WO2020179761A1 - Socket - Google Patents

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Publication number
WO2020179761A1
WO2020179761A1 PCT/JP2020/008811 JP2020008811W WO2020179761A1 WO 2020179761 A1 WO2020179761 A1 WO 2020179761A1 JP 2020008811 W JP2020008811 W JP 2020008811W WO 2020179761 A1 WO2020179761 A1 WO 2020179761A1
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WO
WIPO (PCT)
Prior art keywords
cam
pressing
pressing surface
pressed
pressed surface
Prior art date
Application number
PCT/JP2020/008811
Other languages
French (fr)
Japanese (ja)
Inventor
一也 武藤
Original Assignee
株式会社エンプラス
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Filing date
Publication date
Application filed by 株式会社エンプラス filed Critical 株式会社エンプラス
Publication of WO2020179761A1 publication Critical patent/WO2020179761A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R33/00Coupling devices specially adapted for supporting apparatus and having one part acting as a holder providing support and electrical connection via a counterpart which is structurally associated with the apparatus, e.g. lamp holders; Separate parts thereof
    • H01R33/74Devices having four or more poles, e.g. holders for compact fluorescent lamps
    • H01R33/76Holders with sockets, clips, or analogous contacts adapted for axially-sliding engagement with parallely-arranged pins, blades, or analogous contacts on counterpart, e.g. electronic tube socket

