WO2020113620A1

WO2020113620A1 - Method for manufacturing oled touch control display module

Info

Publication number: WO2020113620A1
Application number: PCT/CN2018/120330
Authority: WO
Inventors: 李志成
Original assignee: 信利光电股份有限公司
Priority date: 2018-12-06
Filing date: 2018-12-11
Publication date: 2020-06-11
Also published as: CN109696991A

Abstract

A method for manufacturing an OLED touch control display module, the method comprising the following steps: step 1: providing a packaged OLED display panel; step 2: forming a touch control electrode layer on the OLED display panel by means of a magnetron-sputtering film-plating system; and step 3: etching the touch control electrode layer to form a touch control electrode pattern. According to the method for manufacturing an OLED touch control display module, the touch control electrode layer is plated on the packaged OLED display panel and is etched to form the touch control electrode pattern; complex protection such as acid resistance, alkali resistance and scratch resistance having to be performed on the formed touch control electrode pattern can be effectively avoided when an OLED functional layer is manufactured, so the process steps and difficulty are effectively simplified, and production efficiency is improved.

Description

Specification Name of the invention: a method for manufacturing an OLED touch display module Technical Field

[0001] The present invention relates to the field of display technology, and in particular to a method for manufacturing an OLED touch display module.

Background technique

[0002] OLED display technology is widely used because it has the advantages of all-solid-state active light emission, good temperature characteristics, low power consumption, fast response, flexible folding, ultra-thin and so on. 5 When some OLED touch display modules integrate touch function, most of them adopt the method of attaching another layer of touch screen sensor between the OLED display panel and the cover plate. However, this increases the weight and thickness of electronic products, which cannot meet the increasingly thin and thin electronic product design requirements. There are also technical solutions for ON CELL, that is, a scheme for plating a touch layer directly on the packaging cover or substrate of the OLED display panel. However, the existing ON CELL process is complicated and the production efficiency is low. Summary of the invention

technical problem

Solution to the problem

Technical solution

[0003] The technical problem to be solved by the present invention is to provide a method for manufacturing an OLED touch display module, simplify the manufacturing process, and improve production efficiency.

[0004] To solve the above technical problems, the present invention provides a method for manufacturing an OLED touch display module, including the following steps:

[0005] Step 1: Provide the packaged OLED display panel;

[0006] Step 2: forming a touch electrode layer on the OLED display panel by a magnetron sputtering coating system;

[0007] Step 3: The touch electrode layer is etched to form a touch electrode pattern.

[0008] As a preferred solution of the present invention, the step 2 includes:

[0009] Step 2.1: Remove the incidental gas on the OLED display panel and the substrate holder through the film feed cavity and/or buffer cavity of the magnetron sputtering coating system;

[0010] Step 2.2: forming a touch control circuit on the OLED display panel by a coating cavity of a magnetron sputtering coating system Polar layer.

[0011] As a preferred solution of the present invention, in the step 2.1, the vacuum degree of the film feed cavity and/or buffer cavity is controlled to match the vacuum degree of the inner cavity of the OLED display panel.

[0012] As a preferred solution of the present invention, the vacuum degree of the film feed cavity and/or buffer cavity is less than or equal to 5.0E-2Pa.

[0013] As a preferred solution of the present invention, the vacuum degree of the inner cavity of the OLED display panel is -25KPa-35 KPa.

[0014] As a preferred solution of the present invention, the specific operation of the step 2.2 is: in the coating chamber of the magnetron sputtering coating system, the target material is sputtered to the OLED by means of vacuum magnetron sputtering A touch electrode layer is formed on the display panel, wherein the heating temperature of the coating cavity is lower than 25°C, and the temperature of the target position during the coating process is lower than 80°C.

[0015] As a preferred solution of the present invention, the step 3 includes:

[0016] Step 3.1: Coating photoresist on the touch electrode layer.

[0017] Step 3.2: Expose and develop the photoresist to form a photoresist electrode pattern;

[0018] Step 3.3: Use the etching solution to etch the touch electrode layer to form a touch electrode pattern.

[0019] As a preferred solution of the present invention, the OLED display panel includes a plurality of sub-display panels; after step 3, the method further includes:

[0020] Step 4: Cutting the plated OLED display panel to form a plurality of semi-finished OLED touch display modules;

[0021] Step 5: Separately remove the photoresist covering the touch electrode pattern on each semi-finished OLED touch display module to form an OLED touch display module.

[0022] As a preferred solution of the present invention, the touch electrode layer is formed on the side of the OLED substrate facing away from the cover plate of the OLED package.

[0023] As a preferred solution of the present invention, between step 1 and step 2 further includes: sealing the edge of the OLED display panel.

