WO2020141691A1 - Dispositif de prévention de condensation de rosée d'une chambre à humidité/température constante - Google Patents

Dispositif de prévention de condensation de rosée d'une chambre à humidité/température constante Download PDF

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Publication number
WO2020141691A1
WO2020141691A1 PCT/KR2019/011687 KR2019011687W WO2020141691A1 WO 2020141691 A1 WO2020141691 A1 WO 2020141691A1 KR 2019011687 W KR2019011687 W KR 2019011687W WO 2020141691 A1 WO2020141691 A1 WO 2020141691A1
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WIPO (PCT)
Prior art keywords
glass
constant temperature
humidity chamber
heating wire
temperature
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Application number
PCT/KR2019/011687
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English (en)
Korean (ko)
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이기용
문현봉
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(주)플렉시고
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Publication of WO2020141691A1 publication Critical patent/WO2020141691A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Definitions

  • the present invention relates to a device for preventing condensation in a constant temperature and constant humidity chamber, and more specifically, a constant temperature and constant humidity chamber that effectively removes water condensation and condensation generated on the inner wall or outer wall of a constant temperature and constant humidity chamber by using multiple heating wires. It relates to a condensation preventing device.
  • thermo-hygrostat is a device that is used for weathering test, aging test, etc. of samples, semiconductor parts, etc. stored while maintaining the temperature and humidity of the chamber, which is the internal space, constant.
  • precision electronic components such as an IC package, a printed circuit board (PCB), a wafer, a charge coupled device (CCD), and a quartz vibrator are external. There is a possibility that it becomes inoperative due to the influence of the environment, such as temperature, humidity, direct sunlight, static electricity, and the like.
  • reagents or samples for biotechnology, physics, chemistry, and medical laboratories can be stored for a long period of time only under an appropriate humidity and temperature environment. Therefore, in this case, the humidity should not be kept to a minimum, but should be maintained at an appropriate level, and in addition, the temperature should be kept at a low temperature.
  • the storage chamber needs to be maintained at a temperature suitable for culture or propagation, not simply maintaining a low temperature.
  • a constant temperature and humidity chamber having an internal space blocked from the outside and maintaining the internal space at a predetermined temperature or humidity is used.
  • the conventional constant temperature and humidity chamber it is composed of an independent space that is closed to the outside for insulation and sealing, and a viewing window is provided to check the internal state of the constant temperature and humidity chamber.
  • the water condensation phenomenon in the constant temperature and humidity chamber has a problem that it is difficult to check the internal state of the constant temperature and humidity chamber through damage to the evaluation object due to the drop of water droplets and a viewing window.
  • condensation of the constant temperature and humidity chamber can be prevented by installing a heating wire in the viewing window of the constant temperature and humidity chamber.
  • the present invention was devised in view of the above points, and effectively removes water condensation and condensation generated on the inner wall or outer wall of the constant temperature and humidity chamber using a heating wire that is installed multiple times, and the temperature inside the constant temperature and humidity chamber and
  • An object of the present invention is to provide a device for preventing condensation in a constant temperature and humidity chamber, which is capable of minimizing the influence of a hot wire on a humidity environment.
  • the condensation preventing apparatus of the constant temperature and humidity chamber looks inside the constant temperature and humidity chamber outside the constant temperature and humidity chamber in which samples and parts are stored
  • the heating wire may include a first heating wire heating the inner glass in a space formed between the inner glass and the out glass so as to heat the multiple glasses, and a second heating wire heating the out glass.
  • the first heating wire is provided on the inner surface of the inner glass to operate under high temperature and high humidity conditions of the constant temperature and humidity chamber to remove water condensation generated on the inner wall of the inner glass.