Definitions

  • the present invention relates to a socket for inspecting electronic components.
  • Patent Document 1 discloses an inspection device that adjusts the height of a member for applying pressure to an object to be inspected by rotating a handle arm connected to an eccentric cam.
  • the present invention provides a socket in which the height of a member for applying a pressure to a device under test can be easily switched.
  • the socket according to the present invention includes a base, a first pressed surface, and an inspected body pressing member having a second pressed surface located closer to the base than the first pressed surface.
  • a cam for pressing the object-pressing member to be inspected toward the base is provided, and the cam comes into contact with the first pressed surface when it is rotated by a first angle around a rotation axis from a reference posture.
  • One pressing surface and a second pressing surface that comes into contact with the second pressed surface when rotated by the second angle about the rotation axis from the reference posture.
  • a socket in which the height of a member for applying a pressure to a device under test can be easily switched.
  • FIG. 1 is a perspective view of a socket according to an embodiment of the present invention.
  • FIG. 2 is a perspective view of the object pressing member according to the embodiment of the present invention.
  • FIG. 3 is a front view of the cam according to the embodiment of the present invention.
  • FIG. 4 is a perspective view of the pressure plate according to the embodiment of the present invention.
  • FIG. 5 is a diagram showing a part of the cross-sectional view taken along the line AA shown in FIG.
  • FIG. 6 is a cross-sectional view taken along the line BB shown in FIG.
  • FIG. 7 is a cross-sectional view taken along the line CC shown in FIG.
  • FIG. 8 is a cross-sectional view taken along the line DD shown in FIG. FIG.
  • FIG. 9 is a diagram showing a part of a vertical cross-sectional view of the socket according to the embodiment of the present invention.
  • FIG. 10 is a schematic view of the socket according to the embodiment of the present invention in a state before pressure is applied to a relatively thick inspection object.
  • FIG. 11 is a schematic view of the socket according to the embodiment of the present invention in a state where pressure is applied to a relatively thick inspection object.
  • FIG. 12 is a schematic view of the socket according to the embodiment of the present invention in a state before pressure is applied to a relatively thin inspection object.
  • FIG. 13 is a schematic view of the socket according to the embodiment of the present invention in a state where pressure is applied to a relatively thin inspection object.
  • FIG. 14 is a schematic view of a socket according to an embodiment of the present invention in a state of being erroneously operated.
  • FIG. 15 is a schematic view of a socket according to an embodiment of the present invention in which the safety device is in a functioning state.
  • FIG. 16 is a front view of a cam according to a modified example of the present invention.
  • a three-dimensional Cartesian coordinate system including an X-axis, a Y-axis, and a Z-axis is drawn.
  • the positive direction of the X axis is defined as the +X direction
  • the positive direction of the Y axis is defined as the +Y direction
  • the positive direction of the Z axis is defined as the +Z direction (upward direction).
  • FIG. 1 is a perspective view of a socket 1 according to an embodiment of the present invention, and the details of which will be apparent from a later description, show the socket 1 in a pressurized state in which a pressure is applied to a device under test. ..
  • the socket 1 is arranged on the wiring board 100.
  • the socket 1 includes a base 2, a cover 3, a latch portion 4, an object pressing member 5 (for example, a heat sink that also serves as a heat radiating member), a cam 6, a bail 7, a pressure plate 8, and the like.
  • object pressing member 5 for example, a heat sink that also serves as a heat radiating member
  • cam 6 for example, a cam 6, a bail 7, a pressure plate 8, and the like.
  • the base 2 has a body portion 21 and a mounting portion 22 (see FIG. 5).
  • the body portion 21 supports the cover 3 and the latch portion 4. Further, the body portion 21 is a frame member constituting the main body portion of the base 2.
  • the placing portion 22 is a member for placing an object to be inspected, and is surrounded by the body portion 21 (see FIG. 5).
  • a plurality of contact pins are provided on the mounting portion 22. The contact pin comes into contact with a connection terminal (not shown) arranged on the wiring board 100.
  • the cover 3 is a member that covers the socket 1 from above.
  • the cover 3 has an accommodation hole 3a (see FIG. 8) in which a second spring 132 described later is accommodated, and an engaged portion 3b (see FIG. 7) with which the latch portion 4 engages.
  • the cover 3 is rotatably fixed to the + Y direction side of the body portion 21 via the shaft 111.
  • the operator of the socket 1 can open and close the cover 3 by rotating the cover 3 around the shaft 111.
  • the cover 3 does not necessarily have to be rotatably fixed to the body portion 21.
  • the cover 3 may be detachably configured with respect to the body portion 21.
  • the latch portion 4 has an engaging portion 4a, and is rotatably fixed to the ⁇ Y direction side of the body portion 21 via a latch shaft 113 (see FIG. 7).
  • the operator of the socket 1 can maintain the closed state of the cover 3 by rotating the latch portion 4 to engage the engaging portion 4a with the engaged portion 3b.
  • the inspection object pressing member 5 is a member for applying pressure from the +Z direction side to the inspection object placed on the placing part 22 during the inspection. When pressure is applied to the inspection object, the connection terminals provided on the inspection object and the connection terminals of the wiring board 100 are electrically connected via the contact pins of the mounting portion 22. Further, the inspection object pressing member 5 functions as a heat radiating member for removing heat from the inspection object under inspection and releasing the heat to the surroundings to keep the inspection object at a predetermined temperature.
  • the object pressing member 5 has a hard stop portion 51, a pressing portion 52 (see FIG. 5), a brim portion 53, and the like.
  • the hard stop portion 51 is a portion pushed by the cam 6 due to the rotation of the cam 6.
  • the hard stop unit 51 will be described in detail later.
  • the pressurizing unit 52 is a portion that comes into contact with the object to be inspected when pressure is applied to the object to be inspected.
  • the cam 6 is a member that rotates around the rotation axis O and presses the inspection object pressing member 5 toward the mounting portion 22.
  • FIG. 3 which is a front view of the cam 6, the cam 6 has a first pressing surface 61, a second pressing surface 62, a non-pressing surface 63, a flank surface 64, and the like.
  • the cam 6 has a plurality of side surfaces parallel to the rotation axis O, that is, a first pressing surface 61, a second pressing surface 62, a non-pressing surface 63, a flank surface 64, and the like.
  • the rotation axis O is parallel to the X-axis direction.
  • the first pressing surface 61 is one side surface of the cam 6, and is located on the ⁇ Y direction side with respect to the rotation axis O.
  • the second pressing surface 62 is located on the +Y direction side with respect to the rotation axis O and on the ⁇ X direction side with respect to the first pressing surface 61.
  • the first pressing surface 61 and the second pressing surface 62 are parallel to each other.
  • the non-pressing surface 63 is a side surface (bottom surface of the cam 6 in FIG. 3) different from the first pressing surface 61 and the second pressing surface 62 of the cam 6.
  • the non-pressing surface 63 is perpendicular to the first pressing surface 61 and the second pressing surface 62.
  • the curved surface 63a connects the first pressing surface 61 and the non-pressing surface 63
  • the curved surface 63b connects the second pressing surface 62 and the non-pressing surface 63.
  • the flank surface 64 is a side surface of the cam 6 located on the +Y direction side with respect to the rotation axis O and on the +X direction side of the second pressing surface 62.
  • the cam 6 has a flank surface 65 located on the ⁇ Y direction side with respect to the rotation axis O and on the ⁇ X direction side with respect to the first pressing surface 61 (see FIG. 5). )have.
  • a shaft hole 66 is formed in the cam 6 along the X axis.
  • the shaft hole 66 is a hole through which the shaft 112 (FIG. 5) is inserted.
  • the distance x1 from the rotation axis O to the first pressing surface 61 and the distance x2 from the rotation axis O to the second pressing surface 62 are equal to each other.
  • the distance x3 from the rotation axis O to the non-pressing surface 63 is shorter than the distance x1 and the distance x2.
  • the bail 7 is connected to two cams 6 and functions as a knob when rotating the cam 6.
  • the pressure plate 8 is a member that is supported by the cover 3 and also supports the member to be inspected pressing member 5 and the cam 6.
  • the pressure plate 8 is a member that functions as a safety device for the socket 1.
  • the pressure plate 8 has two cam holding portions 81, a plurality of first spring arranging portions 82, a plurality of second spring arranging portions 83, and the like.
  • Each cam holding portion 81 has two protruding portions 81a and 81b.
  • the protrusions 81a and 81b are parallel to each other and protrude from the upper surface 8a of the pressure plate 8 in the +Z direction.
  • a cam 6 is inserted between the protrusions 81a and 81b.
  • a shaft hole through which the shaft 112 is inserted is formed in the protrusions 81a and 81b along the X-axis.
  • a hard stop insertion hole 81c through which the hard stop portion 51 is inserted is formed in the cam holding portion 81 along the Z axis.
  • the first spring 131 is arranged in the first spring arrangement portion 82 (see FIG. 7), and the second spring 132 is arranged in the second spring arrangement portion 83 (see FIG. 8).
  • Guide pin through holes 82a (see FIG. 7) and 83a are formed in the first spring arrangement portion 82 and the second spring arrangement portion 83, respectively, along the Z axis.
  • FIG. 5 is a diagram showing a part of the cross-sectional view taken along the line AA shown in FIG.
  • FIG. 6 is a cross-sectional view taken along the line BB shown in FIG. 5 and 6 show a state (pressurized state) in which the relatively thick inspected body S1 is placed on the placing portion 22 and pressure is applied to the inspected body S1.
  • the hard stop portion 51 is inserted into the hard stop insertion hole 81c.
  • the hard stop portion 51 has a first pressed surface 51a and a second pressed surface 51b.
  • the second pressed surface 51b is located closer to the mounting portion 22 than the first pressed surface 51a.
  • the second pressed surface 51b is located on the ⁇ Z direction side of the first pressed surface 51a.
  • a stepped shape is formed by the first pressed surface 51a and the second pressed surface 51b, and the distance from the first pressed surface 51a to the second pressed surface 51b is g1. Both the first pressed surface 51a and the second pressed surface 51b are flat surfaces.
  • the cam 6 is arranged between the protruding portions 81 a and 81 b of the cam holding portion 81, and is rotatably attached to the pressure plate 8 by the shaft 112.
  • the first pressing surface 61 contacts the first pressed surface 51a and presses the inspection object pressing member 5 when the cam 6 rotates around the shaft 112 by the first angle from the non-pressurized state.
  • the second pressing surface 62 contacts the second pressed surface 51b and presses the inspection object pressing member 5 when the cam 6 rotates about the shaft 112 by the second angle from the non-pressurized state.
  • the value of the second angle is a negative value of the first angle.
  • the second pressing surface 62 comes into contact with the second pressed surface 51b when the cam 6 rotates 90 degrees clockwise around the shaft 112 from the non-pressurized state, and contacts the object pressing member 51b. Press 5.
  • the state at this time is shown in FIG.
  • the first pressing surface 61 is the first pressed surface when the cam 6 rotates 90 degrees around the shaft 112 and counterclockwise from the non-pressurized state. It comes into contact with the surface 51a and presses the object pressing member 5.
  • the first angle is 90 degrees counterclockwise and the second angle is 90 degrees clockwise (counterclockwise).
  • the flank 64 is adjacent to the second pressing surface 62 and forms a step shape together with the second pressing surface 62.
  • the distance from the second pressing surface 62 to the flank surface 64 is larger than g1. Therefore, when the second pressing surface 62 comes into contact with the second pressed surface 51b, a gap is formed between the flank surface 64 and the second pressed surface 51b.
  • the flank 65 forms a staircase shape together with the first pressing surface 61 adjacent to the first pressing surface 61.
  • the orthographic projection of the first pressing surface 61 onto the base 2 is located on the upper surface of the portion 21a shown in FIG.
  • the orthographic projection of the second pressing surface 62 onto the base 2 is located on the upper surface of the portion 21b shown in FIG.
  • the first pressing surface 61 and the second pressing surface 62 are displaced in the X-axis direction of the cam 6. That is, the cam 6 has a two-stage structure. Therefore, the orthogonal projections of the first pressing surface 61 and the second pressing surface 62 on the base 2 do not overlap with each other.
  • the orthogonal projection of the first pressing surface 61 appears on the + X direction side with respect to the orthogonal projection of the second pressing surface 62.
  • the relationship in which the orthographic projections of the first pressing surface 61 and the second pressing surface 62 do not overlap each other is maintained regardless of the rotation angle around the rotation axis O.
  • the second pressing surface 62 is in contact with the second pressed surface 51b.
  • This contact is a contact between planes. Therefore, the operator of the socket 1 operates the bail 7 so as to be in the pressurized state shown in FIGS. 5 and 6, and then moves the bail 7 in order to prevent the bail 7 from returning to the non-pressurized state. There is no need to perform the fixing operation. Further, it is not necessary to provide the socket 1 with a mechanism for preventing the cam 6 from rotating.
  • FIG. 7 is a cross-sectional view taken along the line CC shown in FIG.
  • a guide pin 121 is fixed to the brim portion 53.
  • the guide pin 121 penetrates a guide pin through hole 82a formed in the pressure plate 8 along the Z-axis direction.
  • a first spring 131 which is a compression spring, is arranged in the first spring arrangement portion 82 so as to surround the guide pin 121.
  • the first spring 131 is arranged in a compressed state between the upper surface of the first spring arrangement portion 82 and the lower surface of the head portion of the guide pin 121. Therefore, the first spring 131 exerts a repulsive force so as to press the upper surface of the flange portion 53 of the inspection object pressing member 5 against the lower surface of the pressure plate 8.
  • the inspection body pressing member 5 is supported by the pressure plate 8 so as to be lifted up via the first spring 131 and the guide pin 121.
  • FIG. 8 is a cross-sectional view taken along the line DD shown in FIG.
  • Guide pins 122 are fixed to the cover 3.
  • the guide pin 122 penetrates the guide pin through hole 83a formed in the pressure plate 8.
  • the pressure plate 8 is supported by the cover 3 so that it can be lifted via the guide pin 122.
  • a second spring 132 which is a compression spring, is arranged between the cover 3 and the pressure plate 8. More specifically, the second spring 132 is arranged in the second spring arrangement portion 83 so as to surround the guide pin 122 and be accommodated in the accommodation hole 3a.
  • the second spring 132 is arranged in a compressed state between the upper surface of the second spring arrangement portion 83 and the upper surface of the accommodation hole 3a. Therefore, the second spring 132 exerts a repulsive force so as to separate the pressure plate 8 from the cover 3. In other words, the second spring 132 urges the pressure plate 8 away from the cover 3.
  • the pressure plate 8 can move relative to the cover 3 in the Z-axis direction.
  • FIG. 9 is a view showing a part of a vertical cross-sectional view of the socket 1 in another pressurization state different from the pressurization state shown in FIGS. 5 and 6.
  • the bail 7 is operated so as to tilt to the opposite side ( ⁇ Y direction side) from the state shown in FIG. 1, and the cam 6 is operated from the non-pressurized state around the shaft 112 and counterclockwise.
  • 2 is a part of a cross-sectional view corresponding to the cross-sectional view taken along the line AA in FIG. 1 in a state where it is rotated 90 degrees around (0-degree state).
  • FIG. 9 shows a state (pressurized state) in which the inspection target S2 thinner than the inspection target S1 is placed on the mounting portion 22 and pressure is applied to the inspection target S2. ..
  • the first pressed surface 51a and the first pressing surface 61 are in contact with each other.
  • the first pressed surface 51a is g1 away from the mounting portion 22 than the second pressed surface 51b.
  • the socket 1 can inspect the relatively thick object S1 to be inspected, and the bail 7 can be inspected from the non-pressurized state to the ⁇ Y direction side.
  • the inspected body S2 which is g1 thinner than the inspected body S1.
  • the CAM 6 has the following shape. That is, the part on the +X direction side with respect to the center in the X axis direction has the same shape as the part on the ⁇ X direction side. Therefore, even if the cam 6 is arranged so that the second pressing surface 62 is located on the + X direction side with respect to the first pressing surface 61, the cam 6 has exactly the same posture as shown in FIGS. 1 and 5. Become a posture. Therefore, it is not necessary to pay attention to the direction of the cam 6 when connecting the cam 6 to the bail 7, and the socket 1 can be easily manufactured.
  • the +X direction side portion and the ⁇ X rear side portion do not necessarily have to have the same shape, and may satisfy the following (1)-(4).
  • the distance x1 is equal to the distance x2.
  • the orthogonal projections of the first pressing surface 61 and the second pressing surface 62 on the base 2 do not overlap each other.
  • the distance from the first pressing surface 61 to the flank 65 is larger than g1.
  • the distance from the second pressing surface 62 to the flank 64 is larger than g1.
  • FIG. 10 is a schematic view of the socket 1 according to the embodiment of the present invention in a state before pressure is applied to the relatively thick inspection object S1. That is, FIG. 10 shows the socket 1 in the non-pressurized state. In the non-pressurized state, the bail 7 stands upright with respect to the mounting portion 22.
  • the non-pressed surface 63 of the cam 6 is in contact with the first pressed surface 51a.
  • the first spring 131 urges the object pressing member 5 to be inspected in a direction approaching the cover 3 (+ Z direction).
  • the second spring 132 urges the pressure plate 8 in a direction away from the cover 3 ( ⁇ Z direction). Therefore, the pressure plate 8 is positioned with the lower surface of the pressure plate 8 pressed against the lower surface of the head portion of the guide pin 122.
  • the cam 6 rotates around the shaft 112 and clockwise. Then, the curved surface 63b comes into contact with the second pressed surface 51b. At this time, the pressure plate 8 does not move. Further, the second pressed surface 51b is pressed by the curved surface 63b, and the pressurizing portion 52 moves in the ⁇ Z direction and approaches the placing portion 22. As the pressurizing portion 52 approaches the mounting portion 22, the first spring 131 contracts.
  • the second The pressing surface 62 comes into contact with the second pressed surface 51b.
  • the pressurizing portion 52 comes into contact with the inspection object S1 and the pressure is applied to the inspection object S1. Therefore, the connection terminal of the inspection object S1 and the connection terminal of the wiring board 100 are electrically connected via the contact pins of the mounting portion 22, and the inspection of the inspection object S1 can be performed.
  • FIG. 12 is a schematic diagram of the socket 1 according to the embodiment of the present invention in a state before pressure is applied to the relatively thin inspection object S2.
  • the only difference from the state shown in FIG. 10 is that the object to be inspected S2 is placed on the mounting portion 22, and the states of the cam 6, bail 7, first spring 131 and second spring 132. There is no difference.
  • the cam 6 rotates around the shaft 112 and counterclockwise. Then, the curved surface 63a comes into contact with the first pressed surface 51a. At this time, the pressure plate 8 does not move.
  • the first pressed surface 51 a is pressed by the curved surface 63 a, the pressing portion 52 moves in the ⁇ Z direction, and approaches the mounting portion 22. As the pressurizing portion 52 approaches the mounting portion 22, the first spring 131 contracts.
  • the moving distance of the object pressing member 5 to be inspected is the moving distance of the object pressing member 5 to be inspected when the cam 6 is rotated 90 degrees clockwise around the shaft 112 (the cam 6 is in a state of 180 degrees). It is g1 longer than the travel distance. Therefore, as shown in FIG. 13, the pressurizing unit 52 comes into contact with the inspection object S2 that is thinner than the inspection object S1 by g1 and the pressure is applied to the inspection object S2. Therefore, the connection terminal of the inspection object S2 and the connection terminal of the wiring board 100 are electrically connected via the contact pin of the mounting portion 22, and the inspection of the inspection object S2 can be performed.
  • the socket 1 operates as follows.
  • the inspection object pressing member 5 does not move.
  • the force applied to the inspection object S1 is a combined force of the repulsive forces of the plurality of second springs 132 at the maximum. Therefore, by setting the natural length and elastic modulus of the second spring 132 to appropriate values, it is possible to prevent the inspected body S1 from being damaged by applying an excessive force (pressure) to the inspected body S1. .. That is, the pressure plate 8 and the second spring 132 also function as safety devices.
  • the distance between the pressurizing portion 52 and the mounting portion 22 can be adjusted by rotating the cam 6 having a plurality of pressing surfaces, so that a plurality of types of thicknesses can be used.
  • the object to be inspected can be inspected with a single device.
  • both the pressing surface of the cam 6 and the pressed surface of the hard stop portion 51 are flat surfaces, the contact state can be stably maintained as compared with the contact between curved surfaces and flat surfaces or curved surfaces. Therefore, the work for fixing the rotation of the cam 6 is not required to maintain the contact state.
  • the height of the member (inspection body pressing member 5) for applying pressure to the inspection body from the mounting portion 22 can be easily switched.
  • the cam 6 has a two-step structure in which the first pressing surface 61 and the second pressing surface 62 are displaced from each other in the X-axis direction. Further, the distance x1 and the distance x2 are equal to each other. Further, the hard stop portion 51 of the inspection object pressing member 5 has a first pressed surface 51a and a second pressed surface 51b which are different in distance from the mounting portion 22. Therefore, the distance between the first pressed surface 51a and the second pressed surface 51b of the hard stop portion 51 is the moving distance of the inspected body pressing member 5 in the ⁇ Z direction according to the rotation direction of the cam 6. Corresponds to the difference.
  • the cam 6 can be easily manufactured and the secondary processing cost can be reduced. Specifically, the cam 6 can be manufactured as a molded product, and the manufacturing cost can be reduced.
  • the cam 6 has a two-stage structure, and the pressed surface of the hard stop portion 51 contacting the pressing surface of the cam 6 is switched depending on the direction in which the cam 6 is rotated. Therefore, it is possible to prevent early wear of the pressed surface.
  • the moving distance of the object pressing member 5 to be inspected can be changed depending on the direction in which the cam 6 is rotated, the operator can change the direction in which the bail 7 is tilted, and the operator has two inspected objects having different thicknesses by a simple operation.
  • the body examination can be carried out in a single socket 1.
  • the cam 6 is pressed after the inspection object pressing member 5 contacts the inspection object. And the pressure plate 8 moves in the direction away from the mounting portion 22 (+ Z direction). Therefore, it is possible to prevent the inspected body and the socket 1 from being damaged by applying excessive pressure to the inspected body.
  • socket 1 according to the embodiment of the present invention has been described above, the socket 1 may be modified as described below.
  • the positional relationship among the first pressing surface 61, the second pressing surface 62, and the non-pressing surface 63 of the cam 6 may not be the relationship shown in FIG. 3, for example, the cam 6 is as shown in FIG. It may have a shape.
  • the second pressing surface 62 is parallel to the non-pressing surface 63. Further, it is located on the + Z direction side of the rotation axis O and on the ⁇ X direction side of the flank surface 64.
  • the first pressing surface 61 is perpendicular to the second pressing surface 62 and the non-pressing surface 63.
  • the state in which the bail 7 is tilted toward the ⁇ Y direction (here, the cam 6 is in the 0 degree state) is the non-pressurized state, and the bail 7 is upright with respect to the mounting portion 22.
  • a state in which the bail 7 is tilted in the +Y direction side is a state for inspecting the inspection object S2.
  • the inspection object S1 is inspected when the cam 6 is rotated around the rotation axis O and 90 degrees clockwise (the cam 6 is 90 degrees) from the non-pressurized state (the cam 6 is 0 degree). It is a state to do.
  • a state in which the state further rotated by 90 degrees in the clockwise direction around the rotation axis O is a state for inspecting the inspection object S2.
  • the operator may make a mistaken operation in which the bail 7 is tilted in the wrong direction. There is nothing to do.
  • the distance x1 from the rotation axis O to the first pressing surface 61 and the distance x2 from the rotation axis O to the second pressing surface 62 may have different lengths. It suffices that the distance from the second pressing surface 62 to the second pressed surface 51b and the distance from the first pressed surface 51a to the second pressed surface 51b be larger than g1.
  • the object pressing member 5 to be inspected may have three or more pressed surfaces, and the cam 6 may also have three or more pressing surfaces.
  • the inspected member pressing member 5 further has a third pressed surface located closer to the base 2 (-Z direction) than the second pressed surface 51b, and the cam 6 rotates around the rotation axis O. It may further have a third pressing surface that comes into contact with the third pressed surface when rotated by a predetermined angle. By doing so, it is possible to inspect an object to be inspected having a thickness of more than two types with a single socket 1.
  • the cam 6 does not necessarily have the shape shown in FIGS. 3, 5, 16 and the like, and for example, the cam 6 does not have to have the flank surface 65. That is, the first pressing surface 61 may be formed from the vicinity of the end of the cam 6 on the +X direction side to the vicinity of the end of the cam 6 on the ⁇ X direction side.
  • first pressing surface 61 and the second pressing surface 62 are formed on the cam 6 so that the orthogonal projections of the first pressing surface 61 and the second pressing surface 62 on the base 2 overlap each other. May be.
  • the dimension of the flank surface 65 in the X-axis direction is shorter than the dimension of the flank surface 65 in the X-axis direction shown in FIGS. 5 and 10
  • the dimension of the first pressing surface 61 in the X-axis direction is It may be longer than the dimension of the first pressing surface 61 shown in FIGS. 5 and 10 in the X-axis direction.
  • the cam 6 in the vicinity of the center position of the cam 6 in the X-axis direction, the cam 6 is arranged so that the second pressing surface 62 is located on the +Y direction side and the first pressing surface 61 is located on the ⁇ Y direction side. It may be configured.
  • the object pressing member 5 having the hard stop portion 51 shown in FIGS. 2 and 5 may be used.
  • the present invention is suitably used as a socket for inspecting electronic components.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Connecting Device With Holders (AREA)