Beneficial effects of invention

Beneficial effect

[0024] The present invention provides an OLED touch display module manufacturing method by making the OLE package completed D. The touch electrode layer is plated on the display panel and etched to form the touch electrode pattern, which can effectively avoid the need to protect the formed touch electrode pattern from complex acid, alkali, and scratch protection when making the 0 LED functional layer. , Thereby effectively simplifying the process steps and difficulty, and improving production efficiency. In addition, by controlling the vacuum degree of the film feeding cavity and/or the buffer cavity to match the vacuum degree of the inner cavity of the OLED display panel, it is effectively ensured that the OLED display panel will not cause product rupture due to excessive pressure difference between the inside and outside of the box, and at the same time Realize the effect of removing gas and ensure that the product is not easy to break, and ensure the quality of the product; by controlling the temperature of the coating cavity, it is ensured that the OLED display panel can not be damaged by high temperature during the formation of the touch electrode layer, and the product quality and Yield rate; The use of oxalic acid etching solution can effectively ensure the formation of touch electrode patterns.

Brief description of the drawings

BRIEF DESCRIPTION

[0025] FIG. 1 is a flowchart of a method for manufacturing an OLH) touch display module provided by the present invention.

Invention Example

Embodiments of the invention

[0026] In order to make the technical solutions and advantages of the present invention clearer, the following describes the embodiments of the present invention in further detail with reference to the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, but not all the embodiments. Based on the described embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0027] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons of ordinary skill in the field to which the present invention belongs. The terms "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. In the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right", etc. indicate the orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, only In order to facilitate the description of the present invention and simplify the description, it does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, so the terms used to describe the positional relationship in the drawings are for illustrative purposes only. It should not be understood as a limitation to this patent. For those of ordinary skill in the art, the specific meaning of the above terms can be understood according to specific circumstances.

Embodiment One [0029] As shown in FIG. 1, it shows a method for manufacturing an OLED touch display module provided by the present invention, which includes the following steps: Step 1: Provide an OLED display panel with packaging completed; Step 2: Splash by magnetron An injection coating system forms a touch electrode layer on the OLED display panel; Step 3: Etching the touch electrode layer to form a touch electrode pattern.

[0030] In this way, since the OLED display panel is packaged first and then the touch electrode layer is directly plated on the OLED display panel after the package is completed, the process can be effectively simplified and the production efficiency can be improved. Compared with the existing method for manufacturing the OLED functional layer after making the touch electrode pattern on the substrate, it can effectively avoid the complex acid resistance, alkali resistance and resistance to the already formed touch electrode pattern when manufacturing the OLED functional layer Scratches and other protections, which effectively simplifies the process steps and difficulties, and improves production efficiency.

[0031] Specifically, in this embodiment, the touch electrode layer is formed on the side of the OLED substrate facing away from the cover plate of the OLE D package, in this embodiment, the light exit side of the OLED display panel It is the side of the OLED substrate, that is, the touch electrode layer is plated on the light emitting side of the OLED display panel. Between step 1 and step 2 further includes: sealing the edge of the OLED display panel. Preferably, the edge of the OLED display panel is sealed by using UV glue to seal the edge positions of the OLED substrate and the OLED package cover in the OLED display panel. In this way, it is possible to effectively prevent the OLED display panel from being cleaned during the formation of the touch electrode layer or the touch electrode pattern in the subsequent steps, or liquid infiltration during exposure, development, etching, etc., causing corrosion of the peripheral circuit of the OLE D display panel and affecting the product The problem of quality.

[0032] Specifically, in this embodiment, the step 1 may include: step 1.1, making an OLED substrate and an OL ED package cover plate; step 1.2, encapsulating the OLED substrate and the OLED package cover plate to form an OLED display panel. Specifically, in the step 1.1, fabricating the OLED substrate may include: forming an anode trace on the substrate, and then sequentially fabricating a pixel isolation grid, an isolation pillar, an organic layer, and a cathode trace; specifically, the anode trace may include ITO Traces and auxiliary metal traces; specifically, a pixel isolation grid may be formed by coating a positive photoresist, and then exposing and developing the positive photoresist. The manufacturing of the OLED package cover plate may include the following steps: cleaning and drying the package cover plate substrate; applying UV sealant on the package cover plate substrate; coating the area enclosed by the UV frame glue on the package cover plate substrate The cloth desiccant forms the OLED package cover. It should be noted that the OLED display panel may be a PMOLED display panel, and of course it may also be an AMOLED display panel, which is not limited in the present invention.

