WO2020126153A1 - Procédé pour fabriquer un capteur de pression résistant au givre et capteur de pression résistant au givre - Google Patents

Procédé pour fabriquer un capteur de pression résistant au givre et capteur de pression résistant au givre Download PDF

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Publication number
WO2020126153A1
WO2020126153A1 PCT/EP2019/078512 EP2019078512W WO2020126153A1 WO 2020126153 A1 WO2020126153 A1 WO 2020126153A1 EP 2019078512 W EP2019078512 W EP 2019078512W WO 2020126153 A1 WO2020126153 A1 WO 2020126153A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
pressure sensor
channel
carrier substrate
pressure chamber
Prior art date
Application number
PCT/EP2019/078512
Other languages
German (de)
English (en)
Inventor
Thorsten-Kai Janitza
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2020126153A1 publication Critical patent/WO2020126153A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0654—Protection against aggressive medium in general against moisture or humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/24—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid specially adapted for measuring pressure in inlet or exhaust ducts of internal-combustion engines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N2560/00—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics
    • F01N2560/08—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics the means being a pressure sensor

Definitions

  • Pressure sensors are used, for example, in the automotive industry to measure
  • Air pressures used in the intake tract There will be absolute pressure sensors or
  • Differential pressure sensors used. Differential pressure sensors for determining the fill content of particle filters in the exhaust system are known, for example.
  • a pressure sensor typically consists of a pressure sensor element that is applied to a carrier substrate, which in turn is arranged in a housing.
  • Such a pressure sensor is known for example from EP 1 521 952 B1.
  • the known pressure sensors can be produced by arranging a pressure sensor element on a first side of a carrier substrate penetrated by a pressure channel above the pressure channel and a first housing part made of plastic, for example, which has a cavity and a pressure connection connected to the cavity, on one of the pressure sensor element facing away from the second side of the carrier substrate is arranged such that the cavity except for access via the
  • the pressure chamber is therefore an arbitrarily designed space within a
  • Sensor housing which is interposed in a pressure transmission line between a pressure connection of the sensor housing and a pressure channel of a carrier substrate.
  • a pressure chamber is referred to in EP 1 521 952 B1, for example, as the third housing space.
  • liquids such as water or aqueous solutions (e.g. exhaust gas condensates) can penetrate the pressure connection and condense in the pressure chamber, for example from the vapor phase.
  • the penetrated and condensed liquid can be at ambient temperatures below the corresponding
  • Freeze point freeze which can freeze the pressure chamber and the pressure channel, so that it is no longer possible to measure the pressure present. also Due to the specific surface tension, the penetrated liquid can remain in the pressure chamber or in the pressure channel, which can also lead to icing if the ambient temperature is correspondingly low.
  • the pressure sensor be installed with the pressure channel pointing downwards in relation to the direction of gravitation (to prevent liquids from draining off)
  • the invention describes a manufacturing method for manufacturing a pressure sensor that is ultimately better armed against the risk of icing.
  • a carrier substrate for example a printed circuit board, is provided in a known manner.
  • the carrier substrate has a pressure channel on the as
  • a first housing part for example made of plastic, which has a cavity and a pressure connection connected to the cavity, is arranged on a second side of the carrier substrate facing away from the pressure sensor element in such a way that the cavity seals one except for access via the pressure connection and the pressure channel Pressure chamber of the pressure sensor forms.
  • a physical quantity is first determined in empirical tests, which represents a volume of a maximum amount of a condensate that forms in the pressure chamber during normal operation.
  • a physical quantity that represents a volume of a maximum amount of condensate that forms in the pressure chamber during normal operation can be understood to mean, for example, a volume size or a quantity size or another size from which the volume of the condensate can be calculated. This size can, for example, in particular also be the total volume of the condensate formed during operation.
