WO2020147096A1 - Procédé et système de détection de surface métallique - Google Patents

Procédé et système de détection de surface métallique Download PDF

Info

Publication number
WO2020147096A1
WO2020147096A1 PCT/CN2019/072268 CN2019072268W WO2020147096A1 WO 2020147096 A1 WO2020147096 A1 WO 2020147096A1 CN 2019072268 W CN2019072268 W CN 2019072268W WO 2020147096 A1 WO2020147096 A1 WO 2020147096A1
Authority
WO
WIPO (PCT)
Prior art keywords
metal
wave
metal surface
modulation device
space
Prior art date
Application number
PCT/CN2019/072268
Other languages
English (en)
Chinese (zh)
Inventor
王星泽
何良雨
祝毅博
Original Assignee
合刃科技（深圳）有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 合刃科技（深圳）有限公司 filed Critical 合刃科技（深圳）有限公司
Priority to CN201980005291.4A priority Critical patent/CN111279182A/zh
Priority to PCT/CN2019/072268 priority patent/WO2020147096A1/fr
Publication of WO2020147096A1 publication Critical patent/WO2020147096A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/0112—Apparatus in one mechanical, optical or electronic block

Definitions

  • the invention relates to the field of metal detection, in particular to a method and system for metal surface detection.
  • Polished metal may produce scratches, pits, bumps and other surface defects during its production and post-processing. These defects not only affect the appearance of the product, but also have a certain impact on the performance and life of the product. . Because polished metal has strong reflective characteristics, it is difficult to detect defects on polished metal surfaces with commonly used optical two-dimensional imaging and three-dimensional scanning methods. The current detection methods mostly use the traditional manual visual light inspection method, but this detection method is not effective in identifying defects, the efficiency is low, and the detection cost is extremely high. Therefore, finding a method that is not affected by high reflectance and can effectively detect surface defects is of great significance to the quality control of polished metal surfaces.
  • the embodiment of the present invention provides a method and system for detecting a metal surface. By using the method or system provided by the present invention, whether there is a defect on the metal surface can be quickly detected with high efficiency and low cost.
  • the first aspect of the present invention discloses a metal surface detection system.
  • the system includes a transmitter, a detector, and a modulation device; wherein the transmitter and the detector are located at two ends of the modulation device;
  • the transmitter is used to inject electromagnetic waves with a frequency lower than the frequency of the metal plasma into the slit between the modulation device and the metal to be measured to generate a metal surface plasma wave; wherein the metal surface plasma wave is The incident electromagnetic waves are coupled and excited by resonance into spatial radiation electromagnetic waves, and the spatial radiation electromagnetic waves are emitted from the other end of the modulation device;
  • the detector is used to receive the electromagnetic waves radiated in space, and determine whether there is a defect according to the electromagnetic waves radiated in space.
  • the length of the modulation device needs to be less than the propagation distance of the surface plasma wave on the metal surface to be measured.
  • the distance from the modulation device to the surface of the metal to be measured is smaller than the attenuation distance of the plasma wave of the metal surface to be measured in the air.
  • the thickness of the metal to be measured is greater than the attenuation distance of the surface plasmon wave in the metal to be measured.
  • the relative position of the modulation device and the metal in the horizontal direction is changed.
  • the emitted electromagnetic wave will change, so that the detection Defects on the metal surface and their location.
  • the system further includes a processing unit;
  • the processing unit is configured to learn historical detection data using a machine learning algorithm to obtain a defect detection model; wherein the historical detection data is the data detected by the detector after detecting the defective metal.
  • the second aspect of the present invention discloses a method for detecting a metal surface, the method comprising:
  • the transmitter injects electromagnetic waves with a frequency lower than the frequency of the metal plasma into the slit between the modulation device and the metal to be measured to generate a metal surface plasma wave; wherein the metal surface plasma wave is coupled with the incident electromagnetic wave and is Resonance excitation is a space radiating electromagnetic wave, which is emitted from the other end of the modulation device; wherein the modulation device is placed in parallel above the metal to be measured;
  • the detector receives the space radiated electromagnetic wave, and determines whether there is a defect according to the space radiated electromagnetic wave;
  • the length of the modulation device needs to be less than the propagation distance of the surface plasma wave on the metal surface to be measured.
  • the distance from the modulation device to the surface of the metal to be measured is smaller than the attenuation distance of the plasma wave of the metal surface to be measured in the air.
