WO2020119686A1 - 压电位移驱动器的控制系统 - Google Patents

压电位移驱动器的控制系统 Download PDF

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WO2020119686A1
WO2020119686A1 PCT/CN2019/124355 CN2019124355W WO2020119686A1 WO 2020119686 A1 WO2020119686 A1 WO 2020119686A1 CN 2019124355 W CN2019124355 W CN 2019124355W WO 2020119686 A1 WO2020119686 A1 WO 2020119686A1
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displacement
piezoelectric
circuit
bridge arm
signal
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陈巍
梁元博
罗栋
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Shenzhen Institute of Advanced Technology of CAS
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/04—Program control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Program control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G05B19/0423—Input/output
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/04—Program control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Program control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/21—Pc I-O input output
    • G05B2219/21137—Analog to digital conversion, ADC, DAC

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  • the invention belongs to the technical field of displacement actuators, and particularly relates to a control system of a piezoelectric displacement actuator.
  • the micro-displacement drive is a key execution link in the precision drive system.
  • the types of existing micro-displacement drive components include electromechanical drives, electromagnetic drives, piezoelectric drives, and magnetostrictive drives.
  • the piezoelectric displacement driver has obvious advantages compared with other types of driving due to its small size, high resolution, fast response, no noise, small external interference and large thrust.
  • piezoelectric ceramic displacement actuators Due to the hysteresis characteristics of piezoelectric ceramics, piezoelectric ceramic displacement actuators have the greatest difficulty in improving hysteresis characteristics and achieving closed-loop stability control.
  • the hysteresis characteristic is specifically manifested as multi-valued mapping when the input voltage is applied, that is, for the same input signal, its output signal will appear multi-valued if there is no reference to the historical output status of the system. In order to determine the output of the system, the output signal depends not only on the current value of the input signal, but also on the previous state of the system, showing memory.
  • the physical hysteresis model is based on the description of the basic physical principles of hysteretic materials, and the hysteresis model is derived from the relationship between energy, displacement, or stress-strain physical quantities.
  • the phenomenological hysteresis model is based on the phenomenological characteristics of the hysteresis curve, and directly uses an effective mathematical model to characterize the hysteresis curve without paying attention to the physical meaning of the hysteresis system. It is a more common one in current research and application.
  • the existing piezoelectric ceramic drive control method based on the hysteresis inverse model is to first model the hysteresis model, and then establish the hysteresis inverse model through numerical calculation and analytical methods, and then on this basis, design the feedforward based on the inverse model
  • the controller eliminates the effects of hysteretic nonlinearity, and the system after inverse model compensation can be regarded as a linear system approximately.
  • closed-loop control is also added to compensate for the uncertainty and interference of the system.
  • an integrated sensor is usually added to the piezoelectric ceramic displacement drive.
  • the integrated sensor is used to detect the displacement of the displacement drive and the actual displacement signal is fed back to the control system.
  • the disadvantage is that the additional sensor and the implementation The dynamic characteristics of the actuator (displacement driver) are not exactly the same, which makes the stability of the system worse, and the sensor system has a large volume and is not easy to be miniaturized.
  • the present invention provides a control system for a piezoelectric displacement actuator, based on piezoelectric ceramic self-sensing detection for closed-loop feedback, which can speed up the system response speed, improve performance, and make the system volume , Weight reduction.
  • a control system for a piezoelectric displacement driver wherein the control system includes an FPGA control circuit, a power amplifier circuit, a piezoelectric displacement driver, and a self-sensing feedback circuit; the FPGA control circuit is based on an expected displacement signal and the self-sensing feedback The actual displacement signal fed back by the circuit generates a control voltage signal, and the control voltage signal is input to the power amplifying circuit; the power amplifying circuit amplifies the control voltage signal to form a driving voltage and input the piezoelectric displacement A driver to cause the piezoelectric displacement driver to generate a corresponding displacement; the self-sensing feedback circuit is connected to the piezoelectric displacement driver and uses the piezoelectric displacement driver as an inductor, and the self-sensing feedback circuit is based on The displacement amount of the piezoelectric displacement driver generates a corresponding actual displacement signal and feeds back to the FPGA control circuit.
