WO2020192051A1 - Display panel and preparation method thereof - Google Patents

Display panel and preparation method thereof Download PDF

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Publication number
WO2020192051A1
WO2020192051A1 PCT/CN2019/107653 CN2019107653W WO2020192051A1 WO 2020192051 A1 WO2020192051 A1 WO 2020192051A1 CN 2019107653 W CN2019107653 W CN 2019107653W WO 2020192051 A1 WO2020192051 A1 WO 2020192051A1
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WO
WIPO (PCT)
Prior art keywords
layer
black matrix
metal layer
display panel
metal
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PCT/CN2019/107653
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French (fr)
Chinese (zh)
Inventor
唐芮
简庆宏
Original Assignee
武汉华星光电半导体显示技术有限公司
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Publication of WO2020192051A1 publication Critical patent/WO2020192051A1/en

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/86Arrangements for improving contrast, e.g. preventing reflection of ambient light
    • H10K50/865Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. light-blocking layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/60OLEDs integrated with inorganic light-sensitive elements, e.g. with inorganic solar cells or inorganic photodiodes
    • H10K59/65OLEDs integrated with inorganic image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

Definitions

  • the invention relates to the technical field of display panels, in particular to a display panel and a preparation method thereof.
  • OLED Organic Light Emitting Diode
  • OLED has self-luminescence, low drive voltage, high luminous efficiency, short response time, high definition and contrast, a viewing angle of nearly 180 degrees, a wide operating temperature range, and it can realize flexible display and Large-area full-color display and many other advantages are recognized by the industry as the next-generation flat panel display emerging application technology.
  • Electroluminescence (EL) devices emit light through the polarizer layer (Polarizer, or POL), and the light intensity will be reduced by about 50%, especially for under-screen camera designs (CUP)
  • EL Electroluminescence
  • POL polarizer layer
  • CUP under-screen camera designs
  • the purpose of the present invention is to provide a display panel and a preparation method thereof.
  • the black matrix layer material is used to completely overlap the metal wires, and the polarizer layer on the original structure is removed, thereby not only solving the problem of array
  • the reflection effect of the metal layer on the substrate on the external light to ensure the normal display of the electroluminescent device after the light is emitted, and to increase the external light transmittance without the polarizer layer to ensure the normal operation of the under-screen camera.
  • the present invention provides a display panel, the display panel includes an array substrate, the display panel further includes: at least one first metal layer, the at least one first metal layer is disposed on the The array substrate; an interlayer dielectric layer, the interlayer dielectric layer is disposed on the at least one first metal layer; a second metal layer, the second metal layer is disposed on the interlayer dielectric layer ; At least one black matrix layer, the at least one black matrix layer is at least disposed on the second metal layer, and completely covers the at least one first metal layer and the second metal layer.
  • the black matrix layer when the at least one black matrix layer is a multilayer, the black matrix layer is respectively disposed on the second metal layer and the at least first metal layer, and completely covers the At least the first metal layer and the second metal layer.
  • the thickness of the at least one black matrix layer is 100 nm to 5000 nm.
  • the material of the at least one black matrix layer is black organic resin and black inorganic film.
  • the black inorganic film is metal oxide or metal sulfide.
  • the material of the at least one first metal layer is molybdenum.
  • the second metal layer has a laminated structure of titanium/aluminum/titanium.
  • the array substrate includes: a base substrate, an inorganic water blocking layer disposed on the base substrate, a buffer layer disposed on the inorganic water blocking layer, and a An active layer on the buffer layer and a gate insulating layer arranged on the active layer; wherein the at least one first metal layer is arranged on the gate insulating layer.
  • the present invention provides a manufacturing method using the above-mentioned display panel.
  • the manufacturing method includes: (1) providing a base substrate of an array substrate; (2) on the base substrate Deposit a first metal layer, and use a gate mask to pattern the first metal layer to form a first gate layer; (3) coating a black matrix layer on the first gate layer Material and perform exposure and development operations to form the black matrix layer with the same pattern as the first gate layer; (4) deposit an interlayer dielectric layer on the black matrix layer; (5) A second metal layer is deposited on the interlayer dielectric layer, and patterning is performed to form source and drain electrodes; (6) a black matrix layer material is coated on the source and drain electrodes, and exposure and development are performed Operation to form the black matrix layer with the same pattern as the source and drain electrodes; (7) provide an organic flat layer on the black matrix layer; (8) deposit an organic flat layer on the organic flat layer The anode is patterned; (9) corresponding electroluminescent materials and cathode materials are sequentially deposited on the
  • the present invention provides a method for manufacturing the above-mentioned display panel, the method includes: (a) providing a base substrate of an array substrate; (b) depositing on the base substrate A first metal layer, and patterning the first metal layer using a gate mask to form a first gate layer; (c) depositing an inter-dielectric layer on the first gate layer; (D) Deposit a second metal layer on the interlayer dielectric layer, and perform a patterning operation to form source and drain electrodes; (e) Coat a black matrix layer on the source and drain electrodes Material, and perform exposure and development operations to form the black matrix layer, and make the black matrix layer completely cover the first metal layer and the second metal layer; (f) set on the black matrix layer An organic flat layer; (g) deposit an anode on the organic flat layer, and pattern the anode; (h) deposit corresponding electroluminescent materials and cathode materials on the patterned anode in order to The electroluminescent layer and the cathode are formed
  • the advantage of the present invention is that the display panel of the present invention completely overlaps the metal layer (or metal wire) by using the black matrix layer material, and removes the polarizer layer on the original structure, thus not only can solve the problem on the array substrate
  • the reflection effect of the metal layer on the external light to ensure the normal display of the electroluminescent device after the light is emitted, and to increase the external light transmittance without the polarizer layer to ensure the normal operation of the camera under the screen.
  • the structure of removing the polarizer layer can reduce the thickness of the OLED device and facilitate bending.
  • FIG. 1 is a schematic diagram of a display panel in the first embodiment of the invention.
  • FIG. 2 is a flow chart of the steps of the manufacturing method of the display panel in the second embodiment of the present invention.
  • 3A to 3E are process flow diagrams of the manufacturing method of the display panel in the second embodiment of the present invention.
  • FIG. 4 is a flow chart of the steps of the manufacturing method of the display panel in the third embodiment of the present invention.
  • 5A to 5D are process flow diagrams of the manufacturing method of the display panel in the third embodiment of the present invention.
  • FIG. 6 is a schematic diagram of the structure of the display device in the fourth embodiment of the present invention.
  • the embodiment of the present invention provides a display panel, a manufacturing method thereof, and a display device. The detailed description will be given below.
  • FIG. 1 is a schematic diagram of a display panel in the first embodiment of the invention.
  • the present invention provides a display panel (reference number 610 shown in FIG. 6).
  • the display panel 610 includes an array substrate 100, and the display panel 610 further includes: at least one first metal layer 200, The at least one first metal layer 200 is disposed on the array substrate 100; an interlayer dielectric layer 114 is disposed on the at least one first metal layer 200; a second metal layer 300, the second metal layer 300 is disposed on the interlayer dielectric layer 114; at least one black matrix layer 400, the at least one black matrix layer 400 is at least disposed on the second metal layer 300, and completely covers The at least one first metal layer 200 and the second metal layer 300.
  • the display panel 610 includes an array substrate 100.
  • the array substrate 100 is an OLED array substrate.
  • the array substrate 100 includes: a base substrate 101, an inorganic water blocking layer 102 disposed on the base substrate 101, a buffer layer 103 disposed on the inorganic water blocking layer 102, and a buffer layer 103 disposed on the buffer layer.
  • the at least one first metal layer 200 is disposed on the array substrate 100.
  • the at least one first metal layer 200 is disposed on the gate insulating layer 112 of the array substrate 100.
  • the base substrate 101 is a flexible base substrate, which provides a substrate environment for flexible display.
  • the flexible substrate is made of PI material.
  • the inorganic water blocking layer 102 is used to prevent water vapor from intruding from the PI layer, that is, from the flexible substrate.
  • the material of the inorganic water blocking layer 102 is SiNx (silicon nitride), SiOxNy (silicon oxynitride), SiOx (silicon oxide), SiCxNy (silicon carbonitride), ZnO (zinc oxide), AlOx (aluminum oxide), etc. , But not limited to this.
  • the buffer layer 103 is used to prevent ion implantation of the lower layer into the active layer 111.
  • the active layer 111 can form a TFT device after ion doping.
  • the material of the interlayer dielectric layer 114 is not limited to SiNx, SiOxNy, SiOx, SiCxNy, etc.
  • the first metal layer 200 is a first gate layer (using the same reference number as the first metal layer), that is, a single gate structure.
  • the first metal layer 200 is a multilayer, so the first metal layer 200 is the first gate layer GE1 or the second gate layer GE2 (the same as the first metal layer can be used).
  • the label that is, the double-gate structure. That is, at least one gate layer is provided on the gate insulating layer 112 (not marked in the figure, please refer to the number 200 in FIG. 1), and the number of the gate layer may be one or two. The layer is not limited to this.
  • the material of the gate layer (including the first gate layer GE1 and the second gate layer GE2) is molybdenum.
  • An interlayer dielectric layer 114 is provided on the gate layer.
  • a second metal layer 300 is provided on the interlayer dielectric layer 114.
  • the second metal layer 300 is a source electrode and a drain electrode (not marked in the figure). Further, the source electrode and the drain electrode are designed with a laminated structure of titanium/aluminum/titanium.
