WO2020186734A1 - 一种柔性微型机器人 - Google Patents

一种柔性微型机器人 Download PDF

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Publication number
WO2020186734A1
WO2020186734A1 PCT/CN2019/110625 CN2019110625W WO2020186734A1 WO 2020186734 A1 WO2020186734 A1 WO 2020186734A1 CN 2019110625 W CN2019110625 W CN 2019110625W WO 2020186734 A1 WO2020186734 A1 WO 2020186734A1
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flexible
flexible member
micro
robot
active
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PCT/CN2019/110625
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English (en)
French (fr)
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张旻
吴一川
王晓浩
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清华大学深圳国际研究生院
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Publication of WO2020186734A1 publication Critical patent/WO2020186734A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements

Definitions

  • the invention relates to the field of robots, in particular to a flexible micro robot.
  • micro robots are often used to participate in field work.
  • micro robots with sizes ranging from millimeters to centimeters each additional milligram Quality will also have a vital impact on the robot motion system. Therefore, in order to improve the efficiency of on-site operations, it is very necessary to provide a micro-robot with a light structure and a fast moving speed.
  • the structure of the micro-robot is generally designed to be more complicated and the production cost is high.
  • the embodiment of the present invention provides a flexible micro-robot, which is used to improve the motion speed of the micro-robot while simplifying the structure and reducing the cost.
  • the flexible micro-robot includes:
  • Active flexible parts and passive flexible parts that fit up and down, and the first support;
  • the active flexible member is used to extend or contract under the action of external force
  • the passive flexible member is used to bend or expand toward the bottom under the drive of the active flexible member
  • the first support member is arranged on one side of the bottom of the passive flexible member and has a first preset angle with the ground.
  • the active flexible element is made of piezoelectric material, and the passive flexible element is made of non-piezoelectric material;
  • the flexible micro-robot further includes: a conductive layer disposed on the upper and lower opposite surfaces of the active flexible member;
  • the active flexible member is used to connect to AC power and stretch or contract under the action of the AC driving voltage.
  • the material of the active flexible member is polyvinylidene fluoride.
  • the passive flexible member is made of polyterephthalic acid plastic or polyimide.
  • the flexible micro-robot further includes: a second support member, which is arranged on the other side of the bottom of the passive flexible member and has a second preset angle with the ground.
  • the degree of the first preset included angle and the second preset included angle is 20°-80°.
  • the thickness of the conductive layer is 20 nm-50 nm.
  • the thickness of the active flexible member is 15 ⁇ m-30 ⁇ m.
  • the bending angle of the active flexible member and the passive flexible member is 30°-60°.
  • the passive flexible member and the first support member are connected in an adhesive manner.
  • the active flexible member and the passive flexible member are provided, and the active flexible member is extended or shortened under the action of external force.
  • the passive flexible member is driven by the active flexible member to bend or expand toward the bottom, which ensures that the During the operation, the active flexible member can be controlled to extend or contract by external force, and the passive flexible member can be driven to bend or relax, and then continuously move on the ground under the support of the first support member. Since the first support member and the ground have a first preset angle, the flexible micro robot can move quickly on the ground. It can be seen that the flexible micro-robot provided by the embodiment of the present invention has a simple structure, low manufacturing cost, and can increase the motion speed of the micro-robot.
  • Fig. 1 is a schematic diagram of the structure of a flexible micro-robot in an embodiment of the present invention
  • Figure 2 is an example diagram of displacement test data in an embodiment of the present invention.
  • Figure 3 is an example diagram of a frequency test comparison in an embodiment of the present invention.
  • Fig. 4 is a comparative example diagram of a pressure test in the embodiment of the present invention.
  • the flexible micro-robot includes: an active flexible part 1 and a passive flexible part 2 that are attached up and down, and a first support 3.
  • the active flexible member 1 is used to extend or contract under external force.
  • the passive flexible member 2 is used to bend or relax toward the bottom under the action of the active flexible member 1.
  • the first supporting member 3 is arranged on one side of the bottom of the passive flexible member 2 and has a first preset angle with the ground.
  • external force here, external force includes: light energy, electric energy or temperature, etc.
  • external force includes: light energy, electric energy or temperature, etc.
  • the external force is controlled to continuously change, so that the active flexible member 1 continuously repeats the action of extending or contracting, which in turn drives the passive flexible member 2 to continuously bend or expand towards the bottom, under the support of the first support 3 .
  • the movement of the flexible micro-robot on the ground can be realized (because there is the first support 3, after the flexible micro-robot is deformed, its front and back friction is unbalanced, then the flexible micro-robot will perform unidirectional movement).
  • the flexible micro robot can be used as a carrier (for example, some sensors are installed on the flexible micro robot).
