WO2020118772A1 - 一种送料装置 - Google Patents

一种送料装置 Download PDF

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Publication number
WO2020118772A1
WO2020118772A1 PCT/CN2018/123722 CN2018123722W WO2020118772A1 WO 2020118772 A1 WO2020118772 A1 WO 2020118772A1 CN 2018123722 W CN2018123722 W CN 2018123722W WO 2020118772 A1 WO2020118772 A1 WO 2020118772A1
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WO
WIPO (PCT)
Prior art keywords
unit
feeding
positioning
rotating
rotating unit
Prior art date
Application number
PCT/CN2018/123722
Other languages
English (en)
French (fr)
Inventor
宋建
张开端
张维刚
Original Assignee
山东天岳先进材料科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN201811532645.4A external-priority patent/CN109680341B/zh
Priority claimed from CN201822101236.0U external-priority patent/CN209873181U/zh
Application filed by 山东天岳先进材料科技有限公司 filed Critical 山东天岳先进材料科技有限公司
Publication of WO2020118772A1 publication Critical patent/WO2020118772A1/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G29/00—Rotary conveyors, e.g. rotating discs, arms, star-wheels or cones
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure

Definitions

  • This application relates to the field of auxiliary tools for production equipment, in particular to a feeding device.
  • the silicon carbide growing crystal furnace usually sets the furnace body on the furnace body frame.
  • the operator loads the furnace body, he needs to cover the lower cover of the furnace body extending inside the frame
  • the space inside the rack is very small, when directly loading on the lower cover of the furnace body, multiple operators are required to perform at the same time.
  • the limited operating space reduces the operator's work efficiency and labor intensity Also greatly increased.
  • the silicon carbide crystal growth furnace has high requirements for the arrangement order of the crystal growth materials in the furnace.
  • the materials When loading, the materials need to be accurately arranged in a certain order from top to bottom, from inside to outside. Concentricity requirements are high.
  • the space inside the rack is limited. During manual operation, it is impossible to use special positioning tooling to ensure the concentricity of the material in the furnace body and other positioning accuracy issues. Therefore, it is difficult to control the accuracy of the position of the material when loading directly under the furnace cover .
  • the Chinese utility model patent with the announcement number CN207581890U provides an automatic feeding device for hot-dip plating equipment, including a feeder, a supporting table, a rotating arm, an arm spindle, a safety shaft, a transmission device and a motor.
  • This solution mainly solves Problems of low feeding efficiency and easy contamination of workpieces.
  • the device has a complicated structure and a large volume, which is not suitable for installation on the furnace frame of the crystal growth furnace, nor can it solve the problem of the accuracy of the feeding position.
  • the present application proposes a feeding device, including a support unit connected in turn, a rotary Unit and feeding unit, the supporting unit is rotatably connected to the rotating unit, and the feeding unit is detachably connected to the rotating unit, the supporting unit, the rotating unit and the feeding unit are so configured that the rotating unit drives the feeding unit to rotate around the supporting unit,
  • the feeding device further includes a limiting component, which is so arranged with the rotating unit and the supporting unit to adjust the rotation angle of the rotating unit.
  • the limit assembly includes at least a first limit assembly, the first limit assembly includes a first baffle and a first limit block, the first limit block and the first baffle cooperate to adjust the rotation of the rotating unit The angle between the rotation unit and the support unit required to rotate the feeding unit to the target position.
  • the first limiting component is located on the feeding direction side of the rotating unit and the supporting unit.
  • the first limit block is provided in the rotating unit, and the first baffle is provided in the support unit.
  • the first limit block is provided in the support unit, and the first baffle is provided in The rotation unit can be used to limit the angle between the rotation unit and the support unit required to rotate the feeding unit to the target position.
  • the first limit block includes a first bent edge and a second bent edge with an angle ⁇ , the opening of the angle ⁇ of the first limit block is the opposite direction of the rotation axis, and the first limit block The bent edge is fixed on the side wall of the rotating unit. When the rotating unit rotates to the target position, the second bent edge of the first limiting block contacts the first baffle and the rotating unit stops rotating.
  • the first bent edge is fixed to the side wall of the rotating unit by screws, and the angle ⁇ is used to define the angle between the rotating unit and the supporting unit required to feed the feeding unit to the target position, and the range is preferably It is 60-70 degrees, more preferably 65 degrees.
  • the setting of the first limiting component makes it impossible to continue to rotate in the feeding direction when the feeding unit rotates to the target position, that is, the position where the feeding unit turns to the equipment inlet is fixed and accurate.
  • the first limiting component further includes a first adjusting member, which is used in conjunction with the first limiting block and the first baffle to adjust the rotation angle of the rotating unit.
  • the first adjusting member passes vertically through the second bent edge and is at least partially located on the non- ⁇ angle opening side of the second bent edge. When rotating to the target position, the first adjusting member on the non- ⁇ angle opening side of the second bent edge comes into contact with the first baffle and the rotating unit stops rotating.
  • the setting of the first adjusting member can adjust the angle between the rotating unit and the supporting unit when the ⁇ angle of the first limiting block is fixed, without replacing the first limiting block, It is suitable for production equipment with different inlet positions.
  • the limit assembly further includes a second limit assembly.
  • the second limit assembly includes a second baffle and a second limit block. The second limit block and the second baffle are used together to adjust the rotation angle of the rotating unit , To define the maximum angle between the rotating unit and the supporting unit required before feeding the feeding unit to the target position.
  • the second limit block is provided in the support unit, and the second baffle is provided in the rotating unit.
  • the second limit block is provided in the rotating unit, and the second baffle is provided in Support unit.
  • the second limit block has opposite head and tail ends, wherein the tail end is fixed at the bottom of the support unit, the head end extends radially along the support unit until partially exposed, and the second baffle extends along the axial direction of the rotating unit to It has the same height as the second limit block.
  • the second limiting component further includes a second adjusting member, which is used in conjunction with the first limiting block and the first baffle to adjust the rotation angle of the rotating unit.
  • the setting of the second adjusting member can adjust the angle between the rotating unit and the supporting unit when the second limiting block contacts the second baffle when the position of the second limiting block is fixed. Remove the second limit block to adjust the position.
  • the setting of the second limit component makes it possible to rotate to the most suitable position for loading before the feeding unit is sent to the target position.
  • the operator can rotate the rotating unit outward to the second limit block to block the limit position, and stand inside the limit position for loading, so that the feeding device cannot continue to rotate outward or inward, improving Loading efficiency and accuracy.
  • first and/or second adjusting member is a retractable structure.
  • first and/or second adjusting member is a screw.
  • the second limit block is a travel switch.
  • the feed inlet is controlled to open.
  • the circuit is turned on to cause the crystal growth furnace to issue a command to control the opening of the feed inlet, so as to prevent the collision between the feeding device and the production equipment and damage to the equipment.
  • the travel switch can be used to turn on or off the circuit that controls the lifting of the lower cover of the silicon carbide crystal growth furnace, that is, when the rotary unit rotates to the position of the second limit block, the travel switch is approached or touched
  • the control circuit is turned on, the lower body cover of the crystal growth furnace is opened and lowered to a position lower than the height of the feeding device, then the feeding unit is sent to the target position above the lower body cover, and then the crystal growth furnace is operated
  • the lower cover of the furnace body is controlled to rise, and such a setting can avoid collision caused by the same height of the feeding device and the lower cover of the furnace body.
  • the feeding unit and the rotating unit of the feeding device are connected by a snap.
  • the rotating unit includes a tooling pallet, and a support bar is laterally extended along the tooling pallet, and the feeding unit includes a loading tray placed above the support bar, and the loading tray and the support bar pass through a card Buckle connection.
  • the contact surface of the loading tray and the support bar is provided with a buckle
  • the support bar includes a positioning bar
  • the positioning bar is recessed to form a positioning rib
  • the positioning rib corresponds to the position of the buckle and corresponds to The opening width of the buckle is equal.
  • the loading tray includes a circular tooling upper body and a tooling lower body, wherein the tooling upper body is in contact with the support bar, the contact surface is provided with a buckle, and support columns are distributed on the edges of the tool lower body and pass through the support columns Removable connection with tooling upper body.
  • the upper body of the tooling and the lower body of the tooling are hollow, and the support bar can be inserted until the upper body of the tooling is buckled with the support bar. More preferably, the positioning bar passes through the center of the upper body of the tooling.
  • the tooling lower body and the tooling upper body are screwed; in another embodiment, the tooling lower body may be first connected to the tooling upper body through the support column After the thread connection, insert the support bar into the upper body of the tooling and the lower body of the tooling until the buckle structure is fitted and fixed.
  • the positioning bar may be any one of the support bars, or any number of the support bars may play a positioning role together.
  • the positioning bar is a support bar that supports the center of the loading tray, or supports Support bar at any edge of the loading tray.
  • the number and position of the snap connection structure can be adjusted so that the loading tray and the support bar will not shake after being connected. This arrangement is beneficial to fix the loading tray on the support bar and load. When the loading tray containing the material is rotated into the target position of the crystal growth furnace, the loading tray can smoothly leave the support bar and enter the furnace body together with the material internal.
  • the number and position of the buckles and positioning ribs of the loading tray can also be adjusted.
  • the concave part of the positioning bar can form a positioning rib.
  • two buckles can be provided to match the positions of the two ends of the positioning rib, or multiple buckles can be provided to fix the arbitrary positions of the positioning rib;
  • a plurality of positioning ribs may also be formed in the concave portion of the positioning bar.
  • a buckle may be provided for each positioning rib, or a buckle fixed to the positioning rib of the matching part may be provided.
  • the buckle and the positioning rib may not correspond to each other.
  • four parallel positioning ribs and a buckle are provided.
  • the buckle can be used to fit and fix on any one of the positioning ribs. Since the positioning ribs are arranged in parallel, when the buckle is fitted and fixed with different positioning ribs, the position of the loading tray on the support bar is not the same. With this arrangement, the fixed position of the loading tray on the support bar can be adjusted, so that the feeding device is suitable for assisting feeding of crystal growth furnaces of different specifications.
  • the feeding unit and the rotating unit are connected by a buckle, one is to ensure that the position of the feeding unit for loading on the rotating unit is fixed, which is helpful to improve the accuracy of the material arrangement and the concentricity of the material during loading, and the second is to cooperate
  • the limit assembly makes the position of the feeding unit rotating to the target position accurate.
