WO2020037720A1 - 一种刷洗装置及清洗设备 - Google Patents

一种刷洗装置及清洗设备 Download PDF

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Publication number
WO2020037720A1
WO2020037720A1 PCT/CN2018/104482 CN2018104482W WO2020037720A1 WO 2020037720 A1 WO2020037720 A1 WO 2020037720A1 CN 2018104482 W CN2018104482 W CN 2018104482W WO 2020037720 A1 WO2020037720 A1 WO 2020037720A1
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WO
WIPO (PCT)
Prior art keywords
sealing
seal
ring
base
outer ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2018/104482
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English (en)
French (fr)
Inventor
施杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan China Star Optoelectronics Technology Co Ltd
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Wuhan China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Wuhan China Star Optoelectronics Technology Co Ltd filed Critical Wuhan China Star Optoelectronics Technology Co Ltd
Priority to US16/301,891 priority Critical patent/US10946418B2/en
Publication of WO2020037720A1 publication Critical patent/WO2020037720A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/12—Brushes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces

Definitions

  • the invention relates to the field of substrate cleaning, in particular to a brush cleaning device and cleaning equipment.
  • Existing cleaning equipment generally has a brushing device for cleaning the front and back of a substrate.
  • the principle is to use the rotation of a hair brush to bring the tip of the fluff into contact with the surface of the substrate, thereby disturbing and scrubbing the substrate surface.
  • the rigid structure design is used to seal the connection between the drive shaft and the body of the chamber, which has poor sealing performance against high-temperature and high-pressure chemical liquid vapors, which easily leads to leakage of the chemical liquid vapors.
  • the invention provides a brushing device to solve the technical problem that the existing sealing mechanism has poor sealing performance, which leads to the easy leakage of medicinal liquid vapor.
  • a scrubbing device includes:
  • a sealing mechanism provided on the body for sealing the connection between the drive shaft and the body;
  • the sealing mechanism includes a sealing member sleeved on the driving shaft, and one end of the sealing member is tightly sealed and connected with a side wall of the body; the driving shaft is sleeved with a first seal made of a hard material.
  • the first and second sealing rings are in contact with the inner wall of the seal;
  • the first sealing ring is provided with a connection portion, and the second
  • the seal ring is provided with a sleeve portion sleeved on the connecting portion, and the outside of the sleeve portion is in contact with the inner wall of the seal;
  • the seal includes a base and a seal outer ring, and the drive shaft passes through in sequence A base and a sealing outer ring, the base is fixed on the body; a sealing film is provided between the sealing outer ring and the base, one end of the sealing film is fixedly connected to the base, and the other end is fixedly connected to the sealing outer ring .
  • the first seal ring and the second seal ring are both disposed inside the seal outer ring.
  • a damping bracket is provided on the sealing outer ring, one end of the damping bracket is fixedly connected to the outside of the sealing outer ring, and the other end is fixedly connected to the base.
  • the shock-absorbing bracket is fixedly connected to the base by screws.
  • the sealing film is made of a soft anticorrosive material.
  • a protective shell is fixedly disposed on the base, and the sealing film is located inside the protective shell.
  • the sealing mechanism is located inside the body.
  • a scrubbing device includes:
  • a sealing mechanism provided on the body for sealing the connection between the drive shaft and the body;
  • the sealing mechanism includes a sealing member sleeved on the driving shaft, and one end of the sealing member is tightly sealed and connected with a side wall of the body; the driving shaft is sleeved with a first seal made of a hard material. Ring and a second sealing ring made of a soft material, the first sealing ring and the second sealing ring are in contact with the inner wall of the seal.
  • the first seal ring is provided with a connection portion
  • the second seal ring is provided with a sleeve portion sleeved on the connection portion, and the outside of the sleeve portion is in contact with the inner wall of the seal.
  • the seal includes a base and a seal outer ring, the drive shaft passes through the base and the seal outer ring in order, and the base is fixed on the body; a gap is provided between the seal outer ring and the base One end of the sealing film is fixedly connected to the base, and the other end is fixedly connected to the sealing outer ring.
  • the first seal ring and the second seal ring are both disposed inside the seal outer ring.
  • a damping bracket is provided on the sealing outer ring, one end of the damping bracket is fixedly connected to the outside of the sealing outer ring, and the other end is fixedly connected to the base.
  • the shock-absorbing bracket is fixedly connected to the base by screws.
  • the sealing film is made of a soft anticorrosive material.
  • a protective shell is fixedly disposed on the base, and the sealing film is located inside the protective shell.
