WO2020177352A1 - Optical fiber preform based on continuous fused quartz bushing, and manufacturing method therefor - Google Patents

Optical fiber preform based on continuous fused quartz bushing, and manufacturing method therefor Download PDF

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Publication number
WO2020177352A1
WO2020177352A1 PCT/CN2019/114350 CN2019114350W WO2020177352A1 WO 2020177352 A1 WO2020177352 A1 WO 2020177352A1 CN 2019114350 W CN2019114350 W CN 2019114350W WO 2020177352 A1 WO2020177352 A1 WO 2020177352A1
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optical fiber
core rod
fiber preform
synthetic
fused silica
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PCT/CN2019/114350
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French (fr)
Chinese (zh)
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莫思铭
李凡
眭立洪
张国栋
周莉
李想
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江苏永鼎光纤科技有限公司
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Publication of WO2020177352A1 publication Critical patent/WO2020177352A1/en

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod

Definitions

  • the invention relates to an optical fiber preform based on a continuous fused silica sleeve and a manufacturing method thereof, belonging to the field of optical fiber preform manufacturing.
  • the process of producing optical fiber preforms mainly adopts a two-step method, that is, first manufacturing the preform core rod, and then manufacturing the cladding outside the core rod.
  • core rod manufacturing technologies improved chemical vapor deposition (MCVD), microwave plasma chemical vapor deposition (PCVD), external vapor deposition (OVD) and axial vapor deposition (VAD), outsourcing Layer manufacturing technology mainly includes OVD method, sleeve method, and plasma spraying method.
  • the sleeve method is to insert a core rod into a quartz sleeve to form an optical fiber preform, which is currently a better method for manufacturing large-size optical fiber preforms.
  • Quartz sleeves are made of natural crystalline quartz or synthetic silane by high temperature melting. Quartz sleeves are classified according to process method, use and appearance, including continuous fused quartz sleeves, fused transparent quartz sleeves, and gas refining transparent quartz sleeves , Synthetic quartz sleeves, opaque quartz sleeves, optical quartz sleeves, quartz sleeves for semiconductors, quartz sleeves for electric light sources, etc., among which continuous fused quartz sleeves are prepared by continuous melting method, and the continuous melting method is simple.
  • One-time input of quartz sand to draw the tube directly has a great cost advantage.
  • the metal impurity content of the continuous fused silica tube is high, and the hydroxyl content is difficult to control. Using it as the outer covering of the optical fiber preform will increase the loss of the optical fiber and make it It is difficult to apply to the production of optical fiber preforms.
  • the technical problem to be solved by the present invention is: in order to solve the technical problem that using continuous fused silica tube as the outer layer of the optical fiber preform will increase the loss of optical fiber, an optical fiber preform based on continuous fused silica tube and a manufacturing method thereof are provided .
  • a manufacturing method of optical fiber preform based on continuous fused silica sleeve the steps are as follows:
  • the OVD process is used to deposit the loose body of the outer covering containing the Sb 2 O 3 -F mixture on the outside of the optical fiber core rod, and then the sintering process is carried out in the sintering furnace to obtain the composite core rod;
  • the sintering treatment method is: passing into the sintering furnace Enter inert gas and chlorine gas, first raise the sintering furnace to 600-800°C at a heating rate of 50-60°C/min, keep it for 1-2h, and then raise it to 1000-1200°C at a heating rate of 30-40°C/min. Keep the temperature for 2-4 hours, and finally increase the temperature to 1300-1500°C at a rate of 10-20°C/min, and keep it for 5-7 hours;
  • the synthetic core rod and the continuous fused silica sleeve are combined into an optical fiber preform.
  • the sintered synthetic mandrel is heat-treated.
  • the heat treatment method is: cooling the synthetic mandrel held at 1300-1500°C for 5-7h to a temperature of ⁇ 100°C within 2 minutes, and then heat the cooled synthetic mandrel The mandrel is heated to 700-1000°C for 2 to 3 hours, and finally the synthetic mandrel is cooled to 300-500°C for 3 to 5 hours.
  • the steps of using the VAD process to prepare the optical fiber core rod are: first deposit the powder core rod by the axial vapor deposition method; then perform the dehydroxylation treatment, fluorine doping treatment and vitrification treatment on the powder core rod in the sintering furnace: During the hydroxyl treatment, pass Cl 2 gas and inert gas into the sintering furnace, and the dehydroxylation temperature is 800 ⁇ 1000°C; during the fluorine doping treatment, pass fluorine-containing gas and inert gas into the sintering furnace, and the temperature of the sintering furnace is 1000 ⁇ 1300°C; During the vitrification process, only inert gas is introduced into the sintering furnace, and the glass transition temperature is 1400 ⁇ 1600°C.
  • the RIC process steps are: corroding the surface of the synthetic mandrel with a mixed acid of hydrofluoric acid and nitric acid with a molar ratio of 1:0.5-1.5, the corrosion depth is not less than 0.6mm, and then cleaning the corroded synthetic mandrel After drying, insert the synthetic mandrel into the continuous fused silica sleeve to form an optical fiber preform.
  • the core layer is a silica glass layer doped with P 2 O 5 or B 2 O 3 , and the relative refractive index ⁇ n 1 of the core layer is 0.3% to 0.4%; the inner cladding layer is doped with GeO 2
  • the relative refractive index ⁇ n 2 of the inner cladding layer is -0.05% to -0.01%, and the ratio b/a of the fiber core rod diameter b to the core layer diameter a is 3 to 5.
  • the relative refractive index ⁇ n 3 of the outer cladding layer is -0.25% to -0.1%, and the ratio c/a of the diameter c of the synthetic core rod to the diameter a of the core layer is 7-9.
  • the synthetic mandrel is fixed in the center of the continuous fused silica sleeve in the RIC process, and the gap between the synthetic mandrel and the continuous fused silica sleeve is controlled to be less than 3 mm, and the effective diameter d of the optical fiber preform is equal to the diameter of the synthetic mandrel.
  • the ratio d/c of c is 2 ⁇ 3.
  • the metal impurity content in the continuous fused quartz sleeve is less than 20 ppm, and the hydroxyl content is less than 6 ppm.
  • the present invention also provides an optical fiber preform manufactured by the above method.
  • the present invention also provides a single-mode optical fiber, which is formed by directly drawing the above-mentioned optical fiber preform, or formed by drawing after drawing.
  • OVD process Use external vapor deposition and sintering process to prepare the required thickness of quartz glass.
  • VAD process Use axial vapor deposition and sintering process to prepare quartz glass of required thickness.
  • RIC process The synthetic mandrel and sleeve are processed, including tapering, extension, corrosion, cleaning, and drying, and then the synthetic mandrel is inserted into the sleeve to form a large-size optical fiber preform.
  • Continuous fused quartz casing a casing made of natural quartz sand using continuous melting process.
  • the relative refractive index ⁇ n 1 of the core layer is defined by the following equation:
  • n 1 is the absolute refractive index of the core layer
  • n c is the absolute refractive index of pure silica glass.
  • the relative refractive index of the inner cladding ⁇ n 2 is defined by the following equation:
  • n 2 is the absolute refractive index of the inner cladding
  • n c is the absolute refractive index of pure silica glass.
  • the relative refractive index ⁇ n 3 of the outer cladding is defined by the following equation:
  • n 3 is the absolute refractive index of the cladding
  • n c is the absolute refractive index of pure silica glass.
  • the effective diameter of the optical fiber preform is the outer diameter of the solid preform, and for the RIC preform,
  • the CSA is the cross-sectional area
  • Core/clad concentricity error the distance between the center of the core layer of the fiber and the center of the fiber.