  • the flexible micro-robot provided by the embodiment of the present invention is provided with an active flexible part 1 and a passive flexible part 2, and the active flexible part 1 is extended or contracted under the action of an external force, and the passive flexible part 2 is driven downward by the active flexible part 1
  • the bottom bends or relaxes, ensuring that in subsequent operations, the active flexible member 1 can be controlled to extend or contract by external force, and drive the passive flexible member 2 to bend or relax, and then be on the ground under the support of the first support 3 Keep moving. Since the first support 3 has a first preset angle with the ground, the flexible micro-robot can move quickly on the ground. It can be seen that the flexible micro-robot provided by the embodiment of the present invention has a simple structure, low manufacturing cost, and can increase the motion speed of the micro-robot.
  • the structure of the first support 3 may be various, for example, it may be a rod structure, a column structure, or the like.
  • the bending angle of the active flexible part 1 and the passive flexible part 2 can be set to 30°-60° (such as 30°, 45°, 50°, etc.).
  • the active flexible element 1 uses piezoelectric materials
  • the passive flexible element 2 uses non-piezoelectric materials.
  • the flexible micro robot further includes: a conductive layer 4.
  • the conductive layer 4 is arranged on the upper and lower opposite surfaces of the active flexible member 1.
  • the active flexible member 1 is used to connect to alternating current and expand or contract under the action of the alternating current driving voltage.
  • the conductive layer 4 it is equivalent to providing a protective energy absorbing layer for the active flexible member 1, which has better covering and protection performance.
  • the thickness of the conductive layer 4 is 20nm-50nm (such as 20nm, 30nm, 35nm, etc.).
  • the flexible micro-robot if one end of the flexible micro-robot is fixed, it is regarded as a cantilever beam.
  • the deformation of the cantilever beam under static voltage driving can be derived, and the derivation formula is as follows:
  • the robot reaches a speed of 20 cm/s (20 positions/second), which is higher than the speeds at 800 Hz and 900 Hz, indicating that resonance is a more effective way of robot movement.
  • the flexible micro-robot can still maintain the function of movement even after being subjected to a pressure of 59.5 kg and a large body deformation. For details, see FIG. 4.
  • the material of the active flexible member 1 may be polyvinylidene fluoride (PVDF for short).
  • the material of the passive flexible part 2 can be polyethylene terephthalate (polyethylene terephthalate, abbreviated as Polyethylene terephthalate). PET) or polyimide (Polyimide, PI for short).
  • the active flexible member 1 may be a thin film structure, and its thickness may be 15 ⁇ m-30 ⁇ m (15 ⁇ m, 20 ⁇ m, 25 ⁇ m, etc.).
  • the flexible micro robot further includes: a second support.
  • the second supporting member is arranged on the other side of the bottom of the passive flexible member 2 and has a second preset angle with the ground.
  • the “other side” refers to the side opposite to the first support 3.
  • adding a second support member on the other side of the bottom of the passive flexible member 2 is equivalent to adding a power member.
  • the first support member 3 and the second support member support the ground at the same time.
  • the process is similar to that of a horse.
  • it can achieve the effect of galloping by constantly changing its movement speed, that is, leaving the ground briefly during the movement, so as to adapt to various complex geographic environments.
  • the degree of the first preset angle and the second preset angle may be 20°-80° (such as 30°, 50°, 70°, etc.).
  • the passive flexible member 2 and the first supporting member 3 may be connected in an adhesive manner.
  • the material of the first support 3 can be set to be the same as the passive flexible member 2, that is, the first support 3 can be folded so as to adjust the angle between it and the ground at any time.
  • PVDF as the active flexible part 1
  • PET as the passive flexible part 2
  • a 3 cm long and 1.5 cm wide mask plate with a hollow square pattern is produced, which is used as a mask for vapor deposition of metal on the flexible piezoelectric film PVDF.
  • gold with a thickness of 20 nm is deposited on both sides of the PVDF with a thickness of 20 ⁇ m by evaporation or sputtering.
  • double-sided gilding use a laser cutter or paper cutter to cut the vapor-deposited square pattern with a length of 3 cm and a width of 1.5 cm. Use the same cutting machine to cut the PET film with glue on one side without piezoelectric properties into square patterns of the same size.
  • the two surfaces of the PVDF are fixed with wires respectively, and the side with PET tape is glued to the double-full PVDF film to form the skeleton of the robot.
  • the plane skeleton is placed on a 3D printed surface, and the plane skeleton dog is formed into an arched three-dimensional surface with a curvature of 45 degrees by hot pressing. Fold into an angle with PET, stick to one end of the arched three-dimensional curved surface to form the leg, and the angle between the leg and the ground is 70 degrees.
  • the drive circuit board outputs an adjustable AC signal.
  • the mass of the manufactured flexible micro-robot is less than 0.1g.
  • the upper and lower surfaces of the PVDF are connected to the positive and negative poles of the external power supply.
  • the positive pole provides AC voltage with a peak-to-peak value of 50V to 200V.
  • the negative pole can be grounded.
  • the present invention uses a simple manufacturing process and structural design to realize the rapid movement of the flexible micro-robot; and after large pressure and deformation, the robot can still maintain the ability of continuous movement, indicating that the flexible micro-robot has good The stability and robustness.

