WO2020093733A1 - 一种静电式自供能位移栅格传感器 - Google Patents

一种静电式自供能位移栅格传感器 Download PDF

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Publication number
WO2020093733A1
WO2020093733A1 PCT/CN2019/097708 CN2019097708W WO2020093733A1 WO 2020093733 A1 WO2020093733 A1 WO 2020093733A1 CN 2019097708 W CN2019097708 W CN 2019097708W WO 2020093733 A1 WO2020093733 A1 WO 2020093733A1
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displacement
slide
sliding
sensor
sensing unit
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PCT/CN2019/097708
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English (en)
French (fr)
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张鹤
汪华钢
张治成
全力威
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浙江大学
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Priority to JP2020551342A priority Critical patent/JP2021516345A/ja
Priority to US16/978,189 priority patent/US11402293B2/en
Publication of WO2020093733A1 publication Critical patent/WO2020093733A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
    • G01M5/0041—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining deflection or stress

Definitions

  • the invention relates to an electrostatic self-powered displacement grid sensor.
  • Displacement measuring instruments are widely used in displacement measurement of bridges, railways, dams and various construction facilities. At present, the commonly used displacement measuring instruments mainly include dial indicator, resistance displacement meter, vibrating wire sensor and so on.
  • the dial indicator due to the limitation of the label length and installation, it is limited in practical applications; if the resistance displacement meter is used, it has non-linearity, the output signal is weak, the anti-interference ability is poor, and it is greatly affected by the environment ; If the vibrating wire sensor is used, the sensor material and processing technology have higher requirements and the measurement accuracy is lower.
  • the technical problem to be solved by the present invention is to provide an electrostatic self-powered displacement grid sensor, which can be used for the measurement of structural displacement without additional energy supply, and can transform the deformation energy of the component to be measured into electrical energy in the form of electrical signals
  • the output also has the characteristics of high precision, wide application range, easy processing and easy operation.
  • an electrostatic self-powered displacement grid sensor for measuring the displacement between two components to be measured, including a U-shaped chute, and the slot of the chute A slide is inserted; the slide is parallel to the bottom surface of the slide, and the length of the slide is longer than the length of the slide; one end of the slide is used to be fixed to the member to be tested; a slide plate perpendicular to the slide is fixed on the inner side of the slide ; The sliding plate is perpendicular to the sliding direction of the sliding plate; both ends of the sliding groove have an outwardly extending limit block for limiting the slide plate, and the limit block at one end is used to fix another member to be tested ;
  • the inner bottom surface of the chute is provided with a sensor array composed of a plurality of strip-shaped sensor units parallel to the slide plate; the end of the slide plate also has a strip-shaped sensor unit; the sensor units in the sensor array and The sensing unit at the end of the skateboard is composed of a metal electrode layer and
  • both the limit block and the sliding piece are fixed to the member to be tested by an adhesive.
  • the member to be measured fixed to the slider and the member to be fixed fixed to the limit block are respectively located on both sides of the sensor, and the relative displacement between the two members to be measured is measured.
  • the indicator light and the ammeter are integrated on the back of the chute.
  • the sliding groove, the sliding plate and the sliding plate are all made of insulating material.
  • each sensing unit in the sensing array is the same, and the distance between two adjacent sensing units is the same as the width of the sensing unit.
  • the thickness of the sliding plate is the same as the width of the sensing unit.
  • the height of the two limiting blocks is the same, which is greater than the thickness of the bottom plate of the chute, and the width thereof is equal to the width of the bottom plate of the chute.
  • the fixed position of the sliding board is two thirds of the length of the sliding plate.
  • ⁇ x 1 (t) (
  • -1) ⁇ l 0 , where k represents the number of the bright indicator light, l 0 is the width of the sensing unit; ⁇ x 2 (t) f (IR k ), R k represents The resistance of the k-th indicator light, I represents the number of currents, and f () is a function of the displacement between two sensor units in contact with each other and the output voltage.
  • the beneficial effect of the present invention is that the present invention can convert the mechanical law of displacement of a member into an electrical signal according to its force-electricity conversion characteristics, and passes through the signal processing device in the device. Therefore, the output device can express the magnitude of the displacement with an electrical signal And output.