  • the present invention uses the VAD process to prepare an optical fiber core rod including a core layer and an inner cladding layer, and then prepares an outer cladding layer containing Sb 2 O 3 -F through the OVD process, and finally prepares a large-size and low-loss optical fiber preform through the RIC process, wherein: After the sintering process, the reasonable outer cover layer deposited by the OVD process is further subjected to a heat treatment process, so that the barrier layer has a reasonable material composition and structure, which can effectively prevent the metal impurities and hydroxyl groups in the fused quartz sleeve from diffusing to the core layer, effectively reducing The loss of the drawn fiber is reduced, and the diameter of the synthetic mandrel prepared by the OVD process is uniform, which can accurately control the gap between the sleeve and the synthetic mandrel in the RIC process and reduce the concentricity error of the fiber core/cladding; the powder mandrel is prepared by the VAD method, Then through reasonable dehydroxy
  • the diameter of the optical fiber preform prepared by the present invention can reach 211mm
  • the drawing length of a single preform can reach 2920km
  • the attenuation of the prepared optical fiber at 1310nm wavelength is as low as 0.271dB/km
  • the attenuation coefficient at 1383nm wavelength is as low as 0.245dB/km
  • the attenuation coefficient at 1550nm wavelength is as low as 0.145dB/km
  • the optical fiber prepared from the optical fiber preform has a mode field diameter of 8.1 ⁇ 9.2 ⁇ m at 1310nm wavelength
  • the cut-off wavelength of the optical fiber is 1251nm ⁇ 1271nm .
  • the powder core rod is prepared by the axial vapor deposition method (VAD method), and then the powder core rod is subjected to dehydroxylation treatment, fluorine doping treatment and vitrification treatment in the sintering furnace: during the dehydroxylation treatment, pass Cl into the sintering furnace 2 gas and He gas, Cl 2 gas flow rate is 1000mL/min, He gas flow rate is 20L/min, and dehydroxylation temperature is 800°C; during fluorine doping treatment, SiF 4 gas and He gas, SiF 4 gas and The flow ratio of He gas is 4:1, in which the He gas flow rate is 30L/min, and the sintering furnace temperature is 1000°C; during vitrification, only He gas is introduced into the sintering furnace, and the He gas flow rate is 40L/min, vitrification The temperature is 1400°C;
  • the fiber core rod has a core-cladding ratio b/a of 3
  • the core layer is a silica glass layer doped with P 2 O 5 , and the relative refractive index difference ⁇ n 1 of the core layer is 0.3%
  • the layer is a silica glass layer doped with GeO 2 -F mixture, and the relative refractive index ⁇ n 2 of the inner cladding layer is -0.05%.
  • the OVD process is used to deposit the outer covering containing the Sb 2 O 3 -F mixture on the outside of the optical fiber core rod, and then perform sintering treatment to obtain a synthetic core rod;
  • the sintering treatment method is: inert gas and chlorine gas are passed into the sintering furnace, Cl 2
  • the gas flow rate is 800mL/min and the He gas flow rate is 40L/min.
  • the sintering furnace is raised to 600°C at a heating rate of 50°C/min, kept for 2 hours, and then raised to 1000°C at a heating rate of 30°C/min. Keep the temperature for 4 hours, and finally increase it to 1300°C at a heating rate of 10°C/min, and keep it for 7 hours;
  • the ratio c/a of the diameter c of the synthetic core rod to the diameter a of the core layer is 7 and the relative refractive index ⁇ n 3 of the outer cladding layer is -0.25%;
  • the RIC process to combine the synthetic core rod and the continuous fused silica sleeve into an optical fiber preform, specifically: the surface of the synthetic core rod is corroded with a mixed acid of hydrofluoric acid and nitric acid with a molar ratio of 1:0.5, and the corrosion depth is not less than 0.6mm, then clean and dry the corroded synthetic mandrel, insert the synthetic mandrel into the continuous fused quartz sleeve, and fix the synthetic mandrel in the center of the continuous fused quartz sleeve to control the synthetic mandrel and continuous fused quartz sleeve The gap between them is less than 3mm, and the fiber preform is combined into an optical fiber preform.
  • the diameter of the optical fiber preform reaches 201mm.
  • the ratio d/c of the effective diameter d of the optical fiber preform to the composite core rod diameter c is 2, and the prepared optical fiber preform is drawn online
  • the length of a single rod can reach 2850km.
  • the metal impurity content of the fused silica sleeve is shown in Table 1, and the performance parameters of the optical fiber are shown in Table 2.
  • the powder core rod is prepared by the axial vapor deposition method (VAD method), and then the powder core rod is subjected to dehydroxylation treatment, fluorine doping treatment and vitrification treatment in the sintering furnace: during the dehydroxylation treatment, pass Cl into the sintering furnace 2 gas and He gas, Cl 2 gas flow rate is 1000mL/min, He gas flow rate is 20L/min, and dehydroxylation temperature is 1000°C; during fluorine doping treatment, SiF 4 gas and He gas, SiF 4 gas and The flow ratio of He gas is 3:1, among which the He gas flow is 30L/min, and the sintering furnace temperature is 1300°C; during vitrification, only He gas is introduced into the sintering furnace, and the He gas flow is 40L/min, vitrification The temperature is 1600°C;
  • the fiber core rod has a core-wrap ratio b/a of 5
  • the core layer is a silica glass layer doped with B 2 O 3 , and the relative refractive index difference ⁇ n 1 of the core layer is 0.4%
  • the layer is a silica glass layer doped with GeO 2 -F mixture, and the relative refractive index ⁇ n 2 of the inner cladding layer is -0.01%.
  • the OVD process is used to deposit the outer covering containing the Sb 2 O 3 -F mixture on the outside of the optical fiber core rod, and then perform sintering treatment to obtain a synthetic core rod;
  • the sintering treatment method is: inert gas and chlorine gas are passed into the sintering furnace, Cl 2
  • the gas flow rate is 800mL/min and the He gas flow rate is 40L/min.
  • the sintering furnace is raised to 800°C at a heating rate of 60°C/min, kept for 1 hour, and then raised to 1200°C at a heating rate of 40°C/min. Insulate for 2h, and finally rise to 1500°C at a heating rate of 20°C/min for 5h;
  • the ratio c/a of the diameter c of the synthetic core rod to the diameter a of the core layer is 9 and the relative refractive index ⁇ n 3 of the outer cladding layer is -0.1%;
  • the RIC process to combine the synthetic mandrel and the continuous fused silica sleeve into an optical fiber preform, specifically: the surface of the synthetic mandrel is corroded with a mixed acid of hydrofluoric acid and nitric acid with a molar ratio of 1:1.5, and the corrosion depth is not less than 0.6mm, then clean and dry the corroded synthetic mandrel, insert the synthetic mandrel into the continuous fused quartz sleeve, and fix the synthetic mandrel in the center of the continuous fused quartz sleeve to control the synthetic mandrel and continuous fused quartz sleeve The gap between them is less than 3mm, and the fiber preform is combined into an optical fiber preform.
  • the diameter of the optical fiber preform reaches 211mm.
  • the ratio d/c of the effective diameter d of the optical fiber preform to the composite core rod diameter c is 3, and the prepared optical fiber preform is drawn online
  • the length of a single rod can reach 2920km; among them, the metal impurity content of the fused silica sleeve is shown in Table 3, and the performance parameters of the optical fiber are shown in Table 4.
  • the powder core rod is prepared by the axial vapor deposition method (VAD method), and then the powder core rod is subjected to dehydroxylation treatment, fluorine doping treatment and vitrification treatment in the sintering furnace: during the dehydroxylation treatment, pass Cl into the sintering furnace 2 gas and He gas, Cl 2 gas flow rate is 1000mL/min, He gas flow rate is 20L/min, and dehydroxylation temperature is 900°C; during fluorine doping treatment, SiF 4 gas and He gas, SiF 4 gas and The flow ratio of He gas is 4:1, in which the He gas flow rate is 30L/min, and the sintering furnace temperature is 1200°C; during vitrification, only He gas is introduced into the sintering furnace, and the He gas flow rate is 40L/min. The temperature is 1500°C;
  • the core-packing ratio b/a of the fiber core rod is 4.5
  • the core layer is a silica glass layer doped with B 2 O 3
  • the relative refractive index difference ⁇ n 1 of the core layer is 0.35%
  • the layer is a silica glass layer doped with GeO 2 -F mixture, and the relative refractive index ⁇ n 2 of the inner cladding layer is -0.03%.
  • the OVD process is used to deposit the outer covering containing the Sb 2 O 3 -F mixture on the outside of the optical fiber core rod, and then perform sintering treatment to obtain a synthetic core rod;
  • the sintering treatment method is: inert gas and chlorine gas are passed into the sintering furnace, Cl 2
  • the gas flow rate is 800mL/min
  • the He gas flow rate is 40L/min.