  • the feeding device provided in the present application is suitable for assisting feeding to a crystal growth furnace, including but not limited to a silicon carbide single crystal furnace, a silicon carbide polycrystal furnace, a single crystal silicon crystal growth furnace, a polycrystalline silicon crystal growth furnace, and the like.
  • a crystal growth furnace including but not limited to a silicon carbide single crystal furnace, a silicon carbide polycrystal furnace, a single crystal silicon crystal growth furnace, a polycrystalline silicon crystal growth furnace, and the like.
  • the rotating unit further includes a rotating plate, one end of the rotating plate is rotatably connected to the support unit, the other end is placed above the tooling pallet, and is detachably connected to the tooling pallet.
  • the rotating plate and the supporting unit are connected by a compression handle and a pair of thrust bearing shafts, and are screwed to the tooling pallet. The setting of the rotating plate can strengthen the tooling pallet and increase the bearing capacity of the rotating unit to the feeding unit.
  • the support unit may be a detachable support frame fixed on the production equipment rack, or a support seat independent of the production equipment and directly placed on the ground to function as a base.
  • a support frame that is detachably fixed on the furnace frame is more preferred, which saves space and is easy to operate.
  • a feeding device including a support frame, a rotation unit and a loading tray connected in sequence, wherein one end of the rotation unit is rotatably connected to the support frame and the other end is detachably connected to the loading tray to
  • the rotating unit drives the loading tray to rotate around the support frame.
  • At least one support bar is also provided along the radial extension of the rotating unit, and the loading tray is placed above the support bar and is detachably connected to the support bar.
  • the support bars are preferably 2-5, more preferably 3, and the support bars are placed under the loading tray to provide support for the loading tray filled with materials.
  • the detachable connection methods of the loading tray and the support bar include but are not limited to snap connection, screw connection, pin connection, key connection, sliding connection, etc., preferably snap connection.
  • the support bar includes at least one positioning bar, and the loading tray is snap-fitted to the positioning bar. This arrangement can ensure that the position of the loading tray on the support bar is fixed, which is beneficial to improve the accuracy of the material arrangement and the concentricity of the material during loading.
  • the positioning bar may be any one of the support bars, or any number of the support bars may play a positioning role together.
  • the positioning bar is a support bar that supports the center of the loading tray, or supports Support bar at any edge of the loading tray.
  • the number and position of the snap connection structure can be adjusted so that the loading tray and the support bar will not shake after being connected. This arrangement is beneficial to fix the loading tray on the support bar and load. When the loading tray containing the material is rotated into the target position of the crystal growth furnace, the loading tray can smoothly leave the support bar and enter the furnace body together with the material internal.
  • the contact surface of the loading tray and the positioning bar is provided with at least one buckle, the positioning bar is partially concave to form a positioning rib, the positioning rib corresponds to the position of the buckle, and the width is equal to the opening width of the buckle.
  • the buckle cooperates with the positioning edge to fix it.
  • the number and position of the buckles and positioning ribs of the loading tray can also be adjusted.
  • the concave part of the positioning bar can form a positioning rib.
  • two buckles can be provided to match the positions of the two ends of the positioning rib, or multiple buckles can be provided to fix the arbitrary positions of the positioning rib;
  • a plurality of positioning ribs may also be formed in the concave portion of the positioning bar.
  • a buckle may be provided for each positioning rib, or a buckle fixed to the positioning rib of the matching part may be provided.
  • the buckle and the positioning rib may not correspond to each other.
  • four parallel positioning ribs and a buckle are provided.
  • the buckle can be used to fit and fix on any one of the positioning ribs. Since the positioning ribs are arranged in parallel, when the buckle is fitted and fixed with different positioning ribs, the position of the loading tray on the support bar is not the same. With this arrangement, the fixed position of the loading tray on the support bar can be adjusted, so that the feeding device is suitable for assisting feeding of crystal growth furnaces of different specifications.
  • the positioning rib includes at least two branch ribs that cross each other vertically and horizontally, and the buckle is fixed in cooperation with the branch rib.
  • the positioning edge includes two mutually perpendicular supporting edges, one of which is divided into the first side and the second side by the vertical foot, and the other supporting edge is divided into the third side and the fourth side by the vertical foot, wherein the buckle is at least It is fixed with two sides that are not the same edge, preferably with four sides.
  • the positioning bar passes through the center of the charging tray or near the edge of the charging tray.
  • a certain support bar passing through the center of the loading tray or near the edge of the loading tray may be set as a positioning bar; in another embodiment, several support bars may be set as positioning bars.
  • the support bar is arc-shaped.
  • the support bar is an arc-shaped bar with a certain thickness. This arrangement is beneficial to increase the bearing area of the support bar. When the feeding unit is loaded with materials, the force can be more evenly dispersed.
  • the loading tray includes a tooling upper body and a tooling lower body, the tooling lower body is provided with a supporting column, and the tooling upper body is screwed to the tooling lower body through the supporting column.
  • the upper body of the tooling and the lower body of the tooling are hollow, and the support bar can be inserted until the loading tray is buckled to the support bar.
  • the tooling upper body can be connected to the support bar by buckle, and then the tooling upper body can be screwed to the tooling lower body; in another embodiment, the tooling lower body can be connected to the tooling through the support column After the upper body is threaded, insert the support bar into the inside until the buckle structure fits and fixes.
  • the rotating unit includes a rotating plate and a tool supporting plate, the rotating plate is rotatably connected to the support frame, one end of the tool supporting plate is detachably connected to the rotating plate, and the other end is provided with a supporting bar extending in the radial direction.
  • one end of the rotating plate is connected to the support frame through a compression handle and a pair of thrust bearing shafts, and the other end is screwed to the tooling support plate.
  • Such setting can not only strengthen the tooling pallet, but also increase the bearing capacity of the rotating unit to the loading tray.
  • the device further includes a limit assembly.
  • the limit assembly includes at least one baffle and a limit block.
  • the baffle and the limit block are used in conjunction to adjust the rotation angle of the rotating plate. This setting can be matched with the rotating plate, so that the positioning of the loading tray to the target position is more accurate.
  • the limit assembly includes at least a first limit assembly, the first limit assembly includes a first baffle and a first limit block, the first limit block and the first baffle are used in conjunction to adjust the rotation
  • the angle of the plate rotation defines the angle between the rotating plate and the support frame required to rotate the loading tray to the target position.
  • the first limiting component is located on the feeding direction side of the rotating plate and the support frame.
  • the first limiting block is provided on the rotating plate, and the first baffle is provided on the support frame. In another embodiment, the first limiting block is provided on the support frame, and the first baffle is provided on The rotating plate can achieve the limitation of the angle between the rotating plate and the supporting frame required to rotate the loading tray to the target position.
  • the first limit block includes a first bent edge and a second bent edge with an angle ⁇ , the opening of the angle ⁇ of the first limit block is the opposite direction of the rotation axis, and the first limit block The bent edge is fixed on the side wall of the rotating plate. When the rotating plate rotates to the target position, the second bent edge of the first limiting block contacts the first baffle plate and the rotating plate stops rotating.
  • the first bent edge is fixed to the side wall of the rotating plate by screws, and the angle ⁇ is used to define the angle between the rotating plate and the support frame required to send the loading tray to the target position. It is preferably 60-70 degrees, and more preferably 65 degrees.
  • the setting of the first limit component makes it impossible to continue to rotate in the feeding direction when the charging tray rotates to the target position, that is, the position of the charging tray to the inlet of the crystal growth furnace is fixed and precise.
  • the limit assembly further includes a second limit assembly, the second limit assembly includes a second baffle and a second limit block, and the second limit block and the second baffle are used in conjunction to adjust the rotation
  • the angle of the plate rotation defines the maximum angle between the rotating plate and the support frame required before feeding the loading tray to the target position.
  • the second limit block is provided on the support frame, and the second baffle is provided on the rotating plate.
  • the second limit block is provided on the rotating plate, and the second baffle is provided on Support frame.
  • the second limit block has opposite head ends and tail ends, wherein the tail ends are fixed at the bottom of the support frame, the head ends extend radially along the support frame until partially exposed, and the second baffle extends along the axis of the rotating plate to It has the same height as the second limit block.
  • the limit assembly further includes an adjustment member detachably connected to the limit block, wherein the adjustment member is used in conjunction with the limit block and the baffle to adjust the angle of rotation of the rotating plate; preferably, the adjustment member is a retractable structure, more Preferably, the adjusting member is a screw.
  • the first limiting component further includes a first adjusting member, which is used in conjunction with the first limiting block and the first baffle to adjust the rotation angle of the rotating plate.
  • the first adjusting member passes vertically through the second bent edge and is at least partially located on the non- ⁇ angle opening side of the second bent edge. When rotating to the target position, the first adjusting member on the non- ⁇ angle opening side of the second bent edge comes into contact with the first baffle plate and the rotating plate stops rotating.
  • the setting of the first adjusting member can adjust the angle between the rotating plate and the support frame when the ⁇ angle of the first limiting block is fixed, without replacing the first limiting block, It is suitable for crystal growth furnaces with different inlet positions.
  • the second limiting component further includes a second adjusting member, which is used in conjunction with the first limiting block and the first baffle to adjust the rotation angle of the rotating plate.
  • the setting of the second adjusting member can adjust the angle between the rotating plate and the support frame when the second limiting block contacts the second baffle plate when the position of the second limiting block is fixed, without the need for further adjustment Remove the second limit block to adjust the position.
  • the setting of the second limit component makes it possible to rotate to the most suitable position for loading before the loading tray is sent to the target position.
  • the operator can rotate the rotary plate outward to the second limit block to block the limit position, and stand opposite the limit position to load, so that the feeding device cannot continue to rotate outward, which improves the loading Efficiency and precision.
  • the second limit block is a travel switch.
  • the feed inlet is controlled to open. More preferably, when the travel switch is in contact with the second baffle, an instruction to control the opening of the material inlet is issued to prevent the equipment from being damaged due to the collision between the feeding device and the crystal growth furnace.
