, it can be seen from the light distribution that the size has been reduced to approximately 1/2 at the point of 100㎛. The size of the light that passes through the light exit surface of the clad 130 and is output to the outside is approximately 50 µm × 65 µm when there is no lens, but the size of the light passing through the optical path unit 20 is reduced to 20 µm × 35 µm. I can see that it was done.

The transmission capacity of the optical transceiver is focusing, while the size of the evolved over 200G 100G in the photodiode 310, even if small in 80㎛ ² to 36㎛ ² passes through the section 20 the optical path emitted optical signal photodiode ( 310), so no optical loss occurs.

Hereinafter, a method of manufacturing an AWG device module for an optical transceiver according to the present invention will be described with reference to the accompanying drawings.

FIG. 5 is a flowchart showing a method of manufacturing an AWG device module for an optical transceiver according to the present invention, and FIG. 6 is a view of the optical transmission means 100 of FIG. 2 as viewed from the side.

First, as shown in FIGS. 5 and 6, looking at a method of manufacturing a general optical waveguide 110, first, a lower clad layer is formed on a substrate, and then a core layer is formed on the lower clad layer (S10). ). Subsequently, a photoresist layer is formed on the core layer, and then exposed and developed to form a photoresist pattern. The core layer is etched and patterned using the obtained photoresist pattern (S20). The optical waveguide 110 is completed by forming an upper cladding layer on the patterned core layer (S30).

A method of manufacturing the optical path part 20 in the form of a concave lens in the general optical waveguide 110 completed as described above is as follows.

A photoresist pattern having a certain pattern is formed in the upper clad layer, and a concave groove 21 having a concave shape is formed on the upper clad layer on which the photoresist pattern is not formed through a wet etching process (S40). For example, when a circular or square photoresist pattern is formed on the upper cladding layer, a concave groove 21 having a hemispherical or rectangular cross section is formed on the upper clad layer on which the photoresist pattern is not formed through a wet etching process. can do.

Subsequently, the concave groove 21 formed in the upper cladding layer is filled with a material capable of UV curing having a high refractive index, such as resin, epoxy, etc., to form the optical path part 20 in the form of a concave lens. (S50).

On the other hand, after forming the optical path part 20 on the upper cladding layer as described above, a UV curable material having a high refractive index is thermally reflowed on the corresponding upper part of the optical path part 20 (S60). It is also possible to form a spherical lens unit having the same focusing characteristics as the furnace unit 20 (S70). The spherical lens unit is to compensate for the surface where it is difficult to change the refractive index of the conventional convex lens, and UV curing with a high refractive index is possible after making a concave groove 21 on the surface of the cladding layer without separately manufacturing a micro lens array block and bonding. By filling the material, the same function as the convex lens can be added, and the focal length can be easily adjusted by adjusting the refractive index of a material capable of UV curing with a high refractive index.

The material capable of UV curing having a high refractive index thermally reflowed on the upper portion of the light path part 20 may be resin or epoxy, and other materials not limited thereto may be used.

According to the present invention, the optical signal traveling along the core 120 of the optical waveguide 110 is reflected by the first reflective layer 111 and then proceeds in the direction in which the photodiode 310 is located. At this time, the optical path part 20 is formed on the light exit surface of the clad 130 so that the optical signal can be focused according to the principle of optical propagation in a free space, and the photodiode 310 is placed in the part where the optical signal is focused. It can be arranged to form a light receiving means 300.

Accordingly, the AWG device module for an optical transceiver according to the present invention can form an optical transceiver, a strong sensor, and various optical communication modules with a simple manufacturing process and low cost.

Meanwhile, FIG. 7 is a cross-sectional view showing an optical path part of an AWG device module according to a third embodiment of the present invention, and FIG. 8 is a cross-sectional view illustrating an optical path part of an AWG device module according to a fourth embodiment of the present invention, and FIG. 9 Is a cross-sectional view showing a molding process of a molding mold part and an optical path part by the molding mold part for manufacturing the output waveguide of FIG. 8.

As shown in FIG. 7, a plurality of optical signals input to the input waveguide 11 proceed toward each output waveguide 15, and are reflected by the second reflective layer 21 formed on the optical path part 20. The optical signal is converted into an optical path by the optical path conversion unit 23 and is output through the convex lens unit 24. As shown in FIG. 1, the convex lens unit 24 of the linear optical path unit 20 focuses the incident optical signal and outputs it to the outside.

Specifically, the AWG device module according to the third embodiment of the present invention will be described, as shown in FIG. 7, an optical transmission means 100 for transmitting an optical signal, and an optical signal of the optical transmission means 100 is received. And a light receiving means 300 for receiving the focused optical signal and converting it into an electric signal. In addition, a sub-mount (not shown) may be provided for stacking and supporting the optical transmission means 100 and the optical reception means 300.