  • the thickness of the metal to be measured is greater than the attenuation distance of the surface plasmon wave in the metal to be measured.
  • the determining whether there is a defect based on the space radiated electromagnetic wave includes: when the space radiated electromagnetic wave received by the detector changes, determining that the metal surface has a defect, and based on the received The angle of the space radiated electromagnetic waves determines the location of the defect.
  • the method further includes:
  • the processing unit uses a machine learning algorithm to learn historical detection data to obtain a defect detection model; wherein the historical detection data is data detected after detecting defective metals.
  • a third aspect of the present invention discloses a storage medium in which a program code is stored, and when the program code is executed, the method of the second aspect is executed;
  • the fourth aspect of the present invention discloses a computer program product, the computer program product contains program code; when the program code is executed, the method of the second aspect is executed.
  • electromagnetic waves with a frequency lower than the frequency of the metal plasma are incident on the slit between the modulation device and the metal to be measured to generate a metal surface plasma wave; wherein, the The metal surface plasma wave couples with the incident electromagnetic wave and is excited by resonance into a space radiating electromagnetic wave, which is emitted from the other end of the modulation device; wherein the modulation device is placed in parallel on the under-test Above the metal; receiving the space radiated electromagnetic waves, and based on the space radiated electromagnetic waves to determine whether there are defects.
  • FIG. 1 is a schematic diagram of a metal surface detection system provided by an embodiment of the present invention
  • FIG. 2 is a schematic structural diagram of a modulation device provided by an embodiment of the present invention.
  • FIG. 3 is a schematic structural diagram of another modulation device provided by an embodiment of the present invention.
  • FIG. 4 is a schematic structural diagram of another modulation device provided by an embodiment of the present invention.
  • FIG. 5 is a schematic diagram of a translational metal surface detection track provided by an embodiment of the present invention.
  • FIG. 6 is a schematic diagram of another translational metal surface detection track provided by an embodiment of the present invention.
  • FIG. 7 is a schematic diagram of another translational metal surface detection track provided by an embodiment of the present invention.
  • FIG. 8 is a schematic diagram of another translational metal surface detection track provided by an embodiment of the present invention.
  • FIG. 9 is a schematic diagram of learning using a neural network according to an embodiment of the present invention.
  • FIG. 10 is a schematic flowchart of a method for detecting a metal surface according to an embodiment of the present invention.
  • FIG. 11 is a schematic flowchart of another method for detecting a metal surface according to an embodiment of the present invention.
  • FIG. 12 is a schematic structural diagram of a metal surface detection device provided by an embodiment of the present invention.
  • FIG. 1 is a metal surface detection system provided by an embodiment of the present invention.
  • the system includes a transmitter 110, a modulation device 120 (or called a modulation mechanism), and a detector 130; wherein, the transmitter 110 and the detector 130 are located at two ends of the modulation device 120;
  • the transmitter 110 is used to inject electromagnetic waves with a frequency lower than the frequency of the metal plasma into the slit between the modulation device and the metal to be measured to generate a metal surface plasma wave; wherein, the metal surface plasma wave is The incident electromagnetic waves are coupled and excited by resonance into spatial radiation electromagnetic waves, and the spatial radiation electromagnetic waves are emitted from the other end of the modulation device;
  • the detector 130 is configured to receive the electromagnetic waves radiated from the space, and determine whether there is a defect according to the electromagnetic waves radiated from the space.
  • the detector 130 is specifically used to determine that the metal surface has a defect when the received space radiated electromagnetic wave changes; further, it can also determine the defect of the defect based on the received space radiated electromagnetic wave. position.
  • the changes in the electromagnetic wave radiation in space include, but are not limited to, changes in the amplitude of the electromagnetic wave radiation in the space and changes in the fluctuation frequency of the electromagnetic wave radiation in the space.
  • the position of the defect can be located against the emission angle of the received spatial radiation electromagnetic wave.
  • the emission angle of the received electromagnetic wave from space does not match the angle of the incident electromagnetic wave, it can be understood as a change.
  • the incident angle is 45 degrees
  • the exit angle should also be 45 degrees. If it is not 45 degrees, there is a defect.
  • SPW Surface Plasmon Wave
  • Transverse magnetic wave transverse magnetic wave
  • permeability transverse electric wave
