WO2020173065A1 - Optical film structure, and manufacturing method therefor and use thereof - Google Patents

Optical film structure, and manufacturing method therefor and use thereof Download PDF

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Publication number
WO2020173065A1
WO2020173065A1 PCT/CN2019/103280 CN2019103280W WO2020173065A1 WO 2020173065 A1 WO2020173065 A1 WO 2020173065A1 CN 2019103280 W CN2019103280 W CN 2019103280W WO 2020173065 A1 WO2020173065 A1 WO 2020173065A1
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Prior art keywords
layer
optical
optical structure
film structure
structure layer
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PCT/CN2019/103280
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French (fr)
Chinese (zh)
Inventor
赵志刚
陈健
王振
丛杉
Original Assignee
中国科学院苏州纳米技术与纳米仿生研究所
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Priority claimed from CN201910594037.4A external-priority patent/CN112180647B/en
Priority claimed from CN201910594031.7A external-priority patent/CN112180648B/en
Priority claimed from CN201910594027.0A external-priority patent/CN112180646B/en
Application filed by 中国科学院苏州纳米技术与纳米仿生研究所 filed Critical 中国科学院苏州纳米技术与纳米仿生研究所
Publication of WO2020173065A1 publication Critical patent/WO2020173065A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/153Constructional details
    • G02F1/157Structural association of cells with optical devices, e.g. reflectors or illuminating devices

Definitions

  • This application relates to an optical film, in particular to an optical film structure with a reflection/transmission dual mode and a preparation method and application thereof, belonging to the field of optics or optoelectronic technology.
  • optical film structure In the optoelectronic information industry, the most promising three types of products in communication, display and storage are inseparable from the optical film structure, such as projectors, rear projection TVs, digital cameras, camcorders, DVDs, and DWDM and GFF in optical communications Filters, etc., the performance of the optical film structure to a large extent determines the final performance of these products.
  • Optical film structure is breaking through the traditional category, and it has penetrated more and more widely into various disciplines such as optoelectronic devices, space detectors, integrated circuits, biochips, laser devices, liquid crystal displays, integrated optics, etc., contributing to the progress of science and technology and the global Economic development plays an important role.
  • the main purpose of this application is to provide an optical film structure and its preparation method and application to overcome the deficiencies in the prior art.
  • the embodiment of the application provides an optical film structure, including a first optical structure layer and a second optical structure layer arranged in parallel, the first optical structure layer and the second optical structure layer are optically reflective and/or optically transmissive sexually, a medium layer is provided between the first optical structure layer and the second optical structure layer, and the bonding interface between the medium layer and the first optical structure layer and the second optical structure layer is the first optical structure layer of the medium layer.
  • a surface and a second surface, the first surface, the second surface and the medium layer constitute an optical cavity; when incident light enters the optical cavity from the first optical structure layer or the second optical structure layer, the The phase shift between the reflected light formed on the surface and the reflected light formed on the second surface d is the thickness of the dielectric layer, Is the refractive index of the medium layer, ⁇ is the wavelength of the incident light, Is the refraction angle of the incident light when passing through the first surface or the second surface.
  • the optical film structure has an optical transmission mode, an optical reflection mode, or an optical transmission and reflection mode.
  • the embodiments of the present application also provide applications of the optical film structure, for example, applications in the preparation of optical devices, optoelectronic devices, electronic devices and other equipment.
  • an embodiment of the present application provides a device that includes a working electrode and a counter electrode that cooperate with each other.
  • the working electrode includes any of the foregoing optical film structures, and the dielectric layer in the optical film structure is mainly composed of electrochromic Material composition.
  • the device may be an optical device, an electronic device, or an optoelectronic device, etc., and is not limited thereto.
  • the device further includes an electrolyte, and the electrolyte is distributed between the working electrode and the counter electrode.
  • the embodiment of the present application provides a method for adjusting and controlling the device, which includes:
  • the potential difference between the working electrode and the counter electrode is adjusted to at least change the refractive index of the electrochromic material in the dielectric layer, thereby adjusting the color of the device.
  • An embodiment of the present application also provides a device, which includes the device described above.
  • the optical film structure of the embodiment of the present application adopts electrochromic material to form the dielectric layer.
  • the refractive index of the electrochromic material changes, which in turn changes the optical parameters of the dielectric layer, and finally leads to optical
  • the change of the color of the film structure, the fusion of the structure color and the electrochromic can realize the reflection/transmission dual-mode colorful electrochromic structure with rich color changes.
  • the optical film structure provided by the embodiments of the application has a simple preparation process and low cost. It only needs to adjust the material and/or thickness of each optical structure layer and dielectric layer to control its color, reflectance and transmittance, which is suitable for Large-scale production and multi-functional applications have broad application prospects in the fields of machinery, photovoltaics, energy, transportation, and construction.
  • Fig. 1 is a schematic diagram of a novel film structure in a typical embodiment of the present application
  • Figure 2a is a schematic diagram of a novel reflective/transmissive dual-mode colorful electrochromic structure in a typical embodiment of the present application
  • Figure 2b is a schematic diagram of the structure of the electrochromic working electrode in Figure 2a;
  • FIG. 3 is a schematic diagram of a manufacturing process of a high-precision patterned colorful film in a typical embodiment of the present application
  • FIG. 4 is a schematic structural diagram of a novel optical film structure in Embodiment 1 of the present application.
  • Example 5 is a photograph of the reflection color of the novel optical thin film structure with different tungsten oxide thicknesses as seen from the side of the first optical structure in Example 1 of the present application;
  • FIG. 6 is a photograph of the reflection color of the novel optical film structure with different tungsten oxide thicknesses as seen from the direction of the PET substrate in Example 1 of the application;
  • Example 7 is a photograph of the transmission color of the novel optical thin film structure under different tungsten oxide thicknesses in Example 1 of the application;
  • FIG. 8 is a schematic structural diagram of a novel optical film structure in Embodiment 3 of the application.
  • FIG. 9 is a photograph of the reflection color of the novel optical thin film structure with different tungsten oxide thicknesses as seen from the side of the first optical structure in Example 3 of the application;
  • Example 10 is a photograph of the reflection color of the novel optical film structure with different thicknesses of tungsten oxide in Example 3 of the present application as seen from the direction of the PET substrate;
  • Example 11 is a photograph of the transmission color of the novel optical thin film structure under different tungsten oxide thicknesses in Example 3 of the present application;
  • Example 12 is a schematic diagram of the structure of the working electrode of a novel reflective/transmissive dual-mode multi-color electrochromic device in Example 7 of the present application;
  • Example 13 is a photograph of the working electrode (taken from both sides of the first optical structure and the substrate) in the colorful electrochromic device with different tungsten oxide thickness in Example 7 of the present application under different voltages;
  • FIG. 14 is a schematic structural diagram of a mobile phone according to Embodiment 15 of the present application.
  • FIG. 15 is a schematic diagram of the structure of the colorful film forming the Logo in FIG. 14.
  • An aspect of the embodiments of the present application provides an optical film structure including a first optical structure layer and a second optical structure layer arranged in parallel, and the first optical structure layer and the second optical structure layer are optically reflective and/or Optically transmissive, a medium layer is provided between the first optical structure layer and the second optical structure layer, and the bonding interface between the medium layer and the first optical structure layer and the second optical structure layer is the medium layer
  • the first surface, the second surface, the first surface, the second surface and the dielectric layer form an optical cavity.
  • the reflected light formed on the first surface by incident light from the first optical structure layer and the reflected light formed on the second surface by the incident light passing through the dielectric layer Reflected light interference and superposition.
  • the reflected light formed on the second surface by the incident light incident from the second optical structure layer and the reflected light formed on the first surface by the incident light passing through the medium layer are interfered and superposed.
  • the phase shift between the reflected light formed on the first surface and the reflected light formed on the second surface d is the thickness of the dielectric layer, Is the refractive index of the medium layer, ⁇ is the wavelength of the incident light, Is the refraction angle of the incident light when passing through the first surface or the second surface.
  • the refractive index of the first optical structure layer is defined as The reflection coefficient of the first surface among them Is the incident angle of incident light on the first surface.
  • the refractive index of the second optical structure layer is defined as The reflection coefficient of the second surface among them Is the refraction angle of incident light when passing through the second surface.
  • the reflection coefficient of the optical film structure is expressed as:
  • the reflectivity is expressed as:
  • the reflectivity and reflectivity of the optical film structure are also applicable to the case where incident light enters the optical cavity from the second optical structure layer.
  • the refractive index of the first optical structure layer is defined as The transmission coefficient of the first optical structure layer among them Is the incident angle of incident light on the first surface.
  • the refractive index of the second optical structure layer is defined as The transmission coefficient of the second optical structure layer among them Is the refraction angle of incident light when passing through the second surface.
  • the transmission coefficient of the optical film structure is expressed as:
  • the transmittance is expressed as:
  • the transmittance and transmittance of the optical film structure are also applicable to the case where incident light enters the optical cavity from the second optical structure layer.
  • the optical film structure has an optical transmission mode, an optical reflection mode, or an optical transmission and reflection mode.
  • the optical film structure has a double-sided asymmetric structure color.
  • the optical film structure in the optical transmission working mode, has a transparent structural color.
  • the optical film structure includes one or more first optical structure layers, one or more medium layers, and one or more second optical structure layers.
  • the optical film structure includes multiple first optical structure layers and/or multiple second optical structure layers and multiple medium layers.
  • the material of at least one of the first optical structure layer and the second optical structure layer includes a metal material.
  • the first optical structure layer or the second optical structure layer is a metal layer.
  • the first optical structure layer and the second optical structure layer are both metal layers.
  • the first optical structure layer or the second optical structure layer is directly air.
  • the first optical structure layer or the second optical structure layer is not present.
  • the metal material includes tungsten, gold, silver, copper, titanium, aluminum, chromium, iron, cobalt, nickel, platinum, germanium, palladium, etc., but is not limited thereto.
  • the thickness of the first optical structure layer or the second optical structure layer is preferably 0-20 nm, preferably greater than 0 and less than 20 nm, or at least one of the first optical structure layer and the second optical structure layer The thickness of one is above 20 nm; preferably, the thickness of at least one of the first optical structure layer and the second optical structure layer is 50-3000 nm.
  • the material of the medium layer is selected from organic materials or inorganic materials.
  • the inorganic material includes any one or a combination of metal element or non-metal element, inorganic salt, and oxide, but is not limited thereto.
  • non-metallic element includes any one or a combination of single crystal silicon, polycrystalline silicon, and diamond, but is not limited thereto.
  • the inorganic salt includes any one or a combination of fluoride, sulfide, selenide, chloride, bromide, iodide, arsenide, or telluride, but is not limited thereto.
  • the oxide includes WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , Cr 2 O 3 , MoO 3 , Al 2 O 3 , SiO 2 , MgO, ZnO, MnO 2 , CaO, ZrO 2 , Ta 2 O 5 , Y 3 Al 5 O 12 , Er 2 O 3 , IrO 2 any one or a combination of more than one, but not Limited to this.
  • the fluoride includes any one of MgF 2 , CaF 2 , GeF 2 , YbF 3 , YF 3 , Na 3 AlF 6 , AlF 3 , NdF 3 , LaF 3 , LiF, NaF, BaF 2 , SrF 2 A combination of one or more, but not limited to this.
  • the sulfide includes any one or a combination of ZnS, GeS, MoS 2 , and Bi 2 S 3 , but is not limited thereto.
  • the selenide includes any one or a combination of ZnSe, GeSe, MoSe 2 , PbSe, and Ag 2 Se, but is not limited thereto.
  • the chloride includes any one or a combination of AgCl, NaCl, and KCl, but is not limited thereto.
  • the bromide includes any one or a combination of AgBr, NaBr, KBr, TlBr, and CsBr, but is not limited thereto.
  • the iodide includes any one or a combination of AgI, NaI, KI, RbI, and CsI, but is not limited thereto.
  • the arsenide includes GaAs, etc., but is not limited thereto.
  • the antimony compound includes GdTe and the like, but is not limited thereto.
  • the material of the dielectric layer includes SrTiO 3 , Ba 3 Ta 4 O 15 , Bi 4 Ti 3 O 2 , CaCO 3 , CaWO 4 , CaMnO 4 , LiNbO 4 , Prussian blue, Prussian black, Prussian white, Prussian green Any one or more of the combination of, but not limited to this.
  • the material of the medium layer includes liquid crystal material or MOF material, but is not limited thereto.
  • the organic material includes small organic molecular compounds and/or polymers, but is not limited thereto.
  • the organic material includes viologen, polypyrrole, polyaniline, polythiophene, polycarbazole, phthalocyanine, terephthalate, dimethylbenzidine, tetrathiafulvene, alkyl bipyridine , Phenothiazole, polyamide, epoxy resin, polydiyne, any one or a combination of more, but not limited thereto.
  • the dielectric layer may be mainly composed of electrochromic materials.
  • the electrochromic material can be selected from inorganic, organic materials or liquid crystal materials and MOF materials.
  • the inorganic material may include WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , MoO 3 , IrO 2 , Prussian blue, Prussian black, Prussian white, Prussian green, etc., but not limited to this.
  • the organic material may include viologen, polypyrrole, polyaniline, polythiophene, polycarbazole, phthalocyanine, terephthalate, dimethylbenzidine, tetrathiafulvene, alkyl bipyridine, phene Thiazole, polydiyne, etc., but not limited thereto.
  • the thickness of the dielectric layer is greater than 0 and less than or equal to 2000 nm, preferably 50 to 2000 nm, more preferably 100 to 500 nm, so that the color saturation of the optical film structure is higher.
  • an optimized medium layer may be added between the first optical structure layer or the second optical structure layer and the medium layer to optimize the color of the optical film structure.
  • an optimized medium layer may be added to the first optical structure layer or the second optical structure layer, or the first optical structure layer or the second optical structure layer may also be arranged on the optimized medium layer, To optimize the color of the optical film structure.
  • the first optical structure layer or the second optical structure layer is combined with a substrate.
  • the substrate is transparent or translucent.
  • the material of the substrate can be transparent or translucent, for example, can be selected from any one or a combination of materials such as glass, organic glass, PET, PES, PEN, PC, PMMA, PDMS, etc. Not limited to this.
  • the aforementioned optimized medium layer may be disposed between the first optical structure layer or the second optical structure layer and the substrate.
  • the material of the optimized dielectric layer includes but not limited to WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , Cr 2 O 3. MoO 3 , Al 2 O 3 , SiO 2 , MgO, ZnO, MnO 2 , CaO, ZrO 2 , Ta 2 O 5 , Y 3 Al 5 O 12 , Er 2 O 3 , ZnS, MgF 2 , SiN x ( Silicon nitride), but not limited to this.
  • the thickness of the optimized dielectric layer is preferably 0-2000 nm, preferably 100-500 nm.
  • an optical film structure includes a second optical structure layer 2, a medium layer 3 and a first optical structure layer 4 disposed on a substrate 1.
  • the first optical structure layer 4 and the second optical structure layer 2 are reflection/transmission layers, which can be made of metal.
  • the first optical structure layer 4 can also be directly air.
  • the second optical structure layer 2 may not exist.
  • the material and thickness of the first optical structure layer, the second optical structure layer, and the medium layer may be as described above. Moreover, by adjusting the material and thickness of the first optical structure layer 4, the second optical structure layer 2, the dielectric layer 3, etc., the reflection/transmission structure color, reflectance, and transmittance of the optical film structure can be changed.
  • Another aspect of the embodiments of the present application also provides a method for preparing the optical film structure, which may include:
  • the formation of the said section by means of physical or chemical deposition, such as coating, printing, film casting, etc., or magnetron sputtering, electron beam evaporation, thermal evaporation, electrochemical deposition, chemical vapor deposition, atomic force deposition, sol-gel technology, etc.
  • An optical structure layer or a second optical structure layer, a medium layer, etc. are not limited thereto.
  • the first optical or second optical structure layer and the medium layer may be sequentially formed on the substrate.
  • electrochromic devices made of electrochromic materials have been widely used in smart windows, smart indicators, imaging equipment, and the like.
  • the principle of electrochromism is the phenomenon that the electronic structure and optical properties (reflectance, transmittance, absorption, etc.) of inorganic or organic electrochromic materials undergo stable and reversible changes under the action of an external electric field or current. Its appearance is expressed as a reversible change in color and transparency.
  • Traditional electrochromic devices can be divided into two models, transmissive electrochromic devices and reflective electrochromic devices, and the color of electrochromic devices is only determined by the electronic structure and optical properties of the electrochromic itself. Therefore, the single mode and monotonous color modulation of electrochromic has become a bottleneck that limits its application range.
  • the thickness and/or material of the first optical structure layer, the second optical structure layer, and the dielectric layer can be adjusted during the process of the preparation method, so as to adjust the structure of the optical film. Reflection/transmission structure color.
  • Another aspect of the embodiments of the present application also provides a device, including a working electrode and a counter electrode that cooperate with each other.
  • the working electrode includes any of the foregoing optical film structures, and the dielectric layer in the optical film structure is mainly composed of Composed of electrochromic materials.
  • the device further includes an electrolyte distributed between the working electrode and the counter electrode.
  • the type of the electrolyte is not particularly limited, and liquid electrolyte, gel polymer electrolyte or inorganic solid electrolyte can be used.
  • the electrolyte is in contact with the dielectric layer, and provides a material in a mobile environment for discoloring or decolorizing the electrochromic material, such as hydrogen ions or lithium ions.
  • the electrolyte may contain one or more compounds, for example containing H + , Li + , Al 3+ , Na + , K + , Rb + , Ca 2+ , Zn 2+ , Mg 2 + Or Cs + compound.
  • the electrolyte layer may include a lithium salt compound, such as LiClO 4 , LiBF 4 , LiAsF 6 or LiPF 6 .
  • the ions contained in the electrolyte can contribute to the discoloration of the device or the change in light transmittance when being inserted into or removed from the dielectric layer according to the polarity of the applied voltage.
  • the electrolyte used contains a mixture of multiple ions, which can make the color change of the device richer and fuller than a single ion.
  • the electrolyte may be a liquid electrolyte, such as aqueous LiCl, AlCl 3 , HCl, and H 2 SO 4 aqueous solutions.
  • the electrolyte may further include a carbonate compound. Since the carbonate-based compound has a high dielectric constant, the ionic conductivity provided by the lithium salt can be increased.
  • the carbonate-based compound at least one of the following can be used: PC (propylene carbonate), EC (ethylene carbonate), DMC (dimethyl carbonate), DEC (diethyl carbonate), and EMC (carbonic acid Ethyl methyl).
  • PC propylene carbonate
  • EC ethylene carbonate
  • DMC dimethyl carbonate
  • DEC diethyl carbonate
  • EMC carbonic acid Ethyl methyl
  • organic LiClO 4 , Na(ClO 4 ) 3 propylene carbonate electrolyte, etc. can be used.
  • the electrolyte may be a gel electrolyte, such as PMMA-PEG-LiClO 4 , PVDF-PC-LiPF 6 , LiCl/PVA, H 2 SO 4 /PVA, etc., but is not limited thereto.
  • a gel electrolyte such as PMMA-PEG-LiClO 4 , PVDF-PC-LiPF 6 , LiCl/PVA, H 2 SO 4 /PVA, etc., but is not limited thereto.
  • the electrolyte when an inorganic solid electrolyte is used as the electrolyte, the electrolyte may include LiPON or Ta 2 O 5 .
  • the electrolyte may be, but is not limited to, a Li-containing metal oxide film, such as LiTaO or LiPO.
  • the inorganic solid electrolyte may be an electrolyte in which LiPON or Ta 2 O 5 is added with components such as B, S, and W.
  • it may be LiBO 2 +Li 2 SO 4 , LiAlF 4 , LiNbO 3 , Li 2 OB 2 O 3 etc.
  • the device further includes an ion storage layer.
  • the ion storage layer is in contact with the electrolyte.
  • the first optical structure layer or the second optical structure layer is also combined with a substrate.
  • the working electrode may include a substrate.
  • the counter electrode may include a substrate, a transparent conductive layer, and an ion storage layer; the material of the substrate may be as described above, and will not be repeated here.
  • the material of the ion storage layer can be selected from but not limited to NiO, Fe 2 O 3 , TiO 2 , Prussian blue, IrO 2 and the like.
  • a conductive layer is also provided on the substrate.
  • the conductive layer includes any one or a combination of FTO, ITO, Ag nanowire, Ag nano grid, carbon nanotube, and graphene, and is not limited thereto.
  • the counter electrode is transparent or translucent.
  • the embodiment of the present application also provides a method for preparing the device, which includes:
  • the first optical structure layer, the second optical structure layer, the dielectric layer, etc. are fabricated using the method described above to form the working electrode;
  • the working electrode, the electrolyte and the counter electrode are assembled to form a device.
  • FIG. 2a shows a device in a typical embodiment of the present application, which includes a working electrode 5, a counter electrode 7 and an electrolyte layer 6, and the electrolyte layer 6 is disposed between the working electrode 5 and the counter electrode 7.
  • the electrolyte layer 6 can be selected from a suitable water phase electrolyte, an organic phase electrolyte, a gel electrolyte or a solid electrolyte, preferably LiCl, AlCl 3 , HCl, H 2 SO 4 aqueous solution, LiClO 4 propylene carbonate Electrolyte, LiCl/PVA, H 2 SO 4 /PVA gel electrolyte, etc., but not limited thereto.
  • the working electrode 5 may include an optical film structure, which may include a conductive substrate 10, a metal reflection/transmission layer 11 as a second optical structure layer, and a dielectric layer 12, and the dielectric
  • the air layer above the layer 12 can be used as the first optical structure layer, and the medium layer 12 is composed of an electrochromic material.
  • the thickness of the aforementioned second optical structure layer is greater than 0 and less than 20 nm.
  • the reflection/transmission structure color of the optical film structure can be changed.
  • the voltage, current, etc. applied to the electrochromic material the color of the dielectric layer can also be changed. In this way, it is possible to realize the fusion of the inherent optical structural color and electrochromic of the device (especially the optical device), and realize rich color changes in a simpler and controllable manner.
  • Another aspect of the embodiments of the present application also provides a control method of the device, which includes:
  • the potential difference between the working electrode and the counter electrode is adjusted to at least change the refractive index of the electrochromic material in the dielectric layer, thereby adjusting the color of the device.
  • the operating voltage of the device can be adjusted according to actual conditions, for example, it can be -4V to 4V, but is not limited to this.
  • the device combines colorful reflection/transmission structural colors with electrochromic, enriches the color modulation of the electrochromic device, and realizes dynamic control of multiple colors. Specifically, by adjusting the thickness and material of the first optical structure layer, the second optical structure layer, and the dielectric layer in the optical film structure, a colorful structural color can be obtained.
  • the optical film structure as a working electrode, by applying a voltage, the refractive index of the electrochromic material in the dielectric layer is changed (which may be caused by the insertion or extraction of ions in the electrolyte layer of the electrochromic material), The optical parameters of the dielectric layer are changed, and the color is changed.
  • electrochromic reflection/transmission dual mode and brilliant and rich color modulation which will greatly promote the development of electrochromic technology and its application in many fields. .
  • the embodiments of the present application also provide the use of the optical film structure or the device, such as electrochromic, photochromic, construction, automobile, art decoration, filter, anti-counterfeiting, solar cell, display, LED screen, Applications in communication, sensing, lighting and other fields.
  • the optical film structure or the device such as electrochromic, photochromic, construction, automobile, art decoration, filter, anti-counterfeiting, solar cell, display, LED screen, Applications in communication, sensing, lighting and other fields.
  • Another aspect of the embodiments of the present application also provides a device, which includes the device described above.
  • the device further includes a power supply, which can be electrically connected with the device to form a working circuit.
  • a power supply which can be electrically connected with the device to form a working circuit.
  • the device may further include additional packaging structures, control modules, power modules and other components, and these accessory components can be combined with the optical film structure in a conventional manner.
  • the device includes, but is not limited to, mechanical equipment, optoelectronic equipment, electronic equipment, buildings, vehicles, outdoor billboards, etc., and is not limited thereto.
  • the device is a consumer electronic product or a household appliance
  • the optical film structure is connected and/or integrally formed on the housing and/or display screen of the device.
  • the consumer electronic product includes a mobile phone, a bracelet, a tablet computer or a notebook computer, etc.; or, the household appliance includes a TV, a refrigerator, an electric fan, or an air conditioner, etc.
  • the device is a building, and the optical film structure is connected and/or integrally formed with any one of the inner wall, the outer wall, and the window of the building; or, the device is For a vehicle, the optical film structure is connected to and/or integrally formed with any one of the housing, inner wall, and window of the vehicle; or, the device is shoes, hats or clothing, and the surface of the device is connected And/or integrally formed with the optical film structure.
  • the optical film structure presents a set graphic structure.
  • a device including a colorful film structure, including a substrate, the substrate is connected to or integrally formed with a colorful film structure, the colorful film structure includes at least one dielectric layer, wherein Each dielectric layer cooperates with a first reflective surface and a second reflective surface to form an optical cavity.
  • the first reflective surface is the first surface of the dielectric layer
  • the second reflective surface is the second surface of the dielectric layer and A bonding interface of the second optical structure layer, the first surface and the second surface are arranged opposite to each other;
  • the phase shift between the reflected light formed on the first reflective surface and the reflected light formed on the second reflective surface d is the thickness of the dielectric layer, Is the refractive index of the medium layer, ⁇ is the wavelength of the incident light, Is the refraction angle of the incident light when passing through the first reflecting surface.
  • the refractive index of the media material on the first surface of the media layer is defined as Then the reflection coefficient of the first reflecting surface among them Is the angle of incidence of incident light; and, if the refractive index of the medium material on the second surface of the medium layer is defined as Then the reflection coefficient of the second reflecting surface among them Is the refraction angle of incident light when passing through the second reflecting surface;
  • the reflection coefficient of the colorful film structure mainly composed of the dielectric layer and the second optical structure layer is expressed as:
  • the second optical structure layer adopts a metal material layer with a thickness of 20 nm or more.
  • the thickness of the metal reflective layer is 50-3000 nm. That is, the second optical structure layer may be regarded as a metal reflective layer.
  • the material of the metal reflective layer can be selected from inactive metals, such as chromium, gold, silver, copper, tungsten, titanium or alloys thereof, and is not limited thereto.
  • the metal reflective layer also serves as the current collector of the dielectric layer. Therefore, the metal reflective layer may preferably be formed of a metal material having high conductivity, for example, may be formed of a material having high conductivity such as silver (Ag) or copper (Cu).
  • the second optical structure layer adopts a metal material layer with a thickness greater than 0 and less than 20 nm.
  • the first reflective surface is the junction surface between the first surface of the dielectric layer and the first optical structure layer, and the refractive index of the first optical structure layer is The refractive index of the second optical structure layer is
  • the reflectivity and reflectivity of the colorful film structure are also applicable to the case where incident light enters the optical cavity from the second optical structure layer.
  • first optical structure layer and the second optical structure layer are arranged in parallel, and have optical reflectivity and/or optical transmittance.
  • the reflected light formed on the first surface by the incident light from the first optical structure layer and the reflected light formed on the second surface by the incident light passing through the dielectric layer Reflected light interference and superposition.
  • the reflected light formed on the second surface by the incident light incident from the second optical structure layer and the reflected light formed on the first surface by the incident light passing through the medium layer are interfered and superposed.
  • the transmission coefficient of the first optical structure layer among them Is the incident angle of incident light on the first surface
  • the transmission coefficient of the second optical structure layer among them Is the refraction angle of incident light when passing through the second surface
  • the transmission coefficient of the colorful film structure mainly composed of the first optical structure layer, the medium layer and the second optical structure layer is expressed as:
  • the transmittance is expressed as:
  • the transmittance and transmittance of the colorful film structure are also applicable to the case where incident light enters the optical cavity from the second optical structure layer.
  • the colorful film structure includes one or more first optical structure layers, one or more dielectric layers, and one or more second optical structure layers.
  • the colorful film structure includes multiple first optical structure layers and/or multiple second optical structure layers and multiple medium layers.
  • the first optical structure layer is a metal material layer or consists of gas.
  • the thickness of the first optical structure layer is preferably 0-20 nm, preferably greater than 0 but less than 20 nm.
  • the first optical structure layer is a metal layer.
  • the first optical structure layer is formed of air.
  • the first optical structure layer or the second optical structure layer is not present.
  • the material of the metal material layer includes any one or a combination of tungsten, gold, silver, copper, titanium, aluminum, chromium, iron, cobalt, nickel, platinum, germanium, and palladium, but is not limited to this.
  • an optimized medium layer may be added between the first optical structure layer or the second optical structure layer and the medium layer to optimize the color of the colorful film structure.
  • an optimized medium layer may be added to the first optical structure layer or the second optical structure layer, or the first optical structure layer or the second optical structure layer may also be arranged on the optimized medium layer, To optimize the color of the colorful film structure.
  • the material of the optimized dielectric layer includes but not limited to WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , Cr 2 O 3. MoO 3 , Al 2 O 3 , SiO 2 , MgO, ZnO, MnO 2 , CaO, ZrO 2 , Ta 2 O 5 , Y 3 Al 5 O 12 , Er 2 O 3 , ZnS, MgF 2 , SiN x ( Silicon nitride), but not limited to this.
  • adding a semiconductor material of a suitable thickness can increase the intensity difference of the reflectance curve, thereby increasing the color saturation.
  • the thickness of the optimized dielectric layer is preferably 0 to 2000 nm, preferably 0 to 500 nm, preferably 0 to 300 nm, and particularly preferably 1 to 100 nm.
  • the colorful film structure has an optical transmission mode, an optical reflection mode, or an optical transmission and reflection mode.
  • the colorful film structure in the optical reflection working mode, has a double-sided asymmetric structure color.
  • the colorful film structure In the optical transmission mode, has a transparent structural color.
  • the thickness of the dielectric layer is greater than 0 and less than or equal to 2000 nm, preferably 50 to 2000 nm, more preferably 100 to 500 nm, so that the color saturation of the colorful film structure is higher.
  • the material of the medium layer is selected from organic materials or inorganic materials.
  • the inorganic material includes any one or a combination of metal element or non-metal element, inorganic salt, and oxide, but is not limited thereto.
  • non-metallic element includes any one or a combination of single crystal silicon, polycrystalline silicon, and diamond, but is not limited thereto.
  • the inorganic salt includes any one or a combination of fluoride, sulfide, selenide, chloride, bromide, iodide, arsenide, or telluride, but is not limited thereto.
  • the oxide includes WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , Cr 2 O 3 , MoO 3 , Al 2 O 3 , SiO 2 , MgO, ZnO, MnO 2 , CaO, ZrO 2 , Ta 2 O 5 , Y 3 Al 5 O 12 , Er 2 O 3 , IrO 2 any one or a combination of more than one, but not Limited to this.
  • the sulfide includes any one or a combination of ZnS, GeS, MoS 2 , and Bi 2 S 3 , but is not limited thereto.
  • the selenide includes any one or a combination of ZnSe, GeSe, MoSe 2 , PbSe, and Ag 2 Se, but is not limited thereto.
  • the chloride includes AgCl, but not limited thereto.
  • the bromide includes any one or a combination of AgBr and TlBr, but is not limited thereto.
  • the iodide includes AgI, etc., but is not limited thereto.
  • the arsenide includes GaAs, etc., but is not limited thereto.
  • the antimony compound includes GdTe and the like, but is not limited thereto.
  • the material of the dielectric layer includes SrTiO 3 , Ba 3 Ta 4 O 15 , Bi 4 Ti 3 O 2 , CaCO 3 , CaWO 4 , CaMnO 4 , LiNbO 4 , Prussian blue, Prussian black, Prussian white, Prussian green Any one or more of the combination of, but not limited to this.
  • the material of the medium layer includes liquid crystal material or MOF material, but is not limited thereto.
  • the organic material includes small organic molecular compounds and/or polymers, but is not limited thereto.
  • the organic material includes viologen, polypyrrole, polyaniline, polythiophene, polycarbazole, phthalocyanine, terephthalate, dimethylbenzidine, tetrathiafulvene, alkyl bipyridine , Phenothiazole, polyamide, epoxy resin, polydiyne, any one or a combination of more, but not limited thereto.
  • the dielectric layer may be mainly composed of electrochromic materials.
  • the electrochromic material can be selected from inorganic, organic materials or liquid crystal materials and MOF materials.
  • the inorganic material may include WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , MoO 3 , IrO 2 , Prussian blue, Prussian black, Prussian white, Prussian green, etc., but not limited to this.
  • the organic material may include viologen, polypyrrole, polyaniline, polythiophene, polycarbazole, phthalocyanine, terephthalate, dimethylbenzidine, tetrathiafulvene, alkyl bipyridine, phene Thiazole, polydiyne, etc., but not limited thereto.
  • the thickness and/or material of the first optical structure layer, the second optical structure layer, and the medium layer can also be adjusted to adjust the color of the colorful film structure.
  • the colorful film structure includes a working electrode, a counter electrode, and an electrolyte distributed between the working electrode and the counter electrode, and the working electrode includes a dielectric layer formed of an electrochromic material.
  • the electrochromic material may be selected from organic electrochromic materials or inorganic electrochromic materials.
  • the inorganic electrochromic material may be oxides of Co, Rh, Ir, Ni, Cr, Mn, Fe, Ti, V, Nb, Ta, Mo, W, such as LiNiO 2 (lithium nickelate), IrO 2 , NiO, V 2 O 5 , LixCoO 2 (lithium cobalt oxide), Rh 2 O 3 , CrO 3 , WO 3 , MoO 3 , Nb 2 O 5 , Ta 2 O 5 or TiO 2, etc., and not limited thereto.
  • the organic electrochromic material can be organic polymers, small organic molecules, metal supramolecular polymers, metal organic compounds, etc., such as methyl viologen, viologen, polyaniline, polythiophene, polypyrrole, Prussian blue , Metal organic chelates (such as phthalocyanine compounds), polydiynes, etc., and are not limited thereto.
  • the type of the electrolyte is not particularly limited, and liquid electrolyte, gel polymer electrolyte or inorganic solid electrolyte can be used.
  • the electrolyte is in contact with the dielectric layer, and provides a material in a mobile environment for discoloring or decolorizing the electrochromic material, such as hydrogen ions or lithium ions.
  • the electrolyte may contain one or more compounds, for example containing H + , Li + , Al 3+ , Na + , K + , Rb + , Ca 2+ , Zn 2+ , Mg 2 + Or Cs + compound.
  • the electrolyte layer may include a lithium salt compound, such as LiClO 4 , LiBF 4 , LiAsF 6 or LiPF 6 .
  • the ions contained in the electrolyte can contribute to the discoloration of the device or the change in light transmittance when being inserted into or removed from the dielectric layer according to the polarity of the applied voltage.
  • the electrolyte may be a mixed electrolyte, for example, a mixed electrolyte composed of two or more salts of water-based LiCl, AlCl 3 , HCl, MgCl 2 , ZnCl 2 and the like.
  • a mixed electrolyte composed of two or more salts of water-based LiCl, AlCl 3 , HCl, MgCl 2 , ZnCl 2 and the like.
  • the electrolyte may be a liquid electrolyte, such as aqueous LiCl, AlCl 3 , HCl, and H 2 SO 4 aqueous solutions.
  • the electrolyte may further include a carbonate compound. Since the carbonate-based compound has a high dielectric constant, the ionic conductivity provided by the lithium salt can be increased.