  • the black matrix layer 400 is provided at least on the second metal layer 300.
  • the black matrix layer 400 is provided on both the first metal layer 200 and the second metal layer 300.
  • the black matrix layer 400 completely covers the first metal layer 200 (which is the first gate layer or the second gate layer) and the second metal layer 300, that is, the covering metal layer.
  • covering not only means that the black matrix layer 400 is directly arranged on the surface of the metal layer, but also that the black matrix layer 400 is arranged above the metal layer, that is, is arranged on the projection surface of the metal layer.
  • a black matrix layer 400 is provided on the projection surface of the first metal layer 200 in FIG. 1.
  • the thickness of the black matrix layer 400 is 100 nanometers to 5000 nanometers, and the thickness can be limited according to actual requirements.
  • the material of the black matrix layer 400 is black organic resin and black inorganic film.
  • the black inorganic film may be a metal oxide or metal sulfide, such as copper oxide, iron oxide, manganese dioxide, ferroferric oxide, molybdenum sulfide, copper sulfide, and the like.
  • the display panel 610 of the present invention completely overlaps the metal layer (or metal wire) by using the black matrix layer material, and removes the polarizer layer on the original structure (that is, the polarizer layer in the prior art), Therefore, it can not only solve the reflection effect of the metal layer on the array substrate on the external light to ensure the normal display of the electroluminescent device after the light is emitted, but also increase the external light transmittance without the polarizer layer to ensure the under-screen The camera is working normally.
  • the structure of removing the polarizer layer can reduce the thickness of the OLED display panel and facilitate bending.
  • the black matrix layer 400 also covers metal traces such as scan lines and data lines.
  • an organic flat layer 411 is provided on the black matrix layer 400.
  • An anode 511 is provided on the organic flat layer 411.
  • the material of the anode 511 is a transparent electrode material, such as indium tin oxide ITO.
  • An electroluminescent layer 512 (including a red color resistor R, a green color resistor G, and a blue color resistor B) is disposed on the anode 511, namely, the EL light-emitting layer 512.
  • a pixel defining layer 412 is coated on the EL light-emitting layer 512.
  • the material of the pixel definition layer 412 and the organic flat layer 411 may be the same or different, for example, not limited to acrylic, polyacrylate, polycarbonate, and polystyrene.
  • a cathode 513 is provided on the EL light-emitting layer 512.
  • the display panel 610 further includes an encapsulation layer 600.
  • the encapsulation layer 600 is disposed on the cathode 513.
  • FIG. 2 is a flow chart of the steps of the manufacturing method of the display panel in the second embodiment of the present invention.
  • 3A to 3E are process flow diagrams of the manufacturing method of the display panel in the second embodiment of the present invention.
  • the present invention provides a manufacturing method using the above-mentioned display panel, wherein the structure of the display panel is as described above, which will not be repeated here.
  • the preparation method includes:
  • Step S210 Provide a base substrate of an array substrate.
  • the base substrate 101 is a flexible base substrate, which provides a flexible substrate for an OLED device.
  • the base substrate 101 may be made of PI material.
  • step S220 deposit a first metal layer on the base substrate, and use a gate mask to pattern the first metal layer to form a first gate layer.
  • a first metal layer 200 on the base substrate 101 may further include: disposing an inorganic water blocking layer 102, a buffer layer 103, an active layer 111 and a gate on the flexible base substrate. ⁇ insulation layer 112.
  • the inorganic water blocking layer 102 is used to prevent water vapor from intruding from the PI layer.
  • the buffer layer 103 is used to prevent lower layer ions from being implanted into the active layer 111.
  • the material of the gate insulating layer 112 is not limited to SiNx, SiOxNy, SiOx, SiCxNy, ZnO, AlOx.
  • the first metal layer 200 can be continuously deposited by PVD, sputtering, evaporation, etc., and a gate mask is used to form the patterned first metal layer. Grid layer.
  • step S230 coating a black matrix layer material on the first gate layer, and performing exposure and development operations to form the black matrix layer, and the black matrix layer and the first gate
  • the polar layer has the same pattern.
  • the material of the black matrix layer 400 is a black organic resin and a black inorganic film.
  • the black inorganic film can be a metal oxide or a metal sulfide, such as copper oxide, iron oxide, manganese dioxide, ferroferric oxide, molybdenum sulfide, Copper sulfide, etc.
  • exposure and development operations are performed to form the black matrix layer 400 with the same pattern as the first gate layer.
  • the black matrix layer 400 covers the first gate layer.
  • a first metal layer 200 is deposited again on the black matrix layer 400, and a gate mask is used to form a patterned second gate layer.
  • two gate layers are formed, including the first gate layer and the second gate layer.
  • a black matrix layer material is coated on the second gate layer, and exposure and development operations are performed to form the black matrix layer 400, and the black matrix layer 400 has the same pattern as the second gate layer At this time, the black matrix layer 400 also covers the second gate layer.
  • Step S240 deposit an interlayer dielectric layer on the black matrix layer.
  • An interlayer dielectric layer 114 is deposited on the black matrix layer 400, and an opening is provided in the interlayer dielectric layer 114, and the opening is used to make the source and drain in the subsequent steps and the active Layer 111 is connected.
  • step S250 deposit a second metal layer on the interlayer dielectric layer, and perform a patterning operation to form a source electrode and a drain electrode.
  • the structure of the source and drain is a stacked structure design of titanium/aluminum/titanium, which is not limited here.
  • Step S260 coating a black matrix layer material on the source and drain electrodes, and performing exposure and development operations to form the black matrix layer 401, and the black matrix layer 401 and the source and drain electrodes 300 same patterns.
  • the black matrix layer material is a black organic resin and a black inorganic film, wherein the black inorganic film can be a metal oxide or a metal sulfide, such as copper oxide, iron oxide, manganese dioxide, ferroferric oxide, molybdenum sulfide, copper sulfide Wait.
  • the black matrix layer 400 has the same pattern as the source and drain electrodes, that is, the black matrix layer 400 covers the source and drain electrodes. .
  • Step S270 Disposing an organic flat layer on the black matrix layer.
  • An organic flat layer 411 is formed on the black matrix layer 400.
  • step S280 deposit an anode on the organic flat layer and pattern it.
  • An anode 511 is deposited on the entire surface of the organic flat layer 411 and patterned.
  • the anode 511 is a transparent conductive electrode material and has a high hole injection capability, and indium tin oxide ITO is generally used.
  • Step S290 sequentially depositing corresponding electroluminescent materials and cathode materials on the anode to form an electroluminescent layer and a cathode respectively.
  • the electroluminescent material and the cathode material are sequentially deposited to form the electroluminescent layer 512 and the cathode, respectively.
  • an encapsulation layer may be covered on the cathode, and the encapsulation layer may be an alternately stacked structure of an organic layer and an inorganic layer.
  • the entire structure of the display panel 610 is coated on each metal layer by using the black matrix layer material, and the pattern is completely consistent with the covered metal layer, it can effectively block the external light on the metal layer (as The reflection on the electrode) prevents the light emitted by the electroluminescent device from interfering with the external reflected light and affecting the normal display of the display panel 610.
  • the black matrix layer 400 is provided to replace the polarizer structure in the display area above the camera, thereby greatly improving the external light transmittance and ensuring the normal operation of the camera.
  • FIG. 4 is a flow chart of the steps of the manufacturing method of the display panel in the third embodiment of the present invention.
  • 5A to 5D are process flow diagrams of the manufacturing method of the display panel in the third embodiment of the present invention.
  • the present invention also provides a method for manufacturing the above-mentioned display panel.
  • the structure of the display panel is as described above, which will not be repeated here.
  • the preparation method includes:
  • Step S410 Provide a base substrate of an array substrate.
  • the base substrate 101 is a flexible base substrate, which provides a flexible substrate for an OLED device.
  • the base substrate may be made of PI material.
  • step S420 deposit a first metal layer on the base substrate, and use a gate mask to pattern the first metal layer to form a first gate layer.
  • a first metal layer 200 on the base substrate 101 may further include: disposing an inorganic water blocking layer 102, a buffer layer 103, an active layer 111 and a gate on the flexible base substrate. ⁇ insulation layer 112.
  • the inorganic water blocking layer 102 is used to prevent water vapor from intruding from the PI layer.
  • the buffer layer 103 is used to prevent lower layer ions from being implanted into the active layer 111.
  • the material of the gate insulating layer 112 is not limited to SiNx, SiOxNy, SiOx, SiCxNy, ZnO, AlOx.
  • the first metal layer 200 can be continuously deposited by PVD, sputtering, evaporation, etc., and a gate mask is used to form the patterned first metal layer. Grid layer.
  • Step S430 deposit and form an interlayer dielectric layer on the first gate layer.
  • An interlayer dielectric layer 114 is deposited on the first gate layer, and an opening is provided in the interlayer dielectric layer 114.
  • step S440 deposit a second metal layer on the interlayer dielectric layer, and perform a patterning operation to form a source electrode and a drain electrode.
  • the structure of the source and drain is a stacked structure design of titanium/aluminum/titanium, which is not limited here.
  • step S450 coating a black matrix layer material on the source and drain electrodes, and performing exposure and development operations to form the black matrix layer, and make the black matrix layer completely cover the at least A first metal layer and the second metal layer.
