WO2020186983A1 - Structure de reconnaissance d'empreintes digitales et son procédé d'excitation, et dispositif d'affichage - Google Patents

Structure de reconnaissance d'empreintes digitales et son procédé d'excitation, et dispositif d'affichage Download PDF

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Publication number
WO2020186983A1
WO2020186983A1 PCT/CN2020/076766 CN2020076766W WO2020186983A1 WO 2020186983 A1 WO2020186983 A1 WO 2020186983A1 CN 2020076766 W CN2020076766 W CN 2020076766W WO 2020186983 A1 WO2020186983 A1 WO 2020186983A1
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WIPO (PCT)
Prior art keywords
strip
electrode
shaped
piezoelectric material
shaped driving
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PCT/CN2020/076766
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English (en)
Chinese (zh)
Inventor
刘英明
王海生
丁小梁
王鹏鹏
李秀锋
张晨阳
李佩笑
Original Assignee
京东方科技集团股份有限公司
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Publication of WO2020186983A1 publication Critical patent/WO2020186983A1/fr

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • G06V40/1306—Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition

Definitions

  • the embodiments of the present disclosure relate to a fingerprint recognition structure, a driving method of the fingerprint recognition structure, and a display device.
  • Fingerprint recognition technology is a technology that compares the minutiae feature points of different fingerprints to perform identification, so as to achieve identity recognition.
  • under-screen fingerprint recognition technology With the continuous development of smart phones, under-screen fingerprint recognition technology has become one of the current research hotspots and development directions in the smart phone market.
  • under-screen fingerprint identification technology can be divided into under-screen capacitive fingerprint identification technology, under-screen ultrasonic fingerprint identification technology and under-screen optical fingerprint identification technology.
  • the under-screen ultrasonic fingerprint recognition technology has become the most ideal solution at present because of its strong penetrability, high recognition, and strong anti-fouling ability.
  • the under-screen ultrasonic fingerprint recognition technology realizes fingerprint recognition through the ultrasonic fingerprint recognition structure.
  • the ultrasonic fingerprint recognition structure is a three-layered structure, including a driving electrode, a receiving electrode, and a piezoelectric layer located between the two.
  • a driving voltage is applied to the driving electrode and the receiving electrode
  • the piezoelectric layer is excited by the voltage to produce an inverse piezoelectric effect, and the first ultrasonic wave is emitted outward.
  • the first ultrasonic wave touches the finger, it is reflected by the finger back to the second ultrasonic wave. Since the fingerprint includes valleys and ridges, the vibration intensity of the second ultrasonic wave reflected by the fingerprint back to the piezoelectric layer is different.
  • a fixed voltage is applied to the driving electrode, and the piezoelectric layer can convert the second ultrasonic wave into a voltage signal.
  • the voltage signal is transmitted to the fingerprint recognition module through the receiving electrode, and the position of the valley and ridge in the fingerprint is determined according to the voltage signal.
  • At least one embodiment of the present disclosure provides a fingerprint recognition structure, including: a first electrode layer including a plurality of strip-shaped receiving electrodes arranged at intervals; a piezoelectric material layer on one side of the first electrode layer; and a second electrode layer
  • the electrode layer is located on the side of the piezoelectric material layer away from the first electrode layer and includes a plurality of strip-shaped driving electrodes arranged along intervals, each of the strip-shaped driving electrodes extends along a first direction, and each of the strip-shaped driving electrodes
  • the receiving electrode extends in a second direction, the first direction and the second direction intersect, the plurality of strip-shaped driving electrodes and the plurality of strip-shaped receiving electrodes intersect each other to form a plurality of intersecting regions, the pressing
  • the electrical material layer at least overlaps the plurality of intersection regions, and one of the strip-shaped receiving electrodes and the plurality of strip-shaped driving electrodes form a plurality of the intersection regions.
  • the piezoelectric material layer includes sub-piezoelectric material layers arranged at intervals, and each of the sub-piezoelectric material layers is along the first direction or the second direction.
  • Direction extension
  • the piezoelectric material layer includes a plurality of sub-piezoelectric material blocks, and the plurality of sub-piezoelectric material blocks are arranged in a one-to-one correspondence with the plurality of intersecting regions.
  • the second electrode layer further includes: a barrier wall located between two adjacent strip-shaped driving electrodes.
  • the size of the retaining wall in the direction perpendicular to the piezoelectric material layer ranges from 1 to 20 microns, and the second electrode layer is perpendicular to the piezoelectric material layer.
  • the size range of the piezoelectric material layer in the direction is 1-20 microns.
  • the material of the second electrode layer includes one or more of copper, silver and aluminum.
  • the fingerprint identification structure provided by an embodiment of the present disclosure further includes: a plurality of receiving circuits, the plurality of receiving circuits are respectively electrically connected to the plurality of strip-shaped receiving electrodes, the fingerprint identification structure includes an effective identification area and An edge area located around the effective identification area, the multiple crossing areas are located in the effective identification area, and the multiple receiving circuits are located in the edge area.
  • each of the receiving circuits includes: a storage capacitor including a first electrode and a second electrode; a first thin film transistor including a first gate, a first source, and A first drain; and a signal reading unit, the strip-shaped receiving electrode, the first source and the first electrode are connected to a storage node, and the signal reading unit is configured to read from the storage capacitor
  • the first thin film transistor is an oxide thin film transistor.
  • the signal reading unit includes: a second thin film transistor including a second gate, a second source, and a second drain; and a third thin film transistor, Comprising a third gate, a third source and a third drain, the second gate is connected to the storage node, the second drain is connected to the third source, the second source
  • the third gate is configured to apply a fixed voltage, the third gate is configured to apply a readout instruction signal, and the third drain is configured to output a signal.
  • At least one embodiment of the present disclosure also provides a display device, which includes: a display panel; and the fingerprint identification structure described above.
  • the display panel includes a display area and a peripheral area located at the periphery of the display area
  • the fingerprint recognition structure further includes: a plurality of receiving circuits; The circuits are respectively electrically connected to the plurality of strip-shaped receiving electrodes, wherein each of the receiving circuits includes: a storage capacitor including a first electrode and a second electrode; a first thin film transistor including a first gate and a first source Electrode and a first drain; and a signal reading unit, the strip-shaped receiving electrode, the first source and the first electrode are connected to a storage node, and the signal reading unit is configured to read the storage
  • the plurality of crossing areas are located in the display area
  • the orthographic projection of the plurality of receiving circuits on the display panel is located in the peripheral area.
