WO2020118499A1 - Optical sensor and forming method therefor - Google Patents

Optical sensor and forming method therefor Download PDF

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Publication number
WO2020118499A1
WO2020118499A1 PCT/CN2018/120168 CN2018120168W WO2020118499A1 WO 2020118499 A1 WO2020118499 A1 WO 2020118499A1 CN 2018120168 W CN2018120168 W CN 2018120168W WO 2020118499 A1 WO2020118499 A1 WO 2020118499A1
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WIPO (PCT)
Prior art keywords
binding
pin
pins
bonding
pseudo
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PCT/CN2018/120168
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French (fr)
Chinese (zh)
Inventor
凌严
朱虹
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上海箩箕技术有限公司
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Priority to PCT/CN2018/120168 priority Critical patent/WO2020118499A1/en
Publication of WO2020118499A1 publication Critical patent/WO2020118499A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light

Definitions

  • the invention relates to the field of sensors, in particular to an optical sensor and a method of forming the same.
  • the optical sensor is a large-area planar imaging device, which is composed of a pixel cell array, drive lines, signal readout lines, and the like.
  • the optical signal with image information is directly projected to each pixel unit of the imaging surface of the sensor, which is absorbed and imaged by the pixel unit of the sensor. Since the light is not focused through the lens or fiber, it is the same size, without scaling, so it will have better imaging quality; at the same time, the imaging device is also thinner and lighter, so it has been widely used in various fields.
  • optical sensors used in fingerprint imaging, document scanning and other fields.
  • Each pixel unit is composed of a switching device and a photoelectric device. Visible light is converted into electronic signals by photoelectric devices in each pixel unit of the optical sensor and stored.
  • the system controller controls the driving chip on the driving unit to control the driving line on the optical sensor, and then controls the row-by-row opening of the pixel unit array; at the same time, the system controller controls the signal reading unit on the signal acquisition unit to pass through the optical sensor
  • the signal line reads the electronic signal of the row that is turned on in the pixel cell array, and then performs amplification, analog-to-digital conversion, and storage. Finally, a digital grayscale image directly related to the surface characteristics of the illuminated object is realized.
  • the problem solved by the present invention is to provide an optical sensor and a forming method thereof to improve the performance of the optical sensor.
  • the present invention provides an optical sensor, including: a substrate; a fingerprint sensing circuit layer on the substrate, the fingerprint sensing circuit layer including a pixel area and a first binding area located on the side of the pixel area;
  • the pixel area of the fingerprint sensing circuit layer includes: a plurality of columns of photosensitive pixel units; one or more columns of non-photosensitive pixel units, the non-photosensitive pixel units are located on the sides of the plurality of columns of photosensitive pixel units;
  • the first binding area of the fingerprint sensing circuit layer includes: a plurality of first binding pins, the first binding pins are respectively Connected to the first data line; the second binding pin located on the side of the plurality of first binding pins, and the second binding pin is connected to the second data line; located at the plurality of first binding pins And a first pseudo-binding pin between the second binding pin; an anisotropic conductive layer on the first binding area
  • the conductivity of the anisotropic conductive layer perpendicular to the surface of the first binding area is greater than that parallel to the surface of the first binding area.
  • first binding pin and the second binding pin are parallel and parallel to the first pseudo binding pin.
  • the line width of the first bonding pin is equal to the line width of the second bonding pin and equal to the line width of the first pseudo bonding pin.
  • the spacing between the adjacent first binding pin and the first pseudo-binding pin, the spacing between the adjacent second binding pin and the first pseudo-binding pin, and any The spacing between adjacent first bonding pins is equal.
  • the number of second binding pins is multiple, and the second binding pins are respectively connected to the second data lines;
  • the spacing between any adjacent first bonding pins is equal to the spacing between any adjacent second bonding pins.
  • the number of the first pseudo binding pins is multiple.
  • the spacing between the adjacent first binding pins and the first pseudo-binding pins is equal to the spacing between any adjacent first binding pins.
  • the first pseudo-bonded pins are arranged at equal intervals; the distance between any adjacent first pseudo-bonded pins is 10 ⁇ m to 400 ⁇ m.
  • the number of first pseudo binding pins is greater than or equal to 5.
  • the number of the first pseudo binding pins is one.
  • the non-photosensitive pixel units are located on both sides of the columns of photosensitive pixels; the second binding pins are located on both sides of the first binding pins; There is a first pseudo binding pin between the second binding pin on one side of the binding pin and the plurality of first binding pins, and the second on the other side of the first binding pins There is a first pseudo-binding pin between the binding pin and the plurality of first binding pins.
  • the method further includes: a signal readout flexible circuit, the signal readout flexible circuit includes a second binding area, the second binding area is opposite to the first binding area, and the anisotropic conductive layer Located between the first binding area and the second binding area; the second binding area includes: a plurality of third binding pins, the third binding pins are opposite to the first binding pins, each third The binding pins and the first binding pins are electrically connected in one-to-one correspondence with the anisotropic conductive layer; the fourth binding pin located on the side of the plurality of third binding pins, the fourth binding pin The foot is opposite to the second binding pin, and the fourth binding pin is electrically connected to the second binding pin through an anisotropic conductive layer; it is located between the third binding pins and the fourth binding pin The second pseudo-binding pin between the pins is opposite to the first pseudo-binding pin.
  • the invention also provides a method for forming an optical sensor according to any one of the above, comprising: providing a substrate; forming a fingerprint sensing circuit layer on the substrate, the fingerprint sensing circuit layer including a pixel area and a third portion located on the side of the pixel area A binding area;
  • the pixel area of the fingerprint sensing circuit layer includes: a plurality of columns of photosensitive pixel units; one or more rows of non-photosensitive pixel units, the non-photosensitive pixel units are located on the sides of the plurality of rows of photosensitive pixel units; and each A first data line connected to each column of photosensitive pixel units; a second data line connected to each column of non-photosensitive pixel units;
  • the first binding area of the fingerprint sensing circuit layer includes: a plurality of first binding pins, The first binding pins are respectively connected to the first data line; the second binding pins located at the side of the plurality of first binding pins, and the second binding pins are connected to the second data line; located at the A first pseudo-bind
  • the method further includes: providing a signal readout flexible circuit, the signal readout flexible circuit includes a second binding area, and the second binding area includes: a plurality of third binding pins located on the plurality of The fourth binding pin on the side of the three binding pins; the second pseudo binding pin between the third binding pins and the fourth binding pin; the signal is read out flexibly
  • the circuit is bonded to the anisotropic conductive layer, the anisotropic conductive layer is located between the first binding area and the second binding area, and the second binding area is opposite to the first binding area ,
  • the third binding pin is opposite to the first binding pin, the fourth binding pin is opposite to the second binding pin, and the second pseudo binding pin is opposite to the first pseudo binding pin.
  • the three binding pins and the first binding pins are electrically connected to each other through an anisotropic conductive layer, and the fourth binding pin is electrically connected to the second binding pins through an anisotropic conductive layer.
  • a first pseudo binding pin is provided between the plurality of first binding pins and the second binding pin, so that the first binding pin and the second binding pin The distance between the fixed pins increases.
  • the first pseudo binding pin is not electrically connected. Even when strong light is irradiated to the photosensitive pixel unit and the signal value output by the first data line is large, since the distance between the first bonding pin and the second bonding pin increases, they are adjacent The electric field between the first data line and the second data line is not too great.
  • the signal of the first data line is prevented from leaking to the second data line through the anisotropic conductive layer, then the signal actually output by the second data line is the background signal value, and the signal of the second data line can be used to reduce electronic noise.
  • the performance of the optical sensor is improved.
  • the distance between the first and second bonding pins is increased by setting the placement of the first pseudo-bonding pins, so that the density of the bonding pins is kept consistent and the anisotropic conductive layer is made
  • the force is uniform everywhere, which is conducive to the pressing effect of the anisotropic conductive layer and the first binding area, and improves the bonding of the anisotropic conductive layer and the first binding area Performance and conductive effect.
  • Figure 1 is a schematic structural view of an optical sensor
  • Figure 2 is a top view of Figure 1;
  • 3 to 7 are schematic structural diagrams of an optical sensor formation process in an embodiment of the invention.
  • An optical sensor includes: a substrate 100; a fingerprint sensing circuit layer 110 on the substrate 100.
  • the fingerprint sensing circuit layer 110 includes a pixel zone Z1 and a binding zone Z2;
  • the pixel zone Z1 includes : Several columns of photosensitive pixel units 110a; one or more columns of non-photosensitive pixel units 110b, the non-photosensitive pixel units 110b are located at the sides of the several columns of photosensitive pixel units 110a; a first data line 1101 connected to each column of photosensitive pixel units 110a ;
  • the binding zone Z2 includes: a number of first binding pins (not shown), the first binding pins are respectively connected to the first data line 1101 ;
  • a second binding pin located on the side of several first binding pins, the second binding pin is connected to the second data line 1102; an anisotropy located on the first binding zone Z2 Conductive layer 120; the signal readout flexible
  • the only difference between the non-photosensitive pixel unit 110b and the photosensitive pixel unit 110a is that the non-photosensitive pixel unit 110b is not photosensitive, and the photosensitive pixel unit 110a is photosensitive.
  • the second data line 1102 is connected to the non-photosensitive pixel unit 110b. Since the non-photosensitive pixel unit 110b is not photosensitive, the output value of the second data line 1102 is maintained at a background signal value at any time. During image acquisition, power fluctuations or external electromagnetic waves interfere with the optical sensor, and the generated electronic noise will be included in this background signal value, and the interference of the non-photosensitive pixel unit 110b and the photosensitive pixel unit 110a is synchronized The size is basically the same. Therefore, when no light is incident on the optical sensor, the signal value output by the first data line 1101 and the signal value output by the second data line 1102 are substantially the same.
  • the second data line 1102 When light is irradiated to the photosensitive pixel unit 110a, the second data line 1102 is used to collect real-time electronic noise of the optical sensor, and the signal value output by each first data line 1101 minus part or all of the second data line 1102 outputs a background signal
  • the average value of the values can eliminate most of the electronic noise of the image and improve the image effect.
  • the anisotropic conductive layer 120 bonds the signal readout flexible circuit 130 to the binding zone Z2 of the fingerprint sensing circuit layer 110.
  • the anisotropic conductive layer 120 is also used for conducting electricity in a direction perpendicular to the surface of the substrate 100, and for electrical insulation in a direction parallel to the surface of the substrate 100.
  • the conductivity of the anisotropic conductive layer 120 perpendicular to the surface of the bonding zone Z2 is ⁇ 30 ohms/bonded pin area, that is, the longitudinal on-resistance of the anisotropic conductive layer 120 on each bonded pin ⁇ 30 ohms; the conductivity of the anisotropic conductive layer 120 parallel to the surface of the bonding zone Z2 is >10 8 ohms/the distance between adjacent bonding pins, that is, the anisotropic conduction between any adjacent bonding pins
  • the lateral on-resistance of layer 120 is >10 8 ohms.
  • anisotropic conductive layer 120 in a direction parallel to the surface of the substrate 100 is not an absolute insulator, anisotropic conductive layer 120 in a direction parallel to the surface of the substrate 100 has certain conductivity (typically above 108 Ohms) .
  • the spacing between the first and second bonding pins in the bonding zone Z2, the line width of the first bonding pin, and the line width of the second bonding pin are smaller ( Generally less than 100um), so that the area of the binding zone Z2 is small, improving the integration of the optical sensor.
  • the signal value output by the second data line 1102 is larger, and the potential of the second data line 1102 is significantly different from the potential of the first data line 1101.
  • the electric field between the adjacent first data line 1101 and the second data line 1102 is relatively strong. Therefore, the signal of the adjacent first data line 1101 will leak to the second data line 1102 through the anisotropic conductive layer 120, which causes the signal actually output by the second data line 1102 to become larger. At this time, the actual output of the second data line 1102 The signal will include signals other than the background signal value, so the signal of the second data line 1102 cannot be used to reduce electronic noise in real time.