[0033] Specifically, in this embodiment, the step 2 includes: Step 2.1: by magnetron sputtering coating system Entering the film cavity and/or buffer cavity to remove incidental gas on the OLED display panel and the substrate holder; Step 2.2: Form a touch electrode layer on the OLED display panel through a coating cavity of a magnetron sputtering coating system. That is, before the OLE D display panel is fed into the coating cavity to form the touch electrode layer, the film cavity and/or the buffer cavity are firstly passed to remove the water vapor, nitrogen and other impurities, so as to effectively avoid the influence of the impurities and sputtering The deposited touch electrode layer forms too many defects, which seriously affects the optical and electrical properties and guarantees product quality.

[0034] Specifically, in the step 2.1, the vacuum degree of the film advancement cavity and/or the buffer cavity is controlled to match the vacuum degree of the inner cavity of the OL ED display panel, due to entering the film advancement cavity and the buffer cavity Of the OLED display panel has been packaged, and the packaged OLED display panel forms a certain inner cavity, so that the vacuum degree of the film insertion cavity and the buffer cavity matches the inner cavity vacuum of the OLED display panel, which can effectively ensure the OLED display panel No product rupture will occur due to excessive pressure difference between the inside and outside of the box to ensure product quality; specifically, it may be controlled that the vacuum degree of the film feed chamber and/or buffer chamber is less than or equal to 5.0E-2Pa, that is, in the film feed chamber and /Or the vacuum degree of the buffer cavity is not greater than 5.0E-2Pa, which can effectively ensure that the OLED display panel is not easily broken; preferably, the vacuum degree of the film feeding cavity and/or the buffer cavity can be maintained at 5.0E-2Pa, Effectively balance the effect of removing impurities and the effect of ensuring that the product is not easily broken. Preferably, the vacuum degree of the internal cavity of the OLED display panel is -25KPa~-35KPa, that is, it is lower than 1 atmospheric pressure, and the actual pressure is 75KPa~65KPa. This matching of vacuum degree can effectively ensure that the OLED display panel will not be cracked or deformed, and at the same time, it can effectively achieve the purpose of removing impurities.

[0035] Specifically, the specific operation of the step 2.2 is: in the coating chamber of the magnetron sputtering coating system, the target material is sputtered onto the OLED display panel by vacuum magnetron sputtering to form a touch For the electrode layer, the heating temperature of the coating chamber is lower than 25°C, and the temperature of the target position during the coating process is lower than 80°C. In this way, on the one hand, the formation of the touch electrode layer is ensured, and on the other hand, it can effectively ensure that the OLED display panel can not be damaged by high temperature during the process of forming the touch electrode layer, thereby ensuring product quality and yield. Specifically, in this embodiment, the other process parameters of the coating chamber may be a vacuum degree of 0.4-0.5 Pa, a flow rate of argon gas of 300-600 sccm, a flow rate of oxygen gas of 3-4 sccm, and the rake material is The ITO rake material can effectively ensure the formation of the touch electrode layer.

[0036] Specifically, the step 3 includes: Step 3.1: coating a photoresist on the touch electrode layer; specifically, the material of the photoresist is a positive photoresist with a thickness of 1-2um The pre-baking temperature is 90-100°C. Step 3.2: Expose and develop the photoresist to form a photoresist electrode pattern; specifically, a wavelength of ultraviolet light for exposure It is a mixed wavelength band of 365nm, 405nm and 436nm, the developer material for development is TMAH (2.38%-wt), and the post-baking temperature is 100~110°C; Step 3.3: Use an etching solution to the touch electrode layer Etching to form a touch electrode pattern. Specifically, the material of the etching solution is oxalic acid, the temperature is 40-45 degrees, and the time is 180-300S. Of course, the etching time may be performed according to the thickness of the specific touch electrode layer. Adjustment. In this way, since the low-temperature manufacturing process is used to manufacture the touch electrode layer in this embodiment, the etching solution using the oxalic acid material can effectively ensure the etching effect and the formation of the touch electrode pattern.

[0037] The manufacturing method of the OLED touch display module provided in this embodiment, by making the packaged OLE D display panel by plating a touch electrode layer and etching to form a touch electrode pattern, can effectively avoid making 0 LED In the functional layer, it is necessary to protect the formed touch electrode patterns with complex acid resistance, alkali resistance, scratch resistance, etc., thereby effectively simplifying the process steps and difficulties, and improving production efficiency. In addition, by controlling the vacuum degree of the film feeding cavity and/or the buffer cavity to match the vacuum degree of the inner cavity of the OLED display panel, it is effectively ensured that the OLED display panel will not cause product rupture due to excessive pressure difference between the inside and outside of the box, and at the same time To achieve the effect of removing gas and to ensure that the product is not easy to break, to ensure product quality; by controlling the temperature of the coating cavity, it is ensured that the OLED display panel can not be damaged by high temperature during the formation of the touch electrode layer, ensuring product quality and Yield rate; By using an etching solution of oxalic acid material, the formation of touch electrode patterns can be effectively ensured.