  • the FPGA control circuit includes a sliding mode control module, a digital-to-analog conversion module, and an analog-to-digital conversion module; the sliding mode control module generates a control voltage signal according to an expected displacement signal and an actual displacement signal fed back by the self-aware feedback circuit
  • the digital-to-analog conversion module is connected between the sliding mode control module and the power amplifier circuit, and is used to convert the digital signal of the control voltage signal into an analog signal;
  • the analog-to-digital conversion module is connected to the The sliding mode control module and the self-aware feedback circuit are used to convert the analog signal of the actual displacement signal fed back by the self-aware feedback circuit into a digital signal.
  • the sliding mode control module is a sliding mode control module provided with a second-order sliding mode algorithm.
  • the self-sensing feedback circuit is a bridge circuit, and the piezoelectric displacement driver is connected to one of the bridge arms of the bridge circuit.
  • the electric bridge circuit includes a first bridge arm, a second bridge arm, a third bridge arm, and a fourth bridge arm that are connected in sequence.
  • the first bridge arm is provided with the piezoelectric displacement driver.
  • a first resistor is provided on the second bridge arm, a second resistor is provided on the third bridge arm, and a reference capacitor is provided on the fourth bridge arm; wherein, the positive electrode of the driving voltage provided by the power amplifier circuit is connected At the connection point of the first bridge arm and the fourth bridge arm, the negative electrode is connected to the connection point of the second bridge arm and the third bridge arm; the first bridge arm and the second bridge
  • a feedback actual displacement signal is output between the connection point of the arm and the connection point of the third bridge arm and the fourth bridge arm.
  • the piezoelectric displacement driver includes a displacement amplification mechanism and a piezoelectric ceramic.
  • the driving voltage provided by the power amplification circuit causes the length of the piezoelectric ceramic to change. The change in length is amplified.
  • the control system of the piezoelectric displacement driver uses piezoelectric ceramic self-sensing detection for closed-loop feedback.
  • the piezoelectric ceramic in the piezoelectric displacement driver is not only used as a driver of the displacement mechanism, but also as a closed-loop feedback
  • the sensor, driver and sensor in the circuit are integrated, which can speed up the system's response speed and performance, and also reduce the number of sensors required by the system, reducing the system volume and system weight.
  • FIG. 1 is a structural block diagram of a control system of a piezoelectric displacement driver provided by an embodiment of the present invention
  • FIG. 2 is a schematic structural diagram of a piezoelectric displacement driver in an embodiment of the present invention.
  • FIG. 3 is a circuit diagram of a self-aware feedback circuit in an embodiment of the present invention.
  • This embodiment provides a control system for a piezoelectric displacement driver.
  • the control system includes an FPGA control circuit 1, a power amplifier circuit 2, a piezoelectric displacement driver 3, and a self-sensing feedback circuit 4.
  • the FPGA control circuit 1 generates a control voltage signal according to the expected displacement signal and the actual displacement signal fed back by the self-aware feedback circuit 4, and inputs the control voltage signal to the power amplification circuit 2.
  • the power amplifier circuit 2 power-amplifies the control voltage signal to form a driving voltage and inputs it to the piezoelectric displacement driver 3, so that the piezoelectric displacement driver 3 generates a corresponding displacement;
  • the self-sensing feedback circuit 4 Connected to the piezoelectric displacement driver 3 and using the piezoelectric displacement driver 3 as an inductor, the self-sensing feedback circuit 4 generates a corresponding actual displacement signal according to the displacement of the piezoelectric displacement driver 3 and feeds back to the FPGA control circuit 1.
  • the piezoelectric displacement driver 3 includes a displacement amplification mechanism 31 and a piezoelectric ceramic 32.
  • the piezoelectric ceramic 32 has positive and negative electrodes to receive the driving voltage output by the power amplification circuit 2.
