WO2020118939A1 - 电子枪、电子加速器以及辐照装置 - Google Patents

电子枪、电子加速器以及辐照装置 Download PDF

Info

Publication number
WO2020118939A1
WO2020118939A1 PCT/CN2019/078221 CN2019078221W WO2020118939A1 WO 2020118939 A1 WO2020118939 A1 WO 2020118939A1 CN 2019078221 W CN2019078221 W CN 2019078221W WO 2020118939 A1 WO2020118939 A1 WO 2020118939A1
Authority
WO
WIPO (PCT)
Prior art keywords
electron
electron gun
accelerator
floating grid
cathode structures
Prior art date
Application number
PCT/CN2019/078221
Other languages
English (en)
French (fr)
Inventor
畅祥云
Original Assignee
陕西利友百辉科技发展有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 陕西利友百辉科技发展有限公司 filed Critical 陕西利友百辉科技发展有限公司
Publication of WO2020118939A1 publication Critical patent/WO2020118939A1/zh

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/48—Electron guns
    • H01J29/485—Construction of the gun or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/48—Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/48—Electron guns
    • H01J29/488—Schematic arrangements of the electrodes for beam forming; Place and form of the elecrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/22—Details of linear accelerators, e.g. drift tubes

Definitions

  • the present disclosure relates to the technical field of irradiation accelerators, and in particular, to an electron gun, an electron accelerator including the electron gun, and an irradiation device including the electron accelerator.
  • Electron linear accelerator is one of the most widely used accelerators. It is widely used in tumor treatment, polymer cross-linking, medical supplies disinfection, casting flaw detection, food preservation, customs inspection, sterilization and insecticide, isotope production, and scientific research. .
  • the conventional electronic linear accelerator is shown in Figure 1, which is mainly composed of a DC section, a beam-forming section and an acceleration section. Since the acceleration section can only accelerate the micro-pulse electron beam composed of discrete beams, the lower-energy DC electron beam generated by the DC gun must pass through the beam-converging section to be converted into a micro-pulse electron beam 40 to be used by the subsequent acceleration section accelerate.
  • the microwave electron gun accelerator can directly generate electron beams composed of micro-pulses, so that the generated electron beams can be directly accelerated by the acceleration section.
  • microwave electron guns due to the "anti-bombing" effect, microwave electron guns cannot work in a state of high duty cycle, low average power, and high cost, and are generally not suitable for irradiation accelerator applications.
  • the average current of the microwave electron gun accelerator is very small, only on the order of tens of microamps, the average power is up to several hundred watts, and the efficiency is very low.
  • the related art provides a microwave electron gun accelerator, as shown in FIG. 2, which can completely eliminate most of the poor performance electrons in the anti-detonation electrons and the emitted electrons of the microwave electron gun, so that the microwave electron gun can work in a continuous wave state, thereby The average current of the microwave electron gun can be greatly increased, that is, the average power can be greatly increased.
  • FIG. 2 shows a microwave electron gun accelerator, as shown in FIG. 2, which can completely eliminate most of the poor performance electrons in the anti-detonation electrons and the emitted electrons of the microwave electron gun, so that the microwave electron gun can work in a continuous wave state, thereby The average current of the microwave electron gun can be greatly increased, that is, the average power can be greatly increased.
  • FIG. 2 shows if you want to increase the utilization of microwave power to improve the overall efficiency, you can make the microwave electron gun accelerator work by continuous microwave pulses (called macro pulses, macro pulses It contains many micro-pulses of microwave frequency) in a pulsed working state, and increases the
  • the above method requires that the acceleration gap of the microwave electron gun is sufficiently small relative to the microwave wavelength used, and the smaller the better.
  • the cathode 10 when a higher average current of the macropulse is required, the cathode 10 must have a sufficiently large emission surface, and the large emission surface requires a large acceleration gap and a large acceleration exit, otherwise the acceleration gap will be small.
  • the electric field of the middle part of the cathode 10 with a large emission surface is reduced too much, which finally makes the electron beam 40 easy to hit the cavity wall, and the cathode 10 with a large cathode emission surface is complicated and difficult to process and install, and adapts to temperature changes Sex is also poor.
  • a large acceleration gap requires a long microwave wavelength or a large-sized accelerator.
  • the large acceleration outlet is not conducive to the microwave isolation of the electron gun and the acceleration tube, which further affects the performance of the accelerator.
  • the current solution is difficult to design the electron accelerator with better performance in consideration of the above factors. Therefore, it is necessary to provide a new technical solution to improve one or more problems in the above solution.
  • the purpose of the present disclosure is to provide an electron gun, an electron accelerator including the electron gun, and an irradiation device including the electron accelerator, so as to overcome at least to some extent one or more problems caused by limitations and defects of the related art.
  • an electron gun including:
