WO2020181643A1 - 柔性光电探测器和柔性光电探测器制备方法 - Google Patents

柔性光电探测器和柔性光电探测器制备方法 Download PDF

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WO2020181643A1
WO2020181643A1 PCT/CN2019/086346 CN2019086346W WO2020181643A1 WO 2020181643 A1 WO2020181643 A1 WO 2020181643A1 CN 2019086346 W CN2019086346 W CN 2019086346W WO 2020181643 A1 WO2020181643 A1 WO 2020181643A1
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carbon nanotube
walled carbon
nanotube film
film
quantum dots
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French (fr)
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罗成志
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Wuhan China Star Optoelectronics Technology Co Ltd
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Wuhan China Star Optoelectronics Technology Co Ltd
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80—Constructional details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/50—Photovoltaic [PV] devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells

Definitions

  • This application relates to the field of detection technology, in particular to a flexible photodetector and a method for preparing the flexible photodetector.
  • SWNTs Single-walled carbon nanotube carbornanotubes
  • Single-walled carbon nanotubes to assemble flexible photodetectors need to solve two problems: one is that single-walled carbon nanotubes (single-walled carbornanotubes; SWNTs) themselves have low light absorption rate and lack of light gain mechanism, so the response of the detector is low; The second is that single-walled carbornanotubes (SWNTs) film will change in resistance due to deformation during folding and stretching, thereby changing the performance of the photodetector.
  • the existing flexible photodetectors assembled with single-wall carbon nanotubes have defects and need to be improved.
  • the existing flexible photodetector has the technical problem that the single-wall carbon nanotube film is deformed.
  • the embodiment of the application provides a flexible photodetector, which includes:
  • a single-walled carbon nanotube film is disposed on the polydimethylsiloxane film, and the single-walled carbon nanotube film includes at least one layer of corrugated structure;
  • the gold electrodes are arranged at the two ends of the single-walled carbon nanotube film in the direction of force in which the wrinkles are formed.
  • the single-wall carbon nanotube film is provided with perovskite quantum dots.
  • the single-walled carbon nanotube film includes a wrinkled area and a flat area, and the wrinkled structure is disposed in the wrinkled area.
  • the wrinkle region includes a first wrinkle region and a second wrinkle region.
  • the first wrinkle region and the second wrinkle region are arranged at Flat areas on both sides.
  • the perovskite quantum dots are arranged in the first fold area.
  • the perovskite quantum dots are arranged in the second fold area.
  • the perovskite quantum dots are arranged in a flat area.
  • the perovskite quantum dots are arranged in the flat area and the first fold area.
  • the perovskite quantum dots are arranged in the flat area and the second fold area.
  • the perovskite quantum dots are arranged in the first fold area and the second fold area.
  • the cross-sectional shape of the corrugated structure is rectangular in the state of not being folded or stretched.
  • the cross-sectional shape of the fold structure is trapezoidal in the state of not being folded or stretched.
  • the embodiment of the application provides a method for preparing a flexible photodetector, which includes:
  • a gold electrode is provided, and gold electrodes are arranged at both ends of the force direction in which the single-walled carbon nanotube film forms wrinkles.
  • the step of providing the polydimethylsiloxane film includes: stretching the polydimethylsiloxane film to both sides by 30%-50%, and after stretching Fix it on the glass surface to form a pre-stretched polydimethylsiloxane film.
  • the step of forming the single-walled carbon nanotube film into at least one layer of pleated structure includes: transferring the single-walled carbon nanotube on the pre-stretched polydimethylsiloxane film film.
  • the step of transferring the single-walled carbon nanotube film on the pre-stretched polydimethylsiloxane film includes: The water surface is then lifted up with a pre-stretched polydimethylsiloxane film, and then dried at 60°C for 24 hours.
  • the step of forming the single-walled carbon nanotube film into at least one layer of pleated structure further includes: tearing off the pre-stretched polydimethylsiloxane film from the glass, At this time, the strain is released, and the polydimethylsiloxane film will shrink to its original length due to elasticity.
  • the step of arranging gold electrodes at both ends of the force direction in which the single-walled carbon nanotube film forms wrinkles includes: forming the wrinkle in the single-wall carbon nanotube film in the force direction
  • the gold electrodes are prepared by evaporation or PVD at the two ends of the upper surface.
  • the method for preparing the flexible photodetector provided by the present application, it further includes forming perovskite quantum dots on the single-walled carbon nanotube film.
  • the step of forming perovskite quantum dots on the single-walled carbon nanotube film includes: forming perovskite quantum dots on the single-walled carbon nanotube film by chemical deposition point.
  • the beneficial effects of the present application are: the present application provides a flexible photodetector and a method for preparing a flexible photodetector.
  • the flexible photodetector includes a polydimethylsiloxane film, a single-wall carbon nanotube film, and a gold electrode.
  • the single-walled carbon nanotube film is disposed on the polydimethylsiloxane film, the single-walled carbon nanotube film includes at least one layer of corrugated structure, and the gold electrode is disposed on the single-walled carbon nanotube film to form folds During the folding and stretching of the single-walled carbon nanotube film, the wrinkled structure of the single-walled carbon nanotube film will reduce the deformation, alleviating the existing flexible photodetector of the single-walled carbon nanotube The technical problem of film deformation.
  • FIG. 1 is a first schematic top view of a flexible photodetector provided by an embodiment of this application;
  • FIG. 2 is a first cross-sectional schematic diagram of a flexible photodetector provided by an embodiment of this application;
  • FIG. 3 is a schematic top view of a second type of flexible photodetector provided by an embodiment of the application.
  • FIG. 4 is a third schematic top view of a flexible photodetector provided by an embodiment of the application.