  • the display panel includes a light-emitting side, and the fingerprint identification structure is located on the light-emitting side of the display panel.
  • the display panel includes a black matrix, and the orthographic projection of the strip-shaped driving electrode and the strip-shaped receiving electrode on the display panel is at least Partially overlapped.
  • At least one embodiment of the present disclosure provides a method for driving the aforementioned fingerprint identification structure.
  • the plurality of strip-shaped driving electrodes are divided into a plurality of strip-shaped driving electrode groups arranged in sequence, and each of the strip-shaped driving electrode groups includes N Strip-shaped drive electrodes, two adjacent strip-shaped drive electrode groups share N-1 of the strip-shaped drive electrodes, and the driving method includes: sequentially applying drive voltages to the plurality of strip-shaped drive electrode groups to Respectively driving the piezoelectric material layers corresponding to the plurality of strip-shaped driving electrode groups to emit ultrasonic waves; and using the piezoelectric material layer to receive the ultrasonic waves reflected by the fingerprint and output corresponding fingerprint electrical signals through the plurality of strip-shaped receiving electrodes , N is a positive integer greater than or equal to 1.
  • N is a positive integer greater than or equal to 2
  • each of the strip-shaped driving electrode groups includes a first strip-shaped driving electrode and a second strip-shaped driving electrode
  • Applying a driving voltage to each of the strip-shaped driving electrode groups includes: applying a driving voltage to the first strip-shaped driving electrode at a first time point to drive the piezoelectric material layer corresponding to the first strip-shaped driving electrode to emit And applying a driving voltage to the second strip-shaped drive electrode at a second time point to delay the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip-shaped drive electrode from that of the first strip
  • the piezoelectric material layer corresponding to the driving electrode emits a phase of ultrasonic waves, and the second time point is delayed from the first time point.
  • N is a positive integer greater than or equal to 3
  • each of the strip-shaped driving electrode groups includes a first strip-shaped driving electrode, a second strip-shaped driving electrode and The third strip-shaped driving electrode
  • applying a driving voltage to each of the strip-shaped driving electrode groups includes: applying a driving voltage to the first strip-shaped driving electrode and the third strip-shaped driving electrode at a first time point to drive all the strip-shaped driving electrodes.
  • the piezoelectric material layer corresponding to the first strip-shaped driving electrode and the third strip-shaped driving electrode emits ultrasonic waves; and at a second time point, a driving voltage is applied to the second strip-shaped driving electrode to make the The phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the two strip-shaped driving electrodes is delayed from the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip-shaped driving electrode and the third strip-shaped driving electrode, so The second time point is delayed from the first time point.
  • the fingerprint identification structure further includes: a plurality of receiving circuits, and the plurality of receiving circuits are respectively electrically connected to the plurality of strip-shaped receiving electrodes ,
  • each of the receiving circuits includes: a storage capacitor including a first electrode and a second electrode; a first thin film transistor including a first gate, a first source, and a first drain; and a signal reading unit, so The strip-shaped receiving electrode, the first source electrode, and the first electrode are connected to a storage node, and the signal reading unit is configured to read the electrical signal stored in the storage capacitor, using the piezoelectric material layer
  • Receiving the ultrasonic wave reflected by the fingerprint and outputting the corresponding fingerprint electrical signal through the strip-shaped receiving electrode includes: applying a driving voltage to the strip-shaped driving electrode group to drive the piezoelectric material layer corresponding to the strip-shaped driving electrode group to emit During ultrasonic waves, an on signal is applied to the first gate to turn on
  • Figure 1 is a schematic diagram of a fingerprint recognition structure emitting ultrasonic waves
  • Figure 2 is a schematic diagram of a fingerprint recognition structure receiving ultrasonic waves
  • Figure 3 is a schematic diagram of a fingerprint identification structure for fingerprint identification
  • Figure 4 is a schematic structural diagram of a fingerprint recognition structure
  • FIG. 5 is a schematic plan view of a fingerprint identification structure provided by an embodiment of the present disclosure.
  • Fig. 6A is a schematic diagram of a fingerprint identification structure provided by an embodiment of the present disclosure to realize ultrasonic focusing
  • 6B is a schematic diagram of another fingerprint identification structure provided by an embodiment of the present disclosure to achieve ultrasonic focusing
  • FIG. 7A is a schematic diagram of ultrasonic waves emitted by a fingerprint identification structure provided by an embodiment of the present disclosure focusing on the valley of the fingerprint;
  • FIG. 7B is a schematic diagram of ultrasonic waves emitted by a fingerprint identification structure provided by an embodiment of the present disclosure focusing on the ridge of the fingerprint;
  • FIG. 8 is a schematic plan view of another fingerprint identification structure provided by an embodiment of the present disclosure.
  • FIG. 9 is a schematic plan view of another fingerprint identification structure provided by an embodiment of the disclosure.
  • FIG. 10 is a schematic cross-sectional view of a fingerprint identification structure along the AA direction in FIG. 5 according to an embodiment of the disclosure
  • FIG. 11 is a schematic plan view of another fingerprint identification structure provided by an embodiment of the present disclosure.
  • FIG. 12 is a schematic diagram of a receiving circuit in a fingerprint identification structure provided by an embodiment of the disclosure.
  • FIG. 13 is a schematic structural diagram of a display device provided by an embodiment of the present disclosure.
  • FIG. 14 is a schematic plan view of a display device provided by an embodiment of the disclosure.
  • FIG. 15 is a flowchart of a method for driving a fingerprint identification structure according to an embodiment of the disclosure.
  • Fig. 1 is a schematic diagram of a fingerprint recognition structure transmitting ultrasonic waves
  • Fig. 2 is a schematic diagram of a fingerprint recognition structure receiving ultrasonic waves.
  • the fingerprint recognition structure includes an ultrasonic sensor 10; the ultrasonic sensor 10 includes an upper electrode 11, a lower electrode 12, and a piezoelectric layer 13 located between the upper electrode 11 and the lower electrode 12; the piezoelectric layer 13 uses piezoelectric Made of material, it can be excited by voltage to produce inverse piezoelectric effect.
  • the piezoelectric layer 13 is due to the inverse piezoelectric effect. Deformation occurs and drives the film layers above and below the piezoelectric layer 13 to vibrate together, so that ultrasonic waves can be generated and emitted outward.
  • a cavity such as an air cavity
  • the ultrasonic waves emitted by the ultrasonic sensor will be strengthened. Thereby, the ultrasonic wave can be emitted better.