  • the sintering furnace is raised to 700°C at a heating rate of 55°C/min, kept for 1.5h, and then raised to 1100°C at a heating rate of 35°C/min ,Hold for 3h, finally raise to 1400°C at a heating rate of 15°C/min, keep for 6h;
  • the ratio c/a of the diameter c of the synthetic core rod to the diameter a of the core layer is 8, and the relative refractive index ⁇ n 3 of the outer cladding layer is -0.15%;
  • the RIC process to combine the synthetic mandrel and the continuous fused silica sleeve into an optical fiber preform.
  • the surface of the synthetic mandrel is corroded with a mixed acid of hydrofluoric acid and nitric acid at a molar ratio of 1:1, and the corrosion depth is not less than 0.6mm, then clean and dry the corroded synthetic mandrel, insert the synthetic mandrel into the continuous fused quartz sleeve, and fix the synthetic mandrel in the center of the continuous fused quartz sleeve to control the synthetic mandrel and continuous fused quartz sleeve The gap between them is less than 3mm, and the optical fiber preform is combined into an optical fiber preform.
  • the diameter of the optical fiber preform reaches 205mm, and the ratio d/c of the effective diameter d of the optical fiber preform to the composite core rod diameter c is 2.5.
  • the prepared optical fiber preform is drawn online For low-loss optical fiber, the length of a single rod can reach 2895km; among them, the metal impurity content of the fused silica sleeve is shown in Table 5, and the performance parameters of the optical fiber are shown in Table 6.
  • Example 4 The only difference between Example 4 and Example 3 is that the sintered synthetic mandrel is heat-treated.
  • the heat treatment method is: the synthetic mandrel that has been kept at 1400°C for 6 hours is cooled to a temperature of ⁇ 100°C within 2 minutes, and then The cooled synthetic mandrel was heated to 700°C for 3 hours, and finally the synthetic mandrel was cooled to 300°C and held for 5 hours. Finally, the diameter of the obtained optical fiber preform reached 208mm.
  • the prepared optical fiber preform was drawn into low-loss optical fiber online. The length of the rod can reach 2905km.
  • the performance parameters of the optical fiber are shown in Table 7.
  • Example 5 The difference between Example 5 and Example 3 is that the sintered synthetic mandrel is heat-treated.
  • the heat treatment method is: the synthetic mandrel that has been kept at 1400°C for 6 hours is cooled to a temperature of ⁇ 100°C within 2 minutes, and then The cooled synthetic mandrel was heated to 1000°C for 2h, and finally the synthetic mandrel was cooled to 500°C and held for 3h. Finally, the diameter of the obtained optical fiber preform reached 210mm.
  • the prepared optical fiber preform was drawn into low-loss optical fiber online. The length of the rod can reach 2913km, and the performance parameters of the optical fiber are shown in Table 8.

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Abstract

Provided are an optical fiber preform based on a continuous fused quartz bushing, and a manufacturing method therefor. The manufacturing method comprises: preparing an optical fiber core rod with a core layer and an inner cladding layer from inside to outside by using a VAD process; depositing a barrier layer loose body containing a Sb2O3-F mixture on the outer portion of the optical fiber core rod by using an OVD process, and then performing a sintering treatment to obtain a synthetic core rod; and combining the synthetic core rod and a continuous fused quartz bushing by using an RIC process to obtain the optical fiber preform. The diameter of the preform can reach 211 mm, the drawing length of a single preform can reach 2920 km, the attenuation of a drawn optical fiber at 1310 nm is as low as 0.271 dB/km, the attenuation coefficient at 1383 nm is as low as 0.245 dB/km, the attenuation coefficient at 1550 nm is as low as 0.145 dB/km, the mode field diameter at 1310 nm is 8.1 μm to 9.2 μm, and the optical cable cut-off wavelength is 1251 nm to 1271 nm.

Description

一种基于连熔石英套管的光纤预制棒及其制造方法Optical fiber preform based on continuous fused silica sleeve and manufacturing method thereof 技术领域Technical field
本发明涉及一种基于连熔石英套管的光纤预制棒及其制造方法,属于光纤预制棒制造领域。The invention relates to an optical fiber preform based on a continuous fused silica sleeve and a manufacturing method thereof, belonging to the field of optical fiber preform manufacturing.
背景技术Background technique
目前,生产光纤预制棒的工艺主要采用两步法,即先制造预制棒芯棒,然后在芯棒外制造包层。芯棒制造技术主要有以下四种:改进的化学汽相沉积法(MCVD)、微波等离子体化学汽相沉积(PCVD)、外部气相沉积法(OVD)和轴向气相沉积法(VAD),外包层制造技术主要包括OVD法,套管法,等离子体喷涂法,其中,套管法是将芯棒插入石英套管中组成光纤预制棒,它是目前制造大尺寸光纤预制棒的较好方法。At present, the process of producing optical fiber preforms mainly adopts a two-step method, that is, first manufacturing the preform core rod, and then manufacturing the cladding outside the core rod. There are four main core rod manufacturing technologies: improved chemical vapor deposition (MCVD), microwave plasma chemical vapor deposition (PCVD), external vapor deposition (OVD) and axial vapor deposition (VAD), outsourcing Layer manufacturing technology mainly includes OVD method, sleeve method, and plasma spraying method. Among them, the sleeve method is to insert a core rod into a quartz sleeve to form an optical fiber preform, which is currently a better method for manufacturing large-size optical fiber preforms.
石英套管采用天然结晶石英或合成硅烷经高温熔制而成,石英套管按工艺方法、用途及外观来分类,包括连熔石英套管、电熔透明石英套管、气炼透明石英套管、合成石英套管、不透明石英套管、光学石英套管、半导体用石英套管、电光源用石英套管等,其中连熔石英套管采用连熔法制备而成,连熔法工艺简单,一次性投入石英砂直接拉管,具有很大的成本优势,但是连熔石英套管的金属杂质含量高,羟基含量难以控制,以其作为光纤预制棒的外包层会增大光纤损耗,使其难以应用于光纤预制棒的生产。Quartz sleeves are made of natural crystalline quartz or synthetic silane by high temperature melting. Quartz sleeves are classified according to process method, use and appearance, including continuous fused quartz sleeves, fused transparent quartz sleeves, and gas refining transparent quartz sleeves , Synthetic quartz sleeves, opaque quartz sleeves, optical quartz sleeves, quartz sleeves for semiconductors, quartz sleeves for electric light sources, etc., among which continuous fused quartz sleeves are prepared by continuous melting method, and the continuous melting method is simple. One-time input of quartz sand to draw the tube directly has a great cost advantage. However, the metal impurity content of the continuous fused silica tube is high, and the hydroxyl content is difficult to control. Using it as the outer covering of the optical fiber preform will increase the loss of the optical fiber and make it It is difficult to apply to the production of optical fiber preforms.
发明内容Summary of the invention
本发明要解决的技术问题是:为解决以连熔石英套管作为光纤预制棒的外包层会增大光纤损耗的技术问题,提供一种基于连熔石英套管的光纤预制棒及其制造方法。The technical problem to be solved by the present invention is: in order to solve the technical problem that using continuous fused silica tube as the outer layer of the optical fiber preform will increase the loss of optical fiber, an optical fiber preform based on continuous fused silica tube and a manufacturing method thereof are provided .
本发明解决其技术问题所采用的技术方案是:The technical solutions adopted by the present invention to solve its technical problems are:
一种基于连熔石英套管的光纤预制棒的制造方法,步骤如下:A manufacturing method of optical fiber preform based on continuous fused silica sleeve, the steps are as follows:
利用VAD工艺制备由内到外为芯层和内包层的光纤芯棒;Use the VAD process to prepare fiber core rods with core and inner cladding from the inside to the outside;
利用OVD工艺在光纤芯棒外部沉积包含有Sb 2O 3-F混合物的外包层疏松体,然后在烧结炉内进行烧结处理,得到合成芯棒;所述烧结处理方法为:往烧结炉内通入惰性气体和氯气,首先使烧结炉以50-60℃/min的升温速率升到600-800℃,保温1-2h,然后以30-40℃/min的升温速率升到1000-1200℃,保温2-4h,最后以10-20℃/min的升温速率升到1300-1500℃,保温5-7h; The OVD process is used to deposit the loose body of the outer covering containing the Sb 2 O 3 -F mixture on the outside of the optical fiber core rod, and then the sintering process is carried out in the sintering furnace to obtain the composite core rod; the sintering treatment method is: passing into the sintering furnace Enter inert gas and chlorine gas, first raise the sintering furnace to 600-800℃ at a heating rate of 50-60℃/min, keep it for 1-2h, and then raise it to 1000-1200℃ at a heating rate of 30-40℃/min. Keep the temperature for 2-4 hours, and finally increase the temperature to 1300-1500°C at a rate of 10-20°C/min, and keep it for 5-7 hours;
利用RIC工艺将合成芯棒与连熔石英套管组合成光纤预制棒。Using the RIC process, the synthetic core rod and the continuous fused silica sleeve are combined into an optical fiber preform.