  • An electron gun chamber, and a plurality of electron beam holes are provided at the outlet end of the electron gun chamber;
  • a floating grid cathode structure assembly disposed in the chamber of the electron gun, includes a plurality of floating grid cathode structures, and the multiple floating grid cathode structures are distributed in a predetermined pattern to form a cathode surface; wherein the multiple electron beam holes and the multiple The floating grid cathode structures are in one-to-one correspondence, so that the multiple electron beams generated by the multiple floating grid cathode structures are respectively emitted from the corresponding one electron beam aperture.
  • the electron gun is a microwave electron gun.
  • the plurality of floating grid cathode structures are distributed in any one or more of the following preset pattern shapes: circle, grid, strip, and concentric circles.
  • the acceleration gap of the plurality of floating gate cathode structures is less than 1/4 of the microwave wavelength.
  • the cross-sections of the plurality of floating gate cathode structures are preset regular shapes.
  • the preset regular shape includes at least a circle, a rectangle, and an ellipse.
  • the electron accelerator is an electron linear accelerator.
  • an electron accelerator including an accelerator and the electron gun described in any of the above embodiments; the electron gun is connected to the accelerator.
  • an irradiation device including the electron accelerator described in any of the above embodiments.
  • the irradiation device includes an irradiation sterilization device.
  • the cathode assembly of the electron gun is configured with a plurality of floating grid cathode structures distributed in a predetermined pattern to form a cathode surface, and at the same time, a plurality of electron beam holes are provided at the outlet end of the electron gun chamber instead of the existing An electron beam hole, the multiple floating grid cathode structures correspond to the multiple electron beam holes one by one; in this embodiment, the cathode surface formed by replacing the original overall cathode surface with multiple small area floating grid cathode structures At the same time, the electron beam outlet with a large aperture at the original exit end is changed into a plurality of electron beam holes with small diameters corresponding to the multiple suspended grid cathode structures.
  • the processing and installation of the floating grid cathode structure are much easier, so the manufacturing complexity of the electron accelerator can be simplified; the adaptability of multiple floating grid cathode structures to temperature changes is also stronger, and the electric field distribution between the acceleration gaps becomes more Uniform, so the divergence angle of the split beam generated by each suspended grid cathode structure becomes smaller, which improves the quality of the beam.
  • FIG. 1 shows a schematic diagram of an electronic linear accelerator in the prior art
  • FIG. 2 shows a schematic diagram of a microwave electron gun accelerator in the prior art
  • FIG. 3 shows a schematic diagram of the macro pulse used when the microwave electron gun accelerator is working
  • FIG. 4 shows a partial schematic view of the structure of a conventional microwave electron gun
  • FIG. 5 shows a schematic structural view of an electron gun in an exemplary embodiment of the present disclosure
  • FIG. 6 shows a schematic diagram of the shape distribution of the imprint pattern of the floating gate cathode structure in an exemplary embodiment of the present disclosure
  • FIG. 7 shows another pattern shape distribution diagram of the floating gate cathode structure in the exemplary embodiment of the present disclosure.
  • Example embodiments will now be described more fully with reference to the drawings.
  • the example embodiments can be implemented in various forms, and should not be construed as being limited to the examples set forth herein; on the contrary, providing these embodiments makes the present disclosure more comprehensive and complete, and fully conveys the idea of the example embodiments For those skilled in the art.
  • the described features, structures, or characteristics may be combined in one or more embodiments in any suitable manner.
  • the electron gun may include an electron gun chamber and a suspension grid cathode structure assembly.
  • the electron gun chamber may be a microwave cavity, and the exit end of the microwave cavity, such as the side wall 20, is provided with a plurality of electron beam holes 201;
  • the suspension grid cathode structure assembly is disposed in the electron gun chamber and includes a plurality of suspension grid cathodes Structure 10, the plurality of floating grid cathode structures 10 are distributed in a predetermined pattern to form a cathode surface; wherein the plurality of electron beam holes 201 and the plurality of floating grid cathode structures 10 respectively correspond to each other, so that the plurality of A plurality of electron beams 40 generated by the floating grid cathode structure 10 are respectively emitted from a corresponding electron beam hole 201.
  • the original cathode surface as shown in FIG. 4 is replaced with the cathode surface formed by a plurality of small-area floating grid cathode structures 10, and the original outlet has a large aperture
  • the electron beam outlet becomes a plurality of small-diameter electron beam holes 201 corresponding to the plurality of floating grid cathode structures 10, so that, because of the small area of the floating grid cathode structure 10, the processing and The installation is much easier, so it can simplify the manufacturing complexity of the electron accelerator; multiple floating grid cathode structures are also more adaptable to temperature changes, and at the same time make the electric field distribution between the acceleration gaps more uniform, so each floating grid
