WO2020179636A1 - Détecteur de position et capteur magnétique - Google Patents

Détecteur de position et capteur magnétique Download PDF

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Publication number
WO2020179636A1
WO2020179636A1 PCT/JP2020/008126 JP2020008126W WO2020179636A1 WO 2020179636 A1 WO2020179636 A1 WO 2020179636A1 JP 2020008126 W JP2020008126 W JP 2020008126W WO 2020179636 A1 WO2020179636 A1 WO 2020179636A1
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Prior art keywords
magnetic
magnetic sensor
straight line
orbit
separation distance
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PCT/JP2020/008126
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English (en)
Japanese (ja)
Inventor
雅彦 石立
大 桑原
浩仁 林
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株式会社村田製作所
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Publication of WO2020179636A1 publication Critical patent/WO2020179636A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices

Definitions

  • the present invention relates to a position detection device and a magnetic sensor device.
  • Patent Document 1 JP-A-2005-331399
  • the position detection device described in Patent Document 1 includes one magnetic sensor pair, a magnetic force generator, and a control unit. A pair of magnetic sensor pairs are arranged apart from each other.
  • the magnetic force generator moves relative to a pair of magnetic sensors.
  • the control means detects the relative position in a predetermined direction between the magnetic force generator and the pair of magnetic sensors based on each output value from the pair of magnetic sensors.
  • the control means controls each input value of the one magnetic sensor pair so that the sum of the magnitudes of the output values of the one magnetic sensor pair becomes a constant value, and then controls each of the one magnetic sensor pair. The difference in the magnitude of the output values is detected as the position output.
  • the position detection device described in Patent Document 1 has room for improving the detection accuracy of the position and displacement of the magnetic force generator which is the member to be detected.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a position detection device having improved detection accuracy of the position and displacement of a member to be detected.
  • the position detection device detects the position of a member to be detected that is linearly movable.
  • the position detection device includes a magnetic member, a substrate, a first magnetic sensor, and a second magnetic sensor.
  • the magnetic member is included in the detected member.
  • the substrate has a first surface and a second surface. The first surface faces the magnetic member. The second surface is parallel to the first surface.
  • Each of the plurality of first magnetic sensors is arranged on the first surface on a first virtual straight line parallel to the trajectory through which the magnetic member passes.
  • the plurality of second magnetic sensors are arranged on the second plane on a second virtual straight line parallel to the trajectory.
  • the first separation distance is the distance between the track and the first virtual straight line, and the distance between the track and the second virtual straight line.
  • the second separation distance is different from each other.
  • the detection accuracy of the position and displacement of the detected member can be improved.
  • FIG. 3 is a cross-sectional view of the position detection device shown in FIG. 2 as seen in the direction of arrows III-III.
  • FIG. 4 is a cross-sectional view of the position detection device shown in FIG. 3 as seen from the direction of arrows IV-IV.
  • FIG. 5 is a view of the magnetic sensor device shown in FIG. 5 viewed from the direction of arrow VI. It is a figure which looked at the magnetic sensor apparatus shown in FIG.
  • FIG. 6 is a top view showing transparently all magnetic sensors provided on a substrate.
  • FIG. 8 is an enlarged view showing an IX portion of the magnetic sensor device shown in FIG.
  • FIG. 3 is a block diagram showing an electronic circuit of the magnetic sensor in the magnetic sensor device according to the embodiment of the present invention. It is a block diagram which shows the circuit structure of the magnetic sensor device which concerns on one Embodiment of this invention. It is a graph which shows the transition of the magnetic flux density in the extension direction of each orbit of the 1st magnetic field component and the 2nd magnetic field component of the magnetic field which acts on three kinds of 1st imaginary straight lines from which the 1st separation distance differs mutually.
  • FIG. 6 is a second table showing the transition of the detection range in which the magnetic sensor outputs an ON signal with the movement of the magnet in the position detection device according to the first embodiment.
  • FIGS. 17 is a graph showing the magnet position (A) on the horizontal axis and the intermediate position (B) on the vertical axis shown in FIGS. 15 and 16. It is the first table which shows the transition of the detection range which the magnetic sensor outputs an ON signal with the movement of the magnet in the position detection apparatus which concerns on Comparative Example 1. 2 is a second table showing the transition of the detection range in which the magnetic sensor outputs an ON signal with the movement of the magnet in the position detection device according to Comparative Example 1. 20 is a graph shown in FIGS. 18 and 19 with the magnet position (A) as the horizontal axis and the intermediate position (B) as the vertical axis.
  • the transition of each of the first magnetic field component and the second magnetic field component on the first virtual straight line and the output of the magnetic sensor when the magnetic member is located at the initial position It is the table which showed the signal.
  • the first magnetic field component and the second magnetic field component on the first virtual straight line when the magnetic member is located at the initial position 3 is a table showing the transition of each of the above and the output signal of the magnetic sensor.