  • the ultrasonic wave emitted by the ultrasonic sensor 10 is reflected by the fingerprint 500, and the reflected ultrasonic wave is converted into an alternating voltage in the piezoelectric layer; at this time, the upper electrode 11 is grounded, and the lower electrode 12 can be used as a receiving electrode. Receive the alternating voltage generated by the piezoelectric layer. Since the fingerprint 500 includes the valley 510 and the ridge 520, their ability to reflect ultrasonic waves is different (the valley 510 has a stronger ability to reflect ultrasonic waves), resulting in different intensities of the ultrasonic waves reflected by the valley 510 and the ridge 520. Therefore, it can be judged whether the ultrasonic wave is reflected by the valley or the ridge by the alternating voltage received by the receiving electrode.
  • FIG. 3 is a schematic diagram of a fingerprint identification structure for fingerprint identification.
  • the fingerprint recognition structure includes an upper electrode 11, a plurality of lower electrodes 12, a piezoelectric layer 13 located between the upper electrode 11 and the plurality of lower electrodes 12, and one located on the upper electrode 11 away from the piezoelectric layer 13.
  • the substrate 80 on the side and the protective layer 90 on the side of the plurality of lower electrodes 12 away from the piezoelectric layer 13; the ultrasonic sensor 10 composed of the lower electrode 12, the piezoelectric layer 13 and the plurality of upper electrodes 11 can emit ultrasonic waves or accept ultrasonic waves
  • the ultrasonic sensor 10 functions as both an ultrasonic transmitting sensor and an ultrasonic receiving sensor.
  • the ultrasonic wave emitted by the ultrasonic sensor 10 is reflected by the fingerprint 500, and the reflected ultrasonic wave is converted into an alternating voltage in the piezoelectric layer; at this time, the upper electrode 11 is grounded, and the lower electrodes 12 can be As a receiving electrode, it can receive the alternating voltage generated by the piezoelectric layer at different positions. Since the fingerprint 500 includes the valley 510 and the ridge 520, their ability to reflect ultrasonic waves is different (the valley 510 has a stronger ability to reflect ultrasonic waves), resulting in different intensities of the ultrasonic waves reflected by the valley 510 and the ridge 520. Therefore, the position information of the valleys and ridges of the fingerprint 500 can be obtained through the alternating voltages received by the plurality of lower electrodes 12, so that fingerprint identification can be realized.
  • FIG. 4 is a schematic structural diagram of a fingerprint recognition structure. As shown in FIG. 4, the upper electrode 11, the lower electrode 12 and the piezoelectric layer 13 can all be fabricated on the same side of the thin film transistor substrate 91.
  • the fingerprint recognition structure further includes: a bias resistor 60 and a binding pad 70; the bias resistor 60 can be used to calibrate the voltage, and the binding pad 70 can be used to bind an external circuit.
  • the usual fingerprint recognition structure includes a plurality of block-shaped receiving electrodes (upper electrode or lower electrode) arranged in an array. Each block-shaped receiving electrode needs to be provided with a corresponding receiving circuit to measure the voltage received by each receiving electrode. The signal is received and processed.
  • the receiving circuit usually includes a multilayer structure such as thin film transistors and capacitors.
  • the fingerprint recognition structure has many layers (including at least the upper electrode, the lower electrode, the piezoelectric layer, the multi-layer structure of the receiving circuit), resulting in low light transmittance, so it can only be placed under the display panel , Resulting in high power consumption; on the other hand, the structure of the fingerprint identification structure is complex and the cost is also high.
  • the embodiments of the present disclosure provide a fingerprint identification structure, a driving method of the fingerprint identification structure, and a display device.
  • the fingerprint identification structure includes a first electrode layer, a piezoelectric material layer, and a second electrode layer; the first electrode layer includes a plurality of strip-shaped receiving electrodes arranged at intervals; the piezoelectric material layer is on one side of the first electrode layer; The electrode layer is on the side of the piezoelectric material layer away from the first electrode layer and includes a plurality of strip-shaped driving electrodes arranged along intervals, each strip-shaped driving electrode extends in a first direction, and each strip-shaped receiving electrode extends in a second direction.
  • the first direction and the second direction intersect, the plurality of strip-shaped driving electrodes and the plurality of strip-shaped receiving electrodes intersect each other to form a plurality of intersection regions, and the piezoelectric material layer at least overlaps the plurality of intersection regions.
  • the strip-shaped driving electrode, the strip-shaped receiving electrode and the piezoelectric material layer form an ultrasonic sensor. Therefore, the fingerprint recognition structure can use multiple strip-shaped drive electrodes, multiple strip-shaped receiving electrodes and piezoelectric material layers to realize the transmission and reception of ultrasonic waves respectively through scanning and driving, and there is no need to set up receiving in each cross area.
  • the number of film layers in the fingerprint identification structure can be reduced to increase the light transmittance of the fingerprint identification structure, so that the fingerprint identification structure can be arranged on the display panel, and the power consumption of the fingerprint identification structure can be reduced.
  • the fingerprint identification structure has a simple structure and low cost.
  • the fingerprint recognition structure can also realize the focusing of the ultrasonic wave (increased interference) by driving the above-mentioned multiple strip drive electrodes separately, so as to increase the intensity or energy of the emitted ultrasonic wave in a specific area, thereby increasing the The fingerprint recognition performance can also make the emitted ultrasonic waves have better directivity, thereby reducing the crosstalk between the valleys and ridges of the fingerprint, thereby improving the fingerprint recognition performance.
  • FIG. 5 is a schematic plan view of a fingerprint identification structure according to an embodiment of the present disclosure.
  • the fingerprint identification structure 100 includes a first electrode layer 110, a piezoelectric material layer 130, and a second electrode layer 120;
  • the first electrode layer 110 includes a plurality of strip-shaped receiving electrodes 112 arranged at intervals, for example, multiple The two strip-shaped receiving electrodes 112 may be parallel to each other;
  • the piezoelectric material layer 130 is arranged on one side of the first electrode layer 110;
  • the second electrode layer 120 is arranged on the side of the piezoelectric material layer 130 away from the first electrode layer 110, that is, In other words, the piezoelectric material layer 130 is located between the first electrode layer 110 and the second electrode layer 120;
  • the second electrode layer 120 includes a plurality of strip-shaped driving electrodes 122 arranged along the interval, for example, the plurality of strip-shaped driving electrodes 122 can be mutually Parallel; each strip-shaped driving electrode 122 extend
  • one strip-shaped receiving electrode 112 and a plurality of strip-shaped driving electrodes 122 form a plurality of crossing regions 140; in addition, the above-mentioned "piezoelectric material layer at least overlaps a plurality of crossing regions" refers to a piezoelectric material layer Falling into the aforementioned multiple crossing regions; that is, the piezoelectric material layer includes portions located in the multiple crossing regions, and may also include portions located outside the multiple crossing regions.