  • the wave vector of the surface plasmon wave is larger than that of the light wave under normal circumstances (for a continuous metal medium interface), it is impossible to directly excite the surface plasmon wave SPW propagating along the interface with light waves. .
  • some special structures need to be introduced to achieve wave vector matching, namely the modulation device 120.
  • the structure of the commonly used modulation device 120 may be a prism coupling manner, a waveguide structure, a diffraction grating structure, and the like.
  • the waveguide structure uses the evanescent wave at the boundary of the waveguide to excite the surface plasmon wave, so that the optical field energy in the waveguide is coupled to the surface plasmon wave.
  • the light waves on both sides of the waveguide are evanescent waves.
  • surface plasmon waves can be excited when the light waves pass through this area.
  • optical fibers are often used as waveguides, a certain section of the optical fiber is stripped of the cladding, and then metal is plated, so as to realize the simplest structure of a waveguide to excite surface plasmon waves.
  • the diffraction grating structure uses the grating to introduce an additional wave vector increment to achieve wave vector matching.
  • the commonly used gratings are mainly one-dimensional gratings, two-dimensional gratings, hole array structures and particle arrays. Since the material parameters and geometric parameters of the grating structure can be selected by oneself, the content for research is very rich. On the one hand, this structure can excite surface plasmon waves, and on the other hand, energy bands can be introduced into the two-dimensional grating structure, so that the characteristics of surface waves are affected by the energy bands, and the device parameters are more controllable.
  • the distance from the modulation device 120 to the metal surface is smaller than the attenuation distance of the metal surface plasma wave in the air. Further, the thickness of the metal to be measured is greater than the attenuation distance of the surface plasma wave in the metal.
  • the geometric design of the modulation device 120 is adjusted according to the corresponding wave characteristics (for example, the length needs to be smaller than the propagation distance of the surface plasma wave on the metal surface).
  • the depth of metal surface defects can be estimated based on the attenuation distance of metal surface plasma waves generated by waves of different frequencies. For example: when the modulation device corresponding to waves of different frequencies moves on the metal surface, if it is found to move to a certain position, the detector detects that the wave of a certain frequency corresponds to the largest signal change, and the signal corresponding to waves of other frequency bands is basically Without any change, the depth of cracks and pits on the metal surface can be estimated based on the formula of the attenuation constant of the frequency wave.
  • SPW Surface Plasmon Wave
  • Transverse magnetic wave transverse magnetic wave
  • permeability transverse electric wave
  • the incident wave enters the slit between the modulation device and the metal to be measured, generating a metal surface plasma wave.
  • the surface plasmon wave can be coupled with the incident wave and resonantly excited into a space radiating electromagnetic wave, which is emitted from the other end of the modulation device and received by the detector.
  • the electromagnetic wave transmitter and the detector are respectively located at the two ends of the modulation device.
  • the relative position of the modulation device and the metal in the horizontal direction is changed.
  • the emitted electromagnetic wave will change, so that the defect and location of the metal surface can be detected.
  • Figure 5 provides a translation detection method.
  • the entire surface cannot be detected at one time. Therefore, it is necessary to design the surface detection trajectory, horizontally change the relative position of the device and the metal surface, and traverse Global. Specifically, as shown in FIG. 5, keeping the relative height of the detection device and the metal surface unchanged, allowing them to relatively translate along the wave propagation direction, and then scanning line by line to cover the entire metal surface.
  • the detection accuracy of the translation detection method is higher.
  • Figure 6 provides a vertical movement detection method.
  • the method specifically includes: keeping the relative height of the detection device and the metal surface constant, allowing them to translate relative to the wave propagation direction, and then scanning column by column to cover the entire metal surface.
  • the detection speed of the vertical detection method is faster.
  • the method includes: firstly allowing the metal and the detection device to translate relative to the direction of wave propagation, and when a change in the outgoing wave signal is detected (when surface defects are encountered), changing the scanning mode to translate along the direction of wave propagation, so that the The exact location of the defect in both directions. After that, the device and the metal continue to translate along the direction perpendicular to the wave, scanning column by column until the next defect is encountered. Repeating the above steps can accurately locate the defect on the entire metal surface.
