WO2020158168A1 - Corps élastique et capteur de force utilisant ce dernier - Google Patents

Corps élastique et capteur de force utilisant ce dernier Download PDF

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Publication number
WO2020158168A1
WO2020158168A1 PCT/JP2019/047067 JP2019047067W WO2020158168A1 WO 2020158168 A1 WO2020158168 A1 WO 2020158168A1 JP 2019047067 W JP2019047067 W JP 2019047067W WO 2020158168 A1 WO2020158168 A1 WO 2020158168A1
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WO
WIPO (PCT)
Prior art keywords
elastic
elastic portion
relay
strain
elastic body
Prior art date
Application number
PCT/JP2019/047067
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English (en)
Japanese (ja)
Inventor
嵩幸 遠藤
鈴木　隆史
Original Assignee
日本電産コパル電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 日本電産コパル電子株式会社 filed Critical 日本電産コパル電子株式会社
Priority to CN201980078288.5A priority Critical patent/CN113167670B/zh
Publication of WO2020158168A1 publication Critical patent/WO2020158168A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force

Definitions

  • the embodiment of the present invention relates to an elastic body used in, for example, a robot arm and a force sensor using the elastic body.
  • the force sensor is used, for example, in a robot arm or the like, and detects force (Fx, Fy, Fz) and moment (Mx, My, Mz) with respect to three orthogonal axes (x, y, z) (for example, patents). Reference 1).
  • the force sensor includes an elastic body that can be deformed in 6 axis directions, for example, 3 axis directions and 3 axis directions, and a plurality of strain sensors are provided on this elastic body.
  • Each strain sensor is provided with a plurality of strain gauges on the strain generating body. Further, the force sensor is provided with a stopper in order to protect the elastic body and the strain generating body from an external force.
  • the stopper structure is required to have a high processing accuracy, and the stopper can be realized. It will be difficult.
  • the embodiment of the present invention provides an elastic body capable of obtaining a sufficient sensor output and improving the measurement accuracy, and a force sensor using the elastic body.
  • the elastic body of the present embodiment is connected to a first structure including a plurality of first elastic portions that can be deformed in six axial directions, a second elastic portion that can be deformed in the six axial directions, and the second elastic portion.
  • a plurality of second structures each having a relay part formed therein, and a plurality of third structures provided between each of the relay parts of the second structure and each of the first elastic parts.
  • the first structure body, the second structure body, the third structure body, the relay portion, the first elastic portion, and the second elastic portion are composed of one metal plate, and the second The structure, the third structure, the relay portion, the first elastic portion, and the second elastic portion are the bent metal plate.
  • the force sensor of the present embodiment includes a first structure to which a plurality of first elastic portions that can be deformed in six axial directions are connected, a second elastic portion that can be deformed in the six axial directions, and the second elastic portion.
  • a plurality of second structures each having a relay part connected to the part, and a plurality of third structures provided between each of the relay parts of the second structure and each of the first elastic parts.
  • a plurality of strain sensors provided between the relays of the first structure and the second structure, respectively, the first structure, the second structure, the second
  • the three structures, the relay part, the first elastic part, and the second elastic part are configured by one metal plate, and the second structure, the third structure, the relay part, and the first structure.
  • the elastic part and the second elastic part are the bent metal plates.
  • the perspective view which shows the state which assembled a part of force sensor shown in FIG. FIG. 3 is a perspective view showing a state in which a part of the force sensor shown in FIG. 2 is further assembled.
  • the side sectional view which shows an example of the modification of the elastic body concerning this embodiment, and shows a part of it.
  • FIG. 8A The perspective view which shows the example of the deformation
  • the side sectional view showing an example of deformation of the elastic body as a reference example and showing a part thereof.
  • the perspective view which shows the example of a deformation
  • the top view which shows an example of a strain sensor.
  • the configuration of the force sensor 10 according to this embodiment will be described with reference to FIGS. 1 to 6.
  • the force sensor 10 is used, for example, in a robot arm or the like, and has forces in the X, Y, and Z axis directions (Fx, Fy, Fz) and torques around the X, Y, Z axes (moments: Mx, My, Mz). To detect.