Abstract

Provided is a socket wherein it is possible to easily change the height of a member used to apply pressure on an item subject to inspection. This socket is provided with: a base; a to-be-inspected item pressing member which has a first to-be-pressed surface and a second to-be-pressed surface that is located closer to the base than the first to-be-pressed surface is; and a cam which presses the to-be-inspected item pressing member toward the base. The cam has: a first pressing surface that comes into contact with the first to-be-pressed surface when the cam is rotated about a rotational axis thereof by a first angular degree from a reference position; and a second pressing surface that comes into contact with the second to-be-pressed surface when the cam is rotated about the rotational axis by a second angular degree from the reference position.

Description

ソケットsocket
 本発明は、電子部品を検査するためのソケットに関する。 The present invention relates to a socket for inspecting electronic components.
 集積回路(IC)等の電子部品の製造過程において、電子部品を検査するために種々の検査装置が使用される。これらの検査装置の中には、互いに異なる厚さを有する複数種類の被検査体それぞれに所定の圧力を印加するものがある。例えば、特許文献1には、偏心カムに接続しているハンドル腕を回動することで、被検査体に圧力を印加するための部材の高さを調節する検査装置が開示されている。 In the manufacturing process of electronic components such as integrated circuits (ICs), various inspection devices are used to inspect electronic components. Some of these inspection devices apply a predetermined pressure to each of a plurality of types of objects to be inspected having different thicknesses. For example, Patent Document 1 discloses an inspection device that adjusts the height of a member for applying pressure to an object to be inspected by rotating a handle arm connected to an eccentric cam.
特開2010-15894号公報Japanese Unexamined Patent Publication No. 2010-15894
 しかしながら、特許文献1の検査装置を使用して被検査体の検査を行う場合、偏心カムが円形ロール状であるため、ハンドル腕を特定の角度分回動した後、そのハンドル腕をその位置に固定する必要があった。このため、特許文献1の検査装置は、複数の高さに切り替えて検査を行うためには、その都度ハンドル腕を固定する必要があるため、高さを容易に切り替えられるとはいい難かった。 However, when the inspection device of Patent Document 1 is used to inspect an object to be inspected, since the eccentric cam has a circular roll shape, after rotating the handle arm by a specific angle, the handle arm is moved to that position. I had to fix it. For this reason, the inspection device of Patent Document 1 needs to fix the handle arm each time in order to perform the inspection by switching to a plurality of heights, and thus it is difficult to say that the heights can be easily switched.
 そこで本発明は、被検査体に圧力を印加するための部材の高さを容易に切り替えることができるソケットを提供する。 Therefore, the present invention provides a socket in which the height of a member for applying a pressure to a device under test can be easily switched.
 本発明に係るソケットは、ベースと、第1の被押圧面、及び、前記第1の被押圧面よりも前記ベースの近くに位置する第2の被押圧面を有する被検査体押圧部材と、前記ベースに向けて前記被検査体押圧部材を押圧するカムと、を備え、前記カムは、基準姿勢から回転軸周りに第1の角度回転したときに前記第1の被押圧面に接触する第1の押圧面、及び、前記基準姿勢から前記回転軸周りに第2の角度回転したときに前記第2の被押圧面に接触する第2の押圧面を有する。 The socket according to the present invention includes a base, a first pressed surface, and an inspected body pressing member having a second pressed surface located closer to the base than the first pressed surface. A cam for pressing the object-pressing member to be inspected toward the base is provided, and the cam comes into contact with the first pressed surface when it is rotated by a first angle around a rotation axis from a reference posture. One pressing surface and a second pressing surface that comes into contact with the second pressed surface when rotated by the second angle about the rotation axis from the reference posture.
 本発明によれば、被検査体に圧力を印加するための部材の高さを容易に切り替えることができるソケットを提供する。 According to the present invention, there is provided a socket in which the height of a member for applying a pressure to a device under test can be easily switched.
図1は、本発明の実施形態に係るソケットの斜視図である。FIG. 1 is a perspective view of a socket according to an embodiment of the present invention. 図2は、本発明の実施形態に係る被検査体押圧部材の斜視図である。FIG. 2 is a perspective view of the object pressing member according to the embodiment of the present invention. 図3は、本発明の実施形態に係るカムの正面図である。FIG. 3 is a front view of the cam according to the embodiment of the present invention. 図4は、本発明の実施形態に係るプレッシャープレートの斜視図である。FIG. 4 is a perspective view of the pressure plate according to the embodiment of the present invention. 図5は、図1に示されるA-A断面図の一部を示す図である。FIG. 5 is a diagram showing a part of the cross-sectional view taken along the line AA shown in FIG. 図6は、図5に示されるB-B断面図である。FIG. 6 is a cross-sectional view taken along the line BB shown in FIG. 図7は、図5に示されるC-C断面図である。FIG. 7 is a cross-sectional view taken along the line CC shown in FIG. 図8は、図5に示されるD-D断面図である。FIG. 8 is a cross-sectional view taken along the line DD shown in FIG. 図9は、本発明の実施形態に係るソケットの縦断面図の一部を示す図である。FIG. 9 is a diagram showing a part of a vertical cross-sectional view of the socket according to the embodiment of the present invention. 図10は、比較的厚い被検査体に圧力を印加する前の状態にある本発明の実施形態に係るソケットの模式図である。FIG. 10 is a schematic view of the socket according to the embodiment of the present invention in a state before pressure is applied to a relatively thick inspection object. 図11は、比較的厚い被検査体に圧力が印加された状態にある本発明の実施形態に係るソケットの模式図である。FIG. 11 is a schematic view of the socket according to the embodiment of the present invention in a state where pressure is applied to a relatively thick inspection object. 図12は、比較的薄い被検査体に圧力を印加する前の状態にある本発明の実施形態に係るソケットの模式図である。FIG. 12 is a schematic view of the socket according to the embodiment of the present invention in a state before pressure is applied to a relatively thin inspection object. 図13は、比較的薄い被検査体に圧力が印加された状態にある本発明の実施形態に係るソケットの模式図である。FIG. 13 is a schematic view of the socket according to the embodiment of the present invention in a state where pressure is applied to a relatively thin inspection object. 図14は、誤操作された状態にある本発明の実施形態に係るソケットの模式図である。FIG. 14 is a schematic view of a socket according to an embodiment of the present invention in a state of being erroneously operated. 図15は、安全装置が機能した状態にある本発明の実施形態に係るソケットの模式図である。FIG. 15 is a schematic view of a socket according to an embodiment of the present invention in which the safety device is in a functioning state. 図16は、本発明の変形例に係るカムの正面図である。FIG. 16 is a front view of a cam according to a modified example of the present invention.
 以下、実施形態の図面を参照して説明する。各図面には、説明の便宜上、X軸、Y軸及びZ軸からなる三次元直交座標系が描かれている。X軸の正方向を+X方向、Y軸の正方向を+Y方向、Z軸の正方向を+Z方向(上方向)とそれぞれ定義する。 The following will be described with reference to the drawings of the embodiments. In each drawing, for convenience of explanation, a three-dimensional Cartesian coordinate system including an X-axis, a Y-axis, and a Z-axis is drawn. The positive direction of the X axis is defined as the +X direction, the positive direction of the Y axis is defined as the +Y direction, and the positive direction of the Z axis is defined as the +Z direction (upward direction).
 図1は、本発明の実施形態に係るソケット1の斜視図であり、詳細は後の説明から明らかになるが、被検査体に圧力が印加される加圧状態にあるソケット1を示している。ソケット1は、配線基板100上に配設されている。 FIG. 1 is a perspective view of a socket 1 according to an embodiment of the present invention, and the details of which will be apparent from a later description, show the socket 1 in a pressurized state in which a pressure is applied to a device under test. .. The socket 1 is arranged on the wiring board 100.
 ソケット1は、ベース2、カバー3、ラッチ部4、被検査体押圧部材5(例えば、放熱部材を兼ねるヒートシンク)、カム6、ベイル7、及びプレッシャープレート8等を備える。 The socket 1 includes a base 2, a cover 3, a latch portion 4, an object pressing member 5 (for example, a heat sink that also serves as a heat radiating member), a cam 6, a bail 7, a pressure plate 8, and the like.
 ベース2は、ボディ部21及び載置部22(図5参照)を有する。ボディ部21は、カバー3及びラッチ部4を支持している。また、ボディ部21は、ベース2の本体部分を構成する枠部材である。 The base 2 has a body portion 21 and a mounting portion 22 (see FIG. 5). The body portion 21 supports the cover 3 and the latch portion 4. Further, the body portion 21 is a frame member constituting the main body portion of the base 2.
 載置部22は、被検査体を載置するための部材であり、ボディ部21に取り囲まれている(図5参照)。載置部22には、図示せぬ複数のコンタクトピンが配設されている。そのコンタクトピンは、配線基板100に配設された図示せぬ接続端子と接触する。 The placing portion 22 is a member for placing an object to be inspected, and is surrounded by the body portion 21 (see FIG. 5). A plurality of contact pins (not shown) are provided on the mounting portion 22. The contact pin comes into contact with a connection terminal (not shown) arranged on the wiring board 100.
 カバー3は、ソケット1に上から覆い被さる部材である。カバー3は、後に説明する第2ばね132が収容される収容孔3a(図8参照)、及びラッチ部4が係合する被係合部3b(図7参照)を有する。カバー3は、シャフト111を介して回動可能にボディ部21の+Y方向側に固定されている。ソケット1の操作者は、カバー3をシャフト111周りに回動することでカバー3を開閉できる。なお、カバー3はボディ部21に必ずしも回動可能に固定されていなくてもよい。例えば、カバー3は、ボディ部21に対して着脱自在に構成されていてもよい。 The cover 3 is a member that covers the socket 1 from above. The cover 3 has an accommodation hole 3a (see FIG. 8) in which a second spring 132 described later is accommodated, and an engaged portion 3b (see FIG. 7) with which the latch portion 4 engages. The cover 3 is rotatably fixed to the + Y direction side of the body portion 21 via the shaft 111. The operator of the socket 1 can open and close the cover 3 by rotating the cover 3 around the shaft 111. The cover 3 does not necessarily have to be rotatably fixed to the body portion 21. For example, the cover 3 may be detachably configured with respect to the body portion 21.
 ラッチ部4は、係合部4aを有しており、ラッチ軸113を介して回動可能にボディ部21の-Y方向側に固定されている(図7参照)。ソケット1の操作者は、ラッチ部4を回動させて係合部4aを被係合部3bに係合させることにより、カバー3の閉状態を維持させることができる。 The latch portion 4 has an engaging portion 4a, and is rotatably fixed to the −Y direction side of the body portion 21 via a latch shaft 113 (see FIG. 7). The operator of the socket 1 can maintain the closed state of the cover 3 by rotating the latch portion 4 to engage the engaging portion 4a with the engaged portion 3b.
 被検査体押圧部材5は、検査時に載置部22上に載置された被検査体に+Z方向側から圧力を印加するための部材である。被検査体に圧力が印加されると、被検査体に設けられている接続端子と配線基板100の接続端子とが載置部22のコンタクトピンを介して電気的に接続される。また、被検査体押圧部材5は、検査中の被検査体から熱を奪うとともに奪った熱を周囲に放出して被検査体を所定の温度に保つための放熱部材として機能する。 The inspection object pressing member 5 is a member for applying pressure from the +Z direction side to the inspection object placed on the placing part 22 during the inspection. When pressure is applied to the inspection object, the connection terminals provided on the inspection object and the connection terminals of the wiring board 100 are electrically connected via the contact pins of the mounting portion 22. Further, the inspection object pressing member 5 functions as a heat radiating member for removing heat from the inspection object under inspection and releasing the heat to the surroundings to keep the inspection object at a predetermined temperature.
 被検査体押圧部材5の斜視図である図2に示されるように、被検査体押圧部材5は、ハードストップ部51、加圧部52(図5参照)、つば部53等を有する。ハードストップ部51は、カム6の回転によりカム6によって押される部位である。ハードストップ部51については、後に詳細に説明する。加圧部52は、被検査体に圧力を印加するときに被検査体に接する部位である。 As shown in FIG. 2 which is a perspective view of the object pressing member 5 to be inspected, the object pressing member 5 has a hard stop portion 51, a pressing portion 52 (see FIG. 5), a brim portion 53, and the like. The hard stop portion 51 is a portion pushed by the cam 6 due to the rotation of the cam 6. The hard stop unit 51 will be described in detail later. The pressurizing unit 52 is a portion that comes into contact with the object to be inspected when pressure is applied to the object to be inspected.
 再び図1を参照する。2つのカム6は、被検査体押圧部材5の両側に1つずつ配置されている。カム6は、回転軸O周りに回転するとともに載置部22に向けて被検査体押圧部材5を押圧する部材である。カム6の正面図である図3に示されるように、カム6は、第1の押圧面61、第2の押圧面62、非押圧面63、及び逃げ面64等を有する。 Refer to FIG. 1 again. Two cams 6 are arranged on both sides of the object pressing member 5 to be inspected. The cam 6 is a member that rotates around the rotation axis O and presses the inspection object pressing member 5 toward the mounting portion 22. As shown in FIG. 3, which is a front view of the cam 6, the cam 6 has a first pressing surface 61, a second pressing surface 62, a non-pressing surface 63, a flank surface 64, and the like.
 カム6は、回転軸Oと平行な複数の側面、つまり、第1の押圧面61、第2の押圧面62、非押圧面63、及び逃げ面64等を有している。なお、回転軸OはX軸方向と平行である。 The cam 6 has a plurality of side surfaces parallel to the rotation axis O, that is, a first pressing surface 61, a second pressing surface 62, a non-pressing surface 63, a flank surface 64, and the like. The rotation axis O is parallel to the X-axis direction.
 第1の押圧面61は、カム6の一つの側面であり、回転軸Oに対して-Y方向側に位置する。第2の押圧面62は、回転軸Oに対して+Y方向側で、且つ、第1の押圧面61よりも-X方向側に位置する。第1の押圧面61と第2の押圧面62とは互いに平行である。 The first pressing surface 61 is one side surface of the cam 6, and is located on the −Y direction side with respect to the rotation axis O. The second pressing surface 62 is located on the +Y direction side with respect to the rotation axis O and on the −X direction side with respect to the first pressing surface 61. The first pressing surface 61 and the second pressing surface 62 are parallel to each other.
 非押圧面63は、カム6の第1の押圧面61及び第2の押圧面62とは別の側面(図3においてカム6の底面)である。非押圧面63は、第1の押圧面61及び第2の押圧面62と垂直である。 The non-pressing surface 63 is a side surface (bottom surface of the cam 6 in FIG. 3) different from the first pressing surface 61 and the second pressing surface 62 of the cam 6. The non-pressing surface 63 is perpendicular to the first pressing surface 61 and the second pressing surface 62.
 曲面63aは第1の押圧面61と非押圧面63とを接続しており、曲面63bは第2の押圧面62と非押圧面63とを接続している。 The curved surface 63a connects the first pressing surface 61 and the non-pressing surface 63, and the curved surface 63b connects the second pressing surface 62 and the non-pressing surface 63.
