WO2020149375A1 - Magnetic identification sensor - Google Patents

Magnetic identification sensor Download PDF

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Publication number
WO2020149375A1
WO2020149375A1 PCT/JP2020/001353 JP2020001353W WO2020149375A1 WO 2020149375 A1 WO2020149375 A1 WO 2020149375A1 JP 2020001353 W JP2020001353 W JP 2020001353W WO 2020149375 A1 WO2020149375 A1 WO 2020149375A1
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Prior art keywords
magnetic
magnets
detection element
magnet
sliding surface
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PCT/JP2020/001353
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French (fr)
Japanese (ja)
Inventor
川瀬 正博
裕貴 関河
匠 佐藤
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キヤノン電子株式会社
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Priority to JP2020566482A priority Critical patent/JP7008149B2/en
Priority to CN202080009541.4A priority patent/CN113302693B/en
Publication of WO2020149375A1 publication Critical patent/WO2020149375A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • GPHYSICS
    • G07CHECKING-DEVICES
    • G07DHANDLING OF COINS OR VALUABLE PAPERS, e.g. TESTING, SORTING BY DENOMINATIONS, COUNTING, DISPENSING, CHANGING OR DEPOSITING
    • G07D7/00Testing specially adapted to determine the identity or genuineness of valuable papers or for segregating those which are unacceptable, e.g. banknotes that are alien to a currency
    • G07D7/04Testing magnetic properties of the materials thereof, e.g. by detection of magnetic imprint
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices

Definitions

  • the present invention is a magnetic identification sensor for performing magnetic type detection or magnetic type detection on a paper-shaped medium incorporating a magnetic ink containing a magnetic material such as a bill or a magnetic foil strip, and performing type determination or authenticity determination, and It relates to the device.
  • the printed magnetic ink is magnetized by the magnetic field of the magnet in the magnetic sensor, and the change of the magnetic field related to the printing pattern of the magnetic ink is magnetically detected by the magnetic detection element, thereby discriminating the type of banknote and authenticity. Judging.
  • SMR semiconductor magnetic resistance element
  • Patent Document 1 For example, in a magnetic impedance element or a fluxgate sensor having a narrow operating point, as shown in Patent Document 1, magnets of opposite polarities are placed in front of and behind the magnetic detection element, and a magnetic field in a direction orthogonal to the magnetic sensitive direction of the magnetic detection element. It is shown that the magnetic field applied to the element is relaxed by strengthening the magnetic field.
  • MR magnetoresistive
  • AMR anisotropic magnetoresistive element
  • TMR tunnel magnetoresistive element
  • the magnetic identification sensor in which a magnet and a magnetic detection element are arranged below a sliding surface that is in contact with a medium to be conveyed, and which determines a magnetic pattern of a magnetic body part included in the medium,
  • a pair of magnets having an NS direction perpendicular to the sliding surface has a magnetic pole on one side of each of the magnets at a predetermined interval in the medium transport direction so that the magnets have opposite polarities, and a magnetic pole on one side of the magnet is below the sliding surface.
  • the magnetic detection element having a magnetic field detection direction perpendicular to the sliding surface is arranged in a space surrounded by a pair of the magnet and the yoke on three sides. To do.
  • the magnetic field for magnetizing the medium on the sliding surface is increased, Further, it is possible to provide a magnetic discrimination sensor in which the structure of the sensor unit including the magnetic detection element and the magnet is strengthened to suppress the influence of pseudo output (noise) due to vibration or stress.
  • the block diagram of the magnetic identification sensor which concerns on embodiment of this invention Sectional drawing of the magnetic identification sensor which concerns on embodiment of this invention.
  • the block diagram of the magnetic detection element which concerns on embodiment of this invention. 1 is an external perspective view of a magnetic identification sensor according to an embodiment of the present invention. Explanatory drawing of NS direction of a magnet, a yoke, and attachment. The graph which shows the relationship between the distance from the sliding surface of a sensor, and magnetization. An example of the external magnetic field characteristic of a magneto-impedance element. An example of the output of the magnetic detection element when the yoke is attached. The graph of the output by the floating amount of the magnetic medium from the sliding surface.
  • the block diagram of the magnetic identification sensor which concerns on other embodiment of this invention. Sectional drawing of the magnetic identification sensor which concerns on other embodiment of this invention.
  • FIG. 1 is a configuration example of a magnetic identification sensor to which the identification processing of the present case is applied, and is an external perspective view showing a positional relationship between a paper-shaped magnetic medium to be detected, a magnet constituting the sensor, and a magnetic detection element.
  • a bill is mentioned as an example of a paper-like magnetic medium.
  • the magnetic discriminating sensor of the present invention moves the magnetic medium relative to the magnetic detecting element, and detects the magnetic pattern generated by the magnet due to the magnetic material portion of the magnetic medium or the change in the magnetic pattern, which is caused by the magnetic detecting element. By doing so, the sensor discriminates the magnetic medium.
  • the sliding member 5 is shown transparently.
  • the magnetic detection element 1 and the magnets 2a and 2b are incorporated in the sensor body 4, and are arranged below the sliding surface 6 of the sliding member 5 along the medium transport direction indicated by the arrow.
  • the magnets 2a and 2b may be collectively referred to as the magnet 2.
  • the magnets 2a and 2b have a rectangular parallelepiped structure and are cut out from a block material. Basically, it is preferable to use parts having the same shape in order to make the magnetic field distribution symmetrical.
  • a Nd-Fe-B or Sm-Co based rare earth magnet is suitable because it requires a magnetic field of at least several hundred Gauss on the sliding surface 6.
  • the material is taken so that the perpendicular direction is the magnetization direction with respect to the surface of the rectangular parallelepiped magnet which is close to the lower part of the sliding surface 6.
  • two magnets 2a and 2b are arranged as a pair of magnets in parallel at a predetermined distance d in the medium transport direction.
  • the pair of magnets are arranged so that their polarities are opposite to each other. Therefore, the magnetic poles on one side of the magnets 2a and 2b are arranged in close proximity to the lower part of the sliding surface 6.
  • the iron-based yoke 3 is arranged so as to bridge and connect between the magnetic poles opposite to the sliding surface 6 (between the magnetic poles on the other side).
  • a U-shaped (in other words, horseshoe-shaped) magnet body M is formed, and a magnetized portion as a sensor is formed.
  • the requirement for the yoke 3 is that the saturation magnetic flux density is high, and the magnetic permeability itself is not so important.
  • Iron-based steel sheets having a saturation magnetic flux density of more than 2 T (tesla) are preferable because they are inexpensive and easily available.
  • the magnetic effect of the yoke 3 is that the magnetic field on the sliding surface 6 side can be almost doubled and the magnetic force for magnetizing the medium can be increased.
  • the yoke 3 may have a flat plate shape (flat plate shape) as long as at least the surfaces on which the magnets are seated are on the same plane.
  • a gap from being formed between the magnet 2 and the yoke 3
  • the magnets 2a and 2b and the magnetic detection element 1 can be attached with the yoke 3 as a reference. That is, by ensuring the flatness of the yoke 3, a desired magnetic field can be stably formed, and the detection accuracy can be improved.
  • the yoke 3 plays a role of the spine of the sensor part, and determines the rigidity of the sensor part. Considering the stress deformation at the time of assembling and the flexural strength at the time of transporting the medium, the plate thickness of 0.5 mm or more. Is preferably secured. Further, since the magnet and the magnet have an attraction force relationship, the structure of the magnet body is extremely stable, and the pseudo output due to the relative displacement of the magnet is rarely generated.
  • the magnetic detection element 1 is installed in the U-shaped inner space of the magnet body M in the lower part of the sliding surface 6, that is, in the space surrounded by the pair of magnets 2 and the yoke 3 on three sides. Magnetization is detected when the magnetic printing unit 9 of the above passes directly above. At this time, the magnetic field detection direction of the magnetic detection element 1 is arranged so as to be perpendicular to the sliding surface 6. When a large bias magnetic field is applied, the high-sensitivity magnetic detection element is magnetically saturated and does not operate. Therefore, the high-sensitivity magnetic detection element is basically installed at the position of the zero magnetic field which is approximately the midpoint of the magnets 2a and 2b.
  • the magnetic detection element 1 is installed in a space surrounded by three sides, it does not need to be separated from the yoke 3 and the magnet 2 that form the space, and is disposed in contact with the yoke 3 and the magnet 2. Is also good.
  • FIG. 2 shows a cross-sectional view of this embodiment, and the axis of symmetry of the pair of magnets is indicated by the Z-axis, but the elements are arranged so as to have magnetic field detection sensitivity in the axial direction.
  • the sensing surface (magnetically sensitive surface) of the element is the YZ plane.
  • the magnetic detection element 1 is composed of a rectangular parallelepiped non-magnetic substrate 11, and a pattern of a magnetic thin film 12 composed of a plurality of long thin parallel lines is formed on one surface thereof.
  • a magnetic thin film permalloy, Fe-Co-Si-B based amorphous, Fe-Ta-C based microcrystalline thin film or the like is used.
  • the magnetic thin film 12 has a pattern extending on the non-magnetic substrate 11 in the Z direction.