  • the sealing mechanism is located inside the body.
  • the present invention also provides a cleaning device, including a spraying device, a drying device, and the above-mentioned brushing device; wherein the spraying device is disposed above a drive shaft for spraying and cleaning a substrate; Dry the cleaned substrate.
  • the present invention also provides a cleaning device, including:
  • a spraying device which is disposed above the drive shaft for spray cleaning the substrate
  • a drying device for drying the cleaned substrate and,
  • the brushing device includes:
  • a sealing mechanism provided on the body for sealing the connection between the drive shaft and the body;
  • the sealing mechanism includes a sealing member sleeved on the driving shaft, and one end of the sealing member is tightly sealed and connected with a side wall of the body; the driving shaft is sleeved with a first seal made of a hard material. Ring and a second sealing ring made of a soft material, the first sealing ring and the second sealing ring are in contact with the inner wall of the seal.
  • first seal ring Through the combination of a rigid first seal ring and a soft second seal ring, they act together on the drive shaft to play a double protective sealing role. At the same time, a soft second seal ring is used to enhance the seal between the inside of the seal and the outside of the drive shaft. The tightness of the connection prevents high temperature and high pressure steam and liquid medicine from advancing along the drive shaft, thereby preventing leakage of liquid medicine and steam from the body.
  • FIG. 1 is a schematic structural diagram of a brushing device in a specific embodiment of the present invention
  • FIG. 2 is a schematic structural diagram of a sealing mechanism in a specific embodiment of the present invention.
  • FIG. 3 is an enlarged schematic view of A in FIG. 2; FIG.
  • FIG. 4 is a schematic diagram of a cleaning device in a specific embodiment of the present invention.
  • sealing mechanism sealing mechanism; 51, seals; 511, base; 512, sealing outer ring; 5121, snap-in portion; 513, sealing film; 514, shock-absorbing bracket; 515, protective shell; 52, first sealing ring; 521, connecting part; 53, second sealing ring; 531, socket part; 54, bearing seal; 55, screw;
  • the present invention aims at the existing brushing device, adopts a rigid structure design to seal the connection between the driving shaft 20 and the chamber body 10, has poor sealing performance against high-temperature and high-pressure chemical liquid vapor, and may easily lead to technical problems of chemical liquid vapor leakage. Examples can solve this defect.
  • a brushing device as shown in FIG. 1, the brushing device includes a body 10, and a driving shaft 20 penetrating inside and outside the body 10 is horizontally disposed on the body 10, and a brush for cleaning a substrate is fixed on the driving shaft 20 30.
  • a motor 40 that is drivingly connected to the drive shaft 20 to drive the drive shaft 20 to rotate is fixedly disposed on the outside of the body 10; a sealing mechanism is provided on the body 10 to seal the connection between the drive shaft 20 and the body 10. 50.
  • FIG. 1 only shows a case where two driving shafts 20 are provided. It can be understood that in a specific implementation, one driving shaft 20 or two or more driving shafts 20 may be provided.
  • the sealing mechanism 50 includes a sealing member 51 sleeved on the driving shaft 20.
  • One end of the sealing member 51 is tightly connected to the side wall of the body 10.
  • the driving shaft 20 is sleeved on the driving shaft 20.
  • a first seal ring 52 made of a hard material and a second seal ring 53 made of a soft material are provided. The first seal ring 52 and the second seal ring 53 are in contact with the inner wall of the seal 51. .
  • the hard first seal ring 52 and the soft second seal ring 53 are combined to work together on the drive shaft 20 so as to form a sealed environment with the seal 51; the soft material has a certain elasticity, so that the soft The second seal ring 53 enhances the tightness of the connection with the inside of the seal 51 and the outside of the drive shaft 20, and blocks the high-temperature and high-pressure steam and the medicinal solution from advancing along the drive shaft 20, thereby preventing the medicinal solution and vapor in the body 10 from leaking.
  • the first sealing ring 52 is made of SUS (stainless steel), which has good corrosion resistance, high temperature resistance and abrasion resistance, and prevents the chemical liquid in the body 10 from corroding the first sealing ring. 52.
  • the second sealing ring 53 is made of soft PP (polypropylene), and the PP material has good high temperature resistance and abrasion resistance. It can be understood that the second sealing ring 53 may also be selected from other materials, such as PVC (polyvinyl chloride) or PPE (polypropylene).