  • the driving voltage provided by the power amplifying circuit 2 changes the length of the piezoelectric ceramic 32, and the displacement amplifying mechanism 31 amplifies the change in the length of the piezoelectric ceramic 32.
  • the FPGA control circuit 1 includes a sliding mode control module 11, a digital-to-analog conversion module 12, and an analog-to-digital conversion module 13.
  • the digital-to-analog conversion module 12 is connected between the sliding mode control module 11 and the power amplifier circuit 2, and the analog-to-digital conversion module 13 is connected to the self-aware feedback circuit 4 and the sliding mode control module 11 between.
  • the sliding mode control module 11 generates a control voltage signal according to the expected displacement signal and the actual displacement signal fed back by the self-aware feedback circuit 4, and the control voltage signal is a digital signal.
  • the digital-to-analog conversion module 12 is used to convert the digital signal of the control voltage signal into an analog signal, and then input the analog signal of the control voltage signal to the power amplifier circuit 2.
  • the self-sensing feedback circuit 4 uses the piezoelectric displacement driver 3 as a sensor to obtain an analog signal of an actual displacement signal, and the analog-to-digital conversion module 13 is used to convert the analog signal of the actual displacement signal into a digital signal, and then The digital signal of the actual displacement signal is input to the sliding mode control module 11.
  • the sliding mode control algorithm is used to generate the control signal, which does not need to be realized by modeling a complex hysteresis model. It has the advantages of high output displacement accuracy, compact structure, high linearity, etc., and is simplified compared to establishing an accurate hysteresis model. The amount of calculation improves the performance of the control system.
  • the sliding mode control module 11 is a sliding mode control module provided with a second-order sliding mode algorithm, specifically a second-order Twisting sliding mode control algorithm.
  • the self-sensing feedback circuit 4 is a bridge circuit, and the piezoelectric displacement driver 3 is connected to one of the bridge arms of the bridge circuit.
  • the electric bridge circuit includes a first bridge arm L 1 , a second bridge arm L 2 , a third bridge arm L 3, and a fourth bridge arm L 4 connected in this order.
  • the first bridge arm L 1 is provided with a piezoelectric ceramic 32 of the piezoelectric displacement driver 3.
  • the capacitance C p on the first bridge arm L 1 is the equivalent binding capacitance of the piezoelectric ceramic 32
  • the voltage U p is the voltage generated by the piezoelectric ceramic 32 due to strain.
  • the second bridge arm of the L is provided with a first resistor R 1
  • the third bridge arm of the L is provided with a second resistor R 2
  • the fourth leg L 4 is provided with a reference capacitance C r 3 2.
  • the positive electrode of the driving voltage U c provided by the power amplifier circuit 2 is connected to the connection point of the first bridge arm L 1 and the fourth bridge arm L 4
  • the negative electrode is connected to the second bridge arm L 2 A connection point with the third bridge arm L 3; a connection point between the first bridge arm L 1 and the second bridge arm L 2 and the third bridge arm L 3 and the fourth bridge arm L
  • the actual displacement signal U s fed back is output between the connection points of 4 .
  • the bridge circuit by selecting the first debug resistor R 1, a second resistor R 2 and the specific parameters of the reference capacitance C r of the initial state such that the electrical bridge circuit is balanced bridge.
  • the capacitance C p and the voltage U p in the bridge circuit change, thereby obtaining the corresponding actual displacement signal U s at the output end of the bridge.
  • the displacement driver and displacement sensor are integrated.
  • the control system of the piezoelectric displacement actuator provided by the embodiment of the present invention: firstly, a sliding mode control algorithm is used to generate a control signal, which does not need to be realized by modeling a complex hysteresis model, which has an output displacement High precision, compact structure, high linearity and other advantages; the second is the use of piezoelectric ceramic self-sensing detection for closed-loop feedback.