  • the strip-shaped driving electrode 122, the strip-shaped receiving electrode 112, and the piezoelectric material layer 130 can form an ultrasonic sensor.
  • the strip receiving electrode 112 can be grounded, and then an alternating voltage is applied to one of the plurality of strip driving electrodes 122, and the piezoelectric material layer 130 corresponding to the strip driving electrode 122
  • the inverse piezoelectric effect will deform or drive the film layers above and below the piezoelectric material layer 130 to vibrate together, thereby generating ultrasonic waves and emitting them outward; when the emitted ultrasonic waves are reflected by the fingerprint back to the fingerprint identification structure, multiple The plurality of intersection regions 140 corresponding to the strip-shaped receiving electrode 112 and the strip-shaped driving electrode 122 can receive reflected ultrasonic waves, and can convert the ultrasonic signals received by the plurality of cross-regions 140 corresponding to the strip-shaped driving electrode 122 into electricity.
  • the electrical signals output by the plurality of strip-shaped receiving electrodes 112 at this time are the reflected echo information corresponding to the strip-shaped driving electrode 122; 122 After applying an AC square wave to transmit and receive ultrasonic waves, the reflected echo information corresponding to the entire fingerprint identification structure can be obtained, so that fingerprint identification can be realized. Therefore, the fingerprint identification structure can utilize a plurality of strip-shaped driving electrodes, a plurality of strip-shaped receiving electrodes, and a piezoelectric material layer to respectively realize the transmission and reception of ultrasonic waves through a scanning driving manner.
  • the fingerprint identification structure does not need to be provided with a receiving circuit in each intersection area, so the number of layers in the fingerprint identification structure can be reduced to increase the light transmittance of the fingerprint identification structure, so that the fingerprint identification structure can be set in On the display panel, the power consumption of the fingerprint identification structure can be reduced.
  • the fingerprint identification structure has a simple structure and low cost.
  • the fingerprint recognition structure can also realize the focusing of the ultrasonic wave (increased interference) by driving the above-mentioned multiple strip drive electrodes separately, so as to increase the intensity or energy of the emitted ultrasonic wave in a specific area, thereby increasing the
  • the fingerprint recognition performance can also make the emitted ultrasonic waves have better directivity, thereby reducing the crosstalk between the valleys and ridges of the fingerprint, thereby improving the fingerprint recognition performance.
  • the fingerprint recognition structure improves the intensity or energy of the emitted ultrasonic waves in a specific area or a specific direction by realizing the focusing of ultrasonic waves (phase-increasing interference), the fingerprint recognition structure can not only realize fingerprint recognition, but also penetrate the finger to distinguish the Whether the fingerprint is real skin.
  • the width of the strip-shaped driving electrode can be in the range of 50-70 microns, and the width of the strip-shaped receiving electrode can be in the range of 50-70 microns.
  • the width of the interval between two adjacent strip-shaped driving electrodes is also in the range of 50-70 microns, and the width of the interval between two adjacent strip-shaped receiving electrodes is also in the range of 50-70 microns.
  • FIG. 6A is a schematic diagram of a fingerprint identification structure provided by an embodiment of the present disclosure to achieve ultrasonic focusing.
  • Fig. 6A shows an example in which the fingerprint recognition structure realizes ultrasonic focusing.
  • the plurality of strip-shaped driving electrodes 122 includes a first strip-shaped driving electrode 1221 and a second strip-shaped driving electrode 1222.
  • a driving voltage (such as an alternating voltage) is applied to the first strip-shaped driving electrode 1221 at the first time point to drive the piezoelectric material layer corresponding to the first strip-shaped driving electrode 1221 to emit ultrasonic waves, and then at the second time point
  • the second strip-shaped driving electrode 1222 applies a driving voltage to delay the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip-shaped driving electrode 1222 from the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip-shaped driving electrode 1221, thereby Ultrasonic focusing (increasing interference) can be achieved directly above the second strip-shaped drive electrode 1222 (or in other directions away from the first strip-shaped drive electrode 1222), that is, the second strip-shaped drive electrode is enhanced
  • the intensity or energy of the ultrasonic waves directly above the driving electrode 1222 so that the fingerprint identification structure can not only realize fingerprint identification, but also penetrate the finger to distinguish whether the fingerprint is genuine skin.
  • the aforementioned second time point is delayed from the first time point. It should be noted that the phase delay of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip-shaped driving electrode and the phase delay of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip-shaped driving electrode can be obtained by testing according to actual conditions.
  • FIG. 6B is a schematic diagram of another fingerprint identification structure provided by an embodiment of the present disclosure to achieve ultrasonic focusing.
  • Fig. 6B shows another example in which the fingerprint recognition structure realizes ultrasonic focusing.
  • the plurality of strip-shaped driving electrodes 122 include a first strip-shaped driving electrode 1221, a second strip-shaped driving electrode 1222, and a third strip-shaped driving electrode 1223.
  • a driving voltage is applied to the first strip-shaped driving electrode 1221 and the third strip-shaped driving electrode 1223 at the first time point to drive the piezoelectric material layer corresponding to the first strip-shaped driving electrode 1221 and the third strip-shaped driving electrode 1223 And apply a driving voltage to the second strip-shaped drive electrode 1222 at the second time point to delay the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip-shaped drive electrode 1222 from that of the first strip-shaped drive electrode 1221 and The phases of the ultrasonic waves emitted by the piezoelectric material layers corresponding to the three strip-shaped drive electrodes 1223, so that the ultrasonic focus (phase-increasing interference) can be achieved directly above the second strip-shaped drive electrode 1222, that is, the positive direction of the second strip-shaped drive electrode 1222
  • the strength or energy of the upper ultrasonic wave enables the fingerprint identification structure to not only realize fingerprint identification, but also penetrate the finger to distinguish whether the fingerprint is genuine skin.
  • two or more strip-shaped drive electrodes are driven separately to emit ultrasonic waves, and the ultrasonic waves are focused directly above the delayed-driven strip-shaped drive electrodes.
  • the ultrasonic receiving element composed of a plurality of strip-shaped receiving electrodes can receive the reflected echo.
  • the electrical signal output by the plurality of strip-shaped receiving electrodes is the reflected echo information corresponding to the delayed-driving strip driving electrode.
