WO2020093277A1 - Chip and electrical equipment - Google Patents

Chip and electrical equipment Download PDF

Info

Publication number
WO2020093277A1
WO2020093277A1 PCT/CN2018/114390 CN2018114390W WO2020093277A1 WO 2020093277 A1 WO2020093277 A1 WO 2020093277A1 CN 2018114390 W CN2018114390 W CN 2018114390W WO 2020093277 A1 WO2020093277 A1 WO 2020093277A1
Authority
WO
WIPO (PCT)
Prior art keywords
power supply
pad
supply area
pin
metal plate
Prior art date
Application number
PCT/CN2018/114390
Other languages
French (fr)
Chinese (zh)
Inventor
杨帅
郭函
Original Assignee
北京比特大陆科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 北京比特大陆科技有限公司 filed Critical 北京比特大陆科技有限公司
Priority to PCT/CN2018/114390 priority Critical patent/WO2020093277A1/en
Publication of WO2020093277A1 publication Critical patent/WO2020093277A1/en

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Definitions

  • This application relates to the field of electrical equipment, such as a chip and electrical equipment.
  • a circuit board and a chip mounted on the circuit board are provided in the electrical equipment, and the chip is electrically connected to the circuit on the circuit board.
  • the chip includes a wafer and a substrate, and the wafer has a first power supply area and a second power supply area spaced apart; each of the first power supply area and the second power supply area has a plurality of pads, and each The pad is electrically connected to a pin on the substrate, the substrate is connected to the circuit board, and the pins on the substrate are electrically connected to the circuit on the circuit board to realize the connection between the chip and the circuit board.
  • An embodiment of the present disclosure provides a chip, including: a substrate and a wafer mounted on the substrate;
  • the wafer has a first power supply area and a second power supply area spaced apart, the first power supply area includes a first pad and a second pad, and the second power supply area includes a second pad and a third Pad
  • the wafer is disposed on a mounting surface on the substrate;
  • the substrate includes a bottom metal plate facing away from the mounting surface, at least one intermediate metal plate disposed parallel to and spaced from the bottom metal plate, and disposed on Insulation plate between adjacent metal plates;
  • the bottom metal plate is provided with a power supply pin, a ground pin and a first power pin;
  • a first conductive hole and a second conductive hole penetrating the substrate are provided at intervals on the substrate, and an end of the first conductive hole facing the mounting surface is connected to the first pad in the first power supply area, The end of the first conductive hole facing away from the mounting surface is connected to the power supply pin; the end of the second conductive hole facing the mounting surface is connected to the third pad in the second power supply area. The end of the second conductive hole facing away from the mounting surface is connected to the ground pin; the second pad in the first power supply area and the second pad in the second power supply area are located between The first circuit on the intermediate metal plate is connected, and the first circuit is electrically connected to the first power pin through a first connection hole.
  • the wafer further includes a third power supply area, and the third power supply area is spaced apart from the first power supply area and the second power supply area, and the third power supply area It includes a third pad and a fourth pad; the fourth pad in the third power supply area is connected to the end of the second conductive hole facing the mounting surface, and the third solder in the third power supply area
  • the disk and the third pad in the second power supply area are connected by a second circuit on the middle metal plate; the bottom metal plate is also provided with a second power pin, the second circuit The second power pin is electrically connected through the second connection hole.
  • the wafer further includes a fourth power supply area, and the fourth power supply area is spaced apart from the first power supply area, the second power supply area, and the third power supply area ,
  • the fourth power supply area includes a fourth pad and a fifth pad; the fifth pad in the fourth power supply area is connected to an end of the second conductive hole facing the mounting surface, the fourth The fourth pad in the power supply area and the fourth pad in the third power supply area are connected by a third circuit located on the middle metal plate; the bottom metal plate is also provided with a third power supply Pin, the second circuit is electrically connected to the third power pin through a third connection hole.
  • the power supply pin and the ground pin are provided in the middle of the bottom metal plate, the first power pin, the second power pin, and the first Three power pins are located at the edge of the bottom metal plate.
  • the intermediate metal plate includes a first intermediate metal plate disposed toward the wafer, and a second intermediate metal between the first intermediate metal plate and the bottom metal plate Board, the second circuit is provided on the first intermediate metal plate, and the first circuit and the third circuit are provided on the second intermediate metal plate.
  • a first solder resist layer is provided on the mounting surface of the substrate, and a second solder resist layer is provided on the bonding surface of the substrate opposite to the mounting surface.
  • the first solder resist layer and the second solder resist layer are both insulating layers.
  • the chip further includes a package cover, which is provided on the wafer and connected to the mounting surface.
  • the packaging cover is a plastic cover or a ceramic cover or a metal cover.
  • An embodiment of the present disclosure also provides an electrical device, including: the chip as described above.
  • An embodiment of the present disclosure also provides a chip, including: a substrate and a wafer mounted on the substrate;
  • the first power supply area includes a first pad and a second pad, and the second power supply The area includes a second pad and a three pad;
  • the third power supply area includes a third pad and a fourth pad, and the fourth power supply area includes a fourth pad and a five pad;
  • the first pad in the first power supply area serves as a power input terminal, the second pad in the first power supply area is connected to the second pad in the second power supply area, and the first power supply area
  • the second pad in the area serves as the ground terminal of the first power supply area;
  • the second pad in the second power supply area serves as the power supply terminal of the second power supply area, and the third in the second power supply area
  • the pad is connected to the third pad in the third power supply area, and the third pad in the second power supply area serves as the ground terminal of the second power supply area;
  • the third in the third power supply area serves as a power end of the third power supply area, the fourth pad in the third power supply area is connected to the fourth pad in the fourth power supply area, and the fourth pad in the third power supply area
  • the pad serves as the ground terminal of the third power supply area;
  • the fourth pad in the fourth power supply area serves as the power supply terminal of the fourth power supply area, and the fifth pad in the fourth power supply area serves as the first 4.
  • the substrate includes a stacked first intermediate metal plate, a second intermediate metal plate, a bottom metal plate, and an insulating plate provided between adjacent metal plates, and the wafer is provided on a mounting surface on the substrate ;
  • the bottom metal plate is disposed away from the mounting surface and the bottom metal plate is provided with a power supply pin, a ground pin, a first power pin, a second power pin, and a third power pin;
  • Conductive holes are provided on the first intermediate metal plate and the second intermediate metal plate so that the power supply pin is connected to the first pad, the ground pin is connected to the fifth pad, and the first The power supply pin is connected to the second pad, the second power pin is connected to the third pad, and the third power pin is connected to the fourth pad.
  • the power supply pin and the ground pin are provided in the middle of the bottom metal plate; the first power pin, the second power pin, and the first Three power pins are provided at the edge of the bottom metal plate.
  • a first conductive hole and a second conductive hole penetrating the substrate are provided on the substrate at intervals, an end of the first conductive hole facing the mounting surface is connected to the first power supply
  • the first pad in the area is connected, and the end of the first conductive hole facing away from the mounting surface is connected to the power supply pin; the end of the second conductive hole facing the mounting surface is connected to the fourth power supply area
  • the fifth pad inside is connected, and the end of the second conductive hole facing away from the mounting surface is connected to the ground pin.
  • the first conductive hole and the second conductive hole are straight holes.
  • the first conductive hole and the second conductive hole are plural.
  • the first power pin is electrically connected to the second pad through the first connection hole
  • the second power pin is electrically connected to the third pad through the second connection hole.
  • the third power pin is electrically connected to the fourth pad through a third connection hole; the first connection hole, the second connection hole, and the third connection hole are all plural.
  • the wafer has a first power supply area and a second power supply area spaced apart, the first power supply area includes a first pad and a second pad, and the second power supply area includes a second The pad and the third pad.
  • the substrate includes a bottom metal plate facing away from the mounting surface, at least one intermediate metal plate disposed parallel to and spaced from the bottom metal plate, and an insulating plate disposed between adjacent metal plates.
  • the first pad in the first power supply area is connected to the power supply through the first conductive hole and the power supply pin on the substrate; the third pad in the second power supply area passes through the second conductive hole and the bottom layer
  • the ground pin on the metal plate is connected; the second pad in the first power supply area is connected to the second pad in the second power supply area through the first circuit on the substrate, and the first circuit is connected to the second pad on the bottom metal plate
  • a power pin connection compared with all the pads in the prior art that are connected to the pin, the second pad in the first power supply area and the second pad in the second power supply area in this embodiment are both
  • the first power pin connection can reduce the base
  • the number of power pins on the board simplifies the structure of the chip and reduces the production cost of the chip.
  • FIG. 1 is a schematic structural diagram of a chip provided by this embodiment
  • FIG. 2 is a schematic structural diagram of a wafer in a chip provided by this embodiment
  • FIG. 3 is a schematic structural diagram of a substrate in a chip provided by this embodiment
  • FIG. 4 is a schematic structural diagram of a first intermediate metal plate in this embodiment
  • FIG. 5 is a schematic structural diagram of a second intermediate metal plate in this embodiment
  • FIG. 6 is a schematic structural diagram of a bottom metal plate in this embodiment.
  • the first power supply area
  • FIG. 1 is a schematic diagram of the structure of the chip provided in this embodiment
  • FIG. 2 is a schematic diagram of the structure of the wafer in the chip provided in this embodiment
  • FIG. 3 is a schematic diagram of the structure of the substrate in the chip provided in this embodiment
  • the structure diagram of the first middle metal plate in FIG. 5 is the structure diagram of the second middle metal plate in this embodiment.
  • FIG. 6 is the structure diagram of the bottom metal plate in this embodiment.
  • This embodiment provides a chip, including: a substrate 20 and a wafer 10 mounted on the substrate 20; the wafer 10 has a first power supply area 101 and a second power supply area 102 spaced apart, the first power supply area 101 includes a A pad and a second pad, the second power supply area 102 includes a second pad and a third pad; the wafer 10 is provided on a mounting surface on the substrate 20; the substrate 20 includes an underlying metal plate 205 facing away from the mounting surface, At least one intermediate metal plate disposed parallel to and spaced from the bottom metal plate 205, and an insulating plate provided between adjacent metal plates.
  • the bottom metal plate 205 is provided with a power supply pin 2051, a ground pin 2052, and a first power supply Pin 2053; a first conductive hole 201 and a second conductive hole 202 penetrating through the substrate 20 are arranged at intervals on the substrate 20, an end of the first conductive hole 201 facing the mounting surface is connected to the first pad 1011 in the first power supply area, The end of the first conductive hole 201 facing away from the mounting surface is connected to the power supply pin 2051; the end of the second conductive hole 202 facing the mounting surface is connected to the third pad 1022 in the second power supply area, and the second conductive hole 202 facing away from the mounting surface One end is connected to the ground pin 2052 Connected; the second pad 1012 in the first power supply area and the second pad 1021 in the second power supply area are connected through a first circuit 2041 located on the middle metal plate, and the first circuit 2041 is connected through the first connection hole It is electrically connected to the first power pin 2053.
  • the first pad 1011 in the first power supply area and the second pad 1012 in the first power supply area may be metal sheets provided on the wafer 10 or bumps made of other conductive materials; the same
  • the second pad 1021 in the second power supply area and the third pad 1022 in the second power supply area are also metal sheets provided on the wafer 10 or bumps made of other conductive materials.
  • the power supply pin 2051 in this embodiment is connected to a power supply, which is located outside the wafer 10 and used to provide a higher potential to the first pad 1011 in the first power supply area through the power supply pin 2051 and the first conductive hole 201 installation.
  • the third pad 1022 in the second power supply area is grounded, wherein the potential of the third pad 1022 in the second power supply area may be zero, or the potential of the third pad 1022 in the second power supply area is not Is zero, as long as the third pad 1022 in the second power supply area has a reference potential to ensure that there is a certain distance between the first pad 1011 in the first power supply area and the third pad in the second power supply area 102 The voltage is sufficient so that the wafer 10 can work normally.
  • a computer core is provided in both the first power supply area 101 and the second power supply area 102.
  • the first pad 1011 in the first power supply area and the second pad 1012 in the first power supply area supply the first power supply
  • the computer core in the area 101 supplies power.
  • the second pad 1021 in the second power supply area and the third pad 1022 in the second power supply area supply power to the computer core in the second power supply area 102.
  • the first pad 1011 in the first power supply area as the power supply terminal potential of the first power supply area 101 is greater than the potential of the second pad 1012 in the first power supply area, and the second pad 1021 in the second power supply area as the first
  • the power supply terminal potential of the second power supply area 102 is greater than the potential of the third pad 1022 in the second power supply area, thereby supplying power to the computer cores in the first power supply area 101 and the second power supply area 102.
  • the voltages obtained by the computer cores in the first power supply area 101 and the second power supply area 102 may be equal, that is, the first pad 1011 in the first power supply area and the second pad 1012 in the first power supply area The voltage between them is equal to the voltage between the second pad 1021 in the second power supply area and the third pad 1022 in the second power supply area.
  • the first conductive hole 201 used to connect the first pad 1011 in the first power supply area and the power supply pin 2051 may be a via hole.
  • the first conductive hole 201 may also include a through hole formed on the substrate 20 Hole, and a metal post penetrated in the through hole; the end of the first conductive hole 201 facing the mounting surface of the substrate 20 is connected to the first pad 1011 in the first power supply area, and the first conductive hole 201 is facing the mounting of the substrate 20 One end of the bonding surface opposite to the surface is connected to the power supply pin 2051.
  • the second conductive hole 202 may also be a via hole, or the second conductive hole 202 includes a through hole opened in the substrate 20, and a metal post penetrated in the through hole; the second conductive hole 202 faces the mounting surface One end is connected to the second pad 1021 in the second power supply area, and the end of the second guide hole facing the bonding surface is connected to the ground pin 2052.
  • the second pad 1012 in the first power supply area and the second pad 1021 in the second power supply area may directly communicate with the first circuit 2041 connection; when the first circuit 2041 is located on another metal plate, the second pad 1012 in the first power supply area and the second pad 1021 in the second power supply area may be connected to the first circuit 2041 through a via.
  • the first circuit 2041 may be connected to the first power pin 2053 through the via between the middle metal plate and the bottom metal plate 205 where the first circuit 2041 is located, so as to connect the second pad 1012 and the second
  • the signal on the second pad 1021 in the power supply area is transmitted to the first power supply pin 2053.
  • the wafer 10 has a first power supply area 101 and a second power supply area 102 spaced apart.
  • the first power supply area 101 includes a first pad and a second pad
  • the second power supply area 102 includes a Two pads and a third pad
  • the substrate 20 includes a bottom metal plate 205 facing away from the mounting surface, at least one middle metal plate disposed parallel to and spaced from the bottom metal plate 205, and an insulating plate disposed between adjacent metal plates
  • the wafer 10 is provided on the mounting surface of the substrate 20; the first pad 1011 in the first power supply area is connected to the power supply through the first conductive hole 201 and the power supply pin 2051 on the substrate 20;
  • the three pads 1022 are connected to the ground pin 2052 on the bottom metal plate 205 through the second conductive hole 202; the second pad 1012 in the first power supply area is connected to the second power supply area through the first circuit 2041 on the substrate 20
  • the second pad 1021 is connected, and the first circuit 2041 is connected to the first power pin 2053
  • the wafer 10 further includes a third power supply area 103, which is spaced apart from the first power supply area 101 and the second power supply area 102.
  • the third power supply area 103 includes a third pad and a fourth Pad; the fourth pad 1032 in the third power supply area is connected to the end of the second conductive hole 202 facing the mounting surface, the third pad 1031 in the third power supply area and the third pad 1022 in the second power supply area They are connected by a second circuit 2031 located on the middle metal plate; a second power pin 2054 is also provided on the bottom metal plate 205, and the second circuit 2031 is electrically connected to the second power pin 2054 through the second connection hole.
  • the number of pins of a chip with three power supply areas can be reduced to further simplify the structure of the chip.
  • the wafer 10 further includes a fourth power supply area 104, which is spaced apart from the first power supply area 101, the second power supply area 102, and the third power supply area 103.
  • the fourth power supply area 104 includes a fourth solder Plate and fifth pad; the fifth pad 1042 in the fourth power supply area is connected to the end of the second conductive hole 202 facing the mounting surface, the fourth pad 1041 in the fourth power supply area and the third pad in the third power supply area
  • the four pads 1032 are connected by a third circuit 2042 located on the middle metal plate; the bottom metal plate 205 is also provided with a third power pin 2055, and the second circuit 2031 is connected to the third power pin 2055 through the third connection hole Electrical connection.
  • the wafer 10 in this embodiment may also have five power supply areas, six power supply areas, etc .; correspondingly, each power supply area has a computer core and a pad connected to the computer core, and one power supply area serves as a power supply terminal.
  • the pad is connected to the pad in the previous power supply area as the ground terminal.
  • the pad in the power supply area is connected to the pad in the next power supply area as the power terminal, that is, the computer cores in the adjacent power supply area are connected in series, so that only the first
  • the first pad 1011 in a power supply area is connected to the power supply pin 2051 through the first conductive hole 201, and the pad as the ground terminal in the last power supply area is connected to the ground pin 2052 through the second conductive hole 202.
  • All computer cores in the power supply area provide power.
  • the two adjacent power supply areas are connected by a circuit located on the middle metal plate, and each circuit is connected to a power pin on the bottom metal plate 205 to transmit the signal in the power supply area to the power pin.
  • the power supply pin 2051 and the ground pin 2052 are disposed in the middle of the bottom metal plate 205, and the first power pin 2053, the second power pin 2054, and the third power pin 2055 are located The edge of the bottom metal plate 205.
  • the second circuit 2031 for connecting the third pad 1022 in the second power supply area and the third pad 1031 in the third power supply area is provided on the first intermediate metal plate 203;
  • the other pads on the wafer 10 are connected to other intermediate metal plates or pins through vias passing through the first intermediate metal plate 203.
  • the first circuit 2041 for connecting the second pad 1012 in the first power supply area and the second pad 1021 in the second power supply area is provided on the second intermediate metal plate 204, and at the same time,
  • the third circuit 2042 connecting the fourth pad 1032 in the third power supply area and the fourth pad 1041 in the fourth power supply area is also disposed on the second intermediate metal layer 204.
  • the bottom metal plate 205 as a rectangle, for example, there are multiple ground pins 2052 and power supply pins 2051, and the gaps are set in the middle of the bottom metal plate 205, the first power pin 2053, the second Both the power supply pin 2054 and the third power supply pin 2055 are located near one side of the bottom metal plate 205; of course, the first power supply pin 2053, the second power supply pin 2054, and the third power supply pin 2055 may be symmetrical Are provided on both edges of the bottom metal plate 205.
  • first circuit 2041, second circuit 2031, and third circuit 2042 are all disposed on the same intermediate metal plate, that is, the same intermediate metal plate is patterned To form a first circuit 2041, a second circuit 2031, and a third circuit 2042 with a certain pattern.
  • the intermediate metal plate includes a first intermediate metal plate 203 disposed toward the wafer 10, and a second intermediate metal plate 204 between the first intermediate metal plate 203 and the bottom metal plate 205, and the second circuit 2031 is provided On the first intermediate metal plate 203, the first circuit 2041 and the third circuit 2042 are provided on the second intermediate metal plate 204.
  • the first power supply area 101 includes a plurality of first pads and a plurality of second pads, and the first pads 1011 in the plurality of first power supply areas are arranged in parallel first vertical columns.
  • the second pads 1012 in the plurality of first power supply areas are arranged into a plurality of second vertical columns parallel to each other, and the first vertical columns and the second vertical columns are alternately arranged;
  • the second power supply region 102 includes a plurality of second pads And a plurality of third pads, the second pads 1021 in the plurality of second power supply areas are arranged in parallel third vertical columns, and the third pads 1022 in the plurality of second power supply areas are arranged parallel to each other A number of fourth vertical columns, and the third vertical columns and the fourth vertical columns are alternately arranged, and each third vertical column is arranged collinearly with a second vertical column.
  • the first pads of the first vertical column are connected in parallel, the second pads of the second vertical column are connected in parallel, the second pads of the third vertical column are connected in parallel, and the third pads of the fourth vertical column are connected in parallel ;
  • the first pad of the first vertical column is connected to the power supply pin 2051, the second pad of the second vertical column is connected to the second pad of the third vertical column, and the third pad of the fourth vertical column is grounded Pin 2052 is connected.
  • all the first pads located in the first power supply area 101 are connected in parallel, all the second pads located in the first power supply area 101 are connected in parallel, and all the second pads located in the second power supply area 102 are connected in parallel, located at All third pads in the second power supply area 102 are connected in parallel.
  • the first solder resist layer 206 is provided on the mounting surface of the substrate 20, and the second solder resist layer 207 is provided on the bonding surface of the substrate 20 opposite to the mounting surface. Both the first solder resist layer 206 and the second solder resist layer 207 are insulating layers. Specifically, a first opening is provided on the first solder resist layer 206 corresponding to each pad.
  • the power supply pin 2051, the ground pin 2052, the first power pin 2053, the second power pin 2054, and the first The second solder resist layer 207 corresponding to the three power pins 2055 is provided with a second opening, so that welding is performed only at the first opening and the second opening, and the outer sides of the first opening and the second opening are not welded, which improves the chip Welding accuracy.
  • the chip further includes a packaging cover 30, the wafer 10 is disposed on the mounting surface of the substrate 20, the packaging cover 30 is disposed on the wafer 10, and is connected to the mounting surface.
  • the encapsulation cover 30 can seal the wafer 10, and at the same time, the encapsulation cover 30 can also protect the wafer 10 from damage caused by contact of the external object with the wafer 10.
  • the package cover 30 is a plastic cover, a ceramic cover or a metal cover.
  • an electrical device including: the chip as described above.
  • a chip is further provided, including: a substrate 20 and a wafer 10 mounted on the substrate 20;
  • the first power supply area 101, the second power supply area 102, the third power supply area 103, and the fourth power supply area 104 provided on the wafer 10 in sequence;
  • the first power supply area 101 includes a first pad and a second pad, and the second power supply
  • the area 102 includes second and third pads;
  • the third power supply area 103 includes third and fourth pads, and the fourth power supply area 104 includes fourth and fifth pads;
  • the first pad 1011 in the first power supply area serves as a power input terminal
  • the second pad 1012 in the first power supply area is connected to the second pad 1021 in the second power supply area, and the second solder in the first power supply area
  • the disk 1012 serves as the ground terminal of the first power supply area 101
  • the second pad 1021 in the second power supply area serves as the power supply terminal of the second power supply area 102
  • the third pad 1031 is connected, the third pad 1022 in the second power supply area serves as the ground terminal of the second power supply area 102;
  • the third pad 1031 in the third power supply area serves as the power supply terminal of the third power supply area 103,
  • the fourth pad 1032 in the third power supply area is connected to the fourth pad 1041 in the fourth power supply area, and the fourth pad 1032 in the third power supply area serves as the ground terminal of the third power supply area 103;
  • the fourth pad 1041 in the inside serves
  • the substrate 20 includes a stacked first intermediate metal plate 203, a second intermediate metal plate 204, a bottom metal plate 205, and an insulating plate provided between adjacent metal plates.
  • the wafer 10 is provided on the mounting surface of the substrate 20 ;
  • the bottom metal plate 205 is disposed away from the installation surface and the bottom metal plate 205 is provided with a power supply pin 2051, a ground pin 2052, a first power pin 2053, a second power pin 2054, and a third power pin 2055;
  • Conductive holes are provided on the first intermediate metal plate 203 and the second intermediate metal plate 204 so that the power supply pin 2051 is connected to the first pad, the ground pin 2052 is connected to the fifth pad, and the first power pin 2053 and the second Two pads are connected, the second power pin 2054 is connected to the third pad, and the third power pin 2055 is connected to the fourth pad.
  • the power supply pin 2051 and the ground pin 2052 are provided in the middle of the bottom metal plate 205; the first power pin 2053, the second power pin 2054, and the third power pin 2055 are provided at the edge of the bottom metal plate 205 .
  • a first conductive hole 201 and a second conductive hole 202 penetrating through the substrate 20 are provided on the substrate 20 at intervals.
  • the end of the first conductive hole 201 facing the mounting surface is connected to the first pad 1011 in the first power supply area.
  • the end of a conductive hole 201 facing away from the mounting surface is connected to the power supply pin 2051; the end of the second conductive hole 202 facing the mounting surface is connected to the fifth pad 1042 in the fourth power supply area, and the end of the second conductive hole 202 facing away from the mounting surface Connect to ground pin 2052.
  • first conductive hole 201 and the second conductive hole 202 are straight holes.
  • first conductive holes 201 and second conductive holes 202 there are a plurality of first conductive holes 201 and second conductive holes 202.
  • the first power pin 2053 is electrically connected to the second pad through the first connection hole
  • the second power pin 2054 is electrically connected to the third pad through the second connection hole
  • the third power pin 2055 is connected through the third
  • the connection hole is electrically connected to the fourth pad; the first connection hole, the second connection hole, and the third connection hole are all plural.
  • first, second, etc. may be used in this application to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another.
  • the first element can be called the second element, and likewise, the second element can be called the first element, as long as all occurrences of the "first element” are consistently renamed and all occurrences of The “second component” can be renamed consistently.
  • the first element and the second element are both elements, but they may not be the same element.

