WO2020186557A1 - 一种组合靶件 - Google Patents

一种组合靶件 Download PDF

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Publication number
WO2020186557A1
WO2020186557A1 PCT/CN2019/081183 CN2019081183W WO2020186557A1 WO 2020186557 A1 WO2020186557 A1 WO 2020186557A1 CN 2019081183 W CN2019081183 W CN 2019081183W WO 2020186557 A1 WO2020186557 A1 WO 2020186557A1
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Prior art keywords
target
combined target
sliding rod
driving
mounting
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PCT/CN2019/081183
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English (en)
French (fr)
Inventor
钱铁威
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北京中百源国际科技创新研究有限公司
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Publication of WO2020186557A1 publication Critical patent/WO2020186557A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Definitions

  • the invention relates to a combined target.
  • the target can be understood to mean the material being sputtered in the cathode sputtering system.
  • Most of the sputtering targets used in the past are so-called flat targets that are configured in a circular or rectangular shape.
  • the flat target has the following disadvantages: only about 30% to 40% of the material constituting the flat target is effectively sputtered, its effective utilization rate is low, and the service life is short.
  • the currently used targets are all single targets, and in order to obtain a large number of sputtering sources, the irradiation beam is often optimized. However, the optimization of the irradiation beam often involves high cost and difficult problems.
  • the present invention proposes a combined target, which is composed of multiple single targets and can move in multiple directions, and is equipped with a cooling structure inside, which can not only be obtained at low cost
  • a large number of sputtering sources increase the utilization rate of the target and prolong its service life.
  • a combined target includes a target column and a mounting plate.
  • the mounting plate includes two mounting plates. The two mounting plates are spaced up and down.
  • the target column is arranged between the two mounting plates. The upper and lower ends of the target column are connected to each other.
  • Two mounting plates are connected, several target columns are connected between the two mounting plates, and adjacent target columns are arranged at intervals;
  • the target column includes a tubular target body, a tubular carrier body and a mounting column.
  • the carrier body is sleeved on the installation column, the target body is sleeved on the carrier body, and the carrier body is provided with a cooling cavity inside.
  • the carrier body is provided with a cooling liquid inlet and a cooling liquid outlet, and the cooling liquid inlet and the cooling liquid outlet are respectively communicated with the cooling cavity.
  • the present invention is further provided that the target body can be rotated around its central axis.
  • the present invention is further provided that the carrier body is fixedly connected with the mounting column, and the mounting column is connected with a driving device 1 for driving the rotation.
  • the present invention is further provided that the bearing body is rotatably connected with the mounting post, and further includes a driving mechanism for driving the bearing body to rotate.
  • the driving mechanism includes a gear one, a gear two, and a driving device two.
  • the gear one is coaxial with the carrier and arranged in linkage, the gear two meshes with the gear one, and the driving device two and the gear two
  • the connection is used to drive the two gears to rotate.
  • the present invention is further provided that the position of the combined target can be adjusted in the front, back, left, right, up and down directions, and the combined target can rotate around its central axis.
  • the present invention is further configured to include a sliding rod 1 and a sliding rod 2, the sliding rod 1 and the sliding rod 2 are arranged perpendicular to each other, the sliding rod 1 and the sliding rod 2 form a sliding fit, and the sliding rod 2 can slide along the length direction of the sliding rod 1.
  • the sliding rod one is provided with a driving device three that drives the sliding rod two to move, the sliding rod two is located above the combined target piece, and the mounting plate on the upper side is slidably connected to the sliding rod two, and the mounting plate can move along the sliding rod
  • the second sliding rod moves in the longitudinal direction, and the second sliding rod is provided with a driving device four for driving the sliding of the mounting plate; it also includes a fixed seat, the first sliding rod is fixedly connected to the lower side of the fixed seat, and the fixed seat is connected with the driving device Rotating driving device 5, a driving device 6 for driving it to move up and down is connected to the fixed base.
  • the present invention is further provided that the irradiation beam directed at the combined target at any angle in the horizontal direction will be completely blocked by the target column in the combined target.
  • the combined target provided by the present invention is composed of a plurality of single targets and can move in multiple directions, and is equipped with a cooling structure inside, which not only can obtain a large number of sputtering sources at low cost, but also improves The utilization rate of the target extends its service life.
  • the structure of a single target column is tubular. When the tubular target is used, the rotation of the tubular target can be adjusted so that the surface of the target can obtain a more uniform etching effect, and the etching area can basically cover the entire target surface by adjusting the position of the target body.
