WO2013109010A1 - Dispositif de mesure comprenant un capteur tm - Google Patents

Dispositif de mesure comprenant un capteur tm Download PDF

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Publication number
WO2013109010A1
WO2013109010A1 PCT/KR2013/000085 KR2013000085W WO2013109010A1 WO 2013109010 A1 WO2013109010 A1 WO 2013109010A1 KR 2013000085 W KR2013000085 W KR 2013000085W WO 2013109010 A1 WO2013109010 A1 WO 2013109010A1
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WO
WIPO (PCT)
Prior art keywords
sensor
ferro
housing
seal
axis
Prior art date
Application number
PCT/KR2013/000085
Other languages
English (en)
Korean (ko)
Inventor
정진황
노태우
신윤철
조재현
Original Assignee
주식회사 아츠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 아츠 filed Critical 주식회사 아츠
Publication of WO2013109010A1 publication Critical patent/WO2013109010A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
    • G01B5/06—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

Definitions

  • the TM sensor can sense the thickness of a material to be adsorbed, for example, to sense a material deposited in a deposition process in a semiconductor device manufacturing process such as an OLED, in which case deposition of a deposit This replaces the new TM sensor.
  • the present invention eliminates the inconvenience caused by replacing the TM sensor by alternately using a plurality of TM sensors, and the compactness of the structure to enable the replacement of the TM sensor and Enhance simplicity and reliability of operation.
  • the sensor cover is provided on one side, the housing is formed with an exposure hole on the outside of the sensor cover; It is installed inside the sensor cover, is fixed to one axis of the ferro seal is rotatably installed in the housing, the TM sensor (Thickness Measurement Sensor) is installed a plurality along the circumference of the rotation center, the rotation of the ferro seal 1 axis A TM sensor module to selectively expose the TM sensor through the exposure hole according to an angle; A slit fixed to two axes of ferro seals rotatably installed inside one axis of the ferro seal, and installed to face the sensor cover at an outer side of the housing, and exposed to the TM sensor exposed through the exposure hole.
  • the TM sensor Thiickness Measurement Sensor
  • a chopper unit formed in plural along the circumference of the rotation center; A first motor installed in the housing to rotate the TM sensor module to provide a rotational force to the one axis of the ferro seal; A second motor installed in the housing to rotate the chopper unit to provide rotational force to the two shafts of the ferro seal; A first measuring unit provided in the housing to measure a rotation angle of the TM sensor module; And a second measuring unit provided in the housing to measure the rotational speed of the chopper unit, wherein the multi-axial drive by the ferro seal 1 axis and the ferro seal 2 axis is possible.
  • the first measuring unit may include: a first sensor dog installed to rotate together with the one axis of the ferro seal and having a plurality of pins arranged along an edge thereof; And a first sensor installed inside the housing by a bracket to detect a pin of the first sensor dog and output a detection signal.
  • the simplicity of the multi-axis ferro-seal structure to solve the inconvenience of replacing the TM sensor, and to enable the replacement of the TM sensor and It contributes to compactness and protects the TM sensor device from heat, thus increasing the reliability of the sensing.
  • FIG. 1 is an exploded perspective view showing a measuring device having a TM sensor according to an embodiment of the present invention
  • FIG. 2 is a cross-sectional view showing a measuring device having a TM sensor according to an embodiment of the present invention
  • FIG. 3 is a perspective view showing the inside of a measuring device having a TM sensor according to an embodiment of the present invention
  • FIG. 6 is a view showing an installation state of a measuring device having a TM sensor according to an embodiment of the present invention.
  • FIG. 1 is an exploded perspective view showing a measuring device having a TM sensor according to an embodiment of the present invention
  • Figure 2 is a cross-sectional view showing a measuring device having a TM sensor according to an embodiment of the present invention
  • 3 is a perspective view showing the inside of a measuring device having a TM sensor according to an embodiment of the present invention.
  • the measuring device 100 with a TM sensor is a housing 110, TM sensor module 120, Chopper unit 130, the first And second motors 140 and 150, and first and second measurement units 160 and 170, and the multi-axis drive is possible by the ferro seal 1 axis 121 and the ferro seal 2 axis 131 which will be described later. It features.
  • the housing 110 has a structure in which a sensor cover 111 is provided at one side, an exposure hole 112 is formed at an outer side of the sensor cover 111, and the other side thereof is opened by the cover 113. In the opening 115 is formed.
  • TM sensor module 120 is installed on the inside of the housing 110 to be installed to face the sensor cover 111 is installed inside the sensor cover 111, for example may have a disk shape, the housing 110 It is fixed to the ferro-seal one axis 121 is installed to be rotatable inside the, a plurality of TM sensors (Thickness Measurement Sensor; 122) is installed along the circumference of the rotation center, for example, 16, ferro seal one axis 121 According to the rotation angle of the TM sensor 122 is selectively exposed through the exposure hole 112.
  • TM sensors Thiickness Measurement Sensor
  • the chopper unit 130 is fixed to the end of the ferro-seal two-axis 131 is rotatably installed separately from the ferro-seal one-axis 121 inside the ferro-seal one-axis 121, for example It has a disc shape and is installed to face the sensor cover 111 from the outside of the housing 110, as shown in Figure 4, for exposing the TM sensor 122 exposed through the exposure hole 112 A plurality of slits 132 are formed along the circumference of the rotation center.
  • the chopper unit 130 reduces the exposure of the TM sensor 122 by reducing the exposure of the TM sensor 122 by the slit 132 to increase the use period of the TM sensor 122.
  • the first motor 140 is installed in the housing 110 to rotate the TM sensor module 120 to provide a rotational force to the ferro seal one shaft 121.
  • the first and second motors 140 and 150 are installed on the motor brackets 144 and 154, and the power transmission devices 142 and 152 are fixed to ends of the first and second motor shafts 141 and 151, respectively.
  • the power transmission devices 142 and 152 fixed to the ends of the ferro-seal two-axis 131 protruding from the end of the ferro seal 1 shaft 121 may be geared to the power transmission devices 143 and 153, respectively, the motor bracket 144 and 154 are installed inside the housing 110, respectively.
