KR20140099412A - Measurement system having tm sensor capable of controlling position - Google Patents

Measurement system having tm sensor capable of controlling position Download PDF

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Publication number
KR20140099412A
KR20140099412A KR1020130012078A KR20130012078A KR20140099412A KR 20140099412 A KR20140099412 A KR 20140099412A KR 1020130012078 A KR1020130012078 A KR 1020130012078A KR 20130012078 A KR20130012078 A KR 20130012078A KR 20140099412 A KR20140099412 A KR 20140099412A
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KR
South Korea
Prior art keywords
sensor
shaft
housing
sensors
pins
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KR1020130012078A
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Korean (ko)
Inventor
박창봉
이청명
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주식회사 아츠
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Priority to KR1020130012078A priority Critical patent/KR20140099412A/en
Publication of KR20140099412A publication Critical patent/KR20140099412A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)

Abstract

A measuring device with a TM sensor capable of controlling the position thereof comprises: a housing which includes a sensor cover unit where a nozzle hole is formed; a TM sensor module which is installed inside the sensor cover unit by being fixated to a first shaft installed inside the housing in order to rotate, where multiple TM sensors are installed along the circumference of the center of rotation, and where one of the TM sensors is exposed through the nozzle hole according to the rotational angle of the first shaft; a first motor which is installed inside the housing in order to rotate the first shaft; and a first sensing unit which is placed inside the housing in order to sense the position of the TM sensor. The first sensing unit comprises: a first sensor dog which is installed in order to rotate along with the first shaft, where multiple pins are aligned along the edge thereof, and where one of the pins has a different width from other pins in order to recognize one specific TM sensor among the multiple TM sensors; and a first sensor which senses the pin of the first sensor dog in order to output a sensing signal. Therefore, the measuring device can remove inconvenience due to the replacement of a TM sensor by alternately using multiple TM sensors, can accurately sense the starting position of the TM sensor without disassembling the device by differentiating the size of pins for sensing the position of the TM sensor, can contribute to the simplification and compactness of a multi-axis ferro-alloy structure capable of alternating TM sensors, and can improve assembly properties by simply attaching or detaching the TM sensor module without bolt fastening.

Description

TECHNICAL FIELD [0001] The present invention relates to a measurement apparatus having a TM sensor capable of position control,

The present invention relates to a measurement apparatus having a TM sensor capable of position control, and more particularly, to a measurement apparatus provided with a TM sensor capable of position control so that a plurality of TM sensors can be easily alternately used.

Typically, a TM sensor (Thickness Measurement Sensor) can sense the thickness of a material to be adsorbed. For example, during the manufacturing process of a semiconductor device such as an OLED, a material to be deposited in a deposition process is sensed. In this case, Will replace the new TM sensor.

However, the conventional measuring apparatus equipped with a TM sensor capable of position control has a problem in that it is troublesome to replace a new TM sensor due to substances to be deposited or adsorbed.

In order to solve the problems of the prior art as described above, the present invention can accurately detect the position of the TM sensor so that a plurality of TM sensors can be alternately used, thereby eliminating the inconvenience of replacing the TM sensor . Other objects of the present invention will become readily apparent from the following description of the embodiments.

In order to achieve the above object, according to one aspect of the present invention, there is provided a sensor comprising: a housing provided with a sensor cover portion in which an exposure hole is formed; And a plurality of TM sensors are installed along the circumference of the rotation center, the TM sensors being fixed to a first shaft rotatably installed inside the housing and disposed inside the sensor cover, A TM sensor module in which one of the TM sensor modules is exposed through the exposure hole; A first motor installed inside the housing to rotate the first shaft; And a first sensing unit provided inside the housing to sense a position of the TM sensor, wherein the first sensing unit is installed to rotate together with the first shaft, a plurality of pins are arranged along the edge, A first sensor dog configured to recognize any one TM sensor among a plurality of the TM sensors by forming one of the pins having a width different from that of the remaining pins; And a first sensor installed to sense a pin of the first sensor dog and output a sensing signal.

