WO2020206712A1 - Gyroscope - Google Patents

Gyroscope Download PDF

Info

Publication number
WO2020206712A1
WO2020206712A1 PCT/CN2019/083326 CN2019083326W WO2020206712A1 WO 2020206712 A1 WO2020206712 A1 WO 2020206712A1 CN 2019083326 W CN2019083326 W CN 2019083326W WO 2020206712 A1 WO2020206712 A1 WO 2020206712A1
Authority
WO
WIPO (PCT)
Prior art keywords
arc
support plate
shaped
rod body
elastic connecting
Prior art date
Application number
PCT/CN2019/083326
Other languages
English (en)
Chinese (zh)
Inventor
孟珍奎
刘雨微
Original Assignee
瑞声声学科技(深圳)有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 瑞声声学科技(深圳)有限公司 filed Critical 瑞声声学科技(深圳)有限公司
Publication of WO2020206712A1 publication Critical patent/WO2020206712A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators

Definitions

  • the invention relates to the technical field of gyroscopes, in particular to a gyroscope.
  • the gyroscope is an angular velocity detection device.
  • the prior art gyroscope has a complicated structure. While maintaining the elasticity of rotation, some unnecessary vibrations are generated, so that the accuracy of rotation detection is not high enough.
  • the object of the present invention is to provide a gyroscope that can suppress unnecessary vibration and is easy to manufacture.
  • a gyroscope which includes a ring-shaped support plate and a vibrating member erected on one side of the ring-shaped support plate.
  • the vibrating member includes a ring-shaped portion and a plurality of circumferentially spaced circumferentially arranged on the ring-shaped portion.
  • each of the elastic connecting portions includes an arc-shaped rod extending in an arc shape and spaced apart on the outer circumference of the ring-shaped portion, and connected to the arc-shaped rod and the ring
  • the first rod body between the outer peripheral walls of the part and the second rod body extending from the arc-shaped rod body and fixed to the annular support plate, each of the arc-shaped rod bodies being spaced along a circumference concentric with the ring part distributed.
  • each of the elastic connecting portions includes one arc-shaped rod, two first rods, and one second rod, and the two first rods are separated from two of the arc-shaped rods.
  • the end is extended to connect the outer peripheral wall of the ring portion, and the second rod body connects the arc-shaped rod body and the ring support plate.
  • the second rod is connected to the midpoint of the arc-shaped rod; and/or,
  • connection between the second rod body and the annular support plate is provided with pins for electrical connection.
  • the angle formed by the connection between the second rod body and the arc-shaped rod body and the angle formed by the connection between the first rod body and the annular portion are both greater than or equal to 90 degrees.
  • the number of the elastic connecting parts is an even number, and the even number of elastic connecting parts are distributed at equal intervals along the circumferential direction.
  • the annular support plate has a hollow inner hole, and the central axis of the hollow inner hole coincides with the central axis of the annular portion.
  • the hollow inner hole is a regular polygonal hole.
  • the number of sides of the regular polygon hole is an even number, and the number of sides of the regular polygon hole is the same as the number of the elastic connecting parts, and each of the second rods corresponds to each side of the regular polygon hole one by one.
  • the midpoint of and extending is connected to the annular support plate.
  • the vibrating member is made of metal; and/or,
  • the vibration member is integrally formed.
  • the gyroscope further includes a substrate, and the side of the ring-shaped support plate opposite to the vibrating member is laminated and fixed on the substrate.
  • the present invention provides a gyroscope, the vibrating member is erected on a ring-shaped support plate, and when the vibrating member is rotated by external force, the current changes, and the angular velocity is detected; the structure of the present invention Simple, multiple elastic connecting parts can maintain the elasticity of rotation and suppress unnecessary vibration; and the elastic connecting part is provided with an arc-shaped rod body concentric with the ring part, so that the entire vibrating part structure has no acute angles and maintains elasticity. And it is easier to manufacture while resisting unnecessary vibration performance.
  • FIG. 1 is an exploded view of the structure of a gyroscope provided by an embodiment of the present invention
  • FIG. 2 is a schematic diagram of the overall structure of a gyroscope provided by an embodiment of the present invention
  • Figure 3 is a cross-sectional view of A-A in Figure 2;
  • Fig. 4 is a top view of a gyroscope provided by an embodiment of the present invention.
  • a preferred embodiment of the present invention provides a gyroscope 100, which includes a substrate 10, a ring-shaped support plate 20, and a vibrating member 30 erected on one side of the ring-shaped support plate 20.
  • the vibrating member 30 includes a ring The shaped portion 31 and a plurality of elastic connecting portions 32 arranged on the outer periphery of the annular portion 31 at intervals along the circumferential direction of the annular portion 31, each elastic connecting portion 32 includes an arc extending and spaced apart on the outer periphery of the annular portion 31
  • a pin 324 for electrical connection is provided at the connection between the elastic connecting portion 32 and the annular support plate 20.
  • the annular support plate 20 is made of silicon dioxide, and the vibrating member 30 is made of metal.
