CN109579703B - Method and system for correcting measurement coordinates - Google Patents
Method and system for correcting measurement coordinates Download PDFInfo
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- CN109579703B CN109579703B CN201811605002.8A CN201811605002A CN109579703B CN 109579703 B CN109579703 B CN 109579703B CN 201811605002 A CN201811605002 A CN 201811605002A CN 109579703 B CN109579703 B CN 109579703B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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Abstract
The invention provides a method and a system for correcting measurement coordinates, wherein the method comprises the following steps: acquiring a measurement range of a test area corresponding to a physical measurement module of a measurement system and coordinates of a geometric center of the measurement range; correcting an optical lens of the measuring system according to the acquired geometric center coordinate of the measuring range of the physical measuring module; acquiring the coordinate of the geometric center of the object to be measured by adopting the corrected optical lens; comparing the coordinates of the measurement object with the measurement range of the physical measurement module; when at least part of coordinates of the measuring object are out of the measuring range of the physical measuring module, adjusting the position of the measuring object, and then comparing again; performing a physical measurement when the coordinates of the measurement object are in a measurement range of the physical measurement module.
Description
Technical Field
The invention relates to the field of image measurement, in particular to a method and a system for correcting measurement coordinates.
Background
At present, there are two methods for measuring an object to be measured, one is to measure the object by directly contacting the probe with the object to be measured (called a probe measurement system or a contact measurement system), and the other is to measure the object to be measured by acquiring an image of the object to be measured by using a Charge Coupled Device (CCD) (called an image measurement system or a non-contact measurement system).
Because the probe measurement system is not provided with an observation lens, when the probe is used for measuring the resistivity, the operation file coordinate is directly used as a measurement coordinate, and then the probe is moved to the position of the measurement coordinate for detection. However, the measurement coordinate and the actual coordinate of the operation file are often slightly different, which easily causes the position of the measurement point to be inaccurate, and the probe cannot be accurately inserted into the designated test area.
Disclosure of Invention
The invention provides a method and a system for correcting measurement coordinates, which aim to solve the technical problem that the measurement result is inaccurate because the actual coordinates of a target to be measured cannot be confirmed during physical measurement.
In order to solve the above problem, the present invention provides a method for correcting measurement coordinates, wherein the method comprises:
acquiring a measurement range of a test area corresponding to a physical measurement module of a measurement system and coordinates of a geometric center of the measurement range;
correcting an optical lens of the measuring system according to the obtained geometric center coordinates of the measuring range of the physical measuring module, so that the measuring range of the optical lens is consistent with the measuring range of the physical measuring module;
acquiring the coordinate of the geometric center of the object to be measured by adopting the corrected optical lens;
comparing the coordinates of the measurement object with the measurement range of the physical measurement module;
when at least part of coordinates of the measuring object are out of the measuring range of the physical measuring module, adjusting the position of the measuring object, and then comparing again;
performing a physical measurement when the coordinates of the measurement object are in a measurement range of the physical measurement module.
According to a specific embodiment of the present invention, the method for correcting an optical lens of a measurement system according to the acquired geometric center coordinates of the measurement range of the physical measurement module includes:
comparing the geometric center coordinate of the optical lens with the geometric center coordinate of the measurement range of the physical measurement module to see whether the two are coincident; and if the two measurement ranges are not coincident, adjusting the position of the optical lens until the geometric center coordinate of the optical lens is coincident with the geometric center coordinate of the measurement range of the physical measurement module.
According to an embodiment of the present invention, the method for determining whether the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module includes:
acquiring the geometric center coordinates (x) of the measurement range of the physical measurement module0,y0)；
Acquiring the geometric center coordinate (x) of the optical lens1,y1)；
Calculating the distance delta between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, wherein the calculation method comprises the following steps:
Δ＝(x1-x0)2+(y1-y0)2；
if delta is 0, the geometric center coordinate of the optical lens is coincident with the geometric center coordinate of the measurement range of the physical measurement module, otherwise, the geometric center coordinate of the optical lens is not coincident with the geometric center coordinate of the measurement range of the physical measurement module.