  • the seal 51 includes a base 511 and a seal outer ring 512, the drive shaft 20 passes through the base 511 and the seal outer ring 512 in this order, and the base 511 is fixed on the body 10;
  • a sealing film 513 is provided between the ring 512 and the base 511.
  • One end of the sealing film 513 is fixedly connected to the base 511, and the other end is fixedly connected to the sealing outer ring 512.
  • the sealing film 513 connects the base 511 and the sealing outer ring 512 to form a relatively closed sealed space.
  • the first seal ring 52 and the second seal ring 53 are both disposed inside the seal outer ring 512.
  • the sealed outer ring 512 is provided with a shock absorbing bracket 514.
  • One end of the shock absorbing bracket 514 is fixedly connected to the outside of the sealed outer ring 512, and the other end is fixedly connected to the base 511.
  • a certain vibration occurs when the driving shaft 20 rotates.
  • the sealing outer ring 512 and the base 511 are connected by a sealing film 513 and a shock absorbing frame, which ensures that the sealing outer ring 512 vibrates with the driving shaft 20
  • the shock-absorbing bracket 514 is fixedly connected to the base 511 by screws 55; the protective shell 515 is located between the shock-absorbing bracket 514 and the side wall of the base 511, and the screws 55 pass through the shock-absorbing bracket 514 and the protection in order.
  • the housing 515, the screws 55 are screwed to the base 511 and the shock-absorbing bracket 514.
  • the vibration-damping bracket 514 and the base 511 are fixedly connected by the screw 55, so that there is a certain swing space of the vibration-damping bracket 514 and the sealing outer ring 512, which can effectively offset the vibration of the driving shaft 20 against the sealing outer ring 512. Impact.
  • shock-absorbing bracket 514 and the sealing outer ring 512 are also connected by screws 55, which facilitates the mounting and dismounting of the shock-absorbing bracket 514. It can be understood that, in the specific implementation, the shock-absorbing bracket 514 also It can be fixedly connected to the sealing outer ring 512 by other methods, such as welding or integral molding.
  • two damping brackets 514 are symmetrically disposed about the axis line of the seal outer ring 512. While the shock absorbing bracket 514 and the sealing outer ring 512 have a certain swinging amplitude space, the sealing outer ring 512 and the base 511 are prevented from being separated.
  • the sealing film 513 is made of a soft anticorrosive material.
  • the sealing film 513 is made of a PP material.
  • the chemical liquid in the body 10 is prevented from corroding the sealing film 513, and the transmission of vibration between the base 511 and the sealing outer ring 512 is prevented by the soft sealing film 513, thereby reducing wear of the base 511 and the sealing outer ring 512.
  • a protective shell 515 is fixed on the base 511, and the sealing film 513 is located inside the protective shell 515.
  • the sealing film 513 is protected by a protective shell 515 to prevent leakage of the medicinal solution and high-temperature steam after the sealing film 513 is broken.
  • the sealing mechanism 50 is located on the inner side of the body 10, the base 511 is fixedly installed on the inner wall of the body 10, the sealing outer ring 512 is located on the left side of the base 511, and the first sealing ring 52 and the second
  • the sealing ring 53 prevents the chemical liquid and high-temperature steam from entering the cavity between the sealing outer ring 512 and the base 511 along the driving shaft 20, prevents the high-temperature steam and chemical liquid from corroding the inside of the sealing film 513, and improves the service life of the sealing film 513.
  • a bearing seal 54 sleeved on the drive shaft 20 is provided on the inner side of the base 511, and the first seal ring 52, the second seal ring 53 and the bearing seal 54 work together on the drive shaft 20, so as to play a more important role. Good sealing effect.
  • the first seal ring 52 is provided with a connection portion 521
  • the second seal ring 53 is provided with a sleeve portion 531 sleeved on the connection portion 521, and the outside of the sleeve portion 531 It is in contact with the inner wall of the sealing member 51.
  • the second seal ring 53 is sleeved on the outside of the first seal ring 52 through the socket portion 531, so that the first seal ring 52 and the second seal ring 53 are more tightly connected, and the first seal ring 52 and the second seal ring are prevented.
  • a gap at the connection of 53 caused leakage of chemical liquid and high-temperature steam.
  • the inner edge of the right end of the sealing outer ring 512 is bent inwardly to extend a latching portion 5121, and the sleeve portion 531 of the second seal ring 53 is latched at the latching portion 5121, thereby realizing the second seal ring 53
  • the snap-in installation makes the second seal ring 53 fit closer to the inside of the seal outer ring 512, and also facilitates the replacement of the second seal ring 53.