  • the piezoelectric ceramic in the piezoelectric displacement driver is not only used as a displacement mechanism driver, but also as a closed-loop feedback circuit
  • the sensor, driver and sensor are integrated into one, which can speed up the system response speed and improve performance, and also reduce the number of sensors required by the system, reducing the system volume and system weight.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

提供了一种压电位移驱动器的控制系统，其包括FPGA控制电路（1）、功率放大电路（2）、压电位移驱动器（3）以及自感知反馈电路（4）；FPGA控制电路（1）根据预期位移信号和反馈的实际位移信号生成控制电压信号，输入至功率放大电路（2）；功率放大电路（2）将控制电压信号进行功率放大形成驱动电压输入至压电位移驱动器（3）；自感知反馈电路（4）与压电位移驱动器（3）连接并将压电位移驱动器（3）作为感应器，根据压电位移驱动器（3）的位移量生成相应的实际位移信号反馈至FPGA控制电路（1）。该控制系统是基于压电陶瓷自感知探测进行闭环反馈，可以使系统响应速度加快，性能提高，并使系统的体积、重量减小。

Description

压电位移驱动器的控制系统 技术领域
本发明属于位移驱动器技术领域，具体涉及一种压电位移驱动器的控制系统。
背景技术
微位移驱动器是精密驱动系统中的关键执行环节，现有的微位移驱动元件种类包括机电驱动类、电磁驱动类、压电驱动类、磁致伸缩驱动类。压电位移驱动器以其体积小、分辨率高、响应快、无噪声、外界干扰小和推力大等特点相比与其他种类驱动具有明显优点。
压电陶瓷位移驱动器由于压电陶瓷本身的迟滞特性，改善迟滞特性并实现闭环稳定控制为本领域的最大难点。迟滞特性具体表现为在通有输入电压时表现出多值映射性，即对相同的输入信号，其输出信号若无系统历史输出状态参考的情况下会出现多值。为了确定系统的输出量，输出信号不仅依赖于输入信号当前值，还依赖于系统以前的状态，呈现出记忆性。
目前，对于迟滞模型的研究一直是理论界的热点和难点问题，迟滞模型的精确建立是一项极富挑战性的工作，且尚无统一的迟滞模型。迄今为止专家学者们研究的迟滞数学模型主要包括两类：物理迟滞模型和唯象迟滞模型。物理迟滞模型是从描述迟滞材料的基本物理原理出发，通过能量、位移或者应力-应变的物理量的关系推导迟滞模型。唯象迟滞模型是从迟滞曲线的唯象特性出发，直接采用有效的数学模型表征迟滞曲线，无需关注迟滞系统的物理意义，是目前研究和应用中更为普遍的一种。
现有的基于迟滞逆模型的压电陶瓷驱动控制方法为对迟滞模型先进行建模，再通过数值计算法和解析法建立磁滞逆模型，然后在此基础上，设计基于逆模型的前馈控制器消除迟滞非线性带来的影响，经过逆模型补偿后的系统可近似看作是线性系统。实际应用时，为达到精确控制系统线性度的目的，还加入闭环控制以补偿系统的不确定性和干扰。现有的闭环控制系统中，通常是在压电陶瓷位移驱动器上外加集成的传感器，通过集成的传感器来检测位移驱动器发生位移的大小向控制系统反馈实际位移信号，其缺点是外加的传感器与执 行器(位移驱动器)动态特性不完全相同，易使系统的稳定性变差，传感器系统体积较大，不易小型化。