The optical transmission means 100 uses a planar optical waveguide 110 including a core 120 through which an optical signal is transmitted and a cladding 130 surrounding the core 120.

The planar optical waveguide 110 is a waveguide through which an optical signal is transmitted, and is composed of a core 120 having a relatively large refractive index and a cladding 130 having a relatively small refractive index, and the optical signal incident to the core 120 has a refractive index. It proceeds along the large core 120 toward the output waveguide 15 shown in FIG. 1.

A V-shaped concave groove is formed on one side of the optical waveguide 110. In the concave groove, an inclined surface is formed on the outer groove surface of the optical waveguide 110, and a second reflective layer 21 for vertically reflecting the optical signal is formed on the inclined surface.

The second reflective layer 21 formed in the concave groove of the optical waveguide 110 is formed at an angle of 40 to 45 degrees and may be formed through a dicing blade process, but may also be formed through a polishing or etching process. have.

The second reflective layer 21 reflects the optical signal by applying a reflective coating on the inclined surface of the outer groove surface of the optical waveguide 110. The angle of the second reflective layer 21 is ideally formed at 45 degrees because the light spreading phenomenon is small, but it is difficult to accurately polish in actual implementation, and thus the angle may be limited to an angle of 40 to 45 degrees.

The second reflective layer 21 serves to reflect the optical signal that has progressed through the core 120 to proceed to the light receiving means 300. Metal materials such as gold, silver, or chromium, or other highly reflective coating materials may be formed on the second reflective layer 21 to improve reflectivity.

After the optical signal traveling along the core 120 is reflected by the second reflective layer 21, the optical signal spreads according to the principle of light propagation in the free space and proceeds in the direction in which the light receiving means 300 is located. At this time, as the distance between the core 120 and the second reflective layer 21 meets and reflects and the distance between the light receiving means 300 increases, the optical power at the edge of the spreading optical signal is increased by the photodiode (not shown). It cannot reach the light-receiving part, is transmitted out of the light-receiving part of the photodiode, and the optical signal reflected by the second reflective layer 21 is again incident on the optical transmission means 100 to cause optical loss.

Therefore, to prevent such a problem from occurring, an inclined surface is formed on the inner groove surface of the optical waveguide 110 facing the second reflective layer 21 of the concave groove, and the optical signal is prevented from entering the optical transmission means 100 on the inclined surface. That is, when the optical signal from the optical waveguide 110 of the optical transmission means 100 is collected and focused on the inclined surface formed on the inner groove surface of the optical waveguide 110 and output to the photodiode of the optical receiving means 300, the second reflective layer 21 A reflection limiting layer 22 is formed so that the optical signal reflected in) is not incident on the optical transmission means 100 again.

The reflection limiting layer 22 may be formed at an angle of 5 to 10 degrees, may be formed through a dicing blade process, similar to an inclined surface, and may also be formed through a polishing or etching process. The angle of the reflection limiting layer 22 formed through such a process is 8 degrees, which is ideal because the optical signal reflected from the second reflective layer 21 does not enter the optical transmission means 100, but in actual implementation, it should be accurately polished. Because it is difficult, it can be limited to an angle of 5 to 10 degrees.

At this time, the concave groove including the second reflective layer 21 and the reflective limiting layer 22 is filled with a UV-curable material having a high refractive index, such as resin, epoxy, etc., to induce optical focusing. It is possible to provide the optical path conversion unit 23.

On the other hand, after forming the optical path conversion unit 23 on the clad 130 of the tube transmission means 100, a material capable of UV curing having a high refractive index is thermally reflowed on the corresponding upper portion of the optical path conversion unit 23 ( Thermal reflow) may be performed to form the convex lens unit 24 having a focusing characteristic. The convex lens unit 24 effectively collects and focuses light, which is generally a characteristic of the convex lens.

As described above, the convex lens unit 24 is for minimizing the coupling loss due to light spreading of the optical signal output from the core 120 of the conventional optical transmission means 100, and the second After forming a concave groove including the reflective layer 21 and the reflection limiting layer 22, a UV-curable material having a high refractive index is filled to prepare the optical path conversion unit 23, and the optical path conversion unit 23 It can be manufactured by thermally reflowing a material capable of UV curing with a high refractive index on the top.

In the third embodiment of the present invention, the material capable of UV curing having a high refractive index thermally reflowed on the top of the light path conversion unit 23 may be resin or epoxy, and other materials not limited thereto may be used. have.

