WO2020228715A1 - 激光调阻系统 - Google Patents

激光调阻系统 Download PDF

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Publication number
WO2020228715A1
WO2020228715A1 PCT/CN2020/089919 CN2020089919W WO2020228715A1 WO 2020228715 A1 WO2020228715 A1 WO 2020228715A1 CN 2020089919 W CN2020089919 W CN 2020089919W WO 2020228715 A1 WO2020228715 A1 WO 2020228715A1
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WIPO (PCT)
Prior art keywords
resistance
laser
circuit
control
electrically connected
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PCT/CN2020/089919
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English (en)
French (fr)
Inventor
王喆
陈德佳
吴继东
成学平
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深圳市杰普特光电股份有限公司
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Publication of WO2020228715A1 publication Critical patent/WO2020228715A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/242—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by laser

Definitions

  • This application relates to the technical field of laser resistance adjustment, and in particular to a laser resistance adjustment system.
  • the laser trimming system adjusts the resistance of the chip resistor by using a very thin laser beam to hit the chip resistor, and realize cutting by vaporizing the resistor body of the chip resistor. As the laser cutting process progresses, the resistance value of the chip resistor is measured and monitored in real time by the measurement system. When the actual resistance value of the chip resistor reaches the target resistance value, the laser beam is turned off to realize the laser resistance trimming process.
  • the laser trimming system in the traditional solution cannot guarantee that the chip resistor has a sufficient response rate when the resistance value reaches the target value.
  • the low response rate of the laser trimming system cannot guarantee the notch effect and resistance accuracy of the trimming process.
  • a laser trimming system includes:
  • the resistance connecting device is electrically connected with the resistance to be adjusted when in use
  • a channel conversion device electrically connected to the resistance connecting device, for controlling the opening and closing of the channel where the resistance to be adjusted is located;
  • the measurement device includes a comparison circuit, a measurement circuit, and a power supply circuit.
  • the measurement circuit and the power supply circuit are respectively electrically connected to the channel conversion device.
  • the power supply circuit provides the resistance to be adjusted via the channel conversion device. Measuring current, the measuring circuit measures the voltage value of the resistor to be adjusted via the channel conversion device and the resistance connecting device, the comparison circuit is electrically connected to the measuring circuit, and the comparison circuit is used for Determining whether the voltage of the resistor to be adjusted reaches a preset value;
  • the main control device is electrically connected to the power supply circuit and the channel conversion device respectively, and is used to control the power supply circuit to output a measurement current and control the channel conversion of the channel conversion device;
  • the resistance adjusting device is electrically connected to the main control device and the measurement circuit, respectively, and is used to receive the control instructions of the main control device and the measurement circuit, and start or stop the control instructions according to the received control instructions.
  • the laser cutting of the resistance to be adjusted.
  • the resistance adjusting device includes:
  • the resistance adjustment control circuit is electrically connected to the main control device and the measurement circuit, respectively, and is used to receive control instructions of the main control device and the measurement device;
  • the resistance trimming device is electrically connected to the resistance trimming control circuit, and is used to receive a control instruction of the resistance trimming control circuit, and start or stop the laser cutting of the resistance to be adjusted according to the received control instruction.
  • the resistance adjusting device includes:
  • a laser electrically connected to the resistance adjusting control circuit, for outputting laser
  • the galvanometer is electrically connected with the resistance adjustment control circuit, and is used to adjust the transmission optical path of the output laser.
  • the resistance adjusting control circuit includes:
  • the laser control circuit is electrically connected to the main control device, the measurement circuit, and the laser, and is used to receive control instructions from the main control device and the measurement device, and control the laser according to the control instructions Start and stop;
  • the galvanometer control circuit is electrically connected to the main control device, the measurement circuit, and the galvanometer, and is used to receive control instructions from the main control device and the measurement device, and to control the control device according to the control instructions.
  • the movement and start and stop of the galvanometer are described.
  • the galvanometer includes:
  • Coated optical lens used to adjust the transmission optical path of laser
  • a servo motor where the coated optical lens is disposed on the servo motor, and the servo motor is used to drive the coated optical lens to move;
  • the galvanometer driver is respectively electrically connected with the galvanometer control circuit and the servo motor, and is used for receiving control commands of the galvanometer control circuit and driving the servo motor.
  • the resistance adjusting device further includes:
  • the focusing field lens is arranged on the optical path where the laser light is output from the galvanometer, and is used to focus the laser light on the resistor to be adjusted.
  • the resistance connection device includes a probe card, which is electrically connected to the channel conversion device, and is electrically connected to the resistance to be adjusted when in use.
  • the probe card includes a first probe and a second probe, which are respectively disposed at both ends of the resistor to be adjusted, and are respectively connected to two wires, the first probe and the second probe.
  • the second probe is used for inputting a measuring current and providing a path for measuring the voltage value of the resistance to be adjusted.
  • the channel conversion device includes:
  • a conversion control circuit electrically connected to the main control device, for receiving control instructions from the main control device;
  • the relay card is respectively electrically connected with the conversion control circuit and the resistance connecting device, and is used for receiving control instructions of the conversion control circuit and providing a path for signal transmission of the resistance connecting device.
  • the relay board includes:
  • a relay control circuit electrically connected to the conversion control circuit, for receiving and executing control instructions of the conversion control circuit
  • a plurality of relays are respectively electrically connected with the relay control circuit and the resistance connecting device, and are used for receiving the control command of the relay control circuit and performing pull-in or disconnection according to the control command.
  • the channel conversion device can switch between different resistances to be adjusted, so as to realize continuous resistance adjustment of the different resistances to be adjusted.
  • the main control device controls the measurement device to output a measurement current, and controls the channel conversion of the channel conversion device.
  • the measuring device is provided with a comparison circuit and a measuring circuit.
  • the comparison circuit can quickly respond when the resistance of the resistor to be adjusted reaches a preset value.
  • the measurement circuit can output a measurement current and monitor the voltage of the resistor to be adjusted.
  • the resistance adjusting device can be controlled by the measuring circuit when the comparison circuit determines that the resistance value of the resistance to be adjusted reaches a preset value Start and stop, so as to realize the rapid response of the laser resistance trimming system after the resistance value of the resistance to be adjusted reaches the preset value.
  • FIG. 1 is a schematic diagram of the connection relationship of a laser resistance trimming system provided by an embodiment of the application
  • FIG. 2 is a schematic diagram of the connection relationship of another laser resistance trimming system provided by an embodiment of the application.