 逃げ面64は、回転軸Oに対して+Y方向側で、且つ、第2の押圧面62よりも+X方向側に位置するカム6の側面である。図3には示されていないが、カム6は、回転軸Oに対して-Y方向側で、且つ、第1の押圧面61よりも-X方向側に位置する逃げ面65(図5参照)を有している。 The flank surface 64 is a side surface of the cam 6 located on the +Y direction side with respect to the rotation axis O and on the +X direction side of the second pressing surface 62. Although not shown in FIG. 3, the cam 6 has a flank surface 65 located on the −Y direction side with respect to the rotation axis O and on the −X direction side with respect to the first pressing surface 61 (see FIG. 5). )have.
 カム6には、X軸に沿って軸孔66が形成されている。軸孔66は、シャフト112(図5)が挿通する穴である。ここで、回転軸Oから第1の押圧面61までの距離x1と、回転軸Oから第2の押圧面62までの距離x2とは互いに等しい。他方、回転軸Oから非押圧面63までの距離x3は、距離x1及び距離x2よりも短い。 A shaft hole 66 is formed in the cam 6 along the X axis. The shaft hole 66 is a hole through which the shaft 112 (FIG. 5) is inserted. Here, the distance x1 from the rotation axis O to the first pressing surface 61 and the distance x2 from the rotation axis O to the second pressing surface 62 are equal to each other. On the other hand, the distance x3 from the rotation axis O to the non-pressing surface 63 is shorter than the distance x1 and the distance x2.
 後に詳細に説明するとおり、カム6が図3に示される姿勢をとる状態、つまり非押圧面63が下向きである状態では、カム6は被検査体押圧部材5を押圧しないため、被検査体押圧部材5は被検査体を加圧しない。よって、以下、この状態を非加圧状態と記載する。非加圧状態では、ベイル7は載置部22に対して直立した状態にある(図10及び図12参照)。 As will be described in detail later, when the cam 6 is in the posture shown in FIG. 3, that is, when the non-pressing surface 63 is downward, the cam 6 does not press the object pressing member 5, so that the object to be inspected is pressed. The member 5 does not pressurize the object to be inspected. Therefore, hereinafter, this state will be referred to as a non-pressurized state. In the non-pressurized state, the bail 7 is upright with respect to the mounting portion 22 (see FIGS. 10 and 12).
 再び図1を参照する。ベイル7は、2つのカム6と接続しており、カム6を回転させるときのつまみとして機能する。 Refer to FIG. 1 again. The bail 7 is connected to two cams 6 and functions as a knob when rotating the cam 6.
 プレッシャープレート8は、カバー3に支持されるとともに、被検査体押圧部材5及びカム6を支持する部材である。プレッシャープレート8は、ソケット1の安全装置として機能する部材である。 The pressure plate 8 is a member that is supported by the cover 3 and also supports the member to be inspected pressing member 5 and the cam 6. The pressure plate 8 is a member that functions as a safety device for the socket 1.
 プレッシャープレート8の斜視図である図4に示すように、プレッシャープレート8は、2つのカム保持部81、複数の第1ばね配置部82、及び複数の第2ばね配置部83等を有する。 As shown in FIG. 4, which is a perspective view of the pressure plate 8, the pressure plate 8 has two cam holding portions 81, a plurality of first spring arranging portions 82, a plurality of second spring arranging portions 83, and the like.
 各カム保持部81は、2つの突出部81a、81bを有している。突出部81a、81bは、互いに平行であり、且つ、プレッシャープレート8の上面8aから+Z方向に突出している。突出部81a、81bの間には、カム6が挿入される。なお、突出部81a、81bには、シャフト112が挿通する軸孔がX軸に沿って形成されている。また、カム保持部81には、ハードストップ部51が挿通するハードストップ挿通孔81cがZ軸に沿って形成されている。 Each cam holding portion 81 has two protruding portions 81a and 81b. The protrusions 81a and 81b are parallel to each other and protrude from the upper surface 8a of the pressure plate 8 in the +Z direction. A cam 6 is inserted between the protrusions 81a and 81b. A shaft hole through which the shaft 112 is inserted is formed in the protrusions 81a and 81b along the X-axis. Further, a hard stop insertion hole 81c through which the hard stop portion 51 is inserted is formed in the cam holding portion 81 along the Z axis.
 第1ばね配置部82には第1ばね131が配置され(図7参照)、第2ばね配置部83には第2ばね132が配置される(図8参照)。また、第1ばね配置部82及び第2ばね配置部83には、それぞれガイドピン貫通孔82a(図7参照)、83aがZ軸に沿って形成されている。 The first spring 131 is arranged in the first spring arrangement portion 82 (see FIG. 7), and the second spring 132 is arranged in the second spring arrangement portion 83 (see FIG. 8). Guide pin through holes 82a (see FIG. 7) and 83a are formed in the first spring arrangement portion 82 and the second spring arrangement portion 83, respectively, along the Z axis.
 図5は、図1に示されるA-A断面図の一部を示す図である。また、図6は、図5に示されるB-B断面図である。図5及び図6には、載置部22に比較的厚い被検査体S1が載置されるとともに、被検査体S1に圧力が印加されている状態(加圧状態)が示されている。 FIG. 5 is a diagram showing a part of the cross-sectional view taken along the line AA shown in FIG. Further, FIG. 6 is a cross-sectional view taken along the line BB shown in FIG. 5 and 6 show a state (pressurized state) in which the relatively thick inspected body S1 is placed on the placing portion 22 and pressure is applied to the inspected body S1.
 ハードストップ部51は、ハードストップ挿通孔81cに挿通されている。ハードストップ部51は、第1の被押圧面51a及び第2の被押圧面51bを有する。第2の被押圧面51bは、第1の被押圧面51aよりも載置部22の近くに位置する。言い換えると、第2の被押圧面51bは、第1の被押圧面51aよりも-Z方向側に位置する。また、第1の被押圧面51a及び第2の被押圧面51bにより段差形状が形成されており、第1の被押圧面51aから第2の被押圧面51bまでの距離はg1である。第1の被押圧面51a及び第2の被押圧面51bはいずれも平面である。 The hard stop portion 51 is inserted into the hard stop insertion hole 81c. The hard stop portion 51 has a first pressed surface 51a and a second pressed surface 51b. The second pressed surface 51b is located closer to the mounting portion 22 than the first pressed surface 51a. In other words, the second pressed surface 51b is located on the −Z direction side of the first pressed surface 51a. Further, a stepped shape is formed by the first pressed surface 51a and the second pressed surface 51b, and the distance from the first pressed surface 51a to the second pressed surface 51b is g1. Both the first pressed surface 51a and the second pressed surface 51b are flat surfaces.
 カム6は、カム保持部81の突出部81a、81bの間に配置され、シャフト112によりプレッシャープレート8に回転可能に取り付けられている。第1の押圧面61は、非加圧状態からカム6がシャフト112周りに第1の角度回転したときに第1の被押圧面51aに接触して被検査体押圧部材5を押圧する。第2の押圧面62は、非加圧状態からカム6がシャフト112周りに第2の角度回転したときに第2の被押圧面51bに接触して被検査体押圧部材5を押圧する。本実施形態では、第2の角度の値は、第1の角度の負の値である。 The cam 6 is arranged between the protruding portions 81 a and 81 b of the cam holding portion 81, and is rotatably attached to the pressure plate 8 by the shaft 112. The first pressing surface 61 contacts the first pressed surface 51a and presses the inspection object pressing member 5 when the cam 6 rotates around the shaft 112 by the first angle from the non-pressurized state. The second pressing surface 62 contacts the second pressed surface 51b and presses the inspection object pressing member 5 when the cam 6 rotates about the shaft 112 by the second angle from the non-pressurized state. In this embodiment, the value of the second angle is a negative value of the first angle.
 詳しく説明すると、第2の押圧面62は、非加圧状態からカム6がシャフト112周りに且つ時計回りに90度回転したときに第2の被押圧面51bに接触して被検査体押圧部材5を押圧する。このときの状態が図5に示されている。また、図9を参照して後に説明するように、第1の押圧面61は、非加圧状態からカム6がシャフト112周りに且つ反時計回りに90度回転したときに第1の被押圧面51aに接触して被検査体押圧部材5を押圧する。このように、図3に示されているカム6の状態を回転角度0度としたとき、第1の角度は反時計回りに90度であり、第2の角度は時計回りに90度(反時計回りに-90度)である。以下、非加圧状態からカム6がシャフト112周りに且つ反時計回りに90度回転した状態を「0度の状態」、非加圧状態におけるカム6の状態を「90度の状態」と呼ぶ。また、非加圧状態からカム6がシャフト112周りに且つ時計回りに90度回転した状態を「180度の状態」と呼ぶ。 More specifically, the second pressing surface 62 comes into contact with the second pressed surface 51b when the cam 6 rotates 90 degrees clockwise around the shaft 112 from the non-pressurized state, and contacts the object pressing member 51b. Press 5. The state at this time is shown in FIG. Further, as will be described later with reference to FIG. 9, the first pressing surface 61 is the first pressed surface when the cam 6 rotates 90 degrees around the shaft 112 and counterclockwise from the non-pressurized state. It comes into contact with the surface 51a and presses the object pressing member 5. As described above, when the state of the cam 6 shown in FIG. 3 is set to a rotation angle of 0 degree, the first angle is 90 degrees counterclockwise and the second angle is 90 degrees clockwise (counterclockwise). It is -90 degrees clockwise). Hereinafter, the state in which the cam 6 is rotated 90 degrees counterclockwise around the shaft 112 from the non-pressurized state is referred to as “0 degree state”, and the state of the cam 6 in the non-pressurized state is referred to as “90 degree state”. .. Further, a state in which the cam 6 is rotated 90 degrees clockwise around the shaft 112 from the non-pressurized state is referred to as a "180 degree state".
 逃げ面64は、第2の押圧面62に隣接して第2の押圧面62とともに段差形状を構成する。ここで、第2の押圧面62から逃げ面64までの距離は、g1よりも大きい。このため、第2の押圧面62が、第2の被押圧面51bに接触したときに、逃げ面64と第2の被押圧面51bとの間に隙間ができる。逃げ面65は、第1の押圧面61に隣接して第1の押圧面61とともに階段形状を構成する。 The flank 64 is adjacent to the second pressing surface 62 and forms a step shape together with the second pressing surface 62. Here, the distance from the second pressing surface 62 to the flank surface 64 is larger than g1. Therefore, when the second pressing surface 62 comes into contact with the second pressed surface 51b, a gap is formed between the flank surface 64 and the second pressed surface 51b. The flank 65 forms a staircase shape together with the first pressing surface 61 adjacent to the first pressing surface 61.
 また、ベース2への第1の押圧面61の正射影は、図5に示される部分21aの上面に位置する。ベース2への第2の押圧面62の正射影は、図5に示される部分21bの上面に位置する。ここで、第1の押圧面61と第2の押圧面62とはカム6のX軸方向にずれている。即ち、カム6は、2段構造を有する。したがって、ベース2への第1の押圧面61の正射影及び第2の押圧面62の正射影は互いに重ならない。第1の押圧面61の正射影は、第2の押圧面62の正射影に対して+X方向側に現れる。第1の押圧面61の正射影及び第2の押圧面62の正射影が互いに重ならない関係は、回転軸O周りの回転角度に関係なく維持される。 The orthographic projection of the first pressing surface 61 onto the base 2 is located on the upper surface of the portion 21a shown in FIG. The orthographic projection of the second pressing surface 62 onto the base 2 is located on the upper surface of the portion 21b shown in FIG. Here, the first pressing surface 61 and the second pressing surface 62 are displaced in the X-axis direction of the cam 6. That is, the cam 6 has a two-stage structure. Therefore, the orthogonal projections of the first pressing surface 61 and the second pressing surface 62 on the base 2 do not overlap with each other. The orthogonal projection of the first pressing surface 61 appears on the + X direction side with respect to the orthogonal projection of the second pressing surface 62. The relationship in which the orthographic projections of the first pressing surface 61 and the second pressing surface 62 do not overlap each other is maintained regardless of the rotation angle around the rotation axis O.
 加圧状態において、第2の押圧面62は第2の被押圧面51bに接触している。この接触は、平面同士の接触である。このため、ソケット1の操作者は、図5及び図6に示されている加圧状態になるようにベイル7を操作した後、非加圧状態に戻ってしまうことを防ぐために、ベイル7を固定する操作を行う必要はない。また、カム6の回転を防ぐための機構をソケット1に設ける必要もない。 In the pressurized state, the second pressing surface 62 is in contact with the second pressed surface 51b. This contact is a contact between planes. Therefore, the operator of the socket 1 operates the bail 7 so as to be in the pressurized state shown in FIGS. 5 and 6, and then moves the bail 7 in order to prevent the bail 7 from returning to the non-pressurized state. There is no need to perform the fixing operation. Further, it is not necessary to provide the socket 1 with a mechanism for preventing the cam 6 from rotating.
 図7は、図5に示されるC-C断面図である。 FIG. 7 is a cross-sectional view taken along the line CC shown in FIG.
 つば部53には、ガイドピン121が固定されている。ガイドピン121は、プレッシャープレート8にZ軸方向に沿うように形成されたガイドピン貫通孔82aを貫通している。第1ばね配置部82には、ガイドピン121を取り巻くように、圧縮ばねである第1ばね131が配置されている。第1ばね131は、第1ばね配置部82の上面とガイドピン121のヘッド部の下面との間で圧縮された状態で配置されている。よって、第1ばね131は、被検査体押圧部材5のつば部53の上面をプレッシャープレート8の下面に押しつけるように反発力を働かせている。換言すれば、第1ばね131及びガイドピン121を介してつり上げられるように被検査体押圧部材5はプレッシャープレート8に支持されている。 A guide pin 121 is fixed to the brim portion 53. The guide pin 121 penetrates a guide pin through hole 82a formed in the pressure plate 8 along the Z-axis direction. A first spring 131, which is a compression spring, is arranged in the first spring arrangement portion 82 so as to surround the guide pin 121. The first spring 131 is arranged in a compressed state between the upper surface of the first spring arrangement portion 82 and the lower surface of the head portion of the guide pin 121. Therefore, the first spring 131 exerts a repulsive force so as to press the upper surface of the flange portion 53 of the inspection object pressing member 5 against the lower surface of the pressure plate 8. In other words, the inspection body pressing member 5 is supported by the pressure plate 8 so as to be lifted up via the first spring 131 and the guide pin 121.
 図8は、図5に示されるD-D断面図である。 FIG. 8 is a cross-sectional view taken along the line DD shown in FIG.
 カバー3にはガイドピン122が固定されている。ガイドピン122は、プレッシャープレート8に形成されたガイドピン貫通孔83aを貫通している。プレッシャープレート8は、ガイドピン122を介してつり上げられるようにカバー3に支持されている。カバー3とプレッシャープレート8との間には圧縮ばねである第2ばね132が配置されている。詳しく説明すると、第2ばね配置部83には、ガイドピン122を取り巻くように、且つ収容孔3aに収容されるように第2ばね132が配置されている。第2ばね132は、第2ばね配置部83の上面と収容孔3aの上面との間で圧縮された状態で配置されている。よって、第2ばね132は、プレッシャープレート8をカバー3から離すように反発力を働かせている。言い換えると、第2ばね132はプレッシャープレート8をカバー3から離れる方向に付勢している。プレッシャープレート8はカバー3に対してZ軸方向に相対移動可能である。 Guide pins 122 are fixed to the cover 3. The guide pin 122 penetrates the guide pin through hole 83a formed in the pressure plate 8. The pressure plate 8 is supported by the cover 3 so that it can be lifted via the guide pin 122. A second spring 132, which is a compression spring, is arranged between the cover 3 and the pressure plate 8. More specifically, the second spring 132 is arranged in the second spring arrangement portion 83 so as to surround the guide pin 122 and be accommodated in the accommodation hole 3a. The second spring 132 is arranged in a compressed state between the upper surface of the second spring arrangement portion 83 and the upper surface of the accommodation hole 3a. Therefore, the second spring 132 exerts a repulsive force so as to separate the pressure plate 8 from the cover 3. In other words, the second spring 132 urges the pressure plate 8 away from the cover 3. The pressure plate 8 can move relative to the cover 3 in the Z-axis direction.