  • an operating state is assumed which usually arises with regard to the pressure profile, the moisture content and the temperature of the medium supplied to the pressure sensor and the ambient temperature of the pressure sensor with regard to the intended use of the pressure sensor. For this purpose, average values or certain interval ranges for physical quantities can be used
  • an operating state can be assumed here when the pressure sensor is used in a motor vehicle.
  • this can be, for example
  • Operating state of the pressure sensor acts as experience has shown in the air duct of an intake tract of the motor vehicle during operation.
  • it can be a temperature range of outside air from -20 ° C to 50 ° C and a relative
  • the humidity of the medium supplied is between 20% and 90% humidity and an operating temperature of 5 ° to 30 °.
  • At least one geometric parameter of the pressure chamber is predefined for the maximum amount of condensate that forms in the pressure chamber in normal operation such that, depending on the orientation of the pressure sensor, relative to an effective one
  • a geometric parameter of the pressure chamber is to be understood to mean any geometric variable which influences an empty volume or partial volume or a wall area piece of the pressure chamber.
  • this can be a length size, an area size or a volume size of an object arranged in or on the pressure chamber or an inner wall of the pressure chamber.
  • the invention relates to an improved pressure sensor produced by the method, which is made more robust with respect to icing.
  • the pressure chamber can advantageously be designed such that the condensate does not wet the pressure channel depending on the installation position of the pressure sensor in the vehicle and icing condensate does not clog the pressure port.
  • the carrier substrate is provided on its second side facing away from the pressure sensor element with a channel piece which surrounds the pressure channel and communicates with it and projects into the pressure chamber.
  • the at least one geometric parameter is the distance of an end of the channel piece that is directed away from the carrier substrate from the carrier substrate. This distance can be specified by the design of the channel piece so that when the pressure sensor is aligned relative to the direction of gravity, in which the
  • the fill level of the maximum condensate accumulating in the pressure chamber in the space above the second side of the carrier substrate in a direction perpendicular to the carrier substrate is smaller than the predetermined distance. If the volume of the normal operation in the
  • the filling level of the maximum condensate that accumulates during operation in the pressure chamber in the space above the second side of the carrier substrate can be calculated therefrom. It is thus possible to make the distance of the end of the channel piece facing away from the carrier substrate from the carrier substrate sufficiently large during manufacture so that the fill level advantageously remains below this distance and no liquid gets into the pressure channel.
  • a circumferential outer jacket of the channel piece can advantageously also be conical.
  • a size for a partial volume of the pressure chamber is specified as the at least one geometric parameter, which partial volume is defined as a maximum filling volume which, when the pressure sensor is aligned with the carrier substrate, is parallel to the gravitational direction with condensate can be filled to a maximum before the condensate enters the pressure channel, the size for the partial volume of the
  • Pressure chamber is specified such that the size for the partial volume is larger than the physical size V k .
  • the required partial volume of the pressure chamber can
  • the first housing part can be introduced, for example, entirely or partially as a bulge in the inner contour of the cavern of the first housing part, which is particularly simple if the first housing part is produced as a plastic part.
  • the provision of a duct piece according to the first exemplary embodiment can be combined with the configuration of the partial volume according to the second exemplary embodiment in order to ensure that the condensate does not wet the pressure duct when the pressure sensor is installed vertically and horizontally in the vehicle and icing condensate does not clog the pressure port. Since the vertical and the horizontal installation position differ by an angle of 90 °, this combined measure can also cover all intermediate angles of a pressure sensor inclined by an angle between 0 ° and 90 °. In this particularly advantageous case, therefore, regardless of the orientation of the pressure sensor relative to the effective direction of gravity, a condensate that forms in the pressure chamber during operation cannot get into the pressure channel.
  • a pressure sensor produced by the method according to the invention is also advantageous.