  • the travel switch can send a signal to control the lifting of the lower cover of the crystal growth furnace, that is, when the rotary unit rotates to the position of the second limit block, the travel switch sends a control signal due to the proximity or touch of the travel switch.
  • the crystal furnace controls the lower cover of the furnace body to be lowered and opened.
  • the feeding unit is fed into the target position of the lower cover of the furnace body, which can avoid the collision between the feeding device and the lower cover of the furnace body.
  • the support frame may be detachably fixed on the crystal growth furnace frame, or may be a support base independent of the crystal growth furnace and placed directly on the ground to function as a base.
  • a support frame that is detachably fixed on the furnace frame is more preferred, which saves space and is easy to operate.
  • the feeding device is suitable for assisting feeding to a crystal growth furnace, including but not limited to silicon carbide single crystal furnace, silicon carbide polycrystalline furnace, single crystal silicon crystal growth furnace, polycrystalline silicon crystal growth furnace, and the like.
  • the feeding device provided in this application feeds in a rotating manner, and a limit component is set to limit the rotation angle of the feeding unit, so that the position of loading and/or feeding is fixed and accurate;
  • the limit assembly of the feeding device provided in this application may also be provided with an adjustment member that can adjust the angle between the rotating unit and the supporting unit when it is rotated to the target position, so as to be suitable for production equipment with different inlet positions;
  • the limit assembly of the feeding device provided in this application may also have the function of controlling the opening and closing of the feeding port of the equipment to avoid collision damage of the feeding device and the production equipment;
  • the position of the feeding unit of the feeding device provided on this application on the rotating unit is fixed, which is beneficial to improve the accuracy of the material arrangement during charging and the concentricity of the material entering the furnace body, and can also cooperate with the limit component to rotate the feeding unit
  • the position to the device is more precise;
  • the feeding device provided in this application makes the loading position shift from the inside of the equipment to the external operation. After the feeding unit completes the loading, the rotating unit rotates directly to feed, and the material can be quickly filled in one operation, which improves the equipment. The use efficiency reduces the labor intensity of the operator.
  • the feeding device feds the crystal growth furnace by rotating the furnace frame as the axis, and at the same time, the detachably connected charging tray and support bar are conducive to fixing the position of the charging tray on the support bar , To improve the accuracy of material arrangement and concentricity of materials during loading, and at the same time when the loading tray containing materials is rotated into the target position, it can be smoothly separated from the support bar.
  • the feeding device provided in this application also includes a limit component, which can cooperate with the detachably connected loading tray and the support bar to realize the precise positioning of the loading tray being fed into the target position.
  • the feeding device provided in this application makes the loading position shift from the inside of the equipment to the outside operation. After the loading is completed on the loading tray, the rotating plate rotates directly to feed, and the material can be quickly filled in one operation, which improves The use efficiency of the equipment is reduced, and the labor intensity of the operator is reduced.
  • Figure 1 is a schematic diagram of a three-dimensional structure of a feeding device
  • Figure 2 is a left side view of a feeding device
  • Fig. 3 is a right side view of a feeding device, in which part A is a sectional view of the rotating connection structure of the feeding device;
  • Figure 4 is an enlarged view of part A in Figure 3;
  • FIG. 6 is a bottom view of the second position of the feeding device in the limit state
  • FIG. 7 is a schematic diagram of the assembly of the rotating unit and the feeding unit of the feeding device
  • FIG. 8 is a schematic diagram of the use state of the feeding device
  • the present application provides a feeding device.
  • the feeding device is suitable for assisting feeding to a crystal growth furnace, including but not limited to silicon carbide single crystal furnace, single crystal silicon crystal growth furnace, polycrystalline silicon crystal growth furnace, etc. It is particularly preferred to assist feeding to the silicon carbide single crystal furnace.
  • the feeding device can also be used to feed to ordinary production equipment with a feed inlet.
  • the feeding device As shown in FIG. 1, the feeding device provided by the present application includes a supporting unit, a rotating unit and a feeding unit connected in sequence.
  • the supporting unit includes a supporting frame 2, the rotating unit includes a rotating plate 3, a tool holder 7, a positioning bar 71 and a supporting bar 72, and the feeding unit includes a loading tray, and the loading tray includes a tool upper body 8 and ⁇ 10.
  • the feeding device is used to assist feeding to the silicon carbide single crystal furnace.
  • the silicon carbide single crystal furnace is usually placed on the furnace body frame 1, and the support frame 2 is connected with the furnace body frame 1.
  • the detachable fixed frame can be installed on the legs of the furnace frame 1 during use. The installation height is moderate, which makes it easy to operate when loading, and will not hit the crystal growth furnace when rotating after loading.
  • the support frame 2 can also be placed directly on the ground independently of the furnace frame 1 to provide the supporting force of the rotating unit and the feeding unit and serve as a rotating shaft, so that the connection with the rotating unit The feeding unit rotates on the support frame 2 as an axis.
  • the rotating unit has opposite first and second ends.
  • the first end of the rotating unit is fixedly and rotatably connected to the support unit.
  • the feeding unit is detachably connected to the second end of the rotating unit.
  • the rotating unit drives the feeding unit to support the unit For the shaft to rotate, at the same time, a limit assembly provided on the rotation unit and the support unit is used to adjust the rotation angle of the rotation unit and the feeding unit.
  • the limiting assembly includes at least a first limiting assembly, wherein the first limiting assembly includes a first baffle 21 fixed to the support unit and a first limiting block 11 fixed to the rotating unit, the first baffle 21 and the rotating shaft Parallel and at least partly the same height as the rotating unit.
  • the first limiting block 11 comes into contact with the first baffle 21 and the rotating unit stops rotating.
  • the first limit block 11 includes a first bent edge and a second bent edge with an angle ⁇ , the opening of the angle ⁇ of the first limit block 11 is the opposite direction of the rotation axis, and the first limit block 11
  • the first bent edge is detachably connected and fixed to the side wall of the rotating plate 3.
  • the rotating unit rotates to the target position
  • the second bent edge of the first limiting block 11 contacts the first baffle 21, and the rotating unit stops rotating.
  • the first bent edge of the first limiting block 11 is fixed to the side wall of the rotating plate 3 by screws, and the angle ⁇ is used to define the rotation unit and the support unit required to feed the feeding unit to the target position
  • the angle between them is preferably in the range of 60-70 degrees, and in this embodiment is 65 degrees.
  • the setting of the first limiting component makes it impossible to continue to rotate in the feeding direction when the feeding unit rotates to the target position, that is, the position where the feeding unit turns to the equipment inlet is fixed and accurate.
  • the first limiting block 11 further includes an adjustment member with an adjustable height, the adjustment member vertically passes through the second bending edge, and is at least partially located on the non- ⁇ angle opening side of the second bending edge.
  • the adjusting member on the non- ⁇ angle opening side of the second bent edge comes into contact with the first baffle and the rotating unit stops rotating.
  • the adjusting member is a bolt.
  • the bolt vertically passes through the second bent edge, and the head of the bolt is located on the non- ⁇ angle opening side of the second bent edge, that is, the first The outer side of the limit block 11 is screwed into the inner side along the screw hole.
  • the rotating unit rotates until the head of the bolt hits the first baffle 21, the feeding unit is just rotated to the target position, that is, directly above the lower cover of the furnace body, which is also the feed inlet, and at this time, the rotating unit and the support frame
  • the angle between 2 is ⁇ angle.
  • the setting of the adjusting member can make the angle between the rotating unit and the supporting unit be adjusted when the ⁇ angle of the first limiting block 11 is fixed, for example, the head of the adjusting bolt extends beyond the second bending edge
  • the length of the outer side can realize that the angle between the rotating unit and the supporting unit is greater than the angle ⁇ when the feeding unit is just rotated to the target position when the angle ⁇ is unchanged, so there is no need to replace the first limit block 11, ie
  • the feeding device can be suitable for production equipment with different inlet positions.
  • the limit assembly further includes a second limit assembly, wherein the second limit assembly includes a second baffle 73 fixed to the rotation unit and a second limit block 12 fixed to the support unit, the rotation unit facing the target position During rotation, the second stopper 12 contacts the second baffle 73 and the rotation unit stops rotating.
  • the second limiting block 12 has opposite head and tail ends, where the tail end is fixed at the bottom of the support unit, the head end extends radially along the support unit until partially exposed, and the second baffle 73 rotates along The unit extends axially to the same height as the second limit block 12.
  • the rotating unit rotates in the direction opposite to the target position, the head of the second stopper 12 comes into contact with the second stopper 73 and the rotating unit stops rotating.
  • the head end of the second limit block 12 can also be provided with an adjustable height adjustment member, such as a bolt, by adjusting the length of the bolt head extension, so that When the position of the second limiting block 12 is fixed, the angle between the rotating unit and the supporting unit when the second limiting block 12 is in contact with the second baffle 73 is adjusted without removing the second limiting block 12 Perform position adjustment.
  • an adjustable height adjustment member such as a bolt
  • the second limiting block 12 is a pin-shaped part, and has a pin head and a pin rod, wherein the pin rod is detachably connected to the bottom of the support frame 2, and the pin head extends in the radial direction of the support frame 2 and is exposed.
  • the bolt head is provided with a bolt in a direction parallel to the support frame 2, and the bolt head is located on the target position side.
  • the setting of the second limit component makes it possible to rotate to the most suitable position for loading before the feeding unit is sent to the target position.
  • the operator can rotate the rotary unit outward to the position where the second limit block 12 blocks the limit, and stand inside the limit to load, so that the feeding device cannot continue to rotate outward or inward. Improve the loading efficiency and accuracy.
  • the second limit block 12 is set as a travel switch.
  • the contact of the feeding device can be used to make the contact action to turn on or off the control circuit.
  • the limit switch can be used to make or break the circuit that controls the opening or closing of the equipment inlet.
  • the travel switch can be used to turn on or off the circuit that controls the lifting of the lower cover of the silicon carbide crystal growth furnace, that is, when the rotary unit rotates to the position of the second limit block 12, due to the proximity or touch of the travel Switch, the control circuit is turned on at this time, the lower body cover of the crystal growth furnace is opened and lowered to a position below the height of the feeding device, then the feeding unit is sent to the target position above the lower body cover of the furnace body, and then the crystal growth is operated
  • the furnace controls the lower cover of the furnace body to rise, so the arrangement can avoid collision caused by the same height of the feeding device and the lower cover of the furnace body.