  • Figure 1 is a schematic diagram of the structure of the present invention
  • Figure 2 is a schematic diagram of the structure of the present invention.
  • Figure 3 is a schematic diagram of the structure of the target column of the present invention.
  • Figure 4 is a schematic diagram of the structure of the target column of the present invention.
  • Figure 5 is a schematic diagram of the structure of the target column of the present invention.
  • Figure 6 is a schematic diagram of the structure of the present invention.
  • FIGS. 1-6 The present invention will be described with reference to FIGS. 1-6 as follows:
  • a combined target includes a target post 100 and a mounting plate 200.
  • the mounting plate 200 includes two mounting plates.
  • the two mounting plates 200 are spaced up and down, and the target post 100 is set on two Between the mounting plates 200, the upper and lower ends of the target column 100 are respectively connected to two mounting plates 200, a number of target columns 100 are connected between the two mounting plates 200, and adjacent target columns 100 are arranged at intervals.
  • the target column 100 includes a tubular target body 1, a tubular carrier body 2, and a mounting column 3.
  • the carrier body 2 is sleeved on the installation column 3, and the target body 1 is sleeved on the carrier body.
  • the inside of the carrier 2 is provided with a cooling cavity
  • the carrier 2 is provided with a cooling liquid inlet 21 and a cooling liquid outlet 22, the cooling liquid inlet 21 and the cooling liquid outlet 22 are respectively connected to the cooling cavity Connectivity settings.
  • the target body 1 can be rotated around its central axis.
  • the carrier 2 is fixedly connected to the mounting post 3, and the mounting post 3 is connected with a driving device 4 for driving it to rotate, and the driving device 4 may be a motor.
  • the mounting post 3 is connected to the mounting plate, and the motor is also installed in a suitable position on the mounting plate.
  • the carrying body 2 and the mounting post 3 are rotatably connected, and further includes a driving mechanism for driving the carrying body 2 to rotate.
  • the driving mechanism includes gear one 5, gear two 6, and driving device two 7 (motor).
  • the gear one 5 is coaxially arranged with the carrier 2 and arranged in linkage, and the gear two 6 meshes with the gear one 5 to drive
  • the second device 7 is connected with the second gear 6 for driving the second gear 6 to rotate.
  • the mounting post 3 is connected to the mounting plate, and the motor is also installed in a suitable position on the mounting plate.
  • the combined target can be adjusted in the front, back, left, right, up and down directions, and the combined target can be rotated around its central axis.
  • an implementation of its movement is disclosed as follows:
  • FIG. 6 it also includes a slide bar 101 and a slide bar 102.
  • the slide bar 101 and the slide bar 102 are arranged perpendicular to each other.
  • the slide bar 101 and the slide bar 102 form a sliding fit, and the slide bar 102 can move along
  • the sliding rod 101 slides in the longitudinal direction, and the sliding rod 101 is provided with a driving device three (air cylinder) for driving the sliding rod 102 to move.
  • the above structure can realize the movement in the front and rear directions.
  • the second sliding rod 102 is located above the combined target, and the mounting plate 200 on the upper side is slidably connected to the second sliding rod 102.
  • the mounting plate 200 can move along the length of the second sliding rod 102.
  • the second sliding rod 102 is provided with The driving device 4 (air cylinder) that drives the mounting plate 200 to slide, the above structure can realize the movement in the left and right directions.
  • the sliding rod 101 is fixedly connected to the lower side of the fixed base 103, the fixed base 103 is connected with a driving device 104 (motor) that drives it to rotate, and the fixed base 103 is connected to drive its up and down Mobile driving device six 105 (air cylinder).
  • a driving device 104 motor
  • the fixed base 103 is connected to drive its up and down Mobile driving device six 105 (air cylinder).
  • the radiation beam directed at the combined target at any angle in the horizontal direction will be completely blocked by the target column in the combined target.
  • the arrangement position of the target pillars in the combined target is restricted, and the arrangement density of the target pillars must ensure that the incident radiation beam will not penetrate through the gap between the target pillars.
  • the combined target provided by the present invention is composed of a plurality of single targets and can move in multiple directions, and is equipped with a cooling structure inside, which not only can obtain a large number of sputtering sources at low cost, but also improves The utilization rate of the target extends its service life.
  • the structure of the single target column 100 is tubular. When the tubular target is used, the rotation of the tubular target can be adjusted so that the surface of the target can obtain a more uniform etching effect, and the etching area can basically cover the entire target surface by adjusting the position of the target body 1.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

本发明提出了一种组合靶件，包括靶柱和安装板，所述的安装板包含有两块，两块安装板上下间隔设置，靶柱设置在两块安装板之间，靶柱的上下两端分别与两块安装板连接，两块安装板之间连接有若干个靶柱，相邻的靶柱之间间隔设置；所述的靶柱包括管形的靶体、管形的承载体及安装柱，承载体套设在安装柱上，靶体套设在承载体上，所述的承载体的内部设有冷却腔体，所述的承载体上设有冷却液进口和冷却液出口，冷却液进口和冷却液出口分别与冷却腔体连通设置。