  • FIG. 5 is a schematic top view of a fourth type of flexible photodetector provided by an embodiment of the application.
  • FIG. 6 is a schematic top view of a fifth type of flexible photodetector provided by an embodiment of the application.
  • FIG. 7 is a second cross-sectional schematic diagram of a flexible photodetector provided by an embodiment of the application.
  • FIG. 8 is a schematic top view of a sixth type of flexible photodetector provided by an embodiment of the application.
  • FIG. 9 is a seventh schematic top view of a flexible photodetector provided by an embodiment of the application.
  • the embodiment of the present application can solve this problem.
  • the flexible photodetector provided by this application includes a polydimethylsiloxane film 101, a single-walled carbon nanotube film 102, and a gold electrode 103.
  • the single-walled carbon nanotube film 102 is provided with On the polydimethylsiloxane film 101, the single-walled carbon nanotube film 102 includes at least one layer of corrugated structure 104, and the gold electrode 103 is arranged on the single-walled carbon nanotube film 102 to form a wrinkled force Both ends in the direction.
  • the flexible photodetector includes a polydimethylsiloxane film, a single-wall carbon nanotube film, and a gold electrode.
  • the single-wall carbon nanotube film is disposed on the polydimethylsiloxane.
  • the single-walled carbon nanotube film includes at least one layer of corrugated structure, and the gold electrodes are arranged at both ends of the single-walled carbon nanotube film in the direction of force in which the wrinkles are formed; During the stretching process, the wrinkled structure of the single-walled carbon nanotube film will reduce the deformation, which alleviates the technical problem of the existing flexible photodetector that the single-walled carbon nanotube film is deformed.
  • the single-walled carbon nanotube film 102 includes a corrugated region 202 and a flat region 201, and the corrugated structure 104 is disposed in the corrugated region 202.
  • the single-walled carbon nanotube film 102 is provided with perovskite quantum dots 105.
  • the single-walled carbon nanotube film 102 includes a wrinkled area 202 and a flat area 201.
  • the wrinkled area 202 is arranged in a single layer, and the single-layer arrangement has only one fold, which is easy to operate.
  • the single-walled carbon nanotube film 102 includes a wrinkled area 202 and a flat area 201.
  • the wrinkled area 202 is partially arranged in multiple layers, and the multiple layers are arranged to have at least two folds.
  • the setting can better reduce the deformation during folding and stretching.
  • the single-walled carbon nanotube film 102 includes a wrinkled area 202 and a flat area 201.
  • the wrinkled area 202 is partially arranged in multiple layers, and the multiple layers are arranged to have at least two folds.
  • the setting can better reduce the deformation during folding and stretching, and the shape of each layer of the multi-layer setting is different.
  • the single-walled carbon nanotube film 102 includes a wrinkled area 202 and a flat area 201.
  • the wrinkled area 202 is partially arranged in multiple layers.
  • the multilayer arrangement has at least two folds. The multilayer arrangement can better reduce In the process of folding and stretching, the shape of each layer in the multi-layer setting is the same.
  • the wrinkle area 202 includes a first wrinkle area 2001 and a first wrinkle area 2002.
  • the first wrinkle area 2001 and the first wrinkle area The area 2002 is arranged on both sides of the flat area 201, the left side of the flat area 201 is the first fold area 2001, and the right side of the flat area 201 is the first fold area 2002.
  • the fold region 202 includes a first fold region 2001 and a first fold region 2002, and the first fold region 2001 and the first fold region 2002 are arranged next to each other.
  • the perovskite quantum dot 105 is disposed in the first fold area 2001.
  • the first fold area 2001 is fully covered with perovskite quantum dots 105, a part of the first fold area 2002 is provided with perovskite quantum dots 105, and the fully covered area is set at The entire area is covered in this area, and the flat area 201 is not provided with perovskite quantum dots 105.
  • the perovskite quantum dots 105 are fully covered in the first fold area 2002, a part of the first fold area 2001 is provided with perovskite quantum dots 105, and the flat area 201 is not provided with perovskite quantum dots 105 .
  • a part of the first fold region 2001 is provided with perovskite quantum dots 105
  • a part of the first fold region 2002 is provided with perovskite quantum dots 105
  • the flat region 201 is not provided with perovskite quantum dots.
  • the first fold area 2001 is fully covered with perovskite quantum dots 105
  • the first fold area 2002 is fully covered with perovskite quantum dots 105
  • the flat area 201 is not provided with perovskite quantum dots 105.
  • a part of the flat area 201 is provided with perovskite quantum dots 105
  • the first fold area 2001 is fully covered with perovskite quantum dots 105
  • a part of the first fold area 2002 is provided with perovskite Quantum dot 105.
  • a part of the flat area 201 is provided with perovskite quantum dots 105
  • the first fold area 2002 is fully covered with perovskite quantum dots 105
  • a part of the first fold area 2001 is provided with perovskite.
  • Quantum dot 105 is provided.
  • a portion of the flat area 201 is provided with perovskite quantum dots 105
  • a portion of the first fold area 2001 is provided with perovskite quantum dots 105
  • a portion of the first fold area 2002 is provided with calcium. Titanium ore quantum dot 105.
  • a part of the flat region 201 is provided with perovskite quantum dots 105
  • a part of the first fold region 2002 is provided with perovskite quantum dots 105
  • a part of the first fold region 2001 is provided with calcium. Titanium ore quantum dot 105.
  • a part of the flat area 201 is provided with perovskite quantum dots 105
  • the first fold area 2001 is fully covered with perovskite quantum dots 105
  • the first fold area 2002 is not provided with perovskite quantum dots 105 .