  • FIG. 1 is a schematic diagram showing a configuration of a position detection device according to an embodiment of the present invention.
  • the position detection device 100 according to the embodiment of the present invention includes a magnetic sensor device 101 and a magnetic material member 110.
  • the magnetic sensor device 101 is fixed to the first base 1.
  • the magnetic member 110 is included in the detected member 10.
  • the member 10 to be detected is fixed to the second base portion 2.
  • the second base 2 is linearly movable as indicated by the white arrow, and is relatively movable with respect to the first base 1. Therefore, the detected member 10 and the magnetic member 110 can move linearly and can move relative to the first base 1.
  • the magnetic sensor device 101 detects a magnetic field from the magnetic member 110.
  • the position detecting device 100 detects the relative position of the detected member 10 with respect to the magnetic sensor device 101.
  • FIG. 2 is a plan view showing the configuration of the position detection device according to the embodiment of the present invention.
  • FIG. 3 is a cross-sectional view of the position detection device shown in FIG. 2 seen from the direction of arrows along the line III-III.
  • FIG. 4 is a cross-sectional view of the position detection device shown in FIG. 3 as seen in the direction of arrows IV-IV.
  • the magnetic sensor device 101 includes a substrate 120, a plurality of first magnetic sensors 130, a plurality of second magnetic sensors 140, a plurality of third magnetic sensors 150, and a plurality of third magnetic sensors 150.
  • the four magnetic sensor 160 and the calculation unit 170 are provided. 2 to 4, the structure of the magnetic sensor device 101 is simplified and illustrated, and the calculation unit 170 is not illustrated.
  • the orbit O is an orbit through which the magnetic member 110 passes when moving, and is linear. That is, the extending direction X of the orbit O is along a straight line. In each drawing, the extending direction X of the trajectory O is shown to be parallel to the x-axis direction in the Cartesian coordinate system.
  • the substrate 120 has a first surface 121
  • the magnetic member 110 is a magnet magnetized in a direction perpendicular to the first surface 121. ..
  • the magnetic member 110 has an N pole on the side facing the substrate 120 and an S pole on the side not facing the substrate 120.
  • the magnetic member 110 may have an S pole on the side facing the substrate 120 and an N pole on the side not facing the substrate 120.
  • the magnetic field from the magnetic member 110 acts on each of the first magnetic sensor 130, the second magnetic sensor 140, the third magnetic sensor 150, and the fourth magnetic sensor 160.
  • the magnetic field lines M generated from the magnetic material member 110 pass through each of the first magnetic sensor 130, the second magnetic sensor 140, the third magnetic sensor 150, and the fourth magnetic sensor 160.
  • the magnetic flux density of the magnetic field from the magnetic member 110 that acts on each of the first magnetic sensor 130, the second magnetic sensor 140, the third magnetic sensor 150, and the fourth magnetic sensor 160 is, for example, 13 mT or more and 20 mT or less.
  • the direction of the magnetic field from the magnetic member 110 that acts on each of the first magnetic sensor 130, the second magnetic sensor 140, the third magnetic sensor 150, and the fourth magnetic sensor 160 will be described later.
  • the substrate 120 has a first surface 121 and a second surface 122.
  • the first surface 121 and the second surface 122 are positioned so as to be parallel to each other.
  • the thickness of the substrate 120 is 1.2 mm, for example.
  • the first surface 121 is shown as being perpendicular to the z-axis direction in the Cartesian coordinate system.
  • the first surface 121 faces the magnetic member 110.
  • the second surface 122 is located on the side opposite to the magnetic member 110 side with respect to the first surface 121.
  • each of the plurality of first magnetic sensors 130 is arranged on the first surface 121 on a first virtual straight line L1 parallel to the trajectory O through which the magnetic member 110 passes during movement. It is arranged.
  • the first separation distance Y1 which is the distance between the trajectory O and the first virtual straight line L1
  • the first virtual straight line L1 is shown to be perpendicular to the y-axis direction in the orthogonal coordinate system.
  • Each of the plurality of second magnetic sensors 140 is arranged on the second virtual straight line L2 parallel to the orbit O on the second surface 122.
  • the second separation distance Y2 which is the distance between the trajectory O and the second virtual straight line L2 is, for example, 3 It is 0.0 mm.
  • the first separation distance Y1 and the second separation distance Y2 are different from each other.
  • the relationship between the first separation distance Y1 and the second separation distance Y2 will be described later.
  • each of the plurality of third magnetic sensors 150 is arranged on the first surface 121 on a third virtual straight line L3 parallel to the trajectory O through which the magnetic member 110 passes. ing.
  • the third separation distance Y3 which is the distance between the trajectory O and the third virtual straight line L3, is the first It is substantially the same as the separation distance Y1.
