CN109579703A - Measure method for correcting coordinate and system - Google Patents
Measure method for correcting coordinate and system Download PDFInfo
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- CN109579703A CN109579703A CN201811605002.8A CN201811605002A CN109579703A CN 109579703 A CN109579703 A CN 109579703A CN 201811605002 A CN201811605002 A CN 201811605002A CN 109579703 A CN109579703 A CN 109579703A
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- measurement
- geometric center
- optical lens
- physical
- coordinate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
Abstract
The present invention provides a kind of measurement method for correcting coordinate and system, which comprises obtains the measurement range of the corresponding test zone of physical measurement module of measuring system and the coordinate of the measurement range geometric center；The optical lens of measuring system is corrected according to the Geometric center coordinates of the measurement range of the physical measurement module of acquisition；The coordinate of the geometric center of object to be measured is obtained using the optical lens after correction；The coordinate of the measurement object is compared with the measurement range of the physical measurement module；When except the measurement range that at least partly coordinate of the measurement object is in the physical measurement module, the position of the measurement object is adjusted, then re-start and compare；When in the measurement range that the coordinate of the measurement object is in the physical measurement module, physical measurement is executed.
Description
Technical field
The present invention relates to radiographic measurement field more particularly to a kind of measurement method for correcting coordinate and systems.
Background technique
There are mainly two types of modes for the measurement of measuring targets at present, and one is carried out using the direct contact measured object of probe
It measures (referred to as probe measuring system or " contact measurement system), another is to utilize optical coupled camera lens (Charge
Coupled Device, CCD) obtain object under test image measured (referred to as image measurement system or application
System), usually simultaneously equipped with probe measuring system and image measuring system on existing measuring device.
Since probe measuring system is not provided with observation camera lens, when carrying out resistivity measurement using probe, directly to make
Industry file coordinate is as coordinate is measured, and then traveling probe is detected to the position for measuring coordinate.However the amount of job file
It surveys coordinate and actual coordinate and often slightly has difference, be easy to cause measuring point position inaccurate, cause probe that can not accurately prick finger
Fixed test zone can not only make measurement result inaccurate if pricking the encapsulation region outside measured zone, also result in chip envelope
Dress failure, causes chip to damage.
Summary of the invention
The present invention provide it is a kind of measure coordinates correction method and system, when solving physical measurement due to can not confirm to
It measures the actual coordinate of target and leads to the technical problem of measurement result inaccuracy.
To solve the above problems, the present invention provides a kind of measurement method for correcting coordinate, wherein the described method includes:
The measurement range of the corresponding test zone of physical measurement module of acquisition measuring system and the measurement range geometry
The coordinate at center；
According to the Geometric center coordinates of the measurement range of the physical measurement module of acquisition to the optical frames of measuring system
Head is corrected, and is consistent the measurement range of the optical lens and the measurement range of the physical measurement module；
The coordinate of the geometric center of object to be measured is obtained using the optical lens after correction；
The coordinate of the measurement object is compared with the measurement range of the physical measurement module；
When except the measurement range that at least partly coordinate of the measurement object is in the physical measurement module, adjustment
The position of the measurement object, then re-start and compare；
When in the measurement range that the coordinate of the measurement object is in the physical measurement module, physical measurement is executed.
A specific embodiment according to the present invention, wherein the measurement of the physical measurement module according to acquisition
The Geometric center coordinates of range include: to the corrected method of the optical lens of measuring system
The geometric center of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module is sat
Mark compares, and sees whether the two is overlapped；If not being overlapped, then the position of the optical lens is adjusted, until the optical lens
Geometric center coordinates be overlapped with the Geometric center coordinates of the measurement range of the physical measurement module.
A specific embodiment according to the present invention, wherein judge the Geometric center coordinates of the optical lens with it is described
The method whether Geometric center coordinates of the measurement range of physical measurement module are overlapped are as follows:
Obtain the Geometric center coordinates (x of the measurement range of the physical measurement module0,y0)；
Obtain the Geometric center coordinates (x of the optical lens1,y1)；
Calculate the geometric center of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module
The distance between coordinate Δ, calculation method are as follows:
Δ=(x1-x0)2+(y1-y0)2；
If Δ is 0, illustrate the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module
Geometric center coordinates be overlapped, be not otherwise overlapped.