  • the pressure sensor is manufactured in such a way that a central axis of a supply channel of the pressure connection
  • a partial volume of the pressure chamber can be designed such that when the pressure sensor is aligned with the carrier substrate parallel to the direction of gravity, the partial volume can be filled with condensate up to a lower edge of the supply channel in the pressure connection before the condensate enters the Pressure channel arrives. This makes it easier to drain the condensate from the pressure chamber and prevents icing even better.
  • the first housing part is designed in the transition region between the pressure chamber and the feed channel with an inner contour that tapers conically in the direction of the pressure connection, an improved drainage of the condensate from the pressure chamber can advantageously be achieved.
  • FIG. 1 shows a plan view of a pressure sensor known in the prior art
  • FIG. 5 shows a first exemplary embodiment of a pressure sensor according to the invention
  • FIG. 6 shows a second exemplary embodiment of a pressure sensor according to the invention
  • Fig. 7 shows a third embodiment of a pressure sensor according to the invention.
  • Figure 1 shows a plan view of a known pressure sensor 1 of the prior art.
  • the pressure sensor 1 can be, for example, one
  • a carrier substrate 2 for example a printed circuit board
  • the carrier substrate 2 may previously have been provided with a pressure channel 23 in the form of an opening in the printed circuit board, for example a bore.
  • the pressure sensor element 3 can, for example, as a silicon chip with a
  • the pressure sensor element 3 can, for example, be electrically contacted with the carrier substrate 2 by means of bond wires 24.
  • a frame 16 which surrounds the pressure sensor element 2 and is filled with a gel 17 can be applied to the first side 21 of the carrier substrate 2. Gel 17 preferably covers that
  • the carrier substrate 2 equipped in this way is then introduced into a housing.
  • the housing can have a first housing part 11 and a second housing part 12.
  • the two housing parts 1 1 and 12 can be made, for example, as half parts made of plastic.
  • the first housing part 11 can have a cavity 15.
  • the second housing part 12 can have a further cavity 19.
  • the first housing part 11 can be mounted over the second side 22 of the carrier substrate 2, so that the pressure channel 23 opens into the cavity 15.
  • the first housing part 11 has a pressure connection 6.
  • the pressure connection can comprise a pressure connection in which a supply channel 61 runs.
  • the second housing part 12 can have a further cavity 19.
  • Housing part 12 can be mounted over the first side 21 of the carrier substrate 2, so that the pressure sensor element 3 is accommodated in the further cavity 19.
  • the second housing part 12 can have a further pressure connection 7.
  • pressure connection 7 can comprise a pressure connection, in which a further feed channel (not shown) runs.
  • the housing part 12 forms the further cavity 19 a sealed second pressure chamber 14 which can be acted upon by a second pressure via the further pressure connection 7.
  • This second pressure acts in the second pressure chamber 14 via the gel 17 on the side of the measuring membrane of the pressure sensor element 3 facing away from the carrier substrate 2.
  • the pressure sensor 1 is designed as a differential pressure sensor, which detects a difference in the pressure present between the pressure connection 6 and the further pressure connection 7.
  • the second pressure connection 7 can also be omitted.
  • a reference pressure is encapsulated in the second pressure chamber 14 and the Pressure sensor acts as an absolute pressure sensor for detecting the pressure applied to the pressure connection 6.
  • liquids such as water or aqueous solutions can penetrate into the pressure chamber 13 via the pressure connection 6 and condense there as condensate 30 from the vapor phase.
  • the condensate 30 accumulating in the pressure chamber 13 has a volume V k .
  • the arrow G in FIG. 2 represents the direction of the acting gravitation.
  • an increase in the amount of condensate in the pressure chamber 13 leads to the condensate 30 finally penetrating into the pressure channel 23.
  • the condensate 30 now freezes at one
  • the pressure sensor element 3 can no longer detect the pressure.
  • Fig. 4 shows the problem with an inclined position of the pressure sensor 1 compared to the direction G of the gravitation.
  • the displaced volume V k which would not have penetrated into the pressure channel 23 if the carrier substrate 2 had been aligned parallel to the direction of gravity G, now also penetrates into the pressure channel 23 in this case due to the inclined position of the pressure sensor 1.
  • a method according to the invention for producing an improved pressure sensor 1 is described below with reference to FIGS. 5 to 7, the focus being on the changed manufacturing steps.