According to an embodiment of the present invention, the measurement system has both an image-based measurement unit and a contact-based measurement unit, wherein the image-based measurement unit includes an optical lens, and the contact-based measurement unit includes a physical measurement module.
According to a specific embodiment of the present invention, the physical measurement module is a probe measurement module.
Correspondingly, the invention also provides a system for correcting the measurement coordinate, wherein the system comprises:
the system comprises a first data acquisition unit, a second data acquisition unit and a measurement unit, wherein the first data acquisition unit is used for acquiring a measurement range of a test area corresponding to a physical measurement module of a measurement system and coordinates of a geometric center of the measurement range;
the correction unit is used for correcting an optical lens of the measuring system according to the acquired geometric center coordinates of the measuring range of the physical measuring module, so that the measuring range of the optical lens is consistent with the measuring range of the physical measuring module;
a second data acquisition unit for acquiring coordinates of a geometric center of the object to be measured by using the corrected optical lens;
a comparison unit for comparing the coordinates of the measurement object with the measurement range of the physical measurement module;
the adjusting unit is used for adjusting the position of the measuring object and comparing again when at least part of coordinates of the measuring object is out of the measuring range of the physical measuring module;
and the execution unit is used for executing physical measurement when the coordinates of the measurement object are in the measurement range of the physical measurement module.
According to a specific embodiment of the present invention, the method for correcting the optical lens of the measurement system by the correction unit according to the acquired geometric center coordinates of the measurement range of the physical measurement module includes:
comparing the geometric center coordinate of the optical lens with the geometric center coordinate of the measurement range of the physical measurement module to see whether the two are coincident; and if the two measurement ranges are not coincident, adjusting the position of the optical lens until the geometric center coordinate of the optical lens is coincident with the geometric center coordinate of the measurement range of the physical measurement module.
According to an embodiment of the present invention, the method for the calibration unit to determine whether the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module includes:
acquiring the geometric center coordinates (x) of the measurement range of the physical measurement module0,y0)；
Acquiring the geometric center coordinate (x) of the optical lens1,y1)；
Calculating the distance delta between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, wherein the calculation method comprises the following steps:
Δ＝(x1-x0)2+(y1-y0)2；
if delta is 0, the geometric center coordinate of the optical lens is coincident with the geometric center coordinate of the measurement range of the physical measurement module, otherwise, the geometric center coordinate of the optical lens is not coincident with the geometric center coordinate of the measurement range of the physical measurement module.
According to an embodiment of the present invention, the measurement system has both an image-based measurement unit and a contact-based measurement unit, wherein the image-based measurement unit includes an optical lens, and the contact-based measurement unit includes a physical measurement module.
According to a specific embodiment of the present invention, the physical measurement module is a probe measurement module.
The measurement correction method and the system can correct the position of the target to be measured during physical measurement through the capacitive coupling lens of the optical measurement unit before measurement, solve the problem that the position of the target to be measured cannot be adjusted because the physical measurement unit is not provided with the lens in the prior art, effectively improve the accuracy of the measurement result of the physical measurement unit and simultaneously avoid damaging a chip to be measured.
Drawings
FIG. 1 is a flow chart of a measurement calibration method in one embodiment of the present invention;
fig. 2 is a schematic structural diagram of a measurement calibration system according to an embodiment of the present invention.
Detailed Description
The following description of the various embodiments refers to the accompanying drawings that illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as [ upper ], [ lower ], [ front ], [ rear ], [ left ], [ right ], [ inner ], [ outer ], [ side ], are only referring to the directions of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention. In the drawings, elements having similar structures are denoted by the same reference numerals.
The invention provides a method and a system for correcting measurement coordinates, which aim to solve the technical problem that the measurement result is inaccurate because the actual coordinates of a target to be measured cannot be confirmed during physical measurement. Specifically, referring to fig. 1, the method comprises the following steps:
first, in step S110, a measurement range of a test area corresponding to a physical measurement module of a measurement system and coordinates of a geometric center of the measurement range are acquired.
