WO2020133837A1 - Measurement coordinate correction method and system - Google Patents

Measurement coordinate correction method and system Download PDF

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Publication number
WO2020133837A1
WO2020133837A1 PCT/CN2019/083870 CN2019083870W WO2020133837A1 WO 2020133837 A1 WO2020133837 A1 WO 2020133837A1 CN 2019083870 W CN2019083870 W CN 2019083870W WO 2020133837 A1 WO2020133837 A1 WO 2020133837A1
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measurement
geometric center
physical
optical lens
coordinates
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PCT/CN2019/083870
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French (fr)
Chinese (zh)
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方杰
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深圳市华星光电半导体显示技术有限公司
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Publication of WO2020133837A1 publication Critical patent/WO2020133837A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates

Definitions

  • the invention relates to the field of image measurement, in particular to a method and system for measuring coordinate correction.
  • the probe measurement system or contact measurement system
  • optical coupling Lens Charge Coupled Device (CCD) acquires the image of the object to be measured and performs measurement
  • CCD Charge Coupled Device
  • the probe measuring system does not have an observation lens, when using the probe for resistivity measurement, the coordinates of the work file are directly used as the measuring coordinates, and then the probe is moved to the position of the measuring coordinates for detection.
  • the measurement coordinates and actual coordinates of the job file are often slightly different, which may easily lead to inaccurate measurement points and lead to the probe not being able to be accurately pinned to the designated test area. Inaccuracy can also lead to chip package failure and chip damage.
  • the present invention provides a method and system for measuring coordinate correction to solve the technical problem of inaccurate measurement results due to the inability to confirm the actual coordinates of the target to be measured during physical measurement.
  • the present invention provides a method for measuring coordinate correction, wherein the method includes:
  • the measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes a physical measurement module.
  • the method for correcting the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module includes:
  • the method for determining whether the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module is:
  • the calculation method is:
  • ⁇ 0, it means that the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module, otherwise it does not coincide.
  • the physical measurement module is a probe measurement module.
  • the present invention provides a method for measuring coordinate correction, wherein the method includes:
  • the method for correcting the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module includes:
  • the method for determining whether the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module is:
  • the calculation method is:
  • ⁇ 0, it means that the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module, otherwise it does not coincide.
  • the measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes a physical measurement module.
  • the physical measurement module is a probe measurement module.
  • the present invention also provides a measurement coordinate correction system, wherein the system includes:
  • a first data acquisition unit configured to acquire the measurement range of the test area corresponding to the physical measurement module of the measurement system and the coordinates of the geometric center of the measurement range;
  • a correction unit configured to correct the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module, so that the measurement range of the optical lens is consistent with the measurement range of the physical measurement module;
  • a second data acquisition unit configured to acquire the coordinates of the geometric center of the object to be measured using the corrected optical lens
  • a comparison unit configured to compare the coordinates of the measurement object with the measurement range of the physical measurement module
  • An adjustment unit configured to adjust the position of the measurement object when at least part of the coordinates of the measurement object are outside the measurement range of the physical measurement module, and then perform comparison again;
  • the execution unit is configured to perform physical measurement when the coordinates of the measurement object are in the measurement range of the physical measurement module.
  • the correction unit corrects the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module, including:
  • the correction unit determines whether the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module as follows:
  • the calculation method is:
  • ⁇ 0, it means that the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module, otherwise it does not coincide.
  • the measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes a physical measurement module.
  • the physical measurement module is a probe measurement module.
  • the measurement correction method and system of the present invention can correct the position of the target to be measured during the physical measurement by the capacitive coupling lens of the optical measurement unit before the measurement, which solves the problem that the position of the measurement target cannot be treated in the prior art because the physical measurement unit does not have a lens
  • the problem of adjustment effectively improves the accuracy of the measurement results of the physical measurement unit, while avoiding damage to the chip to be measured.
  • FIG. 1 is a flowchart of a measurement correction method in an embodiment of the invention
  • FIG. 2 is a schematic structural diagram of a measurement correction system in an embodiment of the present invention.
  • the present invention provides a method and system for measuring coordinate correction to solve the technical problem of inaccurate measurement results due to the inability to confirm the actual coordinates of the target to be measured during physical measurement. Specifically, referring to FIG. 1, the method includes the following steps:
  • step S110 the measurement range of the test area corresponding to the physical measurement module of the measurement system and the coordinates of the geometric center of the measurement range are acquired.
  • the measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes a physical measurement module.
  • the physical measurement module is a probe measurement module
  • the optical lens is a capacitive coupling lens.
  • the measurement range of the test area corresponding to the physical measurement module and the coordinates of the geometric center of the measurement range are preset and stored in the system, which can be obtained by retrieving data.
  • step S120 the optical lens of the measurement system is corrected according to the acquired geometric center coordinates of the measurement range of the physical measurement module, so that the measurement range of the optical lens is consistent with the measurement range of the physical measurement module .
  • the method for correcting the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module includes:
  • the method for determining whether the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module is:
  • the calculation method is:
  • ⁇ 0, it means that the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module, otherwise it does not coincide.
  • step S130 the corrected optical lens is used to acquire the coordinates of the geometric center of the object to be measured. That is, a real-time image of the object to be measured is acquired through the corrected optical lens, and the coordinate range of the area and the geometric center coordinate corresponding to the area are calculated according to the acquired image.
  • step S140 the coordinates of the measurement object are compared with the measurement range of the physical measurement module. Specifically, during comparison, the edge coordinates of the area of the object to be measured are compared with the measurement range of the physical measurement module to determine whether the object to be measured is all within the measurement range of the physical measurement module, and according to Judgment results for subsequent operations.