  • the divergence angle of the split beam generated by the cathode structure becomes smaller, which improves the quality of the beam.
  • the electron gun may include but is not limited to a microwave electron gun.
  • the electron beam hole 201 may be a round hole, but is not limited thereto.
  • the plurality of floating gate cathode structures 10 are distributed in any one or more of the following predetermined pattern shapes, such as a circle shape, a grid shape Etc., and may also be elongated, concentric, etc., and the distribution shape of the plurality of floating gate cathode structures 10 is not limited to this.
  • the distance between adjacent floating gate cathode structures 10 may be the same or different, which is not limited in this embodiment.
  • the acceleration gap d of the plurality of floating gate cathode structures 10 is less than 1/4 of the microwave wavelength. Since the original integral cathode surface is replaced with the cathode surface formed by a plurality of small-area floating grid cathode structures 10 in this embodiment, the acceleration gap of the microwave electron gun can be sufficiently small relative to the microwave wavelength used. At this time, when a higher average current of the macropulse is required, the cathode surface can satisfy a sufficiently large overall emission surface, so as to avoid that the electric field in the middle part of the overall large-area cathode in the related art is reduced too much and electrons hit the cavity wall.
  • the solution provided in this embodiment allows the acceleration gap d to be greatly reduced when the total emission area of the cathode surface is the same, so that an accelerator with a higher microwave frequency or a smaller Size accelerator.
  • the small acceleration gap reduces the electron beam energy of the microwave electron gun, but because it immediately enters the accelerator tube behind, the space charge effect is greatly compressed, and the ability to obtain a large current is enhanced.
  • the microwave power required by the microwave electron gun also decreases, which reduces the cost of using an independent microwave power source for the microwave electron gun.
  • the cross-sections of the plurality of floating gate cathode structures 10 are preset regular shapes.
  • the preset regular shapes may include at least but not limited to circles, rectangles, and ellipses Shape and so on.
  • the cathode surface of the floating grid cathode is divided from the original one into a number of small blocks distributed according to the preset pattern shape, and the original one of the microwave electron gun is large.
  • the electron beam outlet becomes several small electron beam outlets corresponding to it; in addition, the acceleration gap of the microwave electron gun is greatly reduced.
  • An embodiment of the present disclosure also provides an electron accelerator, including the accelerator and the electron gun described in any of the above embodiments; the outlet end of the electron gun is connected to the accelerator.
  • an electron accelerator including the accelerator and the electron gun described in any of the above embodiments; the outlet end of the electron gun is connected to the accelerator.
  • the electron accelerator may be an electron linear accelerator, but it is not limited thereto.
  • an embodiment of the present disclosure further provides an irradiation device, and the irradiation device may include the electron accelerator described in any of the above embodiments.
  • the electronic accelerator reference may be made to the detailed description in the above embodiments, which will not be repeated here.
  • the irradiation device may include, but is not limited to, an irradiation sterilization device, a medical irradiation device, and the like.
  • first and second are used for description purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated.
  • the features defined as “first” and “second” may explicitly or implicitly include one or more of the features.
  • the meaning of “plurality” is two or more, unless otherwise specifically limited.
  • the terms “installation”, “connected”, “connected”, “fixed” and other terms should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , Or integrated; it can be mechanical connection or electrical connection; it can be directly connected or indirectly connected through an intermediary, it can be the connection between two components or the interaction between two components.
  • installation can be a fixed connection or a detachable connection , Or integrated; it can be mechanical connection or electrical connection; it can be directly connected or indirectly connected through an intermediary, it can be the connection between two components or the interaction between two components.
  • the first feature “above” or “below” the second feature may include the first and second features in direct contact, or may include the first and second features Contact not directly but through another feature between them.
  • the first feature is “above”, “above” and “above” the second feature includes that the first feature is directly above and diagonally above the second feature, or simply means that the first feature is higher in level than the second feature.
  • the first feature is “below”, “below” and “below” the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the first feature is less horizontal than the second feature.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Particle Accelerators (AREA)