According to an embodiment of the present invention, the measurement system has both an image-based measurement unit and a contact-based measurement unit, wherein the image-based measurement unit includes an optical lens, and the contact-based measurement unit includes a physical measurement module. Specifically, the physical measurement module is a probe measurement module, and the optical lens is a capacitive coupling lens. Specifically, the measurement range of the test area corresponding to the physical measurement module and the coordinates of the geometric center of the measurement range are preset and stored in the system, and can be obtained by retrieving data.
Next, in step S120, an optical lens of the measurement system is corrected according to the acquired geometric center coordinates of the measurement range of the physical measurement module, so that the measurement range of the optical lens is consistent with the measurement range of the physical measurement module. Specifically, the method for correcting the optical lens of the measurement system according to the acquired geometric center coordinate of the measurement range of the physical measurement module includes:
comparing the geometric center coordinate of the optical lens with the geometric center coordinate of the measurement range of the physical measurement module to see whether the two are coincident; and if the two measurement ranges are not coincident, adjusting the position of the optical lens until the geometric center coordinate of the optical lens is coincident with the geometric center coordinate of the measurement range of the physical measurement module.
According to an embodiment of the present invention, the method for determining whether the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module includes:
acquiring the geometric center coordinates (x) of the measurement range of the physical measurement module0,y0)；
Acquiring the geometric center coordinate (x) of the optical lens1,y1)；
Calculating the distance delta between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, wherein the calculation method comprises the following steps:
Δ＝(x1-x0)2+(y1-y0)2；
if delta is 0, the geometric center coordinate of the optical lens is coincident with the geometric center coordinate of the measurement range of the physical measurement module, otherwise, the geometric center coordinate of the optical lens is not coincident with the geometric center coordinate of the measurement range of the physical measurement module.
Thereafter, in step S130, coordinates of the geometric center of the object to be measured are acquired using the corrected optical lens. Namely, a real-time image of the object to be measured is acquired through the corrected optical lens, and the coordinate range of the area and the geometric center coordinate corresponding to the area are calculated according to the acquired image.
Thereafter, in step S140, the coordinates of the measurement object are compared with the measurement range of the physical measurement module. Specifically, during comparison, the edge coordinates of the area where the object to be measured is located are compared with the measurement range of the physical measurement module, whether all the objects to be measured are located within the measurement range of the physical measurement module is judged, and subsequent operations are performed according to the judgment result.
Specifically, in step S150, when at least a part of the coordinates of the measurement object is outside the measurement range of the physical measurement module, the position of the measurement object is adjusted, and the comparison is performed again.
Finally, in step S160, when the coordinates of the measurement object are in the measurement range of the physical measurement module, physical measurement is performed.
The measurement correction method and the system can correct the position of the target to be measured during physical measurement through the capacitive coupling lens of the optical measurement unit before measurement, solve the problem that the position of the target to be measured cannot be adjusted because the physical measurement unit is not provided with the lens in the prior art, effectively improve the accuracy of the measurement result of the physical measurement unit and simultaneously avoid damaging a chip to be measured.
Accordingly, referring to fig. 2, the present invention also provides a measurement coordinate correcting system, which includes: the device comprises a first data acquisition unit, a correction unit, a second data acquisition unit, a comparison unit, an adjustment unit and an execution unit.
The first data acquisition unit is used for acquiring a measurement range of a test area corresponding to a physical measurement module of the measurement system and coordinates of a geometric center of the measurement range.
According to an embodiment of the present invention, the measurement system has both an image-based measurement unit and a contact-based measurement unit, wherein the image-based measurement unit includes an optical lens, and the contact-based measurement unit includes a physical measurement module. Specifically, the physical measurement module is a probe measurement module, and the optical lens is a capacitive coupling lens. Specifically, the measurement range of the test area corresponding to the physical measurement module and the coordinates of the geometric center of the measurement range are preset and stored in the system, and can be obtained by retrieving data.
The correction unit is used for correcting an optical lens of the measuring system according to the acquired geometric center coordinates of the measuring range of the physical measuring module, so that the measuring range of the optical lens is consistent with the measuring range of the physical measuring module.