  • the magnetic thin film 12 has a magnetic detection direction in the longitudinal direction and faces the Z direction. This direction is the same as the NS direction of the adjacent magnet 2.
  • the magnetic detection element 1 shown in FIG. 3A is a type of magneto-impedance element, in which each pattern of the magnetic thin film 12 is connected in series by the conductive film 13, and a high frequency drive in the MHz band is performed between the electrode parts 14. A current is applied (energized), and a change in impedance with respect to an external magnetic field is extracted as a sensor signal voltage.
  • the sensor signal is not directly taken out from the magnetic film as shown in FIG. 3B, but the coil 15 is laminated or wound externally to perform a fluxgate operation, and a change in induction output from the detection electrode 16 is generated.
  • the output can be taken out and operated as a so-called orthogonal fluxgate sensor.
  • the magneto-impedance element exhibits a V-shaped external magnetic field characteristic as shown in FIG. 3C and has no sensitivity at zero magnetic field, a bias magnetic field to the inclined portion is required.
  • An offset magnetic field is given by slightly shifting the position in the X-axis direction.
  • the orthogonal fluxgate sensor As shown in Fig. 3(d), there is no magnetic field and there is no inclination, so bias is unnecessary and offset processing is also unnecessary.
  • the technology of the present invention can be used as long as it is a sensor that can form a pattern on one surface of other magnetoresistive elements and have magnetic field detection sensitivity in the NS direction of the magnet. In this case, by arranging the sensor so that the magnetically sensitive surface of the sensor is located at the zero point of the magnetic field generated by the magnet 2, the magnetic field generated by the magnetic medium can be effectively detected.
  • anisotropic magnetoresistive element AMR
  • tunneling magnetoresistive element TMR
  • giant magnetoresistive element GMR
  • a combination of the rectangular parallelepiped magnets 2a and 2b and the flat yoke 3 can form a magnet body M that is strong against vibrations and stresses caused by medium conveyance. On the other hand, it is preferable to maintain the interval and prevent the falling.
  • the spacing member 10 when the spacing member 10 is inserted between the surface of the element opposite to the detection surface and one of the magnets (magnet 2b) facing the surface, a pseudo output due to relative position fluctuation is generated. Is reduced, and it is easier to guarantee accuracy when incorporating. If the non-magnetic substrate 11 of the magnetic detection element 1 can be made thick and the gap with the magnet 2b can be eliminated, the gap holding member 10 can be omitted and the non-magnetic substrate 11 and the magnet 2b can be directly bonded. You may join and fix with.
  • the magnetic detection element 1 is brought into contact with the yoke 3 so that the height hs of the magnetic detection element 1 is set to be equal to or lower than the height hm of the magnet, and an external force is applied downward from the sliding surface 6 (negative Z-axis direction). Even if it is exerted, it is preferable that the magnetic detection element 1 is not loaded.
  • the present invention connects the two magnets with the yoke, increases the magnetic force of the magnet, and establishes the detection unit of the small and high-strength magnetic identification sensor with the yoke as the backbone.
  • FIG. 4 shows an external perspective view of the prototype sensor. However, for the sake of explanation, the sliding member 5 is shown transparently. The same functions as those in FIG. 1 are denoted by the same reference numerals.
  • the magnet 2 is a rectangular parallelepiped measuring 1.5 ⁇ 1.2 ⁇ 21 mm, cut out from a magnet block of Nd-Fe-B (Br1.12T), and the surface of 1.5 ⁇ 21 mm is in contact with the sliding surface, and its vertical direction. Is in the NS direction.
  • the distance d between the pair of magnets is basically set to 2.6 mm, and the bias is adjusted finely at this distance.
  • a SPCC material which is a general steel plate, having a thickness of 0.8 mm was selected.
  • the saturation magnetic flux density is 2.04T.
  • the NS horizontal direction (b) is clearly worse than the distance from the sliding surface.
  • the distance from the sliding surface 6 increases slightly even if the distance from the sliding surface 6 increases, and the magnetic poles are preferably outward.
  • the positional relationship between the four magnetic poles of the left and right magnets affects the detection result, so not only the distance between the magnets, but also the parallelism (tilt) of the left and right magnets in the NS direction It will greatly affect the variation.
  • the magnetic poles are basically treated as two surfaces of the magnets 2a and 2b on the sliding surface 6 side, and it becomes easy to secure the bias of the magnetic detection element 1.
  • the magnetic detection element 1 is constructed on a ceramic non-magnetic substrate 11 having a thickness of 0.75 mm so that the surface on which the magnetic thin film 12 is formed is 1.15 ⁇ 21 mm.
  • the magnetic thin film 12 has a thickness of 2.6 ⁇ m, a pattern width of 18 ⁇ m, and a length of 0.5 mm, which are arranged at equal intervals, and are divided into four parts so that they can function as 4 channels in a multi-channel, and each electrode part 14 is provided.
  • a non-magnetic spacing member 10 that regulates the spacing between the magnetic detection element 1 and the magnet 2b was sandwiched on the back surface of the element, and the yoke 3 and the magnet 2b were fixed with an adhesive.
  • the thickness of the spacing member 10 was 0.5 mm.
  • the magnetic detection element 1 in this example operates as a magnetic impedance element, applies a pulse current in the MHz band, and extracts the amplitude change with respect to the external magnetic field by the AM detection circuit.
  • the magneto-impedance element has an external magnetic field characteristic that requires a bias magnetic field with respect to the magnetic thin film portion, and when the magnetic medium 8 is not detected, the output is located in the area A or B. set.
  • the adjustment can be easily performed by finely adjusting the distance to the magnet 2a on the side to which the distance maintaining member 10 is not adhered. This time, in order to select the region B and perform the shift adjustment of about 20 [Oe], it is dealt with by slightly shifting it from the center of the pair of magnets by about several tens of ⁇ m (region of 40 [Oe] or less).
  • the magnetic detection element 1 when a flux gate element is used as the magnetic detection element 1, since it can be operated at the center of the pair of magnets, it may be set at a position where the output becomes the zero point. In this way, by arranging the magnetic thin film of the magnetic detection element 1 near the zero point of the magnetic field generated by the pair of magnets, the magnetic detection element 1 is suitable for use with either a magnetic impedance element or a fluxgate element. Can be operated.
  • a test medium for the magnetic medium 8 a medium having the magnetic printing unit 9 shown in FIG. 4 was transported, and the decrease in output with respect to the floating amount on the sliding surface 6 was evaluated.
  • adjustment was performed by sandwiching 0.1 mm paper one by one.
  • the magnetic printing unit 9 is a 3 mm-wide printed long and narrow line with soft magnetic ink.
  • Fig. 8 shows an example of the output voltage measurement results. This waveform is measured in a state where the sliding surface 6 and the magnetic medium 8 are in close contact with each other and the floating amount is zero.
  • the magnetic printing unit 9 is magnetized in the transport direction and has a differential waveform when detecting a magnetic field in the Z direction, and expresses an output value as a peak-to-peak value.
  • the solid line c in FIG. 8 is the output waveform when the yoke 3 of the present case is provided, and the broken line a in FIG. 8 is the output waveform data when the measurement is performed by replacing the iron-based yoke material with a non-magnetic metal material of phosphor bronze. Is.
  • the magnetization also increases in accordance with the applied magnetic field, so the magnetic field on the sliding surface is approximately 1.8 times larger in the case of the solid line c than in the case of the broken line a, so the output The voltage increased about 1.7 times.
  • FIG. 9 is a graph showing the output change with respect to the floating amount of the medium. Prototype data in the case where the NS direction of the magnet is horizontal is also shown so that the data corresponding to (a), (b), and (c) of FIG. 6 can be compared.
  • FIG. 4 shows that it can be applied as a multi-channel sensor used in ATMs of banks, and it is easy to connect and arrange a plurality of sensors, and the detection width of the magnetic medium 8 can be freely set. The degree is also high.
  • the entire sensor portion can be thinned while ensuring strength.
  • FIG. 10 Another embodiment of the present invention will be described with reference to FIG.
  • the magnet and the magnetic detection element have a length that is easy to handle, it is preferable to connect and use a plurality of sensor units 31 to 34 for a wide range of detection applications such as bills. That is, it becomes as shown in FIG. 10 in which a plurality of sensor unit parts of the embodiment shown in FIG. 4 are connected.
  • the magnetic detection elements 21 are provided in pairs of a magnetic thin film row F22 near the sliding portion and a magnetic thin film row R23 apart from the sliding portion, and the detection portions are arranged on the same non-magnetic substrate.
  • it is configured to operate differentially. With this element configuration, it is possible to detect only the component with a large magnetic gradient from the sliding surface side due to medium transport, and to significantly remove the surrounding disturbing magnetic field, for example, a nearby bearing in the transport mechanism. It is possible to reduce the magnetic effect on the shaft and shaft.
  • the magnetic detection element 21, the magnet 2 and the end of the yoke 3 overlap on the connection side of the sensor unit end with respect to the y direction in FIG. 10, and the magnetic field is likely to be disturbed due to discontinuity with the adjacent unit, resulting in magnetic detection. It adversely affects the operating point of the device.