  • the present invention provides an optical sensor, including: a substrate; a fingerprint sensing circuit layer on the substrate, the fingerprint sensing circuit layer includes a pixel area and a first binding area; the pixel area includes: a plurality of columns of photosensitive pixels Unit; one or more columns of non-photosensitive pixel units, the non-photosensitive pixel units are located on the sides of the plurality of columns of photosensitive pixel units; the first data lines respectively connected to each column of photosensitive pixel units; respectively connected to each column of non-photosensitive pixel units
  • the second binding line; the first binding area includes: a number of first binding pins, the first binding pins are respectively connected to the first data line; the second binding is located on the side of the number of first binding pins Pin, the second binding pin is connected to the second data line; the first pseudo binding pin is located between several first binding pins and the second binding pin; the one located on the first binding area Anisotropic conductive layer. The performance of the optical sensor is improved.
  • 3 to 6 are structural schematic diagrams of a semiconductor device forming process in an embodiment of the invention.
  • FIG. 4 is a top view of FIG. 3, and a substrate 200 is provided.
  • the substrate 200 is a transparent substrate.
  • the transparent substrate includes a glass substrate or a plastic substrate, and the plastic substrate includes a PI or PET substrate.
  • a fingerprint sensing circuit layer 210 is formed on the substrate 200.
  • the fingerprint sensing circuit layer 210 includes a pixel area A and a first binding area B located on the side of the pixel area A;
  • the pixel area A of the measurement circuit layer 210 includes: a plurality of columns of photosensitive pixel units a1; one or more columns of non-photosensitive pixel units a2, and the non-photosensitive pixel units a2 are located at the sides of the plurality of columns of photosensitive pixel units a1;
  • the first binding area B of the fingerprint sensing circuit layer 210 includes: a plurality of first bindings
  • the pin 2201 and the first binding pin 2201 are respectively connected to the first data line 2101; the second binding pin 2202 located on the side of the first binding pins 2201 and the second binding pin 2202 are The second data line 2102 is connected;
  • the photosensitive pixel unit a1 includes: a photosensitive device and a first switching device.
  • the first switching device includes at least one transistor.
  • the photosensitive device includes a photodiode.
  • the non-photosensitive pixel unit a2 and the photosensitive pixel unit a1 are formed in a set of processes.
  • the non-photosensitive pixel unit a2 includes: a non-photosensitive device and a second switching device.
  • the second switching device includes at least one transistor.
  • the non-photosensitive device includes a photodiode covered with a light blocking layer, the light blocking layer is used to block light from irradiating the non-photosensitive device, and the material of the light blocking layer includes metal and black organic matter.
  • the column direction of the photosensitive pixel units a1 in each column is parallel to the column direction of the non-photosensitive pixel units a2 in each column.
  • the plurality of photosensitive pixel units a1 form a photosensitive pixel unit array of N rows*M columns, N is an integer greater than or equal to 1, and M is an integer greater than or equal to 1.
  • the pixel area A of the fingerprint sensing circuit layer 210 further includes: a plurality of rows of driving lines, which are respectively connected to the photosensitive pixel units a1 of each row, specifically, the driving lines of the i-th row are respectively connected to the photosensitive pixels of the i-th row Unit a1 is connected.
  • the driving lines of several rows are used to turn on the photosensitive pixel unit a1 row by row, i is an integer greater than or equal to 1 and less than or equal to N.
  • the pixel area A of the fingerprint sensing circuit layer 210 includes M columns of first data lines 2101, and the jth column of first data lines 2101 is respectively connected to the jth column of photosensitive pixel unit a1.
  • the first data line 2101 in the jth column is used to read out the output signal of the photosensitive pixel unit a1 in the jth column.
  • the non-photosensitive pixel units a2 are respectively located on both sides of the columns of photosensitive pixel units a1. Specifically, one side of the plurality of columns of photosensitive pixel units a1 has N rows*Q columns of non-photosensitive pixel units a2, and the other side of the plurality of columns of photosensitive pixel units a1 has N rows*W columns of non-photosensitive pixel units a2. In other embodiments, the non-photosensitive pixel unit a2 is only located on one side of the columns of photosensitive pixel units a1.
  • the drive lines are also connected to the non-photosensitive pixel units a2 of each row, specifically, the drive line of the i-th row is connected to the non-photosensitive pixel unit a2 of the i-th row, respectively.
  • the driving line is also used to turn on the non-photosensitive pixel unit a2.
  • the pixel area A of the fingerprint sensing circuit layer 210 includes one or more columns of second data lines 2102.
  • the number of columns of the second data line 2102 is equal to the number of columns of the non-photosensitive pixel unit a2.
  • a row of second data lines 2102 are respectively connected to a row of non-photosensitive pixel units a2.
  • the second data line 2102 is used to read out the output signal of the non-photosensitive pixel unit a2.
  • the second binding pins 2202 are located on both sides of the first binding pins 2201, respectively.
  • the number of the second binding pins 2202 is multiple or one.
  • the first pseudo binding pin 2203 and the first data line 2101 are not connected, the first pseudo binding pin 2203 and the first data line 2101 are electrically disconnected, and the first pseudo binding pin 2203 and the second data line 2102 If not connected, the first pseudo binding pin 2203 and the second data line 2102 are electrically disconnected.
  • the number of the first pseudo binding pins 2203 is multiple.
  • the number of the first pseudo binding pins 2203 is multiple.
  • the number of the first pseudo binding pins 2203 is one, and for the plurality of first bindings The first pseudo-bonded pin 2203 on the other side of the pin 2201, and the number of the first pseudo-bonded pin 2203 is one.
  • the first binding pin 2201 and the second binding pin 2202 are parallel and parallel to the first pseudo binding pin 2203.
  • the line width of the first bonding pin 2201 is equal to the line width of the second bonding pin 2202 and equal to the line width of the first pseudo bonding pin 2203.
  • the spacing between the adjacent first binding pins 2201 and the first pseudo binding pins 2203, the spacing between any adjacent first binding pins 2201, and any adjacent The spacing between the two binding pins 2202, the spacing between the adjacent first binding pins 2201 and the first pseudo binding pins 2203, the adjacent second binding pins 2202 and the first pseudo binding
  • the spacing between the fixed pins 2203 and the spacing between any adjacent first pseudo-bonded pins 2203 are equal.
  • the distance between the adjacent first bonding pin 2201 and the first pseudo bonding pin 2203 is 10 ⁇ m to 400 ⁇ m; the adjacent second bonding pin 2202 and the second The distance between a pseudo-binding pin 2203 is 10 microns to 400 microns.
  • the first pseudo binding pins 2203 are arranged at equal intervals, and the distance between any adjacent first pseudo binding pins 2203 is 10 ⁇ m to 400 ⁇ m.
  • the number of first pseudo binding pins 2203 is greater than or equal to 5.
  • the advantage is that when the distance between the adjacent first pseudo binding pin 2203 and the first binding pin 2201 (less than 50um), and the adjacent first pseudo binding pin 2203 and the second binding lead
  • the spacing between the feet 2202 (less than 50um) and the spacing between the adjacent first pseudo-bonding pins 2203 (less than 50um) are relatively small, and are increased by setting at least five first pseudo-bonding pins 2203
  • the larger effective insulation distance between the first bonding pin 2201 and the second bonding pin 2202 makes the leakage of the first bonding pin 2201 and the second bonding pin 2202 effectively reduced.
  • the distance between the first binding pin 2201 and the second binding pin 2202 is increased by setting the placement of the first pseudo binding pin 2203, so that the density of the binding pins remains consistent, Make the anisotropic conductive layer and the first binding area pressed uniformly at all places, avoiding between the anisotropic conductive layer and the first binding pin 2201, the anisotropic conductive layer and the second binding Air bubbles appear between the pins 2202, thereby facilitating the pressing effect of the anisotropic conductive layer and the first binding area, and improving the adhesion performance and the conductive effect of the anisotropic conductive layer and the first binding area.
  • FIG. 6 is a top view of FIG. 5, FIG. 5 is a schematic diagram based on FIG. 3, and FIG. 6 is a schematic diagram based on FIG. 4, the first binding on the fingerprint sensing circuit layer 210 An anisotropic conductive layer 300 is formed on the area B.
  • the conductivity of the anisotropic conductive layer 300 perpendicular to the surface of the first binding region 2201 is greater than that parallel to the surface of the first binding region 2201.
  • the signal readout flexible circuit 400 includes a second binding area C, and the second binding area C includes: a number of third binding pins 4011 , A fourth binding pin 4012 located on the side of the third binding pins 4011; a second pseudo located between the third binding pins 4011 and the fourth binding pin 4012 Binding pin 4013; the signal reading flexible circuit 400 is bonded to the anisotropic conductive layer 300, the anisotropic conductive layer 300 is located between the first binding area B and the second binding area C
  • the second binding area C is opposite to the first binding area B
  • the third binding pin 4011 is opposite to the first binding pin 2201
  • the fourth binding pin 4012 is opposite to the second binding pin 2202 is opposite
  • the second pseudo binding pin 4013 and the first pseudo binding pin 2203 are opposite
  • each third binding pin 4011 and each first binding pin 2201 correspond to one to one through the anisotropic conductive layer 300
  • a signal reading chip is bound to the signal reading flexible circuit 400, that is, the signal reading chip and the signal reading flexible circuit 400 are bound together.
  • each second pseudo binding pin 4013 is electrically disconnected from the signal readout chip.
  • each second pseudo-bond pin 4013 is electrically connected to the signal readout chip respectively, so that the potential of the second pseudo-bond pin 4013 can be kept stable at all times. Image interference.
  • the second pseudo-binding pins 4013 are all floating, external interference factors will be coupled to the second pseudo-binding pins 4013 or the first pseudo-binding pins through the second pseudo-binding pins 4013, thereby generating an image interference.
  • this embodiment also provides an optical sensor.
  • the fingerprint sensing circuit layer 210 includes a pixel area A and The first binding area B adjacent to the pixel area A; the pixel area A of the fingerprint sensing circuit layer 210 includes: a plurality of columns of photosensitive pixel units a1; one or more columns of non-photosensitive pixel units a2, and the non-photosensitive pixel units a2 are located Side portions of the plurality of columns of photosensitive pixel units a1; a first data line 2101 connected to each column of photosensitive pixel units a1; a second data line 2102 connected to each column of non-photosensitive pixel units a2; the fingerprint sensing circuit layer
  • the first binding area B of 210 includes: a plurality of first binding pins 2201, the first binding pins 2201 are respectively connected to the first data line 2101; Two binding pins 2202, the second binding pin 2
  • the conductivity of the anisotropic conductive layer 300 perpendicular to the surface of the first bonding area B is greater than that parallel to the surface of the first bonding area B.
  • the second binding pins 2202 are located on both sides of the first binding pins 2201, respectively.
  • the number of the first pseudo binding pins 2203 is multiple.
  • the number of the first pseudo binding pins 2203 is multiple.
  • the number of the first pseudo binding pins 2203 is one, and for the plurality of first bindings The first pseudo-bonded pin 2203 on the other side of the pin 2201, and the number of the first pseudo-bonded pin 2203 is one.
  • the first binding pin 2201 and the second binding pin 2202 are parallel and parallel to the first pseudo binding pin 2203.
  • the line width of the first bonding pin 2201 is equal to the line width of the second bonding pin 2202 and equal to the line width of the first pseudo bonding pin 2203.
  • the spacing between the adjacent first binding pins 2201 and the first pseudo binding pins 2203, the spacing between any adjacent first binding pins 2201, the adjacent first The spacing between the binding pin 2201 and the first pseudo binding pin 2203, the spacing between the adjacent second binding pin 2202 and the first pseudo binding pin 2203, and any adjacent first The spacing between the pseudo-binding pins 2203 is equal.
  • the distance between the adjacent first bonding pin 2201 and the first pseudo bonding pin 2203 is 10 ⁇ m to 400 ⁇ m; the adjacent second bonding pin 2202 and the second The distance between a pseudo-binding pin 2203 is 10 microns to 400 microns.