  • the carbonate-based compound at least one of the following can be used: PC (propylene carbonate), EC (ethylene carbonate), DMC (dimethyl carbonate), DEC (diethyl carbonate), and EMC (carbonic acid Ethyl methyl).
  • PC propylene carbonate
  • EC ethylene carbonate
  • DMC dimethyl carbonate
  • DEC diethyl carbonate
  • EMC carbonic acid Ethyl methyl
  • organic LiClO 4 , Na(ClO 4 ) 3 propylene carbonate electrolyte, etc. can be used.
  • the electrolyte may be a gel electrolyte, such as PMMA-PEG-LiClO 4 , PVDF-PC-LiPF 6 , LiCl/PVA, H 2 SO 4 /PVA, etc., but is not limited thereto.
  • a gel electrolyte such as PMMA-PEG-LiClO 4 , PVDF-PC-LiPF 6 , LiCl/PVA, H 2 SO 4 /PVA, etc., but is not limited thereto.
  • the electrolyte when an inorganic solid electrolyte is used as the electrolyte, the electrolyte may include LiPON or Ta 2 O 5 .
  • the electrolyte may be, but is not limited to, a Li-containing metal oxide film, such as LiTaO or LiPO.
  • the inorganic solid electrolyte may be an electrolyte in which LiPON or Ta 2 O 5 is added with components such as B, S, and W.
  • it may be LiBO 2 +Li 2 SO 4 , LiAlF 4 , LiNbO 3 , Li 2 OB 2 O 3 etc.
  • the device further includes an ion storage layer.
  • the ion storage layer is in contact with the electrolyte.
  • the counter electrode may include a substrate, a transparent conductive layer and an ion storage layer.
  • the material of the ion storage layer can be selected from but not limited to NiO, Fe 2 O 3 , TiO 2 , Prussian blue, IrO 2 and the like.
  • the counter electrode is transparent or translucent.
  • the working electrode may also include a transparent conductive electrode and the like.
  • the transparent conductive electrode can be formed by including a material having characteristics such as high light transmittance and low sheet resistance. For example, it can be formed by including any one of the following: selected from ITO (indium tin oxide), FTO (fluorine doped Tin oxide), AZO (aluminum-doped zinc oxide), GZO (gallium-doped zinc oxide), ATO (antimony-doped tin oxide), IZO (indium-doped zinc oxide), Transparent conductive oxide of NTO (niobium doped titanium oxide), ZnO, OMO (oxide/metal/oxide) and CTO; silver (Ag) nanowires; metal mesh; or OMO (oxide metal oxide) .
  • the method of forming the transparent conductive electrode or the transparent conductive layer is not particularly limited, and any known method can be used without limitation.
  • a thin film electrode layer containing transparent conductive oxide particles can be formed on the glass base layer by a method such as sputtering or printing (screen printing, gravure printing, inkjet printing, etc.).
  • the thickness of the electrode layer thus prepared may be in the range of 10 nm to 500 nm, and in the case of the printing method, the thickness may be in the range of 0.1 ⁇ m to 20 ⁇ m.
  • the visible light transmittance of the transparent conductive electrode layer may be 70% to 95%.
  • the electrolyte adopts an all-solid electrolyte, which can be combined to form a solid-state dielectric layer, a first optical structure layer, a second optical structure layer, and a counter electrode to form an all-solid colorful film. structure.
  • the all-solid electrolyte in the all-solid colorful film structure may be in the form of a solid ion conductive layer.
  • the color change principle of this kind of all-solid colorful film structure is: the metal reflective layer and other layer materials constitute a metal-medium structure, and may also include other layers, such as ion conductive layer, ion storage layer, and transparent conductive layer, etc., by adjusting the If the thickness of each layer material is in the appropriate range, an electrochromic structure with structural color can be prepared. Further, by applying voltage, the refractive index of the electrochromic material can be adjusted, and the color of the all-solid colorful film structure can be further adjusted .
  • the thickness and/or material of the first optical structure layer, the second optical structure layer, the dielectric layer, etc. to adjust the color (structure color) of the colorful film structure
  • you can also adjust The electric potential difference applied between the working electrode and the counter electrode is adjusted to at least change the refractive index of the electrochromic material in the dielectric layer, thereby adjusting the color of the colorful film structure.
  • This control process can be dynamic, so that the fusion of colorful structural colors and electrochromic is realized, which greatly enriches the color modulation of colorful film structures.
  • the device may also include components such as a control module and a power supply module that cooperate with the colorful film structure, and these accessory components may be built-in or additionally added to the device.
  • At least any one of magnetron sputtering, ion plating, electron beam evaporation, thermal evaporation, chemical vapor deposition, and electrochemical deposition can be used to form the aforementioned first optical structure layer, Second optical structure layer, medium layer, etc.
  • the dielectric layer can be prepared by magnetron sputtering, ion plating, electron beam evaporation, thermal evaporation, chemical vapor deposition, electrochemical deposition, etc., but it is not limited thereto.
  • the metal material can be processed by laser direct writing, chemical etching, etc., to form the dielectric layer.
  • the first optical structure layer can be prepared as the first optical structure layer, the second optical structure layer, etc. by magnetron sputtering, ion plating, electron beam evaporation, thermal evaporation, chemical vapor deposition, and the like.
  • first optical structure layer, the second optical structure layer, the medium layer, etc. can also be formed by coating, printing, film casting, atomic force deposition, sol-gel technology, etc., and is not limited thereto.
  • the embodiment of the present application also provides a manufacturing method of the patterned colorful film, including:
  • At least two pattern areas of the one metal layer are oxidized in situ, thereby forming at least two dielectric layers capable of showing different colors in the at least two pattern areas, wherein each dielectric layer is connected to a first The reflection surface and a second reflection surface cooperate to form an optical cavity, and then a patterned colorful film is produced.
  • the manufacturing method includes: in an oxygen-containing atmosphere, using laser direct writing to oxidize at least two regions of the at least one metal layer in situ to form at least two different dielectric layers.
  • the oxygen-containing atmosphere may be an oxygen atmosphere, or a mixed atmosphere of oxygen and other inactive gases (for example, nitrogen, inert gas, etc.), for example, it may be preferably an air atmosphere.
  • the manufacturing method may further include: in the laser direct writing process, at least the laser power and/or laser irradiation time are adjusted to make the thickness and/or material of different dielectric layers different.
  • a method for manufacturing a patterned colorful film may include the following steps:
  • a metal layer is provided, and the metal layer 120 is disposed on a substrate 110.
  • the metal layer can be formed on the surface of the substrate by physical/chemical deposition (such as magnetron sputtering, electroplating, etc.), or it can be a self-supporting metal
  • the film is transferred to the substrate surface to form;
  • the laser beam emitted by the laser head 20 of the laser direct writing equipment irradiates a predetermined area (also referred to as a pixel area 130) on the metal layer.
  • a predetermined area also referred to as a pixel area 130
  • the laser The head moves relative to the metal layer, and its movement track can be linear, two-dimensional, or three-dimensional, so that each pixel area on the metal layer is oxidized in situ to form a patterned dielectric layer.
  • the laser spot formed by the laser beam on the metal layer can be controlled at the micron level or sub-micron level.
  • the shape of the laser spot can be arbitrary, such as a circle, a rectangle, and so on.
  • the power of the laser, the irradiation time, the relative movement speed of the laser head and the metal layer, etc. can be adjusted appropriately according to the requirements of the actual application.
  • the corresponding process conditions can be controlled within the following range: the relative movement speed of the laser head and the metal layer is controlled to be 2mm/s-20mm/s, the continuous laser power is 50W-500W, and the laser rectangular spot size is 0.5mm ⁇ 1mm -4mm ⁇ 5mm, the laser action time is 1s-5s, the defocus amount is 0.01mm-10mm, and the spot overlap rate is 10%-50%.
  • the aforementioned laser direct writing process can be carried out in a closed container or in air.
  • At least two different dielectric layers formed by in-situ oxidation of at least two pattern areas of a metal layer
  • each dielectric layer cooperates with a first reflective surface and a second reflective surface to form an optical cavity, the first reflective surface is the first surface of the dielectric layer, and the second reflective surface is the second reflective surface of the dielectric layer.
  • a bonding interface between the surface and a second optical structure layer, the first surface and the second surface are arranged opposite to each other;
  • the phase shift between the reflected light formed on the first reflective surface and the reflected light formed on the second reflective surface d is the thickness of the dielectric layer, Is the refractive index of the medium layer, ⁇ is the wavelength of the incident light, Is the refraction angle of the incident light when passing through the first reflecting surface.
  • At least two pattern areas of the metal layer are oxidized in situ by laser direct writing to form a dielectric layer.
  • each pattern area of the metal layer is oxidized to generate metal oxide films of different types and thicknesses.
  • metal oxide films of different types and thicknesses.
  • different dielectric layers can show different color effects.
  • the aforementioned graphic area may be text, continuous or discontinuous patterns, etc., and is not limited thereto.
  • the dielectric layer can be a thin film structure composed of one metal oxide, or a thin film structure composed of multiple metal oxides.
  • the relative movement speed of the laser spot and the metal layer can be adjusted during the aforementioned laser direct writing process, so that different pattern areas of the metal layer are oxidized in situ to different degrees, and then Make the thickness and/or material of different dielectric layers different.
  • the size of the laser spot can also be adjusted, for example, it can be controlled at the sub-micron level, so that the patterned pixels formed on the metal layer can reach the sub-micron level with high accuracy and avoid occurrence Variegated.
  • the advantage of using the aforementioned laser direct writing method is that it has almost no limitation on the shape of the metal layer.
  • the metal layer may be a continuous plane, curved surface or other irregular surface. This allows the final patterned colorful film to meet the application requirements of a variety of scenarios.
  • two different optical cavities based on two different dielectric layers exhibit different colors.
  • the colors presented by two different optical cavities based on two different dielectric layers may also be the same.
  • two different dielectric layers are spaced apart from each other or adjacent to each other.
  • the second optical structure layer adopts a metal material layer with a thickness of 20 nm or more.
  • the thickness of the metal reflective layer is 50-3000 nm.
  • the reflected light formed by the incident light on the first reflective surface and the reflected light formed on the second reflective surface by the incident light passing through the medium layer interfere and superimpose .
  • the refractive index of the media material on the first surface of the media layer is defined as Then the reflection coefficient of the first reflecting surface among them Is the angle of incidence of incident light; and, if the refractive index of the medium material on the second surface of the medium layer is defined as Then the reflection coefficient of the second reflecting surface among them Is the refraction angle of incident light when passing through the second reflecting surface;
  • the reflection coefficient of the optical film structure mainly composed of the dielectric layer and the second optical structure layer is expressed as: The reflectivity is expressed as:
  • the material of the metal layer includes a transition metal, for example, it can be selected from but not limited to any one or a combination of W, Ni, Ti, Nb, Fe, Co, and Mo elements.
  • the first reflective surface is the junction surface between the first surface of the dielectric layer and the first optical structure layer, and the refractive index of the first optical structure layer is The refractive index of the second optical structure layer is
  • the second optical structure layer adopts a metal material layer with a thickness greater than 0 and less than 20 nm.
  • the reflected light formed on the first surface by the incident light incident from the first optical structure layer and the reflected light formed on the second surface by the incident light passing through the medium layer are interfered and superposed.
  • the reflected light formed on the second surface by the incident light incident from the second optical structure layer and the reflected light formed on the first surface by the incident light passing through the medium layer are interfered and superposed.
  • the transmission coefficient of the first optical structure layer among them Is the incident angle of incident light on the first surface
  • the transmission coefficient of the second optical structure layer among them Is the refraction angle of incident light when passing through the second surface
  • the transmission coefficient of the optical film structure mainly composed of the first optical structure layer, the medium layer and the second optical structure layer is expressed as:
  • the transmittance is expressed as:
  • the transmission coefficient and transmittance of the optical film structure are also applicable to the case where incident light enters the optical cavity from the second optical structure layer.
  • the first optical structure layer is a metal material layer or is composed of gas.
  • the thickness of the first optical structure layer is preferably 0-20 nm.
  • the material of the aforementioned metal material layer includes, but is not limited to, any one or a combination of tungsten, gold, silver, copper, titanium, aluminum, chromium, iron, cobalt, nickel, platinum, germanium, and palladium.
  • the optical film structure mainly composed of the first optical structure layer, the medium layer and the second optical structure layer has an optical transmission working mode, an optical reflection working mode, or an optical transmission and reflection working mode; In the optical reflection working mode, the optical film structure has a double-sided asymmetric structural color, and in the optical transmission working mode, the optical film structure has a transparent structural color.
  • the thickness of the dielectric layer is greater than 0 and less than or equal to 2000 nm, preferably 50 to 2000 nm, and more preferably 100 to 500 nm, so that the color saturation of the optical film structure is higher.
  • an optimized medium layer may be added between the first optical structure layer or the second optical structure layer and the medium layer to optimize the color of the optical film structure.
  • a thin layer of metal may be added on the dielectric layer to optimize the color of the patterned colorful film. Specifically, for certain materials or patterned colorful films with a suitable thickness, adding a metal material with a suitable thickness can increase the intensity difference of the reflectance curve, thereby increasing the color saturation.
  • the material of the thin layer metal can be selected from Ag, Al, Cu, Ni, etc., but is not limited thereto.
  • the thickness of the metal layer may preferably be 0 to 30 nm, particularly preferably 1 to 10 nm.
  • a semiconductor material may be added on the dielectric layer to optimize the color of the patterned colorful film.
  • adding a suitable thickness of semiconductor materials can increase the intensity difference of the reflectance curve, thereby increasing the color saturation.
  • the semiconductor may be selected from Al 2 O 3 , SiO 2 , ZnS, MgF 2 , silicon nitride, etc., but is not limited thereto.
  • the thickness of the semiconductor may preferably be 0 to 300 nm, particularly preferably 1 to 100 nm.
  • an optimized medium layer may be added to the first optical structure layer or the second optical structure layer, or the first optical structure layer or the second optical structure layer may also be arranged on the optimized medium layer, To optimize the color of the patterned colorful film.
  • the first optical structure layer or the second optical structure layer is further combined with a substrate.
  • the aforementioned optimized medium layer may be disposed between the first optical structure layer or the second optical structure layer and the substrate.
  • the material of the optimized dielectric layer includes but not limited to WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , Cr 2 O 3. MoO 3 , Al 2 O 3 , SiO 2 , MgO, ZnO, MnO 2 , CaO, ZrO 2 , Ta 2 O 5 , Y 3 Al 5 O 12 , Er 2 O 3 , ZnS, MgF 2 , SiN x ( Silicon nitride), but not limited to this.
  • the thickness of the optimized dielectric layer is preferably 0-2000 nm, preferably 100-500 nm.
  • the substrate is transparent or translucent.
  • the material of the substrate includes but is not limited to any one or a combination of metal, glass, organic glass, PET, PES, PEN, PC, PMMA, and PDMS.
  • a conductive layer is also provided on the substrate.
  • the conductive layer includes any one or a combination of FTO, ITO, Ag nanowire, Ag nano grid, carbon nanotube, and graphene, and is not limited thereto.
  • the first optical structure layer is integrated with the substrate.
  • a colorful electrochromic structure comprising a working electrode, an electrolyte and a counter electrode, and the working electrode includes any of the aforementioned patterned colorful films.
  • the type of the electrolyte is not particularly limited, and liquid electrolyte, gel polymer electrolyte or inorganic solid electrolyte can be used.
  • the electrolyte is in contact with the dielectric layer, and provides a material for a mobile environment for discoloring or decolorizing metal oxides as electrochromic materials, such as hydrogen ions or lithium ions.
  • the electrolyte may include one or more compounds, such as compounds containing H + , Li + , Al 3+ , Na + , K + , Rb + or Cs + .
  • the electrolyte layer may include a lithium salt compound, such as LiClO 4 , LiBF 4 , LiAsF 6 or LiPF 6 .
  • the ions contained in the electrolyte may exert an effect on the discoloration of the device or the change in light transmittance when being inserted into or removed from the dielectric layer according to the polarity of the applied voltage.
  • the electrolyte may be a liquid electrolyte, such as aqueous LiCl, AlCl 3 , HCl, and H 2 SO 4 aqueous solutions.
  • the electrolyte may be a mixed electrolyte, for example, a mixed electrolyte composed of two or more salts of water-based LiCl, AlCl 3 , HCl, MgCl 2 , and ZnCl 2 .
  • a mixed electrolyte composed of two or more salts of water-based LiCl, AlCl 3 , HCl, MgCl 2 , and ZnCl 2 .
  • the electrolyte may further include a carbonate compound-based electrolyte.
  • the carbonate-based compound has a high dielectric constant and can increase the ionic conductivity provided by the lithium salt.
  • the carbonate compound at least one of the following can be used: PC (propylene carbonate), EC (ethylene carbonate), DMC (dimethyl carbonate), DEC (diethyl carbonate), and EMC (ethylene carbonate) Methyl ester).
  • PC propylene carbonate
  • EC ethylene carbonate
  • DMC dimethyl carbonate
  • DEC diethyl carbonate
  • EMC ethylene carbonate Methyl ester
  • organic LiClO 4 , Na(ClO 4 ) 3 propylene carbonate electrolyte, etc. can be used.
  • the electrolyte may be a gel electrolyte, such as PMMA-PEG-LiClO 4 , PVDF-PC-LiPF 6, etc., but is not limited thereto.
  • the electrolyte when an inorganic solid electrolyte is used as the electrolyte, the electrolyte may include LiPON or Ta 2 O 5 .
  • the electrolyte may be, but is not limited to, a Li-containing metal oxide film, such as LiTaO or LiPO.
  • the inorganic solid electrolyte may be an electrolyte in which LiPON or Ta 2 O 5 is added with components such as B, S, and W.
  • it may be LiBO 2 +Li 2 SO 4 , LiAlF 4 , LiNbO 3 , Li 2 OB 2 O 3 etc.
  • the electrolyte adopts an all-solid electrolyte, which can be combined into a solid-state patterned colorful film, a counter electrode, etc., to form an all-solid colorful electrochromic structure.
  • the metal material layer serving as the first optical structure layer may also serve as a current collector of the dielectric layer. Therefore, the metal material layer may preferably be formed of a metal material having high conductivity, for example, may be formed of a material having high conductivity such as silver (Ag) or copper (Cu).
  • an ion storage layer is further provided between the counter electrode and the dielectric layer, and its material can be selected from but not limited to NiO, Fe 2 O 3 , TiO 2 and the like.
  • the ion storage layer is in contact with the electrolyte.
  • the counter electrode may be a transparent conductive electrode, which may be formed by including a material having characteristics such as high light transmittance and low sheet resistance.
  • a transparent conductive electrode which may be formed by including a material having characteristics such as high light transmittance and low sheet resistance.
  • it may be formed by including any of the following: selected from ITO ( Indium tin oxide), FTO (fluorine-doped tin oxide), AZO (aluminum-doped zinc oxide), GZO (gallium-doped zinc oxide), ATO (antimony-doped tin oxide), Transparent conductive oxides of IZO (indium-doped zinc oxide), NTO (niobium-doped titanium oxide), ZnO, OMO (oxide/metal/oxide) and CTO; silver (Ag) nanowires; metal Mesh; or OMO (Oxide Metal Oxide).
  • the method of forming the transparent conductive electrode is not particularly limited, and any known method can be used without limitation.
  • a thin film electrode layer containing transparent conductive oxide particles can be formed on the glass base layer by a method such as sputtering or printing (screen printing, gravure printing, inkjet printing, etc.).
  • the thickness of the electrode layer thus prepared may be in the range of 10 nm to 500 nm, and in the case of the printing method, the thickness may be in the range of 0.1 m to 20 m.
  • the visible light transmittance of the transparent conductive electrode layer may be 70% to 95%.
  • Another aspect of the embodiments of the present application also provides a method for adjusting and controlling the colorful electrochromic structure, which includes:
  • the potential difference between the working electrode and the counter electrode is adjusted to at least change the refractive index of the metal oxide as the electrochromic material in the dielectric layer, thereby adjusting the color of the colorful electrochromic structure.
  • the working voltage of the colorful electrochromic structure can be adjusted according to actual conditions, for example, it can be -4V to 4V, but is not limited to this.
  • the colorful electrochromic structure integrates the structural color of the patterned colorful film with electrochromic, enriches the color modulation of the electrochromic structure, and realizes multi-color dynamic control.
  • the colorful structural colors can be obtained by adjusting the thickness and material of the first optical structure layer, the second optical structure layer, and the dielectric layer in the patterned colorful film.
  • the patterned colorful film is used as a working electrode, and by applying a voltage, the refractive index of the metal oxide as an electrochromic material in the dielectric layer is changed (which can be caused by the insertion or extraction of ions in the electrolyte layer of the electrochromic It is caused by the material), resulting in the change of the optical parameters of the medium layer and the change of the color, and finally can realize multiple working modes of electrochromism (such as the aforementioned dual mode of reflection/transmission) and brilliant and rich color modulation.
  • the embodiments of the application also provide the use of the patterned colorful film or the colorful electrochromic structure, for example in electronic equipment, optical equipment, construction, automobiles, art decoration, filters, anti-counterfeiting, solar cells, displays, LED screen, communication, sensor, lighting and other fields.
  • Another aspect of the embodiments of the present application also provides a device, which includes the colorful electrochromic structure. Further, the device further includes a power supply, which can be electrically connected with the colorful electrochromic structure to form a working circuit.
  • the device may also include additional packaging structures, control modules, power modules, and other components, and these accessory components may be combined with the colorful electrochromic structure in a conventional manner.
  • the device includes, but is not limited to, mechanical equipment, optoelectronic equipment, electronic equipment, buildings, vehicles, outdoor billboards, etc., and is not limited thereto.
  • An optical film structure provided in this embodiment includes a first optical structure layer, a second optical structure layer, a medium layer, and a base layer, which can be referred to as shown in FIG. 1.
  • the first optical structure layer is air
  • the second optical structure is a metal tungsten (W) layer
  • the dielectric layer is formed of tungsten oxide
  • the base layer may be a PET film.
  • the preparation method of the optical thin film structure is as follows: On a clean PET substrate, a layer of tungsten film is sputtered by a magnetron sputtering method. Preferably, the thickness of the tungsten film is selected to be about 10 nm by sputtering. Then, a tungsten oxide layer is sputtered on the tungsten film by magnetron sputtering. Preferably, the thickness of the tungsten oxide layer is set at 100 nm to 400 nm.
  • the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the aforementioned tungsten oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, electrochemical deposition, sol-gel technology, and the like.
  • the thickness of the tungsten oxide layer is controlled to be different. From the side of the first optical structure layer, an optical thin film structure with rich and brilliant colors can be obtained.
  • the corresponding reflection color also presents a rich and brilliant color, and this color is the same as the color seen from the direction of the first optical structure layer Quite different.
  • the transmittance of the transmission color of the optical film structure of this embodiment is determined by the thickness of the metal tungsten layer and the tungsten oxide layer.
  • the optical film structure provided by the comparative example includes a first optical structure layer, a second optical structure layer, a medium layer and a base layer.
  • the first optical structure layer is air
  • the second optical structure does not exist (no tungsten film)
  • the dielectric layer is formed of tungsten oxide
  • the base layer may be a PET film.
  • the preparation method of the optical thin film structure is as follows: on a clean PET substrate, a tungsten oxide layer is sputtered by magnetron sputtering.
  • the thickness of the tungsten oxide layer is set at 100 nm to 400 nm.
  • the thickness of the tungsten oxide layer is controlled to be different, and when viewed from one side of the first optical structure layer, a transparent and colorless optical film structure is obtained.
  • the corresponding color is also transparent and colorless when viewed from the direction of the base layer, and this color is exactly the same as the color viewed from the direction of the first optical structure layer.
  • the optical film structure provided by the comparative example includes a first optical structure layer, a second optical structure layer, a medium layer and a base layer.
  • the first optical structure layer is air
  • the second optical structure is a metal tungsten (W) layer
  • the dielectric layer is formed of tungsten oxide
  • the base layer may be a PET film.
  • the preparation method of the optical thin film structure is as follows: On a clean PET substrate, a layer of tungsten film is sputtered by a magnetron sputtering method. Preferably, the thickness of the tungsten film is selected to be about 100 nm by sputtering. After that, a tungsten oxide layer is sputtered on the tungsten film by magnetron sputtering. Preferably, the thickness of the tungsten oxide layer is set at 100 nm to 400 nm.
  • the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the aforementioned tungsten oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, electrochemical deposition, sol-gel technology, and the like.
  • the thickness of the tungsten oxide layer is controlled to be different, and when viewed from the side of the first optical structure layer, an optical film structure with rich and brilliant colors can be obtained.
  • the corresponding reflection color only presents the color of the metallic tungsten film (silver white).
  • An optical film structure provided in this embodiment includes a first optical structure layer, a second optical structure layer, a medium layer, and a base layer, which can be referred to as shown in FIG. 1.
  • the first optical structure layer is air
  • the second optical structure is a metallic silver (Ag) layer
  • the dielectric layer is formed of titanium dioxide
  • the base layer may be a PET film.
  • the preparation method of the optical thin film structure is as follows: on a clean PET substrate, a layer of silver film is sputtered by a magnetron sputtering method.
  • the thickness of the silver film is selected to be about 2 nm by sputtering.
  • a layer of titanium dioxide is sputtered on the tungsten film by magnetron sputtering.
  • the thickness of the titanium dioxide layer is set at 100 nm to 400 nm.
  • the aforementioned silver film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the aforementioned titanium dioxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, electrochemical deposition, and sol-gel technology.
  • the optical film structure of this embodiment exhibits similar properties to the optical film structure of Embodiment 1, that is, when viewed from two sides, it exhibits different colors. It also has a transmissive structural color.
  • An optical film structure provided in this embodiment includes a first medium layer, a second optical structure layer, a second medium layer, and a first optical structure layer sequentially formed on a substrate.
  • the added second medium layer can improve color brightness and saturation.
  • the first optical structure layer of the optical film structure is air
  • the second optical structure layer is metal tungsten (W)
  • the first and second dielectric layers are formed of tungsten oxide
  • the base layer may be PET membrane.
  • the preparation method of the optical thin film structure is as follows: on a clean PET substrate, a tungsten oxide layer is sputtered by a magnetron sputtering method.
  • the thickness of the tungsten oxide layer is set at 1 nm to 400 nm.
  • a layer of tungsten film is sputtered by a magnetron sputtering method.
  • the thickness of the tungsten film is about 10 nm.
  • a tungsten oxide layer is sputtered on the tungsten film by magnetron sputtering.
  • the thickness of the tungsten oxide layer is set at 100 nm to 400 nm.
  • the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the aforementioned tungsten oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, electrochemical deposition, sol-gel technology, and the like.
  • the thickness of the tungsten oxide layer between the control tungsten layer and the PET substrate is different. From the side of the first optical structure layer, an optical film structure with rich and brilliant colors can be obtained.
  • the corresponding reflection color also presents a rich and brilliant color from the side of the base layer, and this color is completely different from the color seen from the film direction different.
  • the transmission structure color can be obtained through the optical film structure, and the transmission structure color also presents rich and brilliant colors.
  • the transmittance of the transmission color of the optical film structure is determined by the thickness of the metal tungsten layer and the tungsten oxide layer.
  • An optical film structure provided by this embodiment includes a second optical structure layer, a medium layer, and a first optical structure layer formed on a substrate in sequence.
  • the first optical structure layer is a metal tungsten (W) film
  • the second optical structure layer is a metal aluminum (Al) film
  • the dielectric layer is formed of zinc sulfide (ZnS)
  • the base layer may be a PET film.
  • the preparation method of the optical thin film structure is as follows: on a clean PET substrate, a layer of metal aluminum film is sputtered by a magnetron sputtering method. Preferably, the thickness of the aluminum film is set at 15 nm. Then, a zinc sulfide layer is sputtered by a magnetron sputtering method. Preferably, the thickness of the zinc sulfide is selected to be 100 nm to 400 nm by sputtering. Afterwards, a tungsten film layer is sputtered on the zinc sulfide layer by magnetron sputtering. Preferably, the thickness of the tungsten film layer is set to 0-50 nm.
  • the aforementioned tungsten film and aluminum film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the aforementioned zinc sulfide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, electrochemical deposition, and sol-gel technology.
  • the optical film structure of this embodiment shows different colors when viewed from two sides, and also has a transmission structure color.
  • An optical film structure provided by this embodiment includes a second optical structure layer, a medium layer, and a first optical structure layer formed on a substrate in sequence.
  • the first optical structure layer is air
  • the second optical structure layer is a metal aluminum (Al) film
  • the dielectric layer is formed of silicon simple substance
  • the base layer may be a PET film.
  • the preparation method of the optical thin film structure is as follows: On a clean PET substrate, a layer of metal aluminum film is sputtered by a magnetron sputtering method. Preferably, the thickness of the aluminum film is set at 5 nm. Then, a silicon film layer is deposited by a magnetron sputtering method. Preferably, the thickness of the silicon film layer is selected to be sputtered from 100 nm to 400 nm.
  • the aforementioned aluminum film and silicon film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the optical film structure of this embodiment shows different colors when viewed from two sides, and also has a transmission structure color.
  • An optical film structure provided by this embodiment includes a second optical structure layer, a medium layer, and a first optical structure layer formed on a substrate in sequence.
  • the first optical structure layer is a metallic silver (Ag) film
  • the second optical structure layer is a metallic aluminum (Al) film
  • the dielectric layer is formed of Prussian blue
  • the base layer may be a PET/ITO film.
  • the preparation method of the optical thin film structure is as follows: on a clean PET/ITO substrate, a layer of metal aluminum film is sputtered by a magnetron sputtering method.
  • the thickness of the aluminum film is set at 10 nm.
  • a layer of Prussian blue layer is deposited by electrodeposition method.
  • the thickness of Prussian blue is selected to be 100 nm to 2000 nm.
  • a layer of silver film is sputtered on the Prussian blue layer by magnetron sputtering.
  • the thickness of the silver film is set at 0-50 nm.
  • the aforementioned silver film and aluminum film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the aforementioned Prussian blue layer can be prepared by electrochemical deposition, sol-gel technology and other methods known in the industry.
  • the optical film structure of this embodiment shows different colors when viewed from two sides, and also has a transmission structure color.
  • This embodiment provides a device, which can be regarded as a reflection/transmission dual-mode colorful electrochromic device, comprising a working electrode, an electrolyte layer and a counter electrode, and the electrolyte layer is arranged between the working electrode and the counter electrode.
  • the working electrode includes an optical film structure arranged on a conductive substrate.
  • the optical film structure includes a first and second optical structure layers and a medium layer. Air is used as the first optical structure layer and the second optical structure layer It is formed of metal tungsten (W), and the dielectric layer is formed of tungsten oxide.
  • the substrate can be PET/ITO, etc.
  • the preparation method of the working electrode is as follows: On a clean PET/ITO film, a layer of tungsten film is sputtered by a magnetron sputtering method. Preferably, the thickness of the tungsten film is selected to be about 10 nm by sputtering. After that, a tungsten oxide layer is sputtered by magnetron sputtering on the tungsten film. Preferably, the thickness of the tungsten oxide layer is set to 100 nm to 400 nm.
  • the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the aforementioned tungsten oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, and electrochemical deposition.
  • the working electrode of this embodiment shows different colors when viewed from two sides, and also has a transmissive structure color.
  • the aforementioned working electrode is matched with a pair of electrodes (for example, NiO counter electrode), and AlCl 3 electrolyte is encapsulated between the two, and then leads are drawn out to prepare the colorful electrochromic device of this embodiment.
  • a pair of electrodes for example, NiO counter electrode
  • AlCl 3 electrolyte is encapsulated between the two, and then leads are drawn out to prepare the colorful electrochromic device of this embodiment.
  • the color of the working electrode can be further modulated to change between more colors, especially the color changes on both sides of the working electrode are not completely the same. See the figure for details. 13 shown.
  • This embodiment provides an optical device, which can be regarded as a reflection/transmission dual-mode colorful electrochromic device, comprising a working electrode, an electrolyte layer and a counter electrode, and the electrolyte layer is arranged between the working electrode and the counter electrode.
  • the working electrode includes an optical thin film structure arranged on a conductive substrate.
  • the optical thin film structure includes first and second optical structure layers and a dielectric layer.
  • the first optical structure layer is formed of metal tungsten (W)
  • the second optical structure layer is formed by Metal silver (Ag) is formed
  • the dielectric layer is formed of titanium dioxide (TiO 2 ).
  • the substrate can be PET/AgNWs.
  • the preparation method of the working electrode is as follows: on the clean PET/AgNWs film, a layer of silver film is sputtered by magnetron sputtering method.
  • the thickness of the silver film is selected to be about 10 nm.
  • a layer of titanium oxide is sputtered on the silver film by magnetron sputtering.
  • the thickness of the titanium dioxide layer is set to 100 nm to 400 nm.
  • a layer of tungsten film is sputtered by magnetron sputtering on the titanium dioxide layer.
  • the thickness of the tungsten film is selected to be about 5 nm by sputtering.
  • the optical device can be assembled and formed by referring to Embodiment 7.
  • the aforementioned silver film and tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the aforementioned titanium oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, and electrochemical deposition.
  • the working electrode of this embodiment shows different colors when viewed from two sides, and also has a transmissive structure color.
  • the aforementioned working electrode is matched with a pair of electrodes (for example, a NiO counter electrode), and LiCl/PVA gel electrolyte is arranged between the two, and then the wires are drawn out to prepare the colorful electrochromic device of this embodiment.
  • a pair of electrodes for example, a NiO counter electrode
  • LiCl/PVA gel electrolyte is arranged between the two, and then the wires are drawn out to prepare the colorful electrochromic device of this embodiment.
  • This embodiment provides an optical device, which can be regarded as a reflection/transmission dual-mode colorful electrochromic device, comprising a working electrode, an electrolyte layer and a counter electrode, and the electrolyte layer is arranged between the working electrode and the counter electrode.
  • the working electrode includes an optical thin film structure arranged on a conductive substrate.
  • the optical thin film structure includes first and second optical structure layers and a dielectric layer, wherein the first optical structure layer is air, and the second optical structure is a metallic copper (Cu) layer ,
  • the dielectric layer is formed of vanadium oxide (V 2 O 5 ), and the base layer can be PET/ITO.
  • the preparation method of the optical thin film structure is as follows: On a clean PET substrate, a layer of copper film is sputtered by a magnetron sputtering method. Preferably, the thickness of the copper film is selected to be about 15 nm by sputtering. Then, a vanadium oxide layer is sputtered on the copper film by magnetron sputtering. Preferably, the thickness of the vanadium oxide layer is set at 100 nm to 400 nm.
  • the aforementioned copper film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the aforementioned vanadium oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, electrochemical deposition, sol-gel technology, and the like.
  • the working electrode of this embodiment shows different colors when viewed from two sides, and also has a transmissive structure color.
  • the optical device can be assembled and formed by referring to Embodiment 7.
  • the aforementioned working electrode is matched with a pair of electrodes (for example, NiO counter electrode), and LiCl/HCl/AlCl 3 /NaCl/PVA mixed ion gel electrolyte is set between the two.
  • a pair of electrodes for example, NiO counter electrode
  • LiCl/HCl/AlCl 3 /NaCl/PVA mixed ion gel electrolyte is set between the two.
