WO2021003708A1 - 应用于光学相控阵的天线阵列、光学相控阵及激光雷达 - Google Patents

应用于光学相控阵的天线阵列、光学相控阵及激光雷达 Download PDF

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Publication number
WO2021003708A1
WO2021003708A1 PCT/CN2019/095468 CN2019095468W WO2021003708A1 WO 2021003708 A1 WO2021003708 A1 WO 2021003708A1 CN 2019095468 W CN2019095468 W CN 2019095468W WO 2021003708 A1 WO2021003708 A1 WO 2021003708A1
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Prior art keywords
antenna
width
unit
phase compensation
phase
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PCT/CN2019/095468
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English (en)
French (fr)
Inventor
汪敬
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深圳市速腾聚创科技有限公司
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Priority to CN201980002799.9A priority Critical patent/CN110741276B/zh
Priority to PCT/CN2019/095468 priority patent/WO2021003708A1/zh
Priority to EP19937031.3A priority patent/EP3998492A4/en
Publication of WO2021003708A1 publication Critical patent/WO2021003708A1/zh
Priority to US17/568,755 priority patent/US11881632B2/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
    • G01S7/4815—Constructional features, e.g. arrangements of optical elements of transmitters alone using multiple transmitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/26—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
    • H01Q3/2676—Optically controlled phased array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/484—Transmitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4911—Transmitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497—Means for monitoring or calibrating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0087—Phased arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
    • H01Q15/0033—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective used for beam splitting or combining, e.g. acting as a quasi-optical multiplexer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/26—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
    • H01Q3/267—Phased-array testing or checking devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/14—Mode converters