  • a part of the flat area 201 is provided with perovskite quantum dots 105
  • the first fold area 2002 is fully covered with perovskite quantum dots 105
  • the first fold area 2001 is not provided with perovskite quantum dots 105 .
  • a portion of the flat area 201 is provided with perovskite quantum dots 105
  • a portion of the first fold area 2001 is provided with perovskite quantum dots 105
  • the first fold area 2002 The perovskite quantum dot 105 is not provided.
  • a portion of the flat area 201 is provided with perovskite quantum dots 105
  • a portion of the first fold area 2002 is provided with perovskite quantum dots 105
  • the first fold area 2001 is not provided with perovskite quantum dots.
  • the perovskite quantum dots 105 in the flat area 201 are fully covered, the first fold area 2001 is fully covered with the perovskite quantum dots 105, and the first fold area 2002 is partially covered with perovskite quantum dots. Point 105.
  • the perovskite quantum dots 105 in the flat area 201 are fully covered, the first fold area 2002 is fully covered with the perovskite quantum dots 105, and a part of the first fold area 2001 is provided with perovskite quantum dots. Point 105.
  • the perovskite quantum dots 105 in the flat area 201 are fully covered, a part of the first fold area 2001 is provided with perovskite quantum dots 105, and a part of the first fold area 2002 is provided with perovskite. Ore quantum dots 105.
  • the perovskite quantum dots 105 in the flat area 201 are completely covered, a part of the first fold area 2001 is provided with perovskite quantum dots 105, and the first fold area 2002 is not provided with perovskite quantum dots. 105.
  • the perovskite quantum dots 105 in the flat area 201 are fully covered, a part of the first fold area 2002 is provided with perovskite quantum dots 105, and the first fold area 2001 is not provided with perovskite quantum dots. 105.
  • the perovskite quantum dots 105 in the flat area 201 are fully covered, the first fold area 2001 is fully covered with the perovskite quantum dots 105, and the first fold area 2002 is not provided with the perovskite quantum dots 105.
  • the perovskite quantum dots 105 in the flat area 201 are fully covered, the first fold area 2002 is fully covered by the perovskite quantum dots 105, and the first fold area 2001 is not provided with the perovskite quantum dots 105.
  • the perovskite quantum dots 105 are arranged in the flat area 201 and the first fold area 2001.
  • the perovskite quantum dots 105 are arranged in the flat area 201 and the first corrugated area 2002.
  • the perovskite quantum dots 105 are disposed in the first fold region 2001 and the first fold region 2002.
  • the perovskite quantum dots 105 are arranged in the first fold area 2001 and the first fold area 2002 and the flat area 201.
  • the cross-sectional shape of the corrugated structure 104 is rectangular, and the appearance is more beautiful.
  • the cross-sectional shape of the corrugated structure 104 is a trapezoid in the state of not being folded or stretched.
  • the cross-sectional shape of the fold structure 104 is a semi-circular arc shape. This shape is the most natural and does not require excessive operations to change the contraction after stretching.
  • the cross-sectional shape of the fold structure 104 of the first fold region 2001 is a semicircular arc shape
  • the cross-sectional shape of the fold structure 104 of the first fold region 2002 is a rectangle.
  • the cross-sectional shape of the fold structure 104 of the first fold region 2001 is a semicircular arc shape
  • the cross-sectional shape of the fold structure 104 of the first fold region 2002 is a trapezoid.
  • the cross-sectional shape of the corrugated structure 104 in the first corrugated region 2002 is a semi-circular arc shape
  • the cross-sectional shape of the corrugated structure 104 in the first corrugated region 2001 is a rectangle.
  • the cross-sectional shape of the fold structure 104 of the first fold region 2002 is a semicircular arc shape, and the cross-sectional shape of the fold structure 104 of the first fold region 2001 is a trapezoid.
  • the principle of thermal expansion and contraction can be used to heat the polydimethylsiloxane film 101 and fix it on a glass plate, and then lay the single-walled carbon nanotube film 102 on the glass plate. Then use the pre-stretched polydimethylsiloxane film 101 to lift it up. After drying, tear off the polydimethylsiloxane film 101 from the glass at a low temperature. The siloxane-based film 101 is stretched after heat treatment, and the same effect can be achieved. The single-walled carbon nanotube film 102 forms folds.
  • a single-walled carbon nanotube film 102 with a corrugated structure 104 is prepared on a flexible polydimethylsiloxane film 101, and then calcium is coated on the single-walled carbon nanotube film 102 with a corrugated structure 104 Titanite quantum dots 105 and perovskite quantum dots 105 have high photoelectric responsivity.
  • the single-walled carbon nanotube film 102 of the pleated structure 104 will not change its resistance when deformed greatly.
  • the photoelectric detection has both flexibility and light response. Degree and stability.
  • the preparation method of the flexible photodetector provided by this application includes:
  • a gold electrode 103 is provided, and the gold electrode 103 is provided at both ends of the single-walled carbon nanotube film 102 in the force direction where the wrinkles are formed.
  • the step of providing the polydimethylsiloxane film 101 includes: stretching the polydimethylsiloxane film 101 laterally by 30%-50%, and fixing it on both sides after stretching. On the glass surface, a pre-stretched polydimethylsiloxane film 101 is formed.
  • the step of forming the single-walled carbon nanotube film 102 into at least one layer of pleated structure 104 includes: transferring the single-walled carbon nanotube film 102 on the pre-stretched polydimethylsiloxane film 101.
  • the step of transferring the single-walled carbon nanotube film 102 on the pre-stretched polydimethylsiloxane film 101 includes: firstly lay the single-walled carbon nanotube film 102 on the water surface, and then The pre-stretched polydimethylsiloxane film 101 was used to lift it up, and then dried at 60°C for 24 hours.