  • This embodiment provides an optical device, which can be regarded as a reflection/transmission dual-mode colorful electrochromic device, comprising a working electrode, an electrolyte layer and a counter electrode, and the electrolyte layer is arranged between the working electrode and the counter electrode.
  • the working electrode includes an optical thin film structure arranged on a conductive substrate.
  • the optical thin film structure includes first and second optical structure layers and a dielectric layer. Air is used as the first optical structure layer, and the second optical structure layer is made of metal tungsten (W). Formed, the dielectric layer is formed of tungsten oxide (WO 3 ).
  • the substrate can be PET/ITO.
  • the preparation method of the working electrode is as follows: On a clean PET/ITO film, a silver film is sputtered by magnetron sputtering. Preferably, the thickness of the tungsten film is selected to be about 10nm sputtered. Afterwards, a tungsten oxide layer is sputtered by magnetron sputtering on the silver film. Preferably, the thickness of the tungsten oxide layer is set to 100 nm to 400 nm.
  • the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the aforementioned tungsten oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, and electrochemical deposition.
  • the working electrode of this embodiment shows different colors when viewed from two sides, and also has a transmissive structure color.
  • a layer of lanthanum lithium titanate film is sputtered on the aforementioned working electrode as a solid electrolyte by a magnetron sputtering method, and the thickness of the lanthanum lithium titanate film is preferably 500 nm.
  • the working electrode and the solid electrolyte are matched with a pair of electrodes (for example, an IrO 2 pair of electrodes), and then the wires are drawn out to prepare the colorful electrochromic device of this embodiment.
  • a pair of electrodes for example, an IrO 2 pair of electrodes
  • the wires are drawn out to prepare the colorful electrochromic device of this embodiment.
  • the color of the working electrode can be further modulated to change between more colors, especially the color changes on both sides of the working electrode are not completely the same.
  • the color change of the colorful electrochromic device of the present embodiment is similar to the color change of Example 7 caused by voltage application.
  • the high-precision patterned colorful film includes a substrate and a metal layer disposed on the substrate, wherein a plurality of continuous or spaced dielectric layers formed by laser direct writing are distributed on the metal layer.
  • the thickness of the layer can be 10 nm-300 nm, and each dielectric layer is formed of metal oxide generated in situ.
  • the substrate can be a PET plastic plate.
  • the metal layer may be a tungsten film deposited on the substrate, and its thickness may be about 500 nm.
  • a method for making the patterned colorful film may include: magnetron sputtering sputtering a layer of tungsten film on a clean, 3cm*3cm PET plastic plate, preferably, a tungsten film
  • the thickness of the sputtering is chosen to be about 500nm.
  • a laser direct writing method is used to sequentially laser oxidize tungsten oxide layers of different required thicknesses on each pixel (ie, pattern area) on the tungsten film.
  • the tungsten film can be placed on a worktable controlled by an XY computer, with a moving speed of 15mm/s, a continuous laser power of 200W, a laser rectangular spot size of 1.4mm ⁇ 1.4mm, a defocusing distance of 5mm, and a spot overlap rate 40%, when the laser action time is 6.5s, the obtained dielectric layer thickness is 163nm, the area is pink, and when the laser action time is 8s, the obtained dielectric layer thickness is 200nm, and the area appears blue.
  • the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the color film prepared above is used as an electrochromic layer, and a pair of electrodes, such as a NiO counter electrode layer, is additionally prepared, and LiClO 4 -PC electrolyte is encapsulated between the two and lead wires are drawn to prepare colorful electrochromic devices.
  • a pair of electrodes such as a NiO counter electrode layer
  • LiClO 4 -PC electrolyte is encapsulated between the two and lead wires are drawn to prepare colorful electrochromic devices.
  • By applying voltage to the colorful electrochromic device its color can be further modulated.
  • the red area of the working electrode will change in real time between red, orange and yellow; the blue area will change in real time between blue, purple and red.
  • the high-precision patterned colorful film includes a substrate and a metal layer disposed on the substrate, wherein a plurality of continuous or spaced dielectric layers formed by laser direct writing are distributed on the metal layer.
  • the thickness of the layer can be 10 nm-300 nm, and each dielectric layer is formed of metal oxide generated in situ.
  • the substrate can be a PET plastic plate.
  • the metal layer may be a titanium film deposited on the substrate, and its thickness may be about 500 nm.
  • a method for making the patterned colorful film may include: magnetron sputtering sputtering a layer of titanium film on a clean PET plastic plate with a size of 3cm*3cm, preferably, a titanium film
  • the thickness of the sputtering is chosen to be about 500nm.
  • the laser direct writing method is used to sequentially laser oxidize the titanium oxide layer of different required thickness on each pixel point (ie, the pattern area) on the titanium film.
  • the moving speed of the worktable controlled by the XY computer is 15mm/s
  • the continuous laser power is 300W
  • the laser rectangular spot size is 1.4mm ⁇ 1.4mm
  • the defocus is 5mm
  • the spot overlap rate is 40%
  • the laser action time is 3 -10s.
  • the aforementioned titanium film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the high-precision patterned colorful film includes a substrate and a metal layer disposed on the substrate, wherein a plurality of continuous or spaced dielectric layers formed by laser direct writing are distributed on the metal layer.
  • the thickness of the dielectric layer is 0-20 nm, and each dielectric layer is formed of metal oxide generated in situ.
  • the substrate can be a PET plastic plate.
  • the metal layer may be a copper film deposited on the substrate, and its thickness may be about 0-20 nm.
  • a method of making the patterned colorful film may include: first magnetron sputtering sputtering a copper film on a clean PET plastic plate with a size of 3cm*3cm, preferably a copper film The thickness of the sputtering is chosen to be about 15nm. Then, the laser direct writing method is used to sequentially laser oxidize the copper oxide layers of different required thicknesses on each pixel point (that is, the pattern area) on the copper film.
  • the moving speed of the worktable controlled by the XY computer is 15mm/s
  • the continuous laser power is 100W
  • the laser rectangular spot size is 1.4mm ⁇ 1.4mm
  • the defocus is 5mm
  • the spot overlap rate is 40%
  • the laser action time is 0 -5s.
  • the high-precision patterned colorful film includes a substrate and a metal layer disposed on the substrate, wherein a plurality of continuous or spaced dielectric layers formed by laser direct writing are distributed on the metal layer.
  • the thickness of the dielectric layer may be 10 nm to 300 nm, and each dielectric layer is formed of metal oxide generated in situ.
  • the substrate can be a PET plastic plate.
  • the metal layer may be a tungsten film deposited on the substrate, and its thickness may be about 500 nm.
  • a method for making the patterned colorful film may include: magnetron sputtering sputtering a layer of tungsten film on a clean, 3cm*3cm PET plastic plate, preferably, a tungsten film
  • the thickness of the sputtering is chosen to be about 500nm.
  • a laser direct writing method is used to sequentially laser oxidize tungsten oxide layers of different required thicknesses on each pixel (ie, pattern area) on the tungsten film.
  • the moving speed of the worktable controlled by the XY computer is 15mm/s
  • the continuous laser power is 200W
  • the laser rectangular spot size is 1.4mm ⁇ 1.4mm
  • the defocus is 5mm
  • the spot overlap rate is 40%
  • the laser action time is 6s.
  • the thickness of the obtained dielectric layer is 150nm
  • the area appears yellow
  • the laser action time is 10s
  • the thickness of the obtained dielectric layer is about 250nm, and this area appears green.
  • the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
  • the color film prepared above is used as the electrochromic layer, and a pair of electrodes, such as a NiO counter electrode layer, is prepared, and the PMMA-PEG-LiPF6 gel electrolyte is encapsulated between the two, and then the wires are led out, then high-precision patterning can be prepared Multi-color electrochromic devices.
  • a pair of electrodes such as a NiO counter electrode layer
  • High-precision patterning can be prepared Multi-color electrochromic devices.
  • the power supply voltage is -2.5V ⁇ +2.5V, the yellow area of the working electrode will change in real time between yellow, green and blue; the green area will change in real time between green, cyan and blue.
  • this embodiment discloses a mobile phone, which includes a mobile phone body 200 and a mobile phone case 300, which includes a housing 210 on which a Logo 400 formed of a colorful film structure is integrally provided.
  • the colorful film structure is an all-solid electrochromic structure, which includes a working electrode, an electrolyte layer and a counter electrode, and the electrolyte layer is arranged between the working electrode and the counter electrode.
  • the working electrode includes a metal tungsten layer 210 with a thickness of about 100 nm and a tungsten oxide dielectric layer 220 with a thickness of about 150 nm to 400 nm that are sequentially deposited on the mobile phone shell by magnetron sputtering.
  • the electrolyte 230 uses LiNbO 3 with a thickness of about 600 nm.
  • the pair of electrodes 250 uses ITO with a thickness of about 200 nm.
  • An ion storage layer NiO 240 with a thickness of about 200 nm is arranged between the counter electrode and the electrolyte.
  • the aforementioned tungsten film and tungsten oxide layer can also be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, and ion plating.
  • the logo appears as a single color when it is not powered on, and after the power (mobile phone power supply) is turned on, the voltage can be adjusted (this can be achieved through the voltage control function of the mobile phone or a voltage control component can also be added).
  • the color can be switched between a variety of colors with the change of voltage, for example, it can change from red to yellow, then from yellow to green, or it can be blue, purple, etc., and the hue, saturation, brightness, etc. are all Can be adjusted in real time.
  • This embodiment discloses a refrigerator panel, which includes a transparent cover plate covering the front box of the refrigerator, and a colorful film structure is covered on the inner wall of the transparent cover plate.
  • the colorful film structure is an all-solid electrochromic structure, which includes a working electrode, an electrolyte layer and a counter electrode, and the electrolyte layer is arranged between the working electrode and the counter electrode.
  • the working electrode includes a metal Cr layer with a thickness of about 50nm sequentially deposited on the mobile phone shell by magnetron sputtering, and a Prussian blue layer with a thickness of about 100nm is electrochemically deposited on the metal Cr layer.
  • the Prussian blue layer is magnetron sputtered with a ZnS layer with a thickness of about 1 nm to 15 nm.
  • a LiAlF4 electrolyte layer with a thickness of about 300 nm is formed on the ZnS layer.
  • An Fe 2 O 3 layer with a thickness of about 100 nm is formed on the electrolyte layer.
  • AZO with a thickness of about 80 nm is provided on the Fe 2 O 3 layer as a counter electrode.
  • the colorful film structure presents a single color when it is not energized, and after the power supply (the power module of the refrigerator) is turned on, the color of the colorful film structure can be changed by adjusting the voltage (which can be added by an additional voltage control element). Switch between red, yellow and blue at will.
  • This embodiment discloses a building with more than one window, some of the windows include a window frame and glass fixed on the window frame, the glass is covered with a colorful film structure, the colorful film structure includes successively The first medium layer, the second optical structure layer, the second medium layer, and the first optical structure layer are formed on the glass.
  • the first optical structure layer is air
  • the second optical structure layer is a metal tungsten film
  • the first and second dielectric layers are formed of tungsten oxide layers.
  • the tungsten oxide layer as the first dielectric layer can be formed by magnetron sputtering or the like, and has a thickness of about 1 nm to 400 nm.
  • the thickness of the metallic tungsten film is about 10 nm.
  • the thickness of the tungsten oxide layer as the second dielectric layer is about 100 nm to 400 nm, and it may be formed on the metal tungsten film by magnetron sputtering.
  • a colorful film structure reflecting rich and brilliant colors can be obtained. From the direction of the glass side, the corresponding reflection color also presents a rich and brilliant color, and this color is completely different from the color seen from the film direction. Moreover, through the colorful film structure, a transmission structure color can be obtained, and the transmission structure color also presents a rich and brilliant color.
  • the transmittance of the reflection color and the transmission color of the colorful film structure is determined by the metal tungsten layer and The thickness of the tungsten oxide layer is determined.
  • This embodiment discloses an automobile.
  • the window glass of the automobile is conformally covered with a reflection/transmission dual-mode colorful film structure, which includes a working electrode, an electrolyte layer and a counter electrode.
  • the electrolyte layer is arranged on the working electrode and the counter electrode. between.
  • the working electrode includes first and second optical structure layers and a dielectric layer.
  • the first optical structure layer is a tungsten film with a thickness of about 5 nm
  • the second optical structure layer is a silver film with a thickness of about 10 nm
  • the dielectric layer is a thickness of 100 nm to 400 nm. Titanium oxide layer.
  • a transparent conductive layer formed by nano silver wires is also formed on the window glass of the automobile, and the first or second optical structure layer is formed on the transparent conductive layer.
  • the vehicle window glass of this embodiment shows different colors when viewed from two sides, and also has a transmission structure color.
  • the aforementioned working electrode is matched with a pair of electrodes (such as NiO counter electrode), and LiCl/PVA gel electrolyte is set between the two, and then the lead wire is connected to the car power supply.
  • a pair of electrodes such as NiO counter electrode
  • LiCl/PVA gel electrolyte is set between the two, and then the lead wire is connected to the car power supply.
  • This embodiment discloses a sun visor cap, a partial area of the sun visor cap body is made of PET film, and a colorful pattern with a colorful film structure is formed on the PET film.
  • the colorful film structure includes a working electrode, an electrolyte layer and For the counter electrode, the electrolyte layer is arranged between the working electrode and the counter electrode.
  • the working electrode and the counter electrode are also electrically connected with the organic photovoltaic cell arranged on the sun visor through the voltage control module.
  • the working electrode includes a tungsten film with a thickness of about 500nm on the PET film by magnetron sputtering.
  • Each pixel of the tungsten film (corresponding to the colorful pattern) is oxidized by laser direct writing to form a tungsten oxide layer of different thicknesses as a dielectric layer .
  • the thickness of the dielectric layer is about 0-300 nm.
  • the process conditions of the laser direct writing include: the tungsten film can be placed on a worktable controlled by an XY computer, the moving speed is 15mm/s, the continuous laser power is 100W, the laser rectangular spot size is 1.4mm ⁇ 1.4mm, and it is out of focus. The amount is 5mm, the spot overlap rate is 40%, and the laser action time is 0-5s.
  • the aforementioned counter electrode may be a NiO counter electrode layer.
  • a LiBO 2 +Li 2 SO 4 solid electrolyte is encapsulated between the working electrode and the counter electrode, and then leads are drawn.
  • the color of the colorful thin film structure can be further modulated by applying voltage to the colorful film structure through organic photovoltaic cells.
  • the voltage is -2.5V ⁇ +2.5V, the red area of the working electrode will change between red, orange and yellow in real time; the blue area will change between blue, purple and red in real time.

Abstract

Disclosed are an optical film structure, and a manufacturing method therefor and the use thereof. The optical film structure comprises a first optical structure layer (4) and a second optical structure layer (2) that are arranged in parallel; the first optical structure layer (4) and the second optical structure layer (2) are optically reflective and/or transmissive; a dielectric layer (3) is arranged between the first optical structure layer (4) and the second optical structure layer (2); the bonding interfaces between the dielectric layer (3) and the first optical structure layer (4) and between the dielectric layer (3) and the second optical structure layer (2) are a first surface and a second surface of the dielectric layer (3) respectively; and the first surface, the second surface and the dielectric layer (3) define an optical cavity. The optical film structure shows colorful reflection/transmission colors, and particularly when an electrochromic material is used to form the dielectric layer (3), adjusting the magnitude of the voltage applied to the dielectric layer (3) also can realize fusion of the structural color and electrochromism of the optical film structure, so that the optical film structure shows more colorful color changes, and therefore can be widely applied in multiple fields.

Description

光学薄膜结构及其制备方法与应用Optical film structure and its preparation method and application 技术领域Technical field
本申请涉及一种光学薄膜,特别涉及一种具有反射/透射双模式的光学薄膜结构及其制备方法与应用,属于光学或光电技术领域。This application relates to an optical film, in particular to an optical film structure with a reflection/transmission dual mode and a preparation method and application thereof, belonging to the field of optics or optoelectronic technology.
背景技术Background technique
光电信息产业中最有发展前景的通讯、显示和存储三大类产品都离不开光学薄膜结构,如投影机、背投影电视机、数码照相机、摄像机、DVD,以及光通讯中的DWDM、GFF滤光片等,光学薄膜结构的性能在很大程度上决定了这些产品的最终性能。光学薄膜结构正在突破传统的范畴,越来越广泛地渗透到光电器件、空间探测器、集成电路、生物芯片、激光器件、液晶显示、集成光学等各学科领域中,对科学技术的进步和全球经济的发展都起着重要的作用。随着现代科学技术的快速发展,除了要求光学薄膜结构产品具有实用多功能性,以适应光电信息产业,能源产业等领域的营业需求之外,对于其美学多功能性也有亟待解决的需求,以期待应用于建筑、汽车、艺术装饰、和防伪领域。这促使了一系列新型光学薄膜结构及其制备技术的发展。但目前许多光学薄膜结构功能单一,结构复杂,制备技术繁琐,不能满足多功能需求,限制了光电,能源,艺术装饰,防伪,传感,通信等产业的进一步发展。In the optoelectronic information industry, the most promising three types of products in communication, display and storage are inseparable from the optical film structure, such as projectors, rear projection TVs, digital cameras, camcorders, DVDs, and DWDM and GFF in optical communications Filters, etc., the performance of the optical film structure to a large extent determines the final performance of these products. Optical film structure is breaking through the traditional category, and it has penetrated more and more widely into various disciplines such as optoelectronic devices, space detectors, integrated circuits, biochips, laser devices, liquid crystal displays, integrated optics, etc., contributing to the progress of science and technology and the global Economic development plays an important role. With the rapid development of modern science and technology, in addition to requiring optical film structure products to have practical versatility to meet the business needs of the optoelectronic information industry, energy industry and other fields, there are also urgent needs for their aesthetic versatility. It is expected to be used in the fields of construction, automobiles, art decoration, and anti-counterfeiting. This has prompted the development of a series of new optical thin film structures and their preparation technology. However, many optical films currently have single-function structures, complex structures, and cumbersome preparation techniques, which cannot meet the needs of multi-functionality, limiting the further development of industries such as optoelectronics, energy, art decoration, anti-counterfeiting, sensing, and communications.
申请内容Application content
本申请的主要目的在于提供一种光学薄膜结构及其制备方法与应用,以克服现有技术中的不足。The main purpose of this application is to provide an optical film structure and its preparation method and application to overcome the deficiencies in the prior art.
为实现前述申请目的,本申请采用的技术方案包括:In order to achieve the purpose of the aforementioned application, the technical solutions adopted in this application include:
本申请实施例提供了一种光学薄膜结构,包括平行设置的第一光学结构层和第二光学结构层,所述第一光学结构层、第二光学结构层是光学反射性和/或光学透射性的,所述第一光学结构层和第二光学结构层之间设置有介质层,所述介质层与第一光学结构层、第二光学结构层的 结合界面分别为所述介质层的第一表面、第二表面,所述第一表面、第二表面与介质层组成光学腔;在入射光从第一光学结构层或第二光学结构层入射所述光学腔时,于所述第一表面形成的反射光和于所述第二表面形成的反射光的相移
Figure PCTCN2019103280-appb-000001
d为所述介质层的厚度,
Figure PCTCN2019103280-appb-000002
为所述介质层的折射率,λ为所述入射光的波长,
Figure PCTCN2019103280-appb-000003
为所述入射光在透过所述第一表面或第二表面时的折射角。
The embodiment of the application provides an optical film structure, including a first optical structure layer and a second optical structure layer arranged in parallel, the first optical structure layer and the second optical structure layer are optically reflective and/or optically transmissive Sexually, a medium layer is provided between the first optical structure layer and the second optical structure layer, and the bonding interface between the medium layer and the first optical structure layer and the second optical structure layer is the first optical structure layer of the medium layer. A surface and a second surface, the first surface, the second surface and the medium layer constitute an optical cavity; when incident light enters the optical cavity from the first optical structure layer or the second optical structure layer, the The phase shift between the reflected light formed on the surface and the reflected light formed on the second surface
Figure PCTCN2019103280-appb-000001
d is the thickness of the dielectric layer,
Figure PCTCN2019103280-appb-000002
Is the refractive index of the medium layer, λ is the wavelength of the incident light,
Figure PCTCN2019103280-appb-000003
Is the refraction angle of the incident light when passing through the first surface or the second surface.
进一步地,所述光学薄膜结构具有光学透射工作模式、光学反射工作模式或者光学透射及反射工作模式。Further, the optical film structure has an optical transmission mode, an optical reflection mode, or an optical transmission and reflection mode.
本申请实施例还提供了所述光学薄膜结构的应用,例如在制备光学器件、光电器件、电子器件等设备内的应用。The embodiments of the present application also provide applications of the optical film structure, for example, applications in the preparation of optical devices, optoelectronic devices, electronic devices and other equipment.
例如,本申请实施例提供了一种器件,包括相互配合的工作电极及对电极,所述工作电极包括前述的任意一种光学薄膜结构,所述光学薄膜结构内的介质层主要由电致变色材料组成。所述器件可以是光学器件、电子器件或光电器件等,且不限于此。For example, an embodiment of the present application provides a device that includes a working electrode and a counter electrode that cooperate with each other. The working electrode includes any of the foregoing optical film structures, and the dielectric layer in the optical film structure is mainly composed of electrochromic Material composition. The device may be an optical device, an electronic device, or an optoelectronic device, etc., and is not limited thereto.
进一步的,所述器件还包括电解质,所述电解质分布于所述工作电极与对电极之间。Further, the device further includes an electrolyte, and the electrolyte is distributed between the working electrode and the counter electrode.
本申请实施例提供了一种所述器件的调控方法,其包括:The embodiment of the present application provides a method for adjusting and controlling the device, which includes:
将工作电极、对电极与电源连接形成工作电路;Connect the working electrode and the counter electrode to the power source to form a working circuit;
调整工作电极与对电极之间的电势差,以至少使介质层内电致变色材料的折射率变化,从而调控所述器件的颜色。The potential difference between the working electrode and the counter electrode is adjusted to at least change the refractive index of the electrochromic material in the dielectric layer, thereby adjusting the color of the device.
本申请实施例还提供了一种装置,其包括所述的器件。An embodiment of the present application also provides a device, which includes the device described above.
与现有技术相比,本申请的优点在于:Compared with the prior art, the advantages of this application are:
1)本申请实施例通过调节光学薄膜结构中各光学结构层、介质层的材质和/或厚度等,即可得到丰富多彩的反射/透射结构色,其中更令人感兴趣的是,所述光学薄膜结构从其相互背对的两侧观察,具有截然不同的反射结构色,且还同时存在透射结构色。1) In the embodiments of the present application, by adjusting the material and/or thickness of each optical structure layer and medium layer in the optical film structure, a colorful reflection/transmission structure color can be obtained. The more interesting thing is that the The structure of the optical film, viewed from its opposite sides, has a completely different reflection structure color, and also a transmission structure color.
2)优选的,本申请实施例的光学薄膜结构采用电致变色材料形成介质层,通过对介质层施加电压,引起电致变色材料折射率的变化,进而改变介质层的光学参数,最终导致光学薄膜结构颜色的改变,这种结构色和电致变色的融合能实现具有丰富颜色变化的反射/透射双模式的多彩电致变色结构。2) Preferably, the optical film structure of the embodiment of the present application adopts electrochromic material to form the dielectric layer. By applying a voltage to the dielectric layer, the refractive index of the electrochromic material changes, which in turn changes the optical parameters of the dielectric layer, and finally leads to optical The change of the color of the film structure, the fusion of the structure color and the electrochromic can realize the reflection/transmission dual-mode colorful electrochromic structure with rich color changes.
3)本申请实施例提供的光学薄膜结构制备工艺简单,成本低廉,仅需调控各光学结构层、介质层的材质和/或厚度,即可控制其颜色,反射率和透过率,适于规模化生产和多功能应用,在机械、光电、能源、交通、建筑等领域有广泛应用前景。3) The optical film structure provided by the embodiments of the application has a simple preparation process and low cost. It only needs to adjust the material and/or thickness of each optical structure layer and dielectric layer to control its color, reflectance and transmittance, which is suitable for Large-scale production and multi-functional applications have broad application prospects in the fields of machinery, photovoltaics, energy, transportation, and construction.
附图说明Description of the drawings
图1是本申请一典型实施方案中一种新型薄膜结构示意图;Fig. 1 is a schematic diagram of a novel film structure in a typical embodiment of the present application;
图2a是本申请一典型实施方案中一种新型反射/透射双模式多彩电致变色结构的示意图;Figure 2a is a schematic diagram of a novel reflective/transmissive dual-mode colorful electrochromic structure in a typical embodiment of the present application;
图2b是图2a中电致变色工作电极的结构示意图;Figure 2b is a schematic diagram of the structure of the electrochromic working electrode in Figure 2a;
图3是本申请一典型实施方案中一种高精度图案化多彩薄膜的制作工艺示意图;3 is a schematic diagram of a manufacturing process of a high-precision patterned colorful film in a typical embodiment of the present application;
图4是本申请实施例1中一种新型光学薄膜结构的结构示意图;4 is a schematic structural diagram of a novel optical film structure in Embodiment 1 of the present application;
图5是本申请实施例1中不同氧化钨厚度下新型光学薄膜结构的从第一光学结构一侧看到的反射颜色的照片;5 is a photograph of the reflection color of the novel optical thin film structure with different tungsten oxide thicknesses as seen from the side of the first optical structure in Example 1 of the present application;
图6为本申请实施例1中不同氧化钨厚度下新型光学薄膜结构的从PET基底方向看到的反射颜色的照片;FIG. 6 is a photograph of the reflection color of the novel optical film structure with different tungsten oxide thicknesses as seen from the direction of the PET substrate in Example 1 of the application;
图7为本申请实施例1中不同氧化钨厚度下新型光学薄膜结构的透射颜色的照片;7 is a photograph of the transmission color of the novel optical thin film structure under different tungsten oxide thicknesses in Example 1 of the application;
图8为本申请实施例3中一种新型光学薄膜结构的结构示意图;8 is a schematic structural diagram of a novel optical film structure in Embodiment 3 of the application;
图9为本申请实施例3中不同氧化钨厚度下新型光学薄膜结构的从第一光学结构一侧看到的反射颜色的照片;FIG. 9 is a photograph of the reflection color of the novel optical thin film structure with different tungsten oxide thicknesses as seen from the side of the first optical structure in Example 3 of the application;
图10是本申请实施例3中不同氧化钨厚度下新型光学薄膜结构的从PET基底方向看到的反射颜色的照片;10 is a photograph of the reflection color of the novel optical film structure with different thicknesses of tungsten oxide in Example 3 of the present application as seen from the direction of the PET substrate;
图11是本申请实施例3中不同氧化钨厚度下新型光学薄膜结构的透射颜色的照片;11 is a photograph of the transmission color of the novel optical thin film structure under different tungsten oxide thicknesses in Example 3 of the present application;
图12是本申请实施例7中一种新型反射/透射双模式多彩电致变色器件的工作电极的结构示意图;12 is a schematic diagram of the structure of the working electrode of a novel reflective/transmissive dual-mode multi-color electrochromic device in Example 7 of the present application;
图13是本申请实施例7中不同氧化钨厚度多彩电致变色器件中工作电极(从第一光学结构和基底两侧方向拍摄)在不同电压下的照片;13 is a photograph of the working electrode (taken from both sides of the first optical structure and the substrate) in the colorful electrochromic device with different tungsten oxide thickness in Example 7 of the present application under different voltages;
图14是本申请实施例15的一种手机的结构示意图;FIG. 14 is a schematic structural diagram of a mobile phone according to Embodiment 15 of the present application;
图15是形成图14中Logo的多彩薄膜的结构示意图。FIG. 15 is a schematic diagram of the structure of the colorful film forming the Logo in FIG. 14.
具体实施方式detailed description
鉴于现有技术中的不足,本案申请人经长期研究和大量实践,得以提出本申请的技术方案。如下将对该技术方案、其实施过程及原理等作进一步的解释说明。In view of the shortcomings in the existing technology, the applicant in this case was able to propose the technical solution of the application after long-term research and extensive practice. The technical solution, its implementation process and principle will be further explained as follows.
为了更清楚地说明本申请实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请中记载的一些实施方案,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本申请保护的范围。以下实施例中采用的实施条件可以根据实际需要而做进一步调整,未注明的实施条件通常为常规实验中的条件。In order to more clearly describe the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments described in this application, but not all examples. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of this application. The implementation conditions used in the following embodiments can be further adjusted according to actual needs, and the implementation conditions that are not specified are usually conditions in routine experiments.
又及,需要说明的是,在本说明书中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括所述要素的过程、方法、物品或者设备中还存在另外的相同要素。Furthermore, it should be noted that in this specification, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply these There is any such actual relationship or sequence between entities or operations. Moreover, the terms "include", "include" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device that includes a series of elements includes not only those elements, but also includes Other elements of, or also include elements inherent to this process, method, article or equipment. If there are no more restrictions, the element defined by the sentence "including a..." does not exclude the existence of other same elements in the process, method, article, or equipment including the element.
本申请实施例的一个方面提供的一种光学薄膜结构包括平行设置的第一光学结构层和第二光学结构层,所述第一光学结构层、第二光学结构层是光学反射性和/或光学透射性的,所述第一光学结构层和第二光学结构层之间设置有介质层,所述介质层与第一光学结构层、第二光学结构层的结合界面分别为所述介质层的第一表面、第二表面,所述第一表面、第二表面与介质层组成光学腔。An aspect of the embodiments of the present application provides an optical film structure including a first optical structure layer and a second optical structure layer arranged in parallel, and the first optical structure layer and the second optical structure layer are optically reflective and/or Optically transmissive, a medium layer is provided between the first optical structure layer and the second optical structure layer, and the bonding interface between the medium layer and the first optical structure layer and the second optical structure layer is the medium layer The first surface, the second surface, the first surface, the second surface and the dielectric layer form an optical cavity.
进一步地,对于所述光学薄膜结构而言,由从第一光学结构层入射的入射光在所述第一表面形成的反射光与由透过所述介质层的入射光在第二表面形成的反射光干涉叠加。反之亦然,即,由从第二光学结构层入射的入射光在所述第二表面形成的反射光与由透过所述介质层的入射光在第一表面形成的反射光干涉叠加。Further, for the optical film structure, the reflected light formed on the first surface by incident light from the first optical structure layer and the reflected light formed on the second surface by the incident light passing through the dielectric layer Reflected light interference and superposition. The reverse is also true, that is, the reflected light formed on the second surface by the incident light incident from the second optical structure layer and the reflected light formed on the first surface by the incident light passing through the medium layer are interfered and superposed.
进一步地,在入射光从第一光学结构层或第二光学结构层入射所述光学腔时,于所述第一表面形成的反射光和于所述第二表面形成的反射光的相移
Figure PCTCN2019103280-appb-000004
d为所述介质 层的厚度,
Figure PCTCN2019103280-appb-000005
为所述介质层的折射率,λ为所述入射光的波长,
Figure PCTCN2019103280-appb-000006
为所述入射光在透过所述第一表面或第二表面时的折射角。
Further, when incident light enters the optical cavity from the first optical structure layer or the second optical structure layer, the phase shift between the reflected light formed on the first surface and the reflected light formed on the second surface
Figure PCTCN2019103280-appb-000004
d is the thickness of the dielectric layer,
Figure PCTCN2019103280-appb-000005
Is the refractive index of the medium layer, λ is the wavelength of the incident light,
Figure PCTCN2019103280-appb-000006
Is the refraction angle of the incident light when passing through the first surface or the second surface.
在一些实施方案中,若定义所述第一光学结构层的折射率为
Figure PCTCN2019103280-appb-000007
则所述第一表面的反射系数
Figure PCTCN2019103280-appb-000008
其中
Figure PCTCN2019103280-appb-000009
为入射光于第一表面的入射角。
In some embodiments, if the refractive index of the first optical structure layer is defined as
Figure PCTCN2019103280-appb-000007
The reflection coefficient of the first surface
Figure PCTCN2019103280-appb-000008
among them
Figure PCTCN2019103280-appb-000009
Is the incident angle of incident light on the first surface.
在一些实施方案中,若定义所述第二光学结构层的折射率为
Figure PCTCN2019103280-appb-000010
则所述第二表面的反射系数
Figure PCTCN2019103280-appb-000011
其中
Figure PCTCN2019103280-appb-000012
为入射光在透过第二表面时的折射角。
In some embodiments, if the refractive index of the second optical structure layer is defined as
Figure PCTCN2019103280-appb-000010
The reflection coefficient of the second surface
Figure PCTCN2019103280-appb-000011
among them
Figure PCTCN2019103280-appb-000012
Is the refraction angle of incident light when passing through the second surface.
在一些实施方案中,所述光学薄膜结构的反射系数表示为:
Figure PCTCN2019103280-appb-000013
反射率表示为:
Figure PCTCN2019103280-appb-000014
In some embodiments, the reflection coefficient of the optical film structure is expressed as:
Figure PCTCN2019103280-appb-000013
The reflectivity is expressed as:
Figure PCTCN2019103280-appb-000014
进一步的,所述光学薄膜结构的反射系数、反射率同样适用于入射光从第二光学结构层入射所述光学腔的情况。Further, the reflectivity and reflectivity of the optical film structure are also applicable to the case where incident light enters the optical cavity from the second optical structure layer.
在一些实施方案中,若定义所述第一光学结构层的折射率为
Figure PCTCN2019103280-appb-000015
则所述第一光学结构层的透射系数
Figure PCTCN2019103280-appb-000016
其中
Figure PCTCN2019103280-appb-000017
为入射光于第一表面的入射角。
In some embodiments, if the refractive index of the first optical structure layer is defined as
Figure PCTCN2019103280-appb-000015
The transmission coefficient of the first optical structure layer
Figure PCTCN2019103280-appb-000016
among them
Figure PCTCN2019103280-appb-000017
Is the incident angle of incident light on the first surface.
在一些实施方案中,若定义所述第二光学结构层的折射率为
Figure PCTCN2019103280-appb-000018
则所述第二光学结构层的透射系数
Figure PCTCN2019103280-appb-000019
其中
Figure PCTCN2019103280-appb-000020
为入射光在透过第二表面时的折射角。
In some embodiments, if the refractive index of the second optical structure layer is defined as
Figure PCTCN2019103280-appb-000018
The transmission coefficient of the second optical structure layer
Figure PCTCN2019103280-appb-000019
among them
Figure PCTCN2019103280-appb-000020
Is the refraction angle of incident light when passing through the second surface.
在一些实施方案中,所述光学薄膜结构的透射系数表示为:
Figure PCTCN2019103280-appb-000021
透过率表示为:
Figure PCTCN2019103280-appb-000022
In some embodiments, the transmission coefficient of the optical film structure is expressed as:
Figure PCTCN2019103280-appb-000021
The transmittance is expressed as:
Figure PCTCN2019103280-appb-000022
进一步的,所述光学薄膜结构的透射系数、透过率同样适用于入射光从第二光学结构层入射所述光学腔的情况。Further, the transmittance and transmittance of the optical film structure are also applicable to the case where incident light enters the optical cavity from the second optical structure layer.
进一步地,所述光学薄膜结构具有光学透射工作模式、光学反射工作模式或者光学透射及反射工作模式。Further, the optical film structure has an optical transmission mode, an optical reflection mode, or an optical transmission and reflection mode.