According to a specific embodiment of the present invention, the method for correcting the optical lens of the measurement system by the correction unit according to the acquired geometric center coordinates of the measurement range of the physical measurement module includes:
comparing the geometric center coordinate of the optical lens with the geometric center coordinate of the measurement range of the physical measurement module to see whether the two are coincident; and if the two measurement ranges are not coincident, adjusting the position of the optical lens until the geometric center coordinate of the optical lens is coincident with the geometric center coordinate of the measurement range of the physical measurement module.
According to an embodiment of the present invention, the method for the calibration unit to determine whether the geometric center coordinate of the optical lens coincides with the geometric center coordinate of the measurement range of the physical measurement module includes:
acquiring the geometric center coordinates (x) of the measurement range of the physical measurement module0,y0)；
Acquiring the geometric center coordinate (x) of the optical lens1,y1)；
Calculating the distance delta between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, wherein the calculation method comprises the following steps:
Δ＝(x1-x0)2+(y1-y0)2；
if delta is 0, the geometric center coordinate of the optical lens is coincident with the geometric center coordinate of the measurement range of the physical measurement module, otherwise, the geometric center coordinate of the optical lens is not coincident with the geometric center coordinate of the measurement range of the physical measurement module.
The second data acquisition unit is used for acquiring the coordinates of the geometric center of the object to be measured by adopting the corrected optical lens. Namely, a real-time image of the object to be measured is acquired through the corrected optical lens, and the coordinate range of the area and the geometric center coordinate corresponding to the area are calculated according to the acquired image.
The comparison unit is used for comparing the coordinates of the measuring object with the measuring range of the physical measuring module. Specifically, during comparison, the edge coordinates of the area where the object to be measured is located are compared with the measurement range of the physical measurement module, whether all the objects to be measured are located within the measurement range of the physical measurement module is judged, and subsequent operations are performed according to the judgment result.
The adjusting unit is used for adjusting the position of the measuring object when at least part of coordinates of the measuring object is out of the measuring range of the physical measuring module, and then comparing again.
The execution unit is used for executing physical measurement when the coordinates of the measurement object are in the measurement range of the physical measurement module.
According to an embodiment of the present invention, the measurement system has both an image-based measurement unit and a contact-based measurement unit, wherein the image-based measurement unit includes an optical lens, and the contact-based measurement unit includes a physical measurement module.
According to a specific embodiment of the present invention, the physical measurement module is a probe measurement module.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, therefore, the scope of the present invention shall be determined by the appended claims.
Claims (8)
1. A method of measuring coordinate correction, the method comprising: acquiring a measurement range of a test area corresponding to a physical measurement module of a measurement system and coordinates of a geometric center of the measurement range, wherein the coordinates of the geometric center of the measurement range and the measurement range are preset and stored in the measurement system;
comparing the geometric center coordinate of the optical lens with the geometric center coordinate of the measuring range of the physical measuring module to see whether the two are overlapped; if the two geometric center coordinates do not coincide, adjusting the position of the optical lens until the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module;
acquiring the geometric center coordinate of the object to be measured by adopting the corrected optical lens;
comparing the coordinates of the measurement object with the measurement range of the physical measurement module;
when at least part of coordinates of the measuring object are out of the measuring range of the physical measuring module, adjusting the position of the measuring object, and then comparing again;
performing a physical measurement when the coordinates of the measurement object are in a measurement range of the physical measurement module.
2. The method according to claim 1, wherein the method for determining whether or not the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module comprises:
acquiring the geometric center coordinates (x) of the measurement range of the physical measurement module0,y0) (ii) a Acquiring the geometric center coordinate (x) of the optical lens1,y1) (ii) a Calculating the distance between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, wherein the calculation method comprises the following steps: Δ ═ x1-x0)2+(y1-y0)2(ii) a If delta is 0, the geometric center coordinate of the optical lens is coincident with the geometric center coordinate of the measurement range of the physical measurement module, otherwise, the geometric center coordinate of the optical lens is not coincident with the geometric center coordinate of the measurement range of the physical measurement module.
3. The method according to claim 1, wherein the measurement system has both an image-based measurement unit including an optical lens and a contact-based measurement unit including a physical measurement module.
4. The measurement coordinate correction method according to claim 3, wherein the physical measurement module is a probe measurement module.