 図9は、図5及び図6に示される加圧状態とは異なるもう一つの加圧状態における、ソケット1の縦断面図の一部を示す図である。具体的には、図9は、ベイル7が図1に示される状態とは逆側(-Y方向側)に倒れるように操作され、カム6が非加圧状態からシャフト112周りに且つ反時計周りに90度回転した状態(0度の状態)における、図1のA-A断面図に相当する断面図の一部である。 FIG. 9 is a view showing a part of a vertical cross-sectional view of the socket 1 in another pressurization state different from the pressurization state shown in FIGS. 5 and 6. Specifically, in FIG. 9, the bail 7 is operated so as to tilt to the opposite side (−Y direction side) from the state shown in FIG. 1, and the cam 6 is operated from the non-pressurized state around the shaft 112 and counterclockwise. 2 is a part of a cross-sectional view corresponding to the cross-sectional view taken along the line AA in FIG. 1 in a state where it is rotated 90 degrees around (0-degree state).
 図9には、載置部22に被検査体S1よりも薄い被検査体S2が載置されるとともに、被検査体S2に圧力が印加されている状態(加圧状態)が示されている。図9に示される状態では、第1の被押圧面51aと第1の押圧面61とが接触している。第1の被押圧面51aは第2の被押圧面51bよりも載置部22からg1離れている。非加圧状態からシャフト112周りに且つ反時計回りにカム6が回転した場合(0度の状態)、非加圧状態からシャフト112周りに且つ時計回りにカム6が回転した場合(180度の状態)と比べて、被検査体押圧部材5の非加圧状態からの移動距離はg1大きい。そのため、ソケット1は、ベイル7が非加圧状態から+Y方向側に倒された場合、比較的厚い被検査体S1の検査を行うことができ、ベイル7が非加圧状態から-Y方向側に倒された場合、被検査体S1よりもg1薄い被検査体S2の検査を行うことができる。 FIG. 9 shows a state (pressurized state) in which the inspection target S2 thinner than the inspection target S1 is placed on the mounting portion 22 and pressure is applied to the inspection target S2. .. In the state shown in FIG. 9, the first pressed surface 51a and the first pressing surface 61 are in contact with each other. The first pressed surface 51a is g1 away from the mounting portion 22 than the second pressed surface 51b. When the cam 6 rotates around the shaft 112 and counterclockwise from the non-pressurized state (0 degree state), and when the cam 6 rotates around the shaft 112 and clockwise from the non-pressurized state (180 degrees). Compared to the state), the moving distance of the object pressing member 5 from the non-pressurized state is g1 larger. Therefore, when the bail 7 is tilted from the non-pressurized state to the + Y direction side, the socket 1 can inspect the relatively thick object S1 to be inspected, and the bail 7 can be inspected from the non-pressurized state to the −Y direction side. When it is knocked down, it is possible to inspect the inspected body S2 which is g1 thinner than the inspected body S1.
 図9に示されている状態、つまり非加圧状態からカム6がシャフト112周りに且つ反時計回りに90度回転した状態(0度の状態)においてもベイル7を固定する操作を行う必要はない。 It is necessary to perform the operation of fixing the bail 7 even in the state shown in FIG. 9, that is, in the state where the cam 6 is rotated 90 degrees counterclockwise around the shaft 112 (0 degree state) from the non-pressurized state. Absent.
 カム6は、次のような形状である。即ち、X軸方向の中央を境としたときの+X方向側の部位は-X方向側の部位と同じ形状である。よって、第2の押圧面62が第1の押圧面61に対して+X方向側に位置するようにカム6が配置されたとしても、カム6は図1及び図5に示される姿勢と全く同じ姿勢になる。したがって、カム6をベイル7に接続する際にカム6の向きに注意を払う必要がなくなるため、ソケット1の製造が容易である。ここで、+X方向側の部位と-X後方側の部位とは必ずしも同じ形状でなくともよく、以下の(1)-(4)を満たせばよい。(1)距離x1が距離x2に等しいこと。(2)ベース2への第1の押圧面61の正射影及び第2の押圧面62の正射影が互いに重ならないこと。(3)第1の押圧面61から逃げ面65までの距離はg1よりも大きいこと。(4)第2の押圧面62から逃げ面64までの距離はg1よりも大きいこと。 CAM 6 has the following shape. That is, the part on the +X direction side with respect to the center in the X axis direction has the same shape as the part on the −X direction side. Therefore, even if the cam 6 is arranged so that the second pressing surface 62 is located on the + X direction side with respect to the first pressing surface 61, the cam 6 has exactly the same posture as shown in FIGS. 1 and 5. Become a posture. Therefore, it is not necessary to pay attention to the direction of the cam 6 when connecting the cam 6 to the bail 7, and the socket 1 can be easily manufactured. Here, the +X direction side portion and the −X rear side portion do not necessarily have to have the same shape, and may satisfy the following (1)-(4). (1) The distance x1 is equal to the distance x2. (2) The orthogonal projections of the first pressing surface 61 and the second pressing surface 62 on the base 2 do not overlap each other. (3) The distance from the first pressing surface 61 to the flank 65 is larger than g1. (4) The distance from the second pressing surface 62 to the flank 64 is larger than g1.
 次に、ソケット1の加圧動作について説明する。はじめに、厚さd1を有する比較的厚い被検査体S1に対する加圧動作について図10及び図11を用いて説明する。 Next, the pressurizing operation of the socket 1 will be described. First, a pressurizing operation for a relatively thick inspection object S1 having a thickness d1 will be described with reference to FIGS. 10 and 11.
 図10は、比較的厚い被検査体S1に圧力を印加する前の状態にある本発明の実施形態に係るソケット1の模式図である。つまり、図10には、非加圧状態にあるソケット1が示されている。非加圧状態において、ベイル7は載置部22に対して直立している。 FIG. 10 is a schematic view of the socket 1 according to the embodiment of the present invention in a state before pressure is applied to the relatively thick inspection object S1. That is, FIG. 10 shows the socket 1 in the non-pressurized state. In the non-pressurized state, the bail 7 stands upright with respect to the mounting portion 22.
 この状態では、カム6の非押圧面63が第1の被押圧面51aに接触している。また、第1ばね131は被検査体押圧部材5をカバー3に近づく方向(+Z方向)に付勢している。また、第2ばね132は、プレッシャープレート8をカバー3から離れる方向(-Z方向)に付勢している。そのため、プレッシャープレート8の下面がガイドピン122のヘッド部の下面に押し付けられた状態でプレッシャープレート8が位置決めされている。 In this state, the non-pressed surface 63 of the cam 6 is in contact with the first pressed surface 51a. Further, the first spring 131 urges the object pressing member 5 to be inspected in a direction approaching the cover 3 (+ Z direction). Further, the second spring 132 urges the pressure plate 8 in a direction away from the cover 3 (−Z direction). Therefore, the pressure plate 8 is positioned with the lower surface of the pressure plate 8 pressed against the lower surface of the head portion of the guide pin 122.
 操作者がベイル7を+Y方向側に倒すと、カム6がシャフト112周りに且つ時計回りに回転する。そして、曲面63bが第2の被押圧面51bに接触するようになる。このとき、プレッシャープレート8は移動しない。また、曲面63bで第2の被押圧面51bが押されて、加圧部52が-Z方向に移動し、載置部22に近づいていく。加圧部52の載置部22への接近に伴い、第1ばね131が縮んでいく。 When the operator tilts the bail 7 to the +Y direction side, the cam 6 rotates around the shaft 112 and clockwise. Then, the curved surface 63b comes into contact with the second pressed surface 51b. At this time, the pressure plate 8 does not move. Further, the second pressed surface 51b is pressed by the curved surface 63b, and the pressurizing portion 52 moves in the −Z direction and approaches the placing portion 22. As the pressurizing portion 52 approaches the mounting portion 22, the first spring 131 contracts.
 更にベイル7が+Y方向側に倒されて非加圧状態からのカム6の回転角度が90度に達する(カム6が180度の状態になる)と、図11に示すように、第2の押圧面62が第2の被押圧面51bに接触するようになる。また、被検査体S1に加圧部52が接触するようになり、被検査体S1に圧力が印加されるようになる。よって、被検査体S1の接続端子と配線基板100の接続端子とが載置部22のコンタクトピンを介して電気的に接続され、被検査体S1の検査を行うことができる。 Further, when the bail 7 is tilted toward the + Y direction and the rotation angle of the cam 6 from the non-pressurized state reaches 90 degrees (the cam 6 is in the state of 180 degrees), as shown in FIG. 11, the second The pressing surface 62 comes into contact with the second pressed surface 51b. Further, the pressurizing portion 52 comes into contact with the inspection object S1 and the pressure is applied to the inspection object S1. Therefore, the connection terminal of the inspection object S1 and the connection terminal of the wiring board 100 are electrically connected via the contact pins of the mounting portion 22, and the inspection of the inspection object S1 can be performed.
 続いて、被検査体S1(厚さd1)よりもg1薄い厚さd2(d2<d1)を有する比較的薄い被検査体S2に対する加圧動作について図12及び図13を用いて説明する。 Subsequently, a pressurizing operation on a relatively thin inspected object S2 having a thickness d2 (d2 <d1) g1 thinner than the inspected object S1 (thickness d1) will be described with reference to FIGS. 12 and 13.
 図12は、比較的薄い被検査体S2に圧力を印加する前の状態にある本発明の実施形態に係るソケット1の模式図である。図10に示されている状態との違いは、載置部22に被検査体S2が載置されていることのみであり、カム6、ベイル7、第1ばね131及び第2ばね132の状態に違いはない。 FIG. 12 is a schematic diagram of the socket 1 according to the embodiment of the present invention in a state before pressure is applied to the relatively thin inspection object S2. The only difference from the state shown in FIG. 10 is that the object to be inspected S2 is placed on the mounting portion 22, and the states of the cam 6, bail 7, first spring 131 and second spring 132. There is no difference.
 被検査体S2に圧力を印加する場合、被検査体S2は被検査体S1よりも薄いため加圧部52をより載置部22近くまで(-Z方向側に)移動させる必要がある。そこで、操作者は非加圧状態から-Y方向側にベイル7を倒す。 When pressure is applied to the inspected body S2, since the inspected body S2 is thinner than the inspected body S1, it is necessary to move the pressurizing portion 52 closer to the mounting portion 22 (toward the −Z direction). Therefore, the operator tilts the bail 7 in the −Y direction from the non-pressurized state.
 操作者がベイル7を-Y方向側に倒すと、カム6がシャフト112周りに且つ反時計回りに回転する。そして、曲面63aが第1の被押圧面51aに接触するようになる。このとき、プレッシャープレート8は、移動しない。また、曲面63aで第1の被押圧面51aが押されて、加圧部52が-Z方向に移動し、載置部22に近づいていく。加圧部52の載置部22への接近に伴い、第1ばね131が縮んでいく。 When the operator tilts the bail 7 toward the −Y direction, the cam 6 rotates around the shaft 112 and counterclockwise. Then, the curved surface 63a comes into contact with the first pressed surface 51a. At this time, the pressure plate 8 does not move. In addition, the first pressed surface 51 a is pressed by the curved surface 63 a, the pressing portion 52 moves in the −Z direction, and approaches the mounting portion 22. As the pressurizing portion 52 approaches the mounting portion 22, the first spring 131 contracts.
 更にベイル7が-Y方向側に倒されて非加圧状態からのカム6の回転角度が90度に達する(カム6が0度の状態になる)と、図13に示すように、第1の押圧面61が第1の被押圧面51aに接触するようになる。また、カム6がシャフト112周りに且つ反時計回りに90度回転した(カム6が0度の状態になった)場合、第2の被押圧面51bよりも載置部22から遠い側に位置する第1の被押圧面51aが第1の押圧面61によって押圧される。このため、被検査体押圧部材5の移動距離は、カム6がシャフト112周りに且つ時計回りに90度回転した(カム6が180度の状態になった)ときの被検査体押圧部材5の移動距離よりもg1長い。したがって、図13に示すように、被検査体S1よりもg1薄い被検査体S2に加圧部52が接触するようになり、被検査体S2に圧力が印加されるようになる。よって、被検査体S2の接続端子と配線基板100の接続端子とが載置部22のコンタクトピンを介して電気的に接続され、被検査体S2の検査を行うことができる。 Further, when the bail 7 is tilted toward the −Y direction and the rotation angle of the cam 6 from the non-pressurized state reaches 90 degrees (the cam 6 becomes a state of 0 degrees), as shown in FIG. 13, the first The pressing surface 61 of the above comes into contact with the first pressed surface 51a. Further, when the cam 6 is rotated 90 degrees counterclockwise around the shaft 112 (the cam 6 is in the state of 0 degrees), the position is farther from the mounting portion 22 than the second pressed surface 51b. The first pressed surface 51a to be pressed is pressed by the first pressing surface 61. Therefore, the moving distance of the object pressing member 5 to be inspected is the moving distance of the object pressing member 5 to be inspected when the cam 6 is rotated 90 degrees clockwise around the shaft 112 (the cam 6 is in a state of 180 degrees). It is g1 longer than the travel distance. Therefore, as shown in FIG. 13, the pressurizing unit 52 comes into contact with the inspection object S2 that is thinner than the inspection object S1 by g1 and the pressure is applied to the inspection object S2. Therefore, the connection terminal of the inspection object S2 and the connection terminal of the wiring board 100 are electrically connected via the contact pin of the mounting portion 22, and the inspection of the inspection object S2 can be performed.
 上述したように、操作者が被検査体S1の検査をする場合、上述したようにベイル7を+Y方向側に倒す必要があるが、操作者が誤ってベイル7を-Y方向側に倒した場合、ソケット1は以下のように作動する。 As described above, when the operator inspects the object to be inspected S1, it is necessary to tilt the bail 7 toward the + Y direction as described above, but the operator accidentally tilts the bail 7 toward the −Y direction. In that case, the socket 1 operates as follows.
 図10に示すように、被検査体S1が載置部22に載置された状態において、非加圧状態から操作者がベイル7を-Y方向側に倒すと、カム6がシャフト112周りに且つ反時計回りに回転する。そして、曲面63aが第1の被押圧面51aに接触するようになる。すると、加圧部52が-Z方向に移動し、載置部22に近づいていく。また、加圧部52の載置部22への接近に伴い、第1ばね131が縮んでいく。 As shown in FIG. 10, when the operator S1 tilts the bail 7 toward the −Y direction from the non-pressurized state in the state where the inspected object S1 is mounted on the mounting portion 22, the cam 6 moves around the shaft 112. And it rotates counterclockwise. Then, the curved surface 63a comes into contact with the first pressed surface 51a. Then, the pressurizing portion 52 moves in the −Z direction and approaches the mounting portion 22. Further, as the pressurizing portion 52 approaches the mounting portion 22, the first spring 131 contracts.
 やがて、図14に示すように、加圧部52が被検査体S1に接触する。 Eventually, as shown in FIG. 14, the pressurizing unit 52 comes into contact with the inspected object S1.
 更にベイル7が-Y方向側に倒されると、被検査体押圧部材5を押し下げることができないので、カム6自身が+Z方向に移動し始める。カム6はプレッシャープレート8に取り付けられているため、カム6の移動とともにプレッシャープレート8も+Z方向に移動する。このとき、プレッシャープレート8とカバー3との間に挟まれている第2ばね132は、縮んでいく。ソケット1の各部のこのような動作は、ベイル7が-Y方向側に90度倒されるまで(図15に示す状態になるまで)続く。 When the bail 7 is further tilted to the −Y direction side, the inspected body pressing member 5 cannot be pushed down, so the cam 6 itself starts moving in the +Z direction. Since the cam 6 is attached to the pressure plate 8, the pressure plate 8 also moves in the +Z direction as the cam 6 moves. At this time, the second spring 132 sandwiched between the pressure plate 8 and the cover 3 shrinks. Such an operation of each part of the socket 1 continues until the bail 7 is tilted 90 degrees toward the −Y direction (until the state shown in FIG. 15 is reached).
 この間、被検査体押圧部材5は移動しない。また、被検査体S1に印加される力は、最大でも複数の第2ばね132の反発力の合力である。よって、第2ばね132の自然長及び弾性係数を適切な値に設定することで、被検査体S1に過度な力(圧力)が印加されて被検査体S1が破損してしまうことを防止できる。つまり、プレッシャープレート8及び第2ばね132は、安全装置としても機能する。 During this time, the inspection object pressing member 5 does not move. Further, the force applied to the inspection object S1 is a combined force of the repulsive forces of the plurality of second springs 132 at the maximum. Therefore, by setting the natural length and elastic modulus of the second spring 132 to appropriate values, it is possible to prevent the inspected body S1 from being damaged by applying an excessive force (pressure) to the inspected body S1. .. That is, the pressure plate 8 and the second spring 132 also function as safety devices.