  • the black matrix layer material is a black organic resin and a black inorganic film, wherein the black inorganic film can be a metal oxide or a metal sulfide, such as copper oxide, iron oxide, manganese dioxide, ferroferric oxide, molybdenum sulfide, copper sulfide Wait.
  • the black matrix layer 400 has the same pattern as the source and drain electrodes and the first gate layer, that is, the black matrix layer 400 not only covers The source and drain also cover the first gate layer.
  • the third embodiment of the present invention only one layer of black matrix layer 400 is coated, that is, one layer of black matrix layer 400 is provided, which can simplify the manufacturing process of the display panel 610 and improve It is efficient, and is conducive to reducing the thickness of the display panel and improving the yield.
  • Step S460 Disposing an organic flat layer on the black matrix layer.
  • step S470 deposit an anode on the organic flat layer and pattern it.
  • An anode 511 is deposited on the entire surface of the organic flat layer 411 and patterned.
  • the anode 511 is a transparent conductive electrode material and has a high hole injection capability, and indium tin oxide ITO is generally used.
  • Step S480 sequentially depositing corresponding electroluminescent materials and cathode materials on the anode to form an electroluminescent layer and a cathode respectively.
  • the electroluminescent material and the cathode material are sequentially deposited to form the electroluminescent layer 512 and the cathode, respectively.
  • an encapsulation layer may be covered on the cathode, and the encapsulation layer may be an alternately stacked structure of organic layers and inorganic layers.
  • the entire structure of the display panel 610 is coated on each metal layer by using the black matrix layer 400 material, and the pattern is completely consistent with the covered metal layer, it can effectively block the external light from the metal layer ( As the reflection on the electrode), the light emitted by the electroluminescent device and the reflected light from the outside may interfere with the external reflected light and affect the normal display of the display panel 610.
  • the black matrix layer 400 is provided to replace the polarizer structure in the display area above the camera, thereby greatly improving the external light transmittance and ensuring the normal operation of the camera.
  • the display panel of the present invention uses the black matrix layer material to completely overlap the metal layer (or metal wire) to replace the original polarizer structure design, and uses this design in the displayable area above the camera, thereby It solves the problem that the light transmittance caused by the polarizer is greatly reduced and the camera cannot work normally.
  • FIG. 6 is a schematic diagram of the structure of the display device in the fourth embodiment of the present invention.
  • a display device 600 is provided, and the display device includes the above-mentioned display panel 610.
  • the specific structure of the display panel 610 is as described above, and will not be repeated here.
  • the display device 600 may be any product or component with a display function, such as a liquid crystal television TV, a liquid crystal display device (such as a flexible display, a high-efficiency display), a mobile phone, a digital photo frame, a tablet computer, and the like.
  • an under-screen camera 620 is provided on the active area of the display panel 610, the position of which is shown in FIG. 6.
  • the subject of this application can be manufactured and used in industry and has industrial applicability.

Abstract

Disclosed are a display panel (610) and a preparation method thereof. In the display panel (610), a black matrix layer material (400, 401) is used to cover a metal wire in a completely overlapping manner, and a polarizer layer on the original structure is removed, thereby not only being capable of solving a reflection effect of a metal layer on an array substrate (100) on external light so as to ensure normal display after an electroluminescent device emits light, but also being capable of increasing the transmittance of the external light in the absence of the polarizer layer so as to ensure the normal operation of an under-screen camera (620).

Description

显示面板及其制备方法Display panel and preparation method thereof 技术领域Technical field
本发明涉及显示面板技术领域,尤其涉及一种显示面板及其制备方法。The invention relates to the technical field of display panels, in particular to a display panel and a preparation method thereof.
背景技术Background technique
有机发光二极管器件(Organic Light Emitting Diode,简称OLED)具有自发光、驱动电压低、发光效率高、响应时间短、清晰度与对比度高、近180度视角、使用温度范围宽、可实现柔性显示与大面积全色显示等诸多优点,被业界公认为是下一代的平面显示器新兴应用技术。Organic Light Emitting Diode (OLED) has self-luminescence, low drive voltage, high luminous efficiency, short response time, high definition and contrast, a viewing angle of nearly 180 degrees, a wide operating temperature range, and it can realize flexible display and Large-area full-color display and many other advantages are recognized by the industry as the next-generation flat panel display emerging application technology.
目前普遍使用的是顶发射结构OLED器件,电致发光(Electroluminescence,EL)器件出光经过偏光片层(Polarizer,即POL),光强会折损50%左右,尤其对于屏下摄像头设计(CUP)的OLED产品而言,对应于摄像头上方的发光区域,偏光片层(POL)的光折损直接影响拍照效果,因此需要在此区域去除偏光片层结构。At present, OLED devices with top-emission structure are commonly used. Electroluminescence (EL) devices emit light through the polarizer layer (Polarizer, or POL), and the light intensity will be reduced by about 50%, especially for under-screen camera designs (CUP) For OLED products, corresponding to the light-emitting area above the camera, the photorefraction of the polarizer layer (POL) directly affects the photographing effect, so it is necessary to remove the polarizer layer structure in this area.
技术问题technical problem
但是,由于阵列基板的各种金属层的存在,在没有偏光片层的情况下,外界光线会在金属层发生镜面反射,反射光线与电致发光器件的出射光线形成干涉,从而严重影响屏幕的成像效果。However, due to the existence of various metal layers on the array substrate, without the polarizer layer, external light will be specularly reflected on the metal layer, and the reflected light will interfere with the emitted light of the electroluminescent device, which will seriously affect the screen’s performance. Imaging effect.
有鉴于此,如何解决偏光片层光透过率偏低影响屏下摄像头正常成像的问题,并且确保摄像头上方的显示区域正常显示不受外界光线干涉影响,成为了相关研究人员的重点研究课题。In view of this, how to solve the problem that the low light transmittance of the polarizer layer affects the normal imaging of the camera under the screen, and to ensure that the display area above the camera is not affected by external light interference has become a key research topic for related researchers.
技术解决方案Technical solutions
本发明的目的在于,提供一种显示面板及其制备方法,在显示面板中,利用黑矩阵层材料对金属导线进行完全重叠式覆盖,且去除原结构上的偏光片层,从而不仅能够解决阵列基板上的金属层对外界光线的反射效应,以保证电致发光器件出光后正常显示,而且在使得没有偏光片层的情况下,增大外界光透射率,以保证屏下摄像头正常工作。The purpose of the present invention is to provide a display panel and a preparation method thereof. In the display panel, the black matrix layer material is used to completely overlap the metal wires, and the polarizer layer on the original structure is removed, thereby not only solving the problem of array The reflection effect of the metal layer on the substrate on the external light to ensure the normal display of the electroluminescent device after the light is emitted, and to increase the external light transmittance without the polarizer layer to ensure the normal operation of the under-screen camera.
根据本发明的一方面,本发明提供了一种显示面板,所述显示面板包括一阵列基板,所述显示面板还包括:至少一第一金属层,所述至少一第一金属层设置在所述阵列基板上;一层间介质层,所述层间介质层设置在所述至少一第一金属层上;一第二金属层,所述第二金属层设置在所述层间介质层上;至少一黑色矩阵层,所述至少一黑色矩阵层至少设置在所述第二金属层上,并且完全覆盖所述至少一第一金属层和所述第二金属层。According to one aspect of the present invention, the present invention provides a display panel, the display panel includes an array substrate, the display panel further includes: at least one first metal layer, the at least one first metal layer is disposed on the The array substrate; an interlayer dielectric layer, the interlayer dielectric layer is disposed on the at least one first metal layer; a second metal layer, the second metal layer is disposed on the interlayer dielectric layer ; At least one black matrix layer, the at least one black matrix layer is at least disposed on the second metal layer, and completely covers the at least one first metal layer and the second metal layer.
根据本发明的一实施例,当所述至少一黑色矩阵层为多层时,所述黑色矩阵层分别设置在所述第二金属层和所述至少第一金属层上,并且完全覆盖所述至少第一金属层和所述第二金属层。According to an embodiment of the present invention, when the at least one black matrix layer is a multilayer, the black matrix layer is respectively disposed on the second metal layer and the at least first metal layer, and completely covers the At least the first metal layer and the second metal layer.
根据本发明的一实施例,所述至少一黑色矩阵层的厚度为100纳米至5000纳米。According to an embodiment of the present invention, the thickness of the at least one black matrix layer is 100 nm to 5000 nm.
根据本发明的一实施例,所述至少一黑色矩阵层的材料为黑色有机树脂和黑色无机薄膜。According to an embodiment of the present invention, the material of the at least one black matrix layer is black organic resin and black inorganic film.
根据本发明的一实施例,所述黑色无机薄膜为金属氧化物或金属硫化物。According to an embodiment of the present invention, the black inorganic film is metal oxide or metal sulfide.
根据本发明的一实施例,所述至少一第一金属层的材料为钼。According to an embodiment of the present invention, the material of the at least one first metal layer is molybdenum.
根据本发明的一实施例,所述第二金属层为钛/铝/钛的叠层结构。According to an embodiment of the present invention, the second metal layer has a laminated structure of titanium/aluminum/titanium.
根据本发明的一实施例,所述阵列基板包括:一衬底基板、一设置在所述衬底基板上的无机阻水层、一设置在所述无机阻水层上的缓冲层、一设置在所述缓冲层上的有源层以及一设置在所述有源层上的栅极绝缘层;其中所述至少一第一金属层设置在所述栅极绝缘层上。According to an embodiment of the present invention, the array substrate includes: a base substrate, an inorganic water blocking layer disposed on the base substrate, a buffer layer disposed on the inorganic water blocking layer, and a An active layer on the buffer layer and a gate insulating layer arranged on the active layer; wherein the at least one first metal layer is arranged on the gate insulating layer.