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

A chip and electrical equipment. The chip comprises a substrate (20) and a wafer (10) mounted on the substrate (20); the wafer (10) is provided with a first power supply area (101) and a second power supply area (102) which are arranged at an interval; the first power supply area (101) comprises first bonding pads (1011) and second bonding pads (1012); the second power supply area (102) comprises second bonding pads (1021) and third bonding pads (1022); the wafer (10) is disposed on the mounting surface of the substrate (20); the substrate (20) comprises a bottom metal plate (205) away from the mounting surface, at least one middle metal plate arranged parallel to and spaced apart from the bottom metal plate (205), and an insulating plate disposed between adjacent metal plates; the bottom metal plate (205) is provided with power supply pins (2051), grounding pins (2052), and first power supply pins (2053); the second bonding pads (1012) in the first power supply area (101) are connected to the second bonding pads (1021) in the second power supply area (102) by means of a first circuit (2041) located on the middle metal plate, and the first circuit (2041) is electrically connected to the first power supply pins (2053) by means of a first connecting hole. The second bonding pads (1012) in the first power supply area (101) and the second bonding pads (1021) in the second power supply area (102) are connected to the first power supply pins (2053), so that the number of the power supply pins on the substrate (20) can be reduced, the structure of the chip is simplified, and the production costs of the chip are reduced.