Description

一种组合靶件 技术领域
本发明涉及一种组合靶件。
背景技术
靶可以理解为，表示阴极溅射系统中被溅射的材料。过去所使用的大部分溅射靶是构造为呈圆形的或呈矩形的所谓的平面靶。然而平面靶具有如下缺点：构成该平面靶的材料的仅约30％到40％得到有效溅射，其有效利用率低，使用寿命短。且目前使用的靶都是单个的靶体，而为了得到大量的溅射源，常会对照射束来进行优化设计，但是对照射束的优化往往会涉及到高成本和高难度的问题。
发明内容
针对背景技术中指出的问题，本发明提出一种组合靶件，其由多个单体靶组合而成，并能进行多方向的运动，且其内部配置有冷却结构，不但能低成本的获取大量的溅射源，而且提高了靶的利用率，延长了其使用寿命。
本发明的技术方案是这样实现的：
一种组合靶件，包括靶柱和安装板，所述的安装板包含有两块，两块安装板上下间隔设置，靶柱设置在两块安装板之间，靶柱的上下两端分别与两块安装板连接，两块安装板之间连接有若干个靶柱，相邻的靶柱之间间隔设置；
所述的靶柱包括管形的靶体、管形的承载体及安装柱，承载体套设在安装柱上，靶体套设在承载体上，所述的承载体的内部设有冷却腔体，所述的承载体上设有冷却液进口和冷却液出口，冷却液进口和冷却液出口分别与冷却腔体连通设置。
本发明还进一步设置为，所述的靶体可绕其中心轴线进行转动。
本发明还进一步设置为，所述的承载体与安装柱固定连接，安装柱上连接有驱动其转动的驱动装置一。
本发明还进一步设置为，所述的承载体与安装柱形成可转动连接，还包括一驱动承载体转动的驱动机构。
本发明还进一步设置为，所述的驱动机构包括齿轮一、齿轮二、驱动装置二，所述的齿轮一与承载体同轴且联动设置，齿轮二与齿轮一啮合，驱动装置二与齿轮二连接用于驱动齿轮二转动。
本发明还进一步设置为，所述的组合靶件能前、后、左、右、上、下方向进行位置调节，所述的组合靶件能绕其中心轴线进行转动。
本发明还进一步设置为，还包括滑杆一、滑杆二，滑杆一与滑杆二相互垂直设置，滑杆一与滑杆二形成滑动配合，滑杆二能沿滑杆一长度方向滑动，滑杆一上设有驱动滑杆二移动的驱动装置三，滑杆二位于所述的组合靶件的上方，位于上侧的安装板与滑杆二滑动连接，该安装板可沿滑杆二长度方向移动，滑杆二上设有驱动所述的安装板滑动的驱动装置四；还包括固定座，所述的滑杆一固定连接在固定座的下侧，固定座上连接有驱动其转动的驱动装置五，固定座上连接有驱动其上下移动的驱动装置六。
本发明还进一步设置为，水平方向任何角度射向组合靶件的照射束都会被组合靶件中的靶柱完全阻挡。
本发明的有益效果：
本发明提供的组合靶件，其由多个单体靶组合而成，并能进行多方向的运动，且其内部配置有冷却结构，不但能低成本的获取大量的溅射源，而且提高了靶的利用率，延长了其使用寿命。单个靶柱结构为管形，使用时通过对管形靶进行自转调节，使靶的表面能获得更均匀的蚀刻效果，且通过调节靶体的位置蚀刻区域基本能覆盖整个靶的表面。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其他的附图。
图1为本发明的结构示意图；
图2为本发明的结构示意图；
图3为本发明靶柱的结构示意图；
图4为本发明靶柱的结构示意图；
图5为本发明靶柱的结构示意图；
图6为本发明的结构示意图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
如下参考图1-6对本发明进行说明：
如图1和2所示，一种组合靶件，包括靶柱100和安装板200，所述的安装板200包含有两块，两块安装板200上下间隔设置，靶柱100设置在两块安装板200之间，靶柱100的上下两端分别与两块安装板200连接，两块安装板200之间连接有若干个靶柱100，相邻的靶柱100之间间隔设置。
如图3所示，所述的靶柱100包括管形的靶体1、管形的承载体2及安装柱3，承载体2套设在安装柱3上，靶体1套设在承载体2上，所述的承载体2的内部设有冷却腔体，所述的承载体2上设有冷却液进口21和冷却液出口22，冷却液进口21和冷却液出口22分别与冷却腔体连通设置。
其中，所述的靶体1可绕其中心轴线进行转动。
如图4所示，所述的承载体2与安装柱3固定连接，安装柱3上连接有驱动其转动的驱动装置一4，驱动装置一4可以是电机。实际使用时，安装柱3与安装板连接，电机也安装在安装板上合适的位置。
如图5所示，所述的承载体2与安装柱3形成可转动连接，还包括一驱动承载体2转动的驱动机构。
其中，所述的驱动机构包括齿轮一5、齿轮二6、驱动装置二7(电机)，所述的齿轮一5与承载体2同轴且联动设置，齿轮二6与齿轮一5啮合，驱动装 置二7与齿轮二6连接用于驱动齿轮二6转动。实际使用时，安装柱3与安装板连接，电机也安装在安装板上合适的位置。
其中，所述的组合靶件能前、后、左、右、上、下方向进行位置调节，所述的组合靶件能绕其中心轴线进行转动。使得组合靶件能进行多方向的移动，如下公开了其实现移动的一种实施方式：
如图6所示，还包括滑杆一101、滑杆二102，滑杆一101与滑杆二102相互垂直设置，滑杆一101与滑杆二102形成滑动配合，滑杆二102能沿滑杆一101长度方向滑动，滑杆一101上设有驱动滑杆二102移动的驱动装置三(气缸)，上述结构可实现前后方向的移动。
滑杆二102位于所述的组合靶件的上方，位于上侧的安装板200与滑杆二102滑动连接，该安装板200可沿滑杆二102长度方向移动，滑杆二102上设有驱动所述的安装板200滑动的驱动装置四(气缸)，上述结构可实现左右方向的移动。
还包括固定座103，所述的滑杆一101固定连接在固定座103的下侧，固定座103上连接有驱动其转动的驱动装置五104(电机)，固定座103上连接有驱动其上下移动的驱动装置六105(气缸)。
水平方向任何角度射向组合靶件的照射束都会被组合靶件中的靶柱完全阻挡。上述技术方案中限制了组合靶件中靶柱的排列位置，靶柱的排列密度必须保证射入的照射束不会从靶柱之间的间隙中透过。
本发明的有益效果：
本发明提供的组合靶件，其由多个单体靶组合而成，并能进行多方向的运动，且其内部配置有冷却结构，不但能低成本的获取大量的溅射源，而且提高 了靶的利用率，延长了其使用寿命。单个靶柱100结构为管形，使用时通过对管形靶进行自转调节，使靶的表面能获得更均匀的蚀刻效果，且通过调节靶体1的位置蚀刻区域基本能覆盖整个靶的表面。
以上所述的仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。