  • the detection method can also be designed for the shape of the metal to be tested.
  • a rotary scanning can be used to quickly detect surface defects.
  • the biggest advantage of this method is the fast detection speed and high efficiency.
  • the method includes: the detection device is located above the surface to be measured, and the relative height is kept constant. During the detection process, the device and the surface to be tested rotate relative to each other. When rotated through 360 degrees, the entire surface can be scanned by the device. According to the signal change of the emitted wave, the corresponding defect can be detected.
  • the rotation method described above can be used for testing.
  • the output wave signals collected by the detection end can be analyzed category by category to achieve the purpose of surface defect detection and identification. Since a single measurement can only obtain electromagnetic wave signals in a single direction or a single line, after performing translation or rotation scanning, the electromagnetic signal plane distribution map of the entire measured object is obtained, and then artificial intelligence algorithm analysis is performed.
  • the metal surface detection system further includes a processing unit
  • the processing unit is configured to learn historical detection data using a machine learning algorithm to obtain a defect detection model; wherein the historical detection data is the data detected by the detector after detecting the defective metal.
  • common machine learning algorithms include classification learning algorithms, Bayesian learning algorithms, support vector machine learning algorithms, neural network learning algorithms, and so on.
  • FIG. 9 is a schematic diagram of learning using a neural network.
  • a deep learning neural network is used for large sample training and learning. Collect large amounts of data according to different defect samples, classify and train these signal maps that can indirectly reflect metal surface defects, and obtain neural network models for different defects. Among them, the model defines output states such as bumps, no defects (OK), scratches, and pits.
  • an electromagnetic wave with a frequency lower than the frequency of the metal plasma is incident on the slit between the modulation device and the metal to be measured to generate a metal surface plasma wave; wherein, the metal surface
  • the plasma wave is coupled with the incident electromagnetic wave and is excited by resonance into a space radiating electromagnetic wave, which is emitted from the other end of the modulation device; wherein the modulation device is placed in parallel on the metal to be measured Above; receiving the space radiated electromagnetic wave, and determine whether there is a defect according to the space radiated electromagnetic wave.
  • FIG. 10 is a schematic flowchart of a method for detecting a metal surface according to another embodiment of the present invention.
  • the method includes:
  • the transmitter injects electromagnetic waves with a frequency lower than the frequency of the metal plasma into the slit between the modulation device and the metal to be measured to generate a metal surface plasma wave; wherein, the metal surface plasma wave and the incident electromagnetic wave Coupled and excited by resonance into a space radiation electromagnetic wave, the space radiation electromagnetic wave is emitted from the other end of the modulation device;
  • the length of the modulation device needs to be less than the propagation distance of the surface plasma wave on the metal surface
  • the modulation device is placed in parallel above the metal to be tested;
  • the distance from the modulation device to the metal surface is smaller than the attenuation distance of the metal surface plasma wave in the air.
  • the thickness of the metal to be measured is greater than the attenuation distance of the surface plasmon wave in the metal.
  • the detector receives the space radiation electromagnetic wave, and determines whether there is a defect according to the space radiation electromagnetic wave.
  • the determining whether there is a defect based on the space radiated electromagnetic wave includes: when the received space radiated electromagnetic wave changes, determining that the metal surface has a defect and determining the position of the defect.
  • the changes in the electromagnetic wave radiation in space include, but are not limited to, changes in the amplitude of the electromagnetic wave radiation in the space and changes in the fluctuation frequency of the electromagnetic wave radiation in the space.
  • the location of the defect can be determined based on the received electromagnetic waves of space radiation. It is understandable that the position of the defect can be located against the emission angle of the received electromagnetic wave from space.
  • the emission angle of the received electromagnetic wave from space does not match the angle of the incident electromagnetic wave, it can be understood as a change.
  • the incident angle is 45 degrees
  • the exit angle should also be 45 degrees. If it is not 45 degrees, there is a defect.
  • the emitted spatial radiation electromagnetic wave will change.
  • the method further includes:
  • the processing unit learns historical detection data using a machine learning algorithm to obtain a defect detection model; wherein, the historical detection data is data detected after detecting defective metals.
  • common machine learning algorithms include classification learning algorithms, Bayesian learning algorithms, support vector machine learning algorithms, neural network learning algorithms, and so on.
  • an electromagnetic wave with a frequency lower than the frequency of the metal plasma is incident on the slit between the modulation device and the metal to be measured to generate a metal surface plasma wave; wherein, the metal surface
  • the plasma wave is coupled with the incident electromagnetic wave and is excited by resonance into a space radiating electromagnetic wave, which is emitted from the other end of the modulation device; wherein the modulation device is placed in parallel on the metal to be measured Above; receiving the space radiated electromagnetic wave, and determine whether there is a defect according to the space radiated electromagnetic wave.
  • an embodiment of the present invention provides a method for detecting a metal surface, wherein the method includes:
  • the transmitter injects electromagnetic waves with a frequency lower than the frequency of the metal plasma into the slit between the modulation device and the metal to be measured to generate a metal surface plasma wave; wherein, the metal surface plasma wave is
  • the electromagnetic waves are coupled and excited by resonance into spatial radiation electromagnetic waves, which are emitted from the other end of the modulation device;
  • the modulation device is placed in parallel above the metal to be tested;
  • the distance from the modulation device to the metal surface is smaller than the attenuation distance of the metal surface plasma wave in the air.
  • the thickness of the metal to be measured is greater than the attenuation distance of the surface plasmon wave in the metal.
  • the length of the modulation device needs to be less than the propagation distance of the surface plasma wave on the metal surface
  • the detector receives the electromagnetic wave radiated from the space.
  • the location of the defect can be determined based on the received electromagnetic waves of space radiation. It is understandable that the position of the defect can be located against the emission angle of the received electromagnetic wave from space.
  • the emission angle of the received electromagnetic wave from space does not match the angle of the incident electromagnetic wave, it can be understood as a change.
  • the incident angle is 45 degrees
  • the exit angle should also be 45 degrees. If it is not 45 degrees, there is a defect.
  • the emitted spatial radiation electromagnetic wave will change.
  • the processing unit uses a machine learning algorithm to learn historical detection data to obtain a defect detection model; wherein, the historical detection data is data detected after detecting defective metals.
  • common machine learning algorithms include classification learning algorithms, Bayesian learning algorithms, support vector machine learning algorithms, neural network learning algorithms, and so on.
  • a device 400 is provided.
  • the device can be a transmitter or a detector.
  • the device 400 includes hardware such as a CPU 401, a memory 402, a bus 403, and a transceiver 404.
  • the device can perform the aforementioned transmitter method or detector method.
  • a storage medium stores program code, and when the program code is executed, the method in the foregoing method embodiment is executed.
  • a computer program product in another embodiment, contains program code; when the program code is executed, the method in the foregoing method embodiment will be executed.
  • the disclosed device may be implemented in other ways.
  • the device embodiments described above are only schematic.
  • the division of the unit is only a logical function division.
  • there may be another division manner for example, multiple units or components may be combined or may Integration into another system, or some features can be ignored, or not implemented.
  • the displayed or discussed mutual coupling or direct coupling or communication connection may be indirect coupling or communication connection through some interfaces, devices or units, and may be in electrical or other forms.
  • the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
  • each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist alone physically, or two or more units may be integrated into one unit.
  • the above integrated unit can be implemented in the form of hardware or software function unit.
  • the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it may be stored in a computer-readable storage medium.
  • the technical solution of the present invention essentially or part of the contribution to the existing technology or all or part of the technical solution can be embodied in the form of a software product, the computer software product is stored in a storage medium , Including several instructions to enable a computer device (which may be a personal computer, server, or network device, etc.) to perform all or part of the steps of the methods described in various embodiments of the present invention.
  • the aforementioned storage media include: U disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), mobile hard disk, magnetic disk or optical disk and other media that can store program code .