  • the first measuring unit 160 is provided in the housing 110 to measure the rotation angle of the TM sensor module 120.
  • the first measuring unit 160 is installed to rotate together with the ferro seal 1 shaft 121 and a plurality of pins along the edge.
  • the inner side of the housing 110 is installed by the bracket 164 to detect the first sensor dog 161 and the pin 162 of the first sensor dog 161 and to output a detection signal. It may include a first sensor 163.
  • the second measuring unit 170 is provided in the housing 110 to measure the rotational speed of the chopper unit 130.
  • the second measuring unit 170 is installed to rotate together with the ferro-seal two-axis 131 and pins 172 on one side.
  • the second sensor dog 171 is installed so as to protrude, and the pin 172 of the second sensor dog 171 is installed on the inside of the housing 110 by the bracket 164 to detect the output of the detection signal It may include two sensors 173.
  • the first and second sensors 163 and 173 may be installed up and down by the same rotation sensor bracket 164, and the bracket 164 may be fixed to one of the motor brackets 154 of the motor brackets 144 and 154. have.
  • the first and second sensor dogs 161 and 171 may be directly fixed to the ferro seal 1 axis 121 and the ferro seal 2 axis 131, and, alternatively, to the power transmission devices 143 and 153 as in this embodiment, respectively. By being fixed may be fixed to the ferro seal 1 axis 121 and the ferro seal 2 axis 131 via the power transmission device (143,153), respectively.
  • the first and second sensors 163 and 173 output light having a predetermined wavelength and receive light reflected by the pins 162 and 172, or output light detection signals according to whether the light is received by the pins 162 and 172.
  • various types of sensors may be applied.
  • a ferro-seal 180 may be installed at an outer side of the ferro seal 1 shaft 121, and a coolant circulation tube 190 may be installed at an outer circumferential surface of the ferro-sil 180.
  • the ferrosil 180 is fixed on the cover member 114 which surrounds the TM sensor module 120 together with the sensor cover 111.
  • the cover member 114 forms an inner space with the sensor cover 111, TM sensor module 120 is located in this inner space, is fixed to the inside of the housing 110, the motor on the upper surface Brackets 144 and 154 are fixed.
  • the measuring device 100 with the TM sensor according to the invention is provided with a bellows pipe lock 210 provided in the opening 115 of the housing 110. It may be connected to the bellows pipe 220, and may be fixed to the inner wall of the vacuum chamber 300 by a flange 230 provided at an end of the bellows pipe 220.
  • the TM sensor module 120 and the chopper unit 130 are rotated by the driving of the first and second motors 140 and 150, respectively, and the first sensor 163 of the first measuring unit 160 rotates. 1
  • the control unit 200 receives the detection signal TM sensor module 120
  • Control the first motor 140 to selectively position the TM sensor 122 in the exposure hole 112 of the sensor cover 111, so that the TM sensor 122 located in the exposure hole 112 material
  • the rotation angle of the TM sensor module 120 can be controlled to alternately position the other TM sensor 122 in the exposure hole 112, respectively.
  • the signal line drawn from each of the TM sensor 122 is connected to the control unit 200 by a rotary connection such as a rotary joint to enable the operation and action of the TM sensor 122 located in the exposure hole 112. have.
  • control unit 200 detects the pin 172 of the second sensor dog 171 that the second sensor 173 of the second measuring unit 170 rotates to output a detection signal, and receives the detection signal.
  • the second motor 150 may be controlled to adjust the rotation speed of the chopper unit 130.
  • the inside of the housing 110 including the ferro chamber 180 can be cooled by circulating and supplying the coolant to the coolant circulation pipe 190.
  • a measuring apparatus including a TEM sensor, including: a housing having a sensor cover at one side and an exposure hole formed at an outer side of the sensor cover; It is installed inside the sensor cover, is fixed to one axis of the ferro seal is rotatably installed in the housing, the TM sensor (Thickness Measurement Sensor) is installed a plurality along the circumference of the rotation center, the rotation of the ferro seal 1 axis A TM sensor module to selectively expose the TM sensor through the exposure hole according to an angle; A slit fixed to two axes of ferro seals rotatably installed inside one axis of the ferro seal, and installed to face the sensor cover at an outer side of the housing, and exposed to the TM sensor exposed through the exposure hole.
  • TM sensor Thiickness Measurement Sensor
  • a chopper unit formed in plural along the circumference of the rotation center; A first motor installed in the housing to rotate the TM sensor module to provide a rotational force to the one axis of the ferro seal; A second motor installed in the housing to rotate the chopper unit to provide rotational force to the two shafts of the ferro seal; A first measuring unit provided in the housing to measure a rotation angle of the TM sensor module; And a second measuring unit provided in the housing to measure the rotational speed of the chopper unit, wherein the multi-axial drive by the ferro seal 1 axis and the ferro seal 2 axis is possible.
  • the first measuring unit may include: a first sensor dog installed to rotate together with the one axis of the ferro seal and having a plurality of pins arranged along an edge thereof; And a first sensor installed inside the housing by a bracket to detect a pin of the first sensor dog and output a detection signal.
  • the second measuring unit, the second sensor dog is installed to rotate together with the two ferro-seal shaft, the pin is protruding on one side; And a second sensor installed inside the housing by a bracket to detect a pin of the second sensor dog and output a detection signal.
  • Ferro seal installed on the outer side of the ferro seal 1 axis; And a refrigerant circulation tube installed on an outer circumferential surface of the ferro chamber and supplied with a refrigerant circulating.
  • It is characterized in that it further comprises an air cooling tube provided to forcibly discharge the heat inside by forcibly ejecting the air inside the housing.
  • the measuring device with the TEM sensor according to the present invention various specific devices used for semiconductor processes and the like are available.
  • TM sensor module 121 ferro seal 1 axis
  • first motor 141 first motor shaft
  • first measuring unit 161 first sensor dog