  • the pre-stretched polydimethylsiloxane film 101 is torn off from the glass. At this time, the strain is released. Due to the elastic effect, the polydimethylsiloxane film 101 will shrink to its original length. . During the shrinking process of the polydimethylsiloxane film 101, the single-walled carbon nanotube film 102 on the surface will form a wrinkle structure 104.
  • the step of forming the single-walled carbon nanotube film 102 into at least one layer of pleated structure 104 further includes: tearing off the pre-stretched polydimethylsiloxane film 101 from the glass, and the strain Release, due to the elastic effect, the polydimethylsiloxane film 101 will shrink to its original length.
  • the single-walled carbon nanotube film 102 on the surface will form a wrinkled structure 104, and the deformation of the single-walled carbon nanotube film 102 during the folding and stretching process will not cause a large resistance change, thus Make the performance of the flexible photodetector stable.
  • the step of arranging gold electrodes 103 at both ends of the single-walled carbon nanotube film 102 in the force direction where the wrinkles are formed includes:
  • the gold electrode 103 is prepared by evaporation or PVD at the end.
  • it further includes perovskite quantum dots 105 formed on the single-walled carbon nanotube film 102.
  • the single-walled carbon nanotube film 102 itself is flexible due to its low light absorption rate and lack of light gain mechanism. The responsivity of the photodetector is low. By adding perovskite quantum dots, the optical gain mechanism is increased, thereby improving the responsivity of the flexible photodetector.
  • the step of forming perovskite quantum dots 105 on the single-walled carbon nanotube film 102 includes: forming perovskite quantum dots 105 on the single-walled carbon nanotube film 102 by chemical deposition.
  • the flexible photodetector includes a polydimethylsiloxane film, a single-wall carbon nanotube film, and a gold electrode.
  • the single-wall carbon nanotube film Is disposed on the polydimethylsiloxane film, the single-walled carbon nanotube film includes at least one layer of corrugated structure, and the gold electrodes are disposed on two directions in which the single-walled carbon nanotube film forms wrinkles.