Definitions

  • the invention relates to the technical field of laser radar, in particular to an antenna array, an optical phased array and a laser radar applied to an optical phased array.
  • the optical phased array is an important part of the all-solid-state lidar system. It has the advantages of complete solid-state, high reliability, small size, and convenient control.
  • the optical phased array can be realized by integrated optoelectronic technology.
  • the existing antenna arrays include silicon-on-insulator (SOI) materials, silicon nitride materials, three-five group materials, etc. Since the silicon-based optical phased array based on SOI material can utilize the mature microelectronic complementary metal oxide semiconductor (Complementary Metal Oxide Semiconductor, CMOS) process platform, it has received great attention from the industry in recent years.
  • SOI silicon-on-insulator
  • CMOS complementary metal oxide semiconductor
  • the optical phased array is composed of an optical splitter, a tunable phase shifter, a connecting waveguide, and an antenna transmitting unit.
  • the input light can be divided into equal proportions or unequal proportions through the splitter. After these lights pass through the tunable phase shifter, their phase will be changed. After passing through a series of connected waveguides, it is finally launched into free space in the antenna transmitting unit.
  • the edge-emitting antenna has a wide waveguide width at the edge of the chip, and light can be well confined in the waveguide. When it suddenly reaches the edge of the chip and emits into free space, it will cause obvious reflection due to the sudden change of refractive index. This greatly affects the emission efficiency of this antenna, so how to improve the emission efficiency of the edge transmitting antenna is an urgent problem in the industry.
  • the embodiments of the present invention provide an antenna array, an optical phased array, and a lidar applied to an optical phased array that overcomes or at least partially solves the foregoing problems.
  • an antenna array applied to an optical phased array including: N phase compensation groups and N antenna groups, each of the phase compensation groups includes M phase compensation units, each The antenna group includes M antenna units, where N and M are positive integers; the input end of one of the phase compensation units in one of the phase compensation groups is used to receive optical signals, and the output end is connected to one of the antennas One of the antenna units in the group is used to transmit the received optical signal to the antenna unit, and perform phase compensation on the optical signal according to the phase shift generated by the antenna unit, and the antenna unit uses To emit the light signal.
  • the antenna unit includes a waveguide mode converter gradually narrowing from a first width to a second width, which is used to gradually expand the light spot in the waveguide and emit it at the end.
  • the phase compensation unit includes a first mode converter whose width gradually changes from the first width to a third width and a second mode converter whose width gradually changes from the third width to the first width
  • the output terminal of the first mode converter is connected with the input terminal of the second mode converter, and the output terminal of the second mode converter is connected with one of the antenna units.
  • the third width is related to the second width of the antenna unit connected to the output end of the second mode converter and the manufacturing process of the antenna array.
  • any one of the antenna groups in any one of the antenna groups, if any one of the antenna elements produces a phase shift of ⁇ , the phase compensation unit connected to the antenna unit at the output end is adjusted The difference between the first width and the third width causes the phase compensation unit to produce a phase shift of - ⁇ , where ⁇ represents the amount of phase change.
  • the first width wj of any one of the phase compensation units in the phase compensation group is 300 nm to 500 nm, and the third width wjp is wj ⁇ 200 nm.
  • the length of any one of the phase compensation units is 1 ⁇ m-50 ⁇ m, and the length of any one of the antenna units is 1 ⁇ m-50 ⁇ m.
  • an optical phased array including an optical signal output unit, a waveguide unit, and the aforementioned antenna array applied to the optical phased array; the optical signal output unit is used to output N ⁇ M channels of modulated optical signals; the waveguide unit includes N ⁇ M channels of waveguide pipes for transmitting the N ⁇ M channels of modulated optical signals to the antenna unit to transmit the optical signals.
  • the optical signal output unit includes an optical splitter and a phase shifter connected to the optical splitter, the optical splitter is used to split the input light; the phase shifter is used to split the optical splitter The light is phase-shifted, and finally N ⁇ M optical signals with different phases are output.
  • a laser radar which includes the aforementioned optical phased array, a light receiving unit, and a ranging unit.
  • a smart device including the aforementioned lidar.
  • the antenna array applied to the optical phased array includes N phase compensation groups and N antenna groups, each of the phase compensation groups includes M phase compensation units, and each of the antenna groups includes M antenna units, where N and M are positive integers; the input end of one of the phase compensation units in one of the phase compensation groups is used to receive optical signals, and the output end is connected to one of the antenna groups
  • the antenna unit is used to transmit the received optical signal to the antenna unit, and perform phase compensation on the optical signal according to the phase shift generated by the antenna unit, and the antenna unit is used to transmit the light signal.
  • the width of the antenna unit the size of the light spot emitted by the antenna can be enlarged, the reflection with the outside world can be reduced, and the transmission efficiency can be improved; the phase difference caused by different antenna units is compensated by the phase compensation unit, so that the transmitted multiple optical signals can be reduced.
  • the phase is kept equal to meet the requirements of far-field imaging.
  • Figure 1 shows a schematic structural diagram of an antenna array applied to an optical phased array according to an embodiment of the present invention
  • FIG. 2 shows a schematic diagram of the internal structure of a phase compensation group and an antenna group of an antenna array applied to an optical phased array according to an embodiment of the present invention
  • FIG. 3 shows a schematic structural diagram of another antenna array applied to an optical phased array according to an embodiment of the present invention
  • Fig. 4 shows a schematic structural diagram of an optical phased array according to an embodiment of the present invention.
  • Fig. 1 shows a schematic structural diagram of an antenna array applied to an optical phased array according to an embodiment of the present invention.
  • 2 shows a schematic diagram of the internal structure of a phase compensation group and an antenna group of an antenna array applied to an optical phased array according to an embodiment of the present invention.
  • the antenna array applied to the optical phased array includes N phase compensation groups 11 and N antenna groups 12. Referring to FIG.
  • each phase compensation group 11 includes M phase compensation units 110, and each antenna group 12 includes M antenna units 120, where N and M are positive integers; one of the phase compensation groups The input end of one of the phase compensation units 110 is used to receive an optical signal, and the output end is connected to one of the antenna units 120 in one of the antenna groups 12, and is used to transmit the received optical signal to the antenna unit 120, and perform phase compensation on the optical signal according to the phase offset generated by the antenna unit 120, and the antenna unit 120 is configured to transmit the optical signal.
