WO2013109010A1

WO2013109010A1 - Measurement device comprising tm sensor

Info

Publication number: WO2013109010A1
Application number: PCT/KR2013/000085
Authority: WO
Inventors: 정진황; 노태우; 신윤철; 조재현
Original assignee: 주식회사 아츠
Priority date: 2012-01-19
Filing date: 2013-01-07
Publication date: 2013-07-25
Also published as: KR101256131B1

Abstract

According to the present invention, a plurality of TM sensors are used alternately so as to address the inconvenience caused by TM sensor replacement, contribute to structural simplicity by allowing TM sensor rotation, and increase sensing reliability by protecting the TM sensors from heat.

Description

Measuring device with TEM sensor

The present invention relates to a measuring device having a TM (TM) sensor, and more particularly, to conciseness and compactness of the structure to enable the alternating of a plurality of TM sensors, and to protect the TM sensor from heat to It relates to a measuring device having a TM sensor for increasing the reliability.

In general, the TM sensor can sense the thickness of a material to be adsorbed, for example, to sense a material deposited in a deposition process in a semiconductor device manufacturing process such as an OLED, in which case deposition of a deposit This replaces the new TM sensor.

However, the conventional measuring device having a TM sensor has a problem that the new TM sensor has to be replaced due to the material to be deposited or adsorbed.

In order to solve the conventional problems as described above, the present invention eliminates the inconvenience caused by replacing the TM sensor by alternately using a plurality of TM sensors, and the compactness of the structure to enable the replacement of the TM sensor and Enhance simplicity and reliability of operation.

Other objects of the present invention will be readily understood through the following description of the embodiments.

In order to achieve the above object, according to an aspect of the present invention, the sensor cover is provided on one side, the housing is formed with an exposure hole on the outside of the sensor cover; It is installed inside the sensor cover, is fixed to one axis of the ferro seal is rotatably installed in the housing, the TM sensor (Thickness Measurement Sensor) is installed a plurality along the circumference of the rotation center, the rotation of the ferro seal 1 axis A TM sensor module to selectively expose the TM sensor through the exposure hole according to an angle; A slit fixed to two axes of ferro seals rotatably installed inside one axis of the ferro seal, and installed to face the sensor cover at an outer side of the housing, and exposed to the TM sensor exposed through the exposure hole. A chopper unit formed in plural along the circumference of the rotation center; A first motor installed in the housing to rotate the TM sensor module to provide a rotational force to the one axis of the ferro seal; A second motor installed in the housing to rotate the chopper unit to provide rotational force to the two shafts of the ferro seal; A first measuring unit provided in the housing to measure a rotation angle of the TM sensor module; And a second measuring unit provided in the housing to measure the rotational speed of the chopper unit, wherein the multi-axial drive by the ferro seal 1 axis and the ferro seal 2 axis is possible.

The first measuring unit may include: a first sensor dog installed to rotate together with the one axis of the ferro seal and having a plurality of pins arranged along an edge thereof; And a first sensor installed inside the housing by a bracket to detect a pin of the first sensor dog and output a detection signal.

The second measuring unit, the second sensor dog is installed to rotate together with the two ferro-seal shaft, the pin is protruding on one side; And a second sensor installed inside the housing by a bracket to detect a pin of the second sensor dog and output a detection signal.

Ferro seal installed on the outer side of the ferro seal 1 axis; And a refrigerant circulation tube installed on an outer circumferential surface of the ferro chamber and supplied with a refrigerant circulating.

It is characterized in that it further comprises an air cooling tube provided to forcibly discharge the heat inside by forcibly ejecting the air inside the housing.

According to the measuring device with a TM sensor according to the present invention, by using a plurality of the TM sensor alternately, the simplicity of the multi-axis ferro-seal structure to solve the inconvenience of replacing the TM sensor, and to enable the replacement of the TM sensor and It contributes to compactness and protects the TM sensor device from heat, thus increasing the reliability of the sensing.

1 is an exploded perspective view showing a measuring device having a TM sensor according to an embodiment of the present invention,

2 is a cross-sectional view showing a measuring device having a TM sensor according to an embodiment of the present invention,

3 is a perspective view showing the inside of a measuring device having a TM sensor according to an embodiment of the present invention,

4 is a bottom view showing a sensor cover of a measuring device having a TM sensor according to an embodiment of the present invention,

5 is a perspective view showing a measuring device having a TM sensor according to an embodiment of the present invention,

6 is a view showing an installation state of a measuring device having a TM sensor according to an embodiment of the present invention.

