WO2020181620A1 - Système d'impression 3d par projection stéréoscopique grand format de haute précision et procédé d'impression associé - Google Patents

Système d'impression 3d par projection stéréoscopique grand format de haute précision et procédé d'impression associé Download PDF

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WO2020181620A1
WO2020181620A1 PCT/CN2019/083761 CN2019083761W WO2020181620A1 WO 2020181620 A1 WO2020181620 A1 WO 2020181620A1 CN 2019083761 W CN2019083761 W CN 2019083761W WO 2020181620 A1 WO2020181620 A1 WO 2020181620A1
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film
printing
resin
layer
sample stage
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PCT/CN2019/083761
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English (en)
Chinese (zh)
Inventor
夏春光
方雷
郭再勋
何贺敬
付良康
罗刚
蔡俊林
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无锡摩方精密科技有限公司
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Publication of WO2020181620A1 publication Critical patent/WO2020181620A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor

Definitions

  • the invention belongs to the technical field of 3D printing, and specifically relates to a high-precision large-format stereo projection 3D printing system and a printing method thereof.
  • Stereolithography (printing) first appeared as a rapid prototyping technology. Rapid prototyping technology or 3D printing technology refers to a series of technologies that directly generate full-scale samples from computer models. They are much faster than traditional mechanical cutting. Since Chuck Hull invented stereo lithography in 1986, it has played its role in many fields economically and quickly, such as visualization of complex components, error detection of initial design, verification of design functions of important initial components, and theoretical design verification. In the past few decades, people's investment in micro-electromechanical systems (MEMS) has led to the emergence of micro-scale stereo lithography, which inherits the basic principles of traditional stereo lithography, but can achieve micro-scale precision.
  • MEMS micro-electromechanical systems
  • the resin curing technology based on single-photon and two-photon can even reach an accuracy of 200 nanometers.
  • these technologies are based on serial sequential scanning of laser spots on the resin surface or inside, which greatly affects the printing speed and cost-effectiveness.
  • micro display devices such as micro liquid crystal displays (LCD) and Texas Instruments’ digital light processor (DLP).
  • LCD micro liquid crystal displays
  • DLP digital light processor
  • the picture is imaged by photo-mechanical imaging and projected onto the photosensitive resin liquid surface to be cured, and the model design generated by the computer is copied through multi-layer superposition.
  • Each microdisplay chip has a certain size, such as the currently popular high-definition resolution 1920X1080.
  • the present invention provides a high-precision large-format stereo projection 3D printing system and a printing method thereof.
  • a DLP-based micro-stereolithography system design is provided to solve high-precision 3D printing at the same time. And meet the needs of large format.
  • This technology has a wide range of applications, from structural engineering, material engineering, to biological and medical engineering; from the macro-optical scale (above the centimeter level) to the micro-scale (under the millimeter).
  • a high-precision large-format stereo projection 3D printing system including a DLP optical engine with a light source, a projection lens and a resin tank;
  • the light path projected by the DLP optical engine is reflected and projected by the thin-film beam splitter into the projection lens, and the projection lens is projected onto the interface between the thin film and the resin in the resin tank;
  • a laser displacement meter is provided on one side of the projection lens
  • An image controller is also provided on one side of the thin-film beam splitter, and the monitoring optical path of the image controller coincides with the projection optical path reflected by the thin-film beam splitter;
  • the sample stage is located in the resin tank, the resin tank is also provided with a film, and also includes a movement control system.
  • the movement control system controls the resin tank and the sample stage to move in the horizontal XY plane, controls the height of the sample stage, and controls Height movement of resin tank and film height;
  • the resin tank is also provided with a film clamp and a bubble scraper;
  • the film clamp includes a hollow lower clamp and a middle short tubular upper clamp; the film is fixed on the lower clamp of the film clamp, and the upper clamp Press down to form a downwardly convex membrane surface, the outer side of the membrane surface is located below the liquid surface of the resin;
  • the film is located directly below the projection lens in the direction of gravity. This helps to collect air bubbles during the printing process.