Description

芯片及电器设备Chips and electrical equipment 技术领域Technical field
本申请涉及电器设备领域,例如涉及一种芯片及电器设备。This application relates to the field of electrical equipment, such as a chip and electrical equipment.
背景技术Background technique
在电器设备内设置有电路板以及安装在电路板上的芯片,芯片与电路板上的电路电连接。A circuit board and a chip mounted on the circuit board are provided in the electrical equipment, and the chip is electrically connected to the circuit on the circuit board.
现有技术中,芯片包括晶圆以及基板,晶圆上具有间隔设置的第一供电区和第二供电区;第一供电区内和第二供电区内均具有多个焊盘,并且每一焊盘与基板上的一个引脚电连接,基板与电路板连接,且基板上的引脚与电路板上的电路电连接,以实现芯片与电路板之间的连接。In the prior art, the chip includes a wafer and a substrate, and the wafer has a first power supply area and a second power supply area spaced apart; each of the first power supply area and the second power supply area has a plurality of pads, and each The pad is electrically connected to a pin on the substrate, the substrate is connected to the circuit board, and the pins on the substrate are electrically connected to the circuit on the circuit board to realize the connection between the chip and the circuit board.
然而,晶圆上的焊盘较多,使得基板上的引脚较多,导致芯片的结构复杂,生产成本高。However, there are more pads on the wafer, which leads to more pins on the substrate, resulting in a complicated chip structure and high production cost.
发明内容Summary of the invention
本公开实施例提供了一种芯片,包括:基板以及安装在所述基板上的晶圆;An embodiment of the present disclosure provides a chip, including: a substrate and a wafer mounted on the substrate;
所述晶圆上具有间隔设置的第一供电区以及第二供电区,所述第一供电区包括第一焊盘和第二焊盘,所述第二供电区包括第二焊盘和第三焊盘;The wafer has a first power supply area and a second power supply area spaced apart, the first power supply area includes a first pad and a second pad, and the second power supply area includes a second pad and a third Pad
所述晶圆设置在所述基板上的安装面上;所述基板包括背离所述安装面的底层金属板、与所述底层金属板平行且间隔的设置的至少一个中间金属板,以及设置在相邻金属板之间的绝缘板;The wafer is disposed on a mounting surface on the substrate; the substrate includes a bottom metal plate facing away from the mounting surface, at least one intermediate metal plate disposed parallel to and spaced from the bottom metal plate, and disposed on Insulation plate between adjacent metal plates;
所述底层金属板上设置有供电引脚、接地引脚以及第一电源引脚;The bottom metal plate is provided with a power supply pin, a ground pin and a first power pin;
所述基板上间隔设置有贯穿所述基板的第一导电孔和第二导电孔,所 述第一导电孔朝向所述安装面的一端与所述第一供电区内的第一焊盘连接,所述第一导电孔背离所述安装面的一端与所述供电引脚连接;所述第二导电孔朝向所述安装面的一端与所述第二供电区内的第三焊盘连接,所述第二导电孔背离所述安装面的一端与所述接地引脚连接;所述第一供电区内的第二焊盘与所述第二供电区内的第二焊盘之间通过位于所述中间金属板上的第一电路连接,且所述第一电路通过第一连接孔与所述第一电源引脚电连接。A first conductive hole and a second conductive hole penetrating the substrate are provided at intervals on the substrate, and an end of the first conductive hole facing the mounting surface is connected to the first pad in the first power supply area, The end of the first conductive hole facing away from the mounting surface is connected to the power supply pin; the end of the second conductive hole facing the mounting surface is connected to the third pad in the second power supply area. The end of the second conductive hole facing away from the mounting surface is connected to the ground pin; the second pad in the first power supply area and the second pad in the second power supply area are located between The first circuit on the intermediate metal plate is connected, and the first circuit is electrically connected to the first power pin through a first connection hole.
如上所述的芯片,优选地,所述晶圆还包括第三供电区,所述第三供电区与所述第一供电区和所述第二供电区间隔的设置,所述第三供电区包括第三焊盘和第四焊盘;所述第三供电区内的第四焊盘与所述第二导电孔朝向所述安装面的一端连接,所述第三供电区内的第三焊盘与所述第二供电区内的第三焊盘之间通过位于所述中间金属板上的第二电路连接;所述底层金属板上还设置有第二电源引脚,所述第二电路通过第二连接孔与所述第二电源引脚电连接。For the chip as described above, preferably, the wafer further includes a third power supply area, and the third power supply area is spaced apart from the first power supply area and the second power supply area, and the third power supply area It includes a third pad and a fourth pad; the fourth pad in the third power supply area is connected to the end of the second conductive hole facing the mounting surface, and the third solder in the third power supply area The disk and the third pad in the second power supply area are connected by a second circuit on the middle metal plate; the bottom metal plate is also provided with a second power pin, the second circuit The second power pin is electrically connected through the second connection hole.
如上所述的芯片,优选地,所述晶圆还包括第四供电区,所述第四供电区与所述第一供电区、所述第二供电区以及所述第三供电区间隔的设置,所述第四供电区包括第四焊盘和第五焊盘;所述第四供电区内的第五焊盘与所述第二导电孔朝向所述安装面的一端连接,所述第四供电区内的第四焊盘与所述第三供电区内的第四焊盘之间通过位于所述中间金属板上的第三电路连接;所述底层金属板上还设置有第三电源引脚,所述第二电路通过第三连接孔与所述第三电源引脚电连接。For the chip as described above, preferably, the wafer further includes a fourth power supply area, and the fourth power supply area is spaced apart from the first power supply area, the second power supply area, and the third power supply area , The fourth power supply area includes a fourth pad and a fifth pad; the fifth pad in the fourth power supply area is connected to an end of the second conductive hole facing the mounting surface, the fourth The fourth pad in the power supply area and the fourth pad in the third power supply area are connected by a third circuit located on the middle metal plate; the bottom metal plate is also provided with a third power supply Pin, the second circuit is electrically connected to the third power pin through a third connection hole.
如上所述的芯片,优选地,所述供电引脚和所述接地引脚设置在所述底层金属板的中间位置,所述第一电源引脚、所述第二电源引脚以及所述第三电源引脚位于所述底层金属板的边缘。In the chip as described above, preferably, the power supply pin and the ground pin are provided in the middle of the bottom metal plate, the first power pin, the second power pin, and the first Three power pins are located at the edge of the bottom metal plate.
如上所述的芯片,优选地,所述中间金属板包括朝向所述晶圆设置的第一中间金属板、以及位于所述第一中间金属板和所述底层金属板之间的 第二中间金属板,所述第二电路设置在所述第一中间金属板上,所述第一电路和所述第三电路设置在所述第二中间金属板上。In the chip as described above, preferably, the intermediate metal plate includes a first intermediate metal plate disposed toward the wafer, and a second intermediate metal between the first intermediate metal plate and the bottom metal plate Board, the second circuit is provided on the first intermediate metal plate, and the first circuit and the third circuit are provided on the second intermediate metal plate.
如上所述的芯片,优选地,所述基板的安装面上设置有第一阻焊层,所述基板上与所述安装面相对的贴合面上设置有第二阻焊层。In the chip as described above, preferably, a first solder resist layer is provided on the mounting surface of the substrate, and a second solder resist layer is provided on the bonding surface of the substrate opposite to the mounting surface.
如上所述的芯片,优选地,所述第一阻焊层和所述第二阻焊层均为绝缘层。In the chip as described above, preferably, the first solder resist layer and the second solder resist layer are both insulating layers.
如上所述的芯片,优选地,所述芯片还包括封装罩,所述封装罩罩设置在所述晶圆上,且与所述安装面连接。As described above, preferably, the chip further includes a package cover, which is provided on the wafer and connected to the mounting surface.
如上所述的芯片,优选地,所述封装罩为塑料罩或陶瓷罩或金属罩。For the above-mentioned chip, preferably, the packaging cover is a plastic cover or a ceramic cover or a metal cover.
本公开实施例还提供一种电器设备,包括:如上所述的芯片。An embodiment of the present disclosure also provides an electrical device, including: the chip as described above.
本公开实施例还提供一种芯片,包括:基板以及安装在所述基板上的晶圆;An embodiment of the present disclosure also provides a chip, including: a substrate and a wafer mounted on the substrate;
所述晶圆上依次设置的第一供电区、第二供电区、第三供电区和第四供电区;所述第一供电区包括第一焊盘和第二焊盘,所述第二供电区包括第二焊盘和三焊盘;所述第三供电区包括第三焊盘和第四焊盘,所述第四供电区包括第四焊盘和五焊盘;A first power supply area, a second power supply area, a third power supply area, and a fourth power supply area that are sequentially arranged on the wafer; the first power supply area includes a first pad and a second pad, and the second power supply The area includes a second pad and a three pad; the third power supply area includes a third pad and a fourth pad, and the fourth power supply area includes a fourth pad and a five pad;
所述第一供电区内的第一焊盘作为电源输入端,所述第一供电区内的第二焊盘与所述第二供电区内的第二焊盘连接,所述第一供电区内的第二焊盘作为所述第一供电区的接地端;所述第二供电区内的第二焊盘作为所述第二供电区的电源端,所述第二供电区内的第三焊盘与所述第三供电区内的第三焊盘连接,所述第二供电区内的第三焊盘作为所述第二供电区的接地端;所述第三供电区内的第三焊盘作为所述第三供电区的电源端,所述第三供电区内的第四焊盘与所述第四供电区内的第四焊盘连接,所述第三供电区内的第四焊盘作为所述第三供电区的接地端;所述第四供电区内的第四焊盘作为所述第四供电区的电源端,所述第四供电区内的第五焊盘作为第四供电区的接地端;The first pad in the first power supply area serves as a power input terminal, the second pad in the first power supply area is connected to the second pad in the second power supply area, and the first power supply area The second pad in the area serves as the ground terminal of the first power supply area; the second pad in the second power supply area serves as the power supply terminal of the second power supply area, and the third in the second power supply area The pad is connected to the third pad in the third power supply area, and the third pad in the second power supply area serves as the ground terminal of the second power supply area; the third in the third power supply area The pad serves as a power end of the third power supply area, the fourth pad in the third power supply area is connected to the fourth pad in the fourth power supply area, and the fourth pad in the third power supply area The pad serves as the ground terminal of the third power supply area; the fourth pad in the fourth power supply area serves as the power supply terminal of the fourth power supply area, and the fifth pad in the fourth power supply area serves as the first 4. The ground terminal of the power supply area;
所述基板包括层叠设置的第一中间金属板、第二中间金属板、底层金属板,以及设置在相邻金属板之间的绝缘板,所述晶圆设置在所述基板上的安装面上;The substrate includes a stacked first intermediate metal plate, a second intermediate metal plate, a bottom metal plate, and an insulating plate provided between adjacent metal plates, and the wafer is provided on a mounting surface on the substrate ;
所述底层金属板背离所述安装面设置且所述底层金属板上设置有供电引脚、接地引脚、第一电源引脚,第二电源引脚,第三电源引脚;The bottom metal plate is disposed away from the mounting surface and the bottom metal plate is provided with a power supply pin, a ground pin, a first power pin, a second power pin, and a third power pin;
在所述第一中间金属板和所述第二中间金属板上设置导电孔,使得所述供电引脚与第一焊盘连接、所述接地引脚与第五焊盘连接、所述第一电源引脚与第二焊盘连接、第二电源引脚与第三焊盘连接、所述第三电源引脚与第四焊盘连接。Conductive holes are provided on the first intermediate metal plate and the second intermediate metal plate so that the power supply pin is connected to the first pad, the ground pin is connected to the fifth pad, and the first The power supply pin is connected to the second pad, the second power pin is connected to the third pad, and the third power pin is connected to the fourth pad.
如上所述的芯片,优选地,所述供电引脚和所述接地引脚设置在所述底层金属板的中间位置;所述第一电源引脚、所述第二电源引脚、所述第三电源引脚设置在所述底层金属板的边缘。In the chip as described above, preferably, the power supply pin and the ground pin are provided in the middle of the bottom metal plate; the first power pin, the second power pin, and the first Three power pins are provided at the edge of the bottom metal plate.
如上所述的芯片,优选地,所述基板上间隔设置有贯穿所述基板的第一导电孔和第二导电孔,所述第一导电孔朝向所述安装面的一端与所述第一供电区内的第一焊盘连接,所述第一导电孔背离所述安装面的一端与所述供电引脚连接;所述第二导电孔朝向所述安装面的一端与所述第四供电区内的第五焊盘连接,所述第二导电孔背离所述安装面的一端与所述接地引脚连接。In the chip as described above, preferably, a first conductive hole and a second conductive hole penetrating the substrate are provided on the substrate at intervals, an end of the first conductive hole facing the mounting surface is connected to the first power supply The first pad in the area is connected, and the end of the first conductive hole facing away from the mounting surface is connected to the power supply pin; the end of the second conductive hole facing the mounting surface is connected to the fourth power supply area The fifth pad inside is connected, and the end of the second conductive hole facing away from the mounting surface is connected to the ground pin.
如上所述的芯片,优选地,所述第一导电孔和第二导电孔为直孔。In the chip as described above, preferably, the first conductive hole and the second conductive hole are straight holes.
如上所述的芯片,优选地,所述第一导电孔和第二导电孔为多个。In the above-mentioned chip, preferably, the first conductive hole and the second conductive hole are plural.