根据本发明的另一方面,本发明提供了一种采用上述显示面板的制备方法,所述制备方法包括:(1)提供一阵列基板的衬底基板;(2)在所述衬底基板上沉积一第一金属层,并且采用栅极掩模板将所述第一金属层图案化,以形成一第一栅极层;(3)在所述第一栅极层上涂布一黑色矩阵层材料,并执行曝光显影操作,以形成所述黑色矩阵层,并且与所述第一栅极层相同图案;(4)在所述黑色矩阵层上沉积一层间介质层;(5)在所述层间介质层上沉积第二金属层,并且进行图案化操作,以形成源极和漏极;(6)在所述源极和漏极上涂布一黑色矩阵层材料,并执行曝光显影操作,以形成所述黑色矩阵层,并且与所述源极和漏极相同图案;(7)在所述黑色矩阵层上设置一有机平坦层;(8)在所述有机平坦层上沉积一阳极,并且图案化;(9)在所述阳极上依次沉积相应的电致发光材料和阴极材料,以分别形成电致发光层和阴极。According to another aspect of the present invention, the present invention provides a manufacturing method using the above-mentioned display panel. The manufacturing method includes: (1) providing a base substrate of an array substrate; (2) on the base substrate Deposit a first metal layer, and use a gate mask to pattern the first metal layer to form a first gate layer; (3) coating a black matrix layer on the first gate layer Material and perform exposure and development operations to form the black matrix layer with the same pattern as the first gate layer; (4) deposit an interlayer dielectric layer on the black matrix layer; (5) A second metal layer is deposited on the interlayer dielectric layer, and patterning is performed to form source and drain electrodes; (6) a black matrix layer material is coated on the source and drain electrodes, and exposure and development are performed Operation to form the black matrix layer with the same pattern as the source and drain electrodes; (7) provide an organic flat layer on the black matrix layer; (8) deposit an organic flat layer on the organic flat layer The anode is patterned; (9) corresponding electroluminescent materials and cathode materials are sequentially deposited on the anode to form an electroluminescent layer and a cathode respectively.
根据本发明的又一方面,本发明提供了一种上述显示面板的制备方法,所述制备方法包括:(a)提供一阵列基板的衬底基板;(b)在所述衬底基板上沉积一第一金属层,并且采用栅极掩模板将所述第一金属层图案化,以形成一第一栅极层;(c)在所述第一栅极层上沉积一层间介质层;(d)在所述层间介质层上沉积一第二金属层,并且进行图案化操作,以形成源极和漏极;(e)在所述源极和漏极上涂布一黑色矩阵层材料,并执行曝光显影操作,以形成所述黑色矩阵层,并且使得所述黑色矩阵层完全覆盖所述第一金属层和所述第二金属层;(f)在所述黑色矩阵层上设置一有机平坦层;(g)在所述有机平坦层上沉积一阳极,并且图案化所述阳极;(h)在所述图案化的阳极上依次沉积相应的电致发光材料和阴极材料,以分别形成电致发光层和阴极。According to another aspect of the present invention, the present invention provides a method for manufacturing the above-mentioned display panel, the method includes: (a) providing a base substrate of an array substrate; (b) depositing on the base substrate A first metal layer, and patterning the first metal layer using a gate mask to form a first gate layer; (c) depositing an inter-dielectric layer on the first gate layer; (D) Deposit a second metal layer on the interlayer dielectric layer, and perform a patterning operation to form source and drain electrodes; (e) Coat a black matrix layer on the source and drain electrodes Material, and perform exposure and development operations to form the black matrix layer, and make the black matrix layer completely cover the first metal layer and the second metal layer; (f) set on the black matrix layer An organic flat layer; (g) deposit an anode on the organic flat layer, and pattern the anode; (h) deposit corresponding electroluminescent materials and cathode materials on the patterned anode in order to The electroluminescent layer and the cathode are formed separately.
有益效果Beneficial effect
本发明的优点在于,本发明所述显示面板通过利用黑矩阵层材料对金属层(或金属导线)进行完全重叠式覆盖,并且去除原结构上的偏光片层,从而不仅能够解决阵列基板上的金属层对外界光线的反射效应,以保证电致发光器件出光后正常显示,而且在使得没有偏光片层的情况下,增大外界光透射率,以保证屏下摄像头正常工作。另外,去除偏光片层的结构可以减薄OLED器件的厚度,便于弯折。The advantage of the present invention is that the display panel of the present invention completely overlaps the metal layer (or metal wire) by using the black matrix layer material, and removes the polarizer layer on the original structure, thus not only can solve the problem on the array substrate The reflection effect of the metal layer on the external light to ensure the normal display of the electroluminescent device after the light is emitted, and to increase the external light transmittance without the polarizer layer to ensure the normal operation of the camera under the screen. In addition, the structure of removing the polarizer layer can reduce the thickness of the OLED device and facilitate bending.
附图说明Description of the drawings
为了更清楚地说明本发明实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly describe the technical solutions in the embodiments of the present invention, the following will briefly introduce the accompanying drawings used in the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.
图1是本发明第一实施例中的显示面板的示意图。FIG. 1 is a schematic diagram of a display panel in the first embodiment of the invention.
图2是本发明第二实施例中的显示面板的制备方法的步骤流程图。FIG. 2 is a flow chart of the steps of the manufacturing method of the display panel in the second embodiment of the present invention.
图3A至图3E是本发明第二实施例中的显示面板的制备方法的工艺流程图。3A to 3E are process flow diagrams of the manufacturing method of the display panel in the second embodiment of the present invention.
图4是本发明第三实施例中的显示面板的制备方法的步骤流程图。FIG. 4 is a flow chart of the steps of the manufacturing method of the display panel in the third embodiment of the present invention.
图5A至图5D是本发明第三实施例中的显示面板的制备方法的工艺流程图。5A to 5D are process flow diagrams of the manufacturing method of the display panel in the third embodiment of the present invention.
图6是本发明第四实施例中的显示装置的结构示意图。FIG. 6 is a schematic diagram of the structure of the display device in the fourth embodiment of the present invention.
本发明的实施方式Embodiments of the invention
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述。显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work shall fall within the protection scope of the present invention.
本发明的说明书和权利要求书以及上述附图中的术语“第一”、“第二”、“第三”等(如果存在)是用于区别类似的对象,而不必用于描述特定的顺序或先后次序。应当理解,这样描述的对象在适当情况下可以互换。此外,术语“包括”和“具有”以及他们的任何变形,意图在于覆盖不排他的包含。The terms "first", "second", "third", etc. (if any) in the description and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and not necessarily used to describe a specific order Or precedence. It should be understood that the objects described in this way can be interchanged under appropriate circumstances. In addition, the terms "include" and "have" and any variations of them are intended to cover non-exclusive inclusion.
在本专利文档中,下文论述的附图以及用来描述本发明公开的原理的各实施例仅用于说明,而不应解释为限制本发明公开的范围。所属领域的技术人员将理解,本发明的原理可在任何适当布置的系统中实施。将详细说明示例性实施方式,在附图中示出了这些实施方式的实例。此外,将参考附图详细描述根据示例性实施例的终端。附图中的相同附图标号指代相同的元件。In this patent document, the drawings discussed below and various embodiments used to describe the principle of the disclosure of the present invention are only for illustration, and should not be construed as limiting the scope of the disclosure of the present invention. Those skilled in the art will understand that the principles of the present invention may be implemented in any suitably arranged system. Exemplary embodiments will be described in detail, and examples of these embodiments are shown in the drawings. In addition, a terminal according to an exemplary embodiment will be described in detail with reference to the accompanying drawings. The same reference numerals in the drawings refer to the same elements.
本发明说明书中使用的术语仅用来描述特定实施方式,而并不意图显示本发明的概念。除非上下文中有明确不同的意义,否则,以单数形式使用的表达涵盖复数形式的表达。在本发明说明书中,应理解,诸如“包括”、“具有”以及“含有”等术语意图说明存在本发明说明书中揭示的特征、数字、步骤、动作或其组合的可能性,而并不意图排除可存在或可添加一个或多个其他特征、数字、步骤、动作或其组合的可能性。附图中的相同参考标号指代相同部分。The terms used in the specification of the present invention are only used to describe specific embodiments, and are not intended to show the concept of the present invention. Unless there is a clearly different meaning in the context, the expression used in the singular form encompasses the expression in the plural form. In the specification of the present invention, it should be understood that terms such as "including", "having" and "containing" are intended to indicate the possibility of the features, numbers, steps, actions or combinations thereof disclosed in the specification of the present invention, but not The possibility that one or more other features, numbers, steps, actions or combinations thereof may exist or may be added is excluded. The same reference numerals in the drawings refer to the same parts.
本发明实施例提供一种显示面板及其制备方法和显示装置。以下将分别进行详细说明。The embodiment of the present invention provides a display panel, a manufacturing method thereof, and a display device. The detailed description will be given below.
图1是本发明第一实施例中的显示面板的示意图。FIG. 1 is a schematic diagram of a display panel in the first embodiment of the invention.