发明内容
为了解决上述现有技术存在的问题，本发明提供了一种压电位移驱动器的控制系统，基于压电陶瓷自感知探测进行闭环反馈，可以使系统响应速度加快，性能提高，并使系统的体积、重量减小。
为了达到上述发明目的，本发明采用了如下的技术方案：
一种压电位移驱动器的控制系统，其中，所述控制系统包括FPGA控制电路、功率放大电路、压电位移驱动器以及自感知反馈电路；所述FPGA控制电路根据预期位移信号和所述自感知反馈电路反馈的实际位移信号生成控制电压信号，并将所述控制电压信号输入至所述功率放大电路；所述功率放大电路将所述控制电压信号进行功率放大形成驱动电压输入至所述压电位移驱动器，以使所述压电位移驱动器产生相应的位移量；所述自感知反馈电路与所述压电位移驱动器连接并将所述压电位移驱动器作为感应器，所述自感知反馈电路根据所述压电位移驱动器的位移量生成相应的实际位移信号反馈至所述FPGA控制电路。
具体地，所述FPGA控制电路包括滑模控制模块、数模转换模块和模数转换模块；所述滑模控制模块根据预期位移信号和所述自感知反馈电路反馈的实际位移信号生成控制电压信号；所述数模转换模块连接在所述滑模控制模块和所述功率放大电路之间，用于将所述控制电压信号的数字信号转换为模拟信号；所述模数转换模块连接在所述滑模控制模块和所述自感知反馈电路之间，用于将所述自感知反馈电路反馈的实际位移信号的模拟信号转换为数字信号。
具体地，所述滑模控制模块为设置有二阶滑模算法的滑模控制模块。
具体地，所述自感知反馈电路为电桥电路，所述压电位移驱动器连接在所述电桥电路的其中一个桥臂上。
具体地，所述电桥电路包括依次连接的第一桥臂、第二桥臂、第三桥臂和第四桥臂，所述第一桥臂上设置有所述压电位移驱动器，所述第二桥臂上设置有第一电阻，所述第三桥臂上设置有第二电阻，所述第四桥臂上设置有参考电容；其中，所述功率放大电路提供的驱动电压的正极连接于所述第一桥臂和所述第四桥臂的连接点，负极连接于所述第二桥臂和所述第三桥臂的连接点；所 述第一桥臂和所述第二桥臂的连接点与所述第三桥臂和所述第四桥臂的连接点之间输出反馈的实际位移信号。
具体地，所述压电位移驱动器包括位移放大机构和压电陶瓷，所述功率放大电路提供的驱动电压使得所述压电陶瓷的长度发生变化，所述位移放大机构将所述压电陶瓷的长度变化进行放大。
本发明实施例提供的压电位移驱动器的控制系统，采用压电陶瓷自感知探测进行闭环反馈，压电位移驱动器中的压电陶瓷不仅用于作为位移机构的驱动器，并且还用于作为闭环反馈电路中的感应器，驱动器和感应器融为一体，可以使系统响应速度加快，性能提高，并且还减少了系统所需传感器数量，使系统体积减小、系统重量降低。
附图说明
图1是本发明实施例提供的压电位移驱动器的控制系统的结构框图；
图2是本发明实施例中的压电位移驱动器的结构示意图；
图3是本发明实施例中的自感知反馈电路的电路图。
具体实施方式
为使本发明的目的、技术方案和优点更加清楚，下面结合附图对本发明的具体实施方式进行详细说明。这些优选实施方式的示例在附图中进行了例示。附图中所示和根据附图描述的本发明的实施方式仅仅是示例性的，并且本发明并不限于这些实施方式。
在此，还需要说明的是，为了避免因不必要的细节而模糊了本发明，在附图中仅仅示出了与根据本发明的方案密切相关的结构和/或处理步骤，而省略了与本发明关系不大的其他细节。
本实施例提供了一种压电位移驱动器的控制系统，如图1所示，所述控制系统包括FPGA控制电路1、功率放大电路2、压电位移驱动器3以及自感知反馈电路4。