 以上説明したように、本実施形態によれば、複数の押圧面を有するカム6を回転させることで加圧部52と載置部22との距離を調節できるため、複数の種類の厚さの被検査体を単一の装置で検査を行うことができる。 As described above, according to the present embodiment, the distance between the pressurizing portion 52 and the mounting portion 22 can be adjusted by rotating the cam 6 having a plurality of pressing surfaces, so that a plurality of types of thicknesses can be used. The object to be inspected can be inspected with a single device.
 カム6の押圧面とハードストップ部51の被押圧面とはいずれも平面であるため、曲面と平面又は曲面同士の接触に比べて接触状態を安定して維持できる。このため、当該接触状態を維持するためにカム6の回転を固定するための作業を必要としない。 Since both the pressing surface of the cam 6 and the pressed surface of the hard stop portion 51 are flat surfaces, the contact state can be stably maintained as compared with the contact between curved surfaces and flat surfaces or curved surfaces. Therefore, the work for fixing the rotation of the cam 6 is not required to maintain the contact state.
 したがって、被検査体に圧力を印加するための部材(被検査体押圧部材5)の載置部22からの高さを容易に切り替えることができる。 Therefore, the height of the member (inspection body pressing member 5) for applying pressure to the inspection body from the mounting portion 22 can be easily switched.
 カム6は、第1の押圧面61と第2の押圧面62とが互いにX軸方向にずれた2段構造を有している。また、距離x1と距離x2とは互いに等しい。更に被検査体押圧部材5のハードストップ部51は、載置部22からの距離が互いに異なる第1の被押圧面51a及び第2の被押圧面51bを有している。よって、ハードストップ部51の第1の被押圧面51a及び第2の被押圧面51b間の距離は、カム6の回転方向に応じた被検査体押圧部材5の-Z方向への移動距離の差に対応する。したがって、第1の被押圧面51a及び第2の被押圧面51b間の距離が所定の距離に設定されていれば、カム6を製造する際に、距離x1及び距離x2をそれぞれ異なる被検査体の厚さに応じた長さにしたり、二次加工等を行う必要はない。したがって、カム6の製造が容易であり、二次加工費を削減できる。具体的には、カム6を成形品として製作することができ、製造コストを削減できる。 The cam 6 has a two-step structure in which the first pressing surface 61 and the second pressing surface 62 are displaced from each other in the X-axis direction. Further, the distance x1 and the distance x2 are equal to each other. Further, the hard stop portion 51 of the inspection object pressing member 5 has a first pressed surface 51a and a second pressed surface 51b which are different in distance from the mounting portion 22. Therefore, the distance between the first pressed surface 51a and the second pressed surface 51b of the hard stop portion 51 is the moving distance of the inspected body pressing member 5 in the −Z direction according to the rotation direction of the cam 6. Corresponds to the difference. Therefore, if the distance between the first pressed surface 51a and the second pressed surface 51b is set to a predetermined distance, when the cam 6 is manufactured, the distance x1 and the distance x2 are different from each other. It is not necessary to make the length according to the thickness of the product or to perform secondary processing. Therefore, the cam 6 can be easily manufactured and the secondary processing cost can be reduced. Specifically, the cam 6 can be manufactured as a molded product, and the manufacturing cost can be reduced.
 また、カム6が2段構造であり、カム6を回転させる方向によってカム6の押圧面と接触するハードストップ部51の被押圧面が切り替わる。したがって、被押圧面の早期摩耗を防止することができる。 Also, the cam 6 has a two-stage structure, and the pressed surface of the hard stop portion 51 contacting the pressing surface of the cam 6 is switched depending on the direction in which the cam 6 is rotated. Therefore, it is possible to prevent early wear of the pressed surface.
 更に、カム6を回転させる方向によって、被検査体押圧部材5の移動距離を変えることができるため、操作者は、ベイル7を倒す方向を変えるという単純な操作で厚さが異なる2つの被検査体の検査を単一のソケット1で行うことができる。 Further, since the moving distance of the object pressing member 5 to be inspected can be changed depending on the direction in which the cam 6 is rotated, the operator can change the direction in which the bail 7 is tilted, and the operator has two inspected objects having different thicknesses by a simple operation. The body examination can be carried out in a single socket 1.
 また、厚めの被検査体を検査する際に、操作者が誤って薄い被検査体に加圧するための動作を行った場合、被検査体押圧部材5が被検査体に接触した後、カム6及びプレッシャープレート8が載置部22から離れる方向(+Z方向)に移動する。このため、被検査体に過度に圧力を印加することによる被検査体やソケット1の破損を防止することができる。 Further, when the operator erroneously performs an operation to pressurize the thin inspection object when inspecting the thick inspection object, the cam 6 is pressed after the inspection object pressing member 5 contacts the inspection object. And the pressure plate 8 moves in the direction away from the mounting portion 22 (+ Z direction). Therefore, it is possible to prevent the inspected body and the socket 1 from being damaged by applying excessive pressure to the inspected body.
 以上、本発明の実施形態に係るソケット1について説明してきたが、ソケット1は以下に説明するように変形させてもよい。 Although the socket 1 according to the embodiment of the present invention has been described above, the socket 1 may be modified as described below.
 カム6の第1の押圧面61、第2の押圧面62、及び非押圧面63の位置関係は、図3に示す関係になくてもよく、例えば、カム6は図16に示されるような形状であってもよい。図16では、第2の押圧面62は、非押圧面63と平行である。また、回転軸Oよりも+Z方向側に位置し、逃げ面64よりも-X方向側に位置する。他方、第1の押圧面61は第2の押圧面62及び非押圧面63と垂直である。カム6が図16に示されている形状である場合に、回転軸O周りに且つ時計回りに回転すると第1の押圧面61は第1の被押圧面51aに接触し、更にカム6が回転軸O周りに且つ時計回りに回転すると、第2の押圧面62は第2の押圧面62に接触する。回転軸Oから第1の押圧面61までの距離x1、回転軸Oから第2の押圧面62までの距離x2、及び回転軸Oから非押圧面63までの距離x3には、x3<x1<x2、且つx1+2g1<x2の関係がある。 The positional relationship among the first pressing surface 61, the second pressing surface 62, and the non-pressing surface 63 of the cam 6 may not be the relationship shown in FIG. 3, for example, the cam 6 is as shown in FIG. It may have a shape. In FIG. 16, the second pressing surface 62 is parallel to the non-pressing surface 63. Further, it is located on the + Z direction side of the rotation axis O and on the −X direction side of the flank surface 64. On the other hand, the first pressing surface 61 is perpendicular to the second pressing surface 62 and the non-pressing surface 63. When the cam 6 has the shape shown in FIG. 16, when the cam 6 rotates around the rotation axis O and in the clockwise direction, the first pressing surface 61 contacts the first pressed surface 51a, and the cam 6 further rotates. When rotated about the axis O and clockwise, the second pressing surface 62 comes into contact with the second pressing surface 62. For the distance x1 from the rotary shaft O to the first pressing surface 61, the distance x2 from the rotary shaft O to the second pressing surface 62, and the distance x3 from the rotary shaft O to the non-pressing surface 63, x3<x1< There is a relationship of x2 and x1 + 2g1 <x2.
 この場合、ベイル7を-Y方向側に倒した状態(ここで、カム6は0度の状態である。)が非加圧状態となり、ベイル7を載置部22に対して直立させた状態が被検査体S1を検査するための状態となり、ベイル7を+Y方向側に倒した状態が被検査体S2を検査するための状態となる。言い換えると、非加圧状態(カム6が0度の状態)からカム6が回転軸O周りに且つ時計回りに90度回転した状態(カム6が90度の状態)が被検査体S1を検査するための状態である。また、当該状態から更に回転軸O周りに且つ時計回りに90度回転した状態(カム6が180度の状態)が被検査体S2を検査するための状態である。このように、カム6を一方向に回転する角度の大きさに応じて、被検査体押圧部材5の移動距離が変わる構成にすることで、操作者がベイル7を倒す方向を間違えるという誤操作をすることはなくなる。 In this case, the state in which the bail 7 is tilted toward the −Y direction (here, the cam 6 is in the 0 degree state) is the non-pressurized state, and the bail 7 is upright with respect to the mounting portion 22. Indicates a state for inspecting the inspection object S1, and a state in which the bail 7 is tilted in the +Y direction side is a state for inspecting the inspection object S2. In other words, the inspection object S1 is inspected when the cam 6 is rotated around the rotation axis O and 90 degrees clockwise (the cam 6 is 90 degrees) from the non-pressurized state (the cam 6 is 0 degree). It is a state to do. Further, a state in which the state further rotated by 90 degrees in the clockwise direction around the rotation axis O (the state in which the cam 6 is 180 degrees) is a state for inspecting the inspection object S2. As described above, by making the moving distance of the inspection object pressing member 5 change according to the size of the angle of rotating the cam 6 in one direction, the operator may make a mistaken operation in which the bail 7 is tilted in the wrong direction. There is nothing to do.
 また、カム6において、回転軸Oから第1の押圧面61までの距離x1と、回転軸Oから第2の押圧面62までの距離x2とは、異なる長さであってもよい。第2の押圧面62から第2の被押圧面51bまでの距離と、第1の被押圧面51aから第2の被押圧面51bまでの距離とがg1よりも大きければよい。 Further, in the cam 6, the distance x1 from the rotation axis O to the first pressing surface 61 and the distance x2 from the rotation axis O to the second pressing surface 62 may have different lengths. It suffices that the distance from the second pressing surface 62 to the second pressed surface 51b and the distance from the first pressed surface 51a to the second pressed surface 51b be larger than g1.
 また、被検査体押圧部材5は3以上の被押圧面を有していてもよく、カム6も3以上の押圧面を有していてもよい。例えば、被検査体押圧部材5は、第2の被押圧面51bよりもベース2の近く(-Z方向)に位置する第3の被押圧面を更に有し、カム6は、回転軸O周りに所定の角度回転したときに第3の被押圧面に接触する第3の押圧面を更に有していてもよい。このようにすることで、2種類よりも多種の厚さの被検査体を単一のソケット1で検査を行うことができる。 Further, the object pressing member 5 to be inspected may have three or more pressed surfaces, and the cam 6 may also have three or more pressing surfaces. For example, the inspected member pressing member 5 further has a third pressed surface located closer to the base 2 (-Z direction) than the second pressed surface 51b, and the cam 6 rotates around the rotation axis O. It may further have a third pressing surface that comes into contact with the third pressed surface when rotated by a predetermined angle. By doing so, it is possible to inspect an object to be inspected having a thickness of more than two types with a single socket 1.
 なお、カム6は必ずしも図3、図5及び図16等に示されている形状でなくてもよく、例えば、カム6は、逃げ面65を有さなくてもよい。即ち、第1の押圧面61が、カム6の+X方向側の端部の近傍から、カム6の-X方向側の端部の近傍にかけて形成されていてもよい。 Note that the cam 6 does not necessarily have the shape shown in FIGS. 3, 5, 16 and the like, and for example, the cam 6 does not have to have the flank surface 65. That is, the first pressing surface 61 may be formed from the vicinity of the end of the cam 6 on the +X direction side to the vicinity of the end of the cam 6 on the −X direction side.
 また、ベース2への第1の押圧面61の正射影及び第2の押圧面62の正射影が互いに重なり合うように、第1の押圧面61及び第2の押圧面62がカム6に形成されていてもよい。例えば、逃げ面65のX軸方向の寸法が、図5及び図10に示されている逃げ面65のX軸方向の寸法よりも短く、第1の押圧面61のX軸方向の寸法が、図5及び図10に示されている第1の押圧面61のX軸方向の寸法よりも長くてもよい。言い換えると、カム6のX軸方向における中央位置近傍において、+Y方向側には第2の押圧面62が位置し、-Y方向側には第1の押圧面61が位置するようにカム6が構成されていてもよい。この形状のカム6が用いられる場合、図2及び図5に示されているハードストップ部51を有する被検査体押圧部材5を使用すればよい。 Further, the first pressing surface 61 and the second pressing surface 62 are formed on the cam 6 so that the orthogonal projections of the first pressing surface 61 and the second pressing surface 62 on the base 2 overlap each other. May be. For example, the dimension of the flank surface 65 in the X-axis direction is shorter than the dimension of the flank surface 65 in the X-axis direction shown in FIGS. 5 and 10, and the dimension of the first pressing surface 61 in the X-axis direction is It may be longer than the dimension of the first pressing surface 61 shown in FIGS. 5 and 10 in the X-axis direction. In other words, in the vicinity of the center position of the cam 6 in the X-axis direction, the cam 6 is arranged so that the second pressing surface 62 is located on the +Y direction side and the first pressing surface 61 is located on the −Y direction side. It may be configured. When a cam 6 having this shape is used, the object pressing member 5 having the hard stop portion 51 shown in FIGS. 2 and 5 may be used.
 <注釈>
 その他、上記各実施形態は、何れも本発明を実施するにあたっての具体化の一例を示したものに過ぎず、これらによって本発明の技術的範囲が限定的に解釈されてはならないものである。すなわち、本発明はその要旨、またはその主要な特徴から逸脱することなく、様々な形で実施することができる。
<Note>
In addition, each of the above embodiments is merely an example of embodiment in carrying out the present invention, and the technical scope of the present invention should not be construed in a limited manner by these. That is, the present invention can be implemented in various forms without departing from the gist or the main features thereof.
 本出願は、2019年3月6日出願の特願2019-040391に基づく優先権を主張する。これらの出願明細書および図面に記載された内容は、すべて本願明細書に援用される。 This application claims priority based on Japanese Patent Application No. 2019-040391 filed on Mar. 6, 2019. All the contents described in these application specifications and drawings are incorporated herein by reference.
 本発明は、電子部品を検査するためのソケットに好適に利用される。 The present invention is suitably used as a socket for inspecting electronic components.
 1 ソケット
 2 ベース
 3 カバー
 3a 収容孔
 3b 被係合部
 4 ラッチ部
 4a 係合部
 5 被検査体押圧部材
 6 カム
 7 ベイル
 8 プレッシャープレート
 8a 上面
 21 ボディ部
 21a、21b 部分
 22 載置部
 51 ハードストップ部
 51a 第1の被押圧面
 51b 第2の被押圧面
 52 加圧部
 53 つば部
 61 第1の押圧面
 62 第2の押圧面
 63 非押圧面
 63a、63b 曲面
 64、65 逃げ面
 66 軸孔
 81 カム保持部
 81a、81b 突出部
 81c ハードストップ挿通孔
 82 第1ばね配置部
 83 第2ばね配置部
 82a、83a ガイドピン貫通孔
 100 配線基板
 111、112 シャフト
 113 ラッチ軸
 121、122 ガイドピン
 131 第1ばね
 132 第2ばね
 S1、S2 被検査体
 O 回転軸
1 Socket 2 Base 3 Cover 3a Accommodating hole 3b Engagement part 4 Latch part 4a Engagement part 5 Inspected object pressing member 6 Cam 7 Vail 8 Pressure plate 8a Top surface 21 Body part 21a, 21b Part 22 Mounting part 51 Hard stop Part 51a First pressed surface 51b Second pressed surface 52 Pressurized part 53 Brim part 61 First pressed surface 62 Second pressed surface 63 Non-pressed surface 63a, 63b Curved surface 64, 65 Escape surface 66 Shaft hole 81 Cam holding part 81a, 81b Protruding part 81c Hard stop insertion hole 82 1st spring arrangement part 83 2nd spring arrangement part 82a, 83a Guide pin through hole 100 Wiring board 111, 112 Shaft 113 Latch shaft 121, 122 Guide pin 131 1 spring 132 2nd spring S1, S2 DUT O rotation axis