  • the first seal ring 52 is located on the side of the second seal ring 53 away from the base 511.
  • the first seal ring 52 has good corrosion resistance, high temperature resistance and wear resistance.
  • the first seal ring 52 prevents high temperature steam and
  • the second seal ring 53 contacts to prevent the second seal ring 53 from being corroded, thereby increasing the service life of the second seal ring 53.
  • the second seal ring 53 serves as a second protection. If the first seal ring is caused by wear and other reasons When a gap is generated between the drive shaft 20 and the drive shaft 20, the second sealing ring 53 can prevent the chemical liquid and high-temperature steam from leaking through the gap.
  • a cleaning device as shown in FIG. 4, includes a spraying device 60, a drying device 70, and the brushing device described above; the spraying device 60 is disposed above the drive shaft 20 for spray cleaning the substrate; The drying device 70 is used for drying the cleaned substrate.
  • the beneficial effect of the present invention is that the rigid first sealing ring 52 and the flexible second sealing ring 53 are combined to act on the drive shaft 20 to play a double protective sealing role, while using the flexible second sealing ring 53
  • the tightness of the connection with the inside of the seal 51 and the outside of the drive shaft 20 is enhanced, and high-temperature and high-pressure steam and medical liquid are blocked from advancing along the drive shaft 20, thereby preventing the medical liquid and vapor in the body 10 from leaking.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Sealing Devices (AREA)

Abstract

本发明提供一种刷洗装置，包括机体以及驱动轴；机体上设置有用于对驱动轴与机体的连接处进行密封的密封机构；其中，密封机构包括套设在驱动轴上的密封件，密封件一端与机体侧壁贴合密封连接；驱动轴上套设有由硬性材料制成的第一密封圈、以及由软性材料制成的第二密封圈，第一密封圈和第二密封圈均与密封件内壁触接。

Description

一种刷洗装置及清洗设备 技术领域
本发明涉及基板清洗领域，尤其涉及一种刷洗装置及清洗设备。
 背景技术
在液晶面板的制备过程中，需要使用清洗设备对基板进行清洗。现有的清洗设备中，一般会带有刷洗装置，以用于基板正背面的清洗，其原理是利用毛刷的转动，绒毛尖端与基板表面接触，从而扰动、刷洗掉基板表面异物。
清洗设备内因多用到各类化学药液，而且处于高温高压等复杂清洗环境，因此，密封避免漏液是清洗设备最基本的能力要求。但在刷洗装置中，为了保持毛刷的驱动部干燥，驱动轴会延伸到腔室外，现有的刷洗装置中，驱动轴与腔室机体的连接处一般采用轴承和带双沟槽的硬性密封件进行密封。