  • the pin 324 is in a continuously energized state, so that the vibrating member 30 is also in a conductive state.
  • the vibrating member 30 is erected on the ring-shaped support plate 20. Under normal conditions, the current is normal and there is no fluctuation; if the ring-shaped portion 31 is subjected to external pressure, the elastic connecting portion 32 will rotate, which will cause the current to change. When the current changes, the gyroscope 100 can detect the corresponding angular velocity change.
  • the gyroscope 100 provided by the embodiment of the present invention has a simple structure, and the provision of a plurality of elastic connecting portions 32 not only maintains the elasticity of rotation but also suppresses unnecessary vibration; and the elastic connecting portion 32 is provided with an arc that is concentric with the ring portion 31
  • the rod body 321 makes the structure of the entire vibrating member 30 free of acute angles, which is easier to manufacture while maintaining elasticity and resistance to unnecessary vibration performance.
  • each elastic connecting portion 32 includes an arc-shaped rod 321, two first rods 322 and a second rod 323, the two first rods 322 from the arc-shaped rod 321 respectively Both ends extend to connect the outer peripheral wall of the ring portion 31. A distance is maintained between two adjacent elastic connecting portions 32, which can prevent the elastic connecting portions 32 from colliding with each other during vibration, thereby improving the accuracy and reliability of the detection result.
  • the second rod body 323 is connected to the midpoint of the arc-shaped rod body 321.
  • the angle formed by the connection between the second rod body 323 and the arc-shaped rod body 321 and the angle formed by the connection between the first rod body 322 and the annular portion 31 are both greater than or equal to 90 degrees.
  • the overall structure of the vibrating member 30 has no acute angles, and it is easier to manufacture on the premise of maintaining the elasticity of rotation and resistance to unnecessary vibration.
  • the number of the elastic connecting portions 32 is an even number, and the even number of elastic connecting portions 32 are distributed at equal intervals along the circumferential direction.
  • the elastic connecting parts 32 are arranged at intervals along a circumference concentric with the ring part 31, the arrangement is uniform and the connection is stable, so that the gyroscope 100 can be more resistant to unnecessary vibration.
  • the annular portion 31 has a circular ring shape, which has a simple structure, is convenient for manufacturing and molding, and facilitates the symmetrical connection of an even number of elastic connecting portions 32.
  • the annular portion 31 may also have other regular polygonal shapes.
  • the vibration member 30 is integrally formed.
  • the vibrating member 30 is manufactured in an integrated manner, which is beneficial to the overall stability of the vibrating member 30, makes it more resistant to unnecessary vibration, and is convenient for industrial manufacturing.
  • the outer contour shape of the annular support plate 20 is rectangular, the annular support plate 20 has a hollow inner hole 21, and the central axis of the hollow inner hole 21 coincides with the central axis of the annular portion 31.
  • the vibrating member 30 is erected on the ring-shaped support plate 20, and the portion of the ring-shaped support plate 20 facing the vibrating member 30 is set as a through hole, which can prevent the vibration of the vibrating member 30 from occurring between the elastic connecting portion 32 and the ring support plate 20 Collision, so as to affect the test results.
  • the hollow inner hole 21 is a regular polygon hole
  • the number of sides of the regular polygon hole is an even number
  • the number of sides of the regular polygon hole is the same as the number of the elastic connecting portion 32
  • each second rod body 323 corresponds to each of the regular polygon holes one by one.
  • the midpoint of the edge is extended and connected to the ring-shaped support plate 20.
  • the number of elastic connecting portions 32 and the number of sides of the regular polygonal hole are both eight.
  • the number of sides of the regular polygonal hole can be any other even number to ensure that the elastic connecting portions 32 are evenly arranged and connected stably, so that unnecessary vibration can be suppressed.
  • the gyroscope 100 includes a substrate 10, and the side of the ring-shaped support plate 20 opposite to the vibrating element 30 is laminated and fixed on the substrate 10.
  • the substrate 10 is a rectangular plate.
  • the strength of the entire gyroscope 100 can be increased.
  • the principle of detecting the angular velocity of the gyroscope 100 provided by the embodiment of the present invention is: the vibrating member 30 is erected on the annular support plate 20. When the vibrating member 30 rotates due to external force, the current changes, and the angular velocity is detected.
  • the gyroscope 100 provided by the embodiment of the present invention has a simple structure, and the provision of a plurality of elastic connecting portions 32 not only maintains the elasticity of rotation but also suppresses unnecessary vibration; and the elastic connecting portion 32 is provided with an arc that is concentric with the ring portion 31
  • the rod body 321 makes the structure of the entire vibrating member 30 free of acute angles, which is easier to manufacture while maintaining elasticity and resistance to unnecessary vibration performance.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