优选地,对烧结处理后的合成芯棒进行热处理,热处理方法为:将在1300-1500℃下保温5-7h后的合成芯棒在2min内冷却至温度<100℃,然后将冷却后的合成芯棒升温至700~1000℃保温2~3h,最后将合成芯棒降温至300~500℃保温3~5h。Preferably, the sintered synthetic mandrel is heat-treated. The heat treatment method is: cooling the synthetic mandrel held at 1300-1500°C for 5-7h to a temperature of <100°C within 2 minutes, and then heat the cooled synthetic mandrel The mandrel is heated to 700-1000°C for 2 to 3 hours, and finally the synthetic mandrel is cooled to 300-500°C for 3 to 5 hours.
优选地,利用VAD工艺制备光纤芯棒的步骤为:首先用轴向气相沉积法沉积粉末芯棒;然后在烧结炉中对粉末芯棒进行脱羟处理、氟掺杂处理和玻璃化处理:脱羟处理时,往烧结炉内通入Cl 2气和惰性气体,脱羟温度为800~1000℃;氟掺杂处理时,往烧结炉内通入含氟气体和惰性气体,烧结炉温度为1000~1300℃;玻璃化处理时,往烧结炉内只通 入惰性气体,玻璃化温度为1400~1600℃。 Preferably, the steps of using the VAD process to prepare the optical fiber core rod are: first deposit the powder core rod by the axial vapor deposition method; then perform the dehydroxylation treatment, fluorine doping treatment and vitrification treatment on the powder core rod in the sintering furnace: During the hydroxyl treatment, pass Cl 2 gas and inert gas into the sintering furnace, and the dehydroxylation temperature is 800~1000℃; during the fluorine doping treatment, pass fluorine-containing gas and inert gas into the sintering furnace, and the temperature of the sintering furnace is 1000 ~1300℃; During the vitrification process, only inert gas is introduced into the sintering furnace, and the glass transition temperature is 1400~1600℃.
优选地,RIC工艺步骤为:将合成芯棒表面用摩尔比为1:0.5-1.5的氢氟酸、硝酸的混合酸腐蚀,腐蚀深度计不小于0.6mm,然后将腐蚀后的合成芯棒清洗干燥,将合成芯棒插入连熔石英套管中,组合成光纤预制棒。Preferably, the RIC process steps are: corroding the surface of the synthetic mandrel with a mixed acid of hydrofluoric acid and nitric acid with a molar ratio of 1:0.5-1.5, the corrosion depth is not less than 0.6mm, and then cleaning the corroded synthetic mandrel After drying, insert the synthetic mandrel into the continuous fused silica sleeve to form an optical fiber preform.
优选地,所述芯层为掺有P 2O 5或B 2O 3的二氧化硅玻璃层,芯层的相对折射率Δn 1为0.3%~0.4%;所述内包层为掺有GeO 2-F混合物的二氧化硅玻璃层,内包层的相对折射率Δn 2为-0.05%~-0.01%,光纤芯棒的直径b与芯层直径a的比值b/a为3~5。 Preferably, the core layer is a silica glass layer doped with P 2 O 5 or B 2 O 3 , and the relative refractive index Δn 1 of the core layer is 0.3% to 0.4%; the inner cladding layer is doped with GeO 2 For the silica glass layer of the -F mixture, the relative refractive index Δn 2 of the inner cladding layer is -0.05% to -0.01%, and the ratio b/a of the fiber core rod diameter b to the core layer diameter a is 3 to 5.
优选地,所述外包层的相对折射率Δn 3为-0.25%~-0.1%,合成芯棒的直径c与芯层直径a的比值c/a为7~9。 Preferably, the relative refractive index Δn 3 of the outer cladding layer is -0.25% to -0.1%, and the ratio c/a of the diameter c of the synthetic core rod to the diameter a of the core layer is 7-9.
优选地,RIC工艺中将合成芯棒固定在连熔石英套管中心,控制合成芯棒和连熔石英套管之间的间隙小于3mm,所述光纤预制棒的有效直径d与合成芯棒直径c的比值d/c为2~3。Preferably, the synthetic mandrel is fixed in the center of the continuous fused silica sleeve in the RIC process, and the gap between the synthetic mandrel and the continuous fused silica sleeve is controlled to be less than 3 mm, and the effective diameter d of the optical fiber preform is equal to the diameter of the synthetic mandrel. The ratio d/c of c is 2~3.
优选地,所述连熔石英套管中金属杂质含量小于20ppm,羟基含量小于6ppm。Preferably, the metal impurity content in the continuous fused quartz sleeve is less than 20 ppm, and the hydroxyl content is less than 6 ppm.
本发明还提供一种由上述方法制造的光纤预制棒。The present invention also provides an optical fiber preform manufactured by the above method.
本发明还提供一种单模光纤,所述光纤由上述的光纤预制棒直接拉丝而成,或经拉伸后再拉丝而成。The present invention also provides a single-mode optical fiber, which is formed by directly drawing the above-mentioned optical fiber preform, or formed by drawing after drawing.
另外,为清楚地说明本发明的技术方案,对本发明涉及的术语的定义和说明如下:In addition, in order to clearly illustrate the technical solutions of the present invention, the definitions and descriptions of the terms involved in the present invention are as follows:
OVD工艺:用外部气相沉积和烧结工艺制备所需厚度的石英玻璃。OVD process: Use external vapor deposition and sintering process to prepare the required thickness of quartz glass.
VAD工艺:用轴向气相沉积和烧结工艺制备所需厚度的石英玻璃。VAD process: Use axial vapor deposition and sintering process to prepare quartz glass of required thickness.
RIC工艺:将合成芯棒和套管经过处理,包括拉锥、延长、腐蚀、清洗、干燥后,将合成芯棒插入套管中组成大尺寸光纤预制棒的制造工艺。RIC process: The synthetic mandrel and sleeve are processed, including tapering, extension, corrosion, cleaning, and drying, and then the synthetic mandrel is inserted into the sleeve to form a large-size optical fiber preform.
连熔石英套管:以天然石英砂为原料采用连熔工艺制备而成的套管。Continuous fused quartz casing: a casing made of natural quartz sand using continuous melting process.
芯层的相对折射率Δn 1,由以下方程式定义: The relative refractive index Δn 1 of the core layer is defined by the following equation:
Figure PCTCN2019114350-appb-000001
Figure PCTCN2019114350-appb-000001
其中,n 1为芯层的绝对折射率,而n c为纯石英玻璃的绝对折射率。 Among them, n 1 is the absolute refractive index of the core layer, and n c is the absolute refractive index of pure silica glass.
内包层的相对折射率Δn 2,由以下方程式定义: The relative refractive index of the inner cladding Δn 2 is defined by the following equation:
Figure PCTCN2019114350-appb-000002
Figure PCTCN2019114350-appb-000002
其中,n 2为内包层的绝对折射率,而n c为纯石英玻璃的绝对折射率。 Among them, n 2 is the absolute refractive index of the inner cladding, and n c is the absolute refractive index of pure silica glass.
外包层的相对折射率Δn 3,由以下方程式定义: The relative refractive index Δn 3 of the outer cladding is defined by the following equation:
Figure PCTCN2019114350-appb-000003
Figure PCTCN2019114350-appb-000003
其中,n 3为外包层的绝对折射率,而n c为纯石英玻璃的绝对折射率。 Among them, n 3 is the absolute refractive index of the cladding, and n c is the absolute refractive index of pure silica glass.
