WO2020121977A1 - Inspection system, and method for acquring image for inspection - Google Patents

Abstract

The present disclosure aims to improve inspection efficiency. An inspection system (10) according to the present disclosure comprises an inspection camera (1), a detection camera (2), a stage (3), and an adjustment mechanism (4). The inspection camera (1) comprises a camera having an image-capturing element in which a plurality of photodetectors are arranged two-dimensionally, and the inspection camera (1) captures an image of an area for inspection including at least a portion of subject (100) to be inspected. The detection camera (2) comprises a camera having an image-capturing element in which a plurality of photodetectors arranged two-dimensionally, and the detection camera (2) captures an image of a detection area that includes and is wider than the inspection area. The subject (100) to be inspected is carried by the stage (3). The adjustment mechanism (4) adjusts the relative position between the stage (3) and the inspection camera (1) on the basis of an image of the detection area image-captured by the detection camera (2).

Description

Inspection system and image acquisition method for inspection

The present disclosure relates to an inspection system and an image acquisition method for inspection. More specifically, the present disclosure relates to an inspection system for inspecting the appearance of an inspection object, and an image acquisition method for inspection.

Patent Document 1 describes an inspection device that performs preliminary positioning of a test piece with a line sensor camera. In the inspection device described in Patent Document 1, a line sensor camera is arranged so that the arrangement direction of the photosensors is parallel to the x-axis direction, and an image is taken while moving the xy stage in the y-axis direction to obtain a two-dimensional image. Get a nice image.

In the inspection device (inspection system) described in Patent Document 1, an image for performing preliminary positioning of a test piece (inspection target) is imaged by a line sensor camera while moving an xy stage in the y-axis direction. The inspection efficiency was not good.

Japanese Unexamined Patent Publication No. 2000-887764.

An object of the present disclosure is to provide an inspection system that can improve inspection efficiency and an image acquisition method for inspection.

The inspection system according to one aspect of the present disclosure is an inspection system that inspects the appearance of an inspection target. The inspection system includes an inspection camera, a detection camera, a stage, and an adjustment mechanism. The inspection camera is composed of a camera having an image sensor in which a plurality of light receiving elements are two-dimensionally arranged, and images an inspection area including at least a part of the inspection target. The detection camera is a camera having an image sensor in which a plurality of light receiving elements are two-dimensionally arranged, and captures an image of a detection area including the inspection area and wider than the inspection area. The inspection target is placed on the stage. The adjustment mechanism adjusts a relative position between the stage and the inspection camera based on an image of the detection area captured by the detection camera.

An inspection image acquisition method according to an aspect of the present disclosure is an inspection image acquisition method in an inspection system that inspects the appearance of an inspection target. The image acquisition method for inspection includes three processes. The first process is a process of imaging an inspection area including at least a part of the inspection target with an inspection camera including a camera having an image sensor in which a plurality of light receiving elements are two-dimensionally arranged. The second process is a process of imaging a detection region including the inspection region and wider than the inspection region by a detection camera including a camera having an image sensor in which a plurality of light receiving elements are two-dimensionally arranged. Is. The third process is a process of adjusting the relative position between the inspection camera and the stage on which the inspection target is placed, based on the image of the detection area captured by the detection camera.

FIG. 1 is a side view of the inspection system according to the first embodiment, and is a side view when a detection area is imaged by a detection camera. FIG. 2 is a side view of the above inspection system, which is a side view when an inspection region is imaged by an inspection camera. FIG. 3 is a side view of the above inspection system, and is another side view in the case where an inspection region is imaged by an inspection camera. FIG. 4 is a perspective view of the above inspection system with a cover removed. FIG. 5 is a plan view showing the relationship between the inspection area and the detection area of the above inspection system. FIG. 6 is a flow chart for explaining the operation of the above inspection system. FIG. 7 is a schematic diagram of the inspection illumination according to the first modification of the first embodiment. FIG. 8 is an external perspective view of the inspection system according to the second embodiment. FIG. 9 is an external perspective view of the inspection system according to the first modification of the second embodiment. FIG. 10 is an external perspective view of the inspection system according to the second modification of the second embodiment. FIG. 11 is a plan view of an inspection system according to Modification 3 of Embodiment 2.

(Embodiment 1)
(1) Outline of Inspection System Hereinafter, an outline of the inspection system 10 according to the first embodiment will be described with reference to FIGS. 1 to 4.

The inspection system 10 according to the first embodiment is a system for inspecting the appearance of the inspection target 100. The inspection target 100 is, for example, a chip component such as a resistor, a capacitor, or an inductor. Further, as another example of the inspection target 100, a circuit board, a sheet metal part such as a plate spring, or a resin molded part such as a cover may be used. The inspection system 10 inspects external defects such as dirt, scratches, burrs, and chips on the outer surface of a chip component as the inspection target 100, for example. The inspection system 10 may be incorporated in the manufacturing line of the chip component, or the visual inspection may be performed outside the manufacturing line.

The inspection system 10 according to the first embodiment includes an inspection camera 1, a detection camera 2, a stage 3, and an adjusting mechanism 4, as shown in FIGS. 1 to 4. The inspection camera 1 and the detection camera 2 are area cameras. The “area camera” in the present disclosure refers to a camera having an image pickup device (for example, CCD image sensor or CMOS image sensor) in which a plurality of light receiving devices (for example, photodiodes) are two-dimensionally arranged. That is, according to the area camera, a two-dimensional plane image can be acquired without moving the stage on which the inspection target is placed in one direction unlike the line sensor camera.

The inspection camera 1 images the inspection region R1 (see FIG. 5) including the inspection target 100. The detection camera 2 captures an image of a detection region R2 (see FIG. 5) including the inspection region R1 and wider than the inspection region R1. Here, one or more inspection targets 100 are mounted on the stage 3. The “detection region R2” in the present disclosure refers to a region that is set so as to include the entire stage 3 on which one or more inspection targets 100 are placed. Further, the “inspection region R1” in the present disclosure refers to a region that is set so as to include at least a part of one inspection target 100 among one or a plurality of inspection targets 100. Then, when a plurality of inspection objects 100 are placed on the stage 3, the detection region R2 includes a plurality of inspection regions R1.

On the stage 3, for example, a plurality of (15 in the first embodiment) chip parts as the inspection target 100 are mounted. The adjustment mechanism 4 adjusts the relative position between the stage 3 and the inspection camera 1 based on the image of the detection region R2 captured by the detection camera 2. The “relative position” in the present disclosure refers to the position of the inspection camera 1 with respect to the stage 3 in the direction intersecting the optical axis of the inspection camera 1.

In the inspection system 10 according to the first embodiment, as described above, the detection camera 2 for capturing the detection area R2 including the stage 3 is an area camera. Therefore, unlike the case where the position of the inspection target is detected by the line sensor camera, the position of the inspection target can be detected without moving the stage on which the inspection target is placed in one direction, so that the inspection efficiency can be improved. ..

When shooting the stage 3 with the line sensor camera, it is necessary to synchronize the position of the stage 3 with the shooting timing of the line sensor camera. This is because, in general, since the actuator uses a synchronous motor, ideal constant speed control is difficult. Therefore, in this case, the imaging timing pulse is directly generated from the pulse output of the encoder of the actuator that drives the stage 3, and the synchronous imaging is performed in real time using the image processing dedicated board.

On the other hand, when shooting the stage 3 with the area camera, it is sufficient to move the stage 3 to a predetermined position, stop the stage 3, and then shoot with the area camera. No need to synchronize timing. Therefore, in this case, the stage 3 can be photographed with a simpler and less expensive structure than when the stage 3 is photographed with the line sensor camera.

As a result of the above, the inspection system 10 can be configured at a low cost with a simple structure as compared with the case where the position of the inspection target is detected by the line sensor camera.