  • a bubble scraper is provided under the film; the blade of the bubble scraper is a smooth cylindrical surface, which is supported by a spring and installed on the scraper body, and the blade contacts the film elastically; the movement control system controls the movement of the scraper.
  • a high-precision large-format stereo projection 3D printing method includes the following steps:
  • the three-dimensional geometric model will be further sliced into two-dimensional pictures in one direction, each picture represents a thin layer in the three-dimensional model, and the slice direction of the model is printed by the printer direction;
  • the resulting series of pictures will be read by the printing system and projected to the interface between the film and the resin; within a certain period of time, where there is light, a cured layer of a certain thickness will be produced, which represents the corresponding model in the projected picture. layer;
  • the sample stage and sample will drop by 1-2 mm and separate from the film;
  • the less-returned distance is the thickness of the next layer.
  • the gap between the printed sample and the film is filled with the resin layer needed to print the next layer; the exposure is repeated successively, as the sample stage moves layer by layer Down, the model is copied in the resin tank.
  • the stitching printing mode is adopted; the picture representing the first layer of the model is cut into multiple sub-pictures less than a single DLP resolution. For each layer in the model, multiple exposures Finish, project all sub-pictures of the current layer in turn.
  • the present invention provides a high-precision large-format stereo projection 3D printing system and a printing method thereof, which provide a high-precision, large-format processing capability, which is useful in the fields of microelectromechanical (MEMS), biomedical, industrial connectors and Other developments in the field of micromachining provide an advanced and precise approach.
  • MEMS microelectromechanical
  • Figure 1 is a schematic diagram of the system structure of the present invention
  • FIG. 2 is a schematic diagram of the structure of the film clamp of the present invention.
  • FIG. 3 is a schematic diagram of the structure of the bubble scraper of the present invention.
  • Figure 5 is a schematic diagram of error stitching in stitching printing mode; where A, single exposure format; B, accurate stitching in the x direction, C, error stitching in the x direction; B', accurate stitching in the y direction, and C', error stitching in the y direction ;
  • Figure 6 is a schematic diagram of three printing modes
  • Fig. 7 shows the vertical adjustment steps of the sample stage and the optical axis of the present invention.
  • a high-precision large-format stereoscopic projection 3D printing system includes a DLP light engine 1 with a light source, a projection lens 4 and a resin tank 8;
  • the light path projected by the DLP optical engine 1 is reflected and projected by the film splitter 3 into the projection lens 4, and the projection lens 4 is projected onto the interface between the film 7 and the resin in the resin tank 8;
  • the thin-film beam splitter 3 can also be a millimeter-thick splitter lens made of glass. However, for the wavelength of light used, one side of the lens should be coated with a reflective film and the other side with an antireflection coating to eliminate ghosting.
  • a laser displacement meter 5 is provided on one side of the projection lens 4;
  • An image controller 2 is also provided on one side of the thin-film beam splitter 3, and the monitoring light path of the image controller 2 coincides with the projection light path reflected by the thin-film beam splitter 3;
  • the sample stage 9 is located in the resin tank 8.
  • the resin tank 8 is also provided with a film 7, and also includes a movement control system.
  • the movement control system controls the resin tank 8 and the sample stage 9 to move in the horizontal XY plane, and controls The height movement of the sample stage 9 controls the height movement of the resin tank 8 and the film 7;
  • the resin tank 8 is also provided with a film clamp 10 and a bubble scraper 6;
  • the film clamp 10 includes a hollow lower clamp and a middle short tubular upper clamp;
  • the film 7 is fixed on the lower clamp of the film clamp 10 , Forming a downwardly convex film surface under the squeeze of the upper clamp, and the outer surface of the film surface is located below the liquid surface of the resin;
  • the film 7 is located directly under the direction of gravity of the projection lens 4. This helps to collect air bubbles during the printing process.