如上所述的芯片,优选地,所述第一电源引脚通过第一连接孔与第二焊盘电连接,所述第二电源引脚通过第二连接孔与第三焊盘电连接,所述第三电源引脚通过第三连接孔与第四焊盘电连接;所述第一连接孔、所述第二连接孔和所述第三连接孔均为多个。In the chip described above, preferably, the first power pin is electrically connected to the second pad through the first connection hole, and the second power pin is electrically connected to the third pad through the second connection hole. The third power pin is electrically connected to the fourth pad through a third connection hole; the first connection hole, the second connection hole, and the third connection hole are all plural.
本公开实施例提供的芯片及电器设备,晶圆上具有间隔设置的第一供电区和第二供电区,第一供电区包括第一焊盘和第二焊盘,第二供电区包括第 二焊盘和第三焊盘,基板包括背离安装面的底层金属板、与底层金属板平行且间隔的设置的至少一个中间金属板,以及设置在相邻金属板之间的绝缘板,晶圆设置在基板的安装面上;第一供电区内的第一焊盘通过基板上的第一导电孔以及供电引脚与电源连接;第二供电区内的第三焊盘通过第二导电孔与底层金属板上的接地引脚连接;第一供电区内的第二焊盘通过基板上的第一电路与第二供电区内的第二焊盘连接,且第一电路与底层金属板上的第一电源引脚连接;与现有技术中所有的焊盘均与引脚连接相比,本实施例中第一供电区内的第二焊盘和第二供电区内的第二焊盘均与第一电源引脚连接,可以减少基板上的电源引脚数量,简化芯片的结构,降低芯片的生产成本。In the chip and electrical equipment provided by the embodiments of the present disclosure, the wafer has a first power supply area and a second power supply area spaced apart, the first power supply area includes a first pad and a second pad, and the second power supply area includes a second The pad and the third pad. The substrate includes a bottom metal plate facing away from the mounting surface, at least one intermediate metal plate disposed parallel to and spaced from the bottom metal plate, and an insulating plate disposed between adjacent metal plates. On the mounting surface of the substrate; the first pad in the first power supply area is connected to the power supply through the first conductive hole and the power supply pin on the substrate; the third pad in the second power supply area passes through the second conductive hole and the bottom layer The ground pin on the metal plate is connected; the second pad in the first power supply area is connected to the second pad in the second power supply area through the first circuit on the substrate, and the first circuit is connected to the second pad on the bottom metal plate A power pin connection; compared with all the pads in the prior art that are connected to the pin, the second pad in the first power supply area and the second pad in the second power supply area in this embodiment are both The first power pin connection can reduce the base The number of power pins on the board simplifies the structure of the chip and reduces the production cost of the chip.
附图说明BRIEF DESCRIPTION
一个或多个实施例通过与之对应的附图进行示例性说明,这些示例性说明和附图并不构成对实施例的限定,附图中具有相同参考数字标号的元件示为类似的元件,附图不构成比例限制,并且其中:One or more embodiments are exemplified by the corresponding drawings. These exemplary descriptions and the drawings do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are shown as similar elements. The drawings do not constitute a proportional limitation, and among them:
图1为本实施例提供的芯片的结构示意图;FIG. 1 is a schematic structural diagram of a chip provided by this embodiment;
图2为本实施例提供的芯片中晶圆的结构示意图;2 is a schematic structural diagram of a wafer in a chip provided by this embodiment;
图3为本实施例提供的芯片中基板的结构示意图;3 is a schematic structural diagram of a substrate in a chip provided by this embodiment;
图4为本实施例中第一中间金属板的结构示意图;4 is a schematic structural diagram of a first intermediate metal plate in this embodiment;
图5为本实施例中第二中间金属板的结构示意图;5 is a schematic structural diagram of a second intermediate metal plate in this embodiment;
图6为本实施例中底层金属板的结构示意图。6 is a schematic structural diagram of a bottom metal plate in this embodiment.
附图标记说明:Description of reference signs:
10、晶圆;10. Wafer;
20、基板;20. Substrate;
30、封装罩;30. Encapsulation cover;
101、第一供电区;101. The first power supply area;
102、第二供电区;102. The second power supply area;
103、第三供电区;103. The third power supply area;
104、第四供电区;104. The fourth power supply area;
1011、第一供电区内的第一焊盘;1011, the first pad in the first power supply area;
1012、第一供电区内的第二焊盘;1012. The second pad in the first power supply area;
1021、第二供电区内的第二焊盘;1021, the second pad in the second power supply area;
1022、第二供电区内的第三焊盘;1022, the third pad in the second power supply area;
1031、第三供电区内的第三焊盘;1031, the third pad in the third power supply area;
1032、第三供电区内的第四焊盘;1032, the fourth pad in the third power supply area;
1041、第四供电区内的第四焊盘;1041, the fourth pad in the fourth power supply area;
1042、第四供电区内的第五焊盘;1042. The fifth pad in the fourth power supply area;
2051、供电引脚;2051, power supply pin;
2052、接地引脚;2052, ground pin;
2053、第一电源引脚;2053, the first power pin;
2054、第二电源引脚;2054, second power supply pin;
2055、第三电源引脚;2055, the third power pin;
201、第一导电孔;201. The first conductive hole;
202、第二导电孔;202. Second conductive hole;
203、第一中间金属板;203. The first intermediate metal plate;
204、第二中间金属板;204. The second intermediate metal plate;
205、底层金属板;205. The bottom metal plate;
206、第一阻焊层;206. The first solder resist layer;
207、第二阻焊层;207. Second solder resist layer;
2041、第一电路;2041, the first circuit;
2031、第二电路;2031. Second circuit;
2042、第三电路。2042. The third circuit.
具体实施方式detailed description
为了能够更加详尽地了解本公开实施例的特点与技术内容,下面结合附图对本公开实施例的实现进行详细阐述,所附附图仅供参考说明之用,并非用来限定本公开实施例。在以下的技术描述中,为方便解释起见,通过多个细节以提供对所披露实施例的充分理解。然而,在没有这些细节的情况下,一个或多个实施例仍然可以实施。在其它情况下,为简化附图,熟知的结构和装置可以简化展示。In order to understand the features and technical contents of the embodiments of the present disclosure in more detail, the following describes the implementation of the embodiments of the present disclosure in detail with reference to the drawings. The accompanying drawings are for reference only and are not intended to limit the embodiments of the present disclosure. In the following technical description, for convenience of explanation, various details are provided to provide a sufficient understanding of the disclosed embodiments. However, without these details, one or more embodiments can still be implemented. In other cases, to simplify the drawings, well-known structures and devices can be simplified.
图1为本实施例提供的芯片的结构示意图;图2为本实施例提供的芯片中晶圆的结构示意图;图3为本实施例提供的芯片中基板的结构示意图;图4为本实施例中第一中间金属板的结构示意图;图5为本实施例中第二中间金属板的结构示意图;图6为本实施例中底层金属板的结构示意图。1 is a schematic diagram of the structure of the chip provided in this embodiment; FIG. 2 is a schematic diagram of the structure of the wafer in the chip provided in this embodiment; FIG. 3 is a schematic diagram of the structure of the substrate in the chip provided in this embodiment; The structure diagram of the first middle metal plate in FIG. 5 is the structure diagram of the second middle metal plate in this embodiment. FIG. 6 is the structure diagram of the bottom metal plate in this embodiment.
请参照图1-图6。本实施例提供一种芯片,包括:基板20以及安装在基板20上的晶圆10;晶圆10上具有间隔设置的第一供电区101以及第二供电区102,第一供电区101包括第一焊盘和第二焊盘,第二供电区102包括第二焊盘和第三焊盘;晶圆10设置在基板20上的安装面上;基板20包括背离安装面的底层金属板205、与底层金属板205平行且间隔的设置的至少一个中间金属板,以及设置在相邻金属板之间的绝缘板,底层金属板205上设置有供电引脚2051、接地引脚2052以及第一电源引脚2053;基板20上间隔设置有贯穿基板20的第一导电孔201和第二导电孔202,第一导电孔201朝向安装面的一端与第一供电区内的第一焊盘1011连接,第一导电孔201背离安装面的一端与供电引脚2051连接;第二导电孔202朝向安装面的一端与第二供电区内的第三焊盘1022连接,第二导电孔202背离安装面的一端与接地引脚2052连接;第一供电区内的第二焊盘1012与第二供电区内的第二焊盘1021之间通过位于中间金属板上的第一电路2041连接,且第一电路2041通过第一连接孔与第一电源引脚2053电连接。Please refer to Figure 1-6. This embodiment provides a chip, including: a substrate 20 and a wafer 10 mounted on the substrate 20; the wafer 10 has a first power supply area 101 and a second power supply area 102 spaced apart, the first power supply area 101 includes a A pad and a second pad, the second power supply area 102 includes a second pad and a third pad; the wafer 10 is provided on a mounting surface on the substrate 20; the substrate 20 includes an underlying metal plate 205 facing away from the mounting surface, At least one intermediate metal plate disposed parallel to and spaced from the bottom metal plate 205, and an insulating plate provided between adjacent metal plates. The bottom metal plate 205 is provided with a power supply pin 2051, a ground pin 2052, and a first power supply Pin 2053; a first conductive hole 201 and a second conductive hole 202 penetrating through the substrate 20 are arranged at intervals on the substrate 20, an end of the first conductive hole 201 facing the mounting surface is connected to the first pad 1011 in the first power supply area, The end of the first conductive hole 201 facing away from the mounting surface is connected to the power supply pin 2051; the end of the second conductive hole 202 facing the mounting surface is connected to the third pad 1022 in the second power supply area, and the second conductive hole 202 facing away from the mounting surface One end is connected to the ground pin 2052 Connected; the second pad 1012 in the first power supply area and the second pad 1021 in the second power supply area are connected through a first circuit 2041 located on the middle metal plate, and the first circuit 2041 is connected through the first connection hole It is electrically connected to the first power pin 2053.
本实施例中第一供电区内的第一焊盘1011和第一供电区内的第二焊盘1012可以为设置在晶圆10上的金属片或者由其他导电材质构成的凸点;相同的,第二供电区内的第二焊盘1021和第二供电区内的第三焊盘1022也为设置在晶圆10上的金属片或者由其他导电材质构成的凸点。In this embodiment, the first pad 1011 in the first power supply area and the second pad 1012 in the first power supply area may be metal sheets provided on the wafer 10 or bumps made of other conductive materials; the same In addition, the second pad 1021 in the second power supply area and the third pad 1022 in the second power supply area are also metal sheets provided on the wafer 10 or bumps made of other conductive materials.
本实施例中的供电引脚2051与电源连接,电源为位于晶圆10外部并且用于通过供电引脚2051和第一导电孔201向第一供电区内的第一焊盘1011提供较高电势的装置。The power supply pin 2051 in this embodiment is connected to a power supply, which is located outside the wafer 10 and used to provide a higher potential to the first pad 1011 in the first power supply area through the power supply pin 2051 and the first conductive hole 201 installation.
本实施例中第二供电区内的第三焊盘1022接地,其中第二供电区内的第三焊盘1022的电势可以为零,或者第二供电区内的第三焊盘1022的电势不为零,只要使得第二供电区内的第三焊盘1022具有一个参考电位,以保证第一供电区内的第一焊盘1011与第二供电区102内第三焊盘之间具有一定的电压即可,以使晶圆10可以正常工作。In this embodiment, the third pad 1022 in the second power supply area is grounded, wherein the potential of the third pad 1022 in the second power supply area may be zero, or the potential of the third pad 1022 in the second power supply area is not Is zero, as long as the third pad 1022 in the second power supply area has a reference potential to ensure that there is a certain distance between the first pad 1011 in the first power supply area and the third pad in the second power supply area 102 The voltage is sufficient so that the wafer 10 can work normally.
本实施例中在第一供电区101和第二供电区102内均设置具有计算机内核,第一供电区内的第一焊盘1011和第一供电区内的第二焊盘1012为第一供电区101内的计算机内核供电,第二供电区内的第二焊盘1021和第二供电区内的第三焊盘1022为第二供电区102内的计算机内核供电。第一供电区内的第一焊盘1011作为第一供电区101的电源端电势大于第一供电区内的第二焊盘1012的电势,并且第二供电区内的第二焊盘1021作为第二供电区102的电源端电势大于第二供电区内的第三焊盘1022的电势,进而对第一供电区101和第二供电区102内的计算机内核供电。In this embodiment, a computer core is provided in both the first power supply area 101 and the second power supply area 102. The first pad 1011 in the first power supply area and the second pad 1012 in the first power supply area supply the first power supply The computer core in the area 101 supplies power. The second pad 1021 in the second power supply area and the third pad 1022 in the second power supply area supply power to the computer core in the second power supply area 102. The first pad 1011 in the first power supply area as the power supply terminal potential of the first power supply area 101 is greater than the potential of the second pad 1012 in the first power supply area, and the second pad 1021 in the second power supply area as the first The power supply terminal potential of the second power supply area 102 is greater than the potential of the third pad 1022 in the second power supply area, thereby supplying power to the computer cores in the first power supply area 101 and the second power supply area 102.