5. A measurement coordinate correction system, the system comprising:
the device comprises a first data acquisition unit, a second data acquisition unit and a measurement unit, wherein the first data acquisition unit is used for acquiring a measurement range of a test area corresponding to a physical measurement module of a measurement system and coordinates of a geometric center of the measurement range, and the coordinates of the geometric center of the measurement range and the geometric center of the measurement range are preset and stored in the measurement system;
the correction unit is used for comparing the geometric center coordinate of the optical lens with the geometric center coordinate of the measurement range of the physical measurement module to see whether the two coordinates are overlapped; if the two geometric center coordinates do not coincide, adjusting the position of the optical lens until the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module; the second data acquisition unit is used for acquiring the coordinates of the geometric center of the object to be measured by adopting the corrected optical lens;
a comparison unit for comparing the coordinates of the measurement object with the measurement range of the physical measurement module;
the adjusting unit is used for adjusting the position of the measuring object and comparing again when at least part of coordinates of the measuring object is out of the measuring range of the physical measuring module;
and the execution unit is used for executing physical measurement when the coordinates of the measurement object are in the measurement range of the physical measurement module.
6. The system according to claim 5, wherein the method for the calibration unit to determine whether the geometric center coordinates of the optical lens coincide with the geometric center coordinates of the measurement range of the physical measurement module is:
acquiring the geometric center coordinates (x) of the measurement range of the physical measurement module0,y0) (ii) a Acquiring the geometric center coordinate (x) of the optical lens1,y1) (ii) a Calculating the distance between the geometric center coordinate of the optical lens and the geometric center coordinate of the measurement range of the physical measurement module, wherein the calculation method comprises the following steps: Δ ═ x1-x0)2+(y1-y0)2；
If delta is 0, the geometric center coordinate of the optical lens is coincident with the geometric center coordinate of the measurement range of the physical measurement module, otherwise, the geometric center coordinate of the optical lens is not coincident with the geometric center coordinate of the measurement range of the physical measurement module.
7. The system of claim 5, wherein the measurement system has both an image-based measurement unit and a contact-based measurement unit, wherein the image-based measurement unit comprises an optical lens and the contact-based measurement unit comprises a physical measurement module.
8. The measurement coordinate correction system of claim 7, wherein the physical measurement module is a probe measurement module.
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| CN201811605002.8A CN109579703B (en) | 2018-12-26 | 2018-12-26 | Method and system for correcting measurement coordinates |
| PCT/CN2019/083870 WO2020133837A1 (en) | 2018-12-26 | 2019-04-23 | Measurement coordinate correction method and system |
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| CN109579703B (en) * | 2018-12-26 | 2020-06-16 | 深圳市华星光电半导体显示技术有限公司 | Method and system for correcting measurement coordinates |
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| US4714339B2 (en) * | 1986-02-28 | 2000-05-23 | Us Commerce | Three and five axis laser tracking systems |
| JP5509013B2 (en) * | 2010-09-17 | 2014-06-04 | 株式会社ミツトヨ | CMM measuring data correction method and CMM |
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| TWM502849U (en) * | 2015-01-12 | 2015-06-11 | Hauman Technologies Corp | Equipment capable of automatically tuning point measurement position according to images of object under test and probe tip |
| CN106885515A (en) * | 2017-03-01 | 2017-06-23 | 苏州光照精密仪器有限公司 | A kind of image measuring method, device and system |
| CN108663380A (en) * | 2017-03-29 | 2018-10-16 | 吉而特科技有限公司 | Probe card detection method and system |
| CN109579703B (en) * | 2018-12-26 | 2020-06-16 | 深圳市华星光电半导体显示技术有限公司 | Method and system for correcting measurement coordinates |
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| CN101006558A (en) * | 2004-09-14 | 2007-07-25 | 尼康股份有限公司 | Correction method and exposure device |
| CN102901473A (en) * | 2011-07-27 | 2013-01-30 | 鸿富锦精密工业（深圳）有限公司 | Correction system and method for measuring coordinate |
| CN102909728A (en) * | 2011-08-05 | 2013-02-06 | 鸿富锦精密工业（深圳）有限公司 | Vision correcting method of robot tool center point |
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