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Toys (AREA)

Abstract

一种柔性微型机器人，包括：上下贴合的主动柔性件（1）和被动柔性件（2），以及第一支撑件（3）；主动柔性件用于在外力作用下伸长或缩短；被动柔性件用于在主动柔性件的带动下向底部弯曲或舒张；第一支撑件设置在被动柔性件底部的一侧，且与地面具有第一预设夹角。其可以在提高微型机器人运动速度的同时，简化结构，降低成本。

Description

一种柔性微型机器人 技术领域
本发明涉及机器人领域，尤其涉及一种柔性微型机器人。
背景技术
在极端环境探索，军事信息侦探，灾难搜寻和救援等场景下，由于地形原因，经常会使用到微型机器人参与现场工作，而对于毫米至厘米级尺寸大小的微型机器人来说，每增添一毫克的质量也会对机器人运动系统产生至关重要的影响。因此，为了提高现场作业效率，提供一种结构轻巧，运动速度快的微型机器人是十分必要的。
现有技术为了提高微型机器人的运动速度，一般会将微型机器人的结构设计的较为复杂，制作成本较高。
发明内容
本发明实施例提供一种柔性微型机器人，用以在提高微型机器人运动速度的同时，简化结构，降低成本，该柔性微型机器人包括：
上下贴合的主动柔性件和被动柔性件，以及第一支撑件；
所述主动柔性件用于在外力作用下伸长或缩短；
所述被动柔性件用于在所述主动柔性件的带动下向底部弯曲或舒张；
所述第一支撑件设置在所述被动柔性件底部的一侧，且与地面具有第一预设夹角。
可选的，所述主动柔性件采用压电材料，所述被动柔性件采用非压电材料；
所述柔性微型机器人还包括：导电层，设置在所述主动柔性件的上下相对面上；
所述主动柔性件用于接入交流电，并在交流驱动电压的作用下伸长或缩短。
可选的，所述主动柔性件的材质为聚偏氟乙烯。
可选的，所述被动柔性件的材质为聚对苯二甲酸类塑料或聚酰亚胺。
可选的，该柔性微型机器人还包括：第二支撑件，设置在所述被动柔性件底部的另一侧，且与地面具有第二预设夹角。
可选的，所述第一预设夹角和所述第二预设夹角的度数为20°-80°。
可选的，所述导电层的厚度为20nm-50nm。
可选的，所述主动柔性件的厚度为15μm-30μm。
可选的，所述主动柔性件和所述被动柔性件的弯曲角度为30°-60°。
可选的，所述被动柔性件和所述第一支撑件以粘贴的方式相连接。
本发明实施例中，通过设置主动柔性件和被动柔性件，并使主动柔性件在外力作用下伸长或缩短，被动柔性件在主动柔性件的带动下向底部弯曲或舒张，保证了在后续的作业中，可以通过外力控制主动柔性件伸长或缩短，并带动被动柔性件弯曲或舒张，进而在第一支撑件的支撑作用下在地面上不断运动。由于第一支撑件与地面具有第一预设夹角，因此，柔性微型机器人在地面上能够快速运动。可见，本发明实施例提供的柔性微型机器人结构简单，制作成本较低，且能够提高微型机器人的运动速度。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。在附图中：
图1为本发明实施例中柔性微型机器人的结构示意图；
图2为本发明实施例中的位移试验数据示例图；
图3为本发明实施例中的频率试验对比示例图；
图4为本发明实施例中的承压试验对比示例图。
附图标号如下：
1      主动柔性件，
2      被动柔性件，
3      第一支撑件，
4      导电层。
具体实施方式
为使本发明实施例的目的、技术方案和优点更加清楚明白，下面结合附图对本发明实 施例做进一步详细说明。在此，本发明的示意性实施例及其说明用于解释本发明，但并不作为对本发明的限定。