The first sensor may be formed such that one of the pins has a width greater than that of the remaining pins.

The first sensor may be provided at an edge of the first sensor so that the pin corresponds to each of the TM sensors, and one of the pins may correspond to the TM sensor used first among the TM sensors.

And a slit for exposing the TM sensor exposed through the exposure hole is rotatably mounted on a second shaft fixed to a second shaft rotatably installed inside the first shaft so as to face the sensor cover from the outside of the housing, A plurality of chopper units formed along the circumference of the center; A second motor installed inside the housing for rotating the second shaft, respectively; And a second sensing unit provided on the housing to sense a rotational speed of the chopper unit.

A second sensor dog installed to rotate together with the second shaft, and a pin protruding from the second sensor dog; And a second sensor installed to detect a pin of the second sensor dog and output a sensing signal.

The first and second shafts may be installed in the inner side of the biaxial shaft and may be provided inside the housing to prevent the vacuum from flowing out through the first and second shafts.

A refrigerant circulation part installed on an outer circumferential surface of the ferrocomer and circulating and supplying the refrigerant; And an air cooling pipe for forcibly discharging the inside air by forcibly blowing the inside air of the housing.

The TM sensor module according to claim 1, further comprising a detachable coupling portion for detachably coupling the first shaft and the TM sensor module, wherein the detachable coupling portion is provided to protrude from any one of the TM sensor module and the first shaft, A fitting protrusion formed on the base plate; A fitting member having a fitting groove formed so that the fitting protrusion is fitted along the longitudinal direction of the first shaft and fixed to the other one of the TM sensor module and the first shaft; And a ball flange installed on both sides of the fitting groove so as to face each other, and a ball elastically supported by a spring so as to be engaged with the engaging groove.

According to the measuring apparatus having the TM sensor capable of position control according to the present invention, it is possible to eliminate the inconvenience of replacing the TM sensor by using a plurality of TM sensors alternately, The TM sensor module can be easily recognized without tightening the bolts, thereby contributing to the simplification and compactness of the multi-shaft ferroelectric structure allowing the TM sensors to be alternated, So that the assembling ability can be improved.

1 is a perspective view illustrating a measurement apparatus having a TM sensor capable of position control according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view illustrating a measurement apparatus having a TM sensor capable of position control according to an embodiment of the present invention.
3 is a perspective view illustrating an internal structure of a measurement apparatus having a TM sensor capable of position control according to an embodiment of the present invention.
4 is a cross-sectional view illustrating an internal structure of a measurement apparatus having a TM sensor capable of position control according to an embodiment of the present invention.
5 is a perspective view illustrating a TM sensor module showing a measurement apparatus having a TM sensor capable of position control according to an embodiment of the present invention.
FIG. 6 is a plan view showing a chopper unit showing a measurement apparatus having a TM sensor capable of position control according to an embodiment of the present invention.
FIG. 7 is a view for explaining the first and second sensing units of a measurement apparatus having a TM sensor capable of position control according to an embodiment of the present invention.
8 is a view for explaining a first sensing unit of a measurement apparatus having a TM sensor capable of position control according to an embodiment of the present invention.
FIG. 9 is a perspective view illustrating a first sensor dog of a first sensing unit of a measurement apparatus having a TM sensor capable of position control according to an embodiment of the present invention. FIG.
10 is a bottom view for explaining a second sensing unit of a measurement apparatus having a TM sensor capable of position control according to an embodiment of the present invention.
FIG. 11 is a perspective view showing the entirety of a measuring apparatus having a TM sensor capable of position control according to an embodiment of the present invention.
FIG. 12 is a view illustrating an installation of a measurement apparatus having a TM sensor capable of position control according to an embodiment of the present invention.
13 is a cross-sectional view illustrating a detachable coupling portion of a measurement device having a TM sensor according to an embodiment of the present invention.
FIG. 14 is a perspective view showing a fitting protrusion of a measuring device having a TM sensor according to an embodiment of the present invention. FIG.
FIG. 15 is a perspective view showing a fitting member of a measuring apparatus having a TM sensor according to an embodiment of the present invention. FIG.