(2) Configuration of Inspection System Next, the configuration of the inspection system 10 according to the first embodiment will be described with reference to FIGS. 1 to 5. In the following description, as shown in FIGS. 1 to 5, the length direction (longitudinal direction) of the stage 3 is the X direction, the width direction (shorter direction) of the stage 3 is the Y direction, and the thickness direction of the stage 3 is. It is defined as the Z direction. However, these directions are not intended to limit the usage direction of the inspection system 10. Further, the arrows in the drawings are shown only for the purpose of description and do not have any substance.

As shown in FIGS. 1 to 4, the inspection system 10 according to the first embodiment includes an inspection camera 1, a detection camera 2, a stage 3, and an adjustment mechanism 4. Further, the inspection system 10 includes the inspection illumination 5, the detection illumination 6, the camera actuator 7, and the illumination actuator 8. The inspection system 10 further includes a base 11 and a cover 14.

The inspection camera 1 is, for example, an area camera. The area camera is a two-dimensional camera having an image sensor in which a plurality of light receiving elements (for example, photodiodes) are two-dimensionally arranged. The image sensor is, for example, a two-dimensional image sensor such as a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor. The inspection camera 1 includes a lens 101. As shown in FIG. 3, the lens 101 has a columnar shape elongated in the Z direction. The lens 101 is detachably attached to the inspection camera 1. Therefore, by exchanging the lens 101, it is possible to adjust the size of the inspection target, the magnification and the viewing angle suitable for the inspection item, and the like. Therefore, by mounting the lens 101 suitable for inspection on the inspection camera 1, it is possible to set an area including at least a part of one inspection target 100 as the inspection area R1. As shown in FIG. 4, the inspection camera 1 is attached to the camera actuator 7 by a rectangular arm 12 that is long in the Y direction.

Like the inspection camera 1, the detection camera 2 is an area camera. The detection camera 2 has a wide-angle lens. Therefore, the detection camera 2 can capture an image of the detection area R2 that is wider than the inspection area R1. The detection region R2 is a region including the entire stage 3 on which a plurality of (15 in the first embodiment) inspection objects 100 are placed here (see FIG. 5). As shown in FIGS. 2 and 3, the detection camera 2 is attached to the arm 12 by a connecting member 9 formed in a T shape when viewed from the X direction. That is, when the arm 12 to which the inspection camera 1 is attached moves in the Z direction by the camera actuator 7, the detection camera 2 can move in the Z direction. In other words, the detection camera 2 moves together with the inspection camera 1 by the camera actuator 7. In the first embodiment, the angle of view of the detection camera 2 is wider than the angle of view of the inspection camera 1.

Here, in the inspection system 10 according to the first embodiment, the inspection camera 1 and the detection camera 2 are attached to the same arm 12. Therefore, regarding the positional relationship between the inspection camera 1 and the detection camera 2, the other of the inspection camera 1 and the detection camera 2 is reflected when one of the inspection camera 1 and the detection camera 2 is photographed. It is preferable that there is no positional relationship.

As shown in FIGS. 4 and 5, the stage 3 has a rectangular plate shape that is long in the X direction when viewed from the Z direction. The dimension of the stage 3 in the X direction is, for example, 300 mm, and the dimension of the stage 3 in the Y direction is, for example, 200 mm. Note that these dimensions are examples and are not intended to be limited to these dimensions. On one surface (upper surface) of the stage 3, a plurality of inspection targets 100 are arranged, for example, in a grid pattern. In the first embodiment, the plurality of inspection objects 100 are arranged in five rows in the X direction and three rows in the Y direction. The stage 3 can be moved in the X direction and the Y direction by the adjusting mechanism 4. That is, the stage 3 can be moved in the XY plane by the adjusting mechanism 4.

The adjusting mechanism 4 has a first actuator 41 and a second actuator 42, as shown in FIGS. 1 to 4. The first actuator 41 has a rectangular tube shape that is long in the Y direction. The second actuator 42 has a rectangular tube shape that is long in the X direction. The power source of the first actuator 41 and the second actuator 42 is, for example, a motor (electric motor). The second actuator 42 is movable by the first actuator 41 in the longitudinal direction (Y direction) of the first actuator 41. That is, the stage 3 can be moved in the Y direction by moving the second actuator 42 in the Y direction. The stage 3 is movable by the second actuator 42 in the length direction (X direction) of the second actuator 42. That is, the stage 3 can be moved in the X direction and the Y direction by the first actuator 41 and the second actuator 42. In other words, the adjustment mechanism 4 moves the stage 3 in a direction (X direction and Y direction) that intersects the optical axis (axis in the Z direction) of the inspection camera 1. The adjustment mechanism 4 is attached to the base 11 such that the length direction of the base 11 formed in the shape of a rectangular plate long in the Y direction and the length direction of the first actuator 41 are parallel to each other.

The inspection illumination 5 irradiates the inspection region R1 imaged by the inspection camera 1 with light. In other words, the inspection system 10 further includes the inspection illumination 5 that irradiates the inspection region R1 with light. The inspection illumination 5 is, for example, a ring illumination 51 as shown in FIGS. 1 to 4. The ring illumination 51 has an annular light source. The inspection illumination 5 is attached to the illumination actuator 8 by an arm 13 having a rectangular tube shape that is long in the Y direction. In this way, by making the inspection illumination 5 the ring illumination 51, it is difficult for the inspection object 100 to be shaded and the inspection object 100 can be irradiated with uniform light. The ring illumination 51 has, for example, a configuration including a circuit board in which a plurality of light emitting diodes (LEDs) are arranged on the circumference.

Here, in the inspection system 10 according to the first embodiment, the detection camera 2 is arranged outside the ring illumination 51 (inspection illumination 5) as shown in FIGS. 1 to 3. Specifically, the detection camera 2 is arranged at a position closer to the camera actuator 7 than the ring illumination 51 in the Y direction (a position on the inner side of the ring illumination 51) when viewed from the Z direction. In particular, as shown in FIGS. 1 to 3, it is best to arrange the detection camera 2 at a position close to the outer peripheral surface of the ring illumination 51 in the Y direction. On the other hand, the inspection camera 1 is arranged inside the ring illumination 51 as shown in FIG. As described above, by disposing the detection camera 2 outside the ring illumination 51, it is possible to reduce the reflection of the inspection camera 1 in the detection region R2 imaged by the detection camera 2. Further, the ring illumination 51 can be downsized as compared with the case where the detection camera 2 is arranged inside the ring illumination 51.

The detection illumination 6 irradiates the detection area R2 imaged by the detection camera 2 with light. In other words, the inspection system 10 further includes the detection illumination 6 that irradiates the detection region R2 with light. That is, in the inspection system 10 according to the first embodiment, the inspection illumination 5 and the detection illumination 6 are provided separately. According to this configuration, it is possible to realize illumination suitable for each of the inspection region R1 and the detection region R2. The detection illumination 6 has a plurality of (four in the first embodiment) LED elements 61. The plurality of LED elements 61 are respectively provided at four corners of a predetermined rectangle centered on the detection camera 2 when viewed from the Z direction. According to this configuration, it is possible to acquire a clear image as compared with the case where the detection illumination 6 is not provided.

The camera actuator 7 moves the inspection camera 1 and the detection camera 2 attached to the arm 12 in the Z direction. In other words, the inspection system 10 further includes a camera actuator 7 that moves the inspection camera 1 and the detection camera 2 in a direction toward the inspection target 100 mounted on the stage 3 and a direction away from the inspection target 100. There is. The power source of the camera actuator 7 is, for example, a motor (electric motor). The camera actuator 7 has a rectangular tube shape that is long in the Z direction. The camera actuator 7 moves the inspection camera 1 and the detection camera 2 along the length direction (Z direction) of the camera actuator 7.

