WO2020143687A1 - 一种具有周期性带隙结构的传感器结构 - Google Patents

一种具有周期性带隙结构的传感器结构 Download PDF

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WO2020143687A1
WO2020143687A1 PCT/CN2020/070980 CN2020070980W WO2020143687A1 WO 2020143687 A1 WO2020143687 A1 WO 2020143687A1 CN 2020070980 W CN2020070980 W CN 2020070980W WO 2020143687 A1 WO2020143687 A1 WO 2020143687A1
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periodic
sensor
band gap
sensor structure
phononic crystal
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羊箭锋
周怡
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Suzhou University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/18—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying effective impedance of discharge tubes or semiconductor devices
    • G01D5/183—Sensing rotation or linear movement using strain, force or pressure sensors
    • G01D5/185—Sensing rotation or linear movement using strain, force or pressure sensors using piezoelectric sensors

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  • the invention relates to the technical field of sensor structures, in particular to a sensor structure with a periodic band gap structure.
  • phononic crystals The study of phononic crystals provides new ideas for the field of vibration control. It consists of two or more elastic materials and has a periodic composite structure with elastic band gap characteristics. When elastic waves propagate in phononic crystals, elastic wave forbidden bands are formed. In the frequency range of the forbidden bands, elastic wave propagation will be suppressed. In recent years, scholars from various countries have made many useful explorations on the regulation of the band gap of phononic crystals. From the initial adjustment of the geometric structure (scatterer shape and lattice structure) to achieve band gap control to use the rheological properties of smart materials to achieve control of the energy band structure of the phononic crystal.
  • the technical problem to be solved by the present invention is to overcome the problem that the propagation of the existing elastic wave is suppressed, resulting in low signal acquisition sensitivity, thereby providing a periodic band that guarantees the effective propagation of the elastic wave and can improve the signal sensitivity
  • the sensor structure of the gap structure is to overcome the problem that the propagation of the existing elastic wave is suppressed, resulting in low signal acquisition sensitivity, thereby providing a periodic band that guarantees the effective propagation of the elastic wave and can improve the signal sensitivity
  • the sensor structure of the gap structure is to overcome the problem that the propagation of the existing elastic wave is suppressed, resulting in low signal acquisition sensitivity, thereby providing a periodic band that guarantees the effective propagation of the elastic wave and can improve the signal sensitivity
  • the sensor structure of the gap structure is to overcome the problem that the propagation of the existing elastic wave is suppressed, resulting in low signal acquisition sensitivity, thereby providing a periodic band that guarantees the effective propagation of the elastic wave and can improve the signal sensitivity
  • the sensor structure of the gap structure
  • a sensor structure with a periodic band gap structure of the present invention includes a plurality of one-dimensional phononic crystal sector structures arranged concentrically, and a plurality of one-to-one correspondingly arranged in one-dimensional sound
  • the one-dimensional phononic crystal sector structure is designed with periodic round holes and/or periodic square holes.
  • the periodic round holes and/or periodic square holes are periodic structures arranged in concentric circles.
  • the piezoelectric sensors are arranged in a circular array, and a gap is provided between adjacent piezoelectric sensors.
  • the gap range between adjacent piezoelectric sensors is determined by the number of high-sensitivity frequency bands of the sensors.
  • the minimum gap between adjacent piezoelectric sensors is greater than 1 mm.
  • the sensor structure includes six one-dimensional phononic crystal sector structures, and the six one-dimensional phononic crystal sector structures have different local resonance bands.
  • the one-dimensional phononic crystal sector structure is made of an acoustic metamaterial designed with a periodic structure and forming a light band bandgap structure.
  • the sensor structure is arranged in a circle, and its outer diameter is ⁇ R, and the value range of ⁇ R is as follows: 100 mm ⁇ R ⁇ 500 mm.
  • the thickness of the sensor structure is h, and the value range of h is as follows: 1 mm ⁇ h ⁇ 10 mm.