  • Each of the plurality of fourth magnetic sensors 160 is arranged on the second surface 122 on a fourth virtual straight line L4 parallel to the trajectory O through which the magnetic member 110 passes.
  • the fourth separation distance Y4 which is the distance between the trajectory O and the fourth virtual straight line L4, is the second distance when viewed from the direction perpendicular to the first surface 121. It is substantially the same as the distance Y2.
  • FIG. 5 is a plan view showing the configuration of the magnetic sensor device according to the embodiment of the present invention.
  • FIG. 6 is a view of the magnetic sensor device shown in FIG. 5 viewed from the direction of arrow VI.
  • FIG. 7 is a view of the magnetic sensor device shown in FIG. 6 viewed from the direction of arrow VII.
  • FIG. 8 is a plan view showing all the magnetic sensors provided on the substrate in a perspective view in the magnetic sensor device according to the embodiment of the present invention.
  • FIG. 9 is an enlarged view of the IX portion of the magnetic sensor device shown in FIG.
  • the plurality of first magnetic sensors 130 are arranged at equal intervals.
  • the center-to-center distance between adjacent first magnetic sensors 130 is, for example, 2.0 mm.
  • the plurality of second magnetic sensors 140 are arranged side by side at equal intervals.
  • the center distance between the second magnetic sensors 140 adjacent to each other is set to be substantially the same as the center distance between the first magnetic sensors 130 adjacent to each other.
  • each of the plurality of first magnetic sensors 130 and each of the plurality of second magnetic sensors 140 are The center points of the magnetic sensors are arranged so as to be staggered in the extending direction X of the orbit O.
  • the plurality of third magnetic sensors 150 are arranged at equal intervals.
  • the distance between the centers of the third magnetic sensors 150 adjacent to each other is set to be substantially the same as the distance between the centers of the first magnetic sensors 130 adjacent to each other.
  • each of the plurality of first magnetic sensors 130 and each of the plurality of third magnetic sensors 150 are arranged so as to be staggered in the extending direction X of the orbit O.
  • the plurality of fourth magnetic sensors 160 are arranged at equal intervals.
  • the center-to-center distance between the fourth magnetic sensors 160 adjacent to each other is arranged so as to be substantially the same as the center-to-center distance between the first magnetic sensors 130 adjacent to each other.
  • each of the plurality of first magnetic sensors 130 and each of the plurality of fourth magnetic sensors 160 are The center points of the magnetic sensors are arranged so as to be staggered in the extending direction X of the orbit O.
  • a plurality of first magnetic sensors 130, a plurality of second magnetic sensors 140, a plurality of third magnetic sensors 150 and a plurality of fourth magnetic sensors 160 are arranged so as to be located at different positions in the extending direction X of the orbit O.
  • the first magnetic sensor 130, the second magnetic sensor 140, the third magnetic sensor 150, and the fourth magnetic sensor 160 have the extending direction X of the orbit O.
  • the fourth magnetic sensor 160, the third magnetic sensor 150, the second magnetic sensor 140, and the first magnetic sensor 130 are arranged so as to be repeated in this order.
  • the magnetic field in the extending direction X of the orbit O is sequentially set in the above region in the order of the fourth magnetic sensor 160, the third magnetic sensor 150, the second magnetic sensor 140, and the first magnetic sensor 130.
  • the sensors are arranged so that the distance between the centers is 0.5 mm.
  • the number of the second magnetic sensors 140 is the same as the number of the first magnetic sensors 130.
  • the number of the second magnetic sensors 140 may be different from the number of the first magnetic sensors 130.
  • the numbers of the first magnetic sensor 130, the second magnetic sensor 140, the third magnetic sensor 150, and the fourth magnetic sensor 160 may be the same as or different from each other.
  • the magnetic sensors are arranged in the extending direction X of the orbit O.
  • the space can be narrowed. Thereby, the arrangement density of the magnetic sensors can be increased in the extending direction X of the track O.
  • each of the plurality of first magnetic sensors 130, the plurality of second magnetic sensors 140, the plurality of third magnetic sensors 150, and the plurality of fourth magnetic sensors 160 has a magnetic field having a sensitivity characteristic equal to or higher than the magnetic field strength at which magnetic saturation occurs. It is arranged within the range applied from the magnetic member 110. Therefore, in each of the first magnetic sensor 130, the second magnetic sensor 140, the third magnetic sensor 150, and the fourth magnetic sensor 160, the position and displacement of the magnetic member 110 are detected based on the direction of the acting magnetic field. can do.
  • each of the first magnetic sensor 130, the second magnetic sensor 140, the third magnetic sensor 150, and the fourth magnetic sensor 160 detects the direction of the magnetic field in the in-plane direction of the arranged surface. To do.