  • the first pseudo binding pins 2203 are arranged at equal intervals, and the distance between any adjacent first pseudo binding pins 2203 is 10 ⁇ m to 400 ⁇ m.
  • the number of first pseudo binding pins 2203 is greater than or equal to 5.
  • the optical sensor further includes a signal readout flexible circuit 400, the signal readout flexible circuit 400 includes a second binding area C, the second binding area C is opposite to the first binding area B, and the The anisotropic conductive layer 300 is located between the first binding region B and the second binding region C.
  • the second binding area C includes: a plurality of third binding pins 4011, the third binding pins 4011 are opposite to the first binding pins 2201, and each third binding pin 4011 is bound to each first binding pin
  • the pins 2201 are electrically connected one-to-one through the anisotropic conductive layer 300; the fourth bonding pin 4012 located on the side of the third bonding pins 4011, the fourth bonding pin 4012 and the second bonding
  • the fixed pin 2202 is opposite, and the fourth bonding pin 4012 is electrically connected to the second bonding pin 2202 through the anisotropic conductive layer 300; it is located between the third bonding pins 4011 and the fourth bonding
  • the second pseudo binding pin 4013 between the pins 4012 is opposite to the first pseudo binding pin 2203.
  • the second data line 2102 is connected to the non-photosensitive pixel unit a2. Since the non-photosensitive pixel unit a2 is not photosensitive, the second data line 2102 is used to output the background signal value at any time. During image acquisition, power fluctuations or external electromagnetic waves interfere with the optical sensor, and the generated electronic noise will be included in this background signal value, and the interference of the non-photosensitive pixel unit a2 and the photosensitive pixel unit a1 is synchronized The size is basically the same. When no light is incident on the optical sensor, the signal value output by the first data line 2101 and the signal value output by the second data line 2102 are substantially the same.
  • the second data line 2102 can accurately collect the real-time electronic noise of the optical sensor, and the signal value output by each first data line 2101 is subtracted from the average value of part or all of the background signal value output by the second data line 2102, so that Eliminate most of the electronic noise of the image and improve the image effect.

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Abstract

An optical sensor and a forming method therefor. The optical sensor comprises: a substrate (200); a fingerprint sensing circuit layer (210) located on the substrate (200), the fingerprint sensing circuit layer (210) comprising a pixel region (A) and a first binding region (B), wherein the pixel region (A) comprises a plurality of columns of photosensitive pixel units (a1), one or more columns of non-photosensitive pixel units (a2) located at the sides of the plurality of columns of photosensitive pixel units (a1), a first data line (2101) connected to each column of photosensitive pixel units (a1), and a second data line (2102) connected to each column of non-photosensitive pixel units (a2), and the first binding region (B) comprises a plurality of first binding pins (2201) respectively connected to the first data lines (2101), second binding pins (2202) located at the sides of the plurality of first binding pins (2201) and connected to the second data lines (2102), and first pseudo binding pins (2203) between the plurality of first binding pins (2201) and second binding pins (2202); and an anisotropic conductive layer (300) located on the first binding region (B). The performance of the optical sensor is improved.

Description

光学传感器及其形成方法Optical sensor and its forming method 技术领域Technical field
本发明涉及传感器领域,尤其涉及一种光学传感器及其形成方法。The invention relates to the field of sensors, in particular to an optical sensor and a method of forming the same.
背景技术Background technique
光学传感器是一种大面积的平面成像设备,由像素单元阵列、驱动线、信号读出线等构成。带有图像信息的光信号直接投射到传感器成像表面的各个像素单元,被传感器的像素单元吸收而成像。由于不经过透镜或光纤聚焦光,是同尺寸、无缩放比例的成像,因而会有更好的成像质量;同时成像设备也更加轻薄,所以已经大量应用于各个领域。The optical sensor is a large-area planar imaging device, which is composed of a pixel cell array, drive lines, signal readout lines, and the like. The optical signal with image information is directly projected to each pixel unit of the imaging surface of the sensor, which is absorbed and imaged by the pixel unit of the sensor. Since the light is not focused through the lens or fiber, it is the same size, without scaling, so it will have better imaging quality; at the same time, the imaging device is also thinner and lighter, so it has been widely used in various fields.
比如应用于指纹成像、文件扫描等领域的光学传感器。各像素单元由开关器件和光电器件构成。可见光被光学传感器的各像素单元中的光电器件转化为电子信号存储起来。系统控制器控制驱动单元上的驱动芯片,来控制光学传感器上的驱动线,进而控制像素单元阵列的逐行开启;同时系统控制器控制信号采集单元上的信号读出芯片,通过光学传感器上的信号线来读取像素单元阵列中被开启的那一行的电子信号,然后进行放大、模数转化、存储。最终实现一个与被照射物体表面特征直接相关的数字化灰阶图像。For example, optical sensors used in fingerprint imaging, document scanning and other fields. Each pixel unit is composed of a switching device and a photoelectric device. Visible light is converted into electronic signals by photoelectric devices in each pixel unit of the optical sensor and stored. The system controller controls the driving chip on the driving unit to control the driving line on the optical sensor, and then controls the row-by-row opening of the pixel unit array; at the same time, the system controller controls the signal reading unit on the signal acquisition unit to pass through the optical sensor The signal line reads the electronic signal of the row that is turned on in the pixel cell array, and then performs amplification, analog-to-digital conversion, and storage. Finally, a digital grayscale image directly related to the surface characteristics of the illuminated object is realized.
然而,现有的光学传感器的性能有待提高。However, the performance of existing optical sensors needs to be improved.
发明内容Summary of the invention
本发明解决的问题是提供一种光学传感器及其形成方法,以提高光学传感器的性能。The problem solved by the present invention is to provide an optical sensor and a forming method thereof to improve the performance of the optical sensor.
为解决上述问题,本发明提供一种光学传感器,包括:基板;位 于基板上的指纹感测电路层,指纹感测电路层包括像素区和位于像素区侧部的第一绑定区;所述指纹感测电路层的像素区包括:若干列感光像素单元;一列或多列非感光像素单元,非感光像素单元位于所述若干列感光像素单元的侧部;与各列感光像素单元分别连接的第一数据线;与各列非感光像素单元分别连接的第二数据线;所述指纹感测电路层的第一绑定区包括:若干第一绑定引脚,第一绑定引脚分别和第一数据线连接;位于所述若干第一绑定引脚侧部的第二绑定引脚,第二绑定引脚与第二数据线连接;位于所述若干第一绑定引脚和第二绑定引脚之间的第一伪绑定引脚;位于指纹感测电路层的第一绑定区上的各向异性导电层。To solve the above problem, the present invention provides an optical sensor, including: a substrate; a fingerprint sensing circuit layer on the substrate, the fingerprint sensing circuit layer including a pixel area and a first binding area located on the side of the pixel area; The pixel area of the fingerprint sensing circuit layer includes: a plurality of columns of photosensitive pixel units; one or more columns of non-photosensitive pixel units, the non-photosensitive pixel units are located on the sides of the plurality of columns of photosensitive pixel units; A first data line; a second data line connected to each column of non-photosensitive pixel units; the first binding area of the fingerprint sensing circuit layer includes: a plurality of first binding pins, the first binding pins are respectively Connected to the first data line; the second binding pin located on the side of the plurality of first binding pins, and the second binding pin is connected to the second data line; located at the plurality of first binding pins And a first pseudo-binding pin between the second binding pin; an anisotropic conductive layer on the first binding area of the fingerprint sensing circuit layer.
可选的,所述各向异性导电层在垂直于第一绑定区表面的导电率大于在平行于第一绑定区表面的导电率。Optionally, the conductivity of the anisotropic conductive layer perpendicular to the surface of the first binding area is greater than that parallel to the surface of the first binding area.
可选的,第一绑定引脚和第二绑定引脚平行且和第一伪绑定引脚平行。Optionally, the first binding pin and the second binding pin are parallel and parallel to the first pseudo binding pin.
可选的,第一绑定引脚的线宽等于第二绑定引脚的线宽且等于第一伪绑定引脚的线宽。Optionally, the line width of the first bonding pin is equal to the line width of the second bonding pin and equal to the line width of the first pseudo bonding pin.
可选的,相邻的第一绑定引脚和第一伪绑定引脚之间的间距、相邻的第二绑定引脚和第一伪绑定引脚之间的间距、以及任意相邻的第一绑定引脚之间的间距相等。Optionally, the spacing between the adjacent first binding pin and the first pseudo-binding pin, the spacing between the adjacent second binding pin and the first pseudo-binding pin, and any The spacing between adjacent first bonding pins is equal.
可选的,对于所述若干第一绑定引脚一侧的第二绑定引脚,第二绑定引脚的数量为多个,第二绑定引脚分别与第二数据线连接;任意相邻的第一绑定引脚之间的间距等于任意相邻的第二绑定引脚之间的间距。Optionally, for the second binding pins on the side of the plurality of first binding pins, the number of second binding pins is multiple, and the second binding pins are respectively connected to the second data lines; The spacing between any adjacent first bonding pins is equal to the spacing between any adjacent second bonding pins.
可选的,对于所述若干第一绑定引脚一侧的第一伪绑定引脚,第一伪绑定引脚的数量为多个。Optionally, for the first pseudo binding pins on the side of the plurality of first binding pins, the number of the first pseudo binding pins is multiple.
可选的,相邻的第一绑定引脚和第一伪绑定引脚之间的间距等于任意相邻的第一伪绑定引脚之间的间距。Optionally, the spacing between the adjacent first binding pins and the first pseudo-binding pins is equal to the spacing between any adjacent first binding pins.
可选的,第一伪绑定引脚等距排列;任意相邻第一伪绑定引脚之间的距离为10微米~400微米。Optionally, the first pseudo-bonded pins are arranged at equal intervals; the distance between any adjacent first pseudo-bonded pins is 10 μm to 400 μm.
可选的,对于所述若干第一绑定引脚一侧的第一伪绑定引脚,第一伪绑定引脚的数量大于等于5个。Optionally, for the first pseudo binding pins on the side of the plurality of first binding pins, the number of first pseudo binding pins is greater than or equal to 5.
可选的,对于所述若干第一绑定引脚一侧的第一伪绑定引脚,第一伪绑定引脚的数量为一个。Optionally, for the first pseudo binding pins on the side of the plurality of first binding pins, the number of the first pseudo binding pins is one.
可选的,所述非感光像素单元分别位于所述若干列感光像素单元的两侧;所述第二绑定引脚分别位于所述若干第一绑定引脚的两侧;所述若干第一绑定引脚一侧的第二绑定引脚和所述若干第一绑定引脚之间具有第一伪绑定引脚,所述若干第一绑定引脚另一侧的第二绑定引脚和所述若干第一绑定引脚之间具有第一伪绑定引脚。Optionally, the non-photosensitive pixel units are located on both sides of the columns of photosensitive pixels; the second binding pins are located on both sides of the first binding pins; There is a first pseudo binding pin between the second binding pin on one side of the binding pin and the plurality of first binding pins, and the second on the other side of the first binding pins There is a first pseudo-binding pin between the binding pin and the plurality of first binding pins.
可选的,还包括:信号读出柔性电路,所述信号读出柔性电路包括第二绑定区,第二绑定区与所述第一绑定区相对,且所述各向异性导电层位于第一绑定区和第二绑定区之间;所述第二绑定区包括:若干第三绑定引脚,第三绑定引脚与第一绑定引脚相对,各第三绑定引脚与各第一绑定引脚通过各向异性导电层一一对应电性连接;位于所述若干第三绑定引脚侧部的第四绑定引脚,第四绑定引脚与第二绑定引脚相对,第四绑定引脚通过各向异性导电层与第二绑定引脚电性连接;位于所述若干第三绑定引脚和所述第四绑定引脚之间的第二伪绑定引脚,第二伪绑定引脚和第一伪绑定引脚相对。Optionally, the method further includes: a signal readout flexible circuit, the signal readout flexible circuit includes a second binding area, the second binding area is opposite to the first binding area, and the anisotropic conductive layer Located between the first binding area and the second binding area; the second binding area includes: a plurality of third binding pins, the third binding pins are opposite to the first binding pins, each third The binding pins and the first binding pins are electrically connected in one-to-one correspondence with the anisotropic conductive layer; the fourth binding pin located on the side of the plurality of third binding pins, the fourth binding pin The foot is opposite to the second binding pin, and the fourth binding pin is electrically connected to the second binding pin through an anisotropic conductive layer; it is located between the third binding pins and the fourth binding pin The second pseudo-binding pin between the pins is opposite to the first pseudo-binding pin.