The illumination actuator 8 moves the inspection illumination 5 attached to the arm 13 in the Z direction. In other words, the inspection system 10 further includes the illumination actuator 8 that moves the inspection illumination 5 in a direction approaching the inspection target 100 mounted on the stage 3 and a direction away from the inspection target 100. The power source of the illumination actuator 8 is, for example, a motor (electric motor). The illumination actuator 8 has a rectangular tube shape that is long in the Z direction, and is arranged side by side with the camera actuator 7 in the X direction. The illumination actuator 8 moves the inspection illumination 5 in the length direction (Z direction) of the illumination actuator 8.

The base 11 is formed in a rectangular plate shape that is long in the Y direction when viewed from the Z direction. The tips of the base 11 in the Y direction are chamfered so that the distance between them becomes narrower toward the tips when viewed from the Z direction. The stage 3 and the adjusting mechanism 4 are attached to one surface (upper surface) of the base 11.

The cover 14 is formed in an L shape when viewed from the X direction. The cover 14 is attached to the base 11 and covers the inspection camera 1, the detection camera 2, the stage 3, the inspection illumination 5, and the detection illumination 6 when viewed from the Z direction.

In the inspection system 10 according to the first embodiment, the inspection camera 1 and the detection camera 2 attached to the arm 12 and the inspection illumination 5 attached to the arm 13 can be operated separately. In other words, the camera actuator 7 and the illumination actuator 8 operate separately. According to this configuration, the focus operation of the inspection camera 1 and the adjustment of the illumination condition of the inspection illumination 5 can be performed separately. Here, the focus operation of the inspection camera 1 means an operation of focusing by moving the inspection camera 1 in the Z direction. The illumination conditions of the inspection illumination 5 are adjusted by moving the inspection illumination 5 in the Z direction such as the illuminance of the illumination light and the incident angle of the illumination light when the inspection object 1 is photographed by the inspection camera 1. It means adjusting the conditions.

In the inspection system 10 according to the first embodiment, as shown in FIGS. 1 to 3, the cover 14 formed in an L shape when viewed from the X direction has the inspection camera 1 and the detection camera when viewed from the Z direction. 2, the stage 3, the inspection illumination 5, and the detection illumination 6 are attached to the base 11 so as to cover them.

(3) Operation of Inspection System Next, the operation of the inspection system 10 according to the first embodiment will be described with reference to FIGS. 1 to 3 and 6. Hereinafter, a case where the inspection camera 1 captures an image of the inspection region R1 including the inspection object 100 located at the center among the plurality of inspection objects 100 mounted on the stage 3 will be described. The same applies to the other inspection targets 100, and a description thereof will be omitted here.

First, the inspection system 10 raises the detection camera 2 to the first raised position by the camera actuator 7 (step S1). The first raised position is a height position where the detection camera 2 can image the detection region R2. Subsequently, the inspection system 10 raises the inspection illumination 5 to the second elevated position by the illumination actuator 8 (step S2). The second raised position is a height position where the inspection illumination 5 is not reflected in the detection area R2 when the detection camera 2 images the detection area R2.

Further, the inspection system 10 moves the stage 3 to the first position by the adjusting mechanism 4 (step S3). The first position is a position where the optical axis P2 of the detection camera 2 (see FIG. 1) and the center point P3 of the stage 3 (see FIG. 5) coincide with each other on the XY plane. In the present disclosure, “match” does not only mean that the optical axis P2 and the center point P3 completely overlap each other on the XY plane, but also that the optical axis P2 is within a predetermined range with respect to the center point P3 on the XY plane. Including the case When the detection camera 2 is in the first raised position and the stage 3 is in the first position, the detection camera 2 is at a height position where the detection region R2 can be imaged, and the entire stage 3 is included in the detection region R2. (See Figure 5).

Next, the inspection system 10 turns on the detection illumination 6 (step S4), and then causes the detection camera 2 to capture an image of the detection region R2 (step S5). Then, the inspection system 10 causes the detection camera 2 to capture an image of the detection region R2, and then turns off the detection illumination 6 (step S6).

After that, the inspection system 10 lowers the inspection camera 1 to the first lowered position by the camera actuator 7 (step S7). The first lowered position is a height position where the inspection camera 1 can image the inspection region R1. Then, the inspection system 10 causes the illumination actuator 8 to lower the inspection illumination 5 to the second lowered position (step S8).

Further, the inspection system 10 moves the stage 3 to the second position by the adjusting mechanism 4 (step S9). The second position is a position on the XY plane where the optical axis of the inspection camera 1 and the center point of the inspection area of the inspection object 100 coincide with each other. The term “match” in the present disclosure is not limited to the case where the optical axis of the inspection camera 1 and the center point of the inspection area of the inspection object 100 (or the center point of the inspection object 100) completely overlap each other in the XY plane. This includes the case where the optical axis of the inspection camera 1 is within a predetermined range with respect to the center point of the inspection area of the inspection object 100 (or the center point of the inspection object 100) on the XY plane. At this time, the inspection system 10 moves the stage 3 based on the image of the detection region R2 captured by the detection camera 2 in step S5. That is, the inspection system 10 adjusts the relative position between the stage 3 and the inspection camera 1 based on the image of the detection region R2 captured by the detection camera 2. When the inspection illumination 5 is in the second lowered position, the distance between the inspection illumination 5 and the surface (upper surface) of the inspection object 100 is a predetermined distance, as shown in FIG.

After that, the inspection system 10 turns on the inspection illumination 5 (step S10), and then causes the inspection camera 1 to capture an image of the inspection region R1 (step S11). Then, the inspection system 10 causes the inspection camera 1 to capture an image of the inspection region R1 and then turns off the inspection illumination 5 (step S12).

The inspection system 10 repeats the processing of steps S9 to S12 when there is another inspection target 100 on the stage 3 (step S13; Yes). On the other hand, the inspection system 10 ends the operation when there is no other inspection target 100 on the stage 3 (step S13; No).

In the inspection system 10 according to the first embodiment, as described above, the detection camera 2 for capturing the detection area R2 including the stage 3 is an area camera. Therefore, unlike the case where the inspection target is preliminarily positioned by the line sensor camera, the process of moving the stage on which the inspection target is placed in one direction is unnecessary, and the inspection efficiency is improved accordingly. You can Moreover, when the detection region R2 is imaged by the detection camera 2, it is sufficient to move the stage 3 so that the optical axis P2 of the detection camera 2 and the center point P3 of the stage 3 coincide with each other on the XY plane. The moving distance can be shortened.

By the way, in the inspection system 10 according to the first embodiment, the angle of light that illuminates the surface (upper surface) of the inspection target 100 can be changed by the inspection illumination 5. When the distance between the inspection illumination 5 and the surface (upper surface) of the inspection object 100 is reduced, the angle between the traveling direction of the light of the inspection illumination 5 and the normal line of the surface (upper surface) of the inspection object 100 becomes smaller. growing. In this case, it is possible to emphasize the lack of edges and the like. As a result, it is possible to efficiently inspect not only the surface (upper surface) of the inspection object 100, but also the edge of the inspection object 100 and the like.

Note that the order of steps S1 to S4 described above is an example, and the order of steps S1 to S4 may be interchanged. For example, the order of steps S1 and S2 may be exchanged, or the order of steps S2 and S3 may be exchanged. Further, the order of steps S7 to S10 may be changed. For example, step S8 and step S9 may be interchanged, or step S7 and step S10 may be interchanged. Furthermore, when there are a plurality of inspection objects 100, the inspection illumination 5 may be kept on until the imaging of the inspection regions R1 of all the inspection objects 100 is completed. That is, step S12 may be omitted until the imaging of the inspection regions R1 of all the inspection targets 100 is completed.