而采用硬性结构设计对驱动轴和腔室机体的连接处进行密封，对高温高压的药液蒸汽密封性差，容易导致药液蒸汽泄露。
 技术问题
本发明提供一种刷洗装置，以解决现有的密封机构密封性较差，导致药液蒸汽容易泄露的技术问题。
 技术解决方案
一种刷洗装置，包括：
机体；
横向设置且贯穿机体内外的驱动轴；
设置在驱动轴上的毛刷；
设置在机体上以用于对驱动轴与机体的连接处进行密封的密封机构；
其中，所述密封机构包括套设在驱动轴上的密封件，所述密封件一端与机体的侧壁贴合密封并连接；所述驱动轴上套设有由硬性材料制成的第一密封圈以及由软性材料制成的第二密封圈，所述第一密封圈和第二密封圈均与密封件的内壁触接；所述第一密封圈上设置有连接部，所述第二密封圈上设置有套接在连接部上的套接部，所述套接部的外侧与密封件的内壁触接；所述密封件包括基座和密封外环，所述驱动轴依次穿过基座和密封外环，所述基座固定在机体上；所述密封外环与基座之间设置有密封膜，所述密封膜一端与基座固定连接，另一端与密封外环固定连接。
优选的，所述第一密封圈和第二密封圈均设置在密封外环的内侧。
优选的，所述密封外环上设置有减震支架，所述减震支架的一端与密封外环的外侧固定连接，另一端与基座固定连接。
优选的，所述减震支架通过螺丝与基座固定连接。
优选的，所述密封膜由软性防腐材料制成。
优选的，所述基座上固定设置有防护外壳，所述密封膜位于防护外壳的内侧。
优选的，所述密封机构位于机体的内侧。
一种刷洗装置，包括：
机体；
横向设置且贯穿机体内外的驱动轴；
设置在驱动轴上的毛刷；
设置在机体上以用于对驱动轴与机体的连接处进行密封的密封机构；
其中，所述密封机构包括套设在驱动轴上的密封件，所述密封件一端与机体的侧壁贴合密封并连接；所述驱动轴上套设有由硬性材料制成的第一密封圈以及由软性材料制成的第二密封圈，所述第一密封圈和第二密封圈均与密封件的内壁触接。
优选的，所述第一密封圈上设置有连接部，所述第二密封圈上设置有套接在连接部上的套接部，所述套接部的外侧与密封件的内壁触接。
优选的，所述密封件包括基座和密封外环，所述驱动轴依次穿过基座和密封外环，所述基座固定在机体上；所述密封外环与基座之间设置有密封膜，所述密封膜一端与基座固定连接，另一端与密封外环固定连接。
优选的，所述第一密封圈和第二密封圈均设置在密封外环的内侧。
优选的，所述密封外环上设置有减震支架，所述减震支架的一端与密封外环的外侧固定连接，另一端与基座固定连接。
优选的，所述减震支架通过螺丝与基座固定连接。
优选的，所述密封膜由软性防腐材料制成。
优选的，所述基座上固定设置有防护外壳，所述密封膜位于防护外壳的内侧。
优选的，所述密封机构位于机体的内侧。
本发明还提供一种清洗设备，包括喷淋装置、干燥装置以及上述的刷洗装置；其中，所述喷淋装置设置在驱动轴上方，以用于对基板进行喷淋清洗；所述干燥装置用于对清洗后的基板进行干燥。
本发明还提供一种清洗设备，包括：
喷淋装置，所述喷淋装置设置在驱动轴上方，以用于对基板进行喷淋清洗；
干燥装置，所述干燥装置用于对清洗后的基板进行干燥；以及，
刷洗装置，所述刷洗装置包括：
机体；
横向设置且贯穿机体内外的驱动轴；
设置在驱动轴上的毛刷；
设置在机体上以用于对驱动轴与机体的连接处进行密封的密封机构；
其中，所述密封机构包括套设在驱动轴上的密封件，所述密封件一端与机体的侧壁贴合密封并连接；所述驱动轴上套设有由硬性材料制成的第一密封圈以及由软性材料制成的第二密封圈，所述第一密封圈和第二密封圈均与密封件的内壁触接。
 有益效果
通过硬性的第一密封圈与软性的第二密封圈结合，共同作用在驱动轴上，起到双重防护密封作用，同时利用软性的第二密封圈增强与密封件内侧以及驱动轴外侧的连接紧密性，阻挡高温高压蒸汽及药液沿驱动轴前进，从而防止机体内的药液和蒸汽泄露。
 附图说明
为了更清楚地说明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单介绍，显而易见地，下面描述中的附图仅仅是发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本发明具体实施方式中刷洗装置的结构示意图；
图2为本发明具体实施方式中密封机构的结构示意图；
图3为图2中A处放大示意图；
图4为本发明具体实施方式中清洗设备的示意图。
附图标记：
10、机体；20、驱动轴；30、毛刷；40、电机；
50、密封机构；51、密封件；511、基座；512、密封外环；5121、卡接部；513、密封膜；514、减震支架；515、防护外壳；52、第一密封圈；521、连接部；53、第二密封圈；531、套接部；54、轴承密封件；55、螺丝；
60、喷淋装置；70、干燥装置。
本发明的具体实施方式