Abstract

一种可产生高平均电流电子束的微波电子枪，该电子枪可应用于辐照的电子加速器。该电子枪包括：电子枪腔室，该电子枪腔室的出口端设有多个电子束孔（201）；悬浮栅阴极结构（10）组件，设置于该电子枪腔室内，且包括多个悬浮栅阴极结构（10），该多个悬浮栅阴极结构（10）以预设图案形状分布形成一阴极面；其中所述多个电子束孔（201）与该多个悬浮栅阴极结构（10）分别一一对应，以使各所述悬浮栅阴极结构（10）产生的电子束（40）分别从对应的一电子束孔（201）射出。

Description

电子枪、电子加速器以及辐照装置
本申请要求在2018年12月13日提交的，申请号为2018115235385，名称为“电子枪、电子加速器以及辐照装置”的中国专利申请的优先权，上述申请的全部内容通过引用并入本文。
技术领域
本公开涉及辐照加速器技术领域，尤其涉及一种电子枪、包含该电子枪的电子加速器以及包含该电子加速器的辐照装置。
背景技术
随着科学技术的发展，电子加速器的应用领域越来越广泛。电子直线加速器是加速器中用途最为广泛的一种，它广泛应用于肿瘤治疗，高分子交联，医疗用品消毒，铸件探伤，食品保鲜，海关检查，灭菌杀虫，同位素生产以及科学科研等方面。常规电子直线加速器如图1所示，主要由直流段、聚束段和加速段组成。由于加速段只能加速由分立束团组成的微脉冲电子束，由直流枪产生的较低能量的直流电子束必须经过聚束段使其转换成微脉冲电子束40才能被后面的加速段所加速。虽然微波电子枪加速器可直接产生微脉冲组成的电子束，从而使得所产生的电子束可直接被加速段加速。但是微波电子枪由于“反轰”效应无法工作在高占空比的状态，平均功率低，成本高，通常不适于辐照加速器应用。一般的，微波电子枪加速器的平均电流很小，只有几十微安量级，平均功率最多几百瓦，效率很低。
相关技术中提供一种微波电子枪加速器，如图2所示，其可以完全消 除微波电子枪的反轰电子和其发射电子中的大部分差性能电子，使得微波电子枪可以工作在连续波状态下，从而使得微波电子枪平均电流可以大幅提高，也就是平均功率可以大幅提高。但是在具体应用时依然存在一些问题，如图3所示，如果要提高微波功率的利用率从而提高整体效率，可以让微波电子枪加速器工作在由连续的微波脉冲(称为宏脉冲，宏脉冲内包含很多微波频率的微脉冲)组成的脉冲式工作状态下，并且提高宏脉冲内的平均电流。
但是上述方式要求微波电子枪的加速间隙相对于所采用的微波波长要足够的小，而且越小越好。参考图4所示，此时在要求较高的宏脉冲平均电流时阴极10必须有足够大的发射面，而大的发射面又要求大的加速间隙和大的加速出口，否则加速间隙小会使大的发射面的阴极10中间部分的电场降低太多而最终使电子束40易打在腔壁上，且具有大的阴极发射面的阴极10加工和安装复杂、难度高，对温度变化适应性也差。另外，大的加速间隙又要求长的微波波长或大尺寸的加速器。同时，大的加速出口也不利于电子枪和加速管的微波隔离，进一步影响加速器的性能。目前的方案很难兼顾以上这些因素设计性能较好的电子加速器。因此，有必要提供一种新的技术方案改善上述方案中存在的一个或者多个问题。
需要注意的是，本部分旨在为权利要求书中陈述的本发明的实施方式提供背景或上下文。此处的描述不因为包括在本部分中就承认是现有技术。
发明内容
本公开的目的在于提供一种电子枪、包含该电子枪的电子加速器以及包含该电子加速器的辐照装置，进而至少在一定程度上克服由于相关技术的限制和缺陷而导致的一个或者多个问题。
根据本公开实施例的第一方面，提供一种电子枪，该电子枪包括：
电子枪腔室，该电子枪腔室的出口端设有多个电子束孔；
悬浮栅阴极结构组件，设置于该电子枪腔室内，包括多个悬浮栅阴极结构，该多个悬浮栅阴极结构以预设图案形状分布形成一阴极面；其中所述多个电子束孔与该多个悬浮栅阴极结构分别一一对应，以使该多个悬浮栅阴极结构产生的多个电子束分别从对应的一电子束孔射出。
本公开的实施例中，所述电子枪为微波电子枪。
本公开的实施例中，所述多个悬浮栅阴极结构以下述任意一种或多种预设图案形状分布：圆圈形、栅格形、长条形和同心圆形。
本公开的实施例中，所述多个悬浮栅阴极结构的加速间隙小于微波波长的1/4。
本公开的实施例中，所述多个悬浮栅阴极结构的横截面为预设规则形状。
