WO2020250897A1 - Système de traitement d'informations, procédé de traitement d'informations et programme - Google Patents

Système de traitement d'informations, procédé de traitement d'informations et programme Download PDF

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Publication number
WO2020250897A1
WO2020250897A1 PCT/JP2020/022722 JP2020022722W WO2020250897A1 WO 2020250897 A1 WO2020250897 A1 WO 2020250897A1 JP 2020022722 W JP2020022722 W JP 2020022722W WO 2020250897 A1 WO2020250897 A1 WO 2020250897A1
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WIPO (PCT)
Prior art keywords
vacuum pump
frequency band
data
vibration
intensity
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PCT/JP2020/022722
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English (en)
Japanese (ja)
Inventor
恵治 舞鴫
哲郎 杉浦
篤志 塩川
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株式会社荏原製作所
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Publication of WO2020250897A1 publication Critical patent/WO2020250897A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/10—Other safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations

Definitions

  • the present invention relates to an information processing system, an information processing method and a program.
  • the vacuum pump is stopped due to an abnormality derived from the product of the vacuum pump at any timing during the continuous operation of the vacuum pump, there is a possibility of damaging the product in the manufacturing process of the semiconductor manufacturing equipment. Therefore, it is required that the vacuum pump does not stop during the manufacturing process of the semiconductor manufacturing apparatus.
  • the vacuum pump has a vacuum pump body, a pump drive motor, and a motor drive control device housed in a housing (device outer box), and is assembled as an integrated structure as a whole.
  • Pre-determined parts hereinafter referred to as standard replacement parts, for example, rubber packing to prevent gas leaks
  • standard replacement parts for example, rubber packing to prevent gas leaks
  • the vacuum pump in operation may malfunction or malfunction due to the fact that parts other than the standard replacement parts specified in advance were not replaced with new parts during the maintenance of the vacuum pump.
  • parts other than the standard replacement parts specified in advance were not replaced with new parts during the maintenance of the vacuum pump.
  • the cost of replacement parts increases due to excessive replacement of parts other than standard replacement parts during maintenance of the vacuum pump.
  • the present invention has been made in view of the above problems, and is an information processing system and an information processing method capable of reducing the frequency of failures or abnormalities in a vacuum pump during operation and reducing the cost of replacement parts. And the purpose of providing the program.
  • a storage in which a frequency band and information used as a material for determining whether or not to replace a component are associated and stored, and vibration of a vacuum pump during operation are stored.
  • the difference between the reference data or the reference range and the comparison unit that compares the sound intensity for each frequency band and the comparison result the difference between the reference data of the intensity of a certain frequency band exceeds the reference value or the intensity of a certain frequency band
  • the storage is provided with an output unit that outputs information corresponding to the frequency band with reference to the storage.
  • the information processing system is the information processing system according to the first aspect, and the information stored in the storage, which is a material for determining whether or not the parts should be replaced, is , Part identification information that identifies the part to be replaced, failure prediction time, vacuum pump operation period and / or failure probability when the part is used continuously, or vacuum pump operation period and / or failure when the part is replaced.
  • the occurrence probability, and the information output in the output unit is the part identification information, the failure prediction time, the operation period and / or the failure occurrence probability of the vacuum pump when the parts are continuously used, or the vacuum when the parts are replaced. Pump operating period and / or failure probability.
  • each part that is likely to have a failure or abnormality can be specified as a part that needs to be replaced, so that a part that is likely to have a failure or abnormality can be replaced.
  • the information processing system is the information processing system according to the first or second aspect, and is based on at least one of the command value of the parameter of the vacuum pump or the observed value of the parameter.
  • the comparison unit includes a discriminating unit for discriminating the gas load condition of the vacuum pump and / or the operating process of the semiconductor manufacturing apparatus to which the vacuum pump is connected, and the comparison unit determines the comparison for each frequency band. It is executed for each gas load condition or operation process, and the storage stores the gas load condition or the operation process in association with a set of the frequency band and the component identification information for identifying the component to be replaced.
  • the output unit stores the storage when the difference between the intensity of a certain frequency band and the reference data exceeds the reference value or the intensity of a certain frequency band deviates from the reference range.
  • the component identification information corresponding to the frequency band and the determined gas load condition or operation process set is output.
  • the information processing system is the information processing system according to any one of the first to third aspects, and in the storage, vacuum pumps that have failed in the past are vacuumed for each model.
  • the aged data of the pump vibration data and the aged data of the vacuum pump drive current data are stored in association with the elapsed time from the start of use to the time of failure, and the operation of the target vacuum pump is performed with reference to the storage.
  • a predictor for predicting the failure time of the target vacuum pump can be obtained. Further prepare.
  • the user of the target vacuum pump can know the failure prediction time of the target vacuum pump, so that the vacuum pump can be put out for maintenance or new before it is stopped during the semiconductor manufacturing process. It is possible to increase the probability that the vacuum pump can be avoided from stopping during the semiconductor manufacturing process by replacing it with a vacuum pump.
  • the information processing system is the information information system according to any one of the first to fourth aspects, and the comparison unit Fourier transforms the time series data of vibration and / or sound. , The amplitude after Fourier transform is compared for each frequency band.
  • vibration and / or sound intensity can be compared.
  • the information processing system is the information processing system according to any one of the first to fifth aspects, and the output unit is a pump operation period and a failure occurrence probability when parts are continued. And / or the relationship between the pump operation period and the failure occurrence probability when parts are replaced is output.
  • the user can predict the cost-effectiveness of the part when the part is replaced.
  • the information processing system according to the seventh aspect of the present invention is the information processing system according to any one of the first to sixth aspects, and the reference data is based on the vacuum pump at the time of pre-delivery inspection of the vacuum pump. It is statistical data of the vibration or sound intensity of any other vacuum pump of the same model at the time of initial operation, or the vibration or sound intensity.
