WO2020107518A1 - 一种可实现激光光束匀化功能的光学系统 - Google Patents

一种可实现激光光束匀化功能的光学系统 Download PDF

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WO2020107518A1
WO2020107518A1 PCT/CN2018/119816 CN2018119816W WO2020107518A1 WO 2020107518 A1 WO2020107518 A1 WO 2020107518A1 CN 2018119816 W CN2018119816 W CN 2018119816W WO 2020107518 A1 WO2020107518 A1 WO 2020107518A1
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optical system
realizing
laser beam
lens
light
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任策
倪强
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福州高意光学有限公司
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0966—Cylindrical lenses

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  • the invention relates to the fields of biomedicine and optical surveying and mapping, in particular to an optical system capable of realizing the function of laser beam homogenization.
  • Unidirectional laser spot homogenization is generally achieved by using collimating lenses and Powell prisms, but this solution is suitable for the shaping of long line spots (usually longer than 1mm).
  • An object of the present invention is to provide an optical system that can realize the laser beam homogenization function to achieve a small light spot.
  • the present invention adopts the following technical solutions:
  • An optical system capable of realizing laser beam homogenization function which sequentially includes a laser light source, a collimating system, a spot shaping system and a focusing system along the light propagation path. After the light emitted by the laser light source is collimated by the collimating system, The beam shaping system performs shaping in one direction, and then the light intensity in this direction is homogenized from the Gaussian to the flat top through the focusing system, and the light intensity perpendicular to the above direction maintains the Gaussian distribution.
  • the light spot shaping system may be a combination of at least two cylindrical mirrors.
  • the light spot shaping system may be a non-cylindrical lens, one side of the non-cylindrical lens is a non-cylindrical surface, and the other side is a flat or cylindrical surface.
  • ⁇ 1 to ⁇ 8 are the coefficients of each order
  • r is the vertical distance from a point on the curve to the center axis of the curve
  • c is the reciprocal of the radius of curvature
  • k is the conic coefficient of the curved surface.
  • the collimating system is a single spherical lens, an aspheric lens or a combined lens system.
  • the focusing system is a spherical lens, an aspheric lens, or a combined lens system.
  • changing the focal lengths of the collimating system and the focusing system can realize the output of different spot sizes in the Gaussian distribution direction.
  • the present invention adopts the above technical scheme to use multiple cylindrical lenses or non-cylindrical lenses to achieve a single-direction flat-top light output with small light spot requirements (the length of the homogenizing direction is less than 1mm), and cooperates with the collimating system and focusing system to achieve additional Gaussian distribution of the light spot in one direction.
  • FIG. 1 is a schematic diagram of Embodiment 1 of the present invention.
  • Embodiment 3 is a schematic diagram of a vertical light intensity distribution curve of Embodiment 1;
  • Example 4 is a schematic diagram of a horizontal light intensity distribution curve of Example 1;
  • FIG. 5 is a schematic diagram of Embodiment 2 of the present invention.
  • Example 6 is a light intensity distribution diagram of Example 2.
  • FIG. 7 is a schematic diagram of a vertical light intensity distribution curve of Embodiment 2.
  • Embodiment 8 is a schematic diagram of a horizontal light intensity distribution curve of Embodiment 2.
  • the present invention can realize an optical system for laser beam homogenization function, which includes a laser light source 1, a collimating system 2, a spot shaping system 3, and a focusing system 4 in sequence along the light propagation path.
  • the light emitted by the light source 1 is collimated by the collimating system 2 and then shaped by the spot shaping system 3 in one direction, and then by the focusing system 4 to achieve the homogenization of the light intensity in this direction from Gauss to flat top, which is perpendicular to the above direction
  • the intensity of the light remains Gaussian.
  • the collimating system 2 may be a single spherical lens, an aspheric lens or a combined lens system.
  • the focusing system 4 may be a spherical lens, an aspheric lens, or a combined lens system.
  • the spot shaping system 3 is a combination of at least two cylindrical mirrors.
  • the light intensity distribution diagram and the light intensity distribution curves in two directions are shown in Figure 2-4.
  • the spot shaping system 3 is a non-cylindrical lens, one side of the non-cylindrical lens is non-cylindrical, and the other side is flat or cylindrical.
  • the light intensity distribution diagram and the light intensity distribution curves in two directions are shown in Figure 6-8.
  • ⁇ 1 to ⁇ 8 are the coefficients of each order
  • r is the vertical distance from a point on the curve to the center axis of the curve
  • c is the reciprocal of the radius of curvature
  • k is the conic coefficient of the curved surface.
  • the present invention uses multiple cylindrical lenses or non-cylindrical lenses to achieve a single-direction flat-top light output with small light spot requirements (the length of the homogenizing direction is less than 1 mm), and cooperates with the collimating system 2 and the focusing system 4 to achieve another direction Gaussian distribution of light spots.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)