Claims (8)

  1. 一种组合靶件，其特征在于：包括靶柱和安装板，所述的安装板包含有两块，两块安装板上下间隔设置，靶柱设置在两块安装板之间，靶柱的上下两端分别与两块安装板连接，两块安装板之间连接有若干个靶柱，相邻的靶柱之间间隔设置；
    所述的靶柱包括管形的靶体、管形的承载体及安装柱，承载体套设在安装柱上，靶体套设在承载体上，所述的承载体的内部设有冷却腔体，所述的承载体上设有冷却液进口和冷却液出口，冷却液进口和冷却液出口分别与冷却腔体连通设置。
  2. 根据权利要求1所述的一种组合靶件，其特征在于：所述的靶体可绕其中心轴线进行转动。
  3. 根据权利要求2所述的一种组合靶件，其特征在于：所述的承载体与安装柱固定连接，安装柱上连接有驱动其转动的驱动装置一。
  4. 根据权利要求2所述的一种组合靶件，其特征在于：所述的承载体与安装柱形成可转动连接，还包括一驱动承载体转动的驱动机构。
  5. 根据权利要求4所述的一种组合靶件，其特征在于：所述的驱动机构包括齿轮一、齿轮二、驱动装置二，所述的齿轮一与承载体同轴且联动设置，齿轮二与齿轮一啮合，驱动装置二与齿轮二连接用于驱动齿轮二转动。
  6. 根据权利要求1-5任一项所述的一种组合靶件，其特征在于：所述的组合靶件能前、后、左、右、上、下方向进行位置调节，所述的组合靶件能绕其中心轴线进行转动。
  7. 根据权利要求6所述的一种组合靶件，其特征在于：还包括滑杆一、滑杆二，滑杆一与滑杆二相互垂直设置，滑杆一与滑杆二形成滑动配合，滑杆二 能沿滑杆一长度方向滑动，滑杆一上设有驱动滑杆二移动的驱动装置三，滑杆二位于所述的组合靶件的上方，位于上侧的安装板与滑杆二滑动连接，该安装板可沿滑杆二长度方向移动，滑杆二上设有驱动所述的安装板滑动的驱动装置四；还包括固定座，所述的滑杆一固定连接在固定座的下侧，固定座上连接有驱动其转动的驱动装置五，固定座上连接有驱动其上下移动的驱动装置六。
  8. 根据权利要求6所述的一种组合靶件，其特征在于：水平方向任何角度射向组合靶件的照射束都会被组合靶件中的靶柱完全阻挡。
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