其中，所述FPGA控制电路1根据预期位移信号和所述自感知反馈电路4反馈的实际位移信号生成控制电压信号，并将所述控制电压信号输入至所述功率放大电路2。所述功率放大电路2将所述控制电压信号进行功率放大形成驱动电压输入至所述压电位移驱动器3，以使所述压电位移驱动器3产生相应的位移 量；所述自感知反馈电路4与所述压电位移驱动器3连接并将所述压电位移驱动器3作为感应器，所述自感知反馈电路4根据所述压电位移驱动器3的位移量生成相应的实际位移信号反馈至所述FPGA控制电路1。
其中，如图2所示，所述压电位移驱动器3包括位移放大机构31和压电陶瓷32，所述压电陶瓷32具有正负电极以接收所述功率放大电路2输出的驱动电压，所述功率放大电路2提供的驱动电压使得所述压电陶瓷32的长度发生变化，所述位移放大机构31将所述压电陶瓷32的长度变化进行放大。
本实施例中，如图1所示，所述FPGA控制电路1包括滑模控制模块11、数模转换模块12和模数转换模块13。所述数模转换模块12连接在所述滑模控制模块11和所述功率放大电路2之间，所述模数转换模块13连接在所述自感知反馈电路4和所述滑模控制模块11之间。所述滑模控制模块11根据预期位移信号和所述自感知反馈电路4反馈的实际位移信号生成控制电压信号，该控制电压信号为数字信号。所述数模转换模块12用于将所述控制电压信号的数字信号转换为模拟信号，再将该控制电压信号的模拟信号输入到所述功率放大电路2。所述自感知反馈电路4以所述压电位移驱动器3作为感应器获取实际位移信号的模拟信号，所述模数转换模块13用于将所述实际位移信号的模拟信号转换为数字信号，再将该实际位移信号的数字信号输入到所述滑模控制模块11。
本发明中采用滑模控制算法生成控制信号，不需要通过对复杂的磁滞模型建模来实现，其具有输出位移精度高、结构紧凑、线性度高等优点，并且相比建立精确迟滞模型简化了计算量，提升了控制系统的性能。在优选的方案中，所述滑模控制模块11为设置有二阶滑模算法的滑模控制模块，具体是设置有二阶Twisting滑模控制算法。
其中，所述自感知反馈电路4为电桥电路，所述压电位移驱动器3连接在所述电桥电路的其中一个桥臂上。具体地，如图3所示，所述电桥电路包括依次连接的第一桥臂L 1、第二桥臂L 2、第三桥臂L 3和第四桥臂L 4。所述第一桥臂L 1上设置有所述压电位移驱动器3的压电陶瓷32，如图3中，第一桥臂L 1上的电容C p是压电陶瓷32的等效束缚电容，电压U p是压电陶瓷32由于应变而产生的电压。所述第二桥臂L 2上设置有第一电阻R 1，所述第三桥臂L 3上设置有第二电阻R 2，所述第四桥臂L 4上设置有参考电容C r。其中，所述功率放大电路2提供的驱动电压U c的正极连接于所述第一桥臂L 1和所述第四桥臂L 4的连接点，负极连接于所述第二桥臂L 2和所述第三桥臂L 3的连接点；所述第一桥臂L 1和 所述第二桥臂L 2的连接点与所述第三桥臂L 3和所述第四桥臂L 4的连接点之间输出反馈的实际位移信号U s。
所述电桥电路中，通过调试选择第一电阻R 1、第二电阻R 2以及参考电容C r的具体参数使得电桥电路的初始状态为平衡电桥。当驱动电压U c驱动所述压电陶瓷32的长度发生变化时，电桥电路中的电容C p和电压U p发生变化，由此在电桥输出端获得相应的实际位移信号U s。基于以上的电桥电路，实现了位移驱动器和位移感应器融为一体。
综上所述，根据本发明的实施例提供的压电位移驱动器的控制系统：首先是采用滑模控制算法生成控制信号，不需要通过对复杂的磁滞模型建模来实现，其具有输出位移精度高、结构紧凑、线性度高等优点；其次是采用压电陶瓷自感知探测进行闭环反馈，压电位移驱动器中的压电陶瓷不仅用于作为位移机构的驱动器，并且还用于作为闭环反馈电路中的感应器，驱动器和感应器融为一体，可以使系统响应速度加快，性能提高，并且还减少了系统所需传感器数量，使系统体积减小、系统重量降低。