  • the present invention is made of acoustic metamaterials that adopt periodic structure design and form a light band bandgap structure, and use its local resonance effect on the special frequency band of the signal to enhance the sensor signal of the detector, thereby realizing the improvement of the sensitivity of the sensor
  • the purpose is to make the designed sensor structure have special physical properties.
  • the present invention adopts a plurality of piezoelectric sensors and forms an array type sensor, which can effectively perform vector analysis on the signal.
  • the invention can also measure the local resonance frequency range of unknown metamaterial design by gradually changing the external frequency.
  • FIG. 1 is a schematic diagram of the sensor structure of the present invention having a periodic band gap structure
  • FIG. 2 is a top view of the sensor structure of the present invention having a periodic band gap structure
  • FIG 3 is a side view of the sensor structure of the present invention having a periodic band gap structure.
  • this embodiment provides a sensor structure having a periodic band gap structure, including a plurality of one-dimensional phononic crystal sector structures 11 arranged concentrically, and a plurality of piezoelectric sensors 12, and the pressure
  • the electric sensor 12 is correspondingly disposed inside the one-dimensional phononic crystal sector structure 11; at the same time, an air anti-interference zone 13 is provided between any two adjacent one-dimensional phononic crystal sector structures 11.
  • the sensor structure having a periodic band gap structure in this embodiment includes a plurality of one-dimensional phononic crystal fan-shaped structures 11 arranged concentrically, and a plurality of piezoelectric sensors 12, and the piezoelectric sensors 12 are correspondingly arranged in The inner side of the one-dimensional phononic crystal fan-shaped structure 11 is helpful to locate the direction of the signal source and improve the sensitivity.
  • the piezoelectric sensor 12 is close to the center of the circle, which is beneficial to positioning the signal;
  • the internal parameters of the one-dimensional phononic crystal fan-shaped structure 11 can realize different local resonance bands, so elastic waves are transmitted to the piezoelectric sensor 12 through the one-dimensional phononic crystal fan-shaped structure 11, which is beneficial to generate different frequencies , Can enhance the frequency signal in a larger range, effectively improve the sensitivity, and facilitate subsequent signal processing and research; at the same time, any adjacent two one-dimensional phononic crystal fan structure 11 is provided with an air anti-interference zone 13 Through the air anti-interference zone 13, when the elastic wave is transmitted through any one-dimensional phononic crystal fan-shaped structure 11, two adjacent one-dimensional phononic crystal fan-shaped structures 11 interfere with it.
  • six one-dimensional phononic crystal fan-shaped structures 11 are taken as examples to illustrate the transmission method of elastic waves.
  • the six one-dimensional phononic crystal fan-shaped structures 11 are marked as A1, A2, A3, A4, A5, A6, correspondingly, the number of the piezoelectric sensors 12 is also six, respectively labeled as C1, C2, C3, C4, C5, C6, then the elastic wave wants to be transmitted to the The C1, C2, C3, C4, C5, C6 in the piezoelectric sensor 12 must pass through the corresponding A1, A2, A3, A4, A5, A6 in the one-dimensional phononic crystal sector structure 11 because of the The six one-dimensional phononic crystal fan-shaped structures 11 have different local resonance bands, and the metamaterials are formed as a whole, and the local resonance of the metamaterials will enhance the elastic wave with a frequency in the resonance band.
  • Including multi-band metamaterial design, and their local resonance frequency is different, so it can be compared with a larger frequency signal to enhance the sensitivity; at the same time can also be used to detect weak elastic wave signals Because the local resonance of the metamaterial can enhance this signal, it is beneficial for subsequent signal processing and other research.
  • the one-dimensional phononic crystal sector structures 11 are all made of acoustic metamaterials with a periodic structure design and forming an optical band gap structure, and each of the one-dimensional phononic crystal sector structures 11
  • the scale parameters and shapes of acoustic metamaterials are different, so that by changing the above parameters, different local resonance bands can be achieved, and the frequency signals in a larger range can be enhanced to achieve the effect of improving sensitivity.
  • the one-dimensional phononic crystal fan-shaped structure 11 is provided with a plurality of through holes 14 through which signals of different frequencies can be collected to make the sensing sensitivity higher; Arrangement with a set period is helpful for collecting sensitive signals on different frequency bands and improving the signal receiving sensitivity.