Abstract

La présente invention concerne un procédé et un système de détection de surface métallique. Le procédé comprend : un émetteur (110) qui transmet une onde électromagnétique dont la fréquence est inférieure à la fréquence d'un plasma métallique dans un espace entre un dispositif de modulation (120) et un métal à tester de manière à générer une onde de plasma de surface métallique, l'onde de plasma de surface métallique étant couplée à l'onde électromagnétique incidente et étant mise en résonance et excitée dans une onde électromagnétique de rayonnement spatial, l'onde électromagnétique de rayonnement spatial étant transmise à partir de l'autre extrémité du dispositif de modulation (120), étant ainsi reçue par un détecteur (130) ; les positions relatives du dispositif de modulation (120) et du métal dans la direction horizontale sont modifiées, lorsque l'onde de plasma de surface passe où un défaut est présent sur la surface métallique, un changement se produit dans l'onde électromagnétique transmise, détectant ainsi la position où le défaut est situé sur la surface métallique. Le procédé ou le système permet de détecter rapidement si un défaut est présent sur la surface métallique et est très efficace.
PCT/CN2019/072268 2019-01-18 2019-01-18 Procédé et système de détection de surface métallique WO2020147096A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201980005291.4A CN111279182A (zh) 2019-01-18 2019-01-18 一种金属表面检测的方法及系统
PCT/CN2019/072268 WO2020147096A1 (fr) 2019-01-18 2019-01-18 Procédé et système de détection de surface métallique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2019/072268 WO2020147096A1 (fr) 2019-01-18 2019-01-18 Procédé et système de détection de surface métallique

Publications (1)

Publication Number Publication Date
WO2020147096A1 true WO2020147096A1 (fr) 2020-07-23

Family

ID=70999834

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2019/072268 WO2020147096A1 (fr) 2019-01-18 2019-01-18 Procédé et système de détection de surface métallique

Country Status (2)

Country Link
CN (1) CN111279182A (fr)
WO (1) WO2020147096A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112255509B (zh) * 2020-09-11 2023-12-29 中国空间技术研究院 一种基于低温等离子体检测设备绝缘缺陷的系统及方法
CN114577121B (zh) * 2022-05-09 2022-09-06 中国科学技术大学 基于表面波定向性检测亚波长介质纳米线形貌的检测装置
CN114900937A (zh) * 2022-05-31 2022-08-12 厦门大学 一种激发表面等离子体激元的结构、方法和电磁波探测隐身装置、方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004109106A (ja) * 2002-07-22 2004-04-08 Fujitsu Ltd 表面欠陥検査方法および表面欠陥検査装置
US20060091332A1 (en) * 2000-09-21 2006-05-04 Hitachi High-Technologies Corporation Method and its apparatus for inspecting particles or defects of a semiconductor device
JP2009271001A (ja) * 2008-05-09 2009-11-19 Hitachi Plasma Display Ltd 基板表面欠陥検査方法，基板表面欠陥検査装置
CN102096269A (zh) * 2011-01-18 2011-06-15 南京邮电大学 太赫兹表面等离子体波光学调制器及其调制方法
CN202281747U (zh) * 2011-11-07 2012-06-20 上海工程技术大学 一种等离子体共振传感装置
CN102636491A (zh) * 2012-04-17 2012-08-15 南京邮电大学 基于表面等离子体波的半导体缺陷检测方法
CN102739165A (zh) * 2012-06-28 2012-10-17 南京邮电大学 基于表面等离子体波传输距离的电磁波调制方法
CN102928503A (zh) * 2012-10-24 2013-02-13 天津工业大学 一种金属板材的电磁声发射无损探伤装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ299489B6 (cs) * 2005-01-12 2008-08-13 Ústav fotoniky a elektroniky AV CR, v. v. i. Zpusob spektroskopie povrchových plazmonu pro senzory s povrchovými plazmony a senzorový element k provádení tohoto zpusobu
CN102736273A (zh) * 2012-06-28 2012-10-17 南京邮电大学 基于表面等离子体波传输距离的电磁波温度调制方法
CN102721670B (zh) * 2012-06-28 2014-06-04 南京邮电大学 一种半导体等离子体频率测量方法
CN104597564B (zh) * 2015-01-16 2018-03-30 哈尔滨工业大学深圳研究生院 一种类表面等离子体复合型狭缝波导及其应用