  • the information processing method includes a step of comparing the vibration or sound intensity of the vacuum pump during operation with reference data or a reference range for each frequency band, and as a result of comparison, a certain frequency band.
  • a certain frequency band When the difference from the reference data of the intensity of the above exceeds the reference value or the intensity of a certain frequency band deviates from the reference range, there is a step of referring to the storage and outputting the information corresponding to the frequency band.
  • the frequency band and the information regarding the replacement of parts of the vacuum pump are stored in association with each other.
  • each part that is likely to have a failure or abnormality can be specified as a part that needs to be replaced, so that a part that is likely to have a failure or abnormality can be replaced.
  • a program according to a ninth aspect of the present invention is a computer that can refer to a storage in which a frequency band and information on vacuum pump component replacement are stored in association with the vibration or sound of the vacuum pump during operation.
  • the difference between the reference data or the reference range and the comparison unit that compares the intensity for each frequency band and the comparison result the difference between the reference data of the intensity of a certain frequency band exceeds the reference value or the intensity of a certain frequency band exceeds the reference range.
  • it is a program for functioning as an output unit that outputs information corresponding to the frequency band with reference to the storage.
  • each part that is likely to have a failure or abnormality can be specified as a part that needs to be replaced, so that a part that is likely to have a failure or abnormality can be replaced.
  • each part that is likely to have a failure or abnormality can be specified as a part that needs to be replaced, so that the part that is likely to have a failure or abnormality can be replaced. it can.
  • the state of parts (for example, the damaged state) is estimated from the analysis result of the vibration data of the pump.
  • the vibration value of the vacuum pump (hereinafter, also referred to as the pump vibration value) changes depending on the operating state of the vacuum pump.
  • the operating state of the vacuum pump is estimated from the motor current value. When the motor current value is high, the load condition for maintaining the rotor rotation is large.
  • the pump vibration value and the motor current value are measured and recorded as a set.
  • Vibration data is subjected to frequency division data processing (FFT processing) in addition to the amplitude, vibration velocity, and vibration acceleration at the time of measurement.
  • FFT processing frequency division data processing
  • the failed component can be identified by reading the component corresponding to the specific frequency band from the storage.
  • the vibration data includes, for example, (1) 1-axis amplitude data, velocity data, acceleration data, (2) 3-axis amplitude data, velocity data, acceleration data, and (3) 3-axis rotation angle velocity data. It may be either.
  • FIG. 1 is a schematic configuration diagram of an information processing system according to the first embodiment.
  • the information processing system S according to the first embodiment includes semiconductor manufacturing systems 10-1, ..., 10-N, and semiconductor manufacturing systems 10-1, ..., 10- via a network NW.
  • the information processing device 20 connected to the N, the tester terminal 30 connected to the network NW, the user terminal 40 connected to the network NW, and the maintenance terminal 50 connected to the network NW are provided.
  • the tester terminal 30 is, for example, a terminal used by a tester who conducts a pre-shipment performance test in a factory that manufactures a vacuum pump.
  • the user terminal 40 is a terminal used by a user who uses the semiconductor manufacturing systems 10-1, ..., 10-N.
  • the maintenance terminal 50 is, for example, a terminal used by a person who maintains a vacuum pump in a factory for maintaining the vacuum pump.
  • the semiconductor manufacturing systems 10-1, ..., 10-N are each equipped with a vacuum pump 3.
  • the semiconductor manufacturing systems 10-1, ..., 10-N are collectively referred to as the semiconductor manufacturing system 10.
  • FIG. 2 is a schematic diagram showing an example of data flow during the manufacturing process, operation, and maintenance process.
  • the vibration of the vacuum pump is measured in the pre-shipment performance test of the vacuum pump.
  • the control device 4 described later in the semiconductor manufacturing system 10 transmits vibration data indicating this vibration amount and drive current data indicating the drive current of the motor 33 described later in the vacuum pump to the information processing device 20.
  • the information processing device 20 predicts the failure occurrence time of the vacuum pump 3 using the vibration data and the drive current data, and transmits the data indicating the failure occurrence prediction time to the tester terminal 30.
  • the control device 4 described later in the semiconductor manufacturing system 10 transmits vibration data indicating this vibration amount and drive current data indicating the drive current of the motor 33 described later in the vacuum pump to the information processing device 20.
  • the information processing device 20 predicts the failure occurrence time of the pump by using the vibration data and the drive current data, and transmits the data indicating the failure occurrence prediction time to the user terminal 40.
  • the vacuum pump is taken to the factory for maintenance (for example, overhaul) and returned after the maintenance is completed.
  • the same maintenance test as the pre-shipment performance test is carried out in the maintenance process. That is, in the maintenance process of the vacuum pump, the vibration of the vacuum pump is measured in the maintenance test of the vacuum pump.
  • the control device 4 described later in the semiconductor manufacturing system 10 transmits vibration data indicating this vibration amount and drive current data indicating the drive current of the motor 33 described later in the vacuum pump to the information processing device 20.
  • the information processing apparatus 20 uses the vibration data and the drive current data to predict the failure time of the vacuum pump and determine the necessity of replacing parts. Then, the information processing device 20 transmits the component replacement determination data indicating the necessity of component replacement and the data indicating the failure occurrence prediction time to the maintenance terminal 50.
  • FIG. 3 is a schematic configuration diagram of the semiconductor manufacturing system 10 according to the first embodiment.
  • the semiconductor manufacturing system 10 according to the first embodiment includes a semiconductor manufacturing apparatus 1, a vacuum pump 3, a pipe 2 connecting the semiconductor manufacturing apparatus 1 and the vacuum pump 3, and a vacuum pump 3. It includes a connected control device 4 and a display device 6 connected to the control device 4.
  • the semiconductor manufacturing apparatus 1 includes a chamber film forming furnace 11 and a control unit 12 for controlling the chamber film forming furnace 11.