In the inspection system 10 according to the first embodiment, the angle of view of the detection camera 2 is wider than that of the inspection camera 1. According to this configuration, since the detection camera 2 has a wide viewing angle (wide angle), the detection camera 2 is used to detect the position of the inspection target 100, and the adjustment mechanism 4 is used to detect the optical axis of the inspection camera 1. It is possible to efficiently perform the operation of adjusting the relative position between the stage 3 and the inspection camera 1 at a position where the center point of the inspection range of the inspection target 100 (or the center point of the inspection target 100) matches. Further, since the inspection camera 1 has a narrow viewing angle, it is possible to observe minute defects in the inspection target 100 by using the inspection camera 1, so that the inspection can be efficiently performed.

Here, in the case of an inspection device specialized in semiconductor inspection as in the cited document 1, a highly accurate and expensive configuration such as a line sensor camera and its control mechanism is required. However, considering a general-purpose inspection assuming an inspection target such as an electronic component or a printed circuit board, the relative positional accuracy between the inspection target and the inspection camera is not so much required.

For example, the defect size generally required for semiconductor inspection using an image pickup device having a high-magnification lens or an electron microscope is, for example, about 0.5 μm to several μm, and finer defects are detected as miniaturization progresses. There is a need to. On the other hand, the defect size found by a general visual inspection is, for example, about several tens μm to 100 μm. Along with that, the magnification of the lens also greatly changes.

If the magnification of the lens is high, it is necessary to bring the work to the focal position of the light or electron beam, and position accuracy is required. On the other hand, when the magnification of the lens is low, the work can be inspected if the work is within the field of view of the camera, and the positional accuracy is not so required.

Then, when comparing with the reference image, the alignment by image processing is often sufficient, and if the inspection illumination has a flat luminance distribution, it is possible to suppress the luminance variation due to the positional deviation, A more suitable inspection system can be realized. Even if the positional deviation is large, if the work is within the camera field of view, the center of gravity of the work is determined by image processing, and the stage is moved in the X and Y directions so that the center of gravity of the work becomes the center of the camera field of view. It is also possible to control to. From the above, the inspection system 10 according to the first embodiment can employ the detection camera 2 having low position detection accuracy.

(4) Modified Example The first embodiment is only one of the various embodiments of the present disclosure. The first embodiment can be variously modified according to the design and the like as long as the object of the present disclosure can be achieved. Further, the same function as the inspection system 10 may be embodied by an image acquisition method for inspection, a computer program, a non-transitory recording medium recording the computer program, or the like.

The image acquisition method for inspection according to one aspect is an image acquisition method for inspection that acquires an image used in the inspection system 10 that inspects the appearance of the inspection target 100. The image acquisition method for inspection includes three processes. The first process is a process of capturing an image of the inspection region R1 including the inspection target 100 by the inspection camera 1 including a camera having an image pickup device in which a plurality of light receiving elements are arranged two-dimensionally (step S11). .. In the second process, the detection camera 2 including a camera having an image sensor in which a plurality of light receiving elements are two-dimensionally arranged captures an image of a detection area R2 including the inspection area R1 and wider than the inspection area R1. This is the processing (step S5). The third process is a process of adjusting the relative position between the inspection camera 1 and the stage 3 on which the inspection target 100 is placed, based on the image of the detection region R2 captured by the detection camera 2 (step S9). is there.

The following is a list of modifications of the first embodiment. The modifications described below can be applied in appropriate combination.

The inspection system 10 in the present disclosure includes a computer system. The computer system mainly has a processor and a memory as hardware. The function as the inspection system 10 in the present disclosure is realized by the processor executing the program recorded in the memory of the computer system. The program may be pre-recorded in the memory of the computer system, may be provided through an electric communication line, or recorded in a non-transitory recording medium such as a memory card, an optical disk, a hard disk drive, etc. that can be read by the computer system. May be provided. The processor of the computer system is composed of one or a plurality of electronic circuits including a semiconductor integrated circuit (IC) or a large scale integrated circuit (LSI). The integrated circuit such as an IC or an LSI referred to here has a different name depending on the degree of integration, and includes an integrated circuit called a system LSI, VLSI (Very Large Scale Integration), or ULSI (Ultra Large Scale Integration). Furthermore, FPGAs (Field-Programmable Gate Arrays) that are programmed after the manufacture of LSIs, or logic devices that can be reconfigured for junction relationships within LSIs or for circuit blocks within LSIs should also be adopted as processors. You can The plurality of electronic circuits may be integrated in one chip, or may be distributed and provided in the plurality of chips. The plurality of chips may be integrated in one device, or may be distributed and provided in the plurality of devices. The computer system referred to herein includes a microcontroller having one or more processors and one or more memories. Therefore, the microcontroller is also composed of one or a plurality of electronic circuits including a semiconductor integrated circuit or a large scale integrated circuit.

It is not an essential configuration of the inspection system 10 that a plurality of functions of the inspection system 10 are integrated in one housing, and the components of the inspection system 10 are distributed and provided in the plurality of housings. Good. Furthermore, at least a part of the functions of the inspection system 10 may be realized by a cloud (cloud computing) or the like.

(4.1) Modification 1
Although the inspection illumination 5 is the ring illumination 51 in the first embodiment, the inspection illumination 5A may be the coaxial incident illumination 52 as shown in FIG. 7. Hereinafter, the inspection system according to the first modification will be described with reference to FIG. 7. The inspection system according to the modified example 1 is the same as the inspection system 10 according to the first embodiment except for the inspection illumination 5A, and the same reference numerals are given to the same components for detailed description. Omit it.

Further, in FIG. 7, it is easy to distinguish the first reflected light reflected by the surface of the half mirror 522 and directed to the inspection target 100 from the second reflected light reflected by the surface of the inspection target 100 and directed to the inspection camera 1. The figures are shifted and illustrated. Actually, the second reflected light is reflected toward the inspection camera 1 at the same position as the incident position of the first reflected light on the inspection target 100.

The inspection system according to Modification 1 includes an inspection camera 1, a detection camera 2, a stage 3, and an adjustment mechanism 4. Furthermore, the inspection system includes an inspection illumination 5A, a detection illumination 6, a camera actuator 7, and an illumination actuator 8.

The inspection illumination 5A according to the first modification is a coaxial incident illumination 52. The “coaxial epi-illumination 52” in the present disclosure refers to an illumination that irradiates the inspection target 100 with light from the light source 521 from the direction of the optical axis of the inspection camera 1. In other words, the coaxial epi-illumination 52 irradiates the inspection region R1 with light from a direction that coincides with the optical axis P1 of the inspection camera 1. The inspection illumination 5A according to the first modification includes a light source 521 and a half mirror 522, as shown in FIG. 7. The light source 521 irradiates the half mirror 522 with light from a direction intersecting the direction of the optical axis of the inspection camera 1. The half mirror 522 is arranged between the inspection camera 1 and the inspection object 100 in a state of being inclined with respect to the optical axis direction of the inspection camera 1.

In this inspection illumination 5A, part of the light (parallel light) emitted from the light source 521 is reflected by the surface of the half mirror 522, and travels toward the inspection target 100 as the first reflected light. The first reflected light traveling toward the inspection target 100 is reflected by the surface of the inspection target 100 and travels toward the inspection camera 1 as second reflected light. At this time, the second reflected light passes through the half mirror 522 and travels toward the inspection camera 1. When the inspection illumination 5A is the coaxial incident illumination 52, it is effective, for example, when the inspection target 100 is a glossy metal object.

(4.2) Other Modifications In the first embodiment, the detection camera 2 is arranged outside the ring illumination 51, but the detection camera 2 may be arranged inside the ring illumination 51.