Abstract

一种可实现激光光束匀化功能的光学系统，其沿光的传播路径依序包括激光光源(1)、准直系统(2)、光斑整形系统(3)和聚焦系统(4)，激光光源(1)发出的光通过准直系统(2)准直后，经过光斑整形系统(3)进行一个方向的整形，之后经过聚焦系统(4)实现这个方向的光强从高斯到平顶的匀化，与此同时，与这个方向相垂直的光强则保持高斯分布。采用以上结构，可以实现小光斑要求(匀化方向长度小于1mm)的单方向平顶光输出。

Description

一种可实现激光光束匀化功能的光学系统 技术领域
本发明涉及生物医疗及光学测绘领域，尤其涉及一种可实现激光光束匀化功能的光学系统。
背景技术
激光光斑单方向匀化一般采用准直透镜加上Powell棱镜实现，但是该方案适用于需要较长的线斑的整形(通常长度大于1mm)。
发明内容
本发明的目的在于提供一种实现小光斑要求的可实现激光光束匀化功能的光学系统。
为实现上述目的，本发明采用以下技术方案：
一种可实现激光光束匀化功能的光学系统，其沿光的传播路径依序包括激光光源、准直系统、光斑整形系统和聚焦系统，激光光源发出的光通过准直系统准直后，经过光斑整形系统进行一个方向的整形，之后经过聚焦系统实现这个方向的光强从高斯到平顶的匀化，与上述方向相垂直的光强则保持高斯分布。
进一步的，所述光斑整形系统可以为至少两个的柱面镜组合。
进一步的，所述光斑整形系统可以为非柱面透镜，该非柱面透镜的一面为非柱面，另外一面为平面或者柱面。
进一步的，所述非柱面的曲线方程为：
Figure PCTCN2018119816-appb-000001
其中，z为曲线坐标方程，α 1至α 8为各阶系数，r为曲线上的一点到曲线中心轴的垂直距离，c为曲率半径的倒数，k为曲面的圆锥系数。
进一步的，所述准直系统为单球面透镜、非球面透镜或者组合透镜系统。
进一步的，所述聚焦系统为球面透镜、非球面透镜或者组合透镜系统。
进一步的，改变准直系统和聚焦系统的焦距，可实现高斯分布方向不同的光斑大小输出。
本发明采用以上技术方案利用多片柱面镜或者非柱面镜片，来实现小光斑要求(匀化方向长度小于1mm)的单方向平顶光输出，并配合准直系统和聚焦系统，实现另外一个方向光斑的高斯分布。
附图说明
以下结合附图和具体实施方式对本发明做进一步详细说明：
图1为本发明实施例一的示意图；
图2为实施例一的光强分布图；
图3为实施例一的竖直方向的光强分布曲线示意图；
图4为实施例一的水平方向的光强分布曲线示意图；
图5为本发明实施例二的示意图。
图6为实施例二的光强分布图；
图7为实施例二的竖直方向的光强分布曲线示意图；
图8为实施例二的水平方向的光强分布曲线示意图。
具体实施方式
如图1或图5所示，本发明可实现激光光束匀化功能的光学系统，其沿光的传播路径依序包括激光光源1、准直系统2、光斑整形系统3和聚焦系统4，激光光源1发出的光通过准直系统2准直后，经过光斑整形系统3进行一个方向的整形，之后经过聚焦系统4实现这个方向的光强从高斯到平顶的匀化，与上述方向相垂直的光强则保持高斯分布。
其中，准直系统2可以为单球面透镜、非球面透镜或者组合透镜系统等。聚焦系统4可以为球面透镜、非球面透镜或者组合透镜系统。
另外，可通过改变准直系统2和聚焦系统4的焦距，可实现高斯分布方向不同的光斑大小输出。
实施例1，如图1所示，光斑整形系统3为至少两个的柱面镜组合。其中光强分布图和两个方向的光强分布曲线如图2-4所示。
实施例2，如图5所示，光斑整形系统3为非柱面透镜，该非柱面透镜的一面为非柱面，另外一面为平面或者柱面。其中光强分布图和两个方向的光强分布曲线如图6-8所示。
非柱面的曲线方程为：
Figure PCTCN2018119816-appb-000002
其中，z为曲线坐标方程，α 1至α 8为各阶系数，r为曲线上的一点到曲线中心轴的垂直距离，c为曲率半径的倒数，k为曲面的圆锥系数。
本发明利用多片柱面镜或者非柱面镜片，来实现小光斑要求(匀化方向长度小于1mm)的单方向平顶光输出，并配合准直系统2和聚焦系统4，实现另外一个方向光斑的高斯分布。
尽管结合优选实施方案具体展示和介绍了本发明，但所属领域的技术人员应该明白，在不脱离所附权利要求所限定的本发明的精神和范围内，在形式上和细节上对本发明所做出的各种变化，均为本发明的保护范围。