  • FIG. 3 is a schematic diagram of the influence of a laser on a cut mark according to an embodiment of the application
  • FIG. 4 is a schematic diagram of the principle of a laser resistance trimming system using laser cutting to change the resistance value of the resistor to be adjusted according to an embodiment of the application;
  • FIG. 5 is a schematic diagram of the relationship between the cutting length and the resistance value of a laser resistance trimming system provided by an embodiment of the application;
  • FIG. 6 is a schematic diagram of a cross-sectional structure of a resistor to be adjusted according to an embodiment of the application
  • FIG. 7 is a schematic structural diagram of a probe card of a laser resistance trimming system provided by an embodiment of the application.
  • the laser resistance adjustment system 100 includes a resistance connection device 10, a channel conversion device 20, a measurement device 30, a main control device 40 and a resistance adjustment device 50.
  • the resistance connecting device 10 is electrically connected to the resistance to be adjusted 200 when in use. It can be understood that the resistance connection device 10 can be stably connected to a plurality of the resistances 200 to be adjusted at the same time. At the same time, the resistance connection device 10 can provide current input and voltage measurement channels for the connected resistance to be adjusted 200.
  • the setting of the resistance connecting device 10 can ensure the stable connection of the laser resistance trimming system 100 and the resistance to be adjusted 200, and at the same time can perform continuous resistance repair of a plurality of the resistance to be adjusted 200 for the laser resistance adjustment system 100 Provide guarantees.
  • the channel conversion device 20 is electrically connected to the resistance connecting device 10.
  • the channel conversion device 20 is used to control the opening and closing of the channel where the resistor 200 to be adjusted is located. It can be understood that the channel conversion device 20 can be composed of a relay, and the measurement channel can be switched by controlling the opening and closing of the relay.
  • the setting of the channel conversion device 20 can ensure that the laser resistance trimming system 100 continuously trims the multiple resistances 200 to be adjusted.
  • the measurement device 30 includes a comparison circuit 310, a measurement circuit 320 and a power supply circuit 330.
  • the measurement circuit 320 and the power circuit 330 are electrically connected to the channel conversion device 20 respectively.
  • the measurement circuit 320 and the channel conversion device 20 are connected by a measurement cable.
  • the power supply circuit 330 provides a measurement current to the resistance to be adjusted 200 via the channel conversion device 20, and the measurement circuit 320 measures the resistance to be adjusted via the channel conversion device 20 and the resistance connecting device 10 The voltage value of 200.
  • the comparison circuit 310 is electrically connected to the measurement circuit 320.
  • the comparison circuit 310 is used to determine whether the voltage of the resistor 200 to be adjusted reaches a preset value. It can be understood that the comparison circuit 310 may include a comparator.
  • the measurement circuit 320 can output a preset measurement current under the control of the main control device 40, and the measurement current is input into the resistance to be adjusted 200 through the channel conversion device 20 and the resistance connection device 10 successively. After the measuring circuit 320 outputs the measuring current, the voltage value of the resistor 200 to be adjusted can be measured in real time, and the resistance of the resistor 200 to be adjusted can be calculated based on the measured voltage value and the current value of the preset measurement current. The resistance value of the resistance to be adjusted 200 is monitored in real time during the resistance adjustment process of the laser resistance adjustment system 100.
  • the main control device 40 is electrically connected to the power circuit 330 and the channel conversion device 20 respectively.
  • the main control device 40 is used to control the power supply circuit 330 to output a measurement current and control the channel conversion of the channel conversion device 20. It can be understood that the main control device 40 can control the measurement circuit 320 and the channel conversion device 20 to perform corresponding actions.
  • the main control device 40 can receive control instructions from the host computer.
  • the control instruction may include position information of the resistor 200 to be adjusted, that is, which resistor is to be cut, and instruction information to start or stop cutting.
  • the communication between the laser resistance trimming system 100 and the host computer can be realized by setting the main control device 40.
  • the main control device 40 may include a communication module through which remote control of the laser resistance trimming system 100 and real-time monitoring of the cutting process can be realized.
  • the resistance adjusting device 50 is electrically connected to the main control device 40 and the measuring circuit 320 respectively.
  • the resistance adjusting device 50 is used to receive control instructions from the main control device 40 and the measuring circuit 320, and to start or stop laser cutting of the resistor 200 to be adjusted according to the received control instructions.
  • the resistance adjusting device 50 is an execution component.
  • the resistance adjusting device 50 can output laser, and adjust the transmission optical path of the laser according to the position information of the resistance 200 to be adjusted, so as to complete the cutting of the specified resistance 200 to be adjusted.
  • the laser trimming system 100 can integrate various internal control modules on one or more control boards, thereby reducing the volume of the laser trimming system 100 and improving the integration.
  • the main control device 40 sends a control instruction containing the position information of the resistance to be adjusted 200 to the channel conversion device 20.
  • the channel conversion device 20 controls the channel where the resistance to be adjusted 200 is located to open.
  • the main control device 40 controls the measurement circuit 320 to output a preset measurement current to the resistance to be adjusted 200.
  • the main control device 40 controls the resistance adjusting device 50 to cut the resistance to be adjusted 200.
  • the measurement circuit 320 monitors the voltage value of the resistor 200 to be adjusted in real time and transmits it to the comparison circuit 310, and the comparison circuit 310 compares the real-time voltage value with the preset voltage value.
  • the comparison circuit 310 in the measuring device 30 can output A constant level.
  • the main control device 40 may continue to control the resistance adjusting device 50 to continuously output laser light and control the transmission optical path.
  • the measurement circuit 320 can continuously output a measurement current to the resistor 200 to be adjusted, and measure the real-time voltage of the resistor 200 to be adjusted. It can be understood that when the actual voltage of the resistor 200 to be adjusted reaches the preset voltage value (that is, the resistance of the resistor 200 to be adjusted reaches the preset resistance), the output level of the comparison circuit 310 will be reversed.
  • the comparison circuit 310 After the output level of the comparison circuit 310 is inverted, the comparison circuit 310 sends a signal to the main control device 40 via the measurement circuit 320. Subsequently, the main control device 40 controls the resistance adjusting device 50 to stop adjusting the resistance.
  • the resistance adjustment device 50 includes a laser and a galvanometer, that is, stopping the resistance adjustment process includes turning off the laser and controlling the galvanometer to stop moving.
