WO2020135137A1 - Capteur de navigation magnétique et système de navigation magnétique - Google Patents

Capteur de navigation magnétique et système de navigation magnétique Download PDF

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Publication number
WO2020135137A1
WO2020135137A1 PCT/CN2019/125807 CN2019125807W WO2020135137A1 WO 2020135137 A1 WO2020135137 A1 WO 2020135137A1 CN 2019125807 W CN2019125807 W CN 2019125807W WO 2020135137 A1 WO2020135137 A1 WO 2020135137A1
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WO
WIPO (PCT)
Prior art keywords
magnetic
magnetic navigation
tmr sensor
tunnel magnetoresistive
processing system
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PCT/CN2019/125807
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English (en)
Chinese (zh)
Inventor
陈金亮
李东风
钱辰
郭海平
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江苏多维科技有限公司
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Application filed by 江苏多维科技有限公司 filed Critical 江苏多维科技有限公司
Publication of WO2020135137A1 publication Critical patent/WO2020135137A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices

Definitions

  • the invention relates to the field of navigation, in particular to a magnetic navigation sensor and a magnetic navigation system.
  • AGV Automated Guided Vehicle
  • AGV is an unmanned transport vehicle that can travel along a set guidance path. It is generally equipped with electromagnetic or optical automatic guidance devices, and has safety protection and Various transfer functions.
  • fixed path guidance methods include electromagnetic guidance, magnetic tape guidance, optical guidance, etc.
  • free path guidance methods include: laser guidance , Inertial guidance, visual guidance, GPS (Global Positioning System) guidance, etc.
  • magnetic tape guidance is the most widely used, and is generally used in industries such as warehouse logistics, automobile production, flexible manufacturing, and assembly.
  • the AGV system for tape guidance is as follows: the tape under test is pasted on the ground, and the sensor installed on the AGV senses the magnetic field signal of the tape under test and feeds it back to the car's power system to realize the car's automatic guidance function.
  • the conventional AGV magnetic navigation sensor uses a switch-type magnetic sensor or a Hall-type sensor, and the detection accuracy and position resolution are low; and due to the low sensitivity of the conventional magnetic sensor, the flying distance from the magnetic navigation sensor to the measured tape is low, and the detection width It is relatively narrow, and even through on-site debugging, it is prone to interference from the outside field. Therefore, in practical applications, conventional AGV magnetic navigation sensors are subject to more venue constraints.
  • the present invention proposes a magnetic navigation sensor and a magnetic navigation system, which have high precision and high resolution, and can achieve a large flying height and detection width without on-site calibration.
  • an embodiment of the present invention provides a magnetic navigation sensor, including:
  • multiple tunnel magnetoresistive TMR sensor elements are arranged parallel to the width extension direction of the magnetic tape, and the vertical distance between the multiple tunnel magnetoresistive TMR sensor elements and the plane of the tape is equal;
  • a control processing system the input end of the control processing system is electrically connected to the output ends of the multiple tunnel magnetoresistive TMR sensor elements, and the control processing system is used to process the output signals of the multiple tunnel magnetoresistive TMR sensor elements.
  • a plurality of tunnel magnetoresistive TMR sensor elements are arranged at equal intervals in the direction parallel to the width extension of the magnetic tape.
  • control processing system includes a signal conditioning unit, a signal sampling unit, an analog-to-digital conversion unit, and a central processing unit, wherein the signal conditioning unit, signal sampling unit, analog-to-digital conversion unit, and central processing unit are electrically connected in sequence, and the signal conditioning
  • the unit includes a sensitivity calibration circuit, a zero drift calibration circuit, a linearity calibration circuit and a temperature compensation circuit.
  • the central processor unit includes a micro control unit MCU, a digital signal processor DSP or a field programmable gate array FPGA.
  • circuit board also includes a circuit board, a plurality of tunnel magnetoresistive TMR sensor elements and a control processing system are arranged on the circuit board.
  • the output of the control processing system is electrically connected to the bus drive interface
  • the bus drive interface is electrically connected to the cable
  • bus drive interface includes: a controller area network CAN bus interface, an RS485 bus serial communication interface or an RS232 bus serial communication interface.
  • an electromagnetic shielding shell which is sleeved on the outside of the circuit board
  • the material of the electromagnetic shielding shell includes at least one of the following: Permalloy, industrial pure iron, carbon steel, stainless steel, and silicon steel.
  • tunnel magnetoresistive TMR sensor element is a linear magnetoresistive element.
  • an embodiment of the present invention further provides a magnetic navigation system, including: a magnetic tape and the magnetic navigation sensor provided by any embodiment of the present invention.