  • a thin plate of a magnetic metal such as a silicon steel plate or permalloy that can be magnetized is formed into a disc or a strip-shaped small piece, and the side surface of the magnet is formed. It can be easily modified by adding to.
  • This bias magnetic field can be corrected not only at the end of the unit like the magnetic thin plate 24a in FIG. 10 but also at the center of the unit like the magnetic thin plate 24b. It is also effective for the correction of edge variations, etc.) and edge chipping.
  • the present invention has a feature that the sensor unit can be unitized and can freely deal with the detection width of various media.
  • the present invention is not limited to the embodiment described above, and various modifications can be made without departing from the scope of the present invention.
  • the parts having the same shape as the magnets 2a and 2b are preferable, but the present invention is not limited to this, and for example, the magnet 2a having a larger size is used, thereby biasing the magnetic detection element 1.
  • a magnetic field may be formed.

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  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
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Abstract

The present invention makes it possible to increase an applied magnetic field on a sliding surface side of a magnetic identification sensor, thereby increasing an output of the sensor and stabilizing waveforms. Provided is a magnetic identification sensor in which magnets and a magnetic detection element are integrated at a lower part of a sliding surface which comes into contact with a medium being conveyed, and which determines a magnetic pattern of a magnetic material part within the medium, said magnetic identification sensor being characterized in that: a substantially U-shaped (horseshoe-shaped) magnetizing part is formed by disposing a pair of rectangular parallelepiped magnets, the N-S direction of which is perpendicular to the sliding surface, at a predetermined interval in a medium conveyance direction in parallel such that the polarities are opposite to each other, and by having the magnetic pole on one side of each of the magnets arranged close to the lower part of the sliding surface, and having the magnetic poles on a side opposite to the sliding surface coupled to each other by an iron-based yoke member; the magnetic detection element, a magnetic field detecting direction of which is a direction perpendicular to the sliding surface, is arranged in a space within the magnetizing part; and the magnetic pattern of the medium, which has been magnetized in the medium conveyance direction as a result of passing over the pair of magnets above the sliding surface, is read by the magnetic detection element.

Description

磁気識別センサMagnetic identification sensor
 本発明は、紙幣等のように磁性体を含んだ磁気インクの印刷もしくは磁性の箔帯を組み込んだ紙状の媒体に対して磁気の検知を行い、種類判別や真贋判定を行う磁気識別センサ及び装置に関するものである。 The present invention is a magnetic identification sensor for performing magnetic type detection or magnetic type detection on a paper-shaped medium incorporating a magnetic ink containing a magnetic material such as a bill or a magnetic foil strip, and performing type determination or authenticity determination, and It relates to the device.
 従来、紙幣の識別では印刷された磁気インクを磁気センサ内の磁石の磁場により磁化し、磁気インクの印刷パターンに関わる磁場の変化を磁気検出素子により磁気検知することで、紙幣の種類判別や真贋判定を行っている。 Conventionally, in the identification of banknotes, the printed magnetic ink is magnetized by the magnetic field of the magnet in the magnetic sensor, and the change of the magnetic field related to the printing pattern of the magnetic ink is magnetically detected by the magnetic detection element, thereby discriminating the type of banknote and authenticity. Judging.
 媒体に使用される磁性体には、保磁力の大きい所謂硬磁性と呼ばれるものと保磁力をほとんど持たない所謂軟磁性と呼ばれるものが存在する。特に、磁気センサで軟磁性体の検知に対応するために、センサ側に配置された磁石で軟磁性体に磁場を印加しながら、磁気検出素子でその磁化を検知する必要がある。 There are two types of magnetic materials used for media, so-called hard magnetism, which has a large coercive force, and so-called soft magnetism, which has almost no coercive force. In particular, in order to deal with the detection of the soft magnetic material by the magnetic sensor, it is necessary to detect the magnetization of the soft magnetic material while the magnetic field is applied to the soft magnetic material by the magnet arranged on the sensor side.
 半導体の磁気抵抗素子(SMR)では磁気飽和がないため、その素子の真下に磁石を設置でき、磁石に対する制約がない。しかし、それ以外のほとんどのセンサは、磁性体に関わる磁気飽和が存在し、磁石の設置に関しては、動作点への制約の中で工夫をしている。 Since semiconductor magnetic resistance element (SMR) does not have magnetic saturation, a magnet can be installed directly under the element and there is no restriction on the magnet. However, most of the other sensors have magnetic saturation related to the magnetic substance, and the installation of the magnet is devised within the restriction on the operating point.
特開2007-286012号公報JP, 2007-286012, A 特許第6209674号公報Patent No. 6209674
 例えば、動作点の狭い磁気インピーダンス素子やフラックスゲートセンサにおいては、特許文献1に示すように磁気検出素子の前後に互いに逆極性の磁石を置き、磁気検出素子の感磁方向と直交する方向の磁界を強めることで、素子に掛かる磁界を緩和する事例が示されている。 For example, in a magnetic impedance element or a fluxgate sensor having a narrow operating point, as shown in Patent Document 1, magnets of opposite polarities are placed in front of and behind the magnetic detection element, and a magnetic field in a direction orthogonal to the magnetic sensitive direction of the magnetic detection element. It is shown that the magnetic field applied to the element is relaxed by strengthening the magnetic field.
 また、磁気飽和が存在する異方性磁気抵抗素子(AMR),トンネル磁気抵抗素子(TMR)等の磁気抵抗(MR)素子でも、特許文献2にあるように素子の前後に互いに逆極性の磁石を置くことで、動作点に影響を与えないようにしている。 Further, even in a magnetoresistive (MR) element such as an anisotropic magnetoresistive element (AMR) or a tunnel magnetoresistive element (TMR) in which magnetic saturation is present, magnets having opposite polarities before and after the element as described in Patent Document 2. Is set so that it does not affect the operating point.
 しかし、これらは磁石の配置に工夫がなされているが、磁石の配置によって摺動面側の磁界分布に差異があり、媒体の搬送に対する摺動面での浮きによる感度低下、所謂スペーシングロスが生じる。性能向上の観点では、そのロスを減らす要求が強まっている。 However, although the arrangement of the magnets has been devised, there is a difference in the magnetic field distribution on the sliding surface side depending on the arrangement of the magnets, and the sensitivity is lowered due to the floating on the sliding surface against the conveyance of the medium, so-called spacing loss. Occurs. From the viewpoint of improving performance, there is an increasing demand for reducing the loss.
 また、媒体事情では近年保磁力が1kOe(エルステッド)を大幅に超える高保磁力の媒体が登場し、組み込まれる磁石の磁力を上げる必要が生じている。磁石の磁力を上げる上ではサイズに制約を与えたり、振動や応力に対する磁石と磁気検出素子の相対変位による疑似出力(ノイズ)の発生等の悪影響が出てしまう。 Also, in the medium circumstance, in recent years, a medium with a high coercive force whose coercive force greatly exceeds 1 kOe (Oersted) has appeared, and it is necessary to increase the magnetic force of the incorporated magnet. In order to increase the magnetic force of the magnet, there are adverse effects such as restriction on the size and generation of pseudo output (noise) due to relative displacement of the magnet and the magnetic detection element against vibration and stress.
 上記を鑑み、本発明に係る磁気識別センサは、
 搬送される媒体と接する摺動面の下部に磁石及び磁気検出素子が配置され、前記媒体に含まれる磁性体部の磁気パターンを判別する磁気識別センサであって、
 前記摺動面に対して垂直のNS方向を持つ一対の磁石が、互いに逆極性になるように媒体搬送方向へ所定の間隔で、それぞれの前記磁石の一方側の磁極が前記摺動面の下部に近接して並設され、
 前記磁石の他方側の磁極同士がヨークで接続された着磁部が形成され、
 前記着磁部において、一対の前記磁石と前記ヨークとで三方が囲まれた空間内に、前記摺動面に対して垂直の磁界検知方向を有する前記磁気検出素子が配置されることを特徴とする。
In view of the above, the magnetic identification sensor according to the present invention,
A magnetic identification sensor in which a magnet and a magnetic detection element are arranged below a sliding surface that is in contact with a medium to be conveyed, and which determines a magnetic pattern of a magnetic body part included in the medium,
A pair of magnets having an NS direction perpendicular to the sliding surface has a magnetic pole on one side of each of the magnets at a predetermined interval in the medium transport direction so that the magnets have opposite polarities, and a magnetic pole on one side of the magnet is below the sliding surface. Are juxtaposed close to
A magnetized portion in which magnetic poles on the other side of the magnet are connected by a yoke is formed,
In the magnetizing part, the magnetic detection element having a magnetic field detection direction perpendicular to the sliding surface is arranged in a space surrounded by a pair of the magnet and the yoke on three sides. To do.
 本発明によれば、一対の磁石を用いて摺動面上に発生する磁場の方向を規定するものにおいて、ヨークを設けることによって、摺動面上における媒体を磁化するための磁場を増大させ、さらに磁気検出素子と磁石を含むセンサ部の構成を強固にして、振動や応力等による疑似出力(ノイズ)の影響を抑えた磁気識別センサを提供できる。 According to the present invention, in the one in which the direction of the magnetic field generated on the sliding surface is defined by using a pair of magnets, by providing the yoke, the magnetic field for magnetizing the medium on the sliding surface is increased, Further, it is possible to provide a magnetic discrimination sensor in which the structure of the sensor unit including the magnetic detection element and the magnet is strengthened to suppress the influence of pseudo output (noise) due to vibration or stress.