A specific embodiment according to the present invention, wherein the measuring system have simultaneously image-type measuring unit and
Contact type measurement unit, wherein the image-type measuring unit includes optical lens, the contact type measurement unit includes physics
Measurement module.
A specific embodiment according to the present invention, wherein the physical measurement module is probe measurement module.
Correspondingly, the present invention also provides a kind of measurement coordinates correction systems, wherein the system comprises:
First data capture unit, the measurement model of the corresponding test zone of physical measurement module for obtaining measuring system
Enclose the coordinate with the measurement range geometric center；
Unit is corrected, for the Geometric center coordinates according to the measurement range of the physical measurement module of acquisition to measurement
The optical lens of system is corrected, and the measurement range of the measurement range and the physical measurement module that make the optical lens is protected
It holds consistent；
Second data capture unit, the seat of the geometric center for obtaining object to be measured using the optical lens after correction
Mark；
Comparing unit, for comparing the coordinate of the measurement object and the measurement range of the physical measurement module
Compared with；
Adjustment unit is in the measurement model of the physical measurement module for at least partly coordinate when the measurement object
When except enclosing, the position of the measurement object is adjusted, then re-starts and compares；
Execution unit, for when in the measurement range that the coordinate of the measurement object is in the physical measurement module,
Execute physical measurement.
A specific embodiment according to the present invention, wherein the unit that corrects is according to the physical measurement mould of acquisition
The Geometric center coordinates of the measurement range of block include: to the corrected method of the optical lens of measuring system
The geometric center of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module is sat
Mark compares, and sees whether the two is overlapped；If not being overlapped, then the position of the optical lens is adjusted, until the optical lens
Geometric center coordinates be overlapped with the Geometric center coordinates of the measurement range of the physical measurement module.
A specific embodiment according to the present invention, wherein in the geometry of optical lens described in the correction unit judges
The method whether heart coordinate is overlapped with the Geometric center coordinates of the measurement range of the physical measurement module are as follows:
Obtain the Geometric center coordinates (x of the measurement range of the physical measurement module0,y0)；
Obtain the Geometric center coordinates (x of the optical lens1,y1)；
Calculate the geometric center of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module
The distance between coordinate Δ, calculation method are as follows:
Δ=(x1-x0)2+(y1-y0)2；
If Δ is 0, illustrate the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module
Geometric center coordinates be overlapped, be not otherwise overlapped.
A specific embodiment according to the present invention, wherein the measuring system have simultaneously image-type measuring unit and
Contact type measurement unit, wherein the image-type measuring unit includes optical lens, the contact type measurement unit includes physics
Measurement module.
A specific embodiment according to the present invention, wherein the physical measurement module is probe measurement module.
Measurement bearing calibration of the invention and system can pass through the capacitive coupling mirror of optical measurement unit before measuring
The position of target to be measured when head correcting physics measurement, solve in the prior art due to the not set camera lens of physical measurement unit and
The problem of can not being adjusted to the position of target to be measured, effectively increase the accurate of the measurement result of physical measurement unit
Rate, while avoiding damaging chip to be measured.
Detailed description of the invention
Fig. 1 is the flow chart of the measurement bearing calibration in one embodiment of the present of invention；
Fig. 2 is the structural schematic diagram of the measurement correction system in one embodiment of the present of invention.
Specific embodiment
The explanation of following embodiment is referred to the additional illustration, the particular implementation that can be used to implement to illustrate the present invention
Example.The direction term that the present invention is previously mentioned, such as [on], [under], [preceding], [rear], [left side], [right side], [interior], [outer], [side]
Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to
The limitation present invention.The similar unit of structure is with being given the same reference numerals in the figure.
The present invention provide it is a kind of measure coordinates correction method and system, when solving physical measurement due to can not confirm to
It measures the actual coordinate of target and leads to the technical problem of measurement result inaccuracy.Specifically, referring to Fig. 1, this method include with
Lower step:
Firstly, in step s 110, obtaining the measurement range of the corresponding test zone of physical measurement module of measuring system
With the coordinate of the measurement range geometric center.