  • the material of the magnetic tape includes at least one of the following: neodymium iron boron, samarium cobalt, aluminum nickel cobalt, and ferrite.
  • the magnetic navigation sensor includes: multiple tunnel magnetoresistive TMR sensor elements and a control processing system, the multiple tunnel magnetoresistive TMR sensor elements are arranged parallel to the width extension direction of the magnetic tape, and the multiple tunnel magnetoresistive elements The vertical distance between the TMR sensor element and the plane of the magnetic tape is equal; the input of the control processing system is electrically connected to the output of multiple tunnel magnetoresistive TMR sensor elements, and the control processing system is used to output signals from multiple tunnel magnetoresistive TMR sensor elements Be processed.
  • the tunnel magnetoresistive TMR sensor element is one of the most sensitive among the magnetosensitive elements, the tunnel magnetoresistive TMR sensor element can achieve a large sensing distance and can effectively increase the flying height of the magnetic navigation sensor; it consists of multiple tunnel magnetoresistive TMR
  • the tunnel magnetoresistive TMR sensor array composed of sensor elements can realize a large detection width.
  • FIG. 1 is a schematic structural diagram of a magnetic navigation sensor provided by an embodiment of the present invention.
  • FIG. 2 is a schematic diagram of an output characteristic curve of a linear tunnel magnetoresistive TMR sensor element provided by an embodiment of the present invention
  • FIG. 3 is a magnetic field distribution diagram of a magnetic tape at the position of a magnetic navigation sensor provided by an embodiment of the present invention
  • FIG. 4 is a schematic diagram of a navigation scenario provided by an embodiment of the present invention.
  • FIG. 5 is a schematic structural diagram of yet another magnetic navigation system provided by an embodiment of the present invention.
  • FIG. 6 is a schematic structural diagram of a control processing system according to an embodiment of the present invention.
  • FIG. 7 is a schematic structural diagram of a magnetic navigation sensor according to an embodiment of the present invention.
  • FIG. 1 is a schematic structural diagram of a magnetic navigation sensor according to an embodiment of the present invention.
  • the magnetic navigation sensor includes: a plurality of tunnel magnetoresistive TMR sensor elements 201 and a control processing system 400.
  • a plurality of tunnel magnetoresistive TMR sensor elements 201 are arranged parallel to the width extension direction of the magnetic tape, and the vertical distance between the plurality of tunnel magnetoresistive TMR sensor elements 201 and the plane where the tape is located is equal; the input end of the control processing system 400 and the plurality of tunnels The output ends of the magnetoresistive TMR sensor element 201 are electrically connected, and the control processing system 400 is used to process the output signals of the plurality of tunnel magnetoresistive TMR sensor elements 201.
  • the magnetic navigation sensor can be installed in an automatic navigation system and can be installed on a navigation vehicle.
  • Magnetic tape can generate a magnetic field.
  • the strength of the magnetic field generated by the magnetic tape is related to the distance. The farther away from the magnetic tape, the weaker the magnetic field.
  • the tunnel magnetoresistive TMR sensor element can be used to detect the magnetic field generated by the magnetic tape at the location of the tunnel magnetoresistive TMR sensor element, that is, to collect the magnetic field signal of the magnetic tape.
  • the control processing system 400 processes the output signals of the multiple tunnel magnetoresistive TMR sensor elements 201 to obtain the absolute position information of the navigation vehicle according to the output signals of the multiple tunnel magnetoresistive TMR sensor elements 201, and then sends the information to the navigation vehicle to Control the turning and/or moving direction of the navigation vehicle.
  • 2 is a schematic diagram of an output characteristic curve of a tunnel magnetoresistor (TMR) sensor element provided in an embodiment of the present invention.
  • TMR tunnel magnetoresistor
  • the output voltage of the TMR sensor element is linearly related to the external magnetic field; if it exceeds this certain range, the output voltage is not linearly related to the external magnetic field, and the detected magnetic field strength will be inaccurate.
  • the certain range may be that the magnetic field strength is between the lower limit and the upper limit.
  • points 102 and 103 correspond to the lower limit and the upper limit of the magnetic field strength that the TMR sensor element can detect
  • the magnetic field strength corresponding to point 104 is between the lower limit and the upper limit.
  • the sensitivity is the slope of the characteristic curve 101, where the greater the slope, the higher the sensitivity.
  • FIG. 3 is a magnetic field distribution diagram of a magnetic tape at the position of a magnetic navigation sensor provided by an embodiment of the present invention.
  • the abscissa 301 is the position in the width direction of the magnetic strip
  • the ordinate 302 is the magnetic field
  • the black dot 303 in FIG. 3 Represents the magnitude of the magnetic field of the environment in which the TMR sensor element 201 is located at different positions. Among them, the magnetic field directly opposite to the middle position of the magnetic tape 205 is the strongest.