  • the measuring circuit 320 stops outputting the measuring current. After the measurement circuit 320 stops outputting the measurement current, the channel conversion device 20 closes the current channel, that is, the cutting process of the resistance to be adjusted 200 is completed.
  • the channel conversion device 20 of the laser resistance adjustment system 100 proposed in the present application can switch between different resistances 200 to be adjusted, so that different resistances 200 to be adjusted can be adjusted continuously.
  • the main control device 40 controls the measurement device 30 to output the measurement current, and controls the channel conversion of the channel conversion device 20, that is, the opening or closing of different channels.
  • the measurement device 30 is provided with the comparison circuit 310 and the measurement circuit 320.
  • the comparison circuit 310 can respond instantly when the resistance of the resistor 200 to be adjusted reaches a preset value.
  • the measuring circuit 320 can output a measuring current and monitor the voltage of the resistor 200 to be adjusted.
  • the measurement circuit 320 can directly The resistance trimming device 50 is controlled to stop running, so as to realize the rapid response of the laser trimming system 100 after the resistance value of the resistance to be adjusted 200 reaches a preset value. It can be understood that the laser resistance trimming system 100 integrates laser control, galvanometer control, and measurement control, and can manufacture chip resistors intelligently, efficiently and accurately.
  • the resistance adjusting device 50 includes a resistance adjusting control circuit 510 and a resistance adjusting device 520.
  • the resistance adjustment control circuit 510 is electrically connected to the main control device 40 and the measurement circuit 320 respectively.
  • the resistance adjustment control circuit 510 is used to receive control instructions from the main control device 40 and the measurement device 30.
  • the resistance adjusting device 520 is electrically connected to the resistance adjusting control circuit 510.
  • the resistance trimming device 520 is configured to receive a control instruction of the resistance trimming control circuit 510, and start or stop laser cutting of the resistance to be adjusted 200 according to the received control instruction.
  • the resistance adjustment control circuit 510 can control the resistance adjustment process of the resistance adjustment device 520 according to the control signal sent by the main control device 40.
  • the configuration of the resistance trimming control circuit 510 can improve the operating efficiency of the laser trimming system 100.
  • the resistance adjustment control circuit 510 may not be included, and the control of the resistance adjustment device 520 is directly implemented through the main control device 40.
  • the resistance adjusting device 520 includes a laser 521 and a galvanometer 522.
  • the laser 521 is electrically connected to the resistance adjusting control circuit 510 for outputting laser light.
  • the galvanometer 522 is electrically connected to the resistance adjustment control circuit 510.
  • the galvanometer 522 is used to adjust the transmission optical path of the output laser. It can be understood that the laser 521 can output pulsed laser light. Please refer to FIG. 3 together. In the process of cutting the resistor 200 to be adjusted, the laser pulse points are moved to gradually stack forward to form a continuous cut. Among them, the width of the notch can be determined by the size of the focused spot and the power intensity of the laser.
  • the quality of the cut can be adjusted by modifying parameters such as the spot density and cutting speed.
  • the galvanometer 522 can adjust the transmission optical path of the laser beam output by the laser 521.
  • the laser beam changes the optical path through the rotation of the mirror of the galvanometer 522, and finally forms a laser cut mark on the resistor 200 to be adjusted.
  • the resistance adjustment control circuit 510 includes a laser control circuit 511 and a galvanometer control circuit 512.
  • the laser control circuit 511 is electrically connected to the main control device 40, the measurement circuit 320, and the laser 521, respectively.
  • the laser control circuit 511 is configured to receive control instructions from the main control device 40 and the measurement device 30, and control the start and stop of the laser 521 according to the control instructions.
  • the galvanometer control circuit 512 is electrically connected to the main control device 40, the measurement circuit 320, and the galvanometer 522, respectively.
  • the galvanometer control circuit 512 is used to receive control instructions from the main control device 40 and the measurement device 30, and control the movement, start and stop of the galvanometer 522 according to the control instructions.
  • the laser control circuit 511 and the galvanometer control circuit 512 can control the laser 521 and the galvanometer 522 respectively.
  • the configuration of the laser control circuit 511 and the galvanometer control circuit 512 can separate the two control processes, thereby further improving the control accuracy and operating efficiency of the laser trimming system 100.
  • the laser control circuit 511 and the galvanometer control circuit 512 may be integrated on the same circuit board.
  • the galvanometer 522 includes a coated optical lens 523, a servo motor 524, and a galvanometer driver 525.
  • the coated optical lens 523 is used to adjust the transmission optical path of the laser.
  • the coated optical lens 523 is disposed on the servo motor 524, and the servo motor 524 is used to drive the coated optical lens 523 to move.
  • the galvanometer driver 525 is electrically connected to the galvanometer control circuit 512 and the servo motor 524 respectively.
  • the galvanometer driver 525 is used to receive the control command of the galvanometer control circuit 512 and drive the servo motor 524.
  • the galvanometer driver 525 receives a driving signal, and drives the servo motor 524 with the coated optical lens 523 to move.
  • the servo motor 524 may be a closed-loop incremental servo motor.
  • the driving signal of the galvanometer driver 525 can be output and monitored by the galvanometer control circuit 512. Please also refer to FIG.
  • the galvanometer 522 drives the laser to scan and cut the substrate of the resistor 200 to be adjusted, so that the resistor paste layer is heated and vaporized by the laser to form a certain depth of nicks, thereby changing the
  • the conductive cross-sectional area and conductive length of the resistor 200 body further adjust the resistor 200 to be adjusted that is lower than the preset resistance value within the allowable deviation range of the resistance value.
  • the laser resistance adjustment changes the resistance value of the resistor 200 to be adjusted by changing the current channel. It can be understood that the laser at least needs to cut to the resistive substrate. In addition, the longer the cutting length, the greater the resistance value.
  • R R 0 *(1+at).
  • R 0 is the resistance of the metal conductor at 0°C
  • a is the temperature coefficient of resistance of the metal conductor (different metal conductors have different temperature coefficients of resistance a). From the above formula, we can see that the higher the temperature of the resistance, the greater the change in resistance. Therefore, when the laser score is also clean, the lower the temperature acting on the resistor 200 to be adjusted during the resistance adjustment process, the higher its stability.
  • the resistance adjusting device 520 further includes a focusing field lens 526.
  • the focus field lens 526 is arranged on the optical path where the laser light is output from the galvanometer 522.