本发明还提供一种形成上述任意一项所述光学传感器的形成方法,包括:提供基板;在基板上形成指纹感测电路层,指纹感测电路层包括像素区和位于像素区侧部的第一绑定区;所述指纹感测电路层的像素区包括:若干列感光像素单元;一列或多列非感光像素单元,非感光像素单元位于所述若干列感光像素单元的侧部;与各列感光像素单元分别连接的第一数据线;与各列非感光像素单元分别连接的第二数据线;所述指纹感测电路层的第一绑定区包括:若干第一绑定引脚,第一绑定引脚分别和第一数据线连接;位于所述若干第一绑定引 脚侧部的第二绑定引脚,第二绑定引脚与第二数据线连接;位于所述若干第一绑定引脚和第二绑定引脚之间的第一伪绑定引脚;在指纹感测电路层的第一绑定区上形成各向异性导电层。The invention also provides a method for forming an optical sensor according to any one of the above, comprising: providing a substrate; forming a fingerprint sensing circuit layer on the substrate, the fingerprint sensing circuit layer including a pixel area and a third portion located on the side of the pixel area A binding area; the pixel area of the fingerprint sensing circuit layer includes: a plurality of columns of photosensitive pixel units; one or more rows of non-photosensitive pixel units, the non-photosensitive pixel units are located on the sides of the plurality of rows of photosensitive pixel units; and each A first data line connected to each column of photosensitive pixel units; a second data line connected to each column of non-photosensitive pixel units; the first binding area of the fingerprint sensing circuit layer includes: a plurality of first binding pins, The first binding pins are respectively connected to the first data line; the second binding pins located at the side of the plurality of first binding pins, and the second binding pins are connected to the second data line; located at the A first pseudo-binding pin between the first and second binding pins; an anisotropic conductive layer is formed on the first binding area of the fingerprint sensing circuit layer.
可选的,还包括:提供信号读出柔性电路,所述信号读出柔性电路包括第二绑定区,所述第二绑定区包括:若干第三绑定引脚,位于所述若干第三绑定引脚侧部的第四绑定引脚;位于所述若干第三绑定引脚和所述第四绑定引脚之间的第二伪绑定引脚;将信号读出柔性电路与所述各向异性导电层贴合在一起,所述各向异性导电层位于第一绑定区和第二绑定区之间,第二绑定区与所述第一绑定区相对,第三绑定引脚与第一绑定引脚相对,第四绑定引脚与第二绑定引脚相对,第二伪绑定引脚和第一伪绑定引脚相对,各第三绑定引脚与各第一绑定引脚通过各向异性导电层一一对应电性连接,第四绑定引脚通过各向异性导电层与第二绑定引脚电性连接。Optionally, the method further includes: providing a signal readout flexible circuit, the signal readout flexible circuit includes a second binding area, and the second binding area includes: a plurality of third binding pins located on the plurality of The fourth binding pin on the side of the three binding pins; the second pseudo binding pin between the third binding pins and the fourth binding pin; the signal is read out flexibly The circuit is bonded to the anisotropic conductive layer, the anisotropic conductive layer is located between the first binding area and the second binding area, and the second binding area is opposite to the first binding area , The third binding pin is opposite to the first binding pin, the fourth binding pin is opposite to the second binding pin, and the second pseudo binding pin is opposite to the first pseudo binding pin. The three binding pins and the first binding pins are electrically connected to each other through an anisotropic conductive layer, and the fourth binding pin is electrically connected to the second binding pins through an anisotropic conductive layer.
与现有技术相比,本发明的技术方案具有以下优点:Compared with the prior art, the technical solution of the present invention has the following advantages:
本发明技术方案提供的光学传感器中,在所述若干第一绑定引脚和第二绑定引脚之间设置了第一伪绑定引脚,使得第一绑定引脚和第二绑定引脚之间的距离增大。第一伪绑定引脚不进行电性连接。即使在较强的光线照射至感光像素单元,第一数据线输出的信号值较大的情况下,由于第一绑定引脚和第二绑定引脚之间的距离增大,因此相邻的第一数据线和第二数据线之间的电场也不至于很大。这样避免第一数据线的信号通过各向异性导电层漏到第二数据线,那么第二数据线实际输出的信号为本底信号值,第二数据线的信号能够用于消减电子噪音。综上,提高了光学传感器的性能。In the optical sensor provided by the technical solution of the present invention, a first pseudo binding pin is provided between the plurality of first binding pins and the second binding pin, so that the first binding pin and the second binding pin The distance between the fixed pins increases. The first pseudo binding pin is not electrically connected. Even when strong light is irradiated to the photosensitive pixel unit and the signal value output by the first data line is large, since the distance between the first bonding pin and the second bonding pin increases, they are adjacent The electric field between the first data line and the second data line is not too great. In this way, the signal of the first data line is prevented from leaking to the second data line through the anisotropic conductive layer, then the signal actually output by the second data line is the background signal value, and the signal of the second data line can be used to reduce electronic noise. In summary, the performance of the optical sensor is improved.
其次,通过设置第一伪绑定引脚的放置增大第一绑定引脚和第二绑定引脚之间的距离,这样使得绑定引脚的密度保持一致,使各向异性导电层与第一绑定区的压合时各处受力均匀,有利于各向异性导电层与第一绑定区的压合效果,提高了各向异性导电层与第一绑定区的粘接性能和导电效果。Secondly, the distance between the first and second bonding pins is increased by setting the placement of the first pseudo-bonding pins, so that the density of the bonding pins is kept consistent and the anisotropic conductive layer is made When pressing with the first binding area, the force is uniform everywhere, which is conducive to the pressing effect of the anisotropic conductive layer and the first binding area, and improves the bonding of the anisotropic conductive layer and the first binding area Performance and conductive effect.
附图说明BRIEF DESCRIPTION
图1是一种光学传感器的结构示意图;Figure 1 is a schematic structural view of an optical sensor;
图2为图1的俯视图;Figure 2 is a top view of Figure 1;
图3至图7是本发明一实施例中光学传感器形成过程的结构示意图。3 to 7 are schematic structural diagrams of an optical sensor formation process in an embodiment of the invention.
具体实施方式detailed description
正如背景技术所述,现有的光学传感器的性能有待提高。As described in the background art, the performance of existing optical sensors needs to be improved.
一种光学传感器,结合参考图1和图2,包括:基板100;位于基板上100的指纹感测电路层110,指纹感测电路层110包括像素区Z1和绑定区Z2;像素区Z1包括:若干列感光像素单元110a;一列或多列非感光像素单元110b,非感光像素单元110b位于所述若干列感光像素单元110a的侧部;与各列感光像素单元110a连接的第一数据线1101;与各列非感光像素单元110b连接的第二数据线1102;绑定区Z2包括:若干第一绑定引脚(未图示),第一绑定引脚分别和第一数据线1101连接;位于若干第一绑定引脚侧部的第二绑定引脚(未图示),第二绑定引脚与第二数据线1102连接;位于第一绑定区Z2上的各向异性导电层120;位于各向异性导电层120上的信号读出柔性电路130。An optical sensor, with reference to FIGS. 1 and 2, includes: a substrate 100; a fingerprint sensing circuit layer 110 on the substrate 100. The fingerprint sensing circuit layer 110 includes a pixel zone Z1 and a binding zone Z2; the pixel zone Z1 includes : Several columns of photosensitive pixel units 110a; one or more columns of non-photosensitive pixel units 110b, the non-photosensitive pixel units 110b are located at the sides of the several columns of photosensitive pixel units 110a; a first data line 1101 connected to each column of photosensitive pixel units 110a ; The second data line 1102 connected to each column of non-photosensitive pixel units 110b; the binding zone Z2 includes: a number of first binding pins (not shown), the first binding pins are respectively connected to the first data line 1101 ; A second binding pin (not shown) located on the side of several first binding pins, the second binding pin is connected to the second data line 1102; an anisotropy located on the first binding zone Z2 Conductive layer 120; the signal readout flexible circuit 130 on the anisotropic conductive layer 120.
非感光像素单元110b与感光像素单元110a的唯一差别是:非感光像素单元110b没有感光性,感光像素单元110a具有感光性。The only difference between the non-photosensitive pixel unit 110b and the photosensitive pixel unit 110a is that the non-photosensitive pixel unit 110b is not photosensitive, and the photosensitive pixel unit 110a is photosensitive.
第二数据线1102与非感光像素单元110b连接,由于非感光像素单元110b没有感光性,因此在任何时候第二数据线1102的输出值都保持在一个本底信号值。在图像采集时,电源波动或外界电磁波对光学传感器的干扰,而产生的电子噪声就会被包含在这个本底信号值中,而且非感光像素单元110b和感光像素单元110a所受干扰是同步的,大小也是基本一致的。因此在光学传感器没有光入射时,第一数据线1101输出的信号值和第二数据线1102输出的信号值基本一致。 在光线照射至感光像素单元110a时,第二数据线1102用于收集光学传感器的实时电子噪音,各第一数据线1101输出的信号值分别减去部分或全部第二数据线1102输出本底信号值的平均值,这样就能消除图像的绝大部分电子噪音,提高了图像效果。The second data line 1102 is connected to the non-photosensitive pixel unit 110b. Since the non-photosensitive pixel unit 110b is not photosensitive, the output value of the second data line 1102 is maintained at a background signal value at any time. During image acquisition, power fluctuations or external electromagnetic waves interfere with the optical sensor, and the generated electronic noise will be included in this background signal value, and the interference of the non-photosensitive pixel unit 110b and the photosensitive pixel unit 110a is synchronized The size is basically the same. Therefore, when no light is incident on the optical sensor, the signal value output by the first data line 1101 and the signal value output by the second data line 1102 are substantially the same. When light is irradiated to the photosensitive pixel unit 110a, the second data line 1102 is used to collect real-time electronic noise of the optical sensor, and the signal value output by each first data line 1101 minus part or all of the second data line 1102 outputs a background signal The average value of the values can eliminate most of the electronic noise of the image and improve the image effect.
在第一绑定区Z2,各向异性导电层120将信号读出柔性电路130粘接在指纹感测电路层110的绑定区Z2上。各向异性导电层120还用于在垂直于基板100表面方向进行导电,而在平行于基板100表面方向用于电学绝缘。In the first binding zone Z2, the anisotropic conductive layer 120 bonds the signal readout flexible circuit 130 to the binding zone Z2 of the fingerprint sensing circuit layer 110. The anisotropic conductive layer 120 is also used for conducting electricity in a direction perpendicular to the surface of the substrate 100, and for electrical insulation in a direction parallel to the surface of the substrate 100.
各向异性导电层120在垂直于绑定区Z2表面的导电率为<30欧姆/绑定引脚面积,即每个绑定引脚上的各向异性导电层120的纵向的导通电阻<30欧姆;各向异性导电层120在平行于绑定区Z2表面的导电率为>10 8欧姆/相邻绑定引脚之间的距离,即任意相邻绑定引脚之间的异性导电层120的横向的导通电阻>10 8欧姆。 The conductivity of the anisotropic conductive layer 120 perpendicular to the surface of the bonding zone Z2 is <30 ohms/bonded pin area, that is, the longitudinal on-resistance of the anisotropic conductive layer 120 on each bonded pin< 30 ohms; the conductivity of the anisotropic conductive layer 120 parallel to the surface of the bonding zone Z2 is >10 8 ohms/the distance between adjacent bonding pins, that is, the anisotropic conduction between any adjacent bonding pins The lateral on-resistance of layer 120 is >10 8 ohms.