  • the rotating unit includes a rotating plate 3, a tool holder 7, a positioning bar 71 and a supporting bar 72.
  • one end of the rotating plate 3 is rotatably connected to the support frame 2, and the other end is placed above the tooling pallet 7 and is detachably connected to the tooling pallet 7.
  • the rotating plate 3 and the support frame 2 are connected by a compression handle 4 and a pair of thrust bearing shafts, and are screwed to the tool holder 7.
  • the setting of the rotating plate 3 can reinforce the tooling pallet 7 and increase the bearing capacity of the rotating unit to the feeding unit.
  • connection structure of the rotating plate 3 and the support frame 2 is composed of a pressing handle 4 connected to a first thrust bearing 5, a second thrust bearing 6 and a round nut 9 in order to realize that the rotating unit can use the support frame 2 as
  • the shaft rotates, and accordingly, in order to assemble the above-mentioned shaft connection structure, the connection position of the rotating plate 3 and the support frame 2 is provided with holes or grooves for assembling the corresponding connection structure parts.
  • a convex thin strip-shaped push plate may be provided above the rotary plate 3 to facilitate manual push-pull rotation operation.
  • the tooling pallet 7 is disposed below the rotating plate 3 and is partially screw-connected with the rotating plate 3.
  • a positioning bar 71 is laterally extended along the tooling pallet 7, and the positioning bar 71 passes through the center of the tooling upper body 8.
  • a support bar 72 is also provided on both sides of the positioning bar 71 for supporting and placing the feeding unit.
  • the support bars 72 and the positioning bar 71 are arc-shaped bars with a certain thickness, which is beneficial to increase the support bar 72
  • the force-bearing area of the positioning bar 71 can disperse the force when the feeding unit is equipped with materials.
  • the feeding unit includes a loading tray, wherein the loading tray includes a circular tool upper body 8 and a tool lower body 10, and four support columns 101 are distributed on the edge of the tool lower body 10, and each support column 101 is provided with a threaded groove inside the tooling.
  • the body 8 is provided with screw holes at positions corresponding to the four support columns 101, and the upper tool body 8 and the lower tool body 10 can be detachably connected by screws or bolts.
  • detachable connection methods include but are not limited to snap connection, screw connection, pin connection, key connection, sliding connection, etc., preferably snap connection.
  • the feeding unit and the rotating unit are connected by a snap.
  • the upper tool body 8 and the positioning bar 71 are connected by a buckle.
  • the contact surface of the tooling upper body 8 and the positioning bar 71 is provided with a buckle 81, and the positioning bar 71 is recessed to form a positioning rib 711.
  • the positioning rib 711 corresponds to the position of the buckle 81 and is equal to the opening width of the buckle 81.
  • the number and position of the buckle 81 and the positioning rib 711 can be adjusted.
  • the concave part of the positioning bar can form a positioning rib 711.
  • two buckles 81 can be provided to match the positions of both ends of the positioning rib 711.
  • a plurality of positioning ribs 711 may also be formed in the concave portion of the positioning bar.
  • a positioning buckle 81 may be provided for each positioning rib 711, or a locking buckle 81 fixed to the positioning rib 711 may be provided.
  • the criterion for judging the positioning success is that when the positioning groove 811 happens to be engaged with the positioning edge 711 corresponding to it, it is regarded as successful positioning.
  • the positioning rib 711 includes two ribs that cross each other, and the intersection of the two ribs extends outward to form four branch ribs.
  • the contact surface of the tooling upper body 8 and the positioning bar 71 is provided with four branch ribs.
  • each buckle 81 corresponds a positioning groove 811, wherein the opening width of the positioning groove 811 is equal to the width of the branch edge of the positioning rib 711, so that the buckle 81 can be stuck in its corresponding position On the branches.
  • the upper body 8 of the tooling moves so that each branch edge and its corresponding positioning groove 811 just fit and catch, it can be considered that the positioning is completed.
  • the two edges of the positioning rib 711 cross vertically and horizontally, when the buckle 81 is engaged on its corresponding supporting rib, the position of the tooling upper body 8 on the positioning bar 71 is more stable, and the tooling upper body is loaded during loading 8 will not shake around.
  • the positioning bar may be any one of the support bars, or any number of the support bars may play a positioning role together; the positioning bar may be a support bar that supports the center position of the loading tray, or a support device Support strips at any edge of the tray.
  • the number and position of the snap connection structure can be adjusted so that the loading tray and the support bar will not shake after being connected. This arrangement is beneficial to fix the loading tray on the support bar for loading.
  • the positioning bar 71 passes through the center of the upper body 8 of the tooling, and a plurality of buckles 81 are provided along the diameter of the upper body 8 of the tooling.
  • the positioning rib 711 is also set to be linear.
  • a through hole is provided in the center of the upper tool body 8 for observing the relative positions of the positioning groove 811 and the positioning rib 711.
  • the lower body 10 of the tool and the upper body 8 of the tool connected by the support column 101 are hollow inside for placing the positioning bar 71.
  • the tooling upper body 8 is positioned and positioned above the positioning bar 71 through the above-mentioned snap connection, and then the tooling lower body 10 is connected to the tooling upper body 8; in another embodiment, the After the tooling lower body 10 is screwed to the tooling upper body 8 through the support column 101, the positioning bar 71 is inserted into the tooling upper body 8 and the tooling lower body 10 until the buckle structure is engaged for successful positioning.
  • the feeding unit and the rotating unit are connected by a buckle.
  • One is to ensure that the position of the tooling upper body 8 for loading is fixed on the positioning bar 71, and to avoid the shaking of the tooling upper body 8 when loading the tooling upper body 8, which is beneficial to
  • the increased accuracy and concentricity of the materials are arranged to cooperate with the first limit block 11 to make the position of the feeding unit rotating to the target position more accurate.
  • the preferred method of using the above feeding device is as follows:
  • the support frame 2 on the legs of the furnace body frame 1, and then insert the positioning bar 71 and the support bar 72 into the interior of the tooling upper body 8 and the tooling lower body 10 that are connected as a whole until the card above the tooling upper body 8
  • the buckle 81 is engaged with the corresponding positioning edge 711 and cannot continue to move.
  • the positioning bar 71 supports the center of the tool upper body 8
  • the support bar 72 supports the edge of the tool upper body 8.
  • the travel switch controls to lower the lower cover of the crystal growth furnace to a position lower than the height of the feeding device. Then, standing on the side of the feeding direction of the feeding device, the materials are neatly arranged on the upper body 8 of the tooling in a certain order. Since the second limiting block 12 also has a limiting effect, the position of the rotating unit will not be shaken during loading.
  • the feeding unit is just above the lower cover of the furnace body. Operate the control system of the crystal growth furnace to raise the lower cover of the furnace body until it is dragged to the lower body 10 of the tooling, so that the upper body 8 of the tooling is just separated from the tooling pallet 7 and the tooling pallet 7 can be moved outside the furnace frame 1 Unscrew. At this time, the feeding unit containing the material has been placed on the lower cover of the furnace body. Continue to raise the lower cover of the furnace body until it enters the furnace body and reaches the designated position in the furnace body.
  • the feeding device provided by the present application to feed the silicon carbide single crystal furnace, compared with the existing manual charging directly into the silicon carbide single crystal furnace, the efficiency is greatly improved, such as the same 6 kg of silicon carbide For the raw material, the feeding time of the feeding device is saved by 1 to 1.5 hours. At the same time, the external charging improves the position accuracy of the material and the concentricity into the furnace body, which is beneficial to the production of silicon carbide crystals with higher yield and quality.