In the first embodiment, the inspection camera 1 and the detection camera 2 are provided separately, but the inspection camera and the detection camera may be combined into one camera. In this case, for example, a method of exchanging lenses depending on whether the camera functions as an inspection camera or a detection camera is possible.

In the first embodiment, both the inspection camera 1 and the detection camera 2 can be moved by one camera actuator 7, but the inspection camera 1 and the detection camera 2 can be moved individually by separate camera actuators. May be Further, the detection camera 2 may have a structure in which it is fixed at a fixed position without moving. Since the detection camera 2 generally has a smaller lens diameter and a deeper depth of field than the inspection camera 1, even if the detection camera 2 is fixed at a fixed position, the inspection target 100 Even if the height of the subject changes within a certain range, it remains in focus.

In the first embodiment, the adjustment mechanism 4 moves the stage 3 to adjust the relative position between the stage 3 and the inspection camera 1. However, the adjustment mechanism moves the inspection camera 1 to adjust the stage 3 and the inspection camera 1. The relative position to the camera 1 may be adjusted. Further, the structure in which the adjusting mechanism moves the stage 3 in one direction orthogonal to the direction of the optical axis of the inspection camera 1, and the inspection direction in the direction orthogonal to the moving direction of the stage 3 and the optical axis direction of the inspection camera 1 The relative position between the stage 3 and the inspection camera 1 may be adjusted by providing a structure for moving the inspection camera 1. For example, when two directions orthogonal to the optical axis direction of the inspection camera 1 are defined as the X direction and the Y direction, the adjusting mechanism moves the stage 3 in the X direction, and the inspection camera 1 is moved in the Y direction. A structure including a moving structure may be used.

In the first embodiment, the camera (inspection camera 1, detection camera 2) and the illumination (inspection illumination 5, detection illumination 6) are arranged on the same side with respect to the inspection target 100. The appearance of the inspection target 100 is inspected on the basis of the reflected light. On the other hand, the inspection target 100 may be arranged between the camera and the illumination, and the appearance of the inspection target 100 may be inspected based on the transmitted light from the illumination.

In the first embodiment, the inspection system 10 directly detects the position of the inspection target 100 based on the image of the detection region R2 captured by the detection camera 2. On the other hand, for example, when the inspection target 100 is placed on the tray, the inspection system 10 determines the inspection target 100 based on the pitch of the recesses for accommodating the inspection target 100 provided in the tray. The position of may be detected indirectly. Further, for example, when the inspection target 100 is placed on the tray, the inspection system 10 detects the inspection target 100 based on the position of the marks arranged on the tray to indicate the positional relationship of the inspection target 100. The position may be detected indirectly.

In the first embodiment, the height of the inspection illumination 5 is changed according to the inspection site (front surface, side surface) of the inspection object 100. For example, the height of the inspection illumination 5 is changed according to the type of the inspection object. May be.

In the first embodiment, the inspection camera 1 images the inspection region R1 including the inspection target 100, but the inspection camera 1 may be configured to image the inspection region R1 including a part of the inspection target 100. Further, the inspection camera 1 may be configured to inspect the entire inspection target 100 by imaging a part of the inspection target 100 a plurality of times. When the inspection camera 1 images a part of the inspection object 100 a plurality of times, the relative position between the stage 3 and the inspection camera 1 may be adjusted by the adjustment mechanism 4 before the inspection camera 1 takes an image. it can.

(Embodiment 2)
In the inspection system 10 according to the first embodiment, the adjusting mechanism 4 is configured by the first actuator 41 and the second actuator 42, the stage 3 is moved by the first actuator 41 in the X direction, and the second actuator 42 is used. By moving the stage 3 in the Y direction, the relative position between the stage 3 and the inspection camera 1 is adjusted. That is, in the inspection system 10 according to the first embodiment, the relative position between the stage 3 and the inspection camera 1 is adjusted by fixing the inspection camera 1 and moving the stage 3 in the X direction and the Y direction. doing.

On the other hand, in the inspection system 10A according to the second embodiment, the stage 3 can be moved in the X direction, and the moving unit 16 (described later) including the inspection camera 1 can be moved in the Y direction. , The relative position between the stage 3 and the inspection camera 1 is adjusted. Hereinafter, the inspection system 10A according to the second embodiment will be described with reference to FIG. Regarding the inspection system 10A according to the second embodiment, the same components as those of the inspection system 10 according to the first embodiment are denoted by the same reference numerals and the description thereof will be omitted.

(1) Configuration of Inspection System As shown in FIG. 8, the inspection system 10A according to the second embodiment includes an inspection camera 1, a detection camera 2, a stage 3, and an adjustment mechanism 4. The inspection system 10A further includes an inspection illumination 5, a detection illumination (not shown), a camera actuator 7, an illumination actuator 8, and a housing 15. The adjustment mechanism 4 includes a moving unit 16 and a stage actuator 17.

The inspection camera 1 is an area camera as in the first embodiment. The inspection camera 1 images the inspection region R1 (see FIG. 5). The inspection region R1 is a region including at least a part of the inspection target 100. The inspection camera 1 can be moved in the Z direction by the camera actuator 7. In other words, the camera actuator 7 moves the inspection camera 1 in a direction approaching the inspection target 100 mounted on the stage 3 and a direction away from the inspection target 100.

Like the inspection camera 1, the detection camera 2 is an area camera. The detection camera 2 has an image sensor 21. The image pickup device 21 is arranged such that the image pickup surface is on the stage 3 side (downward). The detection camera 2 images the detection area R2 (see FIG. 5). The detection area R2 is an area set to include the entire stage 3. The detection camera 2 is attached to a case 161 (described later) of the moving unit 16. Therefore, the position of the detection camera 2 is fixed in the Z direction.

The stage 3 is a rectangular plate shape that is long in the X direction when viewed from the Z direction. The stage 3 is attached to the stage actuator 17, and is movable in the X direction together with the stage actuator 17. That is, the stage actuator 17 (adjustment mechanism 4) moves the stage 3 in the first direction intersecting the optical axis of the inspection camera 1. In the second embodiment, the first direction is the X direction.

The inspection illumination 5 is the ring illumination 51 as in the first embodiment. The inspection illumination 5 can be moved in the Z direction by the illumination actuator 8. In other words, the illumination actuator 8 moves the inspection illumination 5 in a direction approaching the inspection target 100 mounted on the stage 3 and a direction away from the inspection target 100. In the inspection system 10A according to the second embodiment, the camera actuator 7 that drives the inspection camera 1 and the illumination actuator 8 that drives the inspection illumination 5 operate independently. The inspection illumination 5 is not limited to the ring illumination 51 and may be the coaxial incident illumination 52 (see FIG. 7), for example, as in the first embodiment.

Detecting illumination includes multiple LED elements. The plurality of LED elements are arranged at positions where light can be emitted to the detection region R2 including the entire stage 3. Specifically, the positions of the plurality of LED elements of the detection illumination are, for example, the lower surface of the detection camera 2 or the lower surface of the inspection illumination 5 (ring illumination 51).

The stage actuator 17 as the adjusting mechanism 4 includes a synchronous motor, and is movable in the X direction by driving the synchronous motor. The stage actuator 17 is attached to the stage 3. Then, by moving the stage actuator 17 in the X direction, the stage 3 can be moved in the X direction.

The moving unit 16 as the adjusting mechanism 4 includes the inspection camera 1, the detection camera 2, the inspection illumination 5, the detection illumination, the camera actuator 7 and the illumination actuator 8 described above, and a case 161 for housing them. Have. The moving unit 16 can be moved in the Y direction by a Y direction actuator (not shown). That is, the inspection camera 1, the detection camera 2, the inspection illumination 5, and the detection illumination can be moved in the Y direction by the Y direction actuator. In other words, the moving unit 16 (adjustment mechanism 4) moves the inspection camera 1 in the second direction that intersects the optical axis of the inspection camera 1 and intersects the first direction. In the second embodiment, the second direction is the Y direction.