  • 4 is a schematic diagram of a navigation scenario provided by an embodiment of the present invention.
  • the multiple tunnel magnetoresistive TMR sensor elements 201 and the control processing system 400 can be installed on the automatic navigation vehicle 10, and when used, ensure that the multiple tunnel magnetoresistive TMR sensor elements 201 are arranged along the direction X parallel to the width extension of the magnetic tape 205,
  • the width extension direction X is perpendicular to the length extension direction Y, and the vertical distance 204 between the multiple tunnel magnetoresistive TMR sensor elements 201 and the plane where the magnetic tape 205 is located is equal.
  • the TMR sensor element 201 at the intermediate position and the intermediate position of the magnetic tape 205 are directly opposite, and each TMR sensor element
  • the magnetic field signal collected by 201 satisfies the preset condition, for example, the magnetic field signal collected by the TMR sensor element 201 in the middle position is the largest, and the magnetic field signals collected by the TMR sensor elements 201 on both sides gradually decrease; when the direction of the automatic navigation vehicle 10 When traveling slightly away from the preset path, the middle position of the TMR sensor element 201 and the middle position of the magnetic tape 205 are not directly opposed, and the magnetic field signal collected by each TMR sensor element 201 does not meet the preset condition, that is, the TMR of the non-intermediate position
  • the magnetic field signal collected by the sensor element 201 is the largest, and according to the position of the TMR sensor element 201 with the largest magnetic field signal, the degree of deviation of the navigation vehicle's forward direction is
  • the magnetic navigation sensor proposed by the present invention has a TMR sensor array composed of multiple TMR sensor elements 201 in the entire magnetic navigation sensor.
  • the TMR sensor element of the present invention selects a linear magnetoresistive element, that is, the output voltage of the TMR sensor element and the external magnetic field Into a linear relationship.
  • the material of the magnetic tape to be tested includes, but is not limited to, permanent magnet materials such as neodymium iron boron, samarium cobalt, aluminum nickel cobalt, ferrite, etc., which may be flexible rubber magnets, rigid sintered magnets, or rigid Bonded magnets, or rigid injection magnets. It should be noted that the materials of the above magnetic tapes are all materials used in the prior art.
  • the magnetic navigation sensor includes: multiple tunnel magnetoresistive TMR sensor elements and a control processing system, the multiple tunnel magnetoresistive TMR sensor elements are arranged parallel to the width extension direction of the magnetic tape, and the multiple tunnel magnetoresistive TMR The vertical distance between the sensor element and the plane of the magnetic tape is equal; the input end of the control processing system is electrically connected to the output ends of the multiple tunnel magnetoresistive TMR sensor elements, and the control processing system is used to perform the output signal of the multiple tunnel magnetoresistive TMR sensor elements deal with.
  • the tunnel magnetoresistive TMR sensor element is one of the most sensitive among the magnetosensitive elements, the tunnel magnetoresistive TMR sensor element can achieve a large sensing distance and can effectively increase the flying height of the magnetic navigation sensor; it consists of multiple tunnel magnetoresistive TMR
  • the tunnel magnetoresistive TMR sensor array composed of sensor elements can realize a large detection width.
  • FIG. 5 is a schematic structural diagram of yet another magnetic navigation sensor provided by an embodiment of the present invention. Based on the above embodiment, the magnetic navigation sensor further includes a circuit board 201, a plurality of tunnel magnetoresistive TMR sensor elements 201 and a control processing system (not shown) are provided on the circuit board 201.
  • the TMR sensor elements 201 are arranged at equal intervals, and the interval between each pair is the arrow 203 in the figure, and all TMR sensor elements 201 are arranged on the circuit board 202.
  • a plurality of tunnel magnetoresistive TMR sensor elements 201 are arranged at equal intervals in the direction parallel to the width extension of the magnetic tape 205.
  • the circuit board 202 in addition to the TMR sensor array, there is a bus drive interface and a control processing system.
  • the circuit board 202 is vertically arranged above the magnetic tape under test 205 and placed vertically with the magnetic tape under test 205, directly under the TMR sensor element 201 It has a magnetic tape 205 under test, and the distance from the TMR sensor element 201 is the vertical distance 204 in FIG. 5 and the tape width 206.
  • the TMR sensor array is connected to the control processing system, and the TMR sensor array collects the magnetic field signal of the measured magnetic tape and transmits it to the input end of the control processing system.
  • the magnetic field signal collected by the TMR sensor array and the vertical distance between the TMR sensor array and the measured magnetic tape form a There is a corresponding relationship, in which, if the vertical distance between the TMR sensor array and the measured magnetic tape is larger, the magnetic field signal collected by each TMR sensor element is smaller.
