WO2020133096A1 - Mems陀螺仪及包含该陀螺仪的电子设备 - Google Patents

Mems陀螺仪及包含该陀螺仪的电子设备 Download PDF

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WO2020133096A1
WO2020133096A1 PCT/CN2018/124469 CN2018124469W WO2020133096A1 WO 2020133096 A1 WO2020133096 A1 WO 2020133096A1 CN 2018124469 W CN2018124469 W CN 2018124469W WO 2020133096 A1 WO2020133096 A1 WO 2020133096A1
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mass
mems gyroscope
hollow ring
hollow
elastic
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PCT/CN2018/124469
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French (fr)
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孟珍奎
刘雨微
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瑞声声学科技(深圳)有限公司
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Priority to PCT/CN2018/124469 priority Critical patent/WO2020133096A1/zh
Publication of WO2020133096A1 publication Critical patent/WO2020133096A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology

Definitions

  • the present invention relates to a rotation-sensitive device using a vibrating component, and relates to a MEMS gyroscope and an electronic device including the gyroscope.
  • MEMS gyroscope is a silicon micro-electromechanical gyroscope.
  • MEMS Micro-Electro-Mechanical Systems
  • MEMS refers to a micro-electromechanical system that integrates mechanical elements, micro sensors, micro actuators, signal processing and control circuits, interface circuits, communications and power supplies. .
  • the Chinese patent with the announcement number "101907637” discloses a three-axis differential accelerometer (a kind of MEMS gyroscope), which is used to generate the structural layer of each component including a mass, an elastic element, a first moving electrode, The first static electrode and the first fixed block.
  • the mass is parallel to the first silicon substrate, and is suspended on the first silicon substrate by connecting with the elastic element.
  • the elastic element supports the mass to move in a direction parallel to the first silicon substrate, that is, the mass is limited to its
  • the movement in the direction of the surface is used to detect acceleration in the X-axis direction and Y-axis direction (see paragraph 46 of the patent specification).
  • the elastic element is respectively connected to the four corners of the square mass, and each elastic element corresponding to each corner includes two serpentine elastic arms, the elastic deformation direction of which is parallel to the first axis direction and the second axis direction, one end of the elastic arm It is connected to the corner of the mass, and one end is fixed, connected to the first silicon substrate, or fixedly connected to a fixing member located on the first silicon substrate (see paragraph 48 of the patent specification).
  • the accelerometer can limit the movement of the mass in the X-axis and Y-axis directions by setting meander-shaped elastic arms in the X-axis direction and the Y-axis direction and obtain certain sensitivity, but the mass movement on the diagonal Not flexible enough.
  • One of the objects of the present invention is to provide a MEMS gyroscope that can make the mass move not only flexibly in the X-axis and Y-axis directions, but also move flexibly on the diagonal of the mass.
  • the MEMS gyroscope of the present invention includes a mass block, and an elastic member is disposed at four corners of the mass block, and the elastic member is disposed in a diagonal direction of the mass block.
  • the elastic member is an elastic body formed by arranging a plurality of elastic hollow loops along the diagonal direction of the mass.
  • the elastic member composed of a plurality of hollow rings is integrally formed with the mass block in an integrated manner.
  • the mass block and the elastic member are integrally formed of silicone material.
  • the elastic member is composed of a four-stage hollow ring, and the first hollow ring, the second hollow ring, the third hollow ring and the second hollow ring are sequentially arranged from inside to outside along the diagonal of the mass.
  • the fourth hollow ring is composed of a four-stage hollow ring, and the first hollow ring, the second hollow ring, the third hollow ring and the second hollow ring are sequentially arranged from inside to outside along the diagonal of the mass.
  • the size of the first hollow ring is smaller than the size of the second hollow ring, and the sizes of the second hollow ring, the third hollow ring and the fourth hollow ring are successively reduced gradually .
  • the elastic members at the four corners of the mass are those having the same shape and structure.
  • the MEMS gyroscope further includes a fixing frame, the fixing frame is a rectangular ring structure, the mass is arranged in a rectangular structure and is located inside the fixing frame, and one end of the elastic member is arranged on the The other end of the corner of the mass is fixed to the inner corner of the fixing frame.
  • the fixing frame includes a plurality of static electrodes disposed between each adjacent two elastic members, the mass includes a moving electrode corresponding to the static electrode in one-to-one correspondence, the static electrode, the moving electrode All have a flat structure.