While the invention is susceptible to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail. It is to be understood, however, that the invention is not to be limited to the specific embodiments, but is to be understood to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention, And the scope of the present invention is not limited to the following examples.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like or corresponding elements are denoted by the same reference numerals, and redundant explanations thereof will be omitted.

FIG. 1 is a perspective view showing a measuring apparatus having a TM sensor capable of position control according to an embodiment of the present invention. FIG. 2 is a perspective view of a measuring apparatus having a TM sensor capable of position control according to an embodiment of the present invention. And FIG. 3 is a perspective view illustrating an internal structure of a measurement apparatus having a TM sensor capable of position control according to an embodiment of the present invention. Referring to FIG.

1 to 3, a measuring apparatus 100 having a TM sensor capable of position control according to an embodiment of the present invention includes a housing 110, a TM sensor module (Thickness Measurement sensor module) The first motor 140 and the first sensing unit 180 may further include a chopper unit 130, a second motor 150 and a second sensing unit 190 have.

2 and 4, the housing 110 is provided with a sensor cover part 111 at one side thereof, and a single exposure hole 112 is formed through the sensor cover part 111 so as to pass through the inside and the outside of the sensor cover part 111 And a cover 113 is coupled to the opposite side of the sensor cover 111 so as to be opened, and an opening 115 is formed in the side. The sensor cover 111 may have a structure to be coupled to the housing 110 as in the present embodiment, but the sensor cover 111 may be integrally formed with the housing 110. In addition, the sensor cover unit 111 allows any one of the TM sensor (Thickness Measurement sensor) 121 of the TM sensor module 120, which will be described later, to be exposed through the exposure hole 112 to perform a sensing operation. The TM sensor 121 is selectively exposed through the exposure hole 112 so as to alternate with another TM sensor 121. When the remaining TM sensor 121 is exposed, It serves to prevent pollution.

A cover member 114 may be provided on the housing 110 so as to face the inner surface of the sensor cover unit 111 in order to define an inner space of the sensor cover unit 111. The cover member 114 may be a sensor cover, The TM sensor module 120 is enclosed together with the module 111 to form a space in which the TM sensor module 120 is installed. In addition, the cover member 114 may be provided with an electrode 116 (FIG. 14) on its outward facing surface. The electrode 116 is provided at a position where the TM sensor 121 of the TM sensor module 120 can be connected to the TM sensor 121 exposed through the exposure hole 112, Thereby enabling power supply or signal transmission with the TM sensor 121.

The TM sensor module 120 is fixed to a first shaft 201 rotatably installed inside the housing 110 and is installed inside the sensor cover part 111. The TM sensor module 120 includes a rotation center The TM sensor 121 is selectively exposed through the exposure hole 112 in accordance with the rotation angle of the first shaft 201 and the sensor cover portion 111 so as to be opposed to the sensor cover portion 111.

5, the TM sensor module 120 has a disc shape as in the present embodiment, and a plurality of TM sensors 121, for example, twelve TM sensors 121 are spaced around the center of rotation And a through hole 122 may be formed through which the second shaft 202 (shown in FIG. 4) penetrates and protrudes to the outside. The TM sensor 121 senses the thickness of a material to be adsorbed or a substance to be deposited in a manufacturing process of a semiconductor device or a glass substrate, for example, an OLED manufacturing process. For example, the TM sensor 121 may be formed of a quartz crystal sensor, Exposed through the exposure hole 112 of the cover part 111. When the lifetime of the TM sensor 121 is reached, the TM sensor 121 is changed to another TM sensor 121, The substrate 111 is not contaminated by the wafer 111 or the substrate during the substrate manufacturing process.