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Abstract

一种送料装置，包括依次连接的支撑单元、旋转单元和送料单元。支撑单元与旋转单元转动连接，送料单元与旋转单元可拆卸的连接，支撑单元、旋转单元和送料单元如此配置以使旋转单元带动送料单元以支撑单元为轴进行转动，送料单元还包括限位组件，限位组件与旋转单元和支撑单元如此设置以调节旋转单元转动的角度。该送料装置以旋转方式送料，并设置限位组件限制了送料单元的转动的角度，使得装料和/或送料的位置固定且精准，同时装料的位置由设备内部转向设备外部操作，一次操作即可快速填装，提高了设备的使用效率，减小了操作人员的劳动强度。

Description

一种送料装置 技术领域
本申请涉及生产设备辅助工具领域，尤其涉及一种送料装置。
背景技术
现有的生产设备往往需要人工送料，即在生产设备启动前，需要人工地提前将原料放入生产设备中。这样的操作，一是大大增加了操作人员的劳动强度，不够自动化，二是人工操作的准确度低，对于要求装料的位置精准度高的生产工艺，其生产质量难以保证。
例如，在碳化硅晶体的生产过程中，碳化硅长晶炉通常将炉体设置在炉体机架上，操作人员向炉体装料时，需要在伸向机架内部的炉体下盖上进行物料的排列和叠装，由于机架内部的空间非常狭小，在炉体下盖上直接装料时，需要多名操作人员同时进行，有限的操作空间使得操作人员的工作效率降低，劳动强度也大大增加。
另外，碳化硅长晶炉对炉内长晶原料的排列顺序要求较高，在装料时，物料需要按照一定顺序从上到下、从内到外精确排好，对物料在炉体内部的同心度要求较高。而机架内部的空间有限，人工操作时，无法使用专用的定位工装来保证物料在炉体内的同心度等定位精度问题，因此，直接在炉体下盖装料，物料位置的精准度难以控制。
公告号为CN207581890U的中国实用新型专利提供了一种用于热浸镀设备的自动上料装置，包括送料机、支撑台、旋转手臂、手臂主轴、保险轴、传动装置和电机，该方案主要解决上料效率低、工件易污染的 问题。然而该装置结构复杂，体积较大，并不适于安装在长晶炉的炉体机架上，也不能解决上料位置精准度的问题。
发明内容
为了解决现有技术中，因生产设备缺少自动化送料装置而造成的送料效率低、劳动强度大，以及送料位置不精准的问题，本申请提出了一种送料装置，包括依次连接的支撑单元、旋转单元和送料单元，支撑单元与旋转单元转动连接，所述送料单元与旋转单元可拆卸的连接，支撑单元、旋转单元和送料单元如此配置以使旋转单元带动送料单元以支撑单元为轴进行转动，其中，送料装置还包括限位组件，限位组件与旋转单元和支撑单元如此设置以调节旋转单元转动的角度。
进一步地，限位组件至少包括第一限位组件，所述第一限位组件包括第一挡板和第一限位块，第一限位块和第一挡板配合使用以调整旋转单元旋转的角度，限定将送料单元旋转至目标位置所需的旋转单元与支撑单元之间的夹角。优选地，第一限位组件位于旋转单元和支撑单元的送料方向侧。
在一种实施方式中，第一限位块设在旋转单元，第一挡板设在支撑单元，在另一种实施方式中，第一限位块设在支撑单元，第一挡板设在旋转单元，可以实现限定将送料单元旋转至目标位置所需的旋转单元与支撑单元之间的夹角即可。优选地，第一限位块为包括具有α角的第一弯折边和第二弯折边，第一限位块的α角开口为旋转轴的反方向，第一限位块的第一弯折边固定在旋转单元侧壁。旋转单元旋转至目标位置时，第一限位块的第二弯折边与第一挡板接触则旋转单元停止旋转。
在优选的实施方式中，第一弯折边通过螺钉固定在旋转单元侧壁，α角为用以限定将送料单元送入目标位置所需的旋转单元与支撑单元之间的夹角，范围优选为60‐70度，更优选65度。
第一限位组件的设置，使得当送料单元旋转至目标位置时不能再继续向送料方向转动，即送料单元转至设备入料口的位置是固定而精准的。
更进一步地，第一限位组件还包括第一调节件，第一调节件与第一限位块和第一挡板配合使用，以调整旋转单元旋转的角度。在优选地实施方式中，第一调节件垂直穿过第二弯折边，且至少部分位于第二弯折边的非α角开口侧。旋转至目标位置时，第二弯折边的非α角开口侧的第一调节件与第一挡板接触则旋转单元停止旋转。
其中，第一调节件的设置可使得在第一限位块的α角固定的情况下，对旋转单元旋转至目标位置时与支撑单元的夹角进行调整，无需更换第一限位块，以适用于入料口位置不同的生产设备。
进一步地，限位组件还包括第二限位组件，第二限位组件包括第二挡板和第二限位块，第二限位块和第二挡板配合使用以调整旋转单元旋转的角度，限定将送料单元送入目标位置之前所需的旋转单元与支撑单元之间的最大夹角。
在一种实施方式中，第二限位块设在支撑单元，第二挡板设在旋转单元，在另一种实施方式中，第二限位块设在旋转单元，第二挡板设在支撑单元。优选的，第二限位块具有相对的头端和尾端，其中，尾端固定在支撑单元底部，头端沿支撑单元径向延伸至部分露出，第二挡板沿旋转单元轴向延伸至与第二限位块具有相同高度。旋转单元向与目标位置相反方向旋转时，第二限位块的头端与第二挡板接触则旋转单元停止旋转。
更进一步的，第二限位组件还包括第二调节件，第二调节件与第一限位块和第一挡板配合使用，以调整旋转单元旋转的角度。
其中，第二调节件的设置可使得在第二限位块位置固定的情况下，对旋转单元旋转至第二限位块与第二挡板接触时与支撑单元的夹角进行 调整，无需再拆卸第二限位块进行位置调整。
第二限位组件的设置，使得在送料单元被送入目标位置之前，能够旋转至最合适的位置进行装料。在具体的生产实践中，操作人员可以将旋转单元向外旋转至第二限位块阻挡限位处，站在限位处内侧进行装料，使送料装置无法继续向外或向内转动，提高了装料效率和精准度。
进一步地，上述第一和/或第二调节件为可伸缩结构。优选地，所述第一和/或第二调节件为螺钉。
进一步地，第二限位块为行程开关，行程开关与第二挡板配合限位时，控制打开入料口。优选地，行程开关与第二挡板接触时，电路接通使长晶炉发出控制打开入料口的指令，以防止送料装置与生产设备发生碰撞造成设备损坏。
例如，行程开关可以用来实现接通或分断控制碳化硅长晶炉的炉体下盖升降的电路，即当旋转单元旋转至第二限位块的位置时，由于接近或触碰到行程开关，此时控制电路接通，长晶炉的炉体下盖打开并下降至低于送料装置高度的位置，此时再将送料单元送至炉体下盖上方的目标位置，然后操作长晶炉控制炉体下盖上升，如此设置可以避免因送料装置与炉体下盖的高度相同造成碰撞。
进一步地，上述送料装置的送料单元与旋转单元通过卡扣连接。
进一步地，旋转单元包括工装托板，沿所述工装托板横向延伸设有支撑条，所述送料单元包括置于所述支撑条上方的装料盘，所述装料盘与支撑条通过卡扣连接。
更进一步地，装料盘与支撑条的接触面设有卡扣，所述支撑条包括定位条，所述定位条内凹形成定位棱，所述定位棱与所述卡扣的位置对应且与卡扣的开口宽度相等，当装料盘置于支撑条上方时，装料盘的卡扣与定位条的定位棱配合固定。
在一种实施方式中，支撑条至少有两个，且为具有一定厚度的弧形条，这种设置有利于增大支撑条的受力面积，当送料单元上装有物料时，可以使受力更均匀分散。
在一种实施方式中，装料盘包括圆形的工装上体和工装下体，其中，工装上体与支撑条接触，接触面设有卡扣，工装下体边缘分布有支撑柱，且通过支撑柱与工装上体可拆卸连接。工装上体与工装下体之间中空，可插入支撑条，直至工装上体与支撑条卡扣连接，更优选地，支撑条中经过工装上体圆心的为定位条。
在一种实施方式中，将工装上体与支撑条卡扣连接后，再将工装下体与工装上体螺纹连接；在另一种实施方式中，可先将工装下体通过支撑柱与工装上体螺纹连接后，再将支撑条插入工装上体与工装下体的内部，直至卡扣结构配合固定。
在一种实施方式中，定位条可以是支撑条中的任意一个，也可以是支撑条中的任意几个共同起定位作用，优选的，定位条为支撑装料盘中心的支撑条，或者支撑装料盘的任意边缘部位的支撑条。在另一种实施方式中，卡扣连接结构的数目和位置均可以调整，使得装料盘与支撑条连接后不会发生晃动即可。如此设置有利于将装料盘固定在支撑条上装料，当盛有物料的装料盘被旋转送入长晶炉的目标位置时，装料盘可以顺利脱离支撑条，连同物料一起进入炉体内部。
在一种实施方式中，装料盘的卡扣和定位棱的数目和位置也是可以调整的。当定位条仅有一个时，定位条部分内凹可以形成一个定位棱，此时可以设置配合固定定位棱两端位置的两个卡扣，也可以设置固定定位棱任意位置的多个卡扣；定位条部分内凹也可以形成多个定位棱，此时可以为每个定位棱设置一个卡扣，也可以设置配合部分定位棱固定的卡扣。由于定位棱的宽度与卡扣的宽度相等，当装料盘与定位条配合固 定时，卡扣与定位棱可以不是一一对应的，如设置四个互相平行的定位棱和一个卡扣，此时卡扣可以用于配合固定在任意一个定位棱上，由于定位棱是平行设置的，因此当卡扣与不同的定位棱配合固定时，装料盘在支撑条上的位置并不相同。如此设置可以对装料盘在支撑条上的固定位置进行调整，以使得送料装置适用于辅助为不同规格的长晶炉送料。
其中，送料单元与旋转单元通过卡扣连接，一是为了保证用于装料的送料单元在旋转单元上的位置固定，有利于提高装料时的物料排列精度和物料同心度，二是为了配合限位组件，使得送料单元旋转至目标位置的位置精确。
优选地，本申请提供的送料装置适用于辅助向长晶炉送料，包括但不限于碳化硅单晶炉、碳化硅多晶炉、单晶硅长晶炉、多晶硅长晶炉等。
可选的，旋转单元还包括旋转板，旋转板一端与支撑单元转动连接，另一端置于工装托板上方，并与工装托板可拆卸连接。优选地，旋转板与支撑单元通过压紧手柄和一对推力轴承轴连接，并与工装托板螺纹连接。旋转板的设置，可以对工装托板起到加固作用，增大旋转单元对送料单元的承载力。
可选的，支撑单元可以是可拆卸的固定在生产设备机架上的支撑架，也可以是独立于生产设备的、直接放置于地面起底座作用的支撑座。当适用于碳化硅单晶炉时，更优选可拆卸固定在炉体机架上的支撑架，节省空间且操作方便。