Claims (7)

  1.  ベースと、
     第1の被押圧面、及び、前記第1の被押圧面よりも前記ベースの近くに位置する第2の被押圧面を有する被検査体押圧部材と、
     前記ベースに向けて前記被検査体押圧部材を押圧するカムと、を備え、
     前記カムは、基準姿勢から回転軸周りに第1の角度回転したときに前記第1の被押圧面に接触する第1の押圧面、及び、前記基準姿勢から前記回転軸周りに第2の角度回転したときに前記第2の被押圧面に接触する第2の押圧面を有する、
     ソケット。
    With the base
    An inspected member pressing member having a first pressed surface and a second pressed surface positioned closer to the base than the first pressed surface;
    A cam that presses the inspection object pressing member toward the base,
    The cam has a first pressing surface that comes into contact with the first pressed surface when rotated by a first angle around the rotation axis from the reference posture, and a second angle around the rotation axis from the reference posture. A second pressing surface which comes into contact with the second pressed surface when rotated,
    socket.
  2.  前記回転軸から前記第1の押圧面までの距離と、前記回転軸から前記第2の押圧面までの距離は等しい、
     請求項1に記載のソケット。
    A distance from the rotating shaft to the first pressing surface is equal to a distance from the rotating shaft to the second pressing surface,
    The socket according to claim 1.
  3.  前記第2の角度の値は、前記第1の角度の値の負の値である請求項1または2に記載のソケット。 The socket according to claim 1 or 2, wherein the value of the second angle is a negative value of the value of the first angle.
  4.  前記ベースへの前記第1の押圧面の正射影は、前記カムの前記回転軸周りの回転角度に関わらず、前記ベースへの前記第2の押圧面の正射影に重ならない、
     請求項1から3のいずれかに記載のソケット。
    The orthogonal projection of the first pressing surface onto the base does not overlap the orthogonal projection of the second pressing surface onto the base, regardless of the rotation angle of the cam around the rotation axis.
    The socket according to any one of claims 1 to 3.
  5.  前記カムは、前記第2の押圧面に隣接して前記第2の押圧面とともに階段形状を構成する逃げ面を更に有し、
     前記第2の押圧面から前記逃げ面までの距離は、前記第1の被押圧面から前記第2の被押圧面までの距離よりも大きい、
     請求項1から4のいずれかに記載のソケット。
    The cam further has a flank surface adjacent to the second pressing surface and forming a step shape with the second pressing surface,
    A distance from the second pressing surface to the flank is larger than a distance from the first pressed surface to the second pressed surface,
    The socket according to any one of claims 1 to 4.
  6.  前記ベースに固定されるカバーと、
     前記カバーに対して相対移動可能なプレッシャープレートと、
     前記カバーと前記プレッシャープレートとの間に配置され、前記プレッシャープレートを前記カバーから離れる方向に付勢するばねと、を更に備え、
     前記被検査体押圧部材及び前記カムは、前記プレッシャープレートに支持されている、
     請求項1から5のいずれかに記載のソケット。
    The cover fixed to the base and
    A pressure plate that can move relative to the cover and
    A spring disposed between the cover and the pressure plate and biasing the pressure plate in a direction away from the cover;
    The inspection object pressing member and the cam are supported by the pressure plate,
    The socket according to any one of claims 1 to 5.
  7.  前記被検査体押圧部材は、前記第2の被押圧面よりも前記ベースの近くに位置する第3の被押圧面を更に有し、
     前記カムは、前記回転軸周りに第3の角度回転したときに前記第3の被押圧面に接触する第3の押圧面を更に有する、
     請求項1から6のいずれかに記載のソケット。
    The inspected member pressing member further has a third pressed surface located closer to the base than the second pressed surface,
    The cam further has a third pressing surface that comes into contact with the third pressed surface when rotated by a third angle about the rotation axis.
    The socket according to any one of claims 1 to 6.
PCT/JP2020/008811 2019-03-06 2020-03-03 Socket WO2020179761A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019040391A JP2020143988A (en) 2019-03-06 2019-03-06 socket
JP2019-040391 2019-03-06