进一步地,第一供电区101和第二供电区102内的计算机内核分得的电压可以相等,即第一供电区内的第一焊盘1011和第一供电区内的第二焊盘1012之间的电压等于第二供电区内的第二焊盘1021和第二供电区内的第三焊盘1022之间的电压。Further, the voltages obtained by the computer cores in the first power supply area 101 and the second power supply area 102 may be equal, that is, the first pad 1011 in the first power supply area and the second pad 1012 in the first power supply area The voltage between them is equal to the voltage between the second pad 1021 in the second power supply area and the third pad 1022 in the second power supply area.
本实施例中用于连接第一供电区内的第一焊盘1011与供电引脚2051的第一导电孔201可以为过孔,当然第一导电孔201还可以包括在基板20 上开设的通孔,以及穿设在通孔内的金属柱;第一导电孔201朝向基板20安装面的一端与第一供电区内的第一焊盘1011连接,第一导电孔201朝向基板20上与安装面相对的贴合面的一端与供电引脚2051连接。相同的,第二导电孔202也可以为过孔,或者第二导电孔202包括在基板20上开设的通孔,以及穿设在通孔内的金属柱;第二导电孔202朝向安装面的一端与第二供电区内的第二焊盘1021连接,第二导向孔朝向贴合面的一端与接地引脚2052连接。In this embodiment, the first conductive hole 201 used to connect the first pad 1011 in the first power supply area and the power supply pin 2051 may be a via hole. Of course, the first conductive hole 201 may also include a through hole formed on the substrate 20 Hole, and a metal post penetrated in the through hole; the end of the first conductive hole 201 facing the mounting surface of the substrate 20 is connected to the first pad 1011 in the first power supply area, and the first conductive hole 201 is facing the mounting of the substrate 20 One end of the bonding surface opposite to the surface is connected to the power supply pin 2051. Similarly, the second conductive hole 202 may also be a via hole, or the second conductive hole 202 includes a through hole opened in the substrate 20, and a metal post penetrated in the through hole; the second conductive hole 202 faces the mounting surface One end is connected to the second pad 1021 in the second power supply area, and the end of the second guide hole facing the bonding surface is connected to the ground pin 2052.
本实施例中,当第一电路2041位于靠近安装面的中间金属板上时,第一供电区内的第二焊盘1012和第二供电区内的第二焊盘1021可以直接与第一电路2041连接;当第一电路2041位于其他的金属板上时,第一供电区内的第二焊盘1012和第二供电区内的第二焊盘1021可以通过过孔与第一电路2041连接。第一电路2041可以通过第一电路2041所在的中间金属板与底层金属板205之间的过孔与第一电源引脚2053连接,以将第一供电区内的第二焊盘1012与第二供电区内的第二焊盘1021上的信号传递至第一电源引脚2053。In this embodiment, when the first circuit 2041 is located on the middle metal plate close to the mounting surface, the second pad 1012 in the first power supply area and the second pad 1021 in the second power supply area may directly communicate with the first circuit 2041 connection; when the first circuit 2041 is located on another metal plate, the second pad 1012 in the first power supply area and the second pad 1021 in the second power supply area may be connected to the first circuit 2041 through a via. The first circuit 2041 may be connected to the first power pin 2053 through the via between the middle metal plate and the bottom metal plate 205 where the first circuit 2041 is located, so as to connect the second pad 1012 and the second The signal on the second pad 1021 in the power supply area is transmitted to the first power supply pin 2053.
本实施例提供的芯片,晶圆10上具有间隔设置的第一供电区101和第二供电区102,第一供电区101包括第一焊盘和第二焊盘,第二供电区102包括第二焊盘和第三焊盘,基板20包括背离安装面的底层金属板205、与底层金属板205平行且间隔的设置的至少一个中间金属板,以及设置在相邻金属板之间的绝缘板,晶圆10设置在基板20的安装面上;第一供电区内的第一焊盘1011通过基板20上的第一导电孔201以及供电引脚2051与电源连接;第二供电区内的第三焊盘1022通过第二导电孔202与底层金属板205上的接地引脚2052连接;第一供电区内的第二焊盘1012通过基板20上的第一电路2041与第二供电区内的第二焊盘1021连接,且第一电路2041与底层金属板205上的第一电源引脚2053连接;与现有技术中所有的焊盘均与引脚连接相比,本实施例中第一供电区内的第二焊盘1012和第二供电区内的 第二焊盘1021均与第一电源引脚2053连接,可以减少基板20上的电源引脚数量,简化芯片的结构,降低芯片的生产成本。In the chip provided in this embodiment, the wafer 10 has a first power supply area 101 and a second power supply area 102 spaced apart. The first power supply area 101 includes a first pad and a second pad, and the second power supply area 102 includes a Two pads and a third pad, the substrate 20 includes a bottom metal plate 205 facing away from the mounting surface, at least one middle metal plate disposed parallel to and spaced from the bottom metal plate 205, and an insulating plate disposed between adjacent metal plates The wafer 10 is provided on the mounting surface of the substrate 20; the first pad 1011 in the first power supply area is connected to the power supply through the first conductive hole 201 and the power supply pin 2051 on the substrate 20; The three pads 1022 are connected to the ground pin 2052 on the bottom metal plate 205 through the second conductive hole 202; the second pad 1012 in the first power supply area is connected to the second power supply area through the first circuit 2041 on the substrate 20 The second pad 1021 is connected, and the first circuit 2041 is connected to the first power pin 2053 on the bottom metal plate 205; compared with all pads and pin connections in the prior art, the first in this embodiment The second pad 1012 in the power supply area and the second power supply area The second pads 1021 are connected to the first power pins 2053, which can reduce the number of power pins on the substrate 20, simplify the structure of the chip, and reduce the production cost of the chip.
本实施例中,晶圆10还包括第三供电区103,第三供电区103与第一供电区101和第二供电区102间隔的设置,第三供电区103包括第三焊盘和第四焊盘;第三供电区内的第四焊盘1032与第二导电孔202朝向安装面的一端连接,第三供电区内的第三焊盘1031与第二供电区内的第三焊盘1022之间通过位于中间金属板上的第二电路2031连接;底层金属板205上还设置有第二电源引脚2054,第二电路2031通过第二连接孔与第二电源引脚2054电连接。可以减少具有三个供电区的芯片的引脚数量,以进一步简化芯片的结构。In this embodiment, the wafer 10 further includes a third power supply area 103, which is spaced apart from the first power supply area 101 and the second power supply area 102. The third power supply area 103 includes a third pad and a fourth Pad; the fourth pad 1032 in the third power supply area is connected to the end of the second conductive hole 202 facing the mounting surface, the third pad 1031 in the third power supply area and the third pad 1022 in the second power supply area They are connected by a second circuit 2031 located on the middle metal plate; a second power pin 2054 is also provided on the bottom metal plate 205, and the second circuit 2031 is electrically connected to the second power pin 2054 through the second connection hole. The number of pins of a chip with three power supply areas can be reduced to further simplify the structure of the chip.
具体的,晶圆10还包括第四供电区104,第四供电区104与第一供电区101、第二供电区102以及第三供电区103间隔的设置,第四供电区104包括第四焊盘和第五焊盘;第四供电区内的第五焊盘1042与第二导电孔202朝向安装面的一端连接,第四供电区内的第四焊盘1041与第三供电区内的第四焊盘1032之间通过位于中间金属板上的第三电路2042连接;底层金属板205上还设置有第三电源引脚2055,第二电路2031通过第三连接孔与第三电源引脚2055电连接。Specifically, the wafer 10 further includes a fourth power supply area 104, which is spaced apart from the first power supply area 101, the second power supply area 102, and the third power supply area 103. The fourth power supply area 104 includes a fourth solder Plate and fifth pad; the fifth pad 1042 in the fourth power supply area is connected to the end of the second conductive hole 202 facing the mounting surface, the fourth pad 1041 in the fourth power supply area and the third pad in the third power supply area The four pads 1032 are connected by a third circuit 2042 located on the middle metal plate; the bottom metal plate 205 is also provided with a third power pin 2055, and the second circuit 2031 is connected to the third power pin 2055 through the third connection hole Electrical connection.
本实施例中的晶圆10还可以具有五个供电区、六个供电区等;相应的,每一供电区内均具有计算机内核以及与计算机内核连接的焊盘,一个供电区内作为电源端的焊盘与上一供电区作为接地端的焊盘连接,该供电区内作为接地端的焊盘与下一供电区内作为电源端的焊盘连接,即相邻供电区内的计算机内核串联,使得仅第一供电区内的第一焊盘1011通过第一导电孔201与供电引脚2051连接,最后一个供电区内作为接地端的焊盘通过第二导电孔202与接地引脚2052连接,即可实现对所有供电区内的计算机内核进行供电。另外,相邻的两个供电区通过位于中间金属板上的电路连接,每一电路与底层金属板205上的一个电源引脚连接,以将供 电区内的信号传递至电源引脚。The wafer 10 in this embodiment may also have five power supply areas, six power supply areas, etc .; correspondingly, each power supply area has a computer core and a pad connected to the computer core, and one power supply area serves as a power supply terminal. The pad is connected to the pad in the previous power supply area as the ground terminal. The pad in the power supply area is connected to the pad in the next power supply area as the power terminal, that is, the computer cores in the adjacent power supply area are connected in series, so that only the first The first pad 1011 in a power supply area is connected to the power supply pin 2051 through the first conductive hole 201, and the pad as the ground terminal in the last power supply area is connected to the ground pin 2052 through the second conductive hole 202. All computer cores in the power supply area provide power. In addition, the two adjacent power supply areas are connected by a circuit located on the middle metal plate, and each circuit is connected to a power pin on the bottom metal plate 205 to transmit the signal in the power supply area to the power pin.
继续参照图6,本实施例中,供电引脚2051和接地引脚2052设置在底层金属板205的中间位置,第一电源引脚2053、第二电源引脚2054以及第三电源引脚2055位于底层金属板205的边缘。With continued reference to FIG. 6, in this embodiment, the power supply pin 2051 and the ground pin 2052 are disposed in the middle of the bottom metal plate 205, and the first power pin 2053, the second power pin 2054, and the third power pin 2055 are located The edge of the bottom metal plate 205.
具体地,继续参照图4,用于连接第二供电区内的第三焊盘1022和第三供电区内的第三焊盘1031的第二电路2031设置在第一中间金属板203上;此外晶圆10上的其他焊盘通过穿过第一中间金属板203的过孔与其他中间金属板或者引脚连接。Specifically, with continued reference to FIG. 4, the second circuit 2031 for connecting the third pad 1022 in the second power supply area and the third pad 1031 in the third power supply area is provided on the first intermediate metal plate 203; The other pads on the wafer 10 are connected to other intermediate metal plates or pins through vias passing through the first intermediate metal plate 203.
继续参照图5,用于连接第一供电区内的第二焊盘1012和第二供电区内的第二焊盘1021的第一电路2041设置在第二中间金属板204上,同时,用于连接第三供电区内的第四焊盘1032和第四供电区内的第四焊盘1041的第三电路2042也设置在第二中间金属层204上。5, the first circuit 2041 for connecting the second pad 1012 in the first power supply area and the second pad 1021 in the second power supply area is provided on the second intermediate metal plate 204, and at the same time, The third circuit 2042 connecting the fourth pad 1032 in the third power supply area and the fourth pad 1041 in the fourth power supply area is also disposed on the second intermediate metal layer 204.
具体地,以底层金属板205呈矩形为例,接地引脚2052和供电引脚2051均为多个,并给间隔的设置在底层金属板205的中间位置,第一电源引脚2053、第二电源引脚2054以及第三电源引脚2055均设置在底层金属板205的靠近一个侧边的位置;当然,第一电源引脚2053、第二电源引脚2054以及第三电源引脚2055可以对称的设置在底层金属板205的两个边缘。Specifically, taking the bottom metal plate 205 as a rectangle, for example, there are multiple ground pins 2052 and power supply pins 2051, and the gaps are set in the middle of the bottom metal plate 205, the first power pin 2053, the second Both the power supply pin 2054 and the third power supply pin 2055 are located near one side of the bottom metal plate 205; of course, the first power supply pin 2053, the second power supply pin 2054, and the third power supply pin 2055 may be symmetrical Are provided on both edges of the bottom metal plate 205.
在一个可实现的方式中,中间金属板可以为一个,相应的第一电路2041、第二电路2031、以及第三电路2042均设置在同一中间金属板上,即对同一中间金属板进行图形化以形成具有一定图形的第一电路2041、第二电路2031、以及第三电路2042。In a practical manner, there may be one intermediate metal plate, and the corresponding first circuit 2041, second circuit 2031, and third circuit 2042 are all disposed on the same intermediate metal plate, that is, the same intermediate metal plate is patterned To form a first circuit 2041, a second circuit 2031, and a third circuit 2042 with a certain pattern.
本实施例中,中间金属板包括朝向晶圆10设置的第一中间金属板203、以及位于第一中间金属板203和底层金属板205之间的第二中间金属板204,第二电路2031设置在第一中间金属板203上,第一电路2041和第三电路2042设置在第二中间金属板204上。In this embodiment, the intermediate metal plate includes a first intermediate metal plate 203 disposed toward the wafer 10, and a second intermediate metal plate 204 between the first intermediate metal plate 203 and the bottom metal plate 205, and the second circuit 2031 is provided On the first intermediate metal plate 203, the first circuit 2041 and the third circuit 2042 are provided on the second intermediate metal plate 204.
与所有的电路设置在同一中间金属板相比,可以避免在同一中间金属板上设置较多的电路,进而简化中间金属板的结构。Compared with that all circuits are arranged on the same intermediate metal plate, it is possible to avoid installing more circuits on the same intermediate metal plate, thereby simplifying the structure of the intermediate metal plate.