  • the chamber film forming furnace 11 and the vacuum pump 3 communicate with each other via a pipe 2, and when the vacuum pump 3 operates, the gas in the chamber forming furnace 11 is discharged and is drawn to a substantially vacuum.
  • the control device 4 controls the operation of the vacuum pump 3.
  • the control device 4 causes the display device 6 to display information (for example, data indicating a pump failure prediction, component replacement determination data).
  • FIG. 4 is a schematic functional configuration diagram of the vacuum pump 3 according to the first embodiment.
  • the vacuum pump 3 is connected to a power source 38, an inverter 39 whose input is connected to the power source 38, a motor 33 whose input is connected to the output of the inverter 39, and a rotation shaft of the motor 33.
  • the rotor 31 is provided.
  • the vacuum pump 3 includes a pressure gauge 61, a thermometer 62, and a vibration sensor 63 for detecting the vibration of the vacuum pump 3.
  • a sound detection sensor for example, a microphone
  • the vacuum pump 3 includes a processor 64 and a memory 65 in which information is stored by the processor 64.
  • the memory 65 stores measurement data of the pressure gauge 61, the thermometer 62, and the vibration sensor 63, the drive current of the motor 33, and pump operation performance data (for example, the ultimate pressure and / or the arrival time to the specified pressure). I will go.
  • a rotation speed signal indicating the rotation speed of the motor 33 is supplied from the motor 33 to the inverter 39. Then, the current effective value of the drive current and the rotation speed of the motor 33 obtained from the rotation speed signal are supplied from the inverter 39 to the control device 4. Further, a pressure signal indicating a pressure value in the vacuum pump 3 measured by the pressure gauge 61 is supplied to the control device 4. Further, a temperature signal indicating the temperature measured by the thermometer 62 is supplied to the control device 4. Further, vibration data indicating the vibration detected by the vibration sensor 63 is supplied to the control device 4. In the present embodiment, the control device 4 is arranged separately from the vacuum pump 3, but in another embodiment, the control device 4 may be integrally incorporated in the vacuum pump 3.
  • the inverter 39 frequency-converts the alternating current supplied from the power supply 38, and supplies the drive current obtained by frequency conversion to the motor 33.
  • the rotating shaft of the motor 33 is rotated by this drive current, and the rotor 31 is rotated accordingly, so that the gas sucked from the pipe 2 is discharged to the outside of the vacuum pump 3 as the rotor 31 rotates.
  • the vacuum pump 3 having the above configuration, by driving the motor 33 and rotating the pair of rotors 31, the gas sucked from the suction port (not shown) is transferred to the exhaust side according to the rotor 31, and the exhaust port (not shown). It is exhausted from. Then, the gas is continuously transferred from the suction side to the exhaust side, so that the gas in the chamber film forming furnace 11 connected to the suction port is evacuated.
  • the rotor 31 of the vacuum pump 3 according to the first embodiment is a roots type as an example.
  • the vacuum pump 3 may be provided with a screw type rotor. Further, the vacuum pump 3 may be a claw type or scroll type vacuum pump.
  • the vacuum pump 3 may not include a pair of rotors 31 (for example, a turbo molecular pump). Further, the vacuum pump 3 according to the first embodiment is a multi-stage pump as an example, but the present invention is not limited to this, and a single-stage pump may be used.
  • the control device 4 controls the rotation of the rotor so as to execute the stop process when the operation of the target vacuum pump 3 is stopped.
  • the stop step is a step of stopping the rotor 31 after rotating the rotor 31 in the forward direction and / or the reverse direction after the start of stopping the pump.
  • FIG. 5 is a block diagram showing a schematic configuration of the information processing apparatus 20 according to the first embodiment.
  • the information processing apparatus 20 includes an input interface 21, an output interface 22, a storage 23, a memory 24, a communication circuit 25, and a processor 26.
  • the input interface 21 receives an input from an operator who operates the information processing device 20.
  • the output interface 22 is an interface that outputs data to the outside.
  • the storage 23 stores a program and various data according to the first embodiment for the processor 26 to read and execute, and is, for example, a non-volatile memory (for example, a hard disk drive).
  • the memory 24 temporarily holds data and programs, and is, for example, a volatile memory (for example, RAM (Random Access Memory)).
  • the communication circuit 25 communicates with the respective control devices 4 of the semiconductor manufacturing systems 10-1, ..., 10-N via the communication network NW. This communication may be wired or wireless, but will be described as being wired as an example.
  • the processor 26 loads the program according to the first embodiment from the storage 23 into the memory 14, and executes a series of instructions included in the program to execute the comparison unit 251 and the output unit 252, the discrimination unit 253, and the prediction unit. Functions as 254.
  • FIG. 6 is a graph showing an example of a time change of the current effective value of the drive current.
  • the operation process of the semiconductor manufacturing apparatus to which the vacuum pump is connected includes a preparatory process, a film forming process for executing film forming, and a post-process.
  • the preparatory step and the post-step include step 1, and the preparatory step further includes step 2.
  • the film forming step includes steps 3 to 5.
  • the discriminating unit 253 discriminates the operation process of the semiconductor manufacturing apparatus to which the vacuum pump is connected based on the drive current of the motor of the vacuum pump.
  • the discriminating unit 253 discriminates the operation process of the semiconductor manufacturing apparatus to which the vacuum pump is connected based on the drive current of the motor of the vacuum pump.
  • the drive current of this motor may be a command value or an observation value by a sensor.
  • the discrimination unit 253 determines the operation process of the semiconductor manufacturing apparatus to which the vacuum pump is connected based on the drive current of the vacuum pump motor, but the present invention is not limited to this, and the vacuum pump motor. Based on at least one of the driving current of the motor, the power of the motor, the rotation speed of the rotor of the vacuum pump, the temperature of the vacuum pump, the pressure of the vacuum pump, the vibration of the vacuum pump, and the noise of the vacuum pump.
  • the operating process of the semiconductor manufacturing apparatus to which the vacuum pump is connected may be determined.