然而,各向异性导电层120在平行于基板100表面方向并不是绝对的绝缘体,各向异性导电层120在平行于基板100表面方向有一定的导电性(一般为10 8欧姆的量级以上)。其次,绑定区Z2的第一绑定引脚和第二绑定引脚之间的间距、第一绑定引脚的线宽、以及第二绑定引脚的线宽均分别较小(一般小于100um),这样使得绑定区Z2的面积较小,提高光学传感器的集成度。 However, the anisotropic conductive layer 120 in a direction parallel to the surface of the substrate 100 is not an absolute insulator, anisotropic conductive layer 120 in a direction parallel to the surface of the substrate 100 has certain conductivity (typically above 108 Ohms) . Secondly, the spacing between the first and second bonding pins in the bonding zone Z2, the line width of the first bonding pin, and the line width of the second bonding pin are smaller ( Generally less than 100um), so that the area of the binding zone Z2 is small, improving the integration of the optical sensor.
在此基础上,在较强的光线照射至感光像素单元110a时,第二数据线1102输出的信号值较大,第二数据线1102的电位和第一数据线1101的电位有明显差别,相邻第一数据线1101和第二数据线1102之间的电场较强。因此,相邻第一数据线1101的信号会通过各向异性导电层120漏到第二数据线1102,导致第二数据线1102实际输出的信号变大,此时第二数据线1102实际输出的信号就会包含本底信号值之外的信号,那么就无法利用第二数据线1102的信号去实时消减电子噪音。On this basis, when stronger light is irradiated to the photosensitive pixel unit 110a, the signal value output by the second data line 1102 is larger, and the potential of the second data line 1102 is significantly different from the potential of the first data line 1101. The electric field between the adjacent first data line 1101 and the second data line 1102 is relatively strong. Therefore, the signal of the adjacent first data line 1101 will leak to the second data line 1102 through the anisotropic conductive layer 120, which causes the signal actually output by the second data line 1102 to become larger. At this time, the actual output of the second data line 1102 The signal will include signals other than the background signal value, so the signal of the second data line 1102 cannot be used to reduce electronic noise in real time.
在此基础上,本发明提供一种光学传感器,包括:基板;位于基 板上的指纹感测电路层,指纹感测电路层包括像素区和第一绑定区;像素区包括:若干列感光像素单元;一列或多列非感光像素单元,非感光像素单元位于所述若干列感光像素单元的侧部;与各列感光像素单元分别连接的第一数据线;与各列非感光像素单元分别连接的第二数据线;第一绑定区包括:若干第一绑定引脚,第一绑定引脚分别和第一数据线连接;位于若干第一绑定引脚侧部的第二绑定引脚,第二绑定引脚与第二数据线连接;位于若干第一绑定引脚和第二绑定引脚之间的第一伪绑定引脚;位于第一绑定区上的各向异性导电层。所述光学传感器的性能得到提高。On this basis, the present invention provides an optical sensor, including: a substrate; a fingerprint sensing circuit layer on the substrate, the fingerprint sensing circuit layer includes a pixel area and a first binding area; the pixel area includes: a plurality of columns of photosensitive pixels Unit; one or more columns of non-photosensitive pixel units, the non-photosensitive pixel units are located on the sides of the plurality of columns of photosensitive pixel units; the first data lines respectively connected to each column of photosensitive pixel units; respectively connected to each column of non-photosensitive pixel units The second binding line; the first binding area includes: a number of first binding pins, the first binding pins are respectively connected to the first data line; the second binding is located on the side of the number of first binding pins Pin, the second binding pin is connected to the second data line; the first pseudo binding pin is located between several first binding pins and the second binding pin; the one located on the first binding area Anisotropic conductive layer. The performance of the optical sensor is improved.
为使本发明的上述目的、特征和优点能够更为明显易懂,下面结合附图对本发明的具体实施例做详细的说明。In order to make the above objects, features and advantages of the present invention more obvious and understandable, specific embodiments of the present invention will be described in detail below with reference to the drawings.
图3至图6是本发明一实施例中半导体器件形成过程的结构示意图。3 to 6 are structural schematic diagrams of a semiconductor device forming process in an embodiment of the invention.
结合参考图3和图4,图4为图3的俯视图,提供基板200。With reference to FIGS. 3 and 4, FIG. 4 is a top view of FIG. 3, and a substrate 200 is provided.
所述基板200为透光基板,所述透光基板包括玻璃基板或塑料基板,塑料基板包括PI或PET基板。The substrate 200 is a transparent substrate. The transparent substrate includes a glass substrate or a plastic substrate, and the plastic substrate includes a PI or PET substrate.
继续结合参考图3和图4,在基板200上形成指纹感测电路层210,指纹感测电路层210包括像素区A和位于像素区A侧部的第一绑定区B;所述指纹感测电路层210的像素区A包括:若干列感光像素单元a1;一列或多列非感光像素单元a2,非感光像素单元a2位于所述若干列感光像素单元a1的侧部;与各列感光像素单元a1分别连接的第一数据线2101;与各列非感光像素单元a2分别连接的第二数据线2102;所述指纹感测电路层210的第一绑定区B包括:若干第一绑定引脚2201,第一绑定引脚2201分别和第一数据线2101连接;位于所述若干第一绑定引脚2201侧部的第二绑定引脚2202,第二绑定引脚2202与第二数据线2102连接;位于所述若干第一绑定引脚2201和第二绑定引脚2202之间的第一伪绑定引脚2203。With continued reference to FIGS. 3 and 4, a fingerprint sensing circuit layer 210 is formed on the substrate 200. The fingerprint sensing circuit layer 210 includes a pixel area A and a first binding area B located on the side of the pixel area A; The pixel area A of the measurement circuit layer 210 includes: a plurality of columns of photosensitive pixel units a1; one or more columns of non-photosensitive pixel units a2, and the non-photosensitive pixel units a2 are located at the sides of the plurality of columns of photosensitive pixel units a1; The first data line 2101 connected to the unit a1 respectively; the second data line 2102 connected to each column of non-photosensitive pixel units a2; the first binding area B of the fingerprint sensing circuit layer 210 includes: a plurality of first bindings The pin 2201 and the first binding pin 2201 are respectively connected to the first data line 2101; the second binding pin 2202 located on the side of the first binding pins 2201 and the second binding pin 2202 are The second data line 2102 is connected; the first pseudo binding pin 2203 located between the first binding pins 2201 and the second binding pins 2202.
所述感光像素单元a1包括:感光器件和第一开关器件。所述第一开关器件包括至少一个晶体管。所述感光器件包括光电二极管。The photosensitive pixel unit a1 includes: a photosensitive device and a first switching device. The first switching device includes at least one transistor. The photosensitive device includes a photodiode.
所述非感光像素单元a2和感光像素单元a1在一套工艺制程中形成。所述非感光像素单元a2包括:非感光器件和第二开关器件。所述第二开关器件包括至少一个晶体管。The non-photosensitive pixel unit a2 and the photosensitive pixel unit a1 are formed in a set of processes. The non-photosensitive pixel unit a2 includes: a non-photosensitive device and a second switching device. The second switching device includes at least one transistor.
在一个实施例中,所述非感光器件包括覆盖有挡光层的光电二极管,所述挡光层用于阻挡光线照射至非感光器件,所述挡光层的材料包括金属、黑色有机物。In one embodiment, the non-photosensitive device includes a photodiode covered with a light blocking layer, the light blocking layer is used to block light from irradiating the non-photosensitive device, and the material of the light blocking layer includes metal and black organic matter.
本实施例中,各列感光像素单元a1的列方向与各列非感光像素单元a2的列方向平行。In this embodiment, the column direction of the photosensitive pixel units a1 in each column is parallel to the column direction of the non-photosensitive pixel units a2 in each column.
所述若干感光像素单元a1构成N行*M列的感光像素单元阵列,N为大于等于1的整数,M为大于等于1的整数。The plurality of photosensitive pixel units a1 form a photosensitive pixel unit array of N rows*M columns, N is an integer greater than or equal to 1, and M is an integer greater than or equal to 1.
所述指纹感测电路层210的像素区A还包括:若干行的驱动线,驱动线分别与各行的感光像素单元a1连接,具体的,第i行的驱动线分别与第i行的感光像素单元a1连接。若干行的驱动线用于逐行打开感光像素单元a1,i为大于等于1且小于等于N的整数。The pixel area A of the fingerprint sensing circuit layer 210 further includes: a plurality of rows of driving lines, which are respectively connected to the photosensitive pixel units a1 of each row, specifically, the driving lines of the i-th row are respectively connected to the photosensitive pixels of the i-th row Unit a1 is connected. The driving lines of several rows are used to turn on the photosensitive pixel unit a1 row by row, i is an integer greater than or equal to 1 and less than or equal to N.
所述指纹感测电路层210的像素区A包括M列第一数据线2101,第j列的第一数据线2101分别与第j列的感光像素单元a1连接。第j列的第一数据线2101用于读出第j列感光像素单元a1的输出信号。The pixel area A of the fingerprint sensing circuit layer 210 includes M columns of first data lines 2101, and the jth column of first data lines 2101 is respectively connected to the jth column of photosensitive pixel unit a1. The first data line 2101 in the jth column is used to read out the output signal of the photosensitive pixel unit a1 in the jth column.
本实施例中,所述非感光像素单元a2分别位于所述若干列感光像素单元a1的两侧。具体的,所述若干列感光像素单元a1的一侧具有N行*Q列的非感光像素单元a2,所述若干列感光像素单元a1的另一侧具有N行*W列的非感光像素单元a2。在其它实施例中,所述非感光像素单元a2仅位于所述若干列感光像素单元a1的一侧。In this embodiment, the non-photosensitive pixel units a2 are respectively located on both sides of the columns of photosensitive pixel units a1. Specifically, one side of the plurality of columns of photosensitive pixel units a1 has N rows*Q columns of non-photosensitive pixel units a2, and the other side of the plurality of columns of photosensitive pixel units a1 has N rows*W columns of non-photosensitive pixel units a2. In other embodiments, the non-photosensitive pixel unit a2 is only located on one side of the columns of photosensitive pixel units a1.
所述驱动线还与分别与各行的非感光像素单元a2连接,具体的,第i行的驱动线分别与第i行的非感光像素单元a2连接。所述驱动线还用于打开非感光像素单元a2。The drive lines are also connected to the non-photosensitive pixel units a2 of each row, specifically, the drive line of the i-th row is connected to the non-photosensitive pixel unit a2 of the i-th row, respectively. The driving line is also used to turn on the non-photosensitive pixel unit a2.
所述指纹感测电路层210的像素区A包括一列或多列的第二数据线2102。所述第二数据线2102的列数和非感光像素单元a2的列数相等。一列第二数据线2102分别与一列的非感光像素单元a2连接。第二数据线2102用于读出非感光像素单元a2的输出信号。The pixel area A of the fingerprint sensing circuit layer 210 includes one or more columns of second data lines 2102. The number of columns of the second data line 2102 is equal to the number of columns of the non-photosensitive pixel unit a2. A row of second data lines 2102 are respectively connected to a row of non-photosensitive pixel units a2. The second data line 2102 is used to read out the output signal of the non-photosensitive pixel unit a2.
本实施例中,所述第二绑定引脚2202分别位于所述若干第一绑定引脚2201的两侧。所述若干第一绑定引脚2201一侧的第二绑定引脚2202和所述若干第一绑定引脚2201之间具有第一伪绑定引脚2203,所述若干第一绑定引脚2201另一侧的第二绑定引脚2202和所述若干第一绑定引脚2201之间具有第一伪绑定引脚2203。In this embodiment, the second binding pins 2202 are located on both sides of the first binding pins 2201, respectively. There is a first pseudo binding pin 2203 between the second binding pin 2202 on the side of the plurality of first binding pins 2201 and the plurality of first binding pins 2201, and the plurality of first binding There is a first pseudo binding pin 2203 between the second binding pin 2202 on the other side of the pin 2201 and the plurality of first binding pins 2201.