  • step S150 when at least part of the coordinates of the measurement object are outside the measurement range of the physical measurement module, the position of the measurement object is adjusted, and then the comparison is performed again.
  • step S160 when the coordinates of the measurement object are in the measurement range of the physical measurement module, physical measurement is performed.
  • the measurement correction method and system of the present invention can correct the position of the target to be measured during the physical measurement by the capacitive coupling lens of the optical measurement unit before the measurement, which solves the problem that the position of the measurement target cannot be treated in the prior art because the physical measurement unit does not have a lens
  • the problem of adjustment effectively improves the accuracy of the measurement results of the physical measurement unit, while avoiding damage to the chip to be measured.
  • the present invention also provides a measurement coordinate correction system, which includes: a first data acquisition unit, a correction unit, a second data acquisition unit, a comparison unit, an adjustment unit, and an execution unit.
  • the first data acquisition unit is used to acquire the measurement range of the test area corresponding to the physical measurement module of the measurement system and the coordinates of the geometric center of the measurement range.
  • the measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes a physical measurement module.
  • the physical measurement module is a probe measurement module
  • the optical lens is a capacitive coupling lens.
  • the measurement range of the test area corresponding to the physical measurement module and the coordinates of the geometric center of the measurement range are preset and stored in the system, which can be obtained by retrieving data.
  • the correction unit is used to correct the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module, so that the measurement range of the optical lens is consistent with the measurement range of the physical measurement module.
  • the correction unit corrects the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module, including:
  • the correction unit determines whether the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module as follows:
  • the calculation method is:
  • ⁇ 0, it means that the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module, otherwise it does not coincide.
  • the second data acquisition unit is used to acquire the coordinates of the geometric center of the object to be measured using the corrected optical lens. That is, a real-time image of the object to be measured is acquired through the corrected optical lens, and the coordinate range of the area and the geometric center coordinate corresponding to the area are calculated according to the acquired image.
  • the comparison unit is used to compare the coordinates of the measurement object with the measurement range of the physical measurement module. Specifically, during comparison, the edge coordinates of the area of the object to be measured are compared with the measurement range of the physical measurement module to determine whether the object to be measured is all within the measurement range of the physical measurement module, and according to Judgment results for subsequent operations.
  • the adjustment unit is configured to adjust the position of the measurement object and perform comparison again when at least part of the coordinates of the measurement object is outside the measurement range of the physical measurement module.
  • the execution unit is configured to perform physical measurement when the coordinates of the measurement object are in the measurement range of the physical measurement module.
  • the measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes a physical measurement module.
  • the physical measurement module is a probe measurement module.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

A measurement coordinate correction method and system, the method comprising: acquiring a measurement range of a test area and the coordinates of the geometric center of the measurement range (S110); correcting an optical lens according to the acquired coordinates of the geometric center (S120); acquiring, by means of the corrected optical lens, the coordinates of the geometric center of an object to be measured (S130); comparing the coordinates of the object to be measured with the measurement range of a physical measurement module (S140); and when the coordinates of the object to be measured are within the measurement range of the physical measurement module, executing physical measurement (S160).

Description

测量坐标校正方法和系统Measuring coordinate correction method and system 技术领域Technical field
本发明涉及影像测量领域，尤其涉及一种测量坐标校正方法和系统。The invention relates to the field of image measurement, in particular to a method and system for measuring coordinate correction.
背景技术Background technique
目前对待测物体的量测主要有两种方式，一种是利用探针直接接触待测物体进行量测(称为探针量测系统或接触式量测系统)，另外一种是利用光学耦合镜头（Charge Coupled Device, CCD）获取待测物体的影像进行量测(称为影像量测系统或非接触式量测系统)，现有的测量设备上通常同时配备有探针测量系统和影像测量系统。At present, there are two main ways to measure the object to be measured, one is to use the probe to directly measure the object to be measured (called the probe measurement system or contact measurement system), and the other is to use optical coupling Lens (Charge Coupled Device (CCD) acquires the image of the object to be measured and performs measurement (called an image measurement system or a non-contact measurement system). Existing measurement equipment is usually equipped with both a probe measurement system and an image measurement system.
由于探针测量系统没有设置观察镜头，在利用探针进行电阻率测量时，直接以作业文件坐标作为量测坐标，然后移动探针到量测坐标的位置进行检测。Since the probe measuring system does not have an observation lens, when using the probe for resistivity measurement, the coordinates of the work file are directly used as the measuring coordinates, and then the probe is moved to the position of the measuring coordinates for detection.
技术问题technical problem
作业文件的量测坐标和实际坐标往往略有差异，容易导致量测点位置不准确，导致探针无法准确扎到指定的测试区域，如果扎到测量区域外的封装区，不仅会使测量结果不准确，还会导致芯片封装失效，造成芯片损毁。The measurement coordinates and actual coordinates of the job file are often slightly different, which may easily lead to inaccurate measurement points and lead to the probe not being able to be accurately pinned to the designated test area. Inaccuracy can also lead to chip package failure and chip damage.
技术解决方案Technical solution
本发明提供一种测量坐标校正的方法和系统，以解决物理测量时由于无法确认待测量目标的实际坐标而导致测量结果不准确的技术问题。The present invention provides a method and system for measuring coordinate correction to solve the technical problem of inaccurate measurement results due to the inability to confirm the actual coordinates of the target to be measured during physical measurement.