  • the second object of the present invention is to provide an electronic device using the gyroscope of the present invention for position sensing, displacement sensing or motion state sensing, and the electronic device using the gyroscope of the present invention has higher sensing accuracy.
  • the beneficial effects of the present invention are as follows: 1.
  • the elastic member is arranged in the diagonal direction of the mass, so that the mass can be on the X axis, Y axis and diagonal More flexible movement; 2.
  • the elastic member is set as an elastic body formed by arranging a number of elastic hollow rings along the diagonal direction of the mass block. The elastic member adopts this special deformed shape to better facilitate quality
  • the block moves on the X-axis, Y-axis and diagonals; in addition, it should be understood that the second point is a preferred improvement for achieving one of the objects of the present invention.
  • FIG. 1 is a front view of the MEMS gyroscope of the present invention.
  • FIG. 2 is a schematic isometric view of FIG. 1 from above and below.
  • the MEMS gyroscope of this embodiment is mainly composed of a mass 1 and a fixed frame 2.
  • the four corners of the mass are provided with elastic members 12 along the diagonal direction.
  • four of the mass The side has a comb-shaped moving electrode 11 extending outwards, and the inner side of the fixing frame 2 extends inward to form a static electrode 21 that forms a capacitive effect with the moving electrode, and each moving electrode 11 is between two adjacent static electricity
  • the static electrode and the moving electrode are both flat-shaped structures.
  • the mass 1 and the fixing frame 2 are elastically connected by an elastic member 12, and the mass can be positioned on the X axis and Y relative to the fixing frame.
  • the movement on the axis changes the capacitance by changing the distance between the two static electrodes and the moving electrode, thereby sensing the movement and position change of the X-axis or Y-axis of the electronic device.
  • one end of the elastic member 12 is disposed at the corner of the mass 1 and the other end is fixed to the inner corner of the fixing frame 2.
  • the elastic The other end of the component 12 may not be provided on the fixing frame, for example, it may be fixed on the substrate supporting the mass.
  • the structure of this embodiment can be applied to a two-axis MEMS gyroscope that only needs to detect changes in the X-axis and Y-axis; of course, when the Z-axis detection structure is added, it can also be applied to detect the X-axis, Y-axis and Y-axis. Z-axis three-axis MEMS gyroscope; or other gyroscopes. Therefore, the structure of this embodiment is not limited to the application of the two-axis MEMS gyroscope.
  • the elastic member 12 in this embodiment is formed by arranging four hollow rings with certain elasticity along the diagonal direction of the mass, and is formed by using silicone material and the mass together.
  • the four parallel The ring segments of the contact parts of the rings partially overlap, and part of the rings in contact with the mass overlap the mass.
  • the elastic member adopts an elastic body (four in this embodiment) formed by arranging a plurality of hollow rings along the diagonal direction of the mass, which is just a kind obtained under the concept of the present invention Preferred embodiment; this embodiment can facilitate mass movement on the X-axis, Y-axis, and diagonals, compared to providing elastic members only on the diagonal.
  • elastic members of other structures can be used, as long as they are arranged on the diagonal of the mass, especially when the main deformation direction is arranged on the diagonal of the mass, the mass can be placed on the X axis, The Y axis and the diagonal line move flexibly. Therefore, they should be regarded as within the protection scope of the present invention.
  • the use of four hollow rings is only a preferred embodiment of the present invention. In other embodiments, the use of three, two, or even one hollow ring should be within the scope of the present invention Inside. Finally, as for the shape of the hollow ring, it can be adaptively changed as needed.
  • the four hollow rings of the elastic member 12 the first hollow ring 121, the second hollow ring 122, the third hollow ring 123, and the fourth hollow ring 124, whose shape, size, and positional relationship are A better design made according to actual needs, namely: the first hollow ring 121, the second hollow ring 122, the third hollow ring 123 and the fourth hollow ring 124 along the diagonal of the mass 1 Arranged in order from inside to outside, the size of the first hollow ring 121 is smaller than the size of the second hollow ring 122, the sizes of the second hollow ring 122, the third hollow ring 123 and the fourth hollow ring 124 are successively The level becomes smaller.
  • the elastic members 12 at the four corners of the mass 1 in this embodiment adopt elastic members with the same shape and structure, which should be understood as an optimal embodiment, generally the same or for some specific needs It is also within the scope of protection of the present invention to design the elastic elements on each corner into different structures.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