本発明の実施形態に係る磁気識別センサの構成図。The block diagram of the magnetic identification sensor which concerns on embodiment of this invention. 本発明の実施形態に係る磁気識別センサの断面図。Sectional drawing of the magnetic identification sensor which concerns on embodiment of this invention. 本発明の実施形態に係る磁気検出素子の構成図。The block diagram of the magnetic detection element which concerns on embodiment of this invention. 本発明の実施形態に係る磁気識別センサの外観斜視図。1 is an external perspective view of a magnetic identification sensor according to an embodiment of the present invention. 磁石のNS方向とヨークと取り付けの説明図。Explanatory drawing of NS direction of a magnet, a yoke, and attachment. センサの摺動面からの距離と磁化の関係を示すグラフ。The graph which shows the relationship between the distance from the sliding surface of a sensor, and magnetization. 磁気インピーダンス素子の外部磁界特性の一例。An example of the external magnetic field characteristic of a magneto-impedance element. ヨークを取り付けた場合の磁気検出素子の出力の例。An example of the output of the magnetic detection element when the yoke is attached. 摺動面からの磁気媒体の浮き量による出力のグラフ。The graph of the output by the floating amount of the magnetic medium from the sliding surface. 本発明の他の実施形態に係る磁気識別センサの構成図。The block diagram of the magnetic identification sensor which concerns on other embodiment of this invention. 本発明の他の実施形態に係る磁気識別センサの断面図。Sectional drawing of the magnetic identification sensor which concerns on other embodiment of this invention.
 本発明を図示の実施形態に基づいて詳細に説明する。図1は本件の識別処理を適用する磁気識別センサの構成例であり、検知対象となる紙状の磁気媒体とセンサを構成する磁石と磁気検出素子の位置関係を表す外観斜視図である。紙状の磁気媒体の一例としては紙幣が挙げられる。本発明の磁気識別センサは、この磁気媒体を磁気検出素子に対して相対移動させ、その際に現れる磁気媒体における磁性体部により磁石が発生する磁気パターンもしくは磁気パターンの変化を磁気検出素子によって検出することで、磁気媒体を判別するセンサである。なお、説明のために摺動部材5を透過させて示している。 The present invention will be described in detail based on the illustrated embodiment. FIG. 1 is a configuration example of a magnetic identification sensor to which the identification processing of the present case is applied, and is an external perspective view showing a positional relationship between a paper-shaped magnetic medium to be detected, a magnet constituting the sensor, and a magnetic detection element. A bill is mentioned as an example of a paper-like magnetic medium. The magnetic discriminating sensor of the present invention moves the magnetic medium relative to the magnetic detecting element, and detects the magnetic pattern generated by the magnet due to the magnetic material portion of the magnetic medium or the change in the magnetic pattern, which is caused by the magnetic detecting element. By doing so, the sensor discriminates the magnetic medium. For the sake of explanation, the sliding member 5 is shown transparently.
 磁気検出素子1と磁石2a,2bはセンサ本体4に組み込まれ、摺動部材5の摺動面6の下部に、矢印で示す媒体搬送方向に沿って並んでいる。なお、以下の説明において、磁石2aと2bとをまとめて磁石2と表現することがある。 The magnetic detection element 1 and the magnets 2a and 2b are incorporated in the sensor body 4, and are arranged below the sliding surface 6 of the sliding member 5 along the medium transport direction indicated by the arrow. In the following description, the magnets 2a and 2b may be collectively referred to as the magnet 2.
 先ず、磁石の構成について説明する。磁石2a、2bは直方体の構造であり、ブロック材から切り出される。基本的には磁場分布を対称の構成とするために、同一形状の部品を用いることが好ましい。 First, the structure of the magnet will be explained. The magnets 2a and 2b have a rectangular parallelepiped structure and are cut out from a block material. Basically, it is preferable to use parts having the same shape in order to make the magnetic field distribution symmetrical.
 磁石2a、2bの材料としては、摺動面6上で少なくとも数百ガウス以上の磁場を必要とするため、Nd-Fe-BやSm-Co系の希土類磁石が適している。 As a material for the magnets 2a and 2b, a Nd-Fe-B or Sm-Co based rare earth magnet is suitable because it requires a magnetic field of at least several hundred Gauss on the sliding surface 6.
 磁石2a、2bのNS方向を摺動面6に垂直な方向へ取るため、直方体磁石における摺動面6の下部に近接する面に対して垂直方向が磁化方向となるように材料取りを行う。 In order to set the NS direction of the magnets 2a and 2b in the direction perpendicular to the sliding surface 6, the material is taken so that the perpendicular direction is the magnetization direction with respect to the surface of the rectangular parallelepiped magnet which is close to the lower part of the sliding surface 6.
 磁石2a、2bの2本を図1に示すように、一対の磁石として所定の間隔dで平行に媒体搬送方向へ並べる。一対の磁石極性は互いに逆極性になるように配置される。従って、摺動面6の下部に対して磁石2a、2bの一方側の磁極が近接して並設される。 As shown in FIG. 1, two magnets 2a and 2b are arranged as a pair of magnets in parallel at a predetermined distance d in the medium transport direction. The pair of magnets are arranged so that their polarities are opposite to each other. Therefore, the magnetic poles on one side of the magnets 2a and 2b are arranged in close proximity to the lower part of the sliding surface 6.
 さらに摺動面6とは反対の磁極間(他方側の磁極間)同士を橋渡しして接続するように鉄系のヨーク3を配置する。一対の磁石の片方の磁極同士の磁束をヨーク3内に閉じることで、コの字状(言い方を変えれば馬蹄形)の磁石体Mを構成し、センサとしての着磁部を形成する。ヨーク3の要件は、飽和磁束密度の高いことが優先され、透磁率自体はそれほど重要ではない。鉄系の鋼板では飽和磁束密度が2T(テスラ)を超えるものは安価で容易に入手できるため好ましい。 Further, the iron-based yoke 3 is arranged so as to bridge and connect between the magnetic poles opposite to the sliding surface 6 (between the magnetic poles on the other side). By closing the magnetic flux between the magnetic poles of one of the pair of magnets in the yoke 3, a U-shaped (in other words, horseshoe-shaped) magnet body M is formed, and a magnetized portion as a sensor is formed. The requirement for the yoke 3 is that the saturation magnetic flux density is high, and the magnetic permeability itself is not so important. Iron-based steel sheets having a saturation magnetic flux density of more than 2 T (tesla) are preferable because they are inexpensive and easily available.
 ヨーク3の磁気的効果は、後述するように、摺動面6側の磁場を2倍近くに大きくでき、媒体を磁化するための磁力を大きくすることができている。ヨーク3の形状は平面性を有する板状(平板状)のものでよく、少なくとも磁石が着座する面同士が同一平面上であればよい。このように、磁石2とヨーク3との間に隙間が生じないようにすることによって、磁石とヨークとの間に磁極が発生することを防ぎ、一体の着磁部としての磁石体Mを簡易に形成することができる。また、ヨーク3を基準として磁石2a、2bおよび磁気検出素子1を取り付けることができる。すなわち、ヨーク3の平面性を確保することで、所望の磁界を安定して形成することができ、検出精度を向上することができる。 As will be described later, the magnetic effect of the yoke 3 is that the magnetic field on the sliding surface 6 side can be almost doubled and the magnetic force for magnetizing the medium can be increased. The yoke 3 may have a flat plate shape (flat plate shape) as long as at least the surfaces on which the magnets are seated are on the same plane. As described above, by preventing a gap from being formed between the magnet 2 and the yoke 3, it is possible to prevent a magnetic pole from being generated between the magnet and the yoke 3, and to simplify the magnet body M as an integral magnetizing portion. Can be formed. Further, the magnets 2a and 2b and the magnetic detection element 1 can be attached with the yoke 3 as a reference. That is, by ensuring the flatness of the yoke 3, a desired magnetic field can be stably formed, and the detection accuracy can be improved.
 また、このヨーク3は、センサ部の背骨的な役割で、センサ部の剛性を決定することになり、組み込み時の応力変形や媒体搬送時のたわみ強度を考えると、0.5mm以上の板厚を確保しておくことが好ましい。また、磁石とは吸着の力関係であるため、磁石体の構成としては極めて安定しており、磁石の相対変位に起因する疑似出力が生じてしまうことも少ない。 Further, the yoke 3 plays a role of the spine of the sensor part, and determines the rigidity of the sensor part. Considering the stress deformation at the time of assembling and the flexural strength at the time of transporting the medium, the plate thickness of 0.5 mm or more. Is preferably secured. Further, since the magnet and the magnet have an attraction force relationship, the structure of the magnet body is extremely stable, and the pseudo output due to the relative displacement of the magnet is rarely generated.