  • each of the plurality of first magnetic sensors 130 has a first magnetic field component parallel to the trajectory O in the acting magnetic field. Bx and the second magnetic field component By perpendicular to the first magnetic field component Bx in the in-plane direction of the first surface 121 can be detected. Also in each of the plurality of third magnetic sensors 150, the first magnetic field component Bx parallel to the trajectory O and the second magnetic field component Bx perpendicular to the first magnetic field component Bx in the in-plane direction of the first surface 121 in the acting magnetic field. The magnetic field component By can be detected.
  • the first magnetic field component Bx parallel to the trajectory O in the acting magnetic field and the first magnetic field component Bx in the in-plane direction of the second surface 122.
  • the second magnetic field component By perpendicular to the magnetic field component Bx can be detected.
  • each of the plurality of first magnetic sensors 130, the plurality of second magnetic sensors 140, the plurality of third magnetic sensors 150, and the plurality of fourth magnetic sensors 160 is a magnetic switch.
  • the magnetic switch is configured to output an ON signal when the value obtained by subtracting the first magnetic field component Bx from the second magnetic field component By is equal to or greater than the threshold value and output an OFF signal when the value is less than the threshold value.
  • FIG. 10 is a block diagram showing an electronic circuit of the magnetic sensor in the magnetic sensor device according to the embodiment of the present invention.
  • an electronic circuit of the first magnetic sensor 130 is shown.
  • Each of the second magnetic sensor 140, the third magnetic sensor 150, and the fourth magnetic sensor 160 has an electronic circuit similar to that of the first magnetic sensor 130.
  • the first magnetic sensor 130 includes a first magnetic resistance element 130a, a second magnetic resistance element 130b, a third magnetic resistance element 130c, a fourth magnetic resistance element 130d, a differential amplifier 130e, and a temperature compensation circuit. It has 130f, a latch and switch circuit 130g, and a CMOS (Complementary Metal Oxide Semiconductor) driver 130h.
  • CMOS Complementary Metal Oxide Semiconductor
  • each of the first magnetoresistive element 130a, the second magnetoresistive element 130b, the third magnetoresistive element 130c, and the fourth magnetoresistive element 130d is an AMR (Anisotropic Magneto Resistance) element.
  • Each of the first magnetoresistive element 130a, the second magnetoresistive element 130b, the third magnetoresistive element 130c, and the fourth magnetoresistive element 130d is not limited to the AMR element, but is a GMR (Giant Magneto Resistance) element or a TMR (Tunnel). It may be a Magneto Resistance element.
  • the first magnetic resistance element 130a, the second magnetic resistance element 130b, the third magnetic resistance element 130c, and the fourth magnetic resistance element 130d are electrically connected to each other. Specifically, the first magnetoresistive element 130a and the second magnetoresistive element 130b are connected in series by the wiring 130i. The third magnetoresistive element 130c and the fourth magnetoresistive element 130d are connected in series by a wiring 130j.
  • the first magnetic sensor 130 further includes a midpoint 130k, a midpoint 130m, a power supply terminal (Vcc) 137, a ground terminal (Gnd) 138, and an output terminal (Out) 139.
  • Each of the first magnetic resistance element 130a and the third magnetic resistance element 130c is connected to the midpoint 130k. Specifically, the first magnetoresistive element 130a and the midpoint 130k are connected by the wiring 130p, and the third magnetoresistive element 130c and the midpoint 130k are connected by the wiring 130q.
  • Each of the second magnetoresistive element 130b and the fourth magnetoresistive element 130d is connected to the midpoint 130m. Specifically, the second magnetoresistive element 130b and the midpoint 130m are connected by the wiring 130r, and the fourth magnetoresistive element 130d and the midpoint 130m are connected by the wiring 130s.
  • the wiring 130i is connected to a power supply terminal (Vcc) 137 to which current is input.
  • the wiring 130j is connected to the ground terminal (Gnd) 138.
  • the differential amplifier 130e has an input end connected to each of the midpoint 130k and the midpoint 130m, and an output end connected to the temperature compensation circuit 130f.
  • the differential amplifier 130e is connected to each of the power supply terminal (Vcc) 137 and the ground terminal (Gnd) 138.
  • the output terminal of the temperature compensation circuit 130f is connected to the latch and switch circuit 130g. Further, the temperature compensation circuit 130f is connected to each of the power supply terminal (Vcc) 137 and the ground terminal (Gnd) 138.
  • the output end of the latch and switch circuit 130g is connected to the CMOS driver 130h. Further, the latch and switch circuit 130g are connected to each of the power supply terminal (Vcc) 137 and the ground terminal (Gnd) 138.
  • the output end of the CMOS driver 130h is connected to the output terminal (Out) 139.
  • the CMOS driver 130h is connected to each of the power supply terminal (Vcc) 137 and the ground terminal (Gnd) 138.