  • strip-shaped driving electrodes when a plurality of strip-shaped driving electrodes are driven by the method shown in FIG. 6A or FIG. 6B, two or more strip-shaped driving electrodes can be used as a group of strip-shaped driving electrode groups.
  • the driving electrode group can be driven in delay according to the method shown in FIG. 6A or FIG. 6B, but different strip-shaped driving electrode groups are driven separately, such as scanning driving.
  • FIG. 7A is a schematic diagram of ultrasonic waves emitted by a fingerprint identification structure provided by an embodiment of the present disclosure focused on the valley of a fingerprint
  • FIG. 7B is a schematic diagram of ultrasonic waves emitted by a fingerprint identification structure provided by an embodiment of the disclosure focused on the ridge of the fingerprint Schematic.
  • the ultrasonic waves emitted by the fingerprint recognition structure have better directivity, which can reduce the crosstalk between the valleys and ridges of the fingerprint, thereby improving the fingerprint recognition performance.
  • the piezoelectric material layer 130 is not an entire layer structure, but includes sub-piezoelectric material layers 132 arranged at intervals, and each sub-piezoelectric material layer 132 extends in the first direction or the second direction, thereby reducing The mutual crosstalk between ultrasonic sensors corresponding to different crossing areas.
  • FIG. 8 is a schematic plan view of another fingerprint identification structure according to an embodiment of the present disclosure. As shown in FIG. 8, the piezoelectric material layer 130 includes sub-piezoelectric material layers 132 arranged at intervals, and each sub-piezoelectric material layer 132 extends along the second direction.
  • the plurality of sub-piezoelectric material layers 132 and the plurality of strip-shaped receiving electrodes 112 are arranged in one-to-one correspondence.
  • multiple sub-piezoelectric material layers may also extend along the first direction and be arranged in one-to-one correspondence with the multiple strip-shaped drive electrodes.
  • FIG. 9 is a schematic plan view of another fingerprint identification structure according to an embodiment of the present disclosure.
  • the piezoelectric material layer 130 includes a plurality of sub-piezoelectric material blocks 134, and the plurality of sub-piezoelectric material blocks 134 are arranged in a one-to-one correspondence with the plurality of crossing regions 140, thereby further reducing the ultrasonic sensors corresponding to different crossing regions.
  • the interval between different sub-piezoelectric material layers or the interval between different sub-piezoelectric material blocks can be filled with insulating materials, such as resin.
  • the space between different sub-piezoelectric material layers or the space between different sub-piezoelectric material blocks can also be filled with an elastic insulating material, thereby facilitating the vibration of the piezoelectric material layer corresponding to the crossing area.
  • FIG. 10 is a schematic cross-sectional view of a fingerprint identification structure along the AA direction in FIG. 5 according to an embodiment of the present disclosure.
  • the second electrode layer 120 further includes a barrier wall 124 located between two adjacent strip-shaped driving electrodes 122.
  • the piezoelectric material layer 130 is usually made of a piezoelectric material with a higher piezoelectric voltage constant such as PVDF (polyvinylidene fluoride); while PVDF (polyvinylidene fluoride) ) Piezoelectric materials with higher piezoelectric voltage constants require higher driving voltages to generate ultrasonic waves with higher intensity.
  • the second electrode layer 120 needs to be made thicker, for example, greater than 10 microns, so as to be suitable for applying a higher voltage.
  • a patterned metal layer can be formed on the side of the piezoelectric material layer 130 away from the first electrode layer 110.
  • the metal layer does not need to be made thicker; then the retaining wall 124 and the electroplating process can be used in the A metal layer is electroplated on the patterned metal layer, thereby obtaining a thicker second electrode layer.
  • the metal layer can only continue to grow on the patterned metal layer, and the retaining wall can serve as a partition to prevent the electroplated metal layers from being connected to each other.
  • the piezoelectric material layer 130 may also be made of piezoelectric materials such as ALN (aluminum nitride) and PZT (lead zirconate titanate piezoelectric ceramics).
  • ALN aluminum nitride
  • PZT lead zirconate titanate piezoelectric ceramics
  • the piezoelectric material layer can be made by a sol-gel method.
  • each strip-shaped driving electrode 122 may include a first sub-driving electrode 1291 and a second sub-driving electrode 1292 that are stacked, and each of the first and second sub-driving electrodes 1291
  • the electrode 1292 is also a strip-shaped sub-electrode extending along the first direction.
  • the first sub-driving electrode 1291 may be a metal layer formed by a patterning process
  • the second sub-driving electrode 1292 may be a metal layer formed by an electroplating process.
  • the size range of the retaining wall 124 in the direction perpendicular to the piezoelectric material layer 130 is 1-20 microns
  • the size range of the second electrode layer 120 in the direction perpendicular to the piezoelectric material layer 130 is 1-20 microns. Since the thickness of the second electrode layer 120 is relatively thick, the resistance of the second electrode layer 120 is relatively small, and the surface uniformity is relatively good, so that better electrical performance can be achieved (for example, higher driving voltage is applied). It can also realize the uniform reflection of ultrasonic waves, which is conducive to the identification of the valleys and ridges of the fingerprint.
  • the material of the strip-shaped driving electrode includes one or more of copper, silver, and aluminum.
  • the material of the strip-shaped receiving electrode may also include one or more of copper, silver and aluminum.
  • the retaining wall 124 may be made of resin material, which may have a lower cost and lower manufacturing difficulty.
  • the fingerprint identification structure 100 further includes: a substrate 180 located on the side of the first electrode layer 110 away from the piezoelectric material layer 130, and includes a contact configured to contact the fingerprint ⁇ 181.
  • the fingerprint identification structure 100 can recognize the fingerprint by emitting ultrasonic waves to the fingerprint and receiving the ultrasonic waves (echoes) reflected by the fingerprint 500.
  • the substrate 180 may be a cover plate of the display device.
  • the substrate 180 includes a glass substrate.
  • the substrate 180 includes a polyimide substrate.
  • the substrate 180 can be made thinner, and the thickness of the substrate 180 ranges from 5-20 microns.
  • a polyimide layer can be formed on the glass substrate first, and then the first electrode layer, the piezoelectric material layer, and the second electrode can be formed on the polyimide layer. Layer and other layer structures, and finally remove the glass substrate to obtain the fingerprint recognition structure described in this example.
  • the fingerprint recognition structure 100 further includes a protective layer 190 located on the side of the second electrode layer 120 away from the piezoelectric material layer 130.
  • the protection layer 190 may protect the strip-shaped driving electrodes 122 in the second electrode layer 120.
  • the material of the protective layer 190 may be epoxy resin.