  • the wrinkled structure of the single-walled carbon nanotube film will reduce the deformation, which alleviates the technical problem of the existing flexible photodetector that the single-walled carbon nanotube film is deformed.

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Abstract

本申请提供一种柔性光电探测器和柔性光电探测器制备方法，该柔性光电探测器包括聚二甲基硅氧烷薄膜、单壁碳纳米管薄膜、金电极，所述单壁碳纳米管薄膜设置于所述聚二甲基硅氧烷薄膜上，所述单壁碳纳米管薄膜包括至少一层褶皱结构，所述金电极设置在单壁碳纳米管薄膜形成褶皱的受力方向上的两端；在单壁碳纳米管薄膜折叠和拉伸过程中，单壁碳纳米管薄膜的褶皱结构会降低形变，缓解了现有柔性光电探测器存在单壁碳纳米管薄膜产生形变的技术问题。

Description

柔性光电探测器和柔性光电探测器制备方法 技术领域
本申请涉及探测技术领域，尤其涉及一种柔性光电探测器和柔性光电探测器制备方法。
 背景技术
单壁碳纳米管（single-walled carbornanotubes；SWNTs））能随意折叠和弯曲，非常适合用作组装柔性光电探测器。
利用单壁碳纳米管（single-walled carbornanotubes；SWNTs）组装柔性光电探测需要解决两个难题：一是单壁碳纳米管（single-walled carbornanotubes；SWNTs）自身由于光吸收率低、缺乏光增益机制，使探测器的响应度较低；二是单壁碳纳米管（single-walled carbornanotubes；SWNTs）薄膜折叠和拉伸过程中由于形变会造成电阻变化，从而改变光电探测器的性能。
即现有单壁碳纳米管组装的柔性光电探测器存在缺陷，需要改进。
 技术问题
现有柔性光电探测器存在单壁碳纳米管薄膜产生形变的技术问题。
 技术解决方案
为解决上述问题，本申请提供的技术方案如下：
本申请实施例提供一种柔性光电探测器，其包括：
聚二甲基硅氧烷薄膜；
单壁碳纳米管薄膜，设置于所述聚二甲基硅氧烷薄膜上，所述单壁碳纳米管薄膜包括至少一层褶皱结构；
金电极，设置在单壁碳纳米管薄膜形成褶皱的受力方向上的两端。
在本申请提供的柔性光电探测器中，所述单壁碳纳米管薄膜上设置有钙钛矿量子点。
在本申请提供的柔性光电探测器中，所述单壁碳纳米管薄膜包括褶皱区域和平坦区域，所述褶皱结构设置于所述褶皱区域。
在本申请提供的柔性光电探测器中，所述褶皱区域包括第一褶皱区域和第二褶皱区域，在形成褶皱的受力方向上，所述第一褶皱区域与所述第二褶皱区域设置在平坦区域两侧。
在本申请提供的柔性光电探测器中，所述钙钛矿量子点设置在第一褶皱区域。
在本申请提供的柔性光电探测器中，所述钙钛矿量子点设置在第二褶皱区域。
在本申请提供的柔性光电探测器中，所述钙钛矿量子点设置在平坦区域。
在本申请提供的柔性光电探测器中，所述钙钛矿量子点设置在平坦区域和第一褶皱区域。
在本申请提供的柔性光电探测器中，所述钙钛矿量子点设置在平坦区域和第二褶皱区域。
在本申请提供的柔性光电探测器中，所述钙钛矿量子点设置在第一褶皱区域和第二褶皱区域。
在本申请提供的柔性光电探测器中，在没有折叠、拉伸的状态下，褶皱结构的截面形状为矩形。
在本申请提供的柔性光电探测器中，在没有折叠、拉伸的状态下，褶皱结构的截面形状为梯形。
本申请实施例提供一种柔性光电探测器制备方法，其包括：
提供聚二甲基硅氧烷薄膜；
在所述聚二甲基硅氧烷薄膜上形成单壁碳纳米管薄膜，将单壁碳纳米管薄膜形成至少一层褶皱结构；
提供金电极，在单壁碳纳米管薄膜形成褶皱的受力方向上的两端设置金电极。
在本申请提供的柔性光电探测器制备方法中，提供聚二甲基硅氧烷薄膜的步骤包括：将聚二甲基硅氧烷薄膜向侧向两边拉伸30%-50%，拉伸后将其固定在玻璃表面，形成预拉伸的聚二甲基硅氧烷薄膜。
在本申请提供的柔性光电探测器制备方法中，将单壁碳纳米管薄膜形成至少一层褶皱结构的步骤包括：在预拉伸的聚二甲基硅氧烷薄膜上转移单壁碳纳米管薄膜。
在本申请提供的柔性光电探测器制备方法中，在预拉伸的聚二甲基硅氧烷薄膜上转移单壁碳纳米管薄膜的步骤包括：先将单壁碳纳米管薄膜平铺浮于水面，然后用预拉伸的聚二甲基硅氧烷薄膜将其捞起，然后60℃烘干24h。
在本申请提供的柔性光电探测器制备方法中，将单壁碳纳米管薄膜形成至少一层褶皱结构的步骤还包括：将预拉伸的聚二甲基硅氧烷薄膜从玻璃上撕下，此时应变释放，由于弹性作用，聚二甲基硅氧烷薄膜会收缩至原长。
在本申请提供的柔性光电探测器制备方法中，在单壁碳纳米管薄膜形成褶皱的受力方向上的两端设置金电极的步骤包括：在单壁碳纳米管薄膜形成褶皱的受力方向上的两端采用蒸镀或PVD的方式制备金电极。
在本申请提供的柔性光电探测器制备方法中，还包括在所述单壁碳纳米管薄膜上形成有钙钛矿量子点。
在本申请提供的柔性光电探测器制备方法中，在单壁碳纳米管薄膜上形成有钙钛矿量子点的步骤包括：在单壁碳纳米管薄膜上采用化学沉积的方式形成钙钛矿量子点。
 有益效果
本申请的有益效果为：本申请提供一种柔性光电探测器和柔性光电探测器制备方法，该柔性光电探测器包括聚二甲基硅氧烷薄膜、单壁碳纳米管薄膜、金电极，所述单壁碳纳米管薄膜设置于所述聚二甲基硅氧烷薄膜上，所述单壁碳纳米管薄膜包括至少一层褶皱结构，所述金电极设置在单壁碳纳米管薄膜形成褶皱的受力方向上的两端；在单壁碳纳米管薄膜折叠和拉伸过程中，单壁碳纳米管薄膜的褶皱结构会降低形变，缓解了现有柔性光电探测器存在单壁碳纳米管薄膜产生形变的技术问题。