根据本申请的一个方面，提供了一种送料装置，包括依次连接的支撑架、旋转单元和装料盘，其中，旋转单元的一端与支撑架转动连接，另一端与装料盘可拆卸连接，以使旋转单元带动装料盘以支撑架为轴进行转动。沿旋转单元径向延伸还设有至少一个支撑条，装料盘置于支撑条上方，且与支撑条可拆卸连接。
在一种实施方式中，支撑条优选2‐5个，更优选3个，支撑条置于装料盘的下方，用于为装有物料的装料盘提供支撑力。装料盘与支撑条的可拆卸连接方式包括但不限于卡扣连接、螺纹连接、销连接、键连接、滑动连接等，优选卡扣连接。
进一步地，支撑条包括至少一个定位条，装料盘与定位条卡扣连接。如此设置可以保证装料盘在支撑条上的位置固定，有利于提高装料时的物料排列精度和物料同心度。
在一种实施方式中，定位条可以是支撑条中的任意一个，也可以是支撑条中的任意几个共同起定位作用，优选的，定位条为支撑装料盘中心的支撑条，或者支撑装料盘的任意边缘部位的支撑条。在另一种实施方式中，卡扣连接结构的数目和位置均可以调整，使得装料盘与支撑条连接后不会发生晃动即可。如此设置有利于将装料盘固定在支撑条上装料，当盛有物料的装料盘被旋转送入长晶炉的目标位置时，装料盘可以顺利脱离支撑条，连同物料一起进入炉体内部。
更进一步地，装料盘与定位条的接触面设有至少一个卡扣，定位条部分内凹形成定位棱，定位棱与卡扣的位置对应，且宽度与卡扣的开口宽度相等，当装料盘置于定位条上方时，卡扣与定位棱配合固定。
在一种实施方式中，装料盘的卡扣和定位棱的数目和位置也是可以调整的。当定位条仅有一个时，定位条部分内凹可以形成一个定位棱，此时可以设置配合固定定位棱两端位置的两个卡扣，也可以设置固定定位棱任意位置的多个卡扣；定位条部分内凹也可以形成多个定位棱，此时可以为每个定位棱设置一个卡扣，也可以设置配合部分定位棱固定的卡扣。由于定位棱的宽度与卡扣的宽度相等，当装料盘与定位条配合固定时，卡扣与定位棱可以不是一一对应的，如设置四个互相平行的定位棱和一个卡扣，此时卡扣可以用于配合固定在任意一个定位棱上，由于 定位棱是平行设置的，因此当卡扣与不同的定位棱配合固定时，装料盘在支撑条上的位置并不相同。如此设置可以对装料盘在支撑条上的固定位置进行调整，以使得送料装置适用于辅助为不同规格的长晶炉送料。
再更进一步地，定位棱包括至少两个纵横交叉的支棱，卡扣与支棱配合固定。优选地，定位棱包括两个互相垂直的支棱，其中一条支棱被垂足分成第一边和第二边，另一条支棱被垂足分成第三边和第四边，其中卡扣至少与其中非同一个棱的两条边配合固定，优选与四条边配合固定。
进一步地，定位条经过装料盘中心或靠近装料盘边缘。
在一种实施方式中，可以将经过装料盘中心或靠近装料盘边缘的某个支撑条设置成定位条；在另一种实施方式中，可以将几个支撑条设置成定位条。
进一步地，支撑条为弧形。优选地，支撑条为具有一定厚度的弧形条，如此设置有利于增大支撑条的受力面积，当送料单元上装有物料时，可以使受力更均匀分散。
进一步地，所述装料盘包括工装上体和工装下体，所述工装下体设有支撑柱，所述工装上体通过支撑柱与工装下体螺纹连接。优选地，工装上体与工装下体之间中空，可插入支撑条，直至装料盘与支撑条卡扣连接。
在一种实施方式中，可以先将工装上体与支撑条卡扣连接后，再将工装上体与工装下体螺纹连接；在另一种实施方式中，可先将工装下体通过支撑柱与工装上体螺纹连接后，再将支撑条插入内部，直至卡扣结构配合固定。
进一步地，所述旋转单元包括旋转板和工装托板，所述旋转板与支撑架转动连接，所述工装托板的一端与旋转板可拆卸连接，另一端沿径 向延伸设有支撑条。
在一种实施方式中，旋转板的一端与支撑架通过压紧手柄和一对推力轴承轴连接，另一端与工装托板螺纹连接。如此设置，既可以对工装托板起到加固作用，又可以增大旋转单元对装料盘的承载力。
进一步地，装置还包括限位组件，限位组件至少包括一个挡板和一个限位块，挡板和限位块配合使用以调整旋转板旋转的角度。如此设置可以配合旋转板，使得装料盘旋转至目标位置时定位更加精确。
在一种实施方式中，限位组件至少包括第一限位组件，第一限位组件包括第一挡板和第一限位块，第一限位块和第一挡板配合使用以调整旋转板旋转的角度，限定将装料盘旋转至目标位置所需的旋转板与支撑架之间的夹角。优选地，第一限位组件位于旋转板和支撑架的送料方向侧。
在一种实施方式中，第一限位块设在旋转板，第一挡板设在支撑架，在另一种实施方式中，第一限位块设在支撑架，第一挡板设在旋转板，可以实现限定将装料盘旋转至目标位置所需的旋转板与支撑架之间的夹角即可。优选地，第一限位块为包括具有α角的第一弯折边和第二弯折边，第一限位块的α角开口为旋转轴的反方向，第一限位块的第一弯折边固定在旋转板侧壁。旋转板旋转至目标位置时，第一限位块的第二弯折边与第一挡板接触则旋转板停止旋转。
在优选的实施方式中，第一弯折边通过螺钉固定在旋转板侧壁，α角为用以限定将装料盘送入目标位置所需的旋转板与支撑架之间的夹角，范围优选为60‐70度，更优选65度。
第一限位组件的设置，使得当装料盘旋转至目标位置时不能再继续向送料方向转动，即装料盘转至长晶炉入料口的位置是固定而精准的。
在一种实施方式中，限位组件还包括第二限位组件，第二限位组件 包括第二挡板和第二限位块，第二限位块和第二挡板配合使用以调整旋转板旋转的角度，限定将装料盘送入目标位置之前所需的旋转板与支撑架之间的最大夹角。
在一种实施方式中，第二限位块设在支撑架，第二挡板设在旋转板，在另一种实施方式中，第二限位块设在旋转板，第二挡板设在支撑架。优选的，第二限位块具有相对的头端和尾端，其中，尾端固定在支撑架底部，头端沿支撑架径向延伸至部分露出，第二挡板沿旋转板轴向延伸至与第二限位块具有相同高度。旋转板向与目标位置相反方向旋转时，第二限位块的头端与第二挡板接触则旋转板停止旋转。
进一步地，限位组件还包括与限位块可拆卸连接的调节件，其中调节件与限位块和挡板配合使用，以调整旋转板旋转的角度；优选，调节件为可伸缩结构，更优选，调节件为螺钉。
在一种实施方式中，第一限位组件还包括第一调节件，第一调节件与第一限位块和第一挡板配合使用，以调整旋转板旋转的角度。在优选地实施方式中，第一调节件垂直穿过第二弯折边，且至少部分位于第二弯折边的非α角开口侧。旋转至目标位置时，第二弯折边的非α角开口侧的第一调节件与第一挡板接触则旋转板停止旋转。
其中，第一调节件的设置可使得在第一限位块的α角固定的情况下，对旋转板旋转至目标位置时与支撑架的夹角进行调整，无需更换第一限位块，以适用于入料口位置不同的长晶炉。
在一种实施方式中，第二限位组件还包括第二调节件，第二调节件与第一限位块和第一挡板配合使用，以调整旋转板旋转的角度。
其中，第二调节件的设置可使得在第二限位块位置固定的情况下，对旋转板旋转至第二限位块与第二挡板接触时与支撑架的夹角进行调整，无需再拆卸第二限位块进行位置调整。
第二限位组件的设置，使得在装料盘被送入目标位置之前，能够旋转至最合适的位置进行装料。在具体的生产实践中，操作人员可以将旋转板向外旋转至第二限位块阻挡限位处，站在限位处对面进行装料，使送料装置无法继续向外转动，提高了装料效率和精准度。
优选的，第二限位块为行程开关，行程开关与第二挡板配合限位时，控制打开入料口。更优选的，行程开关与第二挡板接触时发出控制打开入料口的指令，以防止送料装置与长晶炉发生碰撞造成设备损坏。
例如，行程开关可以发出控制长晶炉的炉体下盖升降的信号，即当旋转单元旋转至第二限位块的位置时，由于接近或触碰到行程开关，行程开关发出控制信号，长晶炉接收到信号后控制炉体下盖下降打开，此时再将送料单元送入炉体下盖的目标位置，可以避免送料装置与炉体下盖碰撞。
可选的，支撑架可以是可拆卸的固定在长晶炉机架上，也可以是独立于长晶炉的、直接放置于地面起底座作用的支撑座。当适用于碳化硅单晶炉时，更优选可拆卸固定在炉体机架上的支撑架，节省空间且操作方便。
可选地，该送料装置适用于辅助向长晶炉送料，包括但不限于碳化硅单晶炉、碳化硅多晶炉、单晶硅长晶炉、多晶硅长晶炉等。
通过本申请能够带来以下有益效果：
1、本申请提供的送料装置，以旋转方式送料，并设置限位组件限制了送料单元的转动的角度，使得装料和/或送料的位置固定且精准；
2、本申请提供的送料装置的限位组件，还可以设有可对旋转单元旋转至目标位置时与支撑单元的夹角进行调整的调节件，以适用于入料口位置不同的生产设备；
3、本申请提供的送料装置的限位组件，还可以具有控制设备入料口开闭的功能，避免送料装置与生产设备发生碰撞损坏；
4、本申请提供的送料装置的送料单元在旋转单元上的位置固定，有利于提高装料时的物料排列精度和进入炉体内部的物料的同心度，还可以配合限位组件使送料单元旋转至设备的位置更加精准；
5、本申请提供的送料装置，使得装料的位置由设备内部转向外部操作，在送料单元完成装料后，由旋转单元旋转直接送料，一次操作即可实现物料的快速填装，提高了设备的使用效率，减小了操作人员的劳动强度。
6、本申请提供的送料装置，采用以炉体机架为轴旋转的方式向长晶炉送料，同时可拆卸连接的装料盘与支撑条，有利于装料盘在支撑条上的位置固定，提高装料时的物料排列精度和物料同心度，同时当盛有物料的装料盘被旋转送入目标位置时，可以顺利脱离支撑条。
7、本申请提供的送料装置，还包括限位组件，可以配合可拆卸连接的装料盘和支撑条实现装料盘被送入目标位置的精准定位。
8、本申请提供的送料装置，使得装料的位置由设备内部转向外部操作，在装料盘上完成装料后，由旋转板旋转直接送料，一次操作即可实现物料的快速填装，提高了设备的使用效率，减小了操作人员的劳动强度。
附图说明
此处所说明的附图用来提供对本申请的进一步理解，构成本申请的一部分，本申请的示意性实施例及其说明用于解释本申请，并不构成对本申请的不当限定。在附图中：
图1为一种送料装置的立体结构示意图；
图2为一种送料装置的左视图；