  • the force sensor 10 includes a cylindrical main body 11 and a cylindrical cover 12 that covers the main body 11. Inside the cover 12, a mounting plate 13 as a movable body operable with respect to the main body 11 is provided, and the mounting plate 13 is fixed to the cover 12 by a plurality of screws 14. The cover 12 and the mounting plate 13 are operably provided to the main body 11.
  • the main body 11 is fixed to, for example, the main body of a robot arm (not shown).
  • the mounting plate 13 is fixed to, for example, the hand portion of the robot arm.
  • a ring-shaped seal member 15 is provided between the main body 11 and the cover 12.
  • the seal member 15 is made of an elastic material such as rubber or a foamed member, seals a gap between the main body 11 and the cover 12, and allows the cover 12 to operate with respect to the main body 11.
  • an elastic body 16 is provided between the main body 11 and the mounting plate 13.
  • the elastic body 16 is formed by bending, for example, one sheet of metal, and includes one first structure body 16-1, a plurality of second structure bodies 16-2, and a first structure body 16. -1 and the plurality of third structures 16-3 and the like provided between the second structure 16-2 and the second structure 16-2.
  • the plurality of second structures 16-2 are arranged at equal intervals around the first structure 16-1.
  • the elastic body 16 includes, for example, three second structure bodies 16-2.
  • the number of the second structures 16-2 is not limited to three and may be three or more. Further, when the present embodiment is applied to, for example, a torque sensor other than the force sensor, the number of the second structures 16-2 may be two.
  • the six first elastic portions 16-4 are provided around the first structure 16-1.
  • the first elastic portion 16-4 is continuous with the third structure body 16-3 and is arranged around the first structure body 16-1.
  • Each of the second structures 16-2 has two substantially U-shaped second elastic portions 16-5 and two second elastic portions 16-5 between the two second elastic portions 16-5. It is equipped with a straight line connecting portion 16-6.
  • the third structure 16-3 has one end connected to the first elastic portion 16-4 and the other end connected to the relay portion 16-6.
  • the two third structure bodies 16-3 provided between the first structure body 16-1 and one second structure body 16-2 are arranged in parallel with each other.
  • the second structure 16-2 is fixed to the main body 11 by a plurality of screws 17, and the first structure 16-1 is fixed to the mounting plate 13 by a plurality of screws 18 as shown in FIGS. 2 and 4. It
  • the strain sensor 19 is provided between the first structure 16-1 and the relay section 16-6.
  • the one end of the strain sensor 19 has a first structure between the two first elastic portions 16-4 by the fixing plate 20 and the screw 21 inserted into the back surface of the first elastic portion 16-4. It is fixed to 16-1 and the other end of the strain sensor 19 is fixed to the central part of the relay section 16-6 by a fixing plate 22 and a screw 23 inserted into the back surface of the relay section 16-6.
  • the strain sensor 19 has a plurality of strain gauges arranged on the surface of a metallic strain element.
  • the third structure 16-3, the first elastic portion 16-4, the second elastic portion 16-5, and the relay portion 16-6 are deformed. To do. Along with this, the strain element of the strain sensor 19 is deformed, and an electrical signal is output from the strain gauge.
  • each strain gauge of each strain sensor 19 constitutes a bridge circuit, and by the bridge circuit, forces in the X, Y, and Z axis directions (Fx, Fy, Fz), and the X, Y, and Z axis rotations. Torque (moment: Mx, My, Mz) is detected.
  • the main body 11 is provided with a plurality of stoppers 30 that protect the elastic body 16 from external force.
  • Each stopper 30 is composed of a cylindrical stopper member 31, a screw 32 as a fixing member, and a plurality of openings 13 a provided in the mounting plate 13.
  • the present embodiment shows a case where three stoppers 30 are provided.
  • the number of stoppers 30 is not limited to three and may be three or more.
  • the three stoppers 30 are arranged between the three second structures 16-2, respectively.
  • three protrusions 11a are provided at positions corresponding to each other between the three second structures 16-2.
  • the stopper member 31 is fixed to the protrusion 11 a of the main body 11 with the screw 32 while being inserted into the opening 13 a of the mounting plate 13.