  • the arrangement of the through holes 14 according to a set period means that the arrangement of the through holes is a periodic structure arranged in concentric circles.
  • the shape of the through hole 14 may be any shape such as a circle, a square, or a triangle, and generally a periodic round hole and/or a periodic square hole design is often used.
  • the multiple piezoelectric sensors 12 are arranged in a circular array, which is beneficial for effective vector analysis of signals.
  • C1, C2, C3, C4, C5, and C6 in the piezoelectric sensor 12 form a circle, and the center of the circle is the same as A1, A2, and A3 in the six one-dimensional phononic crystal sector structure 11 , A4, A5, A6 circle concentric.
  • a gap is provided between any adjacent piezoelectric sensors 12 to help prevent the piezoelectric sensors 12 from interfering with each other; the gap range between adjacent piezoelectric sensors 12 is mainly determined by the number of high-sensitivity frequency bands of the sensors. When the design requires a large number of frequency bands, the gap range will become smaller, as long as the minimum size meets the minimum gap size between adjacent piezoelectric sensors 12 is greater than 1mm, that is, the minimum gap is greater than 1mm.
  • the outer shape of the sensor structure is circular, and its outer diameter is ⁇ R, and the value range of ⁇ R is as follows: 100mm ⁇ R ⁇ 500mm; as shown in FIG. 3, the thickness of the sensor structure is h , And the value range of h is as follows: 1mm ⁇ h ⁇ 10mm.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

一种具有周期性带隙结构的传感器结构，包括若干个同圆心设置的一维声子晶体扇形结构（11），以及若干个一一对应设置于一维声子晶体扇形结构（11）内侧的压电传感器（12）；同时在相邻的一维声子晶体扇形结构（11）之间设置空气抗干扰区（13）。该传感器结构由采用周期结构设计、并形成光波段带隙结构的声学超材料制成，利用其对信号特殊频段的局域共振效应，来增强传感信号，从而实现提高传感器灵敏度的目的，使设计的传感器结构具有特殊的物理学性能。

Description

一种具有周期性带隙结构的传感器结构 技术领域
本发明涉及传感器结构的技术领域，尤其是指一种具有周期性带隙结构的传感器结构。
背景技术