为解决上述问题，本发明提供了一种测量坐标校正方法，其中，所述方法包括：To solve the above problems, the present invention provides a method for measuring coordinate correction, wherein the method includes:
获取测量系统的物理测量模块对应的测试区域的测量范围和所述测量范围几何中心的坐标；Obtain the measurement range of the test area corresponding to the physical measurement module of the measurement system and the coordinates of the geometric center of the measurement range;
根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正，使所述光学镜头的测量范围与所述物理测量模块的测量范围保持一致；Correct the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module, so that the measurement range of the optical lens is consistent with the measurement range of the physical measurement module;
采用校正后的光学镜头获取待测量对象的几何中心的坐标；Use the corrected optical lens to obtain the coordinates of the geometric center of the object to be measured;
将所述测量对象的坐标与所述物理测量模块的测量范围进行比较；Compare the coordinates of the measurement object with the measurement range of the physical measurement module;
当所述测量对象的至少部分坐标处于所述物理测量模块的测量范围之外时，调整所述测量对象的位置，再重新进行比较；When at least part of the coordinates of the measurement object is outside the measurement range of the physical measurement module, adjust the position of the measurement object, and then compare again;
当所述测量对象的坐标处于所述物理测量模块的测量范围中时，执行物理测量；When the coordinates of the measurement object are in the measurement range of the physical measurement module, physical measurement is performed;
所述测量系统同时具有影像式测量单元和接触式测量单元，其中所述影像式测量单元包括光学镜头，所述接触式测量单元包括物理测量模块。The measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes a physical measurement module.
根据本发明的一个具体实施例，其中，所述根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正的方法包括：According to a specific embodiment of the present invention, the method for correcting the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module includes:
将所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标进行对比，看二者是否重合；如不重合，则调整所述光学镜头的位置，直至所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合。Compare the geometric center coordinates of the optical lens with the geometric center coordinates of the measurement range of the physical measurement module to see if they coincide; if they do not coincide, adjust the position of the optical lens until the optical lens The geometric center coordinates coincide with the geometric center coordinates of the measurement range of the physical measurement module.
根据本发明的一个具体实施例，其中，判断所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标是否重合的方法为：According to a specific embodiment of the present invention, the method for determining whether the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module is:
获取所述物理测量模块的测量范围的几何中心坐标（x 0, y 0）； Acquiring the geometric center coordinates (x 0 , y 0 ) of the measurement range of the physical measurement module;
获取所述光学镜头的几何中心坐标（x 1, y 1）； Obtain the geometric center coordinates (x 1 , y 1 ) of the optical lens;
计算所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标之间的距离Δ，计算方法为：Calculate the distance Δ between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, the calculation method is:
Δ=（x 1-x 0） 2+(y 1-y 0) 2； Δ=(x 1 -x 0 ) 2 +(y 1 -y 0 ) 2 ;
若Δ为0，则说明所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合，否则不重合。If Δ is 0, it means that the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module, otherwise it does not coincide.
根据本发明的一个具体实施例，其中，所述物理测量模块为探针测量模块。According to a specific embodiment of the present invention, wherein the physical measurement module is a probe measurement module.
为解决上述问题，本发明提供了一种测量坐标校正方法，其中，所述方法包括：To solve the above problems, the present invention provides a method for measuring coordinate correction, wherein the method includes:
获取测量系统的物理测量模块对应的测试区域的测量范围和所述测量范围几何中心的坐标；Obtain the measurement range of the test area corresponding to the physical measurement module of the measurement system and the coordinates of the geometric center of the measurement range;
根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正，使所述光学镜头的测量范围与所述物理测量模块的测量范围保持一致；Correct the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module, so that the measurement range of the optical lens is consistent with the measurement range of the physical measurement module;
采用校正后的光学镜头获取待测量对象的几何中心的坐标；Use the corrected optical lens to obtain the coordinates of the geometric center of the object to be measured;
将所述测量对象的坐标与所述物理测量模块的测量范围进行比较；Compare the coordinates of the measurement object with the measurement range of the physical measurement module;
当所述测量对象的至少部分坐标处于所述物理测量模块的测量范围之外时，调整所述测量对象的位置，再重新进行比较；When at least part of the coordinates of the measurement object is outside the measurement range of the physical measurement module, adjust the position of the measurement object, and then compare again;
当所述测量对象的坐标处于所述物理测量模块的测量范围中时，执行物理测量。When the coordinates of the measurement object are in the measurement range of the physical measurement module, physical measurement is performed.
根据本发明的一个具体实施例，其中，所述根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正的方法包括：According to a specific embodiment of the present invention, the method for correcting the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module includes:
将所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标进行对比，看二者是否重合；如不重合，则调整所述光学镜头的位置，直至所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合。Compare the geometric center coordinates of the optical lens with the geometric center coordinates of the measurement range of the physical measurement module to see if they coincide; if they do not coincide, adjust the position of the optical lens until the optical lens The geometric center coordinates coincide with the geometric center coordinates of the measurement range of the physical measurement module.
根据本发明的一个具体实施例，其中，判断所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标是否重合的方法为：According to a specific embodiment of the present invention, the method for determining whether the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module is:
获取所述物理测量模块的测量范围的几何中心坐标（x 0, y 0）； Acquiring the geometric center coordinates (x 0 , y 0 ) of the measurement range of the physical measurement module;
获取所述光学镜头的几何中心坐标（x 1, y 1）； Obtain the geometric center coordinates (x 1 , y 1 ) of the optical lens;
计算所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标之间的距离Δ，计算方法为：Calculate the distance Δ between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, the calculation method is:
Δ=（x 1-x 0） 2+(y 1-y 0) 2； Δ=(x 1 -x 0 ) 2 +(y 1 -y 0 ) 2 ;
若Δ为0，则说明所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合，否则不重合。If Δ is 0, it means that the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module, otherwise it does not coincide.