6, the chopper unit 130 includes a first shaft 201 and a second shaft 202. The second shaft 202 is rotatably installed inside the first shaft 201 (see FIG. 4) separately from the first shaft 201 And a slit 131 for exposing the TM sensor 121 exposed through the exposure hole 112 (shown in FIG. 4) is provided to face the sensor cover part 111 from the outside of the housing 110, For example, equal to the number of the TM sensors 121. The number of the TM sensors 121 may be the same as the number of the TM sensors 121. [ Further, the chopper unit 130 may be formed in a disk shape, for example, and the use period of the TM sensor 121 is increased by reducing the exposure of the TM sensor 121 by the slit 131. [

4 and 7, the first motor 140 includes a motor shaft (not shown) on the first shaft 201 for rotating the first shaft 201 to rotate the TM sensor module 120, Is arranged inside the housing 110 so as to be parallel to each other. Here, the motor shaft of the first motor 140 is not shown, but it can be understood that it has the same configuration as that of the motor shaft 151 of the second motor 150 shown in FIG.

The second motor 150 is installed inside the housing 110 such that the motor shaft 151 is disposed on the second shaft 202 in order to rotate the second shaft 202 to rotate the chopper unit 130 do.

The first and second motors 140 and 150 are arranged at an angle of 90 degrees with respect to the center of rotation of the TM sensor module 120 and the chopper unit 130 -seal 200, respectively. The first and second motors 140 and 150 may also include first and second motors 140 and 150 installed on the sides of the housing 110 such that they are respectively positioned around the first and second shafts 201 and 202, Respectively, to the second motor brackets 142 and 152, respectively. The first and second motor brackets 142 and 152 may be vertically installed on the cover member 114 installed in the housing 110 so as to be opposed to the sensor cover unit 111 by bolts or the like. Meanwhile, the first and second motors 140 and 150 are not limited to the above-described arrangements, but may be disposed directly or indirectly connected to the first and second shafts 201 and 202 in various ways.

The first and second rotational force transmission units 160 and 170 may be provided to transmit the rotational force of the first and second motors 140 and 150 to the first and second shafts 201 and 202, respectively.

The first rotational force transmitting portion 160 includes a first reduction gear 161 installed to be connected in series to a motor shaft (not shown) of the first motor 140 and a second reduction gear 161 installed on the rotation shaft 161a And a first driven gear 163 fixed to the first shaft 201 so as to be engaged with the first drive gear 162. The first drive gear 162 may be fixed to the first drive gear 162,

The second rotational force transmitting portion 170 includes a second reducer 171 installed to be connected in series to the motor shaft 151 of the second motor 150 and a second reducer 171 connected to the rotational shaft 171a of the second reducer 171, And a second shaft 202 projecting from the first shaft 201 so as to be gear-engaged with the second drive gear 172. The second drive gear 172 is fixed to the first drive gear 162, And a second driven gear 173 which is fixed to an end of the first driven gear 163 so as to be vertically spaced apart from the first driven gear 163. The first and second driving gears 162 and 172 may be formed of a pinion and the first and second driven gears 163 and 173 may be spur gears.

8 and 9, the first sensing unit 180 senses the position of the TM sensor 121 of the TM sensor module 120, thereby grasping the position of the TM sensor 121 for the alternation . The first sensing unit 180 is installed to rotate together with the first shaft 201. The first sensing unit 180 includes a plurality of pins 181 and 182 arranged along the edges and a pin 181 of the pins 181 and 182, Which is different from the pin 182 of the TM sensor 121, to easily recognize any one TM sensor 121, for example, the first TM sensor 121 used among the plurality of TM sensors 121 And a first sensor 184 installed to sense the first sensor dog 183 and the fins 181 and 182 of the first sensor dog 183 and output a sensing signal, respectively.