  • FIG. 11 is a schematic plan view of a fingerprint identification structure according to an embodiment of the present disclosure.
  • the fingerprint identification structure 100 further includes a plurality of receiving circuits 150, and the plurality of receiving circuits 150 are respectively electrically connected to a plurality of strip-shaped receiving electrodes 112.
  • the fingerprint identification structure 100 includes an effective identification area 101 and an effective identification area 101. In the edge area 102 around the area 101, multiple crossing areas 130 are located in the effective identification area 101, and multiple receiving circuits 150 are located in the edge area 102. At this time, one strip-shaped receiving electrode 112 corresponding to multiple crossing areas 130 is connected to only one receiving circuit 150, and there is no need to provide a receiving circuit 150 in each crossing area 130, thereby greatly reducing the film layer of the fingerprint identification structure.
  • the above-mentioned effective identification area is an area where the fingerprint identification structure can perform fingerprint identification; when the fingerprint is located in the effective identification area, the fingerprint identification structure can identify the fingerprint; while the edge area cannot perform fingerprint identification.
  • FIG. 12 is a schematic diagram of a receiving circuit according to an embodiment of the present disclosure.
  • the receiving circuit 150 includes a storage capacitor 151, a first thin film transistor 152, and a signal reading unit 153.
  • the storage capacitor 151 includes a first electrode 1511 and a second electrode 1512;
  • the first thin film transistor 152 includes a first gate 1521, a first source 1522, and a first drain 1523; a strip-shaped receiving electrode 112, a first source 1522, and
  • the first pole 1511 is connected to the storage node 154, so that the fingerprint electrical signal received by the strip-shaped receiving electrode 112 can be stored in the storage capacitor 151, and the signal reading unit 153 is configured to read the fingerprint electrical signal stored in the storage capacitor 151 ( Electrical signal), that is, the voltage signal received by the strip-shaped receiving electrode 112.
  • a bias voltage can be applied to the first drain 1523, so that the alternating voltage received by the receiving electrode 112 is raised. , Obtain the detection signal with larger contrast.
  • the first thin film transistor 152 is an oxide thin film transistor, such as an indium gallium zinc oxide (IGZO) thin film transistor.
  • IGZO indium gallium zinc oxide
  • the voltage of the storage node 154 will leak from the piezoelectric structure corresponding to the strip receiving electrode 112 and the first thin film transistor.
  • the magnitude of the leakage current of the structure is 10 -15 A
  • the magnitude of the leakage current of the low-temperature polysilicon thin film transistor is 10 -12 A
  • the magnitude of the leakage current of an oxide thin film transistor, such as IGZO thin film transistor is 10 -15 A.
  • the oxide thin film transistor can reduce the overall leakage current of the driving circuit, thereby ensuring the stability of the fingerprint electrical signal on the storage node 154, thereby improving the fingerprint recognition performance of the fingerprint recognition structure.
  • the signal reading unit 153 includes: a second thin film transistor 155 and a third thin film transistor 156; the second thin film transistor 155 includes a second gate 1551, a second source 1552, and a second drain 1553;
  • the third thin film transistor 156 includes a third gate 1561, a third source 1562, and a third drain 1563.
  • the second gate 1551 is connected to the storage node 154
  • the second drain 1553 is connected to the third source 1562
  • the second source 1552 is configured to apply a fixed voltage
  • the third gate 1561 is configured to apply a read command signal
  • the third drain 1563 is configured to output a signal so that the detection signal (electric signal) stored in the storage capacitor 151 can be read.
  • FIG. 13 is a schematic structural diagram of a display device according to an embodiment of the present disclosure.
  • the display device includes a display module 200 and the fingerprint identification structure 100 provided in the above embodiment. Since the fingerprint recognition structure can use multiple strip-shaped drive electrodes, multiple strip-shaped receiving electrodes and piezoelectric material layers to realize the transmission and reception of ultrasonic waves through scanning drive mode, there is no need to set up a receiving circuit in each crossing area, so The number of film layers in the fingerprint identification structure can be reduced to increase the light transmittance of the fingerprint identification structure. Therefore, the display device can arrange the fingerprint identification structure on the light-emitting side of the display panel, thereby reducing the function of the fingerprint identification structure.
  • the structure of the fingerprint identification structure is simple, so the cost of the display device is low.
  • the display device can also realize the focusing of the ultrasonic wave (increasing interference) by driving the above-mentioned multiple strip-shaped drive electrodes separately, so as to increase the intensity or energy of the emitted ultrasonic wave in a specific area, thereby improving the fingerprint
  • the recognition performance can also make the emitted ultrasonic waves have better directivity, thereby reducing the crosstalk between the valleys and ridges of the fingerprint, thereby improving the fingerprint recognition performance.
  • the fingerprint recognition structure improves the intensity or energy of the emitted ultrasonic waves in a specific area or a specific direction by realizing the focusing of ultrasonic waves (phase-increasing interference), the fingerprint recognition structure can not only realize fingerprint recognition, but also penetrate the finger to distinguish the Whether the fingerprint is real skin. For details, please refer to the relevant description of the foregoing embodiment, which is not repeated here.
  • the display module 200 includes a light-emitting side 220, and the fingerprint recognition structure 100 is located on the light-emitting side 220 of the display module 200.
  • the display module 200 is an organic light emitting diode (OLED) display module.
  • OLED organic light emitting diode
  • the display module 200 includes a thin film transistor 250, an anode 260, a light emitting layer 270, and a cathode 280.
  • the thin film transistor 250 includes a drain 253, the anode 260 is electrically connected to the drain 253, and the light-emitting layer 270 is disposed between the anode 260 and the cathode 280.
  • the thin film transistor 250 further includes a gate 251, a source 252, and an active layer 254.
  • the display module 200 includes a black matrix or pixel defining layer 230, the orthographic projection of the strip-shaped driving electrodes 122 and the strip-shaped receiving electrodes 112 on the display module 200 and the black matrix or pixel defining layer 230 at least partially overlap.
  • FIG. 14 is a schematic plan view of a display device according to an embodiment of the present disclosure.
  • the display module 200 includes a display area 201 and a peripheral area 202 located in the display area 201.
  • the fingerprint recognition structure 100 also includes: a plurality of receiving circuits, each of which is electrically connected to a plurality of strip-shaped receiving electrodes. Connected, each receiving circuit includes: a storage capacitor including a first electrode and a second electrode; a first thin film transistor including a first gate, a first source, and a first drain; and a signal reading unit, and a strip-shaped receiving electrode
  • the first source electrode and the first electrode are connected to the storage node, and the signal reading unit is configured to read the electrical signal stored in the storage capacitor.