  • the outer diameter of the stopper member 31 is set to be slightly smaller than the inner diameter of the opening 13a as described later.
  • a printed board 41 As shown in FIG. 5, a printed board 41, a plurality of flexible printed boards 42, a back cover 43, a lead wire assembly 44, and a hollow tube 45 are provided on the back surface of the main body 11.
  • the printed circuit board 41 includes a processing circuit (not shown) that supplies power to the bridge circuit and processes an output signal of the bridge circuit.
  • one end of the plurality of flexible printed boards 42 is arranged on the upper surface side of the main body 11 and connected to each strain sensor 19.
  • the other ends of the flexible printed boards 42 are connected to a processing circuit or the like on the back surface of the printed board 41.
  • the plurality of flexible printed boards 42 supply power to the strain gauges and supply signals from the strain gauges to the processing circuit.
  • the lead wire assembly 44 is connected to the printed board 41, supplies power to the processing circuit, and transmits a signal from the processing circuit.
  • the back cover 43 is fixed to the main body 11 with a plurality of screws and covers the printed board 41.
  • the main body 11, the cover 12, the mounting plate 13, the first structure 16-1 of the elastic body 16, the printed board 41, and the back cover 43 are provided at their central portions with openings so as to communicate with each other. 45 is provided in this opening.
  • one end of the hollow tube 45 penetrates the back cover 43, the printed board 41, and the first structure 16-1 and is projected onto the surface of the first structure 16-1.
  • a ring-shaped seal member 26 is provided at one end of the hollow tube 45 protruding from the surface of the first structure 16-1.
  • the sealing member 26 is made of, for example, rubber or foam material, and seals a gap between the opening of the mounting plate 13 and one end of the hollow tube 25. This prevents dust from entering the inside of the mounting plate 13 from the outside of the cover 12.
  • FIG. 6 shows the elastic body 16 according to the present embodiment.
  • the elastic body 16 is formed by bending a piece of metal.
  • the elastic body 16 includes one first structure body 16-1, three second structure bodies 16-2, six third structure bodies 16-3, and a first structure body provided on each of the third structure bodies 16-3. Between the elastic portion 16-4, the two second elastic portions 16-5 provided in each second structure 16-2, the two second elastic portions 16-5, and the two third structural bodies 16-3. And a beam portion 16-7 connecting the first structure 16-1 and the relay portion 16-6.
  • First structure 16-1, second structure 16-2, third structure 16-3, first elastic part 16-4, second elastic part 16-5, relay part 16-6, and beam part 16 -7 is formed, for example, by punching from a single metal plate.
  • the relay section 16-6 is connected to the first structure 16-1 by the beam section 16-7.
  • a second elastic portion 16-5 and a second structure 16-2 are continuously formed on both sides of the relay portion 16-6, and a third structure 16-3 and a first elastic portion 16-4 are further formed. It is formed continuously.
  • the first elastic portion 16-4 is provided at one end portion (tip portion) in the length direction of the third structure 16-3 and in a direction intersecting the length direction (width direction).
  • the width of the second structure 16-2, the third structure 16-3, and the second elastic portion 16-5 is W, and the width W1 of the first elastic portion 16-4 is smaller than the width W.
  • the width of the relay portion is set to about 2W.
  • the thickness T of the metal plate (shown in FIG. 6), the width W1 of the first elastic portion 16-4, the width W of the second elastic portion 16-5, the third structure 16-3, and the like, and the relay portion 16-6
  • the relationship of the width 2W can be changed as needed.
  • the width of the beam portion 16-7 is equal to the thickness T of the metal plate, and the beam portion 16-7 has a square cross section. Therefore, the ease of deformation in each axial direction is made equal.
  • the beam portion 16-7 is used to connect the first structure 16-1 and the relay portion 16-6. However, if the structure is such that the first structure 16-1 is connected to the third structure 16-3 or the first elastic portion 16-4, the beam portion 16-7 can be omitted.
  • the elastic body 16 shown in FIG. 6 is formed by bending a plurality of bent portions B shown by broken lines of a metal plate punched as shown in A. After bending each part of the metal plate, the tip of the first elastic part 16-4 is fixed to the first structure 16-1 by, for example, a screw.