本公开的实施例中，所述预设规则形状至少包括圆形、矩形和椭圆形。
本公开的实施例中，所述电子加速器为电子直线加速器。
根据本公开实施例的第二方面，提供一种电子加速器，包括加速器以及上述任一实施例中所述的电子枪；该电子枪与该加速器连接。
根据本公开实施例的第三方面，提供一种辐照装置，包括上述任一实施例中所述的电子加速器。
本公开的实施例中，该辐照装置包括辐照灭菌装置。
本公开的实施例提供的技术方案可以包括以下有益效果：
本公开的实施例中，电子枪的阴极组件设置为多个悬浮栅阴极结构以预设图案形状分布形成一阴极面，同时在电子枪腔室的出口端设有多个电子束孔而不是现有的一个电子束孔，该多个悬浮栅阴极结构与多个电子束孔一一对应；本实施例中通过将原有的整体的阴极面替换为多个小面积悬浮栅阴极结构构成的该阴极面，同时将原来出口端一大孔径的电子 束出口变为与该多个悬浮栅阴极结构对应的小口径的多个电子束孔，这样，由于小面积的悬浮栅阴极结构比大面机的整体悬浮栅阴极结构的加工和安装都容易的多，因此可简化电子加速器的制造复杂度；多个悬浮栅阴极结构对温度变化的适应性也要强，同时使得加速间隙之间的电场分布变的更加均匀，因此每个悬浮栅阴极结构产生的分束流的散角变小，提高了束流的品质。另外也很容易实现电子枪和紧跟在后面的加速管之间的微波隔离，从而使两个腔可以工作在不同的最佳的相位上，提升电子加速器的性能。
附图说明
图1示出现有技术中电子直线加速器示意图；
图2示出现有技术中一微波电子枪加速器示意图；
图3示出微波电子枪加速器工作时采用的宏脉冲示意图；
图4示出现有微波电子枪结构局部示意图；
图5示出本公开示例性实施例中电子枪结构示意图；
图6示出本公开示例性实施例中悬浮栅阴极结构印记图案形状分布示意图；
图7示出本公开示例性实施例中悬浮栅阴极结构另一图案形状分布示意图。
具体实施方式
现在将参考附图更全面地描述示例实施方式。然而，示例实施方式能够以多种形式实施，且不应被理解为限于在此阐述的范例；相反，提供这些实施方式使得本公开将更加全面和完整，并将示例实施方式的构思全面地传达给本领域的技术人员。所描述的特征、结构或特性可以以任何合适的方式结合在一个或更多实施方式中。
此外，附图仅为本公开的示意性图解，并非一定是按比例绘制。图中相同的附图标记表示相同或类似的部分，因而将省略对它们的重复描述。附图中所示的一些方框图是功能实体，不一定必须与物理或逻辑上独立的实体相对应。
本示例实施方式中首先提供了一种电子枪。参考图5中所示，该电子枪可以包括电子枪腔室和悬浮栅阴极结构组件。其中，该电子枪腔室可以是微波腔，该微波腔的出口端如侧壁20设有多个电子束孔201；该悬浮栅阴极结构组件设置于该电子枪腔室内，且包括多个悬浮栅阴极结构10，该多个悬浮栅阴极结构10以预设图案形状分布形成一阴极面；其中所述多个电子束孔201与该多个悬浮栅阴极结构10分别一一对应，以使该多个悬浮栅阴极结构10产生的多个电子束40分别从对应的一电子束孔201射出。
本实施例提供的上述方案中，通过将原有的如图4所示的整体的阴极面替换为多个小面积悬浮栅阴极结构10构成的该阴极面，同时将原来出口端一大孔径的电子束出口变为与该多个悬浮栅阴极结构10对应的小口径的多个电子束孔201，这样，由于小面积的悬浮栅阴极结构10比大面机的整体悬浮栅阴极结构的加工和安装都容易的多，因此可简化电子加速器的制造复杂度；多个悬浮栅阴极结构对温度变化的适应性也要强，同时使得加速间隙之间的电场分布变的更加均匀，因此每个悬浮栅阴极结构产生的分束流的散角变小，提高了束流的品质。另外也很容易实现电子枪和紧跟在后面的加速管之间的微波隔离，从而使两个腔可以工作在不同的最佳的相位上，提升电子加速器的性能。
具体的，在本公开的一实施例中，所述电子枪可以包括但限于为微波电子枪。所述电子束孔201可以是圆孔，但不限于此。可选的，在本公开的实施例中，如图6～7所示，所述多个悬浮栅阴极结构10以下述任意一种或多种预设图案形状分布，例如圆圈形、栅格形等，还可以是长条 形和同心圆形等，该多个悬浮栅阴极结构10的分布形状不限于此。可选的，在本公开的实施例中，相邻悬浮栅阴极结构10之间的距离可以相同或不同，本实施例中对此不作限制。