A specific embodiment according to the present invention, wherein the measuring system have simultaneously image-type measuring unit and
Contact type measurement unit, wherein the image-type measuring unit includes optical lens, the contact type measurement unit includes physics
Measurement module.Specifically, the physical measurement module is probe measurement module, the optical lens is capacitive coupling camera lens.Tool
Body, the coordinate of the measurement range of the corresponding test zone of physical measurement module and the measurement range geometric center is to set in advance
It sets and stores in systems, can be obtained by called data.
Secondly, in the step s 120, according to the Geometric center coordinates of the measurement range of the physical measurement module of acquisition
The optical lens of measuring system is corrected, the measurement range of the optical lens and the measurement of the physical measurement module are made
Range is consistent.Specifically, the Geometric center coordinates pair of the measurement range of the physical measurement module according to acquisition
The corrected method of the optical lens of measuring system includes:
The geometric center of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module is sat
Mark compares, and sees whether the two is overlapped；If not being overlapped, then the position of the optical lens is adjusted, until the optical lens
Geometric center coordinates be overlapped with the Geometric center coordinates of the measurement range of the physical measurement module.
A specific embodiment according to the present invention, wherein judge the Geometric center coordinates of the optical lens with it is described
The method whether Geometric center coordinates of the measurement range of physical measurement module are overlapped are as follows:
Obtain the Geometric center coordinates (x of the measurement range of the physical measurement module0,y0)；
Obtain the Geometric center coordinates (x of the optical lens1,y1)；
Calculate the geometric center of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module
The distance between coordinate Δ, calculation method are as follows:
Δ=(x1-x0)2+(y1-y0)2；
If Δ is 0, illustrate the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module
Geometric center coordinates be overlapped, be not otherwise overlapped.
Later, in step s 130, the coordinate of the geometric center of object to be measured is obtained using the optical lens after correction.
That is, obtain the realtime graphic of object to be measured by the optical lens after correction, and described in calculating it according to the image of acquisition
The coordinate range in region Geometric center coordinates corresponding with the region.
Later, in step S140, by the measurement range of the coordinate of the measurement object and the physical measurement module into
Row compares.Specifically, when comparing, by the measurement of the edge coordinate in the locating region of object to be measured and the physical measurement module
Range is compared, and judges whether the object to be measured is entirely located in the measurement range of the physical measurement module, and root
It is judged that result carries out subsequent operation.
Specifically, in step S150, when at least partly coordinate of the measurement object is in the physical measurement module
Measurement range except when, adjust the position of the measurement object, then re-start and compare.
Finally, in step S160, when the coordinate of the measurement object is in the measurement range of the physical measurement module
When middle, physical measurement is executed.
Measurement bearing calibration of the invention and system can pass through the capacitive coupling mirror of optical measurement unit before measuring
The position of target to be measured when head correcting physics measurement, solve in the prior art due to the not set camera lens of physical measurement unit and
The problem of can not being adjusted to the position of target to be measured, effectively increase the accurate of the measurement result of physical measurement unit
Rate, while avoiding damaging chip to be measured.
Correspondingly, referring to fig. 2, the present invention also provides a kind of measurement coordinates correction systems comprising: the first data acquisition
Unit, correction unit, the second data capture unit, comparing unit, adjustment unit and execution unit.
First data capture unit is used to obtain the survey of the corresponding test zone of physical measurement module of measuring system
Measure the coordinate of range and the measurement range geometric center.
A specific embodiment according to the present invention, wherein the measuring system have simultaneously image-type measuring unit and
Contact type measurement unit, wherein the image-type measuring unit includes optical lens, the contact type measurement unit includes physics
Measurement module.Specifically, the physical measurement module is probe measurement module, the optical lens is capacitive coupling camera lens.Tool
Body, the coordinate of the measurement range of the corresponding test zone of physical measurement module and the measurement range geometric center is to set in advance
It sets and stores in systems, can be obtained by called data.