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

Selon la présente invention, plusieurs capteurs TM sont utilisés de façon alternée de façon à traiter le problème causé par le remplacement des capteurs TM, à renforcer la simplicité structurelle en permettant la rotation des capteurs TM, et à augmenter la fiabilité de détection grâce à la protection des capteurs TM contre la chaleur.
PCT/KR2013/000085 2012-01-19 2013-01-07 Dispositif de mesure comprenant un capteur tm WO2013109010A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2012-0006009 2012-01-19
KR1020120006009A KR101256131B1 (ko) 2012-01-19 2012-01-19 Ｔｍ 센서를 구비한 측정 장치

Publications (1)

Publication Number Publication Date
WO2013109010A1 true WO2013109010A1 (fr) 2013-07-25

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PCT/KR2013/000085 WO2013109010A1 (fr) 2012-01-19 2013-01-07 Dispositif de mesure comprenant un capteur tm

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KR (1) KR101256131B1 (fr)
WO (1) WO2013109010A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101957467B1 (ko) * 2013-04-24 2019-03-12 주식회사 선익시스템 증착두께 측정장치
KR101789546B1 (ko) * 2015-12-11 2017-11-20 주식회사 선익시스템 증착두께 측정장치 및 이를 구비한 증착장치
KR102292818B1 (ko) * 2019-09-23 2021-08-26 (주)에스브이엠테크 증착 물질 감지장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0130964Y1 (ko) * 1995-08-18 1999-03-30 이우복 고소 작업용 로보트를 이용한 도장막 두께 검사장치
JP2004083172A (ja) * 2002-08-26 2004-03-18 Hitachi Ltd 紙葉類厚さ検知装置
KR20100004165A (ko) * 2008-07-03 2010-01-13 주식회사 선익시스템 막 증착 장치와 막 두께 측정 방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0130964Y1 (ko) * 1995-08-18 1999-03-30 이우복 고소 작업용 로보트를 이용한 도장막 두께 검사장치
JP2004083172A (ja) * 2002-08-26 2004-03-18 Hitachi Ltd 紙葉類厚さ検知装置
KR20100004165A (ko) * 2008-07-03 2010-01-13 주식회사 선익시스템 막 증착 장치와 막 두께 측정 방법

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Publication number Publication date
KR101256131B1 (ko) 2013-04-23

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