参阅图1,本发明提供了一种显示面板(如图6所示的标号610),所述显示面板610包括一阵列基板100,所述显示面板610还包括:至少一第一金属层200,所述至少一第一金属层200设置在所述阵列基板100上;一层间介质层114,所述层间介质层114设置在所述至少一第一金属层200上;一第二金属层300,所述第二金属层300设置在所述层间介质层114上;至少一黑色矩阵层400,所述至少一黑色矩阵层400至少设置在所述第二金属层300上,并且完全覆盖所述至少一第一金属层200和所述第二金属层300。Referring to FIG. 1, the present invention provides a display panel (reference number 610 shown in FIG. 6). The display panel 610 includes an array substrate 100, and the display panel 610 further includes: at least one first metal layer 200, The at least one first metal layer 200 is disposed on the array substrate 100; an interlayer dielectric layer 114 is disposed on the at least one first metal layer 200; a second metal layer 300, the second metal layer 300 is disposed on the interlayer dielectric layer 114; at least one black matrix layer 400, the at least one black matrix layer 400 is at least disposed on the second metal layer 300, and completely covers The at least one first metal layer 200 and the second metal layer 300.
具体而言,所述显示面板610包括一阵列基板100。例如在第一实施例中,所述阵列基板100为OLED阵列基板。所述阵列基板100包括:一衬底基板101、一设置在衬底基板101上的无机阻水层102、一设置在所述无机阻水层102上的缓冲层103、一设置在所述缓冲层103上的有源层111以及一设置在所述有源层111上的栅极绝缘层112。Specifically, the display panel 610 includes an array substrate 100. For example, in the first embodiment, the array substrate 100 is an OLED array substrate. The array substrate 100 includes: a base substrate 101, an inorganic water blocking layer 102 disposed on the base substrate 101, a buffer layer 103 disposed on the inorganic water blocking layer 102, and a buffer layer 103 disposed on the buffer layer. The active layer 111 on the layer 103 and a gate insulating layer 112 disposed on the active layer 111.
所述至少一第一金属层200设置在阵列基板100上,在第一实施例中,所述至少一第一金属层200设置在所述阵列基板100的栅极绝缘层112上。其中,所述衬底基板101为柔性衬底基板,为柔性显示提供衬底环境。通常,所述柔性衬底基板采用PI材料制成。所述无机阻水层102用于防止水汽从PI层入侵,即从柔性衬底基板入侵。所述无机阻水层102的材料为SiNx(氮化硅), SiOxNy(氮氧化硅), SiOx(氧化硅), SiCxNy(碳氮化硅), ZnO(氧化锌), AlOx(氧化铝)等,但不限于此。所述缓冲层103用于防止下层离子注入至有源层111。所述有源层111在离子掺杂后可形成TFT器件。另外,所述层间介质层114的材料不限于SiNx, SiOxNy, SiOx, SiCxNy等。The at least one first metal layer 200 is disposed on the array substrate 100. In the first embodiment, the at least one first metal layer 200 is disposed on the gate insulating layer 112 of the array substrate 100. Wherein, the base substrate 101 is a flexible base substrate, which provides a substrate environment for flexible display. Generally, the flexible substrate is made of PI material. The inorganic water blocking layer 102 is used to prevent water vapor from intruding from the PI layer, that is, from the flexible substrate. The material of the inorganic water blocking layer 102 is SiNx (silicon nitride), SiOxNy (silicon oxynitride), SiOx (silicon oxide), SiCxNy (silicon carbonitride), ZnO (zinc oxide), AlOx (aluminum oxide), etc. , But not limited to this. The buffer layer 103 is used to prevent ion implantation of the lower layer into the active layer 111. The active layer 111 can form a TFT device after ion doping. In addition, the material of the interlayer dielectric layer 114 is not limited to SiNx, SiOxNy, SiOx, SiCxNy, etc.
在所述栅极绝缘层112上设有至少一第一金属层200。在第一实施例中,所述第一金属层200为第一栅极层(采用与第一金属层相同的标号),即单栅结构。在其他部分实施例中,所述第一金属层200为多层,于是,所述第一金属层200为第一栅极层GE1或第二栅极层GE2(可采用与第一金属层相同的标号),即双栅结构。亦即,在所述栅极绝缘层112上设有至少一层的栅极层(图中未标注,可参考图1中的标号200),所述栅极层的数量可以为一层或两层,不限于此。所述栅极层(包括第一栅极层GE1和第二栅极层GE2)的材料为钼。At least one first metal layer 200 is provided on the gate insulating layer 112. In the first embodiment, the first metal layer 200 is a first gate layer (using the same reference number as the first metal layer), that is, a single gate structure. In other embodiments, the first metal layer 200 is a multilayer, so the first metal layer 200 is the first gate layer GE1 or the second gate layer GE2 (the same as the first metal layer can be used). The label), that is, the double-gate structure. That is, at least one gate layer is provided on the gate insulating layer 112 (not marked in the figure, please refer to the number 200 in FIG. 1), and the number of the gate layer may be one or two. The layer is not limited to this. The material of the gate layer (including the first gate layer GE1 and the second gate layer GE2) is molybdenum.
在所述栅极层上设置一层间介质层114。在所述层间介质层114上设置第二金属层300。在第一实施例中,所述第二金属层300为源极和漏极(图中未标注)。进一步,所述源极和漏极采用钛/铝/钛的叠层结构设计。An interlayer dielectric layer 114 is provided on the gate layer. A second metal layer 300 is provided on the interlayer dielectric layer 114. In the first embodiment, the second metal layer 300 is a source electrode and a drain electrode (not marked in the figure). Further, the source electrode and the drain electrode are designed with a laminated structure of titanium/aluminum/titanium.
另外,至少在第二金属层300上设置所述黑色矩阵层400。在第一实施例中,在所述第一金属层200和所述第二金属层300上均设置所述黑色矩阵层400。所述黑色矩阵层400完全覆盖第一金属层200(为第一栅极层或和第二栅极层)和第二金属层300,即覆盖金属层。需说明的是,此处覆盖不仅指黑色矩阵层400直接设置在所述金属层的表面上,而且也指黑色矩阵层400在所述金属层的上方,即设置在所述金属层的投影面上,例如图1中的第一金属层200的投影面上设置有黑色矩阵层400。优选地,所述黑色矩阵层400的厚度为100纳米至5000纳米,该厚度可以根据实际需求进行限定。所述黑色矩阵层400的材料为黑色有机树脂和黑色无机薄膜。其中,所述黑色无机薄膜可以为金属氧化物或金属硫化物,例如氧化铜、氧化铁、二氧化锰、四氧化三铁、硫化钼、硫化铜等。因此,本发明所述显示面板610通过利用黑矩阵层材料对金属层(或金属导线)进行完全重叠式覆盖,并且去除原结构上的偏光片层(即现有技术中的偏光片层),从而不仅能够解决阵列基板上的金属层对外界光线的反射效应,以保证电致发光器件出光后正常显示,而且在使得没有偏光片层的情况下,增大外界光透射率,以保证屏下摄像头正常工作。另外,去除偏光片层的结构可以减薄OLED显示面板的厚度,便于弯折。In addition, the black matrix layer 400 is provided at least on the second metal layer 300. In the first embodiment, the black matrix layer 400 is provided on both the first metal layer 200 and the second metal layer 300. The black matrix layer 400 completely covers the first metal layer 200 (which is the first gate layer or the second gate layer) and the second metal layer 300, that is, the covering metal layer. It should be noted that covering here not only means that the black matrix layer 400 is directly arranged on the surface of the metal layer, but also that the black matrix layer 400 is arranged above the metal layer, that is, is arranged on the projection surface of the metal layer. Above, for example, a black matrix layer 400 is provided on the projection surface of the first metal layer 200 in FIG. 1. Preferably, the thickness of the black matrix layer 400 is 100 nanometers to 5000 nanometers, and the thickness can be limited according to actual requirements. The material of the black matrix layer 400 is black organic resin and black inorganic film. Wherein, the black inorganic film may be a metal oxide or metal sulfide, such as copper oxide, iron oxide, manganese dioxide, ferroferric oxide, molybdenum sulfide, copper sulfide, and the like. Therefore, the display panel 610 of the present invention completely overlaps the metal layer (or metal wire) by using the black matrix layer material, and removes the polarizer layer on the original structure (that is, the polarizer layer in the prior art), Therefore, it can not only solve the reflection effect of the metal layer on the array substrate on the external light to ensure the normal display of the electroluminescent device after the light is emitted, but also increase the external light transmittance without the polarizer layer to ensure the under-screen The camera is working normally. In addition, the structure of removing the polarizer layer can reduce the thickness of the OLED display panel and facilitate bending.
另外,所述黑色矩阵层400也覆盖扫描线和数据线等金属走线。In addition, the black matrix layer 400 also covers metal traces such as scan lines and data lines.
另外,在所述黑色矩阵层400上设置有机平坦层411。在所述有机平坦层411上设置一阳极511。所述阳极511的材料为透明电极材料,例如氧化铟锡ITO。在所述阳极511上设置一电致发光层512(包括红色色阻R、绿色色阻G和蓝色色阻B),即EL发光层512。在EL发光层512上涂布一像素定义层412。所述像素定义层412和所述有机平坦层411的材料可以为相同或不同,例如不限于丙烯酸Acrylate、聚丙烯酸酯类、聚碳酸脂类、聚苯乙烯。在所述EL发光层512上设置一阴极513。In addition, an organic flat layer 411 is provided on the black matrix layer 400. An anode 511 is provided on the organic flat layer 411. The material of the anode 511 is a transparent electrode material, such as indium tin oxide ITO. An electroluminescent layer 512 (including a red color resistor R, a green color resistor G, and a blue color resistor B) is disposed on the anode 511, namely, the EL light-emitting layer 512. A pixel defining layer 412 is coated on the EL light-emitting layer 512. The material of the pixel definition layer 412 and the organic flat layer 411 may be the same or different, for example, not limited to acrylic, polyacrylate, polycarbonate, and polystyrene. A cathode 513 is provided on the EL light-emitting layer 512.