其中,在所述光学反射工作模式下,所述光学薄膜结构具有双面不对称结构色。Wherein, in the optical reflection working mode, the optical film structure has a double-sided asymmetric structure color.
其中,在所述光学透射工作模式下,所述光学薄膜结构具有透明结构色。Wherein, in the optical transmission working mode, the optical film structure has a transparent structural color.
在一些实施方案中,所述光学薄膜结构包括一个或多个第一光学结构层、一个或多个介质层和一个或多个第二光学结构层。In some embodiments, the optical film structure includes one or more first optical structure layers, one or more medium layers, and one or more second optical structure layers.
在一些实施方案中,所述光学薄膜结构包括多个第一光学结构层和/或多个第二光学结构层以及多个介质层。In some embodiments, the optical film structure includes multiple first optical structure layers and/or multiple second optical structure layers and multiple medium layers.
在一些实施方案中,所述第一光学结构层和第二光学结构层中至少一者的材质包括金属材料。In some embodiments, the material of at least one of the first optical structure layer and the second optical structure layer includes a metal material.
在一些实施方案中,所述第一光学结构层或第二光学结构层为金属层。In some embodiments, the first optical structure layer or the second optical structure layer is a metal layer.
在一些实施方案中,所述第一光学结构层和第二光学结构层均为金属层。In some embodiments, the first optical structure layer and the second optical structure layer are both metal layers.
在一些实施方案中,所述第一光学结构层或第二光学结构层直接为空气。In some embodiments, the first optical structure layer or the second optical structure layer is directly air.
在一些实施方案中,所述第一光学结构层或第二光学结构层不存在。In some embodiments, the first optical structure layer or the second optical structure layer is not present.
进一步的,所述金属材料包括钨,金,银,铜,钛,铝,铬,铁,钴,镍,铂,锗,钯等,但不限于此。Further, the metal material includes tungsten, gold, silver, copper, titanium, aluminum, chromium, iron, cobalt, nickel, platinum, germanium, palladium, etc., but is not limited thereto.
进一步的,所述第一光学结构层或第二光学结构层的厚度优选为0~20nm,优选为大于0而小于20nm,或者,所述第一光学结构层和第二光学结构层中至少一者的厚度在20nm以上;优选的,所述第一光学结构层和第二光学结构层中至少一者的厚度为50~3000nm。Further, the thickness of the first optical structure layer or the second optical structure layer is preferably 0-20 nm, preferably greater than 0 and less than 20 nm, or at least one of the first optical structure layer and the second optical structure layer The thickness of one is above 20 nm; preferably, the thickness of at least one of the first optical structure layer and the second optical structure layer is 50-3000 nm.
在一些实施方案中,所述介质层的材质选自有机材料或无机材料。In some embodiments, the material of the medium layer is selected from organic materials or inorganic materials.
进一步的,所述无机材料包括金属单质或非金属单质、无机盐、氧化物中任意一种或多种的组合,但不限于此。Further, the inorganic material includes any one or a combination of metal element or non-metal element, inorganic salt, and oxide, but is not limited thereto.
进一步的,所述非金属单质包括单晶硅、多晶硅、金刚石中任意一种或多种的组合,但不限于此。Further, the non-metallic element includes any one or a combination of single crystal silicon, polycrystalline silicon, and diamond, but is not limited thereto.
进一步的,所述无机盐包括氟化物、硫化物、硒化物、氯化物、溴化物、碘化物、砷化物或碲化物中任意一种或多种的组合,但不限于此。Further, the inorganic salt includes any one or a combination of fluoride, sulfide, selenide, chloride, bromide, iodide, arsenide, or telluride, but is not limited thereto.
进一步的,所述氧化物包括WO 3、NiO、TiO 2、Nb 2O 5、Fe 2O 3、V 2O 5、Co 2O 3、Y 2O 3、Cr 2O 3、MoO 3、Al 2O 3、SiO 2、MgO、ZnO、MnO 2、CaO、ZrO 2、Ta 2O 5、Y 3Al 5O 12、Er 2O 3、IrO 2中任意一种或多种的组合,但不限于此。 Further, the oxide includes WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , Cr 2 O 3 , MoO 3 , Al 2 O 3 , SiO 2 , MgO, ZnO, MnO 2 , CaO, ZrO 2 , Ta 2 O 5 , Y 3 Al 5 O 12 , Er 2 O 3 , IrO 2 any one or a combination of more than one, but not Limited to this.
更优选的,所述氟化物包括MgF 2、CaF 2、GeF 2、YbF 3、YF 3、Na 3AlF 6、AlF 3、NdF 3、LaF 3、LiF、NaF、BaF 2、SrF 2中任意一种或多种的组合,但不限于此。 More preferably, the fluoride includes any one of MgF 2 , CaF 2 , GeF 2 , YbF 3 , YF 3 , Na 3 AlF 6 , AlF 3 , NdF 3 , LaF 3 , LiF, NaF, BaF 2 , SrF 2 A combination of one or more, but not limited to this.
进一步的,所述硫化物包括ZnS、GeS、MoS 2、Bi 2S 3中任意一种或多种的组合,但不限于此。 Further, the sulfide includes any one or a combination of ZnS, GeS, MoS 2 , and Bi 2 S 3 , but is not limited thereto.
进一步的,所述硒化物包括ZnSe,GeSe、MoSe 2、PbSe、Ag 2Se中任意一种或多种的组合,但不限于此。 Further, the selenide includes any one or a combination of ZnSe, GeSe, MoSe 2 , PbSe, and Ag 2 Se, but is not limited thereto.
进一步的,所述氯化物包括AgCl、NaCl、KCl中任意一种或多种的组合,但不限于此。Further, the chloride includes any one or a combination of AgCl, NaCl, and KCl, but is not limited thereto.
进一步的,所述溴化物包括AgBr、NaBr、KBr、TlBr、CsBr中任意一种或多种的组合,但不限于此。Further, the bromide includes any one or a combination of AgBr, NaBr, KBr, TlBr, and CsBr, but is not limited thereto.
进一步的,所述碘化物包括AgI、NaI、KI、RbI、CsI中任意一种或多种的组合,但不限于此。Further, the iodide includes any one or a combination of AgI, NaI, KI, RbI, and CsI, but is not limited thereto.
进一步的,所述砷化物包括GaAs等,但不限于此。Further, the arsenide includes GaAs, etc., but is not limited thereto.
进一步的,所述锑化物包括GdTe等,但不限于此。Further, the antimony compound includes GdTe and the like, but is not limited thereto.
进一步的,所述介质层的材质包括SrTiO 3、Ba 3Ta 4O 15、Bi 4Ti 3O 2、CaCO 3、CaWO 4、CaMnO 4、LiNbO 4、普鲁士蓝、普鲁士黑、普鲁士白、普鲁士绿中任意一种或多种的组合,但不限于此。 Further, the material of the dielectric layer includes SrTiO 3 , Ba 3 Ta 4 O 15 , Bi 4 Ti 3 O 2 , CaCO 3 , CaWO 4 , CaMnO 4 , LiNbO 4 , Prussian blue, Prussian black, Prussian white, Prussian green Any one or more of the combination of, but not limited to this.
进一步的,所述介质层的材质包括液晶材料或MOF材料,但不限于此。Further, the material of the medium layer includes liquid crystal material or MOF material, but is not limited thereto.
进一步的,所述有机材料包括有机小分子化合物和/或聚合物,但不限于此。Further, the organic material includes small organic molecular compounds and/or polymers, but is not limited thereto.
进一步的,所述有机材料包括紫罗精、聚吡咯、聚苯胺、聚噻吩、聚咔唑、酞菁、对苯二甲脂、二甲基联二苯胺、四噻富烯、烷基联吡啶、吩噻唑、聚酰胺、环氧树脂、聚二炔中任意一种或多种的组合,但不限于此。Further, the organic material includes viologen, polypyrrole, polyaniline, polythiophene, polycarbazole, phthalocyanine, terephthalate, dimethylbenzidine, tetrathiafulvene, alkyl bipyridine , Phenothiazole, polyamide, epoxy resin, polydiyne, any one or a combination of more, but not limited thereto.
在一些实施方案中,所述介质层可以主要由电致变色材料组成。所述的电致变色材料可以选自无机、有机材料或者液晶材料和MOF材料等。例如,所述无机材料可以包括WO 3、NiO、TiO 2、Nb 2O 5、Fe 2O 3、V 2O 5、Co 2O 3、Y 2O 3、MoO 3、IrO 2、普鲁士蓝、普鲁士黑、普鲁士白、普鲁士绿等,且不限于此。所述有机材料可以包括紫罗精、聚吡咯、聚苯胺、聚噻吩、聚咔唑、酞菁、对苯二甲脂、二甲基联二苯胺、四噻富烯、烷基联吡啶、吩噻唑、聚二炔等,但不限于此。 In some embodiments, the dielectric layer may be mainly composed of electrochromic materials. The electrochromic material can be selected from inorganic, organic materials or liquid crystal materials and MOF materials. For example, the inorganic material may include WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , MoO 3 , IrO 2 , Prussian blue, Prussian black, Prussian white, Prussian green, etc., but not limited to this. The organic material may include viologen, polypyrrole, polyaniline, polythiophene, polycarbazole, phthalocyanine, terephthalate, dimethylbenzidine, tetrathiafulvene, alkyl bipyridine, phene Thiazole, polydiyne, etc., but not limited thereto.
在一些实施方案中,所述介质层厚度为大于0而小于或等于2000nm,优选为50~2000nm,更优选为100~500nm,以使所述光学薄膜结构的颜色饱和度更高。In some embodiments, the thickness of the dielectric layer is greater than 0 and less than or equal to 2000 nm, preferably 50 to 2000 nm, more preferably 100 to 500 nm, so that the color saturation of the optical film structure is higher.
进一步的,还可以在所述第一光学结构层或第二光学结构层与介质层之间增加优化介质层,以优化所述光学薄膜结构的颜色。Further, an optimized medium layer may be added between the first optical structure layer or the second optical structure layer and the medium layer to optimize the color of the optical film structure.
进一步的,还可以在所述第一光学结构层或第二光学结构层上增加优化介质层,或者,也可以将所述第一光学结构层或第二光学结构层设置在优化介质层上,以优化所述光学薄膜结构的颜色。Further, an optimized medium layer may be added to the first optical structure layer or the second optical structure layer, or the first optical structure layer or the second optical structure layer may also be arranged on the optimized medium layer, To optimize the color of the optical film structure.
在一些实施方案中,所述第一光学结构层或第二光学结构层与基底结合。In some embodiments, the first optical structure layer or the second optical structure layer is combined with a substrate.
进一步的,所述基底为透明或半透明的。相应的,所述基底的材质可以是透明或半透明的,例如可以选自玻璃、有机玻璃、PET、PES、PEN、PC、PMMA、PDMS等材料中的任意一种或多种的组合,但不限于此。Further, the substrate is transparent or translucent. Correspondingly, the material of the substrate can be transparent or translucent, for example, can be selected from any one or a combination of materials such as glass, organic glass, PET, PES, PEN, PC, PMMA, PDMS, etc. Not limited to this.
进一步的,前述优化介质层可以设置在所述第一光学结构层或第二光学结构层与基底之间。Further, the aforementioned optimized medium layer may be disposed between the first optical structure layer or the second optical structure layer and the substrate.
进一步的,所述优化介质层的材质包括但不仅限于WO 3、NiO、TiO 2、Nb 2O 5、Fe 2O 3、V 2O 5、Co 2O 3、Y 2O 3、Cr 2O 3、MoO 3、Al 2O 3、SiO 2、MgO、ZnO、MnO 2、CaO、ZrO 2、Ta 2O 5、Y 3Al 5O 12、Er 2O 3、ZnS、MgF 2、SiN x(氮化硅)等,但不限于此。 Further, the material of the optimized dielectric layer includes but not limited to WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , Cr 2 O 3. MoO 3 , Al 2 O 3 , SiO 2 , MgO, ZnO, MnO 2 , CaO, ZrO 2 , Ta 2 O 5 , Y 3 Al 5 O 12 , Er 2 O 3 , ZnS, MgF 2 , SiN x ( Silicon nitride), but not limited to this.
进一步的,所述优化介质层的厚度优选为0~2000nm,优选为100~500nm。Further, the thickness of the optimized dielectric layer is preferably 0-2000 nm, preferably 100-500 nm.
在一个较为典型的实施方案中,请参阅图1所示,一种光学薄膜结构包括设置在基底1上的第二光学结构层2、介质层3和第一光学结构层4。该第一光学结构层4、第二光学结构层2为反射/透射层,其可以是金属材质的。In a more typical implementation, please refer to FIG. 1, an optical film structure includes a second optical structure layer 2, a medium layer 3 and a first optical structure layer 4 disposed on a substrate 1. The first optical structure layer 4 and the second optical structure layer 2 are reflection/transmission layers, which can be made of metal.
其中,第一光学结构层4也可以直接为空气。Wherein, the first optical structure layer 4 can also be directly air.
其中,第二光学结构层2也可以不存在。Among them, the second optical structure layer 2 may not exist.
该典型实施方案中,第一光学结构层、第二光学结构层、介质层的材质、厚度等可以如前文所述。并且,通过调整第一光学结构层4、第二光学结构层2、介质层3的材质以及厚度等,可以改变光学薄膜结构的反射/透射结构色,反射率和透过率。In this exemplary embodiment, the material and thickness of the first optical structure layer, the second optical structure layer, and the medium layer may be as described above. Moreover, by adjusting the material and thickness of the first optical structure layer 4, the second optical structure layer 2, the dielectric layer 3, etc., the reflection/transmission structure color, reflectance, and transmittance of the optical film structure can be changed.
本申请实施例的另一个方面还提供了一种制备所述光学薄膜结构的方法,其可以包括:Another aspect of the embodiments of the present application also provides a method for preparing the optical film structure, which may include:
通过物理或化学沉积方式,例如涂布、印刷、铸膜等方式或者磁控溅射、电子束蒸发、热蒸发、电化学沉积、化学气相沉积、原子力沉积、溶胶凝胶技术等形成所述第一光学结构层或第二光学结构层、介质层等,且不限于此。The formation of the said section by means of physical or chemical deposition, such as coating, printing, film casting, etc., or magnetron sputtering, electron beam evaporation, thermal evaporation, electrochemical deposition, chemical vapor deposition, atomic force deposition, sol-gel technology, etc. An optical structure layer or a second optical structure layer, a medium layer, etc. are not limited thereto.
在一些实施方案中,所述第一光或第二光学结构层、介质层可以依次形成在基底上。In some embodiments, the first optical or second optical structure layer and the medium layer may be sequentially formed on the substrate.
进一步的,由电致变色材料做成的电致变色器件已经广泛应用于智能窗、智能指示器、成像设备等。电致变色的原理是在外加电场或者电流的作用下无机或有机的电致变色材料的电子结构和光学属性(反射率、透过率、吸收率等)发生稳定、可逆的变化的现象,在其外观上表现为颜色和透明度的可逆变化。传统的电致变色可分为两种模型,透过型电致变色器件和反射型电致变色器件,并且,电致变色器件的颜色仅仅只由电致变色本身的电子结构和光学属性决定。因此,电致变色的单一模式和单调颜色调制也成为了限制其应用范围的瓶颈。Further, electrochromic devices made of electrochromic materials have been widely used in smart windows, smart indicators, imaging equipment, and the like. The principle of electrochromism is the phenomenon that the electronic structure and optical properties (reflectance, transmittance, absorption, etc.) of inorganic or organic electrochromic materials undergo stable and reversible changes under the action of an external electric field or current. Its appearance is expressed as a reversible change in color and transparency. Traditional electrochromic devices can be divided into two models, transmissive electrochromic devices and reflective electrochromic devices, and the color of electrochromic devices is only determined by the electronic structure and optical properties of the electrochromic itself. Therefore, the single mode and monotonous color modulation of electrochromic has become a bottleneck that limits its application range.
在一些实施方案中,可以在所述制备方法进行的过程中,调整所述第一光学结构层或第二光学结构层、介质层的厚度和/或材质等,从而调整所述光学薄膜结构的反射/透射结构色。In some embodiments, the thickness and/or material of the first optical structure layer, the second optical structure layer, and the dielectric layer can be adjusted during the process of the preparation method, so as to adjust the structure of the optical film. Reflection/transmission structure color.
本申请实施例的另一个方面还提供了一种器件,包括相互配合的工作电极及对电极,所述工作电极包括前述的任意一种光学薄膜结构,所述光学薄膜结构内的介质层主要由电致变色材料组成。Another aspect of the embodiments of the present application also provides a device, including a working electrode and a counter electrode that cooperate with each other. The working electrode includes any of the foregoing optical film structures, and the dielectric layer in the optical film structure is mainly composed of Composed of electrochromic materials.
在一些实施方案中,所述器件还包括电解质,所述电解质分布于所述工作电极与对电极之间。In some embodiments, the device further includes an electrolyte distributed between the working electrode and the counter electrode.
进一步的,在本申请的前述实施例中,所述电解质的类型没有特别限制,可以使用液体电解质、凝胶聚合物电解质或无机固体电解质。在一些实施方案中,所述电解质与介质层接触,并提供用于使电致变色材料变色或脱色的离子,例如氢离子或锂离子的移动环境的材料。Further, in the foregoing embodiments of the present application, the type of the electrolyte is not particularly limited, and liquid electrolyte, gel polymer electrolyte or inorganic solid electrolyte can be used. In some embodiments, the electrolyte is in contact with the dielectric layer, and provides a material in a mobile environment for discoloring or decolorizing the electrochromic material, such as hydrogen ions or lithium ions.
在一些实施方案中,所述电解质可以包含一种或更多种化合物,例如含有H +、Li +、Al 3+、Na +、K +、Rb +、Ca 2+,Zn 2+、Mg 2+或Cs +的化合物。在一个实施案例中,电解质层可以包含锂盐化合物,例如LiClO 4、LiBF 4、LiAsF 6或LiPF 6。包含在电解质中的离子可以在根据施加的电压的极性被嵌入或移出介质层时对器件的变色或光透射率变化发挥作用。在一些实施方案中,所采用的电解质包含混合的多种离子,其较之单一离子,可以使器件的颜色变化更为丰富饱满。 In some embodiments, the electrolyte may contain one or more compounds, for example containing H + , Li + , Al 3+ , Na + , K + , Rb + , Ca 2+ , Zn 2+ , Mg 2 + Or Cs + compound. In one embodiment, the electrolyte layer may include a lithium salt compound, such as LiClO 4 , LiBF 4 , LiAsF 6 or LiPF 6 . The ions contained in the electrolyte can contribute to the discoloration of the device or the change in light transmittance when being inserted into or removed from the dielectric layer according to the polarity of the applied voltage. In some embodiments, the electrolyte used contains a mixture of multiple ions, which can make the color change of the device richer and fuller than a single ion.
在一些实施方案中,所述电解质可以是液态电解质,例如水系的LiCl、AlCl 3、HCl、H 2SO 4水溶液等。 In some embodiments, the electrolyte may be a liquid electrolyte, such as aqueous LiCl, AlCl 3 , HCl, and H 2 SO 4 aqueous solutions.
在一些实施方案中,所述电解质还可以包含碳酸酯化合物。由于基于碳酸酯的化合物具有高的介电常数,可以增加由锂盐提供的离子导电率。作为基于碳酸酯的化合物,可以使用以下的至少一种:PC(碳酸亚丙酯)、EC(碳酸亚乙酯)、DMC(碳酸二甲酯)、DEC(碳酸二乙酯)和EMC(碳酸乙基甲酯)。例如可以采用有机系的LiClO 4、Na(ClO 4) 3的碳酸丙烯酯电解液等。 In some embodiments, the electrolyte may further include a carbonate compound. Since the carbonate-based compound has a high dielectric constant, the ionic conductivity provided by the lithium salt can be increased. As the carbonate-based compound, at least one of the following can be used: PC (propylene carbonate), EC (ethylene carbonate), DMC (dimethyl carbonate), DEC (diethyl carbonate), and EMC (carbonic acid Ethyl methyl). For example, organic LiClO 4 , Na(ClO 4 ) 3 propylene carbonate electrolyte, etc. can be used.
在一些实施方案中,所述电解质可以是凝胶电解质,例如PMMA-PEG-LiClO 4,PVDF-PC-LiPF 6,LiCl/PVA,H 2SO 4/PVA等,但不限于此。 In some embodiments, the electrolyte may be a gel electrolyte, such as PMMA-PEG-LiClO 4 , PVDF-PC-LiPF 6 , LiCl/PVA, H 2 SO 4 /PVA, etc., but is not limited thereto.
在一些优选的实施方案中,当使用无机固体电解质作为所述电解质时,电解质可以包含LiPON或Ta 2O 5。例如,所述电解质可以但不限于为含Li的金属氧化物薄膜,比如LiTaO或LiPO等薄膜。此外,无机固体电解质可以为其中LiPON或Ta 2O 5被添加有诸如B、S和W等组分的电解质,例如可以是LiBO 2+Li 2SO 4、LiAlF 4、LiNbO 3、Li 2O-B 2O 3等。 In some preferred embodiments, when an inorganic solid electrolyte is used as the electrolyte, the electrolyte may include LiPON or Ta 2 O 5 . For example, the electrolyte may be, but is not limited to, a Li-containing metal oxide film, such as LiTaO or LiPO. In addition, the inorganic solid electrolyte may be an electrolyte in which LiPON or Ta 2 O 5 is added with components such as B, S, and W. For example, it may be LiBO 2 +Li 2 SO 4 , LiAlF 4 , LiNbO 3 , Li 2 OB 2 O 3 etc.
优选的,所述器件还包括离子存储层。Preferably, the device further includes an ion storage layer.
进一步的,所述离子存储层与所述电解质接触。Further, the ion storage layer is in contact with the electrolyte.
在一些实施方案中,所述第一光学结构层或第二光学结构层还与基底结合。In some embodiments, the first optical structure layer or the second optical structure layer is also combined with a substrate.
例如,所述工作电极可以包括基底。For example, the working electrode may include a substrate.
例如,所述对电极可以包括基底、透明导电层和离子存储层;所述基底的材质可如前文所述,此处不再赘述。For example, the counter electrode may include a substrate, a transparent conductive layer, and an ion storage layer; the material of the substrate may be as described above, and will not be repeated here.
进一步的,所述离子存储层的材质可以选自但不限于NiO、Fe 2O 3、TiO 2、普鲁士蓝、IrO 2等。 Further, the material of the ion storage layer can be selected from but not limited to NiO, Fe 2 O 3 , TiO 2 , Prussian blue, IrO 2 and the like.
在一些实施方案中,所述基底上还设置有导电层。其中,所述导电层包括FTO、ITO、Ag纳米线、Ag纳米网栅、碳纳米管、石墨烯中的任意一种或多种的组合,且不限于此。In some embodiments, a conductive layer is also provided on the substrate. Wherein, the conductive layer includes any one or a combination of FTO, ITO, Ag nanowire, Ag nano grid, carbon nanotube, and graphene, and is not limited thereto.
在一些实施方案中,所述对电极为透明或半透明的。In some embodiments, the counter electrode is transparent or translucent.
本申请实施例还提供了所述器件的制备方法,其包括:The embodiment of the present application also provides a method for preparing the device, which includes:
采用前文所述的方法制作第一光学结构层、第二光学结构层及介质层等,形成工作电极;The first optical structure layer, the second optical structure layer, the dielectric layer, etc. are fabricated using the method described above to form the working electrode;
以及,将工作电极、电解质与对电极组装形成器件。And, the working electrode, the electrolyte and the counter electrode are assembled to form a device.
请参阅图2a示出了本申请一典型实施方案中一种器件,其包括工作电极5、对电极7及电解质层6,电解质层6设置于工作电极5及对电极7之间。2a shows a device in a typical embodiment of the present application, which includes a working electrode 5, a counter electrode 7 and an electrolyte layer 6, and the electrolyte layer 6 is disposed between the working electrode 5 and the counter electrode 7.
其中,所述电解质层6可以选用合适的水相电解液,有机相电解液,凝胶电解质或是固体电解质,优选的LiCl、AlCl 3、HCl、H 2SO 4水溶液,LiClO 4的碳酸丙烯酯电解液,LiCl/PVA,H 2SO 4/PVA凝胶电解质等,且不限于此。 Wherein, the electrolyte layer 6 can be selected from a suitable water phase electrolyte, an organic phase electrolyte, a gel electrolyte or a solid electrolyte, preferably LiCl, AlCl 3 , HCl, H 2 SO 4 aqueous solution, LiClO 4 propylene carbonate Electrolyte, LiCl/PVA, H 2 SO 4 /PVA gel electrolyte, etc., but not limited thereto.
再请参阅图2b所示,所述工作电极5可以包括光学薄膜结构,所述光学薄膜结构可以包括导电基底10、作为第二光学结构层的金属反射/透射层11和介质层12,而介质层12上方的空 气层可以作为第一光学结构层,所述介质层12由电致变色材料组成。优选的,前述第二光学结构层的厚度大于0而小于20nm。Referring again to FIG. 2b, the working electrode 5 may include an optical film structure, which may include a conductive substrate 10, a metal reflection/transmission layer 11 as a second optical structure layer, and a dielectric layer 12, and the dielectric The air layer above the layer 12 can be used as the first optical structure layer, and the medium layer 12 is composed of an electrochromic material. Preferably, the thickness of the aforementioned second optical structure layer is greater than 0 and less than 20 nm.
其中,参阅前文内容,通过调整金属反射/透射层、介质层的材质和厚度等,可以改变光学薄膜结构的反射/透射结构色。而且,通过调整施加在电致变色材料上的电压、电流等,还可使介质层的颜色变化。如此,可以实现器件(特别是光学器件)固有的光学结构色和电致变色的融合,更为简单、可控的实现丰富的颜色变化。Among them, referring to the previous content, by adjusting the material and thickness of the metal reflection/transmission layer and the dielectric layer, the reflection/transmission structure color of the optical film structure can be changed. Moreover, by adjusting the voltage, current, etc. applied to the electrochromic material, the color of the dielectric layer can also be changed. In this way, it is possible to realize the fusion of the inherent optical structural color and electrochromic of the device (especially the optical device), and realize rich color changes in a simpler and controllable manner.
本申请实施例的另一个方面还提供了所述器件的调控方法,其包括:Another aspect of the embodiments of the present application also provides a control method of the device, which includes:
将工作电极、对电极与电源连接形成工作电路;Connect the working electrode and the counter electrode to the power source to form a working circuit;
调整工作电极与对电极之间的电势差,以至少使介质层内电致变色材料的折射率变化,从而调控所述器件的颜色。The potential difference between the working electrode and the counter electrode is adjusted to at least change the refractive index of the electrochromic material in the dielectric layer, thereby adjusting the color of the device.
其中,所述器件的工作电压可以依据实际情况而调整,例如可以是-4V~4V,但不限于此。Wherein, the operating voltage of the device can be adjusted according to actual conditions, for example, it can be -4V to 4V, but is not limited to this.
在本申请的前述实施方案中,所述器件将多彩的反射/透射结构色与电致变色融合,丰富电致变色器件的颜色调制,实现多彩色的动态调控。具体而言,可以通过调整光学薄膜结构中第一光学结构层、第二光学结构层及介质层等的厚度、材质等得到丰富多彩的结构色。同时,将所述光学薄膜结构用作工作电极,通过施加电压,使介质层中的电致变色材料折射率的变化(可以是因电解质层中的离子插入或脱出电致变色材料而引起),导致介质层的光学参数改变,带来颜色的改变,最终能实现电致变色的反射/透射双模式和绚丽丰富的颜色调制,将极大促进电致变色技术发展以及其在多个领域的应用。In the aforementioned embodiments of the present application, the device combines colorful reflection/transmission structural colors with electrochromic, enriches the color modulation of the electrochromic device, and realizes dynamic control of multiple colors. Specifically, by adjusting the thickness and material of the first optical structure layer, the second optical structure layer, and the dielectric layer in the optical film structure, a colorful structural color can be obtained. At the same time, using the optical film structure as a working electrode, by applying a voltage, the refractive index of the electrochromic material in the dielectric layer is changed (which may be caused by the insertion or extraction of ions in the electrolyte layer of the electrochromic material), The optical parameters of the dielectric layer are changed, and the color is changed. Finally, it can realize electrochromic reflection/transmission dual mode and brilliant and rich color modulation, which will greatly promote the development of electrochromic technology and its application in many fields. .
本申请实施例还提供了所述光学薄膜结构或所述器件的用途,例如在电致变色、光致变色、建筑、汽车、艺术装饰、滤光片、防伪、太阳能电池、显示器、LED屏、通信、传感、照明等领域的应用。The embodiments of the present application also provide the use of the optical film structure or the device, such as electrochromic, photochromic, construction, automobile, art decoration, filter, anti-counterfeiting, solar cell, display, LED screen, Applications in communication, sensing, lighting and other fields.
本申请实施例的另一个方面还提供了一种装置,其包括所述的器件。Another aspect of the embodiments of the present application also provides a device, which includes the device described above.
优选的,所述装置还包括电源,所述电源能与所述器件电连接形成工作回路。Preferably, the device further includes a power supply, which can be electrically connected with the device to form a working circuit.
在一些实施方案中,所述装置还可包括附加的封装结构、控制模块、电源模块等组件,这些附件组件可以常规方式与所述光学薄膜结构结合。In some embodiments, the device may further include additional packaging structures, control modules, power modules and other components, and these accessory components can be combined with the optical film structure in a conventional manner.
所述装置包括但不限于机械设备、光电设备、电子设备、建筑物、交通工具以及户外广告牌等,且不限于此。The device includes, but is not limited to, mechanical equipment, optoelectronic equipment, electronic equipment, buildings, vehicles, outdoor billboards, etc., and is not limited thereto.
在一些实施方案中,所述装置为消费电子产品或家用电器,所述光学薄膜结构连接和/或一体形成在所述装置的壳体和/或显示屏上。In some embodiments, the device is a consumer electronic product or a household appliance, and the optical film structure is connected and/or integrally formed on the housing and/or display screen of the device.
在一些实施方案中,所述消费电子产品包括手机、手环、平板电脑或笔记本电脑等;或者,所述家用电器包括电视机、电冰箱、电风扇或空调等。In some embodiments, the consumer electronic product includes a mobile phone, a bracelet, a tablet computer or a notebook computer, etc.; or, the household appliance includes a TV, a refrigerator, an electric fan, or an air conditioner, etc.
在一些实施方案中,所述装置为建筑物,所述建筑物的内墙、外墙、窗户中的任一者上连接和/或一体形成有所述光学薄膜结构;或者,所述装置为交通工具,所述交通工具的外壳、内壁、窗户中的任一者上连接和/或一体形成有所述光学薄膜结构;或者,所述装置为鞋、帽或服饰,所述装置的表面连接和/或一体形成有所述光学薄膜结构。In some embodiments, the device is a building, and the optical film structure is connected and/or integrally formed with any one of the inner wall, the outer wall, and the window of the building; or, the device is For a vehicle, the optical film structure is connected to and/or integrally formed with any one of the housing, inner wall, and window of the vehicle; or, the device is shoes, hats or clothing, and the surface of the device is connected And/or integrally formed with the optical film structure.
在一些实施方案中,所述光学薄膜结构呈现为设定的图文结构。In some embodiments, the optical film structure presents a set graphic structure.
本申请实施例的另一个方面还提供了一种包含多彩薄膜结构的装置,包括基体,所述基体上连接有或一体形成有多彩薄膜结构,所述多彩薄膜结构包括至少一个介质层,其中的每一介质层与一第一反射面和一第二反射面配合形成一光学腔,所述第一反射面为介质层的第一表面,所述第二反射面为介质层的第二表面与一第二光学结构层的结合界面,所述第一表面与第二表面相背对设置;Another aspect of the embodiments of the present application also provides a device including a colorful film structure, including a substrate, the substrate is connected to or integrally formed with a colorful film structure, the colorful film structure includes at least one dielectric layer, wherein Each dielectric layer cooperates with a first reflective surface and a second reflective surface to form an optical cavity. The first reflective surface is the first surface of the dielectric layer, and the second reflective surface is the second surface of the dielectric layer and A bonding interface of the second optical structure layer, the first surface and the second surface are arranged opposite to each other;
在入射光入射所述光学腔时,于所述第一反射面形成的反射光和于所述第二反射面形成的反射光的相移
Figure PCTCN2019103280-appb-000023
d为所述介质层的厚度,
Figure PCTCN2019103280-appb-000024
为所述介质层的折射率,λ为所述入射光的波长,
Figure PCTCN2019103280-appb-000025
为所述入射光在透过第一反射面时的折射角。
When incident light enters the optical cavity, the phase shift between the reflected light formed on the first reflective surface and the reflected light formed on the second reflective surface
Figure PCTCN2019103280-appb-000023
d is the thickness of the dielectric layer,
Figure PCTCN2019103280-appb-000024
Is the refractive index of the medium layer, λ is the wavelength of the incident light,
Figure PCTCN2019103280-appb-000025
Is the refraction angle of the incident light when passing through the first reflecting surface.
进一步的,若定义所述介质层第一表面上的媒介材料的折射率为
Figure PCTCN2019103280-appb-000026
则所述第一反射面的反射系数
Figure PCTCN2019103280-appb-000027
其中
Figure PCTCN2019103280-appb-000028
为入射光的入射角;以及,若定义所述介质层第二表面上的媒介材料的折射率为
Figure PCTCN2019103280-appb-000029
则所述第二反射面的反射系数
Figure PCTCN2019103280-appb-000030
其中
Figure PCTCN2019103280-appb-000031
为入射光在透过第二反射面时的折射角;主要由所述介质层和第二光学结构层组成的多彩薄膜结构的反射系数表示为:
Figure PCTCN2019103280-appb-000032
反射率表示为:
Figure PCTCN2019103280-appb-000033
Further, if the refractive index of the media material on the first surface of the media layer is defined as
Figure PCTCN2019103280-appb-000026
Then the reflection coefficient of the first reflecting surface
Figure PCTCN2019103280-appb-000027
among them
Figure PCTCN2019103280-appb-000028
Is the angle of incidence of incident light; and, if the refractive index of the medium material on the second surface of the medium layer is defined as
Figure PCTCN2019103280-appb-000029
Then the reflection coefficient of the second reflecting surface
Figure PCTCN2019103280-appb-000030
among them
Figure PCTCN2019103280-appb-000031
Is the refraction angle of incident light when passing through the second reflecting surface; the reflection coefficient of the colorful film structure mainly composed of the dielectric layer and the second optical structure layer is expressed as:
Figure PCTCN2019103280-appb-000032
The reflectivity is expressed as:
Figure PCTCN2019103280-appb-000033
在一些实施方式中,所述第二光学结构层采用厚度在20nm以上的金属材料层,优选的,所述金属反射层的厚度为50~3000nm。即,所述第二光学结构层可以被认为是金属反射层。此 时,由入射光在介质层第一表面(即,第一反射面)形成的反射光与由透过所述介质层的入射光在金属层表面(即,第二反射面)形成的反射光干涉叠加。In some embodiments, the second optical structure layer adopts a metal material layer with a thickness of 20 nm or more. Preferably, the thickness of the metal reflective layer is 50-3000 nm. That is, the second optical structure layer may be regarded as a metal reflective layer. At this time, the reflected light formed by the incident light on the first surface (ie, the first reflective surface) of the dielectric layer and the reflected light formed by the incident light passing through the dielectric layer on the surface of the metal layer (ie, the second reflective surface) Light interference superposition.