As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the written description. However, this is not intended to limit the present invention to specific embodiments, but should be understood as including all changes, equivalents, and substitutes included in the spirit and scope of the present invention, and may be modified in various other forms. It is to be understood that the scope of the present invention is not limited to the following examples.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, and the same or corresponding components will be given the same reference numerals regardless of the reference numerals, and redundant description thereof will be omitted.

1 is an exploded perspective view showing a measuring device having a TM sensor according to an embodiment of the present invention, Figure 2 is a cross-sectional view showing a measuring device having a TM sensor according to an embodiment of the present invention, 3 is a perspective view showing the inside of a measuring device having a TM sensor according to an embodiment of the present invention.

As shown in Figures 1 to 3, the measuring device 100 with a TM sensor according to an embodiment of the present invention is a housing 110, TM sensor module 120, Chopper unit 130, the first And

second motors

140 and 150, and first and

second measurement units

160 and 170, and the multi-axis drive is possible by the ferro seal 1 axis 121 and the ferro seal 2 axis 131 which will be described later. It features.

The housing 110 has a structure in which a sensor cover 111 is provided at one side, an exposure hole 112 is formed at an outer side of the sensor cover 111, and the other side thereof is opened by the cover 113. In the opening 115 is formed.

TM sensor module 120 is installed on the inside of the housing 110 to be installed to face the sensor cover 111 is installed inside the sensor cover 111, for example may have a disk shape, the housing 110 It is fixed to the ferro-seal one axis 121 is installed to be rotatable inside the, a plurality of TM sensors (Thickness Measurement Sensor; 122) is installed along the circumference of the rotation center, for example, 16, ferro seal one axis 121 According to the rotation angle of the TM sensor 122 is selectively exposed through the exposure hole 112.

The chopper unit 130 is fixed to the end of the ferro-seal two-axis 131 is rotatably installed separately from the ferro-seal one-axis 121 inside the ferro-seal one-axis 121, for example It has a disc shape and is installed to face the sensor cover 111 from the outside of the housing 110, as shown in Figure 4, for exposing the TM sensor 122 exposed through the exposure hole 112 A plurality of slits 132 are formed along the circumference of the rotation center. In addition, the chopper unit 130 reduces the exposure of the TM sensor 122 by reducing the exposure of the TM sensor 122 by the slit 132 to increase the use period of the TM sensor 122.

The first motor 140 is installed in the housing 110 to rotate the TM sensor module 120 to provide a rotational force to the ferro seal one shaft 121.

The second motor 150 is installed in the housing 110 to rotate the chopper unit 130 to provide a rotational force to the two ferro seal shaft (131).

The first and

second motors

140 and 150 are installed on the

motor brackets

144 and 154, and the

power transmission devices

142 and 152 are fixed to ends of the first and

second motor shafts

141 and 151, respectively. The

power transmission devices

142 and 152 fixed to the ends of the ferro-seal two-axis 131 protruding from the end of the ferro seal 1 shaft 121 may be geared to the

power transmission devices

143 and 153, respectively, the

motor bracket

144 and 154 are installed inside the housing 110, respectively.

The first measuring unit 160 is provided in the housing 110 to measure the rotation angle of the TM sensor module 120. For example, the first measuring unit 160 is installed to rotate together with the ferro seal 1 shaft 121 and a plurality of pins along the edge. The inner side of the housing 110 is installed by the bracket 164 to detect the first sensor dog 161 and the pin 162 of the first sensor dog 161 and to output a detection signal. It may include a first sensor 163.

The second measuring unit 170 is provided in the housing 110 to measure the rotational speed of the chopper unit 130. For example, the second measuring unit 170 is installed to rotate together with the ferro-seal two-axis 131 and pins 172 on one side. The second sensor dog 171 is installed so as to protrude, and the pin 172 of the second sensor dog 171 is installed on the inside of the housing 110 by the bracket 164 to detect the output of the detection signal It may include two sensors 173.