  • the i-th phase compensation group 11 is connected to the i-th antenna group 12, and each phase compensation group 11 can receive M input optical signals, where 1 ⁇ i ⁇ N.
  • the general structure of the different phase compensation groups 11 is consistent.
  • the general structure of the different antenna groups 12 is consistent.
  • the j-th phase compensation unit 110 is connected to the j-th antenna unit 120, and each phase compensation unit 110 can receive an input optical signal, where 1 ⁇ j ⁇ M.
  • the antenna unit 120 is used for transmitting optical signals
  • the phase compensation unit 110 is used for compensating the phase difference caused by the antenna unit 120 connected to the phase compensation unit 110.
  • any antenna unit 120 is composed of a gradually narrowing waveguide mode converter, which can gradually expand the light spot in the antenna waveguide.
  • the waveguide mode converter can be a tapered waveguide with a gradually decreasing width, or a parabolic and similar profile waveguide.
  • the j-th antenna unit 120 includes a waveguide mode converter gradually narrowing from a first width wj to a second width wjt, for gradually expanding the light spot in the waveguide and emitting it at the end.
  • the width of the antenna unit 120 gradually narrows from the first width wj to the second width wjt, which can make the light spot in each antenna gradually increase, and the effective refractive index of the mode decreases, which is closer to the refractive index of air in free space.
  • the optical signal is emitted, the reflection caused by the difference between the refractive index of the antenna mode and the refractive index of the free space air will also be suppressed, so that the emission efficiency is significantly increased.
  • any phase compensation unit 110 can be made of two tapered mode converters with gradually changing widths, and can be in the shape of a bow tie or a similar shape. In addition to a cone, the internal contour can also be a parabola. And similar curves.
  • the phase compensation unit 110 causes a phase shift by changing the width or length to compensate for the additional phase shift caused by the antenna unit 120 connected to it.
  • the phase compensation unit includes a first mode converter whose width gradually changes from the first width wj to a third width wjp and a second mode whose width gradually changes from the third width wjp to the first width wj
  • the output terminal of the first mode converter is connected to the input terminal of the second mode converter, and the output terminal of the second mode converter is connected to one of the antenna units 120.
  • the phase compensation amount of any phase compensation unit 110 is determined by changing the value of the third width wjp.
  • any of the phase compensation groups 11 if the length L1 of any phase compensation unit 110 is the same, the difference between the first width wj and the third width wjp of the phase compensation unit 110
  • any one of the antenna units 120 generates a phase shift of ⁇
  • the phase compensation unit 110 connected to the antenna unit 120 at the output end adjusts the The difference between the first width wj and the third width wjp causes the phase compensation unit 110 to produce a phase shift of - ⁇ , where ⁇ represents the amount of phase change.
  • the third width wjp in the corresponding phase compensation unit 110 connected to the antenna unit 120 can be adjusted to ensure that the phase is compensated. That is, the third width wjp is related to the second width wjt of the antenna unit 120 connected to the output terminal of the second mode converter and the manufacturing process of the antenna array.
  • the selection of the third width wjp in the j-th phase compensation unit 110 connected to the j-th antenna unit 120 should ensure that The phase compensation unit 110 can cause a phase shift of - ⁇ j, so that the joint phase shift of the two units will be zero. If the phases of the optical signals entering any antenna group are in an asymmetric arrangement, then the last emitted light will also be in an asymmetric arrangement.
  • the structure of the antenna unit 120 in each antenna group 12 is generally different, and the structure of the antenna units at corresponding positions in different antenna groups is the same.
  • the structure of the j-th antenna unit in an antenna group is different from the j-1th antenna unit, and the j-th antenna unit in the i-th antenna group and the j-th antenna unit in the i-1th antenna group
  • the structure is the same.
  • the widths of the antenna units are different or the same.
  • the second width wjt of the antenna units is different or the same.
  • the structure of the phase compensation unit in each phase compensation group is generally different, and the structure of the phase compensation unit in the corresponding position in the different phase compensation group is the same.
  • the width of the phase compensation unit is different or the same.
  • the third width wjp of the phase compensation unit is different or the same.
  • the antenna array of the embodiment of the present invention is generally implemented on a silicon optical platform with a silicon layer thickness of 220 nm.
  • the second width wjt can be 100 nm to 300 nm.
  • the second width wjt is 200 nm.
  • the relatively narrow waveguide width prevents the antenna end from confining the optical signal in the waveguide and makes the mode field spot larger.
  • the first width wj of any one of the phase compensation units 110 in the phase compensation group 11 is 300 nm to 500 nm, so as to ensure single-mode transmission without high-order modes causing unnecessary crosstalk.
  • the third width wjp is wj ⁇ 200 nm, and the width change of the waveguide will cause a larger change in the mode refractive index, that is, a larger phase change.
  • the third width wjp may be smaller than the first width wj, or may be larger than the first width wj, and the phase change directions of the two are opposite.
  • the phase compensation units is 1 ⁇ m-50 ⁇ m, and the length of any one of the antenna units is 1 ⁇ m-50 ⁇ m, so as to ensure low mode conversion loss and reduce crosstalk between adjacent waveguides.
  • the antenna array includes three antenna groups 12 and three phase compensation groups 11 connected to the three antenna groups 12 respectively.
  • Each antenna group 12 includes a first antenna unit 121, a second antenna unit 122, and a third antenna unit 123.
  • Each phase compensation group includes a first phase compensation unit 111 connected to the first antenna unit 121, a second phase compensation unit 112 connected to the second antenna unit 122, and a third phase compensation unit connected to the third antenna unit 123 113.
  • the first antenna unit 121 includes a tapered waveguide mode converter whose width gradually narrows from a first width w1 to a second width w1t, and the first phase compensation unit 111 includes a width gradually changing from the first width w1 to a third width
  • the first mode converter 1101 of w1p and the second mode converter 1102 whose width gradually changes from the third width w1p to the first width w1.
  • the second antenna unit 122 includes a tapered waveguide mode converter whose width gradually narrows from the first width w2 to the second width w2t, and the second phase compensation unit 112 includes the width gradually changes from the first width w2 to the third width.
  • the first mode converter 1101 of w2p and the second mode converter 1102 whose width gradually changes from the third width w2p to the first width w2.
  • the third antenna unit 123 includes a tapered waveguide mode converter whose width gradually narrows from the first width w3 to the second width w3t, and the third phase compensation unit 113 includes the width gradually changes from the first width w3 to the third width