以下各实施例的说明是参考附加的图示，用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语，例如[上]、[下]、[前]、[后]、[左]、[右]、[内]、[外]、[侧面]等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。在图中，结构相似的单元是用以相同标号表示。
本发明针对现有的刷洗装置，采用硬性结构设计对驱动轴20和腔室机体10的连接处进行密封，对高温高压的药液蒸汽密封性差，容易导致药液蒸汽泄露的技术问题，本实施例能够解决该缺陷。
一种刷洗装置，如图1所示，所述刷洗装置包括机体10，所述机体10上横向设置有贯穿机体10内外的驱动轴20，所述驱动轴20上固定有用于洗刷基板的毛刷30，所述机体10的外侧上固定设置有与驱动轴20传动连接以驱动驱动轴20转动的电机40；所述机体10上设置有对驱动轴20与机体10的连接处进行密封的密封机构50。
图1中仅示出了设置二个驱动轴20的情况，可以理解的，具体实施中，也可以设置一个驱动轴20或二个以上的驱动轴20。
如图2和图3所示，所述密封机构50包括套设在驱动轴20上的密封件51，所述密封件51一端与机体10侧壁贴合密封连接；所述驱动轴20上套设有由硬性材料制成的第一密封圈52、以及由软性材料制成的第二密封圈53，所述第一密封圈52和第二密封圈53均与密封件51的内壁触接。
利用硬性的第一密封圈52和软性的第二密封圈53结合，共同作用在驱动轴20上，从而与密封件51形成密闭的环境；软性材料具有一定的弹性，从而通过软性的第二密封圈53增强与密封件51内侧以及驱动轴20外侧的连接紧密性，阻挡高温高压蒸汽及药液沿驱动轴20前进，从而防止机体10内的药液和蒸汽泄露。
其中，在本优选实施例中，所述第一密封圈52由SUS（不锈钢）制成，具有较好的抗腐蚀、耐高温和耐磨性，防止机体10内的药液腐蚀第一密封圈52。
其中，在本优选实施例中，所述第二密封圈53由软性的PP（聚丙烯）制成，PP材料具有较好的耐高温性和耐磨性。可以理解的是，第二密封圈53也可以选择其他材料，如PVC（聚氯乙烯）或PPE（聚丙乙烯）。
具体的，所述密封件51包括基座511和密封外环512，所述驱动轴20依次穿过基座511和密封外环512，所述基座511固定在机体10上；所述密封外环512与基座511之间设置有密封膜513，所述密封膜513一端与基座511固定连接，另一端与密封外环512固定连接。通过密封膜513连接基座511和密封外环512，从而形成相对封闭的密封空间。
所述第一密封圈52和第二密封圈53均设置在密封外环512的内侧。
如图2所示，所述密封外环512上设置有减震支架514，所述减震支架514的一端与密封外环512的外侧固定连接，另一端与基座511固定连接。随着刷洗装置使用时间的增长，驱动轴20转动时会产生一定震动，密封外环512与基座511间靠密封膜513和减震架连接，保证了密封外环512随驱动轴20一起震动，两者间紧密贴合，减小密封外环512和驱动轴20的硬性磨损，提高驱动轴20和密封外环512的使用寿命，同时防止密封外环512和驱动轴20产生磨损后机体10内的药液和蒸汽泄露。
具体的，所述减震支架514通过螺丝55与基座511固定连接；所述防护外壳515位于减震支架514与基座511侧壁之间，所述螺丝55依次贯穿减震支架514和防护外壳515，所述螺丝55与基座511和减震支架514螺纹连接。通过螺丝55将减震支架514与基座511固定连接，从而使减震支架514和密封外环512存在一定的上下摇摆幅度空间，能有效缓冲抵消驱动轴20带来的震动对密封外环512的影响。
需要说明的是，在本优选实施例中，减震支架514与密封外环512也通过螺丝55连接，便于减震支架514的装卸，可以理解的是，在具体实施中，减震支架514也可通过其他方式与密封外环512固定连接，如焊接或一体成型。
在本优选实施例中，所述减震支架514关于密封外环512的轴心线对称设置有两个。使减震支架514和密封外环512存在一定的上下摇摆幅度空间的同时，防止密封外环512与基座511脱离。
所述密封膜513由软性防腐材料制成，在本优选实施例中，密封膜513由PP材料制成。防止机体10内的药液腐蚀密封膜513，同时通过软性的密封膜513防止基座511与密封外环512间震动的传递，减少基座511和密封外环512的磨损。
所述基座511上固定设置有防护外壳515，所述密封膜513位于防护外壳515内侧。通过防护外壳515对密封膜513进行保护，防止密封膜513破碎后药液和高温蒸汽泄露。
所述密封机构50位于机体10的内侧，所述基座511固定安装在机体10内壁上，密封外环512位于基座511左侧，通过密封外环512中的第一密封圈52和第二密封圈53阻止药液和高温蒸汽沿驱动轴20进入密封外环512与基座511之间的空腔中，防止高温蒸汽和药液腐蚀密封膜513内侧，提高密封膜513的使用寿命。
所述基座511的内侧设置有套接在驱动轴20上的轴承密封件54，通过第一密封圈52、第二密封圈53和轴承密封件54共同作用在驱动轴20，从而起到更好的密封效果。