  • the second heating wire is provided on the inner surface of the out glass to operate under low temperature conditions of the constant temperature and humidity chamber to remove condensation generated on the outer wall of the out glass.
  • the first heating wire and the second heating wire are respectively controlled through a control unit to minimize the temperature effect in the constant temperature and humidity chamber.
  • a plurality of heating wires are arranged in the viewing window of the constant temperature and humidity chamber to effectively remove the dew and condensation occurring on the inner and outer walls of the viewing window.
  • the heating wire is disposed inside the viewing window, it is possible to prevent the effect of the constant temperature and humidity chamber due to damage to the heating wire.
  • the internal environment of the constant temperature and humidity chamber is optimally maintained to safely protect samples and components inside the chamber.
  • FIG. 1 is a view showing a condensation preventing device of a constant temperature and humidity chamber according to an embodiment of the present invention.
  • FIG. 2 is a view showing a viewing window of a constant temperature and humidity chamber according to an embodiment of the present invention.
  • FIG 3 is a view showing that the viewing window of the constant temperature and humidity chamber according to an embodiment of the present invention is made of triple glass.
  • 1 is a view showing a condensation preventing device of a constant temperature and humidity chamber according to an embodiment of the present invention.
  • 2 is a view showing a viewing window of a constant temperature and humidity chamber according to an embodiment of the present invention.
  • the condensation preventing device 1 of the constant temperature and humidity chamber 100 includes a multi-glass 10 and a hot wire 20 provided in the multi-glass can do.
  • the multi-glass 10 of the condensation preventing device 1 is a viewing window through which the sample and parts are stored, the outside of the constant temperature and humidity chamber 100 can be seen inside the constant temperature and humidity chamber 100
  • the multiple glasses 10 may include double glass 10A or triple glass (see FIG. 3, 10B).
  • the condensation preventing device 1 may arrange the heating wire 20 regardless of whether the multi-glass 10 has a flat or curved surface.
  • the hot wire 20 may be disposed regardless of whether the material of the viewing window 110 is a metal or a non-metal.
  • the heating wire 20 removes water condensation generated on the inner wall of the inner glass 11 of the double glass 10A or condensation generated on the outer wall of the out glass 12 of the double glass 10A. It is provided with at least two or more for removal. It is preferable that the double glass 10A is provided with two heating wires 20.
  • heating wires 20 are disposed on the double glass 10A constituting the viewing window 110 of the constant temperature and humidity chamber 100, but the heating wires 20 are inside the double glass 10A.
  • Each can be arranged to remove the dew and dew condensation occurring in high and low temperature environments individually. At the same time, it is possible to minimize the effect on the temperature and humidity environment inside the constant temperature and humidity chamber 100.
  • the heating wire 20 is a first heating wire 21 for heating the inner glass 11 in a space formed between the inner glass 11 and the out glass 12 so as to heat the double glass 10A. ), and a second heating wire 22 for heating the out glass 12.
  • first heating wire 21 and the second heating wire 22 are provided inside the double glass 10A, heat is applied to the inside of the constant temperature and humidity chamber 100 while protecting each heating wire 20 The impact can be minimized.
  • the second heating wire 22 is disposed on the inner wall of the air pocket a of the double glass 10A, physical damage does not occur even if an impact is applied to the outer wall of the double glass 10A. Through this, it is possible to prevent the second heating wire 22 from being short-circuited.
  • the first heating wire 21 of the condensation preventing device 1 is provided on the inner surface of the inner glass 11 to operate under the high temperature and high humidity conditions of the constant temperature and humidity chamber 100 to operate the inner glass ( It is a structure to remove water condensation generated on the inner wall of 11).
  • the condensation preventing device 1 prevents condensation by operating the first heating wire 21 formed on the inner glass 11 of the double glass 10A under conditions of high temperature and high humidity. At this time, the temperature of the first heating wire 21 is set to conditions similar to the inside of the chamber to heat the inner glass 11 of the double glass 10A, thereby affecting the internal temperature of the constant temperature and humidity chamber 100. You will not give.