本发明实施例提供了一种柔性微型机器人，如附图1所示，该柔性微型机器人包括：上下贴合的主动柔性件1和被动柔性件2，以及第一支撑件3。主动柔性件1用于在外力作用下伸长或缩短。被动柔性件2用于在主动柔性件1的作用下向底部弯曲或舒张。第一支撑件3设置在被动柔性件2底部的一侧，且与地面具有第一预设夹角。
当需要控制柔性微型机器人在地面上运动时，利用外力(此处的外力包括：光能、电能或温度等)使主动柔性件1发生伸长或缩短，进而带动被动柔性件2向底部弯曲或舒张，在此过程中，控制外力不断变化，使主动柔性件1不断重复进行伸长或缩短的动作，进而带动被动柔性件2不断向底部弯曲或舒张，在第一支撑件3的支撑作业下，即可实现柔性微型机器人在地面上的运动(因为存在第一支撑件3，所以在柔性微型机器人发生变形后，其前后摩擦力是不平衡的，这时该柔性微型机器人就会进行单向运动)。在作业过程中，根据实际需要，可以将柔性微型机器人作为载体(例如，在柔性微型机器人上安装一些传感器)。
本发明实施例提供的柔性微型机器人，通过设置主动柔性件1和被动柔性件2，并使主动柔性件1在外力作用下伸长或缩短，被动柔性件2在主动柔性件1的带动下向底部弯曲或舒张，保证了在后续的作业中，可以通过外力控制主动柔性件1伸长或缩短，并带动被动柔性件2弯曲或舒张，进而在第一支撑件3的支撑作用下在地面上不断运动。由于第一支撑件3与地面具有第一预设夹角，因此，柔性微型机器人在地面上能够快速运动。可见，本发明实施例提供的柔性微型机器人结构简单，制作成本较低，且能够提高微型机器人的运动速度。
其中，第一支撑件3的结构可以为多种，举例来说，其可以为杆体结构、柱状结构等。
为了保证柔性微型机器人的运动速度，可以将主动柔性件1和被动柔性件2的弯曲角度设置为30°-60°(如30°、45°、50°等)。
进一步地，主动柔性件1采用压电材料，被动柔性件2采用非压电材料。如附图1所示，柔性微型机器人还包括：导电层4。该导电层4设置在主动柔性件1的上下相对面上。主动柔性件1用于接入交流电，并在交流驱动电压的作用下伸长或缩短。
基于压电材料可以因电场发生机械变形，而非压电材料不受电的影响，通过采用压电材料和非压电材料相互配合，保证了主动柔性件1可以通过交流电时刻发生变形，而被动柔性件2可以随主动柔性件1的变化而变化。通过设置导电层4，相当于为主动柔性件1 提供了一层保护能量吸收层，其具有较好的遮盖防护性能。其中，导电层4的厚度为20nm-50nm(如20nm、30nm、35nm等)。
具体地，如果将柔性微型机器人的一端固定住，将其看作是一个悬臂梁，在此可以推导出在静态的电压驱动下，悬臂梁的变形情况，推导公式如下：
Figure PCTCN2019110625-appb-000001
Figure PCTCN2019110625-appb-000002
Figure PCTCN2019110625-appb-000003
Figure PCTCN2019110625-appb-000004
上述(1)、(2)、(3)、(4)中，ε为主动柔性件1的应变；t 1、t 2、t 3分别为主动柔性件1,导电层4和被动柔性件2的厚度；E1、E2、E3分别为主动柔性件1,导电层4和被动柔性件2的杨氏模量；U为驱动电压；d 31为压电系数；c为一个中间轴量；t b为一个厚度量。
通过公式(1)、(2)、(3)、(4)，我们可以计算出在某一电压下，悬臂梁自由端的位移量。具体示例数据如附图2所示，在不同的电压驱动之下，悬臂梁自由端的位移量与驱动电压的关系，理论推导结果与实际实验结果相似。在交流驱动电压之下，机器人身体发生变形，由于前后摩擦力的不平衡产生单方向的运动。在交流信号的驱动下，驱动频率应接近机器人的共振频率。在此频率附近，机器人的身体变形的振幅最大，运动速度最快。如附图3所示，在共振频率850Hz下，机器人达到20cm/s(20身位/秒)的速度，高于800Hz和900Hz下的速度，表明共振是比较有效的机器人运动的方式。此外，基于被动柔性件2和主动柔性件1的柔性材料，该柔性微型机器人在承受59.5kg的压力和身体大变形的情况下之后，仍然能够保持运动的功能，具体可参见附图4。