光纤预制棒的有效直径,对于实心预制棒即为其外径,对于RIC预制棒,
Figure PCTCN2019114350-appb-000004
所述CSA为横截面积;
The effective diameter of the optical fiber preform is the outer diameter of the solid preform, and for the RIC preform,
Figure PCTCN2019114350-appb-000004
The CSA is the cross-sectional area;
合成芯棒与套管的间隙:合成芯棒与套管之间的单侧距离,即Gap=[套管内径(ID)-合成芯棒外径(c)]/2。The gap between the synthetic mandrel and the sleeve: the unilateral distance between the synthetic mandrel and the sleeve, that is, Gap=[inner diameter of the sleeve (ID)-outer diameter of the synthetic mandrel (c)]/2.
弓曲度:对棒材绕中心轴旋转一周时,单位长度内棒材中心偏离旋转轴位置的最大值。Bow degree: When the bar rotates one circle around the central axis, the maximum value of the position of the bar center deviated from the rotation axis per unit length.
芯/包同心度误差:光纤中芯层的圆心和光纤的圆心之间的距离。Core/clad concentricity error: the distance between the center of the core layer of the fiber and the center of the fiber.
本发明的有益效果是:The beneficial effects of the present invention are:
本发明利用VAD工艺制备包括芯层和内包层的光纤芯棒,再通过OVD工艺制备包含有Sb 2O 3-F的外包层,最后通过RIC工艺制备大尺寸低损耗的光纤预制棒,其中:OVD工艺沉积的合理外包层经烧结工艺后,进一步经热处理工艺,使得阻挡层具有合理的材料组成和结构,这能够有效阻挡连熔石英套管中的金属杂质和羟基扩散至芯层,有效降低了拉制光纤的损耗,且OVD工艺制备的合成芯棒直径均匀,可以精确控制RIC工艺中套管和合成芯棒的间隙,降低光纤芯/包同心度误差;利用VAD法制备粉末芯棒,然后通过合理的脱羟、氟掺杂和玻璃化工艺,不仅能够有效脱除羟基,氟掺杂工艺还能优化芯包层的粘度匹配,从而降低拉制光纤的瑞利散射和损耗;以连熔石英套管作为光纤预制棒的外包层材料,可以得到大尺寸的光纤预制棒。最终,本发明制备的光纤预制棒的直径可达211mm,单根预制棒拉纤长度可达到2920km,制备的光纤在1310nm波长处的衰减低至0.271dB/km,在1383nm波长处的衰减系数低至0.245dB/km,在1550nm波长处的衰减系数低至0.145dB/km,所述的光纤预制棒制备的光纤在1310nm波长的模场直径为8.1~9.2μm,光纤的光缆截止波长为1251nm~1271nm。 The present invention uses the VAD process to prepare an optical fiber core rod including a core layer and an inner cladding layer, and then prepares an outer cladding layer containing Sb 2 O 3 -F through the OVD process, and finally prepares a large-size and low-loss optical fiber preform through the RIC process, wherein: After the sintering process, the reasonable outer cover layer deposited by the OVD process is further subjected to a heat treatment process, so that the barrier layer has a reasonable material composition and structure, which can effectively prevent the metal impurities and hydroxyl groups in the fused quartz sleeve from diffusing to the core layer, effectively reducing The loss of the drawn fiber is reduced, and the diameter of the synthetic mandrel prepared by the OVD process is uniform, which can accurately control the gap between the sleeve and the synthetic mandrel in the RIC process and reduce the concentricity error of the fiber core/cladding; the powder mandrel is prepared by the VAD method, Then through reasonable dehydroxylation, fluorine doping and vitrification process, not only can effectively remove the hydroxyl group, the fluorine doping process can also optimize the viscosity matching of the core and cladding, thereby reducing the Rayleigh scattering and loss of the drawn fiber; The fused silica tube is used as the outer coating material of the optical fiber preform, and large-size optical fiber preform can be obtained. Finally, the diameter of the optical fiber preform prepared by the present invention can reach 211mm, the drawing length of a single preform can reach 2920km, the attenuation of the prepared optical fiber at 1310nm wavelength is as low as 0.271dB/km, and the attenuation coefficient at 1383nm wavelength is as low as 0.245dB/km, the attenuation coefficient at 1550nm wavelength is as low as 0.145dB/km, the optical fiber prepared from the optical fiber preform has a mode field diameter of 8.1~9.2μm at 1310nm wavelength, and the cut-off wavelength of the optical fiber is 1251nm~1271nm .
具体实施方式detailed description
现在对本发明作进一步详细的说明。The present invention will now be described in further detail.
实施例1Example 1
利用轴向气相沉积法(VAD法)制备粉末芯棒,然后在烧结炉中对粉末芯棒进行脱羟处理、氟掺杂处理和玻璃化处理:脱羟处理时,往烧结炉内通入Cl 2气和He气,Cl 2气流量1000mL/min,He气流量20L/min,脱羟温度800℃;氟掺杂处理时,往烧结炉内通入SiF 4气体和He气,SiF 4气体和He气的流量比为4:1,其中He气流量为30L/min,烧结炉温度1000℃;玻璃化处理时,往烧结炉内只通入He气,He气流量为40L/min,玻璃化温度为1400℃; The powder core rod is prepared by the axial vapor deposition method (VAD method), and then the powder core rod is subjected to dehydroxylation treatment, fluorine doping treatment and vitrification treatment in the sintering furnace: during the dehydroxylation treatment, pass Cl into the sintering furnace 2 gas and He gas, Cl 2 gas flow rate is 1000mL/min, He gas flow rate is 20L/min, and dehydroxylation temperature is 800°C; during fluorine doping treatment, SiF 4 gas and He gas, SiF 4 gas and The flow ratio of He gas is 4:1, in which the He gas flow rate is 30L/min, and the sintering furnace temperature is 1000°C; during vitrification, only He gas is introduced into the sintering furnace, and the He gas flow rate is 40L/min, vitrification The temperature is 1400℃;
经测试,光纤芯棒的包芯比b/a为3,所述芯层为掺入P 2O 5的二氧化硅玻璃层,芯层的相对折射率差Δn 1为0.3%;所述内包层为掺有GeO 2-F混合物的二氧化硅玻璃层,内包层的相对折射率Δn 2为-0.05%。 After testing, the fiber core rod has a core-cladding ratio b/a of 3, the core layer is a silica glass layer doped with P 2 O 5 , and the relative refractive index difference Δn 1 of the core layer is 0.3%; The layer is a silica glass layer doped with GeO 2 -F mixture, and the relative refractive index Δn 2 of the inner cladding layer is -0.05%.