  • the fixing method of the first elastic portion 16-4 is not limited to this, and the tip end portion of the first elastic portion 16-4 may be welded to the first structure 16-1 or may be adhered using an adhesive material. Is also possible.
  • the first elastic portion 16-4 is curved with respect to the third structure 16-3 and has a width W1 narrower than the width W of the third structure 16-3 and the like as described later. Therefore, the first elastic portion 16-4 has a bending or torsional rigidity equal to or less than the rigidity of the second elastic portion 16-5.
  • the second elastic portion 16-5 is bent into a substantially U shape and has a lower bending or torsional rigidity than the second structure 16-2.
  • the strain sensor 19 is provided between the first structure body 16-1 located between the two first elastic portions 16-4 and the central portion of the relay portion 16-6. Further, the strain sensor 19 is located between the two third structures 16-3 and arranged in parallel with the two third structures 16-3.
  • the thickness of the first elastic portion 16-4, the second elastic portion 16-5, the relay portion 16-6, the first structural body 16-1, the second structural body 16-2, and the third structural body 16-3 is It is equal to the thickness T of the metal plate.
  • the second elastic portion 16-5 is flexible as the lengths L1 and L2 of the U-shaped portion are long and the thickness T of the metal plate is thin, and the first elastic portion 16-4 and the relay portion 16-6 are flexible. Also, the thinner the thickness T of the metal plate and/or the narrower the width, the more flexible it is.
  • the thickness of the flexure element 19a that constitutes the strain sensor 19 is as follows: the first structure body 16-1, the second structure body 16-2, the third structure body 16-3, the first elastic portion 16-4, and the second elastic portion.
  • the thickness of the flexure element 19a is smaller than the thickness of 16-5 and the relay section 16-6, and the width of the flexure element 19a is the third structure 16-3, the first elastic section 16-4, the second elastic section 16-5, and the relay section. Wider than the thickness T of 16-6.
  • the flexure element 19a has a thin rectangular shape and a large flat aspect ratio. Therefore, when the flexure element 19a is a single body, the flexure element 19a has a small displacement with respect to the force in the Fx and Fy directions and the moment in the Mz direction due to the difference in the second moment of area, and the moment in the Mx and My directions. And has a characteristic that the displacement is large with respect to the force in the Fz direction.
  • the elastic body 16 increases the displacement amount in the direction parallel to the XY plane (plane including the X axis and the Y axis), and the flexure element 19a is slightly displaced. Regardless, the sensor body can realize a large displacement amount.
  • the rigidity of the flexure element 19a in the Z-axis direction is far smaller than the rigidity of the elastic body 16 in the Z-axis direction. Therefore, the rated load related to the bending of the force sensor in the Z-axis direction cannot be applied to the flexure element 19a alone. Therefore, it is necessary to control the amount of displacement of the flexure element 19a.
  • the function required for the elastic body 16 is that (1) the displacement amount is large in the XY plane. (2) To control the displacement amount of the flexure element 19a by receiving a load in the Z-axis direction.
  • the first elastic portion 16-4 is curved at the curved portion 16-4a with respect to the third structure 16-3.
  • the width W1 of the first elastic portion 16-4 is smaller than the width W of the third structure 16-3 and the like. Therefore, the first elastic portion 16-4 has a rigidity equal to or less than the rigidity of the second elastic portion 16-5, and is easily deformed in the directions of arrows C and D in the drawing.
  • the second structure body 16-2 moves relative to the first structure body 16-1.
  • the first elastic portion 16-4 connected to the third structure 16-3 is deformed so as to be twisted. Therefore, the amount of displacement of the second structure 16-2 with respect to the first structure 16-1 increases.
  • the flexure element 19a is displaced according to the thickness of the third structure 16-3, the width of the flexure element 19a, and the load, and the amount of displacement of the flexure element 19a is small. That is, in the case of the present embodiment, it is possible to increase the displacement amount of the second structure body 16-2 with respect to the first structure body 16-1 as compared with the displacement amount of the flexure element 19a.
  • FIG. 8A shows an example of a modification of the elastic body 16 according to this embodiment.