进一步的，可选的，在本公开的实施例中，所述多个悬浮栅阴极结构10的加速间隙d小于微波波长的1/4。由于本实施例中将原有的整体的阴极面替换为多个小面积悬浮栅阴极结构10构成的该阴极面，因此微波电子枪的加速间隙相对于所采用的微波波长可以做到足够的小，此时在要求较高的宏脉冲平均电流时阴极面可以满足具有足够大的整体发射面，避免相关技术中整体大面积阴极中间部分的电场降低太多使得电子打在腔壁上。也即，本实施例提供的方案在阴极面总发射面积相同的情况下使得加速间隙d可以大幅减小，从而可实现在发射能力不变的情况下可选用较高微波频率的加速器或者较小尺寸的加速器。另外，加速间隙小使得微波电子枪的电子束能量降低，但是由于它立刻进入后面的加速管，空间电荷效应被大幅压缩，获得大电流的能力增强。同时由于电子束40在微波电子枪中得到的能量变低，微波电子枪所需的微波功率也降低，使得微波电子枪采用独立微波功率源的成本降低。
可选的，在本实施例中，所述多个悬浮栅阴极结构10的横截面为预设规则形状，示例性的，所述预设规则形状至少可以包括但不限于圆形、矩形和椭圆形等。
综上所述，上述实施例提供的方案的主要改进点在于：将悬浮栅阴极阴极面由原来的一整体分割为按照预设图案形状分布的若干小块，以及将原来的一个微波电子枪大的电子束出口变为与之相应的若干小的电子束出口；另外，大幅减小微波电子枪的加速间隙。
本公开实施例还提供一种电子加速器，包括加速器以及上述任一实施例中所述的电子枪；该电子枪的出口端与该加速器连接。关于该电子枪的内容可参考前述实施例中的详细描述，此处不再赘述。
具体的，在本公开的实施例中，所述电子加速器可以为电子直线加速器，但不限于此。
进一步的，本公开实施例还提供一种辐照装置，该辐照装置可以包括上述任一实施例中所述的电子加速器。关于该电子加速器可参考上述实施例中的详细描述，此处不再赘述。该辐照装置可以包括但不限于是辐照灭菌装置、医疗用辐照装置等。
在本公开的描述中，需要理解的是，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”、“顺时针”、“逆时针”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本公开和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本公开的限制。
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本公开的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。
在本公开中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本公开中的具体含义。
在本公开中，除非另有明确的规定和限定，第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触，也可以包括第一和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且，第一特征在第 二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方，或仅仅表示第一特征水平高度小于第二特征。
在本说明书的描述中，参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本公开的至少一个实施例或示例中。在本说明书中，对上述术语的示意性表述不必须针对的是相同的实施例或示例。而且，描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。此外，本领域的技术人员可以将本说明书中描述的不同实施例或示例进行接合和组合。
本领域技术人员在考虑说明书及实践这里公开的发明后，将容易想到本公开的其它实施方案。本申请旨在涵盖本公开的任何变型、用途或者适应性变化，这些变型、用途或者适应性变化遵循本公开的一般性原理并包括本公开未公开的本技术领域中的公知常识或惯用技术手段。说明书和实施例仅被视为示例性的，本公开的真正范围和精神由所附的权利要求指出。