The case 161 has a box shape that is long in the Z direction, as shown in FIG. In FIG. 8, the case 161 is configured by combining two case pieces from the X direction. The lower end of the case 161 is formed to have a size capable of accommodating the ring illumination 51 as the inspection illumination 5 and the detection camera 2 in the X direction. In the second embodiment, the detection camera 2 is held by the case 161.

The housing 15 has a base 151 and a body 152, as shown in FIG. The base 151 has a rectangular shape that is long in the Y direction when viewed from the Z direction. The rear end portion of the base 151 in the Y direction is chamfered so that the distance between the base 151 and the rear end portion becomes narrower toward the rear end when viewed from the Z direction. The body 152 includes a first body 1521 and a second body 1522. The first body 1521 has a box shape that is long in the Z direction when viewed from the X direction, and extends from one surface of the base 151 (the upper surface in FIG. 8) along the Z direction. The second body 1522 has a box shape that is long in the Y direction when viewed from the X direction, and is one end portion (the upper end portion in FIG. 8) of the first body 1521 in the Z direction and one end portion of the first body 1521 in the Y direction. It extends along the Y direction from (the left end portion in FIG. 8).

(2) Operation of Inspection System Next, an example of operation of the inspection system 10A according to the second embodiment will be described.

First, the inspection system 10A raises the inspection illumination 5 to the first elevated position by the illumination actuator 8. The first raised position is a height position where the inspection illumination 5 is not reflected in the detection region R2 when the detection camera 2 images the detection region R2.

Next, the inspection system 10A adjusts the relative position between the detection camera 2 and the stage 3 by the adjustment mechanism 4. At this time, the inspection system 10A moves the detection camera 2 in the Y direction by moving the stage 3 in the X direction by the stage actuator 17 and moving the moving unit 16 in the Y direction.

The order of the operation of raising the inspection illumination 5 to the first elevated position and the operation of adjusting the relative position of the detection camera 2 and the stage 3 may be reversed.

Next, the inspection system 10A turns on the detection illumination and then causes the detection camera 2 to image the detection region R2. Then, the inspection system 10A causes the detection camera 2 to capture an image of the detection region R2, and then turns off the detection illumination.

After that, the inspection system 10A lowers the inspection camera 1 to the first lowered position by the camera actuator 7. The first lowered position is a height position where the inspection camera 1 can image the inspection region R1. Subsequently, the inspection system 10A causes the inspection actuator 5 to descend to the second descending position by the illumination actuator 8. The second lowered position is a height position where the inspection illumination 5 can irradiate the inspection region R1 with light.

Further, the inspection system 10A adjusts the relative position between the inspection camera 1 and the stage 3 by the adjustment mechanism 4. At this time, the inspection system 10A moves the stage 3 in the X direction and moves the moving unit 16 (the inspection camera 1) in the Y direction based on the image of the detection region R2 captured by the detection camera 2. Let

The order of the operation of lowering the inspection camera 1 to the first lowered position, the operation of lowering the inspection illumination 5 to the second lowered position, and the operation of adjusting the relative position between the inspection camera 1 and the stage 3 are as described above. The order of may be different. For example, after adjusting the relative position between the inspection camera 1 and the stage 3, the inspection camera 1 may be lowered to the first lowered position, and the inspection illumination 5 may be further lowered to the second lowered position.

After that, the inspection system 10A turns on the inspection illumination 5 and then causes the inspection camera 1 to image the inspection region R1. Then, the inspection system 10A causes the inspection camera 1 to capture an image of the inspection region R1 and then turns off the inspection illumination 5.

(3) Effects In the inspection system 10A according to the second embodiment, the detection camera 2 for imaging the detection region R2 including the stage 3 is an area camera. Therefore, unlike the case where the position of the inspection target is detected by the line sensor camera, the position of the inspection target can be detected without moving the stage on which the inspection target is placed in one direction, so that the inspection efficiency can be improved. ..

In the inspection system 10A according to the second embodiment, the detection camera 2 is held in the case 161 of the moving unit 16. Therefore, there is an advantage that the position adjustment in the Z direction is unnecessary for the detection camera 2. Further, in the inspection system 10A according to the second embodiment, the inspection camera 1 is raised by the camera actuator 7 and the inspection illumination 5 is raised by the illumination actuator 8 to secure the field of view of the detection camera 2. be able to.

(4) Modifications Modifications of the second embodiment will be listed below. The modifications described below can be applied in appropriate combination.

(4.1) Modification 1
In the inspection system 10A according to the second embodiment, the detection camera 2 is attached to the case 161 of the moving unit 16, but as shown in FIG. 9, the detection camera 2 may be attached to the inspection illumination 5 as well. Good. Hereinafter, the inspection system 10B according to the first modification will be described with reference to FIG. Regarding the inspection system 10B according to the first modification, the same components as those of the inspection system 10A according to the second embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

The inspection system 10B according to Modification 1 includes an inspection camera 1, a detection camera 2, a stage 3, and an adjustment mechanism 4, as shown in FIG. The inspection system 10B further includes an inspection illumination 5, a detection illumination (not shown), a camera actuator 7, an illumination actuator 8, and a housing 15. The adjustment mechanism 4 includes a moving unit 16 and a stage actuator 17. In addition, in FIG. 9, the illustration of the case 161 of the moving unit 16 is omitted.

In the inspection system 10B according to the first modification, the detection camera 2 is attached to the inspection illumination 5 via the attachment member 18. The mounting member 18 has a semi-elliptical shape when viewed from the Z direction. The detection camera 2 is fixed to the side surface (end surface) of the mounting member 18 in the X direction. Therefore, in the state where the detection camera 2 is attached to the inspection illumination 5 via the attachment member 18, the inspection camera 1 and the inspection illumination 5 and the detection camera 2 are arranged in the X direction. The detection camera 2 is movable in the Z direction together with the inspection illumination 5 by moving the illumination actuator 8 in the Z direction.

Thus, when the detection camera 2 is attached to the inspection illumination 5, there is an advantage that the inspection camera 1 and the inspection illumination 5 are less likely to be in the visual field of the detection camera 2. Furthermore, in this case, since the distance between the stage 3 and the detection camera 2 can be secured by moving the illumination actuator 8 in the Z direction, an image with little distortion (entire image of the stage 3) can be obtained. It becomes possible to acquire.

(4.2) Modification 2
In the inspection system 10A according to the second embodiment, the detection camera 2 is attached to the case 161 of the moving unit 16, but as shown in FIG. 10, the detection camera 2 may be attached to the inspection camera 1 as well. Good. Hereinafter, an inspection system 10C according to Modification 2 will be described with reference to FIG. Regarding the inspection system 10C according to the second modification, the same components as those of the inspection system 10A according to the second embodiment are denoted by the same reference numerals and the description thereof will be omitted.

The inspection system 10C according to Modification 2 includes an inspection camera 1, a detection camera 2, a stage 3, and an adjusting mechanism 4, as shown in FIG. The inspection system 10C further includes an inspection illumination 5, a detection illumination (not shown), a camera actuator 7, an illumination actuator 8, and a housing 15. The adjustment mechanism 4 includes a moving unit 16 and a stage actuator 17. Note that the illustration of the case 161 of the moving unit 16 is omitted in FIG. 10.

In the inspection system 10C according to the second modification, the detection camera 2 is attached to the inspection camera 1 via the attachment member 19. The mounting member 19 has an L shape when viewed from the Y direction. The detection camera 2 is attached to the inspection camera 1 (strictly speaking, the camera actuator 7) by the attachment member 19. Therefore, in the state where the detection camera 2 is attached to the inspection illumination 5 via the attachment member 19, the inspection camera 1 and the inspection illumination 5 and the detection camera 2 are aligned in the X direction. The detection camera 2 can move in the Z direction together with the inspection camera 1 by moving the camera actuator 7 in the Z direction.