  • the method differs from the prior art first of all in that empirical tests determine a physical quantity V k which represents a volume of a maximum amount of condensate 30 that forms in pressure chamber 13 during normal operation.
  • V k represents a volume of a maximum amount of condensate 30 that forms in pressure chamber 13 during normal operation.
  • An operating state can be assumed as normal operation, which changes with regard to the pressure curve, the moisture content and the
  • Ambient temperature of the pressure sensor with regard to the intended use of the pressure sensor usually sets. For example, it can be one
  • the size, shape and properties of the pressure chamber 13 can be designed as a function of the determined physical variable V k .
  • at least one geometric parameter of the pressure chamber 13 is specified such that, depending on the orientation of the pressure sensor 1 relative to an effective gravitational direction G, a condensate 30 that does not form in the pressure chamber 13 during operation is not enters the pressure channel 23.
  • the carrier substrate 2 is before the assembly of the housing parts 11, 12 on its second side 22 facing away from the pressure sensor element 3 with a pressure channel 23 surrounding it and in connection therewith and projecting into the pressure chamber 13 Channel piece 40 provided.
  • the channel piece 40 virtually forms a snorkel, which in the
  • Pressure chamber 13 protrudes.
  • the outer jacket 42 of the channel piece 40 is preferably conical.
  • the distance a of an end 43 of the channel piece 40 that is directed away from the carrier substrate 2 from the carrier substrate 2 is specified as the at least one geometric parameter in such a way that when the pressure sensor 1 is oriented relative to the gravitational direction G, in which the pressure sensor element 3 facing away from the second side 22 of the carrier substrate 2
  • Direction of gravity G indicates a level h of the in operation in the
  • Pressure chamber 13 in the space above the second side 22 of the carrier substrate 2 maximally accumulating condensate 30 in a direction perpendicular to the carrier substrate 2 is smaller than the predetermined distance a.
  • the condensate can therefore
  • a size for a is defined as the at least one geometric parameter
  • Partial volume Vo of the pressure chamber 13 is specified.
  • This partial volume Vo is defined as a maximum filling volume that can be filled to the maximum with condensate 30 when the pressure sensor 1 is aligned with the carrier substrate 2 parallel to the direction of gravity G before the condensate 30 penetrates into the pressure channel 23. 6, this partial volume Vo is the internal volume in the pressure chamber 13 below the dashed line.
  • the partial volume of the pressure chamber 13 can be formed in particular by an additional arching on the inner contour of the cavern 15 of the first housing part 11, as is clear from the comparison of FIGS. 6 and 5.
  • condensate 30 can only penetrate into the pressure channel when the partial volume Vo is filled up to the dashed line, if one disregards the position of the pressure connection 6.
  • the size for the partial volume Vo of the pressure chamber 13 is predetermined such that the size for the partial volume Vo is larger than the physical size V k . Since the physical quantity V k represents the volume of a maximum amount of condensate 30 that forms in the pressure chamber 13 during normal operation, no condensate 30 will therefore be able to get into the pressure channel 23 with this orientation of the pressure sensor 1 relative to the gravitational direction G.
  • a central axis 62 of a supply channel 61 of the pressure connection 6 intersects a central axis 45 of the pressure channel 23, as is the case in FIG. 6, or if a central axis 62 of a
  • Feed channel 61 of the pressure connection 6 coincides completely with the central axis 45 of the pressure channel 23, as shown in FIG. 7. In both of these cases, one
  • Gravity direction G a partial volume Vo of the pressure chamber 13 can be filled with condensate 30 up to a lower edge 64 of the supply channel 61 in the pressure connection 6 before the condensate 30 reaches the pressure channel 6. In this case, the condensate 30 therefore flows out again via the pressure connection 6 before it can penetrate into the pressure channel 23.
  • the first housing part 21 is designed in the transition region between the pressure chamber 13 and the supply channel 61 with an inner contour 63 that tapers in the direction of the pressure connection 6. This enables easier drainage of the condensate 30 via the pressure channel 6 when the position of the pressure sensor 1 changes relative to the direction of gravitation G.
  • Pressure sensor element 3 facing away from the second side 22 of the carrier substrate 2