  • the focus field lens 526 is used to focus laser light on the resistor 200 to be adjusted. It can be understood that the size of the focused spot affects the width of the cut. Therefore, by providing the focusing field lens 526, the accuracy of the resistance adjustment process of the laser resistance adjustment system 100 can be further improved.
  • the resistance connection device 10 includes a probe card 110, which is electrically connected to the channel conversion device 20, and is electrically connected to the resistance to be adjusted 200 when in use.
  • the probe card 110 includes a first probe 111 and a second probe 112, which are respectively disposed at two ends of the resistor 200 to be adjusted, and are respectively connected to two wires.
  • the first probe The needle 111 and the second probe 112 are used to input a measuring current and measure the voltage value of the resistor 200 to be adjusted.
  • the first probe 111 and the second probe 112 have a triangular shape.
  • the wires HF, LF, HS, and LS are all wires drawn from the first probe 111 or the second probe 112.
  • HF and LF are respectively the high potential and the low potential of the constant current power supply.
  • HS and LS are the high and low potentials of voltage measurement respectively.
  • the laser resistance adjusting system 100 measures the resistance of the resistor 200 to be adjusted by inputting a constant current, that is, measuring the resistance value by measuring the voltage of the resistor 200 to be adjusted.
  • the probe card 110 may be connected to a plurality of the resistors 200 to be adjusted at the same time, so that the laser resistance trimming system 100 can continuously cut the resistors 200 to be adjusted.
  • the preset resistance of the resistor 200 to be adjusted is 100 ohms.
  • the preset resistance value may be set in the main control device 40.
  • the measuring device 30 can monitor the change of the preset voltage of the resistor 200 to be adjusted, and the output level of the comparison circuit 310 will reverse when it reaches 10V.
  • the inversion signal is transmitted to the measurement circuit 320 and the main control device 40.
  • the measuring circuit 320 stops outputting the measuring current, and the measuring circuit 320 simultaneously outputs signals to the laser control circuit 511 and the galvanometer control circuit 512, thereby controlling the laser 521 and the galvanometer 522 to stop jobs.
  • the main control device 40 controls the channel conversion device 20 to close the current channel.
  • the channel conversion device 20 includes a conversion control circuit 210 and a relay board 220.
  • the conversion control circuit 210 is electrically connected to the main control device 40.
  • the conversion control circuit 210 is used to receive control instructions from the main control device 40.
  • the relay card 220 is electrically connected to the conversion control circuit 210 and the resistance connecting device 10 respectively.
  • the relay board 220 is used to receive the control instruction of the conversion control circuit 210 and provide a path for the signal transmission of the resistance connecting device 10.