根据本发明的一个具体实施例，其中，所述测量系统同时具有影像式测量单元和接触式测量单元，其中所述影像式测量单元包括光学镜头，所述接触式测量单元包括物理测量模块。According to a specific embodiment of the present invention, wherein the measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes a physical measurement module.
根据本发明的一个具体实施例，其中，所述物理测量模块为探针测量模块。According to a specific embodiment of the present invention, wherein the physical measurement module is a probe measurement module.
相应的，本发明还提供了一种测量坐标校正系统，其中，所述系统包括：Correspondingly, the present invention also provides a measurement coordinate correction system, wherein the system includes:
第一数据获取单元，用于获取测量系统的物理测量模块对应的测试区域的测量范围和所述测量范围几何中心的坐标；A first data acquisition unit, configured to acquire the measurement range of the test area corresponding to the physical measurement module of the measurement system and the coordinates of the geometric center of the measurement range;
校正单元，用于根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正，使所述光学镜头的测量范围与所述物理测量模块的测量范围保持一致；A correction unit, configured to correct the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module, so that the measurement range of the optical lens is consistent with the measurement range of the physical measurement module;
第二数据获取单元，用于采用校正后的光学镜头获取待测量对象的几何中心的坐标；A second data acquisition unit, configured to acquire the coordinates of the geometric center of the object to be measured using the corrected optical lens;
比较单元，用于将所述测量对象的坐标与所述物理测量模块的测量范围进行比较；A comparison unit, configured to compare the coordinates of the measurement object with the measurement range of the physical measurement module;
调整单元，用于当所述测量对象的至少部分坐标处于所述物理测量模块的测量范围之外时，调整所述测量对象的位置，再重新进行比较；An adjustment unit, configured to adjust the position of the measurement object when at least part of the coordinates of the measurement object are outside the measurement range of the physical measurement module, and then perform comparison again;
执行单元，用于当所述测量对象的坐标处于所述物理测量模块的测量范围中时，执行物理测量。The execution unit is configured to perform physical measurement when the coordinates of the measurement object are in the measurement range of the physical measurement module.
根据本发明的一个具体实施例，其中，所述校正单元根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正的方法包括：According to a specific embodiment of the present invention, wherein the correction unit corrects the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module, including:
将所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标进行对比，看二者是否重合；如不重合，则调整所述光学镜头的位置，直至所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合。Compare the geometric center coordinates of the optical lens with the geometric center coordinates of the measurement range of the physical measurement module to see if they coincide; if they do not coincide, adjust the position of the optical lens until the optical lens The geometric center coordinates coincide with the geometric center coordinates of the measurement range of the physical measurement module.
根据本发明的一个具体实施例，其中，所述校正单元判断所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标是否重合的方法为：According to a specific embodiment of the present invention, wherein the correction unit determines whether the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module as follows:
获取所述物理测量模块的测量范围的几何中心坐标（x 0, y 0）； Acquiring the geometric center coordinates (x 0 , y 0 ) of the measurement range of the physical measurement module;
获取所述光学镜头的几何中心坐标（x 1, y 1）； Obtain the geometric center coordinates (x 1 , y 1 ) of the optical lens;
计算所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标之间的距离Δ，计算方法为：Calculate the distance Δ between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, the calculation method is:
Δ=（x 1-x 0） 2+(y 1-y 0) 2； Δ=(x 1 -x 0 ) 2 +(y 1 -y 0 ) 2 ;
若Δ为0，则说明所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合，否则不重合。If Δ is 0, it means that the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module, otherwise it does not coincide.
根据本发明的一个具体实施例，其中，所述测量系统同时具有影像式测量单元和接触式测量单元，其中所述影像式测量单元包括光学镜头，所述接触式测量单元包括物理测量模块。According to a specific embodiment of the present invention, wherein the measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes a physical measurement module.
根据本发明的一个具体实施例，其中，所述物理测量模块为探针测量模块。According to a specific embodiment of the present invention, wherein the physical measurement module is a probe measurement module.
有益效果Beneficial effect
本发明的测量校正方法和系统能够在测量之前通过光学测量单元的电容耦合镜头校正物理测量时待测量目标的位置，解决了现有技术中由于物理测量单元未设置镜头而无法对待测量目标的位置进行调整的问题，有效提高了物理测量单元的测量结果的准确率，同时避免损坏待测量芯片。The measurement correction method and system of the present invention can correct the position of the target to be measured during the physical measurement by the capacitive coupling lens of the optical measurement unit before the measurement, which solves the problem that the position of the measurement target cannot be treated in the prior art because the physical measurement unit does not have a lens The problem of adjustment effectively improves the accuracy of the measurement results of the physical measurement unit, while avoiding damage to the chip to be measured.
附图说明BRIEF DESCRIPTION
图1为本发明的一个实施例中的测量校正方法的流程图；FIG. 1 is a flowchart of a measurement correction method in an embodiment of the invention;
图2为本发明的一个实施例中的测量校正系统的结构示意图。2 is a schematic structural diagram of a measurement correction system in an embodiment of the present invention.
本发明的实施方式Embodiments of the invention
以下各实施例的说明是参考附加的图示，用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语，例如[上]、[下]、[前]、[后]、[左]、[右]、[内]、[外]、[侧面]等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。在图中，结构相似的单元是用以相同标号表示。The descriptions of the following embodiments refer to additional drawings to illustrate specific embodiments that can be implemented by the present invention. Directional terms mentioned in the present invention, such as [upper], [lower], [front], [back], [left], [right], [inner], [outer], [side], etc., are for reference only Attach the direction of the schema. Therefore, the directional terminology is used to illustrate and understand the present invention, not to limit the present invention. In the figure, units with similar structures are indicated by the same reference numerals.