利用OVD工艺在光纤芯棒外部沉积包含有Sb 2O 3-F混合物的外包,然后进行烧结处理,得到合成芯棒;所述烧结处理方法为:往烧结炉内通入惰性气体和氯气,Cl 2气流量在800mL/min,He气流量在40L/min,首先使烧结炉以50℃/min的升温速率升到600℃,保温2h,然后以30℃/min的升温速率升到1000℃,保温4h,最后以10℃/min的升温速率升到1300℃,保温7h; The OVD process is used to deposit the outer covering containing the Sb 2 O 3 -F mixture on the outside of the optical fiber core rod, and then perform sintering treatment to obtain a synthetic core rod; the sintering treatment method is: inert gas and chlorine gas are passed into the sintering furnace, Cl 2 The gas flow rate is 800mL/min and the He gas flow rate is 40L/min. First, the sintering furnace is raised to 600°C at a heating rate of 50°C/min, kept for 2 hours, and then raised to 1000°C at a heating rate of 30°C/min. Keep the temperature for 4 hours, and finally increase it to 1300°C at a heating rate of 10°C/min, and keep it for 7 hours;
经测试后,得到合成芯棒的直径c与芯层直径a的比值c/a为7,外包层的相对折射率Δn 3为-0.25%; After testing, the ratio c/a of the diameter c of the synthetic core rod to the diameter a of the core layer is 7 and the relative refractive index Δn 3 of the outer cladding layer is -0.25%;
利用RIC工艺将合成芯棒与连熔石英套管组合成光纤预制棒,具体是:将合成芯棒表面用摩尔比为1:0.5的氢氟酸、硝酸的混合酸腐蚀,腐蚀深度计不小于0.6mm,然后将腐蚀后的合成芯棒清洗干燥,将合成芯棒插入连熔石英套管中,并将合成芯棒固定在连熔 石英套管中心,控制合成芯棒和连熔石英套管之间的间隙小于3mm,组合成光纤预制棒,光纤预制棒的直径达到201mm,光纤预制棒的有效直径d与合成芯棒直径c的比值d/c为2,将制备的光纤预制棒在线拉制低损耗光纤,单根棒拉纤长度可达到2850km;其中,连熔石英套管的金属杂质含量如表1所示,光纤的性能参数如表2所示。Use the RIC process to combine the synthetic core rod and the continuous fused silica sleeve into an optical fiber preform, specifically: the surface of the synthetic core rod is corroded with a mixed acid of hydrofluoric acid and nitric acid with a molar ratio of 1:0.5, and the corrosion depth is not less than 0.6mm, then clean and dry the corroded synthetic mandrel, insert the synthetic mandrel into the continuous fused quartz sleeve, and fix the synthetic mandrel in the center of the continuous fused quartz sleeve to control the synthetic mandrel and continuous fused quartz sleeve The gap between them is less than 3mm, and the fiber preform is combined into an optical fiber preform. The diameter of the optical fiber preform reaches 201mm. The ratio d/c of the effective diameter d of the optical fiber preform to the composite core rod diameter c is 2, and the prepared optical fiber preform is drawn online To make low-loss optical fiber, the length of a single rod can reach 2850km. Among them, the metal impurity content of the fused silica sleeve is shown in Table 1, and the performance parameters of the optical fiber are shown in Table 2.
表1连熔石英套管的杂质含量分布Table 1 Impurity content distribution of continuous fused silica casing
Figure PCTCN2019114350-appb-000005
Figure PCTCN2019114350-appb-000005
表2预制棒拉丝后光纤的参数Table 2 Optical fiber parameters after drawing the preform
Figure PCTCN2019114350-appb-000006
Figure PCTCN2019114350-appb-000006
实施例2Example 2
利用轴向气相沉积法(VAD法)制备粉末芯棒,然后在烧结炉中对粉末芯棒进行脱羟处理、氟掺杂处理和玻璃化处理:脱羟处理时,往烧结炉内通入Cl 2气和He气,Cl 2气流量1000mL/min,He气流量20L/min,脱羟温度1000℃;氟掺杂处理时,往烧结炉内通入SiF 4气体和He气,SiF 4气体和He气的流量比为3:1,其中He气流量为30L/min,烧结炉温度1300℃;玻璃化处理时,往烧结炉内只通入He气,He气流量为40L/min,玻璃化温度为1600℃; The powder core rod is prepared by the axial vapor deposition method (VAD method), and then the powder core rod is subjected to dehydroxylation treatment, fluorine doping treatment and vitrification treatment in the sintering furnace: during the dehydroxylation treatment, pass Cl into the sintering furnace 2 gas and He gas, Cl 2 gas flow rate is 1000mL/min, He gas flow rate is 20L/min, and dehydroxylation temperature is 1000°C; during fluorine doping treatment, SiF 4 gas and He gas, SiF 4 gas and The flow ratio of He gas is 3:1, among which the He gas flow is 30L/min, and the sintering furnace temperature is 1300℃; during vitrification, only He gas is introduced into the sintering furnace, and the He gas flow is 40L/min, vitrification The temperature is 1600℃;
经测试,光纤芯棒的包芯比b/a为5,所述芯层为掺入B 2O 3的二氧化硅玻璃层,芯层的相对折射率差Δn 1为0.4%;所述内包层为掺有GeO 2-F混合物的二氧化硅玻璃层,内包层的相对折射率Δn 2为-0.01%。 After testing, the fiber core rod has a core-wrap ratio b/a of 5, the core layer is a silica glass layer doped with B 2 O 3 , and the relative refractive index difference Δn 1 of the core layer is 0.4%; The layer is a silica glass layer doped with GeO 2 -F mixture, and the relative refractive index Δn 2 of the inner cladding layer is -0.01%.
利用OVD工艺在光纤芯棒外部沉积包含有Sb 2O 3-F混合物的外包,然后进行烧结处理,得到合成芯棒;所述烧结处理方法为:往烧结炉内通入惰性气体和氯气,Cl 2气流量在800mL/min,He气流量在40L/min,首先使烧结炉以60℃/min的升温速率升到800℃,保温1h,然后以40℃/min的升温速率升到1200℃,保温2h,最后以20℃/min的升温速率升到1500℃,保温5h; The OVD process is used to deposit the outer covering containing the Sb 2 O 3 -F mixture on the outside of the optical fiber core rod, and then perform sintering treatment to obtain a synthetic core rod; the sintering treatment method is: inert gas and chlorine gas are passed into the sintering furnace, Cl 2 The gas flow rate is 800mL/min and the He gas flow rate is 40L/min. First, the sintering furnace is raised to 800°C at a heating rate of 60°C/min, kept for 1 hour, and then raised to 1200°C at a heating rate of 40°C/min. Insulate for 2h, and finally rise to 1500℃ at a heating rate of 20℃/min for 5h;
经测试后,得到合成芯棒的直径c与芯层直径a的比值c/a为9,外包层的相对折射率Δn 3为-0.1%; After testing, the ratio c/a of the diameter c of the synthetic core rod to the diameter a of the core layer is 9 and the relative refractive index Δn 3 of the outer cladding layer is -0.1%;
利用RIC工艺将合成芯棒与连熔石英套管组合成光纤预制棒,具体是:将合成芯棒表面用摩尔比为1:1.5的氢氟酸、硝酸的混合酸腐蚀,腐蚀深度计不小于0.6mm,然后将腐蚀后的合成芯棒清洗干燥,将合成芯棒插入连熔石英套管中,并将合成芯棒固定在连熔石英套管中心,控制合成芯棒和连熔石英套管之间的间隙小于3mm,组合成光纤预制棒,光纤预制棒的直径达到211mm,光纤预制棒的有效直径d与合成芯棒直径c的比值d/c为3,将制备的光纤预制棒在线拉制低损耗光纤,单根棒拉纤长度可达到2920km;其中,连熔石英套管的金属杂质含量如表3所示,光纤的性能参数如表4所示。Use the RIC process to combine the synthetic mandrel and the continuous fused silica sleeve into an optical fiber preform, specifically: the surface of the synthetic mandrel is corroded with a mixed acid of hydrofluoric acid and nitric acid with a molar ratio of 1:1.5, and the corrosion depth is not less than 0.6mm, then clean and dry the corroded synthetic mandrel, insert the synthetic mandrel into the continuous fused quartz sleeve, and fix the synthetic mandrel in the center of the continuous fused quartz sleeve to control the synthetic mandrel and continuous fused quartz sleeve The gap between them is less than 3mm, and the fiber preform is combined into an optical fiber preform. The diameter of the optical fiber preform reaches 211mm. The ratio d/c of the effective diameter d of the optical fiber preform to the composite core rod diameter c is 3, and the prepared optical fiber preform is drawn online For low-loss optical fiber, the length of a single rod can reach 2920km; among them, the metal impurity content of the fused silica sleeve is shown in Table 3, and the performance parameters of the optical fiber are shown in Table 4.