Publications (1)

Publication Number Publication Date
WO2020179761A1 true WO2020179761A1 (en) 2020-09-10

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ID=72338142

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (3)

Country Link
JP (1) JP2020143988A (en)
TW (1) TW202046586A (en)
WO (1) WO2020179761A1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1126124A (en) * 1997-06-27 1999-01-29 Nec Eng Ltd Ic socket
US20050164530A1 (en) * 2004-01-26 2005-07-28 Yates Alan G. Test socket
JP2017208305A (en) * 2016-05-20 2017-11-24 株式会社エンプラス Socket for electrical component
JP2017219413A (en) * 2016-06-07 2017-12-14 株式会社エンプラス Socket for electric component
JP2018503818A (en) * 2015-02-05 2018-02-08 リーノ インダストリアル インコーポレイテッド Inspection device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1126124A (en) * 1997-06-27 1999-01-29 Nec Eng Ltd Ic socket
US20050164530A1 (en) * 2004-01-26 2005-07-28 Yates Alan G. Test socket
JP2018503818A (en) * 2015-02-05 2018-02-08 リーノ インダストリアル インコーポレイテッド Inspection device
JP2017208305A (en) * 2016-05-20 2017-11-24 株式会社エンプラス Socket for electrical component
JP2017219413A (en) * 2016-06-07 2017-12-14 株式会社エンプラス Socket for electric component

Also Published As

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JP2020143988A (en) 2020-09-10
TW202046586A (en) 2020-12-16

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