Embodiment 2

[0039] The principle of this embodiment is the same as the previous embodiment, and the steps are similar. The only difference is that, in this embodiment, the OLED display panel includes multiple sub-display panels; after step 3, the method further includes: Step 4: The OLED display panel after plating the touch electrode pattern is cut to form a plurality of semi-finished OLED touch display modules; Step 5: Removal of the photolithography covering the touch electrode patterns on each semi-finished OLED touch display module Glue to form an OLED touch display module.

[0040] In this way, the packaged OLED display panel provided in this embodiment is a large board, so that the touch electrode patterns are simultaneously formed on the large board and then cut, then multiple OLED touch display modules can be realized at the same time. Production, effectively improve production efficiency. Moreover, in this embodiment, after the touch electrode pattern is etched in step 3, the photoresist covering the touch electrode pattern is not removed temporarily, but is cut in step 4 to form a plurality of OLED touch display models After the semi-finished products are assembled, the photoresist on the semi-finished products of each OLED touch display module is removed in step 5, which can effectively ensure that the touch electrode pattern has light during the cutting process The protection of the resist is not easy to be damaged, which effectively guarantees the product quality and yield.

[0041] The above-mentioned examples only express the implementation of the present invention, the description is more specific and detailed, but it should not be construed as a limitation of the patent scope of the present invention, which is obtained in the form of equivalent replacement or equivalent transformation All technical solutions should fall within the protection scope of the present invention.

Claims

[Claim 1] A method for manufacturing an OLED touch display module, comprising the following steps: Step 1: Provide an OLED display panel with complete packaging;

Step 2: forming a touch electrode layer on the OLED display panel by a magnetron sputtering coating system;

Step 3: Etching the touch electrode layer to form a touch electrode pattern.

[Claim 2] The method for manufacturing an OLED touch display module according to claim 1, wherein the step 2 includes:

Step 2.1: Remove the incidental gas from the OLED display panel and the substrate holder through the entrance cavity and/or buffer cavity of the magnetron sputtering coating system;

Step 2.2: A touch electrode layer is formed on the OLED display panel through the coating cavity of the magnetron sputtering coating system.

[Claim 3] The method for manufacturing the OLED touch display module according to claim 2, wherein in the step 2.1, the vacuum degree of the film feed cavity and/or buffer cavity is controlled as Match the vacuum degree of the inner cavity of the OLED display panel.

[Claim 4] The method for manufacturing the OLED touch display module according to claim 3, wherein the vacuum degree of the film feed cavity and/or buffer cavity is less than or equal to 5.0E-2Pa.

[Claim 5] The method for manufacturing the OLED touch display module according to claim 3, wherein the vacuum degree of the inner cavity of the OLED display panel is -25KPa~-35KPa.

[Claim 6] The method for manufacturing the OLED touch display module according to claim 2, characterized in that the specific operation of step 2.2 is: in the coating chamber of the magnetron sputtering coating system, through vacuum magnetic The target material is sputtered onto the OLED display panel by a controlled sputtering method to form a touch electrode layer, wherein the heating temperature of the coating chamber is lower than 25°C, and the target temperature during the coating process is lower than 80° C.

[Claim 7] The method for manufacturing the OLED touch display module according to claim 1, wherein the step 3 includes:

Step 3.1: Coating photoresist on the touch electrode layer;

Step 3.2: Expose and develop the photoresist to form a photoresist electrode pattern; Step 3.3: Use the etching solution to etch the touch electrode layer to form a touch electrode pattern.

[Claim 8] The method for manufacturing an OLED touch display module according to claim 1, wherein the OLED display panel includes a plurality of sub-display panels; after the step 3, the method further includes a step 4: plating After finishing the touch electrode pattern, the OLED display panel is cut to form multiple semi-finished products of 0 LED touch display modules;

Step 5: Separately remove the photoresist covering the touch electrode pattern on each semi-finished OLED touch display module to form an OLED touch display module.

[Claim 9] The method for manufacturing an OLED touch display module according to claim 1, wherein the touch electrode layer is formed on a side of the OLED substrate facing away from the OLED package cover.

[Claim 10] The method for manufacturing the OLED touch display module according to claim 1, characterized in that between step 1 and step 2 further comprises: sealing the edge of the OLED display panel