 磁気検出素子1はその磁石体Mにおけるコの字状の内側の空間で摺動面6の下部、すなわち、一対の磁石2とヨーク3によって三方が囲まれた空間内に設置され、磁気媒体8の磁気印刷部9が真上を通過する際の磁化を検知する。このとき、磁気検出素子1の磁界検知方向は摺動面6に垂直になるように配置される。高感度の磁気検出素子は、大きなバイアス磁界が印加されると、磁気飽和して動作しなくなるため、基本的には磁石2a、2bのほぼ中点であるゼロ磁場の位置に設置する。バイアス磁界が必要な磁気検出素子でも、その位置から少しずらすことで、必要なバイアス磁界(数から数十Oe程度)を確保することが可能である。なお、磁気検出素子1は三方が囲まれた空間に設置するとしたが、空間を形成するヨーク3や磁石2から離隔している必要はなく、ヨーク3や磁石2と当接して配置されていても良い。 The magnetic detection element 1 is installed in the U-shaped inner space of the magnet body M in the lower part of the sliding surface 6, that is, in the space surrounded by the pair of magnets 2 and the yoke 3 on three sides. Magnetization is detected when the magnetic printing unit 9 of the above passes directly above. At this time, the magnetic field detection direction of the magnetic detection element 1 is arranged so as to be perpendicular to the sliding surface 6. When a large bias magnetic field is applied, the high-sensitivity magnetic detection element is magnetically saturated and does not operate. Therefore, the high-sensitivity magnetic detection element is basically installed at the position of the zero magnetic field which is approximately the midpoint of the magnets 2a and 2b. Even for a magnetic detection element that requires a bias magnetic field, it is possible to secure the required bias magnetic field (about several to several tens Oe) by slightly shifting it from the position. Although the magnetic detection element 1 is installed in a space surrounded by three sides, it does not need to be separated from the yoke 3 and the magnet 2 that form the space, and is disposed in contact with the yoke 3 and the magnet 2. Is also good.
 図2は本実施形態の断面図を示し、一対の磁石の対称軸はZ軸で示されるが、その軸方向に磁界検出感度を持つように素子を配置する。素子の検知面(感磁面)はYZ平面となる。 FIG. 2 shows a cross-sectional view of this embodiment, and the axis of symmetry of the pair of magnets is indicated by the Z-axis, but the elements are arranged so as to have magnetic field detection sensitivity in the axial direction. The sensing surface (magnetically sensitive surface) of the element is the YZ plane.
 摺動面6側では2つの磁石2a、2b間で発生する磁束Φpに関わってX方向にはかなり強い磁場が掛かるが、Z方向ではその磁場とは直交することになり、ゼロ磁場の環境が得られる。 On the sliding surface 6 side, a fairly strong magnetic field is applied in the X direction due to the magnetic flux Φp generated between the two magnets 2a and 2b, but in the Z direction, the magnetic field is orthogonal to the magnetic field and the zero magnetic field environment is generated. can get.
 また、このことは磁石や素子の倒れが僅かでもあると、磁気検出素子へ不要な磁場が掛かることを意味するので、磁石の加工精度やヨークの平面度が重要となる。本件の構成では、磁石の直角度やヨークの平面性の部品精度の確保は容易であり、組立精度への不安は少ない。 Also, this means that an unnecessary magnetic field is applied to the magnetic detection element if the magnet or element is slightly tilted, so the processing accuracy of the magnet and the flatness of the yoke are important. In the configuration of the present case, it is easy to secure the accuracy of parts such as the perpendicularity of the magnet and the flatness of the yoke, and there is little concern about the assembly accuracy.
 磁気検出素子1は図3(a)で示すように直方体の非磁性基板11からなり、その一面には平行に細長い複数本からなる磁性薄膜12のパターンが形成されている。磁性薄膜は、パーマロイ,Fe-Co-Si-B系アモルファス,Fe-Ta-C系微結晶薄膜等が使われる。本実施形態においては、磁性薄膜12は、非磁性基板11上においてZ方向に延在するパターンが形成されている。 As shown in FIG. 3( a ), the magnetic detection element 1 is composed of a rectangular parallelepiped non-magnetic substrate 11, and a pattern of a magnetic thin film 12 composed of a plurality of long thin parallel lines is formed on one surface thereof. As the magnetic thin film, permalloy, Fe-Co-Si-B based amorphous, Fe-Ta-C based microcrystalline thin film or the like is used. In the present embodiment, the magnetic thin film 12 has a pattern extending on the non-magnetic substrate 11 in the Z direction.
 磁性薄膜12は長手方向に磁気検出方向を持ち、Z方向を向いている。この方向は、隣接する磁石2のNS方向と同方向である。 The magnetic thin film 12 has a magnetic detection direction in the longitudinal direction and faces the Z direction. This direction is the same as the NS direction of the adjacent magnet 2.
 図3(a)で示した磁気検出素子1は磁気インピーダンス素子のタイプであり、磁性薄膜12の各パターンを導電膜13で直列になるように結び、電極部14間へMHz帯の高周波の駆動電流を印加(通電)して、外部磁場に対するインピーダンスの変化をセンサ信号電圧として取り出す。 The magnetic detection element 1 shown in FIG. 3A is a type of magneto-impedance element, in which each pattern of the magnetic thin film 12 is connected in series by the conductive film 13, and a high frequency drive in the MHz band is performed between the electrode parts 14. A current is applied (energized), and a change in impedance with respect to an external magnetic field is extracted as a sensor signal voltage.
 別の方法では、図3(b)のように磁性膜から直接センサ信号を取り出さずに、コイル15を積層もしくは外付けで巻回してフラックスゲート動作させ、誘導出力の変化として検出電極16からの出力を取り出し、所謂直交フラックスゲートセンサとしても動作させることができる。 In another method, the sensor signal is not directly taken out from the magnetic film as shown in FIG. 3B, but the coil 15 is laminated or wound externally to perform a fluxgate operation, and a change in induction output from the detection electrode 16 is generated. The output can be taken out and operated as a so-called orthogonal fluxgate sensor.
 磁気インピーダンス素子では、図3(C)のようにV字状の外部磁界特性を示して、ゼロ磁場では感度を持たないため、傾斜部へのバイアス磁界が必要であり、図1または図2のX軸方向に僅かに位置をずらすことで、オフセットの磁界を与える。 Since the magneto-impedance element exhibits a V-shaped external magnetic field characteristic as shown in FIG. 3C and has no sensitivity at zero magnetic field, a bias magnetic field to the inclined portion is required. An offset magnetic field is given by slightly shifting the position in the X-axis direction.
 直交フラックスゲートセンサの場合は図3(d)のように磁界ゼロで傾きを持つためバイアスが不要で、オフセット処理も不要となる。その他の磁気抵抗素子でも一面にパターンを形成して、磁石のNS方向に磁界検出感度を持たせることが可能なセンサであれば、本件の技術が活用できる。この場合、センサの感磁面が、磁石2によって生じる磁界のゼロ点に位置するようにセンサを配置することで、磁気媒体によって生じる磁界を有効に検出できる。 In the case of the orthogonal fluxgate sensor, as shown in Fig. 3(d), there is no magnetic field and there is no inclination, so bias is unnecessary and offset processing is also unnecessary. The technology of the present invention can be used as long as it is a sensor that can form a pattern on one surface of other magnetoresistive elements and have magnetic field detection sensitivity in the NS direction of the magnet. In this case, by arranging the sensor so that the magnetically sensitive surface of the sensor is located at the zero point of the magnetic field generated by the magnet 2, the magnetic field generated by the magnetic medium can be effectively detected.
 具体的には、異方性磁気抵抗素子(AMR)、トンネル型磁気抵抗素子(TMR)、巨大磁気抵抗素子(GMR)も候補として挙げられる。 Specifically, anisotropic magnetoresistive element (AMR), tunneling magnetoresistive element (TMR), and giant magnetoresistive element (GMR) are also candidates.
 直方体状の磁石2a、2bと平面状のヨーク3の組み合わせでは、媒体搬送による振動や応力等に対して強固な磁石体Mを構成できるが、磁気検出素子1の配置においても磁石2a、2bに対し、間隔保持や倒れの防止を行うことが好ましい。 A combination of the rectangular parallelepiped magnets 2a and 2b and the flat yoke 3 can form a magnet body M that is strong against vibrations and stresses caused by medium conveyance. On the other hand, it is preferable to maintain the interval and prevent the falling.
 図2に示すように、素子の検知面と反対側の面と、その面と対向する片方の磁石(磁石2b)との間に間隔保持部材10を入れると、相対位置変動に起因する疑似出力の発生が低減し、組み込み時の精度保証もしやすくなる。なお、磁気検出素子1の非磁性基板11を厚くすることができて、磁石2bとの隙間を無くすことができれば、間隔保持部材10を省略し、非磁性基板11と磁石2bとを直接接着などで接合して固定してもよい。 As shown in FIG. 2, when the spacing member 10 is inserted between the surface of the element opposite to the detection surface and one of the magnets (magnet 2b) facing the surface, a pseudo output due to relative position fluctuation is generated. Is reduced, and it is easier to guarantee accuracy when incorporating. If the non-magnetic substrate 11 of the magnetic detection element 1 can be made thick and the gap with the magnet 2b can be eliminated, the gap holding member 10 can be omitted and the non-magnetic substrate 11 and the magnet 2b can be directly bonded. You may join and fix with.