表3连熔石英套管的杂质含量分布Table 3 Impurity content distribution of continuous fused silica casing
Figure PCTCN2019114350-appb-000007
Figure PCTCN2019114350-appb-000007
表4预制棒拉丝后光纤的参数Table 4 Optical fiber parameters after preform drawing
Figure PCTCN2019114350-appb-000008
Figure PCTCN2019114350-appb-000008
实施例3Example 3
利用轴向气相沉积法(VAD法)制备粉末芯棒,然后在烧结炉中对粉末芯棒进行脱羟处理、氟掺杂处理和玻璃化处理:脱羟处理时,往烧结炉内通入Cl 2气和He气,Cl 2气流量1000mL/min,He气流量20L/min,脱羟温度900℃;氟掺杂处理时,往烧结炉内通入SiF 4气体和He气,SiF 4气体和He气的流量比为4:1,其中He气流量为30L/min,烧结炉温度1200℃;玻璃化处理时,往烧结炉内只通入He气,He气流量为40L/min,玻璃化温度为1500℃; The powder core rod is prepared by the axial vapor deposition method (VAD method), and then the powder core rod is subjected to dehydroxylation treatment, fluorine doping treatment and vitrification treatment in the sintering furnace: during the dehydroxylation treatment, pass Cl into the sintering furnace 2 gas and He gas, Cl 2 gas flow rate is 1000mL/min, He gas flow rate is 20L/min, and dehydroxylation temperature is 900°C; during fluorine doping treatment, SiF 4 gas and He gas, SiF 4 gas and The flow ratio of He gas is 4:1, in which the He gas flow rate is 30L/min, and the sintering furnace temperature is 1200°C; during vitrification, only He gas is introduced into the sintering furnace, and the He gas flow rate is 40L/min. The temperature is 1500℃;
经测试,光纤芯棒的包芯比b/a为4.5,所述芯层为掺入B 2O 3的二氧化硅玻璃层,芯层的相对折射率差Δn 1为0.35%;所述内包层为掺有GeO 2-F混合物的二氧化硅玻璃层,内包层的相对折射率Δn 2为-0.03%。 After testing, the core-packing ratio b/a of the fiber core rod is 4.5, the core layer is a silica glass layer doped with B 2 O 3 , and the relative refractive index difference Δn 1 of the core layer is 0.35%; The layer is a silica glass layer doped with GeO 2 -F mixture, and the relative refractive index Δn 2 of the inner cladding layer is -0.03%.
利用OVD工艺在光纤芯棒外部沉积包含有Sb 2O 3-F混合物的外包,然后进行烧结处理,得到合成芯棒;所述烧结处理方法为:往烧结炉内通入惰性气体和氯气,Cl 2气流量在800mL/min,He气流量在40L/min,首先使烧结炉以55℃/min的升温速率升到700℃,保温1.5h,然后以35℃/min的升温速率升到1100℃,保温3h,最后以15℃/min的升温速率升到1400℃,保温6h; The OVD process is used to deposit the outer covering containing the Sb 2 O 3 -F mixture on the outside of the optical fiber core rod, and then perform sintering treatment to obtain a synthetic core rod; the sintering treatment method is: inert gas and chlorine gas are passed into the sintering furnace, Cl 2 The gas flow rate is 800mL/min, and the He gas flow rate is 40L/min. First, the sintering furnace is raised to 700°C at a heating rate of 55°C/min, kept for 1.5h, and then raised to 1100°C at a heating rate of 35°C/min ,Hold for 3h, finally raise to 1400℃ at a heating rate of 15℃/min, keep for 6h;
经测试后,得到合成芯棒的直径c与芯层直径a的比值c/a为8,外包层的相对折射率Δn 3为-0.15%; After testing, the ratio c/a of the diameter c of the synthetic core rod to the diameter a of the core layer is 8, and the relative refractive index Δn 3 of the outer cladding layer is -0.15%;
利用RIC工艺将合成芯棒与连熔石英套管组合成光纤预制棒,具体是:将合成芯棒表面用摩尔比为1:1的氢氟酸、硝酸的混合酸腐蚀,腐蚀深度计不小于0.6mm,然后将腐蚀后的合成芯棒清洗干燥,将合成芯棒插入连熔石英套管中,并将合成芯棒固定在连熔石英套管中心,控制合成芯棒和连熔石英套管之间的间隙小于3mm,组合成光纤预制棒,光纤预制棒的直径达到205mm,光纤预制棒的有效直径d与合成芯棒直径c的比值d/c为2.5,将制备的光纤预制棒在线拉制低损耗光纤,单根棒拉纤长度可达到2895km;其中,连熔石英套管的金属杂质含量如表5所示,光纤的性能参数如表6所示。Use the RIC process to combine the synthetic mandrel and the continuous fused silica sleeve into an optical fiber preform. Specifically, the surface of the synthetic mandrel is corroded with a mixed acid of hydrofluoric acid and nitric acid at a molar ratio of 1:1, and the corrosion depth is not less than 0.6mm, then clean and dry the corroded synthetic mandrel, insert the synthetic mandrel into the continuous fused quartz sleeve, and fix the synthetic mandrel in the center of the continuous fused quartz sleeve to control the synthetic mandrel and continuous fused quartz sleeve The gap between them is less than 3mm, and the optical fiber preform is combined into an optical fiber preform. The diameter of the optical fiber preform reaches 205mm, and the ratio d/c of the effective diameter d of the optical fiber preform to the composite core rod diameter c is 2.5. The prepared optical fiber preform is drawn online For low-loss optical fiber, the length of a single rod can reach 2895km; among them, the metal impurity content of the fused silica sleeve is shown in Table 5, and the performance parameters of the optical fiber are shown in Table 6.
表5连熔石英套管的杂质含量分布Table 5 Impurity content distribution of continuous fused silica casing
Figure PCTCN2019114350-appb-000009
Figure PCTCN2019114350-appb-000009
表6预制棒拉丝后光纤的参数Table 6 Optical fiber parameters after drawing the preform
Figure PCTCN2019114350-appb-000010
Figure PCTCN2019114350-appb-000010
实施例4Example 4
实施例4与实施例3的区别仅在于:对烧结处理后的合成芯棒进行热处理,热处理方法为:将在1400℃下保温6h后的合成芯棒在2min内冷却至温度<100℃,然后将冷却后的合成芯棒升温至700℃保温3h,最后将合成芯棒降温至300℃保温5h,最终得到光纤预制棒的直径达到208mm,将制备的光纤预制棒在线拉制低损耗光纤,单根棒拉纤长度可达到2905km,光纤的性能参数如表7所示。The only difference between Example 4 and Example 3 is that the sintered synthetic mandrel is heat-treated. The heat treatment method is: the synthetic mandrel that has been kept at 1400°C for 6 hours is cooled to a temperature of <100°C within 2 minutes, and then The cooled synthetic mandrel was heated to 700°C for 3 hours, and finally the synthetic mandrel was cooled to 300°C and held for 5 hours. Finally, the diameter of the obtained optical fiber preform reached 208mm. The prepared optical fiber preform was drawn into low-loss optical fiber online. The length of the rod can reach 2905km. The performance parameters of the optical fiber are shown in Table 7.
表7预制棒拉丝后光纤的性能参数Table 7 Performance parameters of the optical fiber after drawing the preform
Figure PCTCN2019114350-appb-000011
Figure PCTCN2019114350-appb-000011
实施例5Example 5
实施例5与实施例3的区别仅在于:对烧结处理后的合成芯棒进行热处理,热处理方法为:将在1400℃下保温6h后的合成芯棒在2min内冷却至温度<100℃,然后将冷却后的合成芯棒升温至1000℃保温2h,最后将合成芯棒降温至500℃保温3h,最终得到光纤预制棒的直径达到210mm,将制备的光纤预制棒在线拉制低损耗光纤,单根棒拉纤长度可达到2913km,光纤的性能参数如表8所示。The difference between Example 5 and Example 3 is that the sintered synthetic mandrel is heat-treated. The heat treatment method is: the synthetic mandrel that has been kept at 1400°C for 6 hours is cooled to a temperature of <100°C within 2 minutes, and then The cooled synthetic mandrel was heated to 1000°C for 2h, and finally the synthetic mandrel was cooled to 500°C and held for 3h. Finally, the diameter of the obtained optical fiber preform reached 210mm. The prepared optical fiber preform was drawn into low-loss optical fiber online. The length of the rod can reach 2913km, and the performance parameters of the optical fiber are shown in Table 8.
表8预制棒拉丝后光纤的性能参数Table 8 Performance parameters of optical fiber after preform drawing
Figure PCTCN2019114350-appb-000012
Figure PCTCN2019114350-appb-000012
以上述依据本发明的理想实施例为启示,通过上述的说明内容,相关工作人员完全可以在不偏离本项发明技术思想的范围内,进行多样的变更以及修改。本项发明的技术性范围并不局限于说明书上的内容,必须要根据权利要求范围来确定其技术性范围。Taking the above-mentioned ideal embodiment according to the present invention as enlightenment, through the above-mentioned description content, relevant workers can make various changes and modifications without departing from the scope of the technical idea of the present invention. The technical scope of the present invention is not limited to the content of the description, and its technical scope must be determined according to the scope of the claims.