  • the rigidity of the first elastic portion 16-4 connected to the first structure body 16-1 and the third structure body 16-3 is less than or equal to the rigidity of the second elastic portion 16-5. Therefore, for example, when a force in the Fz direction is applied to the elastic body 16, the deformation of the second elastic portion 16-5 is reduced by the deformation of the first elastic portion 16-4, and the relay portion 16-6 is lifted. The quantity is reduced. Therefore, the third structure 16-3 is deformed into a substantially S-shape, and the flexure element 19a provided between the first structure 16-1 and the relay portion 16-6 is also substantially S-shape. Is transformed into.
  • FIG. 8B schematically shows the deformation of the flexure element 19a associated with the deformation of the elastic body 16 shown in FIG. 8A. It is assumed that a plurality of strain gauges 51 to 54 are arranged on the surface of the flexure element 19a as illustrated.
  • the strain gauges 51 and 52 provided on the surface of the flexure element 19a are expanded and the strain gauges 53 and 54 are compressed. It Therefore, the difference between the resistance values of the strain gauges 51 and 52 and the resistance values of the strain gauges 53 and 54 becomes large, and the output voltage of the bridge circuit composed of the strain gauges 51 to 54 can be increased. Therefore, the accuracy of the force sensor can be improved.
  • FIG. 8C shows how the elastic body 60 is deformed as a comparative example.
  • the elastic body 60 is obtained by removing the first elastic portion 16-4 from the elastic body 16 of this embodiment.
  • the first elastic portion 16-4 is not provided, when a force in the Fz direction is applied to the elastic body 60, the bending or bending of the second elastic portion 16-5 having a lower rigidity than that of the second structure 16-2 is performed.
  • the third structure 16-3 is curved due to the torsional deformation.
  • the relay section 16-6 is lifted. Therefore, the flexure element 19a provided between the first structure 16-1 and the relay portion 16-6 is also curved.
  • FIG. 8D shows the deformation of the flexure element 19a associated with the deformation of the elastic body 60 shown in FIG. 8C.
  • the strain gauges 51 and 52 and the strain gauges 53 and 54 provided on the surface of the flexure element 19a are both stretched. Therefore, the difference between the resistance values of the strain gauges 51 and 52 and the resistance values of the strain gauges 53 and 54 is small, and the output voltage of the bridge circuit constituted by the strain gauges 51 to 54 is also small. Therefore, it is difficult to improve the accuracy of the force sensor.
  • the second elastic portion 16-5 has lower bending or torsional rigidity than the second structural body 16-2. Therefore, when a force in the Fx and Fy directions is applied to the elastic body 16 and a moment in the Mz direction is applied, the elastic body 16 is provided between the first structure 16-1 and the relay portion 16-6. It is possible to increase the displacement amount of the second structure body 16-2 with respect to the first structure body 16-1 even though the strain body 19a is displaced only by the amount controlled by the third structure body 16-3 described later. it can.
  • the thickness of the U-shaped second elastic portion 16-5 is narrower than the width, and the second moment of area of the second elastic portion 16-5 is greatly different. Therefore, the second elastic portion 16-5 has high rigidity with respect to the force in the Fz direction and low rigidity with respect to the moment in the Mz direction. In consideration of the twist, the second elastic portion 16-5 is more flexible than it is supposed by simply bending even with respect to the force in the Fz direction. However, the second elastic portion 16-5 has sufficiently higher rigidity against a force in the Fz direction than a moment in the Mz direction.
  • the third structure 16-3 is provided between the first elastic portion 16-4 and the relay portion 16-6, and is arranged in parallel with the strain sensor 19. Therefore, when a force in the Fx and Fy directions and/or a moment in the Mz direction is applied to the elastic body 16, it is possible to control the displacement amount in the thickness direction and the width direction of the strain generating body 19a forming the strain sensor 19. You can
  • the width W of the third structure 16-3 is made wider than the thickness of the strain body 19a, and the thickness T of the third structure 16-3 is made thinner than the width of the strain body 19a. .. Therefore, it is possible to control the displacement amounts in the thickness direction and the width direction of the flexure elements 19a having different second moments of area by the third structure 16-3.