The number of pins 181 and 182 may be the same as the number of the TM sensors 121 such that the number of pins 181 and 182 corresponds to each of the TM sensors 121, Any one of the pins 181 having a wide width, for example, a large width, may be provided at a position corresponding to the TM sensor 121 to be used first. Thus, each of the pins 181 and 182 can accurately identify the position of each of the TM sensors 121, and the pin 181 having a different width from the remaining pins 182, for example, a large width, ). ≪ / RTI > Thus, if the first sensor 184 senses each of the fins 181, 182 at a different time, e.g., a relatively long time, it senses the pin 181 having a different width, e.g., a longer width, than the remaining pin 182 The position of the first TM sensor 121 is recognized. At this time, the first TM sensor 121 is located in the exposure hole 112, so that the first TM sensor 121 is exposed to the outside and can perform sensing. The position change of each of the TM sensors 121 through the position confirmation of the TM sensor 121 is controlled by a control unit (not shown) for receiving the detection signal from the first sensor 184 and controlling the driving of the first motor 140, Lt; / RTI >

The first sensor 184 is installed such that the light emitting element 184b and the light receiving element 184c are opposed to each other on the inner side of the sensor body 184a having a " The first sensor dog 184c is provided so as to be opposed to each other on the rotation locus of the pins 181 and 182 when the first sensor dog 183 rotates so that the light emitted from the light emitting element 184b reaches the light receiving element 184c, The light receiving element 184c may sense the position of the TM sensor 121 at a position corresponding to each of the pins 181 and 182 through the sensing means 181 and 182, respectively. Here, the light emitting element 184b may be a light emitting diode, for example, and the light receiving element 184c may be a photodiode, for example.

As shown in FIG. 10, the second sensing unit 190 can control the rotation speed of the chopper unit 130 by sensing the rotation speed of the chopper unit 130. The second sensing unit 190 may include a second sensor dog 192 installed to rotate together with a second shaft 202 (shown in FIG. 4) and having a single pin 191 protruded on one side thereof, And a second sensor 193 installed to sense the pin 191 of the second sensor dog 192 and output a sensing signal. Here, the second sensor 193 may be installed such that the light emitting element and the light receiving element face each other inside the sensor body having a " C "shape like the first sensor 184, and the second sensor dog 192 The second shaft 202 detects the pin 191 of the second sensor dog 192 passing between the light emitting element and the light receiving element when the second shaft 202 rotates together with the second shaft 202. The light receiving element outputs a sensing signal to the control unit, So that the rotation speed or the rotation speed of the chopper unit 130 rotating together with the second sensor dog 192 can be detected.

The first and second sensors 184 and 193 may be various sensors other than the optical sensor and may be fixed to the sensor bracket 185 fixed to the inside of the housing 110 by bolts or a coupling structure . The sensor bracket 185 may be fixed to the cover member 114 of the housing 110 by a fastening member such as a bolt or the like. As another example, the sensor bracket 185 may be fixed between the first and second motors 140 and 150 To the first and second motor brackets 142 and 152, respectively.

Meanwhile, a control unit (not shown) may be provided to receive the sensing signals of the first and second sensors 184 and 193 to control the first and second motors 140 and 150. The control unit may include a housing 110, and as another example, the first and second sensors 184 and 193 may be installed separately from the housing 110 to receive a sensing signal from the first and second sensors 184 and 193 by wire communication using a cable or wireless communication such as Bluetooth And may transmit a control signal to the first and second motors 140 and 150. [

As shown in Fig. 4, the first and second shafts 201 and 202 can be supported rotatably in the housing 110 by way of example, and as another example, the first and second shafts 201 and 202 can be supported on the inner side of the ferro- And may be composed of a double ferro-seal shaft to be installed.

The first and second shafts 201 and 202 are installed on the inner side of the ferrosilator 200 so as to prevent the vacuum from flowing out through the first and second shafts 201 and 202 using the magnetic fluid. So that the TM sensor module 120 and the chopper unit 130 can be rotated in a state in which the first and second shafts 201 and 202 are kept airtight.

The ferrosilon 200 may be fixed to a ferrosilator 203 fixed to the cover member 114 with a fastening member such as a bolt by a fastening member such as a bolt. The ferrosilon 200 is positioned between the vacuum pressure in the vacuum chamber in which the TM sensor 121 is installed and the atmospheric pressure transmitted through the bellows pipe, and transmits the rotational force to the pressure difference between them without changing the pressure.