L'invention concerne un gyroscope (100), comprenant une plaque de support annulaire (20) et un élément vibrant (30), l'élément vibrant (30) comprenant une partie annulaire (31) et une pluralité de parties de liaison élastiques (32) disposées à intervalles définis le long de la direction circonférentielle de la partie annulaire (31), chaque partie de liaison élastique (32) comprenant des tiges en forme d'arc (321) disposées à intervalles définis sur la circonférence externe de la partie annulaire (31), une première tige (322) reliée entre la tige en forme d'arc (321) et la paroi périphérique externe de la partie annulaire (31) et une seconde tige (323) s'étendant à partir de la tige en forme d'arc (321) et fixée sur la plaque de support annulaire (20), chaque tige en forme d'arc (321) étant répartie à intervalles définis le long d'un cercle qui est concentrique avec la partie annulaire (31). L'élément vibrant (30) du gyroscope (100) est érigé sur la plaque de support annulaire (20), lorsque l'élément vibrant (30) est entraîné en rotation par une force externe, le courant varie et la vitesse angulaire est détectée ; la fourniture d'une pluralité de parties de liaison élastiques (32) non seulement maintient l'élasticité de rotation mais supprime également les vibrations inutiles ; et les parties de liaison élastiques (32) sont pourvues de tiges en forme d'arc (321) concentriques avec la partie annulaire (31), de sorte que la structure de l'ensemble de l'élément vibrant (30) ne présente pas d'angle aigu et elle est plus facile à fabriquer tout en maintenant des performances d'élasticité et de résistance à des vibrations inutiles.
PCT/CN2019/083326 2019-04-08 2019-04-19 Gyroscope WO2020206712A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201910276698.2 2019-04-08
CN201910276698.2A CN109900262B (zh) 2019-04-08 2019-04-08 陀螺仪

Publications (1)

Publication Number Publication Date
WO2020206712A1 true WO2020206712A1 (fr) 2020-10-15

Family

ID=66954732

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2019/083326 WO2020206712A1 (fr) 2019-04-08 2019-04-19 Gyroscope

Country Status (2)

Country Link
CN (1) CN109900262B (fr)
WO (1) WO2020206712A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110631569A (zh) * 2019-10-12 2019-12-31 东南大学 一种mems单环环形振动陀螺结构
CN112857351B (zh) * 2021-04-15 2022-03-25 中北大学 一种兼具大量程和高精度的双环式微机械陀螺结构

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5932804A (en) * 1997-02-18 1999-08-03 British Aerospace Public Limited Company Vibrating structure gyroscope
CN1312906A (zh) * 1998-08-11 2001-09-12 Bae系统公共有限公司 角速度传感器
CN2618143Y (zh) * 2003-05-30 2004-05-26 财团法人工业技术研究院 振动式环形陀螺仪的环体及支承结构
CN1610819A (zh) * 2001-09-14 2005-04-27 Bae系统公共有限公司 振动陀螺速度传感器
CN101558284A (zh) * 2006-12-15 2009-10-14 大西洋惯性系统有限公司 陀螺仪的或关于陀螺仪的改进
CN102089620A (zh) * 2008-07-12 2011-06-08 大西洋惯性系统有限公司 振动结构陀螺仪的或者涉及振动结构陀螺仪的改进
CN104165623A (zh) * 2014-08-08 2014-11-26 上海交通大学 一种内外双电极式微型半球谐振陀螺仪及其制备方法
CN106289215A (zh) * 2016-10-21 2017-01-04 中北大学 一种全对称u形梁mems环形振动陀螺谐振子结构
CN106643686A (zh) * 2016-11-07 2017-05-10 中北大学 一种全对称折叠弹性梁硅微环形振动陀螺谐振子结构