由于聚偏氟乙烯具有良好的耐化学性、加工性及抗疲劳和蠕变性，因此，主动柔性件1的材质可以为聚偏氟乙烯(Polyvinylidene fluoride，简称PVDF)。
基于聚对苯二甲酸类塑料和聚酰亚胺具有优良的耐磨耗摩擦性和尺寸稳定性及电绝缘性，被动柔性件2的材质可以为聚对苯二甲酸类塑料(Polyethylene terephthalate，简称 PET)或聚酰亚胺(Polyimide，简称PI)。
其中，主动柔性件1可以为薄膜结构，其厚度可以为15μm-30μm(15μm、20μm、25μm等)。
为了提高柔性微型机器人的运动速度，该柔性微型机器人还包括：第二支撑件。该第二支撑件设置在被动柔性件2底部的另一侧，且与地面具有第二预设夹角。其中，“另一侧”指的是与第一支撑件3相对的一侧。
可以理解的是，在被动柔性件2底部的另一侧增加第二支撑件相当于增加一个动力件，在柔性微型机器人运动时，第一支撑件3和第二支撑件同时支撑地面，其运动过程与马类似，在运动过程中通过不断改变其运动速度可以实现奔腾的效果，即在运动过程中短暂离开地面，从而适应各种复杂的地理环境。
进一步地，为了保证柔性微型机器人的运动速度，第一预设夹角和第二预设夹角的度数可以为20°-80°(如30°、50°、70°等)。
在本发明实施例中，被动柔性件2和第一支撑件3可以以粘贴的方式相连接。
通过如此设置，即可以保证被动柔性件2和第一支撑件3连接紧固，同时便于安装。
其中，第一支撑件3的材质可以设置为与被动柔性件2相同，即第一支撑件3可以进行折叠，以便随时调成其与地面之间的夹角。
下面以主动柔性件1采用PVDF、被动柔性件2采用PET为例对本发明的柔性微型机器人的制作过程进行说明：
首先，制作出镂空方形图案的长3cm、宽1.5cm的掩模板，用于作为在柔性压电薄膜PVDF上蒸镀金属的掩模。在掩模板下，通过蒸镀或者溅射的方式在厚度为20μm的PVDF两面分别蒸镀20nm厚度的金。在双面镀金之后，用激光切割机或者剪纸机将蒸镀好的长为3cm和宽为1.5cm的方形图案切割下来。用同样的切割机器将不具备压电性能的PET单面带胶的薄膜切割出相同尺寸的方形图案。在PVDF的两个表面分别用导线固定好，用PET带胶的一面与双满PVDF薄膜黏贴，形成机器人的骨架。将平面的骨架放在用3D打印的曲面上，通过热压的方式将平面骨架狗造成拱形的三维曲面，曲率为45度。用PET折叠成为一个角度，黏贴到拱形三维曲面的一端组成腿部，腿部与地面夹角为70度。将PVDF引出的两根导线分别接入驱动电路板的两个端子。驱动电路板输出可调的交流信号。制作好后的柔性微型机器人的质量小于0.1g。
作业时，PVDF的上下两个表面分别外接引线，连接到外界电源的正负极，正极提供交流电压，峰峰值为50V到200V区间，负极可接地。
综上，本发明利用简单的制作工艺和结构设计，实现了柔性微型机器人的快速运动；并且经过大压力和变形作用之后，机器人仍然能够保持连续运动的能力，表明了该柔性微型机器人具有较好的稳定性和鲁棒性。
以上所述的具体实施例，对本发明的目的、技术方案和有益效果进行了进一步详细说明，所应理解的是，以上所述仅为本发明的具体实施例而已，并不用于限定本发明的保护范围，凡在本发明的精神和原则之内，所做的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。