如图3所示，所述第一密封圈52上设置有连接部521，所述第二密封圈53上设置有套接在连接部521上的套接部531，所述套接部531外侧与密封件51内壁触接。第二密封圈53通过套接部531套接在第一密封圈52外侧上，从而使第一密封圈52与第二密封圈53连接的更加紧密，防止第一密封圈52与第二密封圈53的连接处产生间隙后导致药液和高温蒸汽泄露。
所述密封外环512右端的内侧边缘处向内弯折延伸有卡接部5121，所述第二密封圈53的套接部531卡接在卡接部5121处，从而实现第二密封圈53的卡嵌式安装，从而使第二密封圈53与密封外环512内侧贴合的更加紧密，同时也便于第二密封圈53的更换。
所述第一密封圈52位于第二密封圈53远离基座511的一侧，第一密封圈52具有较好的抗腐蚀、耐高温和耐磨性，通过第一密封圈52阻止高温蒸汽与第二密封圈53接触，防止第二密封圈53被腐蚀，从而提高第二密封圈53的使用寿命，同时，第二密封圈53作为第二道防护，若由于磨损等原因导致第一密封圈52与驱动轴20之间产生间隙时，可通过第二密封圈53防止药液和高温蒸汽通过间隙泄漏。
一种清洗设备,如图4所示，包括喷淋装置60、干燥装置70以及上述的刷洗装置；所述喷淋装置60设置在驱动轴20上方，以用于对基板进行喷淋清洗；所述干燥装置70用于对清洗后的基板进行干燥。
本发明的有益效果:通过硬性的第一密封圈52与软性的第二密封圈53结合，共同作用在驱动轴20上，起到双重防护密封作用，同时利用软性的第二密封圈53增强与密封件51内侧以及驱动轴20外侧的连接紧密性，阻挡高温高压蒸汽及药液沿驱动轴20前进，从而防止机体10内的药液和蒸汽泄露。

Claims (17)

  1. 一种刷洗装置，其中，所述刷洗装置包括：
    机体；
    横向设置且贯穿机体内外的驱动轴；
    设置在驱动轴上的毛刷；
    设置在机体上以用于对驱动轴与机体的连接处进行密封的密封机构；
    其中，所述密封机构包括套设在驱动轴上的密封件，所述密封件一端与机体的侧壁贴合密封并连接；所述驱动轴上套设有由硬性材料制成的第一密封圈以及由软性材料制成的第二密封圈，所述第一密封圈和第二密封圈均与密封件的内壁触接；所述第一密封圈上设置有连接部，所述第二密封圈上设置有套接在连接部上的套接部，所述套接部的外侧与密封件的内壁触接；所述密封件包括基座和密封外环，所述驱动轴依次穿过基座和密封外环，所述基座固定在机体上；所述密封外环与基座之间设置有密封膜，所述密封膜一端与基座固定连接，另一端与密封外环固定连接。
  2. 根据权利要求1所述的刷洗装置，其中，所述第一密封圈和第二密封圈均设置在密封外环的内侧。
  3. 根据权利要求2所述的刷洗装置，其中，所述密封外环上设置有减震支架，所述减震支架的一端与密封外环的外侧固定连接，另一端与基座固定连接。
  4. 根据权利要求3所述的刷洗装置，其中，所述减震支架通过螺丝与基座固定连接。
  5. 根据权利要求3所述的刷洗装置，其中，所述密封膜由软性防腐材料制成。
  6. 根据权利要求1所述的刷洗装置，其中，所述基座上固定设置有防护外壳，所述密封膜位于防护外壳的内侧。
  7. 根据权利要求2所述的刷洗装置，其中，所述密封机构位于机体的内侧。
  8. 一种刷洗装置，其中，所述刷洗装置包括：
    机体；
    横向设置且贯穿机体内外的驱动轴；
    设置在驱动轴上的毛刷；
    设置在机体上以用于对驱动轴与机体的连接处进行密封的密封机构；
    其中，所述密封机构包括套设在驱动轴上的密封件，所述密封件一端与机体的侧壁贴合密封并连接；所述驱动轴上套设有由硬性材料制成的第一密封圈以及由软性材料制成的第二密封圈，所述第一密封圈和第二密封圈均与密封件的内壁触接。
  9. 根据权利要求8所述的刷洗装置，其中，所述第一密封圈上设置有连接部，所述第二密封圈上设置有套接在连接部上的套接部，所述套接部的外侧与密封件的内壁触接。
  10. 根据权利要求8所述的刷洗装置，其中，所述密封件包括基座和密封外环，所述驱动轴依次穿过基座和密封外环，所述基座固定在机体上；所述密封外环与基座之间设置有密封膜，所述密封膜一端与基座固定连接，另一端与密封外环固定连接。
  11. 根据权利要求10所述的刷洗装置，其中，所述第一密封圈和第二密封圈均设置在密封外环的内侧。
  12. 根据权利要求11所述的刷洗装置，其中，所述密封外环上设置有减震支架，所述减震支架的一端与密封外环的外侧固定连接，另一端与基座固定连接。
  13. 根据权利要求12所述的刷洗装置，其中，所述减震支架通过螺丝与基座固定连接。
  14. 根据权利要求12所述的刷洗装置，其中，所述密封膜由软性防腐材料制成。
  15. 根据权利要求10所述的刷洗装置，其中，所述基座上固定设置有防护外壳，所述密封膜位于防护外壳的内侧。
  16. 根据权利要求11所述的刷洗装置，其中，所述密封机构位于机体的内侧。
  17. 一种清洗设备，其中，所述清洗设备包括：