The refrigerant circulation unit 210 (shown in FIG. 8) may be installed on the outer circumferential surface of the ferrofil 200 and the inner side of the bellows pipe 240 (shown in FIG. 11) An air cooling pipe 241 (shown in FIG. 11) may be installed.

8, the coolant circulation unit 210 is installed on the outer circumferential surface of the ferro-cooler 200 to circulate and supply the coolant. In this embodiment, the coolant circulation unit 210 is cooled A supply port 211 and a discharge port 212 for connecting the cooling water supply pipe and the cooling water discharge pipe of the cooling water circulation device provided outside are provided respectively for supplying and discharging the cooling water as the coolant, . Also, the coolant circulation unit 210 may be formed of a coolant circulation pipe, and may be wound on the outer circumferential surface of the ferro chamber 200 one time or a plurality of times, unlike the present embodiment.

As shown in Figures 11 and 12, a measuring device 100 having a position-controllable TM sensor according to the present invention is mounted on an opening 115 (shown in Figure 2) of a housing 110 And is fixed to the inner wall of the vacuum chamber 300 by a flange 250 provided at an end of the bellows pipe 240. The bellows pipe lock 230 is connected to the bellows pipe 240 through a bellows pipe lock 230, . An air cooling pipe 241 may be provided on the inner side of the bellows pipe 240 so as to forcibly discharge air inside the housing 110 by forcibly blowing air inside the housing 110.

13 to 15, a measuring apparatus 100 including a TM sensor according to the present invention includes a first shaft 201 (shown in FIG. 1) and a TM sensor module 120 detachably coupled to the first shaft 201 And may further include a detachable coupling portion 260.

The detachable coupling portion 260 includes a fitting protrusion 262 protruding from one of the TM sensor module 120 and the first shaft 201 and having a locking groove 261 formed on both sides thereof, The TM sensor module 120 and the shim member 264 fixed to the other one of the first shafts 201 are formed in the fitting groove 263 so that the first shafts 262 are fitted in the longitudinal direction of the first shaft 201, And a ball flange 267 which is installed to be opposed to both sides of the fitting groove 263 so as to be opposed to each other and to which the ball 266 elastically supported by the spring 265 is fitted to the latching groove 261 have. The ball 266 of the ball flange 267 is elastically supported by the spring 265 in a state of being fitted in the engagement groove 261 formed on both sides of the fitting projection 262, When the TM sensor module 120 is pulled from the first shaft 201 by applying an appropriate force or more to the ball shaft 120, the TM sensor module 120 is rotated together with the first shaft 201, 266 are released from the locking hole 261 while compressing the spring 265 so that the TM sensor module 120 can be separated from the first shaft 201. Therefore, the TM sensor module can be easily attached and detached without fastening the bolt, thereby improving the assembling property.

The fitting protrusion 262 may be provided on one side of the TM sensor module 120 and the fitting member 264 may be fixed to the end of the first shaft 201, Each of the fitting protrusions 262 may have a shape or a number such that each of the fitting protrusions 262 may be fitted and the ball flange 267 may be formed of two pairs. The number of the members 264, and the number of the ball flanges 267, the mounting position and the shape, and the like may be variously changed.

The operation of the measuring apparatus having the TM sensor capable of position control according to the present invention will now be described.

The measuring apparatus 100 having a TM sensor capable of controlling the position according to the present invention is connected to the bellows pipe 240 and the opening formed in the vacuum chamber 300 by the flange 250 at the end of the bellows pipe 240 And the inner side of the housing 110 is connected to the outside of the vacuum chamber 300 through the bellows pipe 240 so that the atmospheric pressure is maintained. By driving the first and second motors 140 and 150, So that rotation of the module 120 and the chopper unit 130 is respectively enabled.