  • the magnetic navigation sensor moves along the length direction of the magnetic tape to be measured, and the width covered by the TMR sensor element is the detection width 207 of the magnetic navigation sensor.
  • the magnetic navigation sensor can be installed in the automatic navigation car system, and the circuit board can be installed on the automatic navigation car.
  • the circuit board When the automatic navigation car moves along the preset path, that is, along the direction of the extension of the length of the tape, the circuit board
  • the middle position of the TMR sensor element 201 is directly opposite to the middle position of the measured magnetic tape 205.
  • the magnetic field signal collected by each TMR sensor element 201 meets the preset condition. For example, the magnetic field signal collected by the middle position TMR sensor element 201 may be the largest.
  • the magnetic field signals collected by the TMR sensor elements 201 on both sides are gradually reduced; when the traveling direction of the autopilot slightly deviates from the preset path, the TMR sensor element 201 in the middle position on the circuit board and the measured tape
  • the middle position of 205 is not right, the magnetic field signal collected by each TMR sensor element 201 does not meet the preset condition, that is, the magnetic field signal collected by the TMR sensor element 201 at the non-intermediate position is the largest, and then according to the TMR sensor element 201 with the largest magnetic field signal Position, determine the degree of deviation of the navigation vehicle's forward direction, and then control the direction of rotation of the navigation vehicle to return to the preset path.
  • the output signal of the TMR sensor element array is used in combination with the distribution characteristics of the magnetic field to realize the detection of the absolute position.
  • FIG. 6 is a schematic structural diagram of a control processing system according to an embodiment of the present invention.
  • the control processing system includes a signal conditioning unit 402, a signal sampling unit 403, an analog-to-digital (A/D) conversion unit 404, and a central processing unit.
  • MCU microcontroller Unit
  • FPGA Field-Programmable Gate Array
  • DSP Digital Signal Processing
  • the magnetic navigation sensor further includes a bus drive interface 406 and a cable
  • the output of the control processing system is electrically connected to the bus drive interface
  • the bus drive interface 406 is electrically connected to the cable
  • the bus drive interface 406 is used to control the processing system
  • the calculated position information is output through the cable.
  • the bus drive interface 406 uses but is not limited to a controller area network (Controller Area Network, CAN) bus interface, an RS485 bus serial communication interface, or an RS232 bus serial communication interface.
  • the output end of the TMR sensor element 201 is electrically connected to the signal conditioning unit 402.
  • the signal conditioning unit 402 includes a sensitivity calibration circuit, a zero drift calibration circuit, a linearity calibration circuit, and a temperature compensation circuit, which increases the positioning accuracy and higher resolution of the magnetic navigation sensor, ensuring that each TMR sensor element has the same
  • it mainly includes linearity error, sensitivity error, zero drift error, and temperature characteristic discrete error.
  • the magnetic navigation sensor proposed by the present invention has an internal integrated compensation unit, which will compensate the above deviation of the TMR sensor element, thereby achieving the goals of high precision and high resolution.
  • each calibration circuit is an existing technology in the art, and a person skilled in the art can design a circuit according to needs.
  • FIG. 7 is a schematic structural diagram of a magnetic navigation sensor according to an embodiment of the present invention.
  • the magnetic navigation sensor further includes an electromagnetic shielding shell 502, and the electromagnetic shielding shell 502 is sleeved on the circuit. The outside of the board.
  • the present invention also has an electromagnetic shielding shell.
  • 501 is an electromagnetic shielding shell
  • 502 is a cable.
  • the material of the electromagnetic shielding shell is a metal or alloy with high magnetic permeability, such as permalloy, industrial pure iron, carbon steel, stainless steel, silicon steel. It should be noted that the materials of the electromagnetic shielding shell are all materials used in the prior art.
  • An embodiment of the present invention provides a magnetic navigation system.
  • the magnetic navigation system 20 includes: a magnetic tape 205 and a magnetic navigation sensor provided by any embodiment of the present invention.
  • the tunnel magnetoresistive TMR sensor element 201 is opposed to the magnetic tape 205 in a direction perpendicular to the surface of the magnetic tape 205.
  • the width occupied by the arrangement of TMR sensor elements 201 may be greater than the tape width 206.
  • the magnetic navigation system provided by the embodiment of the present invention includes the magnetic navigation sensor in the above embodiment. Therefore, the magnetic navigation system provided by the embodiment of the present invention also has the beneficial effects described in the above embodiment, which will not be repeated here.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