 附图说明
为了更清楚地说明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单介绍，显而易见地，下面描述中的附图仅仅是申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本申请实施例提供的柔性光电探测器的第一种俯视示意图；
图2为本申请实施例提供的柔性光电探测器的第一种截面示意图；
图3为本申请实施例提供的柔性光电探测器的第二种俯视示意图；
图4为本申请实施例提供的柔性光电探测器的第三种俯视示意图；
图5为本申请实施例提供的柔性光电探测器的第四种俯视示意图；
图6为本申请实施例提供的柔性光电探测器的第五种俯视示意图；
图7为本申请实施例提供的柔性光电探测器的第二种截面示意图；
图8为本申请实施例提供的柔性光电探测器的第六种俯视示意图；
图9为本申请实施例提供的柔性光电探测器的第七种俯视示意图。
本申请的实施方式
以下各实施例的说明是参考附加的图示，用以例示本申请可用以实施的特定实施例。本申请所提到的方向用语，例如[上]、[下]、[前]、[后]、[左]、[右]、[内]、[外]、[侧面]等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本申请，而非用以限制本申请。在图中，结构相似的单元是用以相同标号表示。
针对现有柔性光电探测器存在单壁碳纳米管薄膜产生形变的技术问题，本申请实施例可以解决这个问题。
如图1、图2所示，本申请提供的柔性光电探测器包括聚二甲基硅氧烷薄膜101、单壁碳纳米管薄膜102、金电极103，所述单壁碳纳米管薄膜102设置于所述聚二甲基硅氧烷薄膜101上，所述单壁碳纳米管薄膜102包括至少一层褶皱结构104，所述金电极103设置在单壁碳纳米管薄膜102形成褶皱的受力方向上的两端。
在本实施例中，柔性光电探测器包括包括聚二甲基硅氧烷薄膜、单壁碳纳米管薄膜、金电极，所述单壁碳纳米管薄膜设置于所述聚二甲基硅氧烷薄膜上，所述单壁碳纳米管薄膜包括至少一层褶皱结构，所述金电极设置在单壁碳纳米管薄膜形成褶皱的受力方向上的两端；在单壁碳纳米管薄膜折叠和拉伸过程中，单壁碳纳米管薄膜的褶皱结构会降低形变，缓解了现有柔性光电探测器存在单壁碳纳米管薄膜产生形变的技术问题。
在一种实施例中，单壁碳纳米管薄膜102包括褶皱区域202和平坦区域201，褶皱结构104设置于褶皱区域202。
在一种实施例中，如图3所示，单壁碳纳米管薄膜102上设置有钙钛矿量子点105设置。
在一种实施例中，单壁碳纳米管薄膜102包括褶皱区域202和平坦区域201，褶皱区域202为单层设置，单层设置即为只有一个褶皱，操作简便。
在一种实施例中，如图4所示，单壁碳纳米管薄膜102包括褶皱区域202和平坦区域201，褶皱区域202部分为多层设置，多层设置为至少有两个褶皱，多层设置可以更好的减少折叠和拉伸过程中的形变。
在一种实施例中，如图5所示，单壁碳纳米管薄膜102包括褶皱区域202和平坦区域201，褶皱区域202部分为多层设置，多层设置为至少有两个褶皱，多层设置可以更好的减少折叠和拉伸过程中的形变，多层设置的每一层的形状都不相同。
在一种实施例中，单壁碳纳米管薄膜102包括褶皱区域202和平坦区域201，褶皱区域202部分为多层设置，多层设置为至少有两个褶皱，多层设置可以更好的减少折叠和拉伸过程中的形变，多层设置的每一层的形状都相同。
在一种实施例中，如图6、图7所示，褶皱区域202包括第一褶皱区域2001和第一褶皱区域2002，在形成褶皱的受力方向上，第一褶皱区域2001与第一褶皱区域2002设置在平坦区域201两侧，平坦区域201左侧为第一褶皱区域2001，平坦区域201右侧为第一褶皱区域2002。
在一种实施例中，褶皱区域202包括第一褶皱区域2001和第一褶皱区域2002，第一褶皱区域2001与第一褶皱区域2002相领设置。
在一种实施例中，钙钛矿量子点105设置在第一褶皱区域2001。
在一种实施例中，如图8所示，第一褶皱区域2001钙钛矿量子点105全覆盖设置，第一褶皱区域2002的部分区域设置有钙钛矿量子点105，全覆盖设置是在该区域全区域覆盖的设置，平坦区域201未设置钙钛矿量子点105。
在一种实施例中，第一褶皱区域2002钙钛矿量子点105全覆盖设置，第一褶皱区域2001的部分区域设置有钙钛矿量子点105，平坦区域201未设置钙钛矿量子点105。
在一种实施例中，第一褶皱区域2001的部分区域设置有钙钛矿量子点105，第一褶皱区域2002的部分区域设置有钙钛矿量子点105，平坦区域201未设置钙钛矿量子点105。
在一种实施例中，第一褶皱区域2001钙钛矿量子点105全覆盖设置，第一褶皱区域2002钙钛矿量子点105全覆盖设置，平坦区域201未设置钙钛矿量子点105。
在一种实施例中，平坦区域201的部分区域设置有钙钛矿量子点105，第一褶皱区域2001钙钛矿量子点105全覆盖设置，第一褶皱区域2002的部分区域设置有钙钛矿量子点105。
在一种实施例中，平坦区域201的部分区域设置有钙钛矿量子点105，第一褶皱区域2002钙钛矿量子点105全覆盖设置，第一褶皱区域2001的部分区域设置有钙钛矿量子点105。
在一种实施例中，平坦区域201的部分区域设置有钙钛矿量子点105，第一褶皱区域2001的部分区域设置有钙钛矿量子点105，第一褶皱区域2002的部分区域设置有钙钛矿量子点105。
在一种实施例中，平坦区域201的部分区域设置有钙钛矿量子点105，第一褶皱区域2002的部分区域设置有钙钛矿量子点105，第一褶皱区域2001的部分区域设置有钙钛矿量子点105。