  • the drive current of the motor of the vacuum pump includes not only the drive current value itself, but also the effective value of the current of the motor and the peak value of the current of the motor.
  • Parameters such as the drive current of the motor of the vacuum pump, the power of the motor, the rotation speed of the rotor of the vacuum pump, the temperature of the vacuum pump, the pressure of the vacuum pump, the vibration of the vacuum pump, and the noise of the vacuum pump. May be a command value or an observed value.
  • the discriminating unit 253 may discriminate the operating process of the semiconductor manufacturing apparatus to which the vacuum pump is connected based on at least one of the command value of the parameter of the vacuum pump or the observed value of the parameter. Good.
  • FIG. 7 is a schematic diagram illustrating the difference in vibration intensity between the initial frequency band and the operating frequency band in the same process for the same vacuum pump.
  • a schematic graph of the vibration intensity for each frequency band at the initial stage (for example, at the time of the pre-shipment performance test or at the initial stage of operation after the pump is shipped) and a schematic graph of the vibration intensity for each frequency band at the time of maintenance are shown. It is shown.
  • the vertical axis is the vibration intensity and the horizontal axis is the frequency. From past data, the inventor of the present application has discovered that when the amount of change in vibration intensity in a certain frequency band exceeds a standard, the cause is an abnormality or failure of a specific component. Similarly, the inventor of the present application has discovered from past data that when the amount of change in sound intensity in a certain frequency band exceeds a standard, the cause is an abnormality or failure of a specific component.
  • the amount of change obtained by subtracting the vibration intensity in the initial frequency band f5 to f6 from the vibration intensity in the frequency band f5 to f6 at the time of maintenance exceeds the threshold value. ing. Then, from the past data, it is shown that when the amount of change in the vibration intensity in the frequency bands f5 to f6 exceeds the reference, the abnormality or failure of the component B is related.
  • FIG. 8 is an example of a table stored in the storage 23 of the information processing device 20.
  • the table T1 shows the process of the vacuum pump, the frequency band, and the component code which is the component identification information for identifying the component to be replaced when there is an abnormality in the vibration or sound of the frequency band.
  • a set of records is accumulated.
  • the frequency band, and the parts of the vacuum pump, such as vibration or sound in the frequency band are associated and stored.
  • the frequency bands of frequencies f3 to f4 are associated with the component code A
  • the frequency bands of the frequencies f5 to f6 are associated with the component code B.
  • FIG. 9 is an example of a table stored in the storage 23 of the information processing device 20.
  • the table T2 shows the model code which is information for identifying the model of the vacuum pump, the file path of the aged data of the vacuum pump vibration data, and the aged data of the drive current data for the vacuum pump which has failed in the past.
  • a set of records of the file path and the elapsed time from the start of use to the time of failure is accumulated.
  • the aged data of the vacuum pump vibration data and the aged data of the drive current data, and the elapsed time from the start of use to the occurrence of the failure are obtained for each model. Is associated and remembered. For example, as shown in FIG. 9, even for the same model of model code 00001, the aged data of the vacuum pump vibration data and the aged data of the drive current data and the elapsed time from the start of use to the time of failure occur for each model. It has been saved.
  • FIG. 10 is a flowchart showing an example of the processing flow during the pre-shipment performance test.
  • Step S10 First, under specific test conditions, the vibration sensor 63 detects the pump vibration, and the tester acquires the vacuum pump vibration data and drives the motor 33 of the vacuum pump 3 at that time to indicate the drive current value. The current data is acquired from the inverter 39.
  • Step S20 the tester measures the pump operation performance data (here, as an example, the ultimate pressure and the arrival time to the specified pressure amount).
  • Step S30 the tester saves the measurement data (for example, pump operation performance data, vacuum pump vibration data, and drive current data) at the time of the pre-shipment performance test in the memory (also referred to as built-in memory) 65 of the vacuum pump. Operate to do. As a result, the processor 64 stores the measurement data in the memory 65 of the vacuum pump 3. Further, the tester operates, for example, the information processing device 20 so as to store the measurement data at the time of the pre-shipment performance test in the storage 23 of the information processing device 20. As a result, the processor 26 of the information processing device 20 stores the measurement data at the time of the pre-shipment performance test in the storage 23.
  • the measurement data for example, pump operation performance data, vacuum pump vibration data, and drive current data
  • the processor 64 stores the measurement data in the memory 65 of the vacuum pump 3.
  • the tester operates, for example, the information processing device 20 so as to store the measurement data at the time of the pre-shipment performance test in the storage 23 of the information processing device 20.
  • the prediction unit 254 of the information processing apparatus 20 refers to the storage 23, and the vacuum pump vibration data and the drive current data at the time of the pre-shipment performance test of the target vacuum pump 3 and the same model in the past. By comparing the vacuum pump vibration data and the vacuum pump drive current data, the time when the failure of the vacuum pump 3 occurs is predicted. Specifically, for example, the prediction unit 254 uses the vacuum pump vibration data at the time of the pre-shipment performance test and the vacuum pump drive current data of the same model in the past, and the vacuum pump vibration at the time of the pre-shipment performance test of the target vacuum pump 3. Extract the data most similar to the data and the vacuum pump drive current data.
  • the prediction unit 254 outputs the elapsed time from the start of use to the time of failure occurrence associated with the extracted data as the failure prediction time of the target vacuum pump 3.
  • the prediction unit 254 controls the failure prediction time of the target vacuum pump 3 to be transmitted from the communication circuit 25 to the tester terminal 30.
  • the tester terminal 30 may display the failure prediction time of the target vacuum pump 3. As a result, the tester can grasp the failure prediction time of the target vacuum pump 3.
  • FIG. 11 is a flowchart showing an example of the flow of the pump failure time prediction processing during the operation of the vacuum pump.
  • Step S110 First, the processor 64 of the vacuum pump 3 stores the vacuum pump vibration data, the vacuum pump drive current data at that time, and the integrated data of the component usage time in the memory 65.