  • multiple crossing areas 130 are located in the display area 201, and the orthographic projections of the multiple receiving circuits 150 on the display module 200 are located in the peripheral area 202.
  • the display area 201 is used for displaying images, and the peripheral area 202 is not displayed. Therefore, the intersection area 130 has only three film layers (strip drive electrode, piezoelectric material layer and strip reception electrode), which has a high light transmittance. Therefore, the intersection area 130 is arranged in the display area 201 to display The impact is small, and the power of the fingerprint identification structure can also be reduced, thereby reducing the power consumption of the fingerprint identification structure.
  • the receiving circuit has more layers and low transmittance, so arranging the receiving circuit in the peripheral area will not affect the display.
  • the display device provided in this example can take into account both better light transmittance and better electrical signal quality.
  • the present disclosure includes but is not limited to this, and the fingerprint identification structure can also be completely arranged in the peripheral area of the display panel. It should be noted that the structure and location of the receiving circuit can be referred to the related descriptions of FIG. 11 and FIG. 12.
  • the display device may be an electronic device with a display function such as a television, a mobile phone, a computer, a notebook computer, an electronic photo album, and a navigator.
  • a display function such as a television, a mobile phone, a computer, a notebook computer, an electronic photo album, and a navigator.
  • FIG. 15 shows a driving method of a fingerprint identification structure according to an embodiment of the present disclosure.
  • the plurality of strip-shaped drive electrodes are divided into a plurality of strip-shaped drive electrode groups arranged in sequence, each strip-shaped drive electrode group includes N strip-shaped drive electrodes, and two adjacent strip-shaped drive electrode groups N-1 strip drive electrodes are shared, and N is a positive integer greater than or equal to 1.
  • the driving method for fingerprint recognition includes the following steps S301-S302.
  • Step S301 sequentially applying driving voltages to the plurality of strip-shaped driving electrode groups to respectively drive the piezoelectric material layers corresponding to the plurality of strip-shaped driving electrode groups to emit ultrasonic waves.
  • an alternating voltage may be applied to a plurality of strip-shaped driving electrode groups in sequence.
  • Step S302 using the piezoelectric material layer to receive the ultrasonic waves reflected by the fingerprint and output corresponding fingerprint electrical signals through the plurality of strip-shaped receiving electrodes.
  • the plurality of strip-shaped driving electrodes are divided into a plurality of strip-shaped driving electrode groups arranged in sequence, and each strip-shaped driving electrode group includes N strip-shaped driving electrodes, adjacent The two strip-shaped drive electrode groups share N-1 strip-shaped drive electrodes, and N is a positive integer greater than or equal to 1.
  • N is a positive integer greater than or equal to 1.
  • each strip-shaped driving electrode group includes one strip-shaped driving electrode; when N ⁇ 2, each strip-shaped driving electrode group includes at least two strip-shaped driving electrodes.
  • the driving method of the fingerprint identification structure can utilize a plurality of strip-shaped driving electrodes, a plurality of strip-shaped receiving electrodes, and a piezoelectric material layer to respectively realize the transmission and reception of ultrasonic waves through a scanning driving manner.
  • the driving method of the fingerprint identification structure does not need to receive the reflection echo in each intersection area, so the number of film layers in the fingerprint identification structure can be reduced to increase the light transmittance of the fingerprint identification structure, so that the The fingerprint identification structure can be arranged on the display panel, thereby reducing the power consumption of the fingerprint identification structure.
  • each strip-shaped driving electrode group includes a first strip-shaped driving electrode and a second strip-shaped driving electrode
  • applying a driving voltage to each strip-shaped driving electrode group includes: At the first time point, a driving voltage is applied to the first strip-shaped driving electrode to drive the piezoelectric material layer corresponding to the first strip-shaped driving electrode to emit ultrasonic waves; and at the second time point, a driving voltage is applied to the second strip-shaped driving electrode to make the The phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the two strip-shaped driving electrodes is delayed from the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip-shaped driving electrode, and the second time point is delayed from the first time point.
  • the strip-shaped driving electrode group can be driven by a delay.
  • the second strip-shaped drive electrode in the drive to achieve the focus of the ultrasound (phase-increasing interference), which can improve the intensity or energy of the emitted ultrasound in a specific area, thereby improving the fingerprint recognition performance, and also make the emitted ultrasound have better
  • the directivity of the fingerprint can reduce the crosstalk between the valleys and ridges of the fingerprint, thereby improving the fingerprint recognition performance.
  • the fingerprint recognition structure improves the intensity or energy of the emitted ultrasonic waves in a specific area or a specific direction by realizing the focusing of ultrasonic waves (phase-increasing interference), the fingerprint recognition structure can not only realize fingerprint recognition, but also penetrate the finger to distinguish the Whether the fingerprint is real skin.
  • the phase delay of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip-shaped driving electrode and the phase delay of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip-shaped driving electrode can be obtained by testing according to actual conditions.
  • the specific ultrasonic focusing process please refer to the related description of FIG. 6A.
  • the piezoelectric material layer corresponding to each strip-shaped driving electrode group is driven to emit ultrasonic waves
  • the piezoelectric material layer is used to receive the reflected echo, and then electrical signals are output through the plurality of strip-shaped receiving electrodes.
  • each strip-shaped driving electrode group includes a first strip-shaped driving electrode, a second strip-shaped driving electrode, and a third strip-shaped driving electrode.
  • the group of applying driving voltage includes: applying a driving voltage to the first strip-shaped driving electrode and the third strip-shaped driving electrode at the first time point to drive the piezoelectric material layer corresponding to the first strip-shaped driving electrode and the third strip-shaped driving electrode to emit Ultrasound; and applying a driving voltage to the second strip-shaped drive electrode at the second time point to delay the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip-shaped drive electrode from the first strip-shaped drive electrode and the third strip-shaped drive The piezoelectric material layer corresponding to the electrode emits the phase of ultrasonic waves, and the second time point is delayed from the first time point.
  • the strip-shaped driving electrode group can be driven first.
  • the first strip-shaped drive electrode and the third strip-shaped drive electrode in the strip drive electrode group, and the second strip-shaped drive electrode in the strip-shaped drive electrode group is driven to achieve the focus (phase-increasing interference) of the ultrasound, so as to improve the emitted
  • the intensity or energy of the ultrasonic wave in a specific area can improve the fingerprint recognition performance, and also make the emitted ultrasonic wave have better directivity, thereby reducing the crosstalk between the valleys and ridges of the fingerprint, thereby improving the fingerprint recognition performance.