一种MEMS陀螺仪和包含该MEMS陀螺仪的电子设备。陀螺仪包括质量块（1），质量块（1）的四角设置有弹性部件（12），弹性部件（12）设置在质量块（1）的对角线方向上，尤其是弹性部件（12）的主形变方向大体上设置在质量块（1）的对角线上。通过将弹性部件（12）设置在质量块（1）的对角线方向上，使得质量块（1）能够在X轴、Y轴以及对角线上较为灵活的移动。电子设备应用该陀螺仪进行位置感应、位移感应或者运动状态感应，可获得更高的感应精度。

Description

MEMS陀螺仪及包含该陀螺仪的电子设备 【技术领域】
本发明涉及使用振动部件的转动敏感装置，具有涉及MEMS陀螺仪以及包含该陀螺仪的电子设备。
【背景技术】
MEMS陀螺仪即硅微机电陀螺仪，MEMS(Micro-Electro-Mechanical Systems)是指集机械元素、微型传感器、微型执行器以及信号处理和控制电路、接口电路、通信和电源于一体的微型机电系统。
公告号为“101907637”的中国专利公开了一种三轴差分加速度计(MEMS陀螺仪中的一种)，其用于生成各元器件的结构层包括质量块，弹性元件、第一动电极、第一静电极和第一固定块。质量块与第一硅基底平行相对，通过与弹性元件相连而悬置于第一硅基底之上，弹性元件支承质量块在平行于第一硅基底的方向上运动，即质量块被限制在其表面的方向上运动，用以检测X轴方向和Y轴方向的加速度(参见该专利说明书第46段)。
该弹性元件分别连接方形质量块的四个角，每个角对应的各弹性元件包括两个蜿蜒状的弹性臂，其弹性变形方向分别平行第一轴方向和第二轴方向，弹性臂一端与质量块的角部相连，一端被固定、连接在第一硅基底上，或固定连接在位于第一硅基底上的固定件上(参见该专利说明书第48段)。
该加速度计通过在X轴方向和Y轴方向设置蜿蜒状弹性臂很好的将质量块限制在X轴和Y轴方向移动并获得一定的灵敏性，但质量块在对角线上的移动不够灵活。
【发明内容】
本发明的目的之一在于提供一种MEMS陀螺仪，可以使得质量块不但可以在X轴和Y轴方向较为灵活的移动，同时在质量块的对角线上仍然可以较为灵活的移动。
本发明的MEMS陀螺仪，包括质量块，所述质量块的四角设置有弹性部件，所述弹性部件设置在所述质量块的对角线方向上。
作为本发明的优选，弹性部件为由若干具有弹性的空心环圈沿所述质量块对角线方向排列形成的弹性体。
作为本发明的优选，所述由若干空心环圈组成的弹性部件通过一体成型的方式与所述质量块一体成型。
作为本发明的优选，所述质量块与弹性部件采用硅胶材料一体成型。
作为本发明的优选，所述弹性部件由四级空心环圈组成，沿所述质量块对角线由内向外依次设置为第一空心环圈、第二空心环圈、第三空心环圈和第四空心环圈。
作为本发明的优选，所述第一空心环圈尺寸小于所述第二空心环圈尺寸，所述第二空心环圈、第三空心环圈和第四空心环圈的尺寸依次逐级变小。
作为本发明的优选，所述质量块四角的弹性部件为形状以及构造完全相同的弹性部件。
作为本发明的优选，所述MEMS陀螺仪还包括固定架，所述固定架为矩形环形结构，所述质量块被设置为矩形结构并位于所述固定架内侧，所述弹性部件一端设置在所述质量块的角上、其另一端被固定在所述固定架的内侧角上。
作为本发明的优选，所述固定架包括设置于每相邻两弹性部件之间的若干静电极，所述质量块包括与所述静电极一一对应的动电极，所述静电极、动电极均为平板状结构。
本发明的目的之二在于提供一种电子设备，该电子设备应用本发明的陀螺仪进行位置感应、位移感应或者运动状态感应，应用本发明陀螺仪的的电子设备感应精度更高。