本发明提供一种测量坐标校正的方法和系统，以解决物理测量时由于无法确认待测量目标的实际坐标而导致测量结果不准确的技术问题。具体的，参见图1，该方法包括以下步骤：The present invention provides a method and system for measuring coordinate correction to solve the technical problem of inaccurate measurement results due to the inability to confirm the actual coordinates of the target to be measured during physical measurement. Specifically, referring to FIG. 1, the method includes the following steps:
首先，在步骤S110中，获取测量系统的物理测量模块对应的测试区域的测量范围和所述测量范围几何中心的坐标。First, in step S110, the measurement range of the test area corresponding to the physical measurement module of the measurement system and the coordinates of the geometric center of the measurement range are acquired.
根据本发明的一个具体实施例，其中，所述测量系统同时具有影像式测量单元和接触式测量单元，其中所述影像式测量单元包括光学镜头，所述接触式测量单元包括物理测量模块。具体的，所述物理测量模块为探针测量模块，所述光学镜头为电容耦合镜头。具体的，物理测量模块对应的测试区域的测量范围和所述测量范围几何中心的坐标为预先设置好并存储在系统中的，通过调取数据即可获得。According to a specific embodiment of the present invention, wherein the measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes a physical measurement module. Specifically, the physical measurement module is a probe measurement module, and the optical lens is a capacitive coupling lens. Specifically, the measurement range of the test area corresponding to the physical measurement module and the coordinates of the geometric center of the measurement range are preset and stored in the system, which can be obtained by retrieving data.
其次，在步骤S120中，根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正，使所述光学镜头的测量范围与所述物理测量模块的测量范围保持一致。具体的，所述根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正的方法包括：Secondly, in step S120, the optical lens of the measurement system is corrected according to the acquired geometric center coordinates of the measurement range of the physical measurement module, so that the measurement range of the optical lens is consistent with the measurement range of the physical measurement module . Specifically, the method for correcting the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module includes:
将所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标进行对比，看二者是否重合；如不重合，则调整所述光学镜头的位置，直至所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合。Compare the geometric center coordinates of the optical lens with the geometric center coordinates of the measurement range of the physical measurement module to see if they coincide; if they do not coincide, adjust the position of the optical lens until the optical lens The geometric center coordinates coincide with the geometric center coordinates of the measurement range of the physical measurement module.
根据本发明的一个具体实施例，其中，判断所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标是否重合的方法为：According to a specific embodiment of the present invention, the method for determining whether the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module is:
获取所述物理测量模块的测量范围的几何中心坐标（x 0, y 0）； Acquiring the geometric center coordinates (x 0 , y 0 ) of the measurement range of the physical measurement module;
获取所述光学镜头的几何中心坐标（x 1, y 1）； Obtain the geometric center coordinates (x 1 , y 1 ) of the optical lens;
计算所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标之间的距离Δ，计算方法为：Calculate the distance Δ between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, the calculation method is:
Δ=（x 1-x 0） 2+(y 1-y 0) 2； Δ=(x 1 -x 0 ) 2 +(y 1 -y 0 ) 2 ;
若Δ为0，则说明所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合，否则不重合。If Δ is 0, it means that the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module, otherwise it does not coincide.
之后，在步骤S130中，采用校正后的光学镜头获取待测量对象的几何中心的坐标。即，通过校正后的光学镜头获取待测量对象的实时图像，并根据获取的图像计算出其所述区域的坐标范围和该区域对应的几何中心坐标。After that, in step S130, the corrected optical lens is used to acquire the coordinates of the geometric center of the object to be measured. That is, a real-time image of the object to be measured is acquired through the corrected optical lens, and the coordinate range of the area and the geometric center coordinate corresponding to the area are calculated according to the acquired image.
之后，在步骤S140中，将所述测量对象的坐标与所述物理测量模块的测量范围进行比较。具体的，比较时，将待测量对象的所处区域的边缘坐标与所述物理测量模块的测量范围进行比较，判断所述待测量对象是否全部位于所述物理测量模块的测量范围内，并根据判断结果进行后续操作。Then, in step S140, the coordinates of the measurement object are compared with the measurement range of the physical measurement module. Specifically, during comparison, the edge coordinates of the area of the object to be measured are compared with the measurement range of the physical measurement module to determine whether the object to be measured is all within the measurement range of the physical measurement module, and according to Judgment results for subsequent operations.
具体的，在步骤S150中，当所述测量对象的至少部分坐标处于所述物理测量模块的测量范围之外时，调整所述测量对象的位置，再重新进行比较。Specifically, in step S150, when at least part of the coordinates of the measurement object are outside the measurement range of the physical measurement module, the position of the measurement object is adjusted, and then the comparison is performed again.
最后，在步骤S160中，当所述测量对象的坐标处于所述物理测量模块的测量范围中时，执行物理测量。Finally, in step S160, when the coordinates of the measurement object are in the measurement range of the physical measurement module, physical measurement is performed.
本发明的测量校正方法和系统能够在测量之前通过光学测量单元的电容耦合镜头校正物理测量时待测量目标的位置，解决了现有技术中由于物理测量单元未设置镜头而无法对待测量目标的位置进行调整的问题，有效提高了物理测量单元的测量结果的准确率，同时避免损坏待测量芯片。The measurement correction method and system of the present invention can correct the position of the target to be measured during the physical measurement by the capacitive coupling lens of the optical measurement unit before the measurement, which solves the problem that the position of the measurement target cannot be treated in the prior art because the physical measurement unit does not have a lens The problem of adjustment effectively improves the accuracy of the measurement results of the physical measurement unit, while avoiding damage to the chip to be measured.