The correction unit is used for the Geometric center coordinates pair of the measurement range of the physical measurement module according to acquisition
The optical lens of measuring system is corrected, and makes the measurement range of the optical lens and the measurement model of the physical measurement module
It encloses and is consistent.
A specific embodiment according to the present invention, wherein the unit that corrects is according to the physical measurement mould of acquisition
The Geometric center coordinates of the measurement range of block include: to the corrected method of the optical lens of measuring system
The geometric center of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module is sat
Mark compares, and sees whether the two is overlapped；If not being overlapped, then the position of the optical lens is adjusted, until the optical lens
Geometric center coordinates be overlapped with the Geometric center coordinates of the measurement range of the physical measurement module.
A specific embodiment according to the present invention, wherein in the geometry of optical lens described in the correction unit judges
The method whether heart coordinate is overlapped with the Geometric center coordinates of the measurement range of the physical measurement module are as follows:
Obtain the Geometric center coordinates (x of the measurement range of the physical measurement module0,y0)；
Obtain the Geometric center coordinates (x of the optical lens1,y1)；
Calculate the geometric center of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module
The distance between coordinate Δ, calculation method are as follows:
Δ=(x1-x0)2+(y1-y0)2；
If Δ is 0, illustrate the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module
Geometric center coordinates be overlapped, be not otherwise overlapped.
Second data capture unit is used to obtain the geometric center of object to be measured using the optical lens after correction
Coordinate.That is, obtaining the realtime graphic of object to be measured by the optical lens after correction, and calculated according to the image of acquisition
The coordinate range in its region Geometric center coordinates corresponding with the region.
The comparing unit is used to carry out the measurement range of the coordinate of the measurement object and the physical measurement module
Compare.Specifically, when comparing, by the measurement model of the edge coordinate in the locating region of object to be measured and the physical measurement module
It encloses and is compared, judge whether the object to be measured is entirely located in the measurement range of the physical measurement module, and according to
Judging result carries out subsequent operation.
The adjustment unit is used to be in the survey of the physical measurement module when at least partly coordinate of the measurement object
When measuring except range, the position of the measurement object is adjusted, then re-start and compare.
The execution unit is used to be in the measurement range of the physical measurement module when the coordinate of the measurement object
When, execute physical measurement.
A specific embodiment according to the present invention, wherein the measuring system have simultaneously image-type measuring unit and
Contact type measurement unit, wherein the image-type measuring unit includes optical lens, the contact type measurement unit includes physics
Measurement module.
A specific embodiment according to the present invention, wherein the physical measurement module is probe measurement module.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention subjects to the scope of the claims.
Claims (10)
1. a kind of measurement method for correcting coordinate, which is characterized in that the described method includes:
Obtain the measurement range and the measurement range geometric center of the corresponding test zone of physical measurement module of measuring system
Coordinate；
According to the Geometric center coordinates of the measurement range of the physical measurement module of acquisition to the optical lens of measuring system into
Row correction, is consistent the measurement range of the optical lens and the measurement range of the physical measurement module；
The coordinate of the geometric center of object to be measured is obtained using the optical lens after correction；
The coordinate of the measurement object is compared with the measurement range of the physical measurement module；
When except the measurement range that at least partly coordinate of the measurement object is in the physical measurement module, described in adjustment
The position of measurement object, then re-start and compare；
When in the measurement range that the coordinate of the measurement object is in the physical measurement module, physical measurement is executed.
2. measurement method for correcting coordinate according to claim 1, which is characterized in that described to be surveyed according to the physics of acquisition
The Geometric center coordinates of measurement range for measuring module include: to the corrected method of the optical lens of measuring system
By the Geometric center coordinates of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module into
Row comparison, sees whether the two is overlapped；If not being overlapped, then the position of the optical lens is adjusted, until the optical lens is several
What centre coordinate is overlapped with the Geometric center coordinates of the measurement range of the physical measurement module.