进一步的,所述金属反射层的材质可以选自非活泼金属,例如铬、金、银、铜、钨、钛或其合金等,且不限于此。Further, the material of the metal reflective layer can be selected from inactive metals, such as chromium, gold, silver, copper, tungsten, titanium or alloys thereof, and is not limited thereto.
在一些实施方案中,若所述多彩薄膜结构中介质层是电致变色材料形成,使得所述多彩薄膜结构为电致变色结构,则所述金属反射层还作为所述介质层的集流体。因此,所述金属反射层可以优选由具有高导电率的金属材料形成,例如可以由具有高导电率的材料例如银(Ag)或铜(Cu)形成。In some embodiments, if the dielectric layer in the colorful film structure is formed of electrochromic material, so that the colorful film structure is an electrochromic structure, the metal reflective layer also serves as the current collector of the dielectric layer. Therefore, the metal reflective layer may preferably be formed of a metal material having high conductivity, for example, may be formed of a material having high conductivity such as silver (Ag) or copper (Cu).
在一些实施方式中,所述第二光学结构层采用厚度大于0而小于20nm的金属材料层。In some embodiments, the second optical structure layer adopts a metal material layer with a thickness greater than 0 and less than 20 nm.
在一些实施方式中,所述第一反射面为介质层的第一表面与第一光学结构层的接合面,所述第一光学结构层的折射率为
Figure PCTCN2019103280-appb-000034
所述第二光学结构层的折射率为
Figure PCTCN2019103280-appb-000035
In some embodiments, the first reflective surface is the junction surface between the first surface of the dielectric layer and the first optical structure layer, and the refractive index of the first optical structure layer is
Figure PCTCN2019103280-appb-000034
The refractive index of the second optical structure layer is
Figure PCTCN2019103280-appb-000035
进一步的,所述多彩薄膜结构的反射系数、反射率同样适用于入射光从第二光学结构层入射所述光学腔的情况。Further, the reflectivity and reflectivity of the colorful film structure are also applicable to the case where incident light enters the optical cavity from the second optical structure layer.
进一步的,所述第一光学结构层、第二光学结构层是平行设置的,并具有光学反射性和/或光学透射性。Further, the first optical structure layer and the second optical structure layer are arranged in parallel, and have optical reflectivity and/or optical transmittance.
进一步地,对于所述多彩薄膜结构而言,由从第一光学结构层入射的入射光在所述第一表面形成的反射光与由透过所述介质层的入射光在第二表面形成的反射光干涉叠加。反之亦然,即,由从第二光学结构层入射的入射光在所述第二表面形成的反射光与由透过所述介质层的入射光在第一表面形成的反射光干涉叠加。Further, for the colorful film structure, the reflected light formed on the first surface by the incident light from the first optical structure layer and the reflected light formed on the second surface by the incident light passing through the dielectric layer Reflected light interference and superposition. The reverse is also true, that is, the reflected light formed on the second surface by the incident light incident from the second optical structure layer and the reflected light formed on the first surface by the incident light passing through the medium layer are interfered and superposed.
具体的,所述第一光学结构层的透射系数
Figure PCTCN2019103280-appb-000036
其中
Figure PCTCN2019103280-appb-000037
为入射光于第一表面的入射角,所述第二光学结构层的透射系数
Figure PCTCN2019103280-appb-000038
其中
Figure PCTCN2019103280-appb-000039
为入射光在透过第二表面时的折射角,主要由所述第一光学结构层、介质层和第二光学结构层组成的多彩薄膜结构的透射系数表示为:
Figure PCTCN2019103280-appb-000040
透过率表示为:
Figure PCTCN2019103280-appb-000041
Specifically, the transmission coefficient of the first optical structure layer
Figure PCTCN2019103280-appb-000036
among them
Figure PCTCN2019103280-appb-000037
Is the incident angle of incident light on the first surface, the transmission coefficient of the second optical structure layer
Figure PCTCN2019103280-appb-000038
among them
Figure PCTCN2019103280-appb-000039
Is the refraction angle of incident light when passing through the second surface, the transmission coefficient of the colorful film structure mainly composed of the first optical structure layer, the medium layer and the second optical structure layer is expressed as:
Figure PCTCN2019103280-appb-000040
The transmittance is expressed as:
Figure PCTCN2019103280-appb-000041
进一步的,所述多彩薄膜结构的透射系数、透过率同样适用于入射光从第二光学结构层入射所述光学腔的情况。Further, the transmittance and transmittance of the colorful film structure are also applicable to the case where incident light enters the optical cavity from the second optical structure layer.
在一些实施方案中,所述多彩薄膜结构包括一个或多个第一光学结构层、一个或多个介质层和一个或多个第二光学结构层。In some embodiments, the colorful film structure includes one or more first optical structure layers, one or more dielectric layers, and one or more second optical structure layers.
在一些实施方案中,所述多彩薄膜结构包括多个第一光学结构层和/或多个第二光学结构层以及多个介质层。In some embodiments, the colorful film structure includes multiple first optical structure layers and/or multiple second optical structure layers and multiple medium layers.
在一些实施方案中,所述第一光学结构层为金属材料层或者由气体组成。In some embodiments, the first optical structure layer is a metal material layer or consists of gas.
进一步的,所述第一光学结构层的厚度优选为0~20nm,优选为大于0而小于20nm。Further, the thickness of the first optical structure layer is preferably 0-20 nm, preferably greater than 0 but less than 20 nm.
在一些实施方案中,所述第一光学结构层为金属层。In some embodiments, the first optical structure layer is a metal layer.
在一些实施方案中,所述第一光学结构层为空气形成。In some embodiments, the first optical structure layer is formed of air.
在一些实施方案中,所述第一光学结构层或第二光学结构层不存在。In some embodiments, the first optical structure layer or the second optical structure layer is not present.
进一步的,所述金属材料层的材质包括钨、金、银、铜、钛、铝、铬、铁、钴、镍、铂、锗、钯中的任意一种或多种的组合,但不限于此。Further, the material of the metal material layer includes any one or a combination of tungsten, gold, silver, copper, titanium, aluminum, chromium, iron, cobalt, nickel, platinum, germanium, and palladium, but is not limited to this.
进一步的,还可以在所述第一光学结构层或第二光学结构层与介质层之间增加优化介质层,以优化所述多彩薄膜结构的颜色。Further, an optimized medium layer may be added between the first optical structure layer or the second optical structure layer and the medium layer to optimize the color of the colorful film structure.
进一步的,还可以在所述第一光学结构层或第二光学结构层上增加优化介质层,或者,也可以将所述第一光学结构层或第二光学结构层设置在优化介质层上,以优化所述多彩薄膜结构的颜色。Further, an optimized medium layer may be added to the first optical structure layer or the second optical structure layer, or the first optical structure layer or the second optical structure layer may also be arranged on the optimized medium layer, To optimize the color of the colorful film structure.
进一步的,所述优化介质层的材质包括但不仅限于WO 3、NiO、TiO 2、Nb 2O 5、Fe 2O 3、V 2O 5、Co 2O 3、Y 2O 3、Cr 2O 3、MoO 3、Al 2O 3、SiO 2、MgO、ZnO、MnO 2、CaO、ZrO 2、Ta 2O 5、Y 3Al 5O 12、Er 2O 3、ZnS、MgF 2、SiN x(氮化硅)等,但不限于此。 Further, the material of the optimized dielectric layer includes but not limited to WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , Cr 2 O 3. MoO 3 , Al 2 O 3 , SiO 2 , MgO, ZnO, MnO 2 , CaO, ZrO 2 , Ta 2 O 5 , Y 3 Al 5 O 12 , Er 2 O 3 , ZnS, MgF 2 , SiN x ( Silicon nitride), but not limited to this.
例如,对于本申请实施例中一些特定的材料或者厚度的多彩薄膜,增加合适厚度的半导体材料,可以提高反射率曲线的强度差,进而提高颜色的饱和度。For example, for some specific materials or colorful films with a thickness in the embodiments of the present application, adding a semiconductor material of a suitable thickness can increase the intensity difference of the reflectance curve, thereby increasing the color saturation.
进一步的,所述优化介质层的厚度优选为0~2000nm,优选为0~500nm,优选为0~300nm,尤其优选为1~100nm。Further, the thickness of the optimized dielectric layer is preferably 0 to 2000 nm, preferably 0 to 500 nm, preferably 0 to 300 nm, and particularly preferably 1 to 100 nm.
进一步地,所述多彩薄膜结构具有光学透射工作模式、光学反射工作模式或者光学透射及反射工作模式。Further, the colorful film structure has an optical transmission mode, an optical reflection mode, or an optical transmission and reflection mode.
其中,在所述光学反射工作模式下,所述多彩薄膜结构具有双面不对称结构色。而在所述光学透射工作模式下,所述多彩薄膜结构具有透明结构色。Wherein, in the optical reflection working mode, the colorful film structure has a double-sided asymmetric structure color. In the optical transmission mode, the colorful film structure has a transparent structural color.
在一些实施方案中,所述介质层厚度为大于0而小于或等于2000nm,优选为50~2000nm,更优选为100~500nm,以使所述多彩薄膜结构的颜色饱和度更高。In some embodiments, the thickness of the dielectric layer is greater than 0 and less than or equal to 2000 nm, preferably 50 to 2000 nm, more preferably 100 to 500 nm, so that the color saturation of the colorful film structure is higher.
在一些实施方案中,所述介质层的材质选自有机材料或无机材料。In some embodiments, the material of the medium layer is selected from organic materials or inorganic materials.
进一步的,所述无机材料包括金属单质或非金属单质、无机盐、氧化物中任意一种或多种的组合,但不限于此。Further, the inorganic material includes any one or a combination of metal element or non-metal element, inorganic salt, and oxide, but is not limited thereto.
进一步的,所述非金属单质包括单晶硅、多晶硅、金刚石中任意一种或多种的组合,但不限于此。Further, the non-metallic element includes any one or a combination of single crystal silicon, polycrystalline silicon, and diamond, but is not limited thereto.
进一步的,所述无机盐包括氟化物、硫化物、硒化物、氯化物、溴化物、碘化物、砷化物或碲化物中任意一种或多种的组合,但不限于此。Further, the inorganic salt includes any one or a combination of fluoride, sulfide, selenide, chloride, bromide, iodide, arsenide, or telluride, but is not limited thereto.
进一步的,所述氧化物包括WO 3、NiO、TiO 2、Nb 2O 5、Fe 2O 3、V 2O 5、Co 2O 3、Y 2O 3、Cr 2O 3、MoO 3、Al 2O 3、SiO 2、MgO、ZnO、MnO 2、CaO、ZrO 2、Ta 2O 5、Y 3Al 5O 12、Er 2O 3、IrO 2中任意一种或多种的组合,但不限于此。 Further, the oxide includes WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , Cr 2 O 3 , MoO 3 , Al 2 O 3 , SiO 2 , MgO, ZnO, MnO 2 , CaO, ZrO 2 , Ta 2 O 5 , Y 3 Al 5 O 12 , Er 2 O 3 , IrO 2 any one or a combination of more than one, but not Limited to this.
进一步的,所述硫化物包括ZnS、GeS、MoS 2、Bi 2S 3中任意一种或多种的组合,但不限于此。 Further, the sulfide includes any one or a combination of ZnS, GeS, MoS 2 , and Bi 2 S 3 , but is not limited thereto.
进一步的,所述硒化物包括ZnSe,GeSe、MoSe 2、PbSe、Ag 2Se中任意一种或多种的组合,但不限于此。 Further, the selenide includes any one or a combination of ZnSe, GeSe, MoSe 2 , PbSe, and Ag 2 Se, but is not limited thereto.
进一步的,所述氯化物包括AgCl等,但不限于此。Further, the chloride includes AgCl, but not limited thereto.
进一步的,所述溴化物包括AgBr、TlBr中任意一种或多种的组合,但不限于此。Further, the bromide includes any one or a combination of AgBr and TlBr, but is not limited thereto.
进一步的,所述碘化物包括AgI、等,但不限于此。Further, the iodide includes AgI, etc., but is not limited thereto.
进一步的,所述砷化物包括GaAs等,但不限于此。Further, the arsenide includes GaAs, etc., but is not limited thereto.
进一步的,所述锑化物包括GdTe等,但不限于此。Further, the antimony compound includes GdTe and the like, but is not limited thereto.
进一步的,所述介质层的材质包括SrTiO 3、Ba 3Ta 4O 15、Bi 4Ti 3O 2、CaCO 3、CaWO 4、CaMnO 4、LiNbO 4、普鲁士蓝、普鲁士黑、普鲁士白、普鲁士绿中任意一种或多种的组合,但不限于此。 Further, the material of the dielectric layer includes SrTiO 3 , Ba 3 Ta 4 O 15 , Bi 4 Ti 3 O 2 , CaCO 3 , CaWO 4 , CaMnO 4 , LiNbO 4 , Prussian blue, Prussian black, Prussian white, Prussian green Any one or more of the combination of, but not limited to this.
进一步的,所述介质层的材质包括液晶材料或MOF材料,但不限于此。Further, the material of the medium layer includes liquid crystal material or MOF material, but is not limited thereto.
进一步的,所述有机材料包括有机小分子化合物和/或聚合物,但不限于此。Further, the organic material includes small organic molecular compounds and/or polymers, but is not limited thereto.
进一步的,所述有机材料包括紫罗精、聚吡咯、聚苯胺、聚噻吩、聚咔唑、酞菁、对苯二甲脂、二甲基联二苯胺、四噻富烯、烷基联吡啶、吩噻唑、聚酰胺、环氧树脂、聚二炔中任意一种或多种的组合,但不限于此。Further, the organic material includes viologen, polypyrrole, polyaniline, polythiophene, polycarbazole, phthalocyanine, terephthalate, dimethylbenzidine, tetrathiafulvene, alkyl bipyridine , Phenothiazole, polyamide, epoxy resin, polydiyne, any one or a combination of more, but not limited thereto.
在一些实施方案中,所述介质层可以主要由电致变色材料组成。所述的电致变色材料可以选自无机、有机材料或者液晶材料和MOF材料等。例如,所述无机材料可以包括WO 3、NiO、TiO 2、Nb 2O 5、Fe 2O 3、V 2O 5、Co 2O 3、Y 2O 3、MoO 3、IrO 2、普鲁士蓝、普鲁士黑、普鲁士白、普鲁士绿等,且不限于此。所述有机材料可以包括紫罗精、聚吡咯、聚苯胺、聚噻吩、聚咔唑、酞菁、对苯二甲脂、二甲基联二苯胺、四噻富烯、烷基联吡啶、吩噻唑、聚二炔等,但不限于此。 In some embodiments, the dielectric layer may be mainly composed of electrochromic materials. The electrochromic material can be selected from inorganic, organic materials or liquid crystal materials and MOF materials. For example, the inorganic material may include WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , MoO 3 , IrO 2 , Prussian blue, Prussian black, Prussian white, Prussian green, etc., but not limited to this. The organic material may include viologen, polypyrrole, polyaniline, polythiophene, polycarbazole, phthalocyanine, terephthalate, dimethylbenzidine, tetrathiafulvene, alkyl bipyridine, phene Thiazole, polydiyne, etc., but not limited thereto.
在一些实施方案中,也可以调整第一光学结构层、第二光学结构层、介质层的厚度和/或材质等,从而调整所述多彩薄膜结构的颜色。In some embodiments, the thickness and/or material of the first optical structure layer, the second optical structure layer, and the medium layer can also be adjusted to adjust the color of the colorful film structure.
在一些实施方式中,所述多彩薄膜结构包括工作电极、对电极和分布于工作电极与对电极之间的电解质,所述工作电极包括由电致变色材料形成的介质层。In some embodiments, the colorful film structure includes a working electrode, a counter electrode, and an electrolyte distributed between the working electrode and the counter electrode, and the working electrode includes a dielectric layer formed of an electrochromic material.
进一步的,所述电致变色材料可以选自有机电致变色材料或无机电致变色材料。其中,无机电致变色材料可以是Co、Rh、Ir、Ni、Cr、Mn、Fe、Ti、V、Nb、Ta、Mo、W的氧化物,例如LiNiO 2(镍酸锂)、IrO 2、NiO、V 2O 5、LixCoO 2(钴酸锂)、Rh 2O 3、CrO 3、WO 3、MoO 3、Nb 2O 5、Ta 2O 5或TiO 2等,且不限于此。其中,有机电致变色材料可以是有机聚合物、有机小分子、金属超分子聚合物、金属有机化合物等,例如如甲基紫精,紫罗精、聚苯胺,聚噻吩,聚吡咯、普鲁士蓝、金属有机螯合物(例如钛菁类化合物)、聚二炔等,且不限于此。 Further, the electrochromic material may be selected from organic electrochromic materials or inorganic electrochromic materials. Among them, the inorganic electrochromic material may be oxides of Co, Rh, Ir, Ni, Cr, Mn, Fe, Ti, V, Nb, Ta, Mo, W, such as LiNiO 2 (lithium nickelate), IrO 2 , NiO, V 2 O 5 , LixCoO 2 (lithium cobalt oxide), Rh 2 O 3 , CrO 3 , WO 3 , MoO 3 , Nb 2 O 5 , Ta 2 O 5 or TiO 2, etc., and not limited thereto. Among them, the organic electrochromic material can be organic polymers, small organic molecules, metal supramolecular polymers, metal organic compounds, etc., such as methyl viologen, viologen, polyaniline, polythiophene, polypyrrole, Prussian blue , Metal organic chelates (such as phthalocyanine compounds), polydiynes, etc., and are not limited thereto.
进一步的,所述电解质的类型没有特别限制,可以使用液体电解质、凝胶聚合物电解质或无机固体电解质。Further, the type of the electrolyte is not particularly limited, and liquid electrolyte, gel polymer electrolyte or inorganic solid electrolyte can be used.
在一些实施方案中,所述电解质与介质层接触,并提供用于使电致变色材料变色或脱色的离子,例如氢离子或锂离子的移动环境的材料。In some embodiments, the electrolyte is in contact with the dielectric layer, and provides a material in a mobile environment for discoloring or decolorizing the electrochromic material, such as hydrogen ions or lithium ions.
在一些实施方案中,所述电解质可以包含一种或更多种化合物,例如含有H +、Li +、Al 3+、Na +、K +、Rb +、Ca 2+,Zn 2+、Mg 2+或Cs +的化合物。在一个实施案例中,电解质层可以包含锂盐化合物,例如LiClO 4、LiBF 4、LiAsF 6或LiPF 6。包含在电解质中的离子可以在根据施加的电压的极性被嵌入或移出介质层时对器件的变色或光透射率变化发挥作用。 In some embodiments, the electrolyte may contain one or more compounds, for example containing H + , Li + , Al 3+ , Na + , K + , Rb + , Ca 2+ , Zn 2+ , Mg 2 + Or Cs + compound. In one embodiment, the electrolyte layer may include a lithium salt compound, such as LiClO 4 , LiBF 4 , LiAsF 6 or LiPF 6 . The ions contained in the electrolyte can contribute to the discoloration of the device or the change in light transmittance when being inserted into or removed from the dielectric layer according to the polarity of the applied voltage.
在一些实施方案中,所述电解质可以是混合电解质,例如水系的LiCl、AlCl 3、HCl、MgCl 2、ZnCl 2等盐中两种或两种以上盐组成的混合电解质。在采用包含两种或更多种离子的电解液时,相比于采用仅含单种离子的电解液的情形,可以使得本申请前述实施例的多彩薄膜结构的颜色变化更为丰富,颜色饱和度更高。 In some embodiments, the electrolyte may be a mixed electrolyte, for example, a mixed electrolyte composed of two or more salts of water-based LiCl, AlCl 3 , HCl, MgCl 2 , ZnCl 2 and the like. When an electrolyte containing two or more kinds of ions is used, compared to the case of using an electrolyte containing only a single ion, the color change of the colorful film structure of the foregoing embodiment of the application can be more abundant, and the color is saturated. Degree higher.
在一些实施方案中,所述电解质可以是液态电解质,例如水系的LiCl、AlCl 3、HCl、H 2SO 4水溶液等。 In some embodiments, the electrolyte may be a liquid electrolyte, such as aqueous LiCl, AlCl 3 , HCl, and H 2 SO 4 aqueous solutions.
在一些实施方案中,所述电解质还可以包含碳酸酯化合物。由于基于碳酸酯的化合物具有高的介电常数,可以增加由锂盐提供的离子导电率。作为基于碳酸酯的化合物,可以使用以下的至少一种:PC(碳酸亚丙酯)、EC(碳酸亚乙酯)、DMC(碳酸二甲酯)、DEC(碳酸二乙酯)和EMC(碳酸乙基甲酯)。例如可以采用有机系的LiClO 4、Na(ClO 4) 3的碳酸丙烯酯电解液等。 In some embodiments, the electrolyte may further include a carbonate compound. Since the carbonate-based compound has a high dielectric constant, the ionic conductivity provided by the lithium salt can be increased. As the carbonate-based compound, at least one of the following can be used: PC (propylene carbonate), EC (ethylene carbonate), DMC (dimethyl carbonate), DEC (diethyl carbonate), and EMC (carbonic acid Ethyl methyl). For example, organic LiClO 4 , Na(ClO 4 ) 3 propylene carbonate electrolyte, etc. can be used.
在一些实施方案中,所述电解质可以是凝胶电解质,例如PMMA-PEG-LiClO 4,PVDF-PC-LiPF 6,LiCl/PVA,H 2SO 4/PVA等,但不限于此。 In some embodiments, the electrolyte may be a gel electrolyte, such as PMMA-PEG-LiClO 4 , PVDF-PC-LiPF 6 , LiCl/PVA, H 2 SO 4 /PVA, etc., but is not limited thereto.
在一些优选的实施方案中,当使用无机固体电解质作为所述电解质时,电解质可以包含LiPON或Ta 2O 5。例如,所述电解质可以但不限于为含Li的金属氧化物薄膜,比如LiTaO或LiPO等薄膜。此外,无机固体电解质可以为其中LiPON或Ta 2O 5被添加有诸如B、S和W等组分的电解质,例如可以是LiBO 2+Li 2SO 4、LiAlF 4、LiNbO 3、Li 2O-B 2O 3等。 In some preferred embodiments, when an inorganic solid electrolyte is used as the electrolyte, the electrolyte may include LiPON or Ta 2 O 5 . For example, the electrolyte may be, but is not limited to, a Li-containing metal oxide film, such as LiTaO or LiPO. In addition, the inorganic solid electrolyte may be an electrolyte in which LiPON or Ta 2 O 5 is added with components such as B, S, and W. For example, it may be LiBO 2 +Li 2 SO 4 , LiAlF 4 , LiNbO 3 , Li 2 OB 2 O 3 etc.
优选的,所述器件还包括离子存储层。Preferably, the device further includes an ion storage layer.
进一步的,所述离子存储层与所述电解质接触。Further, the ion storage layer is in contact with the electrolyte.
进一步的,所述对电极可以包括基底、透明导电层和离子存储层。Further, the counter electrode may include a substrate, a transparent conductive layer and an ion storage layer.
进一步的,所述离子存储层的材质可以选自但不限于NiO、Fe 2O 3、TiO 2、普鲁士蓝、IrO 2等。 Further, the material of the ion storage layer can be selected from but not limited to NiO, Fe 2 O 3 , TiO 2 , Prussian blue, IrO 2 and the like.
在一些实施方案中,所述对电极为透明或半透明的。In some embodiments, the counter electrode is transparent or translucent.
在一些实施方案中,所述工作电极内也可以包含透明导电电极等。所述透明导电电极可以通过包含具有高光透射率、低薄层电阻等特性的材料来形成,例如可以通过包含以下任一种来形成:选自ITO(铟锡氧化物)、FTO(氟掺杂的锡氧化物)、AZO(铝掺杂的锌氧化物)、GZO(镓掺杂的锌氧化物)、ATO(锑掺杂的锡氧化物)、IZO(铟掺杂的锌氧化物)、NTO(铌掺杂的钛氧化物)、ZnO、OMO(氧化物/金属/氧化物)和CTO的透明导电氧化物;银(Ag)纳米线;金属网;或OMO(氧化物金属氧化物)。In some embodiments, the working electrode may also include a transparent conductive electrode and the like. The transparent conductive electrode can be formed by including a material having characteristics such as high light transmittance and low sheet resistance. For example, it can be formed by including any one of the following: selected from ITO (indium tin oxide), FTO (fluorine doped Tin oxide), AZO (aluminum-doped zinc oxide), GZO (gallium-doped zinc oxide), ATO (antimony-doped tin oxide), IZO (indium-doped zinc oxide), Transparent conductive oxide of NTO (niobium doped titanium oxide), ZnO, OMO (oxide/metal/oxide) and CTO; silver (Ag) nanowires; metal mesh; or OMO (oxide metal oxide) .
形成所述透明导电电极或透明导电层的方法没有特别限制,可以使用任何已知的方法而没有限制。例如,可以通过诸如溅射或印刷(丝网印刷、凹版印刷、喷墨印刷等)的方法在玻璃基础层上形成包含透明导电氧化物颗粒的薄膜电极层。在真空方法的情况下,由此制备的电极层的厚度可以在10nm至500nm的范围内,而在印刷方法的情况下,厚度可以在0.1μm至20μm的范围内。在一个实例中,所述透明导电电极层的可见光透射率可以为70%至95%。The method of forming the transparent conductive electrode or the transparent conductive layer is not particularly limited, and any known method can be used without limitation. For example, a thin film electrode layer containing transparent conductive oxide particles can be formed on the glass base layer by a method such as sputtering or printing (screen printing, gravure printing, inkjet printing, etc.). In the case of the vacuum method, the thickness of the electrode layer thus prepared may be in the range of 10 nm to 500 nm, and in the case of the printing method, the thickness may be in the range of 0.1 μm to 20 μm. In an example, the visible light transmittance of the transparent conductive electrode layer may be 70% to 95%.
在一些优选的实施例中,所述电解质采用全固态的电解质,其可以配合为呈现为固态的介质层、第一光学结构层、第二光学结构层、对电极等组成形成全固态的多彩薄膜结构。例如,所述全固态多彩薄膜结构内的全固态电解质可以呈现为固态离子导电层的形式。此类全固态多彩薄膜结构的变色原理为:金属反射层与其他层材料构成金属-介质结构,并可还可以包括其他层,例如离子导电层、离子储存层和透明导电层等,通过调节其中各层材料的厚度至合适范围,可以制备出带有结构色的电致变色结构,进一步的,通过施加电压,可以调节电致变色材料的折射率,还可进一步调节全固态多彩薄膜结构的颜色。In some preferred embodiments, the electrolyte adopts an all-solid electrolyte, which can be combined to form a solid-state dielectric layer, a first optical structure layer, a second optical structure layer, and a counter electrode to form an all-solid colorful film. structure. For example, the all-solid electrolyte in the all-solid colorful film structure may be in the form of a solid ion conductive layer. The color change principle of this kind of all-solid colorful film structure is: the metal reflective layer and other layer materials constitute a metal-medium structure, and may also include other layers, such as ion conductive layer, ion storage layer, and transparent conductive layer, etc., by adjusting the If the thickness of each layer material is in the appropriate range, an electrochromic structure with structural color can be prepared. Further, by applying voltage, the refractive index of the electrochromic material can be adjusted, and the color of the all-solid colorful film structure can be further adjusted .
在一些实施方案中,除了通过调整第一光学结构层、第二光学结构层、介质层的厚度和/或材质等,从而调整所述多彩薄膜结构的颜色(结构色)之外,还可以通过调整施加在前述工作电极与对电极之间的电势差,以至少使介质层内电致变色材料的折射率变化,从而调控所述多彩薄膜结构的颜色。这个调控过程可以是动态的,如此实现了多彩的结构色与电致变色的融合,极大丰富了多彩薄膜结构的颜色调制。In some embodiments, in addition to adjusting the thickness and/or material of the first optical structure layer, the second optical structure layer, the dielectric layer, etc., to adjust the color (structure color) of the colorful film structure, you can also adjust The electric potential difference applied between the working electrode and the counter electrode is adjusted to at least change the refractive index of the electrochromic material in the dielectric layer, thereby adjusting the color of the colorful film structure. This control process can be dynamic, so that the fusion of colorful structural colors and electrochromic is realized, which greatly enriches the color modulation of colorful film structures.
当然,所述装置还可包括配合所述多彩薄膜结构的控制模块、电源模块等组件,这些附件组件可以是所述装置自带的或者另外增设的。Of course, the device may also include components such as a control module and a power supply module that cooperate with the colorful film structure, and these accessory components may be built-in or additionally added to the device.
在本申请的一些实施方案中,至少可以采用磁控溅射、离子镀、电子束蒸发、热蒸发、化学气相沉积、电化学沉积中的任一种方式制作形成前述的第一光学结构层、第二光学结构层、介质层等。In some embodiments of the present application, at least any one of magnetron sputtering, ion plating, electron beam evaporation, thermal evaporation, chemical vapor deposition, and electrochemical deposition can be used to form the aforementioned first optical structure layer, Second optical structure layer, medium layer, etc.
更为具体地,可以由磁控溅射、离子镀、电子束蒸发、热蒸发、化学气相沉积、电化学沉积等方式制备介质层,但不限于此。例如,可以采用激光直写、化学腐蚀等方式对金属材料等进行处理,从而形成所述介质层。More specifically, the dielectric layer can be prepared by magnetron sputtering, ion plating, electron beam evaporation, thermal evaporation, chemical vapor deposition, electrochemical deposition, etc., but it is not limited thereto. For example, the metal material can be processed by laser direct writing, chemical etching, etc., to form the dielectric layer.
更为具体地,可以由磁控溅射、离子镀、电子束蒸发、热蒸发、化学气相沉积等方式制备作为第一光学结构层、第二光学结构层等。More specifically, it can be prepared as the first optical structure layer, the second optical structure layer, etc. by magnetron sputtering, ion plating, electron beam evaporation, thermal evaporation, chemical vapor deposition, and the like.
此外,也可以通过涂布、印刷、铸膜、原子力沉积、溶胶凝胶技术等形成所述第一光学结构层或第二光学结构层、介质层等,且不限于此。In addition, the first optical structure layer, the second optical structure layer, the medium layer, etc. can also be formed by coating, printing, film casting, atomic force deposition, sol-gel technology, etc., and is not limited thereto.
本申请实施例还提供了一种图案化多彩薄膜的制作方法包括:The embodiment of the present application also provides a manufacturing method of the patterned colorful film, including:
提供一金属层;Provide a metal layer;
使所述一金属层的至少两个图形区域被原位氧化,从而在所述的至少两个图形区域内形成至少两个能呈现出不同颜色的介质层,其中每一介质层与一第一反射面和一第二反射面配合形成一光学腔,进而制得图案化多彩薄膜。At least two pattern areas of the one metal layer are oxidized in situ, thereby forming at least two dielectric layers capable of showing different colors in the at least two pattern areas, wherein each dielectric layer is connected to a first The reflection surface and a second reflection surface cooperate to form an optical cavity, and then a patterned colorful film is produced.
在一些实施方式中,所述的制作方法包括:在含氧气氛中,采用激光直写方式使所述至少一金属层的至少两个区域被原位氧化而形成至少两个不同介质层。In some embodiments, the manufacturing method includes: in an oxygen-containing atmosphere, using laser direct writing to oxidize at least two regions of the at least one metal layer in situ to form at least two different dielectric layers.
其中,所述的含氧气氛可以是氧气气氛,也可以是由氧气与其它非活泼气体(例如氮气、惰性气体等)的混合气氛,例如可以优选为空气气氛。Wherein, the oxygen-containing atmosphere may be an oxygen atmosphere, or a mixed atmosphere of oxygen and other inactive gases (for example, nitrogen, inert gas, etc.), for example, it may be preferably an air atmosphere.
在一些实施方式中,所述的制作方法还可包括:在激光直写过程中,至少通过调控激光功率和/或激光照射时间,使不同介质层的厚度和/或材质不同。In some embodiments, the manufacturing method may further include: in the laser direct writing process, at least the laser power and/or laser irradiation time are adjusted to make the thickness and/or material of different dielectric layers different.
请参阅图3所示,在本申请的一个典型实施案例中,一种图案化多彩薄膜的制作方法可以包括如下步骤:Please refer to FIG. 3. In a typical implementation case of the present application, a method for manufacturing a patterned colorful film may include the following steps:
提供一金属层,该金属层120设置在一基底110上,该金属层可以是通过物理/化学沉积方式(例如磁控溅射、电镀等)形成在基底表面,也可以是将自支撑的金属薄膜转移到基底表面形成;以及A metal layer is provided, and the metal layer 120 is disposed on a substrate 110. The metal layer can be formed on the surface of the substrate by physical/chemical deposition (such as magnetron sputtering, electroplating, etc.), or it can be a self-supporting metal The film is transferred to the substrate surface to form; and
提供激光直写设备,在含氧气氛中,使激光直写设备的激光头20发射的激光光束照射金属层上的预定区域(也可称为像素区域130),在此过程中,可以使激光头与金属层相对运动,其运动轨迹可以是线性的、二维的,也可以是三维的,从而将金属层上的各像素区域被原位氧化,从而形成图形化的介质层。Provide laser direct writing equipment. In an oxygen-containing atmosphere, the laser beam emitted by the laser head 20 of the laser direct writing equipment irradiates a predetermined area (also referred to as a pixel area 130) on the metal layer. In this process, the laser The head moves relative to the metal layer, and its movement track can be linear, two-dimensional, or three-dimensional, so that each pixel area on the metal layer is oxidized in situ to form a patterned dielectric layer.
其中,激光光束在金属层上形成的激光光斑可以是控制在微米级或亚微米级的。而激光光斑的形状可以是任意的,例如圆形、矩形,等等。Wherein, the laser spot formed by the laser beam on the metal layer can be controlled at the micron level or sub-micron level. The shape of the laser spot can be arbitrary, such as a circle, a rectangle, and so on.
其中,激光的功率、照射的时间、激光头与金属层的相对运动速度等均可以是依据实际应用的需求而适当调整的。例如,可以将相应的工艺条件控制在如下范围内:激光头与金属层的相对运动速度控制为2mm/s-20mm/s,连续激光功率为50W-500W,激光矩形光斑尺寸为 0.5mm×1mm-4mm×5mm,激光作用时间为1s-5s,离焦量为0.01mm-10mm,光斑搭接率10%-50%。Among them, the power of the laser, the irradiation time, the relative movement speed of the laser head and the metal layer, etc. can be adjusted appropriately according to the requirements of the actual application. For example, the corresponding process conditions can be controlled within the following range: the relative movement speed of the laser head and the metal layer is controlled to be 2mm/s-20mm/s, the continuous laser power is 50W-500W, and the laser rectangular spot size is 0.5mm×1mm -4mm×5mm, the laser action time is 1s-5s, the defocus amount is 0.01mm-10mm, and the spot overlap rate is 10%-50%.
前述激光直写过程可以在一个封闭容器中进行,也可以在空气中进行。The aforementioned laser direct writing process can be carried out in a closed container or in air.