  • a bubble scraper 6 is provided under the film 7; the blade 61 of the bubble scraper 6 is a smooth cylindrical surface, supported by a spring 62 and installed on the scraper body, and the blade 61 is in elastic contact with the film 7; the movement control system Control the movement of the scraper.
  • the display of the printed image is DLP of Texas Instruments, or it can be a reflective LCD screen LCOS.
  • LCOS is considered to have better image brightness and contrast than traditional transmissive LCD screens.
  • Each pixel of it will adjust the reflected light according to the applied voltage. The polarization state. Therefore, adding a polarizer to the optical path allows the reflected light of the corresponding polarized pixel to pass through to form an image.
  • Texas Instruments invented the DLP technology in 1987, which is different from the principle of changing the polarization state of the reflected light on the LCD screen.
  • Each pixel in the DLP is a tiny mirror. It controls the whereabouts of the reflected light by deflecting the micro-mirror.
  • Each lens can be deflected by ⁇ 10o.
  • Bright pixels are reflected light entering the lens, and the opposite are dark pixels.
  • the gray scale of the image is controlled by the frequency of lens deflection.
  • DLP chips have better UV compatibility and higher contrast than liquid crystal chips.
  • the resolution of the DLP chip used in this embodiment is 1920X1080, and chips with higher resolution can also be applied.
  • the size of each micro lens is 7.6umX7.6um, and the wavelength of the light source used is 405 nm.
  • the monitoring camera 2 is applied in the printing light path.
  • the image When the printed image on the DLP chip is projected on the interface between the film 7 and the resin, the image must be clear and the contrast must be strong, for example, greater than 5:1. This requires the interface to be on the optical focal plane of the projection lens 4.
  • the focal depth of the projection lens 4 is between tens of microns to one or two hundred microns. Such a size is difficult to guarantee for the mechanical assembly of multiple parts. Therefore, after hardware assembly, it is necessary to use the image analysis function of the surveillance camera and control the corresponding motion axis to make the interface on the focal plane.
  • the pixel size of the camera is generally required to be smaller than the pixel size of the DLP.
  • the 2 pixel size of the surveillance camera used in the system is 5 microns.
  • This camera is not only a focusing function, for a lens with a focal depth of tens of microns, it can be used to adjust the verticality of the sample stage 9 and the film 7 relative to the optical axis of the lens.
  • the optical path part includes the DLP optical engine 1 commercialized on the market, which includes a light source.
  • the projection light path and the monitoring light path overlap, so the thin film beam splitter 3 is used.
  • a 5 micron thin film beam splitter is used Mirror 3, the reflection and transmission ratio is around 95:5.
  • the beam splitter and beam splitter cube of other materials are also available.
  • the selection of the projection lens 4 needs to meet the following conditions at the working wavelength: 1.
  • the aperture should be large enough to ensure the clarity and uniformity of the DLP image,> 90%: 2.
  • the pixel size of the DLP on the image plane is the size required by the design , Such as 2 microns or 10 microns; 3.
  • the image reflected from the interface between the film and the resin on the surveillance camera through the lens needs to be complete and uniform.
  • the system installs a high-precision laser displacement meter 5 in parallel beside the lens.
  • a laser displacement meter 5 from Keyence was used, and its accuracy reached 1 micron.
  • other types of displacement meters are also feasible, such as ultrasonic displacement meters.
  • the displacement meter is parallel to the optical axis of the projection lens 4, so the surface perpendicular to the displacement meter probe is related to the perpendicular to the optical axis.
  • the displacement meter selects at least three points that are not on a line on a surface, usually three points forming a right triangle.
  • the displacement meter accurately measures the distance from the point to the displacement meter. If the distance from the point to the displacement meter is different, then this The surface is not perpendicular to the displacement gauge and the optical axis. For this reason, the horizontal mechanism of the plane can be adjusted to make all the points have the same distance from the displacement meter.
  • Such three points define the plane perpendicular to the displacement meter and the optical axis. Accurate recording of this verticality and position is essential to control the accuracy of the printing direction.