另外,所述显示面板610还包括一封装层600。所述封装层600设置在所述阴极513上。In addition, the display panel 610 further includes an encapsulation layer 600. The encapsulation layer 600 is disposed on the cathode 513.
由于上述有机平坦层411、阳极511、电致发光层512、像素定义层412、阴极和封装层为本领域技术人员所熟知的,其结构及其在显示面板610中的位置关系,在此不再做多详细描述。Since the above-mentioned organic flat layer 411, anode 511, electroluminescent layer 512, pixel defining layer 412, cathode and encapsulation layer are well known to those skilled in the art, the structure and positional relationship in the display panel 610 are not here. Do more detailed descriptions.
图2是本发明第二实施例中的显示面板的制备方法的步骤流程图。图3A至图3E是本发明第二实施例中的显示面板的制备方法的工艺流程图。FIG. 2 is a flow chart of the steps of the manufacturing method of the display panel in the second embodiment of the present invention. 3A to 3E are process flow diagrams of the manufacturing method of the display panel in the second embodiment of the present invention.
参阅图2和图3A至图3E,本发明提供了一种采用上述显示面板的制备方法,其中所述显示面板如上文所述的结构,在此不再赘述。所述制备方法包括:Referring to FIG. 2 and FIG. 3A to FIG. 3E, the present invention provides a manufacturing method using the above-mentioned display panel, wherein the structure of the display panel is as described above, which will not be repeated here. The preparation method includes:
步骤S210:提供一阵列基板的衬底基板。Step S210: Provide a base substrate of an array substrate.
所述衬底基板101为柔性衬底基板,为OLED器件提供柔性衬底。所述衬底基板101可以采用PI材料制成。The base substrate 101 is a flexible base substrate, which provides a flexible substrate for an OLED device. The base substrate 101 may be made of PI material.
参阅图3A,步骤S220:在所述衬底基板上沉积一第一金属层,并且采用栅极掩模板将所述第一金属层图案化,以形成一第一栅极层。Referring to FIG. 3A, step S220: deposit a first metal layer on the base substrate, and use a gate mask to pattern the first metal layer to form a first gate layer.
在所述衬底基板101上沉积一第一金属层200的步骤之前,可以进一步包括:在柔性衬底基板上设置一无机阻水层102、一缓冲层103、一有源层111以及一栅极绝缘层112。Before the step of depositing a first metal layer 200 on the base substrate 101, it may further include: disposing an inorganic water blocking layer 102, a buffer layer 103, an active layer 111 and a gate on the flexible base substrate.极 insulation layer 112.
其中,所述无机阻水层102用于防止水汽从PI层入侵。所述缓冲层103用于防止下层离子注入所述有源层111。所述栅极绝缘层112的材料不限于SiNx, SiOxNy, SiOx, SiCxNy, ZnO, AlOx。Wherein, the inorganic water blocking layer 102 is used to prevent water vapor from intruding from the PI layer. The buffer layer 103 is used to prevent lower layer ions from being implanted into the active layer 111. The material of the gate insulating layer 112 is not limited to SiNx, SiOxNy, SiOx, SiCxNy, ZnO, AlOx.
在所述衬底基板101上沉积一第一金属层200的步骤中,可以采用PVD、溅射、蒸镀等方式连续沉积第一金属层200,并且采用栅极掩模板形成图案化的第一栅极层。In the step of depositing a first metal layer 200 on the base substrate 101, the first metal layer 200 can be continuously deposited by PVD, sputtering, evaporation, etc., and a gate mask is used to form the patterned first metal layer. Grid layer.
参阅图3B,步骤S230:在所述第一栅极层上涂布一黑色矩阵层材料,并执行曝光显影操作,以形成所述黑色矩阵层,并且所述黑色矩阵层与所述第一栅极层相同图案。Referring to FIG. 3B, step S230: coating a black matrix layer material on the first gate layer, and performing exposure and development operations to form the black matrix layer, and the black matrix layer and the first gate The polar layer has the same pattern.
所述黑色矩阵层400的材料为黑色有机树脂和黑色无机薄膜,其中黑色无机薄膜可以为金属氧化物或金属硫化物,例如氧化铜、氧化铁、二氧化锰、四氧化三铁、硫化钼、硫化铜等。接着进行曝光显影操作,以形成与所述第一栅极层相同图案的黑色矩阵层400,此时,黑色矩阵层400覆盖第一栅极层。可选的,接着,在所述黑色矩阵层400上再次沉积一第一金属层200,并且采用栅极掩模板形成图案化的第二栅极层。于是,形成了两层栅极层,即包括第一栅极层和第二栅极层。然后,在所述第二栅极层上涂布黑色矩阵层材料,并执行曝光显影操作,以形成所述黑色矩阵层400,并且所述黑色矩阵层400与所述第二栅极层相同图案,此时所述黑色矩阵层400也覆盖第二栅极层。The material of the black matrix layer 400 is a black organic resin and a black inorganic film. The black inorganic film can be a metal oxide or a metal sulfide, such as copper oxide, iron oxide, manganese dioxide, ferroferric oxide, molybdenum sulfide, Copper sulfide, etc. Then, exposure and development operations are performed to form the black matrix layer 400 with the same pattern as the first gate layer. At this time, the black matrix layer 400 covers the first gate layer. Optionally, then, a first metal layer 200 is deposited again on the black matrix layer 400, and a gate mask is used to form a patterned second gate layer. Thus, two gate layers are formed, including the first gate layer and the second gate layer. Then, a black matrix layer material is coated on the second gate layer, and exposure and development operations are performed to form the black matrix layer 400, and the black matrix layer 400 has the same pattern as the second gate layer At this time, the black matrix layer 400 also covers the second gate layer.
步骤S240:在所述黑色矩阵层上沉积一层间介质层。Step S240: deposit an interlayer dielectric layer on the black matrix layer.
在所述黑色矩阵层400上沉积一层间介质层114,并且在所述层间介质层114中设置一开孔,所述开孔用于使得后继步骤中的源极和漏极与有源层111相连通。An interlayer dielectric layer 114 is deposited on the black matrix layer 400, and an opening is provided in the interlayer dielectric layer 114, and the opening is used to make the source and drain in the subsequent steps and the active Layer 111 is connected.
参阅图3C,步骤S250:在所述层间介质层上沉积第二金属层,并且进行图案化操作,以形成源极和漏极。Referring to FIG. 3C, step S250: deposit a second metal layer on the interlayer dielectric layer, and perform a patterning operation to form a source electrode and a drain electrode.
参阅图3D,所述源极和漏极的结构为钛/铝/钛的叠层结构设计,此处不做限制。Referring to FIG. 3D, the structure of the source and drain is a stacked structure design of titanium/aluminum/titanium, which is not limited here.
步骤S260:在所述源极和漏极上涂布一黑色矩阵层材料,并执行曝光显影操作,以形成所述黑色矩阵层401,并且所述黑色矩阵层401与所述源极和漏极300相同图案。Step S260: coating a black matrix layer material on the source and drain electrodes, and performing exposure and development operations to form the black matrix layer 401, and the black matrix layer 401 and the source and drain electrodes 300 same patterns.
所述黑色矩阵层材料为黑色有机树脂和黑色无机薄膜,其中黑色无机薄膜可以为金属氧化物或金属硫化物,例如氧化铜、氧化铁、二氧化锰、四氧化三铁、硫化钼、硫化铜等。接着,执行曝光显影操作,以形成所述黑色矩阵层400,并且所述黑色矩阵层400与所述源极和漏极相同的图案,即所述黑色矩阵层400覆盖所述源极和漏极。The black matrix layer material is a black organic resin and a black inorganic film, wherein the black inorganic film can be a metal oxide or a metal sulfide, such as copper oxide, iron oxide, manganese dioxide, ferroferric oxide, molybdenum sulfide, copper sulfide Wait. Next, an exposure and development operation is performed to form the black matrix layer 400, and the black matrix layer 400 has the same pattern as the source and drain electrodes, that is, the black matrix layer 400 covers the source and drain electrodes. .
步骤S270:在所述黑色矩阵层上设置一有机平坦层。Step S270: Disposing an organic flat layer on the black matrix layer.
在所述黑色矩阵层400上形成有机平坦层411。An organic flat layer 411 is formed on the black matrix layer 400.
参阅图3E,步骤S280:在所述有机平坦层上沉积一阳极,并且图案化。Referring to FIG. 3E, step S280: deposit an anode on the organic flat layer and pattern it.
在所述有机平坦层411上整面沉积一阳极511,并且图案化。其中所述阳极511为透明可导电电极材料,且具有较高的空穴注入能力,一般采用氧化铟锡ITO。An anode 511 is deposited on the entire surface of the organic flat layer 411 and patterned. Wherein, the anode 511 is a transparent conductive electrode material and has a high hole injection capability, and indium tin oxide ITO is generally used.