本发明的有益效果是：本发明的MEMS陀螺仪主要改进点在于：1、将弹性部件设置在质量块的对角线方向上，从而使得质量块能够在X轴、Y轴以及对角线上较为灵活的移动；2、将该弹性部件设置成由若干具有弹性 的空心环圈沿所述质量块对角线方向排列形成的弹性体，弹性部件采用该特殊的形变形状能够更好的便于质量块在X轴、Y轴以及对角线上移动；另外，应当理解是，第2点是实现本发明目的之一的一种优选的改进。
【附图说明】
图1是本发明MEMS陀螺仪的主视图。
图2是图1的上下等轴测示意图。
其中，1、质量块，11、动电极，12、弹性部件，121、第一空心环圈，122、第二空心环圈，123、第三空心环圈，124、第四空心环圈，2、固定架，21、静电极。
【具体实施方式】
下面结合图1和图2对本发明作详细描述。
如图1、图2所示，本实施例的MEMS陀螺仪主要由质量块1、固定架2构成，质量块的四个角沿对角线方向上设置弹性部件12，其中，质量块的四侧边具有向外延伸而出、呈梳齿状的动电极11，固定架2内侧向内延伸形成与所述动电极形成电容效应的静电极21，每一动电极11介于两相邻的静电极21之间，且与静电极21平行相对，静电极、动电极均为平板状结构，质量块1与固定架2通过弹性部件12弹性连接，质量块相对于固定架能够在X轴、Y轴上移动，通过改变两个静电极与动电极之间的距离来改变电容，从而感应出电子设备X轴或Y轴的运动与位置变化。本实施例中，弹性部件12一端设置在所述质量块1的角上、其另一端被固定在所述固定架2的内侧角上是一种优选的实施方式，在其他实施方式中，弹性部件12的另一端可以不设置在固定架上，例如固定在支撑质量块的基板上也是可以的。
还应当理解的是，本实施的结构可以应用到只需检测X轴和Y轴变化的二轴MEMS陀螺仪上；当然，外加Z轴检测结构时，也可以应用于检测X轴、Y轴和Z轴的三轴MEMS陀螺仪；或者其他陀螺仪中。因此，本实施例的结构不限于二轴MEMS陀螺仪的应用。
本实施例中的弹性部件12是由四个具有一定弹性的空心环圈沿质量 块对角线方向排列形成的，并采用硅胶材料与质量块一体成型，成型时，为了便于制造，并列的四个环圈接触部分的环形段有部分重叠，与质量块接触的环圈也有一部分与质量块重合。
另外，应当理解，首先，弹性部件采用由若干空心环圈沿所述质量块对角线方向排列形成的弹性体(本实施例为4个)，只是一种在本发明构思下得到的一种较佳的实施方式；该实施方式相对于仅在对角线上设置弹性部件，能够更好的便于质量块在X轴、Y轴以及对角线上移动。当然在其他实施方式中可以采用其他结构的弹性部件，只要将其设置在质量块的对角线上，尤其是主形变方向设置在质量块的对角线上也是能够使质量块在X轴、Y轴以及对角线上进行灵活移动的，因此，均应该认定为在本发明的保护范围之内。其次，采用四个空心环圈也只是本发明的一种较佳的实施方式，在其他实施方式中，例如采用三个、两个、甚至一个空心环圈等均应该在本发明的保护范围之内。最后，至于空心环圈的形状可以根据需要作出适应性的变化。
本实施例中弹性部件12的四个空心环圈：第一空心环圈121、第二空心环圈122、第三空心环圈123和第四空心环圈124，其形状、大小和位置关系是根据实际需要作出的一种较优的设计，即：第一空心环圈121、第二空心环圈122、第三空心环圈123和第四空心环圈124沿所述质量块1对角线由内向外依次排列，第一空心环圈121尺寸小于所述第二空心环圈尺寸122，所述第二空心环圈122、第三空心环圈123和第四空心环圈124的尺寸依次逐级变小。
最后，为了获得最佳的感应效果，本实施例质量块1四角的弹性部件12采用形状以及构造完全相同的弹性部件，应当理解为一种最佳的实施方式，大体相同或者为了一些特定的需要将各角上的弹性元件设计为不同结构也应当归属于本发明的保护范围之内。
以上所述的仅是本发明的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出改进，但这些均属于本发明的保护范围。