Abstract

L'invention concerne un capteur de pression résistant au givre et un procédé pour la fabrication d'un tel capteur de pression (1), présentant les étapes consistant : – à utiliser un substrat support (2) qui est traversé par un canal de pression (23), – à agencer un élément capteur de pression (3) sur un premier côté (21) du substrat support (2) sur le canal de pression (21) et – à fournir une première partie de boîtier (11), qui présente une cavité (15) et un raccord de pression (6) relié à la cavité (15), – à agencer la première partie de boîtier (11) sur un deuxième côté (22) du substrat support (2) opposé à celui de l'élément capteur de pression (3) de manière telle que la cavité (15) forme une chambre de pression (13) du capteur de pression (1) étanche, à l'exception d'un accès via le raccord de pression (6) et le canal de pression (23). Pour concevoir le capteur de pression de manière plus résistante au givre, selon l'invention, une grandeur physique (Vk) est déterminée dans des essais empiriques, laquelle grandeur représente un volume d'une quantité d'un condensat (30) se formant lors du fonctionnement normal dans la chambre de pression (13) et, en fonction de la grandeur physique (Vk) ainsi déterminée, au moins un paramètre géométrique de la chambre de pression (13) est prédéfinie de manière telle qu'en fonction de l'orientation du capteur de pression (1) par rapport à une direction active de la gravitation (G), un condensat (30) se formant lors du fonctionnement dans la chambre de pression (13) n'arrive pas dans le canal de pression (23).
PCT/EP2019/078512 2018-12-17 2019-10-21 Procédé pour fabriquer un capteur de pression résistant au givre et capteur de pression résistant au givre WO2020126153A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018221895.1 2018-12-17
DE102018221895.1A DE102018221895A1 (de) 2018-12-17 2018-12-17 Verfahren zur Herstellung eines vereisungsrobusten Drucksensors und vereisungsrobuster Drucksensor

Publications (1)

Publication Number Publication Date
WO2020126153A1 true WO2020126153A1 (fr) 2020-06-25

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PCT/EP2019/078512 WO2020126153A1 (fr) 2018-12-17 2019-10-21 Procédé pour fabriquer un capteur de pression résistant au givre et capteur de pression résistant au givre

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DE (1) DE102018221895A1 (fr)
WO (1) WO2020126153A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022001066A1 (fr) * 2020-06-29 2022-01-06 中国第一汽车股份有限公司 Système et procédé d'élimination d'eau destiné à des conduites à pression différentielle de piège à particules de moteur à essence

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08277733A (ja) * 1995-04-05 1996-10-22 Aisan Ind Co Ltd 内燃機関の吸気圧検出装置と吸気圧センサ
JP2001153748A (ja) * 1999-11-26 2001-06-08 Hitachi Ltd 圧力センサおよび自動車用内燃機関制御装置
EP1521952A1 (fr) 2002-05-25 2005-04-13 Robert Bosch Gmbh Dispositif de mesure de pression
EP1921433A2 (fr) * 2006-11-10 2008-05-14 Fuji Electric Device Technology Co., Ltd. Appareil de détection de pression et son boîtier
DE102009028244A1 (de) * 2009-08-05 2011-02-10 Endress + Hauser Gmbh + Co. Kg Relativdrucksensor
CN105928655A (zh) * 2016-04-15 2016-09-07 孙拓夫 一种差压传感器及其制造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08277733A (ja) * 1995-04-05 1996-10-22 Aisan Ind Co Ltd 内燃機関の吸気圧検出装置と吸気圧センサ
JP2001153748A (ja) * 1999-11-26 2001-06-08 Hitachi Ltd 圧力センサおよび自動車用内燃機関制御装置
EP1521952A1 (fr) 2002-05-25 2005-04-13 Robert Bosch Gmbh Dispositif de mesure de pression
EP1921433A2 (fr) * 2006-11-10 2008-05-14 Fuji Electric Device Technology Co., Ltd. Appareil de détection de pression et son boîtier
DE102009028244A1 (de) * 2009-08-05 2011-02-10 Endress + Hauser Gmbh + Co. Kg Relativdrucksensor
CN105928655A (zh) * 2016-04-15 2016-09-07 孙拓夫 一种差压传感器及其制造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022001066A1 (fr) * 2020-06-29 2022-01-06 中国第一汽车股份有限公司 Système et procédé d'élimination d'eau destiné à des conduites à pression différentielle de piège à particules de moteur à essence

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