步骤S290:在所述阳极上依次沉积相应的电致发光材料和阴极材料,以分别形成电致发光层和阴极。Step S290: sequentially depositing corresponding electroluminescent materials and cathode materials on the anode to form an electroluminescent layer and a cathode respectively.
然后依次沉积电致发光材料和阴极材料以分别形成电致发光层512和阴极。Then the electroluminescent material and the cathode material are sequentially deposited to form the electroluminescent layer 512 and the cathode, respectively.
另外,在执行步骤S290之后,可以在所述阴极上覆盖一封装层,所述封装层可以为有机层和无机层的交替叠加结构。In addition, after step S290 is performed, an encapsulation layer may be covered on the cathode, and the encapsulation layer may be an alternately stacked structure of an organic layer and an inorganic layer.
由于,所述显示面板610的整个结构通过利用黑色矩阵层材料涂布在每一金属层上,并且与被覆盖的金属层保持完全一致的图案,从而能够有效地遮挡外界光线在金属层(作为电极)上的反射,避免电致发光器件出射光与外界反射光形成干涉而影响到显示面板610的正常显示。通过设置黑色矩阵层400来替代摄像头上方显示区域的偏光片结构,从而极大地提高外界光透过率,保证摄像头正常地工作。Because the entire structure of the display panel 610 is coated on each metal layer by using the black matrix layer material, and the pattern is completely consistent with the covered metal layer, it can effectively block the external light on the metal layer (as The reflection on the electrode) prevents the light emitted by the electroluminescent device from interfering with the external reflected light and affecting the normal display of the display panel 610. The black matrix layer 400 is provided to replace the polarizer structure in the display area above the camera, thereby greatly improving the external light transmittance and ensuring the normal operation of the camera.
图4是本发明第三实施例中的显示面板的制备方法的步骤流程图。图5A至图5D是本发明第三实施例中的显示面板的制备方法的工艺流程图。FIG. 4 is a flow chart of the steps of the manufacturing method of the display panel in the third embodiment of the present invention. 5A to 5D are process flow diagrams of the manufacturing method of the display panel in the third embodiment of the present invention.
参阅图4和图5A至图5D,本发明还提供了一种上述显示面板的制备方法。其中所述显示面板如上文所述的结构,在此不再赘述。所述制备方法包括:Referring to FIG. 4 and FIG. 5A to FIG. 5D, the present invention also provides a method for manufacturing the above-mentioned display panel. The structure of the display panel is as described above, which will not be repeated here. The preparation method includes:
步骤S410:提供一阵列基板的衬底基板。Step S410: Provide a base substrate of an array substrate.
所述衬底基板101为柔性衬底基板,为OLED器件提供柔性衬底。所述衬底基板可以采用PI材料制成。The base substrate 101 is a flexible base substrate, which provides a flexible substrate for an OLED device. The base substrate may be made of PI material.
参阅图5A,步骤S420:在所述衬底基板上沉积一第一金属层,并且采用栅极掩模板将所述第一金属层图案化,以形成一第一栅极层。Referring to FIG. 5A, step S420: deposit a first metal layer on the base substrate, and use a gate mask to pattern the first metal layer to form a first gate layer.
在所述衬底基板101上沉积一第一金属层200的步骤之前,可以进一步包括:在柔性衬底基板上设置一无机阻水层102、一缓冲层103、一有源层111以及一栅极绝缘层112。Before the step of depositing a first metal layer 200 on the base substrate 101, it may further include: disposing an inorganic water blocking layer 102, a buffer layer 103, an active layer 111 and a gate on the flexible base substrate.极 insulation layer 112.
其中,所述无机阻水层102用于防止水汽从PI层入侵。所述缓冲层103用于防止下层离子注入有源层111。所述栅极绝缘层112的材料不限于SiNx, SiOxNy, SiOx, SiCxNy, ZnO, AlOx。Wherein, the inorganic water blocking layer 102 is used to prevent water vapor from intruding from the PI layer. The buffer layer 103 is used to prevent lower layer ions from being implanted into the active layer 111. The material of the gate insulating layer 112 is not limited to SiNx, SiOxNy, SiOx, SiCxNy, ZnO, AlOx.
在所述衬底基板101上沉积一第一金属层200的步骤中,可以采用PVD、溅射、蒸镀等方式连续沉积第一金属层200,并且采用栅极掩模板形成图案化的第一栅极层。In the step of depositing a first metal layer 200 on the base substrate 101, the first metal layer 200 can be continuously deposited by PVD, sputtering, evaporation, etc., and a gate mask is used to form the patterned first metal layer. Grid layer.
步骤S430:在所述第一栅极层上沉积并形成一层间介质层。Step S430: deposit and form an interlayer dielectric layer on the first gate layer.
在所述第一栅极层上沉积层间介质层114,并且在所述层间介质层114中设置一开孔。An interlayer dielectric layer 114 is deposited on the first gate layer, and an opening is provided in the interlayer dielectric layer 114.
参阅图5B,步骤S440:在所述层间介质层上沉积一第二金属层,并且进行图案化操作,以形成源极和漏极。Referring to FIG. 5B, step S440: deposit a second metal layer on the interlayer dielectric layer, and perform a patterning operation to form a source electrode and a drain electrode.
所述源极和漏极的结构为钛/铝/钛的叠层结构设计,此处不做限制。The structure of the source and drain is a stacked structure design of titanium/aluminum/titanium, which is not limited here.
参阅图5C,步骤S450:在所述源极和漏极上涂布一黑色矩阵层材料,并执行曝光显影操作,以形成所述黑色矩阵层,并且使得所述黑色矩阵层完全覆盖所述至少一第一金属层和所述第二金属层。Referring to FIG. 5C, step S450: coating a black matrix layer material on the source and drain electrodes, and performing exposure and development operations to form the black matrix layer, and make the black matrix layer completely cover the at least A first metal layer and the second metal layer.
所述黑色矩阵层材料为黑色有机树脂和黑色无机薄膜,其中黑色无机薄膜可以为金属氧化物或金属硫化物,例如氧化铜、氧化铁、二氧化锰、四氧化三铁、硫化钼、硫化铜等。接着,执行曝光显影操作,以形成所述黑色矩阵层400,并且所述黑色矩阵层400与所述源极和漏极及第一栅极层相同的图案,即所述黑色矩阵层400不仅覆盖所述源极和漏极,而且也覆盖所述第一栅极层。The black matrix layer material is a black organic resin and a black inorganic film, wherein the black inorganic film can be a metal oxide or a metal sulfide, such as copper oxide, iron oxide, manganese dioxide, ferroferric oxide, molybdenum sulfide, copper sulfide Wait. Next, an exposure and development operation is performed to form the black matrix layer 400, and the black matrix layer 400 has the same pattern as the source and drain electrodes and the first gate layer, that is, the black matrix layer 400 not only covers The source and drain also cover the first gate layer.
本发明第三实施例相较于第二实施例,在第三实施例中,仅涂布一层黑色矩阵层400,即设置一层黑色矩阵层400,从而可以简化显示面板610的制程,提高效率,并且有利于减薄所述显示面板的厚度,提高良率。Compared with the second embodiment, in the third embodiment of the present invention, only one layer of black matrix layer 400 is coated, that is, one layer of black matrix layer 400 is provided, which can simplify the manufacturing process of the display panel 610 and improve It is efficient, and is conducive to reducing the thickness of the display panel and improving the yield.
步骤S460:在所述黑色矩阵层上设置一有机平坦层。Step S460: Disposing an organic flat layer on the black matrix layer.
参阅图5D,步骤S470:在所述有机平坦层上沉积一阳极,并且图案化。Referring to FIG. 5D, step S470: deposit an anode on the organic flat layer and pattern it.
在所述有机平坦层411上整面沉积阳极511,并且图案化。其中所述阳极511为透明可导电电极材料,且具有较高的空穴注入能力,一般采用氧化铟锡ITO。An anode 511 is deposited on the entire surface of the organic flat layer 411 and patterned. Wherein, the anode 511 is a transparent conductive electrode material and has a high hole injection capability, and indium tin oxide ITO is generally used.
步骤S480:在所述阳极上依次沉积相应的电致发光材料和阴极材料,以分别形成电致发光层和阴极。Step S480: sequentially depositing corresponding electroluminescent materials and cathode materials on the anode to form an electroluminescent layer and a cathode respectively.
然后依次沉积电致发光材料和阴极材料以分别形成电致发光层512和阴极。Then the electroluminescent material and the cathode material are sequentially deposited to form the electroluminescent layer 512 and the cathode, respectively.
另外,在执行步骤S480之后,可以在阴极上覆盖一封装层,所述封装层可以为有机层无机层的交替叠加结构。In addition, after step S480 is performed, an encapsulation layer may be covered on the cathode, and the encapsulation layer may be an alternately stacked structure of organic layers and inorganic layers.
由于,所述显示面板610的整个结构通过利用黑色矩阵层400材料涂布在每一金属层上,且与被覆盖的金属层保持完全一致的图案,从而能够有效地遮挡外界光线在金属层(作为电极)上的反射,避免电致发光器件出射光与外界反射光形成干涉而影响到显示面板610的正常显示。通过设置黑色矩阵层400来替代摄像头上方显示区域的偏光片结构,从而极大地提高外界光透过率,保证摄像头正常地工作。Because the entire structure of the display panel 610 is coated on each metal layer by using the black matrix layer 400 material, and the pattern is completely consistent with the covered metal layer, it can effectively block the external light from the metal layer ( As the reflection on the electrode), the light emitted by the electroluminescent device and the reflected light from the outside may interfere with the external reflected light and affect the normal display of the display panel 610. The black matrix layer 400 is provided to replace the polarizer structure in the display area above the camera, thereby greatly improving the external light transmittance and ensuring the normal operation of the camera.