L'invention concerne un capteur de navigation magnétique et un système de navigation magnétique. Le capteur de navigation magnétique comprend une pluralité d'éléments capteurs à magnétorésistance tunnel (TMR) (201) et un système de traitement de commande (400) ; la pluralité d'éléments capteurs à TMR (201) étant agencés le long de la direction d'extension en largeur d'une bande magnétique à des distances verticales égales par rapport au plan où la bande magnétique est située ; une borne d'entrée du système de traitement de commande (400) est électriquement connectée à des bornes de sortie de la pluralité d'éléments capteurs à TMR (201), et le système de traitement de commande (400) est utilisé pour traiter des signaux de sortie de la pluralité d'éléments capteurs à TMR (201). Le système décrit possède une plus grande largeur de détection, une hauteur de vol plus élevée, et une précision de position absolue et un taux de résolution de position extrêmement élevés, et est très approprié pour une application industrielle.
PCT/CN2019/125807 2018-12-29 2019-12-17 Capteur de navigation magnétique et système de navigation magnétique WO2020135137A1 (fr)

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CN201822255912.XU CN209102094U (zh) 2018-12-29 2018-12-29 一种磁导航传感器及磁导航系统
CN201822255912.X 2018-12-29

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Publication number Priority date Publication date Assignee Title
CN209102094U (zh) * 2018-12-29 2019-07-12 江苏多维科技有限公司 一种磁导航传感器及磁导航系统
CN116413332B (zh) * 2023-06-12 2023-09-08 中国石油大学(华东) 水下结构裂纹柔性阵列监测探头

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09126780A (ja) * 1995-10-31 1997-05-16 Tokin Corp 磁気方位センサ
CN101387522A (zh) * 2008-09-02 2009-03-18 吉林大学 磁导引传感器
CN203298777U (zh) * 2013-05-30 2013-11-20 成都四威高科技产业园有限公司 一种适合agv的磁导航传感器阵列
CN107091998A (zh) * 2016-02-18 2017-08-25 苏州青飞智能科技有限公司 一种用于磁导航无人车的磁传感器
CN207456461U (zh) * 2017-07-12 2018-06-05 深圳市汉伟智能技术有限公司 一种智能agv磁导航传感器
CN207763722U (zh) * 2017-11-07 2018-08-24 云南昆船智能装备有限公司 一种可自由阵列组合的新型磁导航定位传感器
CN209102094U (zh) * 2018-12-29 2019-07-12 江苏多维科技有限公司 一种磁导航传感器及磁导航系统

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09126780A (ja) * 1995-10-31 1997-05-16 Tokin Corp 磁気方位センサ
CN101387522A (zh) * 2008-09-02 2009-03-18 吉林大学 磁导引传感器
CN203298777U (zh) * 2013-05-30 2013-11-20 成都四威高科技产业园有限公司 一种适合agv的磁导航传感器阵列
CN107091998A (zh) * 2016-02-18 2017-08-25 苏州青飞智能科技有限公司 一种用于磁导航无人车的磁传感器
CN207456461U (zh) * 2017-07-12 2018-06-05 深圳市汉伟智能技术有限公司 一种智能agv磁导航传感器
CN207763722U (zh) * 2017-11-07 2018-08-24 云南昆船智能装备有限公司 一种可自由阵列组合的新型磁导航定位传感器
CN209102094U (zh) * 2018-12-29 2019-07-12 江苏多维科技有限公司 一种磁导航传感器及磁导航系统

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