According to the present invention, after the optical signal traveling along the core 120 of the optical waveguide 110 is reflected from the second reflective layer 21 of the optical path conversion unit 23, the light receiving unit of the photodiode of the optical receiving means 300 It proceeds in the direction where is located. At this time, by forming a convex lens unit 20 on the light exit surface of the clad 130, the optical signal can be focused according to the principle of light propagation in a free space, and a photodiode is disposed at the portion where the optical signal is focused to A receiving means 300 may be formed.

As described above, the optical receiving means 300 may use a module in which the photodiode faces upward based on the position of the optical transmission means 100, or a module in which the photodiode is located below may be used. In an embodiment according to the present invention, as described above, a module in which a photodiode is located is used.

Accordingly, the AWG device module according to the present invention can form an optical transmitter/receiver, an optical sensor, and various optical communication modules at low cost while the manufacturing process is simple.

Hereinafter, in describing the fourth embodiment of the AWG device module according to the present invention, the same configuration code is used for the configuration having the same configuration and the same function as the third embodiment of the present invention, and in order to avoid repetitive configuration, these configurations are Detailed description of this will be omitted.

8 is a cross-sectional view showing an optical path part 20 ′ of an AWG device module according to a fourth embodiment of the present invention, and FIG. 9 is a molding mold part 200 for manufacturing the output waveguide 15 of FIG. , Is a cross-sectional view showing a molding process of the optical path part 20' by the molding mold part 200.

As shown in FIG. 8, the optical path part 20 ′ has an inclined surface formed on one side of the optical waveguide 110, and includes a third reflective layer 21 ′ vertically reflecting an optical signal on the inclined surface.

The optical path part 20 ′ is disposed at one end of the optical waveguide 110 facing the third reflecting layer 21 ′ so that the optical signal reflected by the third reflecting layer 21 ′ is not incident again to the optical transmission means 100. It includes a reflection limiting layer 22 ′ having an inclined surface.

In addition, the light path part 20 ′ includes a light path conversion part 23 ′ filled with a material capable of UV curing with a high refractive index between the inclined surfaces, and a UV light having a high refractive index on the corresponding upper part of the light path conversion part 23. It includes a convex lens unit 24' having a focusing characteristic in which a curable material is thermally reflowed and integrated with the optical path conversion unit 23'.

Such an optical path part 20' is manufactured by excluding a method of processing an inclined surface having a high risk of damage in the mass production process of the AWG device module. As shown in FIG. 9, it is combined with the optical waveguide 110. Through the lower mold 210 provided with a cavity 230 capable of forming the optical path conversion unit 23 ′, and the lower mold 210 can be combined and form a convex lens unit 24 ′. A molding mold part 200 including an upper mold 220 provided with a cavity 231 is provided.

In this way, the molding mold part 200 is the cavity 230,231, which is a molding space including the optical path conversion part 23 ′ and the convex lens part 24 ′ on the inner side of the lower mold 210 and the upper mold 220 Is formed.

One side of the upper mold 220 is formed with an injection hole 240 used to inject a UV-curable material having a high refractive index into the cavities 230 and 231.

In general, the molding mold part 200 may be made of steel, fiber-reinforced plastic, resin, etc., and the lower mold 210 and the upper mold 220 can be easily coupled through fixing means such as bolts.

As the optical waveguide 110 enters and is coupled through the opening formed at one side of the molding mold part 200 configured as described above, the cavity 230 of the optical path conversion part 23 ′ is sealed, and is formed in the injection hole 240 When a material capable of UV curing having a high refractive index is injected and curing of the molding material is completed after a predetermined period of time, the optical path part 20 ′ including the optical path conversion part 23 ′ and the convex lens part 24 ′ Is completed. At this time, a reflection limiting layer 22 ′ formed at an angle of 5 to 10 degrees may be provided at one end of the optical waveguide 110 before molding through the molding mold part 200.

Since the optical path part 20' is formed in the cavities 230 and 231 through the molding mold part 200 shown in FIG. 9, the risk of damage due to polishing of the reflective surface can be prevented, and thus the optical waveguide 110 In addition to reducing the cost of manufacturing, it is possible to improve productivity by lowering the defect rate.

10 to 12 are light distribution diagrams showing reflection loss by angle of inclined surface of reflective layers formed in the waveguide of the output terminal of the AWG device module according to the present invention and the light size of the output terminal, and FIG. 13 is It is a light distribution diagram showing the return loss and the light size at the output stage.

Looking at the light distribution diagram of FIG. 10, when the inclination angle of the inclined surface increases from 40 degrees to 45 degrees, the return loss is greater than 40 dB when the inclination angle of the inclined surface is 40 degrees, and less than 30 dB when the inclination angle is 45 degrees. Able to know.