在一种实施例中，平坦区域201的部分区域设置有钙钛矿量子点105，第一褶皱区域2001钙钛矿量子点105全覆盖设置，第一褶皱区域2002未设置钙钛矿量子点105。
在一种实施例中，平坦区域201的部分区域设置有钙钛矿量子点105，第一褶皱区域2002钙钛矿量子点105全覆盖设置，第一褶皱区域2001未设置钙钛矿量子点105。
在一种实施例中，如图9所示，平坦区域201的部分区域设置有钙钛矿量子点105，第一褶皱区域2001的部分区域设置有钙钛矿量子点105，第一褶皱区域2002未设置钙钛矿量子点105。
在一种实施例中，平坦区域201的部分区域设置有钙钛矿量子点105，第一褶皱区域2002的部分区域设置有钙钛矿量子点105，第一褶皱区域2001未设置钙钛矿量子点105。
在一种实施例中，平坦区域201的钙钛矿量子点105全覆盖设置，第一褶皱区域2001钙钛矿量子点105全覆盖设置，第一褶皱区域2002的部分区域设置有钙钛矿量子点105。
在一种实施例中，平坦区域201的钙钛矿量子点105全覆盖设置，第一褶皱区域2002钙钛矿量子点105全覆盖设置，第一褶皱区域2001的部分区域设置有钙钛矿量子点105。
在一种实施例中，平坦区域201的钙钛矿量子点105全覆盖设置，第一褶皱区域2001的部分区域设置有钙钛矿量子点105，第一褶皱区域2002的部分区域设置有钙钛矿量子点105。
在一种实施例中，平坦区域201的钙钛矿量子点105全覆盖设置，第一褶皱区域2001的部分区域设置有钙钛矿量子点105，第一褶皱区域2002未设置钙钛矿量子点105。
在一种实施例中，平坦区域201的钙钛矿量子点105全覆盖设置，第一褶皱区域2002的部分区域设置有钙钛矿量子点105，第一褶皱区域2001未设置钙钛矿量子点105。
在一种实施例中，平坦区域201的钙钛矿量子点105全覆盖设置，第一褶皱区域2001钙钛矿量子点105全覆盖设置，第一褶皱区域2002未设置钙钛矿量子点105。
在一种实施例中，平坦区域201的钙钛矿量子点105全覆盖设置，第一褶皱区域2002钙钛矿量子点105全覆盖设置，第一褶皱区域2001未设置钙钛矿量子点105。
在一种实施例中，钙钛矿量子点105设置在平坦区域201和第一褶皱区域2001。
在一种实施例中，钙钛矿量子点105设置在平坦区域201和第一褶皱区域2002。
在一种实施例中，钙钛矿量子点105设置在第一褶皱区域2001和第一褶皱区域2002。
在一种实施例中，钙钛矿量子点105设置在第一褶皱区域2001和第一褶皱区域2002以及平坦区域201。
在一种实施例中，在没有折叠、拉伸的状态下，褶皱结构104的截面形状为矩形，外观更加美观。
在一种实施例中，在没有折叠、拉伸的状态下，褶皱结构104的截面形状为梯形。
在一种实施例中，在没有折叠、拉伸的状态下，褶皱结构104的截面形状为半圆弧形状，这种形状的形成最为自然，不需要进行过多的操作来改变拉升后收缩形成的褶皱形状。
在一种实施例中，在没有折叠、拉伸的状态下，第一褶皱区域2001的褶皱结构104的截面形状为半圆弧形状，第一褶皱区域2002的褶皱结构104的截面形状为矩形。
在一种实施例中，在没有折叠、拉伸的状态下，第一褶皱区域2001的褶皱结构104的截面形状为半圆弧形状，第一褶皱区域2002的褶皱结构104的截面形状为梯形。
在一种实施例中，第一褶皱区域2002的褶皱结构104的截面形状为半圆弧形状，第一褶皱区域2001的褶皱结构104的截面形状为矩形。
在一种实施例中，在没有折叠、拉伸的状态下，第一褶皱区域2002的褶皱结构104的截面形状为半圆弧形状，第一褶皱区域2001的褶皱结构104的截面形状为梯形。
在一种实施例中，可以采用热胀冷缩的原理，对聚二甲基硅氧烷薄膜101进行热处理后将其固定在玻璃板上，然后将单壁碳纳米管薄膜102平铺浮于水面，然后用预拉伸的聚二甲基硅氧烷薄膜101将其捞起，烘干后，在低温下，将聚二甲基硅氧烷薄膜101从玻璃上撕下，由于聚二甲基硅氧烷薄膜101进行热处理后会拉伸，可以达到同样的效果，单壁碳纳米管薄膜102的形成褶皱。
在一种实施例中，在柔性聚二甲基硅氧烷薄膜101上制备具有褶皱结构104的单壁碳纳米管薄膜102，然后在褶皱结构104的单壁碳纳米管薄膜102上涂布钙钛矿量子点105，钙钛矿量子点105具有高的光电响应度，褶皱结构104的单壁碳纳米管薄膜102在较大形变时电阻不会发生变化，该光电探测其兼备柔性、光响应度和稳定性。
本申请提供的柔性光电探测器制备方法包括：
提供聚二甲基硅氧烷薄膜101；
在聚二甲基硅氧烷薄膜101上形成单壁碳纳米管薄膜102，将单壁碳纳米管薄膜102形成至少一层褶皱结构104；
提供金电极103，在单壁碳纳米管薄膜102形成褶皱的受力方向上的两端设置金电极103。
在一种实施例中，提供聚二甲基硅氧烷薄膜101的步骤包括：将聚二甲基硅氧烷薄膜101向侧向两边拉伸30%-50%，拉伸后将其固定在玻璃表面，形成预拉伸的聚二甲基硅氧烷薄膜101。
在一种实施例中，将单壁碳纳米管薄膜102形成至少一层褶皱结构104的步骤包括：在预拉伸的聚二甲基硅氧烷薄膜101上转移单壁碳纳米管薄膜102。
在一种实施例中，在预拉伸的聚二甲基硅氧烷薄膜101上转移单壁碳纳米管薄膜102的步骤包括：先将单壁碳纳米管薄膜102平铺浮于水面，然后用预拉伸的聚二甲基硅氧烷薄膜101将其捞起，然后60℃烘干24h。
在一种实施例中，将预拉伸的聚二甲基硅氧烷薄膜101从玻璃上撕下，此时应变释放，由于弹性作用，聚二甲基硅氧烷薄膜101会收缩至原长。在聚二甲基硅氧烷薄膜101收缩过程中表面的单壁碳纳米管薄膜102会形成褶皱结构104。