  • the second heating wire 22 is provided on the inner surface of the out glass 12 to operate under low temperature conditions of the constant temperature and humidity chamber 100 to remove condensation generated on the outer wall of the out glass 12. .
  • the second heating wire 22 is operated in the low temperature condition of the constant temperature and humidity chamber 100 to prevent condensation of the outer wall of the out glass 12. At this time, the first heating wire 21 is not used. It is possible to prevent the temperature of the inner glass 11 from rising. Through this, it is possible to prevent the cooling efficiency of the constant temperature and humidity chamber 100 from being lowered.
  • the temperature effect of the constant temperature and humidity chamber 100 can be minimized by the air pocket a of the double glass 10A.
  • the first heating wire 21 and the second heating wire 22 are respectively controlled through a control unit (not shown) to minimize the temperature effect inside the constant temperature and humidity chamber 100.
  • a control unit not shown
  • only the first heating wire 21 may be operated or only the second heating wire 22 may be operated to minimize the influence of the temperature inside the constant temperature and humidity chamber 100.
  • FIG 3 is a view showing that the viewing window of the constant temperature and humidity chamber according to an embodiment of the present invention is made of triple glass.
  • the viewing window 110 of the constant temperature and humidity chamber 100 forms a triple glass 10B
  • the triple glass 10B includes an inner glass 11 and an out glass 12, And a middle glass 13 installed between the inner glass 11 and the out glass 12, and a plurality of heating wires 20 may be disposed on the triple glass 10B, respectively.
  • an air pocket a is formed between the inner glass 11 and the middle glass 13, and an air pocket a is formed between the middle glass 13 and the out glass 12. Is formed.
  • the first heating wire 21 among the heating wires 20 is disposed on the inner surface of the inner glass 11 of the triple glass 10B, and the second heating wire 22 is placed on the inner surface of the middle glass 13
  • the third heating wire 23 is disposed on the outer surface of the middle glass 13
  • the fourth heating wire 24 is disposed on the inner surface of the out glass 12.
  • water condensation or dew condensation of the triple glass 10B can be effectively eliminated by controlling the first heating wire 21 to the fourth heating wire 24, respectively.
  • the first heating wire 21 and the second heating wire 22 are mainly used to remove moisture condensed on the inner surface of the triple glass 10B, while satisfying the high temperature and high humidity environment of the constant temperature and humidity chamber 100, water In order to effectively remove the constriction, the first heating wire 21 and the second heating wire 22 may be controlled and used respectively.
  • the third hot wire 23 and the fourth hot wire 24 are mainly used to remove condensation generated on the outer surface of the triple glass 10B, which satisfies the low temperature environment of the constant temperature and humidity chamber 100 In order to effectively remove condensation, the third and second heating wires 23 and 24 can be controlled and used respectively.
  • condensation can be quickly removed by operating both the third heating wire 23 and the fourth heating wire 24.
  • a plurality of heating wires 20 are disposed on the viewing window 110 of the constant temperature and humidity chamber 100 by the condensation preventing device 1 of the constant temperature and humidity chamber 100, so that the inner and outer walls of the viewing window 110 are arranged. It is possible to effectively remove the occurrence and dew condensation.
  • the operation of the constant temperature and humidity chamber 100 can be effectively performed.
  • the heating wire 20 is disposed inside the viewing window 110, it is possible to prevent the influence of the constant temperature and humidity chamber 100 due to the damage of the heating wire 20 in advance.
  • the internal environment of the constant temperature and humidity chamber 100 is optimally maintained to safely protect samples and components inside the chamber.
  • the condensation preventing device of a constant temperature and humidity chamber is a weathering test, an aging test, etc. for samples, semiconductor parts, etc., which are stored in the chamber, while maintaining a constant temperature and humidity in the chamber. It is applied to the thermo-hygrostat used for the thermo-hygrostat to effectively remove water condensation and condensation on the inner wall or outer wall of the constant temperature and humidity chamber using multiple heating wires.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)