  • first magnetic sensor 130 Since the first magnetic sensor 130 has the above circuit configuration, a potential difference depending on the strength of the external magnetic field occurs between the midpoint 130m and the midpoint 130k. When this potential difference exceeds a preset detection level, a signal is output from the output terminal (Out) 139.
  • first magnetic sensor 130 outputs a signal when a magnetic field having a magnetic flux density of 13 mT or more acts on first magnetic sensor 130.
  • FIG. 11 is a block diagram showing a circuit configuration of a magnetic sensor device according to an embodiment of the present invention. Note that FIG. 11 illustrates a part of the plurality of first magnetic sensors 130, the plurality of second magnetic sensors 140, the plurality of third magnetic sensors 150, and the plurality of fourth magnetic sensors 160.
  • a magnetic sensor device 101 in a magnetic sensor device 101 according to an embodiment of the present invention, a plurality of first magnetic sensors 130, a plurality of second magnetic sensors 140, a plurality of third magnetic sensors 150 and a plurality of fourth magnetic sensors 130.
  • Each of the magnetic sensors 160 is electrically connected to the calculation unit 170.
  • the calculation unit 170 is connected to the output terminals (OUT) 139 of the plurality of first magnetic sensors 130, the plurality of second magnetic sensors 140, the plurality of third magnetic sensors 150, and the plurality of fourth magnetic sensors 160. ..
  • the calculation unit 170 is a microcomputer. As shown in FIG. 7, in one embodiment of the present invention, the calculation unit 170 is arranged on the second surface 122 of the substrate 120.
  • the calculation unit 170 includes all the magnetic sensors arranged on the substrate 120, including the plurality of first magnetic sensors 130, the plurality of second magnetic sensors 140, the plurality of third magnetic sensors 150, and the plurality of fourth magnetic sensors 160. Among them, a magnetic sensor detecting the magnetic field from the magnetic member 110 at one position on one side of the extending direction X of the orbit O at a position farthest from the magnetic member 110 and the extending direction X of the orbit O. The intermediate position of the orbit O in the extending direction X with the magnetic sensor detected at the position farthest from the magnetic member 110 on the other side is calculated.
  • a magnetic switch that outputs an ON signal at a position farthest from the magnetic member 110 on one side of the extending direction X of the orbit O and the extending direction X of the orbit O.
  • the intermediate position in the extending direction X of the orbit O with the magnetic switch that mainly outputs the ON signal at the position farthest from the magnetic member 110 on the other side is calculated.
  • the position of the center point C of the magnetic member 110 in the extending direction X of the track O of the detected member 10 and the magnetic body in the extending direction X of the track O of the detected member 10 are calculated.
  • a magnetic material is used for each of the first magnetic sensor 130, the second magnetic sensor 140, the third magnetic sensor 150, and the fourth magnetic sensor 160. It is necessary that the magnetic field from the member 110 acts similarly depending on the position of the track O in the extending direction X.
  • the distance between the magnetic member 110 and the first surface 121, and the distance between the magnetic member 110 and the second surface 122 are different from each other.
  • the distance between magnetic member 110 and first surface 121 is, for example, 3.0 mm
  • the distance between magnetic member 110 and second surface 122 is, for example, 4.2 mm. Is. Therefore, the first position in the magnetic field acting on each of the position on the first surface 121 and the position on the second surface 122, which are at the same position when viewed from the direction perpendicular to the first surface 121, The in-plane direction of the surface 121 and the in-plane direction of the second surface 122 are different from each other.
  • the in-plane direction of the surface 122 is brought close to each other.
  • the second separation distance Y2 between the trajectory O and the second virtual straight line L2, as shown in FIG. 3 the length of the first detection range X1 and the length of the second detection range X2 are substantially the same. Is set to be.
  • the first detection range X1 is a range in which the first magnetic sensor 130 outputs an ON signal on the first virtual straight line.
  • the second detection range X2 is a range in which the second magnetic sensor 140 outputs an ON signal on the second virtual straight line.
  • the third separation distance Y3 and the fourth separation distance Y4 are set in the same manner as the first separation distance Y1 and the second separation distance Y2.
  • the first separation distance Y1 was set to three types of 2.0 mm, 2.5 mm, and 3.0 mm.
  • the second separation distance Y2 was set to three types of 2.0 mm, 2.5 mm and 3.0 mm.
  • FIG. 12 is a graph showing the transition of the magnetic flux density in the extending direction of each orbit of the first magnetic field component and the second magnetic field component of the magnetic field acting on the three types of first virtual straight lines having different first separation distances. is there.
  • the vertical axis shows the magnetic flux density (mT)
  • the horizontal axis shows the distance (mm) from the 0 point on the first virtual straight line L1.
  • the point 0 on the first imaginary straight line L1 is a point located on the first imaginary straight line L1 at the same position as the initial position of the center point C of the magnetic member 110 in the extending direction X of the orbit O. Is.