Claims (10)

  1. 一种基于连熔石英套管的光纤预制棒的制造方法,其特征在于,步骤如下:A method for manufacturing an optical fiber preform based on a continuous fused silica sleeve is characterized in that the steps are as follows:
    利用VAD工艺制备由内到外为芯层和内包层的光纤芯棒;Use the VAD process to prepare fiber core rods with core and inner cladding from the inside to the outside;
    利用OVD工艺在光纤芯棒外部沉积包含有Sb 2O 3-F混合物的外包层疏松体,然后在烧结炉内进行烧结处理,得到合成芯棒;所述烧结处理方法为:往烧结炉内通入惰性气体和氯气,首先使烧结炉以50-60℃/min的升温速率升到600-800℃,保温1-2h,然后以30-40℃/min的升温速率升到1000-1200℃,保温2-4h,最后以10-20℃/min的升温速率升到1300-1500℃,保温5-7h; The OVD process is used to deposit the loose body of the outer covering containing the Sb 2 O 3 -F mixture on the outside of the optical fiber core rod, and then the sintering process is carried out in the sintering furnace to obtain the composite core rod; the sintering treatment method is: passing into the sintering furnace Enter inert gas and chlorine gas, first raise the sintering furnace to 600-800℃ at a heating rate of 50-60℃/min, keep it for 1-2h, and then raise it to 1000-1200℃ at a heating rate of 30-40℃/min. Keep the temperature for 2-4 hours, and finally increase the temperature to 1300-1500°C at a rate of 10-20°C/min, and keep it for 5-7 hours;
    利用RIC工艺将合成芯棒与连熔石英套管组合成光纤预制棒。Using the RIC process, the synthetic core rod and the continuous fused silica sleeve are combined into an optical fiber preform.
  2. 根据权利要求1所述的基于连熔石英套管的光纤预制棒的制造方法,其特征在于,对烧结处理后的合成芯棒进行热处理,热处理方法为:将在1300-1500℃下保温5-7h后的合成芯棒在2min内冷却至温度<100℃,然后将冷却后的合成芯棒升温至700~1000℃保温2~3h,最后将合成芯棒降温至300~500℃保温3~5h。The method for manufacturing an optical fiber preform based on a continuous fused silica sleeve according to claim 1, wherein the sintered synthetic core rod is heat treated, and the heat treatment method is: heat preservation at 1300-1500°C. The synthetic mandrel after 7h is cooled to a temperature of <100℃ within 2min, then the cooled synthetic mandrel is heated to 700~1000℃ for 2~3h, and finally the synthetic mandrel is cooled to 300~500℃ and kept for 3~5h .
  3. 根据权利要求1或2所述的基于连熔石英套管的光纤预制棒的制造方法,其特征在于,利用VAD工艺制备光纤芯棒的步骤为:首先用轴向气相沉积法沉积粉末芯棒;然后在烧结炉中对粉末芯棒进行脱羟处理、氟掺杂处理和玻璃化处理:脱羟处理时,往烧结炉内通入Cl 2气和惰性气体,脱羟温度为800~1000℃;氟掺杂处理时,往烧结炉内通入含氟气体和惰性气体,烧结炉温度为1000~1300℃;玻璃化处理时,往烧结炉内只通入惰性气体,玻璃化温度为1400~1600℃。 The method for manufacturing an optical fiber preform based on a continuous fused silica sleeve according to claim 1 or 2, wherein the step of preparing the optical fiber core rod by the VAD process is: first depositing the powder core rod by the axial vapor deposition method; Then in the sintering furnace, the powder core rod is subjected to dehydroxylation treatment, fluorine doping treatment and vitrification treatment: during the dehydroxylation treatment, Cl 2 gas and inert gas are introduced into the sintering furnace, and the dehydroxylation temperature is 800-1000℃; During fluorine doping treatment, fluorine-containing gas and inert gas are introduced into the sintering furnace, and the temperature of the sintering furnace is 1000~1300℃; during vitrification, only inert gas is introduced into the sintering furnace, and the glass transition temperature is 1400~1600 ℃.
  4. 根据权利要求1-3任一项所述的基于连熔石英套管的光纤预制棒的制造方法,其特征在于,RIC工艺步骤为:将合成芯棒表面用摩尔比为1:0.5-1.5的氢氟酸、硝酸的混合酸腐蚀,腐蚀深度计不小于0.6mm,然后将腐蚀后的合成芯棒清洗干燥,将合成芯棒插入连熔石英套管中,组合成光纤预制棒。The method for manufacturing an optical fiber preform based on a continuous fused silica sleeve according to any one of claims 1 to 3, wherein the RIC process step is: using the surface of the synthetic core rod with a molar ratio of 1:0.5-1.5 The mixed acid of hydrofluoric acid and nitric acid is corroded, the corrosion depth is not less than 0.6mm, then the corroded synthetic mandrel is cleaned and dried, and the synthetic mandrel is inserted into the continuous fused silica sleeve to form an optical fiber preform.
  5. 根据权利要求1-4任一项所述的基于连熔石英套管的光纤预制棒的制造方法,其特征在于,所述芯层为掺有P 2O 5或B 2O 3的二氧化硅玻璃层,芯层的相对折射率Δn 1为0.3%~0.4%;所述内包层为掺有GeO 2-F混合物的二氧化硅玻璃层,内包层的相对折射率Δn 2为-0.05%~-0.01%,光纤芯棒的直径b与芯层直径a的比值b/a为3~5。 The method for manufacturing an optical fiber preform based on a continuous fused silica sleeve according to any one of claims 1 to 4, wherein the core layer is silica doped with P 2 O 5 or B 2 O 3 For the glass layer, the relative refractive index Δn 1 of the core layer is 0.3% to 0.4%; the inner cladding layer is a silica glass layer doped with GeO 2 -F mixture, and the relative refractive index Δn 2 of the inner cladding layer is -0.05% to -0.01%, the ratio b/a of the fiber core rod diameter b to the core layer diameter a is 3 to 5.
  6. 根据权利要求1-5任一项所述的基于连熔石英套管的光纤预制棒的制造方法,其特征在于,所述外包层的相对折射率Δn 3为-0.25%~-0.1%,合成芯棒的直径c与芯层直径a的比值c/a为7~9。 The method for manufacturing an optical fiber preform based on a continuous fused silica tube according to any one of claims 1-5, wherein the relative refractive index Δn 3 of the outer cladding layer is -0.25% to -0.1%, and the composite The ratio c/a of the core rod diameter c to the core layer diameter a is 7-9.
  7. 根据权利要求1-6任一项所述的基于连熔石英套管的光纤预制棒的制造方法,其特征在于,RIC工艺中将合成芯棒固定在连熔石英套管中心,控制合成芯棒和连熔石英套管之间的间隙小于3mm,所述光纤预制棒的有效直径d与合成芯棒直径c的比值d/c为2~3。The method for manufacturing an optical fiber preform based on a continuous fused silica tube according to any one of claims 1-6, wherein the synthetic core rod is fixed at the center of the continuous fused silica tube in the RIC process, and the composite core rod is controlled The gap between the fused silica sleeve and the continuous fused silica sleeve is less than 3 mm, and the ratio d/c of the effective diameter d of the optical fiber preform to the diameter c of the composite core rod is 2 to 3.
  8. 根据权利要求1-5任一项所述的基于连熔石英套管的光纤预制棒的制造方法,其特征在于,所述连熔石英套管中金属杂质含量小于20ppm,羟基含量小于6ppm。The method for manufacturing an optical fiber preform based on a continuous fused silica sleeve according to any one of claims 1 to 5, wherein the metal impurity content in the continuous fused silica sleeve is less than 20 ppm, and the hydroxyl content is less than 6 ppm.
  9. 一种由权利要求1-8任一项所述的方法制造的光纤预制棒。An optical fiber preform manufactured by the method of any one of claims 1-8.
  10. 一种单模光纤,其特征在于,所述光纤由权利要求9所述的光纤预制棒直接拉丝而成,或经拉伸后再拉丝而成。A single-mode optical fiber, characterized in that the optical fiber is formed by directly drawing the optical fiber preform according to claim 9, or drawing after drawing.
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