  • the electrostatic self-powered displacement grid sensor has the advantages of simple structure, wide application range, high measurement accuracy, no need to provide additional power, etc., and creatively solves the unstable result of positioning displacement according to the electrical signal standard The problem.
  • Figure 1 is a structural diagram of an electrostatic self-powered displacement grid sensor
  • FIG. 2 is a schematic diagram of the installation of the displacement sensor shown in FIG. 1 on the member to be measured;
  • FIG. 3 is a measurement state when the object to be measured in the installation schematic diagram shown in FIG. 2 is close to the fixed surface;
  • FIG. 4 is a measurement state when the object to be measured in the installation schematic diagram shown in FIG. 2 is away from the fixed surface;
  • FIG. 5 is a circuit diagram of the displacement sensor shown in FIG. 1 used for electrical signal measurement
  • the invention provides an electrostatic self-powered displacement grid sensor, which includes a U-shaped chute, a slide is inserted at the slot of the slide; the slide is parallel to the bottom of the slide, and the length of the slide is greater than the length of the slide; One end of the sliding plate is used to be fixed to the member to be tested; the inner side of the sliding plate is fixed with a sliding plate sliding groove 21 sliding groove perpendicular to the sliding plate; the sliding plate sliding groove 21 sliding groove is perpendicular to the sliding direction of the sliding plate; Two ends of the sliding groove are provided with outwardly extending limiting block sliding grooves 3 sliding grooves, which are used to limit the sliding grooves of the sliding plate sliding grooves 21 to prevent the sliding piece 2 from sliding out of the sliding grooves.
  • the limit block at one end is used to fix another member to be tested;
  • the inner bottom surface of the slide groove is provided with a sensor array composed of a plurality of strip-shaped sensing units parallel to the slide groove of the slide plate 21;
  • the slide plate slides
  • the slot 21 at the end of the chute also has a strip-shaped sensing unit;
  • the sensing unit in the sensing array and the sensing unit at the end of the slide plate are composed of a metal electrode layer and a dielectric material layer, and the transmission in the sensing array
  • the dielectric material layers of the sensing unit and the sensing unit at the end of the sliding plate are in contact with each other and have opposite polarities.
  • the installation form is shown in Figure 2 (the slide slot is fixed to the fixed end, and the slide is fixed to the member to be tested).
  • the electrical signal measuring device and related connecting wires are integrated at the bottom of the chute. Adhesive can be used for the connection between the sensor and the component, but it is not limited to this.
  • the width of each sensing unit in the sensing array is the same, and the distance between two adjacent sensing units is the same as the width of the sensing unit.
  • the thickness of the sliding plate 21 is the same as the width of the sensing unit, which is convenient for measurement.
  • each sensor unit on the sensor array in this structure is numbered symmetrically from the middle to both sides, and the number is 1 on the side of the longer limit block away from the chute Number to n; on the side of the longer limit block near the chute, the number is -1 to -n.
  • Each sensor unit also has an indicator light, and the indicator number is the same as the sensor unit number.
  • the sensing unit at the lower end of the slider is connected to the sensing unit in each chute through a wire to form an indicator circuit.
  • Each indicator circuit is independent of each other, does not affect each other, and is connected in parallel.
  • Each circuit will be provided with Corresponding indicator.
  • An ammeter is arranged in the main circuit of the detection circuit. When the slider slides through the No.
  • the sensor unit in the chute and the sensor unit at the lower end of the slider can be regarded as an independent power supply.
  • the power supply can make the corresponding indicator light. It is known that the length of each cell of the sensor unit in the chute is l 0.
  • the indicator with a negative number lights up it means that the object to be measured is close to the fixed surface; when the indicator with a positive number lights up, it means that the object to be measured is far from the fixed surface.
  • the second displacement amount ⁇ x 2 (t) of the member can be obtained from the relationship between V (t) and x (t) obtained as follows.
  • the amount of component compression is x (t), that is, the relative displacement of the first electrode layer and the second electrode layer is x ( t).
  • x (t) represents the relative displacement between electrode plates coated with two dielectric materials.
  • x (t) changes from 0 to the maximum.
  • the electrode plates are charged, and the surfaces of the two electrode plates obtain opposite static charges with equal charge density ⁇ (produced by contact friction) Charge density).
  • the electric charge generates current through the external circuit.
  • d0 d1 / ⁇ r1 + d2 / ⁇ r2 is the equivalent thickness of the dielectric material
  • l is the length of the dielectric material coated on the electrode plate
  • w is the width of the dielectric material on a single sensing unit
  • ⁇ 0 is the vacuum dielectric Electric constant.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