本实施例中,第一供电区101包括多个第一焊盘和多个第二焊盘,多个第一供电区内的第一焊盘1011排列成相互平行的数个第一竖列,多个第一供电区内的第二焊盘1012排列成相互平行的数个第二竖列,且第一竖列和第二竖列交替设置;第二供电区102包括多个第二焊盘和多个第三焊盘,多个第二供电区内的第二焊盘1021排列成相互平行的数个第三竖列,多个第二供电区内的第三焊盘1022排列成相互平行的数个第四竖列,且第三竖列和第四竖列交替设置,且每一第三竖列与一个第二竖列共线设置。In this embodiment, the first power supply area 101 includes a plurality of first pads and a plurality of second pads, and the first pads 1011 in the plurality of first power supply areas are arranged in parallel first vertical columns. The second pads 1012 in the plurality of first power supply areas are arranged into a plurality of second vertical columns parallel to each other, and the first vertical columns and the second vertical columns are alternately arranged; the second power supply region 102 includes a plurality of second pads And a plurality of third pads, the second pads 1021 in the plurality of second power supply areas are arranged in parallel third vertical columns, and the third pads 1022 in the plurality of second power supply areas are arranged parallel to each other A number of fourth vertical columns, and the third vertical columns and the fourth vertical columns are alternately arranged, and each third vertical column is arranged collinearly with a second vertical column.
具体地,第一竖列的各第一焊盘并联,第二竖列的各第二焊盘并联,第三竖列的各第二焊盘并联,第四竖列的各第三焊盘并联;并且第一竖列的第一焊盘与供电引脚2051连接,第二竖列的第二焊盘与第三竖列的第二焊盘连接,第四竖列的第三焊盘与接地引脚2052连接。进一步地,位于第一供电区101内的所有第一焊盘并联,位于第一供电区101内的所有第二焊盘并联,并且位于第二供电区102内的所有第二焊盘并联,位于第二供电区102内的所有第三焊盘并联。Specifically, the first pads of the first vertical column are connected in parallel, the second pads of the second vertical column are connected in parallel, the second pads of the third vertical column are connected in parallel, and the third pads of the fourth vertical column are connected in parallel ; And the first pad of the first vertical column is connected to the power supply pin 2051, the second pad of the second vertical column is connected to the second pad of the third vertical column, and the third pad of the fourth vertical column is grounded Pin 2052 is connected. Further, all the first pads located in the first power supply area 101 are connected in parallel, all the second pads located in the first power supply area 101 are connected in parallel, and all the second pads located in the second power supply area 102 are connected in parallel, located at All third pads in the second power supply area 102 are connected in parallel.
本实施例中,基板20的安装面上设置有第一阻焊层206,基板20上与安装面相对的贴合面上设置有第二阻焊层207。第一阻焊层206和第二阻焊层207均为绝缘层。具体地,各焊盘对应的第一阻焊层206上设置有第一开口,相同的,在供电引脚2051、接地引脚2052、第一电源引脚2053、第二电源引脚2054以及第三电源引脚2055对应的第二阻焊层207上设置有第二开口,使得只在第一开口和第二开口处进行焊接,第一开口和第二开口的外侧不进行焊接,提高了芯片的焊接精度。In this embodiment, the first solder resist layer 206 is provided on the mounting surface of the substrate 20, and the second solder resist layer 207 is provided on the bonding surface of the substrate 20 opposite to the mounting surface. Both the first solder resist layer 206 and the second solder resist layer 207 are insulating layers. Specifically, a first opening is provided on the first solder resist layer 206 corresponding to each pad. Similarly, the power supply pin 2051, the ground pin 2052, the first power pin 2053, the second power pin 2054, and the first The second solder resist layer 207 corresponding to the three power pins 2055 is provided with a second opening, so that welding is performed only at the first opening and the second opening, and the outer sides of the first opening and the second opening are not welded, which improves the chip Welding accuracy.
本实施例中,芯片还包括封装罩30,晶圆10设置在基板20的安装面上,封装罩30罩设在晶圆10上,且与安装面连接。封装罩30可以对晶 圆10进行密封,同时封装罩30也可以对晶圆10进行保护,以免外界物体与晶圆10接触造成晶圆10的损坏。In this embodiment, the chip further includes a packaging cover 30, the wafer 10 is disposed on the mounting surface of the substrate 20, the packaging cover 30 is disposed on the wafer 10, and is connected to the mounting surface. The encapsulation cover 30 can seal the wafer 10, and at the same time, the encapsulation cover 30 can also protect the wafer 10 from damage caused by contact of the external object with the wafer 10.
进一步地,封装罩30为塑料罩或陶瓷罩或金属罩。Further, the package cover 30 is a plastic cover, a ceramic cover or a metal cover.
在其他实施例中,还提供一种电器设备,包括:如上所述的芯片。In other embodiments, an electrical device is also provided, including: the chip as described above.
继续参照图1-图6。在其他实施例中,还提供一种芯片,包括:基板20以及安装在基板20上的晶圆10;Continue to refer to Figures 1-6. In other embodiments, a chip is further provided, including: a substrate 20 and a wafer 10 mounted on the substrate 20;
晶圆10上依次设置的第一供电区101、第二供电区102、第三供电区103和第四供电区104;第一供电区101包括第一焊盘和第二焊盘,第二供电区102包括第二焊盘和三焊盘;第三供电区103包括第三焊盘和第四焊盘,第四供电区104包括第四焊盘和五焊盘;The first power supply area 101, the second power supply area 102, the third power supply area 103, and the fourth power supply area 104 provided on the wafer 10 in sequence; the first power supply area 101 includes a first pad and a second pad, and the second power supply The area 102 includes second and third pads; the third power supply area 103 includes third and fourth pads, and the fourth power supply area 104 includes fourth and fifth pads;
第一供电区内的第一焊盘1011作为电源输入端,第一供电区内的第二焊盘1012与第二供电区内的第二焊盘1021连接,第一供电区内的第二焊盘1012作为101第一供电区的接地端;第二供电区内的第二焊盘1021作为102第二供电区的电源端,第二供电区内的第三焊盘1022与第三供电区内的第三焊盘1031连接,第二供电区内的第三焊盘1022作为102第二供电区的接地端;第三供电区内的第三焊盘1031作为103第三供电区的电源端,第三供电区内的第四焊盘1032与第四供电区内的第四焊盘1041连接,第三供电区内的第四焊盘1032作为103第三供电区的接地端;第四供电区内的第四焊盘1041作为104第四供电区的电源端,第四供电区内的第五焊盘1042作为104第四供电区的接地端;The first pad 1011 in the first power supply area serves as a power input terminal, the second pad 1012 in the first power supply area is connected to the second pad 1021 in the second power supply area, and the second solder in the first power supply area The disk 1012 serves as the ground terminal of the first power supply area 101; the second pad 1021 in the second power supply area serves as the power supply terminal of the second power supply area 102, the third pad 1022 in the second power supply area and the third power supply area The third pad 1031 is connected, the third pad 1022 in the second power supply area serves as the ground terminal of the second power supply area 102; the third pad 1031 in the third power supply area serves as the power supply terminal of the third power supply area 103, The fourth pad 1032 in the third power supply area is connected to the fourth pad 1041 in the fourth power supply area, and the fourth pad 1032 in the third power supply area serves as the ground terminal of the third power supply area 103; the fourth power supply area The fourth pad 1041 in the inside serves as the power terminal of the fourth power supply area 104, and the fifth pad 1042 in the fourth power supply area serves as the ground terminal of the fourth power supply area 104;
基板20包括层叠设置的第一中间金属板203、第二中间金属板204、底层金属板205,以及设置在相邻金属板之间的绝缘板,晶圆10设置在基板20上的安装面上;The substrate 20 includes a stacked first intermediate metal plate 203, a second intermediate metal plate 204, a bottom metal plate 205, and an insulating plate provided between adjacent metal plates. The wafer 10 is provided on the mounting surface of the substrate 20 ;
底层金属板205背离安装面设置且底层金属板205上设置有供电引脚2051、接地引脚2052、第一电源引脚2053,第二电源引脚2054,第三电源引脚2055;The bottom metal plate 205 is disposed away from the installation surface and the bottom metal plate 205 is provided with a power supply pin 2051, a ground pin 2052, a first power pin 2053, a second power pin 2054, and a third power pin 2055;
在第一中间金属板203和第二中间金属板204上设置导电孔,使得供电引脚2051与第一焊盘连接、接地引脚2052与第五焊盘连接、第一电源引脚2053与第二焊盘连接、第二电源引脚2054与第三焊盘连接、第三电源引脚2055与第四焊盘连接。Conductive holes are provided on the first intermediate metal plate 203 and the second intermediate metal plate 204 so that the power supply pin 2051 is connected to the first pad, the ground pin 2052 is connected to the fifth pad, and the first power pin 2053 and the second Two pads are connected, the second power pin 2054 is connected to the third pad, and the third power pin 2055 is connected to the fourth pad.
具体地,供电引脚2051和接地引脚2052设置在底层金属板205的中间位置;第一电源引脚2053、第二电源引脚2054、第三电源引脚2055设置在底层金属板205的边缘。Specifically, the power supply pin 2051 and the ground pin 2052 are provided in the middle of the bottom metal plate 205; the first power pin 2053, the second power pin 2054, and the third power pin 2055 are provided at the edge of the bottom metal plate 205 .
具体地,基板20上间隔设置有贯穿基板20的第一导电孔201和第二导电孔202,第一导电孔201朝向安装面的一端与第一供电区内的第一焊盘1011连接,第一导电孔201背离安装面的一端与供电引脚2051连接;第二导电孔202朝向安装面的一端与第四供电区内的第五焊盘1042连接,第二导电孔202背离安装面的一端与接地引脚2052连接。Specifically, a first conductive hole 201 and a second conductive hole 202 penetrating through the substrate 20 are provided on the substrate 20 at intervals. The end of the first conductive hole 201 facing the mounting surface is connected to the first pad 1011 in the first power supply area. The end of a conductive hole 201 facing away from the mounting surface is connected to the power supply pin 2051; the end of the second conductive hole 202 facing the mounting surface is connected to the fifth pad 1042 in the fourth power supply area, and the end of the second conductive hole 202 facing away from the mounting surface Connect to ground pin 2052.
具体地,第一导电孔201和第二导电孔202为直孔。Specifically, the first conductive hole 201 and the second conductive hole 202 are straight holes.
具体地,第一导电孔201和第二导电孔202为多个。Specifically, there are a plurality of first conductive holes 201 and second conductive holes 202.
具体地,第一电源引脚2053通过第一连接孔与第二焊盘电连接,第二电源引脚2054通过第二连接孔与第三焊盘电连接,第三电源引脚2055通过第三连接孔与第四焊盘电连接;第一连接孔、第二连接孔和第三连接孔均为多个。Specifically, the first power pin 2053 is electrically connected to the second pad through the first connection hole, the second power pin 2054 is electrically connected to the third pad through the second connection hole, and the third power pin 2055 is connected through the third The connection hole is electrically connected to the fourth pad; the first connection hole, the second connection hole, and the third connection hole are all plural.
当用于本申请中时,虽然术语“第一”、“第二”等可能会在本申请中使用以描述各元件,但这些元件不应受到这些术语的限制。这些术语仅用于将一个元件与另一个元件区别开。比如,在不改变描述的含义的情况下,第一元件可以叫做第二元件,并且同样第,第二元件可以叫做第一元件,只要所有出现的“第一元件”一致重命名并且所有出现的“第二元件”一致重命名即可。第一元件和第二元件都是元件,但可以不是相同的元件。When used in this application, although the terms "first", "second", etc. may be used in this application to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, without changing the meaning of the description, the first element can be called the second element, and likewise, the second element can be called the first element, as long as all occurrences of the "first element" are consistently renamed and all occurrences of The "second component" can be renamed consistently. The first element and the second element are both elements, but they may not be the same element.
另外,上述技术描述中使用术语以提供所描述的实施例的透彻理解。然而,并不需要过于详细的细节以实现所描述的实施例。因此,实施例的 上述描述是为了阐释和描述而呈现的。上述描述中所呈现的实施例以及根据这些实施例所公开的例子是单独提供的,以添加上下文并有助于理解所描述的实施例。上述说明书不用于做到无遗漏或将所描述的实施例限制到本公开的精确形式。根据上述教导,若干修改、选择适用以及变化是可行的。在某些情况下,没有详细描述为人所熟知的处理步骤以避免不必要地影响所描述的实施例。In addition, terminology is used in the above technical description to provide a thorough understanding of the described embodiments. However, no excessively detailed details are required to implement the described embodiments. Therefore, the above description of the embodiments is presented for explanation and description. The embodiments presented in the above description and the examples disclosed according to these embodiments are provided separately to add context and help to understand the described embodiments. The above description is not intended to be without omission or to limit the described embodiments to the precise form of this disclosure. Based on the above teachings, several modifications, choices and changes are possible. In some cases, well-known processing steps are not described in detail to avoid unnecessarily affecting the described embodiments.