  • the fingerprint recognition structure improves the intensity or energy of the emitted ultrasonic waves in a specific area or a specific direction by realizing the focusing of ultrasonic waves (phase-increasing interference), the fingerprint recognition structure can not only realize fingerprint recognition, but also penetrate the finger to distinguish the Whether the fingerprint is real skin. It should be noted that the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the second strip-shaped drive electrode and the phase of the ultrasonic wave emitted by the piezoelectric material layer corresponding to the first strip-shaped drive electrode and the third strip-shaped drive electrode can be delayed by Tested according to the actual situation. For the specific ultrasonic focusing process, refer to the related description of FIG. 6B.
  • the fingerprint recognition structure further includes: a plurality of receiving circuits, and the plurality of receiving circuits are respectively electrically connected to a plurality of strip-shaped receiving electrodes, wherein each receiving circuit includes: a storage capacitor including a first electrode and a second electrode.
  • the fetching unit is configured to read the electrical signal stored in the storage capacitor, using the piezoelectric material layer to receive the ultrasonic wave reflected by the fingerprint and output the corresponding fingerprint electrical signal through the strip-shaped receiving electrode, including: applying a driving voltage to the strip-shaped driving electrode group to When the piezoelectric material layer corresponding to the driving strip-shaped driving electrode group emits ultrasonic waves, an on signal is applied to the first gate to turn on the first thin film transistor to eliminate aftershock; according to the arrival time of the surface echo, a bias is applied to the first drain Voltage to raise the fingerprint electrical signal on the strip-shaped receiving electrode and store the raised fingerprint electrical signal in the storage capacitor; and use the signal reading unit to read the raised fingerprint electrical signal.
  • the ultrasonic wave in order to reduce the noise signal, when the fingerprint does not touch the fingerprint recognition structure, the ultrasonic wave can be transmitted first and the reflected echo can be received to obtain a base value; then, when the fingerprint touches the fingerprint recognition structure At the time, the ultrasonic wave is transmitted and the reflected echo is received to obtain a fingerprint electrical signal; the fingerprint electrical signal is subtracted from the reference value, thereby removing the influence of noise.
  • An embodiment of the present disclosure also provides a method for manufacturing a fingerprint identification structure.
  • the manufacturing method includes: providing a base substrate; forming a first electrode layer on one side of the base substrate; the first electrode layer includes a plurality of receiving and driving electrodes arranged at intervals; and forming the first electrode layer on the side away from the base substrate A piezoelectric material layer; and a second electrode layer is formed on the side of the piezoelectric material layer away from the first electrode layer, the second electrode layer includes a plurality of strip-shaped drive electrodes arranged along intervals, and each strip-shaped drive electrode extends along the first direction , Each strip-shaped receiving electrode extends along the second direction, the first direction and the second direction intersect, the plurality of strip-shaped driving electrodes and the plurality of strip-shaped receiving electrodes cross each other to form a plurality of crossing regions, and the piezoelectric material layer is at least The intersection areas overlap.
  • forming the first electrode layer on one side of the base substrate may directly form the first electrode layer including a plurality of strip-shaped receiving electrodes on one side of the base substrate through a patterning process.
  • the material of the first electrode layer can be a metal material.
  • forming the second electrode layer on the side of the piezoelectric material layer away from the first electrode layer includes: forming a plurality of first sub-driving electrodes through a patterning process, and each first sub-driving electrode is a stripe extending along the first direction.
  • An electrode forming a barrier between adjacent first sub-driving electrodes; and forming a plurality of first sub-driving electrodes on the side away from the substrate and the plurality of first strip-shaped driving electrodes by an electroplating process
  • a second sub-driving electrode the height of the retaining wall in the direction perpendicular to the second electrode layer is greater than the height of the first sub-driving electrode in the direction perpendicular to the second electrode layer, a plurality of first sub-driving electrodes and a plurality of The second sub-driving electrodes constitute a plurality of driving electrodes, so that a second electrode layer with a larger thickness can be formed, thereby generating ultrasonic waves with higher intensity.
  • the thickness of the second electrode layer is greater than 10 microns, so that it is suitable for applying a higher voltage.
  • a plurality of first sub-driving electrodes can be formed on the side of the piezoelectric material layer away from the first electrode layer.
  • the first sub-driving electrodes do not need to be made thicker, for example, the thickness of the first sub-driving electrodes
  • the range is 0.4-1 micron; then, a plurality of second sub-driving electrodes are formed by electroplating on the plurality of first sub-driving electrodes by a barrier wall and an electroplating process, thereby obtaining a thicker driving electrode.
  • the metal layer under the action of the electric field, the metal layer can only continue to grow on the patterned metal layer, and the retaining wall can serve as a partition to prevent the electroplated metal layers from being connected to each other.
  • the material of the second electrode includes one or more of copper, silver, and aluminum.
  • the retaining wall can be made of resin material, which can have lower cost and lower manufacturing difficulty.

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Abstract

L'invention concerne une structure de reconnaissance d'empreintes digitales, un procédé d'excitation d'une structure de reconnaissance d'empreintes digitales, et un dispositif d'affichage. La structure de reconnaissance d'empreintes digitales (100) comporte une première couche (110) d'électrodes, une couche (130) de matériau piézoélectrique et une seconde couche (120) d'électrodes. La première couche (110) d'électrodes comporte une pluralité d'électrodes (112) de réception en forme de bandes disposées par intervalles. La couche (130) de matériau piézoélectrique est située d'un côté de la première couche (110) d'électrodes. La seconde couche (120) d'électrodes est située d'un côté de la couche (130) de matériau piézoélectrique à l'écart de la première couche (110) d'électrodes et comporte une pluralité d'électrodes (122) d'excitation en forme de bandes disposées par intervalles. Les électrodes (122) d'excitation en forme de bandes s'étendent suivant une première direction. Les électrodes (112) de réception en forme de bandes s'étendent suivant une seconde direction. La première direction croise la seconde direction. La pluralité d'électrodes (122) d'excitation en forme de bandes et la pluralité d'électrodes (112) de réception en forme de bandes se croisent pour former une pluralité de zones (140) d'intersection. La couche (130) de matériau piézoélectrique recouvre au moins la pluralité de zones (140) d'intersection.
PCT/CN2020/076766 2019-03-15 2020-02-26 Structure de reconnaissance d'empreintes digitales et son procédé d'excitation, et dispositif d'affichage WO2020186983A1 (fr)

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