  • the magnetic flux density of the second magnetic field component By tends to decrease as the distance from the point 0 on the first virtual straight line L1 increases.
  • the magnetic flux density of the first magnetic field component Bx tends to increase as the distance from the point 0 on the first virtual straight line L1 increases.
  • the values of the second magnetic field component By and the first magnetic field component Bx are equal at a position on the first imaginary straight line L1 from the point 0 to 3.0 mm.
  • the values of the second magnetic field component By and the first magnetic field component Bx are equal at a position 3.5 mm from the point 0 on the first virtual straight line L1.
  • the values of the second magnetic field component By and the first magnetic field component Bx are equal at a position 4.0 mm from the point 0 on the first virtual straight line L1.
  • FIG. 13 is a graph showing the transition of the magnetic flux density in the extending direction of the orbits of the first magnetic field component and the second magnetic field component of the magnetic field that act on the three types of second virtual straight lines having different second separation distances. is there.
  • the vertical axis shows the magnetic flux density (mT)
  • the horizontal axis shows the distance (mm) from the 0 point on the second virtual straight line L2.
  • the 0 point on the second virtual straight line L2 is a point located on the second virtual straight line L2 at the same position as the initial position of the center point C of the magnetic member 110 in the extending direction X of the trajectory O. Is.
  • the magnetic flux density of the second magnetic field component By tends to decrease as the distance from the zero point on the second virtual straight line L2 increases.
  • the magnetic flux density of the first magnetic field component Bx tends to increase as the distance from the point 0 on the second virtual straight line L2 increases.
  • the values of the second magnetic field component By and the first magnetic field component Bx are equal at a position 2.6 mm from the point 0 on the second virtual straight line L2.
  • the values of the second magnetic field component By and the first magnetic field component Bx are equal at the position 3.2 mm from the point 0 on the second virtual straight line L2.
  • the values of the second magnetic field component By and the first magnetic field component Bx are equal at a position 3.7 mm from the point 0 on the second virtual straight line L2.
  • FIG. 14 is a table summarizing the relationship between the first separation distance and the length of the first detection range and the relationship between the second separation distance and the length of the second detection range in Experimental Example 1.
  • the length of the first detection range X1 is 3.6 mm
  • the second detection range X2 is 3.0 mm
  • the length of is 3.7 mm, which is a value close to the length of the first detection range X1. Therefore, by setting the first separation distance Y1 to 2.5 mm and the second separation distance Y2 to 3.0 mm, the length of the first detection range X1 and the length of the second detection range X2 can be made substantially the same. ..
  • each of the first separation distance Y1 and the third separation distance Y3 is 2.5 mm
  • each of the second separation distance Y2 and the fourth separation distance Y4 is 3.0 mm.
  • the position detection device 100 according to the embodiment is prepared as the first embodiment.
  • FIG. 15 is a first table showing the transition of the detection range in which the magnetic sensor outputs an ON signal in accordance with the movement of the magnet in the position detecting device according to the first embodiment.
  • FIG. 16 is a second table showing the transition of the detection range in which the magnetic sensor outputs the ON signal in accordance with the movement of the magnet in the position detecting device according to the first embodiment.
  • the first magnetic sensor 130 is indicated as “first”
  • the second magnetic sensor 140 is indicated as “second”
  • the third magnetic sensor 150 is indicated as "third”. Is displayed
  • the fourth magnetic sensor 160 is displayed as “fourth”.
  • the magnet position (A) indicates the distance from the initial position of the magnet in the extending direction X of the track O.
  • the intermediate position (B) indicates the above intermediate position calculated by the calculation unit 170.
  • a magnetic sensor outputting an ON signal is indicated by a circle.
  • the first magnetic sensor 130 arranged on the first surface 121 of the substrate 120 and The length of the detection range in which each of the third magnetic sensors 150 outputs an ON signal, and each of the second magnetic sensor 140 and the fourth magnetic sensor 160 arranged on the second surface 122 of the substrate 120 outputs an ON signal.
  • the length of the output detection range is the same.
  • the difference between the magnet position (A) and the intermediate position (B) is always 0.00 regardless of the magnet position (A).
  • FIG. 17 is a graph shown in FIGS. 15 and 16 with the magnet position (A) as the horizontal axis and the intermediate position (B) as the vertical axis. As shown in FIG. 17, in the position detecting device according to the first embodiment, the displacement of the magnet for every 0.25 mm can be detected to have linearity.
  • each of the first separation distance Y1, the second separation distance Y2, the third separation distance Y3, and the fourth separation distance Y4 is set to 2.5 m, and the other configuration is the position detection device according to the embodiment of the present invention.
  • a similar position detection device was prepared as Comparative Example 1.
  • FIG. 18 is a first table showing the transition of the detection range in which the magnetic sensor outputs an ON signal in accordance with the movement of the magnet in the position detection device according to Comparative Example 1.