  • the first mode converter 1101 of w3p and the second mode converter 1102 whose width gradually changes from the third width w3p to the first width w3.
  • the first widths w1, w2, and w3 are different, the second widths w1t, w2t, and w3t are also different, and the third widths w1p, w2p, and w3p are also different.
  • the first widths w1, w2, and w3 are the widths of the single-mode waveguide, which can be 300 nm to 500 nm, and the third widths w1p, w2p, and w3p are restricted by process conditions and can be 100 nm to 300 nm.
  • the second width w1t is determined according to the phase shift generated by the first antenna unit 121
  • the second width w2t is determined according to the phase shift generated by the second antenna unit 122
  • the second width w3t is determined according to the phase shift generated by the third antenna unit 123.
  • the lengths L2 of the first antenna unit 121, the second antenna unit 122, and the third antenna unit 123 are the same, and the lengths of the first phase compensation unit 111, the second phase compensation unit 112, and the third phase compensation unit 113 may be the same, or Not the same, set according to your needs.
  • the antenna array of the embodiment of the present invention can be processed by a silicon-based CMOS process, which is beneficial to realize a larger-scale antenna array.
  • the antenna array applied to the optical phased array includes N phase compensation groups and N antenna groups, each of the phase compensation groups includes M phase compensation units, and each of the antenna groups includes M antenna units, where N and M are positive integers; the input end of any one of the phase compensation units is used to receive optical signals, and the output end is connected to one of the antenna units in one of the antenna groups for receiving The optical signal of is transmitted to the antenna unit to compensate the phase difference generated by the antenna unit, and the antenna unit is used to transmit the optical signal.
  • the width of the antenna unit the size of the light spot emitted by the antenna can be enlarged, the reflection with the outside world can be reduced, and the transmission efficiency can be improved; the phase difference caused by different antenna units is compensated by the phase compensation unit, so that the transmitted multiple optical signals can be reduced.
  • the phase is kept equal to meet the requirements of far-field imaging.
  • the embodiment of the present invention also discloses an optical phased array, as shown in FIG. 4, comprising an optical signal output unit 1, a waveguide unit 2 and the aforementioned antenna array 3 applied to the optical phased array; the optical signal output unit 1 is used to output N ⁇ M modulated optical signals; the waveguide unit 2 includes an N ⁇ M waveguide pipe 200 for transmitting the N ⁇ M modulated optical signals to the antenna array 3 The light signal is emitted.
  • the optical signal output unit 1 includes an optical splitter 10 and a phase shifter 11 connected to the optical splitter 10.
  • the optical splitter 10 is used to split the input light; the phase shifter 11 is used to phase shift the light split by the optical splitter 10, and finally output N ⁇ M paths of the optical signals with different phases.
  • the beam splitter 10 may first split the input light, and then the phase shifter 11 phase shifts the light split by the beam splitter 10 to obtain and output multiple optical signals with different phases. It is also possible that the optical splitter 10 and the phase shifter 11 are alternately arranged, that is, the splitting and phase shifting of the input light are performed alternately, and finally multiple optical signals of different phases are output.
  • N ⁇ M optical signals of different phases are output.
  • the waveguide unit 2 receives the N ⁇ M optical signals carrying different phase information after being split and phase-shifted by the optical splitter 10 and the phase shifter 11, and the M output ends of the waveguide unit 2 and the N ⁇ M output ends of the antenna array 3 M input terminals are connected.
  • the phase-shifting zone may adopt a cascaded phase-shifting method. It is impossible to perform independent phase adjustment for each antenna, and can only be given an asymmetrically distributed phase. If the antenna arrays are inconsistent, there will be some additional phase differences that cannot be completely adjusted by the dynamic adjustment method of the phase shift zone. Therefore, a phase compensation group needs to be designed in the antenna array 3 to compensate for the additional phase shift caused by the antenna group.
  • the antenna array 3 includes N phase compensation groups and N antenna groups. Each phase compensation group can receive M input optical signals from the waveguide unit 2 and transmit them to the antenna group corresponding to the phase compensation group. For transmitting optical signals, the phase compensation group is used to compensate the phase shift generated by the antenna group corresponding to the phase compensation group.
  • the antenna array 3 For a more specific structure and working principle of the antenna array 3, refer to the antenna array of the previous embodiment, and will not be repeated here.
  • the embodiment of the invention also discloses a laser radar, which includes an optical phased array, a light receiving unit and a distance measuring unit.
  • the optical phased array is used to emit laser light
  • the light receiving unit is used to receive the laser signal returned by the object
  • the ranging unit is used to perform distance measurement based on the laser signal received by the I receiving unit.
  • the specific structure and working principle of the optical phased array in the embodiment of the present invention are the same as the optical phased array in the foregoing embodiment, and will not be repeated here.
  • the embodiment of the invention also discloses a smart device, including a lidar.
  • a smart device including a lidar.
  • the specific structure and working principle of the lidar are the same as the lidar in the foregoing embodiment, and will not be repeated here.
  • the antenna array applied to the optical phased array includes N phase compensation groups and N antenna groups, each of the phase compensation groups includes M phase compensation units, and each of the antenna groups includes M antenna units, where N and M are positive integers; the input end of any one of the phase compensation units is used to receive optical signals, and the output end is connected to one of the antenna units in one of the antenna groups for receiving The optical signal of is transmitted to the antenna unit to compensate the phase difference generated by the antenna unit, and the antenna unit is used to transmit the optical signal.
  • the width of the antenna unit the size of the light spot emitted by the antenna can be enlarged, the reflection with the outside world can be reduced, and the transmission efficiency can be improved; the phase difference caused by different antenna units is compensated by the phase compensation unit, so that the transmitted multiple optical signals can be reduced.
  • the phase is kept equal to meet the requirements of far-field imaging.
  • modules or units or components in the embodiments can be combined into one module or unit or component, and in addition, they can be divided into multiple sub-modules or sub-units or sub-components. Except that at least some of such features and/or processes or units are mutually exclusive, any combination can be used to compare all features disclosed in this specification (including the accompanying claims, abstract and drawings) and any method or methods disclosed in this manner or All the processes or units of the equipment are combined. Unless expressly stated otherwise, each feature disclosed in this specification (including the accompanying claims, abstract and drawings) may be replaced by an alternative feature providing the same, equivalent or similar purpose.