本申请实施例的另一个方面提供的一种图案化多彩薄膜包括:Another aspect of the embodiments of the present application provides a patterned colorful film including:
由一金属层的至少两个图形区域被原位氧化形成的至少两个不同介质层;At least two different dielectric layers formed by in-situ oxidation of at least two pattern areas of a metal layer;
其中,每一介质层与一第一反射面和一第二反射面配合形成一光学腔,所述第一反射面为介质层的第一表面,所述第二反射面为介质层的第二表面与一第二光学结构层的结合界面,所述第一表面与第二表面相背对设置;Wherein, each dielectric layer cooperates with a first reflective surface and a second reflective surface to form an optical cavity, the first reflective surface is the first surface of the dielectric layer, and the second reflective surface is the second reflective surface of the dielectric layer. A bonding interface between the surface and a second optical structure layer, the first surface and the second surface are arranged opposite to each other;
在入射光入射所述光学腔时,于所述第一反射面形成的反射光和于所述第二反射面形成的反射光的相移
Figure PCTCN2019103280-appb-000042
d为所述介质层的厚度,
Figure PCTCN2019103280-appb-000043
为所述介质层的折射率,λ为所述入射光的波长,
Figure PCTCN2019103280-appb-000044
为所述入射光在透过第一反射面时的折射角。
When incident light enters the optical cavity, the phase shift between the reflected light formed on the first reflective surface and the reflected light formed on the second reflective surface
Figure PCTCN2019103280-appb-000042
d is the thickness of the dielectric layer,
Figure PCTCN2019103280-appb-000043
Is the refractive index of the medium layer, λ is the wavelength of the incident light,
Figure PCTCN2019103280-appb-000044
Is the refraction angle of the incident light when passing through the first reflecting surface.
进一步的,所述金属层的至少两个图形区域是通过激光直写方式被原位氧化而形成介质层的。Further, at least two pattern areas of the metal layer are oxidized in situ by laser direct writing to form a dielectric layer.
在本申请的前述实施例中,在进行激光直写的过程中,由于激光的光-热-化学效应,使金属层的各个图形区域被氧化,生成不同种类与不同厚度的金属氧化物薄膜,通过金属氧化物本身的颜色等,可以使不同介质层呈现出不同的颜色效果。In the foregoing embodiments of the present application, in the process of laser direct writing, due to the photo-thermo-chemical effect of the laser, each pattern area of the metal layer is oxidized to generate metal oxide films of different types and thicknesses. Through the color of the metal oxide itself, different dielectric layers can show different color effects.
进一步的,前述图形区域可以是文字、连续或不连续的图案等等,且不限于此。Further, the aforementioned graphic area may be text, continuous or discontinuous patterns, etc., and is not limited thereto.
进一步的,所述的介质层可以是由一种金属氧化物组成的薄膜结构,也可以是由多种金属氧化物复合形成的薄膜结构。Further, the dielectric layer can be a thin film structure composed of one metal oxide, or a thin film structure composed of multiple metal oxides.
在本申请实施例的一些实施方式中,可以在前述激光直写的过程中,通过调整激光光斑与金属层的相对移动速度,从而使金属层的不同图形区域被原位氧化的程度不同,进而使不同介质层的厚度和/或材质不同。In some implementations of the embodiments of the present application, the relative movement speed of the laser spot and the metal layer can be adjusted during the aforementioned laser direct writing process, so that different pattern areas of the metal layer are oxidized in situ to different degrees, and then Make the thickness and/or material of different dielectric layers different.
进一步,在前述激光直写的过程中,激光光斑的大小也是可以调整的,例如可以控制在亚微米级,从而使金属层上形成的图案像素可达到亚微米级,精度高,且可以避免出现杂色。Furthermore, in the aforementioned laser direct writing process, the size of the laser spot can also be adjusted, for example, it can be controlled at the sub-micron level, so that the patterned pixels formed on the metal layer can reach the sub-micron level with high accuracy and avoid occurrence Variegated.
而且,采用前述激光直写方式的优点还在于,其对于金属层的形态几乎是没有限制的,例如,所述金属层可以是连续的平面、曲面或其它不规则面。这使得最终形成的图案化多彩薄膜可以满足多种场景的应用需求。Moreover, the advantage of using the aforementioned laser direct writing method is that it has almost no limitation on the shape of the metal layer. For example, the metal layer may be a continuous plane, curved surface or other irregular surface. This allows the final patterned colorful film to meet the application requirements of a variety of scenarios.
在一些实施方式中,基于其中两个不同介质层的两个不同光学腔呈现的颜色不同。In some embodiments, two different optical cavities based on two different dielectric layers exhibit different colors.
在一些实施方式中,基于其中两个不同介质层的两个不同光学腔呈现的颜色也可以是相同的。In some embodiments, the colors presented by two different optical cavities based on two different dielectric layers may also be the same.
在一些实施方式中,其中两个不同介质层之间彼此间隔设置或者相互邻接。In some embodiments, two different dielectric layers are spaced apart from each other or adjacent to each other.
在一些实施方式中,所述第二光学结构层采用厚度在20nm以上的金属材料层,优选的,所述金属反射层的厚度为50~3000nm。In some embodiments, the second optical structure layer adopts a metal material layer with a thickness of 20 nm or more. Preferably, the thickness of the metal reflective layer is 50-3000 nm.
进一步的,本申请前述实施例提供的图案化多彩薄膜中,由入射光在第一反射面形成的反射光与由透过所述介质层的入射光在第二反射面形成的反射光干涉叠加。Further, in the patterned colorful film provided by the foregoing embodiment of the present application, the reflected light formed by the incident light on the first reflective surface and the reflected light formed on the second reflective surface by the incident light passing through the medium layer interfere and superimpose .
更进一步的,在一些实施方式中,若定义所述介质层第一表面上的媒介材料的折射率为
Figure PCTCN2019103280-appb-000045
则所述第一反射面的反射系数
Figure PCTCN2019103280-appb-000046
其中
Figure PCTCN2019103280-appb-000047
为入射光的入射角;以及,若定义所述介质层第二表面上的媒介材料的折射率为
Figure PCTCN2019103280-appb-000048
则所述第二反射面的反射系数
Figure PCTCN2019103280-appb-000049
其中
Figure PCTCN2019103280-appb-000050
为入射光在透过第二反射面时的折射角;主要由所述介质层和第二光学结构层组成的光学膜结构的反射系数表示为:
Figure PCTCN2019103280-appb-000051
反射率表示为:
Figure PCTCN2019103280-appb-000052
Furthermore, in some embodiments, if the refractive index of the media material on the first surface of the media layer is defined as
Figure PCTCN2019103280-appb-000045
Then the reflection coefficient of the first reflecting surface
Figure PCTCN2019103280-appb-000046
among them
Figure PCTCN2019103280-appb-000047
Is the angle of incidence of incident light; and, if the refractive index of the medium material on the second surface of the medium layer is defined as
Figure PCTCN2019103280-appb-000048
Then the reflection coefficient of the second reflecting surface
Figure PCTCN2019103280-appb-000049
among them
Figure PCTCN2019103280-appb-000050
Is the refraction angle of incident light when passing through the second reflecting surface; the reflection coefficient of the optical film structure mainly composed of the dielectric layer and the second optical structure layer is expressed as:
Figure PCTCN2019103280-appb-000051
The reflectivity is expressed as:
Figure PCTCN2019103280-appb-000052
进一步的,所述金属层的材质包括过渡金属,例如可以选自但不限于W、Ni、Ti、Nb、Fe、Co、Mo元素中的任意一种或多种的组合。Further, the material of the metal layer includes a transition metal, for example, it can be selected from but not limited to any one or a combination of W, Ni, Ti, Nb, Fe, Co, and Mo elements.
在一些实施方式中,所述第一反射面为介质层的第一表面与第一光学结构层的接合面,所述第一光学结构层的折射率为
Figure PCTCN2019103280-appb-000053
所述第二光学结构层的折射率为
Figure PCTCN2019103280-appb-000054
In some embodiments, the first reflective surface is the junction surface between the first surface of the dielectric layer and the first optical structure layer, and the refractive index of the first optical structure layer is
Figure PCTCN2019103280-appb-000053
The refractive index of the second optical structure layer is
Figure PCTCN2019103280-appb-000054
在一些实施方式中,所述第二光学结构层采用厚度大于0而小于20nm的金属材料层。In some embodiments, the second optical structure layer adopts a metal material layer with a thickness greater than 0 and less than 20 nm.
进一步地,由从第一光学结构层入射的入射光在所述第一表面形成的反射光与由透过所述介质层的入射光在第二表面形成的反射光干涉叠加。反之亦然,即,由从第二光学结构层入射的入射光在所述第二表面形成的反射光与由透过所述介质层的入射光在第一表面形成的反射光干涉叠加。Further, the reflected light formed on the first surface by the incident light incident from the first optical structure layer and the reflected light formed on the second surface by the incident light passing through the medium layer are interfered and superposed. The reverse is also true, that is, the reflected light formed on the second surface by the incident light incident from the second optical structure layer and the reflected light formed on the first surface by the incident light passing through the medium layer are interfered and superposed.
更进一步的,所述第一光学结构层的透射系数
Figure PCTCN2019103280-appb-000055
其中
Figure PCTCN2019103280-appb-000056
为入射光于第一表面的入射角,所述第二光学结构层的透射系数
Figure PCTCN2019103280-appb-000057
其中
Figure PCTCN2019103280-appb-000058
为入射光在透过第二表面时的折射角,主要由所述第一光学结构层、介质层和第二光学结构层组成的光学膜结构的透射系数表示为:
Figure PCTCN2019103280-appb-000059
透过率表示为:
Figure PCTCN2019103280-appb-000060
Furthermore, the transmission coefficient of the first optical structure layer
Figure PCTCN2019103280-appb-000055
among them
Figure PCTCN2019103280-appb-000056
Is the incident angle of incident light on the first surface, the transmission coefficient of the second optical structure layer
Figure PCTCN2019103280-appb-000057
among them
Figure PCTCN2019103280-appb-000058
Is the refraction angle of incident light when passing through the second surface, the transmission coefficient of the optical film structure mainly composed of the first optical structure layer, the medium layer and the second optical structure layer is expressed as:
Figure PCTCN2019103280-appb-000059
The transmittance is expressed as:
Figure PCTCN2019103280-appb-000060
进一步的,所述光学膜结构的透射系数、透过率同样适用于入射光从第二光学结构层入射所述光学腔情况。Further, the transmission coefficient and transmittance of the optical film structure are also applicable to the case where incident light enters the optical cavity from the second optical structure layer.
在一些实施方式中,所述第一光学结构层为金属材料层或者由气体组成。In some embodiments, the first optical structure layer is a metal material layer or is composed of gas.
在一些实施方式中,所述第一光学结构层的厚度优选为0~20nm。In some embodiments, the thickness of the first optical structure layer is preferably 0-20 nm.
进一步的,前述金属材料层的材质包括但不限于钨、金、银、铜、钛、铝、铬、铁、钴、镍、铂、锗、钯中的任意一种或多种的组合。Further, the material of the aforementioned metal material layer includes, but is not limited to, any one or a combination of tungsten, gold, silver, copper, titanium, aluminum, chromium, iron, cobalt, nickel, platinum, germanium, and palladium.
在一些实施方式中,主要由所述第一光学结构层、介质层和第二光学结构层组成的光学膜结构具有光学透射工作模式、光学反射工作模式或者光学透射及反射工作模式;其中,在所述光学反射工作模式下,所述光学膜结构具有双面不对称结构色,而在所述光学透射工作模式下,所述光学膜结构具有透明结构色。In some embodiments, the optical film structure mainly composed of the first optical structure layer, the medium layer and the second optical structure layer has an optical transmission working mode, an optical reflection working mode, or an optical transmission and reflection working mode; In the optical reflection working mode, the optical film structure has a double-sided asymmetric structural color, and in the optical transmission working mode, the optical film structure has a transparent structural color.
在一些实施方式中,所述介质层厚度为大于0而小于或等于2000nm,优选为50~2000nm,更优选为100~500nm,以使所述光学薄膜结构的颜色饱和度更高。In some embodiments, the thickness of the dielectric layer is greater than 0 and less than or equal to 2000 nm, preferably 50 to 2000 nm, and more preferably 100 to 500 nm, so that the color saturation of the optical film structure is higher.
进一步的,还可以在所述第一光学结构层或第二光学结构层与介质层之间增加优化介质层,以优化所述光学薄膜结构的颜色。Further, an optimized medium layer may be added between the first optical structure layer or the second optical structure layer and the medium layer to optimize the color of the optical film structure.
在一些实施方式中,还可以在所述介质层上增加薄层金属以优化图案化多彩薄膜的颜色。具体而言,对于某些材料或者合适厚度的图案化多彩薄膜,增加合适厚度的金属材料,可以提高反射率曲线的强度差,进而提高颜色的饱和度。其中,所述薄层金属的材质可以选自Ag、Al、Cu、Ni等,但不限于此。所述金属层的厚度可以优选为0~30nm,尤其优选为1~10nm。In some embodiments, a thin layer of metal may be added on the dielectric layer to optimize the color of the patterned colorful film. Specifically, for certain materials or patterned colorful films with a suitable thickness, adding a metal material with a suitable thickness can increase the intensity difference of the reflectance curve, thereby increasing the color saturation. Wherein, the material of the thin layer metal can be selected from Ag, Al, Cu, Ni, etc., but is not limited thereto. The thickness of the metal layer may preferably be 0 to 30 nm, particularly preferably 1 to 10 nm.
在一些实施方式中,还可以在介质层上增加半导体材料优化图案化多彩薄膜的颜色。对于一些特定的材料或者厚度的图案化多彩薄膜,增加合适厚度的半导体材料,可以提高反射率曲线的强度差,进而提高颜色的饱和度。其中,所述半导体可以选自Al 2O 3、SiO 2、ZnS、MgF 2、氮化硅等,但不限于此。所述半导体的厚度可以优选为0~300nm,尤其优选为1~100nm。 In some embodiments, a semiconductor material may be added on the dielectric layer to optimize the color of the patterned colorful film. For patterned colorful films with specific materials or thicknesses, adding a suitable thickness of semiconductor materials can increase the intensity difference of the reflectance curve, thereby increasing the color saturation. Wherein, the semiconductor may be selected from Al 2 O 3 , SiO 2 , ZnS, MgF 2 , silicon nitride, etc., but is not limited thereto. The thickness of the semiconductor may preferably be 0 to 300 nm, particularly preferably 1 to 100 nm.
进一步的,还可以在所述第一光学结构层或第二光学结构层上增加优化介质层,或者,也可以将所述第一光学结构层或第二光学结构层设置在优化介质层上,以优化所述图案化多彩薄膜的颜色。Further, an optimized medium layer may be added to the first optical structure layer or the second optical structure layer, or the first optical structure layer or the second optical structure layer may also be arranged on the optimized medium layer, To optimize the color of the patterned colorful film.
在一些实施方式中,所述第一光学结构层或第二光学结构层还与基底结合。In some embodiments, the first optical structure layer or the second optical structure layer is further combined with a substrate.
进一步的,前述优化介质层可以设置在所述第一光学结构层或第二光学结构层与基底之间。Further, the aforementioned optimized medium layer may be disposed between the first optical structure layer or the second optical structure layer and the substrate.
进一步的,所述优化介质层的材质包括但不仅限于WO 3、NiO、TiO 2、Nb 2O 5、Fe 2O 3、V 2O 5、Co 2O 3、Y 2O 3、Cr 2O 3、MoO 3、Al 2O 3、SiO 2、MgO、ZnO、MnO 2、CaO、ZrO 2、Ta 2O 5、Y 3Al 5O 12、Er 2O 3、ZnS、MgF 2、SiN x(氮化硅)等,但不限于此。 Further, the material of the optimized dielectric layer includes but not limited to WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , Cr 2 O 3. MoO 3 , Al 2 O 3 , SiO 2 , MgO, ZnO, MnO 2 , CaO, ZrO 2 , Ta 2 O 5 , Y 3 Al 5 O 12 , Er 2 O 3 , ZnS, MgF 2 , SiN x ( Silicon nitride), but not limited to this.
进一步的,所述优化介质层的厚度优选为0~2000nm,优选为100~500nm。Further, the thickness of the optimized dielectric layer is preferably 0-2000 nm, preferably 100-500 nm.
其中,所述基底为透明或半透明的。Wherein, the substrate is transparent or translucent.
进一步的,所述基底的材质包括但不限于金属、玻璃、有机玻璃、PET、PES、PEN、PC、PMMA、PDMS中的任意一种或多种的组合。Further, the material of the substrate includes but is not limited to any one or a combination of metal, glass, organic glass, PET, PES, PEN, PC, PMMA, and PDMS.
在一些实施方案中,所述基底上还设置有导电层。其中,所述导电层包括FTO、ITO、Ag纳米线、Ag纳米网栅、碳纳米管、石墨烯中的任意一种或多种的组合,且不限于此。In some embodiments, a conductive layer is also provided on the substrate. Wherein, the conductive layer includes any one or a combination of FTO, ITO, Ag nanowire, Ag nano grid, carbon nanotube, and graphene, and is not limited thereto.
在一些实施方式中,所述第一光学结构层与基底一体设置。In some embodiments, the first optical structure layer is integrated with the substrate.
本申请实施例的另一个方面提供的一种多彩电致变色结构包含工作电极、电解质和对电极,所述工作电极包括前述的任一种图案化多彩薄膜。Another aspect of the embodiments of the present application provides a colorful electrochromic structure comprising a working electrode, an electrolyte and a counter electrode, and the working electrode includes any of the aforementioned patterned colorful films.
进一步的,所述电解质的类型没有特别限制,可以使用液体电解质、凝胶聚合物电解质或无机固体电解质。在一些实施方式中,所述电解质与介质层接触,并提供用于使作为电致变色材料的金属氧化物变色或脱色的离子,例如氢离子或锂离子的移动环境的材料。Further, the type of the electrolyte is not particularly limited, and liquid electrolyte, gel polymer electrolyte or inorganic solid electrolyte can be used. In some embodiments, the electrolyte is in contact with the dielectric layer, and provides a material for a mobile environment for discoloring or decolorizing metal oxides as electrochromic materials, such as hydrogen ions or lithium ions.
在一些实施例中,所述电解质可以包含一种或更多种化合物,例如含有H +、Li +、Al 3+、Na +、K +、Rb +或Cs +的化合物。在一个实例中,电解质层可以包含锂盐化合物,例如LiClO 4、LiBF 4、LiAsF 6或LiPF 6。包含在电解质中的离子可以在根据施加的电压的极性被嵌入或移出介质层时对装置的变色或光透射率变化发挥作用。 In some embodiments, the electrolyte may include one or more compounds, such as compounds containing H + , Li + , Al 3+ , Na + , K + , Rb + or Cs + . In one example, the electrolyte layer may include a lithium salt compound, such as LiClO 4 , LiBF 4 , LiAsF 6 or LiPF 6 . The ions contained in the electrolyte may exert an effect on the discoloration of the device or the change in light transmittance when being inserted into or removed from the dielectric layer according to the polarity of the applied voltage.
在一些实施例中,所述电解质可以是液态电解质,例如水系的LiCl、AlCl 3、HCl、H 2SO 4水溶液等。 In some embodiments, the electrolyte may be a liquid electrolyte, such as aqueous LiCl, AlCl 3 , HCl, and H 2 SO 4 aqueous solutions.
在一些实施例中,所述电解质可以是混合电解质,例如水系的LiCl、AlCl 3、HCl、MgCl 2、ZnCl 2等盐中两种或两种以上盐组成的混合电解质。在采用包含两种或更多种离子的电 解液时,相比于采用仅含单种离子的电解液的情形,可以使得本申请前述实施例的电致变色结构的颜色变化更为丰富,颜色饱和度更高。 In some embodiments, the electrolyte may be a mixed electrolyte, for example, a mixed electrolyte composed of two or more salts of water-based LiCl, AlCl 3 , HCl, MgCl 2 , and ZnCl 2 . When an electrolyte containing two or more kinds of ions is used, compared to the case of using an electrolyte containing only a single ion, the color changes of the electrochromic structure of the foregoing embodiments of the present application can be more abundant. The saturation is higher.
在一些实施例中,所述电解质还可以包含碳酸酯化合物基电解质。基于碳酸酯的化合物具有高的介电常数,可以增加由锂盐提供的离子导电率。作为碳酸酯的化合物,可以使用以下的至少一种:PC(碳酸亚丙酯)、EC(碳酸亚乙酯)、DMC(碳酸二甲酯)、DEC(碳酸二乙酯)和EMC(碳酸乙基甲酯)。例如可以采用有机系的LiClO 4、Na(ClO 4) 3的碳酸丙烯酯电解液等。 In some embodiments, the electrolyte may further include a carbonate compound-based electrolyte. The carbonate-based compound has a high dielectric constant and can increase the ionic conductivity provided by the lithium salt. As the carbonate compound, at least one of the following can be used: PC (propylene carbonate), EC (ethylene carbonate), DMC (dimethyl carbonate), DEC (diethyl carbonate), and EMC (ethylene carbonate) Methyl ester). For example, organic LiClO 4 , Na(ClO 4 ) 3 propylene carbonate electrolyte, etc. can be used.
在一些实施方式中,所述电解质可以是凝胶电解质,例如PMMA-PEG-LiClO 4,PVDF-PC-LiPF 6等,但不限于此。 In some embodiments, the electrolyte may be a gel electrolyte, such as PMMA-PEG-LiClO 4 , PVDF-PC-LiPF 6, etc., but is not limited thereto.
在一些优选的实施方式中,当使用无机固体电解质作为所述电解质时,电解质可以包含LiPON或Ta 2O 5。例如,所述电解质可以但不限于为含Li的金属氧化物薄膜,比如LiTaO或LiPO等薄膜。此外,无机固体电解质可以为其中LiPON或Ta 2O 5被添加有诸如B、S和W等组分的电解质,例如可以是LiBO 2+Li 2SO 4、LiAlF 4、LiNbO 3、Li 2O-B 2O 3等。 In some preferred embodiments, when an inorganic solid electrolyte is used as the electrolyte, the electrolyte may include LiPON or Ta 2 O 5 . For example, the electrolyte may be, but is not limited to, a Li-containing metal oxide film, such as LiTaO or LiPO. In addition, the inorganic solid electrolyte may be an electrolyte in which LiPON or Ta 2 O 5 is added with components such as B, S, and W. For example, it may be LiBO 2 +Li 2 SO 4 , LiAlF 4 , LiNbO 3 , Li 2 OB 2 O 3 etc.
在一些优选的实施例中,所述电解质采用全固态的电解质,其可以配合为呈现为固态的图案化多彩薄膜、对电极等组成形成全固态的多彩电致变色结构。In some preferred embodiments, the electrolyte adopts an all-solid electrolyte, which can be combined into a solid-state patterned colorful film, a counter electrode, etc., to form an all-solid colorful electrochromic structure.
在一些实施方式中,作为第一光学结构层的金属材料层还可以还作为所述介质层的集流体。因此,所述金属材料层可以优选由具有高导电率的金属材料形成,例如可以由具有高导电率的材料例如银(Ag)或铜(Cu)形成。In some embodiments, the metal material layer serving as the first optical structure layer may also serve as a current collector of the dielectric layer. Therefore, the metal material layer may preferably be formed of a metal material having high conductivity, for example, may be formed of a material having high conductivity such as silver (Ag) or copper (Cu).
在一些实施方式中,所述对电极与介质层之间还设有离子存储层,其材质可以选自但不限于NiO、Fe 2O 3、TiO 2等。所述离子存储层与所述电解质接触。 In some embodiments, an ion storage layer is further provided between the counter electrode and the dielectric layer, and its material can be selected from but not limited to NiO, Fe 2 O 3 , TiO 2 and the like. The ion storage layer is in contact with the electrolyte.
在一些实施方式中,所述对电极可以采用透明导电电极,其可以通过包含具有高光透射率、低薄层电阻等特性的材料形成,例如可以通过包含以下任一种来形成:选自ITO(铟锡氧化物)、FTO(氟掺杂的锡氧化物)、AZO(铝掺杂的锌氧化物)、GZO(镓掺杂的锌氧化物)、ATO(锑掺杂的锡氧化物)、IZO(铟掺杂的锌氧化物)、NTO(铌掺杂的钛氧化物)、ZnO、OMO(氧化物/金属/氧化物)和CTO的透明导电氧化物;银(Ag)纳米线;金属网;或OMO(氧化物金属氧化物)。In some embodiments, the counter electrode may be a transparent conductive electrode, which may be formed by including a material having characteristics such as high light transmittance and low sheet resistance. For example, it may be formed by including any of the following: selected from ITO ( Indium tin oxide), FTO (fluorine-doped tin oxide), AZO (aluminum-doped zinc oxide), GZO (gallium-doped zinc oxide), ATO (antimony-doped tin oxide), Transparent conductive oxides of IZO (indium-doped zinc oxide), NTO (niobium-doped titanium oxide), ZnO, OMO (oxide/metal/oxide) and CTO; silver (Ag) nanowires; metal Mesh; or OMO (Oxide Metal Oxide).
形成所述透明导电电极的方法没有特别限制,可以使用任何已知的方法而没有限制。例如,可以通过诸如溅射或印刷(丝网印刷、凹版印刷、喷墨印刷等)的方法在玻璃基础层上形成包含透明导电氧化物颗粒的薄膜电极层。在真空方法的情况下,由此制备的电极层的厚度可以 在10nm至500nm的范围内,而在印刷方法的情况下,厚度可以在0.1μm至20μm的范围内。在一个实例中,所述透明导电电极层的可见光透射率可以为70%至95%。The method of forming the transparent conductive electrode is not particularly limited, and any known method can be used without limitation. For example, a thin film electrode layer containing transparent conductive oxide particles can be formed on the glass base layer by a method such as sputtering or printing (screen printing, gravure printing, inkjet printing, etc.). In the case of the vacuum method, the thickness of the electrode layer thus prepared may be in the range of 10 nm to 500 nm, and in the case of the printing method, the thickness may be in the range of 0.1 m to 20 m. In an example, the visible light transmittance of the transparent conductive electrode layer may be 70% to 95%.
本申请实施例的另一个方面还提供了所述多彩电致变色结构的调控方法,其包括:Another aspect of the embodiments of the present application also provides a method for adjusting and controlling the colorful electrochromic structure, which includes:
将工作电极、对电极与电源连接形成工作电路;Connect the working electrode and the counter electrode to the power source to form a working circuit;
调整工作电极与对电极之间的电势差,以至少使介质层内作为电致变色材料的金属氧化物的折射率变化,从而调控所述多彩电致变色结构的颜色。The potential difference between the working electrode and the counter electrode is adjusted to at least change the refractive index of the metal oxide as the electrochromic material in the dielectric layer, thereby adjusting the color of the colorful electrochromic structure.
其中,所述多彩电致变色结构的工作电压可以依据实际情况而调整,例如可以是-4V~4V,但不限于此。Wherein, the working voltage of the colorful electrochromic structure can be adjusted according to actual conditions, for example, it can be -4V to 4V, but is not limited to this.
在本申请的前述实施方式中,所述多彩电致变色结构将图案化多彩薄膜的结构色与电致变色融合,丰富电致变色结构的颜色调制,实现多彩色的动态调控。具体而言,可以通过调整图案化多彩薄膜中第一光学结构层、第二光学结构层及介质层等的厚度、材质等得到丰富多彩的结构色。同时,将所述图案化多彩薄膜用作工作电极,通过施加电压,使介质层中作为电致变色材料的金属氧化物的折射率变化(可以是因电解质层中的离子插入或脱出电致变色材料而引起),导致介质层的光学参数改变,带来颜色的改变,最终能实现电致变色的多种工作模式(例如前述的反射/透射双模式)和绚丽丰富的颜色调制。In the foregoing embodiments of the present application, the colorful electrochromic structure integrates the structural color of the patterned colorful film with electrochromic, enriches the color modulation of the electrochromic structure, and realizes multi-color dynamic control. Specifically, the colorful structural colors can be obtained by adjusting the thickness and material of the first optical structure layer, the second optical structure layer, and the dielectric layer in the patterned colorful film. At the same time, the patterned colorful film is used as a working electrode, and by applying a voltage, the refractive index of the metal oxide as an electrochromic material in the dielectric layer is changed (which can be caused by the insertion or extraction of ions in the electrolyte layer of the electrochromic It is caused by the material), resulting in the change of the optical parameters of the medium layer and the change of the color, and finally can realize multiple working modes of electrochromism (such as the aforementioned dual mode of reflection/transmission) and brilliant and rich color modulation.
本申请实施例还提供了所述图案化多彩薄膜或所述多彩电致变色结构的用途,例如在电子设备、光学设备、建筑、汽车、艺术装饰、滤光片、防伪、太阳能电池、显示器、LED屏、通信、传感、照明等领域的应用。The embodiments of the application also provide the use of the patterned colorful film or the colorful electrochromic structure, for example in electronic equipment, optical equipment, construction, automobiles, art decoration, filters, anti-counterfeiting, solar cells, displays, LED screen, communication, sensor, lighting and other fields.
本申请实施例的另一个方面还提供了一种装置,其包括所述的多彩电致变色结构。进一步的,所述装置还包括电源,所述电源能与所述多彩电致变色结构电连接形成工作回路。Another aspect of the embodiments of the present application also provides a device, which includes the colorful electrochromic structure. Further, the device further includes a power supply, which can be electrically connected with the colorful electrochromic structure to form a working circuit.
在一些实施方案中,所述的装置还可包括附加的封装结构、控制模块、电源模块等组件,这些附件组件可以常规方式与所述多彩电致变色结构结合。In some embodiments, the device may also include additional packaging structures, control modules, power modules, and other components, and these accessory components may be combined with the colorful electrochromic structure in a conventional manner.
所述装置包括但不限于机械设备、光电设备、电子设备、建筑物、交通工具以及户外广告牌等,且不限于此。The device includes, but is not limited to, mechanical equipment, optoelectronic equipment, electronic equipment, buildings, vehicles, outdoor billboards, etc., and is not limited thereto.
以下通过若干实施例并结合附图进一步详细说明本申请的技术方案。然而,所选的实施例仅用于说明本申请,而不限制本申请的范围。The technical solution of the present application will be further described in detail below through several embodiments in conjunction with the drawings. However, the selected embodiments are only used to illustrate the application, and do not limit the scope of the application.
实施例1:Example 1:
该实施例提供的一种光学薄膜结构包括第一光学结构层、第二光学结构层、介质层和基底层,其可以参阅图1所示。An optical film structure provided in this embodiment includes a first optical structure layer, a second optical structure layer, a medium layer, and a base layer, which can be referred to as shown in FIG. 1.
其中,第一光学结构层为空气,第二光学结构为金属钨(W)层,介质层由氧化钨形成,而基底层可以是PET膜。The first optical structure layer is air, the second optical structure is a metal tungsten (W) layer, the dielectric layer is formed of tungsten oxide, and the base layer may be a PET film.
该光学薄膜结构的制备方法如下:在干净的PET衬底上,先通过磁控溅射方法溅射一层钨膜,优选的,钨膜的厚度选择溅射为约10nm。之后在钨膜上再通过磁控溅射溅射一层氧化钨层。优选的,氧化钨层的厚度设置在100nm~400nm。The preparation method of the optical thin film structure is as follows: On a clean PET substrate, a layer of tungsten film is sputtered by a magnetron sputtering method. Preferably, the thickness of the tungsten film is selected to be about 10 nm by sputtering. Then, a tungsten oxide layer is sputtered on the tungsten film by magnetron sputtering. Preferably, the thickness of the tungsten oxide layer is set at 100 nm to 400 nm.
当然,前述的钨膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。前述的氧化钨层可以采用电子束蒸发、热蒸发、电化学沉积、溶胶凝胶技术等业界已知的方式制备。Of course, the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation. The aforementioned tungsten oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, electrochemical deposition, sol-gel technology, and the like.
参阅图3所示,控制氧化钨层的厚度不同,从第一光学结构层一侧方向看,可以得到反射丰富绚丽颜色的光学薄膜结构。Referring to FIG. 3, the thickness of the tungsten oxide layer is controlled to be different. From the side of the first optical structure layer, an optical thin film structure with rich and brilliant colors can be obtained.
参阅图4所示,不同氧化钨厚度下(图3中),从基底层方向看,其对应反射颜色也呈现丰富绚丽的颜色,且这种颜色与从第一光学结构层方向看得到的颜色截然不同。Referring to Figure 4, under different tungsten oxide thicknesses (in Figure 3), from the direction of the base layer, the corresponding reflection color also presents a rich and brilliant color, and this color is the same as the color seen from the direction of the first optical structure layer Quite different.
参阅图5所示,图3所示不同氧化钨厚度下,透过本实施例光学薄膜结构,可以得到透射结构色,所述的透射结构色同样呈现出丰富绚丽的颜色。因此,本实施例光学薄膜结构的透射颜色的透过率由金属钨层和氧化钨层厚度决定。Referring to FIG. 5, under different tungsten oxide thicknesses shown in FIG. 3, through the optical film structure of this embodiment, a transmission structure color can be obtained, and the transmission structure color also presents a rich and brilliant color. Therefore, the transmittance of the transmission color of the optical film structure of this embodiment is determined by the thickness of the metal tungsten layer and the tungsten oxide layer.
对照例1:Comparative example 1:
该对照例提供的一种光学薄膜结构包括第一光学结构层、第二光学结构层、介质层和基底层。The optical film structure provided by the comparative example includes a first optical structure layer, a second optical structure layer, a medium layer and a base layer.
其中,第一光学结构层为空气,第二光学结构不存在(无钨膜),介质层由氧化钨形成,而基底层可以是PET膜。Among them, the first optical structure layer is air, the second optical structure does not exist (no tungsten film), the dielectric layer is formed of tungsten oxide, and the base layer may be a PET film.
该光学薄膜结构的制备方法如下:在干净的PET衬底上,通过磁控溅射溅射一层氧化钨层,优选的,氧化钨层的厚度设置在100nm~400nm。The preparation method of the optical thin film structure is as follows: on a clean PET substrate, a tungsten oxide layer is sputtered by magnetron sputtering. Preferably, the thickness of the tungsten oxide layer is set at 100 nm to 400 nm.
控制氧化钨层的厚度不同,从第一光学结构层一侧方向看,得到的是透明无颜色的光学薄膜结构。The thickness of the tungsten oxide layer is controlled to be different, and when viewed from one side of the first optical structure layer, a transparent and colorless optical film structure is obtained.
不同氧化钨厚度下,从基底层方向看,其对应颜色也为透明无颜色,且这种颜色与从第一光学结构层方向看得到的颜色完全相同。Under different thicknesses of tungsten oxide, the corresponding color is also transparent and colorless when viewed from the direction of the base layer, and this color is exactly the same as the color viewed from the direction of the first optical structure layer.
不同氧化钨厚度下,透过本对照例光学薄膜结构,得到的仍是透明无颜色的光学薄膜结构。Under different thicknesses of tungsten oxide, through the optical film structure of this comparative example, a transparent and colorless optical film structure is still obtained.
对照例2:Comparative Example 2:
该对照例提供的一种光学薄膜结构包括第一光学结构层、第二光学结构层、介质层和基底层。The optical film structure provided by the comparative example includes a first optical structure layer, a second optical structure layer, a medium layer and a base layer.
其中,第一光学结构层为空气,第二光学结构为金属钨(W)层,介质层由氧化钨形成,而基底层可以是PET膜。The first optical structure layer is air, the second optical structure is a metal tungsten (W) layer, the dielectric layer is formed of tungsten oxide, and the base layer may be a PET film.