Claims (16)

  1. 一种芯片,其特征在于,包括:基板以及安装在所述基板上的晶圆;A chip characterized by comprising: a substrate and a wafer mounted on the substrate;
    所述晶圆上具有间隔设置的第一供电区以及第二供电区,所述第一供电区包括第一焊盘和第二焊盘,所述第二供电区包括第二焊盘和第三焊盘;The wafer has a first power supply area and a second power supply area spaced apart, the first power supply area includes a first pad and a second pad, and the second power supply area includes a second pad and a third Pad
    所述晶圆设置在所述基板上的安装面上;所述基板包括背离所述安装面的底层金属板、与所述底层金属板平行且间隔的设置的至少一个中间金属板,以及设置在相邻金属板之间的绝缘板;The wafer is disposed on a mounting surface on the substrate; the substrate includes a bottom metal plate facing away from the mounting surface, at least one intermediate metal plate disposed parallel to and spaced from the bottom metal plate, and disposed on Insulation plate between adjacent metal plates;
    所述底层金属板上设置有供电引脚、接地引脚以及第一电源引脚;The bottom metal plate is provided with a power supply pin, a ground pin and a first power pin;
    所述基板上间隔设置有贯穿所述基板的第一导电孔和第二导电孔,所述第一导电孔朝向所述安装面的一端与所述第一供电区内的第一焊盘连接,所述第一导电孔背离所述安装面的一端与所述供电引脚连接;所述第二导电孔朝向所述安装面的一端与所述第二供电区内的第三焊盘连接,所述第二导电孔背离所述安装面的一端与所述接地引脚连接;所述第一供电区内的第二焊盘与所述第二供电区内的第二焊盘之间通过位于所述中间金属板上的第一电路连接,且所述第一电路通过第一连接孔与所述第一电源引脚电连接。A first conductive hole and a second conductive hole penetrating the substrate are provided at intervals on the substrate, and an end of the first conductive hole facing the mounting surface is connected to the first pad in the first power supply area, The end of the first conductive hole facing away from the mounting surface is connected to the power supply pin; the end of the second conductive hole facing the mounting surface is connected to the third pad in the second power supply area. The end of the second conductive hole facing away from the mounting surface is connected to the ground pin; the second pad in the first power supply area and the second pad in the second power supply area are located between The first circuit on the intermediate metal plate is connected, and the first circuit is electrically connected to the first power pin through a first connection hole.
  2. 根据权利要求1所述的芯片,其特征在于,所述晶圆还包括第三供电区,所述第三供电区与所述第一供电区和所述第二供电区间隔的设置,所述第三供电区包括第三焊盘和第四焊盘;所述第三供电区内的第四焊盘与所述第二导电孔朝向所述安装面的一端连接,所述第三供电区内的第三焊盘与所述第二供电区内的第三焊盘之间通过位于所述中间金属板上的第二电路连接;所述底层金属板上还设置有第二电源引脚,所述第二电路通过第二连接孔与所述第二电源引脚电连接。The chip according to claim 1, wherein the wafer further includes a third power supply area, and the third power supply area is spaced apart from the first power supply area and the second power supply area, the The third power supply area includes a third pad and a fourth pad; the fourth pad in the third power supply area is connected to an end of the second conductive hole facing the mounting surface, and the third power supply area The third pad of the second power supply area is connected to the third pad of the second power supply area through a second circuit on the middle metal plate; the bottom metal plate is also provided with a second power pin, so The second circuit is electrically connected to the second power pin through a second connection hole.
  3. 根据权利要求2所述的芯片,其特征在于,所述晶圆还包括第四供电区,所述第四供电区与所述第一供电区、所述第二供电区以及所述第 三供电区间隔的设置,所述第四供电区包括第四焊盘和第五焊盘;所述第四供电区内的第五焊盘与所述第二导电孔朝向所述安装面的一端连接,所述第四供电区内的第四焊盘与所述第三供电区内的第四焊盘之间通过位于所述中间金属板上的第三电路连接;所述底层金属板上还设置有第三电源引脚,所述第三电路通过第三连接孔与所述第三电源引脚电连接。The chip according to claim 2, wherein the wafer further includes a fourth power supply area, the fourth power supply area and the first power supply area, the second power supply area, and the third power supply The arrangement of the interval, the fourth power supply area includes a fourth pad and a fifth pad; the fifth pad in the fourth power supply area is connected to the end of the second conductive hole facing the mounting surface, The fourth pad in the fourth power supply area and the fourth pad in the third power supply area are connected by a third circuit located on the middle metal plate; the bottom metal plate is also provided with A third power pin. The third circuit is electrically connected to the third power pin through a third connection hole.
  4. 根据权利要求3所述的芯片,其特征在于,所述供电引脚和所述接地引脚设置在所述底层金属板的中间位置,所述第一电源引脚、所述第二电源引脚以及所述第三电源引脚位于所述底层金属板的边缘。The chip according to claim 3, wherein the power supply pin and the ground pin are disposed in the middle of the bottom metal plate, and the first power pin and the second power pin And the third power pin is located at the edge of the bottom metal plate.
  5. 根据权利要求3所述的芯片,其特征在于,所述中间金属板包括朝向所述晶圆设置的第一中间金属板、以及位于所述第一中间金属板和所述底层金属板之间的第二中间金属板,所述第二电路设置在所述第一中间金属板上,所述第一电路和所述第三电路设置在所述第二中间金属板上。The chip according to claim 3, characterized in that the intermediate metal plate includes a first intermediate metal plate disposed toward the wafer, and a portion between the first intermediate metal plate and the bottom metal plate A second intermediate metal plate, the second circuit is provided on the first intermediate metal plate, and the first circuit and the third circuit are provided on the second intermediate metal plate.
  6. 根据权利要求1所述的芯片,其特征在于,所述基板的安装面上设置有第一阻焊层,所述基板上与所述安装面相对的贴合面上设置有第二阻焊层。The chip according to claim 1, wherein a first solder resist layer is provided on the mounting surface of the substrate, and a second solder resist layer is provided on the bonding surface of the substrate opposite to the mounting surface .
  7. 根据权利要求6所述的芯片,其特征在于,所述第一阻焊层和所述第二阻焊层均为绝缘层。The chip according to claim 6, wherein the first solder resist layer and the second solder resist layer are both insulating layers.
  8. 根据权利要求1所述的芯片,其特征在于,所述芯片还包括封装罩,所述封装罩罩设置在所述晶圆上,且与所述安装面连接。The chip according to claim 1, wherein the chip further comprises a packaging cover, the packaging cover is provided on the wafer and connected to the mounting surface.
  9. 根据权利要求8所述的芯片,其特征在于,所述封装罩为塑料罩或陶瓷罩或金属罩。The chip according to claim 8, wherein the packaging cover is a plastic cover, a ceramic cover or a metal cover.
  10. 一种电器设备,其特征在于,包括:权利要求1-9任一项所述的芯片。An electric appliance, characterized by comprising: the chip according to any one of claims 1-9.
  11. 一种芯片,其特征在于,包括:基板以及安装在所述基板上的晶圆;A chip characterized by comprising: a substrate and a wafer mounted on the substrate;
    所述晶圆上依次设置的第一供电区、第二供电区、第三供电区和第四供电区;所述第一供电区包括第一焊盘和第二焊盘,所述第二供电区包括 第二焊盘和三焊盘;所述第三供电区包括第三焊盘和第四焊盘,所述第四供电区包括第四焊盘和五焊盘;A first power supply area, a second power supply area, a third power supply area, and a fourth power supply area that are sequentially arranged on the wafer; the first power supply area includes a first pad and a second pad, and the second power supply The area includes a second pad and a three pad; the third power supply area includes a third pad and a fourth pad, and the fourth power supply area includes a fourth pad and a five pad;
    所述第一供电区内的第一焊盘作为电源输入端,所述第一供电区内的第二焊盘与所述第二供电区内的第二焊盘连接,所述第一供电区内的第二焊盘作为所述第一供电区的接地端;所述第二供电区内的第二焊盘作为所述第二供电区的电源端,所述第二供电区内的第三焊盘与所述第三供电区内的第三焊盘连接,所述第二供电区内的第三焊盘作为所述第二供电区的接地端;所述第三供电区内的第三焊盘作为所述第三供电区的电源端,所述第三供电区内的第四焊盘与所述第四供电区内的第四焊盘连接,所述第三供电区内的第四焊盘作为所述第三供电区的接地端;所述第四供电区内的第四焊盘作为所述第四供电区的电源端,所述第四供电区内的第五焊盘作为第四供电区的接地端;The first pad in the first power supply area serves as a power input terminal, the second pad in the first power supply area is connected to the second pad in the second power supply area, and the first power supply area The second pad in the area serves as the ground terminal of the first power supply area; the second pad in the second power supply area serves as the power supply terminal of the second power supply area, and the third in the second power supply area The pad is connected to the third pad in the third power supply area, and the third pad in the second power supply area serves as the ground terminal of the second power supply area; the third in the third power supply area The pad serves as a power end of the third power supply area, the fourth pad in the third power supply area is connected to the fourth pad in the fourth power supply area, and the fourth pad in the third power supply area The pad serves as the ground terminal of the third power supply area; the fourth pad in the fourth power supply area serves as the power supply terminal of the fourth power supply area, and the fifth pad in the fourth power supply area serves as the first 4. The ground terminal of the power supply area;
    所述基板包括层叠设置的第一中间金属板、第二中间金属板、底层金属板,以及设置在相邻金属板之间的绝缘板,所述晶圆设置在所述基板上的安装面上;The substrate includes a stacked first intermediate metal plate, a second intermediate metal plate, a bottom metal plate, and an insulating plate provided between adjacent metal plates, and the wafer is provided on a mounting surface on the substrate ;
    所述底层金属板背离所述安装面设置且所述底层金属板上设置有供电引脚、接地引脚、第一电源引脚,第二电源引脚,第三电源引脚;The bottom metal plate is disposed away from the mounting surface and the bottom metal plate is provided with a power supply pin, a ground pin, a first power pin, a second power pin, and a third power pin;
    在所述第一中间金属板和所述第二中间金属板上设置导电孔,使得所述供电引脚与第一焊盘连接、所述接地引脚与第五焊盘连接、所述第一电源引脚与第二焊盘连接、第二电源引脚与第三焊盘连接、所述第三电源引脚与第四焊盘连接。Conductive holes are provided on the first intermediate metal plate and the second intermediate metal plate so that the power supply pin is connected to the first pad, the ground pin is connected to the fifth pad, and the first The power supply pin is connected to the second pad, the second power pin is connected to the third pad, and the third power pin is connected to the fourth pad.
  12. 根据权利要求11所述的芯片,其特征在于,所述供电引脚和所述接地引脚设置在所述底层金属板的中间位置;所述第一电源引脚、所述第二电源引脚、所述第三电源引脚设置在所述底层金属板的边缘。The chip according to claim 11, wherein the power supply pin and the ground pin are provided in the middle of the bottom metal plate; the first power pin and the second power pin 3. The third power pin is disposed at the edge of the bottom metal plate.
  13. 根据权利要求11或12所述的芯片,其特征在于,所述基板上间隔设置有贯穿所述基板的第一导电孔和第二导电孔,所述第一导电孔朝向 所述安装面的一端与所述第一供电区内的第一焊盘连接,所述第一导电孔背离所述安装面的一端与所述供电引脚连接;所述第二导电孔朝向所述安装面的一端与所述第四供电区内的第五焊盘连接,所述第二导电孔背离所述安装面的一端与所述接地引脚连接。The chip according to claim 11 or 12, wherein the substrate is provided with a first conductive hole and a second conductive hole penetrating the substrate at intervals, the first conductive hole facing an end of the mounting surface Connected to the first pad in the first power supply area, the end of the first conductive hole facing away from the mounting surface is connected to the power supply pin; the end of the second conductive hole facing the mounting surface is connected to A fifth pad in the fourth power supply area is connected, and an end of the second conductive hole facing away from the mounting surface is connected to the ground pin.
  14. 根据权利要求13所述的芯片,其特征在于,所述第一导电孔和第二导电孔为直孔。The chip according to claim 13, wherein the first conductive hole and the second conductive hole are straight holes.
  15. 根据权利要求14所述的芯片,其特征在于,所述第一导电孔和第二导电孔为多个。The chip according to claim 14, wherein there are a plurality of first conductive holes and second conductive holes.
  16. 根据权利要求15所述的芯片,其特征在于,所述第一电源引脚通过第一连接孔与第二焊盘电连接,所述第二电源引脚通过第二连接孔与第三焊盘电连接,所述第三电源引脚通过第三连接孔与第四焊盘电连接;所述第一连接孔、所述第二连接孔和所述第三连接孔均为多个。The chip according to claim 15, wherein the first power pin is electrically connected to the second pad through the first connection hole, and the second power pin is connected to the third pad through the second connection hole For electrical connection, the third power pin is electrically connected to the fourth pad through a third connection hole; the first connection hole, the second connection hole, and the third connection hole are all plural.
PCT/CN2018/114390 2018-11-07 2018-11-07 Chip and electrical equipment WO2020093277A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/CN2018/114390 WO2020093277A1 (en) 2018-11-07 2018-11-07 Chip and electrical equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2018/114390 WO2020093277A1 (en) 2018-11-07 2018-11-07 Chip and electrical equipment