  • Step S120 Next, the processor 64 of the vacuum pump 3 outputs a set of the vacuum pump vibration data and the vacuum pump drive current data to the control device 4. Then, the control device 4 transmits the set of the vacuum pump vibration data and the vacuum pump drive current data to the information processing device 20.
  • the prediction unit 254 of the information processing device 20 predicts the pump failure time.
  • the prediction unit 254 refers to the storage 23 to obtain vacuum pump vibration data and drive current data during operation of the target vacuum pump 3 and vacuum pump vibration data and vacuum pump drive current data of the same model in the past. By comparing, the time when the failure of the vacuum pump 3 occurs is predicted.
  • the prediction unit 254 uses the vacuum pump vibration data and the vacuum pump drive current data at the time of the pre-shipment performance test of the same model in the past, the vacuum pump vibration data and the vacuum during the operation of the target vacuum pump 3. Extract the data that most closely resembles the pump drive current data.
  • the prediction unit 254 outputs, for example, the elapsed time from the start of use to the time of failure, which is associated with the data by extraction, as the failure prediction time of the target vacuum pump 3.
  • Step S140 the prediction unit 254 of the information processing device 20 controls to transmit the failure prediction time of the target vacuum pump 3 from the communication circuit 25 to the user terminal 40.
  • Step S150 When the user terminal 40 receives the failure prediction time of the target vacuum pump 3, the user terminal 40 displays the failure prediction time of the target vacuum pump 3. As a result, the user end can grasp the failure prediction time of the target vacuum pump 3.
  • FIG. 12 is a flowchart showing an example of a flow of specific processing of replacement parts during maintenance.
  • the comparison unit 251 determines the vibration intensity of the target vacuum pump during operation, which is stored in the memory 65 of the vacuum pump 3, the vibration intensity at the time of pre-delivery inspection of the vacuum pump, and each process. Compare the vibration for each frequency band.
  • the reference data to be compared is not limited to the vibration intensity at the time of pre-delivery inspection of the vacuum pump, but may be the vibration intensity at the initial operation of the vacuum pump, or another vacuum pump of the same model. It may be the vibration intensity of the same model, or it may be statistical data of the vibration intensity of another vacuum pump of the same model.
  • Step S220 As a result of comparison in step S210, the difference between the output unit 252 and the reference data of the intensity of a certain frequency band (here, as an example, the intensity of vibration at the time of pre-delivery inspection of the vacuum pump) exceeds the reference value.
  • the component identification information corresponding to the frequency band is output as an example of the information regarding the component replacement. This identifies the part to be replaced.
  • the comparison unit 251 compares the vibration or sound intensity of the target vacuum pump with a predetermined reference range, and as a result of the comparison, when the vibration or sound intensity of the target vacuum pump deviates from the reference range.
  • the output unit 252 may output the component identification information corresponding to the frequency band.
  • Step S230 the output unit 252 controls to transmit information for advancing the replacement of the specified component from the communication circuit 25 to the maintenance terminal 50.
  • Step S240 the output unit 252 saves the vacuum pump vibration data when the difference from the reference data of the intensity of a certain frequency band exceeds the reference value, and the vacuum pump drive current data at that time in the storage 23.
  • Step S250 When the maintenance terminal 50 receives the information transmitted from the information processing device 20, the maintenance terminal 50 displays the information for advancing the replacement of the specified parts.
  • the maintenance person who sees this information can replace the specified part, so that the part that causes the failure or abnormality can be replaced.
  • the vibration data may be sound data indicating the sound generated from the vacuum pump.
  • the information processing system S includes a frequency band and component identification information for identifying a component of the vacuum pump that should be replaced when there is an abnormality in vibration or sound in the frequency band.
  • the storage 23 is associated with and stored. Further, the information processing system S determines the vibration or sound intensity of the vacuum pump during operation at the time of pre-delivery inspection of the vacuum pump, at the time of initial operation of the vacuum pump, vibration of any other vacuum pump of the same model, or It is provided with statistical data of sound intensity or vibration or sound intensity, and a comparison unit 251 for comparison for each frequency band.
  • the information processing system S refers to the storage 23 and makes the said.
  • An output unit 252 that outputs component identification information corresponding to a frequency band is provided.
  • each part that is likely to have a failure or abnormality can be specified as a part that needs to be replaced, so that a part that is likely to have a failure or abnormality can be replaced.
  • the discrimination unit 253 may discriminate based on at least one of the command value of the parameter of the vacuum pump or the observed value of the parameter, instead of the operation process, as the gas load condition of the vacuum pump. ..
  • the operating state of the vacuum pump is represented by a parameter command value or an observed value.
  • (1) “motor drive current, motor power, rotor rotation speed, pump temperature, pump pressure, pump vibration value”.
  • Pump noise value, etc. state quantity that fluctuates according to gas load, (2) motor current effective value, motor current peak value, pump noise, (3) transient operating state from pump stop to temperature equilibrium, or There is a temperature equilibrium state.
  • the operating conditions of the vacuum pump are, for example, (1) pressure condition on the exhaust side (also called back pressure condition), (2) pipe diameter from semiconductor manufacturing equipment to pump intake port, pipe length, pipe layout, (3). It is at least one of the operating hours from the start of pump operation.
  • the gas load condition of the vacuum pump is, for example, at least one of (1) gas flow rate (for example, maximum gas flow rate, minimum gas flow rate), (2) time change of gas flow rate, and (3) integrated gas amount.
  • Part or all of the operating state of the pump represented by the parameter command value or observed value changes depending on the external conditions.
  • External conditions include transient period after pump start, difference in stabilization period after reaching temperature equilibrium, gas load (gas flow rate), individual pump difference (parts, assembly), and / or change during operation (product adhesion). , Parts thinning due to corrosion, parts wear, back pressure, etc.).