该光学薄膜结构的制备方法如下:在干净的PET衬底上,先通过磁控溅射方法溅射一层钨膜,优选的,钨膜的厚度选择溅射为约100nm。之后在钨膜上再通过磁控溅射溅射一层氧化钨层,优选的,氧化钨层的厚度设置在100nm~400nm。The preparation method of the optical thin film structure is as follows: On a clean PET substrate, a layer of tungsten film is sputtered by a magnetron sputtering method. Preferably, the thickness of the tungsten film is selected to be about 100 nm by sputtering. After that, a tungsten oxide layer is sputtered on the tungsten film by magnetron sputtering. Preferably, the thickness of the tungsten oxide layer is set at 100 nm to 400 nm.
当然,前述的钨膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。前述的氧化钨层可以采用电子束蒸发、热蒸发、电化学沉积、溶胶凝胶技术等业界已知的方式制备。Of course, the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation. The aforementioned tungsten oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, electrochemical deposition, sol-gel technology, and the like.
控制氧化钨层的厚度不同,从第一光学结构层一侧方向看,可以得到反射丰富绚丽颜色的光学薄膜结构。The thickness of the tungsten oxide layer is controlled to be different, and when viewed from the side of the first optical structure layer, an optical film structure with rich and brilliant colors can be obtained.
不同氧化钨厚度下,从基底层方向看,其对应反射颜色仅呈现出金属钨膜的颜色(银白色)。Under different tungsten oxide thicknesses, when viewed from the direction of the base layer, the corresponding reflection color only presents the color of the metallic tungsten film (silver white).
不同氧化钨厚度下,透过本对照例光学薄膜结构,发现无透过性。Under different thicknesses of tungsten oxide, through the optical thin film structure of this comparative example, no permeability is found.
实施例2:Example 2:
该实施例提供的一种光学薄膜结构包括第一光学结构层、第二光学结构层、介质层和基底层,其可以参阅图1所示。An optical film structure provided in this embodiment includes a first optical structure layer, a second optical structure layer, a medium layer, and a base layer, which can be referred to as shown in FIG. 1.
其中,第一光学结构层为空气,第二光学结构为金属银(Ag)层,介质层由二氧化钛形成,而基底层可以是PET膜。Wherein, the first optical structure layer is air, the second optical structure is a metallic silver (Ag) layer, the dielectric layer is formed of titanium dioxide, and the base layer may be a PET film.
该光学薄膜结构的制备方法如下:在干净的PET衬底上,先通过磁控溅射方法溅射一层银膜,优选的,银膜的厚度选择溅射为约2nm。之后在钨膜上再通过磁控溅射溅射一层二氧化钛层,优选的,二氧化钛层的厚度设置在100nm~400nm。The preparation method of the optical thin film structure is as follows: on a clean PET substrate, a layer of silver film is sputtered by a magnetron sputtering method. Preferably, the thickness of the silver film is selected to be about 2 nm by sputtering. After that, a layer of titanium dioxide is sputtered on the tungsten film by magnetron sputtering. Preferably, the thickness of the titanium dioxide layer is set at 100 nm to 400 nm.
当然,前述的银膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。前述的二氧化钛层可以采用电子束蒸发、热蒸发、电化学沉积、溶胶凝胶技术等业界已知的方式制备。Of course, the aforementioned silver film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation. The aforementioned titanium dioxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, electrochemical deposition, and sol-gel technology.
本实施例光学薄膜结构展示出与实施例1光学薄膜结构类似的性质,即,从两侧面观察,呈现出不同的颜色。另外还具有透射结构色。The optical film structure of this embodiment exhibits similar properties to the optical film structure of Embodiment 1, that is, when viewed from two sides, it exhibits different colors. It also has a transmissive structural color.
实施例3:Example 3:
该实施例提供的一种光学薄膜结构包括依次在基底上形成的第一介质层、第二光学结构层、第二介质层、第一光学结构层。An optical film structure provided in this embodiment includes a first medium layer, a second optical structure layer, a second medium layer, and a first optical structure layer sequentially formed on a substrate.
其中,增加的第二介质层可提高颜色亮度与饱和度。Among them, the added second medium layer can improve color brightness and saturation.
参见图6所示,所述光学薄膜结构的第一光学结构层为空气,第二光学结构层为金属钨(W),第一、第二介质层由氧化钨形成,而基底层可以是PET膜。As shown in FIG. 6, the first optical structure layer of the optical film structure is air, the second optical structure layer is metal tungsten (W), the first and second dielectric layers are formed of tungsten oxide, and the base layer may be PET membrane.
该光学薄膜结构的制备方法如下:在干净的PET衬底上,先通过磁控溅射方法溅射一层氧化钨层,优选的,氧化钨层的厚度设置在1nm~400nm。然后再通过磁控溅射方法溅射一层钨膜,优选的,钨膜的厚度为约10nm。之后在钨膜上再通过磁控溅射溅射一层氧化钨层,优选的,氧化钨层的厚度设置在100nm~400nm。The preparation method of the optical thin film structure is as follows: on a clean PET substrate, a tungsten oxide layer is sputtered by a magnetron sputtering method. Preferably, the thickness of the tungsten oxide layer is set at 1 nm to 400 nm. Then a layer of tungsten film is sputtered by a magnetron sputtering method. Preferably, the thickness of the tungsten film is about 10 nm. After that, a tungsten oxide layer is sputtered on the tungsten film by magnetron sputtering. Preferably, the thickness of the tungsten oxide layer is set at 100 nm to 400 nm.
当然,前述的钨膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。前述的氧化钨层可以采用电子束蒸发、热蒸发、电化学沉积、溶胶凝胶技术等业界已知的方式制备。Of course, the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation. The aforementioned tungsten oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, electrochemical deposition, sol-gel technology, and the like.
参阅图7所示,控制钨层和PET基底之间的氧化钨层的厚度不同,从第一光学结构层一侧方向看,可以得到反射丰富绚丽颜色的光学薄膜结构。Referring to FIG. 7, the thickness of the tungsten oxide layer between the control tungsten layer and the PET substrate is different. From the side of the first optical structure layer, an optical film structure with rich and brilliant colors can be obtained.
参阅图8所示,在图7所示的不同氧化钨厚度下,从基底层一侧方向看,其对应反射颜色也呈现丰富绚丽的颜色,且这种颜色与从薄膜方向看得到的颜色截然不同。Referring to Figure 8, under the different tungsten oxide thicknesses shown in Figure 7, the corresponding reflection color also presents a rich and brilliant color from the side of the base layer, and this color is completely different from the color seen from the film direction different.
再请参阅图9所示,在图7所示的不同氧化钨厚度下,透过所述光学薄膜结构,可以得到透射结构色,所述的透射结构色同样呈现出丰富绚丽的颜色,所述光学薄膜结构的透射颜色的透过率由金属钨层和氧化钨层厚度决定。Please refer to FIG. 9 again. Under the different tungsten oxide thicknesses shown in FIG. 7, the transmission structure color can be obtained through the optical film structure, and the transmission structure color also presents rich and brilliant colors. The transmittance of the transmission color of the optical film structure is determined by the thickness of the metal tungsten layer and the tungsten oxide layer.
实施例4:Example 4:
该实施例提供的一种光学薄膜结构包括依次在基底上形成的第二光学结构层、介质层、第一光学结构层。An optical film structure provided by this embodiment includes a second optical structure layer, a medium layer, and a first optical structure layer formed on a substrate in sequence.
其中,第一光学结构层为金属钨(W)膜,第二光学结构层为金属铝(Al)膜,介质层由硫化锌(ZnS)形成,而基底层可以是PET膜。Among them, the first optical structure layer is a metal tungsten (W) film, the second optical structure layer is a metal aluminum (Al) film, the dielectric layer is formed of zinc sulfide (ZnS), and the base layer may be a PET film.
该光学薄膜结构的制备方法如下:在干净的PET衬底上,先通过磁控溅射方法溅射一层金属铝膜,优选的,铝膜的厚度设置在15nm。然后再通过磁控溅射方法溅射一层硫化锌层,优选 的,硫化锌的厚度选择溅射为100nm~400nm。之后在硫化锌层上再通过磁控溅射溅射一层钨膜层,优选的,钨膜层的厚度设置在0~50nm。The preparation method of the optical thin film structure is as follows: on a clean PET substrate, a layer of metal aluminum film is sputtered by a magnetron sputtering method. Preferably, the thickness of the aluminum film is set at 15 nm. Then, a zinc sulfide layer is sputtered by a magnetron sputtering method. Preferably, the thickness of the zinc sulfide is selected to be 100 nm to 400 nm by sputtering. Afterwards, a tungsten film layer is sputtered on the zinc sulfide layer by magnetron sputtering. Preferably, the thickness of the tungsten film layer is set to 0-50 nm.
当然,前述的钨膜和铝膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。前述的硫化锌层可以采用电子束蒸发、热蒸发、电化学沉积、溶胶凝胶技术等业界已知的方式制备。本实施例光学薄膜结构从两侧面观察会呈现出不同的颜色,另外还具有透射结构色。Of course, the aforementioned tungsten film and aluminum film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation. The aforementioned zinc sulfide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, electrochemical deposition, and sol-gel technology. The optical film structure of this embodiment shows different colors when viewed from two sides, and also has a transmission structure color.
实施例5:Example 5:
该实施例提供的一种光学薄膜结构包括依次在基底上形成的第二光学结构层、介质层、第一光学结构层。An optical film structure provided by this embodiment includes a second optical structure layer, a medium layer, and a first optical structure layer formed on a substrate in sequence.
其中,第一光学结构层为空气,第二光学结构层为金属铝(Al)膜,介质层由硅单质形成,而基底层可以是PET膜。Wherein, the first optical structure layer is air, the second optical structure layer is a metal aluminum (Al) film, the dielectric layer is formed of silicon simple substance, and the base layer may be a PET film.
该光学薄膜结构的制备方法如下:在干净的PET衬底上,先通过磁控溅射方法溅射一层金属铝膜,优选的,铝膜的厚度设置在5nm。然后再通过磁控溅射方法沉积一层硅膜层,优选的,硅膜层的厚度选择溅射为100nm~400nm。The preparation method of the optical thin film structure is as follows: On a clean PET substrate, a layer of metal aluminum film is sputtered by a magnetron sputtering method. Preferably, the thickness of the aluminum film is set at 5 nm. Then, a silicon film layer is deposited by a magnetron sputtering method. Preferably, the thickness of the silicon film layer is selected to be sputtered from 100 nm to 400 nm.
当然,前述的铝膜和硅膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。本实施例光学薄膜结构从两侧面观察会呈现出不同的颜色,另外还具有透射结构色。Of course, the aforementioned aluminum film and silicon film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation. The optical film structure of this embodiment shows different colors when viewed from two sides, and also has a transmission structure color.
实施例6:Example 6:
该实施例提供的一种光学薄膜结构包括依次在基底上形成的第二光学结构层、介质层、第一光学结构层。An optical film structure provided by this embodiment includes a second optical structure layer, a medium layer, and a first optical structure layer formed on a substrate in sequence.
其中,第一光学结构层为金属银(Ag)膜,第二光学结构层为金属铝(Al)膜,介质层由普鲁士蓝形成,而基底层可以是PET/ITO膜。The first optical structure layer is a metallic silver (Ag) film, the second optical structure layer is a metallic aluminum (Al) film, the dielectric layer is formed of Prussian blue, and the base layer may be a PET/ITO film.
该光学薄膜结构的制备方法如下:在干净的PET/ITO衬底上,先通过磁控溅射方法溅射一层金属铝膜,优选的,铝膜的厚度设置在10nm。然后再通过电沉积方法沉积一层普鲁士蓝层,优选的,普鲁士蓝的厚度选择为100nm~2000nm。之后在普鲁士蓝层上再通过磁控溅射溅射一层银膜层,优选的,银膜层的厚度设置在0~50nm。The preparation method of the optical thin film structure is as follows: on a clean PET/ITO substrate, a layer of metal aluminum film is sputtered by a magnetron sputtering method. Preferably, the thickness of the aluminum film is set at 10 nm. Then a layer of Prussian blue layer is deposited by electrodeposition method. Preferably, the thickness of Prussian blue is selected to be 100 nm to 2000 nm. Then, a layer of silver film is sputtered on the Prussian blue layer by magnetron sputtering. Preferably, the thickness of the silver film is set at 0-50 nm.
当然,前述的银膜和铝膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。前述的普鲁士蓝层可以采用电化学沉积、溶胶凝胶技术等业界已知的方式制备。Of course, the aforementioned silver film and aluminum film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation. The aforementioned Prussian blue layer can be prepared by electrochemical deposition, sol-gel technology and other methods known in the industry.
本实施例光学薄膜结构从两侧面观察会呈现出不同的颜色,另外还具有透射结构色。The optical film structure of this embodiment shows different colors when viewed from two sides, and also has a transmission structure color.
实施例7:Example 7:
本实施例提供了一种器件,其可以被认为是一种反射/透射双模式多彩电致变色器件,包括工作电极、电解质层和对电极,电解质层设于工作电极和对电极之间。This embodiment provides a device, which can be regarded as a reflection/transmission dual-mode colorful electrochromic device, comprising a working electrode, an electrolyte layer and a counter electrode, and the electrolyte layer is arranged between the working electrode and the counter electrode.
参见图12所示,该工作电极包括设置在导电基底上的光学薄膜结构,该光学薄膜结构包括第一、二光学结构层和介质层,其中空气作为第一光学结构层,第二光学结构层由金属钨(W)形成,介质层由氧化钨形成。而基底可以是PET/ITO等。As shown in FIG. 12, the working electrode includes an optical film structure arranged on a conductive substrate. The optical film structure includes a first and second optical structure layers and a medium layer. Air is used as the first optical structure layer and the second optical structure layer It is formed of metal tungsten (W), and the dielectric layer is formed of tungsten oxide. The substrate can be PET/ITO, etc.
该工作电极的其制备方法如下:在干净的PET/ITO膜上,先通过磁控溅射方法溅射一层钨膜,优选的,钨膜的厚度选择溅射为约10nm。之后在钨膜上再磁控溅射溅射一层氧化钨层,优选的,氧化钨层的厚度设置为100nm~400nm。The preparation method of the working electrode is as follows: On a clean PET/ITO film, a layer of tungsten film is sputtered by a magnetron sputtering method. Preferably, the thickness of the tungsten film is selected to be about 10 nm by sputtering. After that, a tungsten oxide layer is sputtered by magnetron sputtering on the tungsten film. Preferably, the thickness of the tungsten oxide layer is set to 100 nm to 400 nm.
当然,前述的钨膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。前述的氧化钨层可以采用电子束蒸发、热蒸发、电化学沉积等业界已知的方式制备。Of course, the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation. The aforementioned tungsten oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, and electrochemical deposition.
本实施例的工作电极从两侧面观察会呈现出不同的颜色,另外还具有透射结构色。The working electrode of this embodiment shows different colors when viewed from two sides, and also has a transmissive structure color.
再将前述的工作电极与一对电极(例如NiO对电极)配合,并在两者之间封装AlCl 3电解液,之后引出导线,即可制备出本实施例的多彩电致变色器件。通过向该多彩电致变色器件加载电压,还可对工作电极的颜色进行进一步调制,使其在更多种颜色之间变换,特别是工作电极两侧的颜色变化还不完全相同,具体参见图13所示。 Then, the aforementioned working electrode is matched with a pair of electrodes (for example, NiO counter electrode), and AlCl 3 electrolyte is encapsulated between the two, and then leads are drawn out to prepare the colorful electrochromic device of this embodiment. By applying voltage to the colorful electrochromic device, the color of the working electrode can be further modulated to change between more colors, especially the color changes on both sides of the working electrode are not completely the same. See the figure for details. 13 shown.
实施例8:Example 8:
本实施例提供了一种光学器件,其可以被认为是一种反射/透射双模式多彩电致变色器件,包括工作电极、电解质层和对电极,电解质层设于工作电极和对电极之间。This embodiment provides an optical device, which can be regarded as a reflection/transmission dual-mode colorful electrochromic device, comprising a working electrode, an electrolyte layer and a counter electrode, and the electrolyte layer is arranged between the working electrode and the counter electrode.
该工作电极包括设置在导电基底上的光学薄膜结构,该光学薄膜结构包括第一、二光学结构层和介质层,其中第一光学结构层由金属钨(W)形成,第二光学结构层由金属银(Ag)形成,介质层由二氧化钛(TiO 2)形成。而基底可以是PET/AgNWs。 The working electrode includes an optical thin film structure arranged on a conductive substrate. The optical thin film structure includes first and second optical structure layers and a dielectric layer. The first optical structure layer is formed of metal tungsten (W), and the second optical structure layer is formed by Metal silver (Ag) is formed, and the dielectric layer is formed of titanium dioxide (TiO 2 ). The substrate can be PET/AgNWs.
该工作电极的其制备方法如下:在干净的PET/AgNWs膜上,先通过磁控溅射方法溅射一层银膜,优选的,银膜的厚度选择溅射为约10nm。之后在银膜上再磁控溅射溅射一层氧化钛层,优选的,二氧化钛层的厚度设置为100nm~400nm。然后在二氧化钛层上再磁控溅射溅射一层钨膜,优选的,钨膜的厚度选择溅射为约5nm。The preparation method of the working electrode is as follows: on the clean PET/AgNWs film, a layer of silver film is sputtered by magnetron sputtering method. Preferably, the thickness of the silver film is selected to be about 10 nm. Afterwards, a layer of titanium oxide is sputtered on the silver film by magnetron sputtering. Preferably, the thickness of the titanium dioxide layer is set to 100 nm to 400 nm. Then a layer of tungsten film is sputtered by magnetron sputtering on the titanium dioxide layer. Preferably, the thickness of the tungsten film is selected to be about 5 nm by sputtering.
该光学器件可以参阅实施例7的方式组装形成。The optical device can be assembled and formed by referring to Embodiment 7.
当然,前述的银膜和钨膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。前述的氧化钛层可以采用电子束蒸发、热蒸发、电化学沉积等业界已知的方式制备。Of course, the aforementioned silver film and tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation. The aforementioned titanium oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, and electrochemical deposition.
本实施例的工作电极从两侧面观察会呈现出不同的颜色,另外还具有透射结构色。The working electrode of this embodiment shows different colors when viewed from two sides, and also has a transmissive structure color.
再将前述的工作电极与一对电极(例如NiO对电极)配合,并在两者之间设置LiCl/PVA凝胶电解质,之后引出导线,即可制备出本实施例的多彩电致变色器件。通过向该多彩电致变色器件加载电压,通过调整电压范围,还可对工作电极的颜色进行进一步调制,使其在更多种颜色之间变换,特别是工作电极两侧的颜色变化还不完全相同。本实施例的多彩电致变色器件加载电压导致颜色变化展示出与实施例7颜色变化类似的性质。Then, the aforementioned working electrode is matched with a pair of electrodes (for example, a NiO counter electrode), and LiCl/PVA gel electrolyte is arranged between the two, and then the wires are drawn out to prepare the colorful electrochromic device of this embodiment. By applying voltage to the colorful electrochromic device, and by adjusting the voltage range, the color of the working electrode can be further modulated to change between more colors, especially the color change on both sides of the working electrode is not complete the same. The color change of the colorful electrochromic device of the present embodiment is similar to the color change of Example 7 caused by voltage application.
实施例9:Example 9:
本实施例提供了一种光学器件,其可以被认为是一种反射/透射双模式多彩电致变色器件,包括工作电极、电解质层和对电极,电解质层设于工作电极和对电极之间。This embodiment provides an optical device, which can be regarded as a reflection/transmission dual-mode colorful electrochromic device, comprising a working electrode, an electrolyte layer and a counter electrode, and the electrolyte layer is arranged between the working electrode and the counter electrode.
该工作电极包括设置在导电基底上的光学薄膜结构,该光学薄膜结构包括第一、二光学结构层和介质层,其中第一光学结构层为空气,第二光学结构为金属铜(Cu)层,介质层由氧化钒(V 2O 5)形成,而基底层可以是PET/ITO。 The working electrode includes an optical thin film structure arranged on a conductive substrate. The optical thin film structure includes first and second optical structure layers and a dielectric layer, wherein the first optical structure layer is air, and the second optical structure is a metallic copper (Cu) layer , The dielectric layer is formed of vanadium oxide (V 2 O 5 ), and the base layer can be PET/ITO.
该光学薄膜结构的制备方法如下:在干净的PET衬底上,先通过磁控溅射方法溅射一层铜膜,优选的,铜膜的厚度选择溅射为约15nm。之后在铜膜上再通过磁控溅射溅射一层氧化钒层,优选的,氧化钒层的厚度设置在100nm~400nm。The preparation method of the optical thin film structure is as follows: On a clean PET substrate, a layer of copper film is sputtered by a magnetron sputtering method. Preferably, the thickness of the copper film is selected to be about 15 nm by sputtering. Then, a vanadium oxide layer is sputtered on the copper film by magnetron sputtering. Preferably, the thickness of the vanadium oxide layer is set at 100 nm to 400 nm.
当然,前述的铜膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。前述的氧化钒层可以采用电子束蒸发、热蒸发、电化学沉积、溶胶凝胶技术等业界已知的方式制备。Of course, the aforementioned copper film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation. The aforementioned vanadium oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, electrochemical deposition, sol-gel technology, and the like.
本实施例的工作电极从两侧面观察会呈现出不同的颜色,另外还具有透射结构色。The working electrode of this embodiment shows different colors when viewed from two sides, and also has a transmissive structure color.
该光学器件可以参阅实施例7的方式组装形成。The optical device can be assembled and formed by referring to Embodiment 7.
再将前述的工作电极与一对电极(例如NiO对电极)配合,并在两者之间设置LiCl/HCl/AlCl 3/NaCl/PVA混合离子凝胶电解质。通过向该多彩电致变色器件加载电压,通过调整电压范围,还可对工作电极的颜色进行进一步调制,使其在更多种颜色之间变换,特别是工作电极两侧的颜色变化还不完全相同。本实施例的多彩电致变色器件加载电压导致颜色变化展示出与实施例7颜色变化类似的性质。 Then, the aforementioned working electrode is matched with a pair of electrodes (for example, NiO counter electrode), and LiCl/HCl/AlCl 3 /NaCl/PVA mixed ion gel electrolyte is set between the two. By applying voltage to the colorful electrochromic device, and by adjusting the voltage range, the color of the working electrode can be further modulated to change between more colors, especially the color change on both sides of the working electrode is not complete the same. The color change of the colorful electrochromic device of the present embodiment is similar to the color change of Example 7 caused by voltage application.
实施例10:Example 10:
本实施例提供了一种光学器件,其可以被认为是一种反射/透射双模式多彩电致变色器件,包括工作电极、电解质层和对电极,电解质层设于工作电极和对电极之间。This embodiment provides an optical device, which can be regarded as a reflection/transmission dual-mode colorful electrochromic device, comprising a working electrode, an electrolyte layer and a counter electrode, and the electrolyte layer is arranged between the working electrode and the counter electrode.
该工作电极包括设置在导电基底上的光学薄膜结构,该光学薄膜结构包括第一、二光学结构层和介质层,其中空气作为第一光学结构层,第二光学结构层由金属钨(W)形成,介质层由氧化钨(WO 3)形成。而基底可以是PET/ITO。 The working electrode includes an optical thin film structure arranged on a conductive substrate. The optical thin film structure includes first and second optical structure layers and a dielectric layer. Air is used as the first optical structure layer, and the second optical structure layer is made of metal tungsten (W). Formed, the dielectric layer is formed of tungsten oxide (WO 3 ). The substrate can be PET/ITO.
该工作电极的其制备方法如下:在干净的PET/ITO膜上,先通过磁控溅射方法溅射一层银膜,优选的,钨膜的厚度选择溅射为约10nm。之后在银膜上再磁控溅射溅射一层氧化钨层,优选的,氧化钨层的厚度设置为100nm~400nm。The preparation method of the working electrode is as follows: On a clean PET/ITO film, a silver film is sputtered by magnetron sputtering. Preferably, the thickness of the tungsten film is selected to be about 10nm sputtered. Afterwards, a tungsten oxide layer is sputtered by magnetron sputtering on the silver film. Preferably, the thickness of the tungsten oxide layer is set to 100 nm to 400 nm.
当然,前述的钨膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。前述的氧化钨层可以采用电子束蒸发、热蒸发、电化学沉积等业界已知的方式制备。Of course, the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation. The aforementioned tungsten oxide layer can be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, and electrochemical deposition.
本实施例的工作电极从两侧面观察会呈现出不同的颜色,另外还具有透射结构色。The working electrode of this embodiment shows different colors when viewed from two sides, and also has a transmissive structure color.
在前述的工作电极上通过磁控溅射方法溅射一层钛酸镧锂薄膜作为固态电解质,优选的钛酸镧锂薄膜的厚度为500nm。A layer of lanthanum lithium titanate film is sputtered on the aforementioned working electrode as a solid electrolyte by a magnetron sputtering method, and the thickness of the lanthanum lithium titanate film is preferably 500 nm.
再将该工作电极及固态电解质与一对电极(例如IrO 2对电极)配合,之后引出导线,即可制备出本实施例的多彩电致变色器件。通过向该多彩电致变色器件加载电压,还可对工作电极的颜色进行进一步调制,使其在更多种颜色之间变换,特别是工作电极两侧的颜色变化还不完全相同。本实施例的多彩电致变色器件加载电压导致颜色变化展示出与实施例7颜色变化类似的性质。 Then, the working electrode and the solid electrolyte are matched with a pair of electrodes (for example, an IrO 2 pair of electrodes), and then the wires are drawn out to prepare the colorful electrochromic device of this embodiment. By applying voltage to the colorful electrochromic device, the color of the working electrode can be further modulated to change between more colors, especially the color changes on both sides of the working electrode are not completely the same. The color change of the colorful electrochromic device of the present embodiment is similar to the color change of Example 7 caused by voltage application.
此外,本申请的申请人还以本说明书列出的其他介质材料、金属反射材料、基底材料等替代前述实施例中的相应材料进行了试验,发现所获的光学薄膜结构均具有相似的优点。In addition, the applicant of the present application also used other dielectric materials, metal reflective materials, base materials, etc. listed in this specification to replace the corresponding materials in the foregoing embodiments for experiments, and found that the obtained optical film structures all have similar advantages.
实施例11Example 11
参见图3所示,该高精度图案化多彩薄膜包括基底和设置在基底上的金属层,其中,于金属层上分布有通过激光直写方式形成的多个连续或间隔分布的介质层,介质层的厚度可以为10nm-300nm,其中每一介质层由原位生成的金属氧化物形成。其中,基底可以采用PET塑料板。金属层可以是沉积在基底上的钨膜,其厚度可以为约500nm。As shown in FIG. 3, the high-precision patterned colorful film includes a substrate and a metal layer disposed on the substrate, wherein a plurality of continuous or spaced dielectric layers formed by laser direct writing are distributed on the metal layer. The thickness of the layer can be 10 nm-300 nm, and each dielectric layer is formed of metal oxide generated in situ. Among them, the substrate can be a PET plastic plate. The metal layer may be a tungsten film deposited on the substrate, and its thickness may be about 500 nm.
具体的,一种制作该图案化多彩薄膜的方法可以包括:在一块干净的、尺寸大小为3cm*3cm的PET塑料板上,先磁控溅射溅射一层钨膜,优选的,钨膜的厚度选择溅射为约500nm。之后用激光直写方法依次在钨膜上的各个像素点(即图形区域)激光氧化出不同所需厚度的氧化钨层。其中,钨膜可以放置在以X-Y计算机控制的工作台上,其移动速度为15mm/s,连续激光功率为200W,激光矩形光斑尺寸为1.4mm×1.4mm,离焦量5mm,光斑搭接率 40%,激光作用时间为6.5s时,获得介质层厚度为163nm,该区域表现为粉红色,激光作用时间为8s时,获得介质层厚度为200nm,该区域表现为蓝色。Specifically, a method for making the patterned colorful film may include: magnetron sputtering sputtering a layer of tungsten film on a clean, 3cm*3cm PET plastic plate, preferably, a tungsten film The thickness of the sputtering is chosen to be about 500nm. Then, a laser direct writing method is used to sequentially laser oxidize tungsten oxide layers of different required thicknesses on each pixel (ie, pattern area) on the tungsten film. Among them, the tungsten film can be placed on a worktable controlled by an XY computer, with a moving speed of 15mm/s, a continuous laser power of 200W, a laser rectangular spot size of 1.4mm×1.4mm, a defocusing distance of 5mm, and a spot overlap rate 40%, when the laser action time is 6.5s, the obtained dielectric layer thickness is 163nm, the area is pink, and when the laser action time is 8s, the obtained dielectric layer thickness is 200nm, and the area appears blue.
当然,前述的钨膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。Of course, the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
将上述制备的彩色膜用作为电致变色层,另外制备一对电极,例如NiO对电极层,两者之间封装LiClO 4-PC电解液后引出导线,则可以制备出多彩电致变色器件。通过对该多彩电致变色器件加载电压,可以对其颜色进行进一步调制。在接通电压为-2.5V~+2.5V的电源时,该工作电极的红色区域将在红色、橙色、黄色之间实时变换;蓝色区域将在蓝色、紫色、红色之间实时变换。 The color film prepared above is used as an electrochromic layer, and a pair of electrodes, such as a NiO counter electrode layer, is additionally prepared, and LiClO 4 -PC electrolyte is encapsulated between the two and lead wires are drawn to prepare colorful electrochromic devices. By applying voltage to the colorful electrochromic device, its color can be further modulated. When the power supply with a voltage of -2.5V~+2.5V is switched on, the red area of the working electrode will change in real time between red, orange and yellow; the blue area will change in real time between blue, purple and red.
实施例12Example 12
参见图3所示,该高精度图案化多彩薄膜包括基底和设置在基底上的金属层,其中,于金属层上分布有通过激光直写方式形成的多个连续或间隔分布的介质层,介质层的厚度可以为10nm-300nm,其中每一介质层由原位生成的金属氧化物形成。其中,基底可以采用PET塑料板。金属层可以是沉积在基底上的钛膜,其厚度可以为约500nm。As shown in FIG. 3, the high-precision patterned colorful film includes a substrate and a metal layer disposed on the substrate, wherein a plurality of continuous or spaced dielectric layers formed by laser direct writing are distributed on the metal layer. The thickness of the layer can be 10 nm-300 nm, and each dielectric layer is formed of metal oxide generated in situ. Among them, the substrate can be a PET plastic plate. The metal layer may be a titanium film deposited on the substrate, and its thickness may be about 500 nm.
具体的,一种制作该图案化多彩薄膜的方法可以包括:在一块干净的、尺寸大小为3cm*3cm的PET塑料板上,先磁控溅射溅射一层钛膜,优选的,钛膜的厚度选择溅射为约500nm。之后用激光直写方法依次在钛膜上的各个像素点(即图形区域)激光氧化出不同所需厚度的氧化钛层。其中,以X-Y计算机控制的工作台移动速度为15mm/s,连续激光功率为300W,激光矩形光斑尺寸为1.4mm×1.4mm,离焦量5mm,光斑搭接率40%,激光作用时间为3-10s。Specifically, a method for making the patterned colorful film may include: magnetron sputtering sputtering a layer of titanium film on a clean PET plastic plate with a size of 3cm*3cm, preferably, a titanium film The thickness of the sputtering is chosen to be about 500nm. Then, the laser direct writing method is used to sequentially laser oxidize the titanium oxide layer of different required thickness on each pixel point (ie, the pattern area) on the titanium film. Among them, the moving speed of the worktable controlled by the XY computer is 15mm/s, the continuous laser power is 300W, the laser rectangular spot size is 1.4mm×1.4mm, the defocus is 5mm, the spot overlap rate is 40%, and the laser action time is 3 -10s.
当然,前述的钛膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。Of course, the aforementioned titanium film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
实施例13Example 13
请参见图3所示,该高精度图案化多彩薄膜包括基底和设置在基底上的金属层,其中,于金属层上分布有通过激光直写方式形成的多个连续或间隔分布的介质层,介质层厚度为0-20nm,其中每一介质层由原位生成的金属氧化物形成。其中,基底可以采用PET塑料板。金属层可以是沉积在基底上的铜膜,其厚度可以为约0-20nm。As shown in FIG. 3, the high-precision patterned colorful film includes a substrate and a metal layer disposed on the substrate, wherein a plurality of continuous or spaced dielectric layers formed by laser direct writing are distributed on the metal layer. The thickness of the dielectric layer is 0-20 nm, and each dielectric layer is formed of metal oxide generated in situ. Among them, the substrate can be a PET plastic plate. The metal layer may be a copper film deposited on the substrate, and its thickness may be about 0-20 nm.
具体的,一种制作该图案化多彩薄膜的方法可以包括:在一块干净的、尺寸大小为3cm*3cm的PET塑料板上,先磁控溅射溅射一层铜膜,优选的,铜膜的厚度选择溅射为约15nm。之后用激光直写方法依次在铜膜上的各个像素点(即图形区域)激光氧化出不同所需厚度的氧 化铜层。其中,以X-Y计算机控制的工作台移动速度为15mm/s,连续激光功率为100W,激光矩形光斑尺寸为1.4mm×1.4mm,离焦量5mm,光斑搭接率40%,激光作用时间为0-5s。Specifically, a method of making the patterned colorful film may include: first magnetron sputtering sputtering a copper film on a clean PET plastic plate with a size of 3cm*3cm, preferably a copper film The thickness of the sputtering is chosen to be about 15nm. Then, the laser direct writing method is used to sequentially laser oxidize the copper oxide layers of different required thicknesses on each pixel point (that is, the pattern area) on the copper film. Among them, the moving speed of the worktable controlled by the XY computer is 15mm/s, the continuous laser power is 100W, the laser rectangular spot size is 1.4mm×1.4mm, the defocus is 5mm, the spot overlap rate is 40%, and the laser action time is 0 -5s.
实施例14Example 14
请参见图3所示,该高精度图案化多彩薄膜包括基底和设置在基底上的金属层,其中,于金属层上分布有通过激光直写方式形成的多个连续或间隔分布的介质层,介质层的厚度可以为10nm-300nm,其中每一介质层由原位生成的金属氧化物形成。其中,基底可以采用PET塑料板。金属层可以是沉积在基底上的钨膜,其厚度可以为约500nm。As shown in FIG. 3, the high-precision patterned colorful film includes a substrate and a metal layer disposed on the substrate, wherein a plurality of continuous or spaced dielectric layers formed by laser direct writing are distributed on the metal layer. The thickness of the dielectric layer may be 10 nm to 300 nm, and each dielectric layer is formed of metal oxide generated in situ. Among them, the substrate can be a PET plastic plate. The metal layer may be a tungsten film deposited on the substrate, and its thickness may be about 500 nm.