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Abstract

本发明实施例公开了一种应用于光学相控阵的天线阵列、光学相控阵及激光雷达，其中，天线阵列包括：N个相位补偿组和N个天线组，每个相位补偿组包括M个相位补偿单元，每个天线组包括M个天线单元，其中，N、M为正整数；其中一个所述相位补偿组中的其中一个相位补偿单元的输入端用于接收光信号，输出端连接其中一个天线组中的其中一个天线单元，用于将接收的光信号传输至天线单元，并根据天线单元产生的相位偏移，对所述光信号进行相位补偿，天线单元用于发射光信号。由此可见，利用本发明方案，通过缩小天线单元的宽度可以扩大天线发射的光斑大小，降低与外界的反射，提高发射效率；不同的天线单元引起的相位差异通过相位补偿单元进行弥补，使发射出去的多路光信号的相位保持等差，满足远场成像的要求。

Description

应用于光学相控阵的天线阵列、光学相控阵及激光雷达 技术领域
本发明涉及激光雷达技术领域，具体涉及一种应用于光学相控阵的天线阵列、光学相控阵及激光雷达。
背景技术
光学相控阵是全固态激光雷达系统的重要组成部分，具有完全固态化，高可靠性，体积小，方便控制等优点。光学相控阵可以通过集成光电子技术来实现，现有的天线阵列包括绝缘体上硅(Silicon-on-insulator,SOI)材料，氮化硅材料，三五族材料等。而基于SOI材料的硅基光学相控阵由于其可以利用成熟的微电子互补金属氧化物半导体(Complementary Metal Oxide Semiconductor，CMOS)工艺平台，近年来受到业界的高度关注。
一般来说，光学相控阵由分光器、可调谐移相器、连接波导，天线发射单元构成。输入光通过分光器可以分成等比例，或者不等比例的光，这些光通过可调谐移相器之后，其相位会被改变。当经过一系列连接波导后，最终在天线发射单元中发射到自由空间中。
边缘发射天线在芯片边缘的波导宽度往往较宽，光能够在波导中被很好的限制，当突然到达芯片边缘往自由空间发射时，会由于折射率的突然变化，导致出现明显的反射现象，极大地影响了这种天线的发射效率，因此如何提高边缘发射天线的发射效率是目前业界急需解决的问题。
发明内容
鉴于上述问题，本发明实施例提供一种克服上述问题或者至少部分地解决上述问题的一种应用于光学相控阵的天线阵列、光学相控阵及激光雷达。
根据本发明的一个方面，提供了一种应用于光学相控阵的天线阵列，包括：N个相位补偿组和N个天线组，每个所述相位补偿组包括M个相位补偿单元，每个所述天线组包括M个天线单元，其中，N、M为正整数；其中一个所述相位补偿组中的其中一个所述相位补偿单元的输入端用于接收光信号，输出端连 接其中一个天线组中的其中一个所述天线单元，用于将接收的光信号传输至所述天线单元，并根据所述天线单元产生的相位偏移，对所述光信号进行相位补偿，所述天线单元用于发射所述光信号。
可选的，所述天线单元包括由第一宽度逐渐变窄至第二宽度的波导模式转换器，用于将波导中的光斑逐渐扩大并在末端发射出去。
可选的，所述相位补偿单元包括宽度由所述第一宽度逐渐变化至第三宽度的第一模式转换器和宽度由所述第三宽度逐渐变化至所述第一宽度的第二模式转换器，所述第一模式转换器的输出端与所述第二模式转换器的输入端连接，所述第二模式转换器的输出端与其中一个所述天线单元连接。
可选的，所述第三宽度与所述第二模式转换器的输出端连接的所述天线单元的所述第二宽度以及所述天线阵列的制作工艺相关。
可选的，任一所述相位补偿组中，任一所述天线组中，任一所述天线单元产生θ的相位移动，则输出端与所述天线单元连接的所述相位补偿单元通过调整所述第一宽度与所述第三宽度的差值，使所述相位补偿单元产生-θ的相位移动，其中θ表示相位的变化量。
可选的，所述相位补偿组中任一所述相位补偿单元的所述第一宽度wj为300nm～500nm，所述第三宽度wjp为wj±200nm。
可选的，任一所述相位补偿单元的长度为1μm～50μm，任一所述天线单元的长度为1μm～50μm。
根据本发明的另一个方面，提供了一种光学相控阵，包括光信号输出单元、波导单元和前述的应用于光学相控阵的天线阵列；所述光信号输出单元，用于输出N×M路调制后的光信号；所述波导单元，包括N×M路波导管道，用于将所述N×M路调制后的光信号传输至所述天线单元以发射所述光信号。
可选的，所述光信号输出单元包括分光器和与所述分光器连接的移相器，所述分光器用于对输入光进行分光；所述移相器用于对所述分光器分出的光进行移相，最终输出N×M路不同相位的所述光信号。
根据本发明的另一个方面，提供了一种激光雷达，包括前述的光学相控阵、光接收单元以及测距单元。
根据本发明的另一个方面，提供了一种智能设备，包括前述的激光雷达。
在本发明的实施例中，应用于光学相控阵的天线阵列包括N个相位补偿组 和N个天线组，每个所述相位补偿组包括M个相位补偿单元，每个所述天线组包括M个天线单元，其中，N、M为正整数；其中一个所述相位补偿组中的其中一个所述相位补偿单元的输入端用于接收光信号，输出端连接其中一个天线组中的其中一个所述天线单元，用于将接收的光信号传输至所述天线单元，并根据所述天线单元产生的相位偏移，对所述光信号进行相位补偿，所述天线单元用于发射所述光信号。因此，通过缩小天线单元的宽度可以扩大天线发射的光斑大小，降低与外界的反射，提高发射效率；不同的天线单元引起的相位差异通过相位补偿单元进行弥补，使发射出去的多路光信号的相位保持等差，满足远场成像的要求。
附图说明
一个或多个实施例通过与之对应的附图中的图片进行示例性说明，这些示例性说明并不构成对实施例的限定，附图中具有相同参考数字标号的元件表示为类似的元件，除非有特别申明，附图中的图不构成比例限制。
图1示出了根据本发明实施例一种应用于光学相控阵的天线阵列的结构示意图；
图2示出了根据本发明实施例一种应用于光学相控阵的天线阵列的相位补偿组和天线组的内部结构示意图；
图3示出了根据本发明实施例另一种应用于光学相控阵的天线阵列的结构示意图；
图4示出了根据本发明实施例一种光学相控阵的结构示意图。
具体实施方式
下面将参照附图更详细地描述本公开的示例性实施例。虽然附图中显示了本公开的示例性实施例，然而应当理解，可以以各种形式实现本公开而不应被这里阐述的实施例所限制。相反，提供这些实施例是为了能够更透彻地理解本公开，并且能够将本公开的范围完整的传达给本领域的技术人员。
图1示出了根据本发明实施例一种应用于光学相控阵的天线阵列的结构示意图。图2示出了根据本发明实施例一种应用于光学相控阵的天线阵列的相位补偿组和天线组的内部结构示意图。如图1所示，该应用于光学相控阵的天线 阵列包括N个相位补偿组11和N个天线组12。参见图2，每个所述相位补偿组11包括M个相位补偿单元110，每个所述天线组12包括M个天线单元120，其中，N、M为正整数；其中一个所述相位补偿组中的其中一个所述相位补偿单元110的输入端用于接收光信号，输出端连接其中一个天线组12中的其中一个所述天线单元120，用于将接收的光信号传输至所述天线单元120，并根据所述天线单元120产生的相位偏移，对所述光信号进行相位补偿，所述天线单元120用于发射所述光信号。