  • the relay board 220 may include several to dozens of relays, which are electrical components that switch between on and off states at high speed and high frequency. It can be understood that the channel conversion device 20 can provide multiple measurement channels for the laser resistance trimming system 100 by setting the relay board 220. At the same time, the relay board 220 can ensure that the laser resistance trimming system 100 continuously cuts the multiple resistors 200 to be adjusted, so that the working efficiency of the laser resistance trimming system 100 can be further improved.
  • the relay card 220 includes a relay control circuit 221 and a plurality of relays 222.
  • the relay control circuit 221 is electrically connected to the conversion control circuit 210.
  • the relay control circuit 221 is used to receive and execute the control instructions of the conversion control circuit 210.
  • the plurality of relays 222 are electrically connected to the relay control circuit 221 and the resistance connecting device 10 respectively.
  • the plurality of relays 222 are used to receive control instructions from the relay control circuit 221 and are connected or disconnected according to the control instructions. It can be understood that by separately setting the relay control circuit 221, the laser resistance trimming system 100 can ensure good control of the multiple relays 222 during the working process, that is, the relay control circuit 221 can improve the laser resistance trimming. The efficiency of the system 100.
  • the type of the plurality of relays 222 is not limited, as long as they can provide multiple measurement channels without affecting the stability of the laser resistance trimming system 100.
  • the plurality of relays 222 may be switch type relays with contacts.

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Abstract

本申请涉及一种激光调阻系统。激光调阻系统包括电阻连接装置、通道转换装置、量测装置、主控装置和调阻装置。电阻连接装置在使用时与待调电阻电连接。通道转换装置与电阻连接装置电连接。量测装置包括比较电路和量测电路，量测电路与通道转换装置电连接，量测电路经通道转换装置为待调电阻提供量测电流，并经通道转换装置和电阻连接装置测量待调电阻的电压值，比较电路与量测电路电连接，比较电路用于判断待调电阻的电压是否达到预设值。主控装置分别与量测电路和通道转换装置电连接。调阻装置分别与主控装置和量测电路电连接。激光调阻系统可以在待调电阻达到预设值后快速响应，且可以实现对不同的待调电阻的连续调阻。

Description

激光调阻系统 技术领域
本申请涉及激光调阻技术领域，特别是涉及一种激光调阻系统。
背景技术
激光调阻系统对片式电阻进行调阻是利用一束极细的激光束打在片式电阻上，通过对片式电阻的阻体进行气化实现切割。随着激光切割过程的进行，同时通过量测系统实时测量并监测片式电阻阻值的变化，当片式电阻的实际阻值达到目标阻值后，激光束关闭，即实现激光调阻过程。
然而，传统方案中的激光调阻系统无法保证片式电阻在阻值达到目标值时具有足够的响应速率。而激光调阻系统较低的响应速率无法保证调阻过程的切痕效果和电阻精度。
发明内容
基于此，有必要针对相关技术中激光调阻系统在片式电阻在阻值达到目标值时响应速率较低的问题，提供一种激光调阻系统。
一种激光调阻系统，包括：
电阻连接装置，在使用时与待调电阻电连接；
通道转换装置，与所述电阻连接装置电连接，用于控制所述待调电阻所在通道的开闭；
量测装置，包括比较电路、量测电路和电源电路，所述量测电路和电源电路分别与所述通道转换装置电连接，所述电源电路经所述通道转换装置为所述 待调电阻提供量测电流，所述量测电路经所述通道转换装置和所述电阻连接装置测量所述待调电阻的电压值，所述比较电路与所述量测电路电连接，所述比较电路用于判断所述待调电阻的电压是否达到预设值；
主控装置，分别与所述电源电路和所述通道转换装置电连接，用于控制所述电源电路输出量测电流，并控制所述通道转换装置的通道转换；以及
调阻装置，分别与所述主控装置和所述量测电路电连接，用于接收所述主控装置和所述量测电路的控制指令，并依据接收到的控制指令开始或停止对所述待调电阻的激光切割。
在其中一个实施例中，所述调阻装置包括：
调阻控制电路，分别与所述主控装置和所述量测电路电连接，用于接收所述主控装置和所述量测装置的控制指令；以及
调阻设备，与所述调阻控制电路电连接，用于接收所述调阻控制电路的控制指令，并依据接收到的控制指令开始或停止对所述待调电阻的激光切割。
在其中一个实施例中，所述调阻设备包括：
激光器，与所述调阻控制电路电连接，用于输出激光；以及
振镜，与所述调阻控制电路电连接，用于对输出激光的传输光路进行调整。
在其中一个实施例中，所述调阻控制电路包括：
激光器控制电路，分别与所述主控装置、所述量测电路和所述激光器电连接，用于接收所述主控装置和所述量测装置的控制指令，并依据控制指令控制所述激光器的启停；以及
振镜控制电路，分别与所述主控装置、所述量测电路和所述振镜电连接，用于接收所述主控装置和所述量测装置的控制指令，并依据控制指令控制所述振镜的移动及启停。
在其中一个实施例中，所述振镜包括：
镀膜光学镜片，用于调整激光的传输光路；
伺服电机，所述镀膜光学镜片设置于所述伺服电机，所述伺服电机用于带动所述镀膜光学镜片进行移动；以及
振镜驱动器，分别与所述振镜控制电路和所述伺服电机电连接，用于接收所述振镜控制电路的控制命令并驱动所述伺服电机。
在其中一个实施例中，所述调阻设备还包括：
聚焦场镜，设置于从所述振镜输出激光的光路上，用于将激光聚焦于所述待调电阻。
在其中一个实施例中，所述电阻连接装置包括探针卡，与所述通道转换装置电连接，且在使用时与所述待调电阻电连接。
在其中一个实施例中，所述探针卡包括第一探针和第二探针，分别设置于所述待调电阻的两端，且分别连接两根导线，所述第一探针和所述第二探针用于输入量测电流并为测量所述待调电阻的电压值提供通路。
在其中一个实施例中，所述通道转换装置包括：