对于所述若干第一绑定引脚2201两侧中任意一侧的第二绑定引脚2202,第二绑定引脚2202的数量为多个或一个。For the second binding pins 2202 on any one of the two sides of the first binding pins 2201, the number of the second binding pins 2202 is multiple or one.
第一伪绑定引脚2203和第一数据线2101不连接,第一伪绑定引脚2203和第一数据线2101电性断开,第一伪绑定引脚2203和第二数据线2102不连接,第一伪绑定引脚2203和第二数据线2102电性断开。The first pseudo binding pin 2203 and the first data line 2101 are not connected, the first pseudo binding pin 2203 and the first data line 2101 are electrically disconnected, and the first pseudo binding pin 2203 and the second data line 2102 If not connected, the first pseudo binding pin 2203 and the second data line 2102 are electrically disconnected.
本实施例中,对于所述若干第一绑定引脚2201一侧的第一伪绑定引脚2203,第一伪绑定引脚2203的数量为多个。对于所述若干第一绑定引脚2201另一侧的第一伪绑定引脚2203,第一伪绑定引脚2203的数量为多个。In this embodiment, for the first pseudo binding pins 2203 on the side of the first binding pins 2201, the number of the first pseudo binding pins 2203 is multiple. For the first pseudo binding pins 2203 on the other side of the plurality of first binding pins 2201, the number of the first pseudo binding pins 2203 is multiple.
在其它实施例中,对于所述若干第一绑定引脚2201一侧的第一伪绑定引脚2203,第一伪绑定引脚2203的数量为一个,对于所述若干第一绑定引脚2201另一侧的第一伪绑定引脚2203,第一伪绑定引脚2203的数量为一个。In other embodiments, for the first pseudo binding pins 2203 on the side of the plurality of first binding pins 2201, the number of the first pseudo binding pins 2203 is one, and for the plurality of first bindings The first pseudo-bonded pin 2203 on the other side of the pin 2201, and the number of the first pseudo-bonded pin 2203 is one.
第一绑定引脚2201和第二绑定引脚2202平行且和第一伪绑定引脚2203平行。The first binding pin 2201 and the second binding pin 2202 are parallel and parallel to the first pseudo binding pin 2203.
第一绑定引脚2201的线宽等于第二绑定引脚2202的线宽且等于第一伪绑定引脚2203的线宽。The line width of the first bonding pin 2201 is equal to the line width of the second bonding pin 2202 and equal to the line width of the first pseudo bonding pin 2203.
本实施例中,相邻的第一绑定引脚2201和第一伪绑定引脚2203之间的间距、任意相邻的第一绑定引脚2201之间的间距、任意相邻的第二绑定引脚2202之间的间距、相邻的第一绑定引脚2201和第一伪绑定引脚2203之间的间距、相邻的第二绑定引脚2202和第一伪绑定引脚2203之间的间距、以及任意相邻的第一伪绑定引脚2203之间的间距相等。In this embodiment, the spacing between the adjacent first binding pins 2201 and the first pseudo binding pins 2203, the spacing between any adjacent first binding pins 2201, and any adjacent The spacing between the two binding pins 2202, the spacing between the adjacent first binding pins 2201 and the first pseudo binding pins 2203, the adjacent second binding pins 2202 and the first pseudo binding The spacing between the fixed pins 2203 and the spacing between any adjacent first pseudo-bonded pins 2203 are equal.
在一个具体的实施例中,相邻的第一绑定引脚2201和第一伪绑定引脚2203之间的距离为10微米~400微米;相邻的第二绑定引脚2202和第一伪绑定引脚2203之间的距离为10微米~400微米。In a specific embodiment, the distance between the adjacent first bonding pin 2201 and the first pseudo bonding pin 2203 is 10 μm to 400 μm; the adjacent second bonding pin 2202 and the second The distance between a pseudo-binding pin 2203 is 10 microns to 400 microns.
所述第一伪绑定引脚2203等距排列,任意相邻第一伪绑定引脚2203之间的距离为10微米~400微米。The first pseudo binding pins 2203 are arranged at equal intervals, and the distance between any adjacent first pseudo binding pins 2203 is 10 μm to 400 μm.
在一个具体的实施例中,对于所述若干第一绑定引脚2201一侧的第一伪绑定引脚2203,第一伪绑定引脚2203的数量大于等于5个。好处在于:当相邻的第一伪绑定引脚2203与第一绑定引脚2201之间的间距(小于50um)、以及相邻的第一伪绑定引脚2203与第二绑定引脚2202之间的间距(小于50um)、以及相邻第一伪绑定引脚2203之间的间距(小于50um)分别比较小时,通过设置至少5个第一伪绑定引脚2203,来增大第一绑定引脚2201和第二绑定引脚2202之间的有效的绝缘距离,使得第一绑定引脚2201和第二绑定引脚2202的漏电有效降低。In a specific embodiment, for the first pseudo binding pins 2203 on the side of the plurality of first binding pins 2201, the number of first pseudo binding pins 2203 is greater than or equal to 5. The advantage is that when the distance between the adjacent first pseudo binding pin 2203 and the first binding pin 2201 (less than 50um), and the adjacent first pseudo binding pin 2203 and the second binding lead The spacing between the feet 2202 (less than 50um) and the spacing between the adjacent first pseudo-bonding pins 2203 (less than 50um) are relatively small, and are increased by setting at least five first pseudo-bonding pins 2203 The larger effective insulation distance between the first bonding pin 2201 and the second bonding pin 2202 makes the leakage of the first bonding pin 2201 and the second bonding pin 2202 effectively reduced.
本实施例中,通过设置第一伪绑定引脚2203的放置增大第一绑定引脚2201和第二绑定引脚2202之间的距离,这样使得绑定引脚的密度保持一致,使各向异性导电层与第一绑定区的压合时各处受力均匀,避免在各向异性导电层与第一绑定引脚2201之间、各向异性导电层与第二绑定引脚2202之间出现气泡,从而有利于各向异性导电层与第一绑定区的压合效果,提高了各向异性导电层与第一绑定区的粘接性能和导电效果。In this embodiment, the distance between the first binding pin 2201 and the second binding pin 2202 is increased by setting the placement of the first pseudo binding pin 2203, so that the density of the binding pins remains consistent, Make the anisotropic conductive layer and the first binding area pressed uniformly at all places, avoiding between the anisotropic conductive layer and the first binding pin 2201, the anisotropic conductive layer and the second binding Air bubbles appear between the pins 2202, thereby facilitating the pressing effect of the anisotropic conductive layer and the first binding area, and improving the adhesion performance and the conductive effect of the anisotropic conductive layer and the first binding area.
结合参考图5和图6,图6为图5的俯视图,图5为在图3基础 上的示意图,图6为在图4基础上的示意图,在指纹感测电路层210的第一绑定区B上形成各向异性导电层300。With reference to FIGS. 5 and 6, FIG. 6 is a top view of FIG. 5, FIG. 5 is a schematic diagram based on FIG. 3, and FIG. 6 is a schematic diagram based on FIG. 4, the first binding on the fingerprint sensing circuit layer 210 An anisotropic conductive layer 300 is formed on the area B.
各向异性导电层300在垂直于第一绑定区2201表面的导电率大于在平行于第一绑定区2201表面的导电率。The conductivity of the anisotropic conductive layer 300 perpendicular to the surface of the first binding region 2201 is greater than that parallel to the surface of the first binding region 2201.
继续参考图5和图6,提供信号读出柔性电路400,所述信号读出柔性电路400包括第二绑定区C,所述第二绑定区C包括:若干第三绑定引脚4011,位于所述若干第三绑定引脚4011侧部的第四绑定引脚4012;位于所述若干第三绑定引脚4011和所述第四绑定引脚4012之间的第二伪绑定引脚4013;将信号读出柔性电路400与所述各向异性导电层300贴合在一起,所述各向异性导电层300位于第一绑定区B和第二绑定区C之间,第二绑定区C与所述第一绑定区B相对,第三绑定引脚4011与第一绑定引脚2201相对,第四绑定引脚4012与第二绑定引脚2202相对,第二伪绑定引脚4013和第一伪绑定引脚2203相对,各第三绑定引脚4011与各第一绑定引脚2201通过各向异性导电层300一一对应电性连接,第四绑定引脚4012通过各向异性导电层300与第二绑定引脚2202电性连接。With continued reference to FIGS. 5 and 6, a signal readout flexible circuit 400 is provided. The signal readout flexible circuit 400 includes a second binding area C, and the second binding area C includes: a number of third binding pins 4011 , A fourth binding pin 4012 located on the side of the third binding pins 4011; a second pseudo located between the third binding pins 4011 and the fourth binding pin 4012 Binding pin 4013; the signal reading flexible circuit 400 is bonded to the anisotropic conductive layer 300, the anisotropic conductive layer 300 is located between the first binding area B and the second binding area C In the meantime, the second binding area C is opposite to the first binding area B, the third binding pin 4011 is opposite to the first binding pin 2201, and the fourth binding pin 4012 is opposite to the second binding pin 2202 is opposite, the second pseudo binding pin 4013 and the first pseudo binding pin 2203 are opposite, and each third binding pin 4011 and each first binding pin 2201 correspond to one to one through the anisotropic conductive layer 300 For sexual connection, the fourth bonding pin 4012 is electrically connected to the second bonding pin 2202 through the anisotropic conductive layer 300.
所述信号读出柔性电路400上绑定信号读出芯片,即信号读出芯片与信号读出柔性电路400绑定在一起。本实施例中,各第二伪绑定引脚4013与信号读出芯片电性断开。A signal reading chip is bound to the signal reading flexible circuit 400, that is, the signal reading chip and the signal reading flexible circuit 400 are bound together. In this embodiment, each second pseudo binding pin 4013 is electrically disconnected from the signal readout chip.
在另一个实施例中,参考图7,各第二伪绑定引脚4013均分别与信号读出芯片电性连接,这样可以使第二伪绑定引脚4013的电位一直保持稳定,降低对图像的干扰。In another embodiment, referring to FIG. 7, each second pseudo-bond pin 4013 is electrically connected to the signal readout chip respectively, so that the potential of the second pseudo-bond pin 4013 can be kept stable at all times. Image interference.
若第二伪绑定引脚4013都浮空,那么外界干扰因素会通过第二伪绑定引脚4013耦合至第二伪绑定引脚4013或第一伪绑定引脚,进而对图像产生干扰。If the second pseudo-binding pins 4013 are all floating, external interference factors will be coupled to the second pseudo-binding pins 4013 or the first pseudo-binding pins through the second pseudo-binding pins 4013, thereby generating an image interference.
相应的,本实施例还提供一种光学传感器,请结合参考图5和图6,包括:基板200;位于基板200上的指纹感测电路层210,指纹感 测电路层210包括像素区A和与像素区A邻接的第一绑定区B;所述指纹感测电路层210的像素区A包括:若干列感光像素单元a1;一列或多列非感光像素单元a2,非感光像素单元a2位于所述若干列感光像素单元a1的侧部;与各列感光像素单元a1连接的第一数据线2101;与各列非感光像素单元a2连接的第二数据线2102;所述指纹感测电路层210的第一绑定区B包括:若干第一绑定引脚2201,第一绑定引脚2201分别和第一数据线2101连接;位于所述若干第一绑定引脚2201侧部的第二绑定引脚2202,第二绑定引脚2202与第二数据线2102连接;位于所述若干第一绑定引脚2201和第二绑定引脚2202之间的第一伪绑定引脚2203;位于指纹感测电路层210的第一绑定区B上的各向异性导电层300。Correspondingly, this embodiment also provides an optical sensor. Please refer to FIGS. 5 and 6 together, including: a substrate 200; a fingerprint sensing circuit layer 210 on the substrate 200. The fingerprint sensing circuit layer 210 includes a pixel area A and The first binding area B adjacent to the pixel area A; the pixel area A of the fingerprint sensing circuit layer 210 includes: a plurality of columns of photosensitive pixel units a1; one or more columns of non-photosensitive pixel units a2, and the non-photosensitive pixel units a2 are located Side portions of the plurality of columns of photosensitive pixel units a1; a first data line 2101 connected to each column of photosensitive pixel units a1; a second data line 2102 connected to each column of non-photosensitive pixel units a2; the fingerprint sensing circuit layer The first binding area B of 210 includes: a plurality of first binding pins 2201, the first binding pins 2201 are respectively connected to the first data line 2101; Two binding pins 2202, the second binding pin 2202 is connected to the second data line 2102; the first pseudo binding lead between the first binding pins 2201 and the second binding pins 2202 Pin 2203; an anisotropic conductive layer 300 located on the first binding area B of the fingerprint sensing circuit layer 210.