在本发明实施例中，第i个相位补偿组11与第i个天线组12连接，每个相位补偿组11可以接收M个输入光信号，其中1<i<N。不同的相位补偿组11之间一般结构保持一致，同样地，不同的天线组12之间一般结构保持一致。任一相位补偿组11以及与该相位补偿组11连接的天线组12中，第j个相位补偿单元110与第j个天线单元120连接，每个相位补偿单元110可以接收一个输入光信号，其中1<j<M。天线单元120用于发射光信号，相位补偿单元110用于补偿与相位补偿单元110连接的天线单元120引起的相位差。
在本发明实施例中，任一天线单元120由一段逐渐变窄的波导模式转换器构成，可以将天线波导中的光斑逐渐扩大。波导模式转换器可以是宽度逐渐减小的锥形波导，或者抛物线以及类似轮廓的波导。具体地，在任一天线组12中，第j天线单元120包括由第一宽度wj逐渐变窄至第二宽度wjt的波导模式转换器，用于将波导中的光斑逐渐扩大并在末端发射出去。天线单元120的宽度由由第一宽度wj逐渐变窄至第二宽度wjt，可以使每根天线中的光斑逐渐增大，模式有效折射率降低，与自由空间中空气的折射率更加接近，因此当光信号发射出去的时候，由于天线模式折射率和自由空间空气折射率的差异导致的反射也会得到抑制，使发射效率明显增加。
在任一相位补偿组11中，任一相位补偿单元110可以是由两个宽度逐渐变化的锥形模式转换器，可以采用蝴蝶结的形状或者类似的形状，内部的轮廓除了锥形，还可以是抛物线以及类似的曲线。相位补偿单元110通过宽度或者长度的变化，引起相位移动，来弥补与之连接的天线单元120引起的额外相位移动。具体地，相位补偿单元包括宽度由所述第一宽度wj逐渐变化至第三宽度wjp的第一模式转换器和宽度由所述第三宽度wjp逐渐变化至所述第一宽度wj的第二模式转换器，所述第一模式转换器的输出端与所述第二模式转换器的输 入端连接，所述第二模式转换器的输出端与其中一个所述天线单元120连接。任一相位补偿单元110的相位补偿量通过改变第三宽度wjp的值来决定。任一所述相位补偿组11中，在任一相位补偿单元110的长度L1相同的情况下，所述相位补偿单元110的所述第一宽度wj与所述第三宽度wjp的差值|wjp-wj|越大，所述相位补偿单元110对相位的改变也越大。
在本发明实施例中，任一所述天线组12中，任一所述天线单元120产生θ的相位移动，则输出端与所述天线单元120连接的所述相位补偿单元110通过调整所述第一宽度wj与所述第三宽度wjp的差值，使所述相位补偿单元110产生-θ的相位移动，其中θ表示相位的变化量。根据天线组12中的天线单元120引起的相位差，可以调节与该天线单元120连接的对应的相位补偿单元110中的第三宽度wjp，来保证相位得到补偿。即所述第三宽度wjp与所述第二模式转换器的输出端连接的所述天线单元120的所述第二宽度wjt以及所述天线阵列的制作工艺相关。比如，任一天线组12中第j个天线单元120能够引起θj的相位移动，那么与该第j个天线单元120连接的第j个相位补偿单元110中的第三宽度wjp的选取应该保证该相位补偿单元110能够引起-θj的相位移动，这样这2个单元的联合相位移动将会是0。如果进入任一天线组的光信号的相位为等差排布，那么最后发射出去的光也会是等差排布。
在本发明实施例中，每个天线组12中的天线单元120的结构一般不同，而不同天线组中对应位置的天线单元的结构相同。如同一个天线组中第j个天线单元与第j-1个天线单元的结构不同，而第i个天线组中的第j个天线单元和第i-1个天线组中的第j个天线单元结构相同。具体表现为天线单元的宽度不同或者相同，优选地，天线单元的第二宽度wjt不同或者相同。对应地，每个相位补偿组中的相位补偿单元的结构一般不同，而不同相位补偿组中对应位置的相位补偿单元的结构相同。具体表现为相位补偿单元的宽度不同或者相同，优选地，相位补偿单元的第三宽度wjp不同或者相同。
本发明实施例的天线阵列一般在硅层厚度为220nm的硅光平台上面实施。天线单元120末端的第二宽度wjt越小，其模式有效折射率与自由空间中空气的折射率越接近，天线模式折射率和自由空间空气折射率的差异导致的反射得到更好抑制，使发射效率更高。但是由于工艺限制，第二宽度wjt可以取100nm～300nm，优选地，第二宽度wjt为200nm，相对较窄的波导宽度使天线末端无法将 光信号限制在波导中，使模场光斑较大。所述相位补偿组11中任一所述相位补偿单元110的所述第一宽度wj为300nm～500nm，以保证单模传输，不会有高阶模来引起不必要的串扰。所述第三宽度wjp为wj±200nm，波导的宽度变化会引起较大的模式折射率的变化，即会引起较大的相位的变化。在本发明实施例中，第三宽度wjp可以小于第一宽度wj，也可以大于第一宽度wj，两者相位变化方向相反。如，第三宽度wjp小于第一宽度wj，相位增大；而第三宽度wjp大于第一宽度wj，相位减小。任一所述相位补偿单元的长度为1μm～50μm，任一所述天线单元的长度为1μm～50μm，以保证较低的模式转换损耗的同时，降低相邻波导间的串扰。
以下以天线组数目N＝3，每个天线组中的天线单元数目M＝3为例进行说明。如图3所示，天线阵列包括三个天线组12和分别与该三个天线组12连接的三个相位补偿组11。每个天线组12包括第一天线单元121、第二天线单元122以及第三天线单元123。每个相位补偿组包括与第一天线单元121连接的第一相位补偿单元111、与第二天线单元122连接的第二相位补偿单元112、以及与第三天线单元123连接的第三相位补偿单元113。
第一天线单元121包括宽度由第一宽度w1逐渐变窄至第二宽度w1t的锥形的波导模式转换器，第一相位补偿单元111包括宽度由所述第一宽度w1逐渐变化至第三宽度w1p的第一模式转换器1101和宽度由所述第三宽度w1p逐渐变化至所述第一宽度w1的第二模式转换器1102。第二天线单元122包括宽度由第一宽度w2逐渐变窄至第二宽度w2t的锥形的波导模式转换器，第二相位补偿单元112包括宽度由所述第一宽度w2逐渐变化至第三宽度w2p的第一模式转换器1101和宽度由所述第三宽度w2p逐渐变化至所述第一宽度w2的第二模式转换器1102。第三天线单元123包括宽度由第一宽度w3逐渐变窄至第二宽度w3t的锥形的波导模式转换器，第三相位补偿单元113包括宽度由所述第一宽度w3逐渐变化至第三宽度w3p的第一模式转换器1101和宽度由所述第三宽度w3p逐渐变化至所述第一宽度w3的第二模式转换器1102。