Claims (7)

  1. 一种可实现激光光束匀化功能的光学系统，其特征在于：其沿光的传播路径依序包括激光光源、准直系统、光斑整形系统和聚焦系统，激光光源发出的光通过准直系统准直后，经过光斑整形系统进行一个方向的整形，之后经过聚焦系统实现这个方向的光强从高斯到平顶的匀化，与此同时，与上述方向相垂直的光强则保持高斯分布。
  2. 根据权利要求1所述的一种可实现激光光束匀化功能的光学系统，其特征在于：所述光斑整形系统可以为至少两片柱面投镜的组合。
  3. 根据权利要求1所述的一种可实现激光光束匀化功能的光学系统，其特征在于：所述光斑整形系统可以为非柱面透镜，该非柱面透镜的一面为非柱面，另外一面为平面或者柱面。
  4. 根据权利要求3所述的一种可实现激光光束匀化功能的光学系统，其特征在于：所述非柱面的曲线方程为：
    Figure PCTCN2018119816-appb-100001
    其中，z为曲线坐标方程，α 1至α 8为各阶系数，r为曲线上的一点到曲线中心轴的垂直距离，c为曲率半径的倒数，k为曲面的圆锥系数。
  5. 根据权利要求1所述的一种可实现激光光束匀化功能的光学系统，其特征在于：所述准直系统为单球面透镜、非球面透镜或者组合透镜系统。
  6. 根据权利要求1所述的一种可实现激光光束匀化功能的光学系统，其特征在于：所述聚焦系统为球面透镜、非球面透镜或者组合透镜系统。
  7. 根据权利要求1所述的一种可实现激光光束匀化功能的光学系统，其特征在于：改变准直系统和聚焦系统的焦距，可实现高斯分布方向不同的光斑大小输出
PCT/CN2018/119816 2018-11-30 2018-12-07 一种可实现激光光束匀化功能的光学系统 WO2020107518A1 (zh)

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CN114967162A (zh) * 2022-05-06 2022-08-30 西安炬光科技股份有限公司 光学整形模组、装置及激光雷达系统
CN116184681B (zh) * 2023-04-27 2023-08-04 成都莱普科技股份有限公司 二氧化碳激光的光束整形设备以及光束整形方法

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