The ferrosilon 200 is positioned between the vacuum pressure in the vacuum chamber 300 where the TM sensor 121 is installed and the atmospheric pressure transmitted through the bellows pipe 240 to transmit a rotational force to the pressure difference between them . The TM sensor module 120 and the chopper unit 130 are rotated by the first and second motors 140 and 150, respectively.

When the first sensor 184 of the first sensing unit 180 senses the pins 181 and 182 of the first sensor dog 183 rotating and outputs a sensing signal, The TM sensor 121 located in the exposure hole 112 is controlled by the adsorption of the substance by controlling the first motor 140 so that the first motor 121 is selectively positioned in the exposure hole 112 of the sensor cover 111. [ The rotation angle of the TM sensor module 120 can be controlled such that other TM sensors 121 are alternately positioned in the exposure hole 112 when the sensing function is lost. The second sensor 193 of the second sensing unit 190 senses the pin 191 of the second sensor dog 192 and outputs a sensing signal. 130 to control the rotation speed of the second motor 150. Therefore, it is possible to eliminate the inconvenience caused by the replacement of the TM sensor 121 by using the plurality of TM sensors 121 alternately, and to reduce the exposure of the TM sensor 121 by the slit 131 of the chopper unit 130 The use period of the TM sensor 121 can be increased.

On the other hand, the control unit measures the time of sensing each of the pins 181 and 182 of the first sensor dog 183 by the first sensor 184, It is possible to detect a specific TM sensor 121, for example, the first TM sensor 121 used first, and thereby accurately determine the position of the TM sensor 121 and the use of all the TM sensors 121, So that the starting position of the TM sensor 121 can be accurately known even without separating the apparatus.

The inside of the housing 110 including the ferrosilon 200 can be cooled by circulating refrigerant to the refrigerant circulation pipe 210 and air for cooling can be supplied to the inside of the housing 110 through the air cooling pipe 241 So that the inside of the housing 110 can be cooled. Accordingly, the TM sensor 121 or the like is protected from the heat to enhance the reliability of sensing.

The first and second motors 140 and 150 are disposed on the side of the ferro-chamber 200 so that the first and second motors 140 and 150 are parallel to the ferro- The TM sensor module 120 and the chopper unit 130 can be arranged in a small space so that the motor can be arranged in a line in the ferrosilon 200 A multi-shaft ferrule 200 (not shown) which can secure the space in the housing 110 as well as reduce the length of the housing 110 and thereby enable the TM sensor 121 to be shifted, ) Structure can be contributed to simplicity and compactness.

Although the present invention has been described with reference to the accompanying drawings, it is to be understood that various changes and modifications may be made without departing from the spirit of the invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined by the scope of the appended claims and equivalents thereof.

110: housing 111: sensor cover part
112: Exposure hole 113: Cover
114: cover member 115: opening
120: TM sensor module 121: TM sensor
122: Through hole 130: Chopper unit
131: Slit 140: First motor
142: first motor bracket 150: second motor
151: motor shaft 152: second motor bracket
160: first rotational force transmitting portion 161: first reduction gear
161a: rotating shaft 162: first driving gear
163: first driven gear 170: second rotational force transmitting portion
171: Second reduction gear 171a: Rotary shaft
172: second drive gear 173: second driven gear
180: first sensing unit 181, 182: pin
183: first sensor dog 183a:
184: first sensor 184a: sensor body
184b: light emitting element 184c: light receiving element
185: sensor bracket 190: second sensing unit
191: pin 192: second sensor dog
193: second sensor 200: ferrosil
201: first axis 202: second axis
203: ferrosilator 210: refrigerant circulation part
211: supply port 212: exhaust port
230: Bellows pipe lock 240: Bellows pipe
241: air cooling pipe 250: flange
260: detachable coupling portion 261:
262: insertion protrusion 263: insertion groove
264: fitting member 265: spring
266: Ball 267: Ball Flange
300: vacuum chamber

Claims (8)