Claims (10)

  1. 一种电子枪，其特征在于，该电子枪包括：
    电子枪腔室，该电子枪腔室的出口端设有多个电子束孔；
    悬浮栅阴极结构组件，设置于该电子枪腔室内，包括多个悬浮栅阴极结构，该多个悬浮栅阴极结构以预设图案形状分布形成一阴极面；其中所述多个电子束孔与该多个悬浮栅阴极结构分别一一对应，以使各所述悬浮栅阴极结构产生的电子束分别从对应的一电子束孔射出。
  2. 根据权利要求1所述电子枪，其特征在于，所述电子枪为微波电子枪。
  3. 根据权利要求2所述电子枪，其特征在于，所述多个悬浮栅阴极结构以下述任意一种或多种预设图案形状分布：圆形、栅格形、长条形和同心圆形。
  4. 根据权利要求2所述电子枪，其特征在于，所述多个悬浮栅阴极结构的加速间隙小于微波波长的1/4。
  5. 根据权利要求1～4任一项所述电子枪，其特征在于，所述多个悬浮栅阴极结构的横截面为预设规则形状。
  6. 根据权利要求5所述电子枪，其特征在于，所述预设规则形状至少包括圆形、矩形和椭圆形。
  7. 一种电子加速器，其特征在于，包括加速器以及权利要求1～6任一项所述的电子枪；该电子枪的出口端与该加速器连接。
  8. 根据权利要求7所述电子加速器，其特征在于，所述电子加速器为电子直线加速器。
  9. 一种辐照装置，其特征在于，包括权利要求8或9所述的电子加速器。
  10. 根据权利要求9所述辐照装置，其特征在于，该辐照装置包括辐 照灭菌装置。
PCT/CN2019/078221 2018-12-13 2019-03-15 电子枪、电子加速器以及辐照装置 WO2020118939A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201811523538.5 2018-12-13
CN201811523538.5A CN111326379B (zh) 2018-12-13 2018-12-13 电子枪、电子加速器以及辐照装置

Publications (1)

Publication Number Publication Date
WO2020118939A1 true WO2020118939A1 (zh) 2020-06-18

Family

ID=71077049

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2019/078221 WO2020118939A1 (zh) 2018-12-13 2019-03-15 电子枪、电子加速器以及辐照装置

Country Status (2)

Country Link
CN (1) CN111326379B (zh)
WO (1) WO2020118939A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113078039A (zh) * 2021-03-30 2021-07-06 上海联影医疗科技股份有限公司 电子枪装置以及医用直线加速器