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020085877A (ko) * 1999-09-17 2002-11-16 키오닉스, 인크. 전기적으로 디커플링된 마이크로머신 자이로스코프
US8042394B2 (en) * 2007-09-11 2011-10-25 Stmicroelectronics S.R.L. High sensitivity microelectromechanical sensor with rotary driving motion
JP5630267B2 (ja) * 2008-12-09 2014-11-26 株式会社村田製作所 振動ジャイロ素子及びその製造方法
CN102252665B (zh) * 2011-04-20 2013-11-06 上海交通大学 全固态振动式微陀螺的封装结构
GB201307773D0 (en) * 2013-04-30 2013-06-12 Atlantic Inertial Systems Ltd MEMS sensors
CN206341427U (zh) * 2016-10-25 2017-07-18 瑞声科技(新加坡)有限公司 Mems麦克风
CN106643685A (zh) * 2016-11-07 2017-05-10 中北大学 一种全新的u形折叠梁硅微环形振动陀螺
GB2565298B (en) * 2017-08-07 2022-03-16 Atlantic Inertial Systems Ltd Angular rate sensors
CN107607100B (zh) * 2017-10-19 2019-09-27 北方电子研究院安徽有限公司 一种硅微机械角振动陀螺抗冲击弹性止挡结构

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5932804A (en) * 1997-02-18 1999-08-03 British Aerospace Public Limited Company Vibrating structure gyroscope
CN1312906A (zh) * 1998-08-11 2001-09-12 Bae系统公共有限公司 角速度传感器
CN1610819A (zh) * 2001-09-14 2005-04-27 Bae系统公共有限公司 振动陀螺速度传感器
CN2618143Y (zh) * 2003-05-30 2004-05-26 财团法人工业技术研究院 振动式环形陀螺仪的环体及支承结构
CN101558284A (zh) * 2006-12-15 2009-10-14 大西洋惯性系统有限公司 陀螺仪的或关于陀螺仪的改进
CN102089620A (zh) * 2008-07-12 2011-06-08 大西洋惯性系统有限公司 振动结构陀螺仪的或者涉及振动结构陀螺仪的改进
CN104165623A (zh) * 2014-08-08 2014-11-26 上海交通大学 一种内外双电极式微型半球谐振陀螺仪及其制备方法
CN106289215A (zh) * 2016-10-21 2017-01-04 中北大学 一种全对称u形梁mems环形振动陀螺谐振子结构
CN106643686A (zh) * 2016-11-07 2017-05-10 中北大学 一种全对称折叠弹性梁硅微环形振动陀螺谐振子结构

Also Published As

Publication number Publication date
CN109900262B (zh) 2021-08-10
CN109900262A (zh) 2019-06-18

Similar Documents

Publication Publication Date Title
WO2020206712A1 (fr) Gyroscope
CN108613669B (zh) 正多边形盘状mems谐振陀螺
US8928308B2 (en) Current sensor
WO2020206710A1 (fr) Gyroscope
WO2020206711A1 (fr) Gyroscope
CN101893034B (zh) 具有柔性元件的贯穿枢轴以及包括这种枢轴的航天器
JP6210284B2 (ja) 回転角検出装置
CN111156980A (zh) Mems陀螺仪
JP2010078366A (ja) 角度検出装置
CN109186576A (zh) 一种新型正八边环形谐振式微机械陀螺
CN111156981A (zh) Mems陀螺仪
WO2022007039A1 (fr) Gyroscope
US8453506B2 (en) Spring mounting element for an accelerometer
US9816837B2 (en) Magnetic angle detector
JP5904017B2 (ja) 荷重検出装置
JP6070464B2 (ja) 回転体
WO2015108989A1 (fr) Appareil mems à imperfections géométriques intentionnelles pour l'alignement de modes résonnants et pour compenser des variations de fabrication
WO2021134675A1 (fr) Gyroscope mems
US20230266123A1 (en) Sensor
JP2023183228A (ja) トルクセンサ
JPH0528496Y2 (fr)
CN102520210A (zh) 一种压电式六维加速度传感器
JP5518314B2 (ja) 物体測位装置
JP2011027562A (ja) 圧電体膜を用いた振動ジャイロ
WO2022209109A1 (fr) Capteur de couple

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19923839

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19923839

Country of ref document: EP

Kind code of ref document: A1