  • the discriminating unit 253 ignores (stable) individual differences in the pump and changes during pump operation, and assumes that the operating state of the pump changes due to changes in the gas load, and the same gas load. If so, it is assumed that the operating conditions of the pumps are the same.
  • the discriminating unit 253 may determine whether or not the vacuum pump corresponds to a transient period and whether or not the temperature equilibrium has been reached based on the elapsed time from the start of the pump and / or the rate of change in the pump temperature.
  • the discriminating unit 253 compares the motor current observation value for each gas load condition at the time of the shipping test with the motor current observation value of the vacuum pump during operation in the state after the temperature equilibrium is reached.
  • the gas load condition of the pump during operation may be determined. For example, if the discriminating unit 253 has a data file of pump operation observation values including the motor current observation value of the operating pump in the state after the temperature equilibrium is reached, the data file and the observation value of the operation pump It is possible to judge whether the operating conditions are the same or different by comparing the above.
  • the comparison unit 251 may execute the comparison for each frequency band for each determined gas load condition instead of each operation process.
  • the storage 23 may store the gas load condition in association with the set of the frequency band and the component identification information for identifying the component to be replaced, instead of the operation step.
  • the output unit 252 stores the storage 23 when the difference from the reference data of the intensity of a certain frequency band exceeds the reference value or when the intensity of a certain frequency band deviates from the reference range.
  • the component corresponding to the frequency band and the determined set of gas load conditions may be specified as a component requiring replacement.
  • the information processing system S determines the gas load condition of the vacuum pump or the vacuum pump based on at least one of the command value of the parameter of the vacuum pump or the observed value of the parameter.
  • a discriminating unit 253 for discriminating at least one of the operating processes of the connected semiconductor manufacturing apparatus is provided.
  • the comparison unit 251 executes the comparison for each frequency band for each of the determined gas load conditions or operation steps.
  • a gas load condition or the operation process is further associated and stored in a set of the frequency band and the component identification information that identifies the component to be replaced.
  • the output unit 252 refers to the storage 23 when the difference between the intensity of a certain frequency band and the reference data exceeds the reference value or the intensity of a certain frequency band deviates from the reference range.
  • the component identification information corresponding to the frequency band and the determined gas load condition or operation process set is output.
  • the gas load condition is, for example, a gas flow rate.
  • the output unit 252 has (1) the relationship between the pump operation period when the parts are continued and the failure occurrence probability (for example, information such as tables, graphs, and numerical data), and / or (2) when the parts are replaced.
  • the relationship between the pump operation period and the failure occurrence probability (for example, information such as tables, graphs, and numerical data) may be output. This allows the user to predict the cost-effectiveness of the part when the part is replaced.
  • the judgment standard is a reference value (numerical value) which is one threshold value, and the difference in intensity of a certain frequency band is compared with the reference value (numerical value), but the judgment standard is limited to this. is not.
  • the comparison unit 251 extracts feature points from the image data (or numerical data) of the frequency-analyzed waveform, and compares the value of the feature point of the reference frequency analysis waveform with the value of the feature point of the frequency analysis waveform of the target pump.
  • the frequency analysis waveform is, for example, a waveform of a graph in which the horizontal axis after Fourier transform is frequency and the vertical axis is intensity.
  • the feature point may be a frequency value that is an integral multiple of the natural frequency of the component to be replaced.
  • the output unit 252 finds that the value of the feature point of the frequency analysis waveform of the target pump deviates from the range or value determined based on the value of the feature point of the reference frequency analysis waveform, or When the difference between the feature point value of the frequency analysis waveform of the target pump and the feature point value of the reference frequency analysis waveform exceeds the reference value, the storage 23 is referred to and the information corresponding to the deviating frequency band is output. You may.
  • the reference value for this determination may be further refined by using new data.
  • this reference value may be updated at any time by using new data. For example, it may be updated at other timings (regular, irregular).
  • the standard value for example, the pump data of the shipping test, the result of failure or failure due to the deterioration factor of the parts after shipping, and each data such as the operation data of the pump are reviewed and deleted or newly acquired. Can be updated by.
  • the output unit 252 may output cost effectiveness.
  • the cost-effective "cost” is, for example, a part replacement cost (for example, a part price and / or a replacement work cost).
  • the cost-effectiveness "effect” assumes the amount of risk (opposite of the expected value) if it is not replaced, for example, (product loss amount) x (pump failure probability) when a vacuum pump failure occurs. ..
  • the output unit 252 may output cost effectiveness by the ratio of the parts replacement cost and the risk amount. Alternatively, when the past parts replacement cost is recorded in the storage 23 in advance, the output unit 252 may output the cost-effectiveness at the ratio of the past parts replacement cost risk amount.
  • the storage 23 contains the aged data of the vacuum pump vibration data and the aged data of the vacuum pump drive current data for each model of the vacuum pump that has failed in the past, and when a failure occurs from the start of use. It is stored in association with the elapsed time until. Further, the information processing system S refers to the storage and obtains the vacuum pump vibration data and the vacuum pump drive current data during the operation of the target vacuum pump, and the vacuum pump vibration data and the vacuum pump drive current data in the same model in the past. A prediction unit 254 for predicting the failure time of the target vacuum pump is further provided by comparison.
  • the user of the target vacuum pump can know the failure prediction time of the target vacuum pump, so that the vacuum pump can be put out for maintenance or a new vacuum pump before it is stopped during the semiconductor manufacturing process. It is possible to increase the probability that the vacuum pump can be avoided from being stopped during the semiconductor manufacturing process.
  • the comparison unit 251 Fourier transforms the time series data of vibration and / or sound, and compares the amplitude after the Fourier transform for each frequency band. With this configuration, vibration and / or sound intensity can be compared.
  • the determination unit 253 determines the process of the vacuum pump, and the output unit 252 determines the step of the vacuum pump, and as a result of the comparison by the comparison unit 251, the difference from the reference data of the intensity of a certain frequency band exceeds the reference value.