 また、磁気検出素子1をヨーク3に当接させて、磁気検出素子1の高さhsを磁石の高さhm以下にしておき、摺動面6から下方(Z軸負の方向)に外力が及ぼされた場合でも、磁気検出素子1に荷重が掛からないようにしておくことが好ましい。 Further, the magnetic detection element 1 is brought into contact with the yoke 3 so that the height hs of the magnetic detection element 1 is set to be equal to or lower than the height hm of the magnet, and an external force is applied downward from the sliding surface 6 (negative Z-axis direction). Even if it is exerted, it is preferable that the magnetic detection element 1 is not loaded.
 本発明は以上のように、2つの磁石をヨークで結び、磁石の磁力を増大させ、ヨークを背骨とした小型で強度の高い磁気識別センサの検知部を確立した。 As described above, the present invention connects the two magnets with the yoke, increases the magnetic force of the magnet, and establishes the detection unit of the small and high-strength magnetic identification sensor with the yoke as the backbone.
 次に、試作した結果を元に、本実施形態の有効性について説明をする。図4に試作したセンサの外観斜視図を示す。但し、説明のために摺動部材5を透過させて表示している。図1と同じ機能のものについては同じ符号を用いて表記する。 Next, the effectiveness of this embodiment will be explained based on the results of trial production. FIG. 4 shows an external perspective view of the prototype sensor. However, for the sake of explanation, the sliding member 5 is shown transparently. The same functions as those in FIG. 1 are denoted by the same reference numerals.
 磁石2は1.5×1.2×21mmの直方体で、Nd-Fe-B(Br1.12T)の磁石ブロックから切り出し、1.5×21mmの面が摺動面に当接し、その垂直方向がNS方向となるようにする。一対の磁石間の間隔dを2.6mmとすることを基本とし、バイアスの調整ではこの間隔で微調整を行う。ヨーク3は、一般鋼板であるSPCC材で0.8mmの板厚のものを選択した。飽和磁束密度は2.04Tである。 The magnet 2 is a rectangular parallelepiped measuring 1.5×1.2×21 mm, cut out from a magnet block of Nd-Fe-B (Br1.12T), and the surface of 1.5×21 mm is in contact with the sliding surface, and its vertical direction. Is in the NS direction. The distance d between the pair of magnets is basically set to 2.6 mm, and the bias is adjusted finely at this distance. For the yoke 3, a SPCC material, which is a general steel plate, having a thickness of 0.8 mm was selected. The saturation magnetic flux density is 2.04T.
 ここで、磁石のNS方向選択とヨーク付与の検証結果を説明する。図5のとおり、図4の構成をモデル化し、摺動面側で発生する磁場を計算により比較した。(a)は図4の構成でヨークを無しとし、(b)では(a)のレイアウトのままで、磁石2のNS方向を水平とした場合、(c)は図4の構成そのものである。それぞれの結果を図6に示す。 Here, the verification results of selecting the magnet NS direction and attaching the yoke will be described. As shown in FIG. 5, the configuration of FIG. 4 was modeled and the magnetic fields generated on the sliding surface side were compared by calculation. When (a) is the structure of FIG. 4 without a yoke, (b) is the layout of (a), and the NS direction of the magnet 2 is horizontal, (c) is the structure itself. The respective results are shown in FIG.
 先ず、ヨーク無しで磁石のNS方向に関わる(a)と(b)の比較では、摺動面からの距離に対して、NS水平方向の(b)が明らかに悪い。NS方向を摺動面6と垂直にした(a)では、摺動面6からの距離が離れても僅かに増加しており、磁極が外向きであることがよい。 First, comparing (a) and (b), which relate to the NS direction of the magnet without a yoke, the NS horizontal direction (b) is clearly worse than the distance from the sliding surface. In the case (a) in which the NS direction is perpendicular to the sliding surface 6, the distance from the sliding surface 6 increases slightly even if the distance from the sliding surface 6 increases, and the magnetic poles are preferably outward.
 さらに、(a)の構成にヨークを追加すると、磁力はおよそ1.8倍に上がり、減衰は僅かにあるが良好である。磁石のサイズや材質を変更しなくても、摺動面と反対側をヨークで閉じる事の効果は絶大である。軟磁性媒体では、印加する磁場が大きいほど磁化が強くなり、センサ出力の増大が期待できる。 Furthermore, when a yoke is added to the configuration of (a), the magnetic force is increased by about 1.8 times, and there is a slight attenuation, but it is good. Even if the size and material of the magnet are not changed, the effect of closing the side opposite to the sliding surface with the yoke is great. In the soft magnetic medium, the larger the applied magnetic field, the stronger the magnetization, and the increase in the sensor output can be expected.
 生産性の点でも(a)では左右の磁石の4つの磁極の位置関係が検出結果に関わることになるため、磁石の間隔だけでなく、左右の磁石のNS方向の平行度(傾き)も、ばらつきに大きく影響してしまう。ヨーク付きの(c)では、磁極が基本的に磁石2a、2bにおける摺動面6側の面の2つの扱いとなり、磁気検出素子1のバイアスの確保はしやすくなる。 In terms of productivity as well, in (a), the positional relationship between the four magnetic poles of the left and right magnets affects the detection result, so not only the distance between the magnets, but also the parallelism (tilt) of the left and right magnets in the NS direction It will greatly affect the variation. In (c) with a yoke, the magnetic poles are basically treated as two surfaces of the magnets 2a and 2b on the sliding surface 6 side, and it becomes easy to secure the bias of the magnetic detection element 1.
 磁気検出素子1は、磁性薄膜12の形成面が1.15×21mmになるように、厚み0.75mmのセラミックの非磁性基板11上に構成されている。 The magnetic detection element 1 is constructed on a ceramic non-magnetic substrate 11 having a thickness of 0.75 mm so that the surface on which the magnetic thin film 12 is formed is 1.15×21 mm.
 磁性薄膜12は、厚さ2.6μm,パターン幅18μmで長さ0.5mmを等間隔で並べ、マルチチャンネルで4chとして機能できるように4分割し、それぞれ電極部14を設けた。 The magnetic thin film 12 has a thickness of 2.6 μm, a pattern width of 18 μm, and a length of 0.5 mm, which are arranged at equal intervals, and are divided into four parts so that they can function as 4 channels in a multi-channel, and each electrode part 14 is provided.
 素子の背面には、磁気検出素子1と磁石2bの間隔を規制する非磁性の間隔保持部材10を挟み、ヨーク3と磁石2bとを接着剤により固定した。間隔保持部材10の厚みは0.5mmとした。 A non-magnetic spacing member 10 that regulates the spacing between the magnetic detection element 1 and the magnet 2b was sandwiched on the back surface of the element, and the yoke 3 and the magnet 2b were fixed with an adhesive. The thickness of the spacing member 10 was 0.5 mm.
 この例における磁気検出素子1は、磁気インピーダンス素子として動作させ、MHz帯のパルス電流を印加して、その外部磁界に対する振幅変化をAM検波回路により取り出す。 The magnetic detection element 1 in this example operates as a magnetic impedance element, applies a pulse current in the MHz band, and extracts the amplitude change with respect to the external magnetic field by the AM detection circuit.
 磁気インピーダンス素子は、図7に示すように、磁性薄膜部に対してバイアス磁界が必要な外部磁界特性であり、磁気媒体8を検知していない状態で、出力が領域AまたはBとなる位置へセットする。その調整は、間隔保持部材10を接着していない側の磁石2aとの間隔を微調整すれば容易である。今回は、領域Bを選択し20[Oe]程度のずらし調整をするために、一対の磁石の中心から極僅かに数十μm程度(40[Oe]以下となる領域)ずらすことによって対応した。一方、磁気検出素子1としてフラックスゲート素子を用いた場合には、一対の磁石の中心で動作させることが可能なため、出力がゼロ点となる位置へセットすれば良い。このように、磁気検出素子1の磁性薄膜を一対の磁石が生じる磁界のゼロ点付近に配置することで、磁気インピーダンス素子、フラックスゲート素子のいずれを用いた場合にも、磁気検出素子1を好適に動作させることができる。 As shown in FIG. 7, the magneto-impedance element has an external magnetic field characteristic that requires a bias magnetic field with respect to the magnetic thin film portion, and when the magnetic medium 8 is not detected, the output is located in the area A or B. set. The adjustment can be easily performed by finely adjusting the distance to the magnet 2a on the side to which the distance maintaining member 10 is not adhered. This time, in order to select the region B and perform the shift adjustment of about 20 [Oe], it is dealt with by slightly shifting it from the center of the pair of magnets by about several tens of μm (region of 40 [Oe] or less). On the other hand, when a flux gate element is used as the magnetic detection element 1, since it can be operated at the center of the pair of magnets, it may be set at a position where the output becomes the zero point. In this way, by arranging the magnetic thin film of the magnetic detection element 1 near the zero point of the magnetic field generated by the pair of magnets, the magnetic detection element 1 is suitable for use with either a magnetic impedance element or a fluxgate element. Can be operated.