各向异性导电层300在垂直于第一绑定区B表面的导电率大于在平行于第一绑定区B表面的导电率。The conductivity of the anisotropic conductive layer 300 perpendicular to the surface of the first bonding area B is greater than that parallel to the surface of the first bonding area B.
本实施例中,所述第二绑定引脚2202分别位于所述若干第一绑定引脚2201的两侧。所述若干第一绑定引脚2201一侧的第二绑定引脚2202和所述若干第一绑定引脚2201之间具有第一伪绑定引脚2203,所述若干第一绑定引脚2201另一侧的第二绑定引脚2202和所述若干第一绑定引脚2201之间具有第一伪绑定引脚2203。In this embodiment, the second binding pins 2202 are located on both sides of the first binding pins 2201, respectively. There is a first pseudo binding pin 2203 between the second binding pin 2202 on the side of the plurality of first binding pins 2201 and the plurality of first binding pins 2201, and the plurality of first binding There is a first pseudo binding pin 2203 between the second binding pin 2202 on the other side of the pin 2201 and the plurality of first binding pins 2201.
本实施例中,对于所述若干第一绑定引脚2201一侧的第一伪绑定引脚2203,第一伪绑定引脚2203的数量为多个。对于所述若干第一绑定引脚2201另一侧的第一伪绑定引脚2203,第一伪绑定引脚2203的数量为多个。In this embodiment, for the first pseudo binding pins 2203 on the side of the first binding pins 2201, the number of the first pseudo binding pins 2203 is multiple. For the first pseudo binding pins 2203 on the other side of the plurality of first binding pins 2201, the number of the first pseudo binding pins 2203 is multiple.
在其它实施例中,对于所述若干第一绑定引脚2201一侧的第一伪绑定引脚2203,第一伪绑定引脚2203的数量为一个,对于所述若干第一绑定引脚2201另一侧的第一伪绑定引脚2203,第一伪绑定引脚2203的数量为一个。In other embodiments, for the first pseudo binding pins 2203 on the side of the plurality of first binding pins 2201, the number of the first pseudo binding pins 2203 is one, and for the plurality of first bindings The first pseudo-bonded pin 2203 on the other side of the pin 2201, and the number of the first pseudo-bonded pin 2203 is one.
第一绑定引脚2201和第二绑定引脚2202平行且和第一伪绑定引脚2203平行。The first binding pin 2201 and the second binding pin 2202 are parallel and parallel to the first pseudo binding pin 2203.
第一绑定引脚2201的线宽等于第二绑定引脚2202的线宽且等于第一伪绑定引脚2203的线宽。The line width of the first bonding pin 2201 is equal to the line width of the second bonding pin 2202 and equal to the line width of the first pseudo bonding pin 2203.
本实施例中,相邻的第一绑定引脚2201和第一伪绑定引脚2203之间的间距、任意相邻的第一绑定引脚2201之间的间距、相邻的第一绑定引脚2201和第一伪绑定引脚2203之间的间距、相邻的第二绑定引脚2202和第一伪绑定引脚2203之间的间距、以及任意相邻的第一伪绑定引脚2203之间的间距相等。In this embodiment, the spacing between the adjacent first binding pins 2201 and the first pseudo binding pins 2203, the spacing between any adjacent first binding pins 2201, the adjacent first The spacing between the binding pin 2201 and the first pseudo binding pin 2203, the spacing between the adjacent second binding pin 2202 and the first pseudo binding pin 2203, and any adjacent first The spacing between the pseudo-binding pins 2203 is equal.
在一个具体的实施例中,相邻的第一绑定引脚2201和第一伪绑定引脚2203之间的距离为10微米~400微米;相邻的第二绑定引脚2202和第一伪绑定引脚2203之间的距离为10微米~400微米。In a specific embodiment, the distance between the adjacent first bonding pin 2201 and the first pseudo bonding pin 2203 is 10 μm to 400 μm; the adjacent second bonding pin 2202 and the second The distance between a pseudo-binding pin 2203 is 10 microns to 400 microns.
所述第一伪绑定引脚2203等距排列,任意相邻第一伪绑定引脚2203之间的距离为10微米~400微米。The first pseudo binding pins 2203 are arranged at equal intervals, and the distance between any adjacent first pseudo binding pins 2203 is 10 μm to 400 μm.
在一个具体的实施例中,对于所述若干第一绑定引脚2201一侧的第一伪绑定引脚2203,第一伪绑定引脚2203的数量大于等于5个。In a specific embodiment, for the first pseudo binding pins 2203 on the side of the plurality of first binding pins 2201, the number of first pseudo binding pins 2203 is greater than or equal to 5.
所述光学传感器还包括:信号读出柔性电路400,所述信号读出柔性电路400包括第二绑定区C,第二绑定区C与所述第一绑定区B相对,且所述各向异性导电层300位于第一绑定区B和第二绑定区C之间。The optical sensor further includes a signal readout flexible circuit 400, the signal readout flexible circuit 400 includes a second binding area C, the second binding area C is opposite to the first binding area B, and the The anisotropic conductive layer 300 is located between the first binding region B and the second binding region C.
所述第二绑定区C包括:若干第三绑定引脚4011,第三绑定引脚4011与第一绑定引脚2201相对,各第三绑定引脚4011与各第一绑定引脚2201通过各向异性导电层300一一对应电性连接;位于所述若干第三绑定引脚4011侧部的第四绑定引脚4012,第四绑定引脚4012与第二绑定引脚2202相对,第四绑定引脚4012通过各向异性导电层300与第二绑定引脚2202电性连接;位于所述若干第三绑定引脚4011和所述第四绑定引脚4012之间的第二伪绑定引脚4013,第二伪绑定引脚4013和第一伪绑定引脚2203相对。The second binding area C includes: a plurality of third binding pins 4011, the third binding pins 4011 are opposite to the first binding pins 2201, and each third binding pin 4011 is bound to each first binding pin The pins 2201 are electrically connected one-to-one through the anisotropic conductive layer 300; the fourth bonding pin 4012 located on the side of the third bonding pins 4011, the fourth bonding pin 4012 and the second bonding The fixed pin 2202 is opposite, and the fourth bonding pin 4012 is electrically connected to the second bonding pin 2202 through the anisotropic conductive layer 300; it is located between the third bonding pins 4011 and the fourth bonding The second pseudo binding pin 4013 between the pins 4012 is opposite to the first pseudo binding pin 2203.
本实施例中,第二数据线2102与非感光像素单元a2连接,由于 非感光像素单元a2没有感光性,因此在任何时候第二数据线2102用于输出本底信号值。在图像采集时,电源波动或外界电磁波对光学传感器的干扰,而产生的电子噪声就会被包含在这个本底信号值中,而且非感光像素单元a2和感光像素单元a1所受干扰是同步的,大小也是基本一致的。在光学传感器没有光入射时,第一数据线2101输出的信号值和第二数据线2102输出的信号值基本一致。In this embodiment, the second data line 2102 is connected to the non-photosensitive pixel unit a2. Since the non-photosensitive pixel unit a2 is not photosensitive, the second data line 2102 is used to output the background signal value at any time. During image acquisition, power fluctuations or external electromagnetic waves interfere with the optical sensor, and the generated electronic noise will be included in this background signal value, and the interference of the non-photosensitive pixel unit a2 and the photosensitive pixel unit a1 is synchronized The size is basically the same. When no light is incident on the optical sensor, the signal value output by the first data line 2101 and the signal value output by the second data line 2102 are substantially the same.
由于在光线照射至感光像素单元a1时,避免第一数据线2101的信号通过各向异性导电层300漏到第二数据线2102,那么第二数据2102线实际输出的信号为本底信号值,因此第二数据线2102能够准确的收集光学传感器的实时电子噪音,各第一数据线2101输出的信号值分别减去部分或全部第二数据线2102输出本底信号值的平均值,这样就能消除图像的绝大部分电子噪音,提高了图像效果。Since when the light is irradiated to the photosensitive pixel unit a1, the signal of the first data line 2101 is prevented from leaking to the second data line 2102 through the anisotropic conductive layer 300, then the actual output signal of the second data 2102 line is the background signal value, Therefore, the second data line 2102 can accurately collect the real-time electronic noise of the optical sensor, and the signal value output by each first data line 2101 is subtracted from the average value of part or all of the background signal value output by the second data line 2102, so that Eliminate most of the electronic noise of the image and improve the image effect.
虽然本发明披露如上,但本发明并非限定于此。任何本领域技术人员,在不脱离本发明的精神和范围内,均可作各种更动与修改,因此本发明的保护范围应当以权利要求所限定的范围为准。Although the present invention is disclosed as above, the present invention is not limited to this. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be subject to the scope defined by the claims.

Claims (15)

  1. 一种光学传感器,其特征在于,包括:An optical sensor, characterized in that it includes:
    基板;Substrate
    位于基板上的指纹感测电路层,指纹感测电路层包括像素区和位于像素区侧部的第一绑定区;A fingerprint sensing circuit layer on the substrate, the fingerprint sensing circuit layer includes a pixel area and a first binding area located on the side of the pixel area;
    所述指纹感测电路层的像素区包括:若干列感光像素单元;一列或多列非感光像素单元,非感光像素单元位于所述若干列感光像素单元的侧部;与各列感光像素单元分别连接的第一数据线;与各列非感光像素单元分别连接的第二数据线;The pixel area of the fingerprint sensing circuit layer includes: a plurality of columns of photosensitive pixel units; one or more columns of non-photosensitive pixel units, the non-photosensitive pixel units are located at the sides of the plurality of columns of photosensitive pixel units; and each column of photosensitive pixel units The first data line connected; the second data line connected to each column of non-photosensitive pixel units;
    所述指纹感测电路层的第一绑定区包括:若干第一绑定引脚,第一绑定引脚分别和第一数据线连接;位于所述若干第一绑定引脚侧部的第二绑定引脚,第二绑定引脚与第二数据线连接;位于所述若干第一绑定引脚和第二绑定引脚之间的第一伪绑定引脚;The first binding area of the fingerprint sensing circuit layer includes: a plurality of first binding pins, the first binding pins are respectively connected to the first data line; A second binding pin, the second binding pin is connected to the second data line; a first pseudo binding pin located between the plurality of first binding pins and the second binding pin;
    位于指纹感测电路层的第一绑定区上的各向异性导电层。An anisotropic conductive layer located on the first binding area of the fingerprint sensing circuit layer.
  2. 根据权利要求1所述的光学传感器,其特征在于,所述各向异性导电层在垂直于第一绑定区表面的导电率大于在平行于第一绑定区表面的导电率。The optical sensor according to claim 1, wherein the conductivity of the anisotropic conductive layer perpendicular to the surface of the first binding region is greater than that parallel to the surface of the first binding region.
  3. 根据权利要求1所述的光学传感器,其特征在于,第一绑定引脚和第二绑定引脚平行且和第一伪绑定引脚平行。The optical sensor according to claim 1, wherein the first bonding pin and the second bonding pin are parallel and parallel to the first pseudo bonding pin.
  4. 根据权利要求1所述的光学传感器,其特征在于,第一绑定引脚的线宽等于第二绑定引脚的线宽且等于第一伪绑定引脚的线宽。The optical sensor according to claim 1, wherein the line width of the first bonding pin is equal to the line width of the second bonding pin and equal to the line width of the first pseudo bonding pin.