图3为一种送料装置的右视图，其中A部分为送料装置转动连接结构的剖视图；
图4为图3中A部分的放大图；
图5为送料装置处于限位状态第一位置的俯视图；
图6为送料装置处于限位状态第二位置的仰视图；
图7为送料装置的旋转单元和送料单元的装配示意图；
图8为送料装置的使用状态示意图；
图中：1、炉体机架；2、支撑架；3、旋转板；4、压紧手柄；5、第一推力轴承；6、第二推力轴承；7、工装托板；8、工装上体；9、圆螺母；10、工装下体；11、第一限位块；12、第二限位块；21、第一挡板；71、定位条；72、支撑条；73、第二挡板；81、卡扣；101、支撑柱；711、定位棱；811、定位槽。
具体实施方式
为了更清楚的阐释本申请的整体构思，下面结合说明书附图以实施例的方式进行详细说明。在下文的描述中，给出了大量具体的细节以便提供对本申请更为彻底的理解。然而，对于本领域技术人员来说显而易见的是，本申请可以无需一个或多个这些细节而得以实施。在其他的例子中，为了避免与本申请发生混淆，对于本领域公知的一些技术特征未进行描述。
本申请提供了一种送料装置，在优选地实施方式中，本送料装置适用于辅助向长晶炉送料，包括但不限于碳化硅单晶炉、单晶硅长晶炉、多晶硅长晶炉等，特别优选辅助向碳化硅单晶炉送料。在其他的实施方式中，所述送料装置还可以用于向设有入料口的普通生产设备送料。
如图1所示，本申请提供的送料装置包括依次连接的支撑单元、旋 转单元和送料单元。
在一种实施方式中，支撑单元包括支撑架2，旋转单元包括旋转板3、工装托板7、定位条71以及支撑条72，送料单元包括装料盘，装料盘包括工装上体8和工装下体10。
在图1‐3所示的实施例中，该送料装置用于辅助向碳化硅单晶炉送料，碳化硅单晶炉通常置于炉体机架1上，支撑架2是与炉体机架1可拆卸连接的固定架，使用时可安装在炉体机架1的腿上，安装高度适中，使得装料时操作方便，装完料后旋转时还不会撞到长晶炉。在其他的实施方式中，支撑架2还可以独立于炉体机架1，直接放置在地面上，用于提供旋转单元和送料单元的支撑力以及用作旋转轴，以使得与旋转单元连接的送料单元以支撑架2为轴转动。
旋转单元具有相对的第一端和第二端，旋转单元的第一端固定与支撑单元转动连接，送料单元可拆卸的连接在所述旋转单元的第二端，旋转单元带动送料单元以支撑单元为轴进行转动，同时，设置在所述旋转单元和支撑单元的限位组件，用以调节所述旋转单元和送料单元的转动的角度。
限位组件至少包括第一限位组件，其中，第一限位组件包括固定在支撑单元的第一挡板21和固定在旋转单元的第一限位块11，第一挡板21与旋转轴平行，且至少部分与旋转单元具有相同高度。旋转单元旋转至目标位置时，第一限位块11与第一挡板21接触则旋转单元停止旋转。
优选地，第一限位块11为包括具有α角的第一弯折边和第二弯折边，第一限位块11的α角开口为旋转轴的反方向，第一限位块11的第一弯折边与旋转板3侧壁可拆卸连接固定。旋转单元旋转至目标位置时，第一限位块11的第二弯折边与第一挡板21接触，则旋转单元停止旋转。
如图5所示，第一限位块11的第一弯折边通过螺钉固定在旋转板3 侧壁，α角为用以限定将送料单元送入目标位置所需的旋转单元与支撑单元之间的夹角，范围优选为60‐70度，在本实施例中为65度。
第一限位组件的设置，使得当送料单元旋转至目标位置时不能再继续向送料方向转动，即送料单元转至设备入料口的位置是固定而精准的。
第一限位块11还包括高度可调节的调节件，调节件垂直穿过第二弯折边，且至少部分位于第二弯折边的非α角开口侧。旋转至目标位置时，第二弯折边的非α角开口侧的调节件与第一挡板接触则旋转单元停止旋转。
在优选的实施方式中，调节件为螺栓，如图5所示，螺栓垂直穿过第二弯折边，且螺栓的头部位于第二弯折边的非α角开口侧，即由第一限位块11的外侧沿螺孔拧进内侧。当旋转单元旋转至螺栓的头部碰到第一挡板21时，送料单元刚好被旋转至目标位置，即炉体下盖的正上方，也是入料口处，而此时旋转单元与支撑架2之间的夹角为α角。调节件的设置可使得在第一限位块11的α角固定的情况下，对旋转单元旋转至目标位置时与支撑单元的夹角进行调整，例如调节螺栓头部伸出第二弯折边外侧的长度，即可实现在α角不变的情况下，当送料单元刚好被旋转至目标位置时，旋转单元与支撑单元的夹角大于α角，因此无需更换第一限位块11，即可使得送料装置适用于入料口位置不同的生产设备。
限位组件还包括第二限位组件，其中，第二限位组件包括固定在旋转单元的第二挡板73和固定在支撑单元的第二限位块12，旋转单元向与目标位置相反方向旋转时，第二限位块12与第二挡板73接触则旋转单元停止旋转。
如图6所示，第二限位块12具有相对的头端和尾端，其中，尾端固定在支撑单元底部，头端沿支撑单元径向延伸至部分露出，第二挡板73沿旋转单元轴向延伸至与第二限位块12具有相同高度。旋转单元向与目 标位置相反方向旋转时，第二限位块12的头端与第二挡板73接触则旋转单元停止旋转。
在优选的实施方式中，与第一限位块11类似，第二限位块12的头端也可以设置高度可调节的调节件，如螺栓，可通过调节螺栓头部伸出的长度，使得在第二限位块12位置固定的情况下，对旋转单元旋转至第二限位块12与第二挡板73接触时与支撑单元的夹角进行调整，无需再拆卸第二限位块12进行位置调整。
例如，第二限位块12为销状零件，具有销头和销杆，其中销杆可拆卸地连接在支撑架2底部，销头沿支撑架2径向延伸并露出。销头与支撑架2平行的方向上设有螺栓，螺栓头位于目标位置侧，当旋转单元旋转至第二挡板73与第二限位块12的螺栓头部接触时，旋转单元停止旋转。
第二限位组件的设置，使得在送料单元被送入目标位置之前，能够旋转至最合适的位置进行装料。在具体的生产实践中，操作人员可以将旋转单元向外旋转至第二限位块12阻挡限位处，站在限位处内侧进行装料，使送料装置无法继续向外或向内转动，提高了装料效率和精准度。
在另一种优选实施方式中，第二限位块12设置为行程开关，除了具有上述限位作用外，还可以通过送料装置的碰撞使其触头动作来实现接通或分断控制电路，达到一定的控制目的。优选地，行程开关可以用于接通或分断控制设备入料口打开或闭合的电路。
例如，行程开关可以用来实现接通或分断控制碳化硅长晶炉的炉体下盖升降的电路，即当旋转单元旋转至第二限位块12的位置时，由于接近或触碰到行程开关，此时控制电路接通，长晶炉的炉体下盖打开并下降至低于送料装置高度的位置，此时再将送料单元送至炉体下盖上方的目标位置，然后操作长晶炉控制炉体下盖上升，如此设置可以避免因送 料装置与炉体下盖的高度相同造成碰撞。
旋转单元包括旋转板3、工装托板7、定位条71以及支撑条72。其中，旋转板3一端与支撑架2转动连接，另一端置于工装托板7上方，并与工装托板7可拆卸连接。优选地，旋转板3与支撑架2通过压紧手柄4和一对推力轴承轴连接，并与工装托板7螺纹连接。旋转板3的设置，可以对工装托板7起到加固作用，增大旋转单元对送料单元的承载力。
如图4所示，旋转板3与支撑架2的连接结构由压紧手柄4依次连接第一推力轴承5、第二推力轴承6以及圆螺母9组成，以实现旋转单元可以以支撑架2为轴旋转，相应地，为了装配上述轴连接结构，旋转板3与支撑架2的连接位置设有可装配相应连接结构部件的孔或槽。可选地，为了方便旋转单元的旋转操作，旋转板3上方还可以设有凸起的细条状的推板，方便人工手持进行推拉旋转操作。
其中，工装托板7设置于旋转板3的下方，并部分与旋转板3螺纹连接。沿工装托板7横向延伸设有定位条71，且定位条71过工装上体8的圆心。在定位条71的两侧分别还设有一个支撑条72，用于支撑放置送料单元。优选地，支撑条72至少有两个，且平均分布于定位条71的两侧，更优选地，支撑条72和定位条71是具有一定厚度的弧形条状，有利于增大支撑条72和定位条71的受力面积，当送料单元上装有物料时，可以使受力分散。
送料单元包括装料盘，其中装料盘包括圆形的工装上体8和工装下体10，工装下体10的边缘分布有4个支撑柱101，每个支撑柱101内部设有螺纹槽，工装上体8在与4个支撑柱101对应的位置设有螺纹孔，可以通过螺钉或螺栓将工装上体8与工装下体10可拆卸地连接起来。其中，可拆卸连接方式包括但不限于卡扣连接、螺纹连接、销连接、键连 接、滑动连接等，优选卡扣连接。
如图7所示，在上述送料装置中，送料单元与旋转单元通过卡扣连接。优选地，是工装上体8与定位条71通过卡扣连接。
优选的，工装上体8与定位条71的接触面设有卡扣81，定位条71内凹形成定位棱711，定位棱711与卡扣81的位置对应且与卡扣81的开口宽度相等，当工装上体8置于支撑条72上方时，卡扣81与定位棱711配合固定。
在一种实施方式中，卡扣81和定位棱711的数目和位置是可以调整的。当定位条仅有一个时，定位条部分内凹可以形成一个定位棱711，此时可以设置配合固定定位棱711两端位置的两个卡扣81，也可以设置固定定位棱711任意位置的多个卡扣81；定位条部分内凹也可以形成多个定位棱711，此时可以为每个定位棱711设置一个卡扣81，也可以设置配合部分定位棱711固定的卡扣81。如此设置可以对送料单元在支撑条上的固定位置进行调整，以使得送料装置适用于辅助为不同规格的长晶炉送料。
在定位工装上体8在定位条71的位置时，判断定位成功的标准是，当定位槽811刚好与其配合对应的定位棱711卡合时，视为定位成功。如图7所示，定位棱711包括纵横交叉的两条棱，由两条棱的交点向外延伸形成四条支棱，相应地，工装上体8与定位条71的接触面设有与四条支棱位置对应的四个卡扣81，每个卡扣81的内表面构成定位槽811，其中定位槽811的开口宽度与定位棱711的支棱宽度相等，以使得卡扣81可以卡在其对应的支棱上。当工装上体8移动到每个支棱与其对应的定位槽811刚好配合卡住时，即可认为定位完成。其中，由于定位棱711的两条棱是纵横交叉的，当卡扣81卡合在其对应的支棱上时，工装上体8在定位条71上的位置更加稳定，装料时工装上体8不会左右晃动。