在本发明实施例中，第一宽度w1、w2、w3各不相同，第二宽度w1t、w2t、w3t也各不相同，第三宽度w1p、w2p、w3p也各不相同。第一宽度w1、w2、w3为单模波导的宽度，可以取300nm～500nm，第三宽度w1p、w2p、w3p受工艺条件限制，可以取100nm～300nm。第二宽度w1t根据第一天线单元121 产生的相位移动确定，第二宽度w2t根据第二天线单元122产生的相位移动确定，第二宽度w3t根据第三天线单元123产生的相位移动确定。
第一天线单元121、第二天线单元122以及第三天线单元123的长度L2相同，第一相位补偿单元111、第二相位补偿单元112、以及第三相位补偿单元113的长度可以相同，也可以不相同，具体根据需要设置。
本发明实施例的天线阵列可以利用于硅基CMOS工艺加工，有利于实现更大规模的天线阵列。
在本发明的实施例中，应用于光学相控阵的天线阵列包括N个相位补偿组和N个天线组，每个所述相位补偿组包括M个相位补偿单元，每个所述天线组包括M个天线单元，其中，N、M为正整数；任一个所述相位补偿单元的输入端用于接收光信号，输出端连接其中一个天线组中的其中一个所述天线单元，用于将接收的光信号传输至所述天线单元，并补偿所述天线单元产生的相位差，所述天线单元用于发射所述光信号。因此，通过缩小天线单元的宽度可以扩大天线发射的光斑大小，降低与外界的反射，提高发射效率；不同的天线单元引起的相位差异通过相位补偿单元进行弥补，使发射出去的多路光信号的相位保持等差，满足远场成像的要求。
本发明实施例还公开了一种光学相控阵，如图4所示，包括光信号输出单元1、波导单元2和前述的应用于光学相控阵的天线阵列3；所述光信号输出单元1用于输出N×M路调制后的光信号；所述波导单元2包括N×M路波导管道200，用于将所述N×M路调制后的光信号传输至所述天线阵列3以发射所述光信号。
光信号输出单元1包括分光器10和与分光器10连接的移相器11。分光器10用于对输入光进行分光；移相器11用于对分光器10分出的光进行移相，最终输出N×M路不同相位的所述光信号。在本发明实施例中，可以是先分光器10对输入光进行分光，然后移相器11对分光器10分出的光进行移相，得到多个不同相位的光信号并输出。也可以是分光器10和移相器11交替设置，即对输入光的分光和移相交替进行，最终输出多个不同相位的光信号。经过分光器10和移相器11分别对输入光进行分光和移相后输出N×M个不同相位的光信号。波导单元2接收经分光器10和移相器11分光和移相后输出的N×M个载有不同相位信息的光信号，波导单元2的M个输出端与所述天线阵列3的N× M个输入端进行连接。
为了保证这些光信号在天线阵列3的末端发射出去后，能够在自由空间远场形成远场光斑，必须使这些光信号的相位是等差分布的。为了减少移相区的复杂度和功耗，移相区可能采用级联的移相方式，无法对每根天线进行独立的相位调节，只能给予等差分布的相位。如果天线阵列不一致，将会带来一些额外的相位差无法完全通过移相区的动态调节方式来进行调节。因此，需要在天线阵列3中设计一个相位补偿组来弥补天线组引起的额外相位移动。
天线阵列3包括N个相位补偿组和N个天线组，每个相位补偿组可以接收来自波导单元2的M个输入光信号，并传输至与该相位补偿组对应连接的天线组，天线组用于发射光信号，相位补偿组用于补偿与该相位补偿组对应连接的天线组产生的相位移动。天线阵列3更具体的结构及工作原理参见前面实施例的天线阵列，在此不再赘述。
本发明实施例还公开了一种激光雷达，包括光学相控阵、光接收单元以及测距单元。光学相控阵用于发射激光，光接收单元用于接收经物体反向回来的激光信号，测距单元用于根据我接收单元接收的激光信号进行测距。本发明实施例中的光学相控阵的具体结构和工作原理与前述实施例中的光学相控阵相同，在此不再赘述。
本发明实施例还公开了一种智能设备，包括激光雷达。激光雷达的具体结构和工作原理与前述实施例中的激光雷达相同，在此不再赘述。
在本发明的实施例中，应用于光学相控阵的天线阵列包括N个相位补偿组和N个天线组，每个所述相位补偿组包括M个相位补偿单元，每个所述天线组包括M个天线单元，其中，N、M为正整数；任一个所述相位补偿单元的输入端用于接收光信号，输出端连接其中一个天线组中的其中一个所述天线单元，用于将接收的光信号传输至所述天线单元，并补偿所述天线单元产生的相位差，所述天线单元用于发射所述光信号。因此，通过缩小天线单元的宽度可以扩大天线发射的光斑大小，降低与外界的反射，提高发射效率；不同的天线单元引起的相位差异通过相位补偿单元进行弥补，使发射出去的多路光信号的相位保持等差，满足远场成像的要求。
在此处所提供的说明书中，说明了大量具体细节。然而，能够理解，本发明的实施例可以在没有这些具体细节的情况下实践。在一些实例中，并未详细 示出公知的方法、结构和技术，以便不模糊对本说明书的理解。
类似地，应当理解，为了精简本公开并帮助理解各个发明方面中的一个或多个，在上面对本发明的示例性实施例的描述中，本发明的各个特征有时被一起分组到单个实施例、图、或者对其的描述中。然而，并不应将该公开的方法解释成反映如下意图：即所要求保护的本发明要求比在每个权利要求中所明确记载的特征更多的特征。更确切地说，如下面的权利要求书所反映的那样，发明方面在于少于前面公开的单个实施例的所有特征。因此，遵循具体实施方式的权利要求书由此明确地并入该具体实施方式，其中每个权利要求本身都作为本发明的单独实施例。
本领域那些技术人员可以理解，可以对实施例中的设备中的模块进行自适应性地改变并且把它们设置在与该实施例不同的一个或多个设备中。可以把实施例中的模块或单元或组件组合成一个模块或单元或组件，以及此外可以把它们分成多个子模块或子单元或子组件。除了这样的特征和/或过程或者单元中的至少一些是相互排斥之外，可以采用任何组合对本说明书(包括伴随的权利要求、摘要和附图)中公开的所有特征以及如此公开的任何方法或者设备的所有过程或单元进行组合。除非另外明确陈述，本说明书(包括伴随的权利要求、摘要和附图)中公开的每个特征可以由提供相同、等同或相似目的的替代特征来代替。
此外，本领域的技术人员能够理解，尽管在此所述的一些实施例包括其它实施例中所包括的某些特征而不是其它特征，但是不同实施例的特征的组合意味着处于本发明的范围之内并且形成不同的实施例。例如，在下面的权利要求书中，所要求保护的实施例的任意之一都可以以任意的组合方式来使用。
应该注意的是上述实施例对本发明进行说明而不是对本发明进行限制，并且本领域技术人员在不脱离所附权利要求的范围的情况下可设计出替换实施例。在权利要求中，不应将位于括号之间的任何参考符号构造成对权利要求的限制。单词“包含”不排除存在未列在权利要求中的元件或步骤。位于元件之前的单词“一”或“一个”不排除存在多个这样的元件。本发明可以借助于包括有若干不同元件的硬件以及借助于适当编程的计算机来实现。在列举了若干装置的单元权利要求中，这些装置中的若干个可以是通过同一个硬件项来具体体现。单词第一、第二、以及第三等的使用不表示任何顺序。可将这些单词解释为名称。