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060091332A1 (en) * 2000-09-21 2006-05-04 Hitachi High-Technologies Corporation Method and its apparatus for inspecting particles or defects of a semiconductor device
JP2004109106A (ja) * 2002-07-22 2004-04-08 Fujitsu Ltd 表面欠陥検査方法および表面欠陥検査装置
JP2009271001A (ja) * 2008-05-09 2009-11-19 Hitachi Plasma Display Ltd 基板表面欠陥検査方法，基板表面欠陥検査装置
CN102096269A (zh) * 2011-01-18 2011-06-15 南京邮电大学 太赫兹表面等离子体波光学调制器及其调制方法
CN202281747U (zh) * 2011-11-07 2012-06-20 上海工程技术大学 一种等离子体共振传感装置
CN102636491A (zh) * 2012-04-17 2012-08-15 南京邮电大学 基于表面等离子体波的半导体缺陷检测方法
CN102739165A (zh) * 2012-06-28 2012-10-17 南京邮电大学 基于表面等离子体波传输距离的电磁波调制方法
CN102928503A (zh) * 2012-10-24 2013-02-13 天津工业大学 一种金属板材的电磁声发射无损探伤装置

Also Published As

Publication number Publication date
CN111279182A (zh) 2020-06-12

Similar Documents

Publication Publication Date Title
WO2020147096A1 (fr) Procédé et système de détection de surface métallique
Oh et al. Comparison of NDT methods for assessment of a concrete bridge deck
JP6517202B2 (ja) テラヘルツ放射線を使用してシート誘電体サンプルの少なくとも１つの特性を判定するためのシステム
CN107504907A (zh) 超薄薄膜厚度和光学常数的测量装置和测量方法
Michihata et al. Measurement of probe-stylus sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery modes
CN103884298B (zh) 基于导模的金属表面粗糙度测量系统及方法
Song et al. Selective excitation of surface plasmon modes propagating in Ag nanowires
Zheng et al. SiWa: See into walls via deep UWB radar
CN101871894A (zh) 利用闪频检测实现材料内部缺陷的动态加载成像表征方法
Tu et al. Non-destructive evaluation of hidden defects beneath the multilayer organic protective coatings based on terahertz technology
Tian et al. Far-field subwavelength acoustic computational imaging with a single detector
Mrnka et al. Accurate S-parameter modeling and material characterization in quasi-optical systems
Schmidt et al. Near-field mapping of optical eigenstates in coupled disk microresonators
Zhang et al. Terahertz imaging in dielectric media with quasi-Bessel beams
Luo et al. SARS-CoV-2 proteins monitored by long-range surface plasmon field-enhanced Raman scattering with hybrid bowtie nanoaperture arrays and nanocavities
CN107577009A (zh) 一种基于泄漏模波导的在线模式分辨器
Mazumder et al. Analysis of excess scattering in optical fibers
Zhu et al. A novel 3D printed focusing probe in scattering-type scanning near-field millimetre & terahertz wave microscope
Faris et al. Corrosion assessment using ground penetrating radar in reinforced concrete structures: Influential factors and analysis methods
Deibel et al. The excitation and emission of terahertz surface plasmon polaritons on metal wire waveguides
Fang et al. Visualization and quantitative evaluation of delamination defects in GFRPs via sparse millimeter-wave imaging and image processing
Gut et al. Determination of the attenuation of planar waveguides by means of detecting scattered light
Prémel et al. Development of a 3D electromagnetic model for eddy current tubing inspection: application to the simulation of probe eccentricity
Li et al. A localization method for concealed cracks in the road base based on ground penetrating radar
CN205826515U (zh) 基于表面波的声信号探测器和反射式光声显微镜

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19909867

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19909867

Country of ref document: EP

Kind code of ref document: A1

122 Ep: pct application non-entry in european phase

Ref document number: 19909867

Country of ref document: EP

Kind code of ref document: A1

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 13/04/2022)

122 Ep: pct application non-entry in european phase

Ref document number: 19909867

Country of ref document: EP

Kind code of ref document: A1