Claims (10)

  1. MEMS陀螺仪，包括质量块，所述质量块的四角设置有弹性部件，其特征在于：所述弹性部件设置在所述质量块的对角线方向上。
  2. 根据权利要求1所述的MEMS陀螺仪，其特征在于：所述弹性部件为由若干具有弹性的空心环圈沿所述质量块对角线方向排列形成的弹性体。
  3. 根据权利要求2所述的MEMS陀螺仪，其特征在于：所述由若干空心环圈组成的弹性部件通过一体成型的方式与所述质量块一体成型。
  4. 根据权利要求1-3任一所述的MEMS陀螺仪，其特征在于：所述质量块与弹性部件采用硅胶材料一体成型。
  5. 根据权利要求2所述的MEMS陀螺仪，其特征在于：所述弹性部件由四级空心环圈组成，沿所述质量块对角线由内向外依次设置为第一空心环圈、第二空心环圈、第三空心环圈和第四空心环圈。
  6. 根据权利要求5所述的MEMS陀螺仪，其特征在于：所述第一空心环圈尺寸小于所述第二空心环圈尺寸，所述第二空心环圈、第三空心环圈和第四空心环圈的尺寸依次逐级变小。
  7. 根据权利要求1所述的MEMS陀螺仪，其特征在于：所述质量块四角的弹性部件为形状以及构造完全相同的弹性部件。
  8. 根据权利要求1所述的MEMS陀螺仪，其特征在于：所述MEMS陀螺仪还包括固定架，所述固定架为矩形环形结构，所述质量块被设置为矩形结构并位于所述固定架内侧，所述弹性部件一端设置在所述质量块的角上、其另一端被固定在所述固定架的内侧角上。
  9. 根据权利要求8所述的MEMS陀螺仪，其特征在于：所述固定架包括设置于每相邻两弹性部件之间的若干静电极，所述质量块还包括与所述静电极一一对应的动电极，所述静电极、动电极均为平板状结构。
  10. 电子设备，其特征在于：该电子设备包括如权利要求1-9任一所述的MEMS陀螺仪。
PCT/CN2018/124469 2018-12-27 2018-12-27 Mems陀螺仪及包含该陀螺仪的电子设备 WO2020133096A1 (zh)

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Publication number Priority date Publication date Assignee Title
US20030110858A1 (en) * 2001-12-14 2003-06-19 Samsung Electronics Co., Ltd. MEMS gyroscope having mass vibrating vertically on substrate
CN1598597A (zh) * 2004-07-19 2005-03-23 西北工业大学 单质量平板三轴微机械加速度计
CN101907637A (zh) * 2010-06-29 2010-12-08 瑞声声学科技(深圳)有限公司 三轴差分加速度计及其制作方法
CN201828268U (zh) * 2010-09-28 2011-05-11 深迪半导体(上海)有限公司 一种超小型mems陀螺仪传感器
CN103910323A (zh) * 2013-01-09 2014-07-09 先技股份有限公司 微机电装置
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CN203716054U (zh) * 2014-01-22 2014-07-16 成都市大通路桥机械有限公司 一种弹性环减震支座装置
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