The first and

second sensors

163 and 173 may be installed up and down by the same rotation sensor bracket 164, and the bracket 164 may be fixed to one of the motor brackets 154 of the

motor brackets

144 and 154. have. In addition, the first and

second sensor dogs

161 and 171 may be directly fixed to the ferro seal 1 axis 121 and the ferro seal 2 axis 131, and, alternatively, to the

power transmission devices

143 and 153 as in this embodiment, respectively. By being fixed may be fixed to the ferro seal 1 axis 121 and the ferro seal 2 axis 131 via the power transmission device (143,153), respectively.

The first and

second sensors

163 and 173 output light having a predetermined wavelength and receive light reflected by the

pins

162 and 172, or output light detection signals according to whether the light is received by the

pins

162 and 172. In addition, various types of sensors may be applied.

The controller 200 may be provided to receive the detection signals of the first and

second sensors

163 and 173 and transmit a control signal for controlling the first and

second motors

140 and 150. As in the present embodiment, it may be installed in the housing 110 in the form of a PCB. Alternatively, the housing 110 may be installed to be spaced apart from the outside of the housing 110 to receive the detection signal and transmit the control signal by wire or wireless communication by a cable. Make it possible.

A ferro-seal 180 may be installed at an outer side of the ferro seal 1 shaft 121, and a coolant circulation tube 190 may be installed at an outer circumferential surface of the ferro-sil 180.

The ferrosil 180 is fixed on the cover member 114 which surrounds the TM sensor module 120 together with the sensor cover 111. On the other hand, the cover member 114 forms an inner space with the sensor cover 111, TM sensor module 120 is located in this inner space, is fixed to the inside of the housing 110, the motor on the upper surface Brackets 144 and 154 are fixed.

The ferrosil 180 is located between the vacuum pressure in the vacuum chamber in which the TM sensor 132 is installed and the atmospheric pressure transmitted through the bellows pipe, and serves to transmit the rotational force without changing the pressure even between them. It is cooled by the refrigerant circulation pipe 190 to be.

The refrigerant circulation tube 190 is wound around the outer circumferential surface of the ferro chamber 180 as in the present embodiment so that the refrigerant is circulated and supplied. Alternatively, the refrigerant circulation tube 190 is wound once in the ferro chamber 180 or on the outer circumferential surface of the ferro chamber 180. It may be arranged in a zigzag. In addition, the refrigerant circulation tube 190 may receive the refrigerant circulated from the external refrigerant supply unit through the port 191 protruding out of the housing 110.

As shown in FIGS. 5 and 6, the measuring device 100 with the TM sensor according to the invention is provided with a bellows pipe lock 210 provided in the opening 115 of the housing 110. It may be connected to the bellows pipe 220, and may be fixed to the inner wall of the vacuum chamber 300 by a flange 230 provided at an end of the bellows pipe 220.

It may further include an air cooling tube 221 provided to forcibly discharge the heat inside by forcibly ejecting the air inside the housing 110.

The operation of the measuring device with a TM sensor according to the present invention will be described.

The TM sensor module 120 and the chopper unit 130 are rotated by the driving of the first and

second motors

140 and 150, respectively, and the first sensor 163 of the first measuring unit 160 rotates. 1 When detecting the pins 162 of each of the sensor dog 161 and outputting a detection signal, by controlling the rotation angle of the TM sensor module 120 by the control unit 200 receives the detection signal TM sensor module 120 Control the first motor 140 to selectively position the TM sensor 122 in the exposure hole 112 of the sensor cover 111, so that the TM sensor 122 located in the exposure hole 112 material By the adsorption of the sensing function is lost, the rotation angle of the TM sensor module 120 can be controlled to alternately position the other TM sensor 122 in the exposure hole 112, respectively. On the other hand, the signal line drawn from each of the TM sensor 122 is connected to the control unit 200 by a rotary connection such as a rotary joint to enable the operation and action of the TM sensor 122 located in the exposure hole 112. have.

In addition, the control unit 200 detects the pin 172 of the second sensor dog 171 that the second sensor 173 of the second measuring unit 170 rotates to output a detection signal, and receives the detection signal. The second motor 150 may be controlled to adjust the rotation speed of the chopper unit 130.

On the other hand, the inside of the housing 110 including the ferro chamber 180 can be cooled by circulating and supplying the coolant to the coolant circulation pipe 190.

As described above, the present invention has been described with reference to the accompanying drawings, but various modifications and changes can be made without departing from the spirit of the present invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined by the claims below and equivalents thereof.