  • FIG. 9 shows an example of the strain sensor 19.
  • the strain sensor 19 is composed of the flexure element 19a and a plurality of strain gauges R1 to R8 provided on the surface of the flexure element 19a.
  • the strain element 19a is made of metal and has a thickness smaller than its width. Therefore, the flexure element 19a is easily deformed in the thickness direction and is difficult to be deformed in the width direction.
  • One end of the flexure element 19a is provided in the first structure 16-1 and the other end is provided in the relay section 16-6 of the second structure 16-2.
  • the strain gauges R1, R3, R5, and R8 are provided near one end of the flexure element 19a, and the strain gauges R2, R4, R6, and R7 are provided near the other end of the flexure element 19a.
  • FIG. 10 shows an example of a bridge circuit using the strain gauges R1 to R8.
  • the strain gauges R1, R2, R3, R4 configure a first bridge circuit BC1
  • the strain gauges R5, R6, R7, R8 configure a second bridge circuit BC2.
  • a series circuit of the strain gauge R2 and the strain gauge R1 and a series circuit of the strain gauge R4 and the strain gauge R3 are arranged between the power source V and the ground GND.
  • the output voltage Vout+ is output from the connection node of the strain gauge R2 and the strain gauge R1
  • the output voltage Vout ⁇ is output from the connection node of the strain gauge R4 and the strain gauge R3.
  • the output voltage Vout+ and the output voltage Vout ⁇ are supplied to the operational amplifier OP1, and the output voltage Vout is output from the output terminal of the operational amplifier OP1.
  • a series circuit of the strain gauge R6 and the strain gauge R5 and a series circuit of the strain gauge R8 and the strain gauge R7 are arranged between the power source V and the ground GND.
  • the output voltage Vout+ is output from the connection node of the strain gauge R6 and the strain gauge R5, and the output voltage Vout- is output from the connection node of the strain gauge R8 and the strain gauge R7.
  • the output voltage Vout+ and the output voltage Vout ⁇ are supplied to the operational amplifier OP2, and the output voltage Vout is output from the output terminal of the operational amplifier OP2.
  • a large output voltage can be obtained from the first bridge circuit BC1 and the second bridge circuit BC2 by the strain element 19a being deformed into an S shape by the force in the Fz direction, for example.
  • the arrangement of the strain gauges R1 to R8 with respect to the strain generating element 19a and the configuration of the bridge circuits BC1 and BC2 are not limited to this, and can be modified.
  • the elastic body 16 of the present embodiment includes a first structure body 16-1, a plurality of second structure bodies 16-2, and second elastic portions 16-5 provided in each of the second structure bodies 16-2.
  • the relay portion 16-6 provided between the two second elastic portions 16-5, the two third structures 16-3 provided in the relay portion 16-6, and the third structure body 16-3.
  • a first elastic portion 16-4 connected to the first structure body 16-1, and the rigidity of the second elastic portion 16-5 is equal to that of the second structure body 16-2.
  • the rigidity of the first elastic portion 16-4 is lower than that of the second elastic portion 16-5.
  • the overall rigidity of the elastic body 16 can be made lower than in the case where the first elastic portion 16-4 and the second elastic portion 16-5 are not provided, and the force in the Fx and Fy directions is The amount of displacement of the elastic body 16 can be increased. Therefore, it is possible to increase the displacement amount of the elastic body 16 with respect to the forces in the Fx and Fy directions, as compared with the slight deformation of the strain generating body 19a.
  • the elastic body 16 of the present embodiment is provided with the first elastic portion 16-4, the second elastic portion 16-5, and the relay portion 16-6, so that the displacement amounts in the six axial directions are substantially equal. be able to. Moreover, deformation of the third structure 16-3 and the relay portion 16-6 can be suppressed by receiving the force in the Fz direction, and the first elastic portion 16-4, the third structure 16-3, and the relay portion 16-6. Can be transformed into a substantially S-shape. Along with this, the flexure element 19a can be deformed into an S-shape, so that sufficient strain can be applied to the flexure element 19a with respect to the force in the Fz direction. Therefore, a large sensor output can be obtained, and a highly accurate force sensor can be configured.