As described above, when the detection camera 2 is attached to the inspection camera 1, there is an advantage that the inspection camera 1 and the inspection illumination 5 are less likely to enter the visual field of the detection camera 2. Furthermore, in this case, since the distance between the stage 3 and the detection camera 2 can be secured by moving the camera actuator 7 in the Z direction, an image with little distortion (entire image of the stage 3) can be obtained. It becomes possible to acquire.

(4.3) Modification 3
In the inspection system 10A according to the second embodiment, the detection camera 2 is held by the case 161 of the moving unit 16 and is movable in the Y direction together with the moving unit 16, but as shown in FIG. The camera 2 may be attached to the housing 15. Hereinafter, the inspection system 10D according to Modification 3 will be described with reference to FIG. Regarding the inspection system 10D according to the modification 3, the same components as those of the inspection system 10A according to the second embodiment are designated by the same reference numerals, and the description thereof will be omitted.

As shown in FIG. 11, an inspection system 10D according to Modification 3 includes an inspection camera (not shown), a detection camera 2, a stage 3, and an adjusting mechanism 4 (only the moving unit 16 is shown in FIG. 11). And are equipped with. The inspection system 10D further includes an inspection illumination 5, a detection illumination (not shown), a camera actuator (not shown), an illumination actuator (not shown), and a housing 15. I have it. The adjusting mechanism 4 includes a moving unit 16 and a stage actuator (not shown).

The detection camera 2 is attached to the side surface of the second body 1522 of the housing 15 extending along the Y direction. Specifically, the detection camera 2 is attached to a side surface of the second body 1522 opposite to the side surface to which the moving unit 16 is attached. In other words, the detection camera 2 is directly attached to the housing 15 without the adjustment mechanism 4. In the inspection system 10D according to Modification 3, the stage 3 is configured to move only in the X direction and not move in the Y direction. Therefore, when the stage 3 is photographed, the detection camera 2 is moved in the Y direction. The detection camera 2 may not be provided, and the detection camera 2 may be disposed on the side surface of the housing 15. Further, since the moment applied to the Y-direction actuator can be reduced as compared with the case where the detection camera 2 is held by the moving unit 16, the Y-direction actuator can be downsized.

As described above, when the detection camera 2 is attached to the housing 15, by raising the inspection camera 1 by the camera actuator 7 and raising the inspection illumination 5 by the illumination actuator 8, The field of view of the camera 2 can be secured.

(4.4) Modification 4
In Embodiment 2 and Modifications 1 and 2, the detection camera 2 is housed inside the case 161, but the detection camera 2 may be aligned with the moving unit 16 in the first direction. Although not shown, the detection camera 2 may be attached to, for example, one side surface of the case 161 of the moving unit 16 in the X direction. In this case, the X direction is the first direction, and the moving unit 16 and the detection camera 2 are lined up in the first direction. According to this configuration, there is an advantage that the position adjustment of the detection camera 2 in the optical axis direction of the inspection camera 1 is unnecessary.

(Summary)
As described above, the inspection system (10; 10A to 10D) according to the first aspect is the inspection system (10; 10A to 10D) that inspects the appearance of the inspection target (100). The inspection system (10; 10A to 10D) includes an inspection camera (1), a detection camera (2), a stage (3), and an adjusting mechanism (4). The inspection camera (1) is composed of a camera having an image sensor in which a plurality of light receiving elements are arranged two-dimensionally, and images the inspection region (R1) including at least a part of the inspection target (100). The detection camera (2) is composed of a camera having an image pickup device in which a plurality of light receiving elements are two-dimensionally arranged, includes an inspection region (R1), and is a detection region (R2) wider than the inspection region (R1). Image. The inspection target (100) is placed on the stage (3). The adjustment mechanism (4) adjusts the relative position between the stage (3) and the inspection camera (1) based on the image of the detection region (R2) taken by the detection camera (2).

According to this aspect, unlike the case where the line sensor camera preliminarily positions the inspection target, the process of moving the stage on which the inspection target is placed in one direction is unnecessary, and the inspection efficiency is correspondingly increased. Can be improved.

In the inspection system (10; 10A to 10D) according to the second aspect, the inspection target (100) is plural in the first aspect. The adjustment mechanism (4) moves the stage (3) in a direction (X direction and Y direction) that intersects the optical axis (axis in the Z direction) of the inspection camera (1), and thereby a plurality of inspection targets (100 The inspection camera (1) is arranged at each position of (1).

According to this aspect, the inspection camera (1) can be arranged at each position of the plurality of inspection objects (100).

The inspection system (10; 10A to 10D) according to the third aspect further includes an inspection illumination (5) in the first or second aspect. The inspection illumination (5) irradiates the inspection region (R1) with light. The inspection illumination (5) is a ring illumination (51) having an annular light source.

According to this aspect, a clearer image can be acquired as compared with the case where the inspection illumination (5) is not provided. Further, since the inspection illumination (5) is the ring illumination (51), it is difficult for the inspection object (100) to have a shadow, and the inspection object (100) can be irradiated with uniform light.

In the inspection system (10) according to the fourth aspect, in the third aspect, the detection camera (2) is arranged outside the ring illumination (51) in the radial direction.

According to this aspect, it is possible to reduce the reflection of the inspection camera (1) in the detection area (R2). Furthermore, the ring illumination (51) can be downsized as compared with the case where the detection camera (2) is arranged inside the ring illumination (51).

The inspection system (10) according to the fifth aspect further includes the camera actuator (7) and the illumination actuator (8) in the third or fourth aspect. The camera actuator (7) moves the inspection camera (1) in a direction toward the inspection object (100) mounted on the stage (3) and in a direction away from the inspection object (100). The illumination actuator (8) moves the inspection illumination (5) toward the inspection target (100) mounted on the stage (3) and in the direction away from the inspection target (100). The camera actuator (7) and the illumination actuator (8) operate independently.

According to this aspect, the focus operation of the inspection camera (1) and the adjustment of the illumination condition of the inspection illumination (5) can be performed separately.

In the inspection system (10B) according to the sixth aspect, in any one of the third to fifth aspects, the detection camera (2) is attached to the inspection illumination (5).

According to this aspect, there is an advantage that it is difficult for the inspection camera (1) and the inspection illumination (5) to be in the visual field of the detection camera (2).

In the inspection system (10C) according to the seventh aspect, in any one of the first to fifth aspects, the detection camera (2) is attached to the inspection camera (1).

According to this aspect, there is an advantage that it is difficult for the inspection camera (1) and the inspection illumination (5) to be in the visual field of the detection camera (2).

The inspection system (10D) according to the eighth aspect further includes a housing (15) in any one of the first to seventh aspects. The detection camera (1) is directly attached to the housing (15) without the adjustment mechanism (4).

According to this configuration, there is an advantage that the position adjustment of the detection camera (2) is unnecessary.

In the inspection system (10A to 10D) according to the ninth aspect, in any one of the first to eighth aspects, the adjustment mechanism (4) has a first direction (eg, the first direction) intersecting the optical axis of the inspection camera (1). The stage (3) is moved in the (X direction). The adjustment mechanism (4) moves the inspection camera (1) in a second direction (for example, the Y direction) that intersects the optical axis of the inspection camera (1) and intersects the first direction.

According to this aspect, the actuator for moving the stage 3 can be downsized as compared with the case where the stage 3 is moved in both the X direction and the Y direction.

In the inspection system (10A to 10D) according to the tenth aspect, in the ninth aspect, the adjustment mechanism (4) includes a moving unit (16) that can move in the second direction (for example, the Y direction). The inspection camera (1) is aligned with the moving unit (16) in the first direction (for example, the X direction).