According to an aspect of the present invention, there is provided a measuring apparatus including a TEM sensor, including: a housing having a sensor cover at one side and an exposure hole formed at an outer side of the sensor cover; It is installed inside the sensor cover, is fixed to one axis of the ferro seal is rotatably installed in the housing, the TM sensor (Thickness Measurement Sensor) is installed a plurality along the circumference of the rotation center, the rotation of the ferro seal 1 axis A TM sensor module to selectively expose the TM sensor through the exposure hole according to an angle; A slit fixed to two axes of ferro seals rotatably installed inside one axis of the ferro seal, and installed to face the sensor cover at an outer side of the housing, and exposed to the TM sensor exposed through the exposure hole. A chopper unit formed in plural along the circumference of the rotation center; A first motor installed in the housing to rotate the TM sensor module to provide a rotational force to the one axis of the ferro seal; A second motor installed in the housing to rotate the chopper unit to provide rotational force to the two shafts of the ferro seal; A first measuring unit provided in the housing to measure a rotation angle of the TM sensor module; And a second measuring unit provided in the housing to measure the rotational speed of the chopper unit, wherein the multi-axial drive by the ferro seal 1 axis and the ferro seal 2 axis is possible.

As for the measuring device with the TEM sensor according to the present invention, various specific devices used for semiconductor processes and the like are available.

110 housing 111 sensor cover

112: exposure hole 113: cover

114: cover member 115: opening

120: TM sensor module 121: ferro seal 1 axis

122: TM sensor 130: Chopper unit

131: Ferro Seal 2-axis 132: Slit

140: first motor 141: first motor shaft

142: power train 143: power train

144: motor bracket 150: second motor

151: second motor shaft 152: power train

153: power train 154: motor bracket

160: first measuring unit 161: first sensor dog

162: pin 163: first sensor

164: rotation sensor bracket 170: second measuring unit

171: second sensor dog 172: pin

173: second sensor 180: ferrosil

190: refrigerant circulation tube 191: port

200: control unit 210: bellows pipe lock

220: bellows pipe 221: air cooling tube

230; Flange 300: Vacuum Chamber

Claims

A housing having a sensor cover at one side and an exposure hole formed at an outer side of the sensor cover;

It is installed inside the sensor cover, is fixed to one axis of the ferro seal is rotatably installed in the housing, the TM sensor (Thickness Measurement Sensor) is installed a plurality along the circumference of the rotation center, the rotation of the ferro seal 1 axis A TM sensor module to selectively expose the TM sensor through the exposure hole according to an angle;

A slit fixed to two axes of ferro seals rotatably installed inside one axis of the ferro seal, and installed to face the sensor cover at an outer side of the housing, and exposed to the TM sensor exposed through the exposure hole. A chopper unit formed in plural along the circumference of the rotation center;

A first motor installed in the housing to rotate the TM sensor module to provide a rotational force to the one axis of the ferro seal;

A second motor installed in the housing to rotate the chopper unit to provide rotational force to the two shafts of the ferro seal;

A first measuring unit provided in the housing to measure a rotation angle of the TM sensor module; And

It includes a second measuring unit provided in the housing to measure the rotational speed of the chopper unit,

Measuring device with a TM sensor, characterized in that the multi-axial drive by the ferro seal 1 axis and the ferro seal 2 axes.
The method of claim 1, wherein the first measuring unit,

A first sensor dog installed to rotate together with the one axis of the ferro seal and having a plurality of pins arranged along an edge thereof; And

And a first sensor mounted inside the housing by a bracket to detect a pin of the first sensor dog and output a detection signal.
The method of claim 1, wherein the second measuring unit,

A second sensor dog installed to rotate together with the two ferro seals, the second sensor dog installed to protrude a pin on one side; And

And a second sensor mounted inside the housing by a bracket to detect a pin of the second sensor dog and output a detection signal.
The method according to any one of claims 1 to 3,

Ferro seal installed on the outer side of the ferro seal 1 axis; And

It is installed on the outer circumferential surface of the ferro chamber, the measuring device with a TM sensor, characterized in that it further comprises a refrigerant circulation pipe that the refrigerant is circulated.
The measuring device with a TM sensor according to claim 1, further comprising an air cooling tube provided to forcibly discharge the internal heat by forcibly ejecting the air inside the housing.