  • the rigidity of the first elastic portion 16-4 is equal to or less than the rigidity of the second elastic portion 16-5, a large strain can be applied to the strain generating element 19a with respect to the force in the Fz direction, and a larger sensor is provided. You can get the output.
  • the rigidity includes axial rigidity, bending rigidity, shearing rigidity, and torsional rigidity.
  • the elastic body 16 has substantially the same displacement amount in the 6-axis directions, and the overall rigidity is low. Therefore, the flexure element 19a can be protected by the stopper 30 having a simple structure.
  • the gap between the side surface of the stopper member 31 of the stopper 30 and the inner surface of the opening 13a of the mounting plate 13 needs to be 20 ⁇ m or less, for example. Therefore, machining is difficult.
  • the displacement amount of the elastic body 16 under the rated load can be increased to, for example, 100 ⁇ m to 200 ⁇ m. Therefore, the distance between the side surface of the stopper member 31 and the inner surface of the opening 13a of the mounting plate 13 can be widened, so that the stopper 30 can be easily designed when overloaded and the stopper 30 can be easily machined. ..
  • the stopper 30 having high rigidity can suppress the displacement of the elastic body 16 and the strain generating body 19a during overload, it is possible to give sufficient strain to the strain generating body 19a in the range of the rated load. Is. Therefore, it is possible to obtain a high sensor output. If the stopper 30 is not provided, it is necessary to set a rated load that allows for a sufficient safety factor, assuming an overload. For this reason, sufficient strain cannot be applied to the flexure element, and it is difficult to obtain a high sensor output.
  • FIG. 11 shows a modification of the elastic body 16.
  • the first elastic portion 16-4 is provided at one end portion (tip portion) in the length direction of the third structure body 16-3 in the direction (width direction) intersecting the length direction and bends. It has a section 16-4a.
  • the first elastic portion 16-4 is formed by bending one end of the third structure 16-3 in the length direction in the thickness direction of the metal plate.
  • the first elastic portion 16-4 thus formed has a rigidity equal to or lower than the rigidity of the second elastic portion 16-5, and has a structure that is easily deformed in the directions of arrows C and D shown in the drawing.
  • the present invention is not limited to the above-described embodiments as they are, and can be embodied by modifying the constituent elements within a range not departing from the gist of the present invention at the implementation stage. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the above respective embodiments. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, the constituent elements of different embodiments may be combined appropriately.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measurement Of Force In General (AREA)
  • Manipulator (AREA)

Abstract

L'invention concerne un corps élastique comprenant : un premier corps structural (16-1) ; une pluralité de deuxièmes corps structuraux (16-2) ; et une pluralité de troisièmes corps structuraux (16-3). Une pluralité de premières parties élastiques (16-4), aptes à se déformer dans six directions axiales, sont reliées au premier corps structural (16-1). Chaque corps de la pluralité de deuxièmes corps structuraux (16-2) comprend une deuxième partie élastique (16-5) apte à se déformer dans six directions axiales, et une partie de relais (16-6) reliée à la deuxième partie élastique. La pluralité de troisièmes corps structuraux (16-3) sont disposés de manière à être situés individuellement entre : la partie relais (16-6) de l'un des deuxièmes corps structuraux (16-2) ; et l'une des premières parties élastiques (16-4). Le premier corps structural, les deuxièmes corps structuraux, les troisièmes corps structuraux, les parties relais, les premières parties élastiques et les deuxièmes parties élastiques sont chacun constitués d'une seule plaque métallique, et les deuxièmes corps structuraux, les troisièmes corps structuraux, les parties relais, les premières parties élastiques et les deuxièmes parties élastiques constituent des plaques métalliques incurvées.
PCT/JP2019/047067 2019-01-28 2019-12-02 Corps élastique et capteur de force utilisant ce dernier WO2020158168A1 (fr)

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JP2019012326A JP6999587B2 (ja) 2019-01-28 2019-01-28 弾性体とそれを用いた力覚センサ

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CN113167670B (zh) 2023-02-17
JP6999587B2 (ja) 2022-01-18
CN113167670A (zh) 2021-07-23
JP2020118647A (ja) 2020-08-06

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