在一种实施方式中，定位条可以是支撑条中的任意一个，也可以是支撑条中的任意几个共同起定位作用；定位条可以为支撑装料盘中心位置的支撑条，或者支撑装料盘的任意边缘部位的支撑条。在另一种实施方式中，卡扣连接结构的数目和位置均可以调整，使得装料盘与支撑条连接后不会发生晃动即可。如此设置有利于将装料盘固定在支撑条上装料，当盛有物料的送料单元被旋转送入长晶炉的目标位置时，送料单元可以顺利脱离支撑条，连同物料一起进入炉体内部。
可选的，定位条71过工装上体8的圆心，若干个卡扣81沿工装上体8的直径设置，相应地，定位棱711也设为直线型。
可选的，工装上体8的中心设有通孔，用于观察定位槽811与定位棱711的相对位置。
通过支撑柱101连接的工装下体10与工装上体8内部中空，用以放置定位条71。在一种实施方式中，将工装上体8通过上述卡扣连接配合定位放置于定位条71上方后，再将工装下体10与工装上体8连接；在另一种实施方式中，可先将工装下体10通过支撑柱101与工装上体8螺纹连接后，再将定位条71插入工装上体8与工装下体10的内部，直至卡扣结构卡合以成功定位。
送料单元与旋转单元通过卡扣连接，一是为了保证用于装料的工装上体8在定位条71上的位置固定，向工装上体8装料时避免工装上体8的晃动，有利于提高的物料排列精度和同心度，二是为了配合第一限位块11，使得送料单元旋转至目标位置的位置更加精确。
上述送料装置的优选使用方法如下：
将支撑架2安装在炉体机架1的腿上，再将定位条71和支撑条72插入已连接成一个整体的工装上体8和工装下体10的内部，直至工装上体8上方的卡扣81与其对应的定位棱711卡合无法继续移动。此时，定 位条71支撑工装上体8的中心，支撑条72支撑工装上体8的边缘。
将送料装置向炉体机架1外部旋转至为行程开关的第二限位块12阻挡处，行程开关控制将长晶炉的炉体下盖下降至低于送料装置高度的位置。再站在送料装置的送料方向侧，将物料按一定顺序整齐的排列在工装上体8上，由于第二限位块12还具有限位作用，装料时旋转单元位置固定不会晃动。
排好物料后，可站在非送料方向侧，推动旋转板3上的第二挡板，将旋转单元向炉体机架1内部旋转，直至第一限位块11阻挡处，无法再继续向内旋转，此时送料单元刚好位于炉体下盖的正上方。操作长晶炉的控制系统以升高炉体下盖，直至升至拖动工装下体10，使得工装上体8与工装托板7刚好脱离，即可将工装托板7向炉体机架1外部旋出。此时装有物料的送料单元已置于炉体下盖上，继续升高炉体下盖直至进入炉体内部，到达炉体内的指定位置即可。
通过实践可得，使用本申请提供的送料装置向碳化硅单晶炉送料，相比于现有的人工直接向碳化硅单晶炉内部装料，效率大大提高，如同样装6千克的碳化硅原料，采用本送料装置的送料时间节省了1‐1.5小时，同时外部装料提高了物料的位置精度和进入炉体内的同心度，有利于制备出更高产率和质量的碳化硅晶体。
以上所述仅为本申请的实施例而已，并不用于限制本申请。对于本领域技术人员来说，本申请可以有各种更改和变化。凡在本申请的精神和原理之内所作的任何修改、等同替换、改进等，均应包含在本申请的权利要求范围之内。

Claims (20)

  1. 一种送料装置，其特征在于，包括依次连接的支撑单元、旋转单元和送料单元，所述支撑单元与旋转单元转动连接，所述送料单元与旋转单元可拆卸的连接，
    所述支撑单元、旋转单元和送料单元如此配置以使旋转单元带动送料单元以支撑单元为轴进行转动；
    所述送料装置还包括限位组件，所述限位组件与旋转单元和支撑单元如此设置以调节旋转单元转动的角度。
  2. 根据权利要求1所述的送料装置，其特征在于，所述限位组件至少包括第一限位组件，所述第一限位组件包括第一挡板和第一限位块，第一限位块和第一挡板配合使用以调整旋转单元旋转的角度，限定将送料单元旋转至目标位置所需的旋转单元与支撑单元之间的夹角。
  3. 根据权利要求2所述的送料装置，其特征在于，所述第一限位组件还包括第一调节件，所述第一调节件与第一限位块和第一挡板配合使用，以调整旋转单元旋转的角度。
  4. 根据权利要求1所述的送料装置，其特征在于，所述限位组件还包括第二限位组件，所述第二限位组件包括第二挡板和第二限位块，第二限位块和第二挡板配合使用以调整旋转单元旋转的角度，限定将送料单元送入目标位置之前所需的旋转单元与支撑单元之间的最大夹角。
  5. 根据权利要求4所述的送料装置，其特征在于，所述第二限位组件还包括第二调节件，所述第二调节件与第一限位块和第一挡板配合使用，以调整旋转单元旋转的角度。
  6. 根据权利要求3或5所述的送料装置，其特征在于，所述第一和 /或第二调节件为可伸缩结构，优选地，所述第二调节件为螺钉。
  7. 根据权利要求4所述的送料装置，其特征在于，所述第二限位块为行程开关，所述行程开关与第二挡板配合限位时，控制打开入料口。
  8. 根据权利要求1‐7任一所述的送料装置，其特征在于，所述送料单元与所述旋转单元通过卡扣连接。
  9. 根据权利要求8所述的送料装置，其特征在于，所述旋转单元包括工装托板，沿所述工装托板横向延伸设有支撑条，所述送料单元包括置于所述支撑条上方的装料盘，所述装料盘与支撑条通过卡扣连接。
  10. 根据权利要求9所述的送料装置，其特征在于，所述装料盘与支撑条的接触面设有卡扣，所述支撑条包括定位条，所述定位条内凹形成定位棱，所述定位棱与所述卡扣的位置对应且与卡扣的开口宽度相等，当装料盘置于支撑条上方时，装料盘的卡扣与定位条的定位棱配合固定。
  11. 一种送料装置，其特征在于，包括依次连接的支撑架(2)、旋转单元和装料盘，所述旋转单元的一端与支撑架(2)转动连接，另一端与装料盘可拆卸连接，以使旋转单元带动装料盘以支撑架(2)为轴进行转动；
    沿旋转单元径向延伸还设有至少一个支撑条，所述装料盘置于支撑条上方，与支撑条可拆卸连接。
  12. 根据权利要求11所述的装置，其特征在于，所述支撑条包括至少一个定位条(71)，所述装料盘与定位条(71)卡扣连接。
  13. 根据权利要求12所述的装置，其特征在于，所述装料盘与定位条(71)的接触面设有至少一个卡扣(81)，所述定位条(71)部分内凹形成定位棱(711)，所述定位棱(711)与所述卡扣(81)的位置对应，且宽度与卡扣(81)的开口宽度相等，当装料盘置于定位条(71)上方时，所述卡扣(81)与所述定位棱(711)配合固定。
  14. 根据权利要求13所述的装置，其特征在于，所述定位棱(711)包括至少两个纵横交叉的支棱，所述卡扣(81)与所述支棱配合固定。
  15. 根据权利要求12‐14任一所述的装置，其特征在于，所述定位条(71)经过装料盘中心和/或靠近装料盘边缘。
  16. 根据权利要求11所述的装置，其特征在于，所述支撑条为弧形。
  17. 根据权利要求11所述的装置，其特征在于，所述装料盘包括工装上体(8)和工装下体(10)，所述工装下体(10)设有支撑柱(101)，所述工装上体(8)通过支撑柱(101)与工装下体(10)螺纹连接。
  18. 根据权利要求11所述的装置，其特征在于，所述旋转单元包括旋转板(3)和工装托板(7)，所述旋转板(3)与支撑架(2)转动连接，所述工装托板(7)的一端与旋转板(3)可拆卸连接，另一端沿径向延伸设有支撑条。
  19. 根据权利要求11‐18任一所述的装置，其特征在于，所述装置还包括限位组件，所述限位组件至少包括一个挡板和一个限位块，所述挡板和限位块配合使用以调整旋转板旋转的角度。
  20. 根据权利要求19所述的装置，其特征在于，所述限位组件还包括与限位块可拆卸连接的调节件，所述调节件与限位块和挡板配合使用，以调整旋转板旋转的角度；优选，所述调节件为可伸缩结构，更优选，所述调节件为螺钉。
PCT/CN2018/123722 2018-12-14 2018-12-26 一种送料装置 WO2020118772A1 (zh)

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CN201027104Y (zh) * 2007-04-10 2008-02-27 亚龙科技集团有限公司 一种螺旋提升送料装置
KR20110038250A (ko) * 2009-10-08 2011-04-14 웅진에너지 주식회사 잉곳 블럭의 자동 이송 장치 및 이를 이용한 잉곳 블럭의 자동 이송 방법
CN107805771A (zh) * 2017-12-06 2018-03-16 馆陶县鑫江电热设备有限公司 用于热浸镀设备的自动上料装置及热浸镀设备
CN207581890U (zh) * 2017-12-06 2018-07-06 馆陶县鑫江电热设备有限公司 用于热浸镀设备的自动上料装置及热浸镀设备
CN108910448A (zh) * 2018-08-06 2018-11-30 南京环务资源再生科技有限公司 一种可以调节角度的上料输送带

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EP0278516A2 (de) * 1987-02-13 1988-08-17 Leybold Aktiengesellschaft Einlegegerät für Vakuumanlagen
CN201027104Y (zh) * 2007-04-10 2008-02-27 亚龙科技集团有限公司 一种螺旋提升送料装置
KR20110038250A (ko) * 2009-10-08 2011-04-14 웅진에너지 주식회사 잉곳 블럭의 자동 이송 장치 및 이를 이용한 잉곳 블럭의 자동 이송 방법
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