  5. 根据权利要求1所述的光学传感器,其特征在于,相邻的第一绑定引脚和第一伪绑定引脚之间的间距、相邻的第二绑定引脚和第一伪绑定引脚之间的间距、以及任意相邻的第一绑定引脚之间的间距相等。The optical sensor according to claim 1, wherein the distance between the adjacent first bonding pin and the first pseudo bonding pin, the adjacent second bonding pin and the first pseudo bonding The spacing between the fixed pins and the spacing between any adjacent first bonding pins are equal.
  6. 根据权利要求5所述的光学传感器,其特征在于,对于所述若 干第一绑定引脚一侧的第二绑定引脚,第二绑定引脚的数量为多个,第二绑定引脚分别与第二数据线连接;The optical sensor according to claim 5, characterized in that, for the second bonding pin on the side of the plurality of first bonding pins, the number of second bonding pins is multiple, the second bonding The pins are respectively connected to the second data line;
    任意相邻的第一绑定引脚之间的间距等于任意相邻的第二绑定引脚之间的间距。The spacing between any adjacent first bonding pins is equal to the spacing between any adjacent second bonding pins.
  7. 根据权利要求1所述的光学传感器,其特征在于,对于所述若干第一绑定引脚一侧的第一伪绑定引脚,第一伪绑定引脚的数量为多个。The optical sensor according to claim 1, characterized in that, for the first pseudo bonding pins on one side of the plurality of first bonding pins, the number of the first pseudo bonding pins is multiple.
  8. 根据权利要求7所述的光学传感器,其特征在于,相邻的第一绑定引脚和第一伪绑定引脚之间的间距等于任意相邻的第一伪绑定引脚之间的间距。The optical sensor according to claim 7, wherein the distance between the adjacent first bonding pins and the first pseudo bonding pins is equal to that between any adjacent first pseudo bonding pins spacing.
  9. 根据权利要求7所述的光学传感器,其特征在于,第一伪绑定引脚等距排列;任意相邻第一伪绑定引脚之间的距离为10微米~400微米。The optical sensor according to claim 7, wherein the first dummy bonding pins are arranged equidistantly; the distance between any adjacent first dummy bonding pins is 10 microns to 400 microns.
  10. 根据权利要求7所述的光学传感器,其特征在于,对于所述若干第一绑定引脚一侧的第一伪绑定引脚,第一伪绑定引脚的数量大于等于5个。The optical sensor according to claim 7, characterized in that, for the first pseudo bonding pins on the side of the plurality of first bonding pins, the number of first pseudo bonding pins is greater than or equal to 5.
  11. 根据权利要求1所述的光学传感器,其特征在于,对于所述若干第一绑定引脚一侧的第一伪绑定引脚,第一伪绑定引脚的数量为一个。The optical sensor according to claim 1, wherein the number of the first dummy bonding pins is one for the first dummy bonding pins on the side of the plurality of first bonding pins.
  12. 根据权利要求1所述的光学传感器,其特征在于,所述非感光像素单元分别位于所述若干列感光像素单元的两侧;所述第二绑定引脚分别位于所述若干第一绑定引脚的两侧;所述若干第一绑定引脚一侧的第二绑定引脚和所述若干第一绑定引脚之间具有第一伪绑定引脚,所述若干第一绑定引脚另一侧的第二绑定引脚和所述若干第一绑定引脚之间具有第一伪绑定引脚。The optical sensor according to claim 1, wherein the non-photosensitive pixel units are respectively located on both sides of the columns of photosensitive pixels; the second bonding pins are respectively located in the first bindings Both sides of the pin; there is a first pseudo-binding pin between the second binding pin on one side of the plurality of first binding pins and the plurality of first binding pins, the plurality of first There is a first pseudo binding pin between the second binding pin on the other side of the binding pin and the first binding pins.
  13. 根据权利要求1所述的光学传感器,其特征在于,还包括:信号读出柔性电路,所述信号读出柔性电路包括第二绑定区,第二绑 定区与所述第一绑定区相对,且所述各向异性导电层位于第一绑定区和第二绑定区之间;The optical sensor according to claim 1, further comprising: a signal readout flexible circuit, the signal readout flexible circuit includes a second binding area, the second binding area and the first binding area In contrast, and the anisotropic conductive layer is located between the first binding area and the second binding area;
    所述第二绑定区包括:若干第三绑定引脚,第三绑定引脚与第一绑定引脚相对,各第三绑定引脚与各第一绑定引脚通过各向异性导电层一一对应电性连接;位于所述若干第三绑定引脚侧部的第四绑定引脚,第四绑定引脚与第二绑定引脚相对,第四绑定引脚通过各向异性导电层与第二绑定引脚电性连接;位于所述若干第三绑定引脚和所述第四绑定引脚之间的第二伪绑定引脚,第二伪绑定引脚和第一伪绑定引脚相对。The second binding area includes: a plurality of third binding pins, the third binding pins are opposite to the first binding pins, and each third binding pin and each first binding pin pass through each direction The heterosexual conductive layers correspond to one-to-one electrical connection; the fourth bonding pin located on the side of the third bonding pins, the fourth bonding pin is opposite to the second bonding pin, and the fourth bonding pin The foot is electrically connected to the second binding pin through an anisotropic conductive layer; the second pseudo binding pin between the third binding pins and the fourth binding pin, the second The pseudo binding pin is opposite to the first pseudo binding pin.
  14. 一种形成权利要求1至13任意一项所述光学传感器的形成方法,其特征在于,包括:A method for forming an optical sensor according to any one of claims 1 to 13, characterized in that it includes:
    提供基板;Provide substrate;
    在基板上形成指纹感测电路层,指纹感测电路层包括像素区和位于像素区侧部的第一绑定区;所述指纹感测电路层的像素区包括:若干列感光像素单元;一列或多列非感光像素单元,非感光像素单元位于所述若干列感光像素单元的侧部;与各列感光像素单元分别连接的第一数据线;与各列非感光像素单元分别连接的第二数据线;所述指纹感测电路层的第一绑定区包括:若干第一绑定引脚,第一绑定引脚分别和第一数据线连接;位于所述若干第一绑定引脚侧部的第二绑定引脚,第二绑定引脚与第二数据线连接;位于所述若干第一绑定引脚和第二绑定引脚之间的第一伪绑定引脚;A fingerprint sensing circuit layer is formed on the substrate. The fingerprint sensing circuit layer includes a pixel area and a first binding area located on the side of the pixel area; the pixel area of the fingerprint sensing circuit layer includes: a plurality of columns of photosensitive pixel units; one column Or a plurality of columns of non-photosensitive pixel units, the non-photosensitive pixel units are located on the sides of the plurality of columns of photosensitive pixel units; a first data line respectively connected to each column of photosensitive pixel units; a second respectively connected to each column of non-photosensitive pixel units Data line; the first binding area of the fingerprint sensing circuit layer includes: a plurality of first binding pins, the first binding pins are respectively connected to the first data line; and are located in the plurality of first binding pins A second binding pin on the side, the second binding pin is connected to the second data line; a first pseudo binding pin located between the plurality of first binding pins and the second binding pin ;
    在指纹感测电路层的第一绑定区上形成各向异性导电层。An anisotropic conductive layer is formed on the first binding area of the fingerprint sensing circuit layer.
  15. 根据权利要求14所述的光学传感器的形成方法,其特征在于,还包括:提供信号读出柔性电路,所述信号读出柔性电路包括第二绑定区,所述第二绑定区包括:若干第三绑定引脚,位于所述若干第三绑定引脚侧部的第四绑定引脚;位于所述若干第三绑定引脚和所述第四绑定引脚之间的第二伪绑定引脚;将信号读出柔性电路与所述 各向异性导电层贴合在一起,所述各向异性导电层位于第一绑定区和第二绑定区之间,第二绑定区与所述第一绑定区相对,第三绑定引脚与第一绑定引脚相对,第四绑定引脚与第二绑定引脚相对,第二伪绑定引脚和第一伪绑定引脚相对,各第三绑定引脚与各第一绑定引脚通过各向异性导电层一一对应电性连接,第四绑定引脚通过各向异性导电层与第二绑定引脚电性连接。The method of forming an optical sensor according to claim 14, further comprising: providing a signal readout flexible circuit, the signal readout flexible circuit including a second binding area, the second binding area including: A plurality of third binding pins, a fourth binding pin located on the side of the third binding pins; a third binding pin between the third binding pins and the fourth binding pin The second pseudo-binding pin; the signal reading flexible circuit is bonded to the anisotropic conductive layer, the anisotropic conductive layer is located between the first binding area and the second binding area, the first The second binding area is opposite to the first binding area, the third binding pin is opposite to the first binding pin, the fourth binding pin is opposite to the second binding pin, and the second pseudo binding lead The feet are opposite to the first pseudo-binding pins, each third binding pin and each first binding pin are electrically connected one-to-one through an anisotropic conductive layer, and the fourth binding pin is electrically conductive through anisotropy The layer is electrically connected to the second binding pin.
PCT/CN2018/120168 2018-12-11 2018-12-11 Optical sensor and forming method therefor WO2020118499A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113126826A (en) * 2021-05-17 2021-07-16 京东方科技集团股份有限公司 Touch display panel, flexible touch display device and wearable device

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6937313B2 (en) * 2000-05-31 2005-08-30 Lg.Philips Lcd Co., Ltd. Liquid crystal display device implementing improved electrical lines and the fabricating method
CN1892393A (en) * 2005-07-01 2007-01-10 中华映管股份有限公司 Active element array and detection method for same
CN101000413A (en) * 2006-01-13 2007-07-18 三星电子株式会社 Liquid crystal display and forming method thereof and thin film transistor substrate
CN101510396A (en) * 2008-02-15 2009-08-19 奇美电子股份有限公司 Control circuit, backlight module and flat display device
CN102760013A (en) * 2009-06-25 2012-10-31 友达光电股份有限公司 Touch panel
CN103988119A (en) * 2011-12-07 2014-08-13 凸版印刷株式会社 Liquid crystal display device
CN105512645A (en) * 2016-01-19 2016-04-20 上海箩箕技术有限公司 Optical fingerprint sensor module
CN105573556A (en) * 2016-01-29 2016-05-11 上海中航光电子有限公司 Touch-control display panel
US9548322B2 (en) * 2013-12-06 2017-01-17 Japan Display Inc. Display device
CN106897696A (en) * 2017-02-24 2017-06-27 京东方科技集团股份有限公司 A kind of lines identification module, its driving method and display device

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6937313B2 (en) * 2000-05-31 2005-08-30 Lg.Philips Lcd Co., Ltd. Liquid crystal display device implementing improved electrical lines and the fabricating method
CN1892393A (en) * 2005-07-01 2007-01-10 中华映管股份有限公司 Active element array and detection method for same
CN101000413A (en) * 2006-01-13 2007-07-18 三星电子株式会社 Liquid crystal display and forming method thereof and thin film transistor substrate
CN101510396A (en) * 2008-02-15 2009-08-19 奇美电子股份有限公司 Control circuit, backlight module and flat display device
CN102760013A (en) * 2009-06-25 2012-10-31 友达光电股份有限公司 Touch panel
CN103988119A (en) * 2011-12-07 2014-08-13 凸版印刷株式会社 Liquid crystal display device
US9548322B2 (en) * 2013-12-06 2017-01-17 Japan Display Inc. Display device
CN105512645A (en) * 2016-01-19 2016-04-20 上海箩箕技术有限公司 Optical fingerprint sensor module
CN105573556A (en) * 2016-01-29 2016-05-11 上海中航光电子有限公司 Touch-control display panel
CN106897696A (en) * 2017-02-24 2017-06-27 京东方科技集团股份有限公司 A kind of lines identification module, its driving method and display device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113126826A (en) * 2021-05-17 2021-07-16 京东方科技集团股份有限公司 Touch display panel, flexible touch display device and wearable device
CN113126826B (en) * 2021-05-17 2024-07-02 京东方科技集团股份有限公司 Touch display panel, flexible touch display device and wearable device

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