Claims (10)

  1. 一种应用于光学相控阵的天线阵列，其特征在于，包括N个相位补偿组和N个天线组，每个所述相位补偿组包括M个相位补偿单元，每个所述天线组包括M个天线单元，其中，N、M为正整数；其中一个所述相位补偿组中的其中一个所述相位补偿单元的输入端用于接收光信号，输出端连接其中一个天线组中的其中一个所述天线单元，用于将接收的光信号传输至所述天线单元，并根据所述天线单元产生的相位偏移，对所述光信号进行相位补偿，所述天线单元用于发射所述光信号。
  2. 如权利要求1所述的天线阵列，其特征在于，所述天线单元包括由第一宽度逐渐变窄至第二宽度的波导模式转换器，用于将波导中的光斑逐渐扩大并在末端发射出去。
  3. 如权利要求2所述的天线阵列，其特征在于，所述相位补偿单元包括宽度由所述第一宽度逐渐变化至第三宽度的第一模式转换器和宽度由所述第三宽度逐渐变化至所述第一宽度的第二模式转换器，所述第一模式转换器的输出端与所述第二模式转换器的输入端连接，所述第二模式转换器的输出端与其中一个所述天线单元连接。
  4. 如权利要求3所述的天线阵列，其特征在于，所述第三宽度与所述第二模式转换器的输出端连接的所述天线单元的所述第二宽度以及所述天线阵列的制作工艺相关。
  5. 如权利要求3所述的天线阵列，其特征在于，任一所述天线组中，任一所述天线单元产生θ的相位移动，则输出端与所述天线单元连接的所述相位补偿单元通过调整所述第一宽度与所述第三宽度的差值，使所述相位补偿单元产生-θ的相位移动，其中θ表示相位的变化量。
  6. 如权利要求3所述的天线阵列，其特征在于，所述相位补偿组中任一所述相位补偿单元的所述第一宽度wj为300nm～500nm，所述第三宽度wjp为wj±200nm。
  7. 如权利要求1所述的天线阵列，其特征在于，任一所述相位补偿单元的长度为1μm～50μm，任一所述天线单元的长度为1μm～50μm。
  8. 一种光学相控阵，其特征在于，包括光信号输出单元、波导单元和如权 利要求1-7中任一项所述的应用于光学相控阵的天线阵列；所述光信号输出单元，用于输出N×M路调制后的光信号；所述波导单元，包括N×M路波导管道，用于将所述N×M路调制后的光信号传输至所述天线阵列以发射所述光信号。
  9. 如权利要求8所述的光学相控阵，其特征在于，所述光信号输出单元包括分光器和与所述分光器连接的移相器，所述分光器用于对输入光进行分光；所述移相器用于对所述分光器分出的光进行移相，最终输出N×M路不同相位的所述光信号。
  10. 一种激光雷达，其特征在于，包括光接收单元、测距单元以及如权利要求8-9中任一项所述的光学相控阵。
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022179020A1 (zh) * 2021-02-23 2022-09-01 鹏城实验室 片上自适应光接收机系统、光芯片及通信设备

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115685220A (zh) * 2021-07-30 2023-02-03 北京万集科技股份有限公司 目标探测方法、opa激光雷达及计算机可读存储介质
CN115694564B (zh) * 2022-10-26 2024-04-16 Oppo广东移动通信有限公司 蓝牙系统、处理蓝牙信号的方法、芯片以及电子设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070211995A1 (en) * 2006-03-09 2007-09-13 Christensen Scott E Laser beam transformation and combination using tapered waveguides
CN108646430A (zh) * 2018-03-22 2018-10-12 浙江大学 一种基于热光开关和硅光相控阵的单波长多线扫描系统
CN108957900A (zh) * 2018-06-29 2018-12-07 西安空间无线电技术研究所 一种基于硅基的多波束光学相控阵天线
US10326526B2 (en) * 2016-09-08 2019-06-18 Nxgen Partners Ip, Llc Method for muxing orthogonal modes using modal correlation matrices
CN109991582A (zh) * 2019-03-13 2019-07-09 上海交通大学 硅基混合集成激光雷达芯片系统

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9151894B2 (en) * 2012-03-08 2015-10-06 National Institute Of Advanced Industrial Science And Technology Light source circuit and light source device equipped with same
CN106908776A (zh) * 2017-04-26 2017-06-30 上海交通大学 基于非等宽硅波导的激光雷达芯片发射端
CN108963459B (zh) * 2018-06-30 2021-05-18 华为技术有限公司 一种测量方法及设备

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070211995A1 (en) * 2006-03-09 2007-09-13 Christensen Scott E Laser beam transformation and combination using tapered waveguides
US10326526B2 (en) * 2016-09-08 2019-06-18 Nxgen Partners Ip, Llc Method for muxing orthogonal modes using modal correlation matrices
CN108646430A (zh) * 2018-03-22 2018-10-12 浙江大学 一种基于热光开关和硅光相控阵的单波长多线扫描系统
CN108957900A (zh) * 2018-06-29 2018-12-07 西安空间无线电技术研究所 一种基于硅基的多波束光学相控阵天线
CN109991582A (zh) * 2019-03-13 2019-07-09 上海交通大学 硅基混合集成激光雷达芯片系统

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP3998492A4 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022179020A1 (zh) * 2021-02-23 2022-09-01 鹏城实验室 片上自适应光接收机系统、光芯片及通信设备
US12107634B2 (en) 2021-02-23 2024-10-01 Peng Cheng Laboratory On-chip adaptive optical receiver system, optical chip, and communication device

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