相应的，参见图2，本发明还提供了一种测量坐标校正系统，其包括：第一数据获取单元、校正单元、第二数据获取单元、比较单元、调整单元以及执行单元。Correspondingly, referring to FIG. 2, the present invention also provides a measurement coordinate correction system, which includes: a first data acquisition unit, a correction unit, a second data acquisition unit, a comparison unit, an adjustment unit, and an execution unit.
所述第一数据获取单元用于获取测量系统的物理测量模块对应的测试区域的测量范围和所述测量范围几何中心的坐标。The first data acquisition unit is used to acquire the measurement range of the test area corresponding to the physical measurement module of the measurement system and the coordinates of the geometric center of the measurement range.
根据本发明的一个具体实施例，其中，所述测量系统同时具有影像式测量单元和接触式测量单元，其中所述影像式测量单元包括光学镜头，所述接触式测量单元包括物理测量模块。具体的，所述物理测量模块为探针测量模块，所述光学镜头为电容耦合镜头。具体的，物理测量模块对应的测试区域的测量范围和所述测量范围几何中心的坐标为预先设置好并存储在系统中的，通过调取数据即可获得。According to a specific embodiment of the present invention, wherein the measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes a physical measurement module. Specifically, the physical measurement module is a probe measurement module, and the optical lens is a capacitive coupling lens. Specifically, the measurement range of the test area corresponding to the physical measurement module and the coordinates of the geometric center of the measurement range are preset and stored in the system, which can be obtained by retrieving data.
所述校正单元用于根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正，使所述光学镜头的测量范围与所述物理测量模块的测量范围保持一致。The correction unit is used to correct the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module, so that the measurement range of the optical lens is consistent with the measurement range of the physical measurement module.
根据本发明的一个具体实施例，其中，所述校正单元根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正的方法包括：According to a specific embodiment of the present invention, wherein the correction unit corrects the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module, including:
将所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标进行对比，看二者是否重合；如不重合，则调整所述光学镜头的位置，直至所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合。Compare the geometric center coordinates of the optical lens with the geometric center coordinates of the measurement range of the physical measurement module to see if they coincide; if they do not coincide, adjust the position of the optical lens until the optical lens The geometric center coordinates coincide with the geometric center coordinates of the measurement range of the physical measurement module.
根据本发明的一个具体实施例，其中，所述校正单元判断所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标是否重合的方法为：According to a specific embodiment of the present invention, wherein the correction unit determines whether the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module as follows:
获取所述物理测量模块的测量范围的几何中心坐标（x 0, y 0）； Acquiring the geometric center coordinates (x 0 , y 0 ) of the measurement range of the physical measurement module;
获取所述光学镜头的几何中心坐标（x 1, y 1）； Obtain the geometric center coordinates (x 1 , y 1 ) of the optical lens;
计算所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标之间的距离Δ，计算方法为：Calculate the distance Δ between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, the calculation method is:
Δ=（x 1-x 0） 2+(y 1-y 0) 2； Δ=(x 1 -x 0 ) 2 +(y 1 -y 0 ) 2 ;
若Δ为0，则说明所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合，否则不重合。If Δ is 0, it means that the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module, otherwise it does not coincide.
所述第二数据获取单元用于采用校正后的光学镜头获取待测量对象的几何中心的坐标。即，通过校正后的光学镜头获取待测量对象的实时图像，并根据获取的图像计算出其所述区域的坐标范围和该区域对应的几何中心坐标。The second data acquisition unit is used to acquire the coordinates of the geometric center of the object to be measured using the corrected optical lens. That is, a real-time image of the object to be measured is acquired through the corrected optical lens, and the coordinate range of the area and the geometric center coordinate corresponding to the area are calculated according to the acquired image.
所述比较单元用于将所述测量对象的坐标与所述物理测量模块的测量范围进行比较。具体的，比较时，将待测量对象的所处区域的边缘坐标与所述物理测量模块的测量范围进行比较，判断所述待测量对象是否全部位于所述物理测量模块的测量范围内，并根据判断结果进行后续操作。The comparison unit is used to compare the coordinates of the measurement object with the measurement range of the physical measurement module. Specifically, during comparison, the edge coordinates of the area of the object to be measured are compared with the measurement range of the physical measurement module to determine whether the object to be measured is all within the measurement range of the physical measurement module, and according to Judgment results for subsequent operations.
所述调整单元用于当所述测量对象的至少部分坐标处于所述物理测量模块的测量范围之外时，调整所述测量对象的位置，再重新进行比较。The adjustment unit is configured to adjust the position of the measurement object and perform comparison again when at least part of the coordinates of the measurement object is outside the measurement range of the physical measurement module.
所述执行单元用于当所述测量对象的坐标处于所述物理测量模块的测量范围中时，执行物理测量。The execution unit is configured to perform physical measurement when the coordinates of the measurement object are in the measurement range of the physical measurement module.
根据本发明的一个具体实施例，其中，所述测量系统同时具有影像式测量单元和接触式测量单元，其中所述影像式测量单元包括光学镜头，所述接触式测量单元包括物理测量模块。According to a specific embodiment of the present invention, wherein the measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes a physical measurement module.
根据本发明的一个具体实施例，其中，所述物理测量模块为探针测量模块。According to a specific embodiment of the present invention, wherein the physical measurement module is a probe measurement module.