一种静电式自供能位移栅格传感器，用于测量待测构件的位移，包括滑槽（1）和滑片（2），滑槽（2）固定于固定端，且滑槽（2）内侧底部布置有传感阵列；滑片（1）固定连接待测构件，滑片（1）下端部与滑槽（2）内侧底部相接触。当滑片（1）划过传感阵列时，将会输出一个对应的电信号，通过该信号所示的传感阵列中的传感单元的编号和输出电流大小，可得到滑片（1）划过的分段个数和在单个传感阵列上的传感单元上划过的距离，进而来求得结构位移。相比其他位移测量装置来说，分段位移计具有结构简单、应用范围广、测量精度高、无需额外提供电源等优点，并且创造性地解决了按电信号标定位移的结果不稳定的问题。

Description

一种静电式自供能位移栅格传感器 技术领域
本发明涉及用于一种静电式自供能位移栅格传感器。
背景技术
在强震、强风、交通荷载等振动作用下土木工程结构的失效导致了严重的社会损失，所以必须要通过加强对建筑物结构振动的位移监测，来确保其安全性和可行性。结构的位移测试是工程人员进行结构优化设计，了解结构受力状态以及保证结构安全的一个很重要的环节。位移测量仪器广泛地应用于桥梁、铁路、大坝以及各种建筑设施的位移测量。目前常用的位移测量仪器主要有千分表、电阻位移计、振弦式传感器等等。其中，如采用千分表，由于标注长度以及安装的限制，在实际应用中受限较大；如采用电阻位移计，具有非线性，输出信号微弱，抗干扰能力较差，受环境影响较大；如采用振弦式传感器，则对传感器材料及加工工艺要求较高，且测量精度较低。
发明内容
本发明所要解决的技术问题是提供一种静电式自供能位移栅格传感器，能够用于结构位移的测量，并且无需额外提供能源，能够将待测构件变形能转化为电能并以电信号的形式输出，同时还具备精度高、应用范围广、易加工和操作简便的特点。
本发明解决技术问题所采用的技术方案是：一种静电式自供能位移栅格传感器，用于测量两个待测构件之间的位移，包括一U形的滑槽，滑槽的槽口处插有一滑片；滑片与滑槽底面平行，且滑片长度大于滑槽长度；滑片的一端用于固定于待测构件；所述滑片内侧面固定一垂直于所述滑片的滑板；滑板与所述滑片的滑动方向垂直；所述滑槽的两端具有一向外延伸的限位块，用于对滑板进行限位，同时一端的限位块用于固定另一待测构件；滑槽内底面布置有由多个平行于所述滑板的条状传感单元组成的传感阵列；所述滑板末端也具有条状传感单元；所述传感阵列中的传感单元以及滑板末端的传感单元具有金属电极层和介电材料层组成，且所述传感阵列中的传感单元以及滑板末端的传感单元的介电材料层相互接触，且极性相反。滑板末端的金属电极层与电流表相连后，与多个并联在一起的指示灯相连，其中每个指示灯都与传感阵列中的一个传感单元的电极层相连接。
进一步地，所述限位块与滑片都通过胶黏剂固定于待测构件。
进一步地，固定于滑片的待测构件和固定于限位块的待测构件分别位于所述传感器的两侧，测得两个待测构件之间的相对位移。
进一步地，所述指示灯和电流表均集成在所述滑槽的背面。
进一步地，所述的滑槽、滑片与滑板均由绝缘材料制成。
进一步地，传感阵列中的各个传感单元宽度相同，且相邻两个传感单元之间的间距与传感单元的宽度相同。滑板的厚度与所述传感单元的宽度相同。
进一步地，所述的限位块，两块限位块的高度相同，均大于滑槽底板的厚度，且其宽度等与滑槽底板的宽度。
进一步地，所述的滑板，其固定位置为滑片长度的三分之二处。
进一步地，t时刻的位移值通过以下公式计算得到：Δx(t)＝Δx 1(t)+Δx 2(t)；Δx 1(t)表示粗位移，通过指示灯的位置来确定；Δx 2(t)表示精细位移，根据电流值来确定。
Δx 1(t)＝(|k|-1)×l 0，其中k表示亮的指示灯的序号，l 0为传感单元宽度；Δx 2(t)＝f(IR k),R k表示第k个指示灯的电阻，I表示电流表示数，f()为两个相互接触的传感单元之间的位移与输出电压的函数关系式。
本发明的有益效果是：本发明可以根据其力电转换特性将构件发生位移时的力学规律转化为电信号，经过该装置中的信号处理装置，因此通过输出装置能够将位移大小用电信号表示并输出。相比其他位移测量装置来说，静电式自供能位移栅格传感器具有结构简单、应用范围广、测量精度高、无需额外提供电源等优点，并且创造性地解决了按电信号标定位移的结果不稳定的问题。
附图说明
图1是静电式自供能位移栅格传感器的结构图；
图2是图1所示位移传感器在待测构件上的安装示意图；
图3是图2所示安装示意图的待测物体与固定面靠近时的测量状态；