According to this aspect, there is an advantage that the position adjustment of the detection camera (2) in the optical axis direction of the inspection camera (1) is unnecessary.

In the inspection system (10) according to the eleventh aspect, in any one of the first to tenth aspects, the angle of view of the detection camera (2) is wider than the angle of view of the inspection camera (1).

According to this aspect, since the detection camera (2) has a wide viewing angle (wide angle), the position of the inspection target (100) is detected using the detection camera (2) and the adjustment mechanism (4) is used. The operation of adjusting the relative position between the stage (3) and the inspection camera (1) at a position where the optical axis of the inspection camera (1) and the center point of the inspection target 100 coincide can be efficiently performed. .. In addition, since the inspection camera (1) has a narrow viewing angle, it is possible to observe minute defects in the inspection target (100) using the inspection camera (1), so that the inspection can be performed efficiently. it can.

The image acquisition method for inspection according to the twelfth aspect is the image acquisition method for inspection in the inspection system (10) for inspecting the appearance of the inspection target (100). The image acquisition method for inspection includes three processes. The first process is an inspection area (R1) including at least a part of an inspection object (100) in an inspection camera (1) including a camera having an image pickup device in which a plurality of light receiving elements are arranged two-dimensionally. Is a process for imaging. In the second process, a detection camera (2) including a camera having an image sensor in which a plurality of light receiving elements are two-dimensionally arranged includes an inspection region (R1) and is more than the inspection region (R1). This is a process of imaging a wide detection area (R2). The third process is the relative movement between the inspection camera (1) and the stage (3) on which the inspection target (100) is placed, based on the image of the detection region (R2) captured by the detection camera (2). This is the process of adjusting the position. The order of the above three processes is arbitrary. For example, the second process and the third process may be performed before the first process.

According to this aspect, unlike the case where the line sensor camera preliminarily positions the inspection target, the process of moving the stage on which the inspection target is placed in one direction is unnecessary, and the inspection efficiency is correspondingly increased. Can be improved.

The inspection system (10) according to the thirteenth aspect further includes an inspection illumination (5A) that irradiates the inspection region (R1) with light in the first or second aspect. The inspection illumination (5A) is a coaxial epi-illumination (52). The coaxial incident illumination (52) irradiates the inspection region (R1) with light from a direction coinciding with the optical axis (P1) of the inspection camera (1).

According to this aspect, there is an advantage that it is effective when the inspection target (100) is a glossy metal object.

The inspection system (10) according to the fourteenth aspect further includes the detection illumination (6) in any one of the first to fourth and thirteenth aspects. The detection illumination (6) irradiates the detection area (R2) with light.

According to this aspect, it is possible to obtain a clear image as compared with the case where the detection illumination (6) is not provided.

The inspection system (10) according to the fifteenth aspect further includes the inspection illumination (5; 5A) in the fourteenth aspect. The inspection illumination (5; 5A) irradiates the inspection region (R1) with light. The inspection illumination (5; 5A) and the detection illumination (6) are separately provided.

According to this aspect, it is possible to realize illumination suitable for each of the inspection area (R1) and the detection area (R2).

The inspection system (10) according to the sixteenth aspect further includes a camera actuator (7) according to any one of the first to fourth and thirteenth to fifteenth aspects. The camera actuator (7) moves the inspection camera (1) in a direction toward the inspection object (100) mounted on the stage (3) and in a direction away from the inspection object (100).

According to this aspect, the focus operation of the inspection camera (1) can be performed.

In the inspection system (10) according to the seventeenth aspect, in the sixteenth aspect, the detection camera (2) moves together with the inspection camera (1) by the camera actuator (7).

According to this aspect, the focus operation of both the inspection camera (1) and the detection camera (2) can be performed by one camera actuator (7).

The inspection system (10) according to the eighteenth aspect further comprises an inspection illumination (5) and an illumination actuator (8) according to any one of the first to fourth and thirteenth to seventeenth aspects. The inspection illumination (5) irradiates the inspection region (R1) with light. The illumination actuator (8) moves the inspection illumination (5) toward the inspection target (100) mounted on the stage (3) and in the direction away from the inspection target (100).

According to this aspect, the illumination condition of the inspection illumination (5) can be adjusted.

The configurations according to the second to eleventh and thirteenth to eighteenth aspects are not essential for the inspection system (10; 10A to 10D) and can be omitted as appropriate.

1 Inspection Camera 2 Detection Camera 3 Stage 4 Adjustment Mechanism 5, 5A Inspection Lighting 6 Detection Lighting 7 Camera Actuator 8 Lighting Actuator 10, 10A to 10D Inspection System 15 Housing 16 Moving Part 51 Ring Lighting 52 Coaxial Epi-illumination Illumination 100 Inspection target R1 Inspection area R2 Detection area

Claims (12)

1. An inspection system for inspecting the appearance of an inspection object,
   An inspection camera, which comprises a camera having an image sensor in which a plurality of light receiving elements are two-dimensionally arranged, and which images an inspection area including at least a part of the inspection object,
   A detection camera, which comprises a camera having an imaging element in which a plurality of light receiving elements are two-dimensionally arranged, and which includes the inspection area and images a detection area wider than the inspection area,
   A stage on which the inspection target is placed,
   An adjusting mechanism that adjusts a relative position between the stage and the inspection camera based on an image of the detection region imaged by the detection camera.
   Inspection system.
2. The inspection target is plural,
   The adjustment mechanism disposes the inspection camera at each position of the plurality of inspection targets by moving the stage in a direction intersecting the optical axis of the inspection camera.
   The inspection system according to claim 1.
3. Further comprising an inspection illumination for irradiating the inspection area with light,
   The inspection illumination is a ring illumination having an annular light source,
   The inspection system according to claim 1.
4. The detection camera is arranged outside in the radial direction of the ring illumination,
   The inspection system according to claim 3.
5. A camera actuator that moves the inspection camera in a direction approaching the inspection target mounted on the stage and in a direction away from the inspection target;
   A direction for approaching the inspection target, and an illumination actuator for moving the inspection illumination in a direction away from the inspection target,
   The camera actuator and the illumination actuator operate independently,
   The inspection system according to claim 3 or 4.
6. The detection camera is attached to the inspection illumination,
   The inspection system according to any one of claims 3 to 5.
7. The detection camera is attached to the inspection camera,
   The inspection system according to any one of claims 1 to 5.
8. Further provided with a housing,
   The detection camera is directly attached to the housing without going through the adjustment mechanism,
   The inspection system according to any one of claims 1 to 7.
9. The adjustment mechanism is
   Moving the stage in a first direction intersecting the optical axis of the inspection camera,
   Moving the inspection camera in a second direction that intersects the optical axis of the inspection camera and intersects the first direction;
   The inspection system according to any one of claims 1 to 8.
10. The adjustment mechanism includes a moving unit that is movable in the second direction,
    The inspection camera is aligned with the moving unit in the first direction,
    The inspection system according to claim 9.
11. The angle of view of the detection camera is wider than the angle of view of the inspection camera,
    The inspection system according to any one of claims 1 to 10.
12. An image acquisition method for inspection in an inspection system for inspecting the appearance of an inspection target,
    A process for imaging an inspection area including at least a part of the inspection target with an inspection camera including a camera having an image sensor in which a plurality of light receiving elements are two-dimensionally arranged;
    A detection camera including a camera having an image sensor in which a plurality of light receiving elements are two-dimensionally arrayed, a process of capturing an image of a detection region including the inspection region and wider than the inspection region;
    A process of adjusting a relative position between the stage on which the inspection target is placed and the inspection camera based on an image of the detection region imaged by the detection camera,
    Image acquisition method for inspection.

Images