声子晶体的研究为振动控制领域提供新的思路，其由两种或两种以上弹性材料组成，具有弹性波禁带特性的周期性复合结构。弹性波在声子晶体中传播时会形成弹性波禁带，在禁带频率范围内，弹性波的传播将会受到抑制。近年来，各国学者对于声子晶体的带隙调控做了很多有益的探索。从最初的调整几何结构(散射体形状和晶格结构)实现带隙调控到利用智能材料的流变性质来实现调控声子晶体的能带结构。
发明内容
为此，本发明所要解决的技术问题在于克服现有弹性波的传播受到抑制，导致信号采集灵敏度低的问题，从而提供一种保证弹性波的有效传播，且能提高信号灵敏度的具有周期性带隙结构的传感器结构。
为解决上述技术问题，本发明的一种具有周期性带隙结构的传感器结构，该传感器结构包括若干个同圆心设置的一维声子晶体扇形结构，以及若干个一一对应设置于一维声子晶体扇形结构内侧的压电传感器；同时在相邻的一维声子晶体扇形结构之间设置空气抗干扰区。
在本发明的一个实施例中，所述一维声子晶体扇形结构采用周期性圆孔和/或周期性方孔设计。
在本发明的一个实施例中，所述周期性圆孔和/或周期性方孔是按照同 心圆排列的周期性结构。
在本发明的一个实施例中，所述压电传感器采用圆形阵列式排列，且相邻的压电传感器之间设置有间隙。
在本发明的一个实施例中，相邻的压电传感器之间的间隙范围是由传感器高灵敏度频段的数量决定。
在本发明的一个实施例中，相邻的压电传感器之间最小间隙大于1mm。
在本发明的一个实施例中，所述传感器结构包括六个一维声子晶体扇形结构，且该六个一维声子晶体扇形结构具有不同的局域共振带。
在本发明的一个实施例中，所述一维声子晶体扇形结构由采用周期结构设计、并形成光波段带隙结构的声学超材料制成。
在本发明的一个实施例中，该传感器结构呈圆形设置，其外直径为ΦR，且该ΦR的取值范围如下：100mm<φR<500mm。
在本发明的一个实施例中，该传感器结构的厚度为h，且该h的取值范围如下：1mm<h<10mm。
本发明的上述技术方案相比现有技术具有以下优点：
1.本发明由采用周期结构设计、并形成光波段带隙结构的声学超材料制成，利用其对信号特殊频段的局域共振效应，来增强探测器传感信号，从而实现提高传感器灵敏度的目的，使设计的传感器结构具有特殊的物理学性能。
2.本发明采用了多个压电传感器，并组成阵列式传感器，可以对信号进行有效地矢量分析。
3.本发明也可以通过逐渐改变外界的频率，去测量未知超材料设计的局域共振频率范围。
附图说明
为了使本发明的内容更容易被清楚的理解，下面根据本发明的具体实施 例并结合附图，对本发明作进一步详细的说明，其中
图1是本发明具有周期性带隙结构的传感器结构的示意图；
图2是本发明具有周期性带隙结构的传感器结构的俯视图；
图3是本发明具有周期性带隙结构的传感器结构的侧视图。
说明书附图标记说明：11-一维声子晶体扇形结构，12-压电传感器，13-空气抗干扰区，14-通孔。
具体实施方式
如图1所示，本实施例提供一种具有周期性带隙结构的传感器结构，包括多个同圆心设置的一维声子晶体扇形结构11，以及多个压电传感器12，且所述压电传感器12对应设置在所述一维声子晶体扇形结构11的内侧；同时任意相邻两个一维声子晶体扇形结构11之间设置空气抗干扰区13。
本实施例所述具有周期性带隙结构的传感器结构，包括多个同圆心设置的一维声子晶体扇形结构11，以及多个压电传感器12，且所述压电传感器12对应设置在所述一维声子晶体扇形结构11的内侧，有利于定位信号源的方向，提高灵敏度，具体地，所述压电传感器12靠近所述圆心，从而有利于对信号进行定位；由于通过改变所述一维声子晶体扇形结构11的内部参数可以实现不同的局域共振带，因此弹性波通过所述一维声子晶体扇形结构11传输至所述压电传感器12上，有利于产生不同的频率，可以在较大的范围内增强频率信号，有效提高了灵敏度，有利于其后的信号处理及其研究；同时任意相邻两个一维声子晶体扇形结构11之间设置空气抗干扰区13，通过所述空气抗干扰区13可以避免所述弹性波在任意一个所述一维声子晶体扇形结构11传输时，相邻的两个一维声子晶体扇形结构11对其进行的干扰。