  • the resin tank 8 includes a film 7, a film holder 10, a bubble doctor 6, and an immersion type sample stage 9.
  • the film clamp 10 includes a hollow lower clamp and a middle short tubular upper clamp; the film 7 is fixed on the lower clamp of the film clamp 10 to form a downwardly convex film surface under the extrusion of the upper clamp, The outer side of the film surface is located below the liquid surface of the resin.
  • the film clamp 10 has a thickness of 5 mm, and the entire film clamp 10 is immersed in resin 1 to 2 mm to ensure that the lower surface of the film 7 and the resin are completely wetted, while the upper surface is kept dry.
  • the use of the film 7 is mainly to use the deformation of the film to reduce the force that the sample bears when moving up and down in the resin, so as to ensure the integrity of the fine structure; at the same time, the strong tension of the film 7 is used to define the thickness of each layer of resin during printing. Reduce printing time.
  • the film 7 fixed on the hollow lower clamp is pushed through the middle short tubular upper clamp, so that the film 7 is stretched by 20-30%.
  • the material of the film 7 here can be polydimethylsiloxane PDMS, PFA or other transparent plastics, with a thickness ranging from 25 microns to 100 microns.
  • rigid windows with weak adhesion to the cured resin can also be used, such as spraying transparent PDMS on the glass surface or adding a layer of transparent PFA plastic film.
  • Gases will inevitably dissolve during resin preparation and printing. These gases will generate fine bubbles due to the interaction of the movement of the resin and the film during the printing process and the heat generated during the light curing process. These fine bubbles will gradually Combine each other to form millimeter-level bubbles. These bubbles are wrapped in the film at the junction of the resin and the film 7, which will cause the defects of the final printed sample.
  • the equipment frame is projected from the upper part of the gravity direction onto the lower film 7, which makes the air bubbles Due to the buoyancy, it is concentrated under the film 7, and a specially designed bubble scraper 6 is introduced under the film 7, as shown in FIG. 3.
  • the blade 61 of the bubble scraper 6 is blunt and has a smooth cylindrical surface with a radius of 1.5 mm and a length covering the largest printing format.
  • the blade 61 is supported by a spring 62 on the scraper body, so that the blade 61 is in elastic contact with the film 7 or the hard window during scraping, without causing surface damage.
  • a temperature control unit can be added to the resin tank 8.
  • the temperature of the resin tank 8 can be adjusted from room temperature to 100 degrees Celsius.
  • the movement control system of the invention has a total of 5 movement axes, as shown in Figure 1.
  • the two axes control the resin tank 8 and the sample stage 9 to move simultaneously in the XY plane, the Z1 axis that controls the height of the sample stage 9 and the resin tank 8 and the film 7
  • the accuracy of other axis motion control is much higher than the optical accuracy. For example, for the optical accuracy of 10 microns, select the axis control accuracy of 1 micron; 2 Optical accuracy of micron, select the axis control accuracy of 0.5 micron.
  • the three-dimensional geometric model will be further sliced into two-dimensional pictures in one direction, generally black and white, with grayscale. Each picture represents a thin layer in the 3D model.
  • the slicing direction of the model will be the printing direction of the printer.
  • the resulting series of pictures will be read by the printer and projected onto the interface between the film 7 and the resin.
  • a certain thickness of cured layer will be produced where there is light in a certain period of time, which represents the corresponding layer in the model represented by the projected picture.
  • the thickness of the next layer should be reduced, so that the gap between the sample and the film 7 is filled with the resin layer required to print the next layer, as shown in Figure 4.
  • the exposure is repeated successively, and as the sample stage 9 descends layer by layer, the model is replicated in the resin tank 8.
  • a splicing printing mode is proposed.
  • the image representing the first layer of the model will be further sliced into multiple images smaller than a single DLP resolution. For example, a 3800X2000 pixel image can be divided into four 1900X1000 sub-images, and each sub-image will represent A quarter of the area on the first floor.