Publications (1)

Publication Number Publication Date
WO2020093277A1 true WO2020093277A1 (en) 2020-05-14

Family

ID=70610784

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2018/114390 WO2020093277A1 (en) 2018-11-07 2018-11-07 Chip and electrical equipment

Country Status (1)

Country Link
WO (1) WO2020093277A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113838815A (en) * 2021-09-23 2021-12-24 西安紫光国芯半导体有限公司 Substrate and chip assembly

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030080400A1 (en) * 2001-10-26 2003-05-01 Fujitsu Limited Semiconductor system-in-package
CN1470070A (en) * 2000-07-31 2004-01-21 英特尔公司 Electronic assembly comprising interposer with embedded capacitors and methods of manufacture
US20040166659A1 (en) * 1998-12-21 2004-08-26 Megic Corporation Top layers of metal for high performance IC's
CN101131976A (en) * 2006-08-23 2008-02-27 恩益禧电子股份有限公司 Semiconductor device and semiconductor package
CN108461478A (en) * 2017-02-22 2018-08-28 英特尔公司 Embedded Multi-core interconnection bridge with improved power Transmission

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040166659A1 (en) * 1998-12-21 2004-08-26 Megic Corporation Top layers of metal for high performance IC's
CN1470070A (en) * 2000-07-31 2004-01-21 英特尔公司 Electronic assembly comprising interposer with embedded capacitors and methods of manufacture
US20030080400A1 (en) * 2001-10-26 2003-05-01 Fujitsu Limited Semiconductor system-in-package
CN101131976A (en) * 2006-08-23 2008-02-27 恩益禧电子股份有限公司 Semiconductor device and semiconductor package
CN108461478A (en) * 2017-02-22 2018-08-28 英特尔公司 Embedded Multi-core interconnection bridge with improved power Transmission

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113838815A (en) * 2021-09-23 2021-12-24 西安紫光国芯半导体有限公司 Substrate and chip assembly

Similar Documents

Publication Publication Date Title
US6501157B1 (en) Substrate for accepting wire bonded or flip-chip components
US6559531B1 (en) Face to face chips
US7795713B2 (en) Semiconductor device and method for producing the same
US8810031B2 (en) Wafer-to-wafer stack with supporting pedestal
US7372131B2 (en) Routing element for use in semiconductor device assemblies
KR100690922B1 (en) Semiconductor device package
US8253228B2 (en) Package on package structure
US8791501B1 (en) Integrated passive device structure and method
US9142519B2 (en) Semiconductor device with covering member that partially covers wiring substrate
US7786600B2 (en) Circuit substrate having circuit wire formed of conductive polarization particles, method of manufacturing the circuit substrate and semiconductor package having the circuit wire
JP2014096547A (en) Semiconductor device and method of manufacturing the same
CN104241258A (en) Semiconductor device
WO2020093277A1 (en) Chip and electrical equipment
TWI517354B (en) Semiconductor package with embedded decoupling capacitors
KR20120063202A (en) Semiconductor package and display panel assembly having the same
US11322435B2 (en) Package substrate having power trace pattern and ground trace pattern, and semiconductor package including the same
CN208889644U (en) Chip and electrical equipment
US10930618B2 (en) Semiconductor package having chip stack
JP2014120612A (en) Semiconductor device, and semiconductor module using the same
TWI675387B (en) Film capacitor structure and semiconductor device having the same
WO2020093265A1 (en) Wafer, smart processor, and electrical device
TWI825771B (en) Semiconductor device
WO2020093266A1 (en) Wafer, intelligent processor and electrical equipment
US7939951B2 (en) Mounting substrate and electronic apparatus
KR20230044858A (en) Semiconductor package

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18939735

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 17-08-2021)

122 Ep: pct application non-entry in european phase

Ref document number: 18939735

Country of ref document: EP

Kind code of ref document: A1