综上所述，虽然本发明已以优选实施例揭露如上，但上述优选实施例并非用以限制本发明，本领域的普通技术人员，在不脱离本发明的精神和范围内，均可作各种更动与润饰，因此本发明的保护范围以权利要求界定的范围为准。In summary, although the present invention has been disclosed as the above with preferred embodiments, the above preferred embodiments are not intended to limit the present invention. Those of ordinary skill in the art can make various changes without departing from the spirit and scope of the present invention. Such changes and retouching, therefore, the protection scope of the present invention is subject to the scope defined by the claims.

Claims (14)

  1. 一种测量坐标校正方法，其中，所述方法包括：A method for measuring coordinate correction, wherein the method includes:
    获取测量系统的物理测量模块对应的测试区域的测量范围和所述测量范围几何中心的坐标；Obtain the measurement range of the test area corresponding to the physical measurement module of the measurement system and the coordinates of the geometric center of the measurement range;
    根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正，使所述光学镜头的测量范围与所述物理测量模块的测量范围保持一致；Correct the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module, so that the measurement range of the optical lens is consistent with the measurement range of the physical measurement module;
    采用校正后的光学镜头获取待测量对象的几何中心的坐标；Use the corrected optical lens to obtain the coordinates of the geometric center of the object to be measured;
    将所述测量对象的坐标与所述物理测量模块的测量范围进行比较；Compare the coordinates of the measurement object with the measurement range of the physical measurement module;
    当所述测量对象的至少部分坐标处于所述物理测量模块的测量范围之外时，调整所述测量对象的位置，再重新进行比较；When at least part of the coordinates of the measurement object is outside the measurement range of the physical measurement module, adjust the position of the measurement object, and then compare again;
    当所述测量对象的坐标处于所述物理测量模块的测量范围中时，执行物理测量；When the coordinates of the measurement object are in the measurement range of the physical measurement module, physical measurement is performed;
    所述测量系统同时具有影像式测量单元和接触式测量单元，其中所述影像式测量单元包括光学镜头，所述接触式测量单元包括物理测量模块。The measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes a physical measurement module.
  2. 根据权利要求1所述的测量坐标校正方法，其中，所述根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正的方法包括：The measurement coordinate correction method according to claim 1, wherein the method for correcting the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module includes:
    将所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标进行对比，看二者是否重合；如不重合，则调整所述光学镜头的位置，直至所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合。Compare the geometric center coordinates of the optical lens with the geometric center coordinates of the measurement range of the physical measurement module to see if they coincide; if they do not coincide, adjust the position of the optical lens until the optical lens The geometric center coordinates coincide with the geometric center coordinates of the measurement range of the physical measurement module.
  3. 根据权利要求2所述的测量坐标校正方法，其中，判断所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标是否重合的方法为：The measurement coordinate correction method according to claim 2, wherein the method for determining whether the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module is:
    获取所述物理测量模块的测量范围的几何中心坐标（x 0, y 0）； Acquiring the geometric center coordinates (x 0 , y 0 ) of the measurement range of the physical measurement module;
    获取所述光学镜头的几何中心坐标（x 1, y 1）； Obtain the geometric center coordinates (x 1 , y 1 ) of the optical lens;
    计算所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标之间的距离Δ，计算方法为：Calculate the distance Δ between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, the calculation method is:
    Δ=（x 1-x 0） 2+(y 1-y 0) 2； Δ=(x 1 -x 0 ) 2 +(y 1 -y 0 ) 2 ;
    若Δ为0，则说明所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合，否则不重合。If Δ is 0, it means that the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module, otherwise it does not coincide.
  4. 根据权利要求1所述的测量坐标校正方法，其中，所述物理测量模块为探针测量模块。The measurement coordinate correction method according to claim 1, wherein the physical measurement module is a probe measurement module.
  5. 一种测量坐标校正方法，其中，所述方法包括：A method for measuring coordinate correction, wherein the method includes:
    获取测量系统的物理测量模块对应的测试区域的测量范围和所述测量范围几何中心的坐标；Obtain the measurement range of the test area corresponding to the physical measurement module of the measurement system and the coordinates of the geometric center of the measurement range;
    根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正，使所述光学镜头的测量范围与所述物理测量模块的测量范围保持一致；Correct the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module, so that the measurement range of the optical lens is consistent with the measurement range of the physical measurement module;
    采用校正后的光学镜头获取待测量对象的几何中心的坐标；Use the corrected optical lens to obtain the coordinates of the geometric center of the object to be measured;
    将所述测量对象的坐标与所述物理测量模块的测量范围进行比较；Compare the coordinates of the measurement object with the measurement range of the physical measurement module;
    当所述测量对象的至少部分坐标处于所述物理测量模块的测量范围之外时，调整所述测量对象的位置，再重新进行比较；When at least part of the coordinates of the measurement object is outside the measurement range of the physical measurement module, adjust the position of the measurement object, and then compare again;
    当所述测量对象的坐标处于所述物理测量模块的测量范围中时，执行物理测量。When the coordinates of the measurement object are in the measurement range of the physical measurement module, physical measurement is performed.
  6. 根据权利要求5所述的测量坐标校正方法，其中，所述根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正的方法包括：The measurement coordinate correction method according to claim 5, wherein the method of correcting the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module includes:
    将所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标进行对比，看二者是否重合；如不重合，则调整所述光学镜头的位置，直至所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合。Compare the geometric center coordinates of the optical lens with the geometric center coordinates of the measurement range of the physical measurement module to see if they coincide; if they do not coincide, adjust the position of the optical lens until the optical lens The geometric center coordinates coincide with the geometric center coordinates of the measurement range of the physical measurement module.