    喷淋装置，所述喷淋装置设置在驱动轴上方，以用于对基板进行喷淋清洗；
    干燥装置，所述干燥装置用于对清洗后的基板进行干燥；以及，
    刷洗装置，所述刷洗装置包括：
    机体；
    横向设置且贯穿机体内外的驱动轴；
    设置在驱动轴上的毛刷；
    设置在机体上以用于对驱动轴与机体的连接处进行密封的密封机构；
    其中，所述密封机构包括套设在驱动轴上的密封件，所述密封件一端与机体的侧壁贴合密封并连接；所述驱动轴上套设有由硬性材料制成的第一密封圈以及由软性材料制成的第二密封圈，所述第一密封圈和第二密封圈均与密封件的内壁触接。
PCT/CN2018/104482 2018-08-21 2018-09-07 一种刷洗装置及清洗设备 Ceased WO2020037720A1 (zh)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040054910A (ko) * 2002-12-18 2004-06-26 주식회사 포스코 세정설비용 회전축 연결부의 실링장치
US20060033286A1 (en) * 2004-07-29 2006-02-16 Coorstek, Inc. Graphite loaded PTFE mechanical seals for rotating shafts
JP2009031421A (ja) * 2007-07-25 2009-02-12 Kyocera Mita Corp シール構造及びこれを備えた画像形成装置
CN101869892A (zh) * 2010-05-27 2010-10-27 中国电子科技集团公司第四十五研究所 半导体专用设备上吸片台清洗装置
CN202527434U (zh) * 2012-04-16 2012-11-14 楚天科技股份有限公司 一种清洗机机械手臂的密封装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29622322U1 (de) * 1996-12-21 1997-03-13 Killmann, Frank, 45527 Hattingen Wellenabdichtung für Yachtantriebe, ölgeschmiert mit Radialwellendichtringen und Stopfbuchse
AT411384B (de) * 2000-04-10 2003-12-29 Hoerbiger Ventilwerke Gmbh Dichtring-kombination
CN2871036Y (zh) * 2005-12-29 2007-02-21 林珍如 晶圆清洗设备的转轴装置
CN201627929U (zh) * 2010-03-23 2010-11-10 中国钢研科技集团有限公司 一种用于清洗机组中清洗段辊子的轴承密封装置
CN202639876U (zh) * 2012-04-26 2013-01-02 烟台重科机电设备制造有限公司 一种镗杆的辅助支撑机构
CN203566987U (zh) * 2013-11-14 2014-04-30 温州市新南机械设备有限公司 聚氨酯设备浇注混合式机械密封装置
CN105003651A (zh) * 2014-04-24 2015-10-28 湖北天神实业股份有限公司 一种旋转细长轴密封结构
CN104500746B (zh) * 2014-11-07 2016-08-24 南通密炼捏合机械有限公司 一种旋转轴密封结构
KR20170079778A (ko) * 2015-12-31 2017-07-10 명동은 샤프트 씰 장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040054910A (ko) * 2002-12-18 2004-06-26 주식회사 포스코 세정설비용 회전축 연결부의 실링장치
US20060033286A1 (en) * 2004-07-29 2006-02-16 Coorstek, Inc. Graphite loaded PTFE mechanical seals for rotating shafts
JP2009031421A (ja) * 2007-07-25 2009-02-12 Kyocera Mita Corp シール構造及びこれを備えた画像形成装置
CN101869892A (zh) * 2010-05-27 2010-10-27 中国电子科技集团公司第四十五研究所 半导体专用设备上吸片台清洗装置
CN202527434U (zh) * 2012-04-16 2012-11-14 楚天科技股份有限公司 一种清洗机机械手臂的密封装置

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