Abstract

La présente invention concerne un dispositif de prévention de condensation de rosée d'une chambre à humidité/température constante, le dispositif de prévention de condensation de rosée pouvant éliminer efficacement la formation d'eau et la condensation de rosée sur la paroi interne ou la paroi externe d'une fenêtre de visualisation de la chambre à humidité/température constante à l'aide de lignes de chauffage multi-installées, et minimiser l'effet des lignes de chauffage sur l'environnement de température et d'humidité à l'intérieur de la chambre à humidité/température constante. A cet effet, un dispositif de prévention de condensation de rosée d'une chambre à humidité/température constante comprend : un verre multicouche constituant une fenêtre de visualisation qui se trouve à l'extérieur de la chambre à humidité/température constante pour stocker des échantillons et des composants, et à travers lequel l'intérieur de la chambre à humidité/température constante peut être visualisé depuis l'extérieur ; et au moins deux lignes de chauffage fournies pour éliminer la formation d'eau sur une paroi de verre interne du verre multicouche, ou pour éliminer la condensation de rosée sur une paroi de verre externe du verre multicouche.
PCT/KR2019/011687 2019-01-04 2019-09-10 Dispositif de prévention de condensation de rosée d'une chambre à humidité/température constante WO2020141691A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2019-0001005 2019-01-04
KR1020190001005A KR20200085013A (ko) 2019-01-04 2019-01-04 항온항습 챔버의 결로 방지 장치

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WO2020141691A1 true WO2020141691A1 (fr) 2020-07-09

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117144322A (zh) * 2023-08-28 2023-12-01 上海陛通半导体能源科技股份有限公司 一种腔盖结构、半导体工艺设备及其使用方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102643723B1 (ko) * 2021-09-29 2024-04-12 이홍우 착탈식 항온유지수단을 구비한 조립식 인큐베이터
CN114576815A (zh) * 2022-03-15 2022-06-03 山东建筑大学 一种恒温恒湿气候室防结露的控制方法

Citations (5)

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Publication number Priority date Publication date Assignee Title
KR910007572Y1 (ko) * 1989-04-29 1991-09-30 박순홍 항온 항습조의 투시창
KR200279176Y1 (ko) * 2002-03-20 2002-06-22 주식회사 윈스피아 창문용 복층유리
KR100926338B1 (ko) * 2001-09-26 2009-11-10 프리글래스 게엠베하 ＆ 체오. 카게 전기 전도체 구조물을 포함한 플라스틱 창유리를 제조하는 방법과, 도선이 삽입된 플라스틱 창유리
JP2017032375A (ja) * 2015-07-31 2017-02-09 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
WO2018052074A1 (fr) * 2016-09-15 2018-03-22 株式会社堀場エステック Dispositif de mesure d'absorbance et dispositif de fabrication de semi-conducteurs utilisant le dispositif de mesure d'absorbance

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080061752A (ko) 2006-12-28 2008-07-03 엘지전자 주식회사 항온항습 보관용 챔버 조립체
KR101857663B1 (ko) 2016-11-15 2018-05-14 유영훈 IoT 결합형 열선을 이용한 결로방지 시스템 및 방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR910007572Y1 (ko) * 1989-04-29 1991-09-30 박순홍 항온 항습조의 투시창
KR100926338B1 (ko) * 2001-09-26 2009-11-10 프리글래스 게엠베하 ＆ 체오. 카게 전기 전도체 구조물을 포함한 플라스틱 창유리를 제조하는 방법과, 도선이 삽입된 플라스틱 창유리
KR200279176Y1 (ko) * 2002-03-20 2002-06-22 주식회사 윈스피아 창문용 복층유리
JP2017032375A (ja) * 2015-07-31 2017-02-09 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
WO2018052074A1 (fr) * 2016-09-15 2018-03-22 株式会社堀場エステック Dispositif de mesure d'absorbance et dispositif de fabrication de semi-conducteurs utilisant le dispositif de mesure d'absorbance

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117144322A (zh) * 2023-08-28 2023-12-01 上海陛通半导体能源科技股份有限公司 一种腔盖结构、半导体工艺设备及其使用方法

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