Claims (10)

  1. 一种柔性微型机器人，其特征在于，包括：上下贴合的主动柔性件(1)和被动柔性件(2)，以及第一支撑件(3)；
    所述主动柔性件(1)用于在外力作用下伸长或缩短；
    所述被动柔性件(2)用于在所述主动柔性件(1)的带动下向底部弯曲或舒张；
    所述第一支撑件(3)设置在所述被动柔性件(2)底部的一侧，且与地面具有第一预设夹角。
  2. 如权利要求1所述的柔性微型机器人，其特征在于，所述主动柔性件(1)采用压电材料，所述被动柔性件(2)采用非压电材料；
    所述柔性微型机器人还包括：导电层(4)，设置在所述主动柔性件(1)的上下相对面上；
    所述主动柔性件(1)用于接入交流电，并在交流驱动电压的作用下伸长或缩短。
  3. 如权利要求2所述的柔性微型机器人，其特征在于，所述主动柔性件(1)的材质为聚偏氟乙烯。
  4. 如权利要求2所述的柔性微型机器人，其特征在于，所述被动柔性件(2)的材质为聚对苯二甲酸类塑料或聚酰亚胺。
  5. 如权利要求2所述的柔性微型机器人，其特征在于，还包括：第二支撑件，设置在所述被动柔性件(2)底部的另一侧，且与地面具有第二预设夹角。
  6. 如权利要求5所述的柔性微型机器人，其特征在于，所述第一预设夹角和所述第二预设夹角的度数为20°-80°。
  7. 如权利要求2所述的柔性微型机器人，其特征在于，所述导电层(4)的厚度为20nm-50nm。
  8. 如权利要求1所述的柔性微型机器人，其特征在于，所述主动柔性件(1)的厚度 为15μm-30μm。
  9. 如权利要求1所述的柔性微型机器人，其特征在于，所述主动柔性件(1)和所述被动柔性件(2)的弯曲角度为30°-60°。
  10. 如权利要求1所述的柔性微型机器人，其特征在于，所述被动柔性件(2)和所述第一支撑件(3)以粘贴的方式相连接。
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