本发明所述显示面板通过利用黑矩阵层材料对金属层(或金属导线)进行完全重叠式覆盖,以取代原有偏光片的结构设计,并且将该设计用于摄像头上方的可显示区域,从而解决了偏光片所导致的光透光率大幅降低,摄像头无法正常工作的难题。The display panel of the present invention uses the black matrix layer material to completely overlap the metal layer (or metal wire) to replace the original polarizer structure design, and uses this design in the displayable area above the camera, thereby It solves the problem that the light transmittance caused by the polarizer is greatly reduced and the camera cannot work normally.
图6是本发明第四实施例中的显示装置的结构示意图。FIG. 6 is a schematic diagram of the structure of the display device in the fourth embodiment of the present invention.
在第四实施例中,提供一种显示装置600,所述显示装置包括上述显示面板610。所述显示面板610的具体结构如上文所述,在此不再赘述。其中,所述显示装置600可以为液晶电视TV、液晶显示装置(例如柔性显示器、高效显示器)、手机、数码相框、平板电脑等任何具有显示功能的产品或部件。其中,在所述显示面板610活动区域(active area)上设有一屏下摄像头620,其位置如图6所示。In the fourth embodiment, a display device 600 is provided, and the display device includes the above-mentioned display panel 610. The specific structure of the display panel 610 is as described above, and will not be repeated here. Wherein, the display device 600 may be any product or component with a display function, such as a liquid crystal television TV, a liquid crystal display device (such as a flexible display, a high-efficiency display), a mobile phone, a digital photo frame, a tablet computer, and the like. Wherein, an under-screen camera 620 is provided on the active area of the display panel 610, the position of which is shown in FIG. 6.
以上所述仅是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员,在不脱离本发明原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。The above are only the preferred embodiments of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and modifications can be made, and these improvements and modifications should also be considered This is the protection scope of the present invention.
工业实用性Industrial applicability
本申请的主题可以在工业中制造和使用,具备工业实用性。The subject of this application can be manufactured and used in industry and has industrial applicability.

Claims (10)

  1. 一种显示面板,其中所述显示面板包括一阵列基板,所述显示面板还包括:A display panel, wherein the display panel includes an array substrate, and the display panel further includes:
    至少一第一金属层,所述至少一第一金属层设置在所述阵列基板上;At least one first metal layer, the at least one first metal layer is disposed on the array substrate;
    一层间介质层,所述层间介质层设置在所述至少一第一金属层上;An interlayer dielectric layer, the interlayer dielectric layer is disposed on the at least one first metal layer;
    一第二金属层,所述第二金属层设置在所述层间介质层上;A second metal layer, the second metal layer being disposed on the interlayer dielectric layer;
    至少一黑色矩阵层,所述至少一黑色矩阵层至少设置在所述第二金属层上,并且完全覆盖所述至少一第一金属层和所述第二金属层。At least one black matrix layer. The at least one black matrix layer is at least disposed on the second metal layer and completely covers the at least one first metal layer and the second metal layer.
  2. 根据权利要求1所述的显示面板,其中当所述至少一黑色矩阵层为多层时,所述黑色矩阵层分别设置在所述第二金属层和所述至少第一金属层上,并且完全覆盖所述至少第一金属层和所述第二金属层。The display panel according to claim 1, wherein when the at least one black matrix layer is a multilayer, the black matrix layer is respectively disposed on the second metal layer and the at least first metal layer, and completely Covering the at least the first metal layer and the second metal layer.
  3. 根据权利要求1所述的显示面板,其中所述至少一黑色矩阵层的厚度为100纳米至5000纳米。The display panel of claim 1, wherein the thickness of the at least one black matrix layer is 100 nm to 5000 nm.
  4. 根据权利要求1所述的显示面板,其中所述至少一黑色矩阵层的材料为黑色有机树脂和黑色无机薄膜。The display panel of claim 1, wherein the material of the at least one black matrix layer is a black organic resin and a black inorganic film.
  5. 根据权利要求4所述的显示面板,其中所述黑色无机薄膜为金属氧化物或金属硫化物。4. The display panel of claim 4, wherein the black inorganic film is a metal oxide or a metal sulfide.
  6. 根据权利要求1所述的显示面板,其中所述至少一第一金属层的材料为钼。The display panel of claim 1, wherein the material of the at least one first metal layer is molybdenum.
  7. 根据权利要求1所述的显示面板,其中所述第二金属层为钛/铝/钛的叠层结构。The display panel according to claim 1, wherein the second metal layer has a stacked structure of titanium/aluminum/titanium.
  8. 根据权利要求1所述的显示面板,其中所述阵列基板包括:一衬底基板、一设置在所述衬底基板上的无机阻水层、一设置在所述无机阻水层上的缓冲层、一设置在所述缓冲层上的有源层以及一设置在所述有源层上的栅极绝缘层;其中所述至少一第一金属层设置在所述栅极绝缘层上。The display panel according to claim 1, wherein the array substrate comprises: a base substrate, an inorganic water blocking layer disposed on the base substrate, and a buffer layer disposed on the inorganic water blocking layer An active layer arranged on the buffer layer and a gate insulating layer arranged on the active layer; wherein the at least one first metal layer is arranged on the gate insulating layer.
  9. 一种采用权利要求1所述显示面板的制备方法,其中所述制备方法包括:A method for manufacturing the display panel according to claim 1, wherein the manufacturing method comprises:
    (1)提供一阵列基板的衬底基板;(1) Provide a base substrate of an array substrate;
    (2)在所述衬底基板上沉积一第一金属层,并且采用栅极掩模板将所述第一金属层图案化,以形成一第一栅极层;(2) Depositing a first metal layer on the base substrate, and patterning the first metal layer using a gate mask to form a first gate layer;
    (3)在所述第一栅极层上涂布一黑色矩阵层材料,并执行曝光显影操作,以形成所述黑色矩阵层,并且与所述第一栅极层相同图案;(3) Coating a black matrix layer material on the first gate electrode layer, and performing exposure and development operations to form the black matrix layer with the same pattern as the first gate electrode layer;
    (4)在所述黑色矩阵层上沉积一层间介质层;(4) Depositing an interlayer dielectric layer on the black matrix layer;
    (5)在所述层间介质层上沉积第二金属层,并且进行图案化操作,以形成源极和漏极;(5) Depositing a second metal layer on the interlayer dielectric layer, and performing a patterning operation to form a source electrode and a drain electrode;
    (6)在所述源极和漏极上涂布一黑色矩阵层材料,并执行曝光显影操作,以形成所述黑色矩阵层,并且与所述源极和漏极相同图案;(6) Coating a black matrix layer material on the source and drain electrodes, and performing exposure and development operations to form the black matrix layer with the same pattern as the source and drain electrodes;
    (7)在所述黑色矩阵层上设置一有机平坦层;(7) Arranging an organic flat layer on the black matrix layer;
    (8)在所述有机平坦层上沉积一阳极,并且图案化;以及(8) Depositing an anode on the organic flat layer and patterning; and
    (9)在所述阳极上依次沉积相应的电致发光材料和阴极材料,以分别形成一电致发光层和一阴极。(9) Depositing corresponding electroluminescent materials and cathode materials on the anode in sequence to form an electroluminescent layer and a cathode respectively.
  10. 一种采用权利要求1所述显示面板的制备方法,其中所述制备方法包括:A method for manufacturing the display panel according to claim 1, wherein the manufacturing method comprises:
    (a)提供一阵列基板的衬底基板;(A) Provide a base substrate of an array substrate;
    (b)在所述衬底基板上沉积一第一金属层,并且采用栅极掩模板将所述第一金属层图案化,以形成一第一栅极层;(B) Depositing a first metal layer on the base substrate, and using a gate mask to pattern the first metal layer to form a first gate layer;
    (c)在所述第一栅极层上沉积一层间介质层;(C) Depositing an interlayer dielectric layer on the first gate layer;
    (d)在所述层间介质层上沉积一第二金属层,并且进行图案化操作,以形成源极和漏极;(D) Depositing a second metal layer on the interlayer dielectric layer, and performing a patterning operation to form a source electrode and a drain electrode;
    (e)在所述源极和漏极上涂布一黑色矩阵层材料,并执行曝光显影操作,以形成所述黑色矩阵层,并且使得所述黑色矩阵层完全覆盖所述第一金属层和所述第二金属层;(E) Coating a black matrix layer material on the source and drain electrodes, and performing exposure and development operations to form the black matrix layer, and make the black matrix layer completely cover the first metal layer and The second metal layer;
    (f)在所述黑色矩阵层上设置一有机平坦层;(F) Disposing an organic flat layer on the black matrix layer;
    (g)在所述有机平坦层上沉积一阳极,并且图案化所述阳极;以及(G) depositing an anode on the organic flat layer, and patterning the anode; and
    (h)在所述图案化的阳极上依次沉积相应的电致发光材料和阴极材料,以分别形成一电致发光层和一阴极。(H) Depositing corresponding electroluminescent materials and cathode materials in sequence on the patterned anode to form an electroluminescent layer and a cathode respectively.
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