  7. 根据权利要求6所述的测量坐标校正方法，其中，判断所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标是否重合的方法为：The method for measuring coordinate correction according to claim 6, wherein the method for determining whether the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module is:
    获取所述物理测量模块的测量范围的几何中心坐标（x 0, y 0）； Acquiring the geometric center coordinates (x 0 , y 0 ) of the measurement range of the physical measurement module;
    获取所述光学镜头的几何中心坐标（x 1, y 1）； Obtain the geometric center coordinates (x 1 , y 1 ) of the optical lens;
    计算所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标之间的距离Δ，计算方法为：Calculate the distance Δ between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, the calculation method is:
    Δ=（x 1-x 0） 2+(y 1-y 0) 2； Δ=(x 1 -x 0 ) 2 +(y 1 -y 0 ) 2 ;
    若Δ为0，则说明所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合，否则不重合。If Δ is 0, it means that the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module, otherwise it does not coincide.
  8. 根据权利要求5所述的测量坐标校正方法，其中，所述测量系统同时具有影像式测量单元和接触式测量单元，其中所述影像式测量单元包括光学镜头，所述接触式测量单元包括物理测量模块。The measurement coordinate correction method according to claim 5, wherein the measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes physical measurement Module.
  9. 根据权利要求8所述的测量坐标校正方法，其中，所述物理测量模块为探针测量模块。The measurement coordinate correction method according to claim 8, wherein the physical measurement module is a probe measurement module.
  10. 一种测量坐标校正系统，其中，所述系统包括：A measurement coordinate correction system, wherein the system includes:
    第一数据获取单元，用于获取测量系统的物理测量模块对应的测试区域的测量范围和所述测量范围几何中心的坐标；A first data acquisition unit, configured to acquire the measurement range of the test area corresponding to the physical measurement module of the measurement system and the coordinates of the geometric center of the measurement range;
    校正单元，用于根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正，使所述光学镜头的测量范围与所述物理测量模块的测量范围保持一致；A correction unit, configured to correct the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module, so that the measurement range of the optical lens is consistent with the measurement range of the physical measurement module;
    第二数据获取单元，用于采用校正后的光学镜头获取待测量对象的几何中心的坐标；A second data acquisition unit, configured to acquire the coordinates of the geometric center of the object to be measured using the corrected optical lens;
    比较单元，用于将所述测量对象的坐标与所述物理测量模块的测量范围进行比较；A comparison unit, configured to compare the coordinates of the measurement object with the measurement range of the physical measurement module;
    调整单元，用于当所述测量对象的至少部分坐标处于所述物理测量模块的测量范围之外时，调整所述测量对象的位置，再重新进行比较；An adjustment unit, configured to adjust the position of the measurement object when at least part of the coordinates of the measurement object are outside the measurement range of the physical measurement module, and then perform comparison again;
    执行单元，用于当所述测量对象的坐标处于所述物理测量模块的测量范围中时，执行物理测量。The execution unit is configured to perform physical measurement when the coordinates of the measurement object are in the measurement range of the physical measurement module.
  11. 根据权利要求10所述的测量坐标校正系统，其中，所述校正单元根据获取的所述物理测量模块的测量范围的几何中心坐标对测量系统的光学镜头进行校正的方法包括：The measurement coordinate correction system according to claim 10, wherein the correction unit correcting the optical lens of the measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module includes:
    将所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标进行对比，看二者是否重合；如不重合，则调整所述光学镜头的位置，直至所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合。Compare the geometric center coordinates of the optical lens with the geometric center coordinates of the measurement range of the physical measurement module to see if they coincide; if they do not coincide, adjust the position of the optical lens until the optical lens The geometric center coordinates coincide with the geometric center coordinates of the measurement range of the physical measurement module.
  12. 根据权利要求11所述的测量坐标校正系统，其中，所述校正单元判断所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标是否重合的方法为：The measurement coordinate correction system according to claim 11, wherein the method for the correction unit to determine whether the geometric center coordinates of the optical lens and the geometric center coordinates of the measurement range of the physical measurement module coincide with each other is:
    获取所述物理测量模块的测量范围的几何中心坐标（x 0, y 0）； Acquiring the geometric center coordinates (x 0 , y 0 ) of the measurement range of the physical measurement module;
    获取所述光学镜头的几何中心坐标（x 1, y 1）； Obtain the geometric center coordinates (x 1 , y 1 ) of the optical lens;
    计算所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标之间的距离Δ，计算方法为：Calculate the distance Δ between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, the calculation method is:
    Δ=（x 1-x 0） 2+(y 1-y 0) 2； Δ=(x 1 -x 0 ) 2 +(y 1 -y 0 ) 2 ;
    若Δ为0，则说明所述光学镜头的几何中心坐标与所述物理测量模块的测量范围的几何中心坐标重合，否则不重合。If Δ is 0, it means that the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module, otherwise it does not coincide.
  13. 根据权利要求10所述的测量坐标校正系统，其中，所述测量系统同时具有影像式测量单元和接触式测量单元，其中所述影像式测量单元包括光学镜头，所述接触式测量单元包括物理测量模块。The measurement coordinate correction system according to claim 10, wherein the measurement system has both an image measurement unit and a contact measurement unit, wherein the image measurement unit includes an optical lens, and the contact measurement unit includes physical measurement Module.
  14. 根据权利要求13所述的测量坐标校正系统，其中，所述物理测量模块为探针测量模块。The measurement coordinate correction system according to claim 13, wherein the physical measurement module is a probe measurement module.
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