图4是图2所示安装示意图的待测物体与固定面远离时的测量状态；
图5是图1所示位移传感器用于电信号测量的电路图；
图中标号：1-滑槽；2-滑片；21-滑板；3-限位块；l 0-传感器上一个栅格电极与其相邻段的宽度之和；△x(t)-构件的位移总量；Δx 1(t)-构件第一位移量；Δx 2(t)-构件第二位移量。
具体实施方式
以下结合附图，对发明的具体技术方案作进一步描述。
本发明提供一种静电式自供能位移栅格传感器，包括一U形的滑槽，滑槽 的槽口处插有一滑片；滑片与滑槽底面平行，且滑片长度大于滑槽长度；滑片的一端用于固定于待测构件；所述滑片内侧面固定一垂直于所述滑片的滑板滑槽21滑槽；滑板滑槽21滑槽与所述滑片的滑动方向垂直；所述滑槽的两端具有一向外延伸的限位块滑槽3滑槽，用于对滑板滑槽21滑槽进行限位，避免滑片2滑出滑槽。同时一端的限位块用于固定另一待测构件；滑槽内底面布置有由多个平行于所述滑板滑槽21滑槽的条状传感单元组成的传感阵列；所述滑板滑槽21滑槽末端也具有条状传感单元；所述传感阵列中的传感单元以及滑板末端的传感单元具有金属电极层和介电材料层组成，且所述传感阵列中的传感单元以及滑板末端的传感单元的介电材料层相互接触，且极性相反。滑板滑槽21滑槽末端的金属电极层与电流表相连后，与多个并联在一起的指示灯相连，其中每个指示灯都与传感阵列中的一个传感单元的电极层相连接。如图1与图5所示。
安装形式如图2所示(滑槽固定于固定端，滑片固定于待测构件)。电信号测量装置及相关的连接导线集成在滑槽的底部。传感器与构件连接可以采用胶黏剂，但不限于此。
作为优选的方案，传感阵列中的各个传感单元宽度相同，且相邻两个传感单元之间的间距与传感单元的宽度相同。滑板21的厚度与所述传感单元的宽度相同，方便测量。
本发明的静电式自供能位移栅格传感器实现位移测量的原理如下：
如图5所示，本结构中的传感阵列上每个传感单元都有编号，从正中间向两侧对称进行编号，在远离滑槽上的较长的限位块侧，编号为1号到n号；在靠近滑槽上的较长的限位块侧，编号为-1到-n号。每个传感单元也都对应有一个指示灯，指示灯的编号与传感单元编号相同。滑片下端的传感单元分别与每个滑槽中的传感单元通过导线相连，形成一条指示电路，各个指示电路都相互独立，互不影响，并联在一起，且每条电路中都会设有对应的指示灯。在该检测电路的总路中布置有一电流表。当滑片划过滑槽中的第k号传感单元时，将会产生一定的电势差，此时可将滑槽中的该传感单元与滑片下端传感单元视为一个独立电源，通过该电源供电能使对应的指示灯点亮。已知滑槽中的传感单元每一格的长度为l 0，当k号指示灯点亮时，则可得出构件第一位移量Δx 1(t)＝(|k|-1)×l 0。当编号为负数的指示灯点亮时，说明待测物体与固定面靠近；当编号为正数的指示灯点亮时，说明待测物体与固定面远离。
同上所述，滑片划过滑槽中的k号传感单元时，也会对应输出一个I(t)。已知各个指示灯的电阻均为R，则可以计算得到电压V(t)＝R×|I(t)|。又可根 据如下推到所得的V(t)与x(t)的关系式，可求出构件第二位移量Δx 2(t)。
以图3所示的待测物体靠近固定端的测量状态为例，在某一时刻t时，构件压缩量为x(t)，即第一电极层与第二电极层的相对位移量为x(t)。
在静电式自供能位移传感器中，两种介电材料的厚度分别为d1和d2，两者的相对介电常数分别为εr1和εr2。x(t)代表涂有两种介电材料的电极板之间的相对位移。当位移传感器装置工作时，x(t)从0到最大变化。当两个涂有介电材料的电极板无相对位移(即x(t)＝0)，电极板充电，两个电极板的表面获得相反的静电荷，具有相等的电荷密度σ(接触摩擦产生的电荷密度)。并且当两电极板产生相对位移时，电荷经外加电路产生电流。当负载电阻给定为R时，电荷量Q的表达式为：
Figure PCTCN2019097708-appb-000001
其中d0＝d1/εr1+d2/εr2，为介电材料的等效厚度，l为电极板上涂有介电材料的长度，w为单个传感单元上介电材料的宽度，ε0为真空介电常数。
因而电压可表示为：
Figure PCTCN2019097708-appb-000002
联立(1)(2)三式，可以得到电压与位移量x(t)在某时刻t存在映射关系，即某时刻t，通过测量电压V(t)，能够得出此刻的位移量从而通过测量电路将位移大小表达为电信号。
图4所示的待测物体远离固定端的测量状态原理与上述相同。
此时即可得位移总量△x(t)＝Δx 1(t)+Δx 2(t)。