  • the parts corresponding to the frequency band and the determined process set are specified as parts requiring replacement with reference to the storage 23.
  • the process of the vacuum pump is not discriminated, and as a result of comparison by the comparison unit 251 in the output unit 252, the difference from the reference data of the intensity of a certain frequency band exceeds the reference value.
  • the storage 23 is referred to and the component identification information corresponding to the frequency band is output. That is, in the present embodiment, as an example, the comparison unit 251 executes the comparison for each frequency band in a predetermined time range without specifying the process.
  • FIG. 13 is a schematic configuration diagram of the information processing system according to the second embodiment. As shown in FIG. 13, in the information processing system according to the second embodiment, the information processing device 20 is changed to the information processing device 20b as compared with the information processing system S according to the first embodiment. is there.
  • FIG. 14 is a block diagram showing a schematic configuration of the information processing apparatus 20b according to the second embodiment.
  • the storage 23 is changed to the storage 23b and the processor 26 is changed to the processor 26b as compared with the information processing device 20 according to the first embodiment.
  • the table T3 is stored in the storage 23b instead of the table T1.
  • the processor 26b loads the program according to the second embodiment from the storage 23 into the memory 14 and executes a series of instructions included in the program to serve as the comparison unit 251 and the output unit 252 and the prediction unit 254. Function.
  • FIG. 15 is an example of the table T3 in which the storage 23b of the information processing apparatus 20b according to the second embodiment is stored.
  • the table T3 stores a record of a set of component codes, which is component identification information for identifying a frequency band and a component to be replaced when there is an abnormality in vibration or sound in the frequency band. ing.
  • the storage 23b of the information processing apparatus 20b of the second embodiment identifies a frequency band and a component of the vacuum pump that should be replaced when there is an abnormality in vibration or sound in the frequency band.
  • the part code which is the part identification information to be processed, is associated and stored.
  • the comparison unit 251 determines the intensity of vibration or sound of the vacuum pump during operation during the pre-delivery inspection of the vacuum pump, during the initial operation of the vacuum pump, and the vibration or sound of any of the other vacuum pumps of the same model. It is compared with statistical data of intensity or vibration or sound intensity for each frequency band, for example, in a predetermined time range. As a result of comparison, when the difference between the intensity of a certain frequency band and the reference data exceeds the reference value or the intensity of a certain frequency band deviates from the reference range, the output unit 252 refers to the storage 23b and refers to the frequency band. Outputs the component identification information corresponding to.
  • the information processing system S has the frequency band and the component identification information for identifying the component of the vacuum pump that should be replaced when there is an abnormality in the vibration or sound of the frequency band.
  • the storage 23b is associated with and stored.
  • the information processing system S2 determines the vibration or sound intensity of the vacuum pump during operation at the time of pre-delivery inspection of the vacuum pump, at the time of initial operation of the vacuum pump, vibration of any other vacuum pump of the same model, or It is provided with statistical data of sound intensity or vibration or sound intensity, and a comparison unit 251 for comparison for each frequency band.
  • the information processing system S2 refers to the storage 23b and makes the said.
  • An output unit 252 that outputs component identification information corresponding to a frequency band is provided.
  • each part that is likely to have a failure or abnormality can be specified as a part that needs to be replaced, so that a part that is likely to have a failure or abnormality can be replaced.
  • the storage stores the component identification information for identifying the component to be replaced as the information for determining whether or not the component should be replaced.
  • the information that can be used as a basis for deciding whether or not to do so is not limited to this.
  • the information output when there is an abnormality in the vibration or sound of the frequency band is the failure prediction time, the operation period and / or failure occurrence probability of the vacuum pump when the parts are continuously used, or the vacuum pump operation when the parts are replaced. It may be a period and / or a failure occurrence probability.
  • the output unit 252 refers to the storage and makes the said. Parts identification information, failure prediction time, vacuum pump operation period and / or failure occurrence probability when parts are used continuously, or vacuum pump operation period and / or failure occurrence probability when parts are replaced, corresponding to the frequency band May be output.
  • the output information is For example, it may be a table of the operation period of the vacuum pump and the failure occurrence probability when the parts are continuously used.
  • the output information is, for example, the parts. It may be a table of the pump operation period and the failure occurrence probability when the above is replaced.
  • the criterion for determining the parts replacement at the time of pump maintenance is provided, but also the operating vibration data of the failed pump and the pump returned without failure is stored in the storage 23.
  • the storage 23 By constructing a library by storing in, it is possible to infer future failures of the pump due to deterioration of parts of the pump in operation.
  • the processor 26 adds the vibration data of the new pump to the library by storing it in the storage 23, so that it is possible to estimate the future failure of the pump due to the deterioration of parts at the time of manufacturing the pump.
  • the processor 26 adds the vibration data of the new pump to the library by storing it in the storage 23, so that it is possible to estimate the future failure of the pump due to the deterioration of parts at the time of manufacturing the pump.
  • a method for estimating a pump failure due to deterioration of parts of an operating pump and a method for estimating a pump failure due to deterioration of parts during pump manufacturing will be described.
  • the storage 23 the pump data of the shipping test, the result of failure or failure due to the component deterioration factor after shipping, and the operation data of the pump are stored in association with each other.
  • the data in the library is divided into four groups, and the common conditions and / or common tendencies of the pump data of each group are extracted and analyzed. This provides information for deciding whether to replace the part.
  • the data of the four groups are (1) shipping test data of the pump that failed due to the component deterioration factor, (2) shipping test data of the pump that did not fail due to the component deterioration factor, and (3) failure due to the component deterioration factor.
  • information indicating the future possibility of pump failure due to the deterioration factor of the parts of the operating pump may be output.
  • the processor 26 compares the shipping test data of the target pump with the above information (1) and (2) and correlates. By quantifying the properties, information indicating the future possibility of pump failure due to the deterioration factor of the parts of the target pump during the shipping test may be output. These 1 and 2 can be guessed only from the information of (1) and (3), but the reliability is improved by adding (2) and (4).