在一种实施例中，将单壁碳纳米管薄膜102形成至少一层褶皱结构104的步骤还包括：将预拉伸的聚二甲基硅氧烷薄膜101从玻璃上撕下，此时应变释放，由于弹性作用，聚二甲基硅氧烷薄膜101会收缩至原长。在聚二甲基硅氧烷收缩过程中表面的单壁碳纳米管薄膜102会形成褶皱结构104，单壁碳纳米管薄膜102折叠和拉伸过程中形变不会造成较大的电阻变化，从而使得柔性光电探测器的性能稳定。
在一种实施例中，在单壁碳纳米管薄膜102形成褶皱的受力方向上的两端设置金电极103的步骤包括：在单壁碳纳米管薄膜102形成褶皱的受力方向上的两端采用蒸镀或PVD的方式制备金电极103。
在一种实施例中，还包括在所述单壁碳纳米管薄膜102上形成有钙钛矿量子点105，单壁碳纳米管薄膜102自身由于光吸收率低、缺乏光增益机制，使柔性光电探测器的响应度较低，通过增加钙钛矿量子点，增加了光增益机制，从而提高了柔性光电探测器响应度。
在一种实施例中，在单壁碳纳米管薄膜102上形成有钙钛矿量子点105的步骤包括：在单壁碳纳米管薄膜102上采用化学沉积的方式形成钙钛矿量子点105。
根据上述实施例可知：
本申请提供一种柔性光电探测器和柔性光电探测器制备方法，该柔性光电探测器包括聚二甲基硅氧烷薄膜、单壁碳纳米管薄膜、金电极，所述单壁碳纳米管薄膜设置于所述聚二甲基硅氧烷薄膜上，所述单壁碳纳米管薄膜包括至少一层褶皱结构，所述金电极设置在单壁碳纳米管薄膜形成褶皱的受力方向上的两端；在单壁碳纳米管薄膜折叠和拉伸过程中，单壁碳纳米管薄膜的褶皱结构会降低形变，缓解了现有柔性光电探测器存在单壁碳纳米管薄膜产生形变的技术问题。
综上所述，虽然本申请已以优选实施例揭露如上，但上述优选实施例并非用以限制本申请，本领域的普通技术人员，在不脱离本申请的精神和范围内，均可作各种更动与润饰，因此本申请的保护范围以权利要求界定的范围为准

Claims (20)

  1. 一种柔性光电探测器，其中，包括：
    聚二甲基硅氧烷薄膜；
    单壁碳纳米管薄膜，设置于所述聚二甲基硅氧烷薄膜上，所述单壁碳纳米管薄膜包括至少一层褶皱结构；
    金电极，设置在单壁碳纳米管薄膜形成褶皱的受力方向上的两端。
  2. 根据权利要求1所述的柔性光电探测器，其中，所述单壁碳纳米管薄膜上设置有钙钛矿量子点。
  3. 根据权利要求2所述的柔性光电探测器，其中，所述单壁碳纳米管薄膜包括褶皱区域和平坦区域，所述褶皱结构设置于所述褶皱区域。
  4. 根据权利要求3所述的柔性光电探测器，其中，所述褶皱区域包括第一褶皱区域和第二褶皱区域，在形成褶皱的受力方向上，所述第一褶皱区域与所述第二褶皱区域设置在平坦区域两侧。
  5. 根据权利要求4所述的柔性光电探测器，其中，所述钙钛矿量子点设置在第一褶皱区域。
  6. 根据权利要求4所述的柔性光电探测器，其中，所述钙钛矿量子点设置在第二褶皱区域。
  7. 根据权利要求4所述的柔性光电探测器，其中，所述钙钛矿量子点设置在平坦区域。
  8. 根据权利要求4所述的柔性光电探测器，其中，所述钙钛矿量子点设置在平坦区域和第一褶皱区域。
  9. 根据权利要求4所述的柔性光电探测器，其中，所述钙钛矿量子点设置在平坦区域和第二褶皱区域。
  10. 根据权利要求4所述的柔性光电探测器，其中，所述钙钛矿量子点设置在第一褶皱区域和第二褶皱区域。
  11. 根据权利要求1所述的柔性光电探测器，其中，在没有折叠、拉伸的状态下，褶皱结构的截面形状为矩形。
  12. 根据权利要求1所述的柔性光电探测器，其中，在没有折叠、拉伸的状态下，褶皱结构的截面形状为梯形。
  13. 一种柔性光电探测器制备方法，其中，包括：
    提供聚二甲基硅氧烷薄膜；
    在所述聚二甲基硅氧烷薄膜上形成单壁碳纳米管薄膜，将单壁碳纳米管薄膜形成至少一层褶皱结构；
    提供金电极，在单壁碳纳米管薄膜形成褶皱的受力方向上的两端设置金电极。
  14. 根据权利要求13所述的柔性光电探测器制备方法，提供聚二甲基硅氧烷薄膜的步骤包括：将聚二甲基硅氧烷薄膜向侧向两边拉伸30%-50%，拉伸后将其固定在玻璃表面，形成预拉伸的聚二甲基硅氧烷薄膜。
  15. 根据权利要求13所述的柔性光电探测器制备方法，将单壁碳纳米管薄膜形成至少一层褶皱结构的步骤包括：在预拉伸的聚二甲基硅氧烷薄膜上转移单壁碳纳米管薄膜。
  16. 根据权利要求15所述的柔性光电探测器制备方法，在预拉伸的聚二甲基硅氧烷薄膜上转移单壁碳纳米管薄膜的步骤包括：先将单壁碳纳米管薄膜平铺浮于水面，然后用预拉伸的聚二甲基硅氧烷薄膜将其捞起，然后60℃烘干24h。
  17. 根据权利要求13所述的柔性光电探测器制备方法，将单壁碳纳米管薄膜形成至少一层褶皱结构的步骤还包括：将预拉伸的聚二甲基硅氧烷薄膜从玻璃上撕下，此时应变释放，由于弹性作用，聚二甲基硅氧烷薄膜会收缩至原长。
  18. 根据权利要求13所述的柔性光电探测器制备方法，在单壁碳纳米管薄膜形成褶皱的受力方向上的两端设置金电极的步骤包括：在单壁碳纳米管薄膜形成褶皱的受力方向上的两端采用蒸镀或PVD的方式制备金电极。
  19. 根据权利要求13所述的柔性光电探测器制备方法，还包括在所述单壁碳纳米管薄膜上形成有钙钛矿量子点。
  20. 根据权利要求19所述的柔性光电探测器制备方法，在单壁碳纳米管薄膜上形成有钙钛矿量子点的步骤包括：在单壁碳纳米管薄膜上采用化学沉积的方式形成钙钛矿量子点。
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