转换控制电路，与所述主控装置电连接，用于接收所述主控装置的控制指令；以及
继电器板卡，分别与所述转换控制电路和所述电阻连接装置电连接，用于接收所述转换控制电路的控制指令，并为所述电阻连接装置的信号传输提供通路。
在其中一个实施例中，所述继电器板卡包括：
继电器控制电路，与所述转换控制电路电连接，用于接收并执行所述转换控制电路的控制指令；以及
多个继电器，分别与所述继电器控制电路和所述电阻连接装置电连接，与用于接收所述继电器控制电路的控制指令并依据控制指令进行吸合或断开。
在上述激光调阻系统中。所述通道转换装置可以实现对在不同的所述待调电阻之间切换，从而实现对不同的所述待调电阻的连续调阻。所述主控装置控制所述量测装置输出量测电流，并控制所述通道转换装置的通道转换。所述量测装置中设置有比较电路和量测电路。所述比较电路可以在所述待调电阻阻值达到预设值时进行快速响应。所述量测电路可以输出量测电流并监测所述待调电阻的电压。同时，通过所述量测电路与所述调阻装置进行电连接，可以在所述比较电路判断所述待调电阻阻值达到预设值时，通过所述量测电路控制所述调阻装置进行启停，从而实现所述激光调阻系统在所述待调电阻阻值达到预设值后的快速响应。
附图说明
图1为本申请实施例提供的一种激光调阻系统连接关系示意图；
图2为本申请实施例提供的另一种激光调阻系统连接关系示意图；
图3为本申请实施例提供的一种激光对切痕影响示意图；
图4为本申请实施例提供的一种激光调阻系统使用激光切割改变待调电阻阻值的原理示意图；
图5为本申请实施例提供的一种激光调阻系统切割长度与电阻阻值关系示意图；
图6为本申请实施例提供的一种待调电阻剖面结构示意图；
图7为本申请实施例提供的一种激光调阻系统探针卡结构示意图。
附图标号说明
100   激光调阻系统
10    电阻连接装置
110   探针卡
111   第一探针
112   第二探针
20    通道转换装置
210   转换控制电路
220   继电器板卡
221   继电器控制电路
222   继电器
30    量测装置
310   比较电路
320   量测电路
330   电源电路
40    主控装置
50    调阻装置
510   调阻控制电路
511   激光器控制电路
512   振镜控制电路
520   调阻设备
521   激光器
522   振镜
523   镀膜光学镜片
524   伺服电机
525   振镜驱动器
526   聚焦场镜
200   待调电阻
具体实施方式
为使本申请的上述目的、特征和优点能够更加明显易懂，下面结合附图对本申请的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本申请。但是本申请能够以很多不同于在此描述的其它方式来实施，本领域技术人员可以在不违背本申请内涵的情况下做类似改进，因此本申请不受下面公开的具体实施的限制。
需要说明的是，当元件被称为“固定于”另一个元件，它可以直接在另一个元件上或者也可以存在居中的元件。当一个元件被认为是“连接”另一个元件，它可以是直接连接到另一个元件或者可能同时存在居中元件。
除非另有定义，本文所使用的所有的技术和科学术语与属于本申请的技术领域的技术人员通常理解的含义相同。本文中在本申请的说明书中所使用的术语只是为了描述具体的实施例的目的，不是旨在于限制本申请。本文所使用的术语“及/或”包括一个或多个相关的所列项目的任意的和所有的组合。
请参见图1，本申请提供一种激光调阻系统100。所述激光调阻系统100包括电阻连接装置10、通道转换装置20、量测装置30、主控装置40和调阻装置50。
所述电阻连接装置10在使用时与待调电阻200电连接。可以理解，所述电阻连接装置10可以同时与多个所述待调电阻200稳定连接。同时，所述电阻连 接装置10可以为连接的所述待调电阻200提供电流输入及电压测量通道。所述电阻连接装置10的设置可以保证所述激光调阻系统100与所述待调电阻200的稳定连接，同时可以为所述激光调阻系统100进行多个所述待调电阻200连续修阻提供保证。
所述通道转换装置20与所述电阻连接装置10电连接。所述通道转换装置20用于控制所述待调电阻200所在通道的开闭。可以理解，所述通道转换装置20可以由继电器组成，通过控制继电器的断开和吸合可以切换量测通道。所述通道转换装置20的设置可以保证所述激光调阻系统100对多个所述待调电阻200进行连续修阻。
所述量测装置30包括比较电路310、量测电路320和电源电路330。所述量测电路320和所述电源电路330分别与所述通道转换装置20电连接。在一个实施例中，所述量测电路320与所述通道转换装置20通过量测线缆进行连接。所述电源电路330经所述通道转换装置20为所述待调电阻200提供量测电流，所述量测电路320经所述通道转换装置20和所述电阻连接装置10测量所述待调电阻200的电压值。所述比较电路310与所述量测电路320电连接。所述比较电路310用于判断所述待调电阻200的电压是否达到预设值。可以理解，所述比较电路310可以包括比较器。通过设置所述比较电路310可以通过硬件判断所述待调电阻200的阻值是否达到预设值，从而避免由于所述激光调阻系统100的响应延迟造成调阻精度不足。所述量测电路320可以在所述主控装置40的控制下输出预设量测电流，量测电流先后经所述通道转换装置20和所述电阻连接装置10输入所述待调电阻200。所述量测电路320输出量测电流后可以实时测量所述待调电阻200的电压值，通过测得的电压值和预设量测电流的电流值，即可计算所述待调电阻200阻值，进而在所述激光调阻系统100调阻过程 中对所述待调电阻200的阻值进行实时监控。
所述主控装置40分别与所述电源电路330和所述通道转换装置20电连接。所述主控装置40用于控制所述电源电路330输出量测电流，并控制所述通道转换装置20的通道转换。可以理解，所述主控装置40可以控制所述量测电路320和所述通道转换装置20执行相应的动作。同时所述主控装置40可以接收上位机的控制指令。所述控制指令可以包括所述待调电阻200的位置信息，即要切割哪一个电阻，以及开始或停止切割的指令信息。通过设置所述主控装置40可以实现所述激光调阻系统100与上位机的通讯。在一个实施例中，所述主控装置40可以包括通讯模块，通过所述通讯模块可以实现对所述激光调阻系统100的远程控制和对切割过程的实时监控。
所述调阻装置50分别与所述主控装置40和所述量测电路320电连接。所述调阻装置50用于接收所述主控装置40和所述量测电路320的控制指令，并依据接收到的控制指令开始或停止对所述待调电阻200的激光切割。可以理解，所述调阻装置50为执行部件。所述调阻装置50可以输出激光，并依据所述待调电阻200的位置信息调整激光的传输光路，从而完成对指定所述待调电阻200进行切割。在一个实施例中，所述激光调阻系统100可以将内部各个控制模块整合到一个或者多个控制板上，从而减小所述激光调阻系统100的体积，并提高集成度。
可以理解，所述激光调阻系统100工作原理如下：所述主控装置40发送包含所述待调电阻200位置信息的控制指令给所述通道转换装置20。所述通道转换装置20控制所述待调电阻200所在的通道打开。所述主控装置40控制所述量测电路320向所述待调电阻200输出预设的量测电流。所述主控装置40控制所述调阻装置50对所述待调电阻200进行切割。开始切割后，所述量测电路320 实时监控所述待调电阻200的电压值并传输给所述比较电路310，所述比较电路310比较实时电压值与预设电压值的大小。
当所述待调电阻200的电压未达到预设电压值时(即所述待调电阻200的阻值未达到预设阻值)，所述量测装置30中的所述比较电路310可以输出一个恒定电平。此时，所述主控装置40可以继续控制所述调阻装置50持续输出激光并控制传输光路。所述量测电路320可以持续输出量测电流至所述待调电阻200，并测量所述待调电阻200的实时电压。可以理解，当所述待调电阻200的实际电压达到预设电压值时(即所述待调电阻200的阻值达到预设阻值)，所述比较电路310的输出电平会发生翻转。