Claims (9)

  1. 一种静电式自供能位移栅格传感器，用于测量待测构件的位移，其特征是，包括一U形的滑槽(1)，滑槽(1)的槽口处插有一滑片(2)；滑片(2)与滑槽(1)底面平行，且滑片长度大于滑槽长度；滑片的一端用于固定于待测构件；所述滑片(2)内侧面固定一垂直于所述滑片(2)的滑板(21)；滑板(21)与所述滑片的滑动方向垂直；所述滑槽(1)的两端具有一向外延伸的限位块(3)，用于对滑板(21)进行限位，同时一端的限位块用于固定另一待测构件；滑槽(1)内底面布置有由多个平行于所述滑板(21)的条状传感单元组成的传感阵列；所述滑板(21)末端也具有条状传感单元；所述传感阵列中的传感单元以及滑板末端的传感单元具有金属电极层和介电材料层组成，且所述传感阵列中的传感单元以及滑板末端的传感单元的介电材料层相互接触，且极性相反。滑板(21)末端的金属电极层与电流表相连后，与多个并联在一起的指示灯相连，其中每个指示灯都与传感阵列中的一个传感单元的电极层相连接。
  2. 根据权利要求1所述的传感器，其特征是，所述限位块(3)与滑片都通过胶黏剂固定于待测构件。
  3. 根据权利要求1所述的传感器，其特征是，固定于滑片的待测构件和固定于限位块(3)的待测构件分别位于所述传感器的两侧，测得两个待测构件之间的相对位移。
  4. 根据权利要求1所述的传感器，其特征是，所述指示灯和电流表均集成在所述滑槽的背面。
  5. 根据权利要求1所述的传感器，其特征是，所述的滑槽(1)、滑片(2)与滑板(21)均由绝缘材料制成。
  6. 根据权利要求1所述的传感器，其特征是，传感阵列中的各个传感单元宽度相同，且相邻两个传感单元之间的间距与传感单元的宽度相同。滑板(21)的厚度与所述传感单元的宽度相同。
  7. 根据权力要求1所述的传感器，其特征是，所述的限位块(5)，两块限位块的高度相同，均大于滑槽底板的厚度，且其宽度等与滑槽底板的宽度。
  8. 根据权力要求1所述的传感器，其特征是，所述的滑板(21)，其固定位置为滑片(2)长度的三分之二处。
  9. 根据权利要求1所述的传感器，其特征是，t时刻的位移值通过以下公式计算得到：Δx(t)＝Δx 1(t)+Δx 2(t)；Δx 1(t)表示粗位移，通过指示灯的位置来确定；Δx 2(t)表示精细位移，根据电流值来确定。
    Δx 1(t)＝(|k|-1)×l 0，其中k表示亮的指示灯的序号，l 0为传感单元宽度； Δx 2(t)＝f(IR k),R k表示第k个指示灯的电阻，I表示电流表示数，f()为两个相互接触的传感单元之间的位移与输出电压的函数关系式。
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