本实施例中，以六个一维声子晶体扇形结构11为例说明弹性波的传输方式，如图1所示，所述六个一维声子晶体扇形结构11分别标记为A1、A2、A3、A4、A5、A6，对应地，所述压电传感器12的数量也为六个，分别标记为C1、C2、C3、C4、C5、C6，则所述弹性波要想传递至所述压电传感器12 中的C1、C2、C3、C4、C5、C6，就必须经过相应的所述一维声子晶体扇形结构11中的A1、A2、A3、A4、A5、A6，由于所述六个一维声子晶体扇形结构11结构具有不同的局域共振带，整体又形成了超材料，而所述超材料的局域共振作用，会使得频率在共振带的弹性波得到增强，由于包括有多频段超材料设计，且它们的局域共振频率不同，所以可以对比较大的范围内的频率信号进行增强，以达到提高灵敏度的作用；同时还可以运用于检测较微弱的弹性波信号，由于所述超材料的局域共振可以增强此信号，有利于其后的信号处理及其它研究。
如图2所示，所述一维声子晶体扇形结构11均采用周期结构设计、并形成光波段带隙结构的声学超材料制成，且每个所述一维声子晶体扇形结构11的声学超材料的尺度参数与形状均不一样，从而通过改变上述参数可以实现不同的局域共振带，对比较大的范围内的频率信号进行增强，以达到提高灵敏度的作用。具体地，所述一维声子晶体扇形结构11上设有多个通孔14，通过所述通孔14可以对不同频率的信号进行采集，使传感灵敏度更高；所述通孔14按照设定的周期进行排列，有利于采集不同频率带上的敏感信号，提高信号的接收灵敏度。其中，所述述通孔14按照设定的周期进行排列是指所述通孔的排列是按照同心圆排列的周期性结构。所述通孔14的形状可以为圆形、方形或者三角形等任意形状，一般常采用周期性圆孔和/或周期性方孔设计。
所述多个压电传感器12呈圆形阵列式排列，有利于对信号进行有效地矢量分析。具体地，所述压电传感器12中的C1、C2、C3、C4、C5、C6围成一个圆形，且其圆心与所述六个一维声子晶体扇形结构11中A1、A2、A3、A4、A5、A6围成的圆形同心。任意相邻的压电传感器12之间设置有间隙，有利于防止压电传感器12的相互干扰；相邻的压电传感器12之间的间隙范围，主要是由传感器高灵敏度频段的数量来决定，当设计要求频段数量较多时，间隙范围将会变小，最小尺寸只要满足相邻的压电传感器12之间最小间隙尺寸大于1mm就可以了，即最小间隙大于1mm。
本实施例中，所述传感器结构的外形呈圆形，其外直径为ΦR，且该ΦR 的取值范围如下：100mm<φR<500mm；如图3所示，所述传感器结构的厚度为h，且该h的取值范围如下：1mm<h<10mm。
显然，上述实施例仅仅是为清楚地说明所作的举例，并非对实施方式的限定。对于所属领域的普通技术人员来说，在上述说明的基础上还可以做出其它不同形式变化或变动。这里无需也无法对所有的实施方式予以穷举。而由此所引伸出的显而易见的变化或变动仍处于本发明创造的保护范围之中。

Claims (10)

  1. 一种具有周期性带隙结构的传感器结构，其特征在于，该传感器结构包括若干个同圆心设置的一维声子晶体扇形结构，以及若干个一一对应设置于一维声子晶体扇形结构内侧的压电传感器；同时在相邻的一维声子晶体扇形结构之间设置空气抗干扰区。
  2. 根据权利要求1所述的具有周期性带隙结构的传感器结构，其特征在于：所述一维声子晶体扇形结构采用周期性圆孔和/或周期性方孔设计。
  3. 根据权利要求2所述的具有周期性带隙结构的传感器结构，其特征在于：所述周期性圆孔和/或周期性方孔是按照同心圆排列的周期性结构。
  4. 根据权利要求1所述的具有周期性带隙结构的传感器结构，其特征在于：所述压电传感器采用圆形阵列式排列，且相邻的压电传感器之间设置有间隙。
  5. 根据权利要求4所述的具有周期性带隙结构的传感器结构，其特征在于：相邻的压电传感器之间的间隙范围是由传感器高灵敏度频段的数量决定。
  6. 根据权利要求5所述的具有周期性带隙结构的传感器结构，其特征在于：相邻的压电传感器之间最小间隙大于1mm。
  7. 根据权利要求1所述的具有周期性带隙结构的传感器结构，其特征在于：所述传感器结构包括六个一维声子晶体扇形结构，且该六个一维声子晶体扇形结构具有不同的局域共振带。
  8. 根据权利要求1所述的具有周期性带隙结构的传感器结构，其特征在于：所述一维声子晶体扇形结构由采用周期结构设计、并形成光波段带隙结构的声学超材料制成。
  9. 根据权利要求1所述的具有周期性带隙结构的传感器结构，其特征在于：该传感器结构呈圆形设置，其外直径为ΦR，且该ΦR的取值范围如下：100mm<φR<500mm。
  10. 根据权利要求1所述的具有周期性带隙结构的传感器结构，其特征在于：该传感器结构的厚度为h，且该h的取值范围如下：1mm<h<10mm。
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