 磁気検出素子1の電極部14からは、ヨーク3に設けた不図示の貫通孔から、フレキシブルケーブルにより下部の回路基板へ引き出した。大きな穴を開けない限りは、ヨーク3内で磁束の回り込みが発生して、その影響はほとんど現れない。 From the electrode portion 14 of the magnetic detection element 1, a flexible cable was pulled out to a lower circuit board from a through hole (not shown) provided in the yoke 3. Unless a large hole is drilled, the magnetic flux wraps around in the yoke 3 and its effect hardly appears.
 次に、磁気媒体8のテスト媒体として図4の磁気印刷部9を有する媒体を搬送させて、摺動面6上の浮き量に対する出力の低下を評価した。浮き量の評価では、0.1mmの紙を1枚ずつ挟んで調整をした。磁気印刷部9は3mm幅で軟磁性を有するインクで細長いラインを印刷したものである。 Next, as a test medium for the magnetic medium 8, a medium having the magnetic printing unit 9 shown in FIG. 4 was transported, and the decrease in output with respect to the floating amount on the sliding surface 6 was evaluated. In the evaluation of the floating amount, adjustment was performed by sandwiching 0.1 mm paper one by one. The magnetic printing unit 9 is a 3 mm-wide printed long and narrow line with soft magnetic ink.
 図8に、出力電圧の測定結果の一例を示す。この波形は、摺動面6と磁気媒体8とが密着した浮き量ゼロの状態で測定したものである。磁気印刷部9は搬送方向に磁化され、Z方向の磁場を検知する場合には微分的な波形となり、peak-to-peak値で出力値を表現する。 Fig. 8 shows an example of the output voltage measurement results. This waveform is measured in a state where the sliding surface 6 and the magnetic medium 8 are in close contact with each other and the floating amount is zero. The magnetic printing unit 9 is magnetized in the transport direction and has a differential waveform when detecting a magnetic field in the Z direction, and expresses an output value as a peak-to-peak value.
 図8の実線cは本件のヨーク3を設けた場合の出力波形で、図8の破線aは鉄系のヨーク材の代わりにリン青銅の非磁性金属材に置き換えて測定した場合の出力波形データである。 The solid line c in FIG. 8 is the output waveform when the yoke 3 of the present case is provided, and the broken line a in FIG. 8 is the output waveform data when the measurement is performed by replacing the iron-based yoke material with a non-magnetic metal material of phosphor bronze. Is.
 軟磁性体の場合は、印加される磁場に応じて磁化も大きくなるため、実線cの場合は破線aの場合よりも摺動面上の磁場は1.8倍近く大きくなっているので、出力電圧は1.7倍程度増加した。 In the case of a soft magnetic material, the magnetization also increases in accordance with the applied magnetic field, so the magnetic field on the sliding surface is approximately 1.8 times larger in the case of the solid line c than in the case of the broken line a, so the output The voltage increased about 1.7 times.
 図9は、媒体の浮き量に対する出力変化をグラフ化している。磁石のNS方向を水平方向とした場合の試作データも載せ、図6の(a)、(b)、(c)に対応したデータを比較できるようにした。 FIG. 9 is a graph showing the output change with respect to the floating amount of the medium. Prototype data in the case where the NS direction of the magnet is horizontal is also shown so that the data corresponding to (a), (b), and (c) of FIG. 6 can be compared.
 磁石のNS方向を摺動面6と水平に向けて配置する(b)では、磁場の減衰が大きいために、媒体の浮き量に対する出力の低下も明らかに大きい。NS方向を摺動面6と垂直に向けた配置の(a)では媒体の浮き量に対する出力の低下は少なくなっている。さらに、ヨーク3を設けた(c)の本実施形態は、全体の出力が上がり、媒体の浮き量に対する出力の低下もより少なくなっている。 In (b), in which the NS direction of the magnet is oriented horizontally to the sliding surface 6, the magnetic field is greatly attenuated, and therefore the output is significantly reduced with respect to the floating amount of the medium. In the arrangement (a) in which the NS direction is oriented perpendicular to the sliding surface 6, the decrease in the output with respect to the floating amount of the medium is small. Further, in the present embodiment (c) in which the yoke 3 is provided, the overall output is increased, and the decrease in output with respect to the floating amount of the medium is further reduced.
 ヨーク3を設けた(c)における減衰が(a)よりも少し良くなっているのは、軟磁性媒体の特性として十分な磁場が与えられた状態では少し出力が飽和気味になっているためである。 The reason why the attenuation in (c) where the yoke 3 is provided is slightly better than that in (a) is that the output is slightly saturated when a sufficient magnetic field is applied as a characteristic of the soft magnetic medium. is there.
 また、図4で示した形態では、銀行のATMで使われるマルチチャンネルのセンサとして適用できることを示しており、連結して複数個を並べることは容易であって、磁気媒体8の検知幅に対する自由度も高い。 Further, the form shown in FIG. 4 shows that it can be applied as a multi-channel sensor used in ATMs of banks, and it is easy to connect and arrange a plurality of sensors, and the detection width of the magnetic medium 8 can be freely set. The degree is also high.
 さらに、磁気検出素子1と磁石2a、2bを直接ヨーク3に組み付けて、ヨーク3が磁気識別センサの構造体の背骨として扱えるために、強度を確保しつつ、センサ部全体を薄くできる。 Further, since the magnetic detection element 1 and the magnets 2a and 2b are directly assembled to the yoke 3, and the yoke 3 can be treated as a backbone of the structure of the magnetic identification sensor, the entire sensor portion can be thinned while ensuring strength.
 ヨーク3によるセンサの強度アップによって、磁石の磁力を上げても、振動や応力に対する疑似出力の影響を無視できるレベルに抑えることが可能となった。これにより、換言すると、小型で薄型のセンサも実現可能となった。 By increasing the strength of the sensor by the yoke 3, it is possible to suppress the effect of pseudo output on vibration and stress to a level that can be ignored even if the magnetic force of the magnet is increased. In other words, a small and thin sensor can be realized in other words.
 本発明の他の実施形態について、図10を用いて説明を行う。
磁石と磁気検出素子は扱いやすい長さがあり、紙幣のような幅広い検知用途では、複数のセンサユニット31から34を接続して使用することが好ましい。つまり、図4で示した実施形態のセンサユニット部を複数連結した図10のようなものとなる。
Another embodiment of the present invention will be described with reference to FIG.
Since the magnet and the magnetic detection element have a length that is easy to handle, it is preferable to connect and use a plurality of sensor units 31 to 34 for a wide range of detection applications such as bills. That is, it becomes as shown in FIG. 10 in which a plurality of sensor unit parts of the embodiment shown in FIG. 4 are connected.
 また、この実施形態では、磁気検出素子21を、摺動部に近い磁性薄膜列F22と摺動部から離れた磁性薄膜列R23の一対ずつ設け、それらの検知部を同一非磁性基板上に配置し、差動で動作させる構成とした。この素子構成では、媒体搬送による摺動面側からの磁気勾配が大きい成分だけを検出し、周囲の緩やかな外乱磁界を大幅に除去することが可能で、例えば、搬送メカ内にある近くのベアリングやシャフト等の磁気影響を低減できる。 Further, in this embodiment, the magnetic detection elements 21 are provided in pairs of a magnetic thin film row F22 near the sliding portion and a magnetic thin film row R23 apart from the sliding portion, and the detection portions are arranged on the same non-magnetic substrate. However, it is configured to operate differentially. With this element configuration, it is possible to detect only the component with a large magnetic gradient from the sliding surface side due to medium transport, and to significantly remove the surrounding disturbing magnetic field, for example, a nearby bearing in the transport mechanism. It is possible to reduce the magnetic effect on the shaft and shaft.
 しかし、この構成では、図10におけるy方向に対するセンサユニット端の接続側で、磁気検出素子21、磁石2、ヨーク3の端部が重なり、隣接ユニットとの不連続から磁場が乱れやすく、磁気検出素子の動作点へ悪影響を及ぼす。 However, in this configuration, the magnetic detection element 21, the magnet 2 and the end of the yoke 3 overlap on the connection side of the sensor unit end with respect to the y direction in FIG. 10, and the magnetic field is likely to be disturbed due to discontinuity with the adjacent unit, resulting in magnetic detection. It adversely affects the operating point of the device.
 そのため、バイアスが不要な磁気検出素子ではゼロ磁場へ、バイアスが必要な磁気検出素子では所定のバイアス範囲となるように、乱れた磁場を適切に修正する必要が生ずる場合がある。 Therefore, it may be necessary to appropriately correct the disturbed magnetic field so that the magnetic field that does not require bias is zero magnetic field, and the magnetic field that requires bias is within the predetermined bias range.
 磁場を修正する場合は、図10の磁性薄板24a、24bで示すように、ケイ素鋼板やパーマロイ等の着磁が可能な金属磁性体の薄板を円板もしくは短冊状の小片にして、磁石の側面へ付与することで容易に修正が可能である。 When the magnetic field is corrected, as shown by magnetic thin plates 24a and 24b in FIG. 10, a thin plate of a magnetic metal such as a silicon steel plate or permalloy that can be magnetized is formed into a disc or a strip-shaped small piece, and the side surface of the magnet is formed. It can be easily modified by adding to.