  • each layer in the model it will be completed through multiple exposures, projecting all the sub-pictures of the current layer in turn.
  • a certain amount of overlap is usually given, usually 10-30 microns.
  • the position and overlap of the exposure of each area are precisely controlled by the XY axis combination.
  • There are two coordinate systems in the system one is the DLP/LCD vertical coordinate system, and the other is a motion coordinate system composed of XY axes. If the two coordinate systems are not completely parallel due to mechanical assembly errors, there will be misalignment errors in adjacent areas during stitching printing, as shown in Figure 5. For this reason, the measured error will be compensated in the stitching printing mode.
  • the compensation amount in the X and Y directions can be different, and the compensation amount in different areas is also different, but it is often linear. Due to the existence of the X and Y axes, for samples with a smaller print format than the DLP chip, multiple identical samples can be printed repeatedly in the entire format, which can increase the speed of mass production. There are three printing modes as shown in Figure 6. Of course, for samples that require splicing mode, if the format is small enough, multiple samples can be printed at one time, but it is generally processed as splicing printing.
  • auxiliary optical equipment is required for 3D printing equipment where the focal depth of the projection lens 4 is greater than the accuracy requirements, such as 10 micron and 50 micron optical precision equipment.
  • Keyence's laser displacement meter 5 is selected, which can reach 1 micron Measurement accuracy.
  • the system status of the printer needs to be readjusted due to human misoperation or hardware updates. There are two main adjustments. One is the perpendicularity of the film/hard window and the sample stage 9 to the optical axis of the projection lens 4. If both surfaces are perpendicular to the optical axis, they are parallel to each other; the other is the film/hard window.
  • sample stage 9 After the sample stage 9 is adjusted to be vertical, use the feedback of the monitoring camera to move the sample stage 9 to the focal plane of the projection lens 4, and record the position of the displacement meter and the 9-axis Z1 of the sample stage, which is the starting position of printing.

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Abstract

La présente invention a trait au domaine technique de l'impression 3D et concerne, plus particulièrement, un système d'impression 3D par projection stéréoscopique grand format de haute précision, ainsi qu'un procédé d'impression associé. Selon l'invention, un trajet de lumière projeté par un projecteur optique à traitement numérique de la lumière (DLP) est réfléchi et projeté par un séparateur de lumière à film mince pour pénétrer dans une lentille de projection, et la lentille de projection projette le trajet de lumière sur une surface interfaciale entre un film mince et une résine dans un réservoir de résine ; un dispositif de mesure de déplacement laser est disposé d'un côté de la lentille de projection ; un dispositif de commande d'images est disposé d'un côté du séparateur de lumière à film mince, et un trajet de lumière de surveillance du dispositif de commande d'images coïncide avec le trajet de lumière projeté, réfléchi par le séparateur de lumière à film mince ; et un étage d'échantillon est situé dans le réservoir de résine, un film mince est également disposé dans le réservoir de résine, et un système de commande de mouvement commande le mouvement du réservoir de résine, de l'étage d'échantillon et du film mince. Un modèle géométrique tridimensionnel est segmenté en images bidimensionnelles, ces images sont lues par le système d'impression en séquence et sont projetées sur la surface interfaciale du film mince et de la résine, une couche de durcissement est formée par exposition, et l'étage d'échantillon descend et est séparé du film mince ; et une exposition répétée est réalisée en séquence. La présente invention permet d'obtenir une capacité d'usinage grand format de haute précision, ainsi qu'un moyen de découpe précise avancée dans le domaine du micro-usinage.
PCT/CN2019/083761 2019-03-13 2019-04-23 Système d'impression 3d par projection stéréoscopique grand format de haute précision et procédé d'impression associé WO2020181620A1 (fr)

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CN201910189267.2 2019-03-13
CN201910189267.2A CN109822891B (zh) 2019-03-13 2019-03-13 一种高精度大幅面立体投影3d打印系统及其打印方法

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