A housing provided with a sensor cover portion in which an exposure hole is formed;
And a plurality of TM sensors are installed along the circumference of the rotation center, the TM sensors being fixed to a first shaft rotatably installed inside the housing and disposed inside the sensor cover, A TM sensor module in which one of the TM sensor modules is exposed through the exposure hole;
A first motor installed inside the housing to rotate the first shaft; And
And a first sensing unit provided inside the housing to sense the position of the TM sensor,
Wherein the first sensing unit comprises:
Wherein the plurality of pins are arranged so as to rotate together with the first axis, and the plurality of pins are arranged along the edge, and one of the pins has a width different from that of the remaining pins, A first sensor dog for recognizing one TM sensor; And
And a first sensor installed to sense a pin of the first sensor dog and output a sensing signal. The method of claim 1,
And the TM sensor is capable of position control in which one of the pins is formed to have a width larger than the width of the remaining pin. 3. The method according to claim 1 or 2,
And a TM sensor capable of being positionally controlled such that the pin corresponds to each of the TM sensors and the one of the pins corresponds to the TM sensor used first among the TM sensors. [2] The apparatus according to claim 1, further comprising: a TM sensor fixed to a second shaft rotatably installed inside the first shaft so as to face the sensor cover part from the outside of the housing, A chopper unit in which a plurality of slits are formed along the periphery of the rotation center for exposure;
A second motor installed inside the housing for rotating the second shaft, respectively; And
And a second sensing unit provided in the housing to sense the rotational speed of the chopper unit. The apparatus of claim 4, wherein the second sensing unit comprises:
A second sensor dog installed to rotate together with the second shaft and provided with a pin protruding from one side thereof; And
And a second sensor installed to sense a pin of the second sensor dog and output a sensing signal. 5. The apparatus of claim 4, wherein the first and second shafts are dual-pivotally mounted on the inside and further include a ferrule disposed inside the housing to prevent vacuum from escaping through the first and second shafts A measuring device comprising a TM sensor capable of position control. [7] The refrigerator according to claim 6, further comprising: a refrigerant circulation unit installed on an outer circumferential surface of the ferrocomer and circulating and supplying the refrigerant; And
And an air cooling pipe for forcibly discharging the inside air by forcedly blowing in the air inside the housing. The RFID tag according to claim 1, further comprising a detachable coupling portion for detachably coupling the first shaft and the TM sensor module,
Wherein the detachable-
A fitting protrusion protruding from any one of the TM sensor module and the first shaft and having a latching groove formed on both sides thereof;
A fitting member formed with a fitting groove such that the fitting protrusion is fitted along the longitudinal direction of the first shaft and fixed to the other one of the TM sensor module and the first shaft; And
And a ball flange provided on both sides of the fitting groove so as to be opposed to each other and to be engaged with the engaging groove by a ball elastically supported by a spring.
KR1020130012078A 2013-02-01 2013-02-01 Measurement system having tm sensor capable of controlling position KR20140099412A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021010966A1 (en) * 2019-07-15 2021-01-21 Applied Materials, Inc. Measurement assembly for measuring a deposition rate, method of measuring a deposition rate, deposition source, and deposition apparatus
KR20210034812A (en) * 2019-09-23 2021-03-31 (주)에스브이엠테크 Deposition material detecting device
KR20230070598A (en) 2021-11-15 2023-05-23 코오롱인더스트리 주식회사 Polymer electrolyte membrane, method for manufacturing the same and membraneelectrode assembly comprising the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021010966A1 (en) * 2019-07-15 2021-01-21 Applied Materials, Inc. Measurement assembly for measuring a deposition rate, method of measuring a deposition rate, deposition source, and deposition apparatus
KR20210034812A (en) * 2019-09-23 2021-03-31 (주)에스브이엠테크 Deposition material detecting device
KR20230070598A (en) 2021-11-15 2023-05-23 코오롱인더스트리 주식회사 Polymer electrolyte membrane, method for manufacturing the same and membraneelectrode assembly comprising the same

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