在所述比较电路310的输出电平发生反转后，所述比较电路310经所述量测电路320发送信号给所述主控装置40。随后，所述主控装置40控制所述调阻装置50停止调阻。在一个实施例中，所述调阻装置50包括激光器和振镜，即停止调阻过程包括关闭激光器并控制振镜停止运动。同时所述量测电路320停止输出量测电流。所述量测电路320停止输出量测电流后，所述通道转换装置20关闭当前通道，即一个所述待调电阻200的切割过程完成。
相关技术中的量测系统，当所述待调电阻200的阻值达到预设值时通常难以保证其具有足够的响应速率，从而无法保证良好切痕效果和电阻精度。本申请提出的所述激光调阻系统100的所述通道转换装置20可以实现对在不同所述待调电阻200之间进行切换，从而可以对不同所述待调电阻200进行连续调阻。所述主控装置40控制所述量测装置30输出量测电流，并控制所述通道转换装置20的通道转换，即不同通道的打开或关闭。所述量测装置30中设置有所述比较电路310和所述量测电路320。所述比较电路310可以在所述待调电阻200阻值达到预设值时瞬间响应。所述量测电路320可以输出量测电流并监测所述 待调电阻200的电压。同时，通过所述量测电路320与所述调阻装置50进行电连接，可以在所述比较电路310判断所述待调电阻200阻值达到预设值时，通过所述量测电路320直接控制所述调阻装置50停止运行，从而实现所述激光调阻系统100在所述待调电阻200阻值达到预设值后的快速响应。可以理解，所述激光调阻系统100集激光控制、振镜控制和量测控制为一体，可以智能化、高效化和准确化地制造贴片电阻。
请一并参见图2，在一个实施例中，所述调阻装置50包括调阻控制电路510和调阻设备520。所述调阻控制电路510分别与所述主控装置40和所述量测电路320电连接。所述调阻控制电路510用于接收所述主控装置40和所述量测装置30的控制指令。所述调阻设备520与所述调阻控制电路510电连接。所述调阻设备520用于接收所述调阻控制电路510的控制指令，并依据接收到的控制指令开始或停止对所述待调电阻200的激光切割。可以理解，所述调阻控制电路510可以依据所述主控装置40发送的控制信号对所述调阻设备520的调阻过程进行控制。所述调阻控制电路510的设置可以提高所述激光调阻系统100的运行效率。在一个实施例中，也可以不包括所述调阻控制电路510，直接通过所述主控装置40实现对所述调阻设备520的控制。
在一个实施例中，所述调阻设备520包括激光器521和振镜522。所述激光器521与所述调阻控制电路510电连接，用于输出激光。所述振镜522与所述调阻控制电路510电连接。所述振镜522用于对输出激光的传输光路进行调整。可以理解，所述激光器521可以输出脉冲激光。请一并参见图3，在对所述待调电阻200进行切割的过程中，通过激光脉冲点的移动，逐步向前堆叠，从而形成一道连续的切口。其中，切口宽度可以由光斑聚焦后的尺寸以及激光的功率强度决定。同时，切口的品质可以通过修改光斑密度和切割速度等参数来进行 调整。所述振镜522可以调整所述激光器521输出激光束传输的光路。激光束通过所述振镜522的镜片转动而改变光路，最终在所述待调电阻200上形成激光切痕。通过设置所述激光器521和所述振镜522可以实现对所述待调电阻200的精确切割，从而进一步提高所述激光调阻系统100的调阻精度。
在一个实施例中，所述调阻控制电路510包括激光器控制电路511和振镜控制电路512。所述激光器控制电路511分别与所述主控装置40、所述量测电路320和所述激光器521电连接。所述激光器控制电路511用于接收所述主控装置40和所述量测装置30的控制指令，并依据控制指令控制所述激光器521的启停。所述振镜控制电路512分别与所述主控装置40、所述量测电路320和所述振镜522电连接。所述振镜控制电路512用于接收所述主控装置40和所述量测装置30的控制指令，并依据控制指令控制所述振镜522的移动及启停。可以理解，所述激光器控制电路511和所述振镜控制电路512可以分别对所述激光器521和所述振镜522进行控制。所述激光器控制电路511和所述振镜控制电路512的设置可以将两个控制过程分开，从而可以进一步提高所述激光调阻系统100的控制精度和运行效率。在一个实施例中，为了提高所述激光调阻系统100的集成度，可以将所述激光器控制电路511和所述振镜控制电路512集成于同一电路板上。
在一个实施例中，所述振镜522包括镀膜光学镜片523、伺服电机524和振镜驱动器525。所述镀膜光学镜片523用于调整激光的传输光路。所述镀膜光学镜片523设置于所述伺服电机524，所述伺服电机524用于带动所述镀膜光学镜片523进行移动。所述振镜驱动器525分别与所述振镜控制电路512和所述伺服电机524电连接。所述振镜驱动器525用于接收所述振镜控制电路512的控制命令并驱动所述伺服电机524。可以理解，所述振镜驱动器525接收驱动信号， 并驱动带有所述镀膜光学镜片523的所述伺服电机524进行运动。在一个实施例中，所述伺服电机524可以为闭环增量伺服电机。所述振镜驱动器525的驱动信号可以由所述振镜控制电路512输出并进行监控。请一并参见图4，所述振镜522带动激光扫描切割所述待调电阻200的基片，使电阻浆料层受激光加热气化，形成一定深度的刻痕，从而改变所述待调电阻200体的导电截面积和导电长度，进而将低于预设阻值的所述待调电阻200调整到阻值允许的偏差范围内。请参见图5-图6，电阻的计算公式可以表示为R＝ρ(L/A)。其中，ρ为阻抗系数，L为电阻长度，A为电阻横截面积，R的单位为欧姆。从上述公式可以看出，激光调阻通过改变电流通道来改变所述待调电阻200的阻值。可以理解，激光至少需要切割至电阻基板。此外，切割长度越长，电阻阻值越大。
可以理解，电阻与温度之间的关系为：R＝R 0*(1+at)。其中，R 0是0℃时金属导体的电阻，a为该金属导体的电阻温度系数(不同金属导体的电阻温度系数a不同)。从上面的公式可知，电阻所受的温度越高，其阻值变化量越大。因此在激光刻痕同样干净的情况下，调阻过程中作用于所述待调电阻200的温度越低，其稳定性越高。
在一个实施例中，所述调阻设备520还包括聚焦场镜526。所述聚焦场镜526设置于从所述振镜522输出激光的光路上。所述聚焦场镜526用于将激光聚焦于所述待调电阻200。可以理解，由于光斑聚焦后的尺寸影响切口宽度。因此，通过设置所述聚焦场镜526可以进一步提高所述激光调阻系统100调阻过程的准确性。
请一并参见图7，在一个实施例中，所述电阻连接装置10包括探针卡110，与所述通道转换装置20电连接，且在使用时与所述待调电阻200电连接。在一个实施例中，所述探针卡110包括第一探针111和第二探针112，分别设置于所 述待调电阻200的两端，且分别连接两根导线，所述第一探针111和所述第二探针112用于输入量测电流并测量所述待调电阻200的电压值。其中，所述第一探针111和所述第二探针112部分为三角形。导线HF、LF、HS和LS均为所述第一探针111或所述第二探针112引出的线。在一个实施例中，HF、LF分别为恒流电源的高电位和低电位。HS、LS分别为电压测量的高电位和低电位。所述激光调阻系统100采用输入恒定电流的方法测量所述待调电阻200的阻值，即通过测量所述待调电阻200的电压的方法来进行阻值测量。所述探针卡110可以同时连接多个所述待调电阻200，以便所述激光调阻系统100对多个所述待调电阻200进行连续切割。
在一个实施例中，若所述待调电阻200的预设阻值为100欧姆。所述预设阻值可以设置于所述主控装置40内。所述主控装置40可以根据预设阻值，分配需要输入至所述待调电阻200两端的恒定电流。若分配至所述待调电阻200两端的恒定电流为100mA，根据所述激光调阻系统100中使用的输入恒定电流测电压的方式，由公式R＝U/I可以计算得到预设电压为10V。在对所述待调电阻200进行切割的过程中，即所述量测装置30可以监测所述待调电阻200预设电压的变化，当达到10V时所述比较电路310的输出电平会翻转，翻转信号传输给所述量测电路320和所述主控装置40。所述量测电路320停止输出量测电流，所述量测电路320同时输出信号给所述激光器控制电路511和所述振镜控制电路512，从而控制所述激光器521和所述振镜522停止工作。在所述量测电路320停止输出所述量测电流后，所述主控装置40控制所述通道转换装置20关闭当前通道。