  • FIG. 19 is a second table showing the transition of the detection range in which the magnetic sensor outputs an ON signal in accordance with the movement of the magnet in the position detection device according to Comparative Example 1.
  • the notation items shown in FIGS. 18 and 19 are the same as the notation items shown in FIGS. 15 and 16.
  • the length of the detection range in which each of the fourth magnetic sensors 160 outputs an ON signal is such that each of the first magnetic sensor 130 and the third magnetic sensor 150 arranged on the first surface 121 of the substrate 120 has an ON signal. Is narrower than the length of the detection range for outputting.
  • the difference between the magnet position (A) and the intermediate position (B) varies between ⁇ 0.25 and 0.25 depending on the magnet position (A). That is, an error occurs between the calculated intermediate position (B) and the actual magnet position (A).
  • FIG. 20 is a graph shown in FIGS. 18 and 19 with the magnet position (A) as the horizontal axis and the intermediate position (B) as the vertical axis. As shown in FIG. 20, in the position detecting device according to Comparative Example 1, the displacement of the magnet every 0.25 mm cannot be detected so as to have linearity.
  • the magnet position (A) is set to have linearity. It was confirmed that it could be detected.
  • each of the first separation distance Y1, the second separation distance Y2, the third separation distance Y3, and the fourth separation distance Y4 is set so that the detection accuracy of the position detection device 100 does not decrease due to variations in the sensitivity of the magnetic sensors. It
  • the first magnetic sensor 130 is arranged on the first virtual straight line L1 so that the distance between the centers of the first magnetic sensors 130 is 0.5 mm.
  • the threshold value as the magnetic switch of the first magnetic sensor 130 is set within the range of 1.0 mT or more and 2.5 mT or less.
  • FIG. 21 is a view showing the transition of each of the first magnetic field component and the second magnetic field component on the first virtual straight line when the magnetic member is located at the initial position in the position detecting device according to the second embodiment, and It is the table which showed the output signal of a magnetic sensor.
  • the first virtual straight line L1 having a value obtained by subtracting the first magnetic field component Bx from the second magnetic field component By.
  • the rate of change depending on the distance from the 0 point above is large. Therefore, the value obtained by subtracting the first magnetic field component Bx from the second magnetic field component By is 3.2 mT at the position where the distance is 3.5 mm, and is -0.3 mT at the position where the distance is 4.0 mm, The threshold value is located between these two positions.
  • the output signal of the first magnetic sensor 130 becomes an ON signal when the distance is 3.5 mm or less, and becomes an OFF signal when the distance is 4.0 mm or more, and is clearly switched. Accordingly, in the position detection device according to the second embodiment, the length of the first detection range X1 of the first magnetic sensor 130 can be stabilized without being affected by the variation in the sensitivity of the first magnetic sensor 130. it can.
  • the first magnetic sensor 130 was arranged on the first virtual straight line L1 so that the distance between the centers of the first magnetic sensors 130 was 0.5 mm.
  • the threshold value as the magnetic switch of the first magnetic sensor 130 is set within the range of 1.0 mT or more and 2.5 mT or less.
  • FIG. 22 shows the first magnetic field component on the first virtual straight line when the magnetic member is located at the initial position in the position detecting device according to Comparative Example 2 in which the first separation distance Y1 is 8.0 mm. It is a table showing each transition of the second magnetic field component and the output signal of the magnetic sensor.
  • the value obtained by subtracting the first magnetic field component Bx from the second magnetic field component By is 2.9 mT at the position where the distance is 5.5 mm, and 0.8 mT at the position where the distance is 7.5 mm.
  • the threshold is located between the two positions.
  • the output signal of the first magnetic sensor 130 is an ON signal when the distance is 5.5 mm or less and an OFF signal when the distance is 7.5 mm or more, but the distance is 6.0 mm. In the range of 7.0 mm or less, the signal may be ON or OFF depending on the influence of the variation in the sensitivity of the first magnetic sensor 130.
  • the position at which the output signal of the first magnetic sensor 130 switches due to the influence of the variation in the sensitivity of the first magnetic sensor 130 changes, and thus the position of the first magnetic sensor 130 changes. Since the length of the first detection range X1 is not stable, it becomes difficult to make the length of the first detection range X1 and the length of the second detection range X2 substantially the same.
  • each of the second separation distance Y2, the third separation distance Y3, and the fourth separation distance Y4 is set in the same manner as the first separation distance Y1.
  • the first magnetic sensor 130, the second magnetic sensor 140, the third magnetic sensor 150, and the fourth magnetic sensor 160 are arranged on the first surface 121 of the substrate 120 without being affected by variations in the sensitivity of each.
  • the length of the detection range in which each of the magnetic sensors 160 outputs an ON signal can be the same.