In addition, looking at the light distribution diagrams of FIGS. 10 to 12, it can be seen that the size of the optical signal decreases sequentially as the inclination angle of the inclined surface increases from 40 degrees to 45 degrees. That is, the reflection loss is determined according to the inclination angle of the inclined surface. When the inclination angle of the inclined surface is 45 degrees, the reflection loss is very low, which may interfere with use in the communication area. Accordingly, in the third and fourth embodiments of the present invention, a V-shaped concave groove is formed in the optical waveguide 110 of the AWG device module, and a high refractive index UV curing material is filled thereon, and a high refractive index UV curing material is thermally rippled thereon. An optical waveguide including an optical path part 20 ′ cured by thermal reflow to form the optical path part 20 or by injecting a high refractive index UV curing material into the cavities 230 and 231 of the molding mold part 200. 110).

Accordingly, as shown in FIG. 13, compared to the first and second embodiments of the present invention, the size of the optical signal transmitted from the optical transmission unit 100 is relatively reduced and output to the light receiving unit of the photodiode. , It is possible to minimize the coupling loss caused by the light spreading phenomenon, and prevent the optical signal reflected on the second reflective layer 21 from entering the optical transmission unit 100 again, thereby reducing return loss. Can be reduced. In particular, by injecting a high-refractive-index UV curing material to provide a molding part 200 capable of manufacturing the optical path part 20' of the optical waveguide 110, it not only brings about cost reduction in manufacturing the optical waveguide 110. In addition, it is possible to improve productivity by lowering the defect rate.

The above description of the present invention is for illustrative purposes only, and those of ordinary skill in the art to which the present invention pertains can understand that it is possible to easily transform it into other specific forms without changing the technical spirit or essential features of the present invention. will be. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not limiting. The scope of the present invention is indicated by the claims to be described later, and all changes or modified forms derived from the meaning and scope of the claims and their equivalent concepts should be interpreted as being included in the scope of the present invention.

[Explanation of code]

100: optical transmission means

110: optical waveguide

111: first reflective layer

120: core

130: clad

200: forming mold part

300: light receiving means

20,20': Optical path part

21: second reflective layer

21': 3rd reflective layer

Claims (12)

1. An optical transmission means comprising a core through which an optical signal is transmitted and a plate type optical waveguide including a clad surrounding the core; And,

   And an optical receiving means for receiving the optical signal output from the optical transmitting means and converting it into an electric signal,

   An AWG device module for an optical transceiver provided with an optical path part for collecting and focusing the optical signal on a surface of the clad corresponding to the optical receiving means and which is a light exit surface of the optical signal.
2. The method of claim 1,

   The optical path portion has a concave lens shape, wherein a concave groove is formed on the surface of the clad through a wet wetting method by photolithography.
3. The method of claim 2,

   An AWG device module for an optical transceiver, characterized in that the concave groove of the optical path part is filled with a UV curing material having a high refractive index.
4. The method according to claim 2 or 3,

   The concave groove is an AWG device module for an optical transceiver, characterized in that it is made of any one of a hemispherical, U-shaped, V-shaped, and wedge-shaped groove.
5. The method of claim 4,

   The AWG device module for an optical transceiver, characterized in that the hemispherical, U-shaped concave groove is formed through a wet etching process.
6. The method of claim 4,

   The AWG device module for an optical transceiver, characterized in that the V-shaped, wedge-shaped concave groove is formed through a dicing blade process.
7. The method of claim 3,

   An AWG device module for an optical transceiver, characterized in that a spherical lens unit is formed by thermal reflow of the UV curable material having a high refractive index on a corresponding surface of the optical path unit.
8. Forming a core layer on the lower clad layer on the substrate;

   Forming a photoresist pattern on the core layer, and etching and patterning the core layer using the same;

   Forming an upper cladding layer on the patterned core layer to complete an optical waveguide;

   Forming a concave groove having a photoresist pattern on the upper cladding layer and on the upper cladding layer on which the photoresist pattern is not formed; And

   The method of manufacturing an AWG device module for an optical transceiver comprising a step of forming an optical path part in the form of a concave lens by filling the concave groove with a UV curing material having a high refractive index.
9. The method of claim 8,

   The concave groove is a method of manufacturing an AWG device module for an optical transceiver, characterized in that it is made of any one of a hemispherical, U-shaped, V-shaped, wedge-shaped groove.
10. The method of claim 9,

    The hemispherical, U-shaped concave groove is a method of manufacturing an AWG device module for an optical transceiver, characterized in that formed through a wet etching process.
11. The method of claim 9,

    The method of manufacturing an AWG device module for an optical transceiver, wherein the V-shaped and wedge-shaped concave grooves are formed through a dicing blade process.
12. The method of claim 8,

    The method of manufacturing an AWG device module for an optical transceiver, further comprising forming a spherical lens unit by thermally reflowing a material capable of UV curing having a high refractive index on a corresponding surface of the optical path unit.

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