在一个实施例中，所述通道转换装置20包括转换控制电路210和继电器板卡220。所述转换控制电路210与所述主控装置40电连接。所述转换控制电路 210用于接收所述主控装置40的控制指令。所述继电器板卡220分别与所述转换控制电路210和所述电阻连接装置10电连接。所述继电器板卡220用于接收所述转换控制电路210的控制指令，并为所述电阻连接装置10的信号传输提供通路。所述继电器板卡220可以包括几个到几十个继电器，为一种高速、高频切换通断状态的电气元件。可以理解，所述通道转换装置20通过设置所述继电器板卡220可以为所述激光调阻系统100提供多量测通道。同时，所述继电器板卡220可以保证所述激光调阻系统100对多个所述待调电阻200的连续切割，从而可以进一步提高所述激光调阻系统100的工作效率。
在一个实施例中，所述继电器板卡220包括继电器控制电路221和多个继电器222。所述继电器控制电路221与所述转换控制电路210电连接。所述继电器控制电路221用于接收并执行所述转换控制电路210的控制指令。所述多个继电器222分别与所述继电器控制电路221和所述电阻连接装置10电连接。所述多个继电器222与用于接收所述继电器控制电路221的控制指令并依据控制指令进行吸合或断开。可以理解，通过单独设置所述继电器控制电路221可以保证所述激光调阻系统100在工作过程中对所述多个继电器222的良好控制，即所述继电器控制电路221可以提高所述激光调阻系统100的工作效率。可以理解，所述多个继电器222的类型不作限定，只要其可以提供多量测通道且不会对所述激光调阻系统100的稳定性产生影响即可。在一个实施例中，所述多个继电器222可以为开关式有触点继电器。
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本申请的几种实施方式，其描述较为具体和详细， 但并不能因此而理解为对申请专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本申请构思的前提下，还可以做出若干变形和改进，这些都属于本申请的保护范围。因此，本申请专利的保护范围应以所附权利要求为准。

Claims (10)

  1. 一种激光调阻系统，其特征在于，包括：
    电阻连接装置(10)，在使用时与待调电阻(200)电连接；
    通道转换装置(20)，与所述电阻连接装置(10)电连接，用于控制所述待调电阻(200)所在通道的开闭；
    量测装置(30)，包括比较电路(310)、量测电路(320)和电源电路(330)，所述量测电路(320)和所述电源电路(330)分别与所述通道转换装置(20)电连接，所述电源电路(330)经所述通道转换装置(20)为所述待调电阻(200)提供量测电流，所述量测电路(320)经所述通道转换装置(20)和所述电阻连接装置(10)测量所述待调电阻(200)的电压值，所述比较电路(310)与所述量测电路(320)电连接，所述比较电路(310)用于判断所述待调电阻(200)的电压是否达到预设值；
    主控装置(40)，分别与所述电源电路(330)和所述通道转换装置(20)电连接，用于控制所述电源电路(330)输出量测电流，并控制所述通道转换装置(20)的通道转换；以及
    调阻装置(50)，分别与所述主控装置(40)和所述量测电路(320)电连接，用于接收所述主控装置(40)和所述量测电路(320)的控制指令，并依据接收到的控制指令开始或停止对所述待调电阻(200)的激光切割。
  2. 根据权利要求1所述的激光调阻系统，其特征在于，所述调阻装置(50)包括：
    调阻控制电路(510)，分别与所述主控装置(40)和所述量测电路(320)电连接，用于接收所述主控装置(40)和所述量测装置(30)的控制指令；以及
    调阻设备(520)，与所述调阻控制电路(510)电连接，用于接收所述调阻 控制电路(510)的控制指令，并依据接收到的控制指令开始或停止对所述待调电阻(200)的激光切割。
  3. 根据权利要求2所述的激光调阻系统，其特征在于，所述调阻设备(520)包括：
    激光器(521)，与所述调阻控制电路(510)电连接，用于输出激光；以及
    振镜(522)，与所述调阻控制电路(510)电连接，用于对输出激光的传输光路进行调整。
  4. 根据权利要求3所述的激光调阻系统，其特征在于，所述调阻控制电路(510)包括：
    激光器控制电路(511)，分别与所述主控装置(40)、所述量测电路(320)和所述激光器(521)电连接，用于接收所述主控装置(40)和所述量测装置(30)的控制指令，并依据控制指令控制所述激光器(521)的启停；以及
    振镜控制电路(512)，分别与所述主控装置(40)、所述量测电路(320)和所述振镜(522)电连接，用于接收所述主控装置(40)和所述量测装置(30)的控制指令，并依据控制指令控制所述振镜(522)的移动及启停。
  5. 根据权利要求4所述的激光调阻系统，其特征在于，所述振镜(522)包括：
    镀膜光学镜片(523)，用于调整激光的传输光路；
    伺服电机(524)，所述镀膜光学镜片(523)设置于所述伺服电机(524)，所述伺服电机(524)用于带动所述镀膜光学镜片(523)进行移动；以及
    振镜驱动器(525)，分别与所述振镜控制电路(512)和所述伺服电机(524)电连接，用于接收所述振镜控制电路(512)的控制命令并驱动所述伺服电机(524)。
  6. 根据权利要求3所述的激光调阻系统，其特征在于，所述调阻设备(520)还包括：
    聚焦场镜(526)，设置于从所述振镜(522)输出激光的光路上，用于将激光聚焦于所述待调电阻(200)。
  7. 根据权利要求1所述的激光调阻系统，其特征在于，所述电阻连接装置(10)包括探针卡(110)，与所述通道转换装置(20)电连接，且在使用时与所述待调电阻(200)电连接。
  8. 根据权利要求7所述的激光调阻系统，其特征在于，所述探针卡(110)包括第一探针(111)和第二探针(112)，分别设置于所述待调电阻(200)的两端，且分别连接两根导线，所述第一探针(111)和所述第二探针(112)用于输入量测电流并为测量所述待调电阻(200)的电压值提供通路。
  9. 根据权利要求1所述的激光调阻系统，其特征在于，所述通道转换装置(20)包括：
    转换控制电路(210)，与所述主控装置(40)电连接，用于接收所述主控装置(40)的控制指令；以及
    继电器板卡(220)，分别与所述转换控制电路(210)和所述电阻连接装置(10)电连接，用于接收所述转换控制电路(210)的控制指令，并为所述电阻连接装置(10)的信号传输提供通路。
  10. 根据权利要求9所述的激光调阻系统，其特征在于，所述继电器板卡(220)包括：
    继电器控制电路(221)，与所述转换控制电路(210)电连接，用于接收并执行所述转换控制电路(210)的控制指令；以及
    多个继电器(222)，分别与所述继电器控制电路(221)和所述电阻连接装 置(10)电连接，与用于接收所述继电器控制电路(221)的控制指令并依据控制指令进行吸合或断开。
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CN110070971A (zh) * 2019-05-13 2019-07-30 深圳市杰普特光电股份有限公司 激光调阻系统

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