  • each of the plurality of first magnetic sensors 130 has the trajectory O through which the magnetic member 110 passes on the first surface 121. It is arranged on the first virtual straight line L1 parallel to.
  • the plurality of second magnetic sensors 140 are arranged on the second virtual straight line L2 parallel to the orbit O on the second surface 122.
  • a first separation distance Y1 which is a distance between the trajectory O and the first virtual straight line L1
  • the second separation distance Y2 which is the distance between the two, is different from each other.
  • the detection accuracy of the position and displacement of the detected member 10 can be improved.
  • the first virtual straight line L1 and the second virtual straight line are compared with the case where the first separation distance Y1 and the second separation distance Y2 are the same.
  • the first separation so that the in-plane directions of the magnetic field 121 and the second surface 122 from the magnetic member 110 acting at the same position in the extending direction of the orbit O on L2 approach each other.
  • the distance Y1 and the second separation distance Y2 are different from each other.
  • each of the plurality of first magnetic sensors 130 and the plurality of second magnetic sensors 140 is a magnetic switch.
  • the position and displacement of the member 10 to be detected based on the detection signals of the plurality of first magnetic sensors 130 and the plurality of second magnetic sensors 140 can be calculated easily and stably.
  • the magnetic material member 110 is a magnet magnetized in a direction perpendicular to the first surface 121.
  • the position of the member to be detected can be detected with high accuracy by using the fourth magnetic sensor 160.
  • each of the plurality of first magnetic sensors 130 and the plurality of second magnetic sensors 140 has a magnetic field having a magnetic field strength equal to or higher than the magnetic field strength at which the sensitivity characteristics are magnetically saturated. It is arranged within the range applied from the body member 110.
  • the position and displacement of the magnetic member 110 are detected based on the direction of the acting magnetic field. can do.
  • the position and displacement of the member 10 to be detected can be detected with high accuracy without being affected by the variation in the sensitivity of the magnetic sensor.
  • Each of the position detection device 100 and the magnetic sensor device 101 according to the present embodiment further includes a calculation unit 170.
  • the calculation unit 170 calculates the magnetic field from the magnetic member 110 among all the magnetic sensors arranged on the substrate, including the plurality of first magnetic sensors 130 and the plurality of second magnetic sensors 140, to extend the trajectory O.
  • the intermediate position of the orbit with the magnetic sensor in the extending direction X is calculated.
  • the position of the member 10 to be detected can be calculated based on the detection signals of the plurality of magnetic sensors, so that the position and displacement of the member 10 to be detected can be detected with high accuracy.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

L'invention concerne chacun d'une pluralité de premiers capteurs magnétiques (130) étant placé sur une première ligne droite virtuelle (L1) sur une première surface (121), la première ligne droite virtuelle (L1) étant parallèle à une orbite (O) où passe un élément magnétique (110). Une pluralité de seconds capteurs magnétiques (140) sont placés sur une seconde ligne droite virtuelle (L2) sur une seconde surface (122), la seconde ligne droite virtuelle (L2) étant parallèle à l'orbite (O). Un premier jeu (Y1), qui est une distance entre l'orbite (O) et la première ligne droite virtuelle (L1) lorsqu'il est vu depuis une direction perpendiculaire à la première surface (121), et un second jeu (Y2), qui est une distance entre l'orbite (O) et la seconde ligne droite virtuelle (L2) lorsqu'ils sont vus depuis la même direction, sont différents l'un de l'autre.
PCT/JP2020/008126 2019-03-05 2020-02-27 Détecteur de position et capteur magnétique WO2020179636A1 (fr)

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JP2019039590 2019-03-05

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1151693A (ja) * 1997-08-06 1999-02-26 Nippon Thompson Co Ltd リニアエンコーダ装置
JP2007143226A (ja) * 2005-11-15 2007-06-07 Nippon Pulse Motor Co Ltd シャフト型リニアモータの位置検出装置
JP2011061995A (ja) * 2009-09-10 2011-03-24 Nikon Corp リニアモータ及びリニアモータの位置検出方法
EP3285046A1 (fr) * 2016-08-16 2018-02-21 Robert Bosch GmbH Dispositif de mouvement permettant la détection magnétique de position et dispositif de transmission de données

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1151693A (ja) * 1997-08-06 1999-02-26 Nippon Thompson Co Ltd リニアエンコーダ装置
JP2007143226A (ja) * 2005-11-15 2007-06-07 Nippon Pulse Motor Co Ltd シャフト型リニアモータの位置検出装置
JP2011061995A (ja) * 2009-09-10 2011-03-24 Nikon Corp リニアモータ及びリニアモータの位置検出方法
EP3285046A1 (fr) * 2016-08-16 2018-02-21 Robert Bosch GmbH Dispositif de mouvement permettant la détection magnétique de position et dispositif de transmission de données

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