具体的,一种制作该图案化多彩薄膜的方法可以包括:在一块干净的、尺寸大小为3cm*3cm的PET塑料板上,先磁控溅射溅射一层钨膜,优选的,钨膜的厚度选择溅射为约500nm。之后用激光直写方法依次在钨膜上的各个像素点(即图形区域)激光氧化出不同所需厚度的氧化钨层。其中,以X-Y计算机控制的工作台移动速度为15mm/s,连续激光功率为200W,激光矩形光斑尺寸为1.4mm×1.4mm,离焦量5mm,光斑搭接率40%,激光作用时间为6s时,获得介质层厚度为150nm,该区域表现为黄色,激光作用时间为10s时,获得介质层厚度约为250nm,该区域表现为绿色。Specifically, a method for making the patterned colorful film may include: magnetron sputtering sputtering a layer of tungsten film on a clean, 3cm*3cm PET plastic plate, preferably, a tungsten film The thickness of the sputtering is chosen to be about 500nm. Then, a laser direct writing method is used to sequentially laser oxidize tungsten oxide layers of different required thicknesses on each pixel (ie, pattern area) on the tungsten film. Among them, the moving speed of the worktable controlled by the XY computer is 15mm/s, the continuous laser power is 200W, the laser rectangular spot size is 1.4mm×1.4mm, the defocus is 5mm, the spot overlap rate is 40%, and the laser action time is 6s. When the thickness of the obtained dielectric layer is 150nm, the area appears yellow, when the laser action time is 10s, the thickness of the obtained dielectric layer is about 250nm, and this area appears green.
当然,前述的钨膜也可以采用电子束蒸发、热蒸发等业界已知的方式制备。Of course, the aforementioned tungsten film can also be prepared by methods known in the industry such as electron beam evaporation and thermal evaporation.
将上述制备的彩色膜用作为电致变色层,另外制备一对电极,例如NiO对电极层,两者之间封装PMMA-PEG-LiPF6凝胶电解质后引出导线,则可以制备出高精度图案化多彩色电致变色器件。通过对高精度图案化多彩色电致变色器件加载电压,可以对其颜色进行进一步调制。在接通电压为-2.5V~+2.5V的电源时,该工作电极的黄色区域将在黄色、绿色、蓝色之间实时变换;绿色区域将在绿色、青色、蓝色之间实时变换。The color film prepared above is used as the electrochromic layer, and a pair of electrodes, such as a NiO counter electrode layer, is prepared, and the PMMA-PEG-LiPF6 gel electrolyte is encapsulated between the two, and then the wires are led out, then high-precision patterning can be prepared Multi-color electrochromic devices. By applying voltage to the high-precision patterned multicolor electrochromic device, its color can be further modulated. When the power supply voltage is -2.5V~+2.5V, the yellow area of the working electrode will change in real time between yellow, green and blue; the green area will change in real time between green, cyan and blue.
实施例15Example 15
参阅图14-图15所示,本实施例公开了一种手机,包括手机本体200和手机壳300,其包括壳体210,所述壳体上一体设置有由多彩薄膜结构形成的Logo 400。该多彩薄膜结构是全固态电致变色结构,其包括工作电极、电解质层和对电极,电解质层设于工作电极和对电极之间。该工作电极包括通过磁控溅射方式依次沉积在手机壳壳体上的厚度约100nm的金属钨层210和厚度约150nm~400nm的氧化钨介质层220。该电解质230采用厚度约600nm的LiNbO 3。该对电极250采用厚度约200nm的ITO。对电极与电解质之间设置厚度约200nm的 离子存储层NiO 240。当然,前述的钨膜、氧化钨层也可以采用电子束蒸发、热蒸发、离子镀等业界已知的方式制备。 Referring to FIGS. 14-15, this embodiment discloses a mobile phone, which includes a mobile phone body 200 and a mobile phone case 300, which includes a housing 210 on which a Logo 400 formed of a colorful film structure is integrally provided. The colorful film structure is an all-solid electrochromic structure, which includes a working electrode, an electrolyte layer and a counter electrode, and the electrolyte layer is arranged between the working electrode and the counter electrode. The working electrode includes a metal tungsten layer 210 with a thickness of about 100 nm and a tungsten oxide dielectric layer 220 with a thickness of about 150 nm to 400 nm that are sequentially deposited on the mobile phone shell by magnetron sputtering. The electrolyte 230 uses LiNbO 3 with a thickness of about 600 nm. The pair of electrodes 250 uses ITO with a thickness of about 200 nm. An ion storage layer NiO 240 with a thickness of about 200 nm is arranged between the counter electrode and the electrolyte. Of course, the aforementioned tungsten film and tungsten oxide layer can also be prepared by methods known in the industry such as electron beam evaporation, thermal evaporation, and ion plating.
该Logo在未通电时,呈现为单一色彩,而在接通电源(手机电源)后,通过调整电压大小(可以通过手机自带的电压调控功能实现或者也可以增设电压调控元件),该Logo的颜色可以随电压的变化而在多种颜色之间转换,例如可以由红色调为黄色,再由黄色调为绿色,亦可以呈现为蓝色、紫色等,且色调、饱和度、亮度等都是可以实时调整的。The logo appears as a single color when it is not powered on, and after the power (mobile phone power supply) is turned on, the voltage can be adjusted (this can be achieved through the voltage control function of the mobile phone or a voltage control component can also be added). The color can be switched between a variety of colors with the change of voltage, for example, it can change from red to yellow, then from yellow to green, or it can be blue, purple, etc., and the hue, saturation, brightness, etc. are all Can be adjusted in real time.
实施例16Example 16
本实施例公开了一种电冰箱面板,其包括覆设在电冰箱前侧箱体上的透明盖板,所述透明盖板内壁上覆设有多彩薄膜结构。该多彩薄膜结构是全固态电致变色结构,其包括工作电极、电解质层和对电极,电解质层设于工作电极和对电极之间。该工作电极包括通过磁控溅射方式依次沉积在手机壳壳体上的厚度约50nm的金属Cr层,该金属Cr层上通过电化学沉积有厚度约100nm的普鲁士蓝层。该普鲁士蓝层上磁控溅射有厚度约1nm~15nm的ZnS层。该ZnS层上形成有厚度约300nm的LiAlF4电解质层。该电解质层上形成有厚度约100nm的Fe 2O 3层。该Fe 2O 3层上设置厚度约80nm的AZO作为对电极。 This embodiment discloses a refrigerator panel, which includes a transparent cover plate covering the front box of the refrigerator, and a colorful film structure is covered on the inner wall of the transparent cover plate. The colorful film structure is an all-solid electrochromic structure, which includes a working electrode, an electrolyte layer and a counter electrode, and the electrolyte layer is arranged between the working electrode and the counter electrode. The working electrode includes a metal Cr layer with a thickness of about 50nm sequentially deposited on the mobile phone shell by magnetron sputtering, and a Prussian blue layer with a thickness of about 100nm is electrochemically deposited on the metal Cr layer. The Prussian blue layer is magnetron sputtered with a ZnS layer with a thickness of about 1 nm to 15 nm. A LiAlF4 electrolyte layer with a thickness of about 300 nm is formed on the ZnS layer. An Fe 2 O 3 layer with a thickness of about 100 nm is formed on the electrolyte layer. AZO with a thickness of about 80 nm is provided on the Fe 2 O 3 layer as a counter electrode.
该多彩薄膜结构在未通电时,呈现为单一色彩,而在接通电源(电冰箱的电源模块)后,通过调整电压大小(可以通过增设的电压调控元件),该多彩薄膜结构的颜色可以在红、黄、蓝三色之间任意切换。The colorful film structure presents a single color when it is not energized, and after the power supply (the power module of the refrigerator) is turned on, the color of the colorful film structure can be changed by adjusting the voltage (which can be added by an additional voltage control element). Switch between red, yellow and blue at will.
实施例17Example 17
本实施例公开了一种建筑物,该建筑物具有一个以上窗户,其中的一些窗户包括窗框和固定在窗框上的玻璃,所述玻璃上覆盖有多彩薄膜结构,该多彩薄膜结构包括依次在所述玻璃上形成的第一介质层、第二光学结构层、第二介质层、第一光学结构层。其中,第一光学结构层为空气,第二光学结构层为金属钨膜,第一、第二介质层由氧化钨层形成。This embodiment discloses a building with more than one window, some of the windows include a window frame and glass fixed on the window frame, the glass is covered with a colorful film structure, the colorful film structure includes successively The first medium layer, the second optical structure layer, the second medium layer, and the first optical structure layer are formed on the glass. Wherein, the first optical structure layer is air, the second optical structure layer is a metal tungsten film, and the first and second dielectric layers are formed of tungsten oxide layers.
作为第一介质层的氧化钨层可以通过磁控溅射等方式形成,厚度为约1nm~400nm。该金属钨膜的厚度为约10nm。作为第二介质层的氧化钨层的厚度为约100nm~400nm,其可以是在该金属钨膜上通过磁控溅射形成。The tungsten oxide layer as the first dielectric layer can be formed by magnetron sputtering or the like, and has a thickness of about 1 nm to 400 nm. The thickness of the metallic tungsten film is about 10 nm. The thickness of the tungsten oxide layer as the second dielectric layer is about 100 nm to 400 nm, and it may be formed on the metal tungsten film by magnetron sputtering.
从第一光学结构层一侧方向看,可以得到反射丰富绚丽颜色的多彩薄膜结构。而从玻璃一侧方向看,其对应反射颜色也呈现丰富绚丽的颜色,且这种颜色与从薄膜方向看得到的颜色截然不同。并且,透过所述多彩薄膜结构,可以得到透射结构色,所述的透射结构色同样呈现出 丰富绚丽的颜色,所述多彩薄膜结构的反射颜色及透射颜色的透过率由金属钨层和氧化钨层厚度决定。Viewed from the direction of one side of the first optical structure layer, a colorful film structure reflecting rich and brilliant colors can be obtained. From the direction of the glass side, the corresponding reflection color also presents a rich and brilliant color, and this color is completely different from the color seen from the film direction. Moreover, through the colorful film structure, a transmission structure color can be obtained, and the transmission structure color also presents a rich and brilliant color. The transmittance of the reflection color and the transmission color of the colorful film structure is determined by the metal tungsten layer and The thickness of the tungsten oxide layer is determined.
实施例18Example 18
本实施例公开了一种汽车,该汽车的车窗玻璃上共形覆盖有一种反射/透射双模式多彩薄膜结构,其包括工作电极、电解质层和对电极,电解质层设于工作电极和对电极之间。This embodiment discloses an automobile. The window glass of the automobile is conformally covered with a reflection/transmission dual-mode colorful film structure, which includes a working electrode, an electrolyte layer and a counter electrode. The electrolyte layer is arranged on the working electrode and the counter electrode. between.
该工作电极包括第一、二光学结构层和介质层,其中第一光学结构层为厚度约5nm的钨膜,第二光学结构层为厚度约10nm的银膜,介质层为厚度100nm~400nm的氧化钛层。该汽车的车窗玻璃上还形成有纳米银线形成的透明导电层,该第一或二光学结构层形成在该透明导电层上。The working electrode includes first and second optical structure layers and a dielectric layer. The first optical structure layer is a tungsten film with a thickness of about 5 nm, the second optical structure layer is a silver film with a thickness of about 10 nm, and the dielectric layer is a thickness of 100 nm to 400 nm. Titanium oxide layer. A transparent conductive layer formed by nano silver wires is also formed on the window glass of the automobile, and the first or second optical structure layer is formed on the transparent conductive layer.
本实施例的车窗玻璃从两侧面观察会呈现出不同的颜色,另外还具有透射结构色。The vehicle window glass of this embodiment shows different colors when viewed from two sides, and also has a transmission structure color.
再将前述的工作电极与一对电极(例如NiO对电极)配合,并在两者之间设置LiCl/PVA凝胶电解质,之后引出导线与汽车电源连接,通过向该多彩薄膜结构加载电压,通过调整电压范围,还可对该多彩薄膜结构的颜色进行进一步调制,使其在更多种颜色之间变换,特别是车窗玻璃两侧的颜色变化还不完全相同。Then the aforementioned working electrode is matched with a pair of electrodes (such as NiO counter electrode), and LiCl/PVA gel electrolyte is set between the two, and then the lead wire is connected to the car power supply. By applying voltage to the colorful film structure, By adjusting the voltage range, the color of the colorful film structure can be further modulated to change between more colors, especially the color changes on both sides of the car window glass are not completely the same.
实施例19Example 19
本实施例公开了一种遮阳帽,所述遮阳帽帽体的局部区域由PET薄膜制成,该PET薄膜上形成有具有多彩薄膜结构的多彩图案,该多彩薄膜结构包括工作电极、电解质层和对电极,电解质层设于工作电极和对电极之间。该工作电极、对电极还通过电压控制模块与设置在遮阳帽上的有机光伏电池电连接。This embodiment discloses a sun visor cap, a partial area of the sun visor cap body is made of PET film, and a colorful pattern with a colorful film structure is formed on the PET film. The colorful film structure includes a working electrode, an electrolyte layer and For the counter electrode, the electrolyte layer is arranged between the working electrode and the counter electrode. The working electrode and the counter electrode are also electrically connected with the organic photovoltaic cell arranged on the sun visor through the voltage control module.
该工作电极包括磁控溅射在PET薄膜上的厚度约500nm的钨膜,该钨膜的各个像素点(与多彩图案对应)被通过激光直写方式氧化形成不同厚度的氧化钨层作为介质层。该介质层厚度为约0-300nm。该激光直写的工艺条件包括:钨膜可以放置在以X-Y计算机控制的工作台上,其移动速度为15mm/s,连续激光功率为100W,激光矩形光斑尺寸为1.4mm×1.4mm,离焦量5mm,光斑搭接率40%,激光作用时间为0-5s。前述对电极可以是NiO对电极层。工作电极与对电极之间封装LiBO 2+Li 2SO 4固态电解质,之后引出导线。通过有机光伏电池对该多彩薄膜结构加载电压,可以对其颜色进行进一步调制。在电压为-2.5V~+2.5V时,该工作电极的红色区域将在红色、橙色、黄色之间实时变换;蓝色区域将在蓝色、紫色、红色之间实时变换。 The working electrode includes a tungsten film with a thickness of about 500nm on the PET film by magnetron sputtering. Each pixel of the tungsten film (corresponding to the colorful pattern) is oxidized by laser direct writing to form a tungsten oxide layer of different thicknesses as a dielectric layer . The thickness of the dielectric layer is about 0-300 nm. The process conditions of the laser direct writing include: the tungsten film can be placed on a worktable controlled by an XY computer, the moving speed is 15mm/s, the continuous laser power is 100W, the laser rectangular spot size is 1.4mm×1.4mm, and it is out of focus. The amount is 5mm, the spot overlap rate is 40%, and the laser action time is 0-5s. The aforementioned counter electrode may be a NiO counter electrode layer. A LiBO 2 +Li 2 SO 4 solid electrolyte is encapsulated between the working electrode and the counter electrode, and then leads are drawn. The color of the colorful thin film structure can be further modulated by applying voltage to the colorful film structure through organic photovoltaic cells. When the voltage is -2.5V~+2.5V, the red area of the working electrode will change between red, orange and yellow in real time; the blue area will change between blue, purple and red in real time.
应当理解,上述实施例仅为说明本申请的技术构思及特点,其目的在于让熟悉此项技术的人士能够了解本申请的内容并据以实施,并不能以此限制本申请的保护范围。凡根据本申请精神实质所作的等效变化或修饰,都应涵盖在本申请的保护范围之内。It should be understood that the above-mentioned embodiments only illustrate the technical ideas and features of the application, and their purpose is to enable those familiar with the technology to understand the content of the application and implement them accordingly, and cannot limit the protection scope of the application. All equivalent changes or modifications made according to the spirit and essence of this application shall be covered by the protection scope of this application.

Claims (21)

  1. 一种光学薄膜结构,其特征在于包括平行设置的第一光学结构层和第二光学结构层,所述第一光学结构层、第二光学结构层是光学反射性和/或光学透射性的,所述第一光学结构层和第二光学结构层之间设置有介质层,所述介质层与第一光学结构层、第二光学结构层的结合界面分别为所述介质层的第一表面、第二表面,所述第一表面、第二表面与介质层组成光学腔;An optical film structure, characterized by comprising a first optical structure layer and a second optical structure layer arranged in parallel, the first optical structure layer and the second optical structure layer being optically reflective and/or optically transmissive, A medium layer is arranged between the first optical structure layer and the second optical structure layer, and the bonding interface between the medium layer and the first optical structure layer and the second optical structure layer is the first surface of the medium layer, A second surface, the first surface, the second surface and the dielectric layer form an optical cavity;
    在入射光从第一光学结构层或第二光学结构层入射所述光学腔时,于所述第一表面形成的反射光和于所述第二表面形成的反射光的相移
    Figure PCTCN2019103280-appb-100001
    d为所述介质层的厚度,
    Figure PCTCN2019103280-appb-100002
    为所述介质层的折射率,λ为所述入射光的波长,
    Figure PCTCN2019103280-appb-100003
    为所述入射光在透过所述第一表面或第二表面时的折射角。
    When incident light enters the optical cavity from the first optical structure layer or the second optical structure layer, the phase shift of the reflected light formed on the first surface and the reflected light formed on the second surface
    Figure PCTCN2019103280-appb-100001
    d is the thickness of the dielectric layer,
    Figure PCTCN2019103280-appb-100002
    Is the refractive index of the medium layer, λ is the wavelength of the incident light,
    Figure PCTCN2019103280-appb-100003
    Is the refraction angle of the incident light when passing through the first surface or the second surface.
  2. 根据权利要求1所述的光学薄膜结构,其特征在于:若定义所述第一光学结构层的折射率为
    Figure PCTCN2019103280-appb-100004
    则所述第一表面的反射系数
    Figure PCTCN2019103280-appb-100005
    其中
    Figure PCTCN2019103280-appb-100006
    为入射光于第一表面的入射角;
    The optical film structure of claim 1, wherein if the refractive index of the first optical structure layer is defined as
    Figure PCTCN2019103280-appb-100004
    The reflection coefficient of the first surface
    Figure PCTCN2019103280-appb-100005
    among them
    Figure PCTCN2019103280-appb-100006
    Is the incident angle of incident light on the first surface;
    和/或,若定义所述第二光学结构层的折射率为
    Figure PCTCN2019103280-appb-100007
    则所述第二表面的反射系数
    Figure PCTCN2019103280-appb-100008
    其中
    Figure PCTCN2019103280-appb-100009
    为入射光在透过第二表面时的折射角。
    And/or, if the refractive index of the second optical structure layer is defined as
    Figure PCTCN2019103280-appb-100007
    The reflection coefficient of the second surface
    Figure PCTCN2019103280-appb-100008
    among them
    Figure PCTCN2019103280-appb-100009
    Is the refraction angle of incident light when passing through the second surface.
  3. 根据权利要求2所述的光学薄膜结构,其特征在于,所述光学薄膜结构的反射系数表示为:
    Figure PCTCN2019103280-appb-100010
    反射率表示为:
    Figure PCTCN2019103280-appb-100011
    3. The optical film structure of claim 2, wherein the reflection coefficient of the optical film structure is expressed as:
    Figure PCTCN2019103280-appb-100010
    The reflectivity is expressed as:
    Figure PCTCN2019103280-appb-100011
  4. 根据权利要求1-3中任一项所述的光学薄膜结构,其特征在于:若定义所述第一光学结构层的折射率为
    Figure PCTCN2019103280-appb-100012
    则所述第一光学结构层的透射系数
    Figure PCTCN2019103280-appb-100013
    其中
    Figure PCTCN2019103280-appb-100014
    为入射光于第一表面的入射角;
    The optical film structure according to any one of claims 1-3, wherein: if the refractive index of the first optical structure layer is defined as
    Figure PCTCN2019103280-appb-100012
    The transmission coefficient of the first optical structure layer
    Figure PCTCN2019103280-appb-100013
    among them
    Figure PCTCN2019103280-appb-100014
    Is the incident angle of incident light on the first surface;
    和/或,若定义所述第二光学结构层的折射率为
    Figure PCTCN2019103280-appb-100015
    则所述第二光学结构层的透射系数
    Figure PCTCN2019103280-appb-100016
    其中
    Figure PCTCN2019103280-appb-100017
    为入射光在透过第二表面时的折射角。
    And/or, if the refractive index of the second optical structure layer is defined as
    Figure PCTCN2019103280-appb-100015
    The transmission coefficient of the second optical structure layer
    Figure PCTCN2019103280-appb-100016
    among them
    Figure PCTCN2019103280-appb-100017
    Is the refraction angle of incident light when passing through the second surface.
  5. 根据权利要求4所述的光学薄膜结构,其特征在于,所述光学薄膜结构的透射系数表示为:
    Figure PCTCN2019103280-appb-100018
    透过率表示为:
    Figure PCTCN2019103280-appb-100019
    The optical film structure according to claim 4, wherein the transmission coefficient of the optical film structure is expressed as:
    Figure PCTCN2019103280-appb-100018
    The transmittance is expressed as:
    Figure PCTCN2019103280-appb-100019
  6. 根据权利要求1所述的光学薄膜结构,其特征在于:所述光学薄膜结构具有光学透射工作模式、光学反射工作模式或者光学透射及反射工作模式;优选的,在所述光学反射工作模式下,所述光学薄膜结构具有双面不对称结构色,而在所述光学透射工作模式下,所述光学薄膜结构具有透明结构色。The optical film structure according to claim 1, wherein the optical film structure has an optical transmission mode, an optical reflection mode, or an optical transmission and reflection mode; preferably, in the optical reflection mode, The optical film structure has a double-sided asymmetric structural color, and in the optical transmission working mode, the optical film structure has a transparent structural color.
  7. 根据权利要求1所述的光学薄膜结构,其特征在于:第一光学结构层、第二光学结构层中的任一者为金属层,另一者由气体组成,所述气体包括空气;或者,第一光学结构层、第二光学结构层均为金属层。The optical thin film structure of claim 1, wherein any one of the first optical structure layer and the second optical structure layer is a metal layer, and the other is composed of a gas, and the gas includes air; or, Both the first optical structure layer and the second optical structure layer are metal layers.
  8. 根据权利要求1所述的光学薄膜结构,其特征在于:所述光学薄膜结构包括一个或多个第一光学结构层、一个或多个介质层和一个或多个第二光学结构层。The optical film structure of claim 1, wherein the optical film structure comprises one or more first optical structure layers, one or more medium layers, and one or more second optical structure layers.
  9. 根据权利要求8所述的光学薄膜结构,其特征在于:所述光学薄膜结构包括多个第一光学结构层和/或多个第二光学结构层以及多个介质层。8. The optical film structure according to claim 8, wherein the optical film structure comprises a plurality of first optical structure layers and/or a plurality of second optical structure layers and a plurality of dielectric layers.
  10. 根据权利要求1所述的光学薄膜结构,其特征在于:所述第一光学结构层和第二光学结构层中至少一者的材质包括金属材料;优选的,所述金属材料包括钨,金,银,铜,钛,铝,铬,铁,钴,镍,铂,锗,钯中的任意一种或多种的组合;和/或,所述第一光学结构层和第二光学结构层中至少一者的厚度为0~20nm;或者,所述第一光学结构层和第二光学结构层中至少一者的厚度在20nm以上;优选的,所述第一光学结构层和第二光学结构层中至少一者的厚度为50~3000nm。The optical thin film structure of claim 1, wherein the material of at least one of the first optical structure layer and the second optical structure layer comprises a metal material; preferably, the metal material comprises tungsten, gold, Any one or a combination of silver, copper, titanium, aluminum, chromium, iron, cobalt, nickel, platinum, germanium, and palladium; and/or, in the first optical structure layer and the second optical structure layer At least one has a thickness of 0-20 nm; or, at least one of the first optical structure layer and the second optical structure layer has a thickness of 20 nm or more; preferably, the first optical structure layer and the second optical structure The thickness of at least one of the layers is 50-3000 nm.
  11. 根据权利要求1所述的光学薄膜结构,其特征在于:所述介质层的材质选自有机材料或无机材料;The optical film structure according to claim 1, wherein the material of the medium layer is selected from organic materials or inorganic materials;
    优选的,所述无机材料包括金属单质或非金属单质、无机盐、氧化物中任意一种或多种的组合;Preferably, the inorganic material includes any one or a combination of metal element or non-metal element, inorganic salt, and oxide;
    更有选的,所述非金属单质包括单晶硅、多晶硅、金刚石中任意一种或多种的组合;More optionally, the non-metallic element includes any one or a combination of single crystal silicon, polycrystalline silicon, and diamond;
    更优选的,所述无机盐包括氟化物、硫化物、硒化物、氯化物、溴化物、碘化物、砷化物或碲化物中任意一种或多种的组合;More preferably, the inorganic salt includes any one or a combination of fluoride, sulfide, selenide, chloride, bromide, iodide, arsenide, or telluride;
    更优选的,所述氧化物包括WO 3、NiO、TiO 2、Nb 2O 5、Fe 2O 3、V 2O 5、Co 2O 3、Y 2O 3、Cr 2O 3、MoO 3、Al 2O 3、SiO 2、MgO、ZnO、MnO 2、CaO、ZrO 2、Ta 2O 5、Y 3Al 5O 12、Er 2O 3、IrO 2中任意一种或多种的组合; More preferably, the oxide includes WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , Cr 2 O 3 , MoO 3 , Any one or a combination of Al 2 O 3 , SiO 2 , MgO, ZnO, MnO 2 , CaO, ZrO 2 , Ta 2 O 5 , Y 3 Al 5 O 12 , Er 2 O 3 , and IrO 2 ;
    更优选的,所述氟化物包括MgF 2、CaF 2、GeF 2、YbF 3、YF 3、Na 3AlF 6、AlF 3、NdF 3、LaF 3、LiF、NaF、BaF 2、SrF 2中任意一种或多种的组合; More preferably, the fluoride includes any one of MgF 2 , CaF 2 , GeF 2 , YbF 3 , YF 3 , Na 3 AlF 6 , AlF 3 , NdF 3 , LaF 3 , LiF, NaF, BaF 2 , SrF 2 Kind or a combination of many;
    更优选的,所述硫化物包括ZnS、GeS、MoS 2、Bi 2S 3中任意一种或多种的组合; More preferably, the sulfide includes any one or a combination of ZnS, GeS, MoS 2 , and Bi 2 S 3 ;
    更优选的,所述硒化物包括ZnSe,GeSe、MoSe 2、PbSe、Ag 2Se中任意一种或多种的组合; More preferably, the selenide includes any one or a combination of ZnSe, GeSe, MoSe 2 , PbSe, and Ag 2 Se;
    更优选的,所述氯化物包括AgCl、NaCl、KCl中任意一种或多种的组合;More preferably, the chloride includes any one or a combination of AgCl, NaCl, and KCl;
    更优选的,所述溴化物包括AgBr、NaBr、KBr、TlBr、CsBr中任意一种或多种的组合;More preferably, the bromide includes any one or a combination of AgBr, NaBr, KBr, TlBr, and CsBr;
    更优选的,所述碘化物包括AgI、NaI、KI、RbI、CsI中任意一种或多种的组合;More preferably, the iodide includes any one or a combination of AgI, NaI, KI, RbI, and CsI;
    更优选的,所述砷化物包括GaAs;More preferably, the arsenide includes GaAs;
    更优选的,所述锑化物包括GdTe;More preferably, the antimonide includes GdTe;
    优选的,所述介质层的材质包括SrTiO 3、Ba 3Ta 4O 15、Bi 4Ti 3O 2、CaCO 3、CaWO 4、CaMnO 4、LiNbO 4、普鲁士蓝、普鲁士黑、普鲁士白、普鲁士绿中任意一种或多种的组合; Preferably, the material of the dielectric layer includes SrTiO 3 , Ba 3 Ta 4 O 15 , Bi 4 Ti 3 O 2 , CaCO 3 , CaWO 4 , CaMnO 4 , LiNbO 4 , Prussian blue, Prussian black, Prussian white, Prussian green Any one or a combination of
    优选的,所述介质层的材质包括液晶材料或MOF材料;Preferably, the material of the medium layer includes liquid crystal material or MOF material;
    优选的,所述有机材料包括有机小分子化合物和/或聚合物;Preferably, the organic material includes organic small molecule compounds and/or polymers;
    更优选的,所述有机材料包括紫罗精、聚吡咯、聚苯胺、聚噻吩、聚咔唑、酞菁、对苯二甲脂、二甲基联二苯胺、四噻富烯、烷基联吡啶、吩噻唑、聚酰胺、环氧树脂、聚二炔中任意一种或多种的组合;More preferably, the organic material includes viologen, polypyrrole, polyaniline, polythiophene, polycarbazole, phthalocyanine, terephthalate, dimethylbenzidine, tetrathiafulvene, alkyl-linked Any one or a combination of pyridine, phenothiazole, polyamide, epoxy resin, and polydiyne;
    和/或,所述介质层厚度为大于0而小于或等于2000nm,优选为100~500nm;And/or, the thickness of the dielectric layer is greater than 0 and less than or equal to 2000 nm, preferably 100 to 500 nm;
    更优选的,所述介质层的材质选自无机电致变色材料和/或有机电致变色材料。More preferably, the material of the dielectric layer is selected from inorganic electrochromic materials and/or organic electrochromic materials.
  12. 根据权利要求1所述的光学薄膜结构,其特征在于:所述介质层与第一光学结构层或第二光学结构层之间还分布有优化介质层;或者,所述第一光学结构层或第二光学结构层上设有优化介质层;The optical film structure according to claim 1, wherein an optimized medium layer is also distributed between the medium layer and the first optical structure layer or the second optical structure layer; or, the first optical structure layer or An optimized medium layer is provided on the second optical structure layer;
    优选的,所述优化介质层的材质包括WO 3、NiO、TiO 2、Nb 2O 5、Fe 2O 3、V 2O 5、Co 2O 3、Y 2O 3、Cr 2O 3、MoO 3、Al 2O 3、SiO 2、MgO、ZnO、MnO 2、CaO、ZrO 2、Ta 2O 5、Y 3Al 5O 12、Er 2O 3、ZnS、MgF 2、氮化硅中的任意一种或多种的组合; Preferably, the material of the optimized dielectric layer includes WO 3 , NiO, TiO 2 , Nb 2 O 5 , Fe 2 O 3 , V 2 O 5 , Co 2 O 3 , Y 2 O 3 , Cr 2 O 3 , MoO 3. Al 2 O 3 , SiO 2 , MgO, ZnO, MnO 2 , CaO, ZrO 2 , Ta 2 O 5 , Y 3 Al 5 O 12 , Er 2 O 3 , ZnS, MgF 2 , any of silicon nitride One or more combinations;
    优选的,所述优化介质层的厚度为0~2000nm。Preferably, the thickness of the optimized dielectric layer is 0-2000 nm.
  13. 根据权利要求1所述的光学薄膜结构,其特征在于:所述第一光学结构层或第二光学结构层还与基底结合;优选的,所述基底为透明或半透明的;更优选的,所述基底包括的材质包括玻璃、有机玻璃、PET、PES、PEN、PC、PMMA、PDMS中的任意一种或多种的组合。The optical film structure according to claim 1, wherein the first optical structure layer or the second optical structure layer is further combined with a substrate; preferably, the substrate is transparent or translucent; more preferably, The substrate includes any one or a combination of glass, organic glass, PET, PES, PEN, PC, PMMA, and PDMS.
  14. 一种器件,包括相互配合的工作电极及对电极,其特征在于:所述工作电极包括权利要求1-13中任一项所述的光学薄膜结构,所述光学薄膜结构内的介质层主要由电致变色材料组成。A device comprising a working electrode and a counter electrode that cooperate with each other, characterized in that the working electrode comprises the optical film structure of any one of claims 1-13, and the dielectric layer in the optical film structure is mainly composed of Composed of electrochromic materials.
  15. 根据权利要求14的器件,其特征在于:所述器件还包括电解质,所述电解质分布于所述工作电极与对电极之间;优选的,所述电解质包括液态电解质、凝胶电解质或固态电解质;The device according to claim 14, characterized in that: the device further comprises an electrolyte distributed between the working electrode and the counter electrode; preferably, the electrolyte comprises a liquid electrolyte, a gel electrolyte or a solid electrolyte;
    优选的,所述器件还包括离子存储层,所述离子存储层与所述电解质接触;Preferably, the device further includes an ion storage layer, and the ion storage layer is in contact with the electrolyte;
    优选的,所述第一光学结构层或第二光学结构层还与基底结合;优选的,所述基底为透明或半透明的;更优选的,所述基底包括的材质包括玻璃、有机玻璃、PET、PES、PEN、PC、PMMA、PDMS中的任意一种或多种的组合;更优选的,所述基底上还设置有导电层;优选的,所述导电层包括FTO、ITO、Ag纳米线、Ag纳米网栅、碳纳米管、石墨烯中的任意一种或多种的组合;和/或,所述对电极为透明或半透明的。Preferably, the first optical structure layer or the second optical structure layer is further combined with a substrate; preferably, the substrate is transparent or translucent; more preferably, the substrate includes materials including glass, organic glass, Any one or a combination of PET, PES, PEN, PC, PMMA, PDMS; more preferably, a conductive layer is provided on the substrate; preferably, the conductive layer includes FTO, ITO, Ag nano Any one or a combination of wires, Ag nano grids, carbon nanotubes, and graphene; and/or, the counter electrode is transparent or semi-transparent.
  16. 如权利要求14-15中任一项所述器件的调控方法,其特征在于包括:将工作电极、对电极与电源连接形成工作电路;调整工作电极与对电极之间的电势差,以至少使介质层内电致变色材料的折射率变化,从而调控所述器件的颜色。The device control method according to any one of claims 14-15, characterized by comprising: connecting the working electrode, the counter electrode and the power source to form a working circuit; adjusting the potential difference between the working electrode and the counter electrode to at least make the medium The refractive index of the electrochromic material within the layer changes, thereby regulating the color of the device.
  17. 一种装置,其特征在于包括权利要求14-15中任一项所述的器件;优选的,所述装置还包括电源,所述电源能与所述器件电连接形成工作回路。A device, characterized by comprising the device according to any one of claims 14-15; preferably, the device further comprises a power supply, which can be electrically connected with the device to form a working circuit.
  18. 根据权利要求17所述的装置,其特征在于:所述装置为消费电子产品或家用电器,所述光学薄膜结构连接和/或一体形成在所述装置的壳体和/或显示屏上。The device according to claim 17, wherein the device is a consumer electronic product or a household appliance, and the optical film structure is connected and/or integrally formed on the housing and/or display screen of the device.
  19. 根据权利要求18所述的装置,其特征在于:所述消费电子产品包括手机、手环、平板电脑或笔记本电脑;或者,所述家用电器包括电视机、电冰箱、电风扇或空调。The device according to claim 18, wherein the consumer electronic product comprises a mobile phone, a bracelet, a tablet computer or a notebook computer; or, the household appliance comprises a TV, a refrigerator, an electric fan or an air conditioner.
  20. 根据权利要求17所述的装置,其特征在于:所述装置为建筑物,所述建筑物的内墙、外墙、窗户中的任一者上连接和/或一体形成有所述光学薄膜结构;或者,所述装置为交通工具,所述交通工具的外壳、内壁、窗户中的任一者上连接和/或一体形成有所述光学薄膜结构;或者,所述装置为鞋、帽或服饰,所述装置的表面连接和/或一体形成有所述光学薄膜结构。The device according to claim 17, wherein the device is a building, and any one of the inner wall, the outer wall, and the window of the building is connected to and/or integrally formed with the optical film structure Or, the device is a vehicle, and the optical film structure is connected to and/or integrally formed with any one of the housing, inner wall, and window of the vehicle; or, the device is shoes, hats or clothing The surface of the device is connected and/or integrally formed with the optical film structure.
  21. 根据权利要求17所述的装置,其特征在于:所述光学薄膜结构呈现为设定的图文结构。17. The device of claim 17, wherein the optical film structure is a set graphic structure.
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