  • the vacuum pump may be a vacuum pump including a rotor, a motor for rotating the rotor, and an inverter for giving a driving force for rotating the motor.
  • the vacuum pump associates a vibration meter that measures the vibration of the vacuum pump during operation with measurement data measured by the vibration meter, drive current data of the motor during operation of the vacuum pump, and pump operation performance data.
  • a storage medium for storage may be provided.
  • At least a part of the information processing apparatus 20 described in the above-described embodiment may be configured by hardware or software.
  • a program that realizes at least a part of the functions of the information processing system 1 may be stored in a recording medium such as a flexible disk or a CD-ROM, read by a computer, and executed.
  • the recording medium is not limited to a removable one such as a magnetic disk or an optical disk, and may be a fixed recording medium such as a hard disk device or a memory.
  • a program that realizes at least a part of the functions of the information processing device 20 may be distributed via a communication line (including wireless communication) such as the Internet. Further, the program may be encrypted, modulated, compressed, and distributed via a wired line or wireless line such as the Internet, or stored in a recording medium.
  • a communication line including wireless communication
  • the program may be encrypted, modulated, compressed, and distributed via a wired line or wireless line such as the Internet, or stored in a recording medium.
  • the information processing device 20 may be operated by one or a plurality of information processing devices.
  • one of the information processing devices may be a computer, and the function may be realized as at least one means of the information processing device 20 by executing a predetermined program by the computer.
  • all the steps (steps) may be realized by automatic control by a computer. Further, the progress control between the processes may be manually performed while the computer is used to perform each process. Further, at least a part of the whole process may be performed manually.
  • the present invention is not limited to the above embodiment as it is, and at the implementation stage, the components can be modified and embodied within a range that does not deviate from the gist thereof.
  • various inventions can be formed by an appropriate combination of the plurality of components disclosed in the above-described embodiment. For example, some components may be removed from all the components shown in the embodiments. Further, components over different embodiments may be combined as appropriate.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

La présente invention concerne un système de traitement d'informations comprenant : un élément de stockage dans lequel une bande de fréquences et des informations d'identification de composant identifiant un composant de pompe à vide qui doit être remplacé lorsqu'il y a une vibration anormale ou un son anormal dans la bande de fréquences sont associées les unes aux autres et stockées ; une unité de comparaison qui compare l'intensité de vibration ou le son d'une pompe à vide en fonctionnement avec des données de référence ou une plage de référence pour chaque bande de fréquences ; et une unité de sortie qui, si, selon le résultat de la comparaison, la différence entre l'intensité d'une certaine bande de fréquences et les données de référence est supérieure à une valeur de référence ou si l'intensité d'une certaine bande de fréquences s'écarte de la plage de référence, se réfère à l'élément de stockage et fournit des informations correspondant à la bande de fréquences.
PCT/JP2020/022722 2019-06-10 2020-06-09 Système de traitement d'informations, procédé de traitement d'informations et programme WO2020250897A1 (fr)

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JP2019107904A JP2020200791A (ja) 2019-06-10 2019-06-10 情報処理システム、情報処理方法及びプログラム
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US11796982B2 (en) * 2019-09-09 2023-10-24 GE Oil & Gas, LLC Method of predicting failure events for reciprocating compressors

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JPH08166330A (ja) * 1994-12-15 1996-06-25 Hitachi Ltd 回転機械の異常摺動診断方法とその装置、及び非接触型スクリュー圧縮機の異常摺動診断方法とその装置
JPH1162846A (ja) * 1997-08-08 1999-03-05 Ebara Corp 真空ポンプの故障予知システム
US20130340457A1 (en) * 2012-06-25 2013-12-26 Whirlpool Corporation Fault detection and diagnosis for refrigerator from compressor sensor
JP2017142153A (ja) * 2016-02-10 2017-08-17 セイコーエプソン株式会社 寿命予測方法、寿命予測装置、および寿命予測システム
WO2018020618A1 (fr) * 2016-07-27 2018-02-01 富士通株式会社 Programme de détection d'anomalie, dispositif de détection d'anomalie et procédé de détection d'anomalie
JP2018515706A (ja) * 2015-03-18 2018-06-14 エドワーズ リミテッド ポンプモニタ装置及び方法
WO2018168838A1 (fr) * 2017-03-17 2018-09-20 株式会社荏原製作所 Dispositif de traitement d'informations, système de traitement d'informations, procédé de traitement d'informations, programme, dispositif de traitement de substrat, dispositif de détermination de données de référence et procédé de détermination de données de référence

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JPH08166330A (ja) * 1994-12-15 1996-06-25 Hitachi Ltd 回転機械の異常摺動診断方法とその装置、及び非接触型スクリュー圧縮機の異常摺動診断方法とその装置
JPH1162846A (ja) * 1997-08-08 1999-03-05 Ebara Corp 真空ポンプの故障予知システム
US20130340457A1 (en) * 2012-06-25 2013-12-26 Whirlpool Corporation Fault detection and diagnosis for refrigerator from compressor sensor
JP2018515706A (ja) * 2015-03-18 2018-06-14 エドワーズ リミテッド ポンプモニタ装置及び方法
JP2017142153A (ja) * 2016-02-10 2017-08-17 セイコーエプソン株式会社 寿命予測方法、寿命予測装置、および寿命予測システム
WO2018020618A1 (fr) * 2016-07-27 2018-02-01 富士通株式会社 Programme de détection d'anomalie, dispositif de détection d'anomalie et procédé de détection d'anomalie
WO2018168838A1 (fr) * 2017-03-17 2018-09-20 株式会社荏原製作所 Dispositif de traitement d'informations, système de traitement d'informations, procédé de traitement d'informations, programme, dispositif de traitement de substrat, dispositif de détermination de données de référence et procédé de détermination de données de référence

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