 図11に示すセンサユニットの断面図を用いて説明する。磁石2側面に磁性体の磁性薄板24を付与することで磁化し、その磁化された磁性薄板24から磁気検出素子21へ局所的なバイアス磁界を付与できる。あえて修正用の磁石を用意しなくとも、センサの磁石の磁場を利用して磁性体を磁化させることで、バイアス調整が可能であり、磁石2と磁性薄板24とが互いに吸着する関係からも、取り扱いは容易である。修正するバイアス磁場の大きさは、磁性薄板24の形状や厚みもしくは個数により調整が可能である。 Explanation will be given using a sectional view of the sensor unit shown in FIG. By applying a magnetic thin plate 24 of a magnetic material to the side surface of the magnet 2, it is magnetized, and a local bias magnetic field can be applied from the magnetized magnetic thin plate 24 to the magnetic detection element 21. The bias can be adjusted by magnetizing the magnetic body using the magnetic field of the magnet of the sensor without the need to prepare a magnet for correction, and because the magnet 2 and the magnetic thin plate 24 are attracted to each other, It is easy to handle. The magnitude of the bias magnetic field to be corrected can be adjusted by the shape, thickness or number of the magnetic thin plates 24.
 このバイアス磁界の修正は、図10の磁性薄板24aのようにユニット端部だけでなく、磁性薄板24bのようにユニット中央部でも可能であり、磁石自体の局所的な着磁ムラ(磁石製造時の配向ばらつき等)やエッジのカケ等の修正にも有効である。 This bias magnetic field can be corrected not only at the end of the unit like the magnetic thin plate 24a in FIG. 10 but also at the center of the unit like the magnetic thin plate 24b. It is also effective for the correction of edge variations, etc.) and edge chipping.
 本発明は、センサ部をユニット化することができ、各種媒体の検知幅にも自由に対応できる特徴を持つ。 The present invention has a feature that the sensor unit can be unitized and can freely deal with the detection width of various media.
 本発明は、以上説明した実施形態に限らず、本発明の範囲を逸脱しない程度の種々の変更が可能である。例えば、上記実施形態においては、磁石2a、2bとは同一形状の部品が好ましいとして説明したが、これに限られず、例えば磁石2aの方が大きいものを用い、それによって磁気検出素子1へのバイアス磁界を形成しても良い。 The present invention is not limited to the embodiment described above, and various modifications can be made without departing from the scope of the present invention. For example, in the above-described embodiment, it has been described that the parts having the same shape as the magnets 2a and 2b are preferable, but the present invention is not limited to this, and for example, the magnet 2a having a larger size is used, thereby biasing the magnetic detection element 1. A magnetic field may be formed.
1、21 磁気検出素子
2a、2b 磁石
3 ヨーク
4 センサ本体
5 摺動部材
6 摺動面
7 端子
8 磁気媒体
9 磁気印刷部
10 間隔保持部材
11 非磁性基板
12 磁性薄膜
13 導電膜
14 電極部
15 薄膜コイル
16 検出電極
17 回路基板
22、23 磁性薄膜列
24、24a、24b 磁性薄板
31~34 センサユニット
1, 21 Magnetic detection elements 2a, 2b Magnet 3 Yoke 4 Sensor body 5 Sliding member 6 Sliding surface 7 Terminal 8 Magnetic medium 9 Magnetic printing unit 10 Interval holding member 11 Non-magnetic substrate 12 Magnetic thin film 13 Conductive film 14 Electrode unit 15 Thin film coil 16 Detection electrode 17 Circuit boards 22, 23 Magnetic thin film rows 24, 24a, 24b Magnetic thin plates 31-34 Sensor unit

Claims (10)

  1.  搬送される媒体と接する摺動面の下部に磁石及び磁気検出素子が配置され、前記媒体に含まれる磁性体部の磁気パターンを判別する磁気識別センサであって、
     前記摺動面に対して垂直のNS方向を持つ一対の磁石が、互いに逆極性になるように媒体搬送方向へ所定の間隔で、それぞれの前記磁石の一方側の磁極が前記摺動面の下部に近接して並設され、
     前記磁石の他方側の磁極同士がヨークで接続された着磁部が形成され、
     前記着磁部において、一対の前記磁石と前記ヨークとで三方が囲まれた空間内に、前記摺動面に対して垂直の磁界検知方向を有する前記磁気検出素子が配置されることを特徴とする磁気識別センサ。
    A magnetic identification sensor in which a magnet and a magnetic detection element are arranged below a sliding surface that is in contact with a medium to be conveyed, and which determines a magnetic pattern of a magnetic body part included in the medium,
    A pair of magnets having an NS direction perpendicular to the sliding surface has a magnetic pole on one side of each of the magnets at a predetermined interval in the medium transport direction so that the magnets have opposite polarities, and a magnetic pole on one side of the magnet is below the sliding surface. Are juxtaposed close to
    A magnetized portion in which magnetic poles on the other side of the magnet are connected by a yoke is formed,
    In the magnetizing part, the magnetic detection element having a magnetic field detection direction perpendicular to the sliding surface is arranged in a space surrounded by a pair of the magnet and the yoke on three sides. Magnetic identification sensor.
  2.  一対の前記磁石は形状が同一であり、前記ヨークにおける一対の前記磁石の他方側の磁極と接する面は同一平面上に位置することを特徴とする請求項1に記載の磁気識別センサ。 The magnetic discrimination sensor according to claim 1, wherein the pair of magnets have the same shape, and the surfaces of the yokes that contact the magnetic poles on the other side of the pair of magnets are located on the same plane.
  3.  前記ヨークは平板状であり、前記磁気検出素子が前記ヨークに対して固定されるとともに、前記磁気検出素子の磁性薄膜は、一対の前記磁石によって生じる磁界のゼロ点付近に配置されることを特徴とする請求項1または2に記載の磁気識別センサ。 The yoke has a flat plate shape, the magnetic detection element is fixed to the yoke, and the magnetic thin film of the magnetic detection element is arranged near a zero point of a magnetic field generated by the pair of magnets. The magnetic identification sensor according to claim 1 or 2.
  4.  前記磁気検出素子は、一対の前記磁石の中点に配置されることを特徴とする請求項1から3のいずれか一項に記載の磁気識別センサ。 The magnetic identification sensor according to any one of claims 1 to 3, wherein the magnetic detection element is arranged at a midpoint of the pair of magnets.
  5.  前記磁気検出素子は、前記媒体搬送方向で一対の前記磁石の間に配置されており、直方体の非磁性基板を有し、その一面には前記磁石のNS方向と平行に延在する複数の磁性薄膜が形成され、直列に接続された前記磁性薄膜に駆動電流が通電されることを特徴とする請求項1から4のいずれか一項に記載の磁気識別センサ。 The magnetic detection element is arranged between the pair of magnets in the medium transport direction, has a rectangular parallelepiped non-magnetic substrate, and has on one surface thereof a plurality of magnetic members extending parallel to the NS direction of the magnets. The magnetic discrimination sensor according to claim 1, wherein a thin film is formed, and a drive current is applied to the magnetic thin films connected in series.
  6.  前記磁気検出素子の前記磁性薄膜には前記駆動電流として高周波の電流が印加され、直接そのインピーダンスの変化を検知する、もしくは前記磁性薄膜にコイルを積層もしくは巻回してフラックスゲート動作させることを特徴とする請求項5に記載の磁気識別センサ。 A high-frequency current is applied as the drive current to the magnetic thin film of the magnetic detection element, and a change in impedance thereof is directly detected, or a coil is laminated or wound around the magnetic thin film to perform a fluxgate operation. The magnetic identification sensor according to claim 5.
  7.  前記磁気検出素子における検知面とは反対側の面と、前記反対側の面と対向する前記磁石との間に、間隔を規制する非磁性の間隔保持部材が配置されていることを特徴とする請求項1から6のいずれか一項に記載の磁気識別センサ。 A non-magnetic spacing member that regulates a spacing is disposed between a surface of the magnetic detection element opposite to the detection surface and the magnet facing the opposite surface. The magnetic identification sensor according to claim 1.
  8.  前記磁気検出素子における検知面とは反対側の面と、前記反対側の面と対向する前記磁石とが直接接合されていることを特徴とする請求項1から6のいずれか一項に記載の磁気識別センサ。 7. The surface of the magnetic detection element opposite to the detection surface and the magnet facing the opposite surface are directly bonded to each other, according to any one of claims 1 to 6. Magnetic identification sensor.
  9.  前記磁気検出素子の磁性薄膜が、摺動面に近い側と遠い側の2列に配列され、差動動作することを特徴とする請求項1から8のいずれか一項に記載の磁気識別センサ。 9. The magnetic identification sensor according to claim 1, wherein the magnetic thin films of the magnetic detection element are arranged in two rows on the side closer to the sliding surface and on the side farther from the sliding surface to perform a differential operation. ..
  10.  前記磁石の側面に板状の磁界調整用磁性体を有することを特徴とする請求項1から9のいずれか一項に記載の磁気識別センサ。 The magnetic identification sensor according to any one of claims 1 to 9, further comprising a plate-shaped magnetic field adjusting magnetic body on a side surface of the magnet.
PCT/JP2020/001353 2019-01-17 2020-01-16 Magnetic identification sensor WO2020149375A1 (en)

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