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1131335A (zh) * 1995-03-14 1996-09-18 中华映管股份有限公司 多模式混合型阴极射线管
JPH11283487A (ja) * 1998-03-30 1999-10-15 Mitsubishi Electric Corp 電子銃およびその製法
CN1339812A (zh) * 2000-08-23 2002-03-13 东芝株式会社 电子枪组件及阴极射线管装置
CN201859827U (zh) * 2010-11-11 2011-06-08 中国电子科技集团公司第十二研究所 悬浮式栅控多注速调管电子枪结构
CN102683141A (zh) * 2012-04-24 2012-09-19 中国电子科技集团公司第十二研究所 一种集成行波管放大器

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63119134A (ja) * 1986-11-07 1988-05-23 Toshiba Corp マイクロ波管の電子銃構体

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1131335A (zh) * 1995-03-14 1996-09-18 中华映管股份有限公司 多模式混合型阴极射线管
JPH11283487A (ja) * 1998-03-30 1999-10-15 Mitsubishi Electric Corp 電子銃およびその製法
CN1339812A (zh) * 2000-08-23 2002-03-13 东芝株式会社 电子枪组件及阴极射线管装置
CN201859827U (zh) * 2010-11-11 2011-06-08 中国电子科技集团公司第十二研究所 悬浮式栅控多注速调管电子枪结构
CN102683141A (zh) * 2012-04-24 2012-09-19 中国电子科技集团公司第十二研究所 一种集成行波管放大器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113078039A (zh) * 2021-03-30 2021-07-06 上海联影医疗科技股份有限公司 电子枪装置以及医用直线加速器

Also Published As

Publication number Publication date
CN111326379A (zh) 2020-06-23
CN111326379B (zh) 2021-10-15

Similar Documents

Publication Publication Date Title
CN109065428B (zh) 一种双栅控制式冷阴极电子枪及其制备方法
CN101742809B (zh) 等离子体生成设备
CN105261542B (zh) 固定阳极型x射线管
Yuan et al. A truncated-cone carbon nanotube cold-cathode electron gun
WO2020118939A1 (zh) 电子枪、电子加速器以及辐照装置
CN105489460A (zh) 一种k波段同轴相对论返波振荡器
JP5688874B2 (ja) 電子ビーム集束電極及びこれを用いた電子銃、並びに四角形の断面を有する電子ビームの拡散現象を低減させる方法
US20210393986A1 (en) Ion source, circular accelerator using same, and particle beam therapy system
CN108400075A (zh) 平行多束电子枪
KR960015915B1 (ko) 평면형 표시장치
CN109192641B (zh) 一种潘宁冷阴极离子源
WO2020118957A1 (zh) 悬浮栅阴极结构、电子枪、电子加速器及辐照装置
WO2020118938A1 (zh) 多悬浮栅阴极结构、电子枪、电子加速器及辐照装置
JP4984285B2 (ja) 高密度プラズマ処理装置
CN103606505A (zh) 一种利用微波调制的冷阴极电子枪
An et al. Experimental generation of 1.1-kA gyrating electron beam current from an explosive emission cathode magnetron injection gun
CN109831866A (zh) 一种双环电极共面放电等离子体发生装置
KR100866980B1 (ko) 평판형 냉음극 전자총
RU2267830C1 (ru) Электронная отпаянная пушка для вывода ленточного электронного потока из вакуумной области пушки в атмосферу или иную газовую среду
CN102800546B (zh) 带对位孔控制片的集束尖端阵面场致发射冷阴极x线管
CN108231527B (zh) 一种均匀投射式电子光学结构
Li et al. Optimization of a cusp gun with a grid for a terahertz gyrotron traveling-wave amplifier
CN104332373B (zh) 一种产生圆柱形多注强流相对论电子束的冷阴极
CN103606503A (zh) 一种微波调制相位可控的多电子注冷阴极电子枪
RU181037U1 (ru) Автоэмиссионная электронная пушка со сходящимся ленточным пучком

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19895200

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19895200

Country of ref document: EP

Kind code of ref document: A1

122 Ep: pct application non-entry in european phase

Ref document number: 19895200

Country of ref document: EP

Kind code of ref document: A1