3. measurement method for correcting coordinate according to claim 2, which is characterized in that in the geometry for judging the optical lens
The method whether heart coordinate is overlapped with the Geometric center coordinates of the measurement range of the physical measurement module are as follows:
Obtain the Geometric center coordinates (x of the measurement range of the physical measurement module0,y0)；
Obtain the Geometric center coordinates (x of the optical lens1,y1)；
Calculate the Geometric center coordinates of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module
The distance between Δ, calculation method are as follows:
Δ=(x1-x0)2+(y1-y0)2；
If Δ is 0, illustrate the several of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module
What centre coordinate is overlapped, and is not otherwise overlapped.
4. measurement method for correcting coordinate according to claim 1, which is characterized in that the measuring system has image simultaneously
Formula measuring unit and contact type measurement unit, wherein the image-type measuring unit includes optical lens, the contact type measurement
Unit includes physical measurement module.
5. measurement method for correcting coordinate according to claim 4, which is characterized in that the physical measurement module is probe survey
Measure module.
6. a kind of measurement coordinates correction system, which is characterized in that the system comprises:
First data capture unit, for obtain measuring system the corresponding test zone of physical measurement module measurement range and
The coordinate of the measurement range geometric center；
Unit is corrected, for the Geometric center coordinates according to the measurement range of the physical measurement module of acquisition to measuring system
Optical lens be corrected, make the optical lens measurement range and the physical measurement module measurement range keep one
It causes；
Second data capture unit, the coordinate of the geometric center for obtaining object to be measured using the optical lens after correction；
Comparing unit, for the coordinate of the measurement object to be compared with the measurement range of the physical measurement module；
Adjustment unit, for when the measurement object at least partly coordinate be in the physical measurement module measurement range it
When outer, the position of the measurement object is adjusted, then re-starts and compares；
Execution unit, for executing when in the measurement range that the coordinate of the measurement object is in the physical measurement module
Physical measurement.
7. measurement coordinates correction system according to claim 6, which is characterized in that the unit that corrects is according to the institute of acquisition
The Geometric center coordinates for stating the measurement range of physical measurement module include: to the corrected method of the optical lens of measuring system
By the Geometric center coordinates of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module into
Row comparison, sees whether the two is overlapped；If not being overlapped, then the position of the optical lens is adjusted, until the optical lens is several
What centre coordinate is overlapped with the Geometric center coordinates of the measurement range of the physical measurement module.
8. measurement coordinates correction system according to claim 7, which is characterized in that optics described in the correction unit judges
The method whether Geometric center coordinates of camera lens are overlapped with the Geometric center coordinates of the measurement range of the physical measurement module are as follows:
Obtain the Geometric center coordinates (x of the measurement range of the physical measurement module0,y0)；
Obtain the Geometric center coordinates (x of the optical lens1,y1)；
Calculate the Geometric center coordinates of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module
The distance between Δ, calculation method are as follows:
Δ=(x1-x0)2+(y1-y0)2；
If Δ is 0, illustrate the several of the Geometric center coordinates of the optical lens and the measurement range of the physical measurement module
What centre coordinate is overlapped, and is not otherwise overlapped.
9. measurement coordinates correction system according to claim 6, which is characterized in that the measuring system has image simultaneously
Formula measuring unit and contact type measurement unit, wherein the image-type measuring unit includes optical lens, the contact type measurement
Unit includes physical measurement module.
10. measurement coordinates correction system according to claim 9, which is characterized in that the physical measurement module is probe
Measurement module.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811605002.8A CN109579703B (en) | 2018-12-26 | 2018-12-26 | Method and system for correcting measurement coordinates |
| PCT/CN2019/083870 WO2020133837A1 (en) | 2018-12-26 | 2019-04-23 | Measurement coordinate correction method and system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811605002.8A CN109579703B (en) | 2018-12-26 | 2018-12-26 | Method and system for correcting measurement coordinates |
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| CN109579703B CN109579703B (en) | 2020-06-16 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2020133837A1 (en) * | 2018-12-26 | 2020-07-02 | 深圳市华星光电半导体显示技术有限公司 | Measurement coordinate correction method and system |
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| CN109579703B (en) * | 2018-12-26 | 2020-06-16 | 深圳市华星光电半导体显示技术有限公司 | Method and system for correcting measurement coordinates |
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| WO2020133837A1 (en) | 2020-07-02 |
| CN109579703B (en) | 2020-06-16 |
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