虽然已经参照特定实施例示出并描述了本发明，但是本领域的技术人员将理解：在不脱离由权利要求及其等同物限定的本发明的精神和范围的情况下，可在此进行形式和细节上的各种变化。

Claims (10)

  1. 一种压电位移驱动器的控制系统，其中，所述控制系统包括FPGA控制电路、功率放大电路、压电位移驱动器以及自感知反馈电路；
    所述FPGA控制电路根据预期位移信号和所述自感知反馈电路反馈的实际位移信号生成控制电压信号，并将所述控制电压信号输入至所述功率放大电路；
    所述功率放大电路将所述控制电压信号进行功率放大形成驱动电压输入至所述压电位移驱动器，以使所述压电位移驱动器产生相应的位移量；
    所述自感知反馈电路与所述压电位移驱动器连接并将所述压电位移驱动器作为感应器，所述自感知反馈电路根据所述压电位移驱动器的位移量生成相应的实际位移信号反馈至所述FPGA控制电路。
  2. 根据权利要求1所述的压电位移驱动器的控制系统，其中，所述FPGA控制电路包括滑模控制模块、数模转换模块和模数转换模块；
    所述滑模控制模块根据预期位移信号和所述自感知反馈电路反馈的实际位移信号生成控制电压信号；
    所述数模转换模块连接在所述滑模控制模块和所述功率放大电路之间，用于将所述控制电压信号的数字信号转换为模拟信号；
    所述模数转换模块连接在所述滑模控制模块和所述自感知反馈电路之间，用于将所述自感知反馈电路反馈的实际位移信号的模拟信号转换为数字信号。
  3. 根据权利要求2所述的压电位移驱动器的控制系统，其中，所述滑模控制模块为设置有二阶滑模算法的滑模控制模块。
  4. 根据权利要求1所述的压电位移驱动器的控制系统，其中，所述自感知反馈电路为电桥电路，所述压电位移驱动器连接在所述电桥电路的其中一个桥臂上。
  5. 根据权利要求4所述的压电位移驱动器的控制系统，其中，所述电桥电路包括依次连接的第一桥臂、第二桥臂、第三桥臂和第四桥臂，所述第一桥臂上设置有所述压电位移驱动器，所述第二桥臂上设置有第一电阻，所述第三桥臂上设置有第二电阻，所述第四桥臂上设置有参考电容；其中，所述功率放大 电路提供的驱动电压的正极连接于所述第一桥臂和所述第四桥臂的连接点，负极连接于所述第二桥臂和所述第三桥臂的连接点；所述第一桥臂和所述第二桥臂的连接点与所述第三桥臂和所述第四桥臂的连接点之间输出反馈的实际位移信号。
  6. 根据权利要求1所述的压电位移驱动器的控制系统，其中，所述压电位移驱动器包括位移放大机构和压电陶瓷，所述功率放大电路提供的驱动电压使得所述压电陶瓷的长度发生变化，所述位移放大机构将所述压电陶瓷的长度变化进行放大。
  7. 根据权利要求2所述的压电位移驱动器的控制系统，其中，所述压电位移驱动器包括位移放大机构和压电陶瓷，所述功率放大电路提供的驱动电压使得所述压电陶瓷的长度发生变化，所述位移放大机构将所述压电陶瓷的长度变化进行放大。
  8. 根据权利要求3所述的压电位移驱动器的控制系统，其中，所述压电位移驱动器包括位移放大机构和压电陶瓷，所述功率放大电路提供的驱动电压使得所述压电陶瓷的长度发生变化，所述位移放大机构将所述压电陶瓷的长度变化进行放大。
  9. 根据权利要求4所述的压电位移驱动器的控制系统，其中，所述压电位移驱动器包括位移放大机构和压电陶瓷，所述功率放大电路提供的驱动电压使得所述压电陶瓷的长度发生变化，所述位移放大机构将所述压电陶瓷的长度变化进行放大。
  10. 根据权利要求5所述的压电位移驱动器的控制系统，其中，所述压电位移驱动器包括位移放大机构和压电陶瓷，所述功率放大电路提供的驱动电压使得所述压电陶瓷的长度发生变化，所述位移放大机构将所述压电陶瓷的长度变化进行放大。
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